Pfeiffer Vacuum HICUBE ECO Operating Instructions Manual

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OPERATING INSTRUCTIONS

HICUBE ECO

Turbo pumping stations

Translation of the Original

PT0553BEN_C PT0553 2017-08-03

1 About this manual 5

1.1 Validity 5

1.2 Target group 5

1.3 Conventions 5

2 Safety 8

2.1 General safety instructions 8

2.2 Safety instructions 8

2.3 Safety precautions 11

2.4 Limits of use of the product 12

2.5 Proper use 12

2.6 Foreseeable misuse 12

Table of contents

1.1.1 Related documents 5

1.1.2 Variants 5

1.3.1 Abbreviations 5

1.3.2 Pictographs 6

1.3.3 Stickers on the product 6

1.3.4 Instructions in the text 7

3 Transportation and Storage 14

3.1 Transport 14

3.2 Transport protection 14

3.3 Storage 15

4 Product description 16

4.1 Product identification 16

4.2 Function 17

4.2.1 Control interface 17

4.2.2 Drive 18

4.2.3 Cooling 18

4.3 Scope of delivery 18

5 Installation 19

5.1 Preparatory work 19

5.2 Setting up the pumping station 19

5.2.1 Grounding the pumping station 20

5.2.2 Anchor the pumping station (only applies to HiCube 300 Eco) 20

5.3 Connecting the high vacuum side 21

5.3.1 Requirements for the design of the counterflange 21

5.3.2 Using accessories for the high vacuum connection 21

5.3.3 Connecting an external turbopump 22

5.3.4 Installation of ISO-KF flange 22

5.3.5 Installation of ISO-K flange onto ISO-K 23

5.3.6 Installation of ISO-K flange onto ISO-F 23

5.3.7 Installation of CF flanges 25

5.4 Connecting the exhaust side 26

5.5 Use of the DCU as a remote control 27

5.6 Connecting accessories for the pumping station 28

5.7 Unfastening the transport retainer 29

5.8 Connecting to the mains power supply 29

6 Operation 31

6.1 Commissioning 31

6.2 Switching on the turbo pumping station 32

6.3 Operating mode of the turbo pumping station 32

6.4 Operation with gas ballast 32

6.5 Monitoring the operating status 33

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Table of contents

6.5.1 Operating mode display via LED 33

6.5.2 Temperature monitoring 34

6.6 Switching off and venting 34

6.6.1 Switching off the turbo pumping station 34

6.6.2 Venting 34

7 Maintenance 36

7.1 General maintenance information 36

7.2 Maintenance intervals and responsibilities 36

7.3 Removal of components for their maintenance 36

7.3.1 Dismantling connections 37

7.3.2 Removing the turbopump 37

8 Decommissioning 39

8.1 Shutting down for longer periods 39

8.2 Recommissioning 39

8.3 Disposal 39

9 Malfunctions 40

9.1 General 40

9.2 Troubleshooting 40

9.3 Error codes 40

10 Service solutions from Pfeiffer Vacuum 44

11 Accessories 46

12 Technical data and dimensions 47

12.1 General 47

12.2 Technical Data 47

12.3 Dimensioned drawings 52

Declaration of Conformity 55

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the designated product and provide the most important information for a safe usage of the product. The descriptions comply with applicable directives. All information provided in these operating instructions refer to the current development status of the product. The documentation remains valid as long as the customer does not modify the product in any way.

1.1.1 Related documents

HiCube Eco Operating manual

Declaration of Conformity A component of this manual

Operating manuals for the individual components

About this manual

see product description

1.1.2 Variants

These instructions apply to HiCube Eco with the pumping speed classes:

●

HiCube 30 Eco

●

HiCube 80 Eco

●

HiCube 300 Eco

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●

transport,

●

setup (installation),

●

usage and operation,

●

decommissioning,

●

maintenance and cleaning,

●

storage or disposal.

The work described in this document is only permitted to be carried out by persons with appropriate technical training (specialist staff) or with corresponding training from Pfeiffer Vacuum.

1.3 Conventions

1.3.1 Abbreviations

Abbreviation Meaning in the document

CF Flange: Metal-sealed connector conforming to ISO 3669

d Measurement of the diameter (in mm)

DCU Display Control Unit (display and control unit from Pfeiffer Vacuum).

