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Pfeiffer Vacuum
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QualyTest HLT 2 Series

Pfeiffer Vacuum QualyTest HLT 260, QualyTest HLT 2 Series, QualyTest Select HLT 265, QualyTest Dry+ HLT 275, QualyTest Dry HLT 270 Maintenance Instructions Manual

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Maintenance Instructions
QualyTest™ HLT 2xx
VACUUM
M
U
U
C
A
V
BG 805 457 BE / C (0204) HLT 2xx 1
Table of contents Page
1 Important information...............................................................................................4
1.1 Validity.........................................................................................................................4
1.2 Content of these maintenance instructions.................................................................4
1.3 Safety information.......................................................................................................4
1.4 General information ....................................................................................................5
1.5 List of documents........................................................................................................5
2 Design and functional description ..........................................................................6
2.1 System overview.........................................................................................................6
2.1.1 Block diagram .............................................................................................................7
2.1.2 Power inlet and ground connection.............................................................................8
2.2 Pump system ..............................................................................................................9
2.2.1 Roughing pump.........................................................................................................10
2.2.2 TMH 071 turbopump TC 600 drive electronics .........................................................11
2.2.3 Vacuum measurement..............................................................................................12
2.2.4 Valve block................................................................................................................13
2.3 Sniffer line LP 5xx.....................................................................................................14
2.4 Analytical system ......................................................................................................15
2.4.1 Detection system.......................................................................................................15
2.4.2 Mass spectrometer supply MSV ...............................................................................16
2.4.3 Electrometer pre-amplifier EVV.................................................................................17
2.5 Electronics.................................................................................................................18
2.5.1 MC 68 Control board.................................................................................................18
2.5.2 I/O board...................................................................................................................19
2.5.3 Wiring board..............................................................................................................20
2.5.4 Fuses........................................................................................................................21
3 HLT 2xx Maintenance and Service ........................................................................22
3.1 Maintenance and service schedule...........................................................................22
3.2 Maintenance kits.......................................................................................................25
4 Maintenance Work ..................................................................................................27
4.1 General.....................................................................................................................27
4.2 UNO 005A.................................................................................................................28
4.2.1 Check oil level and replenish ....................................................................................28
4.2.2 UNO 005A, oil change ..............................................................................................28
4.3 Oil mist filter ..............................................................................................................30
4.3.1 Check the oil mist filter, drain it and clean the oil pan...............................................30
4.3.2 Replace filter to oil mist filter.....................................................................................30
4.4 MVP 035...................................................................................................................32
4.4.1 MVP 035, replace the diaphragm..............................................................................32
4.5 Scroll pump...............................................................................................................33
4.5.1 Varian Triscroll TS600...............................................................................................33
Page
4.6 TMH 071................................................................................................................... 34
4.6.1 Replace the lubricant reservoir.................................................................................34
4.6.2 TMH 071, exchange for bearing change...................................................................35
4.7 Valve block ............................................................................................................... 36
4.7.1 Clean or replace the screwed fitting with filter on the vent connection .....................36
4.7.2 Clean the Pirani measuring elements P1 and/or P2................................................. 37
4.7.3 Clean the valve block, replace the seals and revise the valves................................37
4.8 Ventilator 1................................................................................................................ 37
4.8.1 Clean / replace the filter mat.....................................................................................37
4.9 LP 5xx.......................................................................................................................37
4.9.1 Replace capillary filter............................................................................................... 37
4.10 Checking the Maintenance Work.............................................................................. 38
4.10.1 Weekly Maintenance Work....................................................................................... 38
4.10.2 Quarterly Maintenance Work.................................................................................... 38
4.10.3 Semiannual Maintenance Work................................................................................38
4.10.4 Annual Maintenance Work........................................................................................ 39
4.10.5 Biannual Maintenance Work.....................................................................................39
Contamination Declaration................................................................................................. 40
BG 805 457 BE / C (0204) HLT 2xx 3
1 IMPORTANT INFORMATION
Maintenance on the HLT 2xx may only be performed by persons who have been authorized by PFEIFFER VACUUM for this purpose.
Authorized persons:
Repair level I Repair level II
Repair level III
1)
1)
Customer Customer with technical education or PFEIFFER VACUUM Service Engineer
1)
Customer with PFEIFFER VACUUM Service training2) or PFEIFFER VACUUM Service Engineer
1)
→ see maintenance schedule (page 22 - 23)
2)
→ PFEIFFER VACUUM offers courses to rapair level II and III.
1.1 Validity
This document applies to products with part numbers:
Type Part number Voltage Roughing pump
HLT 260, QualyTest HLT 260, QualyTest HLT 260, QualyTest HLT 260, QualyTest HLT 260, QualyTest HLT 265, QualyTestTM Select BG Z08 020 100 – 230 V~ extern
TM TM TM TM TM
BG Z08 000 230 V~ UNO 005A BG Z08 001 120 V~ UNO 005A BG Z08 002 100 V~ UNO 005A BG Z08 050 230 V~ UNO 005A; without RC BG Z08 060 120 V~ UNO 005A; without RC
HLT 270, QualyTestTM Dry BG Z08 010 230 V~ MVP 035 HLT 270, QualyTestTM Dry BG Z08 011 120 V~ MVP 035 HLT 270, QualyTestTM Dry BG Z08 012 100 V~ MVP 035 HLT 275, QualyTestTM Dry+ BG Z08 015 230 V~ Scroll pump HLT 275, QualyTestTM Dry+ BG Z08 016 100 - 120 V~ Scroll pump
The part number can be taken from the product name plate. The described functions, illustrations and data are given with the understanding that they are
subject to change without notice.
1.2 Content of these maintenance instructions
The present maintenance instructions describe the periodic maintenance to be performed on the HLT 2xx.
For information on the operation of the equipment, a description of the equipment and the technical specifications please refer to the separate user’s guide.
1.3 Safety information
Basic safety information
• When handling process gases please follow the applicable regulations and protective measures.
