PI P-611.1S, P-611.10, P-611.2, P-611.2S, P-611.20 User Manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany

PZ253E

P-611 Positioning Systems

User Manual

Version: 1.1.0

Date: 25.03.2019

This document describes the following products:









P-611.1

Linear piezo positioning system
P-611.1S/.10

P-611.XZ / P-611.2

XZ and XYZ nanopositioner
P-611.2S/.20/.XZS/.XZ0

P-611.3

NanoCube® XYZ system
P-611.3S/.3SF/.3O/.3OF

P-611.Z

Piezo Z stage
P-611.ZS/.Z0

.1S/.10/.2S/.20/.XZS/.XZ0/.ZS/.Z0
= with LEMO connector(s)

.3S/.3SF/.3O/.3OF
= with D-sub connector

Phone [phone], Fax [phone], Email [email protected], www.pi.ws

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:

PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®

The patents held by PI are found in our patent list:
http://www.physikinstrumente.com/en/about-pi/patents

© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.

Original instructions
First printing: 25.03.2019
Document number: PZ253E, CBo, Version 1.1.0

Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

Contents

1 About this Document 1

1.1 Objective and Target Audience of this User Manual.................................................. 1

1.2 Symbols and Typographic Conventions...................................................................... 1

1.3 Figures ........................................................................................................................ 2

1.4 Other Applicable Documents ..................................................................................... 2

1.5 Downloading Manuals ................................................................................................ 3

2 Safety 5

2.1 Intended Use .............................................................................................................. 5

2.2 General Safety Instructions ........................................................................................ 6

2.3 Organizational Measures ............................................................................................ 7

3 Product Description 9

3.1 Model Overview ......................................................................................................... 9

3.2 Product View ............................................................................................................ 10

3.3 Product Labeling ....................................................................................................... 12

3.4 Scope of Delivery ...................................................................................................... 12

3.5 Suitable Electronics .................................................................................................. 13

3.6 Accessories ............................................................................................................... 13

3.7 Technical Features .................................................................................................... 13

3.7.1 PICMA® Piezo Actuators .............................................................................. 13

3.7.2 Flexure Guides ............................................................................................. 14

3.7.3 Strain Gauge Sensors (SGS) ......................................................................... 14

4 Unpacking 15

5 Installation 17

5.1 General Notes on Installation ................................................................................... 17

5.2 Connecting the P-611 to the Protective Earth Conductor ....................................... 18

5.3 Mounting the P-611 ................................................................................................. 20

5.4 Fixing the Load .......................................................................................................... 22

6 Startup and Operation 25

6.1 General Notes on Startup and Operation ................................................................ 25

6.2 Operating the P-611 ................................................................................................. 26

6.3 Discharging the P-611 ............................................................................................... 27

7 Maintenance 29

7.1 General Notes on Maintenance ............................................................................... 29

7.2 Cleaning the P-611 ................................................................................................... 29

8 Troubleshooting 31

9 Customer Service 33

10 Technical Data 35

10.1 Specifications ............................................................................................................ 35

10.1.1 Data Table .................................................................................................... 35

10.1.2 Maximum Ratings ........................................................................................ 39

10.1.3 Ambient Conditions and Classifications ...................................................... 40

10.2 Dimensions ............................................................................................................... 41

10.3 Torque for Stainless Steel Screws (A2-70) ................................................................ 48

10.4 Pin Assignment ......................................................................................................... 48

11 Old Equipment Disposal 51

12 EU Declaration of Conformity 53

1 About this Document

Downloading Manuals ................................................................................................................... 3

1

About this Document

In this Chapter

Objective and Target Audience of this User Manual ..................................................................... 1

Symbols and Typographic Conventions ......................................................................................... 1

Figures ............................................................................................................................................ 2

Other Applicable Documents ......................................................................................................... 2

1.1 Objective and Target Audience of this User Manual

This user manual contains the necessary information for the intended use of the P-611 (x stands
for the different models (p. 9)).

Basic knowledge of control technology, drive technologies and suitable safety measures is
assumed.

The latest versions of the user manuals are available for download (p. 3) on our website.

1.2 Symbols and Typographic Conventions

The following symbols and typographic conventions are used in this user manual:

NOTICE

CAUTION

Dangerous situation

Failure to comply could lead to minor injury.

 Precautionary measures for avoiding.

Dangerous situation

Failure to comply could cause damage to equipment.

 Precautionary measures for avoiding.

P-611 Positioning Systems PZ253E Version: 1.1.0 1

INFORMATION

Information for easier handling, tricks, tips, etc.

1 About this Document

Action consisting of one or several steps whose sequential order
List item

E-621 Piezo Amplifier/Servo Controller Module

PZ115E User Manual

E-625 Piezo Servo Controller

PZ166E User Manual

E-663 Piezo Amplifier

PZ69E User Manual

E-836 Piezo Amplifier

PZ250E User Manual

PIMikroMove

SM148E Software Manual

Symbol/
Label

1.

2.





p. 5 Cross-reference to page 5

RS-232 Labeling of an operating element on the product (example:

1.3 Figures

For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

Meaning

Action consisting of several steps whose sequential order must
be observed

is irrelevant

socket of the RS-232 interface)

Warning signs affixed to the product that refer to detailed
information in this manual.

1.4 Other Applicable Documents

The devices and software tools from PI mentioned in this documentation are described in their
own manuals.

The latest versions of the user manuals are available for download (p. 3) on our website.

Product Document

E-503 Piezo Amplifier Module PZ62E User Manual

E-505 Piezo Amplifier Module

E-610 Piezo Amplifier / Servo Controller (OEM Module) PZ70E User Manual

E-664 NanoCube® Piezo Controller PZ99E User Manual

E-665 Piezo Amplifier / Servo Controller PZ127E User Manual

E-727.x • E-727.xAP Digital Multi-Channel Piezo
Controller

E-727.xF Digital Multi-Channel Piezo Controller

E727T0005 User Manual

P-5xx / P-6xx / P-7xx Piezo Positioning Systems PZ240EK Short Instructions

2 Version: 1.1.0 PZ253E P-611 Positioning Systems

1 About this Document

If a manual is missing or problems occur with downloading:

1.5 Downloading Manuals

INFORMATION

 Contact our customer service department (p. 33).

INFORMATION

For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.

You need the product CD to get the access data.