DN Nominal diameter as size description

f Measurement of the speed of a vacuum pump (frequency, in rpm or Hz)

HV High vacuum flange, high vacuum side

ISO Flange: Connector conforming to ISO 1609 and ISO 2861

1) also available from the Pfeiffer Vacuum Download Center

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TÜV Rheinland

Fuse

S/N

Mod.

HiCube 80 Eco PM S74 100 00

- - - - - - - -

P/N

Input Mass Made in Germany 2016/10

2 A 100-240 V ±10 % 50/60 Hz

12.5 kg

D-35614 Asslar

warranty seal

About this manual

Abbreviation Meaning in the document

LC Display: Liquid crystal (LCD)

LED Illuminating diode

DVP Diaphragm vacuum pump

PE Protective earth

[P:xxx] Control parameters of the electronic drive unit Printed in bold as a three-digit number

T Temperature (in °C)

TC Electronic drive unit of the turbopump (turbo controller)

TPS Power supply (turbo power supply)

X3 15-pole D-Sub connection socket on the electronic drive unit of the turbopump

Tbl. 1: Abbreviations used in the document

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

in square brackets. Frequently displayed in combination with a short designation.

Example: [P:312] Software version

Note

Tip

Example

1.3.3 Stickers on the product

This section describes all existing stickers on the product, and their meanings.

Rating plate

The rating plate is located on the rear of the pumping station housing.

Warranty seal

The product is factory-sealed. Damaging or removing a warranty seal results in the warranty being voided.

Protection class

The sticker describes protection class 1 for the product. The positioning shows the position for the grounding connection.

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1.3.4 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required action is indicated by an individual or by multiple action steps.

Individual action step

A horizontal, solid triangle indicates the individual action step of an action.

►

This is an individual action step.

Sequence of multiple action steps

The numbering indicates an action with multiple action steps required.

Action step 1

Action step 2

...

About this manual

Warning of electrical voltage

The sticker warns of the risk of electric shock when working with the housing open.

Imperative: Disconnect the mains plug

The sticker instructs the disconnection of the mains plug from the equipment before installation, servicing and maintenance work.

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Safety

2 Safety

2.1 General safety instructions

This document includes the following four risk levels and one information level.

DANGER

Imminent danger

Indicates a hazardous situation which, if not avoided, will result in death or serious injury.

►

Instructions on avoiding the hazardous situation

WARNING

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in death or serious injury.

►

Instructions on avoiding the hazardous situation

CAUTION

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.

►

Instructions on avoiding the hazardous situation

Danger of property damage

Notice is used to address practices not related to physical inrury.

►

Instructions on avoiding property damage

2.2 Safety instructions

All safety instructions in this document are based on results from the risk assessment in accordance with Machine Directive 2006/42/EC AG Appendix I and EN ISO 12100 chapter 5. Where applicable, all service life phases of the product have been taken into account.

Risks during transport

WARNING

Danger of serious injury due to falling objects

Due to falling objects there is a risk of injuries to limbs through to broken bones.

►

Take particular care and pay special attention when transporting products manually.

►

Do not stack the products.

►

Wear protective equipment, e.g. safety shoes.

NOTICE

Notes, tips or examples identify important information on the product or on this document.

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Risks during installation

WARNING

Danger of death from electric shock due to improper installation

The device uses voltage that is dangerous on contact as the electrical power supply. Potentially fatal situations arise due to unsafe or incorrectly installation when reaching into the device.

►

Ensure that the system is safely integrated into an emergency off safety circuit.

►

Do not carry out any unauthorized modifications or changes on the device.

Safety

CAUTION

Cutting injuries on sharp and rotating parts with the high vacuum flange open during installa tion

With the high vacuum flange open, access to sharp-edged parts is possible. There is a risk of cutting injuries. Objects falling inside destroy the pump during subsequent operation.

►

Only remove the original protective cover immediately before connecting the high vacuum flange.

►

Do not reach into the high vacuum flange.

►

Wear protective gloves during the installation process.

►

Do not put the pump into operation with the vacuum flanges open.

►

Ensure that the mechanical installation is completed before the electrics are connected.

