Pfeiffer Vacuum TCP 5000 Operating Instructions Manual

Electronic Drive Unit

TCP 5000

PM 800 134 BE (9902)

Operating Instructions

2

1. Safety Instructions.................................. 3

2. Understanding The TCP 5000 ................. 4

2.1. For Your Orientation........................................................... 4

2.2. Product Description........................................................... 4

Monitoring Electronics ..................................................... 4

Signal Outputs .................................................................... 4

Connection Options ........................................................... 4

STAND-BY Functions ........................................................ 4

Remote Control................................................................... 4

Proper Use .......................................................................... 5

Improper Use...................................................................... 5

2.3. Description Of The Front Panel........................................ 5

2.4. Description Of The Rear Panel ........................................ 5

3. Installation............................................... 6

3.1. Preparations For Installation............................................ 6

3.2. Fitting The Unit In A Rack ................................................. 6

3.3. Mains Power Connection................................................. 6

3.4. Connections Schematic.................................................... 6

3.5. Connecting The Pump....................................................... 7

3.6. Connecting The Pumping Station Control Unit

(Option) ................................................................................ 7

3.7. Connecting The Potential-Free Contacts....................... 8

3.8. Adjusting The Monitoring Electronics

For Exceptional Applications ........................................... 8

3.9. Operating The Electronic Drive Unit TCP 5000

With Accessories............................................................... 9

4. Operations................................................ 9

4.1. Switching ON The Electronic Drive Unit........................ 9

Switching ON Via The Pumping Station Control Unit

TCS 130 ................................................................................ 9

4.2. Starting The Turbopump................................................... 9

4.3. Operations At Nominal Rotation Speed ......................... 9

4.4. Stand-By Operations......................................................... 9

4.7. Switching OFF..................................................................... 9

4.6. Operations With The Pumping Station Control Unit

TCS 130 ................................................................................ 9

5. What To Do In Case Of Breakdowns? . 10

6. Maintenance, Service .......................... 11

7. Technical Data....................................... 11

7.1. Data List............................................................................. 11

7.2. Dimensions Diagram ....................................................... 11

8. Connections Diagram ........................... 12

9. Accessories ........................................... 13

Manufacturer´s Declaration ...........Last page

Index

Page

Page

Danger of damage to the unit or system.

Danger of an electric shock from touching the

contacts.

1. Safety Instructions

☞ Read and follow all the instructions in this manual.
☞ Inform yourself regarding:

– Hazards which can be caused by the unit,
– Hazards which can arise in your system,

☞ Comply with all safety and accident prevention

regulations.

☞ Check regularly that all safety requirements are being

complied with.

☞ Take account of the ambient conditions when installing the

TCP 5000. The protection type is IP20.
The unit is protected against the ingress of foreign bodies
³ ø 12 mm. Because water protection is not provided the
unit must be fitted into a suitable housing (please see
Section 3. Installation).

☞ Disconnect the plug connector on the TCP or pump only

after the mains plug has been disconnected and the pump
is at rest.

☞ When connecting the plug make sure that all mechanical

locking devices are in place.

☞ After connecting the mains cable check for safe PE

connection to the housing.

☞ Do not open the housing cover when the unit is connected

to the mains nor during pumping operation.

☞ Do not carry out any unauthorised conversions or modifi-

cations on the unit.

☞ When returning the unit to us please note the shipping

instructions (please see Section 6).

Danger of personal injury.

3

Pictogram-Definitions

Modifications reserved.

4

2.1. For Your Orientation

Symbols Used

The following symbols are used throughout in the
illustrations:

High vacuum flange
Fore-vacuum flange

Venting connection
Cooling water connection

Electric connection
Air cooling

Position Numbers

Identical pump and accessory parts have the same position
numbers in all illustrations.

Operating Instruction I The Text

➡ Here, you have to do something.

2.2. Product Description

The Electronic Drive Unit TCP 5000 serves to drive and moni­tor PFEIFFER turbomolecular pumps.

The unit complies with the “Safety Ordinance For Electrical
Appliances” and has been tested in accordance with the
requirements of the Standard EN 61010.

The electronic drive unit contains the following functional
features:
– Switching power pack
– Motor drive
– Monitoring and process control

Monitoring Electronics

Monitoring electronics, controlling the two relays K1 and K2,
are integrated in the TCP 5000.

K1 and K2 control the pumping station and system
components. The switching contacts are potential-free.

The pumping station components can be interlocked via
relays K1 and K2 where the Pumping Station Control Unit TCS
130 is in operation (please see Wiring Diagram PM 021 801­S).

Relay K1 - switching contact “rotation speed switchpoint”

– The contact closes when the set rotation speed is attained

and signalises “pump at rotation speed”. The factory set­ting is 80% of the nominal rotation speed.

– The contact can be used, for example, to control the pump

heating unit.

– Adjustment as in Section 3.8.

V

H

Relay K2 - switching contact “operations”

Plug pins b4 and b5 on X4.

– Relay K2 is controlled via locking relay K3. After switching

on the mains voltage relay K2 switches if K3 is set.

– Adjustment as in Section 3.8.

Relay K3 - locking relay

During normal operations relay K3 is closed and opens in the
event of a malfunction.
A malfunction is:
– Non-attainment of 80% of the nominal rotation speed wit-

hin the start-up time.

