This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refer to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacuum.com.
1.2Conventions
Safety instructionsThe safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
CAUTION
Possible danger
Injuries or property damages can occur.
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
Pictograph
definitions
Instructions in the
Work instruction: here you have to do something.
Warning of a displayed source of danger in connection with
operation of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in serious accidents.
text
Abbreviations usedDCU: Display and control unit
HPU: Handheld programming unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
DI / DO: Digital input / digital output
AI / AO: Analog input / analog output
f:Rotation speed (derivated from frequency in Hz)
[P:000]: Parameter of the electronic drive unit with number
NOTE
3
Safety
2Safety
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
2.1Safety precautions
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
NOTE
WARNING
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
● Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use
exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum
is able to guarantee the compliance of the European and North American guidelines.
● Observe all safety and accident prevention regulations.
● A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
● Regularly check the proper observance off all safety measures.
● Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
● Do not loosen any plug connection during operations.
● The unit has been accredited with protection class IP 54. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
● Keep leads and cables well away from hot surfaces (> 70 °C).
● Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
4
2.2Proper use
warranty seal
2.3Improper use
Safety
NOTE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accordingly.
● The electronic drive unit TM 700 DN operates designated Pfeiffer Vacuum turbo-
pumps and their accessories in a DeviceNet bus system.
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is deemed to be all use for purposes deviating from those mentioned above, especially:
● The use of accessories or spare parts, which are not named in this manual.
● The operation of the devices in potentially radioactive areas.
NOTE
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.
5
Product description
3Product description
3.1Product identification
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, second edition, including Amendment 1, or a later version of the same standard incorporating the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the product or:
● www.tuvdotcom.com
● TUVdotCOM-ID 0000021320
Product featuresThe electronic drive unit TM 700 DN is an integrated component of the turbopump. It's
purpose is to drive, monitor and control the entire pump.
CharacteristicsTM 700 DN
Connection voltage TC48 V DC ± 5 %
Connection panelDeviceNet
Turbopump HiPace300 M, 700 M, 800 M
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Scope of delivery● CD-ROM for DeviceNet connection with EDS files
3.2Range of application
Pfeiffer Vacuum electronic drive units TM 700 DN must be installed and operated in the
following ambient conditions.
Installation locationweather protected (indoors)
Protection categoryIP 54
Protection classIII
Temperature+5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T ≤ 31 °C, up to max. 50% at T ≤ 40 °C
Atmospheric pressure75 kPa - 106 kPa
Installation altitude2000 m max.
Degree of pollution2
Overvoltage categoryII
6
3.3Function
accessory
A
B
PV.can
remote
DeviceNet
DC in
RATE
NETMOD
P
1
2
5
MSD
P
LSD
00
22
44
66
8
ADDRESS
b
d
b
c
g2
g4 g5g3
gg1a
Fig. 1:DeviceNet panel for the TM 700 DN
a Mains connection "DC in"
b Connection "accessory A+B"
c Connection "remote"
d Service connection "PV.can"
g Connection "DeviceNet"
3.4General connection description
1
DC in
Casing plug with bayonet locking for the voltage supply between Pfeiffer Vacuum
mains packs and the electronic drive unit TC.
Product description
g1 DeviceNet status LED
g2 Device status LED
g3 DeviceNet baudrate switch
g4 DeviceNet address selection switch MSD
g5 DeviceNet address selection switch LSD
Accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories.
The use of a Y-connector enables double assignment of one connection.
2
PV.can
M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service purposes.
remote
High Density D-sub 26 pole female socket for the connection of a remote control.
DeviceNet
M12 plug (sealed micro) with screw coupling and LEDs for the connection of a DeviceNet bus system.
Casing socket on the rear side of the electronic drive unit for the connection to the
turbopump.
1. "DC in" and "accessory" are already described in the operating instructions of the turbopump.
2. The connection "PV.can" serves to service purposes exclusively.
7
Connections diagram
4Connections diagram
41
5
accessory A
23
DI Pumping station
n.c.
Accessory A2
24 VDC
Accessory A1
FE
+ 24 VDC* out
DI1
DI Motor pump
DI Standby
DI2
AI+ 0-10 VDC
DO1
DO2
1
2
Contact load for accessories:
3
-200 mA max., each connection
-450 mA max., all connections in sum
4
5
1
2
3
4
5
6
7
8
9
All inputs and outputs
in this area are
galvanically seperated
from +U
B
1
2
3
4
5
1
2
3
4
5
n.c.
Accessory B2
24 VDC
Accessory B1
FE
32
5
14
accessory B
DI3
AI- GND
AO1 / 0-10 V
DI Error acknowledgement
DI Remote priority
Relay 1
Relay 1
Relay 1
Relay 2
remote
Potential free contacts
19
1926
1018
DO Remote priority active
Relay 2
Relay 2
Relay 3
Relay 3
RS485 D+
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
1
2
3
4
5
A
Drain
V+
V-
CAN_H
CAN_L
+ UB (+24 / +48 VDC ± 5 %)
3
5
12
DeviceNet
4
B
B
GND
DC inPV.can
C
FE
AC
RS485 D-
GND*
Fig. 2:Connections diagram and assignment of the TM 700 DN
8
25
26
5Connection "remote"
19
1018
1926
Remote control options are provided via the 26-pole D-Sub connector with the designa-
tion ”remote“ on the electronic drive unit.
Shielded connectors and cables must be used.
The following information display the factory setting. Configuration is possible
using the Pfeiffer Vacuum parameter set.
