Pfeiffer Vacuum IKR 261 Operating Instructions Manual

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OPERATING INSTRUCTIONS

Translation of the original instructions

IKR 261

Compact Cold Cathode Gauge, All-metal

2017-07

BG 5153 BEN / D

Product Identification

In all communications with Pfeiffer Vacuum, please specify the information given on the product nameplate.

Validity

Intended Use

Functional Principle

This manual applies to products with the following part numbers

PT R25 750 (DN 40 ISO-KF flange short type) PT R25 751 PT R25 761

(DN 40 CF-F flange short type) (DN 40 CF-F flange long type)

The part number can be taken from the nameplate.

We reserve the right to make technical changes without prior notice.

The Compact Cold Cathode Gauge IKR 261 has been designed for vacuum measurement in the pressure range of 2×10

-9

... 1×10-2 hPa.

The IKR 261 can be used with a Pfeiffer Vacuum measurement unit for Compact Gauges or with another evaluation unit.

Over the whole measurement range, the measuring signal is output as logarithm of the pressure.

The Compact Cold Cathode Gauge IKR 261 functions with a cold cathode ionization measurement circuit (according to the inverted magnetron principle).

BG 5153 BEN / D (2017-07) IKR 261

Contents

Product Identification 2 Validity 2 Intended Use 2 Functional Principle 2

1 Safety 4

1.1 Symbols Used 4

1.2 Personnel Qualifications 4

1.3 Safety Information 4

1.4 Liability and Warranty 5

2 Technical Data 6

3 Installation 9

3.1 Vacuum Connection 9

3.1.1 Removing the Magnet Unit (only for Gauges with CF Flanges) 10

3.2 Electrical Connection 11

3.2.1 Use with a Pfeiffer Vacuum Measurement Unit 11

3.2.2 Use with another Evaluation Unit 11

4 Operation 13

5 Maintenance 14

5.1 Cleaning the Gauge / replacing Parts 14

5.1.1 Disassembling the Gauge 15

5.1.2 Cleaning the Gauge 17

5.1.3 Reassembling the Gauge 18

5.1.4 Adjusting the Gauge 21

5.2 What to do in Case of Problems 21

6 Removing the Gauge From the Vacuum System 22

7 Returning the Product 23

8 Accessories 23

9 Spare Parts 24

10 Disposal 24

Appendix 25

A: Conversion Table for Pressure Units 25 B: Relationship Between Measuring Signal and Pressure 25 C: Gas Type Dependence 26

ETL Certification 27

For cross references within this document, the symbol (→  XY) is used, for references to other documents, the symbol (→  [Z]).

BG 5153 BEN / D (2017-07) IKR 261 3

1 Safety

1.1 Symbols Used

1.2 Personnel Qualifications

1.3 Safety Information

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (→  8) and the process media.

Consider possible reactions of the process media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety information in this document.

• Before you begin to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

DANGER

DANGER: magnetic fields

Strong magnetic fields can disturb electronic devices like heart pacemakers or impair their function.

Maintain a safety distance of ≥10 cm between the magnet and the heart pacemaker or prevent the influence of strong magnetic fields by

Pass on the safety information to other users.

antimagnetic shielding.

BG 5153 BEN / D (2017-07) IKR 261

1.4 Liability and Warranty

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the custodian or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of changes (modifications, alterations etc.) to the product

• use the product with accessories not listed in the corresponding product

documentation.

The custodian assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination or wear and tear, as well as expendable parts (e.g. seals), are not covered by the warranty.

BG 5153 BEN / D (2017-07) IKR 261 5

2 Technical Data

Admissible temperatures

Storage

Operation

all types long type

Bakeout

short type

long type

-40 °C ... +65 °C

+ 5 °C ... +55 °C

250 °C in bakeout area according to the dimensional drawing (without magnetic shielding)

+250 °C (without electronics and magnetic shielding) +250 °C in bakeout area according to the dimensional drawing (without magnetic shielding)

Relative humidity max. 80% at temperatures up to +31 °C

decreasing to 50% at +40 °C

Use indoors only

altitude up to 2000 m (6600 ft)

Measuring range (air, N2) 2×10-9 ... 1×10-2 hPa

Accuracy

Reproducibility

Gas type dependence

≈ ± 30% in the range 1×10

≈ ± 5% in the range 1×10

→ Appendix C

-8

... 1×10-3 hPa

-8

... ... 1×10-3 hPa

Adjustment The gauge is factory-calibrated and

requires no maintenance.