NOTICE

Danger of property damage due to an incorrect counter flange design

Unevennesses of the customers counter flange result in distortion in the pump housing even when correctly affixed. The result is leaks or negative changes in the running properties.

►

Observe the shape tolerances for the counter flange.

►

Observe the maximum deviations in evenness across the entire surface.

Risks during operation

WARNING

Danger of death from poisoning due to toxic gases being expelled without an exhaust line

Exhaust gases and vapors are released from the turbo pumping station unhindered during normal usage. In the case of processes with toxic media, there is a risk of injury and danger of death due to poisoning.

►

Note the corresponding regulations for handling toxic substances.

►

Toxic process gases should be safely conveyed away via an exhaust line.

CAUTION

Risk of injury from bursting due to high pressure in the exhaust line

Faulty or insufficient exhaust lines cause hazardous situations, e.g. increase in exhaust pressure. There is a risk of bursting. It is not possible to rule out the risk of injuries due to broken pieces flying around, high escaping pressure and damage to the equipment.

►

Lay the exhaust line without shut-off units.

►

Observe the permissible pressures and pressure differentials of the product.

►

Check the exhaust line regularly for correct function.

NOTICE

Leaks may occur due to the incorrect installation of CF flanges

Inadequate cleanliness when handling CF flanges and copper seals results in leaks and may cause process damage.

►

Always wear suitable gloves before touching or fitting any components.

►

Fit seals only if dry and free of grease.

►

Note any damaged surfaces and cutting edges.

►

Replace the damaged components.

NOTICE

Destruction of the pump due to gases with excessively high molecule masses

When conveying gases with non-permissibly high molecule masses, there is a risk of the turbopump being destroyed.

►

Make sure the gas mode is set correctly [P:027] on the electronic drive unit.

►

Consult Pfeiffer Vacuum before using gases with larger molecule gases (> 80).

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Safety

NOTICE

Damage to the turbopump due to nonpermissibly fast pressure rise during venting

Non-permissibly high pressure rise rates place a significant load on the rotor and the magnetic bearing of the turbopump. During venting very small volumes in the vacuum chamber or the turbopump, there is a risk of uncontrollable pressure rises. This causes mechanical damage to the turbopump, including potential failure.

►

Observe the prescribed maximum pressure rise speed of 15 hPa/s.

►

Avoid manual and uncontrolled venting of very low volumes.

►

Where necessary, use a venting valve from the Pfeiffer Vacuum range of accessories.

Risks during maintenance

WARNING

Danger of death from electric shock during servicing and maintenance work

The device is only free of voltage with the mains plug disconnected and the turbopump at a standstill.

►

Switch off the main switch prior to starting any work.

►

Wait for the turbopump to come to a standstill (speed = 0)

►

Disconnect the mains plug from the device.

►

Secure the device against accidental restart.

WARNING

Health risk and potential environmental damage due to toxic contaminated parts or devices

Toxic process media result in contamination of the devices or parts thereof. During maintenance work there is a health risk due to contact with these poisonous substances. The non-permitted disposal of toxic substances results in environmental damage.

►

Take appropriate safety precautions and avoid health risks or environmental hazards due to toxic process media.

►

Decontaminate the affected parts before carrying out maintenance work.

►

Wear protective equipment.

NOTICE

Malfunction due to changing the connection configuration

The pumping station connections are pre-configured at the factory. If the control lines on the connector are mixed up, this causes the pumping station to malfunction or fail.

►

When removing components, note their original layout for subsequent re-assembly.

►

Make a note of the accessories configuration and important setting values from the DCU before disassembly of the pumping station or components.

Risks during recommissioning

NOTICE

Damage to the turbopump due to excessive aging of the operating fluid after recommission ing

The storage capacity of the operating fluid in the turbopump is limited. Excessive aging of the operating fluid can result in the ball bearings failing and cause damage to the turbopump.

►

Observe the usable service life of the operating fluid:

●

Without operation, maximum of 2 years,

●

Following operating and standstill times, 4 years in total.

►

Observe the maintenance instructions and inform Pfeiffer Vacuum Service.

