Pfeiffer Vacuum HICUBE PRO Operating Instructions Manual

PT 0265 BEN/E (1602)

OPERATING INSTRUCTIONS

EN

Translation of the original instructions

HICUBE PRO

Turbo pumping station

Table of contents

2

Table of contents

1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.1.1 Applicable documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2.1 Safety instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2.2 Pictographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.3 Instructions in the text . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.4 Abbreviations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.5 Symbols used . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

3.1.1 Transportation lock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.1.1 Product characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.1.2 Scope of delivery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2.1 Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2.2 Cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.1 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.2 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.2.1 Earthing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.2.2 Anchoring the pumping station . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

5.3 Connecting the high vacuum side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

5.4 Connecting the exhaust side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

5.5 Connecting an external turbopump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

5.5.1 Connecting the high vacuum side . . . . . . . . . . . . . . . . . . . . . . . . . 15

5.5.2 Connecting the fore-vacuum side . . . . . . . . . . . . . . . . . . . . . . . . . 15

5.6 Transportation lock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

5.7 Filling up the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

5.8 Connecting accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

5.8.1 Connecting a measuring device . . . . . . . . . . . . . . . . . . . . . . . . . . 17

5.9 Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

6.3.1 Operation with DCU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

6.3.2 Saving energy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

6.4 Operation with gas ballast valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

6.5 Operation with fore-vacuum valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

6.6 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Table of contents

3

6.6.1 Switching off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

6.6.2 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 23

7.2 Removal of components for their maintenance . . . . . . . . . . . . . . . . . . . . 23

7.2.1 Preparatory work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

7.2.2 Dismantling of the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

7.2.3 Installing the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

7.3 Changing the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

11 Spare parts HiCube Pro. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

13 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

13.2 HiCube 80 Pro . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

13.2.1 DN 40 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

13.2.2 DN 63 ISO-K . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

13.2.3 DN 63 CF-F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

13.3 HiCube 300 Pro . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

13.3.1 DN 100 ISO-K . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

13.3.2 DN 100 CF-F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

13.4 HiCube 400 Pro . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

13.4.1 DN 100 ISO-K . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

13.4.2 DN 100 CF-F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

13.5 HiCube 700 Pro . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

13.5.1 DN 160 ISO-K . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

13.5.2 DN 160 CF-F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

14 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

4

About this manual

1 About this manual

1.1 Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen­tation remains valid as long as the customer does not make any changes to the product.

Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.

1.1.1 Applicable documents

*also available via www.pfeiffer-vacuum.com

1.2 Conventions

1.2.1 Safety instructions

The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan­dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:

HiCube Pro Operating instructions

Declaration of Conformity Part of this document
Operating instructions for components see product description*

DANGER

Imminent danger

Indicates an imminent hazardous situation that will result in death or serious injury.

WARNING

Possibly imminent danger

Indicates an imminent hazardous situation that can result in death or serious injury.

CAUTION

Possibly imminent danger

Indicates an imminent hazardous situation that can result in minor or moderate injury.

NOTICE

Command or note

Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

About this manual

5

1.2.2 Pictographs

1.2.3 Instructions in the text

 Work instruction: here you have to do something.

1.2.4 Abbreviations

DCU: Display Control Unit
HPU: Handheld Programming Unit
TC: Electronic drive unit for turbopump
TPS: Mains pack

1.2.5 Symbols used

The following symbols are used consistently throughout the diagrams:

High vacuum flange

Fore-vacuum connection

Electric connection

Air cooling unit

Venting connection

Sealing gas connection

Exhaust connection

Prohibition of an action or activity in connection with a source of danger,
the disregarding of which may result in serious accidents

Warning of a displayed source of danger in connection with operation of
the unit or equipment

Command to perform an action or task associated with a source of dan­ger, the disregarding of which may result in serious accidents

Important information about the product or this document

6

Safety

2Safety

2.1 Safety precautions

● Do not expose any body parts to the vacuum.

● Observe all safety and accident prevention regulations.

● Regularly check the proper observance of all safety measures.

● Always ensure a safe connection to the protective earthing conductor (PE, protection

class I).

● Do not loosen any plug connection during operations.

● Wait for the rotor to reach standstill before peforming work on the high vacuum flange.

● Keep leads and cables well away from hot surfaces (> 70 °C).

● Never fill or operate turbopump with cleaning agent.

● Do not operate the turbopump with open high vacuum flange.

● Do not carry out any unauthorised modifications or conversions to the pumps.

● The unit has been accredited with protection class IP 20. Take necessary measures

when installing into ambient conditions, which afford other protection classes.

Duty to inform

Each person involved in the installation, operation or maintenance of the pumping
station must read and observe the safety-related parts of these operating instuctions
and the components instructions.

 The operator is obligated to make operating personnel aware of dangers originating

from the vacuum pump, the pumped medium or the entire system.

NOTICE

Checking the safety system against excess rotation speed

To provide the functioning of the integrated safety system for avoiding excess rotation
speed, the pump must run-up from the standstill at least once a year.

 Switch off the pump and await the complete standstill (rotation speed = 0 Hz).
 Run-up the pump according to this operating instructions.

WARNING

Danger of unsafe electrical installation

Safe operation after installation is the responsibility of the operator.

 Do not independently modify or change the pump and electrical equipment.
 Make sure that the system is integrated in an emergency off safety circuit.
 Consult Pfeiffer Vacuum for special requirements.

WARNING

Danger of electric shock

In case of defect, the parts connected to the mains supply are under voltage.

 Always keep the mains connection freely accessible so you can disconnect it at any

time.

WARNING

Danger of electric shock

The pumping station is only free of voltages when the mains plug has been disconnect­ed.

 Switch off the master switch and disconnect the mains plug before all work.
 Secure against unintentional restarting.

Safety

7

2.2 Protective equipment

Determined situations concerning the handling of vacuum pumps require wearing of per­sonal protective equipment. The owner, respectively the employer are obligated to pro­vide an adequate equipment to any operating persons.

2.3 Proper use

● Only use the pumping station for creating vacuum.

● Only operate the pumping station as an entire unit.

● Only use the pumping station for evacuation of dry and inert gases; other applications

only after consultation with Pfeiffer Vacuum.

DANGER

Danger to health by hazardous substances during maintenance or installation

Depending on the process vacuum pumps, components or operating fluids can be con­taminated by toxic, reactive or radioactive substances.

 Wear adequate protective equipment during maintenance and repairs or in case of

reinstallation.

kg

WARNING

Risk of injury through falling objects

When transporting vacuum pumps by hand, there is a danger through loads slipping and
falling down.

