Pfeiffer Vacuum MaxiGauge TPG 256 A PT G28 760, MaxiGauge TPG 256 A PT G28 761 Operating Instructions Manual

A PASSION FOR PERFECTION

TPG 256 A

MaxiGauge™, vacuum measurement and control unit for Compact Gauges

Operating Instructions

BG 5186 BEN / C (2013-12)

Validity

Firmware Version

Trademarks

This manual applies to products with part number:

• PT G28 760 with serial interfaces RS232C and

RS422

• PT G28 761 with serial interfaces RS232C and

RS422 and RS485 (addressable, isolated) and RS422 (isolated)

The part number can be taken from the nameplate on the rear panel, where the interfaces can be connected as well (→  12).

This manual is based on firmware version:

• BG 509 730 -K

If your unit does not behave as described in this document, please check whether it is equipped with this firmware version (→  110).

Enter the firmware version number of your unit in the space provided below:

• BG ..................... ..................... -.......

MaxiGauge™ INFICON GmbH FullRange™ INFICON GmbH

We reserve the right to make engineering changes without notice.

2

BG 5186 BEN / C (2013-12) MaxiGauge.om

Contents

Validity 2 Firmware Version 2 Trademarks 2

Intended Use 6

1 2 Technical Data 8 3 Safety 15 4 Commissioning 17

4.1 Personnel 17

4.2 Set-Up, Assembly 17

4.3 Power Connection 18

4.4 Connecting the Gauges to sensor 21

4.5 control Control Connector 21

4.6 RS 232/422 Pinout Connector for Serial

Interfaces 23

4.7 RS 485/422 isol. Interface Port 23

4.8 relay Connector for Switch Contacts 23

5 Operating Elements and Modes 24

5.1 Operating Elements 24

5.2 Operating Modes (Overview) 27

5.2.1 «Measurement» Mode 28

5.2.2 «Setpoint» Mode 30

5.2.3 «General Parameter» Mode 31

5.2.4 «Sensor Parameter» Mode 32

5.2.5 «Sensor Control» Mode 33

5.2.6 «Test» Mode 34

6 Display Formats and Pressure Units 35

6.1 Display Formats 35

6.2 Pressure Units 36

6.3 Cursor 36

7 Operation 37

7.1 Personnel 37

7.2 Switching the Unit On and Off 37

7.3 Selecting the Operating Mode 39

7.4 «Measurement» Mode 40

7.4.1 Selecting the Measurement Point (Sensor) 40

7.4.2 Switching the Gauge On/Off (Sen-on/off) 41

7.4.3 Display of a Single Gauge / All Gauges

(Single/All) 41

7.5 «Setpoint» Mode 42

7.5.1 Selecting the Switching Function (Relay) 42

7.5.2 Assigning Measurement Points (Control Sensor) 43

7.5.3 Defining the Threshold Values (Setpoint) 44

7.5.4 Underrange Control (UR-Control) 46

BG 5186 BEN / C (2013-12) MaxiGauge.om Contents 3

7.6 «General Parameter» Mode 48

7.6.1 Parameter Input Lock (Key-lock) 48

7.6.2 Selecting the Pressure Unit (Unit) 49

7.6.3 Display Resolution (Digits) 50

7.6.4 Bargraph (Bargraph) 51

7.6.5 Restoring Default Values (Default) 52

7.6.6 Defining an Interface (Interface) 53

7.6.7 Defining the Baud Rate (Baudrate) 54

7.6.8 Defining the Node Address (Address) 55

7.6.9 Screensave (Screensave) 56

7.6.10 Display Contrast (Contrast) 57

7.7 «Sensor Parameter» Mode 58

7.7.1 Selecting a Measurement Point (Sensor) 58

7.7.2 Gauge Identification (Type) 59

7.7.3 Offset Function (Offset) (zeroing) 60

7.7.4 Activating the Degas Routine (Degas) 63

7.7.5 Pirani Range Extension (Range-Ext) 64

7.7.6 Setting the Calibration Factor (Cal-Factor) 65

7.7.7 Setting the Measurement Value Filter (Filter) 66

7.7.8 Defining the Measurement Point Name

(Name) 68

7.8 «Sensor Control» Mode 69

7.8.1 Selecting the Controlled Gauge (Sensor) 71

7.8.2 Selecting the Controlling Source (Control) 71

7.8.3 Setting the «Sensor 1 ... 6» Control 72

7.8.4 Setting the «Extern» Control 72

7.8.5 Setting the «Manual» Control 73

7.8.6 Setting the «Hotstart» Control 74

7.9 Status Messages 75

7.10 Error Messages 77

8 Communication 80

8.1 Serial Interfaces 80

8.1.1 Connection Diagrams 80

8.1.2 Connection Cable 81

8.1.3 Data Transmission 82

8.2 Mnemonics 86

8.2.1 Measurement Values 87

8.2.2 Display 90

8.2.3 Switching Functions 91

8.2.4 Parameters 92

8.2.5 Interfaces 95

8.2.6 Error Messages 98

8.2.7 Test Programs for Pfeiffer Vacuum Service

Specialists 99

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Contents BG 5186 BEN / C (2013-12) MaxiGauge.om

9 Maintenance and Care 103

9.1 Personnel 103

9.2 Cleaning 103

9.3 Maintenance 104

10 Accessories and Spare Parts 105 11 Decommissioning 107

Appendix 108

A: Validity Table 108 B: Conversion of Pressure Units 109 C: Equipment Test 109 D: Literature 113

EC Declaration of Conformity 116

For cross references to pages within this manual, the symbol (→  XY) is used, for references to other docu- ments, the symbol (→  [Z]).

BG 5186 BEN / C (2013-12) MaxiGauge.om Contents 5

1 Intended Use

The TPG 256 A TPG 256 A is a 6-port total pressure measurement and control unit for Pfeiffer Vacuum Compact Gauges.

The unit has been engineered for use with the following gauge families *

)

:

• TPR Pirani gauge

• PCR Combined Pirani/Capacitance gauge

• IKR Cold cathode gauge

• PKR Combined Pirani/cold cathode gauge

• IMR Hot ionization gauge High Pressure

(HP)

• PBR Combined Pirani/Bayard-Alpert hot cathode ionization gauge (BA)

• CMR/ACR Capacitive gauge

• APR Piezoresistive gauge

The unit is suited for total pressure measurement in the range of 10

-11

mbar to 50 bar (5×104 mbar). Through its pressure dependent switching functions and the userprogrammable sensor control it can also perform a number of functions for controlling and monitoring vacuum equipment and processes.

DANGER

Although this unit conforms to high quality and safety standards and has been built and tested in accordance with current technology, bodily injury and property damage cannot be precluded if it is used in nonconforming applications (for purposes other than intended) or if it is not used with diligence.

Therefore, it is essential that you carefully study this operating manual, especially the chapter "Safety". Keep this operating manual in a convenient location near your equipment.

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BG 5186 BEN / C (2013-12) TPG 256 A

Figure 1: Dimensions

Figure 2: Nameplate

A Width of front panel 241 mm (½ 19" rack width) B Mounting horizontal 224 mm C Mounting vertical 76.2 mm D Height of front panel 88 mm (2 height units) E Installed depth 228.5 mm F Installed width 207 mm G Installed height 88 mm (2 height units)

Pfeiffer Vacuum, D-35614 Asslar

Typ: No:

F-No:

V Hz VA

The nameplate is located on the rear panel.

Make sure that the voltage and frequency ratings conform with the local power supply system. The remaining information is important for communication with the Pfeiffer Vacuum customer service.

BG 5186 BEN / C (2013-12) MaxiGauge.om Technical data 7

2 Technical Data

Mechanical data

Power connection

Environment, standards

Dimensions

Weight 2.1 kg

19" rack installation

Voltage 90 ... 250 VAC / 50 ... 60 Hz Power consumption 60 VA

Overvoltage category II Protection class 1

Unit connector IEC 320 C14 Power switch Rear panel

Temperatures

Storage Operation

Relative humidity Max. 80 % up to +31°C,

Use Indoors only

Contamination severity II Protection class IP 30

Safety

EMC

→ Figure 1

→ Accessories,

-20 ... +60 °C + 5 ... +40 °C

decreasing to 50 % at +40 °C

maximum height 2000 m

→  116

 105

8

Technical data BG 5186 BEN / C (2013-12) MaxiGauge.om

Figure 3: Gauges

Logarithmic gauges TPR

Compact Pirani Gauge (Pirani gauge)

PCR

Compact Pirani Capacitance Gauge

(Pirani/Capacitance gauge)

IKR

Compact Cold Cathode Gauge (Cold cathode gauge)

PKR

Compact FullRange™ CC Gauge (Pirani/Cold cathode gauge)

IMR

Compact Process Ion Gauge (Pirani/High pressure gauge)

PBR

Compact FullRange™ BA Gauge (Pirani/Bayard-Alpert gauge)

BG 5186 BEN / C (2013-12) MaxiGauge.om Technical data 9

Linear gauges CMR/ACR

Compact Capacitance Gauge (Capacitive gauge)

Gauge connections

APR

Compact Piezo Gauge (Piezoresistive gauge)

Number 6

Compatible gauges (→  [1] ... [18]

Compact Pirani Gauges

Compact Pirani Capacitance Gauge Compact Cold Cathode Gauges

Compact FullRange™ CC Gauges Compact Process Ion Gauges Compact FullRange™ BA Gauges Compact Capacitance Gauges

Compact Piezo Gauges

Connector type, pin assignments

[18])

Pfeiffer Vacuum Compact Gauges

TPR 250, TPR 260, TPR 261, TPR 265, TPR 280, TPR 281

PCR 260, PCR 280

IKR 250, IKR 251, IKR 260, IKR 261, IKR 270 PKR 250, PKR 251, PKR 260, PKR 261 IMR 260, IMR 265 PBR 260

CMR 261, CMR 262, CMR 263, CMR 264, CMR 271, CMR 272, CMR 273, CMR 274, CMR 275; CMR 361, CMR 362, CMR 363, CMR 364, CMR 371, CMR 372, CMR 373, CMR 374, CMR 375; ACR 261, ACR 262, ACR 263, ACR 274 APR 250, APR 260, APR 262, APR 265, APR 266, APR 267

→  20

With the exception of the IMR 265, PBR 260, CMR 27X

and CMR 37X, which can only be connected to ports 4 to 6, any compatible gauge type can be connected to any analog output.

10

Technical data BG 5186 BEN / C (2013-12) MaxiGauge.om

Measured values

Gauge supply

Gauge control

Degas

Measurement ranges

Measurement error

Gain error Offset error

→  Gauge

≤0.2 %

measurement signal

≤20 mV

Measurement rate 100 / s Display rate 4 / s

Filter time constant

s

low

standard fast

Voltage

Current

Sensor 1 to 3 Sensor 4 to 6

Fuse

Sensor 1 to 3 Sensor 4 to 6

2.1 s (f 320 ms (f 100 ms (f

= 0.075 Hz)

g

= 0.5 Hz)

g

= 1.6 Hz)

g

+24 VDC ± 5%

200 mA per gauge 600 mA per gauge

300 mA per gauge 1 A per gauge (PTC element, self resetting after unit is switched off)

Turning the gauge on / off

Manual Automatic

Hot Start

External

Self-monitoring

Softkey (

Sen-on / Sen-off)

by gauge 1 ... 6 (

Sensor X)

(IKR, IMR by TPR, PKR, etc.) adjustable setpoints, userassignable

IKR, PKR, IMR and PBR gauges are turned on when the unit is switched on

Individually for each gauge at the «Control» connector

TTL high: +2 … 5 V = gauge off TTL low: ≤+0.8 V = gauge on

Internal pull-up 3.3 kΩ to +5 V IKR and IMR gauge turned off by

own measured value

Degas (PBR 260 only) Duration 3 min. (can be aborted)

BG 5186 BEN / C (2013-12) MaxiGauge.om Technical data 11

Figure 4: Rear panel

67

1

5

1

5

6

234

1

5

6

234

ALCATEL, 7400 9 Annecy, France

Typ: P/N: S/N: V Hz VA

1

5

6

1

5

234

1

5

6

234

2 9 1 84 35

TPG 256 A part number PT G28 760:

1

2 3 4

5 6

7

RS 232/422

relay

sensor 1 ... ... sensor 6

control

Pinout for serial interface RS232C or RS422 (not isolated)

Connector for relay switch contacts Power inlet 3-pin Reference for fuses inside the unit

(replacement only by Pfeiffer Vacuum Service)

Power switch Connectors for gauges

Connector for control functions

TPG 256 A part number PT G28 761, additional features:

8,9

RS 485/422 isol.

