PI N-470.210Y, N-470.110Y, N-470.410, N-470.410Y, N-470.11V User Manual

...
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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
MP125E
N-470 Linear Actuator
Version: 1.2.0
Date: 27.02.2019
This document describes the following products:
N-470.x10/.x10Y, N-470.x1V/.x1VY,
N-470.x1U/.x1UY
PiezoMike linear actuator, M10×1 thread
N-470.x20/.x20Y, N-470.x2V/.x2VY,
N-470.x2U/.x2UY
PiezoMike linear actuator, 9.5 mm (0.375") clamping shank
Models:
x stands for the travel range: 1 = 7.5 mm 2 = 13 mm 4 = 26 mm
Y: Turned cable exit
0: Not suitable for use in a vacuum V: Vacuum compatible to 10 U: Vacuum compatible to 10
-6
hPa
-9
hPa
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws
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The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co. KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®, Q-Motion®
The patents held by PI are found in our patent list: http://www.physikinstrumente.com/en/about-pi/patents
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of the source.
Original instructions First printing: 27.02.2019 Document number: MP125E, LFa/CBo, version 1.2.0
Subject to change without notice. This manual is superseded by any new release. The latest release is available for download (p. 2) on our website.
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Contents
1 About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals ................................................................................................ 2
2 Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.2.1 Organizational Measures ............................................................................... 6
2.2.2 Measures for Handling Vacuum-Compatible Products ................................. 6
3 Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View ............................................................................................................ 10
3.3 Product Labeling ....................................................................................................... 12
3.4 Scope of Delivery ...................................................................................................... 13
3.5 Suitable Electronics .................................................................................................. 14
3.6 Accessories ............................................................................................................... 14
4 Unpacking 15
5 Installation 17
5.1 General Notes on Installation ................................................................................... 17
5.2 Installing the Linear Actuator into a Mechanical Mounting and Connecting it
to the Protective Earth Conductor ........................................................................... 19
5.3 Preparing a Vacuum-Compatible N-470 for Connecting to the Electronics ............. 22
6 Startup and Operation 25
6.1 General Notes on Startup and Operation ................................................................ 25
6.2 Operating Parameters .............................................................................................. 28
6.3 Operating the N-470 ................................................................................................. 28
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7 Maintenance 29
8 Troubleshooting 31
9 Customer Service 33
10 Technical Data 35
10.1 Specifications ............................................................................................................ 35
10.1.1 Data Table .................................................................................................... 35
10.1.2 Maximum Ratings ........................................................................................ 37
10.1.3 Ambient Conditions and Classifications ...................................................... 38
10.2 Step Size and Axial Force .......................................................................................... 39
10.3 Lifetime ..................................................................................................................... 40
10.4 Operating Time and Duty Cycle ................................................................................ 40
10.5 Dimensions ............................................................................................................... 44
10.5.1 Models with Turned Cable Exit .................................................................... 44
10.5.2 Models with M10×1 Thread ........................................................................ 44
10.5.3 Models with Clamping Shank ...................................................................... 45
10.6 Pin Assignment ......................................................................................................... 46
11 Old Equipment Disposal 47
12 EU Declaration of Conformity 49
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1 About this Document

Downloading Manuals ................................................................................................................... 2
Information for easier handling, tricks, tips, etc.
1
About this Document
In this Chapter
Objective and Target Audience of this User Manual ..................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Figures ............................................................................................................................................ 2
Other Applicable Documents ......................................................................................................... 2

1.1 Objective and Target Audience of this User Manual

This user manual contains the information needed for the intended use of the N-470.
Basic knowledge of motion control concepts and applicable safety measures is assumed.
The latest versions of the user manuals are available for download (p. 2) on our website.

1.2 Symbols and Typographic Conventions

The following symbols and typographic conventions are used in this user manual:
NOTICE
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding.
N-470 Linear Actuator MP125E Version: 1.2.0 1
INFORMATION
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1 About this Document
List item
For products that are supplied with software (CD in the scope of delivery), access to the
Symbol/Label Meaning
1.
2.
Action consisting of several steps whose sequential order must be observed
Action consisting of one or several steps whose sequential order
is irrelevant
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning sign on the product which refers to detailed information in this manual.

1.3 Figures

For better understandability, the colors, proportions, and degree of detail in illustrations can deviate from the actual circumstances. Photographic illustrations may also differ and must not be seen as guaranteed properties.

1.4 Other Applicable Documents

The devices and software tools from PI mentioned in this documentation are described in their own manuals.
Product Document
E-872.401 Q-Motion® piezo motor / PiezoMike drive electronics
N-45x / N-47x / N-48x PiezoMike linear actuators
PIMikroMove SM148E Software Manual

1.5 Downloading Manuals

INFORMATION
If a manual is missing or problems occur with downloading: Contact our customer service department (p. 33).
INFORMATION
manuals is protected by a password. Protected content is only displayed on the website after entering the access data.
You need the product CD to get the access data.
PZ279DE User Manual
MP171EK Short Instructions
2 Version: 1.2.0 MP125E N-470 Linear Actuator
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1 About this Document

For products with CD: Get access data

1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file name).
4. Get the access data for downloading protected content in the "User login for software download" section of the Release News. Possible methods for getting the access data:
− Link to a page for registering and requesting the access data
− User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.

Downloading manuals

If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., N-470) or the product family (e.g., PiezoMike) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
N-470 Linear Actuator MP125E Version: 1.2.0 3
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage medium.
Page 8
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2 Safety

General Safety Instructions............................................................................................................ 5
2
Safety
In this Chapter
Intended Use .................................................................................................................................. 5

2.1 Intended Use

The N-470 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and use in an environment that is free of dirt, oil, and lubricants.
The N-470 is a linear actuator for integration into mechanical and optomechanical components. For integration, the mechanics, in which the N-470 is to be installed, must have suitable mountings.
A piezoelectric motor is installed in the N-470 linear actuator that acts on the fine-threaded screw and moves it.
The drive is self-locking at rest, requires no current, and does not generate any heat. It holds the position with maximum force.
The N-470 is not intended for continuous operation. For further information on the operating conditions of the N-470, see "Technical Data" (p. 35).
It is only possible to use the N-470 as intended in conjunction with suitable electronics (p. 14) that provide the required operating voltages. The electronics are not in the scope of delivery of the N-470.

