Pfeiffer Vacuum TM 700 DN Operating Instructions Manual

TM 700 DN
PM C01 853
D-35614 Asslar
DeviceNet
remote
accessory
PV.can
RATE
P
1
2
5
MSD
P
LSD
00
22
44
66
8
ADDRESS
TM 700 DN
Electronic Drive Unit
Translation of the original instructions
Operating Instructions
EN
PT 0356 BEN/C (1203)
Table of contents
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
4 Connections diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5 Connection "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
6 Connection "DeviceNet". . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
7 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
8 Pfeiffer Vacuum Protocol for "RS-485". . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.2 Configuring the connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6.3 Configuring the data exchange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.4 LED operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.5 DeviceNet objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 31
7.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
8.1 Telegram frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.2 Operating mode display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
2
About this manual

1 About this manual

1.1 Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refer to the current state of the product's development. The documen­tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacu­um.com.

1.2 Conventions

Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan­dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:
CAUTION
Possible danger
Injuries or property damages can occur.
Command or note
Command to perform an action or information about properties, the disregarding of which may result in damage to the product.
Pictograph definitions
Instructions in the
Work instruction: here you have to do something.
Warning of a displayed source of danger in connection with operation of the unit or equipment.
Command to perform an action or task associated with a source of danger, the disregarding of which may result in se­rious accidents.
text
Abbreviations used DCU: Display and control unit
HPU: Handheld programming unit TC: Electronic drive unit for turbopump TPS: Mains pack DI / DO: Digital input / digital output AI / AO: Analog input / analog output f: Rotation speed (derivated from frequency in Hz) [P:000]: Parameter of the electronic drive unit with number
NOTE
3
Safety

2 Safety

Duty to inform
Each person involved in the installation or operation of the unit must read and observe the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.

2.1 Safety precautions

Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.Make sure that the system is integrated in an emergency off safety circuit.Consult Pfeiffer Vacuum for special requirements.
NOTE
WARNING
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the reg­ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines.
Observe all safety and accident prevention regulations.
A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
Regularly check the proper observance off all safety measures.
Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
Do not loosen any plug connection during operations.
The unit has been accredited with protection class IP 54. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
Keep leads and cables well away from hot surfaces (> 70 °C).
Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
4

2.2 Proper use

warranty seal

2.3 Improper use

Safety
NOTE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord­ingly.
The electronic drive unit TM 700 DN operates designated Pfeiffer Vacuum turbo-
pumps and their accessories in a DeviceNet bus system.
Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned above, especially:
The use of accessories or spare parts, which are not named in this manual.
The operation of the devices in potentially radioactive areas.
NOTE
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.
Do not open the product within its warranty period!For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.
5
Product description

3 Product description

3.1 Product identification

This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec­ond edition, including Amendment 1, or a later version of the same standard incorporat­ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod­uct or:
www.tuvdotcom.com
TUVdotCOM-ID 0000021320
Product features The electronic drive unit TM 700 DN is an integrated component of the turbopump. It's
purpose is to drive, monitor and control the entire pump.
Characteristics TM 700 DN
Connection voltage TC 48 V DC ± 5 % Connection panel DeviceNet Turbopump HiPace 300 M, 700 M, 800 M
To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available.
Scope of delivery CD-ROM for DeviceNet connection with EDS files

3.2 Range of application

Pfeiffer Vacuum electronic drive units TM 700 DN must be installed and operated in the following ambient conditions.
Installation location weather protected (indoors) Protection category IP 54 Protection class III Temperature +5 °C to +40 °C (up to +35 °C with air cooling) Relative humidity max. 80 %, at T 31 °C, up to max. 50% at T 40 °C Atmospheric pressure 75 kPa - 106 kPa Installation altitude 2000 m max. Degree of pollution 2 Overvoltage category II
6

3.3 Function

accessory
A
B
PV.can
remote
DeviceNet
DC in
RATE
NET MOD
P
1
2
5
MSD
P
LSD
00
22
44
66
8
ADDRESS
b
d
b
c
g2
g4 g5g3
gg1 a
Fig. 1: DeviceNet panel for the TM 700 DN
a Mains connection "DC in" b Connection "accessory A+B" c Connection "remote" d Service connection "PV.can" g Connection "DeviceNet"

3.4 General connection description

1
DC in
Casing plug with bayonet locking for the voltage supply between Pfeiffer Vacuum mains packs and the electronic drive unit TC.
Product description
g1 DeviceNet status LED g2 Device status LED g3 DeviceNet baudrate switch g4 DeviceNet address selection switch MSD g5 DeviceNet address selection switch LSD
Accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories. The use of a Y-connector enables double assignment of one connection.
2
PV.can
M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service pur­poses.
remote
High Density D-sub 26 pole female socket for the connection of a remote control.
DeviceNet
M12 plug (sealed micro) with screw coupling and LEDs for the connection of a De­viceNet bus system.
Casing socket on the rear side of the electronic drive unit for the connection to the turbopump.
1. "DC in" and "accessory" are already described in the operating instructions of the tur­bopump.
2. The connection "PV.can" serves to service purposes exclusively.
7
Connections diagram

4 Connections diagram

41
5
accessory A
23
DI Pumping station
n.c.
Accessory A2
24 VDC
Accessory A1
FE
+ 24 VDC* out
DI1
DI Motor pump
DI Standby
DI2
AI+ 0-10 VDC
DO1
DO2
1
2
Contact load for accessories:
3
-200 mA max., each connection
-450 mA max., all connections in sum
4
5
1
2
3
4
5
6
7
8
9
All inputs and outputs in this area are galvanically seperated from +U
B
1
2
3
4
5
1
2
3
4
5
n.c.
Accessory B2
24 VDC
Accessory B1
FE
32
5
14
accessory B
DI3
AI- GND
AO1 / 0-10 V
DI Error acknowledgement
DI Remote priority
Relay 1
Relay 1
Relay 1
Relay 2
remote
Potential free contacts
19
19 26
10 18
DO Remote priority active
Relay 2
Relay 2
Relay 3
Relay 3
RS485 D+
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
1
2
3
4
5
A
Drain
V+
V-
CAN_H
CAN_L
+ UB (+24 / +48 VDC ± 5 %)
3
5
12
DeviceNet
4
B
B
GND
DC in PV.can
C
FE
AC
RS485 D-
GND*
Fig. 2: Connections diagram and assignment of the TM 700 DN
8
25
26

5 Connection "remote"

19
1018
1926
Remote control options are provided via the 26-pole D-Sub connector with the designa-
tion ”remote“ on the electronic drive unit.
Shielded connectors and cables must be used.
The following information display the factory setting. Configuration is possible using the Pfeiffer Vacuum parameter set.

5.1 Pin assignment

Pin Function Designation factory settings
1 +24 V DC output (V+) Reference voltage for all digital in- and outputs 2 DI1 Enable venting; open: no; V+: yes 3 DI Motor pump Drive motor; open: off; V+: on 4 DI Pumping station Open: off; V+: on and error acknowledgement 5 DI Standby Standby rotation speed; open: off; V+: on 6 DI2 Heating; open: off; V+: on 7 AI+ Rotation speed setting mode Set value in rotation speed setting mode;
8 DO1 Rotation speed switch point attained;
9 DO2 GND: error; V+: no error (I 10 DI3 Sealing gas; open: off; V+: on 11 AI- Rotation speed setting mode
GND
12 AO1 Actual rotation speed;
13 DI Error acknowledgement Error acknowledgement: V+ pulse (min 500 ms) 14 DI Remote priority Control via interface "remote"; open: off
15 Relais 1 Connection to Pin 16 if relay 1 is inactive 16 Relais 1 Rotation speed switchpoint attained;
17 Relais 1 Connection to Pin 16 if relay 1 is active 18 Relais 2 Connection to Pin 19 if relay 2 is inactive 19 Relais 2 No error; relay contact 2 (U 20 Relais 2 Connection to Pin 19 if relay 2 is active 21 Relais 3 Connection to Pin 22 if relay 3 is inactive 22 Relais 3 Warning; relay contact 3 (U 23 DO Remote priority GND: off; V+: remote priority active 24 RS-485 D+ according to specifications and Pfeiffer Vacuum protocol 25 RS-485 D- according to specifications and Pfeiffer Vacuum protocol 26 Ground (GND) Reference ground for all digital inputs and all outputs
Connection "remote"
2-10 V DC = 20-100% of the nominal rotation speed
GND:no; V+: yes (I
Set value in rotation speed setting mode; GND
0-10 V DC is equivalent to 0-100%; R
V+: set and priority over other digital inputs
relay contact 1 (U
= 50 mA/24 V)
max
= 50 V DC; I
max
= 50 mA/24 V)
max
max
= 50 V DC; I
max
= 50 V DC; I
max
> 10 k
L
= 1 A)
max
max
= 1 A)
= 1 A)
9
Connection "remote"

