Page 1
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
A-110 Series Linear Air Bearing Stage
PIglide LC, Linear Motor Driven with Encoder Feedback
This document describes the A-110.xxxxx Series of Linear Air Bearing Motorized Stages.
Page 1 of 29
Page 2
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®, NanoAutomation®,
Picoactuator®, PInano®, PIMag®
PI owns the following patents or patent applications for the technology field Magnetic Direct Drives (PIMag®):
WO212146709A2, DE102012207082A1
© 2016 PI (Physik Instrumente) L.P. The text, photographs and drawings in this manual are protected by
copyright. With regard thereto, PI (Physik Instrumente) L.P. retains all the rights. Use of said text, photographs
and drawings is permitted only in part and only upon citation of the source.
Subject to change without notice. This manual is superseded by any new release. PI continually improves its
product offerings, and listed options and specifications may be superseded at any time.
Page 2 of 29
Page 3
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
Table of Contents
1. About this Document ____________________________________________________________________5
1.1. Objective and Target Audience of this User Manual ________________________________________5
1.2. Symbols and Typographic Conventions __________________________________________________5
1.3. Other Applicable Documents __________________________________________________________5
2. Safety ________________________________________________________________________________6
2.1. Intended Use ______________________________________________________________________6
2.2. General Safety Instructions ___________________________________________________________6
2.3. Warnings and Safety Notices __________________________________________________________6
2.4. Organizational Measures _____________________________________________________________7
3. Product Description _____________________________________________________________________8
3.1. Model Overview and Part Numbering ___________________________________________________8
3.2. Product Features ___________________________________________________________________8
3.3. Product Labeling __________________________________________________________________ 10
3.4. Scope of Delivery _________________________________________________________________ 11
3.5. Accessories ______________________________________________________________________ 11
3.6. Controllers ______________________________________________________________________ 11
4. Technical Features ____________________________________________________________________ 12
4.1. Air Bearing ______________________________________________________________________ 12
4.2. Linear Motor _____________________________________________________________________ 12
4.3. Linear Encoder ___________________________________________________________________ 12
4.4. Limits and Index Mark (incremental encoders only) ______________________________________ 12
5. Unpacking and Handling ________________________________________________________________ 13
6. Installation __________________________________________________________________________ 14
6.1. Mounting Surface Quality and Preparation _____________________________________________ 14
6.2. Mounting Procedure ______________________________________________________________ 14
6.3. Removing the shipping lock(s) _______________________________________________________ 15
6.4. Air Supply _______________________________________________________________________ 15
6.5. Affixing the Payload to the Stage _____________________________________________________ 16
6.6. XY Configurations _________________________________________________________________ 17
Page 3 of 29
Page 4
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
6.7. Connecting the Stage to Protective Earth ______________________________________________ 18
6.8. Connecting the Cables _____________________________________________________________ 19
7. Startup and Operation of the Stage _______________________________________________________ 20
8. Maintenance _________________________________________________________________________ 21
8.1. Cleaning the Stage ________________________________________________________________ 21
8.2. Preparing the Stage for Transport ____________________________________________________ 22
9. Customer Service _____________________________________________________________________ 23
10. Technical Data _____________________________________________________________________ 24
10.1. Basic Specifications ______________________________________________________________ 24
10.2. Motor Electrical Specifications _____________________________________________________ 25
10.3. Encoder Specifications ___________________________________________________________ 25
10.4. Ambient Conditions _____________________________________________________________ 25
10.5. Dimensions ____________________________________________________________________ 26
10.6. Pin Assignments ________________________________________________________________ 27
11. Old Equipment Disposal ______________________________________________________________ 29
Table of Figures
Figure 1 - Product Features, A-110.200, .300, .400 _________________________________________________9
Figure 2 - Product Features, A-110.050, .100 _____________________________________________________9
Figure 3 -Product Labeling Example __________________________________________________________ 10
Figure 4 - Mounting Surface Quality ___________________________________________________________ 14
Figure 5 - Stage Base Mounting Holes ________________________________________________________ 15
Figure 6 – Shipping Lock ___________________________________________________________________ 15
Figure 7 - Air Inlet Fitting Location ____________________________________________________________ 16
Figure 8 - Payload Mounting Holes ___________________________________________________________ 16
Figure 9 - Earth ground connection point location ________________________________________________ 18
Figure 10 - Mounting of the protective earth conductor (profile view) _________________________________ 18
Figure 11 – Stage Electrical Cable Connectors __________________________________________________ 19
Figure 12 - A-110 Series Stage Dimensions ____________________________________________________ 26
Page 4 of 29
Page 5
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Symbol
Meaning
If not avoided, the situation could result in damage to the equipment.