2.2 General Safety Instructions

The N-470 is built according to state-of-the-art technology and recognized safety standards. Improper use can result in personal injury and/or damage to the N-470.
Use the N-470 for its intended purpose only, and only when it is in perfect technical
condition.
 Read the user manual.
 Eliminate any faults and malfunctions likely to affect safety immediately.
The operator is responsible for the correct installation and operation of the N-470.
N-470 Linear Actuator MP125E Version: 1.2.0 5
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2 Safety

2.2.1 Organizational Measures

User manual
Always keep this user manual available with the N-470.
The latest versions of the user manuals are available for download (p. 2) on our website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the N-470 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Use the device only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the N-470 only after you have read and understood this user
manual.
Personnel qualification
The N-470 may only be installed, started up, operated, maintained, and cleaned by authorized and appropriately qualified personnel.

2.2.2 Measures for Handling Vacuum-Compatible Products

When handling the vacuum version of the linear actuator, attention must be paid to appropriate cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement, powder-free gloves are worn. Afterwards, the linear actuator is cleaned once again by wiping and shrink-wrapped twice in vacuum-compatible film.
Touch the linear actuator only with powder-free gloves.
6 Version: 1.2.0 MP125E N-470 Linear Actuator
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3 Product Description

Accessories ................................................................................................................................... 14
acter following
First character
Travel range
1 = 7.5 mm Second character
Type of installation
3
Product Description
In this Chapter
Model Overview ............................................................................................................................. 7
Product View ................................................................................................................................ 10
Product Labeling .......................................................................................................................... 12
Scope of Delivery ......................................................................................................................... 13
Suitable Electronics ...................................................................................................................... 14

3.1 Model Overview

The models differ in terms of the following features:
 Travel range
 Type of installation
 Suitability for use in a vacuum
 Position of the cable exit
In the product number, these are coded as follows by the character following the period:
Char the period
Third character Suitability for use in
Fourth character Position of the
Meaning Possible values
a vacuum
cable exit
2 = 13 mm 4 = 26 mm
1 = M10×1 thread 2 = 9.5 mm clamping shank
0 = not suitable V = up to 10 U = up to 10
No entry = standard cable exit Y = Turned cable exit (i.e., turned by 180°)
-6
hPa
-9
hPa
N-470 Linear Actuator MP125E Version: 1.2.0 7
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3 Product Description
Model
Description
N-470.110
PiezoMike linear actuator, 7.5 mm, M10×1 thread
N-470.110Y
PiezoMike linear actuator, 7.5 mm, M10×1 thread, turned cable exit
N-470.210
PiezoMike linear actuator, 13 mm, M10×1 thread
N-470.210Y
PiezoMike linear actuator, 13 mm, M10×1 thread, turned cable exit
N-470.410
PiezoMike linear actuator, 26 mm, M10×1 thread
N-470.410Y
PiezoMike linear actuator, 26 mm, M10×1 thread, turned cable exit
Model
Description
N-470.11V
PiezoMike linear actuator, 7.5 mm, M10×1 thread, vacuum compatible to 10-6 hPa
N-470.11VY
PiezoMike linear actuator, 7.5 mm, M10×1 thread, vacuum compatible to 10-6 hPa, turned cable exit
N-470.21V
PiezoMike linear actuator, 13 mm, M10×1 thread, vacuum compatible to 10-6 hPa
N-470.21VY
PiezoMike linear actuator, 13 mm, M10×1 thread, vacuum compatible to 10-6 hPa, turned cable exit
N-470.41V
PiezoMike linear actuator, 26 mm, M10×1 thread, vacuum compatible to 10-6 hPa
N-470.41VY
PiezoMike linear actuator, 26 mm, M10×1 thread, vacuum compatible to 10-6 hPa, turned cable exit
Model
Description
N-470.11U
PiezoMike linear actuator, 7.5 mm, M10×1 thread, vacuum compatible to
N-470.11UY
PiezoMike linear actuator, 7.5 mm, M10×1 thread, vacuum compatible to
N-470.21U
PiezoMike linear actuator, 13 mm, M10×1 thread, vacuum compatible to
N-470.21UY
PiezoMike linear actuator, 13 mm, M10×1 thread, vacuum compatible to 10-9 hPa, turned cable exit
N-470.41U
PiezoMike linear actuator, 26 mm, M10×1 thread, vacuum compatible to 10-9 hPa
N-470.41UY
PiezoMike linear actuator, 26 mm, M10×1 thread, vacuum compatible to 10-9 hPa, turned cable exit
PiezoMike linear actuators with M10×1 thread
PiezoMike linear actuators with M10×1 thread, vacuum-compatible to 10-6 hPa
PiezoMike linear actuators with M10×1 thread, vacuum-compatible to 10-9 hPa
10-9 hPa
10-9 hPa, turned cable exit
10-9 hPa
8 Version: 1.2.0 MP125E N-470 Linear Actuator
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3 Product Description
Model
Description
N-470.120
PiezoMike linear actuator, 7.5 mm, 9.5 mm (0.375") clamping shank
N-470.120Y
PiezoMike linear actuator, 7.5 mm, 9.5 mm (0.375") clamping shank, turned N-470.220
PiezoMike linear actuator, 13 mm, 9.5 mm (0.375") clamping shank
N-470.220Y
PiezoMike linear actuator, 13 mm, 9.5 mm (0.375") clamping shank, turned cable exit
N-470.420
PiezoMike linear actuator, 26 mm, 9.5 mm (0.375") clamping shank
N-470.420Y
PiezoMike linear actuator, 26 mm, 9.5 mm (0.375") clamping shank, turned cable exit
Model
Description
N-470.12V
PiezoMike linear actuator, 7.5 mm, 9.5 mm (0.375") clamping shank, vacuum compatible to 10-6 hPa
N-470.12VY
PiezoMike linear actuator, 7.5 mm, 9.5 mm (0.375") clamping shank, vacuum compatible to 10-6 hPa, turned cable exit
N-470.22V
PiezoMike linear actuator, 13 mm, 9.5 mm (0.375") clamping shank, vacuum compatible to 10-6 hPa
N-470.22VY
PiezoMike linear actuator, 13 mm, 9.5 mm (0.375") clamping shank, vacuum compatible to 10-6 hPa, turned cable exit
N-470.42V
PiezoMike linear actuator, 26 mm, 9.5 mm (0.375") clamping shank, vacuum compatible to 10-6 hPa
N-470.42VY
PiezoMike linear actuator, 26 mm, 9.5 mm (0.375") clamping shank, vacuum
Model
Description
N-470.12U
PiezoMike linear actuator, 7.5 mm, 9.5 mm (0.375") clamping shank, vacuum compatible to 10-9 hPa
N-470.12UY
PiezoMike linear actuator, 7.5 mm, 9.5 mm (0.375") clamping shank, vacuum compatible to 10-9 hPa, turned cable exit
N-470.22U
PiezoMike linear actuator, 13 mm, 9.5 mm (0.375") clamping shank, vacuum compatible to 10-9 hPa
N-470.22UY
PiezoMike linear actuator, 13 mm, 9.5 mm (0.375") clamping shank, vacuum
N-470.42U
PiezoMike linear actuator, 26 mm, 9.5 mm (0.375") clamping shank, vacuum
N-470.42UY
PiezoMike linear actuator, 26 mm, 9.5 mm (0.375") clamping shank, vacuum

