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PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
MP145E
Q
User Manual
Version: 1.0.1
Date: 29.01.2019
This document describes the following products:
Motion miniature linear stage, piezoelectric
521. The model version of the
-521 Miniature Linear Stage
Q-521
Qinertia drive
This document applies to various model
versions of the QQ-521 is coded in the order number by means
of three characters after a period. Meaning of
the characters and valid values:
First character after the period:
Travel range
1 = 12 mm
2 = 22 mm
3 = 32 mm
Second character after the period:
Sensor equipment
0 = without sensor
3 = with sensor, sensor resolution 4 nm
4 = with sensor, sensor resolution 1 nm
Third character after the period:
Vacuum suitability
0 = suitable to 10
U = suitable to 10
-6
hPa
-9
hPa
Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email [email protected], www.pi.ws
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The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: (http://www.physikinstrumente.com/en/aboutpi/patents)
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of
the source.
Original instructions
First printing: 29.01.2019
Document number: MP145E, KSch, version 1.0.1
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.
Page 3
Contents
1 About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms ..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals ................................................................................................ 3
2 Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures ............................................................................................ 6
2.4 Measures for Handling Vacuum-Compatible Products .............................................. 6
3 Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View .............................................................................................................. 9
3.3 Product Labeling ....................................................................................................... 11
3.4 Scope of Delivery ...................................................................................................... 12
3.5 Accessories ............................................................................................................... 12
3.6 Suitable Electronics .................................................................................................. 14
3.7 Technical Features .................................................................................................... 14
3.7.1 Linear Encoder (Sensor) ............................................................................... 14
3.7.2 Reference Point Switch ................................................................................ 14
3.7.3 ID Chip.......................................................................................................... 14
4 Unpacking 15
5 Installation 17
5.1 General Notes on Installation ................................................................................... 17
5.2 Mounting the Q-521 on a Surface and Connecting It to a Protective Earth
Conductor ................................................................................................................. 19
5.3 Setting Up a Multi-Axis System ................................................................................ 21
5.3.1 General Information on Setting Up a Multi-Axis System ............................ 22
5.3.2 Setting Up an XY System .............................................................................. 23
5.3.3 Setting Up a Z System with an Adapter Bracket .......................................... 25
5.4 Affixing the Load to the Q-521 ................................................................................. 30
5.5 Connecting the Q-521 to the Electronics ................................................................. 32
5.5.1 Overview: Connecting for Operation at Atmospheric Pressure .................. 33
5.5.2 Overview: Connecting for Operation in Vacuum to 10
-9
hPa ...................... 34
Page 4
5.5.3 Connecting the Q-521 to the Electronics .................................................... 35
6 Startup and Operation 37
6.1 General Notes on Startup and Operation ................................................................ 37
6.2 Starting Up the Q-521 .............................................................................................. 40
7 Maintenance 43
7.1 General Notes on Maintenance ............................................................................... 43
7.2 Performing a Maintenance Run ............................................................................... 43
7.3 Cleaning the Q-521 ................................................................................................... 43
8 Troubleshooting 45
9 Customer Service 47
10 Technical Data 49
10.1 Specifications ............................................................................................................ 49
10.1.1 Data Table .................................................................................................... 49
10.1.2 Maximum Ratings ........................................................................................ 52
10.1.3 Ambient Conditions and Classifications ...................................................... 52
10.2 Operating Time ......................................................................................................... 53
10.3 Dimensions ............................................................................................................... 54
10.3.1 Q-521.1xx ..................................................................................................... 54
10.3.2 Q-521.2xx ..................................................................................................... 55
10.3.3 Q-521.3xx ..................................................................................................... 56
10.3.4 Q-121.80U Adapter Plate ............................................................................ 57
10.3.5 Q-121.10U Adapter Bracket ........................................................................ 58
10.3.6 Q-121.20U Adapter Bracket ........................................................................ 59
10.3.7 Q-121.30U Adapter Bracket ........................................................................ 60
10.3.8 Vacuum Feedthroughs................................................................................. 61
10.4 Pin Assignment ......................................................................................................... 67
-6
10.4.1 Q-521.xx0 (vacuum compatible to 10
10.4.2 Q-521.xxU (vacuum compatible to 10
hPa) ............................................... 67
-9
hPa) ............................................... 68
10.4.3 C-815.VF Vacuum Feedthrough ................................................................... 69
10.4.4 C-815.VFUx Vacuum Feedthrough .............................................................. 70
10.4.5 5604500041 Adapter ................................................................................... 71
11 Old Equipment Disposal 73
12 EU Declaration of Conformity 75
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1 About this Document
Downloading Manuals ................................................................................................................... 3
1
About this Document
In this Chapter
Objective and Target Audience of this User Manual ..................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures ............................................................................................................................................ 2
Other Applicable Documents ......................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information necessary for the intended use of the Q-521.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
NOTICE
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injuries or damage to the
equipment.
Actions to take to avoid the situation.
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 1
INFORMATION
Information for easier handling, tricks, tips, etc.
Page 6
1 About this Document
Symbol/
Label
1.
2.
Action consisting of one or several steps
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the
1.3 Definition of Terms
Term Explanation
Meaning
Action consisting of several steps whose
sequential order must be Pay attention tod
whose sequential order is irrelevant
List item
product (example: socket of the RS-232
interface)
Warning sign affixed to the product that
refers to detailed information in this
manual.
Load capacity Maximum load capacity in the vertical direction when the
Linear encoder The linear encoder is an incremental sensor for capturing
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
linear stage is mounted horizontally. The contact point of the
load is in the center of the motion platform.
changes in position. Signals from the sensor are used for axis
position feedback. After switching on the controller a
reference point definition must be performed before
absolute target positions can be commanded and reached.
2 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
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1 About this Document
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
Description Document
E-872.401 Q-Motion® Piezomotor electronics,
benchtop device, drives up to 4 linear actuators via
one amplifier channel, TCP/IP, USB, USB for joystick,
digital I/O
E-873.1AT Q-Motion® Controller for piezoelectric
inertia drives, 1 axis, benchtop device (industry), SPI,
TCP/IP, USB, RS-232, I/O, connector for joystick
E-873.3QTU Q-Motion® Controller for piezoelectric
inertia drives, 3 axes, benchtop device (industry),
TCP/IP, USB, I/O, joystick
E-873.10C885 Q-Motion® Controller module for
PIMotionMaster, 1 axis, for systems with
piezoelectric inertia drive
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
PZ279EN User Manual
PZ274E User Manual
PZ273E User Manual
E873T0002 Technical Note
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 47).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 3
Page 8
1 About this Document
− Link to a page for registering and requesting the access data
− User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., P-882) or the product family (e.g.,
PICMA® Bender) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.
4 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 9
2 Safety
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2
Safety
In this Chapter
Intended Use .................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures ............................................................................................................... 6
2.1 Intended Use
The Q-521 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.
In accordance with its design and realization, the Q-521 is intended for single-axis positioning,
adjusting and shifting of loads at different velocities in interval operation. The Q-521 uses a
PIShift piezomotor as a drive. When at rest, the drive is self-locking, requires no current,
generates no heat, and maintains its position.
The Q-521 can be mounted in any orientation. The specifications of the Q-521 apply to
horizontal mounting (p. 49).
The Q-521 is not intended for applications in areas in which a failure would present severe risks
to human beings or the environment. For further information on the operating conditions of
the Q-521, see "Technical Data" (p. 49).
Some models of the Q-521 are equipped with a linear encoder for direct position measurement.
The intended use of the Q-521 is only possible when completely mounted and connected. The
Q-521 must be operated with suitable electronics (p. 14). The electronics are not included in the
scope of delivery of the Q-521.
2.2 General Safety Instructions
The Q-521 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the Q-521.
Only use the Q-521 for its intended purpose, and only use it if it is in a good working
order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the Q-521.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 5
Page 10
2 Safety
2.3 Organizational Measures
User manual
Always keep this user manual available with the Q-521.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the Q-521 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the Q-521 after you have read and understood this user
manual.