5.1Pin assignment
Pin FunctionDesignation factory settings
1+24 V DC output (V+)Reference voltage for all digital in- and outputs
2DI1Enable venting; open: no; V+: yes
3DI Motor pumpDrive motor; open: off; V+: on
4DI Pumping stationOpen: off; V+: on and error acknowledgement
5DI StandbyStandby rotation speed; open: off; V+: on
6DI2Heating; open: off; V+: on
7AI+ Rotation speed setting mode Set value in rotation speed setting mode;
8DO1Rotation speed switch point attained;
9DO2GND: error; V+: no error (I
10 DI3Sealing gas; open: off; V+: on
11 AI- Rotation speed setting mode
GND
12 AO1Actual rotation speed;
13 DI Error acknowledgementError acknowledgement: V+ pulse (min 500 ms)
14 DI Remote priorityControl via interface "remote"; open: off
15 Relais 1Connection to Pin 16 if relay 1 is inactive
16 Relais 1Rotation speed switchpoint attained;
17 Relais 1Connection to Pin 16 if relay 1 is active
18 Relais 2Connection to Pin 19 if relay 2 is inactive
19 Relais 2No error; relay contact 2 (U
20 Relais 2Connection to Pin 19 if relay 2 is active
21 Relais 3Connection to Pin 22 if relay 3 is inactive
22 Relais 3Warning; relay contact 3 (U
23 DO Remote priorityGND: off; V+: remote priority active
24 RS-485 D+according to specifications and Pfeiffer Vacuum protocol
25 RS-485 D-according to specifications and Pfeiffer Vacuum protocol
26 Ground (GND)Reference ground for all digital inputs and all outputs
Connection "remote"
2-10 V DC = 20-100% of the nominal rotation speed
GND:no; V+: yes (I
Set value in rotation speed setting mode; GND
0-10 V DC is equivalent to 0-100%; R
V+: set and priority over other digital inputs
relay contact 1 (U
= 50 mA/24 V)
max
= 50 V DC; I
max
= 50 mA/24 V)
max
max
= 50 V DC; I
max
= 50 V DC; I
max
> 10 kΩ
L
= 1 A)
max
max
= 1 A)
= 1 A)
9
Connection "remote"
5.2Operation via "remote" connection
Increased wear and damage due to incorrect operation
Active magnetic bearings require a constant power supply. The motor acts as a generator and supplies the drive electronics in the event of a power failure. Below a speed of
approx. 6500 rpm, the kinetic energy of the rotor will no longer be sufficient to supply the
magnetic bearings. The drive electronics will switch off completely. The rotor will run
down audibly in the safety bearings.
Do not switch off the pump by disconnecting the mains power supply.
CAUTION
+24 V DC* Output /
Pin 1
Inputs 2 - 6 and the connections to Pins 10, 13, 14 are activated by connecting them with
+24 V DC to Pin 1 (active high). They can also be activated via an external PLC. The
functions are deactivated by "PLC high level" and by "PLC low level".
● PLC high level: +13 V to +33 V
● PLC low level: -33 V to +7 V
● Ri: 7 kΩ
● I
< 210 mA (with RS-485, if existing)
max
InputsThe digital inputs at connection "remote" are used to connect various functions of the
electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can
be configured via interface RS-485 and the Pfeiffer Vacuum parameter set.
DI1 (Enable venting) / Pin 2
V+ :Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI Motor pump / Pin 3
After Pin 4 (pumping station) is activated and the electronic drive unit successfully completes the self-test, the turbopump is placed into operation. During operation, the turbopump can be switched off and on again, while the pumping station remains switched
on. The turbopump is not vented thereby.
V+ :Turbopump motor on
open: Turbopump motor off
10
DI Pumping station / Pin 4
Connected pumping station components (e.g. backing pump, venting valve, air cooling
unit) are triggered and, with Pin 3 (motor) simultaneously activated, the turbopump is
placed in operation. Any ongoing error messages are reset when their cause has been
eliminated.
V+ :Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby / Pin 5
In standby mode, the turbopump operates at a specified rotor speed < nominal rotation
speed. Factory setting and recommended operation are 66.7 % of the nominal rotation
speed.
V+ :Standby activated
open: Standby off, operation at nominal rotation speed
Connection "remote"
f(%)
100
20
210
U(V)
DI2 (Heating) / Pin 6
V+ :Heating on
open: Heating off
DI3 (Sealing gas) / Pin 10
V+ :Sealing gas valve open
open: Sealing gas valve closed
DI Error acknowledgement / Pin 13
V+ :Reset ongoing error messages when cause has been eliminated with a pulse of
min. 500 ms duration.
open: Inactive
DI Remote priority / Pin 14
V+ :The connection "remote" has operation priority over all other digital inputs.
open: Remote priority inactive
AI Rotation speed setting mode / Pin 7 and Pin 11
The analog input at the TM 700 DN defines the set rotation speed of the turbopump. An
input signal of 2 - 10 V between AI+ (Pin 7) and AI- (Pin 11) corresponds to a rotation
speed within the range of 20 - 100% of the nominal rotation speed. If the input is open or
signals fall below 2 V, the pump is accelerated up to nominal rotation speed.
OutputsThe digital outputs at the connection "remote" can be loaded with a maximum of 24 V /
50 mA per output. All outputs listed below are configurable by the Pfeiffer Vacuum parameter set via interface RS-485 (description related to factory settings).
DO1 (Rotation speed switch point attained) / Pin 8
Active high after the rotation speed switch point is attained. Rotation speed switch point
1 is factory-set to 80% of the nominal rotation speed. It can, for example, be used for a
"pump operational" message.
DO2 (No errors) / Pin 9
When the supply voltage has been established, digital output DO2 permanently outputs
24 V DC which means "no errors". Active low in case of error (collective error message).
DO Remote priority active / Pin 23
Active high: The connection "remote" takes priority over any other connected control
panels (e.g. RS-485). With active low, the connection "remote" is ignored.
AO1 Analog output 0-10 V DC / Pin 12
A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x f
picked up via the analog output (load R ≥ 10 kΩ). Additional functions (optionally current/
power) can be assigned to the analog output via DCU, HPU or PC.
Nominal
) can be
11
Connection "remote"
Relay contact s (invertible)
Relay 1 / Pin 15, Pin 16 and Pin 17
The contact between Pin 16 and Pin 15 is closed when the rotation speed switch point
is underrun; relay 1 is inactive. The contact between Pin 16 and Pin 17 is closed when
the rotation speed switch point is attained; relay 1 is active.
Relay 2 / Pin 18, Pin 19 and Pin 20
The contact between Pin 19 and Pin 18 is closed when a malfunction is present; relay 2
is inactive. The contact between Pin 19 and Pin 20 is closed when operation is malfunction free; relay 2 is active.
Relay 3 / Pin 21 and Pin 22
The contact between Pin 21 and Pin 22 is closed when no warning messages are active;
relay 3 is inactive. The contact between Pin 21 and Pin 22 is open when a warning message is present; relay 3 is active.
RS-485One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected respectively to the electronic drive unit via Pin 24 and Pin 25 of the connec-
tion "remote" on the electronic drive unit.
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extralow voltage.
Connect only suitable devices to the bus system.
● The group address of the electronic drive unit is 964.
● All units connected to the bus must have differing RS-485 device addresses [P:797].
Establish the connections according to the specification of the interface RS-485.
Connect all units with RS-485 D+ and RS-485 D- to the bus.
DesignationValue
Serial interfaceRS-485
Baud rate 9600 bauds
Data word length 8 bits
Paritynone (no parity)
Start bits1
Stop bits 1..2
Connecting Pfeiffer Vacuum display and control units or PC
The connection of respectively one external operating unit is possible on the interface
RS-485.
A USB interface (PC) can be connected via the USB/RS-485-converter.