Type of protection IP 40

Maximum pressure (absolute) 1000 kPa

only for inert gases and temperatures < 100 °C

Supply

DANGER

The gauge may only be connected to supply or measurement units that conform to the requirements of a grounded protective extra-low

Voltage at the gauge 15.0 ... 30.0 V= (max. ripple 1 Vpp)

Power consumption ≤ 2 W

Fuse

The minimum voltage of the power supply must be increased proportionally to the length of the measuring cable.

Voltage at the supply unit with maximum cable length

Electrical connection Hirschmann compact connector

Tightening torque ≤0.2 Nm

Cable 5 poles plus screening

Maximum line length 100 m (0.25 mm² conductor)

Pfeiffer Vacuum measurement and control units for Compact Gauges fulfill these requirements.

voltage (PELV). The connection to the gauge has to be fused.

≤ 1 AT

16.0 ... 30.0 V= (max. ripple 1 V

type GO 6, 6 poles, male

150 m (0.34 mm² conductor) 500 m (1.0 mm² conductor)

)

BG 5153 BEN / D (2017-07) IKR 261

Operating voltage (in the measuring chamber)

Operating current (in the measuring chamber)

≤ 3.3 kV

≤ 500 µA

Output signal (measuring signal)

Voltage range

≈ 0 V ... ≈ +10.5 V

Voltage/pressure relationship logarithmic, increase 1 V / decade

(→ Appendix B)

Error signals <0.5 V (no supply)

Output impedance

Minimum load

2×10 Ω

10 kΩ, short-circuit proof

Response time pressure dependent

p > 10 p = 10

-6

hPa

-8

hPa

<10 ms ≈ 1 s

Gauge identification

5.1 kΩ resistor referenced to supply common (→ Figure 2)

Grounding concept

Vacuum flange-measuring common

→ Figure 2

connected via 10 kΩ (max. voltage differential with respect to safety ±50 V with respect to accuracy ±10 V)

Supply common-signal common conducted separately; differential

measurement recommended for cable lengths (≥10 m)

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Materials exposed to the vacuum

Feedthrough isolation Internal seals Flange Measuring chamber Anode Ignition aid

Internal volume

Dimensions [mm]

101.5

18.5

28 55

Compact ColdCathode Gauge

VACUUM

ø 63,5

VACUUM

DN 40 CF-F DN 40 ISO-KF

107

ceramic (Al2O3) Ag stainless steel (1.4306/AISI 304L) stainless steel (1.4306/AISI 304L) Mo stainless steel (1.4310/AISI 301)

≈ 20 cm³

216.5

32 57

Compact ColdCathode Gauge

20103.5

VACUUM

ø 63.5

DN 40 CF-F

Bakeout area

VACUUM

Weight 700 g (DN 40 ISO-KF short type)

950 g (DN 40 CF-F short type) 1100 g (DN 40 CF-F long type)

BG 5153 BEN / D (2017-07) IKR 261

3 Installation

3.1 Vacuum Connection

Procedure

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to

The gauge can be mounted in any orientation. However, it should be mounted so that any particles present cannot enter the measuring chamber (→  13).

See the dimensional drawing for space requirements (→  8).





ensure cleanliness and prevent damages.

Remove the protective cap.

The protective cap will be

needed for maintenance work.

Make the flange connection.

When making a CF flange connection, it can be advantageous to temporarily remove the magnet (→ section 3.1.1).

DANGER

DANGER: overpressure in the vacuum system >250 kPa

KF flange connections with elastomer sealing rings (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use sealing rings provided with an outer centering ring.

DANGER

DANGER: overpressure in the vacuum system >100 kPa

If clamps are opened unintentionally injury can be caused by catapulted parts.

Use the type of clamps which can only be opened and closed

BG 5153 BEN / D (2017-07) IKR 261 9

by means of a tool (e.g. hose clip clamping ring).

