Pfeiffer Vacuum TM 700 DN Operating Instructions Manual

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TM 700 DN

PM C01 853

D-35614 Asslar

DeviceNet

remote

accessory

PV.can

RATE

MSD

LSD

ADDRESS

TM 700 DN

Electronic Drive Unit

Translation of the original instructions

Operating Instructions

PT 0356 BEN/C (1203)

Table of contents

1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

4 Connections diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

5 Connection "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

6 Connection "DeviceNet". . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

7 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

8 Pfeiffer Vacuum Protocol for "RS-485". . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

5.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

6.2 Configuring the connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

6.3 Configuring the data exchange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

6.4 LED operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

6.5 DeviceNet objects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 31

7.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

8.1 Telegram frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

8.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

9.2 Operating mode display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

About this manual

1 About this manual

1.1 Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refer to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.

Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacuum.com.

1.2 Conventions

Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk

evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:

CAUTION

Possible danger

Injuries or property damages can occur.

Command or note

Command to perform an action or information about properties, the disregarding of which may result in damage to the product.

Pictograph definitions

Instructions in the

 Work instruction: here you have to do something.

Warning of a displayed source of danger in connection with operation of the unit or equipment.

Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents.

text

Abbreviations used DCU: Display and control unit

HPU: Handheld programming unit TC: Electronic drive unit for turbopump TPS: Mains pack DI / DO: Digital input / digital output AI / AO: Analog input / analog output f: Rotation speed (derivated from frequency in Hz) [P:000]: Parameter of the electronic drive unit with number

NOTE

Safety

2 Safety

Duty to inform

Each person involved in the installation or operation of the unit must read and observe the safety-related parts of these operating instuctions.

 The operator is obligated to make operating personnel aware of dangers originating

from the unit or the entire system.

2.1 Safety precautions

Danger of unsafe electrical installation

Safe operation after installation is the responsibility of the operator.

 Do not independently modify or change the pump and electrical equipment.  Make sure that the system is integrated in an emergency off safety circuit.  Consult Pfeiffer Vacuum for special requirements.

NOTE

WARNING

Danger of electric shock

In case of defect, the parts connected to the mains supply are under voltage.

 Always keep the mains connection freely accessible so you can disconnect it at any

time.

● Power supply: The turbopump power supply must apply to the requirements of dou-

ble insulation between mains input voltage and operating voltage according to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines.

● Observe all safety and accident prevention regulations.

● A safe connection to the protective earthing conductor (PE) is recommended (protec-

tion class III).

● Regularly check the proper observance off all safety measures.

● Before carrying out any work disconnect the unit and all associated installations safely

from the mains.

● Do not loosen any plug connection during operations.

● The unit has been accredited with protection class IP 54. Take necessary measures

when installing into ambient conditions, which afford other protection classes.

● Keep leads and cables well away from hot surfaces (> 70 °C).

● Only separate the pump and the electronic drive unit from each other after disconnect-

ing the supply voltage and the complete standstill of the pump.

2.2 Proper use

warranty seal

2.3 Improper use

Safety

NOTE

CE conformity

The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.

 Following installation into a plant and before commissioning, the operator must check

the entire system for compliance with the valid EU directives and reassess it accordingly.

● The electronic drive unit TM 700 DN operates designated Pfeiffer Vacuum turbo-

pumps and their accessories in a DeviceNet bus system.

Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned above, especially:

● The use of accessories or spare parts, which are not named in this manual.

● The operation of the devices in potentially radioactive areas.

NOTE

Closure seal

The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.

 Do not open the product within its warranty period!  For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-

um Service.

Product description

3 Product description

3.1 Product identification

This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, second edition, including Amendment 1, or a later version of the same standard incorporating the same level of testing requirements.

For information about other certifications, if applicable, please see the signet on the product or:

● www.tuvdotcom.com

● TUVdotCOM-ID 0000021320

Product features The electronic drive unit TM 700 DN is an integrated component of the turbopump. It's

purpose is to drive, monitor and control the entire pump.

Characteristics TM 700 DN

Connection voltage TC 48 V DC ± 5 % Connection panel DeviceNet Turbopump HiPace 300 M, 700 M, 800 M

To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available.

Scope of delivery ● CD-ROM for DeviceNet connection with EDS files

3.2 Range of application

Pfeiffer Vacuum electronic drive units TM 700 DN must be installed and operated in the following ambient conditions.

Installation location weather protected (indoors) Protection category IP 54 Protection class III Temperature +5 °C to +40 °C (up to +35 °C with air cooling) Relative humidity max. 80 %, at T ≤ 31 °C, up to max. 50% at T ≤ 40 °C Atmospheric pressure 75 kPa - 106 kPa Installation altitude 2000 m max. Degree of pollution 2 Overvoltage category II

3.3 Function

accessory

PV.can

remote

DeviceNet

DC in

RATE

NET MOD

MSD

LSD

ADDRESS

g4 g5g3

gg1 a

Fig. 1: DeviceNet panel for the TM 700 DN

a Mains connection "DC in" b Connection "accessory A+B" c Connection "remote" d Service connection "PV.can" g Connection "DeviceNet"

3.4 General connection description

DC in

Casing plug with bayonet locking for the voltage supply between Pfeiffer Vacuum mains packs and the electronic drive unit TC.

Product description

g1 DeviceNet status LED g2 Device status LED g3 DeviceNet baudrate switch g4 DeviceNet address selection switch MSD g5 DeviceNet address selection switch LSD

Accessory

M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories. The use of a Y-connector enables double assignment of one connection.

PV.can

M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service purposes.

remote

High Density D-sub 26 pole female socket for the connection of a remote control.

DeviceNet

M12 plug (sealed micro) with screw coupling and LEDs for the connection of a DeviceNet bus system.

Casing socket on the rear side of the electronic drive unit for the connection to the turbopump.

1. "DC in" and "accessory" are already described in the operating instructions of the turbopump.

2. The connection "PV.can" serves to service purposes exclusively.

Connections diagram

4 Connections diagram

accessory A

DI Pumping station

n.c.

Accessory A2

24 VDC

Accessory A1

+ 24 VDC* out

DI1

DI Motor pump

DI Standby

DI2

AI+ 0-10 VDC

DO1

DO2

Contact load for accessories:

-200 mA max., each connection

-450 mA max., all connections in sum

All inputs and outputs in this area are galvanically seperated from +U

n.c.

Accessory B2

24 VDC

Accessory B1

accessory B

DI3

AI- GND

AO1 / 0-10 V

DI Error acknowledgement

DI Remote priority

Relay 1

Relay 2

remote

Potential free contacts

19 26

10 18

DO Remote priority active

Relay 2

Relay 3

RS485 D+

Drain

V+

V-

CAN_H

CAN_L

+ UB (+24 / +48 VDC ± 5 %)

DeviceNet

GND

DC in PV.can

RS485 D-

GND*

Fig. 2: Connections diagram and assignment of the TM 700 DN

5 Connection "remote"

1018

1926

Remote control options are provided via the 26-pole D-Sub connector with the designa-

tion ”remote“ on the electronic drive unit.

 Shielded connectors and cables must be used.

The following information display the factory setting. Configuration is possible using the Pfeiffer Vacuum parameter set.

5.1 Pin assignment

Pin Function Designation factory settings

1 +24 V DC output (V+) Reference voltage for all digital in- and outputs 2 DI1 Enable venting; open: no; V+: yes 3 DI Motor pump Drive motor; open: off; V+: on 4 DI Pumping station Open: off; V+: on and error acknowledgement 5 DI Standby Standby rotation speed; open: off; V+: on 6 DI2 Heating; open: off; V+: on 7 AI+ Rotation speed setting mode Set value in rotation speed setting mode;

8 DO1 Rotation speed switch point attained;

9 DO2 GND: error; V+: no error (I 10 DI3 Sealing gas; open: off; V+: on 11 AI- Rotation speed setting mode

GND

12 AO1 Actual rotation speed;

13 DI Error acknowledgement Error acknowledgement: V+ pulse (min 500 ms) 14 DI Remote priority Control via interface "remote"; open: off

15 Relais 1 Connection to Pin 16 if relay 1 is inactive 16 Relais 1 Rotation speed switchpoint attained;

17 Relais 1 Connection to Pin 16 if relay 1 is active 18 Relais 2 Connection to Pin 19 if relay 2 is inactive 19 Relais 2 No error; relay contact 2 (U 20 Relais 2 Connection to Pin 19 if relay 2 is active 21 Relais 3 Connection to Pin 22 if relay 3 is inactive 22 Relais 3 Warning; relay contact 3 (U 23 DO Remote priority GND: off; V+: remote priority active 24 RS-485 D+ according to specifications and Pfeiffer Vacuum protocol 25 RS-485 D- according to specifications and Pfeiffer Vacuum protocol 26 Ground (GND) Reference ground for all digital inputs and all outputs

Connection "remote"

2-10 V DC = 20-100% of the nominal rotation speed

GND:no; V+: yes (I

Set value in rotation speed setting mode; GND

0-10 V DC is equivalent to 0-100%; R

V+: set and priority over other digital inputs

relay contact 1 (U

= 50 mA/24 V)

max

= 50 V DC; I

max

= 50 mA/24 V)

max

= 50 V DC; I

max

= 50 V DC; I

max

> 10 kΩ

= 1 A)

max

= 1 A)

Connection "remote"

5.2 Operation via "remote" connection

Increased wear and damage due to incorrect operation

Active magnetic bearings require a constant power supply. The motor acts as a generator and supplies the drive electronics in the event of a power failure. Below a speed of approx. 6500 rpm, the kinetic energy of the rotor will no longer be sufficient to supply the magnetic bearings. The drive electronics will switch off completely. The rotor will run down audibly in the safety bearings.

 Do not switch off the pump by disconnecting the mains power supply.

CAUTION

+24 V DC* Output / Pin 1

Inputs 2 - 6 and the connections to Pins 10, 13, 14 are activated by connecting them with +24 V DC to Pin 1 (active high). They can also be activated via an external PLC. The functions are deactivated by "PLC high level" and by "PLC low level".

● PLC high level: +13 V to +33 V

● PLC low level: -33 V to +7 V

● Ri: 7 kΩ

● I

< 210 mA (with RS-485, if existing)

max

Inputs The digital inputs at connection "remote" are used to connect various functions of the

electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can be configured via interface RS-485 and the Pfeiffer Vacuum parameter set.