12
6Connection "DeviceNet"
12
3
4
5
MSDPLSD
00
22
44
66
8
ADDRESS
6.1Connections
The turbopump can be connected to a DeviceNet bus system using the connector (5 pin, sealed micro) labelled "DeviceNet" on the electronic drive unit. A supply voltage (V+,
V-) is required to supply this connection in addition to the supply voltage for the electronic
drive unit. The interface is galvanically safe and is isolated from the maximum supply
voltage for the electronic drive unit.
PinAssignment
1Drain
2V+, 24 V DC referred to V3V4CAN_H
5CAN_L
Perform DeviceNet wiring in accordance with the applicable specifications.
Supply the DeviceNet connection with voltage.
6.2Configuring the connection
To start DeviceNet communication, the TM 700 DN must be configured using the enclosed EDS files.
Connection "DeviceNet"
Select desired device address
Select desired baud rate
Fit rubber plugs at the address selector switches evenly and as deep as possible to
achieve the stated protection class.
Device addressThe DeviceNet device address is set manually using the "ADDRESS" selector switches
or via DeviceNet.
PositionMeaning
00 to 63Device address (decimal)
– MSD = multiples of 10 (0x-6x)
– LSD = units (x0-x9)
PAddress via DeviceNet
Setting the address manually
Set the selector switches to the desired value.
– Once the setting has been made, the device accesses the bus using the new ad-
dress.
Setting the address via DeviceNet
Switch off the pump/electronic drive unit
Set the selector switches to "P".
– When switched on, the system uses the last valid valid address ("63" upon deliv-
ery).
– The address is programmable via DeviceNet object 3.1.1. (see p. 16, chap. 6.5).
13
Connection "DeviceNet"
RATE
P
1
2
5
Baud rateThe DeviceNet baud rate is set manually using the "RATE" selector switches or via De-
viceNet.
PositionMeaning
1125 kBit/s
2250 kBit/s
5500 kBit/s
PBaud rate via DeviceNet
Setting the baud rate manually
Set the selector switches to the desired value.
– The change takes effect the next time the system is switched on.
Setting the baud rate via DeviceNet
Switch off the pump/electronic drive unit
Set the selector switches to "P".
– When switched on, the system uses the last valid baud rate (500 kBit/s upon deliv-
ery).
– The baud rate is programmable via DeviceNet object 3.1.2. (see p. 16, chap. 6.5).
6.3Configuring the data exchange
Depending on the program used to set up DeviceNet communication, you can carry out
the following steps:
Import EDS file (see scope of delivery)
Device-specific data:
Specify the format of the cyclical input/output data
– Specify the cyclically alternating process data using objects "Poll I/O input data
(4.0.100)" and "Poll I/O output data (4.0.101)"
– The format can be changed only if the poll I/O connection is inactive.
Specify system behaviour following termination of the cyclical DeviceNet communica-
tion.
– Use object "Idle Action (9.1.7)" to specify which action is to be carried out if there
is a failure of the cyclical exchange of process data (poll I/O connection).
Specify the remote priority.
– Use object "Permission locked (101.0.17)" to specify whether the electronic drive
unit is to be controlled exclusively via DeviceNet or whether other interfaces (e.g.
RS485) are also permitted.
– This does not restrict write access via other interfaces.
Perform pump configuration.
– To set a configuration that differs from the delivery state, use the EDS file to adjust
Set up the device in the master scanlist.
Set the format of the cyclical input/output data
This connection can be used to access the individual DeviceNet objects (see p. 16, chap.
6.5). As a rule, this is done using a dedicated configuration program and the EDS file.
This is also used to specify which data is sent during the cyclical data exchange.
Connection "DeviceNet"
Cyclical data exchange (poll I/O connection)
For the cyclical data exchange, multiple DeviceNet objects are combined to form assemblies (4.x.3.). One assembly is selected for each direction (input/output data). The follow-ing assemblies are available for selection:
Input data (produced data, pump --> PLC)
1: pump status (default)
2: pump status, speed
100: pump status, speed, current
101: pump status, speed, current, temperature
Assembly ... ByteDenotation
12100101
0000(BYTE) Exception Status (48.1.12)
– Bit 0: Common alarm
– Bit 1: Device-specific alarm
– Bit 2: Manufacturer-specific alarm
Details for Bit 0-2 s. Exception Detail Alarm (48.1.13)
– Bit 4: Common warning
– Bit 5: Device-specific warning
– Bit 6: Manufacturer-specific warning
Details for Bit 4-6 s. Exception Detail Warning (48.1.14)
1111(BYTE) Speed Status (42.1.39)
– Bit 0: Pump is on, rotation speed > 0
– Bit 1: Motor is off
– Bit 2: Standby rotation speed attained
– Bit 4: Stopped
– Bit 5: Accelerates
– Bit 6: Set rotation speed attained
– Bit 7: Decelerates
2222(BOOL) Pump On Status (8.1.3)
– 0: Pump is off
– 1: Pump is on, rotation speed > 0
-3-43-43-4(INT) Pump Speed (42.1.7)
– Actual rotation speed in rpm/4 (e.g. value 15000 equates to 60000 rpm)
--5-65-6(INT) IMC Current (42.1.102)
– Intermediate circuit current in 100 mA (e.g. value 42 equates to 4.2 A)
---7-8(INT) Bearing Temperature (49.3.6)
– Bearing temperature in °C/10 (e.g. value 210 equates to 21.0 °C)
---9-10 (INT) Pump Temperature (49.101.6)
– Bottom part temperature in °C/10 (e.g. value 210 equates to 21.0 °C)
Output data (consumed data, PLC --> pump)
5: pump control (default)
6: pump/speed control
7: pump/speed control, set speed
103: pump/speed control, set speed, vent valve cfg.
Assembly ... ByteDenotation
567103
0000(BOOL) Pump On (9.1.3)
– 0: Pumping station off
– 1: Pumping station on
-111(BYTE) Speed Control (42.1.38)
– Bit 0: Pumping station on
– Bit 1: Motor off
– Bit 2: Standby on
--2-32-3(INT) Speed Target (42.1.8)
– Set rotation speed in rpm/4 (e.g. value 15000 writing for 60000 rpm)
---4-5(WORD) Vent Valve Configuration (7.1.4)
– 0: No venting
– 1: Direct venting
– 2: Delayed venting
15
Connection "DeviceNet"
6.4LED operation
NET
StatusMeaningAction
OffDevice not on bus Supply operating voltage
Green flashingOn bus, no master allocated Create connection with master
Green illuminatedOn bus, master allocated
Red flashingConnection to master expired Test connection to master
Red illuminatedBus error or duplicate device address
MOD
StatusMeaningAction
OffNo voltage supply Supply operating voltage
Green illuminatedDevice ready for operation
Red flashingDevice error Resolve error
All function-relevant variables of a turbopump are anchored in the electronic drive unit as
parameters. Each parameter has a three-digit number and a designation. Parameters
can be used via Pfeiffer Vacuum display and control units or via RS-485 with the Pfeiffer
Vacuum protocol.
