Operating Instructions
Turbomolecular Drag Pumps.
With Magnetic Bearings
TMH 1600M / TMU 1600M
PM 800 344 BE/C (0011)
2
Index
Page
Page
1. Safety Instructions.................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2. Understanding The
TMH 1600 M/ TMU 1600M....................... 4
2.1. Main Features..................................................................... 4
2.2. Differences Between The Pump Types.......................... 4
2.3. Temperature Management System (TMS) .....................4
3. Installation............................................... 5
3.1. Preparations For Installation............................................ 5
3.2. Installing The Pump, Connecting The
High Vacuum Side.............................................................. 5
Fitting The Splinter Shield (Accessory).......................... 6
3.3. Connecting The Fore-Vacuum Side ................................ 6
3.4. Connecting The Cooling Unit............................................ 6
Water Cooling..................................................................... 6
Air Cooling (Accessory) .................................................... 7
3.5. Connecting The Venting Valve ........................................ 7
3.6. Connecting The Sealing Gas............................................ 8
3.7. Connecting The Casing Heating Unit.............................. 8
3.8. Connecting The Magnetic Bearing Controller .............. 8
3.9. Connecting The
Temperature Management System (TMS) .................... 9
4. Operations................................................ 9
4.1. Before Switching ON......................................................... 9
4.2. Switching ON...................................................................... 9
4.3. Heating (only for pumps with casing heating unit)....... 9
4.4. Operations With The TMS .............................................. 10
4.5. Intermittent Mode Operations
Of The Backing Pump...................................................... 10
4.6. Gas Type Dependent Operations ...................................10
4.7. Safety Bearings.................................................................11
4.8. Switching OFF And Venting............................................ 11
4.9. Shutting Down For Longer Periods ............................... 11
5. What To Do In Case
Of Breakdowns? .................................... 12
6. Maintenance.......................................... 13
7. Service.................................................... 13
8. Technical Data....................................... 14
8.1. Dimensions.........................................................................15
9. Spare Parts............................................. 16
10. Accessories ........................................... 17
Declaration of Contamination............................................... 18
Manufacturer’s Declaration............ last page
Please note: Current operating instructions are available via
www.pfeiffer-vacuum.de under ”Infoservice”.
3
Abbreviations in the text
TMS = Temperature management system
TCM = Magnetic bearing controller
TMP = Turbomolecular pump
Abbreviations on the type plate of the pump
TMH 1600M: Fully magnetic bearing pump
Suffix”C“: Surface protection for passive protection of
the pump
Suffix ”P“: Purge gas connection for the prevention of
the ingress of aggressive gases into the motor
and bearing area
Suffix: ”T“: Integrated temperature management
system
Suffix ”H“: High level gas throughputs for process
technology
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions
Danger of burns from
touching hot parts.
Danger of an electric shock.
Danger of personal injury.
Danger of damage to the pump
or to the system.
Danger of injury from rotating parts.
Attention to particulary important information on
the product, handling the product or to a
particular part of the documentation.
Modifications reserved.
☞
PLEASE NOTE
☞ Read and follow all instructions in this manual.
☞ Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞ Avoid exposing any part of the body to vacuum.
☞ Observe the safety and accident prevention regulations.
☞ Regularly check that all accident prevention measures are
being complied with.
☞ Do not operate the turbopump with open high vacuum
flange.
☞ Do not carry out any unauthorised conversions or
alterations to the turbopump.
☞ When returning the turbopump observe the shipping
instructions.
☞ Use at least 6 bracket screws to connect the high vacuum
flange.
☞ The turbopump must be anchored in accordance with the
installation instructions.
☞ Do not disconnect the pump cable during operations.
☞ When the turbopump is open disconnect the voltage
supply to the magnetic bearing.
☞ After switching off the turbopump only disconnect the
magnetic bearing from the mains once the rotor is at rest.
☞ If a heater is in use temperatures of up to 120 °C can be
present in the area of the high vacuum flange.
Take care to avoid burns!
☞ When the temperature management system is in operati-
on, surface temperatures of up to 100 °C can arise on the
middle and upper part of the pump. Because even higher
temperatures are possible as a result of malfunctions, it is
adviseable to take protective measures against accidental
touching for temperatures of up to 150 °C.
☞ Keep leads and cables well away from hot
surfaces (> 70 °C).
☞ When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞ When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞ The unit has been accredited protection class IP 20. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken.
1.1. For Your Orientation
Instruction in the text
➡ Working instruction: Here, you have to do something.
Symbols used
The following symbols are used throughout in illustrations.
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Electric connection
Sealing gas connection
Air cooling
1. Safety Instructions
4
2.1. Main Features
Cooling
Standard: Water cooling
Alternative: Air cooling as an accessory (permissible ambient
temperature < 30 °C).
Bearings
High vacuum side: Wear free permanent magnetic bearing.
Fore-vacuum side: Wear free, electromagnetic radial and
axial bearings.
In addition: Dry running safety bearings.
Proper use
– The Turbomolecular Pumps TMH/TMU 1600M may only be
used for the purpose of generating vacuum.
– The Turbomolecular Pumps TMH/TMU 1600M C (please
see the rating plate) are designed to pump corrosive gases
and vapours. Where corrosive gas processes are involved,
gas bonding and particles which can damage the surfaces
of the pump can be produced. The motor and bearing compartments have to be protected with sealing gas.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
Feature TMH 1600M TMU 1600M TMH 1600M H
High vacuum flange DN 200 ISO-K DN 200 CF-F DN 200 ISO-K
DN 250 ISO-K DN 250 CF-F DN 250 ISO-K
Seal Viton Metal Viton
Attainable < 1 · 10-8mbar < 1 · 10
-10
mbar < 5 · 10
-8
final pressure (without baking-out) (with baking-out) (without baking-out)
2.3. Temperature Management System (TMS)
Pumps with the designation TMH 1600M T/TMU 1600M T
(please see the rating plate) can be heated in the area of the
pressure stages with the heaters integrated in the casing and
temperature sensors up to a maximum of 90 °C.
