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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
PZ254E
P-753 Positioning Systems
User Manual
Version: 1.0.1
Date: 28.11.2018
This document describes the following products:
P-753.11C / P-753.1CD
LISA high dynamics piezo nanopositioning
system, 15 µm, direct position measuring,
capacitive sensor
P-753.21C / P-753.2CD
LISA high dynamics piezo nanopositioning
system, 30 µm, direct position measuring,
capacitive sensor
P-753.31C / P-753.3CD
LISA high dynamics piezo nanopositioning
system, 38 µm, direct position measuring,
capacitive sensor
.11C/.21C/.31C = with LEMO connectors
.1CD/.2CD/.3CD = with D-sub connector
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws
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The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: (http://www.physikinstrumente.com/en/aboutpi/patents)
© 2018 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 28.11.2018
Document number: PZ254E, CBo, Version 1.0.1
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.
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Contents
1 About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals ................................................................................................ 3
2 Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures ............................................................................................ 7
3 Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.2 Product View ............................................................................................................ 10
3.3 Product Labeling ....................................................................................................... 10
3.4 Scope of Delivery ...................................................................................................... 11
3.5 Suitable Electronics .................................................................................................. 11
3.6 Technical Features .................................................................................................... 11
3.6.1 PICMA® Piezo Actuators .............................................................................. 11
3.6.2 Flexure Guides ............................................................................................. 12
3.6.3 Capacitive Sensors ....................................................................................... 12
3.6.4 ID Chip (Only Models With D-Sub Connector) ............................................. 12
4 Unpacking 13
5 Installation 15
5.1 General Notes on Installation ................................................................................... 15
5.2 Connecting the P-753 to the Protective Earth Conductor ....................................... 16
5.3 Mounting the P-753 ................................................................................................. 18
5.4 Fixing the Load .......................................................................................................... 20
6 Startup and Operation 25
6.1 General Notes on Startup and Operation ................................................................ 25
6.2 Operating the P-753 ................................................................................................. 26
6.3 Discharging the P-753 ............................................................................................... 27
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7 Maintenance 29
7.1 General Notes on Maintenance ............................................................................... 29
7.2 Cleaning the P-753 ................................................................................................... 29
8 Troubleshooting 31
9 Customer Service 33
10 Technical Data 35
10.1 Specifications ............................................................................................................ 35
10.1.1 Data Table .................................................................................................... 35
10.1.2 Maximum Ratings ........................................................................................ 36
10.1.3 Ambient Conditions and Classifications ...................................................... 37
10.2 Dimensions ............................................................................................................... 38
10.3 Torque for Stainless Steel Screws (A2-70) ................................................................ 41
10.4 Pin Assignment ......................................................................................................... 41
11 Old Equipment Disposal 43
12 EU Declaration of Conformity 45
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1 About this Document
Downloading Manuals ................................................................................................................... 3
1
About this Document
In this Chapter
Objective and Target Group of this User Manual .......................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Figures ............................................................................................................................................ 2
Other Applicable Documents ......................................................................................................... 2
1.1 Objective and Target Group of this User Manual
This user manual contains the information required for the intended use of the P-753
(hereinafter referred to as "positioner"). The letter x in the product number stands for the
various models (p. 9).
Basic knowledge of control technology, drive technologies and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
NOTICE
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
P-753 Positioning Systems PZ254E Version: 1.0.1 1
INFORMATION
Information for easier handling, tricks, tips, etc.
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1 About this Document
Action consisting of one or several steps whose sequential order
List item
P-5xx / P-6xx / P-7xx piezo positioning systems
PZ240EK Short Instructions
Symbol/
Label
1.
2.
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example:
1.3 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
Meaning
Action consisting of several steps whose sequential order must
be observed
is irrelevant
socket of the RS-232 interface)
Warning signs affixed to the product that refer to detailed
information in this manual.
1.4 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
The latest versions of the user manuals are available for download (p. 3) on our website.
Product Document
E-625.CR piezo servo controller PZ166E User Manual
E-754 digital piezo controller E754T0001 User Manual
PIMikroMove SM148E Software Manual
2 Version: 1.0.1 PZ254E P-753 Positioning Systems
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1 About this Document
If a manual is missing or problems occur with downloading:
1.5 Downloading Manuals
INFORMATION
Contact our customer service department (p. 33).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:
− Link to a page for registering and requesting the access data
− User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
P-753 Positioning Systems PZ254E Version: 1.0.1 3
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1 About this Document
3. Click Search.
4. Enter the product number up to the period (e.g., P-753) or the product family (e.g.,
LISA) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.