Failure to observe these precautions could result in serious injury to
those performing the procedures and damage to the equipment.
1.
2.
Action consisting of several steps whose sequential order must be
observed
Action consisting of one or several steps whose sequential order is
irrelevant
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
1. About this Document
1.1. Objective and Target Audience of this User Manual
This manual contains information on the intended use of the A-110. It assumes that the reader has a
fundamental understanding of basic servo systems as well as motion control concepts and applicable safety
procedures.
1.2. Symbols and Typographic Conventions
The following symbols and markings are used in this User Manual:
1.3. Other Applicable Documents
None at this time
Page 5 of 29
Page 6
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
To minimize the possibility of electrical shock and bodily injury or death, disconnect all electrical
power prior to making any electrical connections.
To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit
is in use, ensure that no person comes in contact with the circuitry when the stage is connected to
a power source.
To minimize the possibility of bodily injury or death, disconnect all electrical power prior to making
any mechanical adjustments.
Moving parts of the stage can cause crushing or shearing injuries. All personnel must remain clear
of any moving parts.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
2. Safety
2.1. Intended Use
The A-110 is a laboratory device as defined by DIN EN 61010. It is intended to be used in interior spaces and in
an environment which is free of dirt, oil and lubricants.
In accordance with its design and realization, the A-110 is intended for single-axis positioning of loads at different
velocities. The A-110 is not intended for applications in areas in which a failure would present severe risks to
human beings or the environment.
The A-110 is intended for horizontal mounting only in which the plane of the stage tabletop is level and parallel to
the plane of the ground.
The intended use of the A-110 is only possible when completely mounted and connected.
The A-110 must be operated with a suitable controller. The controller is not included in the scope of delivery of
the A-110.
2.2. General Safety Instructions
The A-110 is built according to state-of-the-art technology and recognized safety standards. Improper use can
result in personal injury and/or damage to the A-110.
Only use the A-110 for its intended purpose, and only use it if it is in a good working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the A-110.
2.3. Warnings and Safety Notices
The following statements apply throughout this manual. Failure to observe these precautions could result in
serious injury to those performing the procedures and damage to the equipment. This manual and any additional
instructions included with the stage should be retained for the lifetime of the stage.
Page 6 of 29
Page 7
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Improper use of the stage can cause damage, shock, injury, or death. Read and understand this
manual before operating the stage.
If the stage is used in a manner not specified by the manufacturer, the protection provided by the
stage can be impaired.
Stage cables can pose a tripping hazard. Securely mount and position all stage cables to avoid
potential hazards.
Do not expose the stage to environments or conditions outside the specified range of operating
environments. Operation in conditions other than those specified can cause damage to the
equipment.
The stage must be mounted securely. Improper mounting can result in injury and damage to the
equipment.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches,
dings, dents, or distortion of the stage.
The stage contains high power magnets that can attract ferrous objects, such as loose screws.
Attracted objects can damage the stage. Make sure that there are no movable, ferrous objects
within a radius of at least 10 cm around the stage.
The stage contains high power magnets that can damage magnetically sensitive objects such as
magnetic data carriers and electronic devices. Make sure that there are no magnetically sensitive
objects within a radius of at least 10 cm around the stage.
Dirt, oil, lubricants and condensation will damage the stage. Keep the stage clean and free of dirt,
debris, oil, lubricants, and moisture.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
2.4. Organizational Measures
User manual
Always keep this user manual available near the A-110.
Add all information given by the manufacturer to the user manual, for example supplements or
Technical Notes.