NOTE
Additional parameters in the control unit
For the control of connected external components (e.g. vacuum measurement devices)
there are additional parameters fixed in the respective Pfeiffer Vacuum display and control unit.
Please consider the respective operating instructions.
ConventionsParameters are displayed in square brackets as a three-digit number in bold font. The
designation may also be stated if necessary.
Example: [P:312] Software version
7.2Parameter overview
Annotation
#Three figure number of the parameter
DisplayNotification of the parameter in a Pfeiffer Vacuum display and control unit
DesignationShort description of the parameter
FunctionsFunctional description of the parameter
Data typeType of formatting of the parameter for the use within the Pfeiffer Vacuum pro-
Access methodR: read access; W: write access
UnitPhysical unit of the described characteristic
min / maxpermissible limits for value input
defaultfactory settings (partially specific of the pump type)
Parameter can be stored non volatile in the electronic drive unit and may be re-
Operation with DCU
Parameter set and Pfeiffer Vacuum display and control unit
Pfeiffer Vacuum display and control units DCU show the basic parameter set by default.
Furthermore the DCU contains parameters, which are not positioned in the electronic
drive unit.
Parameter [P:794] = 1 (Display of all available parameters).
tocol
used after resetting of the mains supply.
NOTE
#DisplayDesignationFunctions
340 PressureActive pressure value7 R mbar1E-101E3
350 Ctr NameType of display and control unit4 R
351 Ctr SoftwareSoftware of display and control unit4 R
738 GaugetypeType of pressure gauge4 RW
794 Param setParameterset0 = basic parameter set
1 = extended parameter set
795 ServicelinInsert service line7 RW795
Unitmin maxdefault
Data type
Access
7RW0 10
25
The Pfeiffer Vacuum parameter set
Control commands
#DisplayDesignationFunctions
001 HeatingHeating0 = off
1 = on
002 StandbyStandby0 = off
1 = on
004 RUTimeCtrlRun-up time control0 = off
1 = on
009 ErrorAcknError acknowledgement1 = Error acknowledgement0 W11
010 PumpgStatnPumping station0 = off
1 = on and error acknowledgement
012 EnableVentEnable venting0 = no
1 = yes
013 BrakeBrake0 = off
1 = on
017 CfgSpdSwPtConfiguration rotation speed switch point0 = Rotation speed switch point 1
1 = Rotation speed switch point 1&2
019 Cfg DO2Configuration output DO20 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
023 MotorPumpMotor pump0 = off
1 = on
024 Cfg DO1Configuration output DO10 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
025 OpMode BKPOperation mode backing pump0 = Continous operating
1 = on
062 Cfg DI1Configuration input DI10 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:063/064]
063 Cfg DI2Configuration input DI20 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:062/064]
064 Cfg DI3Konfiguration input DI30 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:062/063]
Unitmin maxdefault
Data type
Access
7RW0 173x
0RW0 10x
7RW0 50x
7RW0 10x
7 RW12552x
0RW0 10x
7RW0 51x
7RW0 52x
7RW0 53x
Status requests
#DisplayDesignationFunctions
300 RemotePrioRemote priority0 = no
1 = yes
302 SpdSwPtAttRotation speed switch point attained 0 = no
1 = yes
303 Error codeError code4R
304 OvTempElecExcess temperature electronic drive unit0 = no
1 = yes
305 OvTempPumpExcess temperature pump0 = no
1 = yes
306 SetSpdAttSet rotation speed attained0 = no
1 = yes
28
Data type
0R0 1
0R0 1
0R0 1
0R0 1
0R0 1
Unitmin maxdefault
Access
The Pfeiffer Vacuum parameter set
#DisplayDesignationFunctions
307 PumpAccelPump accelerates0 = no
1 = yes
308 SetRotSpdSet rotation speed (Hz)1 R Hz0999999
309 ActualSpdActive rotation speed (Hz)1 R Hz0999999
310 DrvCurrentDrive current2 R A09999.99
311 OpHrsPumpOperating hours pump1 R h065535x
312 Fw versionFirmware version electronic drive unit4 R
313 DrvVoltageDrive voltage2 R V09999.99
314 OpHrsElecOperating hours electronic drive unit1 R h065535x
315 Nominal SpdNominal rotation speed (Hz)1 R Hz0999999
316 DrvPowerDrive power1 R W0999999
319 PumpCylcesPump cycles1 R065535x
324 TempPwrStgTemperature power stage1 R °C0999999
326 TempElecTemperature electronic1 R °C0999999
329 BearngWearWear conditions safety bearings1 R %0150
330 TempPmpBotTemperature pump bottom part1 R °C0999999
336 AccelDecelAcceleration / Deceleration1 R rpm/s0999999
342 TempBearngTemperature bearing1 R °C0999999
346 TempMotorTemperature motor1 R °C0999999
349 ElecNameName of electronic drive unit4 R
354 HW VersionHardware version electronic drive unit4 R
358 RotorImbalRotor out-of-balance1 R %0150
360 ErrHist1Error code history, pos. 14 Rx
361 ErrHist2Error code history, pos. 24 Rx
362 ErrHist3Error code history, pos. 34 Rx
363 ErrHist4Error code history, pos. 44 Rx
364 ErrHist5Error code history, pos. 54 Rx
365 ErrHist6Error code history, pos. 64 Rx
366 ErrHist7Error code history, pos. 74 Rx
367 ErrHist8Error code history, pos. 84 Rx
368 ErrHist9Error code history, pos. 94 Rx
369 ErrHist10Error code history, pos. 104 Rx
397 SetRotSpdSet rotation speed (rpm)1 R rpm0999999
398 ActualSpdActual rotation speed (rpm)1 R rpm0999999
399 NominalSpdNominal rotation speed (rpm)1 R rpm0999999
Unitmin maxdefault
Data type
Access
0R0 1
Set value settings
#DisplayDesignationFunctions
700 RUTimeSValSet value run-up time1 RW min11208x
701 SpdSwPt1Rotation speed switch point 11 RW %50 9780x
707 SpdSValSet value in rot. speed setting mode2 RW %20 10065x
708 PwrSValSet value power consumption7 RW %10 100
710 Swoff BKPSwitching off threshold backing pump in intermit-
711 SwOn BKPSwitching on threshold backing pump in intermit-
717 StdbySValSet value rotation speed at standby2 RW %20 10066.7x
719 SpdSwPt2Rotation speed switch point 21 RW %59720x
720 VentSpdVenting rot. speed at delayed venting7 RW %40 9850x
721 VentTimeVenting time at delayed venting1 RW s636003600x
777 NomSpdConfNominal rotation speed confirmation1 RW Hz015000x
797 RS485AdrRS-485 device address1 RW12551x
tend mode
tend mode
1. depending on the pump type
Unitmin maxdefault
Data type
Access
method
1
1 RW W010000x
1 RW W010000x
100
x
29
The Pfeiffer Vacuum parameter set
7.3Configuring the connections
The electronic drive unit is pre-configured in the factory. Thereby the turbopump is immediately operational with the necessary functions. The connections of the electronic
drive unit can be configured to suit individual requirements using the parameter set.