Port for serial interface RS485 (addressable, isolated) and RS422 (isolated)

Connector types and pin assignments →  20 f.

12

Technical data BG 5186 BEN / C (2013-12) MaxiGauge.om

Switching functions

Error signal

Analog outputs

Computer interfaces

Number 6 Gauge assignment User-programmable Response time 10 ms, if the measured value is

near the setpoint. For bigger differences, take the filter time constant into consideration.

Relay contacts Changeover switch, floating

Contact closed Contact open

= 60 VDC / I

U

max

= 30 VAC / I

U

max

Vacuum better than setpoint Vacuum worse than setpoint or

max

= 3 A = 3 A

power switched off

Cycle life

mechanical electrical

Connector type, pin assignment

7

5×10

cycles

1×105 cycles

→  22

Response time 10 ms

Relay contact Changeover switch, floating

U

Contact closed Contact open

= 60 VDC / I

max

= 30 VAC / I

U

max

No error Error or mains power switched

max

= 3 A = 3 A

off

Cycle life

mechanical electrical

Connector type, pin assignment

7

5×10

5

1×10

→  22

cycles cycles

Number 6 (1 per gauge) Voltage range 0 ... +10 V Internal resistance

Relationship measurement signal-pressure

Connector type, pin assignment

Standard

Option (for PT G28 760)

660 Ω

→  Gauge used

→  20

RS232C RS422, not isolated

RS485, addressable, isolated RS422, isolated

Protocol

RS232C RS422, RS485

Connector type, pin assignment

ACK/NAK, ASCII with 3 character mnemonics, bi-directional data flow (masterslave) (additional information →  80)

Only TXD and RXD used Only TX+, TX-, RX+, RX- used

→  22

BG 5186 BEN / C (2013-12) MaxiGauge.om Technical data 13

Figure 5: Symbols for residual hazards

DANGER

Information on preventing any kind of physical injury.

Figure 6: Symbol for special personal qualifications

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

14 Safety

BG 5186 BEN / C (2013-12) TPG 256 A

3 Safety

3.1 Personnel

3.2 Danger, Caution, and Note Symbols

3.3 Safety Information

3.4 Responsibility and Warranty

Skilled personnel

Work on and with the TPG 256 A TPG 256 A may only be carried out by persons with suitable technical training and the necessary experience.

The opposite symbols together with explanatory text are used to point out residual dangers inherent in conforming utilization and to emphasize important technical requirements.

• Take into account the relevant safety regulations when doing installing and maintenance work.

Pfeiffer Vacuum declines any liability, and the warranty becomes null and void if the operator or third parties

• utilize the product not according to the defined use

• disregard the technical data

• make any kind of changes (modifications, alterations,

etc.) to the product

• use the product with accessories not listed in the product documentation.

BG 5186 BEN / C (2013-12) MaxiGauge.om Safety 15

Figure 7: Setup as desktop unit

Figure 8: Connection cable

Make sure to provide for proper ventilation when using the TPG 256 A as desktop unit. For this purpose, an acrylic glass stand can be ordered as accessory (→ Accessories  105).

Use a connection cable with ground conductor.

DANGER

If you can assume, for example for one of the following reasons, that the unit is no longer safe to operate, shut it down and secure it so that it cannot be inadvertently turned on again:

a) the unit has sustained visible damage b) it no longer functions c) it has been stored for a longer period under unfa-

vorable conditions

d) it has been subjected to severe transport stress

DANGER

Any interruption of the protective ground inside or outside the unit, or disconnection of the protective ground makes the equipment hazardous to operate (electric shock).

16 Commissioning

BG 5186 BEN / C (2013-12) MaxiGauge.om

4 Commissioning

4.1 Personnel

4.2 Set-Up, Assembly

Skilled personnel

The unit may be put into service by skilled and suitably trained persons only.

There are two possibilities for incorporating the unit into a switching cabinet according to DIN 41 494:

a) Installation in a 19" rack frame (2 height units) to-

gether with a second unit or with a blanking plate (

→ Accessories  105)

b) Installation in a 19" rack frame using an adapter

(3 height units, 63 length units, ¾ rack width)

→ Accessories  105)

(

Connection piece PT 441 480-T

Blank panel

Direct installation in a 19" frame

Installation with an adapter

Maxi Gauge

Frame width

Maxi Gauge

PT 441 481

Adapter PT 441 248-X

2 height units

Frame width

3 height units

With an acrylic glass stand (→ Accessories  106), it can also be used as bench top unit.

Caution

Consider the specifications in the "Technical data" with regard to the admissible ambient temperature, the protection class and the voltages.

BG 5186 BEN / C (2013-12) MaxiGauge.om Commissioning 17

4.3 Power Connection

Before switching the unit on make sure that the operating voltage of the unit corresponds to the local line voltage. The power ratings are indicated on the product nameplate on the rear panel of the unit.

Use only a 3-conductor power cable with protective ground. The power connector may only be plugged into a socket with a protective ground. This protection must not be defeated by an extension cable without ground conductor.

If the unit is to be installed in a rack, the power must be supplied via a switched power distributor.

18 Commissioning

BG 5186 BEN / C (2013-12) MaxiGauge.om

Notes:

BG 5186 BEN / C (2013-12) MaxiGauge.om Commissioning 19

Figure 9:

Gauge connector sensor

Figure 10:

Control connector control

Pin assignment 1 Identification

2 GND 3 Measurement signal + 4 Measurement signal 5 Screen 6 Vcc

Pin assignment 1 Analog output sensor 1

2 Analog output sensor 2 3 Analog output sensor 3 4 Analog output sensor 4 5 Analog output sensor 5 6 Analog output sensor 6 7 GND 8 GND 9 GND 10 External control sensor 1 11 External control sensor 2 12 External control sensor 3 13 External control sensor 4 14 External control sensor 5 15 External control sensor 6

Amphenol C91B,

6-pin, female

6

5

4

1

2

3

Front view

D-Sub, high density,

15-pin, female

515110 6

11

Front view

20 Commissioning

BG 5186 BEN / C (2013-12) MaxiGauge.om

4.4 Connecting the Gauges to sensor

4.5 control Control Connector

Caution

Switch the unit off before connecting or removing any gauges.

Connect the gauge to one of the six connectors sensor 1 … sensor 6 (PBR 260, IMR 265, CMR 27X and CMR 37X only to sensor 4 … sensor 6) on the rear

panel of the unit by means of a shielded cable (electromagnetic compatibility). Connect only gauge types specified in the "Technical Data".

Pre-fabricated connection cables as well as individual parts for custom cable fabrication are available (→ Accessories  105).

Configure the control connector as required. Plug it into

the control socket on the rear panel.

Caution

Use only shielded cables (electromagnetic compatibility).

BG 5186 BEN / C (2013-12) MaxiGauge.om Commissioning 21

Figure 11:

RS 232/422

Pinout connector for serial interfaces

Figure: 12

RS 485/422 isol.

Serial interface port

Figure 13:

relay

Connector for switch contacts

Pin assignment 1 Chassis

2 RXD (RS232C) 3 TXD (RS232C) 4 not connected 5 Signal Ground 6 RX+ (RS422) 7 RX- (RS422) 8 TX+ (RS422) 9 TX- (RS422)

Pin assignment 1 TX+

2 TX 3 RX+ 4 not connected 5 not connected 6 RX 7 not connected 8 Isolation ground

Pin assignment

6 5

Relay A

4

10

9

Relay B

8 13 12

Relay C 11 18 17

Relay D 16 21 20

Relay E 19 24 23

Relay F 22 14 15

Error Relay

3

25

1.7

+24 V max. 200 mA GND (Chassis)

D-Sub, 9-pin, male

165

9

Front view

RJ45, 8-pin

18

Front view

D-Sub, 25-pin,

female

13

25

1

14

Front view

22 Commissioning

BG 5186 BEN / C (2013-12) MaxiGauge.om

4.6 RS 232/422 Pinout Connector for Serial Interfaces

4.7 RS 485/422 isol. Interface Port

4.8 relay Connector for Switch Contacts

Connect the serial interface to the RS 232/422 pinout

connector on the back of the unit by means of a shielded cable (electromagnetic compatibility).

Connect the serial interface to the RS 485/422 isol. port

on the back of the unit by means of a shielded cable (electromagnetic compatibility).

The two connectors are linked 1:1. This allows for easy integration of the TPG 256 A into a network.

Connect the peripheral components to the relay con-

nector on the back of the unit by means of a shielded cable (electromagnetic compatibility).

WARNING

Only low voltages (→  13) may be connected. Higher voltages can damage equipment components.

A relay interface with changeover contacts for 250 V / 5 A is available as accessory (→  105).

BG 5186 BEN / C (2013-12) MaxiGauge.om Commissioning 23

5 Operating Elements and Modes

5.1 Operating Elements

Softkeys

Power switch

The TPG 256 A is operated with the five softkeys on the front panel (→ figure 14). The functions of these softkeys vary depending on the operating mode the unit is in. The current function is indicated by the LCD graphic display.

The mains power switch is located on the back of the unit (→ figure 15). When the unit is on, the mains power indicator (green LED) on the front panel is lit (→ figure

14).

When (Screensave) is activated, it may seem

that the unit is switched off (→  56).

24 Operating elements and modes

BG 5186 BEN / C (2013-12) MaxiGauge.om

Figure 14: Front panel

Figure 15: Power switch

12 3

1 Mains power indicator (green LED): on / off 2 Display (LCD): Measured values and operation data 3 5 Softkeys (operating keys with varying functions)

BG 5186 BEN / C (2013-12) MaxiGauge.om Operating elements and modes 25

Figure 16: Operating modes

Measurement Mode

Setpoint Mode

General Parameter Mode

Sensor Parameter Mode

Sensor Control Mode

Test Mode

26 Operating elements and modes

BG 5186 BEN / C (2013-12) MaxiGauge.om

5.2 Operating Modes (Overview)

«Measurement»

«Setpoint»

«General Parameter»

«Sensor Parameter»

«Sensor Control»

«Test»

In «Measurement» mode, the TPG 256 A displays either the measured value of one single gauge at a time in big characters or the measured values of all gauges simultaneously in small characters (→  28, 40).

In «Setpoint» mode, a you can assign a switching function to a measurement point and define the corresponding setpoints (→  30, 42).

In «General Parameter» mode, you can define the system parameters (for all connected gauges together) (→  31, 48).

In «Sensor Parameter» mode, you can define the relevant parameters for each gauge (→  32, 58).

In «Sensor Control» mode, you can define how an individual gauge is switched on / off (→  33, 69).

The «Test» mode is used for diagnostic and service purposes (troubleshooting). Special knowledge and skills are necessary for this work (→  34, 109).

BG 5186 BEN / C (2013-12) MaxiGauge.om Operating elements and modes 27

5.2.1 «Measurement»

S

All

Mode

Figure 17: «Single» display

Display

Softkeys

If the MaxiGauge is operated with linear gauges (CMR 261 … 375, APR 250 … 267), negative pressures may be indicated.