• Although helium is an inert gas it can cause asphyxiation in high concentrations.
• The test object and the gas fittings must be able to withstand the applied pressure gradient.
• Products returned to PFEIFFER VACUUM for service or repair should, if possible, be free of harmful substances (e.g. radioactive, toxic, caustic or microbiological). Otherwise, the type of contamination must be declared. (A copy of the "Declaration of Contamination" can be found on page 39. Additional forms can be obtained from your nearest PFEIFFER VACUUM service center.)
• The line filter, the power supply unit, the wiring board and the roughing pump have parts that are on voltages higher than 50 V. For this reason the power plug must always be disconnected before the HLT 2xx is opened for service work.
Explanations of pictograms
NOTE:
Information on correct handling or use.
CAUTION:
Information on preventing extensive equipment and environmental damage.
DANGER:
Information on preventing bodily injury or extensive property damage.
Vacuum area:
Always wear clean, lint-free gloves and use clean tools when working in this area.
1.4 General information
• Electrical components (circuit boards, EPROMs, electrical connections) are sensitive to
electrostatic discharge and appropriate precautions must be taken. In particular the circuit boards and EPROMs must be stored in antistatic packing material.
• Failure to take appropriate precautions can void the warranty.
• PFEIFFER VACUUM declines any liability and the warranty becomes null and void if the
product is modified or operated with accessories that are not listed in the corresponding product documentation.
1.5 List of documents
BG 805 263 BE User’s guide HLT 2xx BG 805 457 BE Maintenance instructions HLT 2xx PK 800 152 BN User’s guide UNO 005A PJ 11400 User’s guide MVP 035 PM 800 504 BN User’s guide TMH 071 BG 805 268 BD User’s guide LP 5xx 6999-04-250 User’s guide, Scroll pump Triscroll TS600
BG 805 457 BE / C (0204) HLT 2xx 5
2 DESI GN AND FUNCTIONAL DESCRIPTION
The HLT 2xx is a microprocessor controlled leak detector that is equipped with the most advanced electronic and electromechanical components. All processes within the instrument are controlled automatically.
2.1 System overview
Oil mist filter (only HLT 260) Ölnebelfilter (nur HLT 260)
Ventilator 2 Lüfter 2
Test port Testanschluss
Test leak Testleck
V4 V5
Valve block Ventilblock
TMH 071 V2
V1
Ventilator 1 Lüfter 1
EVV
Mass spectrometer Massenspektrometer
RC 260
UNO 005A or / oder MVP 035
I/O Board MC 68 MSV
Wiring board Verdrahtungsebene
Fig. 2 HLT 2xx
2.1.1 Block diagram
Fig. 3 HLT 2xx Block diagram
BG 805 457 BE / C (0204) HLT 2xx 7
2.1.2 Power inlet and ground connection
(on the wiring board)
Fig. 4 Power inlet and ground connection
2.2 Pump system
The pump system consists of a roughing pump, a turbo pump, a helium detector and a valve block that established most connections between the helium detector and the test port. The layout of the pump system is schematically shown in Fig. 5.
Test port
Testanschluss
P2
Helium­Sensor
Pressure test connection Druck Testanschluss
Turbo pump Turbopumpe
P1
Pressure fore vacuum
Druck Vorvakuum
V4
V3
V1
V5
Test leak Testleck
V6
Vent or LP connection Belüftungs oder LP Anschluss
V2
Backing pump Vorvakuumpumpe
Backing pum p option al Vorvakuumpumpe optional
Fig. 5 Pump system HLT 2xx The test object can be connected to the test port with a KF 25 flange. Valves V1, V2, V3 and
V4 establish the vacuum connection between the test object and the helium detector in such a way that no operating state is created that is detrimental to the helium detector.
For calibrating the HLT 2xx a calibrated leak can be connected via valve V5. Valve V6 is normally used for venting so that the test object can be removed from the test
port after the test has been completed. However, it can also be used as a sniffer probe connection.
BG 805 457 BE / C (0204) HLT 2xx 9
2.2.1 Roughing pump
a) HLT 260: UNO 005A (→ Fig. 6) Single-stage, oil-immersed rotary vane vacuum pump with a nominal volume flow rate of
3
4 m
/h at 50 Hz and 5 m3/h at 60 Hz.
Oil filler
Öleinlass
Gas ballast valve
Gasballastventil
Oil level sight glas
Ölstandsschauglas
Oil drain
Ölablass
Fig. 6 UNO 005A b) HLT 270: MVP 035 (→ Fig. 7)
Two-stage diaphragm vacuum pump for absolutely oil-free pumping of gases with a volume flow rate of 1.3 m3/h at 50 Hz and 1.5 m3/h at 60 Hz.
Fig. 7 MVP 035
c) HLT 265: External roughing pump An external roughing pump can be connected to the HLT 265 via the KF 16 flange. If objects
with a large volume need to be tested an additional roughing pump to the HLT 260 and HLT 270 can also be connected to the flange.
d) HLT 275: External scroll pump Oil-free, 2-stage scroll pump with a nominal volume flow rate of 25 m3/h at 50 Hz and
3
30 m
/h at 60 Hz,
2.2.2 TMH 071 turbopump TC 600 drive electronics
to the sensor zum Sensor
T
C
6
0
0
R
S
4
8
5
R
E
M
O
T
E
H
E
A
T
/
T
M
S
V
E
N
T
F
O
R
E
P
U
M
P
F
A
N
Fig. 8 TMH 071 with TC 600
to the valve block zum Ventilblock
BG 805 457 BE / C (0204) HLT 2xx 11
2.2.3 Vacuum measurement
Pirani measuring elements P1 and P2 P1 measures the fore vacuum pressure in the turbomolecular pump. P2 measures the pressure on the test port.
to the valve block zum Ventilblock
Pirani measuring elements Pirani-Messelemente
P2
Fig. 9 Vacuum measurement
P1
Holder Halter
2.2.4 Valve block
Testport
Testanschluss
to fore vacuum pump zur Vorvakuumpumpe
Vent connection
Belüftungsanschluss
V4
V6
V2
V6
V4
V3
V1
V3
P1P2
Srewing flange (ordering No. PM 043 687) to optionally fore vacuum pump Einschraubflansch (Bestell Nr. PM 043 687) zur optionalen Vorvakuumpumpe
Test leak Testleck
V5
V2
V1
Fig.10 Valve block Solenoid valves V1 to V6.