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2 Safety
Organizational Measures ............................................................................................................... 7
2
Safety
In this Chapter
Intended Use .................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
2.1 Intended Use
The P-753 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.
Based on its design and realization, the P-753 is intended for fine positioning as well as the fast
and precise motion of small objects. The motion takes place linearly in one axis.
The P-753 can be mounted with a horizontally or vertically oriented motion axis. Vertical
mounting is only possible under certain conditions (p. 18).
The intended use of the P-753 is only possible in combination with suitable electronics (p. 11)
that is available from PI. The electronics is not included in the scope of delivery of the P-753.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must be able to read out and process the signals from
the capacitive sensors.
2.2 General Safety Instructions
The P-753 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-753.
Only use the P-753 for its intended purpose, and only use it if it is in a good working
order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the P-753.
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2 Safety
The P-753 is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators can
remain charged for several hours. Touching or short-circuiting the contacts in the connector of
the P-753 can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.
Do not open the P-753.
Discharge the positioner's piezo actuators before installation:
Connect the positioner to the switched-off PI controller, which is equipped with an
internal discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Secure the plug connector of the positioner with screws against being pulled out of the
controller.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-753 in the case of malfunction or failure of the system. If touch voltages exist,
touching the P-753 can result in minor injuries from electric shock.
Connect the P-753 to a protective earth conductor (p. 16) before startup.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-753 to the protective earth conductor before starting it
up again.
Mechanical forces can damage or misalign the P-753.
Avoid impacts that affect the P-753.
Do not drop the P-753.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 35).
Do not touch any sensitive parts (e.g., motion platform) when handling the P-753.
The P-753 is maintenance-free and achieves its positioning accuracy as a result of the optimum
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-753.
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2 Safety
2.3 Organizational Measures
User manual
Always keep this user manual available with the P-753.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-753 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the P-753 after you have read and understood this user
manual.
Personnel qualification
The P-753 may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.
P-753 Positioning Systems PZ254E Version: 1.0.1 7
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3 Product Description
Technical Features ....................................................................................................................... 11
P-753.2CD
LISA high dynamics piezo nanopositioning system, 30 µm, direct position
P-753.31C
LISA high dynamics piezo nanopositioning system, 38 µm, direct position
P-753.3CD
LISA high dynamics piezo nanopositioning system, 38 µm, direct position
3
Product Description
In this Chapter
Model Overview ............................................................................................................................. 9
Product View ................................................................................................................................ 10
Product Labeling .......................................................................................................................... 10
Scope of Delivery ......................................................................................................................... 11
Suitable Electronics ...................................................................................................................... 11
3.1 Model Overview
The P-753 is available in the following versions:
Model Description
P-753.11C LISA high dynamics piezo nanopositioning system, 15 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-753.1CD LISA high dynamics piezo nanopositioning system, 15 µm, direct position
measuring, capacitive sensor, D-sub connector
P-753.21C LISA high dynamics piezo nanopositioning system, 30 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
measuring, capacitive sensor, D-sub connector
measuring, capacitive sensor, LEMO connector(s)
measuring, capacitive sensor, D-sub connector
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3 Product Description
LISA
Brand name
Old equipment disposal (p. 43)
Country of origin: Germany
Country of origin
WWW.PI.WS
Manufacturer's address (website)
CE conformity mark
3.2 Product View
The figure serves as an example and can differ from your positioner model.
Figure 1: Example of product view
1 Motion platform
2 Protective earth connection
3 Cable exit
4 Base body
X Positive direction of motion of the positioner
3.3 Product Labeling
Labeling Description
P-753.1CD Product name (example), the characters following the
123456789 Serial number (example), individual for each P-753
period refer to the model
Meaning of the places (counting from left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive numbers
Manufacturer's logo
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Warning sign "Pay attention to the manual!"