 Carry small and mid-size vacuum pumps two-handed.
 Carry vacuum pumps > 20 kg by a suitable lifting device.
 Wear safety shoes with steel toe cap according to directive EN 347.

CAUTION

Risk of injury through hot surfaces

Vacuum pumps can become hot during operation.

 Allow the pump to cool before maintenance and repairs.
 If necessary wear protective gloves according to EN 420.

CAUTION

Risk of injury through sharp edges

Rotor and stator disks of turbopumps have very sharp edges.

 Before any working wait for the complete standstill of the pump.
 Do not reach in the high vacuum flange.
 If necessary wear protective gloves according to EN 420.

NOTICE

EC conformity

The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.

 Following installation into a plant and before commissioning, the operator must check

the entire system for compliance with the valid EU directives and reassess it accord­ingly.

8

Safety

2.4 Improper use

Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:

● pumping of corrosive or explosive media

● pumping of condensing vapors

● pumping of liquids

● pumping of dusts

● operation with improper high gas throughput

● operation with improper high fore-vacuum pressures

● operation with improper high levels of insulated heat input

● operation in improper high magnetic fields

● operation with improper gas mode

● venting with improper high venting rates

● use of the vacuum pump to generate pressure

● operation of the devices in areas with ionizing radiation

● operation in potentially explosive areas

● use of the devices in systems in which impact-like stress and vibrations or periodic

forces affect the devices

● use of accessories or spare parts, which are not named in this manual

warranty seal

Closure seal

The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.

 Do not open the product within its warranty period!
 For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-

um Service.

Transport and storage

9

3 Transport and storage

3.1 Transport

 Always transport the pumping station uprightly and as even as possible.
 Keep the original protective covers.

3.1.1 Transportation lock

The backing pump of the pumping station HiCube Pro is secured against damage during
transport .

 Follow instructions concerning the installation location!
 Before putting into operation loosen the backing pump's transportation lock device at

the installation location.

3.2 Storage

 Close the flange openings by using the original protective covers.
 Close further connection ports by using the corresponding protective covers.
 Only store the pumping station indoors at an ambient temperature between -10 °C

and +40 °C.

 In rooms with moist or aggressive atmospheres, the pumping station must be airproof

shrink-wrapped in a plastic bag together with a bag of dessicant.

WARNING

Danger from falling and swinging loads!

When lifting the pumping station there is a danger of falling parts.

 Only fix a lifting device for transport on all provided points of the frame of the pumping

station (first remove the rubber caps).

 Make sure that there are no persons under the suspended load.
 Do not lift the pumping station on the handle.

CAUTION

Risk of injury due to the pumping station's tipping or rolling away

Superstructural parts provided by customer can shift the pumping station's center of
gravity, creating a risk of tipping. On inclined planes, there are general risks of tipping
and injury due to squeezing from rolling pumping stations.

 Do not transport or move pumping stations with superstructural parts.
 Do not transport or position a pumping station on inclined planes with a downgrade

> 5° (approx. 8.7%).

10

Product description

4 Product description

Table 1: Selection of turbopumps, backing pumps, and accessories for pumping stationsHiCube
Pro

HiPace 80

HiPace 300

HiPace 400

HiPace 700

ACP 15

ACP 28

Duo 11 M

Duo 20 M

Pascal 2010

Pascal 2021

Feature HiCube Pro Operating instruc-

tions

HV flange DN 40 / DN 63 DN 100 DN 160

Turbopump HiPace 80

HiPace 300

HiPace 400

HiPace 700

PT 0208 BN
PT 0200 BN
PT 0210 BN
PT 0209 BN

Electronic drive unit TC 110 TC 110

TC 400 TC 400 TC 400

PT 0204 BN
PT 0203 BN

Air cooling Yes Yes Yes Yes PT 0500 BN

Backing pump: Multi-stage

Roots pump

ACP 15 / 28 ACP 15 / 28 ACP 15 / 28 ACP 15 / 28 112369 O

Backing pump: Rotary vane pump Duo 11 M

Duo 20 M

Duo 11 M
Duo 20 M

Duo 11 M

Duo 20 M

Duo 11 M
Duo 20 M

PD 0070 BN
PK 0203 BN

Backing pump: Rotary vane pump Pascal 2010

Pascal 2021

Pascal 2010
Pascal 2021

Pascal 2010
Pascal 2021

Pascal 2010
Pascal 2021

103275 O

Power supply with

display and control unit

DCU 110 DCU 310 DCU 400 DCU 400 PT 0250 BN

Venting valve optional optional optional optional PT 0228 BN

Housing heater

(water cooling required)

optional, only with

CF flange

optional, only with

CF flange

optional, only with

CF flange

optional, only with

CF flange

PT 0233 BN

Control adapter for accessories Yes Yes Yes Yes PT 0521 BN

Product description

11

4.1 Product identification

4.1.1 Product characteristics

To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.

Fig. 1: Example for a rating plate

4.1.2 Scope of delivery

● HiCube Pro

● Only with rotary vane pump as backing pump: operating fluid and filler tube

● Mains cable

● Grounding cable, 3 m (incl. fixing material)

● Protective cover for the high vacuum flange

● Operating manuals for pumping station and individual components

4.2 Function

Turbo pumping stations are fully automatic pump units which are ready for connection.
A turbo pumping station consists of a portable or mobile vacuum pumping unit with a tur­bopump and a specially matched backing pump.

The display and control unit DCU serves to control and monitor the pumping station.

4.2.1 Control

Electronic drive unit of the turbopump

Mod.:

Mod.-No.:

Ser. No.:

115 - 230 V, 50/60 Hz
Wiring diagram PM 061

Made in Germany 2008/09

HiCube Classic

PM S28 250 00

Mass:

D-35614 Asslar

T4 AH

28 kg

Fig. 2: HiCube Pro Overview

2 Display and control unit DCU
14 Air cooling
15 HiPace turbopump
36 Backing pump
41 Operating fluid channel
86 Frame

86.1 Transportation handle

88 Electronics housing
89 Housing for controls
91 Cover plate
92 Guide roller with locking brake
93 Guide roller
101 Transport protection
102 Retaining hook

15

14

36

102

86.1

2

88

86

93

91

92 41 101

89

H

H

12

Product description

4.2.2 Cooling

● Air cooling

● Water cooling (optional)

In the case of excess temperature the electronic drive unit reduces the drive power au­tomatically.

4.3 Range of application

The pumping station HiCube Pro must be installed and operated in the following ambient
conditions.

