Pfeiffer Vacuum TC 110 Operating Instruction

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Translation of the original instructions

PT 0204 BEN/H (1008)

TC 110

Electronic Drive Unit

Operating Instructions

Table of contents

1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

3 Product description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

4 Connections diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

5 Connection "X3" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

6 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

7 Pfeiffer Vacuum Protocol for "RS485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

8 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

9 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

2.2 Proper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

3.1 Product identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

5.2 Operation via "X3" connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

6.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12

6.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12

6.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15

6.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . .17

7.1 Telegram frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

7.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

7.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

8.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

8.2 Operating mode display via LED. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

8.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Declaration of conformity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

About this manual

1 About this manual

1.1 Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refer to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.

Up-to-date operating instructions can also be downloaded from

www.pfeiffer-vacuum.net.

1.2 Conventions

Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk

evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:

Pictograph definitions

Instructions in the text

CAUTION

Possible danger

Injuries or property damages can occur.

NOTE

Command or note

Command to perform an action or information about properties, the disregarding of which may result in damage to the product.

Warning of a displayed source of danger in connection with operation of the unit or equipment.

Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents.

 Work instruction: here you have to do something.

Abbreviations used DCU:Display and operating unit

HPU:Handheld programming unit

TC:Electronic drive unit for turbopump

TPS:Mains pack

DI / DO:Digital input / digital output

AI / AO:Analog input / analog output

f:Rotation speed (derivated from frequency in Hz)

[P:000]:Parameter of the electronic drive unit with number

Safety

2Safety

2.1 Safety precautions

Duty to inform

Each person involved in the installation or operation of the unit must read and observe the safety-related parts of these operating instuctions.

 The operator is obligated to make operating personnel aware of dangers originating

from the unit or the entire system.

Danger - Electrical installation

Safe operation after installation is the responsibility of the operator.

 Do not independently modify or change the pump and electrical equipment.  Make sure that the system is integrated in an emergency off safety circuit.  Consult Pfeiffer Vacuum for special requirements.

NOTE

WARNIN G

Danger of electric shock

In case of defect, the parts connected to the power supply are under voltage.

 Always keep the mains connection freely accessible so you can disconnect it at any

time.

• Power supply: The turbopump power supply must apply to the requirements of

double insulation between mains input voltage and operating voltage according to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines.

• Observe all safety and accident prevention regulations.

• A safe connection to the protective earthing conductor (PE) is recommended (protection class III).

• Regularly check the proper observance off all safety measures.

• Before carrying out any work disconnect the unit and all associated installations safely from the mains.

• Do not loosen any plug connection during operations.

• The unit has been accredited with protection class IP 30. When installing into ambient conditions, which afford other protection classes, the necessary measures must be taken.

• Keep leads and cables well away from hot surfaces (> 70 °C).

• Only seperate the pump and the electronic drive unit from each other after disconnecting the supply voltage and the complete standstill of the pump.

2.2 Proper use

warranty seal

2.3 Improper use

Safety

NOTE

CE conformity

The manufacturer's declaration becomes invalid if the operator modifies the original product or installs additional components!

 Following installation into a plant and before commissioning, the operator must

check the entire system for compliance with the valid EU directives and reassess it accordingly.

• The electronic drive unit TC 110 operates designated Pfeiffer Vacuum turbopumps and their accessories.

Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned above, especially:

• The use of accessories, which are not named in this manual.

• The operation of the devices in potentially radioactive areas.

NOTE

Closure seal

The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.

 Do not open the product within its warranty period!  For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-

um Service.

Product description

cd h

3 Product description

3.1 Product identification

Product features The electronic drive unit TC 110 is an integrated component of the turbopump. It's

purpose is to drive, monitor and control the entire pump.

Characteristics TC 110

Connection voltage TC 24 V DC ± 5 % Connection panel Standard (X3) Turbopump HiPace 10, 60, 80, 300

To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available.

3.2 Range of application

Pfeiffer Vacuum electronic drive units TC 110 must be installed and operated in the following ambient conditions.

Installation location weather protected (indoors) Protection category IP 30 Protection class III Temperature +5 °C to +40 °C (up to +35 °C with air cooling) Relative humidity max. 80 %, at T ≤ 31 °C, up to max. 50% at T ≤ 40 °C Atmosp heric pressure: 77 kPa - 106 kPa Installation altitude 200 0 m max. Degree of pollution 2 Overvoltage category II

3.3 Function

Fig. 1: Standard panel for the TC 110

c Connection "X3" d Service connection "PV.can"

3.4 General connection description

PV.can

M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service purposes.

D-sub 15 pole female socket for the connection of a remote control. Casing socket on the rear side of the electronic drive unit for the connection

1. The connection "PV.can" serves to service purposes exclusively.

to the turbopump.

h LED "Operating display"

4 Connections diagram

DC in DC in

24 VDC*

RS 485 +

RS 485 -

n.c.

24 VDC*

RS 485 +

RS 485 -

n.c.

RS485 RS485

23456

TC 110

DI Remote Priority

DI1

DI2

DI Pumping station

DI Standby

24 VDC* (V+)

Accessory A1

Accessory B1

DO1

DO2

AO1

RS 485 D+

RS 485 D-

23456

134

Acc. A1

Acc. B1

Connection cable

TC 110 - TPS/DCU, RS485

TPS 110 / 180 and DCU 002 / HPU 001

DCU 110 / 180

Connection cable TC 110 - TPS/DCU

with accessory ports, RS485

TPS 110 / 180 and DCU 002 / HPU 001

DCU 110 / 180

0 - 10 VDC

= 0 - 100 % *f

end

R ≥ 10kΩ

90 - 132 /

185 - 265

VAC

23456

X2 X1

TPS 110 / 180

DCU 110 / 180

24 VDC / max. 200 mA

24 VDC / max. 50mA

+24 VDC / 4,6 - 6,3 A ± 5 %

Contact current max. 6 mA / contact

Mains input /

Power supply

External connection

Fa n

Venting

va lve

Rela y

Fa n

Venting

va lve

Rela y

Connections diagram

Fig. 2: Connections diagram and assignment of the TC 110

Connection "X3"

5 Connection "X3"

Remote control options and voltage supply are provided via the 15-pole D-Sub connector with the designation ”X3“ on the TC 110.