Accessory connection
Digital inputs on
"remote"
Configuration via parameters [P:035], [P:036], [P:037] or [P:038].
OptionDescription
0 = Fan (continous operation)Control via parameter Pumping station
1 = Venting valve, normally closedControl via parameter Enable venting, when using a venting
valve which is normally closed.
2 = HeatingControl via parameters Heating and Rotation speed switch-
pont attained
3 = Backing pumpControl via parameters Pumping station and operation
mode backing pump
4 = Fan (temperature controlled)Control via parameter Pumping station and temperature
thresholds
5 = Sealing gasControl via parameters Pumping station and Sealing gas
6 = always 0GND for the control of an external device
7 = always 1+24 V DC for the control of an external device
8 = Power failure venting unitControl via parameter Enable venting, when using a power
failure venting unit.
9 = TMS heating unit*TMS switching box control
10 = TMS cooling unit*TMS control of cooling water supply
* Only when using pumps with Temperature Management System TMS
Configuration via parameters [P:062], [P:063] or [P:064].
OptionDescription
0 = deactivatedConnection deactivated
1 = Enable ventingControl is equal to parameter [P:012]
2 = HeatingControl is equal to parameter [P:001]
3 = Sealing gasControl is equal to parameter [P:050]
4 = Run-up time controlControl is equal to parameter [P:004]
5 = Rotation speed setting modeControl is equal to parameter [P:026]
Digital outputs and
relays on "remote"
30
Configuration via parameters [P:019] and [P:024], respectively [P:045], [P:046],
[P:047] and [P:028].
● In the description "active" means:
– For all digital outputs: V+ active high
– For all relays: Contact switch-over according to configuration of [P:028]
OptionDescription
0 = Rotation speed switchpoint attainedactive, if switchpoint attained
1 = No erroractive, if failure-free operation
2 = Erroractive, if error message is active
3 = Warningactive, if warning message is active
4 = Error and / or warningactive, if error and / or warning is active
5 = Set rotation speed attainedactive, if set rotation speed is attained
6 = Pump onactive, if Pumping station and Motor is on; No Error
7 = Pump acceleratesactive, if Pumping station is on;
Actual rotation speed < Set rotation speed
8 = Pump deceleratesactive, if Pumping station is on;
Actual rotation speed > Set rotation speed
Pumping station is off;
Rotation speed > 3 Hz
9 = always 0GND for the control of an external device
10 = always 1+24 V DC for the control of an external device
11 = Remote priority activeactive, if Remote priority is active
The Pfeiffer Vacuum parameter set
OptionDescription
12 = HeatingControl is equal to parameter [P:001]
13 = Backing pumpControl is equal to parameter [P:010] and [P:025]
14 = Sealing gasControl is equal to parameter [P:050]
15 = Pumping stationControl is equal to parameter [P:010]
16 = Pump rotatesactive, if rotation speed > 1 Hz
17 = Pump does not rotateactive, if rotation speed < 2 Hz
18 = TMS engaged*active, if TMS set temperature is engaged
* Only when using pumps with Temperature Management System TMS
Analog output on
Configuration via parameter [P:055].
"remote"
OptionDescription
0 = Rotation speedRotation speed signal; 0 - 10 V DC = 0 - 100 % x f
1 = PowerPower signal; 0 - 10 V DC = 0 - 100 % x P
2 = CurrentCurrent signal; 0 - 10 V DC = 0 - 100 % x I
3 = always 0 Valways GND
4 = always 10 Voutput of continously 10 V DC
5 = follows AI1follows the analogue input 1
Analog input on
Configuration via parameter [P:057].
"remote"
OptionDescription
0 = Switched offConnection is deactivated
1 = Set value in rotation speed setting
mode
Rotation speed setting mode via pin 7 (0 - 10 V) and pin 11
(GND)
Control via interface Configuration via parameters [P:060] and [P:061].
Option [P:060]Description
1 = remoteOperation via connection "remote"
2 = RS-485Operation via connection "RS-485"
4 = PV.canFor service purposes only
8 = Field busOperation via field bus
7.4Operation with the Pfeiffer Vacuum parameter set
Factory settingsThe electronic drive unit is pre-programmed in the factory. This guarantees proper, reli-
able turbopump operation without the need for additional configuration.
Checking the adjustments
Gas type dependent
operations
Before operating with parameters, check set values and control commands for their
suitability for the pumping process.
Remove the remote plug from electronic drive unit if required.
Friction causes the rotor to heat up severely under gas load and high rotation speed. To
avoid overheating, the electronic drive unit has implemented power-rotation speed-characteristics, whereby the pump can be operated at every rotation speed with the maximum allowable gas load without danger of damage. The maximum power consumption
depends on the gas type. Three characteristics are available in order to completely exhaust the pump's capacity for each gas type.
31
The Pfeiffer Vacuum parameter set
[P:708]
D
F
B
A
C
E
P
max
f
N
Run-up
Rotation speed
Power
C-D = gas mode "0"
A-B = gas mode "1"
E-F = gas mode "2"
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to destruction of the pump.
Ensure the gas mode is correctly set.
Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).
● Gas mode "0" for gases with the molecular mass >39, e.g. Ar.
● Gas mode "1" for gases with the molecular mass ≤ 39.
● Gas mode "2" for helium.
● Power characteristics according to the technical data of the turbopump.
Check and set-up the gas mode via [P:027].
CAUTION
Fig. 3:Principle of power characteristics lines for gas type dependent operations,
e.g. gas mode = 0
The turbopump runs up with maximum power consumption. When the nominal and/or set
rotation speed is reached, the pump automatically switches over to the chosen power
characteristic of the selected gas mode. Increasing gas load is initially compensated by
a rise in power consumption in order to keep the rotation speed constant. Increasing gas
friction, however, causes the turbopump to heat up more severely. When the gastypedependent maximum power is exceeded, the rotation speed of the turbopump is reduced
until an equilibrium between permissible power and gas friction is attained.
To avoid rotation speed fluctuations, Pfeiffer Vacuum recommends setting a some-
what lower frequency in rotation speed setting mode.
Set value power consumption
Adjust the parameter [P:708] to the desired value in %.
If adjusting the set value power consumption below 100 % the run-up time prolongs. To
avoid error messages, the parameter [P:700] RUTimeSVal should be adjusted accord-
ingly.