The connections for heating and sensors are accessible centrally via a separate connection box.
When the TMS is in operation the additional casing heating
unit on the turbomolecular pump is not possible.
2. Understanding The TMH 1600M / TMU 1600M
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– The turbopump may only be operated in conjunction with a
PFEIFFER Magnetic Bearing Controller TCM 1601 with
relevant cables.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– The turbopump may only be operated subject to the
ambient conditions in accordance with protection class
IP 20.
Improper use
The following is regarded, inter alia, as improper:
– The pumping of explosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 8. ”Technical Data”).
– The use of accessories which are not named in this
manual or which have not been agreed by the
manufacturer.
– Operating the pump in environments which require a pro-
tection class superior to IP 20.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
Turbomolecular Drag Pump TMH 1600M
1 High vacuum flange
2 Fore-vacuum flange
3 Cooling water connection
5 Electric connection
9 Locking screw/sealing gas connection
42 Venting valve
1
3
2
9
5
42
5
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
– The maximum permissible rotor temperature of the pump is
120 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exceeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).
– Only remove the blank flange from the high and for-vacu-
um side immediately before connection.
– Where magnetic fields of > 4 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the heating sleeve and the body
of the pump must be heat insulated to prevent burns from
accidental contact.
– In the event of a sudden standstill of the rotor, torques of
up to 8270 Nm can arise and these must be taken up by the
turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 6 bracket screws, or
– CF flange with the complete set of M8 screws, or
– underside of the pump with 8 screws M8,
screws quality 8.8.
3.2. Installing The Pump,
Connecting The High Vacuum Side
The utmost cleanliness must be observed when
fitting all high vacuum parts. Unclean
components prolong the pumping time.
Using the splinter shield
The use of a splinter shield (accessory) in the high vacuum
flange protects the turbopump against foreign bodies coming
from the vacuum chamber but does reduce the volume flow
rate of the pump by approximately 15%.
For fitting splinter shields please refer to “Fitting the splinter
shield”.
The high vacuum side can be flanged directly to the vacuum
chamber or via a bellows or a vibration compensator
(accessory).
Connecting Via A Bellows
If the high vacuum side is to be flanged via a bellows, the
turbopump must be secured for example via the holes on the
underside of the turbopump (please see”Dimensions”).
The fastening must be able to withstand the torque referred
to in Section 3.1.
HINWEIS
☞
11
H
V
A
C
B
D
V
V
V
H
H
H
Permissible installation positions for the turbopump
11 Vacuum chamber
The maximum loading capacity of the high
vacuum flange is 2000 N (equivalent to 200 kg).
Asymmetric loading on the high vacuum flange
must be avoided.
Shaking the pump can cause overloading on the
magnetic bearing; this can lead to activation of the safety
bearing. Therefore avoid shaking as far as is possible.
Where incitement from the system is involved, for example via
a high vacuum valve, the pump must be secured in such a
way that no movement is possible, especially tilting
movement.
Where rotary vane vacuum pump backing pumps with installation position A or C are involved the fore-vacuum flange
must point downwards.
The use of rotary vane vacuum pumps is not recommended
where installation position B has been selected.
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the pump.
Connecting Via A Vibration Compensator
The maximum permissible temperature at the
vibration compensator is 100°C.
Where a vibration compensator is in use constructional
advice from the manufacturer must be requested.
Directly Flanging The Pump
Oxygen content: max. 4 mg/kg
Chloride content: max. 100 mg/kg
Carbonate hardness: max. 10 ° dH
Consumption of
potassium permanganate: max. 10 mg/kg
Carbon dioxide: Undetectable
Ammonia: Undetectable
pH-value: 7 – 9
Max. fore-line over pressure: max. 6 bar
Minimum flow rate: see 8. ”Technical Data“
6
Fitting The Splinter Shield (Accessory)
➡ Insert the splinter shield in the ISO-K flange in condition on
delivery.
Inserting the splinter shield in ISO-KF flange
A Strap (Condition on delivery)
3.3. Connecting The Fore-Vacuum Side
Recommended PFEIFFER backing pump:
– dry compressing diaphragm pump
– for large vacuum chambers UniDry™ 050-3.
Connecting the backing pump
All connections of the fore-vacuum line: With the usual small
flange components or hose screw connections.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be environmentally damaging.
Comply with all the gas manufacturer’s safety
instructions.
22
23
21
V
Connecting the backing pump
21 Backing pump
22 Fore-vacuum safety valve
23 Fore-vacuum line
➡ The electrical connection of the backing pump: Please see
the operating instructions for the Magnetic Bearing
Controller TCM 1601, PM 800 478 BN.
3.4. Connecting The Cooling Unit
The Turbopumps TMH/TMU 1600M are water cooled as standard.
The permissible ambient temperature for water
cooling is 35 °C.
When operating with reduced levels of gas load, air cooling is
possible (please see ”Accessories“)
The permissible ambient temperature with air cooling
is < 30 °C and the maximum gas flow and fore-vacuum pressure are reduced compared with water cooling (please refer
to Section 8. Technical Data).
Water Cooling
The cooling water can be drawn either
– from the cooling water mains or
– from Recycled Water Cooling Unit TZK in closed circuit.
Cooling from the cooling water mains
To prevent deposits collecting in the pump the cooling water
must be filtered.
The minimum requirements for the cooling water:
Mechanically clean, optically clear, no turbidity, no sediment,
chemically neutral and temperature > dew point.
➡ Fit the delayed opening fore-vacuum safety valve (e.g.
TVV 001, Accessory) in the fore-vacuum line (in PFEIFFER
rotary vane vacuum pumps already integrated as
standard). This prevents the vacuum chamber being ventilated via the backing pump.
➡ With rigid pipe connections: Fit a bellows in the
connecting line to reduce vibration.
➡ Before insert the splinter shield in the CF flange the strap
must be bent.