 Shielded connectors and cables must be used.

The following information display the factory setting. Configuration is possible using the Pfeiffer Vacuum parameter set.

Danger of the drive unit beeing destroyed

Cutting the plug connection "X3" can lead to the destruction of the electronic drive unit, when the power supply is still switched on.

 Before pulling the connector "X3" necessarily disconnect the power supply.  Switch off the power supply unit.

5.1 Pin assignment

Pin Function Designation factory settings

1 +24 VDC input Voltage supply for the electronic drive unit 2 DI Remote priority Control via interface "X3"; open: off;

3 DI1 Enable venting; open: off; V+: on 4 DI2 Heating; open: off; V+: on 5 DI Pumping station open: off; V+: on and error acknowledgement 6DI Standby

DI Error acknowledgement 7 +24 VDC* output (V+) Reference voltage for all digital inputs 8 DO1 GND: no; V+: yes (I 9 DO2 GND: no; V+: yes (I 10 Accessory output A1 open: off; V+: on 11 Accessory output B1 open: off; V+: on 12 AO1 Actual rotation speed; 0-10 VDC is equivalent to 0-100%;

13 RS485 D+ 14 RS485 D15 Ground (GND) Ground connection for the elctronic drive unit;

NOTE

V+: set and priority over other digital inputs

Standby rotation speed; open: off; V+: on Error acknowledgement: V+ pulse (500 - 2000 ms)

=50mA/24 V)

max

=50mA/24 V)

max

> 10 kΩ

Reference ground for all digital inputs and all outputs

5.2 Operation via "X3" connection

Voltage supply +24 VDC Input / Pin 1

The electrical connection at "X3" is carried out via connecting cables of the Pfeiffer Vacuum accessories program or by customized configuration on Pin 1 and Pin 15.

+24 VDC* Output / Pin 7

Inputs 2 - 6 are activated by connecting them with +24 VDC to Pin 7 (active high). They can also be activated via an external PLC. The functions are deactivated by "PLC high level" and by "PLC low level".

• PLC high level: +13 V to +33 V

• PLC low level: -33 V to +7 V

• Ri: 7 kΩ

Connection "X3"

Inputs The digital inputs at connection "X3" are used to connect various functions of the

electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can be configured via interface RS485 and the Pfeiffer Vacuum parameter set.

DI Remote priority / Pin 2

V+ : The connection "X3" has operation priority over all other digital inputs.

open: Remote priority inactive

DI1 (Enable venting) / Pin 3

V+ : Venting is enabled (venting according to venting mode)

open: Venting locked (no venting is performed)

DI2 (Heating) / Pin 4

V+ : Heating on

open: Heating off

DI Pumping station / Pin 5

The turbopumps is placed in operation and connected pumping station components (e.g. backing pump, venting valve, air cooling unit) are triggered. Any ongoing error messages are reset when their cause has been eliminated.

V+ : Malfunction acknowledgement and pumping station on

open: Pumping station off

DI Standby - Error acknowledgement / Pin 6

In standby mode, the turbopump operates at a specified rotor speed < nominal rotation speed. Factory setting and recommended operation are 66.7 % of the nominal rotation speed.

V+ : Standby activated

V+ : Reset ongoing error messages when cause has been eliminated with a pulse of 500 - 2000 ms duration

open: Standby off, operation at nominal rotation speed

Outputs The digital outputs at the connection "X3" can be loaded with a maximum of 24 V

/ 50 mA per output. All outputs listed below are configurable by the Pfeiffer Vacuum parameter set via interface RS485 (description related to factory settings).

DO1 (Rotation speed switch point attained) / Pin 8

Active high after the rotation speed switch point is attained. Rotation speed switch point 1 is factory-set to 80% of the nominal rotation speed. It can, for example, be used for a "pump operational" message.

DO2 (No errors) / Pin 9

When the supply voltage has been established, digital output DO2 permanently outputs 24 VDC which means "no errors". Active low in case of error (collective error message).

Accessory outputs / Pin 10 and Pin 11

The accessory outputs can be loaded with a maximum of 24 V / 200 mA per output. Additional functions can be assigned to the accessory inputs and outputs via DCU, HPU or PC. Works settings:

• Accessory output A1: A connected air cooling unit is activated.

Connection "X3"

DCU 002

DCU 110 - 310

HPU

USB/RS485-converter

TPS

RS485

RJ45

M12

DC in

M12

• Accessory output B1: A connected venting valve is activated, if venting release is transmitted via input DI1.

AO1 Analog output 0-10 V DC / Pin 12

A rotation-speed-proportional voltage (0-10 VDC equals 0 - 100 % x f

Nominal

) can be picked up via the analog output (load R ≥ 10 kΩ). Additional functions (optionally current/power) can be assigned to the analog output via DCU, HPU or PC.

RS485 One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can

be connected respectively to the electronic drive unit via Pin 13 and Pin 14 of the connection "X3" on the electronic drive unit.

CAUTION

Danger of electric shock

The insulation measures of the bus system are designed only for use with safety extralow voltage.

 Connect only suitable devices to the bus system.

• The group address of the electronic drive unit is 961.

• All units connected to the bus must have differing RS485 device addresses

[P:797].

Désignation Valeur

Interface série RS485 Vitesse de transmission 9600 bauds Longueur d'un mot de données 8 bits Parité aucune (no parity) Bits de départ 1 Bits d'arrêt 1..2

Connecting Pfeiffer Vacuum display and control units or PC

Fig. 3: Optional connection possibilities for interface RS485

 Use the connection cable supplied with the control panel or from the range of

accessories.

 The connection of respectively one external operating unit is possible on the in-

terface RS 485.

 A USB interface (PC) can be connected via the USB/RS485-converter.

Cross-linking via the connection RS485

USB/RS485-converter

Y-Connector

RS485

RS485 M12 M12

M12

TC TC

D+

D-

USB/RS485-converter

RS 485

USB

Connection "X3"

Fig. 4: Cross-linking via connection RS485 with connection cables and accessory

 Establish the connections according to the specification of the interface RS485.  Connect all units with D+ and D- to the bus.

• The group address of the electronic drive unit is 961.

• All units connected to the bus must have differing RS485 device addresses

[P:797].