Symbol for the protective earth conductor, marks the
protective earth connection of the P-753 (p. 16)
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3 Product Description
Figure 2: "Residual Voltage" warning sign on the connector of the P-753
Warning sign "Residual voltage": Notice of risk of electric shock (p. 5) for models with
D-sub plug connector
3.4 Scope of Delivery
Product number Description
P-753 Positioner according to order (p. 9)
000036450 M4 screw set for protective earth, consisting of:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 safety washers
2 flat washers
PZ240EK Short instructions for piezo positioning systems
3.5 Suitable Electronics
You need suitable electronics to operate a P-753. Selection of the device depends on the
application and the connections available.
Product number Description
E-625 Piezo servo controller
E-754 Digital piezo controller
To order, contact our customer service department (p. 33).
3.6 Technical Features
3.6.1 PICMA® Piezo Actuators
P-753 positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.
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3 Product Description
3.6.2 Flexure Guides
P-753 positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100 % vacuum compatible, function in a wide temperature range and do
not require any lubricants.
3.6.3 Capacitive Sensors
Capacitive sensors measure the position directly on the motion platform (direct metrology) and
work without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.
3.6.4 ID Chip (Only Models With D-Sub Connector)
An ID chip is located in the D-sub connector of the P-753. When the P-753 is calibrated at the
factory with digital electronics, the calibration data is saved on the ID chip together with
specific product information. During switch-on, the digital electronics read the data from the
ID chip of the P-753 connected. An P-753, whose ID chip contains the calibration data, can
therefore be connected to any suitable digital electronics without renewed calibration.
For more information on the ID chip, see the manual of the controller used.
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4 Unpacking
4
Unpacking
1. Unpack the P-753 with care.
2. Compare the contents with the scope of delivery according to the contract and the
delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact
our customer service department (p. 33) immediately.
4. Keep all packaging materials in case the product needs to be returned.
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5 Installation
Fixing the Load ............................................................................................................................. 20
5
Installation
In this Chapter
General Notes on Installation ...................................................................................................... 15
Connecting the P-753 to the Protective Earth Conductor ........................................................... 16
Mounting the P-753 ..................................................................................................................... 18
5.1 General Notes on Installation
CAUTION
Dangerous voltage and residual charge in piezo actuators!
The P-753 is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators
can remain charged for several hours. Touching or short-circuiting the contacts in the
connector of the P-753 can lead to minor injuries from electric shock. The piezo actuators can
be destroyed by an abrupt contraction.
Do not open the P-753.
Discharge the positioner's piezo actuators before installation:
Connect the positioner to the switched-off PI controller, which is equipped with an internal
discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Secure the plug connector of the positioner with screws against being pulled out of the
controller.
NOTICE
Mechanical overload due to incorrect handling!
An impermissible mechanical load on the motion platform of the P-753 can cause damage to
the piezo actuators, sensors, and flexures of the P-753 as well as loss of accuracy.
Do not touch any sensitive parts (e.g., motion platform) when handling the P-753.
P-753 Positioning Systems PZ254E Version: 1.0.1 15
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5 Installation
Extended cables can reduce the positioning accuracy of the P-753 or affect the sensor
In the case of P-753 positioners with D-sub connectors, ground loops can occur when the
NOTICE
Damage due to unsuitable cables!
Unsuitable cables can damage the P-753 and the electronics.
Only use cables provided by PI for connecting the P-753 to the electronics.
NOTICE
Damage due to improper mounting!
Improper mounting of the P-753 or incorrectly mounted parts can damage the P-753.
Mount the P-753 and the loads only onto the mounting fixtures (holes) intended for this
purpose.
NOTICE
Damage due to incorrectly tightened screws!
Incorrectly tightened screws can cause damage.
Pay attention to the torque range (p. 41) specified for the screws used during installation.
INFORMATION
processing by the electronics.
Do not use cable extensions. If you need longer cables, contact our customer service
department (p. 33).
5.2 Connecting the P-753 to the Protective Earth Conductor
INFORMATION
positioner is grounded via its protective earth connection as well as by the shield of the
connecting cable for the electronics.
If a ground loop occurs, contact our customer service department (p. 33).
INFORMATION
Pay attention to the applicable standards for connecting the protective earth conductor.
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5 Installation
The P-753 has an M4 hole for connecting the protective earth conductor. This hole is located
next to the cable exit and is marked with the
protective earth symbol (see "Dimensions"
(p. 38)).