If you pass the A-110 on to other users, also turn over this user manual as well as other relevant
information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due to an
incomplete user manual can result in minor injury and property damage.
Only install and operate the A-110 after having read and understood this user manual.
Personnel qualification
The A-110 may only be installed, started up, operated, maintained and cleaned by authorized and
appropriately qualified personnel.
Page 7 of 29
Page 8
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Model
Travel
Encoder
Motor Wiring
A-110
050 = 50mm
A = 20µm signal period incremental
Sine (1 Vp-p) output
1 = Standard motor
48 VDC nominal buss
100 = 100mm
B = 1nm resolution absolute
BiSS-C serial output
200 = 200mm
C = 50nm resolution incremental
A-quad-B (TTL) output
300 = 300mm
400 = 400mm
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
3. Product Description
3.1. Model Overview and Part Numbering
The A-110 series offers various models, defined by the travel range, encoder type, and motor option. The
dimensions of the various models vary with travel. Encoder and motor options do not affect the dimensions.
3.2. Product Features
The A-110 series stages all incorporate completely non-contact air bearing surfaces, linear motors, and feedback
devices to provide a maintenance free stage. There is no mechanical contact to wear or require lubrication,
making these stages ideal for clean room and medical applications. The A-110 incorporates opposing lateral
preload and magnetic vertical preload. The brushless linear motor uses an ironless motor coil, which means
there is zero cogging and no attractive forces – resulting in unsurpassed smoothness of motion. This is especially
useful in applications where velocity control is important.
Page 8 of 29
Page 9
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
#
Description
1.
Stage base
2.
Moving table
3.
Moving cable loop
4.
Linear motor
5.
Motor electrical connection
6.
Encoder electrical connection
7.
Air supply inlet
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
Figure 1 - Product Features, A-110.200, .300, .400
Figure 2 - Product Features, A-110.050, .100
Page 9 of 29
Page 10
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
#
Description
1.
Product model number (example)
2.
Serial number (example), individual for each A-110
Meaning of the places (counting from left):
A = PIglide Air Bearing Product
16 = year of manufacture (i.e. 2016)
021701 = consecutive unique number, 6-digit
3.
Warning sign "Observe manual"
4.
Old equipment disposal warning sign
5.
CE conformity mark
6.
Protective earth grounding location
7.
Air supply inlet location
8.
Motor electrical connection
9.
Encoder electrical connection
10.
Country of origin
11.
Manufacturer's address (website)
12.
Manufacturer's logo
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
3.3. Product Labeling
Figure 3 -Product Labeling Example
Page 10 of 29
Page 11
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Item ID
Component
A-110.xxxxxx
Linear stage according to the order
---
Stage Mounting Screws (M5 x 45 SHCS)
---
Transport lock screw and lock label
A110D0001
User manual (this document)
Part #
Description
A-80x.xxx
Air Preparation and Filtration Kit
A-851.xxx
Cable sets for integration with various controllers
Part #
Description
C-891.120200
PIMag® Motion Controller for magnetic direct drives,
1 channel, 24 V, 3 A, USB and RS-232 interfaces
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
3.4. Scope of Delivery
3.5. Accessories
The following accessories are offered to complement the A-110 stage. Contact PI for all available configurations.
3.6. Controllers
The A-110 must be connected to a suitable motion controller to be operated. The following standard controller is
available from PI to operate the A-110. Other controllers are also available, contact PI for options.
Page 11 of 29
Page 12
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
4. Technical Features
4.1. Air Bearing
The A-110 series stage features fully preloaded, non-contact, frictionless air bearings to guide the motion of the
stage and support the payload. This air bearing is a highly accurate precision instrument. The non-contact
nature of the air bearings will provide years of accurate and reliable use if treated properly. Keep the bearing
clean and avoid any shocks, drops or bumps that can cause scratches, dings or distortion of the bearing.
The A-110 incorporates opposing lateral preload and magnetic vertical preload. The magnetic preload makes
the A-110 unsuitable for vertical orientations, unless additional means are provided to prevent separation of the
moving carriage from the base.