Personnel qualification
The Q-521 may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the linear stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. In addition, the Q-521.xxU models are wipe cleaned afterwards
and then shrink-wrapped twice in vacuum-compatible film.
Touch the linear stage only with powder-free gloves.
If necessary, wipe the linear stage clean after unpacking.
6 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
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3 Product Description
Technical Features ....................................................................................................................... 14
3
Product Description
In this Chapter
Model Overview ............................................................................................................................. 7
Product View .................................................................................................................................. 9
Product Labeling .......................................................................................................................... 11
Scope of Delivery ......................................................................................................................... 12
Accessories ................................................................................................................................... 12
Suitable Electronics ...................................................................................................................... 14
3.1 Model Overview
Classification of the Q-521 models
The model version of the Q-521 is coded in the order number by means of three characters
after a period; see also "Detailed model names". Each character codes a feature of the model
version:
First character Second character Third character
Feature Travel range Sensor (linear encoder) Vacuum suitability
Feature value 1 = 12 mm
2 = 22 mm
3 = 32 mm
If the value "x" is used in this manual for a character after the period, the corresponding
description or instruction applies to all feature values of the corresponding feature.
0 = without sensor
3 = with sensor,
sensor resolution 4 nm
4 = with sensor,
sensor resolution 1 nm
0 = suitable to 10
U = suitable to 10
-6
hPa
-9
hPa
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 7
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3 Product Description
Detailed model names
Order
Product name
number
Q-521.100 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 30 × 10 mm (W × L × H), vacuum compatible to 10
-6
hPa
Q-521.10U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 30 × 10 mm (B × L × H), vacuum compatible to 10
-9
hPa
Q-521.130 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 ×
30 × 10 mm (W × L × H), vacuum compatible to 10
-6
hPa
Q-521.140 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
30 × 10 mm (W × L × H), vacuum compatible to 10
-6
hPa
Q-521.14U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
30 × 10 mm (W × L × H), vacuum compatible to 10
-9
hPa
Q-521.200 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 32 × 10 mm (W × L × H), vacuum compatible to 10
-6
hPa
Q-521.20U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 32 × 10 mm (B × L × H), vacuum compatible to 10
-9
hPa
Q-521.230 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 ×
32 × 10 mm (W × L × H), vacuum compatible to 10
-6
hPa
Q-521.240 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
32 × 10 mm (W × L × H), vacuum compatible to 10
-6
hPa
Q-521.24U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
32 × 10 mm (W × L × H), vacuum compatible to 10
-9
hPa
Q-521.300 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 42 × 10 mm (W × L × H), vacuum compatible to 10
-6
hPa
Q-521.30U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 42 × 10 mm (B × L × H), vacuum compatible to 10
-9
hPa
Q-521.330 Q-Motion® Miniature linear stage, piezoelectric inertia drive,
32 mm travel range, linear encoder, 4 nm resolution, 1 N push/pull force,
dimensions 21 × 42 × 10 mm (W × L × H), vacuum compatible to 10
-6
hPa
8 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
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3 Product Description
1 Motion platform
Order
Product name
number
Q-521.340 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
42 × 10 mm (W × L × H), vacuum compatible to 10
Q-521.34U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
42 × 10 mm (W × L × H), vacuum compatible to 10
3.2 Product View
-6
hPa
-9
hPa
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 9
Figure 1: Example for models without sensor: Q-521.200 linear stage
2 Cable exit for drive connector
3 Connector for drive; with Q-521.x00 models: Sub-D 15 (m) connector,
with Q-521.x0U models: Sub-D 15 (f) connector
4 Type plate p. 11
5 Base body
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3 Product Description
Figure 2: Example for models with sensor: Q-521.240 linear stage
1 Motion platform
2 Cable exit for connecting the drive and sensor
3 Warning sign "Electrostatic-sensitive devices"
4 Connector for drive and sensor; with Q-521.xx0 models: Sub-D 15 (m)
connector, with Q-521.xxU models: Sub-D 15 (f) connector
5 ESD protection: ESD protective cap with Q-521.xx0; nonconductive foil with
Q-521.xxU
6 Type plate p. 11
7 Base body
10 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Figure 3: Direction of motion of the platform of the Q-521, Q-521.240 used as an example
The arrow in the figure above shows the direction of motion on positive commanding.
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3 Product Description
Meaning of the places (counting from left):
3.3 Product Labeling
Figure 4: Example for models with sensor: Product labeling and type plate of the Q-521.240 linear stage
Position Labeling Description
A, C
Manufacturer's logo
Symbol for the protective earth conductor,
B
marks the protective earth connection of
the Q-521 (p. 19)
B, C
B, C
Warning sign "Pay attention to the
manual!"
CE conformity mark
Serial number (example), individual for
each Q-521
C 113064246
1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive numbers
C Q-521.240
Product name (example), the characters
following the period refer to the model
C
C WWW.PI.WS Manufacturer's address (website)
C
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 11
Old equipment disposal
Warning sign "Electrostatic-sensitive
devices"
Page 16
3 Product Description
3.4 Scope of Delivery
The Q-521 is delivered with the following components:
Item
ID
Q-521 Linear stage as specified in the order (p. 7)
Q521B0003
Components
Screw set for mounting the Q-521, consisting of:
2 dowel pins, A2 1.5 m6 x 4 ISO 2338
2 socket head cap screws, A2 M2x6 ISO 4762
MP139EK Short instructions for Q-5xx / Q-6xx PIShift linear stages
Only for models without sensor:
7202500060-0015
Only for models suitable for operation to 10-9 hPa:
5604500041
Air-side adapter cable for connection to the E-872.401 drive
electronics, Sub-D 15 (f) to LEMO 3-pin (m), 0.15 m
Adapter for operation outside of a vacuum chamber,
Sub-D 15 (m/m)
3.5 Accessories
Order
number
E-873.UHV1
E-873.UHV2
E-873.UHV3
Description
Air-side extension cable from vacuum feedthrough or Q-521.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to
Sub-D 15 (m), 1 m
Air-side extension cable from vacuum feedthrough or Q-521.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to
Sub-D 15 (m), 2 m
Air-side extension cable from vacuum feedthrough or Q-521.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to
Sub-D 15 (m), 3 m
12 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 17
3 Product Description
hPa. Material: Aluminum alloy,
Order
number
Q-121.80U
Description
Adapter plate for setting up an XY system consisting of two
Q-521, for use in a vacuum to 10
-9
uncoated; mass: 4.5 g; including:
2 dowel pins, A2 1.5 m6 x 4 ISO 2338
3 machine screws, 1.4567 M2x4
Q-121.10U
Q-121.20U
Adapter bracket for vertical mounting of a Q-521; for
recommended Z combinations, see p. 25. For use in a vacuum to
-9
hPa. Material: Aluminum alloy, uncoated; mass: 13.5 g /
10
16.8 g / 26.6 g; each including:
4 dowel pins A2 1.5 m6 x 5 ISO 2338
Q-121.30U
6 machine screws, 1.4567 M2x8
For Q-521.xx0 models only (suitable for use in a vacuum to 10-6 hPa):
Order
number
Description
C-815.VF
Vacuum feedthrough (drive and sensor signals), Sub-D 15 (m/f),
including C815T0003 Technical Note
For Q-521.xxU models only (suitable for use in a vacuum to 10-9 hPa):
Order
number
C-815.VFU1
C-815.VFU3
C-815.VFU6
C-815.VFU15
To order, contact our customer service department (p. 47).