– A reduction of the nominal rotation speed to below 80%

after the start-up time has elapsed.

– An interruption of the operating fluid monitoring for more

than 20 seconds after 50% of the final rotation speed has
been attained.

– Excess rotation speed of more than 5%.

Once a malfunction has been corrected K3 must be re-set via
the pressure key RESET (S3).

Connection Options For:

– Remote control (TCI 001)
– Pumping Station Control Unit TCS 130 with connection

options for the backing pump, fore-vacuum safety valve,
heating, high vacuum valve, cooling water monitor and
venting valve.

– Potential-free contacts K1 “rotation speed switchpoint”

and K2 “operations” for external control.

Stand-By Function

– The turbopump can be operated optionally at 66% (stand-

by) or at the nominal rotation speed.

– The function “stand-by” is switched with key S9 on the

front panel. When stand-by has been switched on, control
lamp 3 illuminates (V5).

– The stand-by function is lost if there is a power failure or

switching off. When the pump is switched on again, the
pump operates at its nominal rotation speed.

– When the pumping station is switched off and power failu-

re the switched status “stand-by” is maintained.

– If stand-by is switched off via pressure key S9 or S10 (see

below), the pump accelerates to its nominal rotation speed
and the start-up phase begins again. Rotation speed moni­toring proceeds as in switching on.

Remote Control Stand-By

– Switch S10 between pins 1 and 15 on plug X9 (not included

in the delivery) is used for remote control purposes.

– If stand-by is switched via the remote control, key S9 on

the front panel has no function.

2. Understanding The TCP 5000

5

1 Control lamp, lubricant
2 Control lamp, power supply
3 Control lamp, stand-by
4 Switch S9 (stand-by)
5 Switch S3 (reset)

2.4 Description Of The Rear Panel

X4 Connector plug, mains
X5 Connector plug, pump
X9 Connection Remote Control Monitor TCI 001 (remote

control)
S8 Voltage selector switch 220-240V
F9 Mains fuse

8 Ventilator grill

2.3 Description Of The Front Panel

Proper Use:

– The Electronic Drive Unit TCP 5000 may only be used to dri-

ve and monitor PFEIFFER turbomolecular pumps.

– The operations unit TCP- turbopump may only be operated

together with a backing pump.

– Pumping Station Control Unit TCS 130 is necessary for con-

trolling the backing pump and fore-vacuum safety valve.

– Instructions concerning installation, start-up, operating

and maintenance must be observed.

– The unit with the article number PM 041 560-U may only be

fitted in ion implantation systems of the company Varian in
accordance with their instructions.

– All other uses require the prior agreement of PFEIFFER

VACUUM.

Improper Use:

Improper is:
– Uses not covered above, and, in particular,

- Connection to pumps and units which is not permitted in
their operating instructions.

- Connection to units which contain touchable and voltage
carrying parts.

Improper use will cause any rights regarding liability and gua­rantees to be forfeited.

8 8 3 4 9 10 5

2

6 1 7

X4 S8 F9 X9 8 X5

6 Rotation speed display
7 Operating hours counter
8 Ventilator
9 Fuse F16/1A

10 Fuse F10/2A

6

3.1. Preparations For Installation

Unauthorised modifications or alterations to the

electronic drive unit are not allowed.
The unit must be fitted in a housing taking
account of the ambient conditions (see Section
7, “Technical Data”).

The unit has been constructed in accordance with protection
type IP20.

For the reliable operating of a pumping station we recom­mend the use of a PFEIFFER Pumping Station Control Unit TCS

130. This includes switching and control elements for the res­pective pumping station components. Wiring should be
carried out in accordance with the Circuit Diagram
PM 021 801-S (please see Section 8).

Where the unit is to be fitted into a rack the plugs must be
connected to the unit in such a way that they can only be dis­connected using the appropriate tools.

➡ Disconnect mains power before installation work.

3.2. Fitting The Unit Into A Rack

The electronic drive unit has been designed to permit fitting in
as rack. The following should be taken account of when
fitting:

– The ambient temperature in the rack casing should not

exceed 40°C.

3.3. Mains Power Connection

– Mains connection must be made in accordance with the

local regulations.

Danger of an electrical shock resulting from

incorrect connections.

➡ Connect the mains cable to X4 and connect the unit to

single phase alternating current 220V/240V, 50/60Hz.

➡ Set the voltage selector switch S8 to the correct value.

Operating a TCP 5000 without pumping station control unit:

➡ For direct connection to the mains voltage (without control

unit TCS) bridge X4/a1 - b1, X4/a2 - b2.

➡ Use an in situ contactor Kxfor switching the electronic dri-

ve unit on and off.

3. Installation

Mains Connection

7

3.5. Connecting The Turbopump

Voltages of up to 150V can occur on the open
electrical connections of a pump which is still
rotating. There is a danger of an electrical
shock from touching the contacts.

Only disconnect the plug connector to the elec-

tronic drive unit once the pump is completely at

rest and the electronic drive unit has been dis-

connected from the mains power supply.

➡ Use a contactor as shown in the input schematic on page

6.

➡ Connect the turbomolecular pump (X8) with connecting

cable to plug connector X5.

➡ Plug X5 and socket X8 must be interlocked after plugging

in and unlocked before disconnecting.