5.2 Operation via "remote" connection

Increased wear and damage due to incorrect operation
Active magnetic bearings require a constant power supply. The motor acts as a gener­ator and supplies the drive electronics in the event of a power failure. Below a speed of approx. 6500 rpm, the kinetic energy of the rotor will no longer be sufficient to supply the magnetic bearings. The drive electronics will switch off completely. The rotor will run down audibly in the safety bearings.
Do not switch off the pump by disconnecting the mains power supply.
CAUTION
+24 V DC* Output / Pin 1
Inputs 2 - 6 and the connections to Pins 10, 13, 14 are activated by connecting them with +24 V DC to Pin 1 (active high). They can also be activated via an external PLC. The functions are deactivated by "PLC high level" and by "PLC low level".
PLC high level: +13 V to +33 V
PLC low level: -33 V to +7 V
Ri: 7 k
I
< 210 mA (with RS-485, if existing)
max
Inputs The digital inputs at connection "remote" are used to connect various functions of the
electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can be configured via interface RS-485 and the Pfeiffer Vacuum parameter set.
DI1 (Enable venting) / Pin 2
V+ : Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI Motor pump / Pin 3
After Pin 4 (pumping station) is activated and the electronic drive unit successfully com­pletes the self-test, the turbopump is placed into operation. During operation, the tur­bopump can be switched off and on again, while the pumping station remains switched on. The turbopump is not vented thereby.
V+ : Turbopump motor on
open: Turbopump motor off
10
DI Pumping station / Pin 4
Connected pumping station components (e.g. backing pump, venting valve, air cooling unit) are triggered and, with Pin 3 (motor) simultaneously activated, the turbopump is placed in operation. Any ongoing error messages are reset when their cause has been eliminated.
V+ : Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby / Pin 5
In standby mode, the turbopump operates at a specified rotor speed < nominal rotation speed. Factory setting and recommended operation are 66.7 % of the nominal rotation speed.
V+ : Standby activated
open: Standby off, operation at nominal rotation speed
Connection "remote"
f(%)
100
20
210
U(V)
DI2 (Heating) / Pin 6
V+ : Heating on
open: Heating off
DI3 (Sealing gas) / Pin 10
V+ : Sealing gas valve open
open: Sealing gas valve closed
DI Error acknowledgement / Pin 13
V+ : Reset ongoing error messages when cause has been eliminated with a pulse of min. 500 ms duration.
open: Inactive
DI Remote priority / Pin 14
V+ : The connection "remote" has operation priority over all other digital inputs.
open: Remote priority inactive
AI Rotation speed setting mode / Pin 7 and Pin 11
The analog input at the TM 700 DN defines the set rotation speed of the turbopump. An input signal of 2 - 10 V between AI+ (Pin 7) and AI- (Pin 11) corresponds to a rotation speed within the range of 20 - 100% of the nominal rotation speed. If the input is open or signals fall below 2 V, the pump is accelerated up to nominal rotation speed.
Outputs The digital outputs at the connection "remote" can be loaded with a maximum of 24 V /
50 mA per output. All outputs listed below are configurable by the Pfeiffer Vacuum pa­rameter set via interface RS-485 (description related to factory settings).
DO1 (Rotation speed switch point attained) / Pin 8
Active high after the rotation speed switch point is attained. Rotation speed switch point 1 is factory-set to 80% of the nominal rotation speed. It can, for example, be used for a "pump operational" message.
DO2 (No errors) / Pin 9
When the supply voltage has been established, digital output DO2 permanently outputs 24 V DC which means "no errors". Active low in case of error (collective error message).
DO Remote priority active / Pin 23
Active high: The connection "remote" takes priority over any other connected control panels (e.g. RS-485). With active low, the connection "remote" is ignored.
AO1 Analog output 0-10 V DC / Pin 12
A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x f picked up via the analog output (load R 10 k). Additional functions (optionally current/ power) can be assigned to the analog output via DCU, HPU or PC.
Nominal
) can be
11
Connection "remote"
Relay contact s (in­vertible)
Relay 1 / Pin 15, Pin 16 and Pin 17
The contact between Pin 16 and Pin 15 is closed when the rotation speed switch point is underrun; relay 1 is inactive. The contact between Pin 16 and Pin 17 is closed when the rotation speed switch point is attained; relay 1 is active.
Relay 2 / Pin 18, Pin 19 and Pin 20
The contact between Pin 19 and Pin 18 is closed when a malfunction is present; relay 2 is inactive. The contact between Pin 19 and Pin 20 is closed when operation is malfunc­tion free; relay 2 is active.
Relay 3 / Pin 21 and Pin 22
The contact between Pin 21 and Pin 22 is closed when no warning messages are active; relay 3 is inactive. The contact between Pin 21 and Pin 22 is open when a warning mes­sage is present; relay 3 is active.
RS-485 One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected respectively to the electronic drive unit via Pin 24 and Pin 25 of the connec-
tion "remote" on the electronic drive unit.
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra­low voltage.
Connect only suitable devices to the bus system.
The group address of the electronic drive unit is 964.
All units connected to the bus must have differing RS-485 device addresses [P:797].
Establish the connections according to the specification of the interface RS-485.Connect all units with RS-485 D+ and RS-485 D- to the bus.
Designation Value
Serial interface RS-485 Baud rate 9600 bauds Data word length 8 bits Parity none (no parity) Start bits 1 Stop bits 1..2
Connecting Pfeiffer Vacuum display and control units or PC
The connection of respectively one external operating unit is possible on the interface
RS-485.
A USB interface (PC) can be connected via the USB/RS-485-converter.
12

6 Connection "DeviceNet"

12
3
4
5
MSDPLSD
00
22
44
66
8
ADDRESS

6.1 Connections

The turbopump can be connected to a DeviceNet bus system using the connector (5 ­pin, sealed micro) labelled "DeviceNet" on the electronic drive unit. A supply voltage (V+, V-) is required to supply this connection in addition to the supply voltage for the electronic drive unit. The interface is galvanically safe and is isolated from the maximum supply voltage for the electronic drive unit.
Pin Assignment
1Drain 2 V+, 24 V DC referred to V­3V­4CAN_H 5CAN_L
Perform DeviceNet wiring in accordance with the applicable specifications.Supply the DeviceNet connection with voltage.

6.2 Configuring the connection

To start DeviceNet communication, the TM 700 DN must be configured using the en­closed EDS files.
Connection "DeviceNet"
Select desired device addressSelect desired baud rateFit rubber plugs at the address selector switches evenly and as deep as possible to
achieve the stated protection class.
Device address The DeviceNet device address is set manually using the "ADDRESS" selector switches
or via DeviceNet.
Position Meaning
00 to 63 Device address (decimal)
– MSD = multiples of 10 (0x-6x) – LSD = units (x0-x9)
P Address via DeviceNet
Setting the address manually
Set the selector switches to the desired value.
– Once the setting has been made, the device accesses the bus using the new ad-
dress.
Setting the address via DeviceNet
Switch off the pump/electronic drive unitSet the selector switches to "P".
– When switched on, the system uses the last valid valid address ("63" upon deliv-
ery).
– The address is programmable via DeviceNet object 3.1.1. (see p. 16, chap. 6.5).
13
Connection "DeviceNet"
RATE
P
1
2
5
Baud rate The DeviceNet baud rate is set manually using the "RATE" selector switches or via De-
viceNet.
Position Meaning
1 125 kBit/s 2 250 kBit/s 5 500 kBit/s P Baud rate via DeviceNet
Setting the baud rate manually
Set the selector switches to the desired value.
– The change takes effect the next time the system is switched on.
Setting the baud rate via DeviceNet
Switch off the pump/electronic drive unitSet the selector switches to "P".
– When switched on, the system uses the last valid baud rate (500 kBit/s upon deliv-
ery).
– The baud rate is programmable via DeviceNet object 3.1.2. (see p. 16, chap. 6.5).

6.3 Configuring the data exchange

Depending on the program used to set up DeviceNet communication, you can carry out the following steps:
Import EDS file (see scope of delivery)
Device-specific data:
Specify the format of the cyclical input/output data
– Specify the cyclically alternating process data using objects "Poll I/O input data
(4.0.100)" and "Poll I/O output data (4.0.101)"
– The format can be changed only if the poll I/O connection is inactive.
Specify system behaviour following termination of the cyclical DeviceNet communica-
tion. – Use object "Idle Action (9.1.7)" to specify which action is to be carried out if there
is a failure of the cyclical exchange of process data (poll I/O connection).
Specify the remote priority.
– Use object "Permission locked (101.0.17)" to specify whether the electronic drive
unit is to be controlled exclusively via DeviceNet or whether other interfaces (e.g. RS485) are also permitted.
– This does not restrict write access via other interfaces.
Perform pump configuration.
– To set a configuration that differs from the delivery state, use the EDS file to adjust
individual objects (e.g. accessory configuration).
Master-specific data:
Explicit data ex­change (explicit con­nection)
14
Set up the device in the master scanlist.Set the format of the cyclical input/output data
This connection can be used to access the individual DeviceNet objects (see p. 16, chap.
6.5). As a rule, this is done using a dedicated configuration program and the EDS file.
This is also used to specify which data is sent during the cyclical data exchange.
Connection "DeviceNet"
Cyclical data ex­change (poll I/O con­nection)
For the cyclical data exchange, multiple DeviceNet objects are combined to form assem­blies (4.x.3.). One assembly is selected for each direction (input/output data). The follow- ing assemblies are available for selection:
Input data (produced data, pump --> PLC)
1: pump status (default) 2: pump status, speed 100: pump status, speed, current 101: pump status, speed, current, temperature
Assembly ... Byte Denotation 12100101
0 0 0 0 (BYTE) Exception Status (48.1.12)
– Bit 0: Common alarm – Bit 1: Device-specific alarm – Bit 2: Manufacturer-specific alarm Details for Bit 0-2 s. Exception Detail Alarm (48.1.13)
– Bit 4: Common warning – Bit 5: Device-specific warning – Bit 6: Manufacturer-specific warning Details for Bit 4-6 s. Exception Detail Warning (48.1.14)
1 1 1 1 (BYTE) Speed Status (42.1.39)
– Bit 0: Pump is on, rotation speed > 0 – Bit 1: Motor is off – Bit 2: Standby rotation speed attained – Bit 4: Stopped – Bit 5: Accelerates – Bit 6: Set rotation speed attained – Bit 7: Decelerates
2 2 2 2 (BOOL) Pump On Status (8.1.3)
– 0: Pump is off – 1: Pump is on, rotation speed > 0
- 3-4 3-4 3-4 (INT) Pump Speed (42.1.7) – Actual rotation speed in rpm/4 (e.g. value 15000 equates to 60000 rpm)
- - 5-6 5-6 (INT) IMC Current (42.1.102) – Intermediate circuit current in 100 mA (e.g. value 42 equates to 4.2 A)
- - - 7-8 (INT) Bearing Temperature (49.3.6) – Bearing temperature in °C/10 (e.g. value 210 equates to 21.0 °C)
- - - 9-10 (INT) Pump Temperature (49.101.6) – Bottom part temperature in °C/10 (e.g. value 210 equates to 21.0 °C)
Output data (consumed data, PLC --> pump)
5: pump control (default) 6: pump/speed control 7: pump/speed control, set speed 103: pump/speed control, set speed, vent valve cfg.
Assembly ... Byte Denotation 567103
0 0 0 0 (BOOL) Pump On (9.1.3)
– 0: Pumping station off – 1: Pumping station on
- 1 1 1 (BYTE) Speed Control (42.1.38)
– Bit 0: Pumping station on – Bit 1: Motor off – Bit 2: Standby on
- - 2-3 2-3 (INT) Speed Target (42.1.8)
– Set rotation speed in rpm/4 (e.g. value 15000 writing for 60000 rpm)
- - - 4-5 (WORD) Vent Valve Configuration (7.1.4)
– 0: No venting – 1: Direct venting – 2: Delayed venting
15
Connection "DeviceNet"