Installation location weather protected (indoors)
Protection category IP 20
Protection class I
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T  31 °C, up to max. 50% at T  40 °C
Atmospheric pressure: 750 hPa - 1060 hPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II
Connection voltage TC 24 or 48 V DC ±5%

Limit values for HiPace 80 HiPace 300 HiPace 400 HiPace 700

Permissible magnetic field max. 3.3 mT 5.5 mT 6 mT 6 mT
Permissible irradiated heat input 3 W 8 W 14 W 14 W

Remarks to ambient conditions

The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible fore-vacuum pressure or at maximum gas throughput depending
on the cooling method. The turbopump is intrinsically safe by a redundant temperature
monitoring.

● By reducing the fore-vacuum pressure or gas throughput, the turbopump can be op­erated at higher ambient temperatures.

● If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit reduces drive power first and switches off then, if necessary.

Installation

13

5 Installation

5.1 Preparatory work

The installation location is to be chosen so that components that need servicing are free­ly accessible at all times. No special foundations or base are necessary for installation.
The unit must not be used outdoors. Conditions are:

● the ambient conditions specified for the range of application

● a level, vibration-free surface.

● Distance to side walls or adjacent devices: at least 50 cm.

● When using a casing heating and a water cooling unit the temperature of the connect-

ed flange of the vacuum chamber must not exceed 120 °C.

● It is not allowed to operate the device in systems where impact-like stresses and vi­brations or periodically forces occur.

 Ensure sufficient cooling for the pumping station.
 When magnetic fields exceed the approved values, a suitable shielding must be used.

Check installation location and consult Pfeiffer Vacuum if needed!

 The maximum permissible rotor temperature for the turbopump is 90 °C. If high tem-

peratures arise for process reasons, the radiated heat input must not exceed the per­missible values. Install suitable screening sheets, if necessary (design information on
request).

5.2 Set-up

5.2.1 Earthing

Fig. 3: HiCube Pro, connections

2 Display and control unit

15.8 Electronic drive unit for turbopump

36.6 Exhaust connection

125.1 Main switch

125.2 Power supply

125.1

125.2

36.615.82

NOTICE

Danger of missing casing earthing

To comply with the required height of the leakage currents according to DIN EN 61010­1:2010, perform the following measure:

 Connect the earthing cable (consignment) of the pumping station with PE on site,

before mains connection.

14

Installation

5.2.2 Anchoring the pumping station

In the case the rotor of the turbopump suddenly blocs, the resulting torque must be ab­sorbed via the pumping station frame by the fixture provided by the customer. Anchoring
the pumping station is mandatory in order to secure the pumping station and the vacuum
system. For this purpose, there are 3 securing hooks at the lower corners of the pumping
station frame.

 Lock all pumping station roller brakes.
 Fasten the pumping station with lashing straps at all 3 securing hooks.

– Pay attention to the fit and the stress of the straps; the strap loop has to be in the

recess of the securing hook.

– Fasten securely the lashing straps provided by the the customer in order to be able

to hold loads up to 2000 N per anchorage point.

5.3 Connecting the high vacuum side

The assembly of superstructures on the pumping station HiCube Pro is in the operator’s
responsibility. The load capacity of the high vacuum flange is specific for the used tur­bopump. The gross weight of superstructures on the pumping station HiCube Pro may
not exceed 100 kg!

 Observe barycentric shifting by using high or lateral protruding superstructure (e.g.

vacuum chamber). Danger of tilting!

M4

Fig. 4: Anchoring the pumping station

102 Securing hooks 92 Roller

102

92

3x !

Installation

15

 Install the high vacuum flange in accordance with the instructions in the operating

manual of the turbopump.

 Ensure the greatest possible cleanliness when installing any high vacuum parts. Un-

clean components prolong the pump-down time.

 Observe the minimum strength of 170 N/mm

2

for the flange material.

5.4 Connecting the exhaust side

 Prepare the exhaust line provided by customer starting from the pumping station's

casing.

 Choose the cross-section of the exhaust line to be at least the size of the nominal

connection diameter of the vacuum pump's exhaust connection.

 Piping to the pump must be suspended or supported.

– Physical forces from the piping system must not be allowed to act on vacuum

pumps.

 Lay piping from the pump sloping downward so that no condensate can flow back into

the pump; otherwise fit a condensate separator.
– If an air trap is created in the system, then a device for draining condensation water

must be provided at the lowest point.

5.5 Connecting an external turbopump

Depending on the configuration the turbopump can be operated separately from the
pumping station. Please observe the following installation information!

 Install the turbopump according to its operating instructions.
 Open the casing of the pumping station, if necessary.
 Extend necessary control leads for the electronic drive unit of the turbopump using

Pfeiffer Vacuum accessories.

 Connect the control leads to the electronic drive unit.

5.5.1 Connecting the high vacuum side

 Install the high vacuum flange in accordance with the instructions in the operating

manual of the turbopump.

 Ensure the greatest possible cleanliness when installing any high vacuum parts. Un-

clean components prolong the pump-down time.

 Observe the minimum strength of 170 N/mm

2

for the flange material.

5.5.2 Connecting the fore-vacuum side

 Extend the fore-vacuum line between turbopump and backing pump.
 Connect the fore-vacuum line with small-flange components or threaded hose cou-

plings. Do not narrow the free cross section of the fore-vacuum flange!

CAUTION

High pressure in the exhaust line!

Danger of damage to the seals and danger of the pump bursting.

 Install the line without shut-off valves on the exhaust side.
 Do not operate the pump with excess pressure at the inlet; observe the maximum al-

lowable pressures and pressure differences.

Operation of the turbopump with the electronic drive unit separate

The operation of the turbopump with a separated electronic drive unit is only possible
using the respective Pfeiffer Vacuum accessories.

16

Installation

 With rigid pipe connections: Install bellows for attenuation of vibrations in the connec-

tion line.

5.6 Transportation lock

Turbo pumping stations of the HiCube Pro line are equipped with transportation lock for
the backing pumps (see label). The transportation lock consists of two opposing knurled
screws with spring suspension which fasten the backing pump's bottom plate.

 Loosen the knurled screw of the transportation lock.
 Similarly loosen the transportation lock on the opposite side.

5.7 Filling up the operating fluid

Only applies to HiCube with rotary vane pump as backing pump!

● The operating fluid reservoir is already filled and installed for the turbopump.

● The dry compressing backing pump ACP is already filled with lubricant.

● The operating fluid for the rotary vane pump is enclosed with the delivery.