The Pfeiffer Vacuum parameter set

6 The Pfeiffer Vacuum parameter set

6.1 General

All function-relevant variables of a turbopump are anchored in the electronic drive unit as parameters. Each parameter has a three-digit number and a designation. Parameters can be used via Pfeiffer Vacuum display and control panels or via RS485 with the Pfeiffer Vacuum protocol.

NOTE

Additional parameters in the control unit

For the control of connected external components (e.g. vacuum measurement devices) there are additional parameters fixed in the respective Pfeiffer Vacuum display and control unit.

 Please consider the respective operating instructions.

Conventions Parameters are displayed in square brackets as a three-digit number in bold font.

The designation may also be stated if necessary.

Example: [P:002] Standby

6.2 Parameter overview

Annotation

# Three figure number of the parameter Display Notification of the parameter in a Pfeiffer Vacuum display and control unit Designation Short description of the parameter Functions Functional description of the parameter Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum

Access method R: read access; W: write access Unit Physical unit of the described characteristic min / max permissible limits for value input default factory settings (partially specific of the pump type)

 Parameter can be stored non volatile in the electronic drive unit and may

Operation with DCU

Parameter set and Pfeiffer Vacuum display and control unit

Pfeiffer Vacuum display and control units DCU show the basic parameter set by default. Furthermore the DCU contains parameters, which are not positioned in the electronic drive unit.

 Parameter [P:794] = 1 (Display of all available parameters).

protocoll

be reused after resetting of the mains supply.

NOTE

# Display Designation Functions

340 Pressure Active pressure value 7 R mbar 1E-10 1E3 350 Ctr Name Type of display and control unit 4 R 351 Ctr Software Software of display and control unit 4 R 738 Gaugetype Type of pressure gauge 4 RW 794 Param set Parameterset 0 = basic parameter set

1 = extended parameter set

795 Servicelin Insert service line 7 RW 795

Unit min max default 

Data type

Access

7RW 0 1 0

The Pfeiffer Vacuum parameter set

Control commands

# Display Designation Functions

001 Heating Heating 0 = off

1 = on

002 Standby Standby 0 = off

1 = on

004 RUTimeCtrl Run-up time control 0 = off

1 = on 009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1 010 PumpgStatn Pumping station 0 = off

1 = on and error acknowledgement 012 EnableVent Enable venting 0 = no

1 = yes 017 CfgSpdSwPt Configuration rotation speed switch point 0 = Rotation speed switch point 1

1 = Rotation speed switch point 1&2 019 Cfg DO2 Configuration output DO2 0 = Rot. speed switch point attained

1 = No error

2 = Error

3 = Warning

4 = Error and/or warning

5 = Set speed attained

6 = Pum p on

7 = Pump accelerates

8 = Pumpe decelerates

9 = always 0

10 = always 1

11 = Remote priority active

12 = Heating

13 = Backing pump

14 = Sealing gas

15 = Pumping station 023 MotorPump Motor pump 0 = off

1 = on 024 Cfg DO1 Configuration output DO1 0 = Rot. speed switch point attained

1 = No error

2 = Error

3 = Warning

4 = Error and/or warning

5 = Set speed attained

6 = Pum p on

7 = Pump accelerates

8 = Pumpe decelerates

9 = always 0

10 = always 1

11 = Remote priority active

12 = Heating

13 = Backing pump

14 = Sealing gas

15 = Pumping station 025 OpMode BKP Operation mode backing pump 0 = Continous operating

1 = Intermittend mode

2 = Delayed switch-on 026 SpdSetMode Rotation speed setting mode 0 = off

1 = on 027 GasMode Gas mode 0 = Heavy Gase

1 = Light Gase

2 = Helium 030 VentMode Venting mode 0 = Delayed venting

1 = No venting

2 = Direct venting 035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)

1 = Venting valve, normally closed

2 = Heating

3 = Backing pump

4 = Fan (temperature controlled)

5 = Sealing gas

6 = always 0

7 = always 1

8 = Power failure venting unit 036 Cfg Acc B1 Configuration accessory connection B1 0 = Fan (continous operation)

1 = Venting valve, normally closed

2 = Heating

3 = Backing pump

4 = Fan (temperature controlled)

5 = Sealing gas

6 = always 0

7 = always 1

8 = Power failure venting unit

Unit min max default 

Data type

Access

0RW 0 1 0 x

0RW 0 1 1 x

0RW 0 1 0 x

7RW 0 1 0 x

7RW 0 15 1 x

0RW 0 1 1 x

7RW 0 15 0 x

7RW 0 2 0 x

7RW 0 1 0 x

7RW 0 2 0 x

7RW 0 8 0 x

7RW 0 8 1 x

The Pfeiffer Vacuum parameter set

# Display Designation Functions

037 Cfg Acc A2 Configuration accessory connection A2 0 = Fan (continous operation)

1 = Venting valve, normally closed

2 = Heating

3 = Backing pump

4 = Fan (temperature controlled)

5 = Sealing gas

6 = always 0

7 = always 1

8 = Power failure venting unit 038 Cfg Acc B2 Configuration accessory connection B2 0 = Fan (continous operation)

1 = Venting valve, normally closed

2 = Heating

3 = Backing pump

4 = Fan (temperature controlled)

5 = Sealing gas

6 = always 0

7 = always 1

8 = Power failure venting unit 050 SealingGas Sealing gas 0 = off

1 = on 055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed

1 = Power

2 = Current

3 = always 0 V

4 = always 10 V 060 CtrlViaInt Control via interface 1 = Remote

2 = RS485

4 = PV.can

8 = Field bus

16 = E74

255 = Unlock interface selection 061 IntSelLckd Interface selection locked 0 = no

1 = yes 062 Cfg DI1 Configuration input DI1 0 = Deactivated

1 = Enable venting

2 = Heating

3 = Sealing gas

4 = Run-up time control

5 = Rotation speed setting mode

6 = Motor

Setting ≠[P:063]

063 Cfg DI2 Configuration input DI2 0 = Deactivated

1 = Enable venting

2 = Heating

3 = Sealing gas

4 = Run-up time control

5 = Rotation speed setting mode

6 = Motor

Setting ≠[P:062]