Description
Vacuum feedthrough (drive and sensor signals), Sub-D 15 (m/m),
DN40CF
Vacuum feedthrough (drive and sensor signals),
3 x Sub-D 15 (m/m), DN63CF
Vacuum feedthrough (drive and sensor signals),
6 x Sub-D 15 (m/m), DN100CF
Vacuum feedthrough (drive and sensor signals),
15 x Sub-D 15 (m/m), DN160CF
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 13
Page 18
3 Product Description
3.6 Suitable Electronics
Electronics
Order number Description
E-872.401 Q-Motion® Piezomotor electronics, benchtop device, drives up to
4 linear actuators via one amplifier channel, TCP/IP, USB, USB for
joystick, digital I/O
E-873.1AT Q-Motion® Controller for piezoelectric inertia drives, 1 axis,
benchtop device (industry), SPI, TCP/IP, USB, RS-232, I/O,
connector for joystick
E-873.3QTU Q-Motion® Controller for piezoelectric inertia drives, 3 axes,
benchtop device (industry), TCP/IP, USB, I/O, joystick
E-873.10C885 Q-Motion® Controller module for PIMotionMaster, 1 axis, for
systems with piezoelectric inertia drive
To order, contact our customer service department (p. 47).
3.7 Technical Features
3.7.1 Linear Encoder (Sensor)
Some of the Q-521 models are equipped with an optical linear encoder. For the encoder
resolution, refer to the table in the "Specifications" section (p. 49).
Optical linear encoders measure the actual position directly (direct metrology). Therefore,
errors occurring in the drivetrain such as nonlinearity, backlash or elastic deformation, cannot
3.7.2 Reference Point Switch
3.7.3 ID Chip
influence the measurement of the position.
The Q-521 models equipped with a sensor have an optical reference point switch.
The commands that use the reference signal are described in the user manual of the controller
and/or in the corresponding software manuals.
14 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Q-521 models with sensor contain an ID chip in the connector.
The following data is stored as parameters on the ID chip:
Information on the linear stage: Type, serial number, date of manufacture, version of
the hardware
Settings for the sensor: Interpolation rate, corrections of hysteresis as well as of phase
and offset, gain values
When switched on or rebooted, controllers from PI read the data from the ID chip.
For more information on the ID chip recognition, see the manual of the controller used.
Page 19
4 Unpacking
4
Unpacking
NOTICE
Electrostatic hazard
Touching the pins in the Sub-D 15 connection of models equipped with sensor can damage
electrostatic-sensitive devices (ESD) of the Q-521. For this reason, these models are supplied
with ESD protection.
Remove the ESD protection from the connector only when you connect the Q-521 to the
controller.
INFORMATION
When handling the vacuum version of the linear stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. In addition, the Q-521.xxU models are wipe cleaned afterwards
and then shrink-wrapped twice in vacuum-compatible film.
Touch the linear stage only with powder-free gloves.
If necessary, wipe the linear stage clean after unpacking.
1. Unpack the Q-521 with care.
2. If present, do not remove the ESD protection from the connection of the Q-521.
3. Compare the contents with the items listed in the contract and the packing list.
4. Inspect the contents for signs of damage. If there is any sign of damage or missing parts,
contact PI immediately.
5. Keep all packaging materials and the ESD protection in case the product needs to be
returned.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 15
Page 20
Page 21
5 Installation
Connecting the Q-521 to the Electronics ..................................................................................... 32
5
Installation
In this Chapter
General Notes on Installation ...................................................................................................... 17
Mounting the Q-521 on a Surface and Connecting It to a Protective Earth Conductor .............. 19
Setting Up a Multi-Axis System .................................................................................................... 21
Affixing the Load to the Q-521 ..................................................................................................... 30
5.1 General Notes on Installation
Figure 5: Accessible when the motion platform is driven out: Ceramic rail of the PIShift drive and, for
models with sensor, ruler of the linear encoder, example Q-521.240
NOTICE
Damage from mechanical actions!
The ruler of the linear encoder is scratch-sensitive and can be damaged by mechanical actions,
e.g. from pointed objects.
Treat the ruler with extreme care.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 17
Page 22
5 Installation
NOTICE
Malfunction due to soiling!
Any type of soiling, e.g. dust, oil, lubricant or condensation, will render the Q-521 inoperable.
Keep the Q-521 free from dirt and condensation.
Avoid touching the ceramic rail and the ruler.
NOTICE
Electrostatic hazard
Touching the pins in the Sub-D 15 connection of models equipped with sensor can damage
electrostatic-sensitive devices (ESD) of the Q-521. For this reason, these models are supplied
with ESD protection.
Remove the ESD protection from the connector only when you connect the Q-521 to the
controller.
NOTICE
Heating up of the Q-521 during operation!
The heat produced during operation of the Q-521 can affect your application.
Install the Q-521 so that the application is not impaired by the dissipated heat.
Ensure sufficient ventilation at the place of installation.
Make sure that the complete bottom side of the Q-521 is in contact with the surface on
which the Q-521 is mounted.
NOTICE
Unintentional changes in position!
If the load exerts a force on the motion platform that exceeds the self-locking (see “holding
force” on p. 49) of the drive (e.g. by cables of the load), unintentional changes in the position
of the motion platform occur. Unintentional changes in position of the motion platform can
damage the drive, the load or the environment.
Make sure by suitable measures that only a force is exerted on the motion platform that is
less than the self-locking of the drive; for example, by cable connections of the load affixed
providing sufficient strain relief.
NOTICE
18 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Damage from unsuitable cables!
Unsuitable cables can damage the electronics.
Only use cables provided by PI for connecting the Q-521 to the electronics.
Page 23
5 Installation
INFORMATION
For optimum repeatability, all components must be firmly affixed to each other.
INFORMATION
When handling the vacuum version of the linear stage, appropriate cleanliness must be
ensured.
Touch the linear stage only with powder-free gloves.
If necessary, wipe the linear stage clean.
INFORMATION
The positive direction of motion of the axis is specified in the product view (p. 9).
5.2 Mounting the Q-521 on a Surface and Connecting It to a
Protective Earth Conductor
NOTICE
Protruding screw heads!
Protruding screw heads can damage the Q-521.
Ensure that the screw heads do not protrude from countersunk holes so that they do not
interfere with the motion.
NOTICE
Warping of the Q-521 due to mounting on uneven surfaces!
Mounting the Q-521 on an uneven surface can warp the Q-521. Warping reduces the accuracy.
Mount the Q-521 onto an even surface. The recommended flatness of the surface
is ≤2 µm.
For applications with large temperature changes:
Only mount the Q-521 on surfaces that have the same or similar thermal expansion
properties as the Q-521.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 19
Page 24
5 Installation
INFORMATION
The electrical contact of the Q-521 to the protective earth conductor is established via the
surface, on which the Q-521 is mounted.
The corresponding contact surfaces must be sufficiently conductive.
The protective earth conductor is connected to the surface on which the Q-521 is
mounted.
The screws are secured against unintentional loosening; e.g., with thread-locking adhesive.
INFORMATION
Pay attention to the applicable standards for mounting the protective earth conductor.
You have the following options for fastening the Q-521:
From above with 2 M2x6 screws
From below with 4 M2 screws of suitable length
Requirements
You have read and understood the general notes on installation (p. 17).
The Q-521 is disconnected from the electronics.
You have provided a suitable surface (for the required position and depth of the holes
for accommodating the screws and locating pins, see "Dimensions" (p. 54)):
− The surface must be connected to the protective earth conductor.
− The contact surfaces to the bottom side of the linear stage have to be sufficiently
conductive to ensure the proper functioning of the protective earth conductor.
− The contact resistance at all connection points relevant for mounting the protective
earth conductor is <0.1 Ω at 25 A.
− For applications with large temperature changes: The surface should have the same
thermal expansion properties as the Q-521 (e.g., surface made of steel).
− The evenness of the surface is ≤2 µm.
You have accounted for the space required to route cables without bending and
according to regulations.
Tools and accessories
Screws:
− For mounting from above: 2 M2x6 socket head cap screws in the scope of delivery
(p. 12)
− For mounting from below: 4 M2 screws of suitable length
20 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Option: 2 1.5 m6 x 4 locating pins, in the scope of delivery
Suitable tools for tightening the screws
Page 25
5 Installation
Thread-locking adhesive
Mounting the Q-521 on a surface and connecting it to a protective earth conductor
Figure 6: Mounting from above, using a Q-521.2xx as an example
1 Option: Aligning the linear stage (view from below) on the surface with
1.5 m6 x 4 locating pins.