PiezoMike linear actuators with clamping shank

cable exit

PiezoMike linear actuators with clamping shank, vacuum-compatible to 10-6 hPa

compatible to 10-6 hPa, turned cable exit

PiezoMike linear actuators with clamping shank, vacuum-compatible to 10-9 hPa

compatible to 10-9 hPa, turned cable exit
compatible to 10-9 hPa
compatible to 10-9 hPa, turned cable exit
N-470 Linear Actuator MP125E Version: 1.2.0 9
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3 Product Description

3.2 Product View

N-470 models with M10×1 thread

The description of the product components is also valid for models with turned cable exit.
Figure 1: Models with thread and standard cable exit (left: N-470.x10; right: N-470.x1V)
1 Screw head 2 Fine-threaded screw (rotating) 3 Base body 4 M10×1 mounting nut 5 M10×1 mounting thread 6 Ball tip for connecting to the moving part of the mechanical mounting 7 Unscrew lock (circlip) for fine-threaded screw 8 Product labeling 9 Cable for connecting to the electronics
10 Version: 1.2.0 MP125E N-470 Linear Actuator
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3 Product Description

N-470 models with clamping shank

The description of the product components is also valid for models with turned cable exit.
Figure 2: Models with clamping shank and standard cable exit (left: N-470.x20; right: N-470.x2V)
1 Screw head 2 Fine-threaded screw (rotating) 3 Base body 4 Clamping shank (9.5 mm diameter, 6 mm clamping width) 5 M9×1 mounting nut 6 Ball tip for connecting to the moving part of the mechanical mounting 7 Unscrew lock (circlip) for fine-threaded screw 8 Product labeling 9 Cable for connecting to the electronics

Directions of Motion

Figure 3: Directions of motion of the N-470
Pay attention to further information on the operating conditions in the "Technical Data" section (p. 35).
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3 Product Description

3.3 Product Labeling

Figure 4: N-470: Product labeling
Figure 5: Type plate (N-470.410 as an example)
12 Version: 1.2.0 MP125E N-470 Linear Actuator
Figure 6: Laser marking (for vacuum-compatible models, N-470.41U as an example)
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3 Product Description
N-470
Linear actuator according to order (p. 7)
For vacuum-compatible models only:
K030B1063
LEMO cable, 3-pin to open end, 2 m, on the air side
Position Labeling Description
A
Manufacturer's logo
A WWW.PI.WS Manufacturer's address (website)
B
B
B
B
CE conformity mark
Warning sign "Pay attention to the manual!"
Old equipment disposal (p. 47)
Symbol for the protective earth conductor (p. 19)
B Country of origin: Germany Country of origin
C N-470.410 Product number (example), the digits after the
period refer to the model
C 123456789 Serial number (example), individual for each
N-470 Meaning of the places (counting from left): 1 = internal information 2 and 3 = year of manufacture 4 to 9 = consecutive numbers
Only with models that are not suitable for use in a vacuum:
C R: 00.001 Revision number (example)
C

3.4 Scope of Delivery

Product number Description
000049906 Hook wrench
MP171EK Short instructions for PiezoMike linear actuators
Data matrix code (example; contains the serial number)
N-470 Linear Actuator MP125E Version: 1.2.0 13
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3 Product Description
N-400.A05
Extension cable, LEMO connector 3-pin to LEMO connector 3-pin, 5 m
N-400.A08
Extension cable, LEMO connector 3-pin to LEMO connector 3-pin, 8 m

3.5 Suitable Electronics

You need suitable electronics for operating the N-470 (not in the scope of delivery). The following electronics are available:
Product number Description
E-872.401 Q-Motion® piezomotor / PiezoMike drive electronics, benchtop device,
drives up to 4 linear actuators via one amplifier channel, TCP/IP, USB, USB for joystick, digital I/O
To order, contact our customer service department (p. 33).