3.1.1 Removing the Magnet Unit (only for Gauges with CF Flanges)

Tools required

Procedure

DANGER

The gauge must be electrically connected to the grounded vacuum chamber. The connection must conform to the requirements of a protective connection according to EN 61010:

• CF flanges fulfill this requirement

• For gauges with KF flanges, use a conductive metallic

• Allen wrench AF 1.5

• Open-end wrench AF 7

clamping ring.

WARNING

WARNING: electric arcing

Helium may cause electric arcing with detrimental effects on the electronics of the product.

Before performing any tightness tests put the product out of operation and remove the electronics unit.

 Unfasten the hexagon socket set screw (1) on the side of the electronics

unit (2) (→ Figure 1).

 Remove the electronics unit.  Unfasten the hexagon head screw (3) on the magnet unit (4) and remove

the magnet unit.

Caution

The magnetic force and the tendency to tilt make it more difficult to separate the magnet unit and the measuring chamber (7).

 Make the flange connection between the gauge and the vacuum system.  Remount the magnet unit and lock it with the hexagon head screw (3).  Carefully mount the electronics unit (2).  Push the electronics unit up to the mechanical stop and lock it with the

hexagon socket set screw (1).

BG 5153 BEN / D (2017-07) IKR 261

3.2 Electrical Connection

3.2.1 Use with a Pfeiffer Vacuum Measurement Unit

Figure 1

If the gauge is used with a Pfeiffer Vacuum measurement unit for Compact Gauges, a corresponding connection cable is required (→  23).

• Secure the connection socket on the gauge with the screw (tightening torque ≤0.2 Nm).

VACUUM

Compact

Cold Cathode

Gauge

3.2.2 Use with another Evaluation Unit

Procedure

The gauge can also be operated with other evaluation units. In this case, an individual connection cable must be made.

For cable lengths up to 10 m (with a conductor cross-section of 0.34 mm

), the measuring signal can be read directly between the positive signal output (pin 2) and the supply common (pin 5) without the degree of accuracy being reduced. For longer measuring cable lengths, we recommend a differential measurement between the signal output and signal common (pin 3) (as a result of the voltage drop along the supply cable ground lead, the common mode signal is approx. 1.0 V at the maximum permissible cable length).

Prepare the connection



socket (ordering number →  23).

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Solder the connection cable according to the diagram.



5.1 k

10k

–

+ –

Figure 2

Connection socket,

: Electrical connection

Pin 1 identification Pin 2 signal output (measuring signal) Pin 3 signal common Pin 4 supply Pin 5 supply common Pin 6 screen

soldering side

WARNING

The supply common (pin 5) and the screen (pin 6) must be connected to the supply unit with protective ground.

Incorrect connection, incorrect polarity, or inadmissible supply

Reassemble the connection socket.



Plug in the connection socket.



Secure the connection socket on the gauge with the screw (tightening torque ≤0.2 Nm).

voltages can damage the gauge.

VACUUM

Compact

Cold Cathode

Gauge

BG 5153 BEN / D (2017-07) IKR 261

4 Operation

Gas type dependence

Ignition delay

Contamination

As soon as the required voltage is applied, the measuring signal is available between pins 2 and 3. (→ Appendix B for the relationship between the measuring signal and the pressure).

The green lamp on the gauge indicates the operating state:

Supply voltage present.

No supply voltage.

Caution

Turn on the gauge only at pressures <10-2 hPa to prevent excessive contamination.

If you are using a Pfeiffer Vacuum measurement unit for Compact Gauges with at least two gauge connections, the cold cathode gauge

The measuring signal depends on the type of gas being measured. The curves are accurate for dry air, N other gases (→ Appendix C).

If you are using a Pfeiffer Vacuum measurement unit for Compact Gauges, you can enter a calibration factor to correct the measurement value displayed (→  of that measurement unit).

An ignition delay occurs whe time increases at low pressures and for clean, degassed gauges it is typically:

10 10 2×10

The ignition is a statistical process. Already a small amount of depositions on the inner surfaces can have a strong influence on it.