Unit min max default 

Data type

Access

7RW 0 8 3 x

7RW 0 8 2 x

0RW 0 1 0 x

7RW 0 4 0 x

7RW 1 255 1 x

0RW 0 1 0 x

7RW 0 6 1 x

7RW 0 6 2 x

Status requests

# Display Designation Functions

300 RemotePrio Remote priority 0 = no

1 = yes

302 SpdSwPtAtt Rotation speed switch point attained 0 = no

1 = yes 303 Error code Error code 4R 304 OvTempElec Excess temperature electronic drive unit 0 = no

1 = yes 305 OvTempPump Excess temperature pump 0 = no

1 = yes 306 SetSpdAtt Set rotation speed attained 0 = no

1 = yes 307 PumpAccel Pump accelerates 0 = no

1 = yes 308 SetRotSpd Set rotation speed (Hz) 1 R Hz 0 999999 309 ActualSpd Active rotation speed (Hz) 1 R Hz 0 999999 310 DrvCurrent Dr ive current 2 R A 0 9999.99 311 OpHrsPump Operating hours pump 1 R h 0 65535 x 312 Fw ve rsion Firmware version electronic drive unit 4 R 313 DrvVoltage Driv e voltage 2 R V 0 9999.99 314 OpHrsElec Operating hours electronic drive unit 1 R h 0 65535 x

Unit min max default 

Data type

Access

0R 0 1

The Pfeiffer Vacuum parameter set

# Display Designation Functions

315 Nominal Spd Nominal rotation speed (Hz) 1 R Hz 0 999999 316 DrvPower Drive power 1 R W 0 999999 319 PumpCylces Pump cycles 1 R 0 65535 x 326 TempElec Temperature electronic 1 R °C 0 999999 330 TempPmpBot Temperature pump bottom part 1 R °C 0 999999 336 AccelDecel Acceleration / Deceleration 1 R rpm/s 0 999999 342 TempBearng Temperature bearing 1 R °C 0 999999 346 TempMotor Temperature motor 1 R °C 0 999999 349 ElecName Name of electronic drive unit 4 R 354 HW Version Hardware version electronic drive unit 4 R 360 ErrHist1 Error code history, pos. 1 4 R x 361 ErrHist2 Error code history, pos. 2 4 R x 362 ErrHist3 Error code history, pos. 3 4 R x 363 ErrHist4 Error code history, pos. 4 4 R x 364 ErrHist5 Error code history, pos. 5 4 R x 365 ErrHist6 Error code history, pos. 6 4 R x 366 ErrHist7 Error code history, pos. 7 4 R x 367 ErrHist8 Error code history, pos. 8 4 R x 368 ErrHist9 Error code history, pos. 9 4 R x 369 ErrHist10 Error code history, pos. 10 4 R x 397 SetRotSpd Set rotation speed (rpm) 1 R rpm 0 999999 398 ActualSpd Actual rotation speed (rpm) 1 R rpm 0 999999 399 NominalSpd Nominal rotation speed (rpm) 1 R rpm 0 999999

Unit min max default 

Data type

Access

Set value settings

# Display Designation Functions

Unit min max default 

Data type

700 RUTimeSVal Set value run-up time 1 RW min 1 120 8 x 701 Spd SwPt 1 Rotation speed swit ch point 1 1 RW % 50 97 80 x 707 SpdSVal Set value in rot. speed setting mode 2 RW % 20 100 50 x 708 PwrSVal Set value power consumption 7 RW % 10 100

710 Swoff BKP Switching off threshold backing pump in in-

711 SwOn BKP Switching on threshold backing pump in in-

717 StdbySVal Set value rotation speed at standby 2 RW % 20 100 66.7 x 719 SpdSwPt2 Rotation speed switch point 2 1 RW % 5 97 20 x 720 VentSpd Venting rot. speed at delayed venting 7 RW % 40 98 50 x 721 VentTime Venting time at delayed venting 1 RW s 6 3600 3600 x 777 NomSpdConf Nominal rotation speed confirmation 1 RW Hz 0 1500 0 x 797 RS485Adr RS485 device address 1 RW 1 255 1 x

1. depending on the pump type

termi ttend mode

Access

1RWW 0 1000 0 x

100

6.3 Configuring the connections

The electronic drive unit is pre-configured in the factory. Thereby the turbopump is immediately operational with the necessary functions. The connections of the electronic drive unit can be configured to suit individual requirements using the parameter set.

The Pfeiffer Vacuum parameter set

Digital outputs on "X3"

Analog output on "X3"

 Configuration via parameters [P:019] and [P:024].

Option Description

0 = Rotation speed switchpoint attained active, if switchpoint attained 1 = No error active, if failure-free operation 2 = Error active, if error message is active 3 = Warning active, if warning message is active 4 = Error and / or warning active, if error and / or warning is active 5 = Set rotation speed attained active, if set rotation speed is attained 6 = Pump on active, if Pumping station and Motor is on; No Error 7 = Pump accelerates active, if Pumping station is on;

8 = Pumpe decelerates active, if Pumping station is on;

9 = always 0 GND for the control of an external device 10 = always 1 +24 VDC for the control of an external device 11 = Remote priority active active, if Remote priority is active 12 = Heating Control is equal to parameter [P:001] 13 = Backing pump Control is equal to parameter [P:010] and [P:025] 14 = Sealing gas Control is equal to parameter [P:050] 15 = Pumping station Control is equal to parameter [P:010]

Actual rotation speed < Set rotation speed

Actual rotation speed > Set rotation speed Pumping station is off;

Rotation speed > 3 Hz

 Configuration via parameter [P:055].

Option Description

0 = Rotation speed Rotation speed signal; 0 - 10 VDC = 0 - 100 % x f 1 = Power Power sign al; 0 - 10 VDC = 0 - 100 % x P 2 = Current Current signal; 0 - 10 VDC = 0 - 100 % x I 3 = always 0 V always GND 4 = always 10 V output of continously 10 V DC

max

Nomina l

max

Accessory connection  Configuration via parameters [P:035] or [P:036].

The standard version electronic drive unit TC 110 only can control two accessory ports via connection cable. Therefore the parameters [P:037] and [P:038] are ineffective.

Option Description

0 = Fan (continous operation) Control via parameter Pumping station 1 = Venting valve, normally closed Control via parameter Enable venting, when using a

venting valve which is normally closed.