3.6 Accessories

Product number Description
N-400.A02 Extension cable, LEMO connector 3-pin to LEMO connector 3-pin, 2 m
N-400.A12 Extension cable, LEMO connector 3-pin to LEMO connector 3-pin, 12 m
N-400.ALM Adapter, LEMO 3-pin to Mini DIN
N-400.AML Adapter, Mini DIN to LEMO 3-pin
To order, contact our customer service department (p. 33).
(for connecting the N-470 to older E-870 drive electronics)
(for connecting older N-470 to the E-872.401 drive electronics)
14 Version: 1.2.0 MP125E N-470 Linear Actuator
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4 Unpacking

When handling the vacuum version of the linear actuator, attention must be paid to
4
Unpacking
INFORMATION
appropriate cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement, powder-free gloves are worn. Afterwards, the linear actuator is cleaned once again by wiping and is then shrink-wrapped twice in vacuum-compatible film.
Touch the linear actuator only with powder-free gloves.
1. Unpack the N-470 with care.
2. Compare the contents with the scope of delivery according to the contract and the delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact our customer service department (p. 33) immediately.
4. Keep all packaging materials in case the product needs to be returned.
N-470 Linear Actuator MP125E Version: 1.2.0 15
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5 Installation

Preparing a Vacuum-Compatible N-470 for Connecting to the Electronics ................................ 22
5
Installation
In this Chapter
General Notes on Installation ...................................................................................................... 17
Installing the Linear Actuator into a Mechanical Mounting and Connecting it to the
Protective Earth Conductor ......................................................................................................... 19

5.1 General Notes on Installation

NOTICE
Friction due to lateral forces!
Lateral forces acting on the fine-threaded screw and the ball tip of the linear actuator increase the friction on the internal drive components. Increased friction impairs the motion of the fine­threaded screw and increases wear on the drive components.
Avoid lateral forces on the fine-threaded screw and on the ball tip of the N-470. Install the N-470 so that the fine-threaded screw is aligned vertically to the contact surface
of the movable part of the mechanical mounting.
NOTICE
Increased wear due to friction!
Increased friction on the contact surface between the ball tip and the movable part of the mechanical mounting increases wear.
Make sure that the contact surface of the mechanical mounting has a roughness of R
<0.1 µm and a hardness of at least 500 HV (corresponds to hardened steel).
Optional: Decrease the friction by applying a small amount of lubricant to the contact
surface of the mechanical mounting.
NOTICE
a
Heating up of the N-470 during operation!
During operation, the N-470 emits up to 5 watts of heat, which can interfere with your application.
Install the N-470 so that the application is not impaired by the dissipated heat. Ensure sufficient ventilation at the place of installation.Pay attention to the operating conditions (duty cycle, ambient temperature) according to
the specifications in "Technical Data" (p. 35).
N-470 Linear Actuator MP125E Version: 1.2.0 17
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5 Installation
NOTICE
Damage from unsuitable cables!
Unsuitable cables can damage the electronics.
Use cables provided by PI only for connecting the N-470 to the electronics.
NOTICE
Dirt, condensation, lubricants!
Dirt, condensation and inappropriately applied lubricant render the drive inoperable.
Keep the N-470 free from dirt and condensation.Do not remove the lubricant that was applied to the fine-threaded screw of the N-470 at
the factory.
Do not lubricate the fine-threaded screw of the N-470.
NOTICE
Damage from opening the base body!
Opening the base body destroys the N-470.
Do not open the N-470.
NOTICE
Damage from unscrewing!
Completely unscrewing the fine-threaded screw from the base body leads to damage to the N-470.
Do not unscrew the fine-threaded screw from the base body of the N-470.
NOTICE
Damage to the fine-threaded screw from contact with hard objects!
Contact with hard objects can damage the thread of the fine-threaded screw. A damaged thread can lead to the failure of the linear actuator.
Prevent the fine-threaded screw from coming into contact with hard objects.
NOTICE
18 Version: 1.2.0 MP125E N-470 Linear Actuator
Damage from overtightening the mounting nut!
Overtightening the mounting nut can damage the linear actuator.
Hand-tighten the mounting nut.
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5 Installation
The contact of the N-470 to the protective earth conductor is established via the contact of the

5.2 Installing the Linear Actuator into a Mechanical Mounting and Connecting it to the Protective Earth Conductor

INFORMATION
mounting nut or thread or clamping shank to a sufficiently conductive mechanical mounting. The mechanical mounting must be connected to the protective earth conductor.
INFORMATION
 Pay attention to the applicable standards for connecting the protective earth conductor.
Figure 7: Models with thread: Relevant components for installation in the mechanical mounting
(presently: N-470.x10)
1 M10×1 mounting nut 2 Mounting thread 3 Ball tip
Figure 8: Models with clamping shank: Relevant components for installation in the mechanical
mounting (presently: N-470.x20)
1 Clamping shank, diameter: 9.5 mm, clamping width: 6 mm 2 M9×1 mounting nut 3 Ball tip
N-470 Linear Actuator MP125E Version: 1.2.0 19
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5 Installation
Figure 9: Example of the installation of two N-470.x10s on a mirror mount
1 N-470.x10 linear actuators with mounting thread 2 Mechanical mounting for linear actuators (fixed part of the mirror holder) 3 Mechanical mounting for mirror (movable part of the mirror holder)

Requirements

You have read and understood the general notes on installation (p. 17).
The N-470 is not connected to the electronics.
You have provided a suitable mechanical mounting (for dimensions of the linear
actuator see "Dimensions" (p. 44)):
− The mechanical mounting must be connected to the protective earth conductor.
− The contact surface of the mechanical mounting to the mounting nut or thread or
clamping shank of the N-470 must be electrically conductive.
− The contact resistance at all connection points relevant for attaching the protective earth conductor is <0.1 Ω at 25 A.
− The contact surface of the mechanical mounting to the ball tip of the N-470 has a roughness of R
− For models with mounting thread: An M10×1 through-hole is in the mechanical mounting.
− For models with clamping shank: There is a through-hole with a suitable diameter in the mechanical mounting.
You have accounted for the space required to route cables according to regulations and
without bending them.
<0.1 µm and a hardness of at least 500 HV.
a
20 Version: 1.2.0 MP125E N-470 Linear Actuator