Gauge failures due to contamination are not covered by the warranty.

Gauge contamination is influenced by the process media used as well as any present or new contaminants and their respective partial pressures. Continuous operation in the range of 10 well as reduced up-time and maintenance cycles. With constantly low pressures (p < 1×10 (cleaning the gauge →  17).

In general, contamination of the gauge leads to deviations of the measured values:

• In the low pressure range (p < 1×10

too low (as a consequence of the contamination of the cold cathode system). In case of severe contamination, instabilities can occur (as layers of the measuring chamber peel off). Contamination due to isolating layers can even lead to a complete failure of the discharge.

Contamination can to a certain extent be reduced by:

• geometric protections (e.g. screenings, elbows) against particles that spread

rectilinearly

• mounting the flange of the gauge at a place where the partial pressure of the

pollutants is particularly low.

Special precautions are required for vapors deposited under plasma (e.g. of the cold cathode measurement system). It may even be necessary to temporarily switch of the gauge while vapors occur.

can be controlled, for example, by a Pirani gauge.

, O2 and CO. They can be mathematically converted for

n cold cathode gauges are switched on. The delay

-7

hPa ≈ 0.1 minute

-8

hPa ≈ 1 minute

-9

hPa ≈ 5 minutes

-4

hPa ... 10-2 hPa can cause severe contamination as

-6

hPa), the gauge can be operated for more than one year without cleaning

-3

hPa), the pressure indication is usually

BG 5153 BEN / D (2017-07) IKR 261 13

5 Maintenance

5.1 Cleaning the Gauge / replacing Parts

Tools / material required

Gauge failures due to contamination or wear and tear, as well as expendable parts (e.g. seals), are not covered by the warranty.

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before you begin to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

DANGER

DANGER: cleaning agents

Cleaning agents can be detrimental to health and environment.

Adhere to the relevant regulations and take the necessary precautions when handling and disposing of cleaning agents. Consider possible

• Allen wrench AF 1.5

• Allen wrench AF 3

• Open-end wrench AF 7

• Pliers for circlip

• Polishing cloth (400 grain) or Scotch-Brite

• Tweezers

• Cleaning alcohol

• Mounting tool for ignition aid (→  24)

• Ignition aid (→  24)

• Metal seal (11) for anode feedthrough (→  24)

reactions with the product materials (→  8).

BG 5153 BEN / D (2017-07) IKR 261

5.1.1 Disassembling the Gauge

Procedure for short type

Figure 3a

Figure 3b

10a

 Remove the gauge from the vacuum system (→  22).  Unfasten the hexagon socket set screw (1) on the side of the electronics

unit (2) (→ Figure 3a).

 Remove the electronics unit.

Caution

The cover of the electronics unit cannot be removed.

 Unfasten the hexagon head screw (3) on the magnet unit (4) and remove

the magnet unit.

Caution

The magnetic force and the tendency to tilt make it more difficult to separate the magnet unit and the measuring chamber (7).

 Remove the circlip (5) as well as the polarity insert (6) from the measuring

chamber.

BG 5153 BEN / D (2017-07) IKR 261 15

Procedure for long type

 Remove the four hexagon socket screws (8) incl. lock washers (8a) on the

back of the measuring chamber.

 Carefully remove the following parts in this order: pressure piece (9),

washer (9a), the complete anode (10) and the metal seal (11) incl. centering ring (12).

The parts can now be cleaned or replaced individually.

Figure 4a

Figure 4b

10a

Figure 4c

BG 5153 BEN / D (2017-07) IKR 261

 Remove the gauge from the vacuum system (→  22).  Unfasten the hexagon socket set screw (1) on the side of the electronics

unit (2) (→ Figure 4a).

 Remove the electronics unit.

Caution

The cover of the electronics unit cannot be removed.

 Unfasten the hexagon head screw (3) on the magnet unit (4) and remove

the magnet unit.

Caution

The magnetic force and the tendency to tilt make it more difficult to separate the magnet unit and the measuring chamber (7).

 Remove the circlip (5) and the polarity insert (6) from the measuring

chamber.

 Remove the two hexagon socket screws (20) incl. lock washers (19) from

the extension piece.