2 = Heating Control via parameters Heating and Rotation speed

switchpont attained

3 = Backing pump Control via parameters Pumping station and operation

mode backing pump

4 = Fan (temperature controlled) Control via parameter Pumping station and temperature

5 = Sealing gas Control via parameters Pumping station and Sealing gas 6 = always 0 GND for the control of an external device 7 = always 1 +24 VDC for the control of an external device 8 = Power failure venting unit Control via parameter Enable venting, when using a

thresholds

power failure venting unit.

The Pfeiffer Vacuum parameter set

Control via interface  Configuration via parameters [P:060] and [P:061].

Option [P:060] Description

1 = remote Operation via connection "remote" 2 = RS485 Operation via connection "RS485" 4 = PV.can For service purposes only 8 = Field bus Operation via field bus 16 = E74 Operation via connection "E74"

Option [P:061] Description

0 = no Interface selection via [P:060] 1 = yes Interfaces selection locked

Digital inputs on "X3"  Configuration via parameters [P:062] and [P:063].

Option Description

0 = deaktiviert Connection deactivated 1 = Enable venting Control is equal to parameter [P:012] 2 = Heating Control is equal to parameter [P:001] 3 = Sealing gas Control is equal to parameter [P:050] 4 = Run-up time control Control is equal to parameter [P:004] 5 = Rotation speed setting mode Control is equal to parameter [P:026] 6 = Motor Control is equal to parameter [P:023]

6.4 Operation with the Pfeiffer Vacuum parameter set

Factory settings The electronic drive unit is pre-programmed in the factory. This guarantees proper,

reliable turbopump operation without the need for additional configuration.

Checking the adjustments

Gas type dependent operations

 Before operating with parameters, check set values and control commands for

their suitability for the pumping process.

Friction causes the rotor to heat up severely under gas load and high rotation speed. To avoid overheating, the electronic drive unit has implemented power-rotation speed-characteristics, whereby the pump can be operated at every rotation speed with the maximum allowable gas load without danger of damage. The maximum power consumption depends on the gas type. Three characteristics are available in order to completely exhaust the pump's capacity for each gas type.

CAUTION

Danger of the pump being destroyed

Pumping of gases with a higher molecular mass in the wrong gas mode can lead to destruction of the pump.

 Ensure the gas mode is correctly set.  Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).

• Gas mode "0" for gases with the molecular mass >39, e.g. Ar.

• Gas mode "1" for gases with the molecular mass ≤ 39.

• Gas mode "2" for helium.

• Power characteristics according to the technical data of the turbopump.

 Check and set-up the gas mode via [P:027].

The Pfeiffer Vacuum parameter set

max

Run-up

[P:708]

Power

C-D = gas mode "0" A-B = gas mode "1"

E-F = gas mode "2"

Rotation speed

Fig. 5: Principle of power characteristics lines for gas type dependent operations,

e.g. gas mode = 0

The turbopump runs up with maximum power consumption. When the nominal and/or set rotation speed is reached, the pump automatically switches over to the chosen power characteristic of the selected gas mode. Increasing gas load is initially compensated by a rise in power consumption in order to keep the rotation speed constant. Increasing gas friction, however, causes the turbopump to heat up more severely. When the gastype-dependent maximum power is exceeded, the rotation speed of the turbopump is reduced until an equilibrium between permissible power and gas friction is attained.

 To avoid rotation speed fluctuations, Pfeiffer Vacuum recommends setting a

somewhat lower frequency in rotation speed setting mode.

Set value power consumption

 Adjust the parameter [P:708] to the desired value in %.

If adjusting the set value power consumption below 100 % the run-up time prolongs. To avoid error messages, the parameter [P:700] RUTimeSVal should be adjusted accordingly.

Run-up time The run-up of the turbopump is time-monitored ex factory. There are various caus-

es of prolonged run-up times, e.g.:

• Too high gas loads

• Leakage in the system

• The set value run-up time is too low

 Eliminate any external and application-related causes.  Adjust the run-up time via parameter [P:700].

Adjusting the rotation speed switchpoint

The rotation speed switch point can be used for the message "Pump operational for the process". Overrunning or underrunning the active rotation speed switch point activates or deactivates a signal at the pre-configured output on the electronic drive unit and at the status parameter [P:302].

Rotation speed switchpoint 1

 Adjust the parameter [P:701] to the desired value in %.  Parameter [P:017] = 0

Signal output and status parameter [P:302] are based on the set value for rotation speed switch point 1 [P:701].

The Pfeiffer Vacuum parameter set

Process

(%)

[P:010]

[P:302]

[P:701]

[P:017] = 0

Process

(%)

[P:010]

[P:302]

[P:701] [P:719]

[P:017] = 1

Process

(%)

[P:010]

[P:302]

[P:719] [P:701]

[P:017] = 1

Fig. 6: Example for the configuration rotation speed switch point 1 active

Rotation speed switchpoint 1 & 2

 Adjust the parameter [P:701] to the desired value in %.  Adjust the parameter [P:719] to the desired value in %.  Parameter [P:017] = 1

When the pumping station [P:010] is switched on, the rotation speed switch point 1 is the signal generator. When the pumping station is switched off, signal output and status query are based on the rotation speed switch point 2. The signal output is governed by the hysteresis between the two switch points.

Fig. 7: Example for the configuration rotation speed switch point 1+2 active; [P:701] > [P:719]

Fig. 8: Example for the configuration rotation speed switch points 1+2 active; [P:701] < [P:719]

The Pfeiffer Vacuum parameter set

Rotation speed setting mode

The rotation speed setting mode reduces the rotation speed and hence the throughput of the turbopump. The pumping speed of the turbopump changes proportional to rotation speed. Standby mode is ineffective during rotation speed setting mode. The set rotation speed is adjusted by the set value in rotation speed setting mode [P:707]. The rotation speed switch point varies with the set rotation speed. Underrunning or overrunning the set value in rotation speed setting mode activates and deactivates the status signal [P:306] SetSpdAtt respectively.

 Adjust the parameter [P:707] to the desired value in %.  Parameter [P:026] = 1  Read the parameters [P:308]/[P:397].