Tools and accessories

Hook wrench (in the scope of delivery (p. 13))
When lubricant is to be applied to the contact surface of the moving part of the mechanical mounting:
Models that are not suitable for use in a vacuum: PTFE-based grease containing no
additive
Vacuum-compatible models: Vacuum-compatible PTFE-based grease containing no
additive
Page 25
5 Installation
Installing an N-470 with mounting thread
1. Screw the mounting nut of the N-470 as far as necessary in the direction of the base body of the N-470.
2. Optional: Apply a small amount of lubricant to the contact surface of the moving part of the mechanical mounting.
3. Screw the N-470 as far as necessary into the M10×1 through-hole of the mechanical mounting.
4. Align the base body of the N-470 with the mechanical mounting.
5. Fix the N-470 in the mechanical mounting:
a) Hold the base body and screw the mounting nut of the N-470 in the direction of the
mechanical mounting.
b) Hand-tighten the mounting nut with the hook wrench.
6. Check that the linear actuator is fixed firmly in the mounting.
7. Optional: Turn the screw head of the linear actuator's fine-threaded screw into the desired position by hand to avoid longer travel to this position.
Installing an N-470 with clamping shank
1. Optional: Apply a small amount of lubricant to the contact surface of the moving part of the mechanical mounting.
2. Remove the mounting nut from the clamping shank of the N-470.
3. Position the N-470 in the mechanical mounting of your application.
4. Manually screw the mounting nut of the N-470 a few turns into the thread of the clamping shank.
5. Align the base body with the mechanical mounting.
6. Clamp the N-470 firmly in the mounting:
− Hold the base body and hand-tighten the mounting nut of the N-470 with the hook
wrench.
7. Check that the linear actuator is fixed firmly in the mounting.
8. Optional: Turn the screw head of the linear actuator's fine-threaded screw into the desired position by hand to avoid longer travel to this position.
N-470 Linear Actuator MP125E Version: 1.2.0 21
Page 26
5 Installation
a
Red
White
Piezo voltage 0 to 80 V
PIEZO+
5.3 Preparing a Vacuum-Compatible N-470 for Connecting to the Electronics
Figure 10: Vacuum-compatible N-470: Connections for the vacuum feedthrough
1 Vacuum-side connector for the N-470's cables 2 Vacuum feedthrough 3 Connector for the K030B1063 air side cable (p. 13) 4 LEMO connector, 3-pin, see "Pin Assignment" (p. 46)

Assigning the stranded wires and the cable shield

Letter Wire color Function Signal
Vacuum-side actuator cable
b Black Brown Piezo voltage ground PIEZO-
c --- --- Bare cable shield ---
Air-side connecting cable

Requirements

You have read and understood the general notes on installation (p. 17).
The cable on the air side of the N-470 is not connected to the electronics.
22 Version: 1.2.0 MP125E N-470 Linear Actuator

Tools and accessories

 Suitable vacuum feedthrough
Air side and vacuum side connector (male or female) for vacuum feedthrough
K030B1063 air side cable (p. 13)
 Suitable tools for wiring the connectors
Page 27
5 Installation
Preparing a vacuum-compatible N-470 for connecting to the electronics
1. Attach the respective connectors for the vacuum feedthrough to the stranded wire ends of the N-470's cables on the vacuum side and on the air side:
− Make sure that the stranded wires are assigned to each other as shown in the
connection diagram.
− Connect the cable shield according to the figure above. If the cable shield cannot be
connected to a pin, connect the respective cable shield to the housing.
2. Check the lines for contacting and short-circuiting using a suitable measuring device.
N-470 Linear Actuator MP125E Version: 1.2.0 23
Page 28
Page 29

6 Startup and Operation

Operating the N-470 .................................................................................................................... 28
6
Startup and Operation
In this Chapter
General Notes on Startup and Operation .................................................................................... 25
Operating Parameters.................................................................................................................. 28