 Unscrew the operating fluid bottle's screw plug and screw the filler tube (both included

in the equipment pack).

Fig. 5: Transportation lock at HiCube Pro

101 Transportation lock

101

101

2x !

Installation

17

 Unscrew operating fluid filler screw 36.1.
 Insert the filler tube into the rotary vane pump's filler opening.
 Fill operating fluid according to rotary vane pump operating instructions.
 Screw in operating fluid filler screw 36.1.
 Check fill level: The correct fill level is between the markings on the sight glass.

– If the fill level drops below the "Min" marking, add operating fluid.

5.8 Connecting accessories

● The air cooling serves to the cooling of Pfeiffer Vacuum turbopumps at ambient tem­peratures of max. + 35 °C.

● A venting valve is installed and connected to the turbopump.

 Generally use water cooling if the ambient temperature is > +35 °C.
 Connect additional accessories according to the operating manual of the turbopump.

5.8.1 Connecting a measuring device

The connection of a vacuum gauge (e.g. Pfeiffer Vacuum ActiveLine) is possible to the
display and control unit DCU.

Fig. 6: Fill the backing pump with operating fluid

36 Backing pump: Rotary vane pump

36.1 Filler opening/filler screw

36.4 Operating fluid bottle (similar to
illustration)

66 Filler tube

36

66

36.1

36.4

Installation and operation of accessories

Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in­stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.

 For information on order numbers of components, see "Accessories".
 Use original accessory parts only.

NOTICE

Dangerous excess temperatures

Process-related high temperatures can result in impermissible excess temperatures
and thus damage to the turbopump.

 Water cooling must be used when employing a casing heating or during operation

with heated vacuum chambers.

 Do not introduce any additional energy into the pump (see p. 19, chap. 6.1).

18

Installation

Connect the transmitter appropriately (see operating instruction of the ActiveLine trans­mitter).

 Open the cover of the casing for electronics.

 Run the measuring cable into the casing for electronics from below.
 Plug the measuring cable in the connection X3 of the DCU.
 Settings are possible with the extended parameter set at the DCU.

5.9 Connecting to the mains power supply

 Observe the information on the rating plae.
 Plug the mains cable into the the mains connection on the rear side of the pumping

station and fix it with the clip.

 Connect the mains cable to the mains.

Fig. 7: HiCube Pro, running a measuring cable

2 Display and control unit

2.1 Measuring gauge

2.4 Measuring cable
89 Control casing

2

89

2.1

2.4

WARNING

Danger of unsafe electrical installation

Safe operation after installation is the responsibility of the operator.

 Do not independently modify or change the pump and electrical equipment.
 Make sure that the system is integrated in an emergency off safety circuit.
 Consult Pfeiffer Vacuum for special requirements.

Operation

19

6Operation

6.1 Commissioning

Important settings for turbopumping stations are preprogrammed in the turbopump's
electronic drive unit at the factory.

Table 2: Factory configuration of important parameters for HiCube Pro pumping stations

 Loosen the transportation lock before first-time starting.
 When water cooling is used: Open cooling water supply and check the flow.
 When sealing gas is used: Open the sealing gas supply and check the flow.

6.2 Operation modes

The following operation modes are available:

● Operation via RS-485 and Pfeiffer Vacuum display and control units or PC

Parameter Name Option HiCube 80 Pro HiCube 300 Pro HiCube 400/700 Pro

[P:001] Heating Without heating 0 0 0

With heating 1 1 1

[P:012] Enable venting 1 1 1
[P:019] Configuration of output DO2 13 (= backing pump) - -
[P:023] Motor pump - 1 1
[P:024] Configuration of output DO1 - 21 = vacuum valve, de-

layed

21 = vacuum valve, de­layed

[P:025] Backup pump operating mode With DUO/Pascal 0 = Continuous opera-

tion

0 = Continuous opera­tion

0 = Continuous opera­tion

With ACP 15/28 1 = intermittent opera-

tion

1 = intermittent opera­tion

1 = intermittent opera­tion

[P:035] Configuration of accessory

connection A1

With air cooling 0 0 0
With water cooling 2 2 2

[P:036] Configuration of accessory

connection B1

1 = Venting valve, nor­mally closed

1 = Venting valve, nor­mally closed

1 = Venting valve, nor­mally closed

[P:046] Configuration of relay 2 - 15 = pumping station 15 = pumping station
[P:047] Configuration of relay 3 - 13 = backing pump 13 = backing pump
[P:055] Configuration of output AO2 8 = Fore-vacuum

triggering

--

[P:710] Backing pump switch-off

threshold for intermittent oper­ation

With DUO/Pascal 0 W 0 W 0 W
With ACP 15/28 10 W 50 W 65 W

[P:711] Backing pump switch-on

threshold for intermittent oper­ation

With DUO/Pascal 0 W 0 W 0 W
With ACP 15/28 20 W 70 W 110 W

Comply run-up time

Pump throughput can be impaired by condensate or remainig moisture in the backing
area. This can lead to exceeding the maximum run-up time.

 Recommendation: When switching on, open the gas ballast valve for about 5 min.

(see p. 21, chap. 6.4).

NOTICE

Danger of the pump being destroyed

Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de­struction of the pump.

 Ensure the gas mode is correctly set.
 Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).

20

Operation

6.3 Function description

6.3.1 Operation with DCU

 Consider the following manuals for the operation via Pfeiffer Vacuum display and con-

trol units:

● Operating instructions "DCU"

● Operating instructions "Electronic drive unit"

 Switch on the mains supply via the main switch.
 Switch on the pumping station using key "ON/OFF" on the DCU.
 Settings are possible with the extended parameter set at the DCU.

6.3.2 Saving energy

Depending on the power consumption of the turbopump the electronic drive unit can con­trol the backing pump operation. Consequently, the supplied fore-vacuum pressure de­pends on the turbopump power consumption. Standby operation of the backing pump
can reduce the overall power consumption of the pumping system and the operating
temperature of the backing pump as well.

● Standby mode with the ACP (preset)

● Standby mode with rotary vane pumps (configurable)

Standby mode with the ACP

Switching thresholds for the standby mode of the ACP are preset.

WARNING

Danger due to open high vacuum flange

The rotor of the turbopump turns at high speed. If the high vacuum flange is open, there
is a danger of cut injuries and that the pump can be destroyed by objects falling into it.

 Never operate the pump with an open high vacuum flange.