Standby Pfeiffer Vacuum recommends standby mode for the turbopump during process

and production stops. When standby mode is active, the electronic drive unit reduces the rotation speed of the turbopump. The factory setting for the set value in standby mode is 66.7 % of the nominal rotation speed. Underrunning or overrunning the set speed in standby mode activates or deactivates the status signal [P:306] SetSpdAtt.

 Adjust the parameter [P:717] to the desired value in %.  Parameter [P:002] = 1  Read the parameters [P:308]/[P:397].

Rotation speed set value

The typical nominal rotation speed of a turbopump is factory-set in the electronic drive unit. If the electronic drive unit is replaced or a different pump type is used, the reference set value of the nominal rotation speed must be confirmed. This procedure is part of a redundant safety system for avoiding excess rotation speeds.

Operation mode backing pump

HiPace Nominal rotation speed confirmation [P:777]

10 / 60 / 80 1500 Hz 300 1000 Hz

 Adjust the parameter [P:777] according to the pump type.

Once the nominal rotation speed is attained, the pump will run idle unless additional gas loads are entered. Depending on process or application requirements, the nominal rotation speed can be reduced in rotation speed setting mode or standby mode.

Operation of a connected backing pump via the electronic drive unit depends on the backing pump type.

Operation mode [P:025] recommended backing pump

"0" continous operation all kinds of backing pumps "1" Intermittend operation diaphragm pumps only "2" Delayed switching on all kinds of backing pumps

 Adjust the parameter [P:025] to the desired value.

Continous operation

With "pumping station on", the electronic drive unit sends a signal to the configured accessory connection to switch on the backing pump. This signal can also be used for controlling a fore-vacuum safety valve.

Intermittend operation (diaphragm pumps only)

Intermittend operation can extend the life expectancy of the membrane of a connected diaphragm pump. Either a diaphragm pump with built-in semiconductor relay or an interconnected relay box with semiconductor relay is required for intermittend operation. The backing pump is switched on and off in dependence of the turbopump's power consumption. A relation to the supplied fore-vacuum pressure is derived from the power consumption. The switching off and switching on thresh-

The Pfeiffer Vacuum parameter set

olds for the backing pump are adjustable. Fluctuations in the power consumption of idling turbopumps and type-dependent varying fore-vacuum pressures of the backing pumps require the switching thresholds to be set separately for the intermittend mode.

Pfeiffer Vacuum recommends the intermittend mode between 5 and 10 mbar. A pressure gauge and a dosing valve are required to set the switching thresholds.

 Switch on the vacuum system via the function "pumping station" and await the

run-up.

 Generate a fore-vacuum pressure of 10 mbar by gas inlet via dosing valve.  Read and note the parameter [P:316].  Adjust the switch on threshold backing pump via parameter [P:711] to the deter-

mined drive power for a fore-vacuum pressure of 10 mbar.

 Reduce the fore-vacuum pressure to 5 mbar.  Read and note the parameter [P:316].  Adjust the switch off threshold backing pump via parameter [P:710] to the deter-

mined drive power for a fore-vacuum pressure of 5 mbar.

Delayed switching on

Switching on the turbopump and the backing pump at the same time can result in unwanted gas flows. Depending on process or application requirements, the backing pump can be switched on with a delay. The switch-on delay depends on the rotation speed of the turbopump and is fixed in the electronic drive unit at 6 Hz.

The switch-on delay signal can also be used for switching a fore-vacuum safety valve.

Switching on the pumping station

Switching off the pumping station

Operation with accessories

The function "pumping station" comprises turbopump operation with control of all connected accessories (e.g. backing pump).

 Switch on the supply voltage with switch S1 on the power supply.  Parameter [P:023] = 1 (default)  Parameter [P:010] = 1

Ongoing (and removed) error messages are reset. After a successfully completed self-test, the electronic drive unit sets the turbopump motor and all connected accessories into operation depending on their configuration.

When the pumping station is activated, the motor of the turbopump can be switched off and on via the function [P:023].

 Parameter [P:010] = 0

The electronic drive unit switches off the turbopump and activates preset accessory options (e.g. venting).

 Wait for the complete standstill of the pump.  Cut off the supply voltage with switch S1 on the power supply.

Depending on the configuration, various accessories can be connected to the turbopump and controlled via parameter of the electronic drive unit.

Heating

 Switch on or off the heating via parameter [P:001].

The activation of a connected casing heating depends on rotation speed switch point 1 (factory setting: 80 % x f

Nominal

The Pfeiffer Vacuum parameter set

Fan

Two options in the connection configuration enable continuous or temperature controlled operation of a connected air cooling unit (see p. 15, chap. 6.3). Threshold values are type-specific and are anchored in the electronic drive unit.

Sealing gas valve

 Switch on or off a sealing gas valve which is connected to a pre-configured out-

put via parameter [P:050].

Vent modes The turbopump can be vented only after the function "pumping station" has been

switched off. Signals are sent to configured outputs with a fixed delay of 6 s. There are three options for operation with a venting valve connected.

 Enable venting via parameter [P:012].  Select the venting mode via parameter [P:030].

Delayed venting

Start and venting time after "pumping station off" are configurable and depend on the rotation speed of the turbopump.

 Parameter [P:030] = 0  Adjust the venting rotation speed in % of the nominal rotation speed via param-

eter [P:720].

 Adjust the venting time in s via parameter [P:721].

Monitoring the thermal load

If the venting rotation speed is underrun, the venting valve will open for the set venting time. In the event of a power failure, venting will occur if the set venting rotation speed is underrun. In this case, the venting period depends on the residual energy delivered by the moving rotor. When power is restored, the venting process is interrupted.

No venting

No venting is performed during this operation mode.

 Parameter [P:030] = 1

Direct venting

Start and venting time are not configurable. Venting starts with a delay of 6 s after "pumping station off". When the function "pumping station" is switched on renewed, the venting valve closes automatically. In the event of a power failure, venting will occur if an anchored type-specific rotation speed is underrun. When power is restored, the venting process is interrupted.

 Parameter [P:030] = 2

If threshold values are overrun, output signals from temperature sensors allow the pump to be brought to a safe condition. Depending on pump type, temperature threshold values for warnings and error messages are saved fixed in the electronic drive unit . For information purposes, various status queries are prepared in the parameter set.