6.4 LED operation

NET
Status Meaning Action
Off Device not on bus Supply operating voltage
Green flashing On bus, no master allocated Create connection with master Green illuminated On bus, master allocated Red flashing Connection to master expired Test connection to master Red illuminated Bus error or duplicate device address
MOD
Status Meaning Action
Off No voltage supply Supply operating voltage Green illuminated Device ready for operation Red flashing Device error Resolve error

6.5 DeviceNet objects

allocated
Wait for address test (approx. 2 s)
Check busCheck device addressCheck baud rate
Identity
Message Router
DeviceNet
Path Name Data type Service Comment
1.0.1 Revision UINT get
1.0.2 Max Instance UINT get
1.0.3 Number of Instances UINT get
Instance 1
1.1.0 (Instance) USINT res, gaa
1.1.1 Vendor ID UINT get 527 (Pfeiffer Vacuum)
1.1.2 Device Type UINT get 33 (Turbomolecular Vacuum
Pump Device)
1.1.3 Product Code UINT get 5377
1.1.4 Revision STRUCT of get
Major Revision USINT Minor Revision USINT
1.1.5 Status WORD get
1.1.6 Serial Number UDINT get
1.1.7 Product Name SHORT_STRING get TM 700 DN
1.1.100 Status Code SHORT_STRING get
This object provides no attributes and services.
Path Name Data type Service Comment
3.0.1 Revision UINT get
16
Instance 1
3.1.0 (Instance) all, re
3.1.1 MAC ID USINT get, (set) set only at switch setting "P"
3.1.2 Baud Rate USINT get, (set) set only at switch setting "P"
3.1.5 Allocation Information STRUCT of get
Allocation Choice Byte BYTE Master’s MAC ID USINT
3.1.6 MAC ID Switch Changed BOOL get
3.1.7 Baud Rate Switch Changed BOOL get
3.1.8 MAC ID Switch Value USINT get
3.1.9 Baud rate Switch Value USINT get
Assembly
Connection "DeviceNet"
Path Name Data type Service Comment
4.0.1 Revision UINT get
4.0.3 Number of Instances UINT get
4.0.100 Poll I/O Input Data USINT get, (set) Assembly instance for input data
(pump->master) of Poll I/O con­nection, set only if connection not active
4.0.101 Poll I/O Output Data USINT get, (set) Assembly instance for output data
(master->pump) of Poll I/O con­nection, set only if connection not active
Instance 1 (default input): pump status
4.1.3 Data ARRAY of get
Exception Status BYTE 48.1.12 Speed Status BYTE 42.1.39 Pump on Status BYTE 8.1.3
Instance 2 (input): pump status, speed
4.2.3 Data ARRAY of get
Exception Status BYTE 48.1.12 Speed Status BYTE 42.1.39 Pump on Status BYTE 8.1.3 Pump Speed 2 x BYTE (INT) 42.1.7
Instance 5 (default output): pump control
4.5.3 Data ARRAY of get, set
Pump On BYTE 9.1.3
Instance 6 (output): pump control
4.6.3 Data ARRAY of get, set
Pump on BYTE 9.1.3 Speed control BYTE 42.1.38
Instance 7 (output): pump/speed control, set speed
4.7.3 Data ARRAY of get, set
Pump On BYTE 9.1.3 Speed Control BYTE 42.1.38 Speed Target 2 x BYTE (INT) 42.1.8
Instance 100 (input): pump status, speed, current
4.100.3 Data ARRAY of get
Exception Status BYTE 48.1.12 Speed Status BYTE 42.1.39 Pump on Status BYTE 8.1.3 Pump Speed 2 x BYTE (INT) 42.1.7 IMC Current 2 x BYTE (INT) 42.1.102
Instance 101 (input): pump status , speed, current, temperatures
4.101.3 Data ARRAY of get
Exception Status BYTE 48.1.12 Speed Status BYTE 42.1.39 Pump on Status BYTE 8.1.3 Pump Speed 2 x BYTE (INT) 42.1.7 IMC Current 2 x BYTE (INT) 42.1.102 Bearing Temperature 2 x BYTE (INT) 49.3.6 Pump Temperature 2 x BYTE (INT) 49.101.6
Instance 103 (output): pump/speed control, set speed, vent valve cfg
4.103.3 Data ARRAY of get, set
Pump On BYTE 9.1.3 Speed Control BYTE 42.1.38 Speed Target BYTE 42.1.8 Vent Valve Cfg. (1) BYTE 7.1.4 (1)
17
Connection "DeviceNet"
Connection
Instance 103 (output): pump/speed control, set speed, vent valve cfg
Vent Valve Cfg. (2) BYTE 7.1.4 (2)
Path Name Data type Service Comment
5.0.1 Revision UINT get
Instance 1: Explicit connection
5.1.1 State USINT get
5.1.2 Instance Type USINT get
5.1.3 Transport Class Trigger BYTE get
5.1.4 DeviceNet Produced
Connection ID
5.1.5 DeviceNet Consumed
Connection ID
5.1.6 DeviceNet Initial Comm
Characteristics
5.1.7 Produce Connection
Size
5.1.8 Consumed Connection
Size
5.1.9 Expected Package Rate UINT get, set
5.1.12 Watchdog Timeout Ac-
tion
5.1.13 Produced Connection
Path Length
5.1.14 Produced Connection
Path
5.1.15 Consumed Connection
Path Length
5.1.16 Consumed Connection
Path
5.1.17 Production Inhibit Time Packed EPATH get
5.1.18 Connection Timeout
Multiplier
UINT get
UINT get
BYTE get
UINT get
UINT get
UINT get, set
USINT get
UINT get
Packed EPATH get
UINT get
USINT get
Instance 2: Poll I/O connection
5.2.1 State USINT get
5.2.2 Instance Type USINT get
5.2.3 Transport Class Trigger BYTE get
5.2.4 DeviceNet Produced
Connection ID
5.2.5 DeviceNet Consumed
Connection ID
5.2.6 DeviceNet Initial Comm
Characteristics
5.2.7 Produce Connection
Size
5.2.8 Consumed Connection
Size
5.2.9 Expected Package Rate UINT get, set
5.2.12 Watchdog Timeout Ac-
tion
5.2.13 Produced Connection
Path Length
5.2.14 Produced Connection
Path
5.2.15 Consumed Connection
Path Length
5.2.16 Consumed Connection
Path
5.2.17 Production Inhibit Time Packed EPATH get, set
5.2.18 Connection Timeout
Multiplier
UINT get
UINT get
BYTE get
UINT get
UINT get
UINT get
USINT get
UINT get
Packed EPATH get
UINT get
USINT get
18
Register
Discrete Input Point
Connection "DeviceNet"
Path Name Data type Service Comment
7.0.1 Revision UINT get
7.0.2 Max Instance UINT get
7.0.3 Number of Instances UINT get
Instance 1
7.1.1 Bad Flag BOOL get 0
7.1.2 Direction BOOL get 1
7.1.3 Size UINT get 16
7.1.4 Data ARRAY of get, set
BITS – 0: No venting
– 1: Direct venting – 2: Delayed venting
BITS 0
7.1.100 Venting Frequency USINT get, set 40-98 %
7.3.101 Venting Time UINT get, set 6-3600 s
Path Name Data type Service Comment
8.0.1 Revision UINT get
8.0.2 Max Instance UINT get
8.0.3 Number of Instances UINT get
Discrete Output Point
Instance 1
8.1.3 Value BOOL get – 0: Pump off
– 1: Pump on and f > 0
8.1.7 Off-On Cycles UDINT get
Path Name Data type Service Comment
9.0.1 Revision UINT get
9.0.2 Max Instance UINT get
9.0.3 Number of Instances UINT get
Instance 1: Pump On/Off
9.1.3 Value BOOL get, set – 0: Pumping station off
– 1: Pumping station on
9.1.5 Fault Action BOOL get, set – 0: Pumping station off
– 1: Hold last state
9.1.6 Fault Action BOOL get, set 0
9.1.7 Idle Action BOOL get, set – 0: Pumping station off
– 1: Hold last state
9.1.8 Idle Action BOOL get, set 0
Instance 2: TMS/Heating
9.2.3 Value BOOL get, set – 0: TMS/Heating off
– 1: TMS/Heating released
9.2.5 Fault Action BOOL get, set – 0: TMS/Heating off
– 1: Hold last state
9.2.6 Fault Action BOOL get, set 0
9.2.7 Idle Action BOOL get, set – 0: TMS/Heating off
– 1: Hold last state
9.2.8 Idle Action BOOL get, set 0
Instance 3: Sealing gas
9.3.3 Value BOOL get, set – 0: Sealing gas off
– 1: Sealing gas on
9.3.5 Fault Action BOOL get, set – 0: Sealing gas off
– 1: Hold last state
9.3.6 Fault Action BOOL get, set 0
9.3.7 Idle Action BOOL get, set – 0: Sealing gas off
– 1: Hold last state
9.3.8 Idle Action BOOL get, set 0
19
Connection "DeviceNet"
AC/DC Drive
Instance 100: Brake
9.100.3 Value BOOL get, set – 0: Brake off
– 1: Brake released
9.100.5 Fault Action BOOL get, set – 0: Brake off
– 1: Hold last state
9.100.6 Fault Action BOOL get, set 0
9.100.7 Idle Action BOOL get, set – 0: Brake off
– 1: Hold last state
9.100.8 Idle Action BOOL get, set 0
Path Name Data type Service Comment
42.0.1 Revision UINT get
42.0.2 Max Instance UINT get
42.0.3 Number of Instances UINT get
Instance 1
42.1.3 At Reference BOOL get – 0: Set rotation speed not attained
– 1: Set rotation speed attained
42.1.4 Net Ref BOOL get 1
42.1.6 Drive Mode USINT get, set 2
42.1.7 Speed Actual INT get Current rotation speed (rpm/2
Scale
) e.g. 15000 read => 60000 rpm
42.1.8 Speed Ref INT get, set Set rotation speed (rpm/2
speed
speed Scale
e.g. 7500 write for 30000 rpm
42.1.15 Power Actual INT get Current power (W)
42.1.16 Input Voltage INT get Input voltage (V/2
voltage Scale
) e.g. 192
read => 24 V
42.1.18 Accel Time UINT get, set Run-up time (ms/2