2, 3 Mounting the linear stage on the surface with two M2x6 screws.
1. Option: Align the Q-521 on the surface with the locating pins.
2. Mount the Q-521 on the surface.
Maximum torque: 35 Ncm
For mounting from above:
− If necessary, manually displace the motion platform of the Q-521 to access the
countersunk holes in the base body.
For mounting from below:
− Maximum screw-in depth in the Q-521: 4 mm
3. Secure the screws against unintentional loosening, e.g., with thread-locking adhesive.
4. Check that the Q-521 is affixed firmly.
5.3 Setting Up a Multi-Axis System
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 21
The Q-521 can be used in multi-axis systems.
Typical combinations:
XY system (p. 23)
Z system (p. 25) (XZ or XYZ combination)
Page 26
5 Installation
Figure 7: Example of an XYZ system: Three Q-521.240 mounted using an adapter plate and an adapter
bracket
1 Lower linear stage
2 Q-121.80U adapter plate (for use in a vacuum to 10
3 Middle linear stage
4 Q-121.x0U adapter bracket (for use in a vacuum to 10
5 Upper linear stage
-9
hPa)
-6
hPa)
5.3.1 General Information on Setting Up a Multi-Axis System
NOTICE
Impermissibly high load on the linear stages!
In a multi-axis system, the linear stage used for the Y and/or Z axis must also be moved.
Impermissibly high loads impair the motion and can damage the linear stages.
Include the masses of the moved linear stages and the mounting adapters (p. 12) in the
calculation of the load to be moved.
For all linear stages in a multi-axis system: Do not exceed the maximum permissible load.
When a linear stage is mounted vertically, make sure that the installed load is lower than
the self-locking of the drive (see “Holding force, power off” on p. 49).
Make sure by suitable measures that only a force is exerted on the motion platform that is
less than the self-locking of the drive; for example, by cable connections of the load affixed
providing sufficient strain relief.
22 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 27
5 Installation
Only install and operate the multi-axis system after you have read and understood the
user manuals of all components of the multi-axis system.
If you require special mounting adapters, contact our customer service department
(p. 47).
5.3.2 Setting Up an XY System
NOTICE
Screws and locating pins that are too long!
Screws and locating pins that are inserted too deeply damage the Q-521.
Pay attention to the depth of the mounting holes (p. 54) in the motion platform.
Pay attention to the maximum depth for the insertion of locating pins (p. 54) into the
motion platform.
Only use screws and locating pins of the correct length for the respective holes.
INFORMATION
Any model of the Q-521 can be used as lower or upper linear stage.
Designations in these instructions:
Lower linear stage: Forms the basis of the multi-axis system (X axis); is mounted on a
surface
Upper linear stage: Forms the Y axis of the multi-axis system; is mounted on the lower
stage rotated by 90°
Requirements
You have read and understood the general notes on installation (p. 17).
You have read and understood the general notes on setting up a multi-axis system
(p. 22).
The linear stages are disconnected from the electronics.
You have properly mounted the lower linear stage on a surface and connected it to a
protective earth conductor (p. 19).
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 23
You have accounted for the space required to route cables without bending and
according to regulations.
Tools and accessories
Mounting accessories from the scope of delivery of the upper linear stage (p. 12):
− 2 locating pins, 1.5 m6 x 4
− 2 socket head cap screws, M2x6
Page 28
5 Installation
Q-121.80U adapter plate, available as an optional accessory (p. 12), including mounting
accessories:
− 2 locating pins, 1.5 m6 x 4
− 2 machine screws, M2x4
Suitable tools for tightening the screws
Setting up an XY system
Figure 8: Example: Mounting a Q-521.240 on a Q-521.240
1 Lower linear stage
2 2 locating pins, 1.5 m6 x 4
3 Q-121.80U adapter plate
4 2 machine screws, M2x4
5 2 locating pins, 1.5 m6 x 4
6 2 socket head cap screws, M2x6
7 Upper linear stage
1. Mount the adapter plate on the lower linear stage with locating pins and M2x4 machine
screws:
− The counterbores of the three holes in the middle of the adapter plate point
upwards.
− Maximum torque: 35 Ncm
− Check that adapter plate is affixed firmly.
2. Mount the upper linear stage on the adapter plate with locating pins and M2x6 socket
head cap screws:
24 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 29
5 Installation
− If necessary, manually displace the motion platform of the upper linear stage to
access the countersunk holes in the base body.
− Maximum torque: 35 Ncm
5.3.3 Setting Up a Z System with an Adapter Bracket
NOTICE
Screws and locating pins that are too long!
Screws and locating pins that are inserted too deeply damage the Q-521.
Pay attention to the depth of the mounting holes (p. 54) in the motion platform.
Pay attention to the maximum depth for the insertion of locating pins (p. 54) into the
motion platform.
Only use screws and locating pins of the correct length for the respective holes.
NOTICE
Warping of the Z system with large temperature changes!
Large temperature changes can cause warping of the Z system, because the Q-521 and the
adapter bracket for the vertical mounting (p. 12) have different thermal expansion properties.
Warping reduces the accuracy.
Avoid large temperature changes for the Z system.
If it is not possible to avoid large temperature changes: Do not use the locating pins for
mounting.
3. Check that the upper linear stage is affixed firmly.
Designations in these instructions:
Lower linear stage: X axis in an XZ combination; Y axis in an XYZ combination. The linear
stage to which the upper linear stage is mounted with an adapter bracket.
Upper linear stage: Forms the Z axis of the multi-axis system; is mounted on the lower
linear stage in a vertical alignment using an adapter bracket.
Recommended Z Systems
The following tables show recommended combinations of adapter brackets and linear stages.
Each upper linear stage is shown with the motion platform in the middle position and with a
maximally extended platform.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 25
Page 30
5 Installation
Systems with Q-121.10U adapter bracket
Combination of
linear stages and
adapter bracket:
Q-521.1xx +
Q-121.10U
Orientation of adapter bracket and upper linear stage to the lower linear stage:
0°
90°
180°
270°
26 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Q-521.2xx +
Q-121.10U
Not possible. The
motion platforms of
the linear stages
collide with each
other.
Not possible. The
motion platforms of
the linear stages
collide with each
other.
Page 31
5 Installation
Systems with Q-121.20U adapter bracket
Combination of
linear stages and
adapter bracket:
Q-521.2xx +
Q-121.20U
Orientation of adapter bracket and upper linear stage to the lower linear stage:
0°
90°
180°
270°
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 27
Q-521.3xx +
Q-121.20U
Not possible. The
motion platforms of
the linear stages
collide with each
other.
Not possible. The
motion platforms of
the linear stages
collide with each
other.
Page 32
5 Installation
Systems with Q-121.30U adapter bracket
Combination of
linear stages and
adapter bracket:
Q-521.3xx +
Q-121.30U
Orientation of adapter bracket and upper linear stage to the lower linear stage:
0°
90°
180°
270°
Requirements
You have read and understood the general notes on installation (p. 17).
You have read and understood the general notes on setting up a multi-axis system
(p. 22).
You have accounted for the space required to route cables without bending and
according to regulations.
If you set up an XZ combination: You have properly mounted the lower linear stage on a
surface.
If you set up an XYZ combination: You have properly mounted the linear stages for the X
and Y axis. (p. 23)
Tools and accessories
Suitable adapter bracket; for combination options, see "Recommended Z Systems"
p. 25. Available as optional accessories (p. 12):
− Q-121.10U adapter bracket
− Q-121.20U adapter bracket
28 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 33
5 Installation
− Q-121.30U adapter bracket
For the diameter and position of the holes in the adapter bracket, see "Dimensions"
(p. 54)
Mounting accessories from the scope of delivery of the adapter bracket:
− 4 locating pins, 1.5 m6 x 5
− 6 machine screws, M2x8
Suitable tools for tightening the screws
Setting up a Z system with an adapter bracket
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 29
Figure 9: Example: Setting up an XZ system consisting of two Q-521.240 and a Q-121.20U
adapter bracket
1 Lower linear stage
2 4 locating pins, 1.5 m6 x 5
3 Q-121.20U adapter bracket
4 6 machine screws, M2x8
5 Upper linear stage
1. Mount the upper linear stage to the long side of the adapter bracket:
− Align the upper linear stage so that the cable exit points away from the origin of the
sides of the adapter bracket; i.e., upwards in the Z system.