Pfeiffer Vacuum Protocol for "RS485"

7 Pfeiffer Vacuum Protocol for "RS485"

7.1 Telegram frame

The telegram frame of the Pfeiffer Vacuum protocol contains only ASCII code characters [32; 127], the exception being the end character of the message a master  (e.g. a PC) sends a telegram, which is answered by a slave  (e.g. electronic drive unit).

a2 a1 a0 * 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0

a2 - a0 Unit address for slave 

– Individual address of the unit ["001";"255"] – Group address "9xx" for all identical units (no response)

– global address "000" for all units on the bus (no response) *Action (siehe S. 23, Kap. 7.2) n2 - n0 Pfeiffer Vacuum parameter numbers l1 - l0 Data length dn ... d0 dn - d0 Data in data type concerned (siehe S. 24, Kap. 7.3) c2 - c0 Checksum (sum of ASCII values of cells a2 to d0) modulo 256 C

carriage return (ASCII 13)

. Basically,

7. 2 Te l e g r a m s

Data request ?

a2a1a000n2n1n002=?c2c1c0

Control command !

a2 a1 a0 1 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0

Data response / control command understood 

a2 a1 a0 1 0 n2 n1 n0 l1 l0 dn ... d0 c2 c1 c0

Error message 

a2 a1 a0 1 0 n2 n1 n0 0 6 N O _ D E F c2 c1 c0

"NO_DEF" The parameter n2 - n0 does not exist "_RANGE" Data dn - d0 are outside the permitted range "_LOGIC" Logic access violation

Example 1 Data request

Actual rotation speed (parameter [P:309], device address slave: "123")

? 1230030902=?112

ASCII 49505148485148574850616349495013

_ R ANGE

_ L OGI C

Data request: 633 Hz

Actual rotation speed (parameter [P:309], device address slave: "123")

 1231030906000633037

ASCII 4950514948514857485448484854515148515513

Pfeiffer Vacuum Protocol for "RS485"

Example 2 Control command

Switch on pumping station (parameter [P:010], device address slave: "042")

! 0421001006111111020

ASCII 4852504948484948485449494949494948504813

Control command understood

Switch on pumping station (parameter [P:010], device address slave: "042")

! 0421001006111111020

ASCII 4852504948484948485449494949494948504813

7.3 Applied data types

Data type Description Size l1 - l0 Example

0 False / true 06 000000 / 111111 1 Positive integer number 06 000000 to 999999 2 Positive fixed comma number 06 0 01571 equal to 15,71 4 Symbol chain 06 TC_400 7 Positive integer number 03 000 to 999 11 Symbol chain 16 BrezelBier&Wurst

8 Malfunctions

8.1 General

Turbopump and electronic drive unit malfunctions always result in a warning or error message. In both cases, the electronic drive unit outputs an error code. Operating messages are generally displayed via the LEDs on the electronic drive unit. If an error occurs, the turbopump and connected devices will be switched off. The selected venting mode will be triggered after the preset delay.

Automatic start-up after error acknowledgement

The function "pumping station" of the electronic drive unit will remain active after a power failure or if errors occur that lead to shut down the pump or the system. The turbopump will automatically run-up once the error has been rectified and acknowledged.

 Switch off the function "pumping status" if necessary.  Take suitable safety measures to prevent the high vacuum flange from meshing

when the turbopump is running.

8.2 Operating mode display via LED

LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump. A differentiated malfunction and warning display is possible only for operation with DCU or HPU.

Malfunctions

WARNIN G

LED Symbol Steady OFF Flashing

(1/12 s active)

Green insufficient

power supply

Yellow no warning Warning

Red no malfunc-

tion

Pumping station "OFF"

Rotation speed ≤ 1Hz

Blinking

(1/2 s active)

Pumping station "OFF" Rotation speed > 1 Hz

Steady ON

Pumping station "ON"

Malfunction

8.3 Error codes

Error code

Err001 Excess rotation speed  Contact Pfeiffer Vacuum Service

Err002 Overvoltage – Wrong mains pack used  Check type of mains pack

Err006 Run-up time error – Run-up time too short

Err007 Operating fluid deficiency – Operating fluid deficiency  Check operating fluid

Err008 Connection electronic drive unit -

Err010 Internal device fault  Contact Pfeiffer Vacuum Service

Err021 Electronic drive unit does not recog-

Err043 Internal configuration fault  Contact Pfeiffer Vacuum Service Err044 Excess temperature electronic – Cooling deficient  Optimize cooling

Problem Possible cause Remedy

 Reset at rotation speed f = 0 only

 Check mains pack voltage  Adjust run-up time to process

 Check the vacuum chamber for leaks or

closed valves

 Adjust rotation speed switch point

 Reset at rotation speed f = 0 only

 Reset at rotation speed f = 0 only  Contact Pfeiffer Vacuum Service

 Reset at rotation speed f = 0 only

 Check the ambient conditions

pump faulty

nizes pump

– Gas flow in the vacuum chamber

caused by leakage or open valves

– Rotation speed switchpoint is under-

run after run-up time is expired

– Connection to the pump is faulty  Check the connection

Malfunctions

Error

Problem Possible cause Remedy

code

Err045 Excess temperature motor – Cooling deficient  Optimize cooling

Err046 Internal initialization fault  Contact Pfeiffer Vacuum Service Err091 Internal device fault  Contact Pfeiffer Vacuum Service Err092 Unknown connection panel  Contact Pfeiffer Vacuum Service Err093 Temperature analysis motor faulty  Contact Pfeiffer Vacuum Service Err094 Temperature analysis electronic

faulty

Err098 Internal communication fault  Contact Pfeiffer Vacuum Service Err107 Collective fault power stage  Contact Pfeiffer Vacuum Service

Err108 Rotation speed measurement faulty  Contact Pfeiffer Vacuum Service

Err109 Firmware not confirmed  Contact Pfeiffer Vacuum Service Err110 Operating fluid analysis faulty  Contact Pfeiffer Vacuum Service