time Scale
) e.g. 2813
read => 6 min
42.1.22 Speed Scale SINT get, set -2
42.1.27 Voltage Scale SINT get, set 3
42.1.28 Time Scale SINT get, set -7
42.1.38 Speed Control BYTE get, set – Bit 0: Pumping station on
– Bit 1: Motor off – Bit 2: Standby on
42.1.39 Speed Status BYTE get – Bit 0: Pump on and f > 0
– Bit 1: Motor is off – Bit 2: Standby rotation speed at-
tained – Bit 4: stopped – Bit 5: accelerates – Bit 6: Set rotation speed attained – Bit 7: decelerates
42.1.41 Max Rated Speed INT get Nominal rotation speed (rpm/2
Speed Scale
)
Max Rated
42.1.42 Max Rated Speed Scale SINT get, set -2
42.1.43 Speed Standby INT get, set Standby rotation speed (rpm/2
Scale
)
Speed
42.1.46 Drive On Hours DINT get Operating hours drive (h)
42.1.100 Gas Mode USINT get, set – 0: Heavy gases – 1: light gases – 2: Helium
42.1.101 Max Power USINT get, set %
42.1.102 IMC Current INT get Intermediate circuit current (100 mA) e.g. 123 read => 12.3 A
42.1.103 Max Rated Speed Con-
firmation
INT get, set Nominal rotation speed (rpm/2
Speed Scale
)
Max Rated
42.1.104 Imbalance INT get Rotor imbalance in %
42.1.105 Bearing Wear INT get Safety bearing stress in %
)
20
S-Device Supervisor
Connection "DeviceNet"
Path Name Data type Service Comment
48.0.1 Revision UINT get
48.0.2 Max Instance UINT get
48.0.3 Number of Instances UINT get
Instance 1
48.1.0 (Instance) res, sta,
48.1.3 Device Type SHORT_STRING get
48.1.4 SEMI Standard Revi-
sion Level
48.1.5 Manufacturer’s Name SHORT_STRING get
48.1.6 Manufacturer’s Model
Number
48.1.7 Software Revision Level SHORT_STRING get
48.1.8 Hardware Revision Lev-elSHORT_STRING get
SHORT_STRING get
SHORT_STRING get
abo, rec, per
48.1.11 Device Status USINT get – 1: Self Testing
48.1.12 Exception Status BYTE get (see p. 14, chap. 6.3)
48.1.13 Exception Detail Alarm STRUCT of get
Common Exception De­tail Size
Common Exception De­tail 0
Common Exception De­tail 1
Device Exception Detail USINT 2 Device Exception 0 BYTE see below Device Exception 1 BYTE see below Manufacturer Excep-
tion Detail Size Manufacturer Excep-
tion Detail 0 Manufacturer Excep-
tion Detail 1
48.1.14 Exception Detail Warn-
ing Common Exception De-
tail Size Common Exception De-
tail 0 Common Exception De-
tail 1 Device Exception Detail USINT 2 Device Exception 0 BYTE see below Device Exception 1 BYTE see below Manufacturer Excep-
tion Detail Size Manufacturer Excep-
tion Detail 0 Manufacturer Excep-
tion Detail 1
48.1.15 Alarm Enable BOOL get, set
48.1.16 Warning Enable BOOL get, set
48.1.23 Run Hours UDINT get Pump operating hours (h)
USINT 2
BYTE see below
BYTE see below
USINT 2
BYTE see below
BYTE see below
STRUCT of get
USINT 2
BYTE see below
BYTE see below
USINT 2
BYTE see below
BYTE see below
– 2: Idle – 3: Self-Test Exception – 4: Executing – 5: Abort – 6: Critical Fault
For Exception Detail Alarm and Exception Detail Warning applies:
21
Connection "DeviceNet"
S-Analog Sensor
Bit Common Ex. Detail 0 Common Ex. Detail 1 Device Ex. Detail 0 Device Ex. Detail 1
0 internal diagnostic Excess supply Drive unit Motor excess tempera-
ture
1 Microcontroller reserved TMS Pump excess temper-
ature
2 EPROM Output voltage supply Voltage supply Bearing excess tem-
perature
3 EEPROM Input voltage supply Excess rotation speed Electronic drive unit
excess temperature 4 RAM Maintenance Overload Connection 5 reserved Contact manufacturer Run-up time Bearing 6 internal real time Reset Run-up time Interlock 7 reserved reserved Vibration reserved
Manufacturer Exception Detail equates to the current message for alarm respective warning in the data type UINT.
Path Name Data type Service Comment
49.0.1 Revision UINT get
49.0.2 Max Instance UINT get
49.0.3 Number of Instances UINT get
Instance 1: Motor temperature
49.1.5 Reading Valid BOOL get 0: invalid, 1: valid
49.1.6 Value INT get Motor temperature (°C/10)
49.1.7 Status BYTE get see below
Interfaces
Instance 3: Bearing temperature
49.3.5 Reading Valid BOOL get 0: invalid, 1: valid
49.3.6 Value INT get Bearing temperature (°C/10)
49.3.7 Status BYTE get see below
Instance 4: Electronic temperature
49.4.5 Reading Valid BOOL get 0: invalid, 1: valid
49.4.6 Value INT get Electronic temperature (°C/10)
49.4.7 Status BYTE get see below
Instance 100: Power stage temperature
49.100.5 Reading Valid BOOL get 0: invalid, 1: valid
49.100.6 Value INT get Power stage temp. (°C/10)
49.100.7 Status BYTE get see below
Instance 101: Bottom part temperature
49.101.5 Reading Valid BOOL get 0: invalid, 1: valid
49.101.6 Value INT get Bottom part temperature (°C/10)
49.101.7 Status BYTE get see below
For all "Status" (49.x.7) applies:
Bit Meaning
0 Excess temperature (alarm) 2 High temperature (warning)
Path Name Data Type Service Comment
101.0.1 Revision UINT get
101.0.2 Max Instance UINT get
101.0.3 Number of Instances UINT get
101.0.16 Current Permission BYTE get, set
101.0.17 Permission Locked BOOL get, set – 0: other interfaces approved to
operation
– 1: operation exclusively via De-
viceNet
22
Connection "DeviceNet"
Instance 2: RS485
101.2.19 Address USINT get, set 1-255: RS485 address
Instance 4: Remote
101.4.17 Configuration USINT get, set {0;4} (see p. 30, chap. 7.3)
Instance 6: DI1
101.6.17 Configuration USINT get, set 0-5(see p. 30, chap. 7.3)
Instance 7: DI2
101.7.17 Configuration USINT get, set 0-5(see p. 30, chap. 7.3)
Instance 8: DI3
101.8.17 Configuration USINT get, set 0-5(see p. 30, chap. 7.3)
Instance 9: AI
101.9.17 Configuration USINT get, set 0-1 (see p. 30, chap. 7.3)
Instance 10: DO1
101.10.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)
Instance 11: DO2
101.11.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)
Instance 12: AO1
101.12.17 Configuration USINT get, set 0-5 (see p. 30, chap. 7.3)
Process Components
Instance 13: Relay 1
101.13.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)
Instance 14: Relay 2
101.14.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)
Instance 15: Relay 3
101.15.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)
Instance 16: Accessory A1
101.16.17 Configuration USINT get, set 0-10(see p. 30, chap. 7.3)
Instance 17: Accessory B1
101.17.17 Configuration USINT get, set 0-10(see p. 30, chap. 7.3)
Instance 18: Accessory A2
101.18.17 Configuration USINT get, set 0-10(see p. 30, chap. 7.3)
Instance 19: Accessory B2
101.19.17 Configuration USINT get, set 0-10(see p. 30, chap. 7.3)
Path Name Data type Service Comment
102.0.1 Revision UINT get
102.0.2 Max Instance UINT get
102.0.3 Number of Instances UINT get
Instance 1: Backing pump
102.1.17 Configuration USINT get, set 0-2 (see p. 31, chap. 7.4)
102.1.21 Switch-Off Threshold UINT get, set 0-1000 W
102.1.22 Switch-On Threshold UINT get, set 0-1000 W
Instance 7: Rotation speed switch point
102.7.17 Configuration USINT get, set 0-1 (see p. 31, chap. 7.4)
102.7.18 Status BOOL get – 0: Rotation speed switch point
102.7.21 Switchpoint 1 UINT get, set 50-97 % (see p. 31, chap. 7.4)
102.7.22 Switchpoint 2 UINT get, set 5-97 % (see p. 31, chap. 7.4)
not attained
– 1: Rotation speed switch point
attained
23
Connection "DeviceNet"
Data types
Services
Data type Byte Description Example
BOOL 1 Binary value (0/1) 00h: 0, 01h:1 BYTE 1 8 single bits 00h, FFh DINT 4 signed integer 12345678h: 89h, 56h, 34h, 12h INT 2 signed integer 1234h: 34h, 12h Packed EPATH 6 1.2.3: 20h, 01h, 24h, 02h, 30h, 03h SHORT_STRIN
G SINT 1 signed integer -42: D6h UINT 2 unsigned integer 2468h: 68h, 24h UDINT 4 unsigned integer 10203040h: 40h, 30h, 20h, 10h USINT 1 unsigned integer 101: 65h WORD 2 16 single bits 55AAh: AAh, 55h
character string with antecedent length byte
"Bilbo": 05h, 42h, 69h, 6Ch, 62h, 6Fh
Service DeviceNet-Service Code
abo abort 4Bh all allocate_master/slave_connection_set 4Bh gaa get_attributes_all 01h get get_attribute_single 0Eh per perform_diagnostics 4Eh rec recover 4Ch rel release_master/slave_connection_set 4Ch res reset 05h set set_attribute_single 10h sta start 06h
24
The Pfeiffer Vacuum parameter set