Requirements
You have read and understood the general notes on installation (p. 15).
The P-753 is not connected to the electronics.
Tools and accessories
Suitable protective earth conductor: Cross-sectional area of the cable ≥ 0.75 mm2
Supplied M4 protective earth screw set (p. 11) for connecting the protective earth
conductor
Suitable screwdriver
Figure 3: Connecting the protective earth conductor (profile view)
1 Base body of the P-753
2 Flat washer
3 Safety washer
4 Screw
5 Cable lug
6 Protective earth conductor
Connecting the P-753 to the protective earth conductor
1. If necessary, attach a suitable cable lug to the protective earth conductor.
2. Use the M4 screw (together with the washers and self-locking washers) to affix the
cable lug of the protective earth conductor to the protective earth connection of the
P-753 as shown in the profile view.
3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm.
4. Make sure that the contact resistance at all connection points relevant for connecting
the protective earth conductor is <0.1 Ω at 25 A.
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5 Installation
5.3 Mounting the P-753
NOTICE
Warping of the P-753 due to mounting on uneven surfaces!
Mounting the P-753 on an uneven surface can warp the P-753. Warping reduces the accuracy.
Mount the P-753 onto an even surface. The recommended flatness of the surface is
≤10 µm.
For applications with large temperature changes:
Only mount the P-753 on surfaces that have the same or similar thermal expansion
properties as the P-753.
NOTICE
Tensile stress on piezo actuator with vertical mounting!
If the P-753 is mounted vertically and the direction of motion of the X axis is downward, this
will result in a tensile stress which reduces the internal preload of the piezo actuator.
Operation with reduced preload can destroy the piezo actuator.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 35).
NOTICE
Unsuitable or wrongly mounted screws!
Using unsuitable screws or mounting screws incorrectly can damage the P-753.
Select the screw length according to the depth of the mounting holes (p. 38).
Do not allow screw heads to protrude.
Mount the P-753 and the loads only onto the mounting fixtures (holes) intended for this
purpose.
Pay attention to the torque range (p. 41) specified for the screws used during installation.
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5 Installation
The figure below serves as an example and can differ from your positioner model.
Figure 4: P-753: Four countersunk holes for mounting from above (white arrows) and two threaded
holes for mounting from below (hatched arrows)
Requirements
You have read and understood the general notes on installation (p. 15).
You have provided a suitable surface. For the required position of the holes, see
"Dimensions" (p. 38).
− For mounting from above with M3 screws: Four M3 holes with a depth of at least
3 mm are present.
− For mounting from below with M3 screws: Two through holes for M3 screws are
present. The thickness of the surface and the depth of the counterbores at the
through-holes in the surface are matched for compliance with the maximum screwin depth of 5 mm in the P-753.
− The flatness of the surface is ≤10 µm.
− For applications with great temperature changes: The surface should have the same
thermal expansion properties as the P-753 (e.g., surface made of aluminum).
You have accounted for the space required for a cable routing free of kinks and in
accordance with regulations.
The P-753 is not connected to the controller.
Tools and accessories
P-753 Positioning Systems PZ254E Version: 1.0.1 19
For mounting from above: Four M3 screws of suitable length (p. 38)
For mounting from below: Two M3 screws of suitable length (p. 38)
Suitable screwdriver
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5 Installation
Mounting the P-753
1. Align the P-753 on the surface so that the corresponding holes in the P-753 and the
surface are aligned.
2. Mount the P-753 on the surface from above or from below:
Mounting from above with four M3 screws:
a) Introduce four screws into the countersunk holes in the base body of the P-753 from
above.
b) Tighten the four screws. Pay attention to the specified torque range (p. 41) while
doing so.
Mounting from below with two M3 screws:
a) Introduce two screws through the holes in the surface into the base body of the
P-753 from below.
b) Tighten the two screws. Pay attention to the specified torque range (p. 41) while
doing so.
3. Make sure that no screw heads protrude from the countersunk holes.
4. Check that the P-753 is fixed firmly to the surface.
5. If necessary, secure the screws with a thread-locking adhesive.
5.4 Fixing the Load
NOTICE
NOTICE
Mechanical overload due to high torques and high loads!
When affixing the load, high torques and high loads can overload the motion platform of the
P-753. Mechanical overload can cause damage to the piezo actuators, sensors, and flexures of
the P-753 and lead to loss in accuracy.