DI1 (Enable venting) / Pin 2

V+ : Venting is enabled (venting according to venting mode)

open: Venting locked (no venting is performed)

DI Motor pump / Pin 3

After Pin 4 (pumping station) is activated and the electronic drive unit successfully completes the self-test, the turbopump is placed into operation. During operation, the turbopump can be switched off and on again, while the pumping station remains switched on. The turbopump is not vented thereby.

V+ : Turbopump motor on

open: Turbopump motor off

DI Pumping station / Pin 4

Connected pumping station components (e.g. backing pump, venting valve, air cooling unit) are triggered and, with Pin 3 (motor) simultaneously activated, the turbopump is placed in operation. Any ongoing error messages are reset when their cause has been eliminated.

V+ : Malfunction acknowledgement and pumping station on

open: Pumping station off

DI Standby / Pin 5

In standby mode, the turbopump operates at a specified rotor speed < nominal rotation speed. Factory setting and recommended operation are 66.7 % of the nominal rotation speed.

V+ : Standby activated

open: Standby off, operation at nominal rotation speed

Connection "remote"

f(%)

100

210

U(V)

DI2 (Heating) / Pin 6

V+ : Heating on

open: Heating off

DI3 (Sealing gas) / Pin 10

V+ : Sealing gas valve open

open: Sealing gas valve closed

DI Error acknowledgement / Pin 13

V+ : Reset ongoing error messages when cause has been eliminated with a pulse of min. 500 ms duration.

open: Inactive

DI Remote priority / Pin 14

V+ : The connection "remote" has operation priority over all other digital inputs.

open: Remote priority inactive

AI Rotation speed setting mode / Pin 7 and Pin 11

The analog input at the TM 700 DN defines the set rotation speed of the turbopump. An input signal of 2 - 10 V between AI+ (Pin 7) and AI- (Pin 11) corresponds to a rotation speed within the range of 20 - 100% of the nominal rotation speed. If the input is open or signals fall below 2 V, the pump is accelerated up to nominal rotation speed.

Outputs The digital outputs at the connection "remote" can be loaded with a maximum of 24 V /

50 mA per output. All outputs listed below are configurable by the Pfeiffer Vacuum parameter set via interface RS-485 (description related to factory settings).

DO1 (Rotation speed switch point attained) / Pin 8

Active high after the rotation speed switch point is attained. Rotation speed switch point 1 is factory-set to 80% of the nominal rotation speed. It can, for example, be used for a "pump operational" message.

DO2 (No errors) / Pin 9

When the supply voltage has been established, digital output DO2 permanently outputs 24 V DC which means "no errors". Active low in case of error (collective error message).

DO Remote priority active / Pin 23

Active high: The connection "remote" takes priority over any other connected control panels (e.g. RS-485). With active low, the connection "remote" is ignored.

AO1 Analog output 0-10 V DC / Pin 12

A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x f picked up via the analog output (load R ≥ 10 kΩ). Additional functions (optionally current/ power) can be assigned to the analog output via DCU, HPU or PC.

Nominal

) can be

Connection "remote"

Relay contact s (invertible)

Relay 1 / Pin 15, Pin 16 and Pin 17

The contact between Pin 16 and Pin 15 is closed when the rotation speed switch point is underrun; relay 1 is inactive. The contact between Pin 16 and Pin 17 is closed when the rotation speed switch point is attained; relay 1 is active.

Relay 2 / Pin 18, Pin 19 and Pin 20

The contact between Pin 19 and Pin 18 is closed when a malfunction is present; relay 2 is inactive. The contact between Pin 19 and Pin 20 is closed when operation is malfunction free; relay 2 is active.

Relay 3 / Pin 21 and Pin 22

The contact between Pin 21 and Pin 22 is closed when no warning messages are active; relay 3 is inactive. The contact between Pin 21 and Pin 22 is open when a warning message is present; relay 3 is active.

RS-485 One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be

connected respectively to the electronic drive unit via Pin 24 and Pin 25 of the connec-

tion "remote" on the electronic drive unit.

CAUTION

Danger of electric shock

The insulation measures of the bus system are designed only for use with safety extralow voltage.

 Connect only suitable devices to the bus system.

● The group address of the electronic drive unit is 964.

● All units connected to the bus must have differing RS-485 device addresses [P:797].

 Establish the connections according to the specification of the interface RS-485.  Connect all units with RS-485 D+ and RS-485 D- to the bus.

Designation Value

Serial interface RS-485 Baud rate 9600 bauds Data word length 8 bits Parity none (no parity) Start bits 1 Stop bits 1..2

Connecting Pfeiffer Vacuum display and control units or PC

 The connection of respectively one external operating unit is possible on the interface

RS-485.

 A USB interface (PC) can be connected via the USB/RS-485-converter.

6 Connection "DeviceNet"

MSDPLSD

ADDRESS

6.1 Connections

The turbopump can be connected to a DeviceNet bus system using the connector (5 pin, sealed micro) labelled "DeviceNet" on the electronic drive unit. A supply voltage (V+, V-) is required to supply this connection in addition to the supply voltage for the electronic drive unit. The interface is galvanically safe and is isolated from the maximum supply voltage for the electronic drive unit.

Pin Assignment

1Drain 2 V+, 24 V DC referred to V3V4CAN_H 5CAN_L

 Perform DeviceNet wiring in accordance with the applicable specifications.  Supply the DeviceNet connection with voltage.

6.2 Configuring the connection

To start DeviceNet communication, the TM 700 DN must be configured using the enclosed EDS files.

Connection "DeviceNet"

 Select desired device address  Select desired baud rate  Fit rubber plugs at the address selector switches evenly and as deep as possible to

achieve the stated protection class.

Device address The DeviceNet device address is set manually using the "ADDRESS" selector switches

or via DeviceNet.

Position Meaning

00 to 63 Device address (decimal)

– MSD = multiples of 10 (0x-6x) – LSD = units (x0-x9)

P Address via DeviceNet

Setting the address manually

 Set the selector switches to the desired value.

– Once the setting has been made, the device accesses the bus using the new ad-

dress.

Setting the address via DeviceNet

 Switch off the pump/electronic drive unit  Set the selector switches to "P".

– When switched on, the system uses the last valid valid address ("63" upon deliv-

ery).

– The address is programmable via DeviceNet object 3.1.1. (see p. 16, chap. 6.5).

Connection "DeviceNet"

RATE

Baud rate The DeviceNet baud rate is set manually using the "RATE" selector switches or via De-

viceNet.

Position Meaning

1 125 kBit/s 2 250 kBit/s 5 500 kBit/s P Baud rate via DeviceNet

Setting the baud rate manually

 Set the selector switches to the desired value.

– The change takes effect the next time the system is switched on.

Setting the baud rate via DeviceNet

 Switch off the pump/electronic drive unit  Set the selector switches to "P".

– When switched on, the system uses the last valid baud rate (500 kBit/s upon deliv-

ery).

– The baud rate is programmable via DeviceNet object 3.1.2. (see p. 16, chap. 6.5).

6.3 Configuring the data exchange

Depending on the program used to set up DeviceNet communication, you can carry out the following steps:

 Import EDS file (see scope of delivery)

Device-specific data:

 Specify the format of the cyclical input/output data

– Specify the cyclically alternating process data using objects "Poll I/O input data

(4.0.100)" and "Poll I/O output data (4.0.101)"

– The format can be changed only if the poll I/O connection is inactive.

 Specify system behaviour following termination of the cyclical DeviceNet communica-

tion. – Use object "Idle Action (9.1.7)" to specify which action is to be carried out if there

is a failure of the cyclical exchange of process data (poll I/O connection).

 Specify the remote priority.

– Use object "Permission locked (101.0.17)" to specify whether the electronic drive

unit is to be controlled exclusively via DeviceNet or whether other interfaces (e.g. RS485) are also permitted.

– This does not restrict write access via other interfaces.

 Perform pump configuration.

– To set a configuration that differs from the delivery state, use the EDS file to adjust

individual objects (e.g. accessory configuration).

Master-specific data:

Explicit data exchange (explicit connection)

 Set up the device in the master scanlist.  Set the format of the cyclical input/output data

This connection can be used to access the individual DeviceNet objects (see p. 16, chap.

6.5). As a rule, this is done using a dedicated configuration program and the EDS file.

This is also used to specify which data is sent during the cyclical data exchange.

Connection "DeviceNet"

Cyclical data exchange (poll I/O connection)

For the cyclical data exchange, multiple DeviceNet objects are combined to form assemblies (4.x.3.). One assembly is selected for each direction (input/output data). The follow- ing assemblies are available for selection:

Input data (produced data, pump --> PLC)

1: pump status (default) 2: pump status, speed 100: pump status, speed, current 101: pump status, speed, current, temperature

Assembly ... Byte Denotation 12100101

0 0 0 0 (BYTE) Exception Status (48.1.12)

– Bit 0: Common alarm – Bit 1: Device-specific alarm – Bit 2: Manufacturer-specific alarm Details for Bit 0-2 s. Exception Detail Alarm (48.1.13)

– Bit 4: Common warning – Bit 5: Device-specific warning – Bit 6: Manufacturer-specific warning Details for Bit 4-6 s. Exception Detail Warning (48.1.14)

1 1 1 1 (BYTE) Speed Status (42.1.39)

– Bit 0: Pump is on, rotation speed > 0 – Bit 1: Motor is off – Bit 2: Standby rotation speed attained – Bit 4: Stopped – Bit 5: Accelerates – Bit 6: Set rotation speed attained – Bit 7: Decelerates

2 2 2 2 (BOOL) Pump On Status (8.1.3)

– 0: Pump is off – 1: Pump is on, rotation speed > 0

- 3-4 3-4 3-4 (INT) Pump Speed (42.1.7) – Actual rotation speed in rpm/4 (e.g. value 15000 equates to 60000 rpm)

- - 5-6 5-6 (INT) IMC Current (42.1.102) – Intermediate circuit current in 100 mA (e.g. value 42 equates to 4.2 A)

- - - 7-8 (INT) Bearing Temperature (49.3.6) – Bearing temperature in °C/10 (e.g. value 210 equates to 21.0 °C)

- - - 9-10 (INT) Pump Temperature (49.101.6) – Bottom part temperature in °C/10 (e.g. value 210 equates to 21.0 °C)

Output data (consumed data, PLC --> pump)

5: pump control (default) 6: pump/speed control 7: pump/speed control, set speed 103: pump/speed control, set speed, vent valve cfg.