Possible causes:

• negative drift

• offset correction activated with positive offset

     

³´μ ³´μ Ø´Ù ³´μ Ø´Ù offset A¡ óÅ ¸ ÆÚ Â ÆÚ cal B¢ ÆÇÈ » õÝ ×ºÕ õÝ C£ ÉÊË CH 2 Ó½¾ Û ¼½¾ ß Û mbar D¤ E¥ ª£ F¦

ª¢

ensor

Mode





Measurement point selected (from 1 ... 6)



Name of measurement point, 4 characters, userdefinable (→  68)



Measured value or status (→  35)



Unit of measurement (→  49)



Offset correction activated (→  60)



Calibration factor ≠ 1.00 (→  65)



Designation of the switching function (A ... F) (→  42)



Controlling source (from 1 ... 6) (→  43)



Bargraph (analog measured value) (→  51)

Sensor Selection of measurement point

Sen-on * Sen-off *

All Displaying the measured values of all

)

Turning the gauge on

)

Turning the gauge off

measurement points

Mode Activating the operating mode selection

*) This parameter is not available for all gauge types

(→ Validity table  108).

28 Operating elements and modes

BG 5186 BEN / C (2013-12) MaxiGauge.om

Figure 18:

S

5

«All» display

Display

Softkeys

      

1 CH 1 2.9E-02 mbar A¡ 2 CH 2 244.5 mbar B¢ 3 CH 3 1.3E-08 mbar cal C£ 4 CH 4 9.9E-08 mbar degas D¤ CH 5 0.00530 mbar offset E¥ 6 CH 6 no Sensor F¦

ensor Sen-off Single Mode



All measurement points (1 ... 6) The selected measurement point is represented inversely



Name of measurement point, 4 characters, userdefinable (→  68)



Measured values or status (→  35)



Unit of measurement (→  49)



Calibration factor ≠ 1.00 (→  65)



Sensor 4: Degas activated (→  63) Sensor 5: Offset correction activated (→  60)



Designation of the switching function (A ... F) (→  42)



Controlling source (from 1 ... 6) (→  43)

Sensor

Sen-on * Sen-off *

Single Displaying the measured value of an

Selection of measurement point

)

Turning the gauge on

)

Turning the gauge off

individual measurement point

Mode Activating the operating mode selection

*) This parameter is not available for all gauge types

(→ Validity table  108).

BG 5186 BEN / C (2013-12) MaxiGauge.om Operating elements and modes 29

5.2.2 «Setpoint» Mode

Figure 19: «Setpoint» display

Display

Softkeys

³´μ Control Sensor 3 Â Setpoint high 5.00E-05 mbar Â Setpoint low 2.00E-05 mbar ¼½¾ UR-Control off

Relay next ®¯ ¬− Return

C Switching function selected

(from A ... F)

Control Sensor Controlling source (1 ... 6) of

switching function C (→  43)

Setpoint high Upper threshold of switching

function C (→  44)

Setpoint low Lower threshold of switching

function C (→  44)

UR-Control *

)

Behavior of switching function C

in case of underrange (→  46)

Relay Selection of switching function (from

A ... F)

next Parameter selection

®¯ Increasing the value ¬− Decreasing the value

Return Returning to the «Measurement» mode

*) This parameter is not available for all gauge types

(→ Validity table  108).

30 Operating elements and modes

BG 5186 BEN / C (2013-12) MaxiGauge.om

5.2.3 «General Parameter» Mode

Figure 20: «General Parameter» display

Display

Softkeys

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Key-lock Parameter input lock enabled or dis-

abled (→  48)

Unit *) Digits Resolution of the measured value dis-

Pressure unit (→  49)

play (logarithmic gauges only) (→  50)

Bargraph

Default Loading the standard values of the

Bargraph (→  51)

parameters (→  52)

Interface Baudrate Address **) Software address of the interface

Type of the serial interface (→  53) Baud rate of the interface (→  54)

(→  55)

Screensave Contrast

*) The pressure units depend on the gauges used

(→ Validity table  36).

)

**

This parameter is available for the RS485 interface only.

next Parameter selection

Screensave (→  56) Contrast of the display (→  57)

®¯ Increasing the value ¬− Decreasing the value

Return Returning to the «Measurement» mode

BG 5186 BEN / C (2013-12) MaxiGauge.om Operating elements and modes 31

5.2.4 «Sensor Para-

S

meter» Mode

Figure 21: «Sensor Parameter» display

Display

Softkeys

³´μ Type APR/CMR 1000 mbar óÅ Offset on 157.6 mbar ÆÇÈ CAL-Factor 1.010 ÉÊË Filter standard Name CH 2

ensor next ®¯ ¬− Return

2 Measurement point selected (from

1 ... 6)

)

Type *

Family of gauge **) connected /

type of gauge connected (→  59)

)

Offset ***

or

Degas ***

)

or

Range-Ext *** Cal-Factor Calibration factor selected for

Activation of offset correction (→  60)

Activation of degas (→  63)

)

Pirani range extension

measurement point 2 (→  65)

Filter Measured value filter selected for

measurement point 2 (→  66)

Name User-definable name for measure-

ment point (up to 4 characters) (→  68)

*) Depending on the type of gauge identified, the measurement

range may need to be indicated.

)

**

The family of linear including ACR gauges are displayed with

APR/CMR.

)

***

This parameter is not available for all gauge types

(→ Validity table  108).

Sensor Selection of measurement point

next Parameter selection

®¯ Increasing the value ¬− Decreasing the value

Return Returning to the «Measurement» mode

32 Operating elements and modes

BG 5186 BEN / C (2013-12) MaxiGauge.om

5.2.5 «Sensor Control»

S

Mode

Figure 22: «Sensor Control» display

Display

Softkeys

Ò´Ô Control Hotstart ñìí ON Power on îïð OFF Selfcontrol Ó½¾ OFF Threshold 9.00E-5 mbar

ensor next Return

5 Measurement point selected

(from 1 ... 6)

Control *

)

Controlling source of measure-

ment point 5 (→  71)

ON Measurement point 5 is activa-

ted when the unit is switched on

OFF Selfcontrol Switching-off mode of measure-

ment point 5

OFF Threshold Switching-off threshold of

measurement point 5 in selfmonitoring mode

*) This parameter is not available for all gauge types

(→ Validity table  108).

Sensor Selection of measurement point

next Parameter selection

®¯ Increasing the value ¬− Decreasing the value

Return Returning to the «Measurement» mode

BG 5186 BEN / C (2013-12) MaxiGauge.om Operating elements and modes 33

5.2.6 «Test» Mode

Figure 23: «Test» display

Display

Softkeys

Program BG509730-K

RAM A/D EPROM I/O EEPROM Interface Display WDT-Ctrl auto

next Start Return

Program

RAM EPROM EEPROM Display A/D I/O Interface WDT-Ctrl

Firmware version (→  109)

RAM self-test (→  110) EPROM self-test (→  110) EEPROM self-test (→  110) Display self-test (→  111) Test analog/digital converter (→  111) Relay test (→  111) Test serial interface (→  112) Watchdog control (→  112)

next Parameter selection Start Starting a test sequence

Return Returning to the «Measurement» mode

The «Test» mode is only available if a key was

pressed while the unit was switched on.

34 Operating elements and modes

BG 5186 BEN / C (2013-12) MaxiGauge.om

6 Display Formats and Pressure Units

S

All

6.1 Display Formats

Figure 24: Exponential representation

Figure 25: Display formats

Both, exponential and floating point formats are used. The format is changed over automatically. Pressures indicated in «Pa» are displayed in exponential format only.

³´μ óÐ ¿À ³´μ Ò´Ô ³´μ ¿À A¡ óÅ ÆÑÁ ÃÁ Â Â Â Â ÃÁ cal B¢ ÆÇÈ ÉÊÎ Á ×ºÕ ÷º ÌÏ Â Â Á C£ ÉÊË CH 2 Áß ÍÎ ¼½¾ æ½Ë ¼½¾ ÍÎ mbar D¤ E¥

+0.2 «¡

ª0 F¦

ensor

50 bar

Logarithmic

gauges

Mode

Linear

gauges

1000 mbar

Floating point format Floating point format

e.g. 4.3 e.g. 4.3

1 mbar

(or 1 Torr)

-11

10

mbar

e.g. 4.16E-01

Exponential format

BG 5186 BEN / C (2013-12) MaxiGauge.om Display formats / Pressure units 35

6.2 Pressure Units

S

2

6.3 Cursor

Figure 26: Cursor (inverse representation of parameter value)

Figure 27: Cursor (inverse representation of gauge / switching function)

Whether a particular pressure unit can be displayed or not depends on the gauge used. The TPG 256 A allows the selection of a specific pressure unit only if it is possible to display the pressure in that unit over the whole measurement range.

Gauge Range*) mbar/bar Torr Pa

Logarithmic 10

-11

…

mbar

  

1000 mbar

0.1 mbar

1 mbar

10 mbar

100 mbar

Linear 1000 mbar

2 bar

5 bar

10 bar

50 bar

                  

Conversion of pressure units (→  109)

*) Full scale value for linear gauges

The cursor points out a selected parameter (value), a gauge or a switching function status «on» by representing it inversely.

Key-lock off Interface RS-485 Baudrate 19200 Unit Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

mbar

1 CH 1 2.9E-02 mbar A¡ CH 2 4.16E-01 mbar B¢ 3 CH 3 1.3E-08 mbar cal 4 CH 4 9.9E-11 mbar D¤ 5 CH 5 0.0053 mbar offset E¥ 6 CH 6 no Sensor F¦

ensor Sen-off Single Mode

C£

36 Display formats / Pressure units

BG 5186 BEN / C (2013-12) MaxiGauge.om

7 Operation

7.1 Personnel

7.2 Switching the Unit On and Off

Power ON

Figure 28: Power switch

Skilled personnel

The unit may only be operated by skilled and trained persons that fully understand the possible hazards related to the corresponding application.

Check that all cables and gauges have been correctly installed and that the specifications listed in the technical data have been met.

Turn the unit on with the power switch (or centrally via a switched power distributor if the unit is rack mounted). The power switch is located on the rear panel of the unit.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 37

Figure 29: Display after power ON

After power ON, the unit:

• automatically performs a self-test, and «TPG 256 A» is displayed

• identifies the gauges connected

• activates parameters that were in effect before the

last power OFF

• switches to the «Measurement» mode for the measurement point selected before the last power OFF

• adapts the parameters if required (if other gauges were previously connected)

Power OFF

• Turn the unit off with the power switch (or centrally via a switched distributor if the unit is rack mounted).

Wait at least 10 seconds before turning the unit

on again in order for it to correctly initialize itself.

38 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

7.3 Selecting the

S

All

S

Operating Mode

Figure 30: Selecting the operating mode

Returning from other operating modes

In the superset«Measurement» mode, you can call a menu of further operating modes by pressing the [Mode] softkey

Select the desired mode by pressing the corresponding softkey:

• [Setpoint] «Setpoint» mode

• [Gen-Par] «General Parameter» mode

• [Sen-Par] «Sensor Parameter» mode

• [Sen-Ctrl] «Sensor Control» mode

³´μ óÐ ¿À ³´μ Ò´Ô ³´μ ¿À A¡ óÅ ÆÑÁ ÃÁ Â Â Â Â ÃÁ cal B¢ ÆÇÈ ÉÊÎ Á ×ºÕ ÷º ÌÏ Â Â Á C£ ÉÊË CH 2 Áß ÍÎ ¼½¾ æ½Ë ¼½¾ ÍÎ mbar D¤ E¥

«¡

ª0 F¦

ensor

ensor Gen-Par Sen-Par Sen-Ctrl Test

Mode

The «Test» mode can only be selected if a key was pressed while the unit was switched on:

• [Test] «Test» mode

If you are in a lower mode, simply press the [Return] softkey to return to the superset «Measurement» mode. If you do not press any key for 1 minute, the display returns automatically to the «Measurement» mode.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 39

7.4 «Measurement»

S

All

Mode

Figure 31: «Single» display

Figure 32: «All» display

7.4.1 Selecting the Measurement Point (

Sensor)

In the superset «Measurement» mode, the unit displays the measured values. If you are in another (lower) mode and do not press any key for 1 minute, the unit returns automatically to the «Measurement» mode.