Depending on their function the valves have different nominal diameters and opening forces. V2 and V6 are concepted for 0.0 to 1.1 bar (open against atmosphere). V1, V3, V4, V5 are conceted for 0.0 to 0.5 bar.
All valves open electromagnetically and close by spring force. They are controlled with 24 V=.
The tightness of the valves toward the atmospheric side is < 10-9 mbar l/s. The tightness at the valve piston is normally < 10-6 mbar l/s, but can be impaired by contamination without affecting normal operation of the HLT 2xx.
BG 805 457 BE / C (0204) HLT 2xx 13
2.3 Sniffer line LP 5xx
(→ User’s guide BG 805 268 BN)
(3 m / 5 m / 10 m)
TP 312 TP 312
Tip 120 mm stiff BG 449 215 -T Spitze 120 mm steif BG 449 215 -T
Sinter filter Sinterfilter
TF 312 TF 312
Tip 120 mm flexible BG 449 217 -T Spitze 120 mm flex BG 449 217 -T
Sniffer line Schnüffelsonde
(120)
(120)
(218)
Handle Handgriff
TP 385 Tip TP 385
Spitze 385 mm steif BG 449 216 -T
Sinter filter Sinterfilter
TF 385 TF 385
Tip 385 mm flexible BG 449 218 -T Spitze 385 mm flex BG 449 218 -T
(120 / 385)
Capillary filter
standa rd: plastic option: metal
Sniffer tip Schnüffelspitze
Kapillarfilter
Standard: Kun ststoff Option: Metall
385 mm stiff BG 449 216 -T
(385)
(385)
Sinter filter Sinterfilter
Sinter filter Sinterfilter
Fig. 2–11 Sniffer line with sniffer probe
Type Ordering No. Sniffer line length Sniffer probe TP 312 LP 503 LP 505 LP 510
BG 449 207 -T 3 meters 120 mm stiff / BG 449 215 -T BG 449 208 -T 5 meters 120 mm stiff / BG 449 215 -T BG 449 209 -T 10 meters 120 mm stiff / BG 449 215 -T
Other sniffer probes (optional)
Type Length/Characteristic Ordering No. TF 312 TP 385 TF 385
120 mm / flexible BG 449 217 -T
385 mm / stiff BG 449 216 -T
385 mm / flexible BG 449 218 -T
Spare parts sets for LP 5xx: BN 845 979 -T (5 x sinter filter)
BN 846 392 -T (5 x capillary filter assembly)
Option: BG 449 140 -T (Capillary filter: metallic version for rough
duty)
2.4 Analytical system
2.4.1 Detection system
The detection system essential comprises the ion source, the magnetic separation system, and the ion collector.
The ion source ionizes neutral gas particles from which it generates an ion beam. The positively charged ions are accelerated out of the ion source and subsequently enter the magnetic field. There they are deflected into a circular path, the radius of which depends on the mass/charge ratio of the ions. Only the helium ions fulfill the separation conditions and reach the ion collector where they can be measured by the electrometer amplifier.
123 4
11
10
M < 4
M = 4
M > 4
Fig. 12a Principle of detection system
Connetion flange Anschlussflansch
Magnetic system Magnetsystem
Mass spectrometer housing Massenspektrometergehäuse
Legend:
1 Cathode 1 2 Anode 3 Cathode 2 4 Amplifier
5
5 Ion collector 6 Ion collector screen
6
7 Suppressor 8 Magnetic field 9 Intermediate orifice 10 Extractor orifice 11 Screening ring
7
Legende:
1 Katode 1 2 Anode 3 Katode 2 4 Verstärker 5 Ionenfänger
8
6 Abschirmung zu Ionenfänger 7 Suppressor 8 Magnetfeld 9 Zwischenblende
9
10 Extraktorblende 11 Abschirmring
Pre-amplifier unit EVV Vorverstärkereinheit EVV
Connection Ion soure Anschluss Ionenquelle
Fig. 12b Design of detection system
BG 805 457 BE / C (0204) HLT 2xx 15
2.4.2 Mass spectrometer supply MSV
This module produces all voltages and currents required for operating the mass spectrometer:
– Anode heating voltage – Cathode heating voltage – Anode potential – Suppressor potential
Faults in the mass spectrometer are detected and signaled to the MC 68. The mass spectrometer supply is monitored in MC 68.
Anode on/ein
K2 K1
Emission on/ein
A
-
e
Anode preheating Anode vorheizen
F3=T1A
Suppressor potential Suppressor Potential
Cathode error Katode Fehler
Cathode potential Katodenpotential
Anode potential Anodenpotential
IKP
IAP
ISP
+15V
-15V+24Vn.c.
XP1
F1=T2A
F2=T3,15A
XP2
F4=M0,032A
Fig. 13 Mass spectrometer supply MSV
2.4.3 Electrometer pre-amplifier EVV
The electrometer pre-amplifier converts the current flowing from the ion collector of the mass spectrometer into a voltage signal. It has four amplification stages. The MC 68 control board selects the required amplification stage and processes the analog output signal. The detection limit in the most sensitive range is approximately 1x10
-15
A.
Fig. 14 Ion collector pre-amplifier unit
NOTE: The ion collector pre-amplifier unit (→ Fig. 14) cannot be opened and repaired. The complete unit has to be replaced in the event of a fault.