7 The Pfeiffer Vacuum parameter set

7.1 General

All function-relevant variables of a turbopump are anchored in the electronic drive unit as parameters. Each parameter has a three-digit number and a designation. Parameters can be used via Pfeiffer Vacuum display and control units or via RS-485 with the Pfeiffer Vacuum protocol.
NOTE
Additional parameters in the control unit
For the control of connected external components (e.g. vacuum measurement devices) there are additional parameters fixed in the respective Pfeiffer Vacuum display and con­trol unit.
Please consider the respective operating instructions.
Conventions Parameters are displayed in square brackets as a three-digit number in bold font. The
designation may also be stated if necessary.
Example: [P:312] Software version

7.2 Parameter overview

Annotation
# Three figure number of the parameter Display Notification of the parameter in a Pfeiffer Vacuum display and control unit Designation Short description of the parameter Functions Functional description of the parameter Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum pro-
Access method R: read access; W: write access Unit Physical unit of the described characteristic min / max permissible limits for value input default factory settings (partially specific of the pump type)
Parameter can be stored non volatile in the electronic drive unit and may be re-
Operation with DCU
Parameter set and Pfeiffer Vacuum display and control unit
Pfeiffer Vacuum display and control units DCU show the basic parameter set by default. Furthermore the DCU contains parameters, which are not positioned in the electronic drive unit.
Parameter [P:794] = 1 (Display of all available parameters).
tocol
used after resetting of the mains supply.
NOTE
# Display Designation Functions
340 Pressure Active pressure value 7 R mbar 1E-101E3
350 Ctr Name Type of display and control unit 4 R 351 Ctr Software Software of display and control unit 4 R 738 Gaugetype Type of pressure gauge 4 RW 794 Param set Parameterset 0 = basic parameter set
1 = extended parameter set
795 Servicelin Insert service line 7 RW 795
Unit min max default
Data type
Access
7RW 0 1 0
25
The Pfeiffer Vacuum parameter set
Control commands
# Display Designation Functions
001 Heating Heating 0 = off
1 = on
002 Standby Standby 0 = off
1 = on
004 RUTimeCtrl Run-up time control 0 = off
1 = on 009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1 010 PumpgStatn Pumping station 0 = off
1 = on and error acknowledgement 012 EnableVent Enable venting 0 = no
1 = yes 013 Brake Brake 0 = off
1 = on 017 CfgSpdSwPt Configuration rotation speed switch point 0 = Rotation speed switch point 1
1 = Rotation speed switch point 1&2 019 Cfg DO2 Configuration output DO2 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate 023 MotorPump Motor pump 0 = off
1 = on 024 Cfg DO1 Configuration output DO1 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate 025 OpMode BKP Operation mode backing pump 0 = Continous operating
1 = Intermittend mode
2 = Delayed switch-on 026 SpdSetMode Rotation speed setting mode 0 = off
1 = on 027 GasMode Gas mode 0 = Heavy gases
1 = Light gases
2 = Helium 028 Cfg Remote Configuration remote 0 = Standard
4 = Relais inverted 030 VentMode Venting mode 0 = Delayed venting
1 = No venting
2 = Direct venting 035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
Unit min max default
Data type
Access
0RW 0 1 0 x
0RW 0 1 0 x
0RW 0 1 1 x
0RW 0 1 0 x
0RW 0 1 0 x
0RW 0 1 1 x
7RW 0 1 0 x
7RW 0 17 1 x
0RW 0 1 1 x
7RW 0 17 0 x
7RW 0 2 0 x
7RW 0 1 0 x
7RW 0 2 0 x
7RW 0 4 0 x
7RW 0 2 2 x
7RW 0 8 0 x
26
The Pfeiffer Vacuum parameter set
# Display Designation Functions
036 Cfg Acc B1 Configuration accessory connection B1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit 037 Cfg Acc A2 Configuration accessory connection A2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit 038 Cfg Acc B2 Configuration accessory connection B2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit 045 Cfg Rel R1 Configuration Relay 1 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate 046 Cfg Rel R2 Configuration Relay 2 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
Unit min max default
Data type
Access
7RW 0 8 1 x
7RW 0 8 3 x
7RW 0 8 2 x
7RW 0 17 0 x
7RW 0 17 1 x
27
The Pfeiffer Vacuum parameter set
# Display Designation Functions
047 Cfg Rel R3 Configuration Relay 3 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate 050 SealingGas Sealing gas 0 = off
1 = on 055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed
1 = Power
2 = Current
3 = always 0 V
4 = always 10 V
5 = follows AI1 057 Cfg AI1 Configuration input AI1 0 = Disconnected
1 = Set value rot. speed setting mode 060 CtrlViaInt Control via interface 1 = Remote
2 = RS-485
4 = PV.can
8 = Field bus
16 = E74
255 = Unlock interface selection 061 IntSelLckd Interface selection locked 0 = off
1 = on 062 Cfg DI1 Configuration input DI1 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting [P:063/064]
063 Cfg DI2 Configuration input DI2 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting [P:062/064]
064 Cfg DI3 Konfiguration input DI3 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting [P:062/063]
Unit min max default
Data type
Access
7RW 0 17 3 x
0RW 0 1 0 x
7RW 0 5 0 x
7RW 0 1 0 x
7 RW 1 255 2 x
0RW 0 1 0 x
7RW 0 5 1 x
7RW 0 5 2 x
7RW 0 5 3 x
Status requests
# Display Designation Functions
300 RemotePrio Remote priority 0 = no
1 = yes
302 SpdSwPtAtt Rotation speed switch point attained 0 = no
1 = yes 303 Error code Error code 4R 304 OvTempElec Excess temperature electronic drive unit 0 = no
1 = yes 305 OvTempPump Excess temperature pump 0 = no
1 = yes 306 SetSpdAtt Set rotation speed attained 0 = no
1 = yes
28
Data type
0R 0 1
0R 0 1
0R 0 1
0R 0 1
0R 0 1
Unit min max default
Access
The Pfeiffer Vacuum parameter set
# Display Designation Functions
307 PumpAccel Pump accelerates 0 = no
1 = yes 308 SetRotSpd Set rotation speed (Hz) 1 R Hz 0 999999 309 ActualSpd Active rotation speed (Hz) 1 R Hz 0 999999 310 DrvCurrent Drive current 2 R A 0 9999.99 311 OpHrsPump Operating hours pump 1 R h 0 65535 x 312 Fw version Firmware version electronic drive unit 4 R 313 DrvVoltage Drive voltage 2 R V 0 9999.99 314 OpHrsElec Operating hours electronic drive unit 1 R h 0 65535 x 315 Nominal Spd Nominal rotation speed (Hz) 1 R Hz 0 999999 316 DrvPower Drive power 1 R W 0 999999 319 PumpCylces Pump cycles 1 R 0 65535 x 324 TempPwrStg Temperature power stage 1 R °C 0 999999 326 TempElec Temperature electronic 1 R °C 0 999999 329 BearngWear Wear conditions safety bearings 1 R % 0 150 330 TempPmpBot Temperature pump bottom part 1 R °C 0 999999 336 AccelDecel Acceleration / Deceleration 1 R rpm/s 0 999999 342 TempBearng Temperature bearing 1 R °C 0 999999 346 TempMotor Temperature motor 1 R °C 0 999999 349 ElecName Name of electronic drive unit 4 R 354 HW Version Hardware version electronic drive unit 4 R 358 RotorImbal Rotor out-of-balance 1 R % 0 150 360 ErrHist1 Error code history, pos. 1 4 R x 361 ErrHist2 Error code history, pos. 2 4 R x 362 ErrHist3 Error code history, pos. 3 4 R x 363 ErrHist4 Error code history, pos. 4 4 R x 364 ErrHist5 Error code history, pos. 5 4 R x 365 ErrHist6 Error code history, pos. 6 4 R x 366 ErrHist7 Error code history, pos. 7 4 R x 367 ErrHist8 Error code history, pos. 8 4 R x 368 ErrHist9 Error code history, pos. 9 4 R x 369 ErrHist10 Error code history, pos. 10 4 R x 397 SetRotSpd Set rotation speed (rpm) 1 R rpm 0 999999 398 ActualSpd Actual rotation speed (rpm) 1 R rpm 0 999999 399 NominalSpd Nominal rotation speed (rpm) 1 R rpm 0 999999
Unit min max default
Data type
Access
0R 0 1
Set value settings
# Display Designation Functions
700 RUTimeSVal Set value run-up time 1 RW min 1 120 8 x 701 SpdSwPt1 Rotation speed switch point 1 1 RW % 50 97 80 x 707 SpdSVal Set value in rot. speed setting mode 2 RW % 20 100 65 x 708 PwrSVal Set value power consumption 7 RW % 10 100
710 Swoff BKP Switching off threshold backing pump in intermit-
711 SwOn BKP Switching on threshold backing pump in intermit-
717 StdbySVal Set value rotation speed at standby 2 RW % 20 100 66.7 x 719 SpdSwPt2 Rotation speed switch point 2 1 RW % 5 97 20 x 720 VentSpd Venting rot. speed at delayed venting 7 RW % 40 98 50 x 721 VentTime Venting time at delayed venting 1 RW s 6 3600 3600 x 777 NomSpdConf Nominal rotation speed confirmation 1 RW Hz 0 1500 0 x 797 RS485Adr RS-485 device address 1 RW 1 255 1 x
tend mode
tend mode
1. depending on the pump type
Unit min max default
Data type
Access
method
1
1 RW W 0 1000 0 x
1 RW W 0 1000 0 x
100
x
29
The Pfeiffer Vacuum parameter set