(→ Overview «Measurement» mode  28).

³´μ óÐ ¿À ³´μ Ò´Ô ³´μ ¿À A¡ óÅ ÆÑÁ ÃÁ Â Â Â Â ÃÁ cal B¢ ÆÇÈ ÉÊÎ Á ×ºÕ ÷º ÌÏ Â Â Á C£ ÉÊË CH 2 Áß ÍÎ ¼½¾ æ½Ë ¼½¾ ÍÎ mbar D¤ E¥

«1

ª0 F¦

ensor

1 CH 1 2.9E-02 mbar A¡

2

CH 2 4.16E-01 mbar B¢ 3 CH 3 1.3E-08 mbar cal C£ 4 CH 4 9.9E-11 mbar D¤ 5 CH 5 0.0053 mbar offset E¥ 6 CH 6 no Sensor F¦

ensor Sen-off Single Mode

Mode

• The measurement point is indicated as a number on the left of the display.

• Select the next measurement point with the [

Sensor]

softkey (in «Single» measurement mode, the corresponding number is increased whereas in «All», the selected measurement point is represented inversely). After the measurement point 6 the display changes to measurement point 1.

40 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

7.4.2 Switching the Gauge On/Off (

Sen-on/off)

7.4.3 Display of a Single Gauge / All Gauges (

Single/All)

• Press the [Sen-off] softkey to turn the selected gauge off or the [

Sen-on] key to turn it on.

Caution

Turning a gauge on or off may affect the status of the relays.

This parameter is not available for all gauge

types (→ Validity table  108).

• Press the [Single]/[All] softkey in order for the unit to display either the measured value of one single gauge at a time or the measured values of all gauges simultaneously (→  40).

Status or error messages may be displayed

instead of measured values (→ Status messages  75, Error messages  77). After the problem is remedied, the measured value is again displayed correctly.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 41

7.5 «Setpoint» Mode

Figure 33: «Setpoint» display

7.5.1 Selecting the Switching Function (

Relay)

In «Setpoint» mode, you can assign a controlling source to a switching function and define the upper and lower thresholds. Additionally, you can select the behavior of the switching function in the event of an underrange.

(→ Overview «Setpoint» mode  30).

³´μ Control Sensor 3 Â Setpoint high 5.00E-05 mbar Â Setpoint low 2.00E-05 mbar ¼½¾ UR-Control off

Relay next ®¯ ¬− Return

The switching function is represented as a letter on the left of the display.

Selecting another switching function:

• Press the [ switching function (

Relay] softkey to choose the desired

A ... F).

The modifications are automatically stored in non-volatile memory.

42 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

7.5.2 Assigning

S

All

Measurement Points (

Control Sensor)

Figure 34: «Setpoint» display

«Measurement» display

The upper parameter line «Control Sensor» shows which measurement point is assigned to a switching function.

The corresponding measurement point has to be assigned to each switching function individually. In «Measurement» mode, all assignments are displayed simultaneously.

³´μ Control Sensor 3 Â Setpoint high 5.00E-05 mbar Â Setpoint low 2.00E-05 mbar ¼½¾ UR-Control off

Relay next ®¯ ¬− Return

³´μ óÐ ¿À ³´μ Ò´Ô ³´μ ¿À A¡ óÅ ÆÑÁ ÃÁ Â Â Â Â ÃÁ cal B¢ ÆÇÈ ÉÊÎ Á ×ºÕ ÷º ÌÏ Â Â Á C£ ÉÊË CH 2 Áß ÍÎ ¼½¾ æ½Ë ¼½¾ ÍÎ mbar D¤ E¥

«¡

+0 F¦

ensor Sen-on

Mode

Assigning another measurement point:

• Select the «Setpoint» mode (if applicable) (→  39)

• Press the [

Control Sensor» parameter

«

• Press the [ value «

• Press the [

next] softkey to select the

®¯]or [¬−] softkey to select a parameter

1 ... 6» (measurement points)

Return] softkey to return to the

«Measurement» mode

The modifications are automatically stored in non-volatile memory.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 43

7.5.3 Defining the Threshold Values (

Setpoint)

Figure 35: «Setpoint» display

The upper and lower thresholds are defined in the second and third parameter line.

³´μ Control Sensor 3 Â Setpoint high 5.00E-05 mbar Â Setpoint low 2.00E-05 mbar ¼½¾ UR-Control off

Relay next ®¯ ¬− Return

Defining the threshold values:

• Select the «Setpoint» mode (if applicable) (→  39)

• Press the [

Setpoint high» parameter

«

• Press the [

next] softkey to select the

®¯] or [¬−] softkey to increase /decrease

the upper threshold value

• Press the [ «

Setpoint low» parameter

• Press the [

next] softkey to select the

®¯] or [¬−] softkey to increase / decrease

the lower threshold value

• Press the [

Return] softkey to return to the

«Measurement» mode

A threshold that is outside the measuring range

is adjusted in such a way that it corresponds to the lower (upper) range limit.

We recommend setting the threshold ½ decade above the lower or ½ below the upper threshold limit.

If both thresholds are outside the measuring range, they are adjusted analogously in such a way that a minimum hysteresis is achieved.

For logarithmic gauges, threshold values are

displayed in logarithmic or floating point format, whereas for linear gauges, they are displayed in floating point format only (→ Display formats  35).

The modifications are automatically stored in non-volatile memory.

44 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

Figure 36:

S

C

Threshold values of a switching function

Figure 37: Inverse representation of the selected switching function (

C3)

setpoint low setpoint high

Pressure

u

l

a

v

d

e

r

u

s

a

e

M

Setpoint high

Setpoint low

Time

OnOff Off

Switching function

1 CH 1 2.9E-02 mbar A¡ 2 CH 2 4.16E-01 mbar B¢ 3 CH 3 1.3E-08 mbar cal 4 CH 4 9.9E-11 mbar D¤ 5 CH 5 0.00530 mbar offset E¥ 6 CH 6 no Sensor F¦

ensor Sen-off Single Mode

The setpoint low defines the pressure reading at which the switching function is activated when the pressure is dropping.

setpoint high defines the pressure reading at

The which the switching function is deactivated when the pressure is rising.

If other gauge types were connected previ-

ously, the threshold may possibly have been adapted automatically.

e

£

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 45

7.5.4 Underrange Control (

UR-Control)

Logarithmic gauges:

The minimum hysteresis between the upper and lower threshold is at least 10% of the lower threshold. This prevents an unstable state. If you set the upper threshold lower than the lower one, this minimum hysteresis is automatically applied.

Linear gauges: The minimum hysteresis between the upper and lower threshold is at least 1% of the measurement range. This prevents an unstable state. If you set the upper threshold lower then the lower threshold, this minimum hysteresis is automatically applied.

This parameter controls the behavior of the switching function in the event of an underrange (→ Status messages  75).

An underrange may occur for one of the following reasons:

 The pressure in the vacuum system is lower than the

lower limit of the measurement range

 The gauge has not yet ignited  The discharge has failed  A fault has occurred

When the underrange control is enabled, an underrange is interpreted as inadmissible measured value: The switching function changes to «OFF».

When the underrange control is deactivated, the switching function remains «ON» in the event of an underrange.

The underrange control is deactivated by default.

46 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

Figure 38: «Setpoint» mode display

³´μ Control Sensor 3 Â Setpoint high 5.00E-05 mbar Â Setpoint low 2.00E-05 mbar ¼½¾ UR-Control off

Relay next ®¯ ¬− Return

Enabling/disabling the underrange control:

• Select the «Setpoint» mode (if applicable) (→  39)

• Press the [

UR-Control» parameter

«

• Press the [ (underrange control enabled) or «

next] softkey to select the

®¯] or [¬−] softkey to select «On»

Off» (underrange

control disabled (default))

• Press the [

Return] softkey to return to the

«Measurement» mode

This parameter is not available for all gauge

types (→ Validity table  108).

If the pressure in the vacuum chamber may be

lower than the lower limit of the measurement range of the gauge it may be advantageous to select «

off».

When «On» is selected, the switching function

evaluation is suppressed for approx. 10 seconds after the gauge has been turned on or an underrange has occurred. The switching function remains «OFF» for this time.

The modifications are automatically stored in non-volatile memory.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 47

7.6 «General Parameter» Mode

Figure 39: «General Parameter» display

7.6.1 Parameter Input

Lock (

Key-lock)

In «General Parameter» mode, you can define the system parameters for all connected gauges together. (→ Overview «General Parameter» mode  31).

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

The parameter input lock prevents inadvertent entries and consequent malfunctions. When the parameter input lock is enabled, only the «

Key-Lock» parameter for dis-

abling the input lock can be modified.

Turning the parameter input lock ON /OFF:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Key-lock»

parameter

• Press the [ lock ON) or «

• Press the [

®¯] or [¬−] softkey to select «On» (input

Off» (input lock OFF(default))

Return] softkey to return to the

«Measurement» mode

If the input lock is enabled and you press a

softkey to modify any other parameter than «

Key-lock», «locked» is displayed instead

of the function of the softkey pressed.

The modifications are automatically stored in non-volatile memory.

48 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

7.6.2 Selecting the Pressure Unit (

Unit)

Figure 40: «General Parameter» display

The unit can display the following pressure units: (milli)bar, Torr, and Pascal.

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Selecting the pressure unit:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Unit» pa-

rameter

• Press the [

Pa», or «mbar» (default) *

«

• Press the [

®¯] or [¬−] softkey to select «Torr»,

Return] softkey to return to the

)

«Measurement» mode

*) For linear gauges, a specific pressure unit can only be selected if

it is possible to display the measured pressure in that unit over the whole measurement range of the gauge (→ table  36).

The modifications are automatically stored in non-volatile memory.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 49

7.6.3 Display Resolution (

Digits)

Figure 41: «General Parameter» display

For observing even fine measurement value fluctuations, the display can be increased from 2 to 3 digits. The measured value will thus have a finer resolution. (Only effective for logarithmic gauges.)

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Defining the number of digits:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Digits» pa-

rameter

• Press the [

®¯] or [¬−] softkey to select «3» or «2»

(default)

• Press the [

Return] softkey to return to the

«Measurement» mode

When Range-Ext (→  64) is on, the display resolution of the PCR and TPR gauges in the pressure range p<1.0E-4 mbar is reduced by one decimal digit.

The modifications are automatically stored in non-volatile memory.

50 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

7.6.4 Bargraph (

Bargraph)

Figure 42: «General Parameter» display

The bargraph allows quick assessment of the measured value and visual observation of the measurement changes (trend).

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Adjusting the bargraph:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Bargraph»

parameter

• Press the [ (bargraph deactivated), « measurement range), or «

®¯] or [¬−] softkey to select «Off»

Sen-Range» (bar range =

1 Decade» (bar = meas-

urement value exponent (default))

• Press the [

Return] softkey to return to the

«Measurement» mode

The modifications are automatically stored in non-volatile memory.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 51

7.6.5 Restoring Default Values (

Figure 43: «General Parameter» display

Default)

This parameter allows to restore all user defined / modified parameters to the factory setting.

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next °± set ±² Return

Restoring the default parameters:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] to select the «Default set» pa-

rameter

The [

®¯] and [¬−] softkeys are represented as one sin-

gle symbol prompting the user to press them simultane-

°± set ±²].

ously: [

• Press both softkeys simultaneously to restore the default values

• Press the [

Return] softkey to return to the

«Measurement» mode

Caution

Restoring the default values cannot be reversed!

The modifications are automatically stored in non-volatile memory.