Inserting the splinter shield in CF-F flange
A Strap (bent)
A
A
7
34
33
31
32
3
Cooling from the cooling water mains
3 Cooling water connection
31 Supply line
32 Return line
33 Dirt trap
34 Cooling Water Monitor TCW 002
Cooling with the Recycled Water Cooling Unit TZK
(Accessory)
Dirt traps in the fore-lines are not necessary.
All other steps as for connecting to the cooling water mains.
3
34
35
TZK
Cooling with Recycled Water Cooling Unit TZK
3 Cooling water connection
34 Cooling Water Monitor TCW 002
35 Recycled Water Cooling Unit TZK
➡ Place the pump on its high vacuum flange
(Caution: do not damage the sealed surfaces).
➡ Pull out the synthetic feet from the base of the pump.
➡ Screw air cooling to the holder 37 with 4 srews M8 and
spring washers onto the turbopump. The fan have to be
installed parallel to the electric connection.
Connection to the cooling water mains
➡ Fit the dirt trap (Accessory) in the supply line.
➡ Connect the supply line with hose clips onto one of the two
cooling water connections.
➡ Connect Cooling Water Monitor TCW 002 in return line.
➡ Connect the return line to the other cooling water connec-
tion of the turbopump.
➡ Tighten all hose clips and check for firm seating of the
hoses.
➡ Tighten the hollow screws on the cooling water
connection to a torque of 20 Nm.
Electrical connection, air cooling
➡ The electrical connection of the air cooling unit is made on
the control line 57 (please see Section 3.8.) on the connecting cable TCM-turbopump (see the operating instructions
for the TCM 1601, PM 800 478 BN).
Alternatively, either the casing heating unit or the TMS can
be connected to the control line. Simultaneous operations of
the functions is not possible.
3.5. Connecting The Venting Valve
Uncontrolled venting can cause overloading on
the axial bearing resulting in activation of the
safety bearing.The TMH/TMU 1600M may only
be vented via the venting valve fitted. It must
not be replaced by other venting equipment.
Maximum pressure on the venting valve: 1.5 bar absolute.
If a higher venting rate is required further venting
components can be opened as soon as the rotation speed of
the pump is less than 100 Hz.
If, from the beginning, the pump is to be vented with
equipment other than that fitted, the pressure increase on the
high vacuum flange must be limited to 2 mbar/s until the rotation speed is less than 100 Hz.
Electrical connection, venting valve
The electrical connection of the venting valve is via the
connecting cable magnetic bearing controller - turbopump.
➡ Connect the plug from the cable junction to the venting
valve and secure with screw.
Please also refer to the connections diagram for the
TCM 1601 in Operating Instructions PM 800 478 BN.
Fitting the air cooling unit
5 Electric connection
36 Fan
37 Holder
38 M8 srew and
spring washer (4x)
Underside pump
Air Cooling (Accessory)
Air cooling is only permissible where the
ambient temperature is < 30 °C.
Ensure that the supply and exhaust air ducts
are not restricted.
Fitting the air cooling unit
➡ Place a fluff-free and clean pad on the working surface.
8
3.6. Connecting The Sealing Gas
To protect the pump, particularly where corrosive or dust producing processes are involved, it is necessary to use sealing
gas. Connection is made via the sealing gas valve (please see
“Accessories”).
For this, please refer to Section 2.1. "Main
Features" for the sealing gas connection.
Please refer to Operating Instructions PM 800 229 BN for
details on installing the sealing gas valve and adjusting the
sealing gas flow.
3.7. Connecting The Casing Heating Unit
Final pressures are attained more rapidly when turbopump
and vacuum chamber are heated.
The heating duration is dependent on the degree of contamination and on the required final pressure. The heating should
last for at least 4 hours.
Where casing heating unit is involved the turbopump must be water cooled.
High temperatures arise when baking out turbo-
pumps and vacuum chambers. There is a danger of burns from touching hot parts, even after
the heating has been switched off.
Ideally, the heating sleeve, pump casing and
vacuum chamber should be insulated during installation.
When baking out do not touch the heating sleeve, pump
casing and vacuum chamber.
➡ Screw the heating sleeve tightly onto the casing with the
securing screws and fit protection against accidental
contact.
➡ Electrical connection, casing heating unit: Please see
Operating Instructions PM 800 478 BN for the TCM 1601.
☞
PLEASE NOTE
☞
PLEASE NOTE
51
53
52
50
54
57
Connecting the magnetic bearing controller with the turbopump
50 Magnetic Bearing Controller TCM
51 Bayonet plug - TCM
52 Connecting cable TCM - TMP
53 Bayonet plug TMP
54 Venting Valve TVF 005
57 Control line
Before disconnecting the plug connection:
– Rotor rotation speed = 0 Hz
– Disconnect the magnetic bearing controller
from the mains.
Voltages of up to 150 V can be present on the
open contacts of a running-down pump.
There is a danger of an electrical shock from
touching the contacts.
3.8. Connecting The Magnetic Bearing
Controller
➡ Plug in the connecting cable between the magnetic
bearing controller and the turbopump.
Caution! Take care to ensure that the cable
plugs are put straight onto the built-in plugs to
avoid damage to the connecting points.
For details please refer to the operating instructions for the Magnetic Bearing Controller
TCM 1601/PM 800 478 BN.
9
4. Operations
4.1. Before Switching ON
Turbopump rotors rotate at high speed. When
the high vacuum flange is open there is a danger
of injury and of damage to the pump caused by
objects falling into the pump. Therefore never
operate the pump with open high vacuum flange.
When operating with casing heating unit or TMS
operations phigh temperatures can arise on the
pump surfaces.
➡ Pre-select the required operational functions and parame-
ters on the Magnetic Bearing Controller TCM 1601.
➡ With water cooling: Open cooling water supply and check
flow.
4.2. Switching ON
➡ Switch on the magnetic bearing electronic controller with
switch S1 on the rear side of the TCM 1601.