For products with CD: Get access data

1. Insert the product CD into the PC drive.

2. Switch to the Manuals directory on the CD.

3. In the Manuals directory, open the Release News (file including releasenews in the file
name).

4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:

− Link to a page for registering and requesting the access data

− User name and password is specified

5. If the access data needs to be requested via a registration page:

a) Follow the link in the Release News.

b) Enter the required information in the browser window.

c) Click Show login data in the browser window.

d) Note the user name and password shown in the browser window.

Downloading manuals

If you have requested access data for protected contents via a registration page (see above):

 Click the links in the browser window to change to the content for your product and log

in using the access data that you received.

P-611 Positioning Systems PZ253E Version: 1.1.0 3

1 About this Document

General procedure:

1. Open the website www.pi.ws.

2. If access to the manuals is protected by a password:

a) Click Login.

b) Log in with the user name and password.

3. Click Search.

4. Enter the product number up to the period (e.g., P-611) or the product family (e.g.,
NanoCube®) into the search field.

5. Click Start search or press the Enter key.

6. Open the corresponding product detail page in the list of search results:

a) If necessary: Scroll down the list.

b) If necessary: Click Load more results at the bottom of the list.

c) Click the corresponding product in the list.

7. Click the Downloads tab.

The manuals are shown under Documentation.

8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

4 Version: 1.1.0 PZ253E P-611 Positioning Systems

2 Safety

Organizational Measures ............................................................................................................... 7

.2S/.20

in two axes horizontally

X, Y

.3S/.3SF/.3O/.3OF

in two axes horizontally and in one axis vertically

X, Y, Z

2

Safety

In this Chapter

Intended Use .................................................................................................................................. 5

General Safety Instructions............................................................................................................ 6

2.1 Intended Use

The P-611 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.

Based on its design and realization, the P-611 is intended for fine positioning as well as the fast
and precise motion of small objects. The specifications of the P-611 apply to horizontal
mounting. The motion is performed as follows depending on the model:

Model Motion Axis

.1S/.10 in one axis horizontally X

.XZS/.XZ0 in one axis horizontally and in one axis vertically X, Z

.ZS/.Z0 in one axis vertically Z

Vertical mounting is only possible under certain conditions.

The intended use of the P-611 is only possible in conjunction with suitable electronics (p. 13)
available from PI. The electronics are not included in the scope of delivery of the P-611.

The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must also be able to read out and process the signals
from the position sensors.

P-611 Positioning Systems PZ253E Version: 1.1.0 5

2 Safety

2.2 General Safety Instructions

The P-611 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-611.

 Use the P-611 for its intended purpose only, and only when it is in perfect technical

condition.

 Read the user manual.

 Eliminate any faults and malfunctions likely to affect safety immediately.

The operator is responsible for the correct installation and operation of the P-611.

The P-611 is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators can
remain charged for several hours. Touching or short-circuiting the contacts in the connector of
the P-611 can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.

 Do not open the P-611.

 Discharge the positioner's piezo actuators before installation:

Connect the positioner to the switched-off PI controller, which is equipped with an
internal discharge resistor.

 Do not pull the plug connector out of the electronics during operation.

Positioners with D-sub plug connector:

Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.

 Do not touch the contacts in the plug connector.

 Secure the plug connector of the positioner with screws against being pulled out of the

controller.

If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-611 in the case of malfunction or failure of the system. If touch voltages exist,
touching the P-611 can result in minor injuries from electric shock.

 Connect the P-611 to a protective earth conductor (p. 18) before startup.

 Do not remove the protective earth conductor during operation.

 If the protective earth conductor has to be removed temporarily (e.g., in the case of

modifications), reconnect the P-611 to the protective earth conductor before restarting.

6 Version: 1.1.0 PZ253E P-611 Positioning Systems

2 Safety

Mechanical forces can damage or misalign the P-611.

 Avoid impacts that affect the P-611.

 Do not drop the P-611.

 Do not exceed the maximum permissible stress and load capacities according to the

specifications (p. 35).

The P-611 is maintenance-free and achieves its positioning accuracy as a result of the optimum
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.

 Loosen screws only when instructed in this manual.

 Do not open the P-611.

 Grip the surfaces indicated on the P-611's base body (p. 15) only.

2.3 Organizational Measures

User manual

 Always keep this user manual available with the P-611.

The latest versions of the user manuals are available for download (p. 3) on our
website.

 Add all information from the manufacturer to the user manual, for example

supplements or technical notes.

 If you give the P-611 to other users, also include this user manual as well as other

relevant information provided by the manufacturer.

 Use the device only if the user manual is complete. Missing information due to an

incomplete user manual can result in minor injury and damage to equipment.

 Install and operate the P-611 only after you have read and understood this user

manual.

Personnel qualification

The P-611 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.

P-611 Positioning Systems PZ253E Version: 1.1.0 7

3 Product Description

Technical Features ....................................................................................................................... 13

P-611.1S

Linear nanopositioning system, 100 µm, strain gauge sensor

P-611.XZS

XZ nanopositioning system, 100 µm × 100 µm, strain gauge sensors

3

Product Description

In this Chapter

Model Overview ............................................................................................................................. 9

Product View ................................................................................................................................ 10

Product Labeling .......................................................................................................................... 12

Scope of Delivery ......................................................................................................................... 12

Suitable Electronics ...................................................................................................................... 13

Accessories ................................................................................................................................... 13

3.1 Model Overview

The following standard versions of the P-611 are available:

P-611.1: Linear piezo positioning system

Model Description

P-611.10 Linear nanopositioning system, 120 µm, without sensor

P-611.XZ / P-611.2: XZ and XYZ nanopositioner

Model Description

P-611.2S XY nanopositioning system, 100 µm × 100 µm, strain gauge sensors

P-611.20 XY nanopositioning system, 120 µm × 120 µm, without sensor

P-611.XZ0 XZ nanopositioning system, 120 µm × 120 µm, without sensor

P-611 Positioning Systems PZ253E Version: 1.1.0 9

3 Product Description

P-611.3: NanoCube® XYZ system

Model Description

P-611.3S NanoCube® XYZ nanopositioning system, 100 µm × 100 µm × 100 µm,

strain gauge sensors

P-611.3SF NanoCube® XYZ nanopositioning system, 100 µm × 100 µm × 100 µm,

strain gauge sensors, integrated fiber holder

P-611.3O NanoCube® XYZ nanopositioning system, 120 µm × 120 µm × 120 µm,

without sensor

P-611.3OF NanoCube® XYZ nanopositioning system, 120 µm × 120 µm × 120 µm,

without sensor, integrated fiber holder

P-611.Z: Piezo Z stage

Model Description

P-611.ZS Vertical nanopositioning stage, 100 µm, strain gauge sensor

P-611.Z0 Vertical nanopositioning stage, 120 µm, without sensor

3.2 Product View

The figures serve as examples and can differ from your positioner model.