 Carefully remove the following parts in this order: pressure piece (18),

insulator (17), anode extension piece (13).

5.1.2 Cleaning the Gauge

Procedure

 Remove the two hexagon socket screws (16) incl. lock washers (15) and

the tube (14).

 Remove the four hexagon socket screws (8) incl. lock washers (8a) on the

back of the measuring chamber.

 Carefully remove the following parts in this order: pressure piece (9),

washer (9a), the complete anode (10) and the metal seal (11) incl. centering ring (12).

The parts can now be cleaned or replaced individually.

 Using a polishing cloth rub the inside walls of the measuring chamber and

the polarity insert to a bright finish.

Caution

The sealing surfaces must only be worked concentrically.

 Rinse the measuring chamber and the polarity insert with cleaning alcohol.  Allow both to dry.

BG 5153 BEN / D (2017-07) IKR 261 17

Cleaning or replacing the anode:

 Remove the used ignition aid (10a) with pliers (→ Figure 3b).  Using a polishing cloth rub the anode pin to a bright finish.

5.1.3 Reassembling the Gauge

Procedure for short type

Caution

Do not bend the anode. Do not carry out mechanical work on the ceramic part.

 Rinse the anode with cleaning alcohol.  Allow the anode to dry.  Insert a new ignition aid (10a) into the mounting tool.  Carefully press the anode (clean or new) centered and parallel to the tool

axis into the ignition aid and insert it to a depth of approx. 15 mm. The final positioning is established after the anode is installed.

Anode Ignition aid

Mounting tool

 Insert a new metal seal (11) incl. the centering ring (12) centered into the

measuring chamber. Make sure the seal and ceramic are clean (→ Figure 3b).

 Carefully insert the anode (10) incl. ignition aid (10a) into the measuring

chamber.

 Place the washer (9a) and pressure piece (9) on the measuring chamber

and secure them by uniformly tightening the four screws (8) incl. lock washers (8a) until the mechanical stop is reached.

 Position the ignition aid (10a) by sliding the mounting tool over the anode

pin until the mechanical stop is reached.

 Blow the particles in the measuring chamber with dry nitrogen (be careful to

hold the measuring chamber with the flange pointing downwards).

 Slide the polarity insert (6) into the measuring chamber until the mechanical

stop is reached.

 Place the circlip (5) snugly fitting on the polarity insert.

Caution

Visually check that the anode pin is centered over the middle hole of the polarity insert (max. eccentricity = 0.5 mm).

BG 5153 BEN / D (2017-07) IKR 261

Procedure for long type

 If possible perform a leak test (leak rate <10

WARNING

WARNING: electric arcing

Helium may cause electric arcing with detrimental effects on the electronics of the product.

Before performing any tightness tests put the product out of operation and remove the electronics unit.

-9

hPa l/s).

 Mount the magnet unit (4) and lock it with the hexagon head screw (3).  Mount the electronics unit (2) and secure it with the hexagon socket set

screw (1).

DANGER

Due to missing ground connection in conjunction with missing or not correctly tightened hexagon socket set screw (1) dangerous contact voltage will occur and electronic components will be damaged.

 Insert a new metal seal (11) incl. the centering ring (12) centered into the

measuring chamber. Make sure the seal and ceramic are clean (→ Figure 4c).

 Carefully insert the anode (10) incl. ignition aid (10a) into the measuring

chamber.

 Place the washer (9a) and pressure piece (9) on the measuring chamber

and secure them by uniformly tightening the four screws (8) incl. lock washers (8a) until the mechanical stop is reached.

 Position the ignition aid (10a) by sliding the mounting tool over the anode

pin until the mechanical stop is reached.

 Blow the particles in the measuring chamber with dry nitrogen (be careful to

hold the measuring chamber with the flange pointing downwards).

 Slide the polarity insert (6) into the measuring chamber until the mechanical

stop is reached.

 Place the circlip (5) snugly fitting on the polarity insert.

Caution

Visually check that the anode pin is centered over the middle hole of the polarity insert (max. eccentricity = 0.5 mm).

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 If possible perform a leak test (leak rate <10

-9

hPal/s).