Fig. 8: Front cover DCU

1 LC display, illuminated
2 Status symbols

3 LED "Operating display"
4 Operating keys

DCU

1

2

3

4

HiCube with turbopump
and ACP

Switching Off threshold backing
pump [P:710]

Switching On threshold backi ng
pump [P:711]

HiPace 80 / TC 110 10 W 20 W

Operation

21

Standby mode with rotary vane pumps

The switching thresholds for the rotary vane pumps as backing pumps are adjustable via
the DCU. Fluctuations in the power consumption of idling turbopumps and type-depen­dent varying fore-vacuum pressures of the backing pumps require the switching thresh­olds to be set separately for the standby mode.

 Determine the switching thresholds for standby operation of the rotary vane pump on

customer side.

 Parameter [P:794] = 1 (display extended parameter set)
 Parameter [P:025] = 1
 Configure thresholds [P:710] and [P:711] according to the operating instructions

"Electronic Drive Unit".

6.4 Operation with gas ballast valve

Steam or moisture from pumped media can condense in the vacuum pump and hence
impair the suction performance.

Letting in gas ballast improves the discharge of condensate, and the pump achieves the
specified final vacuum more quickly. The gas ballast valve can be replaced with a flush­ing gas connection if necessary.

 For operation with gas ballast, please refer to the operating manual for the backing

pump.

 Switch off the pumping station via the "ON/OFF" button on the DCU.
 Place backing pump and venting valve in continuous operation.

– Parameter [P:023] = 0 (turbopump motor off)
– Parameter [P:025] = 0 (continuous operation mode for backing pump)
– Parameter [P:036] = 7 (venting valve continuous 1)

 Switch on the pumping station using key "ON/OFF" on the DCU.

 With the turbopump idle, open the venting screw or allow the venting process to com-

plete using the connected venting valve.

 Clear condensate from the pumping system for around 5 minutes.
 Repeat this process if necessary.

 Restore the initial configuration (see p. 19, chap. 6.1).

 Place the turbopumping station back in operation.

HiPace 300 / TC 400 50 W 70 W
HiPace 400 / TC 400 65 W 110 W
HiPace 700 / TC 400 65 W 110 W

HiCube with turbopump
and ACP

Switching Off threshold backing
pump [P:710]

Switching On threshold backi ng
pump [P:711]

Elimination of large amounts of condensate

If the open gas ballast valve alone is not sufficient to reduce the condensate load, the
pumping system with switched off turbopump can be relieved additionally via the vent­ing connection.

● Prerequisite is an existing display and control unit.

● Admit dry inert gas at the venting connection, if possible.

22

Operation

6.5 Operation with fore-vacuum valve

The fore-vacuum safety valve (optional accessory) is located in the fore-vacuum line be­tween the turbopump and the backing pump. It protects the process vacuum and the tur­bopump from inadvertent venting after switching-off the backing pump or in case of pow­er failure. In order to prevent gas backflow while switching on the fore-vacuum safety
valve opens time delayed to the other pumping station components. The valve is current­less closed.

● [P:010] Pumping station "On" = Fore-vacuum safety valve opens after 8 seonds.

● [P:010] Pumping station "Off" = Fore-vacuum safety valve is closed.

6.6 Switching off and venting

6.6.1 Switching off

After the turbopump is switched off, it must be vented to avoid contamination due to par­ticles streaming back from the fore-vacuum area.

 Switch off the pumping station via the "ON/OFF" button on the DCU.
 Venting.
 Switch off the pumping station at the master switch.
 For water cooling: Shut off the water supply.

6.6.2 Venting

Venting with Pfeiffer Vacuum Venting Valve

 Enable venting via the functions of the electronic drive unit.
 Settings are possible via interface RS-485 by using DCU, HPU or PC.

1)

When mains power is restored the venting procedure is aborted.

Basic information for the rapid venting

Venting of the vacuum chamber in two steps. Ask for details on individual solutions from
Pfeiffer Vacuum.

 Vent for 20 seconds at a rate of pressure rise of max. 15 hPa/s.

– The valve cross section for the venting rate of 15 hPa/s must be adapted to the size

of the vacuum chamber.

– For small vacuum chambers, use the Pfeiffer Vacuum venting valve.

 Then vent with an additional venting valve of any desired size.

WARNING

Danger of electric shock

The pumping station is only free of voltages when the mains plug has been disconnect­ed.

 Switch off the master switch and disconnect the mains plug before all work.
 Secure against unintentional restarting.

Venting rotation speed Switch off the pumping station Mains power failure

1)

50 % of the nominal rotation
speed

Venting valve opens for 3600 s (1 h,
works setting)

Venting valve opens for
3600 s (1 h, works setting)

Maintenance / replacement

23

7 Maintenance / replacement

7.1 Maintenance intervals and responsibilities

● Clean the pumping station externally with a lint-free cloth and little industrial alcohol.

● Carry out the required maintenance on the components of the pumping station in ac-

cordance with the instructions in the individual operating manuals.

● Clarify shorter maintenance intervals for extreme loads or impure processes with Pfei­ffer Vacuum Service.

● For all other cleaning, maintenance or repair work, please contact your Pfeiffer Vacu­um service location.

7.2 Removal of components for their maintenance

In some cases, components may need to be dismantled from the pumping station so that
customers can carry out necessary maintenance work on them (they should then be re­assembled in reverse order).

WARNING

Contamination of parts and operating fluid by pumped media is possible.

Poisoning hazard through contact with materials that damage health.

 In the case of contamination, carry out appropriate safety precautions in order to pre-

vent danger to health through dangerous substances.

 Decontaminate affected parts before carrying out maintenance work.

NOTICE

Disclaimer of liability

Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or op­erating malfunctions due to improperly performed maintenance. The liability and war­ranty entitlement expires.

WARNING

Danger of electric shock

The pumping station is only free of voltages when the mains plug has been disconnect­ed.

 Switch off the master switch and disconnect the mains plug before all work.
 Secure against unintentional restarting.

24

Maintenance / replacement

7.2.1 Preparatory work

 Switch off the pumping station via the "ON/OFF" button on the DCU.
 Venting.

 Switch off the pumping station at the master switch.
 Disconnect the mains plug.
 For water cooling: Shut off the water supply.

7.2.2 Dismantling of the turbopump

 Remove the connector plug from the electronic drive unit.
 Detach and remove the fore-vacuum line from the turbopump.

– Do not damage the fore-vacuum components.

Fig. 9: Disconnecting the pumping station

from the mains safely

67 Mains cable 125.1 Main switch

125.1

67

Fig. 10: HiCube Pro - turbopump connections (example)

8 Power supply cable
10 DCU/TC interface cable
11 Control cable for fore-vacuum connec-

tion

14 Control cable for air cooling
60 Fore-vacuum connection, locking ring
62 Fore-vacuum connection, centering ring

8

60, 62

10, 11, 14

NOTICE

Note the factory settings.