4.2. Linear Motor
The A-110 series stage features a brushless, ironless linear 3-phase motor. This type of motor technology is
completely non-contact and is ideally suited to high speeds; high accelerations; fine resolution positioning; and
smooth, constant-velocity scanning. The motor must be commutated by an external motor drive.
4.3. Linear Encoder
The A-110 series stage features an optical non-contact linear encoder for direct measurement of the stage
position. This feedback signal is used by an external motion controller to close the servo loop for position and
velocity control.
The A-110 series stage offers three types of encoders:
Incremental with analog (sine) output: Suitable for use with controllers using on-board encoder interpolation.
Incremental with digital (TTL) quadrature output: 50nm resolution is the standard offering, contact PI for
alternate resolutions.
Absolute with BiSS-C 32-bit serial output: eliminates the need for startup homing routines and limit switches.
4.4. Limits and Index Mark (incremental encoders only)
When equipped with either of the incremental encoder options, the A-110 series stage features non-contact limit
switches and home index markers. Both the limits and the index position are integral to the encoder electronics.
The limits are magnetic and active high and are placed near the ends of travel. The index mark is optical.
Page 12 of 29
Page 13
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Dispose of packaging materials according to local environmental regulations.
The A-110 stage must always be transported and shipped with the shipping lock engaged. Failure
to use the shipping lock when moving, transporting, or shipping the stage may allow movement
between the stage table and stage base, causing damage.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches,
dings, dents, or distortion of the stage.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
5. Unpacking and Handling
Carefully unpack the air bearing stage and other components from the shipping packaging. Inspect the contents
for signs of damage. If there is any sign of damage or missing parts, contact PI immediately. Compare the
package contents to packing list and notify PI immediately if any parts are missing or incorrect. Keep all
packaging materials in case the product needs to be returned.
Before mounting or using the stage, it is recommended to let the stage stabilize at room temperature for at least
12 hours. Clean any dust or shipping debris off the stage by blowing it off with pressurized nitrogen or clean, oilfree air.
If the stage will be mounted in such a way as to block the product label, it is recommended to record the stage
serial number for future reference.
Page 13 of 29
Page 14
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
6. Installation
6.1. Mounting Surface Quality and Preparation
The A-110 is intended for horizontal mounting only in which the plane of the stage tabletop is level and parallel to
the plane of the ground.
The mounting surface should be flat and have adequate stiffness in order to achieve the maximum performance
from the A-110. When the A-110 series stage is mounted to a non-flat surface, the stage can be distorted as the
mounting screws are tightened. This distortion will decrease the overall accuracy of the stage. Adjustments to the
mounting surface must be done before the stage is secured. The effects of flatness on mounting are illustrated
below.
To maintain accuracy, the mounting surface should be flat within 1 µm per 150 mm. A laboratory grade AA
granite surface plate is recommended. Do not shim under the stage base.
Prepare the mounting surface and bottom of the stage base with precision flat stones to remove any burrs or high
spots. Clean the mounting surface and bottom of the stage with the appropriate cleaners (isopropyl alcohol).
6.2. Mounting Procedure
1. Place the stage on the mounting surface.
2. Remove the shipping lock(s).
3. Connect the compressed air supply and turn on the air.
4. Move the stage table by hand as needed to access the mounting holes in the stage base.
5. Affix the stage base to the mounting surface using 4x M5 SHCS, 45mm long minimum. For travel lengths of
200, 300, and 400, use one additional M5 SHCS, 20mm long minimum, to affix the base near its center.
Page 14 of 29
Figure 4 - Mounting Surface Quality
Page 15
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
The stage contains high power magnets that can attract ferrous objects, such as loose screws.
Attracted objects can damage the stage. Make sure mounting screws and tools are not pulled into
the motor magnet track.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
Figure 5 - Stage Base Mounting Holes
6. Torque the mounting screws (begin from the center out for best accuracy). The typical maximum torque
value for M5 socket head cap screws is 5-6 N-m.
The stage should now be securely mounted. Make sure to allow sufficient clearance at the end of the stage to
attach the motor and encoder cables.