WARNING

WARNING: electric arcing

Helium may cause electric arcing with detrimental effects on the electronics of the product.

Before performing any tightness tests put the product out of operation and remove the electronics unit.

 Place the complete measuring chamber with the flange pointing downwards

on a table and carefully slide the extension piece (13) over the anode pin (→ Figure 5).

Carefully slide the tube (14) over the extension piece and secure it with the

two screws (16) incl. lock washers (15).

Carefully slide the insulator (17) over the extension piece (13) as shown in

Figure 5 and secure the pressure piece (18) with the two screws (20) incl. lock washers (19).

Caution

The inside of the tube and the insulator must be absolutely clean and lint-free.

Mount the magnet unit (4) and lock it with the hexagon head screw (3).

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Mount the electronics unit (2) and secure it with the hexagon socket set

screw (1).

DANGER

Due to missing ground connection in conjunction with missing or not correctly tightened hexagon socket set screw (1) dangerous contact voltage will occur and electronic components will be damaged.

19 18

5.1.4 Adjusting the Gauge

5.2 What to do in Case of Problems

Figure 5

The gauge is factory-calibrated and requires no maintenance. It must be replaced in the event of a defect (→  24).

Problem Possible cause Correction

Measuring signal continually < 0.5 V and

No supply voltage. Turn on the power

supply.

green lamp is OFF.

Measuring signal continually < 0.5 V and

Supply voltage too low. Increase the supply

voltage (→  6).

green lamp is ON Electronics unit defective. Replace the electronics

unit (→  6).

Measurement signal continually in the range of

Vacuum chamber pressure < 2×10

-9

hPa.

0.5 ... 1.8 V (underrange). Gas discharge has not ignited.

–

Wait until the gas discharge ignites (≈ 5 minutes at a pressure of 10

-9

hPa).

Measuring signal unstable. Gauge contaminated. Clean the gauge

(→  17).

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6 Removing the Gauge From the Vacuum System

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before you begin to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary pre-

Procedure





cautions when handling contaminated parts.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

Deactivate the gauge.

Unplug the connection socket.

Remove the gauge from the



vacuum system.

Place the protective cap.



VACUUM

Compact

Cold Cathode

Gauge

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7 Returning the Product

WARNING

WARNING: forwarding contaminated products

Products returned to Pfeiffer Vacuum for service or repair should, if possible, be free of harmful substances (e.g. radioactive, toxic, caustic or microbiological). Otherwise, the type of contamination must be declared.

Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a completed contamination declara-

Form under www.pfeiffer-vacuum.com

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.

tion

8 Accessories

Ordering number

Connection cable for Pfeiffer Vacuum measurement unit for Compact Gauges 3 m 6 m 10 m

Connection socket Hirschmann GO 6 WF 6 contacts, angled, female

Magnetic shielding

PT 448 250 -T PT 448 251 -T PT 448 252 -T

B 4707 283 MA

PT 443 155 -X

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9 Spare Parts

10a

When ordering spare parts, always indicate:

• the type of product

• the manufacturing number given on the product nameplate

• the position, description, and ordering number according to the spare parts list

The following parts are available as spare parts sets:

Pos. Description Ordering

number

Repair set, consisting of: 10a 11 12 9a

3× ignition aid 1× seal HNV 100 (9×1.6) 1× centering ring 1× washer

BN 846 241 -T

Repair set, consisting of: 10 10a 11 12 9a

1× anode, complete 3× ignition aid 1× seal HNV 100 (9×1.6) 1× centering ring 1× washer

Set of ignition aids, consisting of: 10a

10× ignition aid

BN 846 240 -T

BN 845 995 -T

Mounting tool for ignition aid BG 510 600

2 Electronics unit IKR 261 PT 120 160 -T

Measurement system, complete

DN 40 ISO-KF flange DN 40 CF-F flange DN 40 CF-F flange, long

BN 846 465 -T BN 846 466 -T BN 846 467 -T

Exchange gauge

(return defective gauge to Pfeiffer Vacuum)

DN 40 ISO-KF flange short type DN 40 CF-F flange short type DN 40 CF-F flange long type

PT R25 750 -A PT R25 751 -A PT R25 761 -A

10 Disposal

WARNING

WARNING: substances detrimental to the environment

Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.