Run-up timeThe run-up of the turbopump is time-monitored ex factory. There are various causes of
prolonged run-up times, e.g.:
● Too high gas loads
● Leakage in the system
● The set value run-up time is too low
Eliminate any external and application-related causes.
Adjust the run-up time via parameter [P:700].
32
The Pfeiffer Vacuum parameter set
Adjusting the rotation
speed switchpoint
The rotation speed switch point can be used for the message "Pump operational for the
process". Overrunning or underrunning the active rotation speed switch point activates
or deactivates a signal at the pre-configured output on the electronic drive unit and at
the status parameter [P:302].
Rotation speed switchpoint 1
Adjust the parameter [P:701] to the desired value in %.
Parameter [P:017] = 0
Signal output and status parameter [P:302] are based on the set value for rotation speed
switch point 1 [P:701].
f
(%)
[P:017] = 0
[P:701]
t
[P:010]
[P:302]
Fig. 4:Example for the configuration rotation speed switch point 1 active
1
0
1
0
Process
t
t
Rotation speed switchpoint 1 & 2
Adjust the parameter [P:701] to the desired value in %.
Adjust the parameter [P:719] to the desired value in %.
Parameter [P:017] = 1
When the pumping station [P:010] is switched on, the rotation speed switch point 1 is the
signal generator. When the pumping station is switched off, signal output and status query are based on the rotation speed switch point 2. The signal output is governed by the
hysteresis between the two switch points.
f
(%)
[P:017] = 1
[P:701]
[P:719]
t
[P:010]
[P:302]
Fig. 5:Example for the configuration rotation speed switch point 1+2 active; [P:701] > [P:719]
1
0
1
0
Process
t
t
33
The Pfeiffer Vacuum parameter set
Rotation speed setting mode
f
(%)
[P:017] = 1
[P:719]
[P:701]
t
[P:010]
[P:302]
Fig. 6:Example for the configuration rotation speed switch points 1+2 active; [P:701] < [P:719]
1
0
1
0
Process
t
t
The rotation speed setting mode reduces the rotation speed and hence the throughput
of the turbopump. The pumping speed of the turbopump changes proportional to rotation
speed. Standby mode is ineffective during rotation speed setting mode. The set rotation
speed is adjusted by the set value in rotation speed setting mode [P:707]. The rotation
speed switch point varies with the set rotation speed. Underrunning or overrunning the
set value in rotation speed setting mode activates and deactivates the status signal
[P:306] SetSpdAtt respectively.
Adjust the parameter [P:707] to the desired value in %.
Parameter [P:026] = 1
Read the parameters [P:308]/[P:397].
StandbyPfeiffer Vacuum recommends standby mode for the turbopump during process and pro-
duction stops. When standby mode is active, the electronic drive unit reduces the rotation
speed of the turbopump. Standby mode is ineffective during rotation speed setting mode.
The factory setting for the set value in standby mode is 66.7 % of the nominal rotation
speed. Underrunning or overrunning the set speed in standby mode activates or deacti-
vates the status signal [P:306] SetSpdAtt.
Adjust the parameter [P:717] to the desired value in %.
Parameter [P:026] = 0
Parameter [P:002] = 1
Read the parameters [P:308]/[P:397].
Rotation speed set
value
The typical nominal rotation speed of a turbopump is factory-set in the electronic drive
unit. If the electronic drive unit is replaced or a different pump type is used, the reference
set value of the nominal rotation speed must be confirmed. This procedure is part of a
redundant safety system for avoiding excess rotation speeds.
HiPaceNominal rotation speed confirmation [P:777]
3001000 Hz
400 / 700 / 800820 Hz
Adjust the parameter [P:777] according to the pump type.
Once the nominal rotation speed is attained, the pump will run idle unless additional gas
loads are entered. Depending on process or application requirements, the nominal rotation speed can be reduced in rotation speed setting mode or standby mode.
34
The Pfeiffer Vacuum parameter set
Operation mode
backing pump
Operation of a connected backing pump via the electronic drive unit depends on the
backing pump type.
Operation mode [P:025]recommended backing pump
"0" continous operationall kinds of backing pumps
"1" Intermittend operationdiaphragm pumps only
"2" Delayed switching onall kinds of backing pumps
Adjust the parameter [P:025] to the desired value.
Continous operation
With "pumping station on", the electronic drive unit sends a signal to the configured accessory connection to switch on the backing pump. This signal can also be used for controlling a fore-vacuum safety valve.
Intermittend operation (diaphragm pumps only)
Intermittend operation can extend the life expectancy of the membrane of a connected
diaphragm pump. Either a diaphragm pump with built-in semiconductor relay or an interconnected relay box with semiconductor relay is required for intermittend operation. The
backing pump is switched on and off in dependence of the turbopump's power consumption. A relation to the supplied fore-vacuum pressure is derived from the power consumption. The switching off and switching on thresholds for the backing pump are adjustable.
Fluctuations in the power consumption of idling turbopumps and type-dependent varying
fore-vacuum pressures of the backing pumps require the switching thresholds to be set
separately for the intermittend mode.
Pfeiffer Vacuum recommends the intermittend mode between 5 and 10 mbar. A pressure
gauge and a dosing valve are required to set the switching thresholds.
Switch on the vacuum system via the function "pumping station" and await the run-up.
Generate a fore-vacuum pressure of 10 mbar by gas inlet via dosing valve.
Read and note the parameter [P:316].
Adjust the switch on threshold backing pump via parameter [P:711] to the determined
drive power for a fore-vacuum pressure of 10 mbar.
Reduce the fore-vacuum pressure to 5 mbar.
Read and note the parameter [P:316].
Adjust the switch off threshold backing pump via parameter [P:710] to the determined
drive power for a fore-vacuum pressure of 5 mbar.
Electrical brakeThe turbopump is equipped with an electric brake. It supports rapid deceleration of the
rotor until standstill.
Recommendation: To reduce rotor slow-down time, always shut down turbopumps
with magnetic bearings using the electric brake.
Parameter [P:013] = 1
Operation with accessories
Depending on the configuration, various accessories can be connected to the turbopump
and controlled via parameter of the electronic drive unit.
Heating
Switch on or off the heating via parameter [P:001].
The activation of a connected casing heating depends on rotation speed switch point 1
(factory setting: 80 % x f
Nominal
).
Fan
Two options in the connection configuration enable continuous or temperature controlled
operation of a connected air cooling unit (see p. 30, chap. 7.3). Threshold values are
type-specific and are anchored in the electronic drive unit.
35
The Pfeiffer Vacuum parameter set
Sealing gas valve
Switch on or off a sealing gas valve which is connected to a pre-configured output via
parameter [P:050].