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Safety

Risks in the event of faults

WARNING

Danger of death due to the turbopump tearing off in the event of a fault

Sudden blocking of the rotor generates high destructive torques in accordance with ISO 27892. If it is not fastened correctly, the turbopump will tear off. The energy released in this way can propel the entire pump or broken pieces from the inside of the pump through the room. Potentially dangerous gases may escape. There is a risk of serious injury, potentially even fatal, and significant equipment damage.

►

Follow the installation instructions from the manufacturer.

►

Observe the requirements for stability and the design of the counter flange.

►

Only use approved original accessories or mounting elements approved by Pfeiffer Vacuum for the installation process.

WARNING

Danger of death due to the turbopump with vibration damper is tearing off in the event of a fault

Sudden blocking of the rotor generates high destructive torques in accordance with ISO 27892. These result in the turbopump tearing off when using a vibration damper. The energy released in this way can throw the entire pump or broken pieces from the inside of the pump through the space. Potentially dangerous gases may escape. There is a risk of serious injury, potentially even fatal, and significant property damage.

►

Provide suitable safety measures on customer's side to compensate the torques arising.

►

Please contact Pfeiffer Vacuum before installing a vibration damper.

2.3 Safety precautions

General safety measures when handling the product

►

Observe all applicable safety and accident prevention regulations.

►

Check that all safety measures are observed at regular intervals.

►

Do not expose any body parts to the vacuum.

►

Always ensure a safe connection to the protective conductor (PE).

►

Do not unplug any plug connectors during operation.

►

Observe the specified shutdown procedures.

►

Wait for the rotor to come to a complete standstill (speed f = 0) before working on the high vacuum connection.

►

Do not put the device into operation with an open high vacuum flange.

►

Keep lines and cables away from hot surfaces (> 70 °C).

►

Never fill or operate the device with cleaning agents or cleaning agent residue.

►

Do not carry out any unauthorized modifications or changes to the device.

►

Observe the protection rating of the device being installation or operation in different environments.

Information requirement on possible hazards

The owner or operator of the product is required to make all operating personnel aware of hazards arising from the use of this product.

Every person who is involved in the installation, operation or maintenance of the product must have read and understood the safety-relevant parts of this documentation.

Infringement of EU conformity due to modifications to the product

The Declaration of Conformity from the manufacturer is no longer valid if the operator changes the original product or installs additional equipment.

●

Following installation into a system, the operator is required to check and reevaluate as necessary the conformity of the overall system in the context of the relevant EU Directives before commissioning that system.

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Safety

2.4 Limits of use of the product

Parameters Limit values

Installation location Weather-protected (interior spaces)

Air pressure 750 hPa to 1060 hPa

Installation altitude max. 2000 m

Relative humidity max. 80 %, at T < 31 °C

Protection class I

Overvoltage category II

Protection rating (IP code) IP20

Contamination level 2

Ambient temperature 5 °C to 35 °C with air cooling

Permissible surrounding magnetic field Depends on the turbopump used

Maximum irradiated thermal output Depends on the turbopump used

Maximum permissible rotor temperature of the turbo pump 90 °C

max. 50 % at T < 40 °C

5 °C to 40 °C with water cooling

Tbl. 2: Permissible ambient conditions

2.5 Proper use

●

The turbo pumping station is only used to generate the vacuum.

●

The turbo pumping station is only used to extract dry and inert gases.

●

The turbo pumping station is only intended for use in enclosed interior spaces.

●

The turbo pumping station is intended for use as a table-top unit.

2.6 Foreseeable misuse

Misuse of the product automatically invalidates all warranty and liability claims. Any use that is counter to the purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:

●

Pumping corrosive or explosive media

●

Pumping condensing vapors

●

Pumping liquids

●

Pumping dusts

●

Operation with non-permissibly high gas throughput

●

Operation with non-permissibly high fore-vacuum pressure

●

Operation with excessively high radiated heat output

●

Operation in non-permissibly high magnetic fields

●

Operation in the incorrect gas mode

●

Venting with non-permissibly high venting rates

●

Use for pressure generation

Notes on ambient conditions

The specified permissible ambient temperatures apply to operation of the turbopump at maximum permissible backing pressure or at maximum gas throughput, depending on the cooling type. The turbopump is intrinsically safe thanks to redundant temperature monitoring.

●

The reduction in backing pressure or gas throughput permits operation of the turbopump at higher ambient temperatures as well.