Page 34
5 Installation
− Maximum torque: 35 Ncm.
2. Mount the short side of the adapter bracket to the motion platform of the lower linear
stage:
− Permissible alignments, see "Recommended Z systems"
− Maximum torque: 35 Ncm
3. Check that the adapter bracket and the upper linear stage are affixed firmly.
5.4 Affixing the Load to the Q-521
NOTICE
Impermissibly high forces and torques!
Impermissibly high forces and torques that are applied to the motion platform can damage the
Q-521.
For affixing type and mass of the load, pay attention to the maximum permissible forces
according to the specifications (p. 49).
Avoid tilting torques at the motion platform.
NOTICE
Screws and locating pins that are too long!
Screws and locating pins that are inserted too deeply damage the Q-521.
Pay attention to the depth of the mounting holes (p. 54) in the motion platform.
Pay attention to the maximum depth for the insertion of locating pins (p. 54) into the
motion platform.
Only use screws and locating pins of the correct length for the respective holes.
30 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 35
5 Installation
Q-521.1xx
The arrows mark the mounting holes in the motion platform of the Q-521:
For aligning the load:
White arrows: Locating holes Ø 1.5 mm H7, depth 3 mm
For affixing the load:
Black arrows: M2 threaded holes, depth 3 mm
Requirements
You have read and understood the general notes on installation (p. 17).
You have properly mounted the linear stage on a surface (p. 19) or on a Q-521 (p. 21).
The linear stage is disconnected from the electronics.
You have prepared the load so that it can be affixed to the motion platform:
Q-521.2xx
Q-521.3xx
− The distance between the center of gravity of the load and the center of the motion
platform is as small as possible in all directions.
− At least three points are provided for affixing the load on the motion platform.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 31
Tools and accessories
At least three M2 screws of suitable length (p. 54)
Suitable tools for tightening the screws
2 locating pins of suitable length, for locating holes with Ø 1.5 mm H7
Page 36
5 Installation
Affixing the load to the Q-521
1. Option: Align the load on the Q-521 with the locating pins.
2. Affix the load using the screws.
− Maximum torque: 35 Ncm
3. Check that load is affixed firmly.
5.5 Connecting the Q-521 to the Electronics
The electronics to be used for operating the Q-521 depends on the presence of a sensor (see
also "Suitable Electronics" (p. 14)):
Models without sensor (Q-521.x0x): E-872 drive electronics
Models with sensor (Q-521.x3x, Q-521.x4x): E-873 controller
INFORMATION
The Q-521 and the electronics can be delivered as a preconfigured system.
If a connection assignment is given on the labels of the Q-521 and/or electronics, pay
attention to this assignment when connecting the Q-521.
32 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 37
5 Installation
5.5.1 Overview: Connecting for Operation at Atmospheric Pressure
Figure 10: Possible connection of the Q-521 to suitable electronics for operation at atmospheric
pressure
1 Controller
2 Drive electronics
3 Adapter cable
4 Extension cable
5 Adapter for operation outside of the vacuum chamber
6 Linear stage
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 33
Page 38
5 Installation
5.5.2 Overview: Connecting for Operation in Vacuum to 10
Figure 11: Possible connection of the Q-521 to suitable electronics for operation in vacuum
-9
hPa
1 Controller
2 Drive electronics
3 Adapter cable
4 Extension cable
5 Vacuum feedthrough for a pressure to 10
6 Vacuum feedthrough for a pressure to 10
7 Linear stage
-9
hPa
-6
hPa
34 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 39
5 Installation
Figure 12: Example for installation of the C-815.VF vacuum feedthrough. Left: vacuum side,
right: air side
1 Connnector (m) of Q-521 on vacuum side
2 Example of a vacuum feedthrough, part of a vacuum chamber
3 Sealing ring
4 Extension cable
5 C-815.VF vacuum feedthrough
6 Connector (f) of the air-side extension cable for connecting to the electronics
Tools and accessories
4 countersunk screws M3 (ISO 7046) of suitable length, made of stainless steel
Installing a vacuum feedthrough
For the C-815.VF vacuum feedthrough: Install the vacuum feedthrough so that the
Sub-D 15 (f) socket is on the vacuum side of the vacuum chamber.
Pay attention to a maxiumum torque of 0.9 Nm.
5.5.3 Connecting the Q-521 to the Electronics
Requirements
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 35
You have read and understood the general notes on installation (p. 17).
You have installed the electronics.
You have read and understood the user manual of the electronics.
The electronics are switched off; i.e., not connected to the power source.
Page 40
5 Installation
Tools and accessories
If the E-872.401 drive electronics is used: 7202500060-0015 adapter cable, in the scope
of delivery (p. 12)
If a Q-521.x0U is to be operated at atmospheric pressure: 5604500041 adapter, in the
scope of delivery (p. 12)
If the Q-521 is to be operated in a vacuum:
− E-873.UHVx extension cable, available as optional accessory (p. 12)
− Suitable vacuum feedthrough, available as an optional accessory (p. 12):
For Q-521.x00: C-815.VF (suitable for use in a vacuum to 10
For Q-521.x0U: C-815.VFUx (suitable for use in a vacuum to 10
-6
hPa)
-9
hPa)
− Suitable tools for installing the vacuum feedthrough
Connecting the Q-521 to the electronics
1. Remove the ESD protection from the connection of the Q-521.
2. If the Q-521 is to be operated in a vacuum:
− Install the vacuum feedthrough:
a) Obtain the dimensions from the corresponding dimensional drawing (p. 61).
b) Make sure that the vacuum feedthrough is oriented correctly:
C-815.VF: Vacuum side = Sub-D 15 (f) socket
C-815.VFUx: See dimensional drawing (p. 61)
c) Make a suitable opening in the vacuum chamber.
d) Install the vacuum feedthrough.
3. Connect the linear stage and electronics to each other as shown in the connection
diagrams above.
4. Take suitable measures to secure the connections against accidental disconnection.
36 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 41
6 Startup and Operation
Starting Up the Q-521 .................................................................................................................. 40
6
Startup and Operation
In this Chapter
General Notes on Startup and Operation .................................................................................... 37
6.1 General Notes on Startup and Operation
CAUTION
Risk of electric shock if the protective earth conductor is not connected!
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the Q-521 in the case of malfunction or failure of the system. If touch voltages exist,
touching the Q-521 can result in minor injuries from electric shock.
Connect the Q-521 to a protective earth conductor (p. 19) before startup.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the Q-521 to the protective earth conductor before starting it up
again.
CAUTION
Burning from hot surface!
The surface of the Q-521 and its vicinity can heat up during operation. Touching the Q-521 and
surrounding parts can result in minor injuries from burning.
Cool the Q-521 so that the temperature of its surface and surrounding parts does not
exceed 65 °C.
If sufficient cooling is not possible: Make sure that the hot Q-521 and its surrounding parts
cannot be touched.
If sufficient cooling and protection against contact are not possible: Mark the danger zone
in accordance with the legal regulations.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 37
Page 42
6 Startup and Operation
NOTICE
Overheating during continuous operation!
The highest velocity is achieved at maximum operating frequency; however, the Q-521 can
overheat during continuous operation as a result.
Pay attention to the recommended operating time according to the operating frequency in
step mode (p. 53).
Ensure sufficient ventilation at the place of installation.
NOTICE
Operating voltage too high or incorrectly connected!
Operating voltages that are too high or incorrectly connected can cause damage to the Q-521.
Operate the Q-521 only with controllers/drivers and original accessories from PI.
Do not exceed the operating voltage range (p. 52) for which the Q-521 is specified.
Operate the Q-521 only when the operating voltage is properly connected; see "Pin
Assignment" (p. 67).