BG 805 457 BE / C (0204) HLT 2xx 17
2.5 Electronics
2.5.1 MC 68 Control board
DIP switch S2 DIP-Schalter S2 1=PERMANENT "Burn in" 2= 3= 4=
J2
not evaluated wird nicht ausgeführt
Jumper XJ1
XP3
Lithium Accumulator
DIP switch S1 DIP-Schalter S1 1=PROCESSOR RESET 2=GLOBAL RESET 3= UNITS / SUPER GLOBAL RESET 4=not evaluated wird nicht ausgewertet
Flash PROM L H
J1
XP7_MC68 XP6_MC68
Fig. 15 MC 68, components side
2.5.2 I/O board
F3=T0,315A
J2J1
XP5_IO
XP1_IO
F2=T0,8A
F1=T0,8A
XP2_IO
Fig. 16 I/O board
BG 805 457 BE / C (0204) HLT 2xx 19
2.5.3 Wiring board
F3=T4A F2=T0,315A
XP13
XS5
XP18
XP17
XS3 XS4
XP21
XP22
XP12
XP9
XS10
XP20 XP11
Fig.17 Wiring board
XS2_I/O
XS6_MSV
XS2_MSV
XS14
XS24
XP32
XS1_I/O
XS7_MC68
XS1_MSV
XS8
XS16 XS15
XS30
XS29
XP23
XS31
F1=Gas fuse 350V Gasableiter 350V
Sniffer connection LP and total pressure and
I
RC 260 and ventilator
III
F T10 A 5 x 20 Mains fuse
I/O Port
T4 A 5 x 20 24 V (Main fuse without TC Power)
T0,8 A 5 x 20 24 V
F1
T0,8 A 5 x 20 24 V
1)
F2
1)
T0,315 A 5 x 20 +5 V Barcode connection
1)
1)
1)
F1 Gas fuse 350 V Overvoltage protection mains
F2
F3
T0,315 A 5 x 20 not used in HLT 2xx
F3
T2 A 5 x 20 24 V der MSV
T1 A 5 x 20 24 V DC/DC converter for +5 V/±15 V
T3,15 A 5 x 20 Anode heater actually fuse value
M0,032 A 5 x 20 Anode/cathode potential
1)
1)
1)
1)
F1
F2
F3
F4
T2A 1
T3,15A 1
MSV / F2
T1A 1
M0,032A 1
T0,8A 2
MSV / F3
MSV / F4
IO / F1,F2
T0,315A 1
T0,315A 1
T4A 1
T10,0A 2
IO / F3
Wiring board / F2
Wiring board / F3
Main fuse
2.5.4 Fuses
Description Fuse value Dimensions Function Remarks
Main fuse
Wiring board
I/O-Board
contained in the fuse set PT 110 050 -T.
MSV
1)
Fuse set
PT 110 050 -T MSV / F1
BG 805 457 BE / C (0204) HLT 2xx 21
Chapter
4.6.2
Test equipment Material Part No. Ref.
Rep. Loca
Comments Description
level tion
PT 110 010 -T 4.3.2
B 8199 999 ET
B 8199 999 EN#A
B 8199 999 EP#A
PT 110 010 -T 4.6.1
PM P02 810 A#A
B 8199 999 EM#A
PM C01 690 A#A
PT 110 011 -T
PK D31 824#A
PK D31 823#A
PK D31 822#A
B → PT 110 011 -T
replacement oil mist filter
exchange UNO 005A, 100V/50-60Hz
maintenance kit (4A)
if defective exchange MVP 035, 230 V/50 Hz
III os if defective exchange UNO 005A, 230V/50Hz
II os if defective
maintenance kit (4AB)
if defective exchange TMH 071
III os
if defective exchange TC 600 (without cable)
III os
spare parts kit to valve block (4D) PT 110 040 -T
II os if defective replacement Pirani measuring element BN 846 056 -T
3 Depends on operating conditions and appl i cation
(4) Containing in the maintenance A → PT 110 010 -T
(V) Consumption materials
1 13 26 52 104
160 2150 4300 8600 17200
X PK 800 152 BN II os 4.2.1
check oil level, replenish
Quant.
Part number
X II os maintenance kit (4A) PT 110 010 -T 4.2.2
change oil
exchange UNO 005A
X II os 4.3.1
check, drain
X III ws
X III os seal kit (4C) PT 110 030 -T 4.7.3
X II os
X PJ 11400 II os maintenance kit (4B) PT 110 011 -T 4.4.1
replace filter
replace oil mist filter
replace diaphragms
1
B 8199 999 ET
X PM 800 504 BN II os
replace lubricant reservoir
PM P02 810 A PT 110 011 -T
exchange for bearing change
TC 600 exchange
clean valve block, replace
X II os maintenance kit (4AB) PT 110 010 -T 4.7.1
X III os 4.7.2
seals and valves
replace vent filter
B 8199 999 ER
replace
replace valve block III ws if defective replacement valve block B 8199 999 ER
clean
Repair level II Customer trained on maintenance / Service engineer from sal es company adjustment, ti ght eni ng, leak detection
Repair level III Service engineer from sales company X Perform maintenance work
os on-site / on customer’s system 1 Depends on process
ws shop 2 Depends on media facility
B 8199 999 ES
B 8199 999 DW
3 HLT 2XX MAINTENANCE AND SERVICE
3.1 Maintenance and service schedule
Module Task Operating hours / weeks User’s guide
Vacuum system
UNO 005A 1
Europe PK D31 822
America PK D31 824
Asia PK D31 823 exchange UNO 005A, 120V/60Hz
Oil mist filter 1
MVP 035
Europe B 8199 999 EM exchange MVP 035
America B 8199 999 EN exchange MVP 035, 120 V/60 Hz
Asia B 8199 999 EP exchange MVP 035, 100 V/50-60 Hz
TMH 071 1
Valve block 1
P1, P2 BN 846 056 -T
Pirani measuring element 2
Test leak 1 replace III os if defective replacement calibrated leak B 8199 999 DW
Sealing coupling 1 replace II os if defective replacement sealing coupling B 8199 999 ES
Legend: Repair level I Operator * Functional check; cleaning as required, replenishing the operating media,
= Maintenance work
BG 805 457 BE / C (0204) HLT 2xx 22
Chapter
BG 449 208 -T
BG 449 209 -T
BG 449 207 -T
BN 846 392 -T 4.9.1
BN 845 979 -T 4.9.2
B 8199 999 DZ#A
B 8199 999 EW#A
B 8199 999E C#A
B 8199 999 ED#A
B 8199 999 EE#A
B 9199 999 EF
B 9199 999 EF
B 8199 999 EH
B → PT 110 011 -T
replacement LP 505
replacement LP 510
replacement ion source, packed B 8199 999 EU
replacement magnetic system B 8199 999 EV
Test equipment M aterial Part No. Ref.