➡ Switch on the pumping station with the push button on
the front panel of the TCM 1601.
– If air cooling is involved the cooling fan is also switched on
by the magnetic bearing controller.
– The backing pump is automatically started with the
Pumping Station Control Unit TCS 180.
➡ Switch on the backing pump if it is not switched via the
pumping station control unit.
Take care when pumping hazardous gases and
observe the safety precautions of the gas manufacturer.
4.3. Heating (only for pumps with casing
heating unit)
The heating duration is dependent on the degree of contamination and on the required final pressure. The heating should
last for at least 4 hours.
Where casing heating unit is involved the turbopump must be water cooled.
➡ Switch on the turbopump heating in the menu of the
Magnetic Bearing Controller TCM 1601 (please see
Operating Instructions PM 800 478 BN for the TCM 1601).
☞
PLEASE NOTE
3.9. Connecting The Temperature
Management System (TMS)
Pumps with the designation TMH 1600M T/TMU 1600M T
(please see the rating plate) can be heated to a maximum of
90 °C in the Holweck stages range with the heaters and temperature sensors (TMS) integrated in the middle casing.
During TMS operations the additional flange heating for the
turbomolecular pump is not possible.
During TMS operations the turbopump must be
operated with water cooling.
For connection and operation of the temperature
management system (TMS) please refer to operating
instructions for the TMS, PM 800 517 BN and
for the TCM 1601, PM 800 478 BN.
☞
PLEASE NOTE
Temperature management system
95 Connection box
96 Connecting cable for the heating elements
96
95
10
4.6. Gas Type Dependent Operations
Where high level gas loads and rotation speeds are involved,
the resulting friction subjects the rotor to the effect of great
heat. To avoid over-heating, a power rotation speed characteristic line is implemented in the TCM 1601; this ensures that
where maximum gas loads are involved, the pump will operate at any rotation speed without the danger of damage
arising.
The maximum power is dependent on the type of gas. Two
characteristic lines are available for any type of gas in order
to fully exploit the power potential of the pump:
– "Gas-Mode 0" for gases with molecular mass ≥ 40 as, for
example, Argon;
– "Gas-Mode 1" for all lighter gases.
➡ Set the applicable gas mode on the TCM 1601 (please refer
to Operating Instructions PM 800 478 BN for theTCM 1601).
Pumping gases with molecular mass ≥ 40 with
the incorrect gas mode can cause damage to
the pump.
For the vertex of the power characteristic line please refer to
Section 8. Technical Data.
Maximum power is applied when the pump starts in order to
limit the time required. Once the set rotation speed is
attained, switching to the selected power characteristic line
is automatic.
If the gas dependent maximum power is exceeded, the rotation speed is reduced until equilibrium between the
permissible power and gas friction is attained. The power
limitation serves to protect the pump against thermal overloading. In order to avoid rotation speed fluctuations it is
recommended to set, in rotation speed setting mode, the
equilibrium frequency or a somewhat lower frequency.
4.4. Operations With The TMS
If the pump is equipped with the temperature management
system (TMS) (TMH/TMU 1600M C T, see rating plate),
heating is possible in the area of the pressure stages with the
heaters integrated in the middle casing part and temperature
sensors up to a maximum of 90 °C.
➡ Connect the TMS to the magnetic bearing controller.
For connection diagram, function and circuit diagram
please refer to the operating instructions for the
TMS, PM 800 517 BN and for the TCM 1601 PM 800 478 BN.
– Condensable media may only be pumped once the
selected TMS temperature has been attained.
In order to optimize the performance of the pump in gas load
operations and to ensure temperature stability, the rotation
speed of the pump in the TMS mode is slightly reduced by
activating the TMS heating.
For specific rotation speeds in the TMS mode please refer to
Section 8, ”Technical Data”.
As a matter of principle, TMS heating is only activated on
attainment of the rotation speed switchpoint.
4.5. Intermittent Mode Operations Of The
Backing Pump
Where Pumping Station Control Unit TCS 180 is in operation
there is the option, under certain pre-conditions, to select
intermittent mode operations on the diaphragm pump (please
refer to the Section "Operations With Pumping Station Control
Unit TCS 180 in the TCM 1601 Operating Instructions
PM 800 478 BN).
If the setting procedure desribed there cannot be executed
the guide values
<710: BkP Poff> = 150 W und
<711: BkP Pon> = 280 W
can be used for the switch on and switch off threshholds.
The TMH 1600M P C H can not be operated in
connection with a diaphragm pump.
☞
PLEASE NOTE
Power
Frequency
DB
C
A
D-C = Gas mode «0»
B-A = Gas mode «1»
Run up
f
nom
Gas type characteristic line
11
4.7. Safety Bearings
Where heavy, external vibration or improper operating is
involved, the rotor is supported by an additional, dry-running
safety bearing; a clearly audible sound is produced when this
happens. The various causes are evaluated as follows:
– Power failure; Display Warning F 007;
only low level strain on the safety bearing and, with a new
safety bearing set, possible 100 times.
– Uncontrolled venting or vibration;
Malfunction Display E 089;
medium level strain on the safety bearing, and, with a new
safety bearing set, possible 50 times.
– Cable disconnected between the electronics and the
pump; Malfunction Display E 082;
high level strain on the safety bearing, and, with a new
safety bearing set, possible 5 times.
If there is a mix of the events referred to above, the criteria
for the actual wear of the safety bearing is the sum of the partial wear arising from the individual events.
Please get in touch with your local PFEIFFER Service when a
safety bearing replacement is required.
4.8. Switching OFF And Venting
When switching off and venting the turbopump please take
account of the fact that various venting modes are available
(please refer to the operating instructions for the TCM 1601,
PM 800 478 BN).
➡ Switch off the pumping station with the push button
on the front panel of the TCM 1601.
➡ Close the fore-vacuum safety valve (if available). Where
Pumping Station Control Unit TCS 180 is involved, the valve
closes automatically.