The accessory connections on the turbopump have been preconfigured at the factory.
Interchanging the control leads on the connector causes the pumping station to mal­function or fail.

 Do not interchange the control leads.
 Accessory connections can be configured for operation with the DCU.

– For more information refer to the operating instructions for the electronic drive unit

of the turbopump.

Maintenance / replacement

25

 Remove all mounting screws (depending on the turbopump) with washers from the

mounting plate from below.

 Lift the turbopump from the mounting plate.

– Take care with the control cable for the air cooling.

 If necessary, remove the air cooling from the turbopump.
 Perform turbopump maintenance in accordance with the instructions in the operating

instructions.

7.2.3 Installing the turbopump

Once maintenance is complete, attach the turbopump to the mounting plate in the re­verse order. The tightening torque for the socket cap screw is dependent on its size and
the type of turbopump.

 Remember to use washers.

Table 3: Tightening torque for mounting turbopump for HiCube Pro

Fig. 11: HiCube Pro - turbopump assembly/disassembly

4 Hexagon socket screw
6 Washer
14 Air cooling

15 Turbopump
86 Pumping station frame
87 Mounting plate

86

87

4

6

15

14

Turbopump Mounting screw Quantity Tightening torque

HiPace 80 Hexagon socket, M5x12 6 10 Nm
HiPace 300 Hexagon socket, M8x20 5 30 Nm
HiPace 400 Hexagon socket, M8x20 6 30 Nm
HiPace 700 Hexagon socket, M8x20 6 30 Nm

26

Maintenance / replacement

7.3 Changing the operating fluid

Only applies to HiCube with rotary vane pump as backing pump!

 Put a suitable container under the operating fluid duct.
 Change the operating fluid according to the operating instructions of the rotay vane

pump.

 Fill up the operating fluid.(see p. 16, chap. 5.7)

WARNING

Operating fluid may contain toxic substances from the pumped media!

Danger of poisoning from the emission of harmful substances from the operating fluid.

 Wear suitable protective clothing and respirators.
 Dispose of operating fluid according to the local regulations

WARNING

Hot operating fluid!

Danger of burns when draining due to contact with skin.

 Wear suitable protective clothing.
 Use a suitable collecting vessel.

Fig. 12: Change of operating fluids for HiCube Pro with rotary vane pump

36 Backing pump

36.1 Filler screw

36.2 Drain plug
41 Operating fluid channel

36.1

36

36.3

36.2

41

Decommissioning

27

8 Decommissioning

8.1 Shutting down for longer periods

If the pumping station should be shut down for longer than a year:

 Remove the pumping station from the system, if necessary.
 Replace the operating fluid reservoir of the turbopump, if necessary.
 Only store the pumping station indoors at an ambient temperature between -10 °C

and +40 °C.

 In rooms with moist or aggressive atmospheres, the pumping station must be airproof

shrink-wrapped in a plastic bag together with a bag of dessicant.

8.2 Re-starting

 Check pumping station for contamination and moisture.
 Clean the pumping station externally with a lint-free cloth and little industrial alcohol.
 If necessary, have Pfeiffer Vacuum Service clean the pumping station completely.
 Installation and commissioning in accordance with the operating instructions.

8.3 Disposal

Products or parts thereof (mechanical and electrical components, operating fluids, etc.)
may cause environmental burden.

 Safely dispose of the materials according to the locally applicable regulations.

WARNING

Contamination of parts and operating fluid by pumped media is possible.

Poisoning hazard through contact with materials that damage health.

 In the case of contamination, carry out appropriate safety precautions in order to pre-

vent danger to health through dangerous substances.

 Decontaminate affected parts before carrying out maintenance work.

NOTICE

Risk of damage to the pump following recommissioning

The operating fluid in the turbo pump has a limited shelf life. The length of its shelf life
is as follows:

● max. 2 years without operation or

● a total of max. 4 years following periods of operation and nonoperation.

 Follow the maintenance instructions and inform Pfeiffer Vacuum.

28

Malfunctions

9 Malfunctions

Malfunctions on the pumping station are usually caused by faults on individual compo­nents. Faults are indicated by the LEDs at the electronic drive unit of the turbopump. Al­ternatively, a fault code can also be output at the display and control unit DCU.

9.1 Rectifying malfunctions

● Please refer to the relevant operating manual for troubleshooting at pumping station
components.

● For additional queries, contact Pfeiffer Vacuum Service.

Problem Possible causes Remedy

Pumping station will not start; none of the
integrated LEDs on the electronic drive
unit of the turbopump light up

● Electrical supply interrupted  Check the plug contacts at the relay box and the
power supply unit.

 Check the supply lines of the pumping station.
 Check the output voltage (24 V DC) at the "DC

out" terminal of the power supply unit

 Check the plug contacts on the power supply

unit

● Incorrect operating voltage  Apply correct operating voltage

 Observe the ratings on the type plate.

● No operating voltage applied  Apply the correct operating voltage.

● Electronic drive unit defective  Replace the electronic drive unit.

 Contact Pfeiffer Vacuum Service.

Pump not achieving the required ultimate
pressure

● Condensate in the backing pump  Open the gas ballast valve at the backing pump.

● Gas ballast valve open  Close the gas ballast valve at the backing pump.

Service

29

10 Service

Pfeiffer Vacuum offers first-class service!

● Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService

● Maintenance / repair in the nearby ServiceCenter or ServicePoint

● Fast replacement with exchange products in mint condition

● Advice on the most cost-efficient and quickest solution

Detailed information, addresses and forms at: www.pfeiffer-vacuum.com (Service).

Maintenance and repair in the Pfeiffer Vacuum ServiceCenter

The following steps are necessary to ensure a fast, smooth servicing process:

 Download the forms "Service Request" and "Declaration on Contamination".

1)

 Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum

service address.

 Include the confirmation on the service request from Pfeiffer Vacuum with your ship-

ment.

 Fill out the declaration on contamination and include it in the shipment (required!).
 Dismantle all accessories.
 Drain the operating fluid (applies for turbopumps with pumping speed > 700 l/s).
 Leave electronic drive on the pump.
 Close the flange openings by using the original protective covers.
 If possible, send pump or unit in the original packaging.