52 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

7.6.6 Defining an Interface (

Interface)

Figure 44: «General Parameter» display

The serial interfaces are used for external control of the unit as well as for transfer of measured data and modification of parameters (→  13). The desired interface is defined with the following parameter:

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Defining the interface:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Interface»

parameter

• Press the [

RS-485» (serial interface RS485, isolated),

« «

RS-422I» (serial interface RS422C, isolated), RS-422» (serial interface RS422C, not isolated),

«

RS-232» (serial interface RS232C, not isolated

«

®¯] or [¬−] softkey to select among

(default))

• Press the [

Return] softkey to return to the

«Measurement» mode

Check whether the unit is equipped with all

interfaces listed above (→  2, 12).

The modifications are automatically stored in non-volatile memory.

Further information →  80.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 53

7.6.7 Defining the Baud Rate (

Baudrate)

Figure 45: «General Parameter» display

This parameter allows to set the baud rate for the serial interface defined as «

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Interface» parameter value.

Setting the baud rate:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Baudrate»

parameter

• Press the [ (baud), « (baud), «

®¯] or [¬−] softkey to select among «300» 1200» (baud), «2400» (baud), «4800» 9600» (baud (default)), and «19200»

(baud)

• Press the [

Return] softkey to return to the

«Measurement» mode

The modifications are automatically stored in non-volatile memory.

Further information →  80.

54 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

7.6.8 Defining the Node Address (

Address)

Figure 46: «General Parameter» display

The RS485 interface allows to set up a network of max. 32 display units per interface. The node (or device) address can be set between 0 and 31.

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Defining the node address:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Address»

parameter

• Press the [ value «

• Press the [

®¯] or [¬−] softkey to select a parameter

0 ... 31» (node address) (default = 0)

Return] softkey to return to the

«Measurement» mode

This parameter is only available for the RS485

interface.

The modifications are automatically stored in non-volatile memory.

Further information →  80.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 55

7.6.9 Screensave (

Screensave)

Figure 47: «General Parameter» display

In order for the life of the CFL lamp to be prolonged (half-life period approx. 20'000 hours), the backlighting of the LC display can be switched off automatically after an adjustable delay of 1 ... 99 hours while the LCD remains on.

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Adjusting the screensave function:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

Screensave» parameter

«

• Press the [

1 ... 99» (number of hours after which the back-

«

next] softkey to select the

®¯] or [¬−] softkey to select «Off» or

lighting of the LCD is to be switched off after a key has been pressed) (Off = screensave deactivated (default))

• Press the [

Return] softkey to return to the

«Measurement» mode

Press any softkey to reactivate the background

lighting. While the display is dark, all control or selection functions of the softkeys are disabled.

The modifications are automatically stored in non-volatile memory.

56 Operation

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7.6.10 Display Contrast (

Contrast)

Figure 48: «General Parameter» display

This parameter allows to set the contrast of the LC display within a numeric range of 0 ... 20 according to your individual requirements, such as ambient conditions and viewing angle.

Key-lock off Interface RS-485 Baudrate 19200 Unit mbar Address 0 Digits 3 Bargraph 1 Decade Screensave 5 h Default set Contrast 10

next ®¯ ¬− Return

Setting the display contrast:

• Select the «General Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Contrast»

parameter

• Press the [ value «

®¯] or [¬−] softkey to select a parameter

0 ... 20» (minimum contrast ... maximum con-

trast) (default = 10)

• Press the [

Return] softkey to return to the

«Measurement» mode

The modifications are automatically stored in non-volatile memory.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 57

7.7 «Sensor Para-

S

meter» Mode

Figure 49: «Sensor Parameter» display

7.7.1 Selecting a Measurement Point (

Sensor)

In «Sensor Parameter» mode, you can define the parameters relevant for each measurement point.

(→ Overview «Sensor Parameter» mode  32).

³´μ Type APR/CMR 1000 mbar óÅ Offset on 157.6 mbar ÆÇÈ CAL-Factor 1.010 ÉÊË Filter standard Name CH 2

ensor next ®¯ ¬− Return

The measurement point to which the displayed parameters apply is shown as a big figure (1 ... 6) on the left of the display.

• Select the «Sensor Parameter» mode (if applicable)

(→  39)

• Press the [ urement point (from

Sensor] softkey to select the next meas-

1 ... 6).

58 Operation

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7.7.2 Gauge Identifi-

S

cation (

Figure 50: «Sensor Parameter» display

Type)

The TPG 256 A automatically identifies any connected Pfeiffer Vacuum gauges. For linear gauges, a measurement range is displayed additionally as parameter value *

)

behind the gauge type **). This parameter value has to be adjusted according to the connected gauge type.

*) This parameter is not available for all gauge types

(→ Validity table  108).

)

**

The family of linear gauges are displayed with APR/CMR.

³´μ Type APR/CMR 1000 mbar óÅ Offset on 157.6 mbar ÆÇÈ CAL-Factor 1.010 ÉÊË Filter standard Name CH 2

ensor next ®¯ ¬− Return

Adjusting the measurement range:

• Select the «Sensor Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «APR/CMR»

(linear gauge types identified) parameter

• Press the [

0.1 mbar», «1 mbar», «10 mbar», «100 mbar»,

«

1000 mbar» (default), «2 bar», «5 bar», «10

«

bar

• Press the [

®¯] or [¬−] softkey to select among

», and «50 bar»

Return] softkey to return to the

«Measurement» mode

The modifications are automatically stored in non-volatile memory.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 59

7.7.3 Offset Function

S

(

Offset) (zeroing)

Figure 51: «Sensor Parameter» display

Activating / deactivating the offset function

Zero adjustment

The offset function allows the zero of linear gauges to be aligned to the currently measured value (uncorrected outputsignal of the gauge) within a range of -5 ... +110% of the Full Scale setting. It affects the:

 display  switching functions (threshold value display)  analog outputs of the unit  serial interfaces

³´μ Type APR/CMR 1000 mbar óÅ Offset on 157.6 mbar ÆÇÈ CAL-Factor 1.010 ÉÊË Filter standard Name CH 2

ensor next ®¯ ¬− Return

• Select the «Sensor Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Offset» pa-

rameter

• Press the [ correction activated) or «

®¯] or [¬−] softkey to select «on», (offset

off» (offset correction de-

activated) (default) (the previously saved offset value displayed at the right hand side of the «

on»/«off»

parameter value)

This function can be used for two different purposes:

There are two methods for adjusting the zero of a linear gauge. Note, however, that the actual pressure must be lower than the lower limit of the measurement range of the gauge:

− Set the zero by adjusting the „ZERO“ potentiometer

of the gauge (

→  [16] … [18])

− With the offset function of the measurement and

control unit set the current pressure reading to zero

60 Operation

BG 5186 BEN / C (2013-12) MaxiGauge.om

Zeroing at any pressure

Procedure for the second method:

• at a pressure lower than the lower limit of the measurement range of the gauge, activate the offset function («

• press the [ saved offset value (at the right hand side of « the displays of the [

Actual] and [Zero]

[

• press the [

on») next] softkey to select the previously

on»);

®¯] and [¬−] softkeys change to

Actual] softkey to accept the currently

measured value (zero deviation) as new offset value. (If you like to set the offset value to zero, press the [

Zero] softkey).

• press the [

Return] softkey to return to the

«Measurement» mode

The advantage of the second method is that no direct access to the potentiometer of the gauge is required.

The pressure reading of the measurement and control unit can be set to zero at any pressure within the measurement range. All subsequent readings will then be relative to that pressure and may therefore be positive or negative. This method allows for monitoring of pressure variations during a process.

The procedure is the same as for the second method.

This parameter is not available for all gauge

types (→ Validity table  108).

The modifications are automatically stored in non-volatile memory.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 61

Example:

S

When the offset function is activated, the stored offset value is subtracted from the currently measured value.

³´μ Type APR/CMR 1000 mbar óÅ Offset on 10.3 mbar ÆÇÈ CAL-Factor 1.000 ÉÊË Filter standard Name CH 2

ensor next ®¯ ¬− Return

Currently

measured

value

10.3 10.3 0 10.3

17.4 10.3 7.1 17.4

7.4 10.3 -2.9 7.4

Stored

offset value

Display with

offset

activated:

offset

Display with

offset

deactivated:

When the zero of the gauge is adjusted with the

"ZERO" potentiometer, the offset function must be deactivated. The offset values are preserved when the unit is switched off.

62 Operation

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7.7.4 Activating the

S

Degas Routine (

Degas)

Figure 52: «Sensor Parameter» display

Contamination of the electrode system of the Compact Fullrange™ BA Gauge (PBR 260) can cause instabilities of the measured values.

The degassing routine is used for cleaning the electrode system by heating the electron collector grid to approx. 700 °C by electron bombardment.

It normally takes 3 minutes but it can be aborted at any stage.

óÐ Type PBR ÆÑÁ Degas on ÉÊÎ CAL-Factor 1.010 Á Filter standard Name CH 4

ensor next ®¯ ¬− Return

To activate or abort the degassing routine:

• Select the «Sensor Parameter» mode (if applicable)

→  39)

(

• Press the [

next] softkey to select the «Degas» pa-

rameter

• Press the [ activated) or «

• Press the [

®¯] or [¬−] softkey to select «on», (Degas

off» (Degas deactivated) *

Return] softkey to return to the

)

(default)

«Measurement» mode

*) After conclusion of the ≈3 min. degassing routine, the «Degas»

parameter automatically goes back to «off» (default).

• The Degas function is only available for sensor connectors 4 to 6.

• The degassing routine can only be started («

on») when the corresponding

gauge is turned on.

• When Degas = « message «

on», the status

Degas» is displayed in

«Measurement» mode.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 63

7.7.5 Pirani Range

S

Extension (

Range-Ext)

Figure 53: «Sensor Parameter» display

Activate/deactivate Pirani range extension

The display and setpoint adjustment range of the PCR und TPR gauges can be extended.

óÐ Type PCR ÆÑÁ Range-Ext off ÉÊÎ CAL-Factor 1.010 Á Filter standard Name CH 4

ensor next ®¯ ¬− Return

• Select the «Sensor Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Range-Ext»

parameter

• Press the [ range extension activated) or «

®¯] or [¬−]softkey to select «on», (Pirani

off» (Pirani range

extension deactivated) (default)

• Press the [

Return] softkey to return to the

«Measurement» mode

64 Operation

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7.7.6 Setting the

S

Calibration Factor (

Cal-Factor)

Figure 54: «Sensor Parameter» display

For logarithmic gauges

For linear gauges

The calibration function allows to adjust the measured value of a gauge. It is predominantly used for correcting the measured values of logarithmic gauges for gases other than N linear gauges. The calibration factor affects the:

 display *  switching functions (threshold value display) *  analog outputs of the unit  serial interfaces *

*) For IMR 260, IMR 265, and PBR 260 (p≤10–1 mbar) in the hot

cathode measurement range only.

³´μ Type TPR óÅ ÆÇÈ CAL-Factor 1.010 ÉÊË Filter standard Name CH 2

ensor next ®¯ ¬− Return

and for correcting the full scale values of

2

)

Each of the six gauges can be calibrated in the following way:

• Select the «Sensor Parameter» mode (if applicable)

(→  39)

• Press the [ «

Cal-Factor» in the following way:

next] softkey to select the

• Press the [®¯] or [¬−] softkey to adjust the parameter value «

0.10 ... 1.00 (default) ... 9.99» (the value

increases or decreases by

0.01)

• If you hold down the softkey continually, the step size changes automatically to

• Press the [ «Measurement» mode

Return] softkey to return to the

0.1

• Press the [®¯] or [¬−] softkey to adjust the parameter value «

0.500 ... 1.000 (default) ... 2.000» (the

value increases or decreases by

0.001)

• If you hold down the softkey continually, the step size changes automatically to

• Press the [

Return] softkey to return to the

0.01

«Measurement» mode

The modifications are automatically stored in non-volatile memory.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 65

7.7.7 Setting the

S

Measurement Value Filter (

Filter)

Figure 55: «Sensor Parameter» display

Standard Filter

Figure 56: Measurement value filter

Standard

The measurement value filter allows better evaluation of unstable or faulty measurement signals. It affects the:

 display  switching functions (threshold value display)  analog outputs of the unit  serial interfaces

³´μ Type APR/CMR 1000 mbar óÅ Offset on 157.6 mbar ÆÇÈ CAL-Factor 1.010 ÉÊË Filter standard Name CH 2

ensor next ®¯ ¬− Return

For each of the six gauges, a filter can be set in the following way:

• Select the «Sensor Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Filter» pa-

rameter

• Press the [

fast», «slow» and «standard» (default) pa-

«

®¯] or [¬−] softkey to select among

rameter value (→ following explanations)

• Press the [

Return] softkey to return to the

«Measurement» mode

The modifications are automatically stored in non-volatile memory.