7.3 Configuring the connections

The electronic drive unit is pre-configured in the factory. Thereby the turbopump is im­mediately operational with the necessary functions. The connections of the electronic drive unit can be configured to suit individual requirements using the parameter set.
Accessory connec­tion
Digital inputs on "remote"
Configuration via parameters [P:035], [P:036], [P:037] or [P:038].
Option Description
0 = Fan (continous operation) Control via parameter Pumping station 1 = Venting valve, normally closed Control via parameter Enable venting, when using a venting
valve which is normally closed.
2 = Heating Control via parameters Heating and Rotation speed switch-
pont attained
3 = Backing pump Control via parameters Pumping station and operation
mode backing pump
4 = Fan (temperature controlled) Control via parameter Pumping station and temperature
thresholds 5 = Sealing gas Control via parameters Pumping station and Sealing gas 6 = always 0 GND for the control of an external device 7 = always 1 +24 V DC for the control of an external device 8 = Power failure venting unit Control via parameter Enable venting, when using a power
failure venting unit. 9 = TMS heating unit* TMS switching box control 10 = TMS cooling unit* TMS control of cooling water supply
* Only when using pumps with Temperature Management System TMS
Configuration via parameters [P:062], [P:063] or [P:064].
Option Description
0 = deactivated Connection deactivated 1 = Enable venting Control is equal to parameter [P:012] 2 = Heating Control is equal to parameter [P:001] 3 = Sealing gas Control is equal to parameter [P:050] 4 = Run-up time control Control is equal to parameter [P:004] 5 = Rotation speed setting mode Control is equal to parameter [P:026]
Digital outputs and relays on "remote"
30
Configuration via parameters [P:019] and [P:024], respectively [P:045], [P:046],
[P:047] and [P:028].
In the description "active" means:
– For all digital outputs: V+ active high
– For all relays: Contact switch-over according to configuration of [P:028]
Option Description
0 = Rotation speed switchpoint attained active, if switchpoint attained 1 = No error active, if failure-free operation 2 = Error active, if error message is active 3 = Warning active, if warning message is active 4 = Error and / or warning active, if error and / or warning is active 5 = Set rotation speed attained active, if set rotation speed is attained 6 = Pump on active, if Pumping station and Motor is on; No Error 7 = Pump accelerates active, if Pumping station is on;
Actual rotation speed < Set rotation speed
8 = Pump decelerates active, if Pumping station is on;
Actual rotation speed > Set rotation speed Pumping station is off;
Rotation speed > 3 Hz 9 = always 0 GND for the control of an external device 10 = always 1 +24 V DC for the control of an external device 11 = Remote priority active active, if Remote priority is active
The Pfeiffer Vacuum parameter set
Option Description
12 = Heating Control is equal to parameter [P:001] 13 = Backing pump Control is equal to parameter [P:010] and [P:025] 14 = Sealing gas Control is equal to parameter [P:050] 15 = Pumping station Control is equal to parameter [P:010] 16 = Pump rotates active, if rotation speed > 1 Hz 17 = Pump does not rotate active, if rotation speed < 2 Hz 18 = TMS engaged* active, if TMS set temperature is engaged
* Only when using pumps with Temperature Management System TMS
Analog output on
Configuration via parameter [P:055].
"remote"
Option Description
0 = Rotation speed Rotation speed signal; 0 - 10 V DC = 0 - 100 % x f 1 = Power Power signal; 0 - 10 V DC = 0 - 100 % x P 2 = Current Current signal; 0 - 10 V DC = 0 - 100 % x I 3 = always 0 V always GND 4 = always 10 V output of continously 10 V DC 5 = follows AI1 follows the analogue input 1
Analog input on
Configuration via parameter [P:057].
"remote"
Option Description
0 = Switched off Connection is deactivated 1 = Set value in rotation speed setting
mode
Rotation speed setting mode via pin 7 (0 - 10 V) and pin 11 (GND)
Control via interface Configuration via parameters [P:060] and [P:061].
Option [P:060] Description
1 = remote Operation via connection "remote" 2 = RS-485 Operation via connection "RS-485"
4 = PV.can For service purposes only 8 = Field bus Operation via field bus
16 = E74 Operation via connection "E74"
Nominal
max
max
Option [P:061] Description
0 = off Interface selection via [P:060] 1 = on Interface selection locked