NOTICE
Operating frequency too high!
An excessively high operating frequency can cause damage to the Q-521.
Only operate the Q-521 with controllers/drivers and original accessories from PI.
Do not exceed the operating frequency range (p. 52) for which the Q-521 is specified.
NOTICE
Reduced lifetime of the piezo actuator due to permanently high voltage!
Applying a high static voltage to piezo actuators continuously reduces the lifetime of the piezo
ceramic.
If the Q-521 is not used for a longer period of time, e.g., several days, switch the
electronics off.
38 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 43
6 Startup and Operation
Reduce the operating frequency in step mode (step frequency) or respectively the velocity,
NOTICE
Destruction of the piezo actuators by electric flashovers!
Using the Q-521 in environments that increase the electrical conductivity can lead to the
destruction of the piezo actuators of the drive by electric flashovers. Electric flashovers can be
caused by moisture, high humidity, liquids and conductive materials (e.g. metal dust). In
addition, electric flashovers can also occur in certain air pressure ranges due to the increased
conductivity of the air.
Avoid operating the Q-521 in environments that can increase the electrical conductivity.
Only operate the Q-521 within the permissible ambient conditions and classifications
(p. 52).
For operation in vacuum below 0.1 hPa:
Do not operate the Q-521 during evacuation.
NOTICE
Damage due to collisions!
Collisions can damage the linear stage, the load to be moved, and the surroundings.
Make sure that no collisions are possible between the linear stage, the load to be moved,
and the surroundings in the motion range of the linear stage.
Do not place any objects in areas where they can be caught by moving parts.
Stop the motion immediately if an electronics malfunction occurs.
NOTICE
Considerable wear due to high operating frequency!
A high operating frequency in step mode can cause considerable wear on the mechanical
system.
see the user manual of the electronics.
Reduce the operationg time with high operating frquency (p. 53).
Stop the motion immediately if an electronics malfunction occurs.
NOTICE
Increased wear due to small working range!
Using a small working range permanently increases the wear in this area.
If possible: Select another part of the travel range for the working range in regular
intervals.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 39
Page 44
6 Startup and Operation
VEL
INFORMATION
The parameters of the Q-521 can be changed. Changing parameter values can cause
undesirable results.
Create a backup copy on the PC before changing the parameter settings of the Q-521; see
“Saving Parameter Values in a Text File” in the user manual of the electronics. You can then
restore the original settings at any time.
Information on changing the parameter values are provided in section “Adapting Settings”
in the user manual of the electronics
6.2 Starting Up the Q-521
INFORMATION
If the parameters of the electronics are not adapted to the Q-521 and the application (load,
orientation of the Q-521), the Q-521 will either not move or not move satisfactorily.
Only operate the Q-521 when the parameters of the electronics have been correctly set.
Pay particular attention to the parameter settings – depending on the electronics used –
either for the operating frequency in step mode or for the velocity (with closed-loop
operation).
E-872.401 / E-873.3QTU:
− Operating frequency in step mode using parameter 0x1F000400
E-873.1Ax / E-873.10C885
− Velocity set by
(closed-loop operation)
INFORMATION
The inertia drive generates noise in step mode. The noise generation depends on the current
step frequency.
INFORMATION
If you use the software included in the scope of delivery of the electronics, the operating
parameters can be loaded from the PIMicosStages3.dat database. The entries in the stage
database are updated regularly.
Install the PI Update Finder from the product CD of the electronics onto your PC, which
updates the PIMicosStages3.dat database on your PC.
For further information, see the user manual of the electronics.
Requirements
You have read and understood the general notes on startup and operation (p. 37).
You have properly installed the linear stage (p. 17).
You have read and understood the user manual of the electronics.
40 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 45
6 Startup and Operation
You have read and understood the manual of the PC software.
The electronics and the required PC software have been installed. All connections on
the electronics have been set up (see user manual of the electronics).
Starting up the Q-521.x3x with controller
1. Start up the linear stage (see user manual of the controller).
The startup comprises the following steps:
− Selecting the stage type
− Defining the reference point of the axis
− Commanding of first motion for testing
2. If necessary: Adapt the operating frequency in step mode or the velocity (see user
manual of the electronics) to your application (also refer to "General Notes on Startup
and Operation" (p. 37) and "Operating Time" (p. 53)).
In the user manual of the controller, the startup is described using the PIMikroMove
program.
Starting up the Q-521.x0x with E-872 drive electronics
1. Start up the linear stage (see user manual of the drive electronics).
The startup comprises the following steps:
− Selecting the stage type
− Commanding of first motion for testing
2. If necessary: Adapt the operating frequency in step mode (ID 0x1F000400) to your
application (also refer to "General Notes on Startup and Operation" (p. 37) and
"Operating Time" (p. 53)).
In the user manual of the drive electronics, the startup is described using the
PIMikroMove program.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 41
Page 46
Page 47
7 Maintenance
Cleaning the Q-521 ...................................................................................................................... 43
7
Maintenance
In this Chapter
General Notes on Maintenance ................................................................................................... 43
Performing a Maintenance Run ................................................................................................... 43
7.1 General Notes on Maintenance
NOTICE
Damage due to improper maintenance!
Improper maintenance can lead to misalignment and failure of the Q-521.
Only loosen screws according to the instructions in this manual.
7.2 Performing a Maintenance Run
The maintenance run must cover the entire travel range.
Perform the maintenance run after every 10 million steps.
7.3 Cleaning the Q-521
Requirements
You have disconnected the linear stage from the electronics.
Cleaning the linear stage
Only when the linear stage is not used in vacuum:
When necessary, clean the surfaces of the linear stage with a cloth that is lightly
dampened with a mild cleanser or disinfectant.
Only when the linear stage is used in vacuum:
Touch the linear stage only with powder-free gloves.
If necessary, wipe the linear stage clean.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 43
Page 48
Page 49
8 Troubleshooting
Load the parameter set from the stage database that
8
Troubleshooting
Problem Possible causes Solution
Functional
impairment after
system
modification
No or limited
motion
Drive electronics
or controller has
been replaced
The linear stage
has been replaced
Cable not connected
correctly or defective
Excessive load Reduce the load. Pay attention to the information in
Parameters of the
electronics incorrectly
set
Operating voltage too
low
E-872 drive electronics or E-873 controller from PI:
corresponds to the Q-521 model.
If necessary: Set the parameters on the electronics in
the PIMikroMove PC program so that they
correspond to the application (load, orientation) of
the Q-521 model (see user manual of the
electronics).
Check the connecting cable(s)
the "Technical Data" section (p. 49).
If the linear stage is mounted vertically, make sure
that the installed load is lower than the self-locking
of the drive (see “Holding force, power off” on p. 49)
See the "Functional impairment after system
modification" problem in this table.
Provide an operating voltage of 48 V.
Unfavorable operating
frequency for step
mode
Warped base body Mount the Q-521 on an even surface. The
Unfavorable load
mounting
Unsuitable ambient
conditions
Wear of the drive Replace the Q-521 and make sure that the operating
Drive is blocked Carefully release the blockage by manually moving
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 45
Adapt the operating frequency for the step mode
(for details, see "Starting Up the Q-521" (p. 40) and
manual of the electronics used).
recommended evenness of the surface is ≤2 µm.
Pay attention to the maximum torque when affixing
the load (p. 30).
Keep the distance between the center of gravity of
the load and the center of the motion platform as
small as possible in all directions.
Only operate the Q-521 in a clean environment and
within the permissible ambient conditions (p. 52).
parameters of the electronics are adapted to the
linear stage.
Page 50
8 Troubleshooting
the motion platform back and forth.
Problem Possible causes Solution
Contact our customer service department
(p. 47).
If the problem that occurred with your system is not listed in the table above or cannot be
solved as described, contact our customer service department (p. 47).
46 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 51
9 Customer Service
9
Customer Service
For inquiries and orders, contact your PI sales engineer or send us an email ([email protected]).