Assembly ... Byte Denotation 567103

0 0 0 0 (BOOL) Pump On (9.1.3)

– 0: Pumping station off – 1: Pumping station on

- 1 1 1 (BYTE) Speed Control (42.1.38)

– Bit 0: Pumping station on – Bit 1: Motor off – Bit 2: Standby on

- - 2-3 2-3 (INT) Speed Target (42.1.8)

– Set rotation speed in rpm/4 (e.g. value 15000 writing for 60000 rpm)

- - - 4-5 (WORD) Vent Valve Configuration (7.1.4)

– 0: No venting – 1: Direct venting – 2: Delayed venting

Connection "DeviceNet"

6.4 LED operation

NET

Status Meaning Action

Off Device not on bus  Supply operating voltage

Green flashing On bus, no master allocated  Create connection with master Green illuminated On bus, master allocated Red flashing Connection to master expired  Test connection to master Red illuminated Bus error or duplicate device address

MOD

Status Meaning Action

Off No voltage supply  Supply operating voltage Green illuminated Device ready for operation Red flashing Device error  Resolve error

6.5 DeviceNet objects

allocated

 Wait for address test (approx. 2 s)

 Check bus  Check device address  Check baud rate

Identity

Message Router

DeviceNet

Path Name Data type Service Comment

1.0.1 Revision UINT get

1.0.2 Max Instance UINT get

1.0.3 Number of Instances UINT get

Instance 1

1.1.0 (Instance) USINT res, gaa

1.1.1 Vendor ID UINT get 527 (Pfeiffer Vacuum)

1.1.2 Device Type UINT get 33 (Turbomolecular Vacuum

Pump Device)

1.1.3 Product Code UINT get 5377

1.1.4 Revision STRUCT of get

Major Revision USINT Minor Revision USINT

1.1.5 Status WORD get

1.1.6 Serial Number UDINT get

1.1.7 Product Name SHORT_STRING get TM 700 DN

1.1.100 Status Code SHORT_STRING get

This object provides no attributes and services.

Path Name Data type Service Comment

3.0.1 Revision UINT get

Instance 1

3.1.0 (Instance) all, re

3.1.1 MAC ID USINT get, (set) set only at switch setting "P"

3.1.2 Baud Rate USINT get, (set) set only at switch setting "P"

3.1.5 Allocation Information STRUCT of get

Allocation Choice Byte BYTE Master’s MAC ID USINT

3.1.6 MAC ID Switch Changed BOOL get

3.1.7 Baud Rate Switch Changed BOOL get

3.1.8 MAC ID Switch Value USINT get

3.1.9 Baud rate Switch Value USINT get

Assembly

Connection "DeviceNet"

Path Name Data type Service Comment

4.0.1 Revision UINT get

4.0.3 Number of Instances UINT get

4.0.100 Poll I/O Input Data USINT get, (set) Assembly instance for input data

(pump->master) of Poll I/O connection, set only if connection not active

4.0.101 Poll I/O Output Data USINT get, (set) Assembly instance for output data

(master->pump) of Poll I/O connection, set only if connection not active

Instance 1 (default input): pump status

4.1.3 Data ARRAY of get

Exception Status BYTE 48.1.12 Speed Status BYTE 42.1.39 Pump on Status BYTE 8.1.3

Instance 2 (input): pump status, speed

4.2.3 Data ARRAY of get

Exception Status BYTE 48.1.12 Speed Status BYTE 42.1.39 Pump on Status BYTE 8.1.3 Pump Speed 2 x BYTE (INT) 42.1.7

Instance 5 (default output): pump control

4.5.3 Data ARRAY of get, set

Pump On BYTE 9.1.3

Instance 6 (output): pump control

4.6.3 Data ARRAY of get, set

Pump on BYTE 9.1.3 Speed control BYTE 42.1.38

Instance 7 (output): pump/speed control, set speed

4.7.3 Data ARRAY of get, set

Pump On BYTE 9.1.3 Speed Control BYTE 42.1.38 Speed Target 2 x BYTE (INT) 42.1.8

Instance 100 (input): pump status, speed, current

4.100.3 Data ARRAY of get

Exception Status BYTE 48.1.12 Speed Status BYTE 42.1.39 Pump on Status BYTE 8.1.3 Pump Speed 2 x BYTE (INT) 42.1.7 IMC Current 2 x BYTE (INT) 42.1.102

Instance 101 (input): pump status , speed, current, temperatures

4.101.3 Data ARRAY of get

Exception Status BYTE 48.1.12 Speed Status BYTE 42.1.39 Pump on Status BYTE 8.1.3 Pump Speed 2 x BYTE (INT) 42.1.7 IMC Current 2 x BYTE (INT) 42.1.102 Bearing Temperature 2 x BYTE (INT) 49.3.6 Pump Temperature 2 x BYTE (INT) 49.101.6

Instance 103 (output): pump/speed control, set speed, vent valve cfg

4.103.3 Data ARRAY of get, set

Pump On BYTE 9.1.3 Speed Control BYTE 42.1.38 Speed Target BYTE 42.1.8 Vent Valve Cfg. (1) BYTE 7.1.4 (1)

Connection "DeviceNet"

Connection

Instance 103 (output): pump/speed control, set speed, vent valve cfg

Vent Valve Cfg. (2) BYTE 7.1.4 (2)

Path Name Data type Service Comment

5.0.1 Revision UINT get

Instance 1: Explicit connection

5.1.1 State USINT get

5.1.2 Instance Type USINT get

5.1.3 Transport Class Trigger BYTE get

5.1.4 DeviceNet Produced

Connection ID

5.1.5 DeviceNet Consumed

Connection ID

5.1.6 DeviceNet Initial Comm

Characteristics

5.1.7 Produce Connection

Size

5.1.8 Consumed Connection

Size

5.1.9 Expected Package Rate UINT get, set

5.1.12 Watchdog Timeout Ac-

tion

5.1.13 Produced Connection

Path Length

5.1.14 Produced Connection

Path

5.1.15 Consumed Connection

Path Length

5.1.16 Consumed Connection

Path

5.1.17 Production Inhibit Time Packed EPATH get

5.1.18 Connection Timeout

Multiplier

UINT get

BYTE get

UINT get

UINT get, set

USINT get

UINT get

Packed EPATH get

UINT get

USINT get

Instance 2: Poll I/O connection

5.2.1 State USINT get

5.2.2 Instance Type USINT get

5.2.3 Transport Class Trigger BYTE get

5.2.4 DeviceNet Produced

Connection ID

5.2.5 DeviceNet Consumed

Connection ID

5.2.6 DeviceNet Initial Comm

Characteristics

5.2.7 Produce Connection

Size

5.2.8 Consumed Connection

Size

5.2.9 Expected Package Rate UINT get, set

5.2.12 Watchdog Timeout Ac-

tion

5.2.13 Produced Connection

Path Length

5.2.14 Produced Connection

Path

5.2.15 Consumed Connection

Path Length

5.2.16 Consumed Connection

Path

5.2.17 Production Inhibit Time Packed EPATH get, set

5.2.18 Connection Timeout

Multiplier

UINT get

BYTE get

UINT get

USINT get

UINT get

Packed EPATH get

UINT get

USINT get

Discrete Input Point

Connection "DeviceNet"

Path Name Data type Service Comment

7.0.1 Revision UINT get

7.0.2 Max Instance UINT get

7.0.3 Number of Instances UINT get

Instance 1

7.1.1 Bad Flag BOOL get 0

7.1.2 Direction BOOL get 1

7.1.3 Size UINT get 16

7.1.4 Data ARRAY of get, set

BITS – 0: No venting

– 1: Direct venting – 2: Delayed venting

BITS 0

7.1.100 Venting Frequency USINT get, set 40-98 %

7.3.101 Venting Time UINT get, set 6-3600 s

Path Name Data type Service Comment

8.0.1 Revision UINT get

8.0.2 Max Instance UINT get

8.0.3 Number of Instances UINT get

Discrete Output Point

Instance 1

8.1.3 Value BOOL get – 0: Pump off

– 1: Pump on and f > 0

8.1.7 Off-On Cycles UDINT get

Path Name Data type Service Comment

9.0.1 Revision UINT get

9.0.2 Max Instance UINT get

9.0.3 Number of Instances UINT get

Instance 1: Pump On/Off

9.1.3 Value BOOL get, set – 0: Pumping station off

– 1: Pumping station on

9.1.5 Fault Action BOOL get, set – 0: Pumping station off

– 1: Hold last state

9.1.6 Fault Action BOOL get, set 0

9.1.7 Idle Action BOOL get, set – 0: Pumping station off

– 1: Hold last state

9.1.8 Idle Action BOOL get, set 0

Instance 2: TMS/Heating

9.2.3 Value BOOL get, set – 0: TMS/Heating off

– 1: TMS/Heating released

9.2.5 Fault Action BOOL get, set – 0: TMS/Heating off

– 1: Hold last state

9.2.6 Fault Action BOOL get, set 0

9.2.7 Idle Action BOOL get, set – 0: TMS/Heating off

– 1: Hold last state

9.2.8 Idle Action BOOL get, set 0

Instance 3: Sealing gas

9.3.3 Value BOOL get, set – 0: Sealing gas off

– 1: Sealing gas on

9.3.5 Fault Action BOOL get, set – 0: Sealing gas off

– 1: Hold last state

9.3.6 Fault Action BOOL get, set 0

9.3.7 Idle Action BOOL get, set – 0: Sealing gas off

– 1: Hold last state

9.3.8 Idle Action BOOL get, set 0

Connection "DeviceNet"