Err111 Communication fault operating fluid

pump

Err112 Collective fault operating fluid fault  Contact Pfeiffer Vacuum Service

Err113 Rotor temperature invalid – Measurement not calibrated  Contact Pfeiffer Vacuum Service Err114 Temperature analysis power stage

faulty

Err117 Excess temperature pump bottom

part

Err118 Excess temperature power stage – Cooling deficient  Optimize cooling

Err119 Excess temperature bearing – Cooling deficient  Optimize cooling

Err143 Excess temperature operating fluid

pump

Err777 Nominal rotation speed not con-

firmed

Wrn007 Low voltage / mains power failure – Mains failure  Check mains supply Wrn018 Remote priority conflict – Pumping station is switched on via

Wrn045 High temperature motor – Cooling deficient  Optimize cooling

Wrn076 High temperature electronic – Cooling deficient  Optimize cooling

Wrn097 Pump information invalid – Pump data faulty  Reset for default values Wrn098 Pump information incomplete – Connection to the pump is faulty  Contact Pfeiffer Vacuum Service Wrn113 Rotor temperature inaccurate – Measurement not calibrated  Contact Pfeiffer Vacuum Service Wrn115 Temperature analysis pump bottm

part faulty

Wrn116 Temperature analysis bearing faulty  Contact Pfeiffer Vacuum Service Wrn117 High temperature pump bottom part – Cooling deficient  Optimize cooling

Wrn118 High temperature power stage – Cooling deficient  Optimize cooling

Wrn119 High temperature bearing – Cooling deficient  Optimize cooling

Wrn143 High temperature operating fluid

pump

Wrn168 High deceleration – Rate of pressure rise too high; Venting

– Cooling deficient  Optimize cooling

– Nominal rotation speed not con-

firmed after replacement of the electronic drive unit

[P:010]

, whereas the E74-input "start/

stop" is off (opened)

– Cooling deficient  Optimize cooling

rate to high

 Check the ambient conditions

 Contact Pfeiffer Vacuum Service

 Reset at rotation speed f = 0 only

 Reset at rotation speed f = 0 only  Contact Pfeiffer Vacuum Service

 Reset at rotation speed f = 0 only

 Contact Pfeiffer Vacuum Service

 Check the ambient conditions

 Check the ambient conditions  Reset at rotation speed f = 0 only

 Confirm the nominal rotation speed via

[P:777]

 Reset at rotation speed f = 0 only

 Switch on the pumping station via E74  Switch off [P:010]

 Check the ambient conditions

 Contact Pfeiffer Vacuum Service

 Check the ambient conditions

 Check and optimize the venting rate

(pump specific)

9 Accessories

Accessories

An overview about original Pfeiffer Vacuum accessories for the designated device can be found in the operating instructions of the respective vacuum pump.

Declaration of conformity

according to the EC directive:

• Electromagnetic Compatibility 2004/108/EC

• Low Voltage 2006/95/EEC

We hereby certify, that the product specified below is in accordance with the provision of EU Electromagnetic Compatibility Directive 2004/108/EEC and EU Low Voltage Directive 2006/95/EEC.

TC 110

Guidelines, harmonised standards and national standards and specifications which have been applied:

Signatures:

(M.Bender) Managing Director

DIN EN 61000-3-2 : 2008

DIN EN 61000-3-3 : 2006

DIN EN 61010-1 : 2002

DIN EN 61326-1 : 2006

DIN EN 62061 : 2005

Semi F47-020 0

(Dr. M. Wiemer) Managing Director

Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany

CE/2009

Leading. Dependable. Customer Friendly

Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide. For German engineering art, competent advice and reliable services.

Ever since the invention of the turbopump, we´ve been setting standards in our industry. And this claim to leadership will continue to drive us in the future.

You are looking for a perfect vacuum solution? Please contact us:

Germany

Pfeiffer Vacuum GmbH Headquarters Tel.: +49 (0) 6441 802-0 info@pfeiffer-vacuum.de

Benelux

Pfeiffer Vacuum GmbH Sales & Service Benelux Tel.: +800-pfeiffer benelux@pfeiffer-vacuum.de

China

Pfeiffer Vacuum (Shanghai) Co., Ltd. Tel.: +86 21 3393 3940 info@pfeiffer-vacuum.cn

France

Pfeiffer Vacuum France SAS Tel.: +33 169 30 92 82 info@pfeiffer-vacuum.fr

Great Britain

Pfeiffer Vacuum Ltd. Tel.: +44 1908 500600 sales@pfeiffer-vacuum.co.uk

India

Pfeiffer Vacuum India Ltd. Tel.: +91 40 2775 0014 pfeiffer@vsnl.net

Italy

Pfeiffer Vacuum Italia S.p.A. Tel.: +39 02 93 99 05 1 contact@pfeiffer-vacuum.it

Korea

Pfeiffer Vacuum Korea Ltd. Tel.: +82 31 266 0741 sales@pfeiffer-vacuum.co.kr

Austria

Pfeiffer Vacuum Austria GmbH Tel.: +43 1 894 17 04 office@pfeiffer-vacuum.at

Sweden

Pfeiffer Vacuum Scandinavia AB Tel.: +46 8 590 748 10 sales@pfeiffer-vacuum.se

Switzerland

Pfeiffer Vacuum (Schweiz) AG Tel.: +41 44 444 22 55 info@pfeiffer-vacuum.ch

United States

Pfeiffer Vacuum Inc. Tel.: +1 603 578 6500 contact@pfeiffer-vacuum.com

www.pfeiffer-vacuum.net

Pfeiffer Vacuum TC 110 Operating Instruction

Specifications and Main Features

Frequently Asked Questions

User Manual

1 About this manual

1.1 Validity

1.2 Conventions

2Safety

2.1 Safety precautions

2.2 Proper use

2.3 Improper use

3 Product description

3.1 Product identification

3.2 Range of application

3.3 Function

3.4 General connection description

4 Connections diagram

5 Connection "X3"

5.1 Pin assignment

5.2 Operation via "X3" connection

6 The Pfeiffer Vacuum parameter set

6.1 General

6.2 Parameter overview

6.3 Configuring the connections

6.4 Operation with the Pfeiffer Vacuum parameter set

7 Pfeiffer Vacuum Protocol for "RS485"

7.1 Telegram frame

7. 2 Te l e g r a m s

7.3 Applied data types

8 Malfunctions

8.1 General

8.2 Operating mode display via LED

8.3 Error codes

9 Accessories

Declaration of conformity