6.3. Removing the shipping lock(s)
The stage is shipped with a shipping lock installed to prevent unwanted motion between the stage table and the
stage base. To remove the shipping lock, remove the bolt using a 3mm Allen key. Make sure to safely store the
shipping lock and label for future use, should the stage need to be moved or transported.
Figure 6 – Shipping Lock
6.4. Air Supply
Air Requirements
The A-110 stage requires clean, oil-free, and dry compressed air to operate properly. See Section 10.1 Basic
Specifications for detailed air supply requirements.
It is recommended that a pressure switch is installed to monitor air supply pressure and to remove power from
the stage motor if supply pressure drops below 40 psi to prevent damage to the air bearing surfaces.
The air inlet fitting to the A-110 stage accepts flexible polyurethane pneumatic tubing, 4mm OD.
Page 15 of 29
Page 16
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
The stage table should never be moved without the air supply turned on. Moving the
stage table with no air supply, causing sliding metal-to-metal contact, may damage the
bearing surfaces.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
Figure 7 - Air Inlet Fitting Location
Turning off the air supply when not in use
When the stage is not in use, the air supply may be turned off to preserve compressed air and energy.
6.5. Affixing the Payload to the Stage
The payload should be flat, rigid, and comparable to the stage in quality. For valid system performance, the
mounting interface surface should be flat within 1 µm per 50 mm.
The stage tabletop features 15x M6x1 tapped holes for mounting the user’s payload. These are the only features
that should be used to attach a payload to the stage.
Figure 8 - Payload Mounting Holes
Prepare the payload mounting surface and the stage table with precision flat stones to remove any burrs or high
spots. Clean the payload mounting surface and the stage table with the appropriate cleaners (isopropyl alcohol).
Page 16 of 29
Page 17
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Do not attempt to modify the stage table in any way. Customer modifications may damage the
stage.
The M6 screws used to attach the payload to the stage table should not thread into the stage
tabletop any more than 6mm. Longer screws may damage the table.
Do not overtighten the payload mounting screws. A maximum torque of 15 N-m is
recommended.
Do not exceed the maximum payload specified for the A-110 stage. Payload CG should not be
cantilevered beyond the extents of the stage table.
The stage contains high power magnets that can attract ferrous objects, such as loose screws.
Attracted objects can damage the stage. Make sure mounting screws and tools are not pulled
into the motor magnet track.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
6.6. XY Configurations
XY configurations of the A-110 series stage are not available at this time without customization. Please contact
PI for a quote if you require a multi-axis stack.
Page 17 of 29
Page 18
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
#
Description
1.
End plate of the A-110
2.
Flat washer (2x)
3.
Internal tooth washer (2x)
4.
M4 Screw
5.
Cable lug
6.
Protective earth conductor
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
6.7. Connecting the Stage to Protective Earth
The A-110 has an M4 threaded hole for connecting the protective earth conductor. This hole is marked with the
symbol for the protective earth ground . The hole is located on the end plate of the stage near the air inlet.
Figure 9 - Earth ground connection point location
Figure 10 - Mounting of the protective earth conductor (profile view)
1. If necessary, fasten a suitable cable lug to the protective earth conductor. Note that the conductor and lug
are not in the scope of delivery of the stage.
2. Fasten the cable lug of the protective earth conductor to the protective earth connection of the A-110 as
shown in the profile view using the M4 screw proved. You will need a 2mm Allen key.
3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm.
4. Make sure that the contact resistance at all connection points relevant for mounting the protective earth
conductor is <0.1 Ω at 25 A.
Page 18 of 29
Page 19
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Only use the interconnect cables that have been designed for the combination of stage and
controller being used. Connection using the wrong cable may result in damage to the stage and
the controller.
To minimize the possibility of electrical shock and bodily injury or death, disconnect all electrical
power prior to making any electrical connections.
To minimize the possibility of electrical shock and bodily injury or death when any electrical
circuit is in use, ensure that no person comes in contact with the circuitry when the stage is
connected to a power source.
To minimize the possibility of bodily injury or death, disconnect all electrical power prior to
making any mechanical adjustments.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
6.8. Connecting the Cables
Stage interconnect cables are not in the scope of delivery of the A-110 series stage. However, PI offers several
standard cable sets that can be used, depending on the motion controller being used. See Section 10.6 Pin
Assignments for connector pin assignments.