10 Version: 1.1.0 PZ253E P-611 Positioning Systems

Figure 1: Example of product view

1 Motion platform
2 Base body
3 Protective earth connector
4 Cable exit

3 Product Description

P-611.1x

P-611.Zx

Direction of motion of the P-611

The arrows indicate the positive direction of motion in each case.

P-611.2x P-611.XZx

P-611.3x / P-611.3xF

P-611 Positioning Systems PZ253E Version: 1.1.0 11

3 Product Description

P-611

Positioner according to order (p. 9)

000036450

M4 screw set for protective earth, consisting of:

PZ240EK

Short instructions for piezo positioning systems

3.3 Product Labeling

Labeling Description

P-611.XZS Product name (example), the characters following the

123456789 Serial number (example), individual for each P-611

NanoCube® Brand name (.3x and .3xF models only)

Country of origin: Germany Country of origin

period refer to the model

Meaning of each position (from the left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive number

Warning sign "Pay attention to the manual!"

WWW.PI.WS Manufacturer's address (website)

Figure 2: "Residual Voltage" warning sign on the connector of the P-611

"Residual Voltage" warning: Risk of electric shock (p. 6) for models with D-sub connector

3.4 Scope of Delivery

Old equipment disposal (p. 51)

Manufacturer's logo

CE conformity mark

Symbol for the protective earth conductor, marks the
protective earth connection of the P-611 (p. 18)

Product number Description

 1 flat-head screw with cross recess, M4x8, ISO 7045
 2 safety washers
 2 flat washers

12 Version: 1.1.0 PZ253E P-611 Positioning Systems

3 Product Description

E-621 Piezo Amplifier/Servo Controller Module

D-sub 7W2

1

E-727.x • E-727.xAP Digital Multi-Channel Piezo

D-sub 25W3

3

P-895.1LDC

Adapter cable LEMO to D-sub 7W2 (m) for piezo actuator nanopositioning

3.5 Suitable Electronics

You need suitable electronics to operate a P-611. Selecting the device depends on the
application and the connectors available.

Electronics Connector* Channels**

E-505 Piezo Amplifier Module LEMO 1

E-610 Piezo Amplifier / Servo Controller (OEM module) LEMO 1

E-836 Piezo Amplifier LEMO 1

E-503 Piezo Amplifier Module LEMO 3

E-663 Piezo Amplifier LEMO 3

E-625 Piezo Servo Controller D-sub 7W2 1

E-665 Piezo Amplifier / Servo Controller D-sub 7W2 1

E-664 NanoCube® Piezo Controller D-sub 25 3

Controller

E-727.xF Digital Multi-Channel Piezo Controller D-sub 25W3 3

* In some cases, adapter cables (p. 13) are necessary for connecting.
** When using single-channel electronics, each motion axis requires its own individual
electronics.

3.6 Accessories

Adapter cables for models with LEMO plug connectors

Product number Description

systems with capacitive sensors, 1 channel, length: 0.3 m.

P-895.3LDC Adapter cable LEMO to D-sub 25W3 (m) for piezo actuator nanopositioning

systems with capacitive sensors, 3 channels, length: 0.3 m.

 To order, contact our customer service department (p. 33).

3.7 Technical Features

3.7.1 PICMA® Piezo Actuators

P-611 positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,

P-611 Positioning Systems PZ253E Version: 1.1.0 13

and wear.

3 Product Description

3.7.2 Flexure Guides

P-611 positioners have flexure guides for friction-free motion and high guiding accuracy.

A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100 % vacuum compatible, function in a wide temperature range and do
not require any lubricants.

3.7.3 Strain Gauge Sensors (SGS)

Strain gauge sensors derive the position information from their expansion. They are attached at
a suitable position in the drivetrain, where they measure the displacement of the positioner's
moving part against the base body. This type of position measuring is indirect and requires
contact, because the position of the motion platform is derived from a measurement on the
lever, guide or piezo stack.

The sensors operate in thermally drift-free full bridge circuitry and therefore ensure optimum
position stability in the nanometer range.

14 Version: 1.1.0 PZ253E P-611 Positioning Systems

4 Unpacking

xure joints of the P-611 as well

4

Unpacking

NOTICE

Mechanical overload from incorrect handling!

Impermissible mechanical loading of the motion platform as well as certain surfaces of the
P-611 can lead to damage to the piezo actuators, sensors and fle
as to loss of accuracy. In addition, the P-611 can be damaged from tensile forces on the cable
exit and bending of the connecting cable.

 Grip the surfaces indicated on the P-611's base body (p. 15) only.
 Avoid tensile forces on the cable exit and do not bend the cable.

The figure serves as an example and can differ from your positioner model.

Figure 3: P-611: Holding surfaces to be used on the base body (see arrows)

Areas to be protected against the application of force:

- Motion platform (framed with a dashed line)

- Nonanodized surfaces (crosshatched)

1. Unpack the P-611 with care:

a) Spread the foam packaging apart with one hand.

b) Grip the positioner on the surfaces marked by the arrows.

c) Grip all of the positioner's connecting cables with your other hand.

d) At the same time, remove the positioner and the connecting cables carefully from

the foam packaging.

2. Compare the contents of the shipment with the items listed in the contract and the
delivery note.

3. Inspect the contents for signs of damage. If there is any sign of damage or missing parts,
contact PI immediately.

4. Keep all packaging materials in case the product needs to be returned.

P-611 Positioning Systems PZ253E Version: 1.1.0 15

4 Unpacking

16 Version: 1.1.0 PZ253E P-611 Positioning Systems

5 Installation

Fixing the Load ............................................................................................................................. 22

damage to the piezo actuators, sensors and flexure joints of the P-611 as well

5

Installation

In this Chapter

General Notes on Installation ...................................................................................................... 17

Connecting the P-611 to the Protective Earth Conductor ........................................................... 18

Mounting the P-611 ..................................................................................................................... 20

5.1 General Notes on Installation

CAUTION

Dangerous voltage and residual charge in piezo actuators!

The P-611 is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators
can remain charged for several hours. Touching or short-circuiting the contacts in the
connector of the P-611 can lead to minor injuries from electric shock. The piezo actuators can
be destroyed by an abrupt contraction.