➡ With water cooling: Shut off the water supply.
➡ Shut off the supply of sealing gas if operating with sealing
gas.
➡ Do not switch off the TCM 1601 or disconnect from the
mains until the rotation speed has reached 0 Hz.
When operating the pump with aggressive
gases and their reactive products, the operation
of the backing pump and the sealing gas function should be continued for at least 15 minutes
in order to protect the bearings and the drive
and to ensure the complete pumping out of this media.
4.9. Shutting Down For Longer Periods
Vacuum pumps are sometimes used to pump
aggressive or hazardous gases. There is a danger of personal injury resulting from coming into
contact with process gases. Before removing a
turbopump from the system, first:
– Vent the turbopump with a neutral gas or dry air.
– Ensure that there is no residual process gas in the system
nor in the supply lines.
If the turbopump is to be shut down for more than a year:
➡ Remove turbopump from the system.
➡ Close the high vacuum flange and evacuate the turbopump
via the fore-vacuum flange.
➡ Vent turbopump via the venting connection with nitrogen
or dry air.
➡ Close fore-vacuum connection by blank flanging.
➡ Place the pump vertically on its synthetic feet.
➡ In rooms with moist or aggressive atmospheres, the turbo-
pump must be air-sealed in a plastic bag together with a
bag of dessicant, e.g silicagel.
12
Problem Possible causes Remedy
Pump doesn't start • Power supply interrupted • Check fuse in the magnetic bearing
controller
• Check plug contacts on the magnetic
bearing controller
• Check supply line
Pump doesn't attain nominal • Fore-vacuum pressure too high • Check backing pump function
rotation speed within the set start- • Leak or too much gas • Check seals
up time; • Seek leak and repair
Pump cuts out during operations • Reduce gas load
• Start-up phase in the magnetic bearing • Increase the start-up phase
controller set too short
• Thermal overloading caused by
– flow insufficient • Ensure free flow
– air supply insufficient • Ensure adequate air supply
– fore-vacuum pressure too high • Reduce fore-vacuum pressure
– ambient temperature too high • Reduce ambient temperature
Pump doesn't attain final pressure • Pump dirty • Bake out pump
• If seriously contaminated: Request
PFEIFFER Service to clean
• Leak in vacuum chamber, • Seek leak starting with vacuum chamlines or pump ber
• Repair leak
Unusual operating noises • Rotor damaged • Inform PFEIFFER Service of need
for repair
• Splinter shield (if fitted) not • Check seat of splinter shield
seated firmly (see Section 3.2.)
• Pump runs in the safety bearings • Remove the cause; start the pump
again
5. What To Do In Case Of Breakdowns ?
The Magnetic Bearing Controller TCM 1601 contains an
integrated malfunction diagnosis system (error code table).
The malfunction messages are explained in
operating instructions for the TCM 1601, PM 800 478 BN and
their possible causes are listed.
13
6. Maintenance
No liability for personal injury nor material damage will be accepted for damages and operational
interruptions which have been caused by improper maintenance; in addition, all guarantees
become invalid.
Your pump can be cleaned on the spot if it is not very dirty.
Please check procedures with your local PFEIFFER Service
Center.
Your local PFEIFFER Service can advise you regarding
cleaning procedures and any other maintenance and service
work.
☞
PLEASE NOTE
7. Service
Do Make Use Of Our Service Facilities
In the event that repairs are necessary a number of options
are available to you to ensure any system down time is kept to
a minimum:
– Have the pump repaired on the spot by our PFEIFFER
Service Engineers;
– Return the pump to the manufacturer for repairs;
– Replace the pump.
Local PFEIFFER representatives can provide full details.
Before Returning:
➡ Please attach a clearly visible notice "Free of harmful sub-
stances" (both on the unit and also on the delivery note
and any accompanying letters).
"Harmful substances" are substances and preparations as
defined in the current, local, dangerous substances regulations; in the U.S.A. as "materials in accordance with the Code
of Federal Regulations (CFR) 49 Part 173.240 Definition and
Preparation".
We will carry out the decontamination and invoice this work
to you if you have not attached this note. This also applies
where the operator does not have the facilities to carry out
the decontamination work. Units which are contaminated
microbiologically, explosively or radioactively cannot be
accepted as a matter of principle.
Fill Out The Declaration Of Contamination
➡ In every case the "Declaration of Contamination" must be
completed diligently and truthfully.
➡ A copy of the completed declaration must accompany the
unit; any additional copies must be sent to your local
PFEIFFER Service Center.
Please get in touch with your local PFEIFFER representatives
if there are any questions regarding contamination.
Decontaminate units before returning or possible disposal. Do not return any units which are
microbiologically, explosively or radioactively
contaminated.
Returning Contaminated Units
If contaminated have to be returned for maintenance/repair,
the following instructions concerning shipping must be followed:
➡ Neutralise the pump by flushing with nitrogen or dry air.
➡ Seal all openings to the air.
➡ Seal pump or unit in suitable protective foil.
➡ Ship units only in appropriate transport containers.
Repair orders are carried out according to our
general conditions of sale and supply. If repairs
are necessary, please send the pump to your
nearest PFEIFFER Service Center.
Contact Addresses And Telephone Hotline
Contact addresses and telephone numbers can be found on
the back cover of these operating instructions.