If you have any questions concerning your system, provide the following information:
− Product and serial numbers of all products in the system
− Firmware version of the controller (if applicable)
− Version of the driver or the software (if applicable)
− Operating system on the PC (if applicable)
If possible: Take photographs or make videos of your system that can be sent to our
customer service department if requested.
The latest versions of the user manuals are available for download (p. 3) on our website.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 47
Page 52
Page 53
10 Technical Data
Pin Assignment ............................................................................................................................ 67
10
Technical Data
In this Chapter
Specifications ............................................................................................................................... 49
Operating Time ............................................................................................................................ 53
Dimensions .................................................................................................................................. 54
10.1 Specifications
10.1.1 Data Table
Motion and
Q-521.130 Q-521.140/
positioning
12 mm
travel
range,
resolution
4 nm
Q-521.14U
12 mm
travel
range,
resolution
1 nm,
UHV
version
Q-521.14U
Q-521.230 Q-521.240 /
Q-521.24U
22 mm
travel
range,
resolution
4 nm
22 mm
travel
range,
resolution
1 nm,
UHV version
Q-521.24U
Q-521.330 Q-521.340 /
Q-521.34U
32 mm
travel
range,
resolution
4 nm
32 mm
travel
range,
resolution
1 nm,
UHV version
Q-521.34U
Q-521.x00 /
Q-521.x0U
12 mm to
32 mm
travel
range,
open loop,
UHV
versions
Q-521.x0U
Unit
Active axis X X X X X X X
Travel range 12 12 22 22 32 32 12 to 32 mm
Integrated
sensor
Sensor
Linear
encoder
Linear
encoder
Linear
encoder
Linear
encoder
Linear
encoder
Linear
encoder
-
4 1 4 1 4 1 - nm
resolution
Minimum
8 2 8 2 8 2 - nm
incremental
motion
Unidirectional
25 25 25 25 30 30 - nm
repeatability
over entire
travel range
Bidirectional
40 40 40 40 50 50 - nm
repeatability
over entire
travel range
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 49
Page 54
10 Technical Data
Motion and
positioning
Unidirectional
repeatability
over 100 µm
travel range
Bidirectional
repeatability
over 100 µm
travel range
Pitch / yaw
over entire
travel range
Pitch / yaw
over 100 µm
travel range
Maximum
velocity*
Mechanical
properties
Q-521.130 Q-521.140/
Q-521.14U
Q-521.230 Q-521.240 /
Q-521.24U
Q-521.330 Q-521.340 /
Q-521.34U
Q-521.x00 /
Q-521.x0U
Unit
12 12 12 12 12 12 -
24 24 24 24 24 24 - nm
100 100 100 100 100 100 100 µrad
1 1 1 1 1 1 1 µrad
10 10 10 10 10 10 10 mm/
s
Q-521.130 Q-521.140/
Q-521.14U
Q-521.230
Q-521.240 /
Q-521.24U
Q-521.330
Q-521.340 /
Q-521.34U
Q-521.x00 /
Q-521.x0U
Unit
Load capacity 10 10 10 10 10 10 10 N
Length 30 30 32.2 32.2 42.2 42.2 30 to 42.2 mm
Width 21 21 21 21 21 21 21 mm
Height 10 10 10 10 10 10 10 mm
Drive
properties
Q-521.130 Q-521.140/
Q-521.14U
Q-521.230
Q-521.240 /
Q-521.24U
Q-521.330
Q-521.340 /
Q-521.34U
Q-521.x00 /
Q-521.x0U
Unit
Motor type Piezoelectric inertia drive
Push / pull
1 1 1 1 1 1 1 N
force
Holding force,
1.3 1.3 1.3 1.3 1.3 1.3 1.3 N
power off
Miscellaneous Q-521.130
Operating
0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 °C
-521.140/
-521.14U
Q-521.230
Q-521.240 /
Q-521.24U
Q-521.330
Q-521.340 /
Q-521.34U
Q-521.x00 /
Q-521.x0U
Unit
temperature
range
50 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 55
10 Technical Data
Miscellaneous Q-521.130
Material Stainless
steel
-521.140/
-521.14U
Stainless
steel
Q-521.230
Stainless
steel
Q-521.240 /
Q-521.24U
Stainless
steel
Q-521.330
Stainless
steel
Q-521.340 /
Q-521.34U
Stainless
steel
Q-521.x00 /
Q-521.x0U
Stainless
steel
Unit
Cable length 1 1 1 1 1 1 1 m
Connector Sub-D Sub-D Sub-D Sub-D Sub-D Sub-D Sub-D
Mass incl.
cable and
connector
Mass without
cable and
connector
110
24
Q-521.140:
110
Q-521.14U:
66
Q-521.140:
24
Q-521.14U:
24
126
34
Q-521.240:
126
Q-521.24U:
78
Q-521.240:
24
Q-521.24U:
34
135
48
Q-521.340:
135
Q-521.34U:
92
Q-521.340:
48
Q-521.34U:
48
Q-521.100:
110
Q-521.200:
126
Q-521.300:
135
Q-521.10U:
66
Q-521.20U:
78
Q-521.30U:
92
Q-521.100:
24
Q-521.200:
34
Q-521.300:
48
Q-521.10U:
24
Q-521.20U:
34
Q-521.30U:
48
g
g
Recommended
electronics
* Typical velocity at a control frequency of 20 kHz
For operation in a vacuum, we recommend a reduced duty cycle of 20% and a maximum motor push/pull force of 30% compared to a standard environment. The intrinsic
mass of the slider plate must be considered accordingly.
The specifications were determined on a surface with an evenness of 2 µm.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 51
E-873.1AT, E-873.3QTU, E-873.10C885 E-872.401
Page 56
10 Technical Data
10.1.2 Maximum Ratings
The Q-521 linear stage is designed for the following operating data:
Maximum Operating
Voltage
Maximum Operating
Frequency
48 V 20 kHz 10 W
10.1.3 Ambient Conditions and Classifications
Pay attention to the following ambient conditions and classifications for the Q-521:
Area of application For indoor use only
Maximum altitude 2000 m
Air pressure Q-521.xx0:
1100 hPa to 10
Q-521.xxU:
1100 hPa to 10
Relative humidity Highest relative humidity 80 % for temperatures up
to 31 °C, non-condensing
Decreasing linearly to 50 % relative humidity at
40 °C, non-condensing
-6
hPa
-9
hPa
Maximum Power
Consumption
Operating temperature 0 °C to 40 °C
Storage temperature -20 °C to 70 °C
Transport temperature -20 °C to 70 °C
Maximum bakeout
temperature for Q-521.xxU:
Maximum bakeout
temperature for Q-521.xx0:
Overvoltage category (acc. to
120 °C, for 12 hours, only in switched-off state
80 °C, for 2 hours, only in switched-off state
II
EN 60664-1 / VDE 0110-1)
Protection class
I
(acc. to EN 61140 /
VDE 0140-1)
Degree of pollution
1
(acc. to EN 60664-1 /
VDE 0110-1)
Degree of protection
IP20
(acc. to IEC 60529)
52 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 57
10 Technical Data
10.2 Operating Time
The duration of motion and the operating frequency in step mode affect the lifetime of the
linear stage. In order to prevent overheating and increased wear, the motion duration at the
given velocity or given operating frequency may not exceed the values given in the following
table.