Rep. Loca
Comments Description
level tion
1 13 26 52 104
160 2150 4300 8600 17200
if defective replacement LP 503
or if defective set with 5 capillary filters (V)
or if defective set with 5 filters and O-rings (V)
II os
X(3) I os
X(3) BG 805 268 BE I os
if a cathode fails
replacement ion source
immediately order a
compressed air
if defective
if defective exchange MC 68
if defective exchange operating unit RC 260
if defective replacement ventilator
if defective replacement ventilator
if defective replacement wiring board
3 Depends on operating conditions and appl i cation
(4) Containing i n t he maintenance A → PT 110 010 -T
(V) Consumption materials
replace capillary filter
Quant.
Part number
Module Task Operating hours / weeks User’s guide
LP 5xx 1
replace LP 5xx
replace sinter filter
3 m → BG 449 207 -T
5 m → BG 449 208 -T
10 m → BG 449 209 -T
Analytical system
replace ventilator III os
Repair level II Customer trained on maintenance / Service engineer from sal es company adjustment, ti ght eni ng, leak detection
Repair level III Service engineer from sales company X Perform maintenance work
os on-site / on customer’s system 1 Depends on process
ws shop 2 Depends on media facility
B 9199 999 EF
B 8199 999 DZ
B 8199 999 EW
MSV 1 exchange II os if defective exchange MSV
EVV 1 exchange III os if defective exchange EVV
Heliumsensor 1 replace ion source II os
B 8199 999 EV
Magnetic system 1 replace III os
Electrical, Electronics
B 8199 999 EA
B 8199 999 EB
B 8199 999 EC
Power supply 1 replace III os if defective replacement power supply B 8199 999 EA
Line filter 1 replace III os if defective replacement line filter B 8199 999 EB
I/O-Board 1 exchange III os if defective exchange I/O board
B 8199 999 EE
B 8199 999 ED
MC 68 (with firmware) 1 exchange (incl. firmware) III os
RC 260 (with firmware) 1 exchange (incl. firmware) II os
Lüfter (1) 1 clean or replace filter mat * X(3) I os blow out with replacement filter mat (5 pieces) (V) B 8199 999 EG 4.8.1
B 9199 999 EF
B 8199 999 EH
Ventilator (2) 1 replace ventilator III os
Wiring board 1 replace III os
Legend: Repair level I Operator * Functional check; cleaning as required, replenishing the operating media,
BG 805 457 BE / C (0204) HLT 2xx 23
= Maintenance work
Test equipment M aterial Part No. Ref.
Chapter
Comments Description
B → PT 110 011 -T
3 Depends on operating conditions and appl i cation
(4) Containing i n t he maintenance A → PT 110 010 -T
(V) Consumption materials
Rep. Loca
level tion
160 2150 4300 8600 17200
1 13 26 52 104
replace on-off box II os in case of malfunction
Quant.
Part number
Module Task Operating hours / weeks User’s guide
Wagon (Option to HLT265 and HLT275)
Fore vacuum pump 1 replace BG 805 265 BDE II os in case of malfunction
On-off box replace fuse II os in case of malfunction replacement fuse, 5 x 20, 1 A B 4666 436
Retreatment roller 1 replace II os in case of malfunction replacement retreatment roller 1001723
1001723
B 5099 201 FQ
Ventilator 2 replace II os in case of malfunction replacement ventilator B 5099 201 FQ
Repair level II Customer trained on maintenance / Service engineer from sal es company adjustment, ti ght eni ng, leak detection
Repair level III Service engineer from sales company X Perform maintenance work
os on-sit e / on customer’s system 1 Depends on proces s
ws shop 2 Depends on media facility
Sound absorber 1 replace I os replacement sound absorber cartridge B 8199 999 XD
Legend: Repair level I Operator * Functional check; cleaning as required, replenishing the operating media,
= Maintenance work
BG 805 457 BE / C (0204) HLT 2xx 24
Notes
Bemerkung
Quantity
Menge
1
Description
Bezeichnung
Lubricant reservoir 1
Filter 1
Screwed fitting + filter 1
Oil 1 liter
Filter insert to oil mist filter 1
Air filter (set 5 pieces) 1
Ölnebelfilter
Vent connection
UNO 005A
Ventilator 1
Lubricant reservoir 1
Wearing parts set 1
MVP 035
Screwed fitting + filter
Air filter (set 5 pieces) 1
Vent connection
Ventilator 1
Sealing ring R1/4IN, Nylon 3
Flat seal, 55/41,5 x 0,5 3
TMH 071 – MS/ MS – IQ / MS – IF
O-ring, 1,78 x 1,02 1TLO-ring, 12 x 1,5 1
O-Ring, 12 x 1,5 1
O-ring, 13,94 x 2,62 1
TL Capillary
TL adapter
TMH 071 – Fore vacuum connection
O-Ring, 19 x 3 1
O-ring, 3,69 x 1,78 2
O-ring, 30 x 3,5 2
Centering ring, DN 16 KF 1
Test port
Pirani element
TMH 071 – Valve block
VB – Pump
Centering ring, DN 25 KF 1
Test port
3.2 Maintenance kits
Ordering No.