1. Connect the stage cables for the motor and encoder to the connectors on the end plate of the A-110 stage.
2. Tighten the jack screws with a flat head screwdriver to secure the cables. Do not overtighten the screws.
Figure 11 – Stage Electrical Cable Connectors
Page 19 of 29
Page 20
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Moving parts of the stage can cause crushing or shearing injuries. All personnel must remain clear
of any moving parts.
Collisions can damage the stage and the payload.
Take care when operating the stage to ensure that no collisions are possible between the
stage, the load to be moved, and the environment in the motion range of the stage.
Do not place any objects in areas where they can be caught by moving parts.
Stop the motion immediately if a controller malfunction occurs.
Do not attempt to operate the stage with the shipping lock installed.
The A-110 can develop high forces and accelerations. If the stage has been improperly or
incompletely installed, the stage, the payload, and the environment can be damaged during
operation.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
The drive mechanism of the A-110 is not self-locking. The stage can therefore unintentionally move
in the following cases:
Switching off or restarting the controller
Switching off the servo mode for the axis
Unintentional displacement can damage the stage, the payload to be moved, and the environment.
Only operate the A-110 with a horizontally aligned motion axis.
Before switching off or rebooting the controller, take suitable measures to ensure that no
unintentional displacement of the stage table is possible.
Do not exceed the operating voltage range for which the A-110 is specified.
Causing the stage table to hit the hard stop with maximum speed and force can cause damage to
the stage and the payload.
Stop the motion immediately if a controller malfunction occurs.
Ensure that the end of the travel range is approached at low velocity.
Setup the motion controller to observe end of travel limits (if applicable).
Determine the maximum velocity for your application.
Set suitable soft limits for closed-loop operation on the controller.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
7. Startup and Operation of the Stage
See the user’s manual of the controller being used with the A-110 stage for instructions about startup and
operation.
Note that the servo tuning values may need to be adjusted if the payload mass or size changes. If PI was not
given user application information at the time of order, the servo was tuned with no payload mass.
Page 20 of 29
Page 21
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
The optimum values of the servo-loop parameters in the controller depend on the application and
the payload mass. Unsuitable servo-control parameter settings of the controller can cause the
control loop to become unstable and for the stage to vibrate. Oscillations can damage the stage
and/or the load affixed to it.
If the stage is oscillating or exhibits unusual operating noise, immediately switch off the servo
mode for the axis on the controller or switch off the controller.
Only switch on the servo mode for the axis on the controller after you have modified the servo-
control parameter settings; see the manual of the controller.
Note that the servo tuning values may need to be adjusted if the payload mass or size
changes.
Do not use cleaning agents other than isopropanol. Agents such as acetone or other detergents
can damage certain parts of the stage.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
8. Maintenance
Other than basic cleaning, the A-110 series stage is maintenance-free.
8.1. Cleaning the Stage
To clean the stage bearing surfaces, use isopropanol and a clean, lint-free cloth or wipe. Apply the cleaning
agent to the cloth and wipe down all of the air bearing surfaces. When cleaning the air bearing it is recommended
to leave the air supply turned on to help blow any particles out of the bearing and prevent particles from entering
the nozzles. Be especially careful of fingerprints on the bearing surfaces as they attract dust and may tarnish the
bearing finish.
Page 21 of 29
Page 22
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches,
dings, dents, or distortion of the stage.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
Do not attempt to move or transport the stage with the payload attached. This may damage the
stage and the payload.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
8.2. Preparing the Stage for Transport
If the stage requires movement, transport or shipping, follow these steps:
1. Disconnect stage cables.
2. Remove the payload.
3. Remove the stage base mounting screws. With the air supply on, move the stage table by hand as needed
to access the mounting holes in the stage base.
4. With the air supply on, move the stage table to one end of travel by hand.
5. Install the shipping lock and lock label but do NOT fully tighten.
6. Turn off the air supply and disconnect the air supply line from the stage.
7. Tighten the stage shipping lock bolt using a 3mm Allen wrench.
The stage is now secured and can be safely moved. If the stage needs to be shipped, use the original packing
materials.