AC/DC Drive

Instance 100: Brake

9.100.3 Value BOOL get, set – 0: Brake off

– 1: Brake released

9.100.5 Fault Action BOOL get, set – 0: Brake off

– 1: Hold last state

9.100.6 Fault Action BOOL get, set 0

9.100.7 Idle Action BOOL get, set – 0: Brake off

– 1: Hold last state

9.100.8 Idle Action BOOL get, set 0

Path Name Data type Service Comment

42.0.1 Revision UINT get

42.0.2 Max Instance UINT get

42.0.3 Number of Instances UINT get

Instance 1

42.1.3 At Reference BOOL get – 0: Set rotation speed not attained

– 1: Set rotation speed attained

42.1.4 Net Ref BOOL get 1

42.1.6 Drive Mode USINT get, set 2

42.1.7 Speed Actual INT get Current rotation speed (rpm/2

Scale

) e.g. 15000 read => 60000 rpm

42.1.8 Speed Ref INT get, set Set rotation speed (rpm/2

speed

speed Scale

e.g. 7500 write for 30000 rpm

42.1.15 Power Actual INT get Current power (W)

42.1.16 Input Voltage INT get Input voltage (V/2

voltage Scale

) e.g. 192

read => 24 V

42.1.18 Accel Time UINT get, set Run-up time (ms/2

time Scale

) e.g. 2813

read => 6 min

42.1.22 Speed Scale SINT get, set -2

42.1.27 Voltage Scale SINT get, set 3

42.1.28 Time Scale SINT get, set -7

42.1.38 Speed Control BYTE get, set – Bit 0: Pumping station on

– Bit 1: Motor off – Bit 2: Standby on

42.1.39 Speed Status BYTE get – Bit 0: Pump on and f > 0

– Bit 1: Motor is off – Bit 2: Standby rotation speed at-

tained – Bit 4: stopped – Bit 5: accelerates – Bit 6: Set rotation speed attained – Bit 7: decelerates

42.1.41 Max Rated Speed INT get Nominal rotation speed (rpm/2

Speed Scale

)

Max Rated

42.1.42 Max Rated Speed Scale SINT get, set -2

42.1.43 Speed Standby INT get, set Standby rotation speed (rpm/2

Scale

)

Speed

42.1.46 Drive On Hours DINT get Operating hours drive (h)

42.1.100 Gas Mode USINT get, set – 0: Heavy gases – 1: light gases – 2: Helium

42.1.101 Max Power USINT get, set %

42.1.102 IMC Current INT get Intermediate circuit current (100 mA) e.g. 123 read => 12.3 A

42.1.103 Max Rated Speed Con-

firmation

INT get, set Nominal rotation speed (rpm/2

Speed Scale

)

Max Rated

42.1.104 Imbalance INT get Rotor imbalance in %

42.1.105 Bearing Wear INT get Safety bearing stress in %

)

S-Device Supervisor

Connection "DeviceNet"

Path Name Data type Service Comment

48.0.1 Revision UINT get

48.0.2 Max Instance UINT get

48.0.3 Number of Instances UINT get

Instance 1

48.1.0 (Instance) res, sta,

48.1.3 Device Type SHORT_STRING get

48.1.4 SEMI Standard Revi-

sion Level

48.1.5 Manufacturer’s Name SHORT_STRING get

48.1.6 Manufacturer’s Model

Number

48.1.7 Software Revision Level SHORT_STRING get

48.1.8 Hardware Revision Lev-elSHORT_STRING get

SHORT_STRING get

abo, rec, per

48.1.11 Device Status USINT get – 1: Self Testing

48.1.12 Exception Status BYTE get (see p. 14, chap. 6.3)

48.1.13 Exception Detail Alarm STRUCT of get

Common Exception Detail Size

Common Exception Detail 0

Common Exception Detail 1

Device Exception Detail USINT 2 Device Exception 0 BYTE see below Device Exception 1 BYTE see below Manufacturer Excep-

tion Detail Size Manufacturer Excep-

tion Detail 0 Manufacturer Excep-

tion Detail 1

48.1.14 Exception Detail Warn-

ing Common Exception De-

tail Size Common Exception De-

tail 0 Common Exception De-

tail 1 Device Exception Detail USINT 2 Device Exception 0 BYTE see below Device Exception 1 BYTE see below Manufacturer Excep-

tion Detail Size Manufacturer Excep-

tion Detail 0 Manufacturer Excep-

tion Detail 1

48.1.15 Alarm Enable BOOL get, set

48.1.16 Warning Enable BOOL get, set

48.1.23 Run Hours UDINT get Pump operating hours (h)

USINT 2

BYTE see below

USINT 2

BYTE see below

STRUCT of get

USINT 2

BYTE see below

USINT 2

BYTE see below

– 2: Idle – 3: Self-Test Exception – 4: Executing – 5: Abort – 6: Critical Fault

For Exception Detail Alarm and Exception Detail Warning applies:

Connection "DeviceNet"

S-Analog Sensor

Bit Common Ex. Detail 0 Common Ex. Detail 1 Device Ex. Detail 0 Device Ex. Detail 1

0 internal diagnostic Excess supply Drive unit Motor excess tempera-

ture

1 Microcontroller reserved TMS Pump excess temper-

ature

2 EPROM Output voltage supply Voltage supply Bearing excess tem-

perature

3 EEPROM Input voltage supply Excess rotation speed Electronic drive unit

excess temperature 4 RAM Maintenance Overload Connection 5 reserved Contact manufacturer Run-up time Bearing 6 internal real time Reset Run-up time Interlock 7 reserved reserved Vibration reserved

Manufacturer Exception Detail equates to the current message for alarm respective warning in the data type UINT.

Path Name Data type Service Comment

49.0.1 Revision UINT get

49.0.2 Max Instance UINT get

49.0.3 Number of Instances UINT get

Instance 1: Motor temperature

49.1.5 Reading Valid BOOL get 0: invalid, 1: valid

49.1.6 Value INT get Motor temperature (°C/10)

49.1.7 Status BYTE get see below

Interfaces

Instance 3: Bearing temperature

49.3.5 Reading Valid BOOL get 0: invalid, 1: valid

49.3.6 Value INT get Bearing temperature (°C/10)

49.3.7 Status BYTE get see below

Instance 4: Electronic temperature

49.4.5 Reading Valid BOOL get 0: invalid, 1: valid

49.4.6 Value INT get Electronic temperature (°C/10)

49.4.7 Status BYTE get see below

Instance 100: Power stage temperature

49.100.5 Reading Valid BOOL get 0: invalid, 1: valid

49.100.6 Value INT get Power stage temp. (°C/10)

49.100.7 Status BYTE get see below

Instance 101: Bottom part temperature

49.101.5 Reading Valid BOOL get 0: invalid, 1: valid

49.101.6 Value INT get Bottom part temperature (°C/10)

49.101.7 Status BYTE get see below

For all "Status" (49.x.7) applies:

Bit Meaning

0 Excess temperature (alarm) 2 High temperature (warning)

Path Name Data Type Service Comment

101.0.1 Revision UINT get

101.0.2 Max Instance UINT get

101.0.3 Number of Instances UINT get

101.0.16 Current Permission BYTE get, set

101.0.17 Permission Locked BOOL get, set – 0: other interfaces approved to

operation

– 1: operation exclusively via De-

viceNet

Connection "DeviceNet"

Instance 2: RS485

101.2.19 Address USINT get, set 1-255: RS485 address

Instance 4: Remote

101.4.17 Configuration USINT get, set {0;4} (see p. 30, chap. 7.3)

Instance 6: DI1

101.6.17 Configuration USINT get, set 0-5(see p. 30, chap. 7.3)

Instance 7: DI2

101.7.17 Configuration USINT get, set 0-5(see p. 30, chap. 7.3)

Instance 8: DI3

101.8.17 Configuration USINT get, set 0-5(see p. 30, chap. 7.3)

Instance 9: AI

101.9.17 Configuration USINT get, set 0-1 (see p. 30, chap. 7.3)

Instance 10: DO1

101.10.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)

Instance 11: DO2

101.11.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)

Instance 12: AO1

101.12.17 Configuration USINT get, set 0-5 (see p. 30, chap. 7.3)

Process Components

Instance 13: Relay 1

101.13.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)

Instance 14: Relay 2

101.14.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)

Instance 15: Relay 3

101.15.17 Configuration USINT get, set 0-15 (see p. 30, chap. 7.3)

Instance 16: Accessory A1

101.16.17 Configuration USINT get, set 0-10(see p. 30, chap. 7.3)

Instance 17: Accessory B1

101.17.17 Configuration USINT get, set 0-10(see p. 30, chap. 7.3)

Instance 18: Accessory A2

101.18.17 Configuration USINT get, set 0-10(see p. 30, chap. 7.3)

Instance 19: Accessory B2

101.19.17 Configuration USINT get, set 0-10(see p. 30, chap. 7.3)

Path Name Data type Service Comment

102.0.1 Revision UINT get

102.0.2 Max Instance UINT get

102.0.3 Number of Instances UINT get

Instance 1: Backing pump

102.1.17 Configuration USINT get, set 0-2 (see p. 31, chap. 7.4)

102.1.21 Switch-Off Threshold UINT get, set 0-1000 W

102.1.22 Switch-On Threshold UINT get, set 0-1000 W

Instance 7: Rotation speed switch point

102.7.17 Configuration USINT get, set 0-1 (see p. 31, chap. 7.4)

102.7.18 Status BOOL get – 0: Rotation speed switch point

102.7.21 Switchpoint 1 UINT get, set 50-97 % (see p. 31, chap. 7.4)

102.7.22 Switchpoint 2 UINT get, set 5-97 % (see p. 31, chap. 7.4)

not attained

– 1: Rotation speed switch point

attained

Connection "DeviceNet"

Data types

Services

Data type Byte Description Example

BOOL 1 Binary value (0/1) 00h: 0, 01h:1 BYTE 1 8 single bits 00h, FFh DINT 4 signed integer 12345678h: 89h, 56h, 34h, 12h INT 2 signed integer 1234h: 34h, 12h Packed EPATH 6 1.2.3: 20h, 01h, 24h, 02h, 30h, 03h SHORT_STRIN

G SINT 1 signed integer -42: D6h UINT 2 unsigned integer 2468h: 68h, 24h UDINT 4 unsigned integer 10203040h: 40h, 30h, 20h, 10h USINT 1 unsigned integer 101: 65h WORD 2 16 single bits 55AAh: AAh, 55h

character string with antecedent length byte

"Bilbo": 05h, 42h, 69h, 6Ch, 62h, 6Fh

Service DeviceNet-Service Code

abo abort 4Bh all allocate_master/slave_connection_set 4Bh gaa get_attributes_all 01h get get_attribute_single 0Eh per perform_diagnostics 4Eh rec recover 4Ch rel release_master/slave_connection_set 4Ch res reset 05h set set_attribute_single 10h sta start 06h

The Pfeiffer Vacuum parameter set

7 The Pfeiffer Vacuum parameter set

7.1 General

All function-relevant variables of a turbopump are anchored in the electronic drive unit as parameters. Each parameter has a three-digit number and a designation. Parameters can be used via Pfeiffer Vacuum display and control units or via RS-485 with the Pfeiffer Vacuum protocol.