Bestellnummer
(4A) Maintenance kit, HLT 260
PT 110 010 -T TMH 071
(4B) Maintenance kit, HLT 270
PT 110 011 -T TMH 071
(4C) Seal set HLT 2xx
PT 110 030 -T VV, vent, external pump connection
BG 805 457 BE / C (0204) HLT 2xx 25
Notes
Bemerkung
Quantity
Menge
1
1
Description
Bezeichnung
Spare parts for valve V1, V2, V3, V6 2/2- way valve (4D2)4Spare parts for valve V4 2/2- way valve (4D3)
Core 1
Spring 2
Spring bolt 2
O-Ring 1
O-Ring 1
O-Ring 1
Sealing hood 1
Spring 1
O-Ring 1
Sealing B SPE 1
Spring 1
O-Ring 1
Ordering No
Bestellnummer
(4D) Spare parts kit for valve block
PT 110 040 -T Spare parts for valve V5 3/2- way valve (4D1)
(4D1) Spare parts kit for valve V5
PT 110 041 -T
(4D2) Spare parts kit for valve V1, V2, V3, V6
PT 110 042 -T
(4D3) Ersatzteilsatz zu Ventil V4
PT 110 043 -T
26 BG 805 457 BE / C (0204) HLT 2xx
4 MAINTENANCE WORK
4.1 General
CAUTION: Maintenance on the HLT 2xx may only be performed by persons who have been authorized by PFEIFFER VACUUM for this purpose.
Authorized persons:
Repair level I Repair level II
Repair level III
1)
1)
Customer Customer with technical education or PFEIFFER VACUUM Service Engineer
1)
Customer with PFEIFFER VACUUM Service training2) or PFEIFFER VACUUM Service Engineer
1)
→ see maintenance schedule (page 22 - 23)
2)
→ PFEIFFER VACUUM offers courses to rapair level II and III.
CAUTION:
The safety instructions in Chapter 1.3 are to be conscientiously followed whenever maintenance work is performed.
CAUTION:
The power supply and the roughing pump have components that are on voltages higher than 50 V. For this reason the power plug must always be disconnected before the HLT 2xx is opened for service work.
Vacuum area:
Always wear clean, lint-free gloves and use clean tools when working in this area.
BG 805 457 BE / C (0204) HLT 2xx 27
4.2 UNO 005A
(valid for HLT 260)
4.2.1 Check oil level and replenish
(weekly)
Required material: Mineral oil, 1 l, from maintenance kit, Ordering No. PT 110 010 -T Procedure:
• Turn off the power switch.
• Detach the power plug.
• Remove operating unit RC 260.
• With socket wrench unfasten the latch on the right and left-hand side.
• Lift the hood perpendicularly upward.
• Detach the ground cable.
• Visually check the oil level and possible oil discoloration in the UNO 005 A by peeking
through ventilator (2).
• If the oil level is below the minimal marker remove the oil filler cap with a screwdriver (→ Fig. 6), fill oil up to the max. marker and turn the screw in again.
• Replace the oil if it is discolored (→ Chapter 4.2.2).
• Reconnect the ground cable.
• Reinstall the hood and close the latches on the left and right-hand side with the socket
wrench.
• Reinstall operating unit RC 260.
• Put the HLT 2xx back into service according to the user’s guide.
4.2.2 UNO 005A, oil change
(annually)
Required material: Mineral oil, 1 l, from maintenance kit, Ordering No. PT 110 010 -T Procedure:
• Turn off the power switch.
• Detach the power plug.
• Remove operating unit RC 260.
• With socket wrench unfasten the latch on the right and left-hand side.
• Detach the ground cable
• Lift the hood perpendicularly upward.
• With a screwdriver remove the oil filler cap (→ Fig. 6).
• Position an oil collection vessel and direct the oil drain tube (→ Fig. 6) into the vessel.
• With a open-end wrench size 13 and a hexagon-socket-screw key size 5 unfasten the drain screw on the drain tube (→ Fig. 6) and drain the oil.
28 BG 805 457 BE / C (0204) HLT 2xx
• Lightly turn in the oil filler cap. Insert the power plug and allow the pump to run 5 to 10 sec. so that the remaining oil drains.
• Detach the power plug.
• With a open-end wrench size 13 and a hexagon-socket-screw key size 5 reinstall the drain
screw on the drain tube.
• Remove the oil filler cap again and fill 0.33 l of fresh oil through a funnel.
• Reinstall the oil fille r cap.
• Reconnect the ground cable.
• Reinstall the hood and close the latches on the left and right-hand side with the socket
wrench.
• Reinstall operating unit RC 260.
• Put the HLT 2xx back into service according to the user’s guide.
• Dispose of the waste oil in accordance with local regulations.
BG 805 457 BE / C (0204) HLT 2xx 29
4.3 Oil mist filter
(valid for HLT 260)
4.3.1 Check the oil mist filter, drain it and clean the oil pan
(weekly)
Procedure:
• Turn off the power switch.
• Detach the power plug.
• Remove operating unit RC 260.
• With socket wrench unfasten the latch on the right and left-hand side.
• Detach the ground cable
• Lift the hood perpendicularly upward.
• Visually check the transparent plastic cylinder (→ Fig. 20).
• If oil is located in the plastic cylinder, manually unscrew the plastic cylinder by turning it
counterclockwise and dispose of the collected oil in accordance with local regulations.
• Reinstall the plastic cylinder.
• Clean the oil pan with a cloth wet with alcohol.
• Reconnect the ground cable.
• Reinstall the hood and close the latches on the left and right-hand side with the socket
wrench.
• Reinstall operating unit RC 260.
• Put the HLT 2xx back into service according to the user’s guide.
4.3.2 Replace filter to oil mist filter
(semiannually)
Required material: Mineral oil P3, 1 l, from maintenance kit, Ordering No. PT 110 010 -T Procedure:
• Turn off the power switch.
• Detach the power plug.
• Remove operating unit RC 260.
• With socket wrench unfasten the latch on the right and left-hand side.
• Lift the hood perpendicularly upward.
• Detach the ground cable.