Velocity in mm/s Operating
frequency in Hz1
Maximum duration of
motion in s
Idle time in s
10 20000 10 10
5 10000 20 10
2.5 5000 60 10
0.5
1
For the relevant parameters, see "Starting up the Q-521" (p. 40) and the user manual of the
≤ 1000
120 10
electronics used.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 53
Page 58
10 Technical Data
10.3 Dimensions
10.3.1 Q-521.1xx
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
54 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Figure 13: Q-521.1xx
Page 59
10 Technical Data
10.3.2 Q-521.2xx
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 55
Figure 14: Q-521.2xx
Page 60
10 Technical Data
10.3.3 Q-521.3xx
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
56 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Figure 15: Q-521.3xx
Page 61
10 Technical Data
10.3.4 Q-121.80U Adapter Plate
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 57
Figure 16: Q-121.80U adapter plate
Page 62
10 Technical Data
10.3.5 Q-121.10U Adapter Bracket
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
58 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Figure 17: Q-121.10U adapter bracket
Page 63
10 Technical Data
10.3.6 Q-121.20U Adapter Bracket
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 59
Figure 18: Q-121.20U adapter bracket
Page 64
10 Technical Data
10.3.7 Q-121.30U Adapter Bracket
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
60 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Figure 19: Q-121.30U adapter bracket
Page 65
10 Technical Data
10.3.8 Vacuum Feedthroughs
Available vacuum feedthroughs:
C-815.VF (p. 61)
C-815.VFU1 (p. 63)
C-815.VFU3 (p. 64)
C-815.VFU6 (p. 65)
C-815.VFU15 (p. 66)
For the C-815.VF vacuum feedthrough, the recommended dimensions for a vacuum chamber
opening can be found on p. 62.
C-815.VF vacuum feedthrough for 10-6 hPa
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 61
Figure 20: C-815.VF vacuum feedthrough Sub-D 15 (m/f)
Page 66
10 Technical Data
Recommended vacuum chamber opening for the C-815.VF vacuum feedthrough for 10-6 hPa
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
62 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Figure 21: Top: View of the opening on the air side; middle: Section of the vacuum chamber as
specified by the customer; bottom: View from the vacuum side
Page 67
10 Technical Data
C-815.VFU1 vacuum feedthrough for 10-9 hPa
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Figure 22: C-815.VFU1 vacuum feedthrough, Sub-D 15 (m/m)
1 Vacuum side
2 Air side
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 63
Page 68
10 Technical Data
C-815.VFU3 vacuum feedthrough for 10-9 hPa
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Figure 23: C-815.VFU3 vacuum feedthrough, Sub-D 15 (m/m)
1 Vacuum side
2 Air side
64 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 69
10 Technical Data
C-815.VFU6 vacuum feedthrough for 10-9 hPa
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Figure 24: C-815.VFU6 vacuum feedthrough, Sub-D 15 (m/m)
1 Vacuum side
2 Air side
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 65
Page 70
10 Technical Data
1 Vacuum side
C-815.VFU15 vacuum feedthrough for 10-9 hPa
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
66 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Figure 25: C-815.VFU15 vacuum feedthrough, Sub-D 15 (m/m)
2 Air side
Page 71
10 Technical Data
10.4 Pin Assignment
10.4.1 Q-521.xx0 (vacuum compatible to 10
Connector: Sub-D 15 (m)
The Sub-D 15 (m) connector transmits the signals of the drive and, for the models with sensor,
in addition the signals of the sensor and of the ID chip.
Figure 26: Sub-D 15 (m) connector
Pin Signal1 Function Direction
1 REF - 2 Reference signal differential (-) Output
2 Motor (-) Motor signal differential (-) Input
3 Motor (+) Motor signal differential (+) Input
4 V
5 - - -
6 ID chip data 2 ID chip data Output
2
Supply voltage (+5 V) Input
DD
-6
hPa)
7 SIN - 2 Encoder A (-) Output
8 COS - 2 Encoder B (-) Output
9 Motor (-) Motor signal differential (-) Input
10 GND GND GND
11 Motor (+) Motor signal differential (+) Input
12 - - -
13 REF + Reference signal differential (+) Output
14 SIN + 2 Encoder A (+) Output
15 COS + 2 Encoder B (+) Output
1
The "-" sign indicates that the corresponding pin has not been assigned.
2
Only for models with sensor. Not assigned for models without sensor.
The cable shield is connected to the connector shell.
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 67
Page 72
10 Technical Data
10.4.2 Q-521.xxU (vacuum compatible to 10
Connector: Sub-D 15 (f)
The Sub-D 15 (f) connector transmits the signals of the drive and, for the models with sensor, in
addition the signals of the sensor and of the ID chip.
Figure 27: Sub-D 15 (f) connector
Pin Signal1 Function Direction
1 COS - 2 Encoder B (-) Output
2 SIN - 2 Encoder A (-) Output
3 ID chip data 2 ID chip data 2 Output
4 - - -
5 V
6 Motor (+) Motor signal differential (+) Input
2
Supply voltage (+5 V) Input
DD
-9
hPa)
7 Motor (-) Motor signal differential (-) Input
8 REF - 2 Reference signal differential (-) Output
9 COS + 2 Encoder B (+) Output
10 SIN + 2 Encoder A (+) Output
11 REF + 2 Reference signal differential (+) Output
12 - - -
13 Motor (+) Motor signal differential (+) Input
14 GND GND GND
15 Motor (-) Motor signal differential (-) Input
1
The "-" sign indicates that the corresponding pin has not been assigned.
2
Only for models with sensor. Not assigned for models without sensor.
The cable shield is connected to the connector shell.
68 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Page 73
10 Technical Data
10.4.3 C-815.VF Vacuum Feedthrough
Sub-D 15 (m/f)
Figure 28: Vacuum side: Sub-D 15 (f) socket
Figure 29: Air side: Sub-D 15 (m) panel plug
Vacuum side (f)
Air side (m)
Pin Signal Function Pin
1 REF - Reference signal differential (-) 1
2 Motor (-) Motor signal differential (-) 2
3 Motor (+) Motor signal differential (+) 3
4 VDD Supply voltage (+5 V) 4
5 - - 5
6 ID chip data ID chip data 6
7 SIN - Encoder A (-) 7
8 COS - Encoder B (-) 8
9 Motor (-) Motor signal differential (-) 9
10 GND GND 10
11 Motor (+) Motor signal differential (+) 11
12 - - 12
13 REF + Reference signal differential (+) 13
14 SIN + Encoder A (+) 14
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 69
15 COS + Encoder B (+) 15
Page 74
10 Technical Data
10.4.4 C-815.VFUx Vacuum Feedthrough
Sub-D 15 (m/m)
Figure 30: C-815.VFUx vacuum feedthrough
1 Vacuum side
2 Air side
Figure 31: Sub-D 15 (m) panel plug
Vacuum side
Air side
Pin Signal Function Pin
1 COS - Encoder B (-) 8
2 SIN - Encoder A (-) 7
3 ID chip data ID chip data 6
4 - - 5
5 VDD Supply voltage (+5 V) 4
6 Motor (+) Motor signal differential (+) 3
7 Motor (-) Motor signal differential (-) 2
8 REF - Reference signal differential (-) 1
9 COS + Encoder B (+) 15
10 SIN + Encoder A (+) 14
11 REF + Reference signal differential (+) 13
70 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
12 - - 12
13 Motor (+) Motor signal differential (+) 11
14 GND GND 10
15 Motor (-) Motor signal differential (-) 9
Page 75
10 Technical Data
10.4.5 5604500041 Adapter
Sub-D 15 (m/m)
The adapter is only required if a Q-521.xxU model is to be operated at atmospheric pressure
(i.e., without a vacuum feedthrough).
Figure 32: Sub-D 15 (m) connector
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 71
Figure 33: Pin assignment of the 5604500041 adapter
Page 76
Page 77
11 Old Equipment Disposal
11
Old Equipment Disposal
In accordance with EU law, electrical and electronic equipment may not be disposed of in EU
member states via the municipal residual waste.
Dispose of your old equipment according to international, national, and local rules and
regulations.
In order to fulfil the responsibility as the product manufacturer, PI miCos GmbH undertakes
environmentally correct disposal of all old PI miCos equipment made available on the market
after 13 August 2005 without charge.
Any old PI miCos equipment can be sent free of charge to the following address:
PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach, Germany
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 73
Page 78
Page 79
12 EU Declaration of Conformity
12
EU Declaration of Conformity
For the Q-521, an EU Declaration of Conformity has been issued in accordance with the
following European directives:
Low Voltage Directive
EMC Directive
RoHS Directive
The applied standards certifying the conformity are listed below.
Safety (Low Voltage Directive): EN 61010-1
EMC: EN 61326-1
RoHS: EN 50581
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 75
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