 Do not open the P-611.
 Discharge the positioner's piezo actuators before installation:

Connect the positioner to the switched-off PI controller, which is equipped with an internal
discharge resistor.

 Do not pull the plug connector out of the electronics during operation.

Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and

minor injuries.

 Do not touch the contacts in the plug connector.
 Secure the plug connector of the positioner with screws against being pulled out of the

controller.

NOTICE

Mechanical overload from incorrect handling!

Impermissible mechanical loading of the motion platform as well as certain surfaces of the
P-611 can lead to
as to loss of accuracy. In addition, the P-611 can be damaged from tensile forces on the cable
exit and bending of the connecting cable.

 Grip the surfaces indicated on the P-611's base body (p. 15) only.
 Avoid tensile forces on the cable exit and do not bend the cable.

P-611 Positioning Systems PZ253E Version: 1.1.0 17

5 Installation

Extension cables can reduce the positioning accuracy of the P-611 or affect sensor processing

In the case of P-611 positioners with D-sub connectors, ground loops can occur when the

NOTICE

Damage due to unsuitable cables!

Unsuitable cables can damage the P-611 and the electronics.

 Use cables provided by PI only to connect the P-611 to the electronics.

NOTICE

Damage due to improper mounting!

Improper mounting of the P-611 or incorrectly mounted parts can damage the P-611.

 Mount the P-611 and the loads only onto the mounting fixtures (holes) intended for this

purpose.

NOTICE

Damage due to incorrectly tightened screws!

Incorrectly tightened screws can cause damage.

 Pay attention to the torque range (p. 48) specified for the screws used during installation.

INFORMATION

by the electronics.

 Do not use extension cables. If you need longer cables, contact our customer service

department (p. 33).

5.2 Connecting the P-611 to the Protective Earth Conductor

INFORMATION

positioner is grounded via its protective earth connection as well as by the shield of the
connecting cable for the electronics.

 If a ground loop occurs, contact our customer service department (p. 33).

INFORMATION

 Pay attention to the applicable standards for connecting the protective earth conductor.

The P-611 has an M4 hole for attaching the protective earth conductor . This hole is marked
with the symbol for the protective earth conductor

. For the exact position of the hole, see

"Dimensions" (p. 41).

18 Version: 1.1.0 PZ253E P-611 Positioning Systems

5 Installation

Requirements

 You have read and understood the general notes on installation (p. 17).

 The positioner is not connected to the electronics.

Tools and accessories

 Suitable protective earth conductor: Cable cross section ≥ 0.75 mm2

 M4 protective earth screw set (p. 12) supplied for connecting the protective earth

conductor

 Suitable screwdriver

Figure 4: Connecting the protective earth conductor (profile view)

1 Base body of the P-611
2 Flat washer
3 Safety washer
4 Screw
5 Cable lug
6 Protective earth conductor

Connecting the P-611 to the protective earth conductor

1. If necessary, attach a suitable cable lug to the protective earth conductor.

2. Use the M4 screw (together with the washers and self-locking washers) to affix the
cable lug of the protective earth conductor to the protective earth connection of the
P-611 as shown in the profile view.

3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm.

4. Make sure that the contact resistance at all connection points relevant for connecting
the protective earth conductor is <0.1 Ω at 25 A.

P-611 Positioning Systems PZ253E Version: 1.1.0 19

5 Installation

5.3 Mounting the P-611

NOTICE

Warping of the P-611 when mounted on uneven surfaces!

The P-611 could warp if mounted on an uneven surface. Warping reduces the accuracy.

 Mount the P-611 onto an even surface. The recommended flatness of the surface is

≤20 µm.

 For applications with large temperature changes:

Mount the P-611 only onto surfaces that have the same or similar thermal expansion
properties as the P-611.

NOTICE

Tensile stress on piezo actuator with vertical mounting!

When the positioner is mounted vertically, certain alignments can cause tensile stress, which
reduces the preload and destroys the piezo actuator.

 If you want to mount the P-611 vertically, contact our customer service department (p. 33

The following figures serve as examples and can differ from your positioner model.

Figure 5: P-611.1x and .2x: Holes for mounting the positioner onto an underlying surface

Number of mounting holes:
P-611.1x: 4
P-611.2x: 3

).

20 Version: 1.1.0 PZ253E P-611 Positioning Systems

5 Installation

Figure 6: P-611.XZx, .3x, .3xF, and .Zx: One of four recesses in the base body for mounting the

positioner onto an underlying surface

Requirements

 You have read and understood the general notes on installation (p. 17).

Tools and accessories

 When mounting a P-611.2x:

− 3 screws of suitable size and length (p. 41)

 When mounting other models of the P-611:

− 4 screws of suitable size and length (p. 41)

 Suitable screwdriver

Mounting the P-611

1. Position the P-611 on a flat underlying surface.

2. Insert the screws:

When mounting a P-611.1x or .2x:

− Insert the screws from above into the countersunk holes in the base body of the

P-611.

When mounting a P-611.XZx, .3x, .3xF or .Zx:

− Insert the screws into the recesses in the base body of the P-611 from the side.

P-611 Positioning Systems PZ253E Version: 1.1.0 21

3. Tighten the screws. Pay attention to the specified torque range (p. 48) while doing so.

5 Installation

5.4 Fixing the Load

NOTICE

Mechanical overload due to high torques and high loads!

When affixing the load, high torques and high loads can overload the motion platform of the
P-611. Mechanical overload can cause damage to the piezo actuators, sensors, and flexures of
the P-611 and lead to loss in accuracy.

 Avoid torques >50 Ncm on the motion platform.
 Do not exceed the maximum permissible stress and load capacities according to the

specifications (p. 35).

 Pay attention to the torque range (p. 48) specified for the screws used during installation.

NOTICE

Warping of the P-611 when fixing loads with an uneven contact surface!

Fixing loads to an uneven contact surface could warp the P-611. Warping reduces the accuracy.

 Only fix loads on the P-611 whose contact surface with the motion platform of the P-611

has a flatness of at least 20 μm.

 For applications with large temperature changes:

Only fix loads to the P-611 that have the same or similar thermal expansion properties as
the P-611.

NOTICE

Center of load at unsuitable position!

If the center of load is located too far away from the center of the motion platform (e.g., tall
loads and unwanted lever effect), the P-611 can be damaged by high strain on the flexure
guides, high torques, and oscillation, especially when operated dynamically.