➡ Interlock X5: Provide interlocking 16 and screw in with

self-tapping screw 17.

➡ Interlock X8: Lightly tighten screw 18 after the bayonet

lock has engaged.

The interlocking parts are included with the delivery consign­ment in a separate pack.

Only PFEIFFER connecting cable should be used for connec­ting the pump.

3.6. Connecting The Pumping Station Control
Unit TCS 130 (Option)

Only disconnect the plug connector to the
Pumping Station Control Unit TCS 130 when the
pump is completely at rest and the unit has
been disconnected from the mains.

➡ Connect the Pumping Station Control Unit TCS 130 in

accordance with the connections diagram in Section 8
and Operating Instructions PM 800 205 BN.

➡ Connect the TCS 130 to X4/TCP 5000.

No additional units must be connected to X4/TCP 5000.
Please refer to Operating Instructions PM 800 205 BN for furt­her information on connecting the pumping station control
unit.

Turbopumpe anschließen

16

Interlock X5 Connection TCP

17 Screw X8 Connection turbopump
18 Screw
19 Bayonet lock

Mains (AC)
220/240 V
50/60 Hz

Vacuum Chamber

Exhaust

TCS 130

TCP 5000

X4

X9

X5

S10

12

9

7

6

17

4

18

5/13

14

2

11

1

3

Mating plug X4

Connection schematic

3.4. Connections Schematic

Connecting mains voltage without the use of Pumping Station
Control Unit TCS 130.

1 Cooling Water Monitor
2 Backing Pump
3 Cooling Turbopump
4 Heating Turbopump
5 Venting Control Unit TCF
6 Venting Valve
7 High Vacuum Valve

9 Venting Valve Recipient
11 Remote Control
12 Remote (Standby) external
13 Valve Control Unit TCV
14 Fore Vacuum Safety Valve
17 Turbomolecular Pump
18 Electronic Drive Unit TCP

8

3.7. Connecting The Potential-Free Contacts

Where voltages of up to 250V% which are

hazardous to touch are being connected the
relevant installation instructions must be obser­ved (double insulation).

➡ K1: plug pins b5 and b6
➡ K2: plug pins b4 and b5

3.8 The Adjustment Of The Monitoring
Electronics For Exceptional Applications

Rotation speed switchpoint (relay K1)

The switchpoint for the rotation speed of the turbopump has
been set in the factory to 80% of the nominal rotation speed
and can be altered to between 70% and 90% via trimming
potentiometer R56/Control Print PM 041 271-X.

Start-up time (relay K2)

During the start-up time the pump rotor is accelerated to rota­tion speed after which the rotation speed is monitored.

➡ Set the start-up time for switching contact K2 with poten-

tiometer R90.
Setting range: TPH/TPU 2200 from 1 – 45 min

TPH 5000 from 3 min – 120 min.
longer

shorter

– For the TPH/TPU 2200 and the TPH 5000 the factory settings

are approximately 20 minutes and 60 minutes respectively.

– By bridging X4/a4-a5 the unit can be prevented from

switching off in the event the rotation speed falls below the
switchpoint.

R56 80% rotation speed switchpoint higher

lower

R90 Start up phase longer

shorter
TPH/TPU 2200: 1 – 45 min
TPH 5000: 3 – 120 min

S1 DIL switch

Function Of The DIL Switch S1

S1 open:

The rotation speed is monitored after the start-up time has
elapsed (K2 opens when the rotation speed switchpoint is fal­len below or non-attained).

S1 closed:

The rotation speed is monitored immediately the rotation
speed switchpoint (DZP) is exceeded (K2 opens when the
DZP is fallen below). When the rotation speed switchpoint is
fallen below, even within the set start-up time, the electronic
drive unit is switched off immediately.

On delivery, switch S1 on the TCP 5000 is open.

Control Print PM 041 271 -X

R90S1R56

9

4.1 Switching ON The Electronic Drive Unit

➡ Make the connection TCP - turbopump in accordance

with Section 3.5.

➡ Make the cooling water connection turbopump.
➡ Switch the TCP into the mains via contactor Kx.

Providing the electrical connections have been carried out in
accordance with Wiring Diagram PM 021 801-S, the control
contains optimum interlocking. Components can be selected
depending on the application.

Switching ON Via Pumping Station Control
Unit TCS 130

➡ Switch on main switch S7.
➡ Switch on the pumping station with S1.
➡ Switch on any possible heating with S2.

4.2 Start-Up, Turbopump

After switching on, the turbopump begins to run. Operating
fluid monitoring becomes active when 50% of the final rotati­on speed is attained. If the flow of operating fluid is interrup­ted for more than 20 seconds the turbopump is switched off.

When a turbopump is operated for the very
first time bubbles can form in the operating
fluid feeder line and this can cause the turbo­pump to be switched off owing to a lack of ope­rating fluid.

➡ In the event of a malfunction re-start with RESET, ensuring

that the electronic drive unit is supplied with voltage and
that the reset key is depressed for at least 5 seconds.

If a TPH 5000 is in use, the start-up current is 10A. When the
nominal rotation speed is attained the current reduces to
approximately 5A and can increase, depending on the gas
load, to 10A. The start-up current is 5A where pumps with a
rotation speed of 600 Hz (TPH/TPU 2200/1600) are involved.