7.4 Operation with the Pfeiffer Vacuum parameter set

Factory settings The electronic drive unit is pre-programmed in the factory. This guarantees proper, reli-
able turbopump operation without the need for additional configuration.
Checking the adjust­ments
Gas type dependent operations
Before operating with parameters, check set values and control commands for their
suitability for the pumping process.
Remove the remote plug from electronic drive unit if required.
Friction causes the rotor to heat up severely under gas load and high rotation speed. To avoid overheating, the electronic drive unit has implemented power-rotation speed-char­acteristics, whereby the pump can be operated at every rotation speed with the maxi­mum allowable gas load without danger of damage. The maximum power consumption depends on the gas type. Three characteristics are available in order to completely ex­haust the pump's capacity for each gas type.
31
The Pfeiffer Vacuum parameter set
[P:708]
D
F
B
A
C
E
P
max
f
N
Run-up
Rotation speed
Power
C-D = gas mode "0" A-B = gas mode "1" E-F = gas mode "2"
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de­struction of the pump.
Ensure the gas mode is correctly set.Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).
Gas mode "0" for gases with the molecular mass >39, e.g. Ar.
Gas mode "1" for gases with the molecular mass 39.
Gas mode "2" for helium.
Power characteristics according to the technical data of the turbopump.
Check and set-up the gas mode via [P:027].
CAUTION
Fig. 3: Principle of power characteristics lines for gas type dependent operations,
e.g. gas mode = 0
The turbopump runs up with maximum power consumption. When the nominal and/or set rotation speed is reached, the pump automatically switches over to the chosen power characteristic of the selected gas mode. Increasing gas load is initially compensated by a rise in power consumption in order to keep the rotation speed constant. Increasing gas friction, however, causes the turbopump to heat up more severely. When the gastype­dependent maximum power is exceeded, the rotation speed of the turbopump is reduced until an equilibrium between permissible power and gas friction is attained.
To avoid rotation speed fluctuations, Pfeiffer Vacuum recommends setting a some-
what lower frequency in rotation speed setting mode.
Set value power con­sumption
Adjust the parameter [P:708] to the desired value in %.
If adjusting the set value power consumption below 100 % the run-up time prolongs. To
avoid error messages, the parameter [P:700] RUTimeSVal should be adjusted accord-
ingly.
Run-up time The run-up of the turbopump is time-monitored ex factory. There are various causes of
prolonged run-up times, e.g.:
Too high gas loads
Leakage in the system
The set value run-up time is too low
Eliminate any external and application-related causes.Adjust the run-up time via parameter [P:700].
32
The Pfeiffer Vacuum parameter set
Adjusting the rotation speed switchpoint
The rotation speed switch point can be used for the message "Pump operational for the process". Overrunning or underrunning the active rotation speed switch point activates or deactivates a signal at the pre-configured output on the electronic drive unit and at
the status parameter [P:302].
Rotation speed switchpoint 1
Adjust the parameter [P:701] to the desired value in %.Parameter [P:017] = 0
Signal output and status parameter [P:302] are based on the set value for rotation speed switch point 1 [P:701].
f
(%)
[P:017] = 0
[P:701]
t
[P:010]
[P:302]
Fig. 4: Example for the configuration rotation speed switch point 1 active
1
0
1
0
Process
t
t
Rotation speed switchpoint 1 & 2
Adjust the parameter [P:701] to the desired value in %.Adjust the parameter [P:719] to the desired value in %.Parameter [P:017] = 1
When the pumping station [P:010] is switched on, the rotation speed switch point 1 is the
signal generator. When the pumping station is switched off, signal output and status que­ry are based on the rotation speed switch point 2. The signal output is governed by the hysteresis between the two switch points.
f
(%)
[P:017] = 1
[P:701] [P:719]
t
[P:010]
[P:302]
Fig. 5: Example for the configuration rotation speed switch point 1+2 active; [P:701] > [P:719]
1
0
1
0
Process
t
t
33
The Pfeiffer Vacuum parameter set
Rotation speed set­ting mode
f
(%)
[P:017] = 1
[P:719] [P:701]
t
[P:010]
[P:302]
Fig. 6: Example for the configuration rotation speed switch points 1+2 active; [P:701] < [P:719]
1
0
1
0
Process
t
t
The rotation speed setting mode reduces the rotation speed and hence the throughput of the turbopump. The pumping speed of the turbopump changes proportional to rotation speed. Standby mode is ineffective during rotation speed setting mode. The set rotation
speed is adjusted by the set value in rotation speed setting mode [P:707]. The rotation
speed switch point varies with the set rotation speed. Underrunning or overrunning the set value in rotation speed setting mode activates and deactivates the status signal
[P:306] SetSpdAtt respectively.
Adjust the parameter [P:707] to the desired value in %.Parameter [P:026] = 1Read the parameters [P:308]/[P:397].
Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process and pro-
duction stops. When standby mode is active, the electronic drive unit reduces the rotation speed of the turbopump. Standby mode is ineffective during rotation speed setting mode. The factory setting for the set value in standby mode is 66.7 % of the nominal rotation speed. Underrunning or overrunning the set speed in standby mode activates or deacti-
vates the status signal [P:306] SetSpdAtt.
Adjust the parameter [P:717] to the desired value in %.Parameter [P:026] = 0Parameter [P:002] = 1Read the parameters [P:308]/[P:397].
Rotation speed set value
The typical nominal rotation speed of a turbopump is factory-set in the electronic drive unit. If the electronic drive unit is replaced or a different pump type is used, the reference set value of the nominal rotation speed must be confirmed. This procedure is part of a redundant safety system for avoiding excess rotation speeds.
HiPace Nominal rotation speed confirmation [P:777]
300 1000 Hz 400 / 700 / 800 820 Hz
Adjust the parameter [P:777] according to the pump type.
Once the nominal rotation speed is attained, the pump will run idle unless additional gas loads are entered. Depending on process or application requirements, the nominal rota­tion speed can be reduced in rotation speed setting mode or standby mode.
34
The Pfeiffer Vacuum parameter set
Operation mode backing pump
Operation of a connected backing pump via the electronic drive unit depends on the backing pump type.
Operation mode [P:025] recommended backing pump
"0" continous operation all kinds of backing pumps "1" Intermittend operation diaphragm pumps only "2" Delayed switching on all kinds of backing pumps
Adjust the parameter [P:025] to the desired value.
Continous operation
With "pumping station on", the electronic drive unit sends a signal to the configured ac­cessory connection to switch on the backing pump. This signal can also be used for con­trolling a fore-vacuum safety valve.
Intermittend operation (diaphragm pumps only)
Intermittend operation can extend the life expectancy of the membrane of a connected diaphragm pump. Either a diaphragm pump with built-in semiconductor relay or an inter­connected relay box with semiconductor relay is required for intermittend operation. The backing pump is switched on and off in dependence of the turbopump's power consump­tion. A relation to the supplied fore-vacuum pressure is derived from the power consump­tion. The switching off and switching on thresholds for the backing pump are adjustable. Fluctuations in the power consumption of idling turbopumps and type-dependent varying fore-vacuum pressures of the backing pumps require the switching thresholds to be set separately for the intermittend mode.
Pfeiffer Vacuum recommends the intermittend mode between 5 and 10 mbar. A pressure gauge and a dosing valve are required to set the switching thresholds.
Switch on the vacuum system via the function "pumping station" and await the run-up.Generate a fore-vacuum pressure of 10 mbar by gas inlet via dosing valve.Read and note the parameter [P:316]. Adjust the switch on threshold backing pump via parameter [P:711] to the determined
drive power for a fore-vacuum pressure of 10 mbar.
Reduce the fore-vacuum pressure to 5 mbar.Read and note the parameter [P:316]. Adjust the switch off threshold backing pump via parameter [P:710] to the determined
drive power for a fore-vacuum pressure of 5 mbar.
Electrical brake The turbopump is equipped with an electric brake. It supports rapid deceleration of the
rotor until standstill.
Recommendation: To reduce rotor slow-down time, always shut down turbopumps
with magnetic bearings using the electric brake.
Parameter [P:013] = 1
Operation with acces­sories
Depending on the configuration, various accessories can be connected to the turbopump and controlled via parameter of the electronic drive unit.
Heating
Switch on or off the heating via parameter [P:001].
The activation of a connected casing heating depends on rotation speed switch point 1 (factory setting: 80 % x f
Nominal
).
Fan
Two options in the connection configuration enable continuous or temperature controlled
operation of a connected air cooling unit (see p. 30, chap. 7.3). Threshold values are
type-specific and are anchored in the electronic drive unit.
35
The Pfeiffer Vacuum parameter set
Sealing gas valve
Switch on or off a sealing gas valve which is connected to a pre-configured output via
parameter [P:050].
Vent modes The turbopump can be vented only after the function "pumping station" has been
switched off. Signals are sent to configured outputs with a fixed delay of 6 s. There are three options for operation with a venting valve connected.
 Enable venting via parameter [P:012].  Select the venting mode via parameter [P:030].
Delayed venting
Start and venting time after "pumping station off" are configurable and depend on the ro­tation speed of the turbopump.
Parameter [P:030] = 0Adjust the venting rotation speed in % of the nominal rotation speed via parameter
[P:720].
Adjust the venting time in s via parameter [P:721].
If the venting rotation speed is underrun, the venting valve will open for the set venting time. In the event of a power failure, venting will occur if the set venting rotation speed is underrun. In this case, the venting period depends on the residual energy delivered by the moving rotor. When power is restored, the venting process is interrupted.
No venting
No venting is performed during this operation mode.
Parameter [P:030] = 1
Direct venting
Start and venting time are not configurable. Venting starts with a delay of 6 s after "pump­ing station off". When the function "pumping station" is switched on renewed, the venting valve closes automatically. In the event of a power failure, venting will occur if an an­chored type-specific rotation speed is underrun. When power is restored, the venting process is interrupted.
Parameter [P:030] = 2
Safety bearing stress The level of stress on the safety bearings is linked to the severity of the disruptive influ-
ences on the running rotor. The stress on the safety bearings is expressed as a percent­age of the maximum possible stress due to the drive electronics and can be viewed via the RS-485 interface using the Pfeiffer Vacuum display and control unit or PC.
Display the current safety bearing stress in % via parameter [P:329].
Display of a correspondent warning message at 75 % total stress.
Display of a correspondent error message at 100 % total stress.
– Operation of the pump is no longer possible. – Please contact Pfeiffer Vacuum Service.
Balance The magnetic bearing sensorics permanently monitor the current rotor balance. The bal-
ance is expressed as a percentage of the maximum possible rotor imbalance due to the drive electronics and can be viewed via the RS-485 interface using the Pfeiffer Vacuum display and control unit or PC.
Display the current rotor balance in % via parameter [P:329].
Display of a correspondent warning message at 75 % of the admissible unbalance.
Display of a correspondent error message at 100 % of the admissible unbalance.
36
– Operation of the pump is no longer possible. – Please contact Pfeiffer Vacuum Service.
The Pfeiffer Vacuum parameter set
Monitoring the ther­mal load
If threshold values are overrun, output signals from temperature sensors allow the pump to be brought to a safe condition. Depending on pump type, temperature threshold val­ues for warnings and error messages are saved fixed in the electronic drive unit . For information purposes, various status queries are prepared in the parameter set.

7.5 Switching on/off the pump

Switching on The function "pumping station" comprises turbopump operation with control of all con-
nected accessories (e.g. backing pump).
Switch on the supply voltage with switch S1 on the power supply.Parameter [P:023] = 1Parameter [P:010] = 1
Ongoing (and removed) error messages are reset. After a successfully completed self­test, the electronic drive unit sets the turbopump motor and all connected accessories into operation depending on their configuration.
When the pumping station is activated, the motor of the turbopump can be switched off
and on via the function [P:023].
Switching off  Parameter [P:010] = 0
The electronic drive unit switches off the turbopump and activates preset accessory op­tions (e.g. venting, backing pump).
Wait for the complete standstill of the pump.Cut off the supply voltage with switch S1 on the power supply.
37
Pfeiffer Vacuum Protocol for "RS-485"

8 Pfeiffer Vacuum Protocol for "RS-485"

8.1 Telegram frame

The telegram frame of the Pfeiffer Vacuum protocol contains only ASCII code characters [32; 127], the exception being the end character of the message (e.g. a PC) sends a telegram, which is answered by a slave (e.g. electronic drive unit or transmitter).
a2 a1 a0 * 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0
a2 - a0 Unit address for slave
– Individual address of the unit ["001";"255"] – Group address "9xx" for all identical units (no response) – global address "000" for all units on the bus (no response)
* Action (see p. 38, chap. 8.2)
n2 - n0 Pfeiffer Vacuum parameter numbers l1 - l0 Data length dn ... d0
dn - d0 Data in data type concerned (see p. 39, chap. 8.3)
c2 - c0 Checksum (sum of ASCII values of cells a2 to d0) modulo 256 C
R
carriage return (ASCII 13)
C
. Basically, a master
R
C
R

8.2 Telegrams

Data request ?
a2 a1 a0 0 0 n2 n1 n0 0 2 = ? c2 c1 c0
Control command !
a2 a1 a0 1 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0
Data response / control command understood 
a2 a1 a0 1 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0
Error message 
a2 a1 a0 1 0 n2 n1 n0 0 6 N O _ D E F c2 c1 c0
"NO_DEF" The parameter n2 - n0 does not exist "_RANGE" Data dn - d0 are outside the permitted range "_LOGIC" Logic access violation
Example 1 Data request
Actual rotation speed (parameter [P:309], device address slave: "123")
? 1230030902=?112
ASCII 49 50 51 48 48 51 48 57 48 50 61 63 49 49 50 13
_RANGE
_LOGI C
C
R
C
R
C
R
C
R
C
R
38
Data request: 633 Hz Actual rotation speed (parameter [P:309], device address slave: "123")
 1231030906000633037
ASCII 49 50 51 49 48 51 48 57 48 54 48 48 48 54 51 51 48 51 55 13
C
R
Example 2 Control command
Switch on pumping station (parameter [P:010], device address slave: "042")
! 0421001006111111020
ASCII 4852504948484948485449494949494948504813
Control command understood Switch on pumping station (parameter [P:010], device address slave: "042")
! 0421001006111111020
ASCII 4852504948484948485449494949494948504813

8.3 Applied data types

Data type Description Size l1 - l0 Exampl e
0 False / true 06 000000 / 111111 1 Positive integer number 06 000000 to 999999 2 Positive fixed comma number 06 001571 equal to 15,71 4 Symbol chain 06 TC_400 7 Positive integer number 03 000 to 999 11 Symbol chain 16 BrezelBier&Wurst
Pfeiffer Vacuum Protocol for "RS-485"
C
R
C
R
39
Malfunctions

9 Malfunctions

9.1 General

Turbopump and electronic drive unit malfunctions always result in a warning or error message. In both cases, the electronic drive unit outputs an error code. Operating mes­sages are generally displayed via the LEDs on the electronic drive unit. If an error occurs, the turbopump and connected devices will be switched off. The selected venting mode will be triggered after the preset delay.
Automatic start-up after power failure or malfunction acknowledgement
The function "pumping station" of the electronic drive unit remains active after power failure or errors that lead to shut down the pump or the system. The turbopump runs up automatically after power ist restoresd or malfunction acknowledgement.
Switch off the function "pumping station" if necessary.Provide safety measures against interference in the high vacuum flange while the tur-
bopump is running.