Dispose of such substances in accordance with the relevant local

regulations.

BG 5153 BEN / D (2017-07) IKR 261

Appendix

A: Conversion Table for

Pressure Units

B: Relationship Between

Measuring Signal and Pressure

Conversion formulae

mbar bar Pa hPa kPa Torr

mm HG

mbar 1 1×10-3 100 1 0.1 0.75

bar 1×103 1 1×105 1×103 100 750

Pa 0.01 1×10-5 1 0.01 1×10-3 7.5×10-3 hPa 1 1×10-3 100 1 0.1 0.75 kPa 10 0.01 1×103 10 1 7.5 Torr

mm HG

1.332 1.332×10

-3

133.32 1.3332 0.1332 1

1 Pa = 1 N/m2

U-c

p = 10

⇔

U = c + log10 p

Conversion curves

p U c

[hPa] [V] 10.5

[µbar] [V] 7.5

[Torr] [V] 10.625

[mTorr] [V] 7.625

[micron] [V] 7.625

[Pa] [V] 8.5

[kPa] [V] 11.5

where U measuring signal

p pressure c, d constant (pressure unit dependent)

Pressure p

1E+00

1E–01

1E–02

1E–03

1E–04

1E–05

1E–06

1E–07

underrange

sensor error

valid in the range 2×10

1.5×10 2×10

-9

hPa < p

-9

Torr < p

-7

Pa < p

< 1×10 < 7.5×10 < 1 Pa

hPa

Torr

overrange

-2

hPa

-3

Torr

1E–08

1E–09

1E–10

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

Measuring signal U [V]

BG 5153 BEN / D (2017-07) IKR 261 25

Conversion table

C: Gas Type Dependence

Indication range below 10-5 hPa

Measuring

signal U [V]

[hPa]

Pressure p

[Torr]

[Pa]

< 0.5 Sensor error

0.5 ... 1.8 Underrange

1.8

2.5

3.5

4.5

5.5

6.5

7.5

8.5

2.0×10

1.0×10-8

1.0×10

1.0×10-6

1.0×10

1.0×10-4

1.0×10

1.0×10-2

-9

-7

-5

-3

1.5×10-9

7.5×10-9

7.5×10

7.5×10-7

7.5×10

7.5×10-5

7.5×10

7.5×10-3

2.0×10-7

1.0×10-6

-8

1.0×10

-5

1.0×10-4

-6

1.0×10

-3

1.0×10-2

-4

0.1

1.0

8.5 ... 10.5 Overrange

Pressure indicated (gauge calibrated for air)

p (hPa)

-3

8 6

-4

8 6

-5

8 6

-6

8 6

-7

Xe Kr

-7

-6

642

-5

642

-4

642

Luft / Air

642

-3

-2

642

(hPa)

eff

In the range below 10-5 hPa, the pressure indication is linear. For gases other than air, the pressure can be determined by means of a simple conversion formula:

= K × pressure indicated

eff

where gas type K

air (N2, O2,CO) 1.0

Xe 0.4

Kr 0.5

Ar 0.8

2.4

Ne 4.1

He 5.9

These conversion factors are average values.

BG 5153 BEN / D (2017-07) IKR 261

ETL Certification

RECOGNIZED COMPONENT

Caution

A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer.

ETL LISTED

The product IKR 261

• conforms to the UL Standard UL 61010-1

• is certified to the CAN/CSA Standard C22.2 No. 61010-1

3103457

BG 5153 BEN / D (2017-07) IKR 261 27

VACUUM SOLUTIONS FROM A SINGLE SOURCE

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COMPLETE RANGE OF PRODUCTS

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Are you looking for a perfect vacuum solution? Please contact us:

Pfeiffer Vacuum GmbH

Headquarters ● Germany T +49 6441 802-0 info@pfeiffer-vacuum.de

www.pfeiffer-vacuum.com

bg5153ben/ d

Pfeiffer Vacuum IKR 261 Operating Instructions Manual

Specifications and Main Features

Frequently Asked Questions

User Manual