6.1 General Notes on Startup and Operation

CAUTION
Risk of electric shock if the protective earth conductor is not connected!
If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the N-470 in the case of malfunction or failure of the system. If touch voltages exist, touching the N-470 can result in minor injuries from electric shock.
Connect the N-470 to a protective earth conductor before startup. Do not remove the protective earth conductor during operation. Establish contact between the N-470 and the protective earth conductor via a sufficiently
conductive mechanical mounting (p. 19).
Make sure that the contact resistance is <0.1 Ω at 25 A at all connection points relevant for
mounting the protective earth conductor.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the N-470 to the protective earth conductor before starting it up again.
NOTICE
Operating voltage too high or incorrectly connected!
Operating voltages that are too high or incorrectly connected can cause damage to the N-470.
Operate the N-470 only with controllers/drivers and original accessories from PI.Do not exceed the operating voltage range (p. 37) for which the N-470 is specified. Operate the N-470 only when the operating voltage is properly connected; see "Pin
Assignment" (p. 46).
N-470 Linear Actuator MP125E Version: 1.2.0 25
Page 30
6 Startup and Operation
NOTICE
Operating frequency too high!
An excessively high operating frequency can cause damage to the N-470.
Operate the N-470 only with controllers/drivers and original accessories from PI.Do not exceed the operating frequency range (p. 37) specified for the N-470.
NOTICE
Reduced lifetime of the piezo actuator due to permanently high voltage!
Applying a high static voltage to piezo actuators continuously reduces the lifetime of the piezo ceramic.
If the N-470 is not used for a longer period of time, e.g., several days, switch the
electronics off.
NOTICE
Destruction of the piezo actuator due to electric flashovers!
Using the N-470 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers. Electric flashovers can be caused by moisture, high humidity, liquids, and conductive materials (e.g., metal dust). In addition, electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air.
 Avoid operating the N-470 in environments that can increase the electric conductivity.  Operate the N-470 only within the permissible ambient conditions and classifications
(p. 38).
NOTICE
Friction due to lateral forces!
Lateral forces acting on the fine-threaded screw and the ball tip of the linear actuator increase the friction on the internal drive components. Increased friction impairs the motion of the fine­threaded screw and increases wear on the drive components.
Avoid lateral forces on the fine-threaded screw and on the ball tip of the N-470. Install the N-470 so that the fine-threaded screw is aligned vertically to the contact surface
of the movable part of the mechanical mounting.
26 Version: 1.2.0 MP125E N-470 Linear Actuator
Page 31
6 Startup and Operation
Temperature changes lead to a change in the length of the N-470's material. Depending on the
NOTICE
Increased wear due to friction!
Increased friction on the contact surface between the ball tip and the movable part of the mechanical mounting increases wear.
Make sure that the contact surface of the mechanical mounting has a roughness of Ra
<0.1 µm and a hardness of at least 500 HV (corresponds to hardened steel).
Optional: Decrease the friction by applying a small amount of lubricant to the contact
surface of the mechanical mounting.
NOTICE
Damage to the fine-threaded screw from contact with hard objects!
Contact with hard objects can damage the thread of the fine-threaded screw. A damaged thread can lead to the failure of the linear actuator.
Prevent the fine-threaded screw from coming into contact with hard objects.
NOTICE
Damage from unscrewing!
Completely unscrewing the fine-threaded screw from the base body leads to damage to the N-470.
Do not unscrew the fine-threaded screw from the base body of the N-470.
NOTICE
Fine-threaded screw gets stuck!
The N-470's fine-threaded screw can get stuck at the physical end of the travel range (hard stop or circlip). Getting stuck can reduce the lifetime of the linear actuator.
Stop the N-470 after reaching the end of the travel range or command motion away from
the end of the travel range.
If the N-470's fine-threaded screw gets stuck at the end of the travel range: Turn the head
of the fine-threaded screw by hand to loosen it.
INFORMATION
application, drift compensation may be required to keep the position stable in the case of larger temperature fluctuations.
Possible compensatory measures are:
Reducing the transfer of heat by adapting the drive's duty cycle Monitoring the temperature with a sensor (air conditioning or cooling)
Reduce the measuring period if the above-mentioned compensatory measures are not
N-470 Linear Actuator MP125E Version: 1.2.0 27
possible.
Page 32
6 Startup and Operation
INFORMATION
The inertia drive generates noise in step mode. The noise generation depends on the current step frequency.
Pay attention to further information on the operating conditions in the "Technical Data" section (p. 35).
The N-470 is put into operation with suitable electronics (p. 14) from PI.

6.2 Operating Parameters

If you use the software from the scope of delivery of the electronics (p. 14), the operating parameters can be loaded from the positioner database. The records in the positioner database are updated regularly.
Install the PI Update Finder from the product CD for the electronics onto your PC and
update the positioner database on your PC.
Further information can be found in the user manual for the electronics (p. 14).
6.3 Operating the N-470

Requirements

You have read and understood the general notes on startup and operation (p. 25).
 You have read and understood the user manual for the electronics.
 You have read and understood the user manual for the PC software.
You have fixed the N-470 properly (p. 17).
The electronics and the required PC software were installed. All connections to the
electronics were made (see user manual for the electronics).
Operating the N-470
Follow the instructions in the manual for the electronics (p. 14) used for startup and
operation of the N-470.
28 Version: 1.2.0 MP125E N-470 Linear Actuator
Page 33

7 Maintenance

7
Maintenance
When the N-470 is operated in a clean environment, no maintenance work is necessary.
If you would like your device to be serviced, please contact our customer service department (p. 33).
N-470 Linear Actuator MP125E Version: 1.2.0 29
Page 34
Page 35

8 Troubleshooting

No or limited
Check the connecting cable.
Loosen the fine-threaded screw by turning
8
Troubleshooting
Problem Possible causes Solution
Function impairment after system modification
motion
The electronics
were replaced
The mechanics
were replaced
The cable is not connected correctly or is defective
Excessive
counterforces in the direction of motion
Operating
parameters wrongly set
Motor/drive is blocked
 Load the parameter set from the positioner
database that corresponds to the N-470 model.
If necessary: Set the parameters for the
electronics in PIMikroMove so that they correspond to the application (load, orientation) of the N-470 model (see user manual for the electronics).
 Reduce the load. Pay attention to the
information in the "Technical Data" section
35).
(p.
Check the settings for the operating
parameters of the electronics (for details, see the manual for the electronics).
the screw head backwards and forwards by hand.
If the problem that occurred with your system is not listed in the table above or cannot be solved as described, contact our customer service department (p. 33).
N-470 Linear Actuator MP125E Version: 1.2.0 31
Page 36
Page 37

9 Customer Service

9
Customer Service
For inquiries and orders, contact your PI sales engineer or send us an email ([email protected]).
If you have any questions concerning your system, provide the following information:
− Product and serial numbers of all products in the system
− Firmware version of the controller (if applicable)
− Version of the driver or the software (if applicable)
− Operating system on the PC (if applicable)
If possible: Take photographs or make videos of your system that can be sent to our
customer service department if requested.
The latest versions of the user manuals are available for download (p. 2) on our website.
N-470 Linear Actuator MP125E Version: 1.2.0 33
Page 38
Page 39

10 Technical Data

Pin Assignment ............................................................................................................................ 46
Motion and positioning
N-470
Unit
Active axis
X
Travel range
N-470.1xx: 7.5
N-470.4xx: 26
mm
Max. step size in step mode
50
nm
Typ. step size
20
nm
Step frequency
2000
Hz
Max. velocity in full-step mode
3.6
mm/min
Typ. velocity in full-step mode
2.4
mm/min
Mechanical properties
N-470
Unit
Mechanical interface
N-470.x1x: M10×1 mounting thread N-470.x2x: 9.5 mm clamping shank
Stiffness in motion direction
15
N/µm
Feed force (active)
22
N
Holding force (passive)
>100
N
Permissible lateral force
1
N Drive properties
N-470
Unit
Drive type
Piezo motor
Max. operating voltage
80 V Max. power consumption
5
W
10
Technical Data
In this Chapter
Specifications ............................................................................................................................... 35
Step Size and Axial Force ............................................................................................................. 39
Lifetime ........................................................................................................................................ 40
Operating Time and Duty Cycle ................................................................................................... 40
Dimensions .................................................................................................................................. 44