Pay attention to the torque range (p. 41) specified for the screws used during installation.
Avoid torques >0.3 Nm on the motion platform.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 35).
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Warping of the P-753 due to affixing of loads with uneven contact surface!
Affixing loads with an uneven contact surface can warp the P-753. Warping reduces the
accuracy.
Only affix loads on the P-753 whose contact surface with the motion platform of the P-753
has a flatness of at least 10 μm.
For applications with large temperature changes:
Only affix loads to the P-753 that have the same or similar thermal expansion properties as
the P-753.
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5 Installation
NOTICE
Center of load at unsuitable position!
If the center of load is located too far away from the center of the motion platform (e.g., tall
loads and unwanted lever effect), the P-753 can be damaged by high strain on the flexure
guides, high torques, and oscillation, especially when operated dynamically.
If the center of the load to be affixed is too far above or to the side of the motion platform,
adjust the controller settings before startup or contact our customer service department
(p. 33).
NOTICE
Screws that are too long!
The P-753 can be damaged by screws that are too long.
Note the depth of the mounting holes in the motion platform (p. 38).
Only use screws of the correct length for the respective mounting holes.
INFORMATION
The positive direction of motion of the axis is specified in the product view (p. 10).
Figure 5: P-753: M2.5 holes in the motion platform for fixing loads
P-753 Positioning Systems PZ254E Version: 1.0.1 21
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5 Installation
Center of load at the optimum position:
Figure 6: Example of an optimally placed load (1: center of load)
Center of load at an unsuitable position:
Figure 7: High setup and center of load (1) far above the motion platform
Figure 8: Long lever and center of load (1) on the side of the motion platform
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5 Installation
Requirements
You have read and understood the general notes on installation (p. 15).
Tools and accessories
M2.5 screws of suitable length (p. 38)
Suitable tools
Fixing the load
Fix loads only to the threaded holes (p. 38) intended for this purpose and use suitable
screws. While doing so, pay attention to the torque range (p. 41) specified for the
screws, and avoid torques >0.3 Nm on the motion platform.
Fix the load so that it is centered and the center of load is on the motion platform.
P-753 Positioning Systems PZ254E Version: 1.0.1 23
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6 Startup and Operation
Discharging the P-753 .................................................................................................................. 27
When the P-753 is not used but the electronics remain switched on to ensure temperature
6
Startup and Operation
In this Chapter
General Notes on Startup and Operation .................................................................................... 25
Operating the P-753 ..................................................................................................................... 26
6.1 General Notes on Startup and Operation
CAUTION
Risk of electric shock if the protective earth conductor is not connected!
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-753 in the case of malfunction or failure of the system. If touch voltages exist,
touching the P-753 can result in minor injuries from electric shock.
Connect the P-753 to a protective earth conductor (p. 16) before startup.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-753 to the protective earth conductor before starting it up
again.
NOTICE
Destruction of the piezo actuator due to electric flashovers!
Using the P-753 in environments that increase the electrical conductivity can lead to the
destruction of the piezo actuator by electric flashovers. Electric flashovers can be caused by
moisture, high humidity, liquids, and conductive materials (e.g., metal dust). In addition,
electric flashovers can also occur in certain air pressure ranges due to the increased
conductivity of the air.
Avoid operating the P-753 in environments that can increase the electric conductivity.
Operate the P-753 only within the permissible ambient conditions and classifications
(p. 37).
NOTICE
Reduced lifetime of the piezo actuator due to permanently high voltage!
The permanent application of a high static voltage to piezo actuators leads to a considerable
reduction in the lifetime of the piezo ceramic.
stability, discharge the P-753 (p. 27).
P-753 Positioning Systems PZ254E Version: 1.0.1 25
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6 Startup and Operation
NOTICE
Operating voltage too high or incorrectly connected!
Operating voltages that are too high or incorrectly connected can cause damage to the P-753.
Operate the P-753 only with controllers/drivers and original accessories from PI.
Do not exceed the operating voltage range (p. 36) for which the P-753 is specified.
Operate the P-753 only when the operating voltage is properly connected; see "Pin
Assignment" (p. 41).
NOTICE
Uncontrolled oscillation!