Page 22 of 29
Page 23
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
9. Customer Service
For inquiries and orders, contact your PI sales engineer or send us an e-mail ([email protected]).
If you have questions concerning your system, have the following information ready:
Product codes and serial numbers of all products in the system
Firmware version of the controller (if present)
Version of the driver or the software (if present)
Operating system on the PC (if present)
If possible: Take photographs or make videos of your system that can be sent to our customer service
department if requested.
Page 23 of 29
Page 24
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Model
A-110.050
A-110.100
A-110.200
A-110.300
A-110.400
Travel
50 mm
100 mm
200 mm
300 mm
400 mm
Drive System
Brushless ironless linear servo motor, 3-phase
Feedback System
Non-contact optical linear encoder with travel limits and home index
Maximum Velocity
(1)
0.5 m/sec
1 m/sec
Maximum Acceleration
(1)
(Unloaded)
1 g
3 g
Maximum Payload
(2)
10 kg
Accuracy
(3)
(uncompensated)
+/-1.0 µm
+/-1.5 µm
+/-2.0 µm
+/-3.0 µm
+/-4.0 µm
Repeatability
(4)
+/-0.5 µm
Straightness & Flatness
(5)
< +/- 10 nm / 10mm
< 2 µm TIR
< 3 µm TIR
< 4 µm TIR
< 5 µm TIR
Pitch & Yaw TIR
(5)
< 2 arc-sec
< 4 arc-sec
< 6 arc-sec
< 8 arc-sec
< 10 arc-sec
Stage Mass
6.3 g
7.5 kg
11 kg
12 kg
14 kg
Moving Mass
2.5 kg
2.6 kg
Cabling
Internal, non-moving
External, moving loop
Operating Pressure
(6)
65 (+/-5) psi (450 +/-35 kPa)
Air Consumption
< 1.0 SCFM (28 SLPM)
Air Quality
Clean (filtered to 1.0 µm or better) - ISO 8573-1 Class 1
Oil-free -ISO 8573-1 Class 1
Dry (-15 °C dew point) - ISO 8573-1 Class 3
Construction
Hardcoat Aluminum
SS Fasteners
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
10. Technical Data
See the PI website for latest published specifications.
10.1. Basic Specifications
Notes:
1. Maximum velocity and acceleration based on unloaded stage capability; may be limited by payload, controller, or drive performance.
2. Assumes payload CG is centered no more than 50mm above the stage table. Stage is only designed for horizontal operation.
3. Improved accuracy can be obtained with controller-based error compensation. Accuracy values assume short-term time duration and do
not consider the long-term effects of thermal drift on the stage.
4. Encoder resolution chosen may impact repeatability specification.
5. Dependent on the flatness of the surface to which the stage is mounted.
6. To protect stage from damage, an under-pressure air sensor tied to the controller E-stop input is recommended.
Page 24 of 29
Page 25
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Model
A-110.050, .100
A-110.200, .300, .400
Bus Voltage
48 VDC nominal, 60 VDC max
Force Constant
4.2 N/A
12.3 N/A
Peak Current
6.0 A
6.9 A
Continuous Current
2.2 A
3.2 A
Peak Force
25 N
85 N
Continuous Force
9.2 N
39 N
Back EMF
(phase-to-phase)
4.2 V/m/sec
10.1 V/m/sec
Resistance
(phase-to-phase)
8.2 ohms
3.6 ohms
Inductance
(phase-to-phase)
2.7 mH
1.24 mH
Electrical Cycle Length
(pole pitch)
15.24 mm
24 mm
Option Code A B
C
Type
Incremental
Absolute
Incremental
Resolution
20 µm signal period
1 nm
50 nm
Output Signal
Analog Quadrature
1 Vp-p, Differential
BiSS-C 32-bit serial
Digital RS422 Quadrature,
Differential
Power Input
5 VDC, <200 mA
5 VC, <250mA
5 VDC, <200 mA
Input Ripple
200 mVp-p max @ up to 500 kHz
Limits
Open collector output,
Asynchronous pulse,
Active high
None
Open collector output,
Asynchronous pulse,
Active high
Index Mark
0.8 to 1.2 Vp-p, Differential
None
1 count wide
Synchronized to Output Signal
Area of use
For indoor use only
Vacuum Operation
This product is not compatible with operation in a vacuum environment.