☞
PLEASE NOTE
14
8. Technical Data
Feature Unit TMH 1600M TMH 1600M TMH 1600M H
TMU 1600M TMU 1600M
Connection nominal diameter:
Inlet DN 200 ISO-K DN 250 ISO-K DN 200 ISO-K DN 250 ISO-K
DN 200 CF-F DN 250 CF-F
Outlet DN 40 ISO-KF DN 40 ISO-KF
Magnetic bearing controller TCM 1601 TCM 1601
Nominal rotation speed without TMS 1/min 36 000 36 000
Nominal rotation speed with TMS 1/min 33 000 33 000
Standbyrotation speed 1/min 24 000 24 000
Start-up time (up to 90% of the nominal
rotation speed with TCM 1601)
(bis 90 % Nenndrehzahl mit TCM 1601) min 6 7
Noise level dB (A) 55 55
Maximum permissible rotor temperature °C 120 120
Permissible heat radiation power W 27 27
Volume flow rate (with oil-sealed rotary vane vacuum pump):
Stickstoff N
2
l/s 1000 1400 1000 1400
Helium He l/s 1100 1180 1100 1230
Wasserstoff H
2
l/s 750 780 750 850
Compression ration for:
N
2
– > 1 · 10
10
> 1 · 10
8
He – 5 .10
5
2 .10
4
H
2
– 1 · 10
4
2 · 10
3
Critical backing pressure, max.
N
2
Cooling type: water mbar 9 3
Gas throughput without TMS operation at nominal rotation speed, max.
N
2
Cooling type: water mbar l/s 9 15
Ar Cooling type: water mbarl/s 4,5 6
Gas throughput with TMS operation at nominal rotation speed, max
1)
N2Cooling type: water mbarl/s 7 12
Ar Cooling type: water mbarl/s 3,5 5
Gas throughput at 0,1 mbar intake pressure
N2Cooling type: water mbarl/s 16 20
Ar Cooling type: water mbarl/s 12 14
Vertex power characteristics line
2)
A W / Hz 400 400
B W / Hz 580 480
C W / Hz 360 360
D W / Hz 360 360
Theoretical final pressure mbar < 1 · 10
-11
< 1 · 10
-11
Final pressure 1 (metal seal with backing out) mbar < 1 · 10
-10
–
Final pressure 2 (viton seal without backing out) mbar < 1 · 10
-8
< 5 · 10
-8
Cooling water consumtion with water at 15 ˚C
without TMS operation l/h 20 20
with TMS operation and gas load l/h 100 100
Cooling water temperature ˚C 5 - 25 5 - 25
Permissible ambient temperature with
air cooling ˚C 5 - 30 5 - 30
water cooling °C 5 - 35 5 - 35
Power consumption of:
casing heating unit W 170 170
TMS heating W 1000 1000
Permissible magnetic field mT 4 4
Protection class IP 20 IP 20
Weight kg 61/63 62/64 61 63
Relative humidity % 5-85 non-condensing 5-85 nicht betauend
1) Operation with TMS only with water cooling
2) For gas type characteristics line please refer to Section 4.6.
15
8.1. Dimensions
M8 (8x)
190
162
201
284.5
157.5
35.5
°
189
9°
37°
45°
45°
28.5
°
6.5°
20
331
282
272
228.6
159
ø295
ø250
21
257
384.5
397.5
130
DN 200 ISO-K
DN 250 ISO-K
DN 200 CF-F
DN 250 CF-F
DN 40 ISO-KF
DN 10 ISO-KF
16
9. Spare Parts
Pos. Description Pieces Size Number Comments Ordering Quantity
Spare parts TMH/U 1600M
6 Synthetic foot 4 P 4098 582 FA see Section 2.1.
16 USIT ring 2 P 3529 133 -A
54 Venting Valve TVF 005 1 G 1/8” PM Z01 135 see Section 2.1.
97 Temperature sensor, complete 1 PM 073 593 -X see Section 3.9.
Spare parts for the air cooling unit
36 Fan 1 110 V / 230 V P 5099 251 -R7
36a Finger protection 2 P 5099 251 Z4
36b Buffer 4 P 0991 099
Cooling water connection
Air cooling unit
C40-774/2
16
17
Description Size Number Operating Instructions/ Order Quantity
Comments
Magnetic Bearing Controller TCM 1601 90 - 265 V; 50/60 Hz PM C01 675 PM 800 478 BN
Connecting cable turbopump - TCM 3 m PM 051 003 -T other lengths on request
Pumping Station Control Unit TCS 180 100 - 115/230 V; PM C01 655 PM 800 384 BN
50/60 Hz
Casing heating unit 230 V AC, Safety plug PM 016 070 -T Water cooling required
208 V AC, UL plug PM 016 071 -T
115 V AC, UL plug PM 016 072 -T
Protective grill DN 200 PM 016 039 AX
DN 250 PM 016 077 -X
Splinter shield DN 200 PM 006 985 AX
DN 250 PM 006 984 AX
Sealing ring, TMH DN 200 ISO-K PF 303 120 -T
DN 250 ISO-K PF 303 125 -T
Collar flange with retaining ring, TMH DN 200 ISO-K PF 307 120 -T
DN 250 ISO-K PF 307 125 -T
Cu seals (10 pieces), TMU DN 200 CF PF 501 420 -T
(5 pieces) DN 250 CF PF 501 425 -T
Set of screws, TMU DN 200 CF PF 505 003 -T
DN 250 CF PF 505 003 -T
Vibration compensator, TMH DN 200 ISO-K PM 006 668 -X
DN 250 ISO-K PM 006 670 -X
TMU DN 200 CF-F PM 006 669 -X
DN 250 CF-F PM 006 671 -X
Fore-Vacuum Safety Valve TVV 001 115 V PM Z01 206 PM 800 263 BN
230 V PM Z01 205 only with TCS 180
Drying Unit TTV 001 (filled with zeolite) PM Z00 121 PM 800 022 BN
Sealing gas valve PM Z01 142 PM 800 229 BN
Hose nipple for the sealing gas valve DN 16 ISO-KF-10 PF 144 020
Components for cooling
Dirt trap R 3/8” P 4161 300 2R
Recycled Water Cooling Unit TZK 400 230 V, 50 Hz PM Z01 245 PM 800 369 BN
Set for air cooling 230 V AC, Safety plug PM Z01 275
208 V AC, UL plug PM Z01 276
115 V AC, UL plug PM Z01 277
Cooling Water Monitor TCW 002 110 V, 50/60 Hz PM C00 131 PM 800 133 BE
220 V, 50/60 Hz PM C00 130
240 V, 50/60 Hz PM C00 132
Connection component set for the TCW 002 PM 006 802 -T
When ordering accessories and spare parts please be sure to
state the full part number. When ordering spare parts please
state additionally the unit type and unit number (see rating
plate). Please use this list as an order form (by taking a copy)
.