NOTE

Additional parameters in the control unit

For the control of connected external components (e.g. vacuum measurement devices) there are additional parameters fixed in the respective Pfeiffer Vacuum display and control unit.

 Please consider the respective operating instructions.

Conventions Parameters are displayed in square brackets as a three-digit number in bold font. The

designation may also be stated if necessary.

Example: [P:312] Software version

7.2 Parameter overview

Annotation

# Three figure number of the parameter Display Notification of the parameter in a Pfeiffer Vacuum display and control unit Designation Short description of the parameter Functions Functional description of the parameter Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum pro-

Access method R: read access; W: write access Unit Physical unit of the described characteristic min / max permissible limits for value input default factory settings (partially specific of the pump type)

 Parameter can be stored non volatile in the electronic drive unit and may be re-

Operation with DCU

Parameter set and Pfeiffer Vacuum display and control unit

Pfeiffer Vacuum display and control units DCU show the basic parameter set by default. Furthermore the DCU contains parameters, which are not positioned in the electronic drive unit.

 Parameter [P:794] = 1 (Display of all available parameters).

tocol

used after resetting of the mains supply.

NOTE

# Display Designation Functions

340 Pressure Active pressure value 7 R mbar 1E-101E3

350 Ctr Name Type of display and control unit 4 R 351 Ctr Software Software of display and control unit 4 R 738 Gaugetype Type of pressure gauge 4 RW 794 Param set Parameterset 0 = basic parameter set

1 = extended parameter set

795 Servicelin Insert service line 7 RW 795

Unit min max default 

Data type

Access

7RW 0 1 0

The Pfeiffer Vacuum parameter set

Control commands

# Display Designation Functions

001 Heating Heating 0 = off

1 = on

002 Standby Standby 0 = off

1 = on

004 RUTimeCtrl Run-up time control 0 = off

1 = on 009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1 010 PumpgStatn Pumping station 0 = off

1 = on and error acknowledgement 012 EnableVent Enable venting 0 = no

1 = yes 013 Brake Brake 0 = off

1 = on 017 CfgSpdSwPt Configuration rotation speed switch point 0 = Rotation speed switch point 1

1 = Rotation speed switch point 1&2 019 Cfg DO2 Configuration output DO2 0 = Rot. speed switch point attained

1 = No error

2 = Error

3 = Warning

4 = Error and/or warning

5 = Set speed attained

6 = Pump on

7 = Pump accelerates

8 = Pump decelerates

9 = always 0

10 = always 1

11 = Remote priority active

12 = Heating

13 = Backing pump

14 = Sealing gas

15 = Pumping station

16 = Pump rotates

17 = Pump does not rotate 023 MotorPump Motor pump 0 = off

1 = on 024 Cfg DO1 Configuration output DO1 0 = Rot. speed switch point attained

1 = No error

2 = Error

3 = Warning

4 = Error and/or warning

5 = Set speed attained

6 = Pump on

7 = Pump accelerates

8 = Pump decelerates

9 = always 0

10 = always 1

11 = Remote priority active

12 = Heating

13 = Backing pump

14 = Sealing gas

15 = Pumping station

16 = Pump rotates

17 = Pump does not rotate 025 OpMode BKP Operation mode backing pump 0 = Continous operating

1 = Intermittend mode

2 = Delayed switch-on 026 SpdSetMode Rotation speed setting mode 0 = off

1 = on 027 GasMode Gas mode 0 = Heavy gases

1 = Light gases

2 = Helium 028 Cfg Remote Configuration remote 0 = Standard

4 = Relais inverted 030 VentMode Venting mode 0 = Delayed venting

1 = No venting

2 = Direct venting 035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)

1 = Venting valve, normally closed

2 = Heating

3 = Backing pump

4 = Fan (temperature controlled)

5 = Sealing gas

6 = always 0

7 = always 1

8 = Power failure venting unit

Unit min max default 

Data type

Access

0RW 0 1 0 x

0RW 0 1 1 x

0RW 0 1 0 x

0RW 0 1 1 x

7RW 0 1 0 x

7RW 0 17 1 x

0RW 0 1 1 x

7RW 0 17 0 x

7RW 0 2 0 x

7RW 0 1 0 x

7RW 0 2 0 x

7RW 0 4 0 x

7RW 0 2 2 x

7RW 0 8 0 x

The Pfeiffer Vacuum parameter set

# Display Designation Functions

036 Cfg Acc B1 Configuration accessory connection B1 0 = Fan (continous operation)

1 = Venting valve, normally closed

2 = Heating

3 = Backing pump

4 = Fan (temperature controlled)

5 = Sealing gas

6 = always 0

7 = always 1

8 = Power failure venting unit 037 Cfg Acc A2 Configuration accessory connection A2 0 = Fan (continous operation)

1 = Venting valve, normally closed

2 = Heating

3 = Backing pump

4 = Fan (temperature controlled)

5 = Sealing gas

6 = always 0

7 = always 1

8 = Power failure venting unit 038 Cfg Acc B2 Configuration accessory connection B2 0 = Fan (continous operation)

1 = Venting valve, normally closed

2 = Heating

3 = Backing pump

4 = Fan (temperature controlled)

5 = Sealing gas

6 = always 0

7 = always 1

8 = Power failure venting unit 045 Cfg Rel R1 Configuration Relay 1 0 = Rot. speed switch point attained

1 = No error

2 = Error

3 = Warning

4 = Error and/or warning

5 = Set speed attained

6 = Pump on

7 = Pump accelerates

8 = Pump decelerates

9 = always 0

10 = always 1

11 = Remote priority active

12 = Heating

13 = Backing pump

14 = Sealing gas

15 = Pumping station

16 = Pump rotates

17 = Pump does not rotate 046 Cfg Rel R2 Configuration Relay 2 0 = Rot. speed switch point attained

1 = No error

2 = Error

3 = Warning

4 = Error and/or warning

5 = Set speed attained

6 = Pump on

7 = Pump accelerates

8 = Pump decelerates

9 = always 0

10 = always 1

11 = Remote priority active

12 = Heating

13 = Backing pump

14 = Sealing gas

15 = Pumping station

16 = Pump rotates

17 = Pump does not rotate

Unit min max default 

Data type

Access

7RW 0 8 1 x

7RW 0 8 3 x

7RW 0 8 2 x

7RW 0 17 0 x

7RW 0 17 1 x

The Pfeiffer Vacuum parameter set

# Display Designation Functions

047 Cfg Rel R3 Configuration Relay 3 0 = Rot. speed switch point attained

1 = No error

2 = Error

3 = Warning

4 = Error and/or warning

5 = Set speed attained

6 = Pump on

7 = Pump accelerates

8 = Pump decelerates

9 = always 0

10 = always 1

11 = Remote priority active

12 = Heating

13 = Backing pump

14 = Sealing gas

15 = Pumping station

16 = Pump rotates

17 = Pump does not rotate 050 SealingGas Sealing gas 0 = off

1 = on 055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed

1 = Power

2 = Current

3 = always 0 V

4 = always 10 V

5 = follows AI1 057 Cfg AI1 Configuration input AI1 0 = Disconnected

1 = Set value rot. speed setting mode 060 CtrlViaInt Control via interface 1 = Remote

2 = RS-485

4 = PV.can

8 = Field bus

16 = E74

255 = Unlock interface selection 061 IntSelLckd Interface selection locked 0 = off

1 = on 062 Cfg DI1 Configuration input DI1 0 = Deactivated

1 = Enable venting

2 = Heating

3 = Sealing gas

4 = Run-up time control

5 = Rotation speed setting mode

Setting ≠[P:063/064]

063 Cfg DI2 Configuration input DI2 0 = Deactivated

1 = Enable venting

2 = Heating

3 = Sealing gas

4 = Run-up time control

5 = Rotation speed setting mode

Setting ≠[P:062/064]

064 Cfg DI3 Konfiguration input DI3 0 = Deactivated

1 = Enable venting

2 = Heating

3 = Sealing gas

4 = Run-up time control

5 = Rotation speed setting mode

Setting ≠[P:062/063]

Unit min max default 

Data type

Access

7RW 0 17 3 x

0RW 0 1 0 x

7RW 0 5 0 x

7RW 0 1 0 x

7 RW 1 255 2 x

0RW 0 1 0 x

7RW 0 5 1 x

7RW 0 5 2 x

7RW 0 5 3 x

Status requests

# Display Designation Functions

300 RemotePrio Remote priority 0 = no

1 = yes

302 SpdSwPtAtt Rotation speed switch point attained 0 = no

1 = yes 303 Error code Error code 4R 304 OvTempElec Excess temperature electronic drive unit 0 = no

1 = yes 305 OvTempPump Excess temperature pump 0 = no

1 = yes 306 SetSpdAtt Set rotation speed attained 0 = no

1 = yes

Data type

0R 0 1

Unit min max default 

Access

The Pfeiffer Vacuum parameter set

# Display Designation Functions

307 PumpAccel Pump accelerates 0 = no

1 = yes 308 SetRotSpd Set rotation speed (Hz) 1 R Hz 0 999999 309 ActualSpd Active rotation speed (Hz) 1 R Hz 0 999999 310 DrvCurrent Drive current 2 R A 0 9999.99 311 OpHrsPump Operating hours pump 1 R h 0 65535 x 312 Fw version Firmware version electronic drive unit 4 R 313 DrvVoltage Drive voltage 2 R V 0 9999.99 314 OpHrsElec Operating hours electronic drive unit 1 R h 0 65535 x 315 Nominal Spd Nominal rotation speed (Hz) 1 R Hz 0 999999 316 DrvPower Drive power 1 R W 0 999999 319 PumpCylces Pump cycles 1 R 0 65535 x 324 TempPwrStg Temperature power stage 1 R °C 0 999999 326 TempElec Temperature electronic 1 R °C 0 999999 329 BearngWear Wear conditions safety bearings 1 R % 0 150 330 TempPmpBot Temperature pump bottom part 1 R °C 0 999999 336 AccelDecel Acceleration / Deceleration 1 R rpm/s 0 999999 342 TempBearng Temperature bearing 1 R °C 0 999999 346 TempMotor Temperature motor 1 R °C 0 999999 349 ElecName Name of electronic drive unit 4 R 354 HW Version Hardware version electronic drive unit 4 R 358 RotorImbal Rotor out-of-balance 1 R % 0 150 360 ErrHist1 Error code history, pos. 1 4 R x 361 ErrHist2 Error code history, pos. 2 4 R x 362 ErrHist3 Error code history, pos. 3 4 R x 363 ErrHist4 Error code history, pos. 4 4 R x 364 ErrHist5 Error code history, pos. 5 4 R x 365 ErrHist6 Error code history, pos. 6 4 R x 366 ErrHist7 Error code history, pos. 7 4 R x 367 ErrHist8 Error code history, pos. 8 4 R x 368 ErrHist9 Error code history, pos. 9 4 R x 369 ErrHist10 Error code history, pos. 10 4 R x 397 SetRotSpd Set rotation speed (rpm) 1 R rpm 0 999999 398 ActualSpd Actual rotation speed (rpm) 1 R rpm 0 999999 399 NominalSpd Nominal rotation speed (rpm) 1 R rpm 0 999999