 If the center of the load to be affixed is too far above or to the side of the motion platform,

adjust the controller settings before startup or contact our customer service department
(p. 33).

NOTICE

Excessively long screws!

The P-611 can be damaged by excessively long screws.

 Note the depth of the mounting holes in the motion platform (p. 41).
 Use screws of the correct length for the respective mounting holes only.

22 Version: 1.1.0 PZ253E P-611 Positioning Systems

5 Installation

INFORMATION

Positive direction of axis motion is specified in the product view (p. 10).

Center of load at the optimum position:

Figure 7: Example of an optimally placed load

Center of load at an unsuitable position:

Figure 8: Tall load and center of load too far above the motion platform

Figure 9: Unwanted lever effect and center of load on the side of the motion platform

Requirements

 You have read and understood the general notes on installation (p. 17).

 The P-611 is not connected to the electronics.

P-611 Positioning Systems PZ253E Version: 1.1.0 23

5 Installation

Tools and accessories

 Screws of suitable size and length (p. 41)

 Suitable tools

Fixing the load

 Fix loads only by inserting suitable screws into the threaded holes (p. 41) provided.

Pay attention to the torque range (p. 48) specified for the screws, and avoid torques
>50 Ncm on the motion platform.

 Fix the load so that its load center is in the middle of the motion platform.

24 Version: 1.1.0 PZ253E P-611 Positioning Systems

6 Startup and Operation

Discharging the P-611 .................................................................................................................. 27

When the P-611 is not used but the electronics remain switched on to ensure temperature

6

Startup and Operation

In this Chapter

General Notes on Startup and Operation .................................................................................... 25

Operating the P-611 ..................................................................................................................... 26

6.1 General Notes on Startup and Operation

CAUTION

Risk of electric shock if the protective earth conductor is not connected!

If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-611 in the case of malfunction or failure of the system. If touch voltages exist,
touching the P-611 can result in minor injuries from electric shock.

 Connect the P-611 to a protective earth conductor (p. 18) before startup.
 Do not remove the protective earth conductor during operation.
 If the protective earth conductor has to be removed temporarily (e.g., in the case of

modifications), reconnect the P-611 to the protective earth conductor before restarting.

NOTICE

Destruction of the piezo actuator due to electric flashovers!

Using the P-611 in environments that increase the electrical conductivity can lead to the
destruction of the piezo actuator by electric flashovers. Electric flashovers can be caused by
moisture, high humidity, liquids, and conductive materials (e.g., metal dust). In addition,
electric flashovers can also occur in certain air pressure ranges due to the increased
conductivity of the air.

 Avoid operating the P-611 in environments that can increase the electric conductivity.
 Operate the P-611 only within the permissible ambient conditions and classifications

(p. 40).

NOTICE

Reduced lifetime due to permanently high voltage!

Applying a high static voltage to piezo actuators continuously reduces the lifetime of the piezo
ceramic.



stability, discharge the P-611 (p. 27).

P-611 Positioning Systems PZ253E Version: 1.1.0 25

6 Startup and Operation

NOTICE

Operating voltage too high or incorrectly connected!

Operating voltages that are too high or incorrectly connected can cause damage to the P-611.

 Operate the P-611 only with controllers/drivers and original accessories from PI.
 Do not exceed the operating voltage range (p. 39) for which the P-611 is specified.
 Operate the P-611 only when the operating voltage is properly connected; see "Pin

Assignment" (p. 48).

NOTICE

Uncontrolled oscillation!

Oscillation can cause irreparable damage to the P-611. Oscillation is indicated by a humming
noise and can be caused by the following:

 A change in the load and/or dynamics requires the servo control parameters to be

adjusted.

 The P-611 is operated near to its resonant frequency.

If you notice oscillation:

 In closed-loop operation, switch off the servo mode immediately.
 In open-loop operation, stop the P-611 immediately.

INFORMATION

Positive direction of axis motion is specified in the product view (p. 10).

INFORMATION

Sound and vibration (e.g., footfall, knocks) can be transmitted to the P-611 and can affect its
performance with regard to position stability.

 Avoid sound and vibration while the P-611 is being operated.

6.2 Operating the P-611

 Follow the instructions in the manual for the electronics (p. 13) used for startup and

operation of the P-611.

26 Version: 1.1.0 PZ253E P-611 Positioning Systems

6 Startup and Operation

6.3 Discharging the P-611

The P-611 must be discharged in the following cases:

 Before installation

 If the P-611 is not used and the controller remains switched on to ensure temperature

stability

 Before demounting (e.g., before cleaning and transporting the P-611 and for

modifications)

The P-611 is discharged via the internal discharge resistor of the controller from PI.

Discharging a positioner connected to the controller

In closed-loop operation:

1. Switch off the servo mode on the controller.

2. Set the piezo voltage to 0 V on the controller.

In open-loop operation:

 Set the piezo voltage to 0 V on the controller.

Discharging a positioner not connected to the controller

 Connect the positioner to the switched-off controller from PI.

P-611 Positioning Systems PZ253E Version: 1.1.0 27

7 Maintenance

Cleaning the P-611 ....................................................................................................................... 29

7

Maintenance

In this Chapter

General Notes on Maintenance ................................................................................................... 29

7.1 General Notes on Maintenance

NOTICE

Misalignment due to loosening screws!

The P-611 is maintenance-free and achieves its positioning accuracy as a result of the optimum
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.

 Loosen screws only when instructed in this manual.
 Do not open the P-611.

7.2 Cleaning the P-611

NOTICE

Damage from ultrasonic cleaning!

Ultrasonic cleaning can damage the P-611.

 Do not do any ultrasonic cleaning.

Requirements

 You have discharged the piezo actuators of the P-611 (p. 27).

 You have disconnected the P-611 from the electronics.

Cleaning the P-611

 Clean the surfaces of the P-611 with a cloth dampened with a mild cleanser or

disinfectant (e.g., isopropyl alcohol).

P-611 Positioning Systems PZ253E Version: 1.1.0 29

8 Troubleshooting

P-611 or controller has

It is necessary to recalibrate the axis

8

Troubleshooting

Problem Possible causes Solution

No or limited
motion

Cable not connected
correctly

Excessive load  Do not exceed the maximum permissible

Zero shift of the sensor for
the following reasons:

 Load in direction of

motion

 Ambient/operating

temperature of the
positioner is far above
or below the calibration
temperature (21 °C to
24 °C)

Reduced accuracy The base body or the

motion platform is warped

 Check the cable connections.

stress and load capacities according to
the specifications (p.