Sending of contaminated pumps or devices

No units will be accepted if they are contaminated with micro-biological, explosive or ra­dioactive substances. “Hazardous substances” are substances and compounds in ac­cordance with the hazardous goods directive (current version). If pumps are contaminat­ed or the declaration on contamination is missing, Pfeiffer Vacuum performs
decontamination at the shipper's expense.

 Neutralise the pump by flushing it with nitrogen or dry air.
 Close all openings airtight.
 Seal the pump or unit in suitable protective film.
 Return the pump/unit only in a suitable and sturdy transport container and send it in

while following applicable transport conditions.

Exchange unit

The factory operating parameters are always preset with exchange units. If you use
changed parameters for your application, you have to set these again.

Service orders

All service orders are carried out exclusively according to our repair conditions for vacu­um units and components.

1)

Forms under www.pfeiffer-vacuum.com

30

Spare parts HiCube Pro

11 Spare parts HiCube Pro

Please also specify model number of the the rating plate when ordering accessories or
spare parts.

Refer to the operating manuals for the individual components.

12 Accessories

Please also specify model number of the the rating plate when ordering accessories or
spare parts.

Refer to the operating manuals for the individual components.

Technical data

31

13 Technical data

13.1 General

Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps:

● Recommendations of PNEUROP committee PN5

● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum-

pump performance - General description"

● ISO 5302; 2003: "Vacuum technology - Turbomolecular pumps - Measurement of per­formance characteristics"

● Ultimate pressure: using a test dome and a 48 hrs. period of baking out

● Integral leak rate: using a Helium concentration of 100 %, period 10 s

Conversion table: pressure units

Conversion table: gas throughput units

Information relating to technical data on HiCube Pro

● Versions available for:
– Netzanschluss 230 V AC, 50/60 Hz
– Netzanschluss 110 V AC, 50/60 Hz

● Environmental conditions (see p. 12, chap. 4.3)

● Weight specification including fore-vacuum valve (optional for version with rotary vane

pump)

Maximum values refer exclusively to the input as a single load.

mbar bar Pa hPa kPa Torr

mm Hg

mbar 1 1 · 10

-3

100 1 0.1 0.75

bar 1000 1 1 · 10

5

1000 100 750

Pa 0.01 1 · 10

-5

1 0.01 1 · 10

-3

7.5 · 10

-3

hPa 1 1 · 10

-3

100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Tor r

mm Hg

1.33 1.33 · 10

-3

133.32 1.33 0.133 1

1 Pa = 1 N/m

2

mbar·l/s Pa·m3/s sccm Torr·l/s atm·cm3/s

mbar·l/s 1 0.1 59.2 0.75 0.987
Pa·m

3

/s 10 1 592 7.5 9.87

sccm 1.69 · 10

-2

1.69 · 10

-3

1 1.27 · 10

-2

1.67 · 10

-2

Torr·l/s 1.33 0.133 78.9 1 1.32

atm·cm

3

/s 1.01 0.101 59.8 0.76 1

32

Technical data

13.2 HiCube 80 Pro

13.2.1 DN 40 ISO-KF

13.2.2 DN 63 ISO-K

13.2.3 DN 63 CF-F

Parameter HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro

Flange (in) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

35l/s35l/s35l/s35l/s35l/s35l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

21 s 12 s 24,13 s 10,72 s 21,22 s 10,18 s

Pump-down time for vacuum
chamber size 100 l

208 s 116 s 241,3 s 107,2 s 212,2 s 101,8 s

Pump-down time for vacuum
chamber size 1000 l

2079 s 1161 s 2413 s 1072 s 2122 s 1018 s

Ultimate pressure < 1 · 10

-7

hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa
Weight 64 kg 87 kg 63,9 kg 88,9 kg 70,9 kg 72,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 80 HiPace 80 HiPace 80 HiPace 80 HiPace 80 HiPace 80
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

Parameter HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro

Flange (in) DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

67 l/s 67 l/s 67 l/s 67 l/s 67 l/s 67 l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

21 s 12 s 24,13 s 10,72 s 21,22 s 10,18 s

Pump-down time for vacuum
chamber size 100 l

208 s 116 s 241,3 s 107,2 s 212,2 s 101,8 s

Pump-down time for vacuum
chamber size 1000 l

2079 s 1161 s 2413 s 1072 s 2122 s 1018 s

Ultimate pressure < 1 · 10

-7

hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa
Weight 64 kg 87 kg 63,9 kg 88,9 kg 70,9 kg 72,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 80 HiPace 80 HiPace 80 HiPace 80 HiPace 80 HiPace 80
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

Parameter HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro

Flange (in) DN 63 CF-F DN 63 CF-F DN 63 CF-F DN 63 CF-F DN 63 CF-F DN 63 CF-F
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

67 l/s 67 l/s 67 l/s 67 l/s 67 l/s 67 l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

21 s 12 s 24,13 s 10,72 s 21,22 s 10,18 s

Pump-down time for vacuum
chamber size 100 l

208 s 116 s 241,3 s 107,2 s 212,2 s 101,8 s

Pump-down time for vacuum
chamber size 1000 l

2079 s 1161 s 2413 s 1072 s 2122 s 1018 s

Ultimate pressure < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa
Weight 66 kg 89 kg 65,9 kg 90,9 kg 72,9 kg 74,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 80 HiPace 80 HiPace 80 HiPace 80 HiPace 80 HiPace 80
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

Technical data

33

13.3 HiCube 300 Pro

13.3.1 DN 100 ISO-K

13.3.2 DN 100 CF-F

Parameter HiCube 300

Pro

HiCube 300
Pro

HiCube 300
Pro

HiCube 300
Pro

HiCube 300
Pro

HiCube 300
Pro

Flange (in) DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

260 l/s 260 l/s 260 l/s 260 l/s 260 l/s 260 l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

18 s 9 s 23,49 s 10,32 s 21,05 s 10,09 s

Pump-down time for vacuum
chamber size 100 l

178 s 91 s 234,9 s 103,2 s 210,5 s 100,9 s

Pump-down time for vacuum
chamber size 1000 l

1780 s 913 s 2349 s 1032 s 2105 s 1009 s

Ultimate pressure < 1 · 10

-7

hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa
Weight 67 kg 90 kg 66,9 kg 91,9 kg 73,9 kg 75,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 HiPace 300 HiPace 300
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

Parameter HiCube 300

Pro

HiCube 300
Pro

HiCube 300
Pro

HiCube 300
Pro

HiCube 300
Pro

HiCube 300
Pro

Flange (in) DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

260 l/s 260 l/s 260 l/s 260 l/s 260 l/s 260 l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