Oscillation can cause irreparable damage to the P-753. Oscillation is indicated by a humming
noise and can be caused by the following:
A change in the load and/or dynamics requires the servo control parameters to be
adjusted.
The P-753 is operated near to its resonant frequency.
If you notice oscillation:
In closed-loop operation, switch off the servo mode immediately.
In open-loop operation, stop the P-753 immediately.
INFORMATION
The positive direction of motion of the axis is specified in the product view (p. 10).
INFORMATION
Sound and vibration (e.g., footfall, knocks) can be transmitted to the P-753 and can affect its
performance with regard to position stability.
Avoid sound and vibration while the P-753 is being operated.
6.2 Operating the P-753
Follow the instructions in the manual for the electronics (p. 11) used for startup and
operation of the P-753.
26 Version: 1.0.1 PZ254E P-753 Positioning Systems
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6 Startup and Operation
6.3 Discharging the P-753
The P-753 must be discharged in the following cases:
Before installation
If the P-753 is not used and the controller remains switched on to ensure temperature
stability
Before demounting (e.g., before cleaning and transporting the P-753 and for
modifications)
The P-753 is discharged via the internal discharge resistor of the controller from PI.
Discharging a positioner that is connected to the controller
In closed-loop operation:
1. Switch off the servo mode on the controller.
2. Set the piezo voltage to 0 V on the controller.
In open-loop operation:
Set the piezo voltage to 0 V on the controller.
Discharging a positioner that is not connected to the controller
Connect the positioner to the switched-off controller from PI.
P-753 Positioning Systems PZ254E Version: 1.0.1 27
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7 Maintenance
Cleaning the P-753 ....................................................................................................................... 29
7
Maintenance
In this Chapter
General Notes on Maintenance ................................................................................................... 29
7.1 General Notes on Maintenance
NOTICE
Misalignment from loosening screws on the base body!
The P-753 is maintenance-free and precisely aligned. Loosened screws on the base body cause
a loss in positioning accuracy.
Do not loosen any screws on the base body.
7.2 Cleaning the P-753
NOTICE
Damage from ultrasonic cleaning!
Ultrasonic cleaning can damage the P-753.
Do not do any ultrasonic cleaning.
Requirements
You have discharged the piezo actuators of the P-753 (p. 27).
You have disconnected the P-753 from the electronics.
Cleaning the P-753
Clean the surfaces of the P-753 with a cloth dampened with a mild cleanser or
disinfectant (e.g., isopropyl alcohol).
P-753 Positioning Systems PZ254E Version: 1.0.1 29
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Page 35
8 Troubleshooting
8
Troubleshooting
Problem Possible causes Solution
No or limited
motion
Cable not connected
correctly
Excessive load
Zero shift of the sensor for
the following reasons:
Load in direction of
motion
Ambient/operating
temperature of the
positioner is far above
or below the calibration
temperature (21 °C to
24 °C)
Reduced accuracy Warping of the base body or
the motion platform
Check the cable connections.
Do not exceed the maximum permissible
stress and load capacities according to
the specifications (p.
Perform a zero-point adjustment of the
sensor (see controller manual).
Mount the P-753 only onto surfaces with
the following characteristics:
− Flatness of at least 10 μm
− The thermal expansion properties
are similar to those of the P-753
(e.g., surfaces made of aluminum).
Only fix loads with the following
characteristics onto the P-753:
− The contact surface of the load has a
flatness of at least 10 μm.
− The thermal expansion properties
are similar to those of the P-753
(e.g., loads made of aluminum).
35).
P-753 Positioning Systems PZ254E Version: 1.0.1 31
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8 Troubleshooting
P-753 or controller has been
When using positioners, whose ID chip
The positioner
Servo control parameters
Problem Possible causes Solution
replaced
(p. 12) does not contain any calibration data,
or LEMO plug connectors, axis displacement
has to be recalibrated after the P-753 or the
controller has been replaced.
Perform a recalibration of the axis
displacement (see controller manual) or
contact our customer service
department (p. 33).
Axes were mixed up during
connection (only with LEMO
connectors)
Pay attention to the assignment of the
axes when connecting the positioner to
the controller. This assignment is
indicated by labels on the devices.