10.Accessories
36
Tradename Chemical name Danger class Precautions associated Action if spillage or human
Product name (or Symbol) with substance contact
Manufacturer
1.
2.
3.
4.
5.
5. Legally Binding Declaration
I hereby declare that the information supplied on this form is complete and accurate. The despatch of equipment will be in
accordance with the appropriate regulations covering Packaging, Transportation and Labelling of Dangerous Substances.
Name of Organisation: _______________________________________________________________________________
Address: _____________________________________ Post code: _____________________________________
Tel.: ______________________________________________________________________________________
Fax: _____________________________________ Telex: ________________________________________
Name: ______________________________________________________________________________________
Job title: ______________________________________________________________________________________
Date: _____________________________________ Company stamp: ________________________________
Legally binding signature: _____________________________________________________________________________
Declaration of Contamination of Vacuum Equipment and Components
The repair and/or service of vacuum components will only be
carried out if a correctly completed declaration has been
submitted. Non-completion will result in delay.
The manufacturer could refuse to accept any equipment
without a declaration.
This declaration can only be completed and signed by authorised and qualified staff:
1. Description of component:
- Equipment type/model: _________________________
- Code No.: __________________________
- Serial No.: __________________________
- Invoice No.: __________________________
- Delivery Date: __________________________
3. Equipment condition
- Has the equipment been used?
yes ❐ no ❐
- What type of pump oil was used?
___________________________________________
- Is the equipment free from potentially harmful
substances?
yes ❐ (go to section 5)
no ❐ (go to section 4)
4. Process related contamination
of equipment
- toxic yes ❐ no ❐
- corrosive yes ❐ no ❐
- microbiological hazard*) yes ❐ no ❐
- explosive*) yes ❐ no ❐
- radioactive*) yes ❐ no ❐
- other harmful substances yes ❐ no ❐
*) We will not accept delivery of any equipment that has been radioactively or microbiologically contaminated without written
evidence of decontamination!
2. Reason for return:
_____________________________________________
_____________________________________________
_____________________________________________
_____________________________________________
_____________________________________________
Please list all substances, gases and by-products which may have come into contact with the equipment:
im Sinne folgender EU-Richtlinien:
pursuant to the following EU directives:
- Maschinen/Machinery 98/37/EG
- Elektromagnetische Verträglichkeit/Electromagnetic Compatibility
89/336/EWG
- Niederspannung/Low Voltage 73/23/EWG
Hiermit erklären wir, daß das unten aufgeführte Produkt zum Einbau in eine Maschine bestimmt ist und
daß deren Inbetriebnahme so lange untersagt ist, bis festgestellt wurde, daß das Endprodukt den
Bestimmungen der EU-Richtlinie 98/37/EG, Anhang II B entspricht.
Wir bestätigen Konformität mit der EU-Richtlinie über elektromagnetische Verträglichkeit 89/336/EWG
und der EU-Niederspannungsrichtlinie 73/23/EWG.
We hereby certify that the product specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in
accordance with the provision of EU Directive 98/37/EEC, Annex II B.
We certify conformity with EU Electromagnetic Compatibility Directive 89/336/EEC and EU Low Voltage
Directive 73/23/EEC.
Produkt/Product:
TMH 1600M
TMU 1600M
Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen:
Guidelines, harmonised standards, national standards in which have been applied:
EN 292-1 EN 1012-2
EN 292-2 EN 61010-1
EN 294
Unterschrift/Signature:
Unterschriften:
(W. Dondorf)
Geschäftsführer
Managing Director
Pfeiffer-Vacuum GmbH
Emmeliusstrasse 33
35614 Asslar
Germany
Herstellererklärung
Manufacturer´s Declaration
Herst.I/2000
Zentrale/Headquarters
Pfeiffer Vacuum GmbH
Emmeliusstrasse 33
D-35614 Asslar
Telefon 06441/802-0
Telefax 06441/802-202
Hotline 06441/802-333
Internet:
http://www.pfeiffer-vacuum.de
Greece
Analytical Instruments S.A., 1 Mantzarou St.,
GR-15451 Athens,
telephone +30 / 1 674 8973
telefax +30 / 1 674 8978
India
Pfeiffer Vacuum India Ltd.
25-E Nicholson Road, Tarbund
Secunderabad 500 009,
telephone +91 / 40 775 0014, telefax +91 / 40 775 7774
Israel
ODEM Scientific Applications,
2 Bergman Street, Science based park
Rehovod
telephone +972 8 9366 101,
telefax +972 8 9366 102
Italy
Pfeiffer Vacuum Italia S.p.a.
Via San Martino, 44 I-20017 RHO (Milano)
telephone +39 / 2 93 99 051, telefax +39 / 2 93 99 05 33
Japan
Hakuto Co. Ltd., C.P.O. Box 25,
Vacuum & Scientific Instruments Division
Tokyo Central 100-91,
telephone +81 / 3 32 258 910
telefax +81 / 3 32 259 009
Korea
Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453,
Dokok-Dong, Kang Nam-Ku, Seoul, 135-270
telephone +82 / 2 3461 0671/5
telefax +82 / 2 3461 0676
Netherlands
Pfeiffer Vacuum Nederland BV
Veldzigt 30a, NL-3454 PW De Meern,
telephone +31 / 30 6666050, telefax +31 / 30 6662794
Peru
Ing. E. Brammertz s.r.l., José Pardo 182,
Apartado 173, PE-18 Miraflores,
telephone +51 / 1 445 8178
telefax +51 / 1 445-1931
Poland
Softrade Sp.z.o.o, ul. Malwowa 35,
PL-60-175 Poznan, telephone +48 / 61 8677 168,
telefax +48 / 61 8677 111
Portugal
Unilaser Lda, Taguspark
Núcleo Central, sala n
o
268, Estrada CacémPorto Salvo, P-2780 Oeiras
telephone +351 / 1 421 7733
telefax +351 / 1 421 7744
Singapore
APP Systems Services Pte. Ltd, 2 Corporation Road
06-14 Corporation Place, Singapore 618494,
telephone +65 / 268 2024, telefax +65 / 268 6621
Spain
Tecnovac
Tecnologia de Vacio S.L., Ronda de Poniente, 6 Bajo F
Centro Empresarial Euronova
E-28760 Tres Cantos (Madrid)
telephone +34 / 91 804 11 34,
telefax +34 / 91 804 30 91
Sweden
Pfeiffer Vacuum Scandinavia AB
Johanneslundsvägen 3
S-194 61 Upplands Väsby
telephone +46 / 590 748 10
telefax +46 / 590 748 88
Switzerland
Pfeiffer Vacuum Schweiz S.A.