Default setting with a good relationship between response and sensitivity of the display and the switching functions to changes in measured values.

p

66 Operation

t

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Slow Filter

Figure 57: Measurement value filter

Fast Filter

Figure 58: Measurement value filter

Slow

Fast

Choose «slow» if the display and the switching functions should not respond to small changes in measured values. As a consequence, the unit will respond more slowly to changes in measured values.

p

t

Choose «fast» if the display and the switching functions should respond quickly to fluctuations in measured values. As a consequence, the unit will respond faster to interference in measured values.

p

t

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 67

7.7.8 Defining the

S

Measurement Point Name (

Figure 59: «Sensor Parameter» display

Name)

The measurement point name is shown on the display as CH 1, CH 2 ... CH 6 (CH = channel).

These 4 characters can be overwritten with any combination of characters comprising letters, digits or spaces.

This may be useful, for instance, for differentiating gauges in a system or for certain functional designations.

³´μ Type APR/CMR 1000 mbar óÅ Offset on 157.6 mbar ÆÇÈ CAL-Factor 1.010 ÉÊË Filter standard Name CH 2

ensor next ®¯ ¬− Return

Defining the measurement point name:

• Select the «Sensor Parameter» mode (if applicable)

(→  39)

• Press the [

next] softkey to select the «Name» para-

meter (the cursor jumps automatically to the first digit)

• Press the [ value «

®¯] or [¬−] softkey to select a parameter

A ... Z» (default: C), «0 ... 9», « », (first char-

acter of the name)

• Press the [

value «

next] softkey to select the next digit

®¯] or [¬−] softkey to select a parameter

A ... Z» (default: H), «0 ... 9», « », (second

character of the name)

• Select the third (default: space) and the fourth (default: digit 1 ... 6) character of the name as described above

• Press the [

Return] softkey to return to the

«Measurement» mode

The modifications are automatically stored in non-volatile memory.

68 Operation

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7.8 «Sensor Control» Mode

Gauge control possibilities

In «Sensor Control» mode *), you can define how cold cathode, and FullRange™ and ionization gauges are turned on/off by other gauges or control devices.

*) This parameter is not available for all gauge types

(→ Validity table  108).

(→ Overview «Sensor Control» mode  33).

When defining the control options, note that:

• only the gauge control configurations shown on table

«Sensor Control» (→  70 ff) are valid

• the Pirani and all linear gauges are always active after the TPG 256 A has been switched on

• «Hot Start» means that the gauge is automatically turned on when the power is switched on. After power on the hot start control settings (→  74) are applied for turning the gauge off. This operating mode allows for automatic continuation of the measurement after a power failure.

• a gauge cannot be turned off by a «Hot Start».

• a gauge cannot turn itself on when a certain pressure

is reached

• both, cold cathode and linear gauges for a full scale pressure range ≥1000 mbar (1 bar) cannot be used as control sources

• the six «Ext-Ctl» inputs are permanently assigned to the six gauge ports.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 69

Figure 60: Table «Sensor Control»

Controlled Controlling source

sensor TPR/PCR PKR IMR / PBR

1 ... 1E-3*) 1 ... 1E-5 -

IMR/ PBR

on

off

IKR on

off

1 ... 1E-3*) 1 ... 1E-5 -

1E-2 ... 1E-3*)1E-2 ... 1E-5 1E-2 ... 5E-10

Controlled

sensor

APR / CMR

IMR/ PBR

on

off

IKR on

off

/ ACR

1 mbar

1 ... 1E-3 1 ... 1E-2 1 ... 1E-1

1E-2 ... 1E-3 1E-2 -

Controlling source

F.S.

APR / CMR

/ ACR

10 mbar

F.S.

APR / CMR

/ ACR

100 mbar

F.S.

Controlled

sensor

Controlling source

Extern Manual Hot Start

1E-2...1E-5**)

)

Yes

PKR

on

off

IMR/ PBR

on

off

IKR on

off

CTL 1 ... 6 Yes

CTL 1 ... 6 Yes -

CTL 1 ... 6 Yes

CTL 1 ... 6 Yes -

CTL 1 ... 6

Yes

Yes or

1E-2...1E-5**

Bold: default values

*) 1E-4 mbar, if Range-Ext (→  64) is activated

)

**

self-monitoring

- no control possibility

The values such as

1 ... 1E-3 specified in the above table

refer to mbar and correspond to the adjustable setpoints at which the gauges are turned on or off.

70 Operation

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7.8.1 Selecting the Controlled Gauge (

Sensor)

Figure 61: «Sensor Control» display

7.8.2 Selecting the Controlling Source (

Control)

The controlled gauge to which the following parameters access is shown as a big figure on the left of the display.

Ò´Ô Control Sensor 6 ñìí ON Threshold 1.00E-05 mbar îïð OFF Threshold 1.00E-04 mbar Ó½¾

Selecting another measurement point:

• Press the [ measurement point (from

Sensor] key to select the next higher

1 ... 6).

The controlling source is shown in the upper display line at the right of the «

Control» parameter.

To select the controlling source, proceed as follows (in this example, the default gauge is «

Sensor 6»):

• Select the «Sensor Control» mode (if applicable) (→  39)

• Press the [

next] softkey to select the «Control»

parameter

• Press the [

¬−] softkey to select the «Sensor 5 ... 1»

parameter value (if the selected gauge cannot be used as controlling source, the error message

no Sensor Control») is displayed.

«

• Press the [

Manual» and «Hotstart»

«

®¯] softkey to select among «Extern»,

Once the controlling source has been selected, its setpoints for turning the controlled gauge on / off can be defined. The following sections explain how this is done.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 71

7.8.3 Setting the «

Sensor 1 ... 6»

Control

7.8.4 Setting the

Extern»

« Control

Figure 62:

Control Extern» display

«

Setting the parameters:

• Select «

Control» «Sensor 1 ... 6» as controlling

source (→  71)

• Press the [

the parameter value *

• Press the [

Threshold

• Select the [ the parameter value

• Press the [

next] softkey to select «ON Threshold» ®¯] or [¬−] softkey to increase / decrease

next] softkey to select «OFF

)

»

®¯] or [¬−] softkey to increase / decrease

Return] softkey to return to the

*)

«Measurement» mode

*) A minimum hysteresis of 10 % for logarithmic and 1 % for linear

gauges is automatically applied (→ NOTES, 

44 … 46).

The six «Ext-Ctl» inputs are permanently assigned to the six gauge ports.

When the external control source becomes «

low», the

controlled gauge turns on, when the external control source becomes «

high», the controlled gauge turns off.

This behavior is factory set and cannot be modified.

Ò´Ô Control Extern ñìí ON Ext 5 low îïð OFF Ext 5 high Ó½¾

Setting the parameters:

• Select «

Control» «Extern» as controlling source

(→  71)

• Press the [

Return] softkey to return to the

«Measurement» mode

72 Operation

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7.8.5 Setting the

S

«

Manual» Control

Figure 63:

Control Manual» display

«

You can turn on the controlled gauge with the [Sen-on] softkey and turn it off with the [

Sen-off] softkey. If a

corresponding setpoint has been defined, the gauge can also be turned off automatically in the event of a pressure rise.

Ò´Ô Control Manual ñìí ON Key Sen-on îïð OFF Selfcontrol Ó½¾ OFF Threshold 1.00E-03 mbar

ensor next ®¯ ¬− Return

Setting the parameters:

• Select «

Control» «Manual» as controlling source

(→  71)

• Press the [

next] softkey to select the «OFF» para-

meter

• Press the [

Key Sen-off» (unit is turned off with a softkey) or

«

Selfcontrol» (self-monitoring) parameter value

«

®¯] or [¬−] softkey to select the

Wen self-monitoring is selected, a fourth parameter line «

OFF Threshold» is displayed. To define a setpoint,

proceed as follows:

• Press the [

OFF Threshold» parameter

«

• Press the [

next] softkey to select the

®¯] or [¬−] softkey to increase /decrease

the parameter value

• Press the [

Return] softkey to return to the

«Measurement» mode

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 73

7.8.6 Setting the

S

«

Hotstart»

Control

Figure 64: «

Hotstart» display

When the unit is switched on, the controlled gauge is turned on automatically, and when the unit is switched off, it is turned off, too. However, the controlled gauge can also turn off itself in the event of a pressure rise (Selfcontrol).

Ò´Ô Control Hotstart ñìí ON Power on îïð OFF Selfcontrol Ó½¾ OFF Threshold 1.00E-03 mbar

ensor next ®¯ ¬− Return

Setting the parameters:

• Select «

Control» «Hotstart» as controlling

source (→  71)

• Press the [

next] softkey to select the «OFF» para-

meter

• Press the[

Power off » (measurement point is turned off

« when the unit is switched off) or «

®¯] or [¬−] softkey to select the

Selfcontrol»

(self-monitoring) parameter

when self-monitoring is selected, a fourth parameter line

OFF Threshold» is displayed. To define the setpoint,

« proceed as follows:

• Press the [

OFF Threshold»

«

• Press the [

next] softkey to select the

®¯] or [¬−] softkey to increase / decrease

the parameter value

• Press the [

Return] softkey to return to the

«Measurement» mode

74 Operation

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7.9 Status Messages

S

5

Figure 65: Status messages in «Measurement» mode

Figure 66: Status messages with different gauges

Status messages are not to be confounded with error messages. They only indicate the system status. If status messages are displayed instead of measured values, the received measurement signal is faulty.

1 CH 1 no Sensor A¡ 2 CH 2 Sensor off B¢ 3 CH 3 >1E-2 C£ 4 CH 4 no ignition D¤ CH 5 Sensor error 1 E¥ 6 CH 6 Sensor error 2 F¦

ensor Sen-off locked Single Mode

(Status message)

When status messages are displayed, proceed as follows:

• Find out why the received measurement signal is faulty

After the problem is remedied, the measured value is automatically displayed again.

locked *) Status message

TPR

IKR PKR APR

PCR

IMR PBR Meaning CMR ACR

     

*) In softkey display bar

Attempted entry with activated input lock

no Sensor Status message

TPR

IKR PKR APR

PCR

IMR PBR Meaning CMR ACR

    

No gauge connected

Sensor off Status message

TPR

IKR PKR APR

PCR

IMR PBR Meaning CMR ACR

 

IKR, IMR, PKR, PBR turned off

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 75

>"range" Status message

TPR

IKR PKR APR

PCR

     

IMR PBR Meaning

CMR

ACR

Overrange

<"range" Status message

TPR

IKR PKR APR

PCR

     

IMR PBR Meaning

CMR

ACR

Underrange

Sensor error 1 Status message

TPR

IKR PKR APR

PCR

     

IMR PBR Meaning

CMR

ACR

Measured value in the lower error range

Sensor error 2 Status message

TPR

IKR PKR APR

PCR

     

IMR PBR Meaning

CMR

ACR

Measured value in the upper error range

The «Sensor error 1 » and

«

Sensor error 2 » status messages do not

necessarily refer to the connected gauges 1 and 2 (see above for meaning of these status messages).