The positioner is not
connected to the
corresponding controller
(only with several systems)
Pay attention to the assignment of the
devices when several systems are
connected. The assignment is indicated
on the calibration label of the controller
(see rear panel or bottom side), which
contains the serial number of the
positioner to be connected.
starts oscillating
or positions
inaccurately
incorrectly set because for
example, the load was
changed
corresponding motion axes immediately.
2. Check the settings of the servo control
parameters on the controller.
3. Adjust the servo control parameters on
the controller according to the load
change.
1. Switch off the servo mode of the
Open-loop operation near
the resonant frequency
In open-loop operation, operate the
positioner only with a frequency that is
below the resonant frequency.
If the problem that occurred with your system is not listed in the table above or cannot be
solved as described, contact our customer service department (p. 33).
32 Version: 1.0.1 PZ254E P-753 Positioning Systems
Page 37
9 Customer Service
9
Customer Service
For inquiries and orders, contact your PI sales engineer or send us an email ([email protected]).
If you have any questions concerning your system, provide the following information:
− Product and serial numbers of all products in the system
− Firmware version of the controller (if applicable)
− Version of the driver or the software (if applicable)
− Operating system on the PC (if applicable)
If possible: Take photographs or make videos of your system that can be sent to our
customer service department if requested.
The latest versions of the user manuals are available for download (p. 3) on our website.
P-753 Positioning Systems PZ254E Version: 1.0.1 33
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Page 39
10 Technical Data
Pin Assignment ............................................................................................................................ 41
10
Technical Data
In this Chapter
Specifications ............................................................................................................................... 35
Dimensions .................................................................................................................................. 38
Torque for Stainless Steel Screws (A2-70) ................................................................................... 41
10.1 Specifications
10.1.1 Data Table
Active axes X X X
Motion and positioning
Integrated sensor Capacitive Capacitive Capacitive
Travel range, closed loop 15 30 38 µm
Resolution, closed loop 0.1 0.2 0.25 nm typ.
Linearity error, closed loop 0.03 0.03 0.03 % typ.
Repeatability ±1 ±2 ±3 nm typ.
Pitch / yaw ±5 ±7 ±10 µrad typ.
Mechanical properties
Stiffness in motion
direction
Resonant frequency, no
load
Resonant frequency,
under load, 200 g
Push / pull force capacity
in motion direction
Load capacity (vertical /
horizontal operation)
Drive properties
Ceramic type PICMA® P-885 PICMA® P-885 PICMA® P-885
Electrical capacitance 1.5 3.1 4.6 µF ±20 %
P-753.1CD P-753.2CD P-753.3CD Unit Tolerance
45 24 16 N/µm ±20 %
5.6 3.7 2.9 kHz ±20 %
2.5 1.7 1.4 kHz ±20 %
100 / 20 100 / 20 100 / 20 N max.
10 / 2 10 / 2 10 / 2 kg max.
P-753 Positioning Systems PZ254E Version: 1.0.1 35
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10 Technical Data
P-753.1CD P-753.2CD P-753.3CD Unit Tolerance
Miscellaneous
Operating temperature
-20 to 80 -20 to 80 -20 to 80 °C
range
Material Steel Steel Steel
Dimensions 44 mm ×
30 mm ×
15 mm
62 mm ×
30 mm ×
15 mm
80 mm ×
30 mm ×
15 mm
Mass 0.16 0.215 0.26 kg ±5 %
Cable length 1.5 1.5 1.5 m ±10 mm
Sensor / voltage
connection
D-sub 7W2
(m)
D-sub 7W2
(m)
D-sub 7W2
(m)
Recommended electronics E-625, E-754 E-625, E-754 E-625, E-754
The resolution of the system is limited only by the noise of the amplifier and the measuring
technology because PI piezo nanopositioning systems are free of friction.
Versions with LEMO connector available as P-753.x1C.
Vacuum versions to 10
-9
hPa available as P-753.xUD.
Nonmagnetic versions available as P-753.xND.
All specifications based on room temperature (22 °C ±3 °C).
10.1.2 Maximum Ratings
P-753 positioners are designed for the following operating data in continuous operation:
Positioner Maximum operating
voltage
P-753.11C
P-753.1CD
P-753.21C
P-753.2CD
P-753.31C
P-753.3CD
* To prevent damage, it is recommended to operate the positioner with maximally one third of
the resonant frequency. If the positioner is operated with a load, the values are lower.