4.3. Operations At Nominal Rotation Speed

When 95% nominal rotation speed is exceeded the maximum
current is reduced to 3A to prevent the pump rotor from
overheating from too high a gas load (not applicable on the
TPH 5000).

4.4. Stand-By Operations

Stand-by operations are recommended where high gas loads
or process interruptions are involved. In this case the rotation
speed is reduced and the current is maximum 5A. The danger
of rotor overheating does not arise owing to the slower circu­lation speeds of the rotor blades.

4.5 Switching OFF

The switching off procedure is as follows:

➡ Switch off the heating and allow the pump to cool.
➡ Close the high vacuum valve (if provided).
➡ Switch off the pumping station.
➡ Vent the pumping station with the venting control unit

(automatic) or manually.

4. Operations

3.9. Operating The Electronic Drive Unit
TCP 5000 With Accessories

Control Units

The Electronic Drive Unit TCP 5000 can be operated with
Pumping Station Control Unit TCS 130. A Venting Control Unit
TCF 103 or a Valve Control Unit TCV 103 can be integrated in
the TCS 130.

➡ Connect the TCP to TCS 130/X4.

Controller

The following operating functions can be displayed if
Controller TCI 001 is in use:
– Lubricant insufficiency
– Pump temperature too high
– TCP temperature too high
– TCP switched on
– Pump accelerates
– The pump rotation speed < nominal rotation speed
– The pump rotation speed < nominal rotation speed switch-

point
– The pump rotation speed = nominal rotation speed
– Stand-by

➡ Connect the TCI 001 to plug X9 via the connecting cable.
The TCI is designed to provide remote displays.

Only safety low voltages (SELV) may be
connected to the serial interface plug.

The electrical connections must be carried out in accordance
with Operating Instructions PM 800 107 BE for the TCI 001.

TCS 130 (TCF/TCV 103 option)

10

There are a number of possibilities to eliminate malfunctions:

➡ If the pump does not start after being switched on, depress

the RESET key for at least 5 seconds.

➡ Check the malfunction display on a connected TCI 001.

The following malfunctions cause a drop-out of relays K3 and
K2. They can be acknowledged by depressing RESET (S3)
when the malfunction has been eliminated:

– Lubricant insufficiency, turbopump
– Motor rotation speed > 105% nominal rotation speed
– Rotation speed falls below switchpoint K1.

– Cooling water insufficiency*
– Backing pump(s) breakdown*
– Automatic circuit breakers breakdown F1, F5 or F15.*

*

Only in connection with the TCS 130.

Pressure key RESET

– Relay K3 is a locking relay.
– During normal operations K3 is closed and opens in the

event of a malfunction.
– Mains voltage must be present on the electronic drive unit

for K3 to close.

➡

Close relay K3 with the RESET key. Depress for at least

5 seconds.

The TCP 5000 is not potential-free. When the
pump is running down the drive motor acts a
generator and generates up to 200 V DC.

➡ Release the interlocking on plug connections X5 and X4

only when the pump is completely at rest.
➡ Disconnect plug connection X4 only when the pump is

completely at rest.

5. What To Do In The Case Of Breakdowns ?

11

The unit is maintenance-free. Dirt on the front panel panel
can be removed with a damp cloth having first disconnected
the unit from the mains power supply.

Do Make Use Of Our Service Facilities

In the event that repairs are necessary a number of options
are available to you to ensure any system down time is kept to
a minimum:
– Have the pump repaired on the spot by our PFEIFFER

Service Engineers;
– Return the pump to the manufacturer for repairs;
– Replace the unit with an as good as new exchange unit.

Local PFEIFFER representatives can provide full information.

The connections diagram in Section 10 shows the power
carrying current paths.

Customers who carry out their own repairs must
take account of the possibility that touchable
dangerous voltages can be present in the unit.

Please Note:

Repair orders are carried out according to our general condi­tions of sale and supply. If repairs are necessary, please send
the pump to your nearest PFEIFFER Service Center.

Contact Addresses And Telephone Hotline

Contact addresses and telephone numbers can be found on
the back cover of these operating instructions.

6. Maintenance, Service

7. Technical Data

Turbopump TPH 5000 TPH/U 1600

TPH/U 2200

Connection voltage: V AC 220 - 240 220 - 240
Current: A 12 12
Power take-up VA 2400 2400
Frequency: Hz 50-60 50-60
Output voltage, motor connection: V= 200 200
Output current motor connection: A 10 5
Power loss: Watt ?
permissible ambient temperature: °C 5 - 40 5 - 40

Maximum relative humidity % ( at 35 °C) 80 80
“ % at 40 °C) 50 50
Protection type: IP 20 IP 20
Protection class: 1 1

Potentialfree Contacts

permissible voltage: V AC 220 220
Current with ohmic load K1: A 8 8

K2: A 2 2

Start-up time, adjustable to: min 120 45
Rotation speed switchpoint: % 70-90 70-90
Maximum cable length: m 100 100

7.2. Dimensions

Dimensions TCP 5000

7.1. Data List Electronic Drive Unit TCP 5000

GEFAHR

12

8. Connections Diagram

PM 021 801 -S

13

Description Size Number Operating Instructions Order Quantity/

Comments

Pumping Station Control UnitTCS 130 208- 240 V; 50/60 Hz PM C01 551 PM 800 205 BN
Connecting cable turbopump – TCP 3 m PM 011 232 -X (other lengths on request)
Mains cable
Schuko PM 041 400 -X

208 V PM 041 401 -X
Serial Interface TCI 001 PM C01 291 PM 800 107 BN
Serial Interface cable 0,5 m PM 011 462 -X
Serial Interface cable 3 m PM 011 463 -X
Fore vacuum safety valve TVV 001 230 V PM Z01 205 PM 800 263 BN

9. Accessories

When ordering spare parts please state the full article
description and number. Keep a copy of this page as a record
of your order.