9.2 Operating mode display via LED

LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump. A differentiated malfunction and warning display is possible only for opera­tion with DCU or HPU.
WARNING
LED Symbol Steady OFF Flashing
(1/12 s active)
Green insufficient
power supply
Yellow no warning Warning
Red no malfunction Malfunction
Pumping station "OFF" Rotation speed ≤ 1Hz
Blinking (1/2 s active)
Pumping station "OFF" Rotation speed > 1 Hz
Steady ON
Pumping station "ON"

9.3 Error codes

Error code
Err001 Excess rotation speed Contact Pfeiffer Vacuum Service
Err002 Overvoltage – Wrong mains pack used Check type of mains pack
Err006 Run-up time error – Run-up time too short
Err008 Connection electronic drive unit - pump
Err010 Internal device fault Contact Pfeiffer Vacuum Service
Err021 Electronic drive unit does not recognize
Err041 Excess current motor Contact Pfeiffer Vacuum Service Err043 Internal configuration fault Contact Pfeiffer Vacuum Service Err044 Excess temperature electronic – Cooling deficient Optimize cooling
Err045 Excess temperature motor – Cooling deficient Optimize cooling
Problem Possible cause Remedy
Reset at rotation speed f = 0 only
Check mains pack voltageAdjust run-up time to process
Check the vacuum chamber for leaks or
closed valves
Adjust rotation speed switch point
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 onlyContact Pfeiffer Vacuum Service
Reset at rotation speed f = 0 only
Check the ambient conditions
Check the ambient conditions
faulty
pump
– Gas flow in the vacuum chamber
caused by leakage or open valves
– Rotation speed switchpoint is underrun
after run-up time is expired
– Connection to the pump is faulty Check the connection
40
Malfunctions
Error
Problem Possible cause Remedy
code
Err046 Internal initialization fault Contact Pfeiffer Vacuum Service Err073 Overload axial bearing Contact Pfeiffer Vacuum Service Err074 Overload radial bearing Contact Pfeiffer Vacuum Service Err089 Rotor out of target area, stabilization im-
possible
Err091 Internal device fault Contact Pfeiffer Vacuum Service Err092 Unknown connection panel Contact Pfeiffer Vacuum Service Err093 Temperature analysis motor faulty Contact Pfeiffer Vacuum Service Err094 Temperature analysis electronic faulty Contact Pfeiffer Vacuum Service Err098 Internal communication fault Contact Pfeiffer Vacuum Service Err107 Collective fault power stage Contact Pfeiffer Vacuum Service
Err108 Rotation speed measurement faulty Contact Pfeiffer Vacuum Service
Err109 Firmware not confirmed Contact Pfeiffer Vacuum Service Err114 Temperature analysis power stage faulty Contact Pfeiffer Vacuum Service Err117 Excess temperature pump bottom part – Cooling deficient Optimize cooling
Err118 Excess temperature power stage – Cooling deficient Optimize cooling
Err119 Excess temperature bearing – Cooling deficient Optimize cooling
Err777 Nominal rotation speed not confirmed – Nominal rotation speed not confirmed
Err800 Excess current position sensors Contact Pfeiffer Vacuum Service Err802 Calibration of position sensors faulty New calibration by mains "ON/OFF"
Err810 Data set missing in the pump Contact Pfeiffer Vacuum Service Err815 Excess current magnetic bearing output
stage
Err890 Safety bearing stress > 100 % Contact Pfeiffer Vacuum Service Err891 Rotor unbalance > 100 % Contact Pfeiffer Vacuum Service Wrn007 Low voltage / mains power failure – Mains failure Check mains supply Wrn018 Remote priority conflict – Pumping station is switched on via
Wrn045 High temperature motor – Cooling deficient Optimize cooling
Wrn076 High temperature electronic – Cooling deficient Optimize cooling
Wrn089 Rotor out of target area, stabilization
was possible
Wrn097 Pump information invalid – Pump data faulty Reset for default values Wrn098 Pump information incomplete – Connection to the pump is faulty Contact Pfeiffer Vacuum Service Wrn100 Rotation speed raised to minimum value – Permissible adjustments for the rotation
Wrn115 Temperature analysis pump bottm part
faulty
Wrn116 Temperature analysis bearing faulty Contact Pfeiffer Vacuum Service Wrn117 High temperature pump bottom part – Cooling deficient Optimize cooling
Wrn118 High temperature power stage – Cooling deficient Optimize cooling
Wrn119 High temperature bearing – Cooling deficient Optimize cooling
Wrn168 High deceleration – Rate of pressure rise too high; Venting
Wrn801 Brake electronics defective Contact Pfeiffer Vacuum Service Wrn806 Brake resistor defective Contact Pfeiffer Vacuum Service Wrn807 Calibration position sensors required – Recommended by status evaluation Automatic calibration at rotation speed f=0 Wrn890 Safety bearing stress > 75 % Contact Pfeiffer Vacuum Service Wrn891 Rotor unbalance > 75 % Contact Pfeiffer Vacuum Service
– Crushes and vibrations Check the ambient conditions
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 only
Check the ambient conditions
Check the ambient conditions
Check the ambient conditions
after replacement of the electronic drive unit
[P:010], whereas the E74-input "start/ stop" is off (opened)
– Crushes and vibrations Check the ambient conditions
speed setting mode or standby are in­correct
rate to high
Confirm the nominal rotation speed via
[P:777]
Reset at rotation speed f = 0 only
Contact Pfeiffer Vacuum Service
Contact Pfeiffer Vacuum Service
Switch on the pumping station via E74
Switch off [P:010]
Check the ambient conditions
Check the ambient conditions
Check [P:707] or [P:717]Find the valid rotation speed range in the
technical data of the turbopump
Contact Pfeiffer Vacuum Service
Check the ambient conditions
Check the ambient conditions
Check the ambient conditionsCheck and optimize the venting rate (pump
specific)
41

Declaration of conformity

according to the EC directive:
Electromagnetic Compatibility 2004/108/EC
Low Voltage 2006/95/EEC
We hereby certify, that the product specified below is in accordance with the provision
of EU Electromagnetic Compatibility Directive 2004/108/EEC and EU Low Voltage Di- rective 2006/95/EEC.
TM 700 DN
Guidelines, harmonised standards and national standards and specifications which have been applied:
Signatures:
(M.Bender) Managing Director
DIN EN 61000-3-2 : 2008
DIN EN 61000-3-3 : 2006
DIN EN 61010-1 : 2002
DIN EN 61326-1 : 2006
DIN EN 62061 : 2005
Semi F47-0200
Semi S2-0706
(Dr. M. Wiemer) Managing Director
Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany
CE/2011
Leading. Dependable. Customer Friendly
Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide. For German engineering art, competent advice and reliable services.
Ever since the invention of the turbopump, we´ve been setting standards in our industry. And this claim to leadership will continue to drive us in the future.
You are looking for a perfect vacuum solution? Please contact us:
Germany
Pfeiffer Vacuum GmbH Headquarters Tel.: +49 (0) 6441 802-0 info@pfeiffer-vacuum.de
Benelux
Pfeiffer Vacuum GmbH Sales & Service Benelux Tel.: +800-pfeiffer benelux@pfeiffer-vacuum.de
China
Pfeiffer Vacuum (Shanghai) Co., Ltd. Tel.: +86 21 3393 3940 info@pfeiffer-vacuum.cn
France
Pfeiffer Vacuum France SAS Tel.: +33 169 30 92 82 info@pfeiffer-vacuum.fr
Great Britain
Pfeiffer Vacuum Ltd. Tel.: +44 1908 500600 sales@pfeiffer-vacuum.co.uk
India
Pfeiffer Vacuum India Ltd. Tel.: +91 40 2775 0014 pfeiffer@vsnl.net
Italy
Pfeiffer Vacuum Italia S.p.A. Tel.: +39 02 93 99 05 1 contact@pfeiffer-vacuum.it
Korea
Pfeiffer Vacuum Korea Ltd. Tel.: +82 31 266 0741 sales@pfeiffer-vacuum.co.kr
Austria
Pfeiffer Vacuum Austria GmbH Tel.: +43 1 894 17 04 office@pfeiffer-vacuum.at
Sweden
Pfeiffer Vacuum Scandinavia AB Tel.: +46 8 590 748 10 sales@pfeiffer-vacuum.se
Switzerland
Pfeiffer Vacuum (Schweiz) AG Tel.: +41 44 444 22 55 info@pfeiffer-vacuum.ch
United States
Pfeiffer Vacuum Inc. Tel.: +1 603 578 6500 contact@pfeiffer-vacuum.com
www.pfeiffer-vacuum.com
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