Vent modesThe turbopump can be vented only after the function "pumping station" has been
switched off. Signals are sent to configured outputs with a fixed delay of 6 s. There are
three options for operation with a venting valve connected.
Enable venting via parameter [P:012].
Select the venting mode via parameter [P:030].
Delayed venting
Start and venting time after "pumping station off" are configurable and depend on the rotation speed of the turbopump.
Parameter [P:030] = 0
Adjust the venting rotation speed in % of the nominal rotation speed via parameter
[P:720].
Adjust the venting time in s via parameter [P:721].
If the venting rotation speed is underrun, the venting valve will open for the set venting
time. In the event of a power failure, venting will occur if the set venting rotation speed is
underrun. In this case, the venting period depends on the residual energy delivered by
the moving rotor. When power is restored, the venting process is interrupted.
No venting
No venting is performed during this operation mode.
Parameter [P:030] = 1
Direct venting
Start and venting time are not configurable. Venting starts with a delay of 6 s after "pumping station off". When the function "pumping station" is switched on renewed, the venting
valve closes automatically. In the event of a power failure, venting will occur if an anchored type-specific rotation speed is underrun. When power is restored, the venting
process is interrupted.
Parameter [P:030] = 2
Safety bearing stressThe level of stress on the safety bearings is linked to the severity of the disruptive influ-
ences on the running rotor. The stress on the safety bearings is expressed as a percentage of the maximum possible stress due to the drive electronics and can be viewed via
the RS-485 interface using the Pfeiffer Vacuum display and control unit or PC.
Display the current safety bearing stress in % via parameter [P:329].
● Display of a correspondent warning message at 75 % total stress.
● Display of a correspondent error message at 100 % total stress.
– Operation of the pump is no longer possible.
– Please contact Pfeiffer Vacuum Service.
BalanceThe magnetic bearing sensorics permanently monitor the current rotor balance. The bal-
ance is expressed as a percentage of the maximum possible rotor imbalance due to the
drive electronics and can be viewed via the RS-485 interface using the Pfeiffer Vacuum
display and control unit or PC.
Display the current rotor balance in % via parameter [P:329].
● Display of a correspondent warning message at 75 % of the admissible unbalance.
● Display of a correspondent error message at 100 % of the admissible unbalance.
36
– Operation of the pump is no longer possible.
– Please contact Pfeiffer Vacuum Service.
The Pfeiffer Vacuum parameter set
Monitoring the thermal load
If threshold values are overrun, output signals from temperature sensors allow the pump
to be brought to a safe condition. Depending on pump type, temperature threshold values for warnings and error messages are saved fixed in the electronic drive unit . For
information purposes, various status queries are prepared in the parameter set.
7.5Switching on/off the pump
Switching onThe function "pumping station" comprises turbopump operation with control of all con-
nected accessories (e.g. backing pump).
Switch on the supply voltage with switch S1 on the power supply.
Parameter [P:023] = 1
Parameter [P:010] = 1
Ongoing (and removed) error messages are reset. After a successfully completed selftest, the electronic drive unit sets the turbopump motor and all connected accessories
into operation depending on their configuration.
When the pumping station is activated, the motor of the turbopump can be switched off
and on via the function [P:023].
Switching off Parameter [P:010] = 0
The electronic drive unit switches off the turbopump and activates preset accessory options (e.g. venting, backing pump).
Wait for the complete standstill of the pump.
Cut off the supply voltage with switch S1 on the power supply.
37
Pfeiffer Vacuum Protocol for "RS-485"
8Pfeiffer Vacuum Protocol for "RS-485"
8.1Telegram frame
The telegram frame of the Pfeiffer Vacuum protocol contains only ASCII code characters
[32; 127], the exception being the end character of the message
(e.g. a PC) sends a telegram, which is answered by a slave (e.g. electronic drive
unit or transmitter).
a2a1a0*0n2n1n0l1l0dn...d0c2c1c0
a2 - a0Unit address for slave
– Individual address of the unit ["001";"255"]
– Group address "9xx" for all identical units (no response)
– global address "000" for all units on the bus (no response)
dn - d0Data in data type concerned (see p. 39, chap. 8.3)
c2 - c0Checksum (sum of ASCII values of cells a2 to d0) modulo 256
C
R
carriage return (ASCII 13)
C
. Basically, a master
R
C
R
8.2Telegrams
Data request ?
a2a1a000n2n1n002=?c2c1c0
Control command !
a2a1a010n2n1n0l1l0dn...d0c2c1c0
Data response / control command understood
a2a1a010n2n1n0l1l0dn...d0c2c1c0
Error message
a2a1a010n2n1n006NO_DEFc2c1c0
"NO_DEF"The parameter n2 - n0 does not exist
"_RANGE"Data dn - d0 are outside the permitted range
"_LOGIC"Logic access violation
Example 1Data request
Actual rotation speed (parameter [P:309], device address slave: "123")
?1230030902=?112
ASCII49505148485148574850616349495013
_RANGE
_LOGI C
C
R
C
R
C
R
C
R
C
R
38
Data request: 633 Hz
Actual rotation speed (parameter [P:309], device address slave: "123")
1231030906000633037
ASCII4950514948514857485448484854515148515513
C
R
Example 2Control command
Switch on pumping station (parameter [P:010], device address slave: "042")
!0421001006111111020
ASCII 4852504948484948485449494949494948504813
Control command understood
Switch on pumping station (parameter [P:010], device address slave: "042")
!0421001006111111020
ASCII 4852504948484948485449494949494948504813
8.3Applied data types
Data typeDescriptionSize l1 - l0Exampl e
0False / true06000000 / 111111
1Positive integer number06000000 to 999999
2Positive fixed comma number06001571 equal to 15,71
4Symbol chain06TC_400
7Positive integer number03000 to 999
11Symbol chain16BrezelBier&Wurst
Pfeiffer Vacuum Protocol for "RS-485"
C
R
C
R
39
Malfunctions
9Malfunctions
9.1General
Turbopump and electronic drive unit malfunctions always result in a warning or error
message. In both cases, the electronic drive unit outputs an error code. Operating messages are generally displayed via the LEDs on the electronic drive unit. If an error occurs,
the turbopump and connected devices will be switched off. The selected venting mode
will be triggered after the preset delay.
Automatic start-up after power failure or malfunction acknowledgement
The function "pumping station" of the electronic drive unit remains active after power
failure or errors that lead to shut down the pump or the system. The turbopump runs up
automatically after power ist restoresd or malfunction acknowledgement.
Switch off the function "pumping station" if necessary.
Provide safety measures against interference in the high vacuum flange while the tur-
bopump is running.
9.2Operating mode display via LED
LEDs in the front panel of the electronic drive unit show basic operating conditions of the
turbopump. A differentiated malfunction and warning display is possible only for operation with DCU or HPU.