Wiring Diagram Legend

1 Cooling Water Monitor TCW
2 Rotary Vane Vacuum Pump
3 Air Cooling or Cooling Aggregate TZK
4 Heating Turbopump
5 Venting Control Unit TCF
6 Venting Valve TVF
7 High Vacuum Valve
8 Cable TCP-turbopump
9 Venting Valve vacuum chamber
10 Power failure Venting Unit TSF
11 Remote control
12 STAND-BY external
13 Valve Control Unit TCV
14 Fore-vacuum valve
16 Roots Vacuum Pump WKP
17 Turbopump
18 Electronic drive unit
H1 Pumping Station ON
H2 Heating ON
H4 Pumping Station ON (in remote control mode)
H5 Heating ON (in remote control mode)
S1 Pumping station
S2 Heating
S3 Reset
S4 Pumping Station (in remote control mode)
S5 Heating (in remote control mode)
S6 Reset (in remote control mode)
S7 Main switchTCS
S8 Voltage selector switch TCP
S9 Stand-by, TCP
S10 Stand-by external

1) Remove bridge when a TCW is connected

2) 1-3 closed at a room temperature of <24°C

3) Remove bridge when operating remote control

6) Remove bridge when a WKP is connected

➪

DDDDEEEE,,,, AAAATT

TT

Herstellererklärung im Sinne folgender EU-Richtlinien:

- Maschinen 89/392/EWG

- Elektromagnetische Verträglichkeit 89/336/EWG

- Niederspannung 73/23/EWG

Hiermit erklären wir, daß das unten aufgeführte Produkt zum Einbau in eine Maschine bestimmt ist und daß deren Inbetriebnahme so lange untersagt ist, bis festgestellt wurde, daß
das Endprodukt den Bestimmungen der EU-Richtlinie 89/392/EWG, Anhang II B entspricht.
Wir bestätigen Konformität mit der EU-Niederspannungsrichtlinie 73/23/EWG. Bei der Baumusterprüfung wurde mit Zusatzausrüstung Konformität mit der EU-Richtlinie über elektroma­gnetische Verträglichkeit 89/392/EWG festgestellt, die auch bei Einhaltung der Installationsvorschriften erreicht wird. Die angewandten Richtlinien, harmonisierten Normen, nationalen
Normen und Spezifikationen sind unten aufgeführt.

➪

GGGGBBBB,,,, IIIIEE

EE

Manufacturer´s declaration pursuant to the following EU directives:

- Machinery Directive 89/392/EEC

- Electromagnetic Compatibility Directive 89/336/EEC

- Low Voltage Directive 73/23/EEC

We hereby certify that the product specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the
end product is in accordance with the provision of EU Directive 89/392/EEC, Annex II B.
We certify conformity with EU Low Voltage Directive 73/23/EEC. During a certifying test with additional equipment conformity with the EU-directive relating to EMI 89/392/EEC was
found. This will be reached too if the installation instructions are followed. The guidelines, harmonised standards, national standards and specifications which have been applied are
listed below.

➪

BBBBEEEE,,,, FFFFRR

RR

Déclaration du constructeur conformément aux directives CE suivantes:

- directive machine CE 89/392/CEE

- directive CE 89/336/CEE concernant la compatibilité électromagnétique

- directive CE 73/23/CEE concernant la basse tension

Nous déclarons par la présente que le produit mentionné ci-dessous est prévu pour le montage sur une machine et que sa mise en service est interdite tant qu’il n’a pas été déterminé
que le produit final répond bien aux dispositions de la directive CE 89/392/CEE, appendice II B.
Nous confirmons la conformité du produit avec la directive CE 73/23/CEE concernant la basse tension. La conformité requise avec la directive UE régissant la compatibilité électroma­gnétique 89/392/CE, qui est également obtenue en observant les directives en matière d'installation, a été constatée lors du processus d'homologation réalisé avec un équipement
complémentaire. Les directives appliquées, normes harmonisées et les normes et spécifications nationales appliquées figurent ci-dessous.

➪

IIIITT

TT

Dichiarazione del costruttore ai sensi delle seguenti direttive UE:

- Macchinari 89/392/CEE

- Compatibilità elettromagnetica 89/336/CEE

- Bassa tensione 73/23/CEE

Si dichiara che il prodotto qui menzionato è destinato al montaggio in una macchina e che la sua messa in funzione è vietata sin quando non è stato accertato che il prodotto finale non
rispetta le disposizioni della direttiva UE 89/392/CEE, Appendice II B.
Attestiamo la conformità con la direttiva UE sulla bassa tensione 73/23/CEE. Durante la prova di omologazione è stata accertata, con equipaggiamento supplementare, la conformità
con la direttiva UE relativa alla compatibilità elettromagnetica 89/392/CEE, che si ottiene anche nell'osservanza delle norme di installazione". Sono riportate in basso le direttive aplica­te, le norme standardizzate nonché le norme e le specifiche nazionali utilizatte.