Relative humidity
40% to 60% non-condensing
Operating temperature
(1)
+15°C to +25°C
Storage temperature
0°C to +40°C in original packaging
Dust Exposure
The A-110 series stage is not suited for dusty, dirty, oily, or wet environments.
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
10.2. Motor Electrical Specifications
(A-110.xxxx1 standard motor option)
10.3. Encoder Specifications
10.4. Ambient Conditions
Notes:
1. For optimum performance, the stage should be operated at 20°C. Any deviation from this temperature could degrade the precision and
performance of the stage. Any deviation outside the range shown above may damage the stage.
Page 25 of 29
Page 26
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
10.5. Dimensions
Figure 12 - A-110 Series Stage Dimensions
Page 26 of 29
Page 27
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Pin
Function
Description
A1
PHA
Motor phase A
A2
PHB
Motor phase B
A3
PHC
Motor phase C
A4
GND
Shield/GND
1
N/C
No connection
2
N/C
No connection
3
N/C
No connection
4
N/C
No connection
5
N/C
No connection
Pin
Function
Description
1
Cos-
Encoder Analog Cosine -
2
Sin-
Encoder Analog Sine -
3
Index+
Encoder Analog Reference +
4
+5v
Encoder power
5
+5v Sense
Encoder power sense line
6
Vx
Encoder Setup
7
Lim+
Open collector Limit+
8
Lim-
Open collector Limit-
9
Cos+
Encoder Analog Cosine +
10
Sin+
Encoder Analog Sine +
11
Index -
Encoder Analog Reference -
12
GND
Encoder ground
13
GND Sense
Encoder ground sense line
14
CAL
Encoder Calibration
15
N/C
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
10.6. Pin Assignments
Motor Connector, Motor Option “1”
Type: DB9W4M
Encoder Connector, Encoder Option “A”
Type: DB15M
Page 27 of 29
Page 28
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
Pin
Function
Description
1
SHEILD
Inner Shield
2
MA+
Encoder CLK+ (MA+)
3
MA-
Encoder CLK- (MA-)
4
+5v
Encoder power
5
+5v
Encoder power
6
SLO+
Encoder Data+ (SLO+)
7
SLO-
Encoder Data- (SLO-)
8
GND
Encoder ground
9
GND
Encoder ground
10
N/C 11
N/C 12
N/C 13
N/C
14
N/C
15
N/C
Pin
Function
Description
1 X Encoder Setup
2
GND
Encoder ground
3
E-
Alarm signal
4
CHC-
Encoder digital Reference -
5
CHB-
Encoder digital Channel B-
6
CHA-
Encoder digital Channel A-
7
+5v
Encoder power
8
+5v
Encoder power
9
GND
Encoder ground
10
Lim-
Open collector Limit-
11
Lim+
Open collector Limit+
12
CHC+
Encoder digital Reference +
13
CHB+
Encoder digital Channel B+
14
CHA+
Encoder digital Channel A+
15
N/C
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
Encoder Connector, Encoder Option “B”
Type: DB15M
Encoder Connector, Encoder Option “C”
Type: DB15M
Page 28 of 29
Page 29
User Manual
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A110D0001 Rev 1.2 for the A-110 Series
MRe, 28-Nov-2016
11. Old Equipment Disposal
In accordance with EU law, electrical and electronic equipment may not be disposed of in EU member states via
the municipal residual waste.
Dispose of your old equipment according to international, national, and local rules and regulations.
In order to fulfil its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG
undertakes environmentally correct disposal of all old PI equipment made available on the market after 13
August 2005 without charge.
Any old PI equipment can be sent free of charge to the following addresses:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstr. 1
D-76228 Karlsruhe
Germany
PI (Physik Instrumente) L.P.
16 Albert Street
Auburn, MA 01501
USA
Page 29 of 29
Loading...