Unit min max default 

Data type

Access

0R 0 1

Set value settings

# Display Designation Functions

700 RUTimeSVal Set value run-up time 1 RW min 1 120 8 x 701 SpdSwPt1 Rotation speed switch point 1 1 RW % 50 97 80 x 707 SpdSVal Set value in rot. speed setting mode 2 RW % 20 100 65 x 708 PwrSVal Set value power consumption 7 RW % 10 100

710 Swoff BKP Switching off threshold backing pump in intermit-

711 SwOn BKP Switching on threshold backing pump in intermit-

717 StdbySVal Set value rotation speed at standby 2 RW % 20 100 66.7 x 719 SpdSwPt2 Rotation speed switch point 2 1 RW % 5 97 20 x 720 VentSpd Venting rot. speed at delayed venting 7 RW % 40 98 50 x 721 VentTime Venting time at delayed venting 1 RW s 6 3600 3600 x 777 NomSpdConf Nominal rotation speed confirmation 1 RW Hz 0 1500 0 x 797 RS485Adr RS-485 device address 1 RW 1 255 1 x

tend mode

1. depending on the pump type

Unit min max default 

Data type

Access

method

1 RW W 0 1000 0 x

100

The Pfeiffer Vacuum parameter set

7.3 Configuring the connections

The electronic drive unit is pre-configured in the factory. Thereby the turbopump is immediately operational with the necessary functions. The connections of the electronic drive unit can be configured to suit individual requirements using the parameter set.

Accessory connection

Digital inputs on "remote"

 Configuration via parameters [P:035], [P:036], [P:037] or [P:038].

Option Description

0 = Fan (continous operation) Control via parameter Pumping station 1 = Venting valve, normally closed Control via parameter Enable venting, when using a venting

valve which is normally closed.

2 = Heating Control via parameters Heating and Rotation speed switch-

pont attained

3 = Backing pump Control via parameters Pumping station and operation

mode backing pump

4 = Fan (temperature controlled) Control via parameter Pumping station and temperature

thresholds 5 = Sealing gas Control via parameters Pumping station and Sealing gas 6 = always 0 GND for the control of an external device 7 = always 1 +24 V DC for the control of an external device 8 = Power failure venting unit Control via parameter Enable venting, when using a power

failure venting unit. 9 = TMS heating unit* TMS switching box control 10 = TMS cooling unit* TMS control of cooling water supply

* Only when using pumps with Temperature Management System TMS

 Configuration via parameters [P:062], [P:063] or [P:064].

Option Description

0 = deactivated Connection deactivated 1 = Enable venting Control is equal to parameter [P:012] 2 = Heating Control is equal to parameter [P:001] 3 = Sealing gas Control is equal to parameter [P:050] 4 = Run-up time control Control is equal to parameter [P:004] 5 = Rotation speed setting mode Control is equal to parameter [P:026]

Digital outputs and relays on "remote"

 Configuration via parameters [P:019] and [P:024], respectively [P:045], [P:046],

[P:047] and [P:028].

● In the description "active" means:

– For all digital outputs: V+ active high

– For all relays: Contact switch-over according to configuration of [P:028]

Option Description

0 = Rotation speed switchpoint attained active, if switchpoint attained 1 = No error active, if failure-free operation 2 = Error active, if error message is active 3 = Warning active, if warning message is active 4 = Error and / or warning active, if error and / or warning is active 5 = Set rotation speed attained active, if set rotation speed is attained 6 = Pump on active, if Pumping station and Motor is on; No Error 7 = Pump accelerates active, if Pumping station is on;

Actual rotation speed < Set rotation speed

8 = Pump decelerates active, if Pumping station is on;

Actual rotation speed > Set rotation speed Pumping station is off;

Rotation speed > 3 Hz 9 = always 0 GND for the control of an external device 10 = always 1 +24 V DC for the control of an external device 11 = Remote priority active active, if Remote priority is active

The Pfeiffer Vacuum parameter set

Option Description

12 = Heating Control is equal to parameter [P:001] 13 = Backing pump Control is equal to parameter [P:010] and [P:025] 14 = Sealing gas Control is equal to parameter [P:050] 15 = Pumping station Control is equal to parameter [P:010] 16 = Pump rotates active, if rotation speed > 1 Hz 17 = Pump does not rotate active, if rotation speed < 2 Hz 18 = TMS engaged* active, if TMS set temperature is engaged

* Only when using pumps with Temperature Management System TMS

Analog output on

 Configuration via parameter [P:055].

"remote"

Option Description

0 = Rotation speed Rotation speed signal; 0 - 10 V DC = 0 - 100 % x f 1 = Power Power signal; 0 - 10 V DC = 0 - 100 % x P 2 = Current Current signal; 0 - 10 V DC = 0 - 100 % x I 3 = always 0 V always GND 4 = always 10 V output of continously 10 V DC 5 = follows AI1 follows the analogue input 1

Analog input on

 Configuration via parameter [P:057].

"remote"

Option Description

0 = Switched off Connection is deactivated 1 = Set value in rotation speed setting

mode

Rotation speed setting mode via pin 7 (0 - 10 V) and pin 11 (GND)

Control via interface  Configuration via parameters [P:060] and [P:061].

Option [P:060] Description

1 = remote Operation via connection "remote" 2 = RS-485 Operation via connection "RS-485"

4 = PV.can For service purposes only 8 = Field bus Operation via field bus

16 = E74 Operation via connection "E74"

Nominal

max

Option [P:061] Description

0 = off Interface selection via [P:060] 1 = on Interface selection locked

7.4 Operation with the Pfeiffer Vacuum parameter set

Factory settings The electronic drive unit is pre-programmed in the factory. This guarantees proper, reli-

able turbopump operation without the need for additional configuration.

Checking the adjustments

Gas type dependent operations

 Before operating with parameters, check set values and control commands for their

suitability for the pumping process.

 Remove the remote plug from electronic drive unit if required.

Friction causes the rotor to heat up severely under gas load and high rotation speed. To avoid overheating, the electronic drive unit has implemented power-rotation speed-characteristics, whereby the pump can be operated at every rotation speed with the maximum allowable gas load without danger of damage. The maximum power consumption depends on the gas type. Three characteristics are available in order to completely exhaust the pump's capacity for each gas type.

The Pfeiffer Vacuum parameter set

[P:708]

max

Run-up

Rotation speed

Power

C-D = gas mode "0" A-B = gas mode "1" E-F = gas mode "2"

Danger of the pump being destroyed

Pumping of gases with a higher molecular mass in the wrong gas mode can lead to destruction of the pump.

 Ensure the gas mode is correctly set.  Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).

● Gas mode "0" for gases with the molecular mass >39, e.g. Ar.

● Gas mode "1" for gases with the molecular mass ≤ 39.

● Gas mode "2" for helium.

● Power characteristics according to the technical data of the turbopump.

 Check and set-up the gas mode via [P:027].

CAUTION

Fig. 3: Principle of power characteristics lines for gas type dependent operations,

e.g. gas mode = 0

The turbopump runs up with maximum power consumption. When the nominal and/or set rotation speed is reached, the pump automatically switches over to the chosen power characteristic of the selected gas mode. Increasing gas load is initially compensated by a rise in power consumption in order to keep the rotation speed constant. Increasing gas friction, however, causes the turbopump to heat up more severely. When the gastypedependent maximum power is exceeded, the rotation speed of the turbopump is reduced until an equilibrium between permissible power and gas friction is attained.

 To avoid rotation speed fluctuations, Pfeiffer Vacuum recommends setting a some-

what lower frequency in rotation speed setting mode.

Set value power consumption

 Adjust the parameter [P:708] to the desired value in %.

If adjusting the set value power consumption below 100 % the run-up time prolongs. To

avoid error messages, the parameter [P:700] RUTimeSVal should be adjusted accord-

ingly.

Run-up time The run-up of the turbopump is time-monitored ex factory. There are various causes of

prolonged run-up times, e.g.:

● Too high gas loads

● Leakage in the system

● The set value run-up time is too low

 Eliminate any external and application-related causes.  Adjust the run-up time via parameter [P:700].

The Pfeiffer Vacuum parameter set

Adjusting the rotation speed switchpoint

The rotation speed switch point can be used for the message "Pump operational for the process". Overrunning or underrunning the active rotation speed switch point activates or deactivates a signal at the pre-configured output on the electronic drive unit and at

the status parameter [P:302].

Rotation speed switchpoint 1

 Adjust the parameter [P:701] to the desired value in %.  Parameter [P:017] = 0

Signal output and status parameter [P:302] are based on the set value for rotation speed switch point 1 [P:701].

(%)

[P:017] = 0

[P:701]

[P:010]

[P:302]

Fig. 4: Example for the configuration rotation speed switch point 1 active

Process

Rotation speed switchpoint 1 & 2

 Adjust the parameter [P:701] to the desired value in %.  Adjust the parameter [P:719] to the desired value in %.  Parameter [P:017] = 1

When the pumping station [P:010] is switched on, the rotation speed switch point 1 is the

signal generator. When the pumping station is switched off, signal output and status query are based on the rotation speed switch point 2. The signal output is governed by the hysteresis between the two switch points.

(%)

[P:017] = 1

[P:701] [P:719]

[P:010]

[P:302]

Fig. 5: Example for the configuration rotation speed switch point 1+2 active; [P:701] > [P:719]

Process

The Pfeiffer Vacuum parameter set

Rotation speed setting mode

(%)

[P:017] = 1

[P:719] [P:701]

[P:010]

[P:302]

Fig. 6: Example for the configuration rotation speed switch points 1+2 active; [P:701] < [P:719]

Process

The rotation speed setting mode reduces the rotation speed and hence the throughput of the turbopump. The pumping speed of the turbopump changes proportional to rotation speed. Standby mode is ineffective during rotation speed setting mode. The set rotation

speed is adjusted by the set value in rotation speed setting mode [P:707]. The rotation

speed switch point varies with the set rotation speed. Underrunning or overrunning the set value in rotation speed setting mode activates and deactivates the status signal

[P:306] SetSpdAtt respectively.