 Adjust the zero-point of the sensor (see

controller manual).

 Mount the P-611 onto surfaces with the

following characteristics only:

− Flatness of at least 20 μm

− The thermal expansion

properties are similar to those of the
P-611 (e.g., surfaces made of
aluminum).

 Mount loads onto the P-611 with the

following characteristics only:

− The contact surface of the load has a
flatness of at least 20 μm.

− The thermal expansion
properties are similar to those of the
P-611 (e.g., loads made of aluminum).

35).

P-611 Positioning Systems PZ253E Version: 1.1.0 31

been replaced

displacement after replacing the P-611 or
controller.

 Recalibrate the axis displacement (see

controller manual) or contact our
customer service department (p. 33).

8 Troubleshooting

Axes were mixed up during

Pay attention to the assignment of the

Problem Possible causes Solution



connection (only with LEMO
connectors)

axes when connecting the positioner to
the controller. This assignment is
indicated by labels on the devices.

The positioner is not
connected to the
corresponding controller
(only when there are
several systems)

 Pay attention to the assignment of the

devices when several systems are
connected. The assignment is indicated
on the calibration label of the controller
(see rear panel or bottom), which
contains the serial number of the
positioner to be connected.

The positioner
starts oscillating
or positions
inaccurately

Servo control parameters
incorrectly set because for
example, the load was
changed

1. Switch off the servo mode of the
corresponding motion axes immediately.

2. Check the settings of the servo control
parameters on the controller.

3. Adjust the servo control parameters on
the controller according to the load
change.

Open-loop operation near
the resonant frequency

 In open-loop operation, operate the

positioner only with a frequency that is
below the resonant frequency.

If the problem with your system is not listed in the table above or cannot be solved as
described, contact our customer service department (p. 33).

32 Version: 1.1.0 PZ253E P-611 Positioning Systems

9 Customer Service

9

Customer Service

For inquiries and orders, contact your PI sales engineer or send us an email ([email protected]).

 If you have any questions concerning your system, provide the following information:

− Product and serial numbers of all products in the system

− Firmware version of the controller (if applicable)

− Version of the driver or the software (if applicable)

− Operating system on the PC (if applicable)

 If possible: Take photographs or make videos of your system that can be sent to our

customer service department if requested.

The latest versions of the user manuals are available for download (p. 3) on our website.

P-611 Positioning Systems PZ253E Version: 1.1.0 33

10 Technical Data

Pin Assignment ............................................................................................................................ 48

Resonant frequency, no load

400

400

Hz

±20 %

10

Technical Data

In this Chapter

Specifications ............................................................................................................................... 35

Dimensions .................................................................................................................................. 41

Torque for Stainless Steel Screws (A2-70) ................................................................................... 48

10.1 Specifications

10.1.1 Data Table

Active axes X X

Motion and positioning

Integrated sensor SGS -

Travel range at -20 to +120 V, open loop 120 120 µm +20 % / -0 %

Travel range, closed loop 100 - µm

Resolution, open loop 0.2 0.2 nm typ.

Resolution, closed loop 2 - nm typ.

Linearity error, closed loop 0.1 - % typ.

Repeatability <10 - nm typ.

Pitch ±5 ±5 µrad typ.

Yaw ±20 ±20 µrad typ.

Flatness 10 10 nm typ.

Mechanical properties

Stiffness in motion direction 0.2 0.2 N/µm ±20 %

Resonant frequency, under load, 30 g 300 300 Hz ±20 %

Resonant frequency, under load, 100 g 195 195 Hz ±20 %

Push/pull force capacity in motion direction 15 / 10 15 / 10 N max.

Load capacity 15 15 N max.

Drive properties

Ceramic type PICMA® P-885 PICMA® P-885

Electrical capacitance 1.5 1.5 µF ±20 %

P-611.1S P-611.10 Unit Tolerance

P-611 Positioning Systems PZ253E Version: 1.1.0 35

10 Technical Data

Operating temperature range

-20 to 80

-20 to 80

°C

Mass

0.135

0.135

kg

±5 %

Sensor connection

LEMO

-

Tilt θX (motion in Z)

– – ±10

±10

µrad

typ.

Miscellaneous

Material Aluminum, steel Aluminum, steel

Dimensions

Cable length 1.5 1.5 m ±10 mm

Voltage connection LEMO LEMO

Recommended electronics

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI
piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

P-611.1S P-611.10 Unit Tolerance

44 mm × 44 mm ×
17 mm

E-503, E-505, E-610,
E-621, E-625, E-665,
E-836

44 mm × 44 mm ×
17 mm

E-503, E-505, E-610,
E-621, E-625, E-665,
E-836

Active axes X, Y X, Y X, Z X, Z

Motion and positioning

Integrated sensor SGS – SGS –

Travel range at -20 to 120 V,
open loop

Travel range, closed loop 100 – 100 – µm

Resolution, open loop 0.2 0.2 0.2 0.2 nm typ.

Resolution, closed loop 2 – 2 – nm typ.

Linearity error 0.1 – 0.1 – % typ.

Repeatability <10 – <10 – nm typ.

Pitch in X, Y ±5 ±5 ±5 ±5 µrad typ.

P-611.2S P-611.20 P-611.XZS P-611.XZ0 Unit Tolerance

120 120 120 120 µm +20 % /

-0 %

36 Version: 1.1.0 PZ253E P-611 Positioning Systems

Yaw in X ±20 ±20 ±20 ±20 µrad typ.

Yaw in Y ±10 ±10 – – µrad typ.

Tilt θY (motion in Z) – – ±10 ±10 µrad typ.

Mechanical properties

Stiffness 0.2 0.2 0.2

Resonant frequency, no load X: 345;

Resonant frequency, under
load, 30 g

Resonant frequency, under
load, 100 g

Push/pull force capacity in
motion direction

Load capacity 15 15 15 15 N max.

0.2

Z: 0.35

X: 345;

Y: 270

X: 270;
Y: 225

X: 180;
Y: 165

15 / 10 15 / 10 15 / 10 15 / 10 N max.

Y: 270

X: 270;
Y: 225

X: 180;
Y: 165

X: 365;
Z: 340

X: 280;
Z: 295

X: 185;
Z: 230

Z: 0.35

X: 365;
Z: 340

X: 280;
Z: 295

X: 185;
Z: 230

N/µm ±20 %

Hz ±20 %

Hz ±20 %

Hz ±20 %

10 Technical Data

Ceramic type
Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Active axes

X, Y, Z

X, Y, Z

Travel range, closed loop

100 / axis

–

µm

Yaw in Y

±10

±10

µrad

typ.