➪

EEEESS

SS

Declaración del fabricante al tenor de las siguientes Directivas de la UE:

- Maquinarias 89/392/MCE

- Compatibilidad Electromagnética 89/336/MCE

- Baja Tensión 73/23/MCE

Por la presente declaramos que el producto mencionado más abajo está previsto para ser incorporado en una máquina y que la puesta en servicio de la misma queda prohibida en
tanto que no se haya verificado que el producto final concuerda con las disposiciones resultantes de la Directiva 89/392/MCE de la UE, Apéndice II B.
De nuestra parte certificamos la conformidad con la Directiva 73/23/MCE de la UE sobre Baja Tensión. En la comprobación del modelo de construcción, se ha constatado con equipa­miento adicional la conformidad con la directiva de la UE sobre compatibilidad electromagnética 89/392/MCE, que se consigue también cumpliendo las prescripciones de instalación.
Las directivas aplicadas, normas armonizadas y las normas y especificaciones nacionales aplicadas se mencionan abajo.

➪

NNNNLL

LL

Verklaring van de fabrikant in de zin van de volgende EU-richtlijnen:

- machinerichtlijn 89/392/EEG

- richtlijn over elektromagnetische compatibiliteit 89/336/EEG

- richtlijn over laagspanning 73/23/EEG

Hiermee verklaren wij dat het hieronder genoemde produkt is bedoeld om te worden ingebouwd in een machine en dat de ingebruikneming hiervan zolang verboden is, totdat is vast­gesteld dat het eindprodukt voldoet aan de bepalingen van EU-richtlijn 89/392/EEG, appendix II B.
Wij bevestigen de conformiteit met de EEG-richtlijn over laagspanning 73/23/EEG. Bij de bouwtypekeuring is met aanvullende uitrusting conformiteit vastgesteld met de EU-richtlijn over
elektromagnetische compatibiliteit 89/392/EEG, die ook wordt bereikt bij het in acht nemen van de installatievoorschriften. De toegepaste richtlijnen, geharmoniseerde normen en de
toegepaste nationale normen en specificaties zijn hierna aangegeven.

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Producenterklæring i henhold til følgende EU-direktiver:

- Maskiner 89/392/EWG

- Elektromagnetisk kompatibilitet 89/336/EWG

- Lavspænding 73/23/EWG

Hermed erklærer vi, at det nedenstående produkt er beregnet til indbygning i en maskine og at dennes idriftsættelse er forbudt, indtil det er fastslået, at slutproduktet er i overensstem­melse med EU-direktiv 89/392/EWG tillæg II B.
Vi attesterer konformitet med EU-lavspændingsdirektiv 73/23/EWG. Ved konstruktionsprøvekontrollen er der med ekstra udstyr blevet fastslået konformitet med EU-direktivet vedrøren­de elektromagnetisk kompatibilitet 89/392/EWG, hvad der også kan opnås ved overholdelse af installationsforskrifterne. De anvendte direktiver, harmoniserede standarder og de
anvendte nationale standarder og specifikationer er angivet nedenfor.

Pfeiffer Vacuum GmbH

Emmeliusstr. 33
D-35614 Asslar

Herst.II/9604

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SSSSEE

EE

Tillverkarens förklaring enligt följande EG-direktiv:

- Maskindirektiv 89/392/EEC

- Elektromagnetisk tolerans 89/336/EEC

- Lågspänning 73/23/EEC

Härmed förklarar vi, att den nedan nämnda produkten är avsedd för inmontering i en maskin och att denna maskin inte får tas i drift förrän det har konstaterats, att slutprodukten stäm­mer överens med EG’s direktiv 89/392/EEC, annex II B.
Vi bekräftar konformitet med EG’s lågspänningsdirektiv 73/23/EEC. I samband med typprovningen fastställdes också med extra utrustning konformitet med EU-direktivet om
elmagnetiskt tolerans 89/392/EEC, som även uppnås om installationsföreskrifterna beaktas.
De riktlinjer, anpassade standarder, nationella standarder och specifikationer som har blivit accepterade, anges här nedan.

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II

Valmistajan vakuutus seuraavien EU-direktiivien mukaisesti:

- konedirektiivi 89/392/ETY

- sähkömagneettinen siedettävyys 89/336/ETY

- pienjännite 73/23/ETY

Vakuutamme täten, että allamainittu tuote on tarkoitettu asennettavaksi koneeseen ja sen käyttöönotto on kielletty kunnes on todettu, että lopullinen tuote vastaa EU-direktiivin
89/392/EtY vaatimuksia.
Vahvistamme vaatimustenmukaisuuden EU-pienjännitedirektiivin 73/23/ETY kanssa. Rakennemallitarkastuksessa todettiin lisävarustuksella vaatimustenmukaisuus sähkömagneettise­sta yhteensopivuudesta annetun EU-direktiivin 89/392/ETY kanssa, joka saavutetaan myös asennusmääräyksiä noudattamalla.
Soveltamamme suuntaviitat, harmonisoidut standardit, kansalliset standardit ja rakennemääräykset on luteltu alempana.