76 Operation

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7.10 Error Messages

S

EEPROM

All

Figure 67: EEPROM error in «Measurement» mode

Acknowledging error messages

Error messages are flashing in the display bar above the middle softkey: Irregularities or disturbances have occurred. The error relay switches over (→  22).

³´μ óÐ ¿À ³´μ Ò´Ô ³´μ ¿À A¡ óÅ ÆÑÁ ÃÁ Â Â Â Â ÃÁ cal B¢ ÆÇÈ ÉÊÎ Á ×ºÕ ÷º ÌÏ Â Â Á C£ ÉÊË CH 2 Áß ÍÎ ¼½¾ æ½Ë ¼½¾ ÍÎ mbar D¤ E¥

«1

ª0 F¦

ensor

Mode

(Error message is flashing)

When error messages are displayed, proceed as follows:

Acknowledging errors:

• Press the middle softkey. The error message is thus erased and the next error message appears (if applicable)

After the error has been acknowledged, the error relay switches back to its original position (→  22).

• If the error message persists, switch the unit off and on again

Wait at least 10 seconds before turning the unit

on again in order for it to correctly initialize itself.

Depending on the setting of the system monitoring, certain error messages (e.g. watchdog errors) are automatically acknowledged after 2 seconds (→  112) or they have to be manually acknowledged.

The meanings of the error messages are listed in the following table.

If the problem cannot be remedied, make a note of the error message(s) and contact your nearest Pfeiffer Vacuum Service Center.

BG 5186 BEN / C (2013-12) MaxiGauge.om Operation 77

Figure 68: Error message table

Display Possible cause Remedy

No display Power cable interrupted Check the power

cable

Mains voltage missing /

too high / too low

Display dark

Screensave activated (→  56)

Check mains voltage

Press a softkey

Lamp defective (life) Replace the lamp

WDT Operating system error

(watchdog error)

You have switched the

unit on to soon after switching it off

Acknowledge (→  77)

Switch the unit off, wait for 10 seconds and switch it on again

TASK Operating system error

(task fail error)

IDLE Operating system error

(idle error)

STACK Operating system error

(stack overflow error)

RAM RAM error (data

memory)

EPROM EPROM error (program

memory)

EEPROM EEPROM error

(parameter memory)

Display Display-RAM error

(display memory)

KEY Softkey error Acknowledge

Acknowledge (→  77)

(→  77)

ID1...ID6

Break in the line to the corresponding gauge or line has been disconnected during opera-

)

tion

*

Check the gauge cable in question

Acknowledge (→  77)

*) If the cause has not been remedied, the «no Sensor» status

message is displayed.

78 Operation

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Display Possible cause Remedy

SE1...SE6 Sensor error *

)

Check according to the following examples

Acknowledging error messages (→  77)

Pirani,

Pirani/Capacitance: No supply

Measurement element faulty

Check supply and cable

Maintain or exchange the gauge

FullRange™ Gauge:

No supply

Pirani measurement element faulty

Check supply and cable

Maintain or exchange the gauge

Cold cathode gauge:

No supply

Check supply and cable

Linear gauge:

No supply

Check supply and cable

Compact Process Ion Gauge:

No Supply voltage

Check supply and cable

)

*

At the same time, the status message «Sensor error 1»

(in the lower error range) or «Sensor error 2» (in the upper error range) is displayed (→  75).

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8 Communication

8.1 Serial Interfaces

8.1.1 Connection Diagrams

RS232C/422 Serial interface port

RS485/422 isol. Serial interface port

Serial interfaces are used for communication between the TPG 256 A and a computer (HOST). A terminal can be connected for test purposes.

Pin assignment 1 Chassis

2 RXD (RS232C)

D-Sub, 9-pin, male

165

3 TXD (RS232C) 4 not connected 5 Signal ground 6 RX+ (RS422) 7 RX– (RS422) 8 TX+ (RS422) 9 TX– (RS422)

Pin assignment

9

Front view

RJ45, 8-pin 1 TX+ 2 TX– 3 RX+ 4 not connected 5 not connected 6 RX– 7 not connected

Front view

18

8 Isolation ground

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8.1.2 Connection Cable

RS232C/422 Serial interface port

• Use shielded cable only

RS 432

PC MaxiGauge

RXD

TXD

RS485/422I isol. Serial interface port

Caution

Only one of the two interfaces may be connected.

PC MaxiGauge

1Chassis

Chassis

RX+

RX–

RX+

6

RX–

7

TX+

8TX+

9TX– TX–

Chassis

1Chassis

2

RXD

TXD

3

5GND

Signal GND

RS 422 isol.

TM

• Use shielded RJ45 cable (STP)

• Wiring with cable pairs 1/2, 3/6, 4/5 and 7/8

Caution

The voltage difference between the Isol. GND and the chassis may be max. 25 V for each MaxiGauge™.

RS 422 isol.

PC MaxiGauge

RX+

RX–

TX+

TX–

RS 485 isol.

PC MaxiGauge

RX+

RX–

TX+

TX–

TX+

11 11

22 22

TX–

RX+

33 33

66 66

RX–

44

55 55

77

8 Isol. GND 8GND 8 Isol. GND 8

TM

1

TX+

2

TX–

3

RX+

6

RX–

4

5

7

8 Isol. GND GND

TM

MaxiGauge

TM

TX+

TX–

RX+

RX–

44

77

TM

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 81

8.1.3 Data Transmission

Data format

Abbreviations and symbols used

The data transmission is bi-directional (master-slave).

1 Start bit, 8 data bits, 1 stop bit, no parity bit, no hardware handshake

Symbol Meaning

HOST Computer or terminal [...] Optional elements ASCII American Standard Code for Information

Interchange Dec. Hex. <ETX> END OF TEXT (CTRL C)

3 03

Reset the interface <CR> CARRIAGE RETURN

13 0D

Go to beginning of line <LF> LINE FEED

10 0A

Advance by one line <ENQ> ENQUIRY

5 05

Request for data transmission <ACK> ACKNOWLEDGE

6 06

Positive report signal <NAK> NEGATIVE ACKNOWLEDGE

21 15

Negative report signal <ESC> ESCAPE 27 1B

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Flow control

Communication protocol

Transmission format

Transmission protocol

Reception format

After each ASCII string the HOST must wait for a confirmation (<ACK> or <NAK>) <CR><LF> to ensure that the input buffer of the TPG 256 A is empty.

The input buffer of the HOST must have a capacity of at least 64 bytes.

Messages are transmitted to the TPG 256 A as ASCII strings in the form of mnemonics and parameters. All mnemonics comprise three ASCII characters.

Spaces are ignored. <ETX> clears the input buffer in the TPG 256 A.

The input is terminated by <CR> or <LF> or <CR><LF> ("end of message"), and evaluation in the TPG 256 A is subsequently started.

Do not transmit any LINE FEEDS (<LF>) via

the RS485 half duplex line for fear they could cause data collisions on the bus.

The RS232C, RS422, RS422I and RS485 (fullduplex) interfaces permit transmitting LINE FEEDS (<LF>). However, not transmitting them makes data transmission faster.

The tables on 86 ff are applicable to the mnemonics and parameters. The maximum number of digits, the data formats and admissible value ranges are also specified there.

HOST TPG 256 A Explanation

Mnemonics [and parameters] <CR>[<LF>] ─────────────>

HOST transmits message with "end of message"

<───────── <ACK><CR><LF>

MaxiGauge™ transmits positive acknowledgment of a received message

The current parameters of the function can be inquired by leaving out the [parameters].

When requested with a mnemonics, the TPG 256 A transmits the measurement data or parameters as an ASCII string to the HOST.

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 83

Reception protocol

<ENQ> must be transmitted to request the transmission of an ASCII string. Additional strings, according to the last selected mnemonic, are read out by repetitive transmission of <ENQ>.

If <ENQ> is received without a valid request, the error status is transmitted.

HOST TPG 256 A Explanation

Mnemonics [and parameters] <CR>[<LF>] ─────────────>

HOST transmits message with "end of message"

<───────── <ACK><CR><LF>

MaxiGauge™ transmits positive acknowledgment of a received message

The HOST invites the MaxiGauge to transmit data

Measurement values

or parameters

<────────────── <CR><LF>

MaxiGauge™ transmits data with "end of message"

The HOST invites the MaxiGauge to transmit data

Measurement values

or parameters

<────────────── <CR><LF>

MaxiGauge™ transmits data with "end of message"

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Error processing

Error recognition protocol

All messages received are verified in the TPG 256 A. If an error is detected, a negative acknowledgment <NAK> is output. The fault condition can subsequently be read out (→  98).

HOST TPG 256 A Explanation

Mnemonics [and parameters] <CR>[<LF>] ─────────────>

HOST transmits message with "end of message"

***** Transmission or programming error *****

<───────── <NAK><CR><LF>

MaxiGauge™ transmits negative acknowledgment of a received message

Mnemonics [and parameters] <CR>[<LF>] ─────────────>

HOST transmits message with "end of message"

<───────── <ACK><CR><LF>

MaxiGauge™ transmits positive acknowledgment of a received message

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 85

8.2 Mnemonics

Baud rate Baud rate 96

BAU

Calibration factor Sensor x Calibration factor sensor x (1 ... 6) 93

CAx

Measurement point names Measurement point names 89

CID

Display control Bargraph Bargraph 90

DCB

Display control Contrast Display control contrast 91

DCC

Display control Digits Display digits 89

DCD

Display control Screensave Display control screensave 91

DCS

Degas Degas 95

DGS

Error Status Error status 98

ERR

Filter time constant Filter time constant 93

FIL

Full scale range of linear sensors Full scale range of linear sensors 94

FSR

Parameter setup lock Parameter setup lock 93

LOC

Node (device) address for RS485 Node (device) address for RS485 96

NAD

Offset correction Offset correction 94

OFC

Program number Program number 99

PNR

Pirani range extension Pirani range extension 92

PRE

Status, Pressure sensor x (1 ... 6) Status, Pressure sensor x (1 ... 6) 89

PRx

Underrange Ctrl Underrange control 92

PUC

Interface Interface 95

RSX

Save default Save default 95

SAV

Sensor control Sensor control 88

SCx

Sensor on/off Sensor on/off 87

SEN

Set Point Control Source for Relay x Threshold value setting, Allocation 91

SPx

Set Point Status A,B,C,D,E,F Set point status 92

SPS

Test program A/D Identify Test A/D converter identification inputs 101

TAI

Test program A/D Sensor Test A/D converter measurement value

TAS

Display test Display test 99

TDI

EEPROM test EEPROM test 101

TEE

EPROM test EPROM test 100

TEP

Sensor identification Sensor identification 102

TID

Keyboard test Keyboard test 100

TKB

RAM test RAM test 100

TRA

Unit of measurement (Display) Unit of measurement (pressure) 90

UNI

Watchdog and System Error Control Watchdog and system error control 102

WDT

" Transmit " " Receive "

inputs

"Transmit": Data transfer from HOST to TPG 256 A "Receive": Data transfer from TPG 256 A to HOST

→ 

101

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8.2.1 Measurement Values

Sensor on / off

Transmit:

Receive: Transmit:

Receive:

SEN [,x,x,x,x,x,x] <CR>[<LF>]

Sensors 1 ... 6 x = 0 ─> No change 1 ─> Off 2 ─> On

x,x,x,x,x,x <CR><LF>

Status Sensors 1 ... 6

Not all sensor types can be switched on and

off.