270 / 185 / 230

270 / 185 / 230

Hz

±20 %

Drive properties

Electrical capacitance 1.5 1.5 1.5 1.5 µF ±20 %

Miscellaneous

Material

Dimensions

Mass 0.235 0.235 0.27 0.27 kg ±5 %

Cable length 1.5 1.5 1.5 1.5 m ±10 mm

Sensor connection LEMO – LEMO –

Voltage connection LEMO LEMO LEMO LEMO

Recommended electronics

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI
piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

P-611.2S P-611.20 P-611.XZS P-611.XZ0 Unit Tolerance

PICMA®
P-885

Aluminum,
steel

44 mm ×
44 mm ×
25 mm

E-503, E-505,
E-663, E-664,
E-727

PICMA®
P-885

Aluminum,
steel

44 mm ×
44 mm ×
25 mm

E-503, E-505,
E-663, E-664,
E-727

PICMA®
P-885

Aluminum,
steel

44 mm ×
44 mm ×
34 mm

E-503, E-505,
E-663, E-664,
E-727

PICMA®
P-885

Aluminum,
steel

44 mm ×
44 mm ×
34 mm

E-503, E-505,
E-663, E-664,
E-727

Motion and positioning

Integrated sensor SGS

Travel range at -20 to 120 V, open loop 120 / axis 120 / axis µm +20 % / -0 %

Resolution, open loop 0.2 0.2 nm typ.

Resolution, closed loop 1 – nm typ.

Linearity error 0.1 – % typ.

Repeatability <10 – nm typ.

Pitch in X, Y ±5 ±5 µrad typ.

Tilt θX (motion in Z) ±10 ±10 µrad typ.

Yaw in X ±20 ±20 µrad typ.

Tilt θY (motion in Z) ±10 ±10 µrad typ.

Mechanical properties

Stiffness 0.3 0.3 N/µm ±20 %

Resonant frequency X / Y / Z, no load 350 / 220 / 250 350 / 220 / 250 Hz ±20 %

Resonant frequency under load in X / Y / Z,
30 g

Resonant frequency under load in X / Y / Z,
100 g

Push/pull force capacity in motion direction 15 / 10 15 / 10 N max.

Load capacity 15 15 N max.

P-611.3S
P-611.3SF

180 / 135 / 200 180 / 135 / 200 Hz ±20 %

P-611.3O
P-611.3OF

Unit Tolerance

P-611 Positioning Systems PZ253E Version: 1.1.0 37

10 Technical Data

Drive properties

Ceramic type PICMA® P-885 PICMA® P-885

P-611.3S
P-611.3SF

P-611.3O
P-611.3OF

Unit Tolerance

Electrical capacitance 1.5 1.5 µF ±20 %

Miscellaneous

Operating temperature range -20 to 80 -20 to 80 °C

Material Aluminum, steel Aluminum, steel

Dimensions P-611.3S:

44 mm × 44 mm ×

43.2 mm
P-611.3SF:
48 mm × 50 mm ×

44.2 mm

P-611.3O:
44 mm × 44 mm ×

43.2 mm
P-611.3OF:
44 mm × 50 mm ×

44.2 mm

Mass 0.32 0.32 kg ±5 %

Cable length 1.5 1.5 m ±10 mm

Voltage connection D-sub 25 (m) D-sub 25 (m)

Sensor connection D-sub 25 (m) –

Recommended electronics

E-503, E-505, E-663,
E-664, E-727

E-503, E-505, E-663,
E-664, E-727

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI
piezo nanopositioning systems are free of friction.

Adapter cables with LEMO connectors for sensor and operating voltage available.

All specifications based on room temperature (22 °C ±3 °C).

Active axes Z Z

Motion and positioning

Integrated sensor SGS -

P-611.ZS P-611.Z0 Unit Tolerance

Travel range at -20 to +120 V, open loop 120 120 µm +20 % / -0 %

Travel range, closed loop 100 - µm

Resolution, open loop 0.2 0.2 nm typ.

Resolution, closed loop 2 - nm typ.

Linearity error 0.1 - % typ.

Repeatability <10 - nm typ.

Tilt θZ (motion in Z) ±5 ±5 µrad typ.

Tilt θX (motion in Z) ±20 ±20 µrad typ.

Tilt θY (motion in Z) ±5 ±5 µrad typ.

Mechanical properties

Stiffness 0.45 0.45 N/µm ±20 %

Resonant frequency, no load 460 460 Hz ±20 %

Resonant frequency under load, 30 g 375 375 Hz ±20 %

Resonant frequency under load, 100 g 265 265 Hz ±20 %

Push/pull force capacity 15 / 10 15 / 10 N max.

38 Version: 1.1.0 PZ253E P-611 Positioning Systems

10 Technical Data

Ceramic type

PICMA® P-885

PICMA® P-885

Recommended electronics

Drive properties

Electrical capacitance 1.5 1.5 µF ±20 %

Miscellaneous

Operating temperature range -20 to 80 -20 to 80 °C

Material Aluminum, steel Aluminum, steel

Dimensions

Mass 176 176 g ±5 %

Cable length 1.5 1.5 m ±10 mm

Sensor connection LEMO -

Voltage connection LEMO LEMO

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI
piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

System properties

System configuration: P-611.ZS and E-665.SR controller with 30 g load

Small signal bandwidth: 40 Hz

Settling time (10 % step width): 25 ms

P-611.ZS P-611.Z0 Unit Tolerance

44 mm × 44 mm ×
27 mm

E-610, E-625, E-665,
E-836

44 mm × 44 mm ×
27 mm

E-610, E-625, E-665,
E-836

10.1.2 Maximum Ratings

P-611 positioners are designed for the following operating data:

Positioner Maximum operating

voltage

P-611.1S
P-611.10

P-611.2S
P-611.20

P-611.XZS
P-611.XZ0

P-611.3S
P-611.3SF
P-611.3O
P-611.3OF

P-611.ZS
P-611.Z0

-20 to +120 V 133 Hz 3.9 W

-20 to +120 V 115 Hz (in X)

-20 to +120 V 122 Hz (in X)

-20 to +120 V 117 Hz (in X)

-20 to +120 V 153 Hz 4.5 W

Maximum operating
frequency (no load)