Förrlibuckstraße 30, CH-8005 Zürich
telephone +41 / 1 444 2255,
telefax +41 / 1 444 2266
South Africa
Labotec Pty Ltd., P.O. Box 6553,
Halfway House
1685 Midrand
telephone +27 / 11 315 5434
telefax +27 / 11 315 5882
Taiwan
HAKUTO Taiwan Ltd. Hsinchu office No. 103,
Hsien Chen 11th Street, Jubei City,
HsinChu County, Taiwan, R.O.C.
(zip/postal code: 302)
telephone +886 / 3 554 1020
telefax +886 / 3 554 0867
Thailand
S & T Enterprises (Thailand) Ltd.
18th Floor, Chokchail Intíl Bldg.
690 Sukhumvit Road
Klongton, Klongtoey
Bangkok 10110
telephone +662 / 259 4623
telefax +662 / 259 6243
U.S.A.
Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988
USA
telephone +1/ 603 578 6500
telefax +1/ 603 578 6550
Venezuela
Secotec S.A., Apartado 3452, Caracas 1010-A,
telephone +58 / 2 573 8687
telefax +58 / 2 573 1932
Other countries
AVI - Applied Vaccuum Industries GmbH
Leginglenstrasse 17A; CH-7320 Sargans
Switzerland
telephone +41 / 81 710 03 80
telefax +41 / 81 710 03 81
Scope of represented countries
Armenia, Azerbaijan, Bangladesh, Belarus, Bulgaria,
Cambodia, Estonia, Georgia, Hong Kong, Kazakhstan,
Kingdom of Nepal, Kirghizia, Latvia, Lithuania,
Maldavia, Philippines, P.R. China, Rumania, Russia,
Tajikistan, Turkmenistan, Ukraine, Uzbekistan, Vietnam
A.E.M.S.
Advanced Equipment Materials and Systems
P.O. Box 25
Föhrenweg 18
FL-9496 Balzers
telephone +41 / 75 380 0550
telefax +41 / 75 380 0551
Scope of represented countries
Bahrain, Egypt, Iraq, Iran, Jordan, Kuwait, Lebanon,
Lybia, Oman, Pakistan, Saudi-Arabia, Sudan, Syria,
Turkey, United Arab Emirates, Yemen
Argentina
ARO S.A., Casilla de Correo 4890,
1000 Buenos Aires, telephone +54 / 1 331 3918,
telefax +54 / 1 331 3572
Australia
Balzers Australia Pty. Ltd., Level 1,
3, Northcliff Street, Milsons Point, NSW 2061,
telephone +61 / 2 9954 1925, telefax +61 / 2 9954 1939
Austria
Pfeiffer Vacuum Austria GmbH
Diefenbachgasse 35, A-1150 Wien,
telephone +43 / 1 8941 704, telefax +43 / 1 8941 707
Service Hotline: +43 / 1 8941704
Branch Office, Czech Republic
Pfeiffer Vacuum Austria GmbH, Branch Prague
Zvonarska 885
CZ-156 00 Praha 5
telephone + 420/2 900 42981
telefax + 420/2 579 23014
Belgium / Luxemburg
Pfeiffer Vacuum Belgium N.V./S.A.
Luxemburgstraat 5, B-1940 Temse
telephone +32 / 3 710 5920, telefax +32 / 3 710 5929
Service Hotline: +32 / 3 710 5922
Brazil
Elmi Tec
Assistencia Técnica e Representação S/C Ltda.
Rua Bernadino de Compos, 551
CEP 04620-002 São Paulo, SP - Brasil
telephone +55 / 11 532 0740
telefax +55 / 11 535 3598
Chile
BERMAT S.A., Coyancura 2283, piso 6
Providencia, P.O. Box 9781, Santiago
telephone +56 / 2 231 8877,
telefax +56 / 2 231 4294
Colombia
Arotec Colombiana S.A., Carrera 15 No.38-17
P.O. Box 050 862, Santafe de Bogota / D.C.
telephone +57 / 1 288 7799, telefax +57 / 1 285 3604
Denmark
Pfeiffer Vacuum Scandinavia AB, Vesterengen 2,
DK-2630 Taastrup,
telephone +45 / 43 52 38 00
telefax +45 / 43 52 38 50
France
Pfeiffer Vacuum France SAS
45, rue Senouque, BP 139 F-78531 BUC Cedex
telephone +33 / (0)1 30 83 04 00
telefax +33 / (0)1 30 83 04 04
Germany
Pfeiffer Vacuum GmbH,
Emmeliusstrasse 33, D-35614 Asslar
telephone +49 / 6441 802 400
telefax +49 / 6441 802 399
Service Hotline: +49 / 6441 802 333
Great Britain
Pfeiffer Vacuum Ltd.
2-4 Cromwell Business Centre
Howard Way, Interchange Park
Newport Pagnell, MK16 9QS, United Kingdom
telephone +44 / 1 908 500615
telefax +44 / 1 908 500616
(0010)
Loading...