 Adjust the parameter [P:707] to the desired value in %.  Parameter [P:026] = 1  Read the parameters [P:308]/[P:397].

Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process and pro-

duction stops. When standby mode is active, the electronic drive unit reduces the rotation speed of the turbopump. Standby mode is ineffective during rotation speed setting mode. The factory setting for the set value in standby mode is 66.7 % of the nominal rotation speed. Underrunning or overrunning the set speed in standby mode activates or deacti-

vates the status signal [P:306] SetSpdAtt.

 Adjust the parameter [P:717] to the desired value in %.  Parameter [P:026] = 0  Parameter [P:002] = 1  Read the parameters [P:308]/[P:397].

Rotation speed set value

The typical nominal rotation speed of a turbopump is factory-set in the electronic drive unit. If the electronic drive unit is replaced or a different pump type is used, the reference set value of the nominal rotation speed must be confirmed. This procedure is part of a redundant safety system for avoiding excess rotation speeds.

HiPace Nominal rotation speed confirmation [P:777]

300 1000 Hz 400 / 700 / 800 820 Hz

 Adjust the parameter [P:777] according to the pump type.

Once the nominal rotation speed is attained, the pump will run idle unless additional gas loads are entered. Depending on process or application requirements, the nominal rotation speed can be reduced in rotation speed setting mode or standby mode.

The Pfeiffer Vacuum parameter set

Operation mode backing pump

Operation of a connected backing pump via the electronic drive unit depends on the backing pump type.

Operation mode [P:025] recommended backing pump

"0" continous operation all kinds of backing pumps "1" Intermittend operation diaphragm pumps only "2" Delayed switching on all kinds of backing pumps

 Adjust the parameter [P:025] to the desired value.

Continous operation

With "pumping station on", the electronic drive unit sends a signal to the configured accessory connection to switch on the backing pump. This signal can also be used for controlling a fore-vacuum safety valve.

Intermittend operation (diaphragm pumps only)

Intermittend operation can extend the life expectancy of the membrane of a connected diaphragm pump. Either a diaphragm pump with built-in semiconductor relay or an interconnected relay box with semiconductor relay is required for intermittend operation. The backing pump is switched on and off in dependence of the turbopump's power consumption. A relation to the supplied fore-vacuum pressure is derived from the power consumption. The switching off and switching on thresholds for the backing pump are adjustable. Fluctuations in the power consumption of idling turbopumps and type-dependent varying fore-vacuum pressures of the backing pumps require the switching thresholds to be set separately for the intermittend mode.

Pfeiffer Vacuum recommends the intermittend mode between 5 and 10 mbar. A pressure gauge and a dosing valve are required to set the switching thresholds.

 Switch on the vacuum system via the function "pumping station" and await the run-up.  Generate a fore-vacuum pressure of 10 mbar by gas inlet via dosing valve.  Read and note the parameter [P:316].  Adjust the switch on threshold backing pump via parameter [P:711] to the determined

drive power for a fore-vacuum pressure of 10 mbar.

 Reduce the fore-vacuum pressure to 5 mbar.  Read and note the parameter [P:316].  Adjust the switch off threshold backing pump via parameter [P:710] to the determined

drive power for a fore-vacuum pressure of 5 mbar.

Electrical brake The turbopump is equipped with an electric brake. It supports rapid deceleration of the

rotor until standstill.

 Recommendation: To reduce rotor slow-down time, always shut down turbopumps

with magnetic bearings using the electric brake.

 Parameter [P:013] = 1

Operation with accessories

Depending on the configuration, various accessories can be connected to the turbopump and controlled via parameter of the electronic drive unit.

Heating

 Switch on or off the heating via parameter [P:001].

The activation of a connected casing heating depends on rotation speed switch point 1 (factory setting: 80 % x f

Nominal

Fan

Two options in the connection configuration enable continuous or temperature controlled

operation of a connected air cooling unit (see p. 30, chap. 7.3). Threshold values are

type-specific and are anchored in the electronic drive unit.

The Pfeiffer Vacuum parameter set

Sealing gas valve

 Switch on or off a sealing gas valve which is connected to a pre-configured output via

parameter [P:050].

Vent modes The turbopump can be vented only after the function "pumping station" has been

switched off. Signals are sent to configured outputs with a fixed delay of 6 s. There are three options for operation with a venting valve connected.

 Enable venting via parameter [P:012].  Select the venting mode via parameter [P:030].

Delayed venting

Start and venting time after "pumping station off" are configurable and depend on the rotation speed of the turbopump.

 Parameter [P:030] = 0  Adjust the venting rotation speed in % of the nominal rotation speed via parameter

[P:720].

 Adjust the venting time in s via parameter [P:721].

If the venting rotation speed is underrun, the venting valve will open for the set venting time. In the event of a power failure, venting will occur if the set venting rotation speed is underrun. In this case, the venting period depends on the residual energy delivered by the moving rotor. When power is restored, the venting process is interrupted.

No venting

No venting is performed during this operation mode.

 Parameter [P:030] = 1

Direct venting

Start and venting time are not configurable. Venting starts with a delay of 6 s after "pumping station off". When the function "pumping station" is switched on renewed, the venting valve closes automatically. In the event of a power failure, venting will occur if an anchored type-specific rotation speed is underrun. When power is restored, the venting process is interrupted.

 Parameter [P:030] = 2

Safety bearing stress The level of stress on the safety bearings is linked to the severity of the disruptive influ-

ences on the running rotor. The stress on the safety bearings is expressed as a percentage of the maximum possible stress due to the drive electronics and can be viewed via the RS-485 interface using the Pfeiffer Vacuum display and control unit or PC.

 Display the current safety bearing stress in % via parameter [P:329].

● Display of a correspondent warning message at 75 % total stress.

● Display of a correspondent error message at 100 % total stress.

– Operation of the pump is no longer possible. – Please contact Pfeiffer Vacuum Service.

Balance The magnetic bearing sensorics permanently monitor the current rotor balance. The bal-

ance is expressed as a percentage of the maximum possible rotor imbalance due to the drive electronics and can be viewed via the RS-485 interface using the Pfeiffer Vacuum display and control unit or PC.

 Display the current rotor balance in % via parameter [P:329].

● Display of a correspondent warning message at 75 % of the admissible unbalance.

● Display of a correspondent error message at 100 % of the admissible unbalance.

– Operation of the pump is no longer possible. – Please contact Pfeiffer Vacuum Service.

The Pfeiffer Vacuum parameter set

Monitoring the thermal load

If threshold values are overrun, output signals from temperature sensors allow the pump to be brought to a safe condition. Depending on pump type, temperature threshold values for warnings and error messages are saved fixed in the electronic drive unit . For information purposes, various status queries are prepared in the parameter set.

7.5 Switching on/off the pump

Switching on The function "pumping station" comprises turbopump operation with control of all con-

nected accessories (e.g. backing pump).

 Switch on the supply voltage with switch S1 on the power supply.  Parameter [P:023] = 1  Parameter [P:010] = 1

Ongoing (and removed) error messages are reset. After a successfully completed selftest, the electronic drive unit sets the turbopump motor and all connected accessories into operation depending on their configuration.

When the pumping station is activated, the motor of the turbopump can be switched off

and on via the function [P:023].

Switching off  Parameter [P:010] = 0

The electronic drive unit switches off the turbopump and activates preset accessory options (e.g. venting, backing pump).

 Wait for the complete standstill of the pump.  Cut off the supply voltage with switch S1 on the power supply.

Pfeiffer Vacuum Protocol for "RS-485"

8 Pfeiffer Vacuum Protocol for "RS-485"

8.1 Telegram frame

The telegram frame of the Pfeiffer Vacuum protocol contains only ASCII code characters [32; 127], the exception being the end character of the message  (e.g. a PC) sends a telegram, which is answered by a slave  (e.g. electronic drive unit or transmitter).

a2 a1 a0 * 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0

a2 - a0 Unit address for slave 

– Individual address of the unit ["001";"255"] – Group address "9xx" for all identical units (no response) – global address "000" for all units on the bus (no response)

* Action (see p. 38, chap. 8.2)

n2 - n0 Pfeiffer Vacuum parameter numbers l1 - l0 Data length dn ... d0

dn - d0 Data in data type concerned (see p. 39, chap. 8.3)

c2 - c0 Checksum (sum of ASCII values of cells a2 to d0) modulo 256 C

carriage return (ASCII 13)

. Basically, a master

8.2 Telegrams

Data request ?

a2 a1 a0 0 0 n2 n1 n0 0 2 = ? c2 c1 c0

Control command !

a2 a1 a0 1 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0

Data response / control command understood 

a2 a1 a0 1 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0

Error message 

a2 a1 a0 1 0 n2 n1 n0 0 6 N O _ D E F c2 c1 c0

"NO_DEF" The parameter n2 - n0 does not exist "_RANGE" Data dn - d0 are outside the permitted range "_LOGIC" Logic access violation

Example 1 Data request

Actual rotation speed (parameter [P:309], device address slave: "123")

? 1230030902=?112

ASCII 49 50 51 48 48 51 48 57 48 50 61 63 49 49 50 13

_RANGE

_LOGI C

Data request: 633 Hz Actual rotation speed (parameter [P:309], device address slave: "123")

 1231030906000633037

ASCII 49 50 51 49 48 51 48 57 48 54 48 48 48 54 51 51 48 51 55 13

Example 2 Control command

Switch on pumping station (parameter [P:010], device address slave: "042")

! 0421001006111111020

ASCII 4852504948484948485449494949494948504813

Control command understood Switch on pumping station (parameter [P:010], device address slave: "042")

! 0421001006111111020

ASCII 4852504948484948485449494949494948504813

8.3 Applied data types

Data type Description Size l1 - l0 Exampl e

0 False / true 06 000000 / 111111 1 Positive integer number 06 000000 to 999999 2 Positive fixed comma number 06 001571 equal to 15,71 4 Symbol chain 06 TC_400 7 Positive integer number 03 000 to 999 11 Symbol chain 16 BrezelBier&Wurst

Pfeiffer Vacuum Protocol for "RS-485"

Malfunctions

9 Malfunctions

9.1 General

Turbopump and electronic drive unit malfunctions always result in a warning or error message. In both cases, the electronic drive unit outputs an error code. Operating messages are generally displayed via the LEDs on the electronic drive unit. If an error occurs, the turbopump and connected devices will be switched off. The selected venting mode will be triggered after the preset delay.