10.1 Specifications

10.1.1 Data Table

Models that are not suitable for use in a vacuum
N-470.2xx: 13
N-470 Linear Actuator MP125E Version: 1.2.0 35
Page 40
10 Technical Data
Miscellaneous
N-470
Unit
Operating temperature range
10 to 40
°C
Material
Screw: Stainless steel
Nut: Bronze
Dimensions
N-470.1xx: 14 × 28 × 48
N-470.4xx: 14 × 28 × 68.5
mm
Mass
80 g Cable length
2
m
Cable exit
N-470.xxx: Standard N-470.xxxY: Turned cable exit
Connector
LEMO, 3-pin
Recommended electronics
E-872.401
N-470.x1V N-470.x1VY
N-470.x1U N-470.x1UY
N-470.x2V N-470.x2VY
N-470.x2U N-470.x2UY
Mechanical interface
M10×1 mounting thread
M10×1 mounting thread
9.5 mm clamping shank
9.5 mm clamping shank
Pressure range
10
-6
hPa
10
-9
hPa
10
-6
hPa
10
-9
hPa
Motion and positioning
N-470.11x; N-470.11xx N-470.12x; N-470.12xx
N-470.21x; N-470.21xx N-470.22x; N-470.22xx
N-470.41x; N-470.41xx N-470.42x; N-470.42xx
Unit
Active axis
X X X Travel range
7.5
13
26
mm
Max. step size in step mode
50
50
50
nm
Typ. step size
20
20
20
nm
Max. step frequency
2000
2000
2000
Hz
Max. velocity in full-step mode
3.6
3.6
3.6
mm/min
Typ. velocity in full-step mode
2.4
2.4
2.4
mm/min
Mechanical properties
N-470.11x; N-470.11xx N-470.12x; N-470.12xx
N-470.21x; N-470.21xx N-470.22x; N-470.22xx
N-470.41x; N-470.41xx N-470.42x; N-470.42xx
Unit
Stiffness in motion direction
15
15
15
N/µm Feed force (active)
22
22
22
N
Holding force (passive)
>100
>100
>100
N
Permissible lateral force
1 1 1
N
Drive properties
N-470.11x; N-470.11xx N-470.12x; N-470.12xx
N-470.21x; N-470.21xx N-470.22x; N-470.22xx
N-470.41x; N-470.41xx N-470.42x; N-470.42xx
Unit
Drive type
Piezo motor
Piezo motor
Piezo motor
Max. operating voltage
80
80
80 V Max. power consumption
5 5 5
W
Housing: Aluminum (anodized)
N-470.2xx: 14 × 28 × 53.5
Ask about customized versions.
Vacuum-compatible models
36 Version: 1.2.0 MP125E N-470 Linear Actuator
Page 41
10 Technical Data
Miscellaneous
N-470.11x; N-470.11xx N-470.12x; N-470.12xx
N-470.21x; N-470.21xx N-470.22x; N-470.22xx
N-470.41x; N-470.41xx N-470.42x; N-470.42xx
Unit
Operating temperature range
10 to 40
10 to 40
10 to 40
°C
Material
Screw: Stainless steel Housing: Stainless steel
Screw: Stainless steel Housing: Stainless steel
Screw: Stainless steel Housing: Stainless steel
Dimensions
14 × 28 × 48
14 × 28 × 53.5
14 × 28 × 68.5
mm
Mass
80
85
95
g
Cable length / connector
1 m in the vacuum,
to LEMO 3-pin
1 m in the vacuum,
to LEMO 3-pin
1 m in the vacuum,
to LEMO 3-pin
Recommended electronics
E-872.401
E-872.401
E-872.401
N-470.xx0
80 V
400 Hz
5 W
stranded wires; 2 m outside the vacuum, stranded wires
Ask about customized versions.
stranded wires; 2 m outside the vacuum, stranded wires
Materials used for vacuum-compatible models
Machine-made parts
Drive elements
Electrical components Cable insulation: Teflon (PTFE, FEP)
Lubricant High vacuum oil
Adhesive Epoxy-based vacuum adhesive
Stainless steel type 316L (1.4404) (housing) Stainless steel type 301 (1.4310) (spring)
Remaining parts: Vacuum-compatible lead-free bronze (drive component), rolling bearing steel (ball tip), stainless steel (mounting screws), spring steel (circlip)
Stainless steel (fine-threaded screw) PZT (piezoceramic actuator)
Shrink tubing: Kynar, PTFE Solder: Sn95.5 Ag3.8 Cu0.7
stranded wires; 2 m outside the vacuum, stranded wires

10.1.2 Maximum Ratings

N-470 Linear Actuator MP125E Version: 1.2.0 37
N-470 linear actuators are designed for the following operating data:
Model Maximum operating
voltage
Maximum operating frequency during
Maximum power consumption
continuous operation*
N-470.xx0Y
N-470.xxV
80 V 200 Hz 5 W
N-470.xxVY
N-470.xxU
80 V 200 Hz 5 W
N-470.xxUY
* Up to 2000 Hz is permissible for short periods of time. See the "Operating Time and Duty Cycle" (p. 40).
Page 42
10 Technical Data
Maximum altitude
2000 m
Relative humidity
Highest relative humidity 80 % for temperatures up to 31 °C
Degree of protection
IP30

10.1.3 Ambient Conditions and Classifications

Pay attention to the following ambient conditions and classifications for the N-470:
Area of application For indoor use only
Air pressure
Models not suitable for use in a vacuum: 1100 hPa to 0.1 hPa
Models N-470.xxV, .xxVY: 1100 hPa to 10
Models N-470.xxU, .xxUY: 1100 hPa to 10
Decreasing linearly to 50 % relative humidity at 40 °C
Operating temperature 10 °C to 40 °C
Storage temperature -20 °C to 75 °C
Transport temperature -20 °C to 75 °C
Maximum bakeout
120 °C, for 12 hours, only in switched-off state
temperature for N-470.xxV, .xxVY, .xxU, .xxUY models
Overvoltage category II
Protection class I
Degree of pollution 1
according to IEC 60529
-6
hPa (high vacuum)
-9
hPa (ultrahigh vacuum)
38 Version: 1.2.0 MP125E N-470 Linear Actuator
Page 43
10 Technical Data