• Manually unscrew the plastic cylinder by turning it counterclockwise and dispose of the
collected oil in accordance with local regulations.
• First wipe the filter retaining screw with a dry piece of cloth, then unfasten it by hand, and remove it together with the filter.
• Put the replacement filter on the retaining screw and reinstall the retaining screw together with the filter.
30 BG 805 457 BE / C (0204) HLT 2xx
Plastic cylinder
Kunststoffzylinder
Filter
Filter retaining screw
Filterhalteschraube
Fig. 20 Replacing the filter of the oil mist filter
• Reinstall the plastic cylinder.
• Reconnect the ground cable.
• Reinstall the hood and close the latches on the left and right-hand side with the socket
wrench.
• Reinstall operating unit RC 260.
• Put the HLT 2xx back into service according to the user’s guide.
BG 805 457 BE / C (0204) HLT 2xx 31
4.4 MVP 035
(valid for HLT 270)
4.4.1 MVP 035, replace the diaphragm
(semiannually)
Required material: Wearing parts set, from maintenance kit, Ordering No. PT 110 011 -T Procedure:
• Turn off the power switch.
• Detach the power plug.
• Remove operating unit RC 260.
• With socket wrench unfasten the latch on the right and left-hand side.
• Lift the hood perpendicularly upward.
• Detach the ground cable
• Unfasten the two hoses (fore vacuum and exhaust line) on the diaphragm pump.
• With a Phillips screwdriver No. 2 unfasten 6 screws each on the head covers and
simultaneously tilt down the two head covers toward the front, together with the connection lines.
• Remove two sealing rings each on the head covers.
• Also remove the intermediate plates
• Remove two valve plates each on the intermediate plates
.
• Carefully turn the HLT 270 forward on its side.
Fig. 21a lift diaphragm Fig. 21b unscrew diaphragm
CAUTION:
When removing the molded diaphragm make sure that the compensating washers do not get lost.
• With your thumb press in the molded diaphragm in such a way that you can grip it on the opposite side with the other fingers. (→ Fig. 21a).
• Unscrew the molded diaphragm from the pump housing by turning it counterclockwise (→ Fig. 21b).
32 BG 805 457 BE / C (0204) HLT 2xx
• Clean contaminated parts and sealing surfaces with alcohol.
• Fit each new molded diaphragm with the same number of compensating washers as the
old one.
• Screw in the new molded diaphragms.
• Carefully set the HLT 270 upright.
• Set the intermediate plates on the molded diaphragm and install the valve plates.
• Insert the sealing rings on the head covers and place both head covers together in the
correct position on the intermediate plate.
• With a Phillips screwdriver No. 2 screw in and tighten 6 screws on each head cover.
• If an external roughing pump is used, reestablish the KF 16 connection to the external
roughing pump.
• Reconnect the ground cable.
• Reinstall the hood and close the latches on the left and right-hand side with the socket
wrench.
• Reinstall operating unit RC 260.
• Put the HLT 2xx back into service according to the user’s guide.
4.5 Scroll pump
(valid for HLT 275)
4.5.1 Varian Triscroll TS600
Maintenace work according to Varian operating instructions
BG 805 457 BE / C (0204) HLT 2xx 33
4.6 TMH 071
(valid for HLT 260, HLT 265, HLT 270, HLT 275)
4.6.1 Replace the lubricant reservoir
(semiannually)
Required material: Replacement lubricant reservoir from maintenance kit
Ordering No. PT 110 010 -T or PT 110 011 -T
The system for lubricating the ball bearing is factory filled with TL 011. The lubricant needs to be changed at least once per year (under extremely heavy loads or unclean processes more frequently).
The complete lubricant reservoir must always be changed.
Procedure:
• In MANUAL MODE switch off the TMH 071 and wait until the rotational speed is <50 Hz.
• Vent the HLT 2xx by opening the valves V3 and V6.
• Turn off the power switch.
• Detach the power plug.
CAUTION:
To prevent damage on the TMH 071 the HLT 2xx may not be moved for 4 minutes after it has been switched off.
• If an external roughing pump is used, detach the KF16 connection to the external roughing pump.
• Carefully set the HLT 2xx on its back or on ist right side in front view.
Connection external fore vacuum pump Anschluss externe Vorvakuumpumpe
Ventilator filter Lüfterfilter
Covering panel to ion source Abdeckblech zu Ionenquelle
Cap to operating media reservoir Verschlussdeckel zu Betriebsmittelspeicher
Fig. 22 Bottom of HLT 2xx
34 BG 805 457 BE / C (0204) HLT 2xx
• With a hexagonal socket wrench size 19 (or, if your unit is equipped with a new TMH 071, with PFEIFFER tool PVM40498) unscrew the cap (→ Fig. 22) on the bottom.
• Remove the lubricant reservoir (→ Fig. 22) with two screw drivers and dispose of it in accordance with local regulations.
• Insert a new lubricant reservoir (according to PM 800 504 BN) and reinstall the cap screw.
• Set the HLT 2xx upright again.
• If an external roughing pump is used, reestablish the KF 16 connection to the external
roughing pump.
• Put the HLT 2xx back into service according to the user’s guide.
4.6.2 TMH 071, exchange for bearing change
(biannually)
Required material: Exchange TMH 071, Ordering No. PM P02 810 #A
CAUTION
This work must be carried out by PFEIFFER VACUUM or a service engineer who has been trained by PFEIFFER VACUUM.
BG 805 457 BE / C (0204) HLT 2xx 35
4.7 Valve block
(valid for HLT 260, HLT 265, HLT 270, HLT 275)
4.7.1 Clean or replace the screwed fitting with filter on the vent connection
(semiannually)
Required material: Replacement lubricant reservoir from maintenance kit
Ordering No. PT 110 010 -T or PT 110 011 -T
Procedure:
• Turn off the power switch.
• Detach the power plug.
• Remove operating unit RC 260.
• With socket wrench unfasten the latch on the right and left-hand side.
• Lift the hood perpendicularly upward.