90 Hz (in Y)

113 Hz (in Z)

73 Hz (in Y)
83 Hz (in Z)

Maximum power
consumption

3.4 W (in X)

2.6 W (in Y)

3.6 W (in X)

3.3 W (in Z)

3.4 W (in X)

2.1 W (in Y)

2.4 W (in Z)

P-611 Positioning Systems PZ253E Version: 1.1.0 39

10 Technical Data

Maximum altitude

2000 m

Relative humidity

Highest relative humidity 80 % for temperatures up to 31 °C
Operating temperature

–20 °C to 80 °C

Overvoltage category

II

Degree of pollution

1

10.1.3 Ambient Conditions and Classifications

Pay attention to the following ambient conditions and classifications for the P-611:

Area of application For indoor use only

Air pressure 1100 hPa to 0.1 hPa

Decreasing linearly to 50 % relative humidity at 40 °C

Storage temperature –20 °C to 80 °C

Transport temperature –25 °C to 85 °C

Protection class I

Degree of protection

IP20

according to IEC 60529

40 Version: 1.1.0 PZ253E P-611 Positioning Systems

10 Technical Data

10.2 Dimensions

Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

P-611 Positioning Systems PZ253E Version: 1.1.0 41

Figure 10: P-611.1S

10 Technical Data

42 Version: 1.1.0 PZ253E P-611 Positioning Systems

Figure 11: P-611.10

10 Technical Data

P-611 Positioning Systems PZ253E Version: 1.1.0 43

Figure 12: P-611.2S and P-611.20

10 Technical Data

44 Version: 1.1.0 PZ253E P-611 Positioning Systems

Figure 13: P-611.XZS and P-611.XZ0

10 Technical Data

P-611.3OF

44

38.2

37.8

44.2

3 2 3.5

50

40

3.5

10

P-611.3SF

48

40

40

44.2

3 2 4.1

50

40

19

13

P-611 Positioning Systems PZ253E Version: 1.1.0 45

Figure 14: P-611.3O, P-611.3S, P-611.3OF and P-611.3SF

A B C D i F G H J K L

P-611.3O 44 38.2 37.8 43.2 - - 3.5 44 - 3.5 10

P-611.3S 44 38.2 37.8 43.2 - - 3.5 44 - 3.5 10

10 Technical Data

46 Version: 1.1.0 PZ253E P-611 Positioning Systems

Figure 15: P-611.ZS

10 Technical Data

P-611 Positioning Systems PZ253E Version: 1.1.0 47

Figure 16: P-611.Z0

10 Technical Data

10.3 Torque for Stainless Steel Screws (A2-70)

Screw size Minimum torque Maximum torque

M6 4 Nm 6 Nm

M5 2.5 Nm 3.5 Nm

M4 1.5 Nm 2.5 Nm

M3 0.8 Nm 1.1 Nm

M2.5 0.3 Nm 0.4 Nm

M2 0.15 Nm 0.2 Nm

M1.6 0.06 Nm 0.12 Nm

10.4 Pin Assignment

D-sub 25 connector

For P-611.3S/.3SF/.3O/.3OF only:

Figure 17: D-sub 25 connector: Front with connections

D-sub 25 connector pin assignment for the P-611.3S/.3SF

Pin Signal Function

1 Output SGS 3-B1 sensor signal

48 Version: 1.1.0 PZ253E P-611 Positioning Systems

2 Input SGS 3 reference voltage

3 Output SGS 2-B1 sensor signal

4 Input SGS 2 reference voltage

5 Output SGS 1-B1 sensor signal

6 Input SGS 1 reference voltage

7 to 10 Free ---

11 Input Piezo voltage +, channel 3

12 Input Piezo voltage +, channel 2

13 Input Piezo voltage +, channel 1

10 Technical Data

Pin Signal Function

14 Output SGS 3-B2 sensor signal

15 GND SGS 3 GND

16 Output SGS 2-B2 sensor signal

17 GND SGS 2 GND

18 Output SGS 1-B2 sensor signal

19 GND SGS 1 GND

20 to 22 Free ---

23 Input Piezo voltage –, channel 3

24 Input Piezo voltage –, channel 2

25 Input Piezo voltage –, channel 1

D-sub 25 connector pin assignment for the P-611.3O/.3OF

Pin Signal Function

1 to 10 Free ---

11 Input Piezo voltage +, channel 3

12 Input Piezo voltage +, channel 2

13 Input Piezo voltage +, channel 1

14 to 22 Free ---

23 Input Piezo voltage –, channel 3

24 Input Piezo voltage –, channel 2

25 Input Piezo voltage –, channel 1

P-611 Positioning Systems PZ253E Version: 1.1.0 49

10 Technical Data

.1S / .10

PZT Inner

Input

Piezo voltage

Ground

.1S / .2S /

SGS

1

Input

Supply voltage for strain

Cable

LEMO connectors

Only for P-611.1S/.10/.2S/.20/.XZS/.XZ0/.ZS/.Z0

Figure 18: LEMO connector (side view)

LEMO connectors according to model (one connector per axis)

P-611
model

.2S / .20
.XZS / .XZ0
.ZS / .Z0

.XZS / .ZS

Connector
(front
view)

Pin Signal Function Connector

shell

connecto
r

2 Output Sensor signal 1

3 Output Sensor signal 2

4 GND Supply voltage ground

–20 to 120 V

gauge sensor

shield

50 Version: 1.1.0 PZ253E P-611 Positioning Systems

11 Old Equipment Disposal

11

Old Equipment Disposal

In accordance with EU law, electrical and electronic equipment may not be disposed of in EU
member states via the municipal residual waste.

Dispose of your old equipment according to international, national, and local rules and
regulations.

In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH &
Co. KG undertakes environmentally correct disposal of all old PI equipment made available on
the market after 13 August 2005 without charge.

Any old PI equipment can be sent free of charge to the following address:

Physik Instrumente (PI) GmbH & Co. KG

Auf der Roemerstr. 1

D-76228 Karlsruhe, Germany

P-611 Positioning Systems PZ253E Version: 1.1.0 51

12 EU Declaration of Conformity

12

EU Declaration of Conformity

For the P-611, an EU Declaration of Conformity has been issued in accordance with the
following European directives:

Low Voltage Directive

EMC Directive

RoHS Directive

The applied standards certifying the conformity are listed below.

Safety (Low Voltage Directive): EN 61010-1

EMC: EN 61326-1

RoHS: EN 50581

P-611 Positioning Systems PZ253E Version: 1.1.0 53