10.2 Step Size and Axial Force

The following graph shows the step size of the N-470 against various axial forces. The influence of different axial forces on the step size is relatively minor. The active feed force is specified as 22 N (see "Technical Data" (p. 35)).
Figure 11: Typical step size in nm vs. axial force in N
N-470 Linear Actuator MP125E Version: 1.2.0 39
Page 44
10 Technical Data

10.3 Lifetime

The following graph shows the decrease in the step size over the lifetime of the N-470. The lifetime of the N-470 linear actuator is specified as 1 000 000 000 steps. Over this time, the typical step size decreases by maximum 30 %.
Figure 12: Typical step size in nm vs. number of steps

10.4 Operating Time and Duty Cycle

The operating time and duty cycle influence the lifetime of the linear actuator. In order to prevent overheating and strong wear, the operating time and the duty cycle must not exceed the values given in the following tables. The limit values depend on the following factors:
 Setting of the number of steps per second
Use outside or inside the vacuum
40 Version: 1.2.0 MP125E N-470 Linear Actuator
Page 45
10 Technical Data
2000
60 s (max.)
20 % / 4 min
unlimited
unlimited

Models that are not suitable for use in a vacuum

Number of steps
Operating time Duty cycle (max.) / idle time
per second*
2000 10 s 20 % / 40 s
1000 120 s (max.) 40 % / 180 s
1000 10 s 40 % / 15 s
≤400
* To be set via the Maximum Motor Output operating parameter (0x9) for the E-872.401 respectively PIShift Steps per Second for the E-870.
The following graph shows the operating time in seconds depending on the number of steps per second.
N-470 Linear Actuator MP125E Version: 1.2.0 41
Figure 13: Operating time in s vs. steps/s
Page 46
10 Technical Data
1000
120 s (max.)
20 % / 8 min
1000
10 s
20 % / 40 s
The following graph shows the duty cycle in % depending on the number of steps per second.
Figure 14: Duty cycle in % vs. steps/s

Vacuum-compatible models

Number of steps per second*
2000 60 s (max.) 10 % / 9 min
2000 10 s 10 % / 90 s
≤200
* To be set via the Maximum Motor Output operating parameter (0x9) for the E-872.401 respectively PIShift Steps per Second for the E-870.
Operating time Duty cycle (max.) / idle time
unlimited unlimited
42 Version: 1.2.0 MP125E N-470 Linear Actuator
Page 47
10 Technical Data
The following graph shows the operating time in seconds depending on the number of steps per second.
Figure 15: Operating time in s vs. steps/s (vacuum versions of the N-470)
The following graph shows the duty cycle in % depending on the number of steps per second.
N-470 Linear Actuator MP125E Version: 1.2.0 43
Figure 16: Duty cycle in % vs. steps/s (vacuum versions of the N-470)
Page 48
10 Technical Data

10.5 Dimensions

10.5.1 Models with Turned Cable Exit

Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
INFORMATION
The dimensional drawings in the subsequent sections show the N-470.xxx models with standard cable exit, but also apply to the N-470.xxxY models with turned cable exit.
Take note: In the case of the N-470.xxxY models, the cable exit is located exactly opposite
to the position shown in the dimensional drawings.

10.5.2 Models with M10×1 Thread

44 Version: 1.2.0 MP125E N-470 Linear Actuator
Figure 17: Dimensions N-470.x1x
N-470.11x N-470.11xY
N-470.21x N-470.21xY
N-470.41x N-470.41xY
Unit
A 48 53.5 68.5 mm
B (travel range) 7.5 13 26 mm
Page 49
10 Technical Data
B (travel range)
7.5
13
26
mm

10.5.3 Models with Clamping Shank

Figure 18: Dimensions N-470.x2x
N-470.12x N-470.12xY
N-470.22x N-470.22xY
N-470.42x N-470.42xY
Unit
A 48 53.5 68.5 mm
N-470 Linear Actuator MP125E Version: 1.2.0 45
Page 50
10 Technical Data
2
Input: Piezo - (GND)
Black
Brown
3
Not connected
---
---

10.6 Pin Assignment

A LEMO connector is used for connecting to the drive electronics:
Models that are not suitable for use in a vacuum: The connector is located directly on
the cable of the N-470.
Vacuum-compatible models: The connector is on the air-side cable (p. 13). The ends of
the cable on the vacuum and air side of the N-470 have stranded wires for connecting to a vacuum feedthrough (p. 22).
Figure 19: LEMO connector, 3-pin
Pin Function Wire colors for vacuum-compatible models
Cable on the vacuum side
1 Input: Piezo + (0 to 80 V) Red White
Cable shield Connected to the connector
shell
Bare Bare
Cable on the air side
46 Version: 1.2.0 MP125E N-470 Linear Actuator
Page 51

11 Old Equipment Disposal

11
Old Equipment Disposal
In accordance with EU law, electrical and electronic equipment may not be disposed of in EU member states via the municipal residual waste.
Dispose of your old equipment according to international, national, and local rules and regulations.
In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.
Any old PI equipment can be sent free of charge to the following address:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstr. 1
D-76228 Karlsruhe, Germany
N-470 Linear Actuator MP125E Version: 1.2.0 47
Page 52
Page 53

12 EU Declaration of Conformity

12
EU Declaration of Conformity
For the N-470, an EU Declaration of Conformity has been issued in accordance with the following European directives:
Low Voltage Directive
EMC Directive
RoHS Directive
The applied standards certifying the conformity are listed below.
Safety (Low Voltage Directive): EN 61010-1
EMC: EN 61326-1
RoHS: EN 50581
N-470 Linear Actuator MP125E Version: 1.2.0 49
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