WARNING
LEDSymbol Steady OFFFlashing
(1/12 s active)
Greeninsufficient
power supply
Yellowno warningWarning
Redno malfunctionMalfunction
Pumping station "OFF"
Rotation speed ≤ 1Hz
Blinking
(1/2 s active)
Pumping station "OFF"
Rotation speed > 1 Hz
Steady ON
Pumping station
"ON"
9.3Error codes
Error
code
Err001 Excess rotation speed Contact Pfeiffer Vacuum Service
Err002 Overvoltage– Wrong mains pack used Check type of mains pack
Err006 Run-up time error– Run-up time too short
Err008 Connection electronic drive unit - pump
Err010 Internal device fault Contact Pfeiffer Vacuum Service
Err021 Electronic drive unit does not recognize
Err041 Excess current motor Contact Pfeiffer Vacuum Service
Err043 Internal configuration fault Contact Pfeiffer Vacuum Service
Err044 Excess temperature electronic– Cooling deficient Optimize cooling
Err045 Excess temperature motor– Cooling deficient Optimize cooling
ProblemPossible causeRemedy
Reset at rotation speed f = 0 only
Check mains pack voltage
Adjust run-up time to process
Check the vacuum chamber for leaks or
closed valves
Adjust rotation speed switch point
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 only
Contact Pfeiffer Vacuum Service
Reset at rotation speed f = 0 only
Check the ambient conditions
Check the ambient conditions
faulty
pump
– Gas flow in the vacuum chamber
caused by leakage or open valves
– Rotation speed switchpoint is underrun
after run-up time is expired
– Connection to the pump is faulty Check the connection
40
Malfunctions
Error
ProblemPossible causeRemedy
code
Err046 Internal initialization fault Contact Pfeiffer Vacuum Service
Err073 Overload axial bearing Contact Pfeiffer Vacuum Service
Err074 Overload radial bearing Contact Pfeiffer Vacuum Service
Err089 Rotor out of target area, stabilization im-
possible
Err091 Internal device fault Contact Pfeiffer Vacuum Service
Err092 Unknown connection panel Contact Pfeiffer Vacuum Service
Err093 Temperature analysis motor faulty Contact Pfeiffer Vacuum Service
Err094 Temperature analysis electronic faulty Contact Pfeiffer Vacuum Service
Err098 Internal communication fault Contact Pfeiffer Vacuum Service
Err107 Collective fault power stage Contact Pfeiffer Vacuum Service
Err108 Rotation speed measurement faulty Contact Pfeiffer Vacuum Service
Err109 Firmware not confirmed Contact Pfeiffer Vacuum Service
Err114 Temperature analysis power stage faulty Contact Pfeiffer Vacuum Service
Err117 Excess temperature pump bottom part – Cooling deficient Optimize cooling
Err118 Excess temperature power stage– Cooling deficient Optimize cooling
Err119 Excess temperature bearing– Cooling deficient Optimize cooling
Err777 Nominal rotation speed not confirmed– Nominal rotation speed not confirmed
Err800 Excess current position sensors Contact Pfeiffer Vacuum Service
Err802 Calibration of position sensors faulty New calibration by mains "ON/OFF"
Err810 Data set missing in the pump Contact Pfeiffer Vacuum Service
Err815 Excess current magnetic bearing output
stage
Err890 Safety bearing stress > 100 % Contact Pfeiffer Vacuum Service
Err891 Rotor unbalance > 100 % Contact Pfeiffer Vacuum Service
Wrn007 Low voltage / mains power failure– Mains failure Check mains supply
Wrn018 Remote priority conflict– Pumping station is switched on via
Wrn045 High temperature motor– Cooling deficient Optimize cooling
Wrn076 High temperature electronic– Cooling deficient Optimize cooling
Wrn089 Rotor out of target area, stabilization
was possible
Wrn097 Pump information invalid– Pump data faulty Reset for default values
Wrn098 Pump information incomplete– Connection to the pump is faulty Contact Pfeiffer Vacuum Service
Wrn100 Rotation speed raised to minimum value – Permissible adjustments for the rotation
Wrn115 Temperature analysis pump bottm part
faulty
Wrn116 Temperature analysis bearing faulty Contact Pfeiffer Vacuum Service
Wrn117 High temperature pump bottom part– Cooling deficient Optimize cooling
Wrn118 High temperature power stage– Cooling deficient Optimize cooling
Wrn119 High temperature bearing– Cooling deficient Optimize cooling
Wrn168 High deceleration– Rate of pressure rise too high; Venting
Wrn801 Brake electronics defective Contact Pfeiffer Vacuum Service
Wrn806 Brake resistor defective Contact Pfeiffer Vacuum Service
Wrn807 Calibration position sensors required– Recommended by status evaluation Automatic calibration at rotation speed f=0
Wrn890 Safety bearing stress > 75 % Contact Pfeiffer Vacuum Service
Wrn891 Rotor unbalance > 75 % Contact Pfeiffer Vacuum Service
– Crushes and vibrations Check the ambient conditions
Reset at rotation speed f = 0 only
Reset at rotation speed f = 0 only
Check the ambient conditions
Check the ambient conditions
Check the ambient conditions
after replacement of the electronic drive
unit
[P:010], whereas the E74-input "start/
stop" is off (opened)
– Crushes and vibrations Check the ambient conditions
speed setting mode or standby are incorrect
rate to high
Confirm the nominal rotation speed via
[P:777]
Reset at rotation speed f = 0 only
Contact Pfeiffer Vacuum Service
Contact Pfeiffer Vacuum Service
Switch on the pumping station via E74
Switch off [P:010]
Check the ambient conditions
Check the ambient conditions
Check [P:707] or [P:717]
Find the valid rotation speed range in the
technical data of the turbopump
Contact Pfeiffer Vacuum Service
Check the ambient conditions
Check the ambient conditions
Check the ambient conditions
Check and optimize the venting rate (pump
specific)
41
Declaration of conformity
according to the EC directive:
● Electromagnetic Compatibility 2004/108/EC
● Low Voltage 2006/95/EEC
We hereby certify, that the product specified below is in accordance with the provision
of EU Electromagnetic Compatibility Directive 2004/108/EEC and EU Low Voltage Di-
rective 2006/95/EEC.
TM 700 DN
Guidelines, harmonised standards and national standards and specifications which
have been applied:
Signatures:
(M.Bender)
Managing Director
DIN EN 61000-3-2 : 2008
DIN EN 61000-3-3 : 2006
DIN EN 61010-1 : 2002
DIN EN 61326-1 : 2006
DIN EN 62061 : 2005
Semi F47-0200
Semi S2-0706
(Dr. M. Wiemer)
Managing Director
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
CE/2011
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