Automatic start-up after power failure or malfunction acknowledgement

The function "pumping station" of the electronic drive unit remains active after power failure or errors that lead to shut down the pump or the system. The turbopump runs up automatically after power ist restoresd or malfunction acknowledgement.

 Switch off the function "pumping station" if necessary.  Provide safety measures against interference in the high vacuum flange while the tur-

bopump is running.

9.2 Operating mode display via LED

LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump. A differentiated malfunction and warning display is possible only for operation with DCU or HPU.

WARNING

LED Symbol Steady OFF Flashing

(1/12 s active)

Green insufficient

power supply

Yellow no warning Warning

Red no malfunction Malfunction

Pumping station "OFF" Rotation speed ≤ 1Hz

Blinking (1/2 s active)

Pumping station "OFF" Rotation speed > 1 Hz

Steady ON

Pumping station "ON"

9.3 Error codes

Error code

Err001 Excess rotation speed  Contact Pfeiffer Vacuum Service

Err002 Overvoltage – Wrong mains pack used  Check type of mains pack

Err006 Run-up time error – Run-up time too short

Err008 Connection electronic drive unit - pump

Err010 Internal device fault  Contact Pfeiffer Vacuum Service

Err021 Electronic drive unit does not recognize

Err041 Excess current motor  Contact Pfeiffer Vacuum Service Err043 Internal configuration fault  Contact Pfeiffer Vacuum Service Err044 Excess temperature electronic – Cooling deficient  Optimize cooling

Err045 Excess temperature motor – Cooling deficient  Optimize cooling

Problem Possible cause Remedy

 Reset at rotation speed f = 0 only

 Check mains pack voltage  Adjust run-up time to process

 Check the vacuum chamber for leaks or

closed valves

 Adjust rotation speed switch point

 Reset at rotation speed f = 0 only

 Reset at rotation speed f = 0 only  Contact Pfeiffer Vacuum Service

 Reset at rotation speed f = 0 only

 Check the ambient conditions

faulty

pump

– Gas flow in the vacuum chamber

caused by leakage or open valves

– Rotation speed switchpoint is underrun

after run-up time is expired

– Connection to the pump is faulty  Check the connection

Malfunctions

Error

Problem Possible cause Remedy

code

Err046 Internal initialization fault  Contact Pfeiffer Vacuum Service Err073 Overload axial bearing  Contact Pfeiffer Vacuum Service Err074 Overload radial bearing  Contact Pfeiffer Vacuum Service Err089 Rotor out of target area, stabilization im-

possible

Err091 Internal device fault  Contact Pfeiffer Vacuum Service Err092 Unknown connection panel  Contact Pfeiffer Vacuum Service Err093 Temperature analysis motor faulty  Contact Pfeiffer Vacuum Service Err094 Temperature analysis electronic faulty  Contact Pfeiffer Vacuum Service Err098 Internal communication fault  Contact Pfeiffer Vacuum Service Err107 Collective fault power stage  Contact Pfeiffer Vacuum Service

Err108 Rotation speed measurement faulty  Contact Pfeiffer Vacuum Service

Err109 Firmware not confirmed  Contact Pfeiffer Vacuum Service Err114 Temperature analysis power stage faulty  Contact Pfeiffer Vacuum Service Err117 Excess temperature pump bottom part – Cooling deficient  Optimize cooling

Err118 Excess temperature power stage – Cooling deficient  Optimize cooling

Err119 Excess temperature bearing – Cooling deficient  Optimize cooling

Err777 Nominal rotation speed not confirmed – Nominal rotation speed not confirmed

Err800 Excess current position sensors  Contact Pfeiffer Vacuum Service Err802 Calibration of position sensors faulty  New calibration by mains "ON/OFF"

Err810 Data set missing in the pump  Contact Pfeiffer Vacuum Service Err815 Excess current magnetic bearing output

stage

Err890 Safety bearing stress > 100 %  Contact Pfeiffer Vacuum Service Err891 Rotor unbalance > 100 %  Contact Pfeiffer Vacuum Service Wrn007 Low voltage / mains power failure – Mains failure  Check mains supply Wrn018 Remote priority conflict – Pumping station is switched on via

Wrn045 High temperature motor – Cooling deficient  Optimize cooling

Wrn076 High temperature electronic – Cooling deficient  Optimize cooling

Wrn089 Rotor out of target area, stabilization

was possible

Wrn097 Pump information invalid – Pump data faulty  Reset for default values Wrn098 Pump information incomplete – Connection to the pump is faulty  Contact Pfeiffer Vacuum Service Wrn100 Rotation speed raised to minimum value – Permissible adjustments for the rotation

Wrn115 Temperature analysis pump bottm part

faulty

Wrn116 Temperature analysis bearing faulty  Contact Pfeiffer Vacuum Service Wrn117 High temperature pump bottom part – Cooling deficient  Optimize cooling

Wrn118 High temperature power stage – Cooling deficient  Optimize cooling

Wrn119 High temperature bearing – Cooling deficient  Optimize cooling

Wrn168 High deceleration – Rate of pressure rise too high; Venting

Wrn801 Brake electronics defective  Contact Pfeiffer Vacuum Service Wrn806 Brake resistor defective  Contact Pfeiffer Vacuum Service Wrn807 Calibration position sensors required – Recommended by status evaluation  Automatic calibration at rotation speed f=0 Wrn890 Safety bearing stress > 75 %  Contact Pfeiffer Vacuum Service Wrn891 Rotor unbalance > 75 %  Contact Pfeiffer Vacuum Service

– Crushes and vibrations  Check the ambient conditions

 Reset at rotation speed f = 0 only

 Check the ambient conditions

after replacement of the electronic drive unit

[P:010], whereas the E74-input "start/ stop" is off (opened)

– Crushes and vibrations  Check the ambient conditions

speed setting mode or standby are incorrect

rate to high

 Confirm the nominal rotation speed via

[P:777]

 Reset at rotation speed f = 0 only

 Contact Pfeiffer Vacuum Service

 Switch on the pumping station via E74 

Switch off [P:010]

 Check the ambient conditions

 Check [P:707] or [P:717]  Find the valid rotation speed range in the

technical data of the turbopump

 Contact Pfeiffer Vacuum Service

 Check the ambient conditions

 Check the ambient conditions  Check and optimize the venting rate (pump

specific)

Declaration of conformity

according to the EC directive:

● Electromagnetic Compatibility 2004/108/EC

● Low Voltage 2006/95/EEC

We hereby certify, that the product specified below is in accordance with the provision

of EU Electromagnetic Compatibility Directive 2004/108/EEC and EU Low Voltage Di- rective 2006/95/EEC.

TM 700 DN

Guidelines, harmonised standards and national standards and specifications which have been applied:

Signatures:

(M.Bender) Managing Director

DIN EN 61000-3-2 : 2008

DIN EN 61000-3-3 : 2006

DIN EN 61010-1 : 2002

DIN EN 61326-1 : 2006

DIN EN 62061 : 2005

Semi F47-0200

Semi S2-0706

(Dr. M. Wiemer) Managing Director

Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany

CE/2011

Leading. Dependable. Customer Friendly

Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide. For German engineering art, competent advice and reliable services.

Ever since the invention of the turbopump, we´ve been setting standards in our industry. And this claim to leadership will continue to drive us in the future.

You are looking for a perfect vacuum solution? Please contact us:

Germany

Pfeiffer Vacuum GmbH Headquarters Tel.: +49 (0) 6441 802-0 info@pfeiffer-vacuum.de

Benelux

Pfeiffer Vacuum GmbH Sales & Service Benelux Tel.: +800-pfeiffer benelux@pfeiffer-vacuum.de

China

Pfeiffer Vacuum (Shanghai) Co., Ltd. Tel.: +86 21 3393 3940 info@pfeiffer-vacuum.cn

France

Pfeiffer Vacuum France SAS Tel.: +33 169 30 92 82 info@pfeiffer-vacuum.fr

Great Britain

Pfeiffer Vacuum Ltd. Tel.: +44 1908 500600 sales@pfeiffer-vacuum.co.uk

India

Pfeiffer Vacuum India Ltd. Tel.: +91 40 2775 0014 pfeiffer@vsnl.net

Italy

Pfeiffer Vacuum Italia S.p.A. Tel.: +39 02 93 99 05 1 contact@pfeiffer-vacuum.it

Korea

Pfeiffer Vacuum Korea Ltd. Tel.: +82 31 266 0741 sales@pfeiffer-vacuum.co.kr

Austria

Pfeiffer Vacuum Austria GmbH Tel.: +43 1 894 17 04 office@pfeiffer-vacuum.at

Sweden

Pfeiffer Vacuum Scandinavia AB Tel.: +46 8 590 748 10 sales@pfeiffer-vacuum.se

Switzerland

Pfeiffer Vacuum (Schweiz) AG Tel.: +41 44 444 22 55 info@pfeiffer-vacuum.ch

United States

Pfeiffer Vacuum Inc. Tel.: +1 603 578 6500 contact@pfeiffer-vacuum.com

www.pfeiffer-vacuum.com

Pfeiffer Vacuum TM 700 DN Operating Instructions Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

1 About this manual

1.1 Validity

1.2 Conventions

2 Safety

2.1 Safety precautions

2.2 Proper use

2.3 Improper use

3 Product description

3.1 Product identification

3.2 Range of application

3.3 Function

3.4 General connection description

4 Connections diagram

5 Connection "remote"

5.1 Pin assignment

5.2 Operation via "remote" connection

6 Connection "DeviceNet"

6.1 Connections

6.2 Configuring the connection

6.3 Configuring the data exchange

6.4 LED operation

6.5 DeviceNet objects

7 The Pfeiffer Vacuum parameter set

7.1 General

7.2 Parameter overview

7.3 Configuring the connections

7.4 Operation with the Pfeiffer Vacuum parameter set

7.5 Switching on/off the pump

8 Pfeiffer Vacuum Protocol for "RS-485"

8.1 Telegram frame

8.2 Telegrams

8.3 Applied data types

9 Malfunctions

9.1 General

9.2 Operating mode display via LED

9.3 Error codes

Declaration of conformity