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Declaração do fabricante, de acordo com as seguintes Directivas CE:

- Máquinas, na redacção 89/392/CEE

- Compatibilidade electromagnética, na redacção 89/336/CEE

- Baixa tensão, na redacção 73/23/CEE

Com a presente, declaramos que o produto abaixo indicado se destina à montagem numa máquina e que é proibida a colocação em serviço da mesma antes de se ter declarado, que o
produto final está em conformidade com o disposto na Directiva CE, na redacção 89/392/CEE, Apêndice II B.
Certificamos haver conformidade com o disposto na Directiva CE sobre baixa tensão, na redacção 73/23/CEE. Ao fazer-se o exame do tipo de construção, com um equipamento adicio­nal constatou-se existir conformidade com a directriz CE sobre a compatibilidade electromagnética 89/392/CEE, a qual também se consegue, mantendo-se as disposições referentes à
instalação.

Abaixo, dá-se indicação das directivas aplicadas, das normas harmonizadas e das normas e especificações aplicades no respectivo país.

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RR

Produkt/Product/Produit/Prodotto/Producto/Produkt/Produkt/Produto/

TCP 5000

Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen in Sprachen und Spezifikationen:
Guidelines, harmonised standards, national standards in languages and specifications which have been applied:
Les directives appliquées, normes harmonisées et les normes nationales appliquées en langues et spécifications:
Direttive aplicate, norme standardizzate e norme nazionali utilizzate in lingue e specifiche:
Directivas aplicadas, normas armonizadas y normas nacionales aplicadas en idiomas y especificaciones:
Toegepaste richtlijnen, geharmoniseerde normen en toegepaste nationale normen met betrekking tot talen en specificaties:
Anvendte direktiver, harmoniserede standarder og de anvendte nationale standarder med sprog og specifikationer:
Directivas aplicadas, normas harmonizadas e normas aplicadas na linguagem e nas especificações do respectivo país:

EN 61010

Unterschriften/Signatures/Signature/Firme/Firmas/Handtekeningen/Underskrifter/Assinaturas/

Geschäftsführer (W. Dondorf)
Managing Director Gérant d’affairs
Gerente Directeur
Administrerende Direktør Verkställande Direktör
Gerente Underskrift

Allekirjoitukset

DTP

Herst.II/9606 Form.-Nr. 10120 / (9606)

Zentrale/Headquarters

Pfeiffer Vacuum GmbH

Emmeliusstrasse 33
D-35614 Asslar

Telefon [phone]
Telefax 06441/802-202
Hotline [phone]
Internet:
http://www.pfeiffer-vacuum.de

India

Pfeiffer Vacuum India Ltd.
25-E Nicholson Road, Tarbund
Secunderabad 500 009,
telephone 0091 / 40 775 0014, telefax 0091 / 40 775 7774

Israel

Eastronics Ltd., 11 Rozanis Street, P.O. Box 39 300,
Tel Aviv 61392,
telephone 00972 / 3 6458 777,
telefax 00972 / 3 6458 666

Italy

Pfeiffer Vacuum Italia S.p.a.
Via San Martino, 44 I-20017 RHO (Milano)
telephone 0039 / 2 93 99 051, telefax 0039 / 2 93 99 05 33

Japan

Hakuto Co. Ltd., C.P.O. Box 25,
Vacuum & Scientific Instruments Division
Tokyo Central 100-91,
telephone 0081 / 3 32 258 910,
telefax 0081 / 3 32 259 009

Korea

Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453,
Dokok-Dong, Kang Nam-Ku, Seoul, 135-270
telephone 0082 / 2 3461 0671,
telefax 0082 / 2 3461 0676

Netherlands

Pfeiffer Vacuum Nederland BV
Veldzigt 30a, NL-3454 PW De Meern,
telephone 0031 / 30 6666050, telefax 0031 / 30 6662794

Peru

Ing. E. Brammertz S.C.R.L., José Pardo 182,
Apartado 173, PE-18 Miraflores,
telephone 0051 / 1 445 8178
telefax 0051 / 1 445-1931

Poland

Softrade Sp.z.o.o, ul. Malwowa 35,
PL-60-175 Poznan, telephone 0048 / 61 8677 168,
telefax 0048 / 61 8677 111

Portugal

Unilaser Lda, Taguspark
Núcleo Central, sala n

o

268, Estrada Cacém­Porto Salvo, P-2780 Oeiras
telephone 00351 / 1 421 7733,
telefax 00351 / 1 421 7744

Singapore

APP Systems Services Pte. Ltd, 2 Corporation Road
06-14 Corporation Place, Singapore 618494,
telephone 0065 / 268 2024, telefax 0065 / 268 6621

Spain

Tecnovac
Tecnologia de Vacio S.L., Ronda de Poniente, 6 Bajo F
Centro Empresarial Euronova
E-28760 Tres Cantos (Madrid)
telephone 0034 / 91 804 11 34,
telefax 0034 / 91 804 30 91