• Detach the ground cable
Venting filter
Belüftungsfilter
Fig. 23
• With a fork wrench size 12 unfasten the hose coupling on the valve block and pull the hose off the nipple (→ Fig. 23).
• With a hexagon pipe socket wrench size 17 remove the screwed fitting with filter.
• Install the replacement screwed fitting together with the filter on the valve block.
• Mount the hose on the nipple and tighten the hose coupling.
• Connect the ground cable.
• Reinstall the hood and close the latches on the left and right-hand side with the socket
wrench.
• Reinstall operating unit RC 260.
• Put the HLT 2xx back into service according to the user’s guide.
36 BG 805 457 BE / C (0204) HLT 2xx
4.7.2 Clean the Pirani measuring elements P1 and/or P2
(semiannually)
CAUTION
This work must be carried out by PFEIFFER VACUUM or a service engineer who has been trained by PFEIFFER VACUUM.
4.7.3 Clean the valve block, replace the seals and revise the valves
(annually)
Required material: Seal kit, Ordering No. PT 110 030 -T
Spare parts kit to valve block, Ordering No. PT 110 040 -T
CAUTION
This work must be carried out by PFEIFFER VACUUM or a service engineer who has been trained by PFEIFFER VACUUM.
4.8 Ventilator 1
4.8.1 Clean / replace the filter mat
(weekly / quarterly)
see User’s guide HLT 2xx BG 805 263 BE
4.9 LP 5xx
4.9.1 Replace capillary filter
(weekly)
see User’s guide LP 5xx, BG 805 268 BE
4.9.2 Replace the sinter filter
(quarterly)
see User’s guide LP 5xx, BG 805 268 BE
BG 805 457 BE / C (0204) HLT 2xx 37
4.10 Checking the Maintenance Work
The following sections suggest how to check that periodic maintenance work has been carried out.
CAUTION:
In case of neglect of the maintenance work restrictions or refusal of warranty claims might apply.
4.10.1 Weekly Maintenance Work
Assembly Work to be performed
→ Section
UNO 005A Check oil level and replenish 4.2.1 Oil mist filter Replace filter to oil mist filter 4.3.1 Ventilator 1 Clean the filter mat BG 805 263 BE LP 5xx Replace the capillary filter BG 805 268 BE
The above work has been carried out by:
Date: ..................................................... Signature:
.....................................................................................................................
......................................................................................
4.10.2 Quarterly Maintenance Work
Assembly Work to be performed
→ Section
Ventilator 1 Replace the filter mat BG 805 263 BE LP 5xx Replace the sinter filter BG 805 268 BE Sound absorber Replace sound absorber cartridge B 8199 999 XD
The above work has been carried out by:
.....................................................................................................................
O.K.
O.K.
Date: ..................................................... Signature:
......................................................................................
4.10.3 Semiannual Maintenance Work
Assembly Work to be performed
→ Section
O.K.
Oil mist filter Replace the filter 4.3.2 MVP 035 Replace the diaphragm 4.4.1 TMH 071 Replace the lubricant reservoir 4.6.1 Valve block Clean or replace the screwed fitting with filter 4.7.1
Clean the measuring elements P1 and/or P2 4.7.2
The above work has been carried out by:
Date: ..................................................... Signature:
38 BG 805 457 BE / C (0204) HLT 2xx
.....................................................................................................................
......................................................................................
4.10.4 Annual Maintenance Work Assembly Work to be performed
→ Section
UNO 005A Oil change 4.2.2 Valve block Clean the valve block, replace the seals and
4.7.3
revise the valves The above work has been carried out by:
Date: ..................................................... Signature:
....................................................................................................................
.....................................................................................
4.10.5 Biannual Maintenance Work Assembly Work to be performed
→ Section
TMH 071 Exchange for bearing change 4.6.2 The above work has been carried out by:
Date: ..................................................... Signature:
....................................................................................................................
.....................................................................................
O.K.
O.K.
BG 805 457 BE / C (0204) HLT 2xx 39
CONTAMINATION DECLARATION
The serv ic e , repair, and/or d is posal of vacuum equipment and comp onents will onl y be c ar ried out if a corre c tl y c om p leted declaration has been submitted. Non-completion will result in delay. This decl a r ation may only be co m p leted (in block let te r s ) an d s ig n ed by au t horized and quali fied staff.
Description of product
Type Article Number Serial Number
The product is free of any sub­stances which are damaging to health yes
Reason for retur n
Operating flu id(s) used
Process related cont amina t io n of produc t :
toxic no q 1) yes caustic no q 1) yes q biological hazard no explosiv e no radioactive no other harmful substances no
q
1) or not conta ining any amo unt of hazardous residues that exceed the permissible ex­ posure limits
(Must be drained before shipping.)
q
q
yes q 2)
q
yes q 2)
q
yes q 2)
q
1) yes
q
2) Products thus contami­ nated will not be ac­ cepted without written evidence of decontami­ nation!
Harmful substances, gases and/or by-products
Pl eas e list all substanc e s , ga s es, and by-produ c ts which
Trade/product name
Chemical name (or symbol)
the product
Preca uti on s as sociated with substance
may have come into contact wi th:
Action if human contact
Legally binding declaration:
I/we her e by de clare that the inf ormation on thi s for m is complete and acc ur a te an d that I/we will as su m e any further costs that may arise. The contaminated product will be disp atche d in accordance with the applicable regulations.
Organization/company Address Post code, place Phone Fax Email Name
Date and legally binding signature Company stamp
This form can be downloaded from our website.
Copies: Original for addressee - 1 copy for accompanying documents - 1 co py for file of sender
40 BG 805 457 BE / C (0204) HLT 2xx
BG 805 457 BE / C (0204) HLT 2xx 41
Pfeiffer Vacuum GmbH Berliner Strasse 43 D–35614 Asslar Deutschland Tel +49-(0) 6441-802-0 Fax +49-(0) 6441-802-202
info@pfeiffer-vacuum.de http://www.pfeiffer-vacuum.de
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