-20 to +120 V 1.9 kHz 5.4 W
-20 to +120 V 1.25 kHz 10.8 W
-20 to +120 V 1 kHz 16.2 W
Maximum operating
frequency (no load)*
Maximum power
consumption**
36 Version: 1.0.1 PZ254E P-753 Positioning Systems
** Corresponds to the power provided by the amplifier, which results in heating of the piezo
actuator to approximately 80 °C.
Page 41
10 Technical Data
Maximum altitude
2000 m
Relative humidity
Highest relative humidity 80 % for temperatures up to 31 °C
Operating temperature
–20 °C to 80 °C
Transport temperature
–25 °C to 85 °C
Degree of pollution
1
10.1.3 Ambient Conditions and Classifications
Pay attention to the following ambient conditions and classifications for the P-753:
Area of application For indoor use only
Air pressure 1100 hPa to 0.1 hPa
Decreasing linearly to 50 % relative humidity at 40 °C
Storage temperature –20 °C to 80 °C
Overvoltage category II
Protection class I
Degree of protection according to
IP20
IEC 60529
P-753 Positioning Systems PZ254E Version: 1.0.1 37
Page 42
10 Technical Data
10.2 Dimensions
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
38 Version: 1.0.1 PZ254E P-753 Positioning Systems
Figure 9: P-753.11C / P-753.1CD
Page 43
10 Technical Data
P-753 Positioning Systems PZ254E Version: 1.0.1 39
Figure 10: P-753.21C / P-753.2CD
Page 44
10 Technical Data
40 Version: 1.0.1 PZ254E P-753 Positioning Systems
Figure 11: P-753.31C / P-753.3CD
Page 45
10 Technical Data
M3
0.8 Nm
1.1 Nm
M2.5
0.3 Nm
0.4 Nm
10.3 Torque for Stainless Steel Screws (A2-70)
Screw size Minimum torque Maximum torque
M6 4 Nm 6 Nm
M5 2.5 Nm 3.5 Nm
M4 1.5 Nm 2.5 Nm
M2 0.15 Nm 0.2 Nm
M1.6 0.06 Nm 0.12 Nm
10.4 Pin Assignment
D-sub 7W2 connector (m)
Figure 12: D-sub 7W2 connector (m): Front with connections
P-753 Positioning Systems PZ254E Version: 1.0.1 41
Figure 13: D-sub connector: Example top view
Page 46
10 Technical Data
A1
PZT
Piezo voltage
A2
Probe
Probe sensor signal (nonmoving part of the
Housing
---
Shield
P
Probe
Probe sensor signal (nonmoving
Cable shield
T
Target
Target sensor signal (movable part
Cable shield
PZT
PZT
Piezo voltage
Piezo voltage ground on
Pin Signal Function
capacitive sensor)
1 Data ID chip Data line for ID chip
2 GND target and ID chip Ground of target and ID chip
3 GND PZT Piezo voltage ground
4 --- (Not connected)
5 Target Target sensor signal (movable part of the
capacitive sensor)
LEMO coaxial connectors
Figure 14: LEMO connectors: PZT, P and T
Connector Signal Function Connector shell
part of the capacitive sensor)
of the capacitive sensor)
cable shield
42 Version: 1.0.1 PZ254E P-753 Positioning Systems
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11 Old Equipment Disposal
11
Old Equipment Disposal
In accordance with EU law, electrical and electronic equipment may not be disposed of in EU
member states via the municipal residual waste.
Dispose of your old equipment according to international, national, and local rules and
regulations.
In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH &
Co. KG undertakes environmentally correct disposal of all old PI equipment made available on
the market after 13 August 2005 without charge.
Any old PI equipment can be sent free of charge to the following address:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstr. 1
D-76228 Karlsruhe, Germany
P-753 Positioning Systems PZ254E Version: 1.0.1 43
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12 EU Declaration of Conformity
12
EU Declaration of Conformity
For the P-753, an EU Declaration of Conformity has been issued in accordance with the
following European directives:
Low Voltage Directive
EMC Directive
RoHS Directive
The applied standards certifying the conformity are listed below.
Safety (Low Voltage Directive): EN 61010-1
EMC: EN 61326-1
RoHS: EN 50581
P-753 Positioning Systems PZ254E Version: 1.0.1 45
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