Sweden

Pfeiffer Vacuum Scandinavia AB
Magasinsgatan 35, Box 10412
S-43424 Kungsbacka
telephone 0046 / 300 710 80
telefax 0046 / 300 172 85
Service Hotline: 0046 / 300 710 85

Switzerland

Pfeiffer Vacuum Schweiz S.A.
Förrlibuckstraße 30, CH-8005 Zürich
telephone 0041 / 1 444 2255,
telefax 0041 / 1 444 2266
Service Hotline: 0041 / 1 2730119

South Africa

Labotec Pty Ltd., P.O. Box 6553,
Halfway House
1685 Midrand
telephone 0027 / 11 315 5434
telefax 0027 / 11 315 5882

Taiwan

S & T Hitech Ltd. Hsinchu office
No. 103, Hsien Chen 11th Street, Jubei City,
HsinChu County, Taiwan, R.O.C.
(zip/postal code: 302)
telephone 00886 / 3 554 1020
telefax 00886 / 3 554 0867

Thailand

S & T Enterprises (Thailand) Ltd.
18th Floor, Chokchail Intíl Bldg.
690 Sukhumvit Road
Klongton, Klongtoey
Bangkok 10110
telephone 00662 / 259 4623
telefax 00662 / 259 6243

U.S.A.

Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988
USA
telephon 001/ 603 578 6500
telefax 001/ 603 578 6550

Venezuela

Secotec S.A., Apartado 3452, Caracas 1010-A,
telephone 0058 / 2 573 8687
telefax 0058 / 2 573 1932

Other countries

AVI - Applied Vaccuum Industries GmbH
Leginglenstrasse 17A; CH-7320 Sargans
Switzerland
telefon 0041 / 81 710 03 80
telefax 0041 81 710 03 81

Scope of represented countries

Armenia, Azerbaijan, Bangladesh, Belarus, Bulgaria,
Cambodia, Estonia, Georgia, Hong Kong, Kazakhstan,
Kingdom of Nepal, Kirghizia, Latvia, Lithuania, Maldavia,
Philippines, P.R. China, Rumania, Russia, Tajikistan,
Turkmenistan, Ukraine, Uzbekistan, Vietnam

A.E.M.S.
Advanced Equipment Materials and Systems
P.O. Box 25
Föhrenweg 18
FL-9496 Balzers
telephon 0041 / 75 380 0550
telefax 0041 / 75 380 0551

Scope of represented countries

Bahrain, Egypt, Iraq, Iran, Jordan, Kuwait, Lebanon,
Lybia, Oman, Pakistan, Saudi-Arabia, Sudan, Syria,
Turkey, United Arab Emirates, Yemen

Argentina

ARO S.A., Casilla de Correo 4890,
1000 Buenos Aires, telephone 0054 / 1 331 3918,
telefax 0054 / 1 331 3572

Australia

Balzers Australia Pty. Ltd., Level 1,
3, Northcliff Street, Milsons Point, NSW 2061,
telephone 0061 / 2 9954 1925, telefax 0061 / 2 9954 1939

Austria

Pfeiffer Vacuum Austria GmbH
Diefenbachgasse 35, A-1150 Wien,
telephone 0043 / 1 8941 704, telefax 0043 / 1 8941 707
Service Hotline: 0043 / 1 8941704

Belgium / Luxemburg

Pfeiffer Vacuum Belgium N.V./S.A.
Minervastraat 14, B-1930 Zaventem
telephone 0032 / 2 725 0525, telefax 0032 / 2 725 0873
Service Hotline: 0032 / 2 725 3545

Brazil

Elmi Tec
Assistencia Técnica e Representação S/C Ltda.
Rua Bernadino de Compos, 551
CEP 04620-002 São Paulo, SP - Brasil
telephone 0055 / 11 532 0740
telefax 0055 / 11 535 3598

Chile

BERMAT S.A., Coyancura 2283, piso 6
Providencia, P.O. Box 9781, Santiago
telephone 0056 / 2 231 8877,
telefax 0056 / 2 231 4294

Colombia

Arotec Colombiana S.A., Carrera 15 No.38-17
P.O. Box 050 862, Santafe de Bogota / D.C.
telephone 0057 / 1 288 7799, telefax 0057 / 1 285 3604

Denmark

Pfeiffer Vacuum Scandinavia AB, Vesterengen 2,
DK-2630 Taastrup, telephone 0045 / 43 52 38 00,
telefax 0045 / 43 52 38 50

France

Pfeiffer Vacuum France SAS
45, rue Senouque, BP 139 F-78531 BUC Cedex
telephone 0033 / (0)1 30 83 04 00,
telefax 0033 / (0)1 30 83 04 04

Germany

Pfeiffer Vacuum Vertriebs GmbH,
Emmeliusstrasse 33, D-35614 Asslar
telephone 0049 / 6441 802 400
telefax 0049 / 6441 802 399
Service Hotline: 0049 / 6441 802 333

Great Britain

Pfeiffer Vacuum Ltd.
Bradbourne Drive, Tilbrook,
Milton Keynes, MK7 8AZ, United Kingdom
telephone 0044 / 1 908 373 333
telefax 0044 / 1 908 377 776

Greece

Analytical Instruments S.A., 1 Mantzarou St.,
GR-15451 Athens,
telephone 0030 / 1 674 8973, telefax 0030 / 1 674 8978

(0399)