18 s 9 s 23,49 s 10,32 s 21,05 s 10,09 s

Pump-down time for vacuum
chamber size 100 l

178 s 91 s 234,9 s 103,2 s 210,5 s 100,9 s

Pump-down time for vacuum
chamber size 1000 l

1780 s 913 s 2349 s 1032 s 2105 s 1009 s

Ultimate pressure < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa
Weight 69 kg 92 kg 68,9 kg 93,9 kg 75,9 kg 77,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 HiPace 300 HiPace 300
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

34

Technical data

13.4 HiCube 400 Pro

13.4.1 DN 100 ISO-K

13.4.2 DN 100 CF-F

Parameter HiCube 400

Pro

HiCube 400
Pro

HiCube 400
Pro

HiCube 400
Pro

HiCube 400
Pro

HiCube 400
Pro

Flange (in) DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

355 l/s 355 l/s 355 l/s 355 l/s 355 l/s 355 l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

18 s 9 s 23,17 s 10,45 s 20,87 s 9,95 s

Pump-down time for vacuum
chamber size 100 l

175 s 89 s 231,7 s 104,5 s 208,7 s 99,5 s

Pump-down time for vacuum
chamber size 1000 l

1751 s 892 s 2317 s 1045 s 2087 s 995 s

Ultimate pressure < 1 · 10

-7

hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa
Weight 73 kg 96 kg 72,9 kg 97,9 kg 79,9 kg 81,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 400 HiPace 400 HiPace 400 HiPace 400 HiPace 400 HiPace 400
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

Parameter HiCube 400

Pro

HiCube 400
Pro

HiCube 400
Pro

HiCube 400
Pro

HiCube 400
Pro

HiCube 400
Pro

Flange (in) DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

355 l/s 355 l/s 355 l/s 355 l/s 355 l/s 355 l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

18 s 9 s 23,17 s 10,45 s 20,87 s 9,95 s

Pump-down time for vacuum
chamber size 100 l

175 s 89 s 231,7 s 104,5 s 208,7 s 99,5 s

Pump-down time for vacuum
chamber size 1000 l

1751 s 892 s 2317 s 1045 s 2087 s 995 s

Ultimate pressure < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa
Weight 79 kg 102 kg 78,9 kg 103,9 kg 85,9 kg 87,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 400 HiPace 400 HiPace 400 HiPace 400 HiPace 400 HiPace 400
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

Technical data

35

13.5 HiCube 700 Pro

13.5.1 DN 160 ISO-K

13.5.2 DN 160 CF-F

Parameter HiCube 700

Pro

HiCube 700
Pro

HiCube 700
Pro

HiCube 700
Pro

HiCube 700
Pro

HiCube 700
Pro

Flange (in) DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

685 l/s 685 l/s 685 l/s 685 l/s 685 l/s 685 l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

17 s 8 s 23,09 s 10,33 s 20,77 s 9,83 s

Pump-down time for vacuum
chamber size 100 l

169 s 84 s 230,9 s 103,3 s 207,7 s 98,3 s

Pump-down time for vacuum
chamber size 1000 l

1692 s 836 s 2309 s 1033 s 2077 s 983 s

Ultimate pressure < 1 · 10

-7

hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa
Weight 73 kg 96 kg 72,9 kg 97,9 kg 79,9 kg 81,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 700 HiPace 700 HiPace 700 HiPace 700 HiPace 700 HiPace 700
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

Parameter HiCube 700

Pro

HiCube 700
Pro

HiCube 700
Pro

HiCube 700
Pro

HiCube 700
Pro

HiCube 700
Pro

Flange (in) DN 160 CF-F DN 160 CF-F DN 160 CF-F DN 160 CF-F DN 160 CF-F DN 160 CF-F
Flange (out) G 1/2" G 1/2" G 1/2" G 1/2" G 1/2" G 1/2"
Pumping speed for N

2

685 l/s 685 l/s 685 l/s 685 l/s 685 l/s 685 l/s

Pumping speed backing
pump at 50 Hz

14 m

3

/h 27 m3/h 9 m3/h 20 m3/h 9 m3/h 18 m3/h

Pump-down time for vacuum
chamber size 10 l

17 s 8 s 23,09 s 10,33 s 20,77 s 9,83 s

Pump-down time for vacuum
chamber size 100 l

169 s 84 s 230,9 s 103,3 s 207,7 s 98,3 s

Pump-down time for vacuum
chamber size 1000 l

1692 s 836 s 2309 s 1033 s 2077 s 983 s

Ultimate pressure < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa < 5 · 10

-10

hPa
Weight 79 kg 102 kg 78,9 kg 103,9 kg 85,9 kg 87,9 kg
Cooling method, standard Air Air Air Air Air Air
Turbopump HiPace 700 HiPace 700 HiPace 700 HiPace 700 HiPace 700 HiPace 700
Backing pump ACP 15 ACP 28 DUO 11 M DUO 20 M Pascal 2010 Pascal 2021

36

Dimensions

14 Dimensions

51

400

200169

154

67

784

660

455

B

A

325

Dimensions HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro

Flange DN 40 ISO-KF DN 63 ISO-K DN 63 CF-F
A 680 mm 671 mm 676 mm
B 158 mm 149 mm 155 mm

Dimensions HiCube 300 Pro HiCube 300 Pro

Flange DN 100 ISO-K DN 100 CF-F
A 716 mm 728 mm
B 195 mm 207 mm

Dimensions HiCube 400 Pro HiCube 400 Pro

Flange DN 100 ISO-K DN 100 CF-F
A 760 mm 760 mm
B 239 mm 239 mm

Dimensions HiCube 700 Pro HiCube 700 Pro

Flange DN 160 ISO-K DN 160 CF-F
A 733 mm 745 mm
B 212 mm 224 mm

Declaration of conformity

We hereby declare that the product cited below satisfies all relevant provisions accord­ing to the following EC directives:

● Machinery 2006/42/EC (Annex II, no. 1 A)

● Electromagnetic Compatibility 2014/30/EU

The agent responsible for compiling the technical documentation is Mr. Helmut Bern­hardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

HiCube
HiCube Pro

Harmonised standards and national standards and specifications which have been ap­plied:

DIN EN ISO 12100 : 2011-03 DIN EN 61326-1 : 2013

DIN EN 1012-2 : 1996 DIN EN 62061 : 2013

DIN EN 61010-1 : 2010 Semi F47-0200

DIN EN 61000-3-2 : 2010

DIN EN 61000-3-3 : 2009

Signature:

Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany

(Dr. Ulrich von Hülsen)
Managing Director

2016-02-26

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