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 87

Sensor control

Transmit:

Receive: Transmit:

Receive:

SCx [,x,x,x.xE±yy,x.xE±yy] <CR> [<LF>]

Switching off value

Switching on value

Switch off the controlling source of the sensor x = 0 ─> Sensor 1 1 ─> Sensor 2 2 ─> Sensor 3 3 ─> Sensor 4 4 ─> Sensor 5 5 ─> Sensor 6 6 ─> External control 7 ─> Manual (Default)

Switch on the controlling source of the sensor x = 0 ─> Sensor 1 1 ─> Sensor 2 2 ─> Sensor 3 3 ─> Sensor 4 4 ─> Sensor 5 5 ─> Sensor 6 6 ─> External control 7 ─> Manual (Default) 8 ─> Hot start

Controlled sensor x = A ─> Sensor 1

B ─> Sensor 2 C ─> Sensor 3 D ─> Sensor 4 E ─> Sensor 5 F ─> Sensor 6

x,x,x.xxE±y y,x.xxE±yy <CR><LF>

Switching off value

Switching on value

Switch off the controlling source of the gauge

Switch on the controlling source of the gauge

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Status and pressure

Transmit:

Receive: Transmit:

Receive:

Digits

Transmit:

Receive: Transmit:

Receive:

Measurement point names

Transmit:

PRx <CR>[<LF>]

Sensor x = 1 ... 6

x,x.xxxEsx <CR><LF>

Measurement value (always exponential format)

Status x = 0 ─> Measurement data okay 1 ─> Underrange 2 ─> Overrange 3 ─> Sensor error 4 ─> Sensor off 5 ─> No sensor 6 ─> Identification error

DCD [,x] <CR>[<LF>]

Digits x = 2 ─> Display x.x (2 digits) (default)

3 ─> Display x.xx (3 digits)

x <CR><LF>

Digits

When Range-Ext is on, the display resolution of the PCR and TPR gauges in the pressure range p<1.0E-4 mbar is reduced by one decimal digit.

CID [,xxxx,xxxx,xxxx,xxxx,xxxx,xxxx] <CR>[<LF>]

Measurement point name 6

Measurement point name 5

Measurement point name 4

Measurement point name 3

Measurement point name 2

Measurement point name 1

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 89

Receive: Transmit:

Receive:

8.2.2 Display

Unit of measurement

Transmit:

Receive: Transmit:

Receive:

Bargraph

Transmit:

Receive: Transmit:

Receive:

All channel names are ASCII strings (A ... Z;

0 ... 9). Blanks (spaces) are ignored.

xxxx,xxxx,xxxx,xxxx,xxxx,xxxx <CR><LF>

Measurement point names

The selected measurement unit has only an

effect on the display, i.e. it does not affect the accuracy of the measurement.

UNI [,x] <CR>[<LF>]

Measurement unit x = 0 ─> mbar (Default)

1 ─> Torr 2 ─> Pascal

x <CR><LF>

Measurement unit

DCB [,x] <CR>[<LF>]

Bargraph x = 0 ─> Off (default)

1 ─> Bargraph = Measurement range 2 ─> Bargraph = 1 decade

x <CR><LF>

Bargraph

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Contrast

Transmit:

Receive: Transmit:

Receive:

Screensave

Transmit:

Receive: Transmit:

Receive:

8.2.3 Switching Functions

Threshold value setting, Allocation

Transmit:

DCC [,xx] <CR>[<LF>]

Contrast x = 0 ... 20 ─> Contrast dark ... light

(Default = 10 (med.))

xx <CR><LF>

Contrast

DCS [,xx] <CR>[<LF>]

Screensave x = 0 ─> Screensave off (default) 1 ... 99 ─> Screensave after 1 ... 99 h

xx <CR><LF>

Screensave

SPx [,x,x.xxEsx,x.xxEsx] <CR>[<LF>]

Upper threshold [mbar] (default = 9.00E-11)

Lower threshold [mbar] (always exponential format) (default = 1.00E-11)

Source x = 0 ... 5 ─> sensors 1 ... 6

Switching function (Relay) x = 1 ... 6 ─> A ... F

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 91

Receive: Transmit:

Receive:

Set point status

Transmit:

Receive: Transmit:

Receive:

Underrange control

Transmit:

Receive: Transmit:

Receive:

8.2.4 Parameters

Pirani range extension

Transmit:

x,x.xxEsx,x.xxEsx <CR><LF>

Upper threshold

Lower threshold

Sensor (source)

SPS <CR>[<LF>] <ACK><CR><LF>

Set point A ... F x = 0 ─> off

1 ─> on

PUC [,x,x,x,x,x,x] <CR>[<LF>]

Underrange control A ... F x = 0 ─> UR control deactivated (default) 1 ─> UR control activated

x,x,x,x,x,x <CR><LF>

Underrange control

PCR and TPR gauges only, measurement range up to

-5

5×10

mbar.

PRE [,x,x,x,x, x,x] <CR>[<LF>]

Pirani range extension sensors 1 ... 6 x = 0 ─> deactivated (default) 1 ─> activated

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Receive: Transmit:

Receive:

Entry lock function

Transmit:

Receive: Transmit:

Receive:

Filter time constants

Transmit:

Receive: Transmit:

Receive:

Calibration factor

Transmit:

x,x,x,x,x,x <CR><LF>

Range extension

LOC [,x] <CR>[<LF>]

Entry lock function x = 0 ─> off (default)

x <CR><LF>

Entry lock function

FIL [,x,x,x,x,x,x] <CR>[<LF>]

Filter time constant sensors 1 ... 6 x = 0 ─> fast 1 ─> standard (default) 2 ─> slow

x,x,x,x,x,x <CR><LF>

Filter time constant

CAx [,x.xxx] <CR>[<LF>]

Calibration factor

for logarithmic sensors (default = 1.000)

Calibration factor 0.500 ... 2.000

for linear sensors (default = 1.000)

Sensor x = 1 ... 6

1 ─> on

0.100 ... 9.999

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 93

Receive: Transmit:

Receive:

Offset correction

Transmit:

Receive: Transmit:

Receive:

Measurement range

Transmit:

Receive: Transmit:

Receive:

x.xxx <CR><LF>

Calibration factor

OFC [,x,x,x,x,x,x] <CR>[<LF>]

Offset correction sensors 1 ... 6 x = 0 ─> off (default) 1 ─> activated 2 ─> actual measurement value = offset value

x,x,x,x,x,x <CR><LF>

Offset correction

For linear gauges, the maximum pressure

should be defined (full scale value). For logarithmic gauges the measurement range is detected automatically.

FSR [,x,x,x,x,x,x] <CR>[<LF>]

full scale

range sensors 1 ... 6 x = 0 ─> 1 mbar 1 ─> 10 mbar 2 ─> 100 mbar 3 ─> 1000 mbar (default) 4 ─> 2 bar 5 ─> 5 bar 6 ─> 10 bar 7 ─> 50 bar 8 ─> 0.1 mbar

x,x,x,x,x,x <CR><LF>

Measurement ranges

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Degas

Transmit:

Receive: Transmit:

Receive:

Default

Transmit:

Receive:

8.2.5 Interfaces

Interface

Transmit:

Receive: Transmit:

DGS [,0,0,0,x,x,x] <CR>[<LF>]

x = 0 ─> Degas off 1 ─> Degas on

Sensors 1 … 3: no degas

0,0,0,x,x,x <CR><LF>

Degas status

SAV [,1] <CR>[<LF>]

Activate the factory setting

This functions is only useful if several interfaces are connected to the unit.

RSX [,x] <CR>[<LF>]

Interface x = 0 ─> RS232C (default)

1 ─> RS422 2 ─> RS422I isolated 3 ─> RS485 isolated

The RS485 interface allows to assign

addresses to the connected units. The node (or device) address of each unit can be defined (→  55). When replacing a unit, don't forget to enter the corresponding address number (→  96).

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 95

Receive:

Baud rate

Transmit:

Receive: Transmit:

Receive:

RS485 node address

Transmit:

Receive: Transmit:

Receive:

In order not to interrupt the communication, set

the HOST to the same interface as the TPG 256 A.

x <CR><LF>

Interface

BAU [,x] <CR>[<LF>]

Baud rate x = 0 ─> 300 baud

1 ─> 1200 baud 2 ─> 2400 baud 3 ─> 4800 baud 4 ─> 9600 baud (default) 5 ─> 19200 baud

As soon as the new baud rate has been

entered, the report signal is transmitted at the new baud rate.

x <CR><LF>

Baud rate

NAD xx <CR>[<LF>]

Node address of the unit x = 00 ... 31 ─> Node address 00 ... 31

xx <CR><LF>

Node address of the unit

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Addressing the unit

Transmit:

Do not transmit any LINE FEEDS (<LF>) via the

RS485 half duplex line for fear they could cause data collisions on the bus.

The RS232C, RS422, RS422I and RS485 (fullduplex) interfaces permit transmitting LINE

FEEDS (<LF>). However, not transmitting them

makes data transmission faster.

Entering the corresponding node address connects the unit connects to the HOST. The other units release the bus.

<ESC>xx

Node address of the unit xx = 00 ... 31

All node addresses have two digits (00 ... 31).

The address must always be transmitted when a different unit is to be accessed.

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8.2.6 Error Messages

Error status

Transmit:

Receive: Transmit:

Receive:

ERR <CR>[<LF>] <ACK><CR><LF>

<ENQ> xxxxx,xxxxx <CR><LF>

Error status xxxxx = 0 ─> No error 1 ─> Sensor 1: Measurement error 2 ─> Sensor 2: Measurement error 4 ─> Sensor 3: Measurement error 8 ─> Sensor 4: Measurement error 16 ─> Sensor 5: Measurement error 32 ─> Sensor 6: Measurement error 512 ─> Sensor 1: Identification error 1024 ─> Sensor 2: Identification error 2048 ─> Sensor 3: Identification error 4096 ─> Sensor 4: Identification error 8192 ─> Sensor 5: Identification error 16384 ─> Sensor 6: Identification error

Error status xxxxx = 0 ─> No error 1 ─> Watchdog has responded 2 ─> Task fail error 4 ─> IDCX idle error 8 ─> Stack overflow error 16 ─> EPROM error 32 ─> RAM error 64 ─> EEPROM error 128 ─> Key error 4096 ─> Syntax error 8192 ─> Inadmissible parameter 16384 ─>

No hardware

32768 ─> Fatal error

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8.2.7 Test Programs for Pfeiffer Vacuum Service Specialists

Program version

Transmit:

Receive: Transmit:

Receive:

Display test

Transmit:

Receive: Transmit:

Receive:

Some test programs take several seconds to

transmit a report signal. Once a test program is started, the «Test»

mode remains active until the unit is switched

PNR <CR>[<LF>]

off.

BGxxxxxx-x

Index (-, A, B ... Z)

Program version

TDI <CR>[<LF>] <ACK><CR><LF>

<ENQ> xxxxx,xxxxx <CR><LF>

Error status →  98

BG 5186 BEN / C (2013-12) MaxiGauge.om Communication 99

Keyboard test

Transmit:

Receive: Transmit:

Receive:

RAM test

Transmit:

Receive: Transmit:

Receive:

EPROM test

Transmit:

Receive: Transmit:

Receive:

TKB <CR>[<LF>] <ACK><CR><LF>

xx = 1 ─> Bit 0 = 1 Key 1 pressed 2 ─> Bit 1 = 1 Key 2 pressed 4 ─> Bit 2 = 1 Key 3 pressed 8 ─> Bit 3 = 1 Key 4 pressed 16 ─> Bit 4 = 1 Key 5 pressed nn ─> nn = Sum of the values of the pressed keys

TRA <CR>[<LF>] <ACK><CR><LF>

<ENQ> xxxxx,xxxxx <CR><LF>

Error status →  98

TEP <CR>[<LF>] <ACK><CR><LF>

<ENQ> xxxxx,xxxxx <CR><LF>

Error status →  98

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Pfeiffer Vacuum MaxiGauge TPG 256 A PT G28 760, MaxiGauge TPG 256 A PT G28 761 Operating Instructions Manual

Specifications and Main Features

Frequently Asked Questions

User Manual