●

If the maximum permissible operating temperature of the turbopump is exceeded, the electronic drive unit first reduces the drive output and switches it off where necessary.

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●

Use in areas with ionizing radiation

●

Operation in explosion-hazard areas

●

Use in systems in which impact loads and vibrations or periodic forces are exerted on the equipment

●

Use of accessories or spare parts that are not described in this manual

Safety

13/56

< 20 kg

Transportation and Storage

3 Transportation and Storage

3.1 Transport

WARNING

Danger of serious injury due to falling objects

Due to falling objects there is a risk of injuries to limbs through to broken bones.

►

Take particular care and pay special attention when transporting products manually.

►

Do not stack the products.

►

Wear protective equipment, e.g. safety shoes.

Pfeiffer Vacuum recommends retaining the transport packaging and original protective cover.

Notes on safe transportation

Transport the pumping station in the original packaging.

Always transport the pumping station upright and in as level a position as possible.

Always position the pumping station securely on a sufficiently large, level surface.

Fig. 1:

1 Recessed handle 3 Protective cover

2 Installation base

Notes on safe transportation without packaging

For transport without packaging, the HiCube Eco turbo pumping stations are equipped with recessed handles on the side of the housing frame.

HiCube Eco transport

Observe the weight specified on the rating plate. Lift the turbo pumping station with both hands at the recessed handles. Always transport the turbo pumping station upright with the base downward. Always position the pumping station securely on a sufficiently large, level surface.

3.2 Transport protection

The fore-vacuum pumps in HiPace turbo pumping stations are secured against damage during transport.

Using the transport retainers

Do not unfasten the transport retainer on the backing pump until immediately before commissioning at the installation location.

Observe the notes on installation (see chapter “Unfastening the transport retainer”, page 29).

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3.3 Storage

Transportation and Storage

Pfeiffer Vacuum recommends storing the products in their original transport packaging.

Storing the pumping station

Seal the flange openings using the original protective covers.

Seal other connections (e.g. exhaust) with appropriate protective covers.

Only store the turbo pumping station in indoor areas at temperatures between -10 °C and +40 °C.

In rooms with a humid or caustic atmosphere: Seal the turbo pumping station airtight in a plastic bag together with a drying agent.

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Product description

4 Product description

4.1 Product identification

To ensure reliable identification of the product, always keep all of the information on the rating plate to hand, and use it when communicating with Pfeiffer .

Information on certifications can be found on the test seal on the product, as applicable, or from:

●

www.tuvdotcom.com

●

with the company ID no. 000021320

Fig. 2: HiCube Eco pump configuration

Characteristics HiCube Eco Operating manual

HV flange DN 40 / DN 63 DN 100

Turbopump HiPace 30

Electronic drive unit TC 110 TC 110 TC 110 PT 0204 BN

Backing pump: Diaphragm pump

Power supply TPS onboard,

MVP 015-2

MVP 015-4

MVP 030-3

24 V DC

HiPace 80

MVP 015-2

MVP 015-4

MVP 030-3

TPS onboard, 24 V DC

HiPace 300

HiPace 300 H

(MVP 015-2)

MVP 015-4

MVP 030-3

TPS onboard, 24 V DC

PT 0510 BN

PT 0208 BN

PT 0202 BN

PT 0509 BN

PU 0070 BN

PU 0065 BN

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Product description

Characteristics HiCube Eco Operating manual

Display and control unit DCU 002 DCU 002 DCU 002 PT 0250 BN

Air cooling yes yes yes PT 0500 BN

Venting valve optional optional optional PT 0228 BN

Housing heater (water cooling required)

Tbl. 3: HiCube Eco configuration of vacuum pumps and accessories

Not available optional, only with CF

flange

optional, only with CF flange

PT 0233 BN

4.2 Function

Turbo pumping stations are fully automatic pump units supplied ready for connection. A turbo pumping station consists of a portable or mobile vacuum pumping unit with a turbo pump and a specially matched backing pump.

Fig. 3: HiCube Eco construction

1 Display and control unit DCU 002 8 Turbopump HiPace 80, DN 63 ISO-K

2 Retaining hook (only with HiCube 300 Eco) 9 Electronic drive unit TC 110

3 Transport protection 10 Connecting cable

4 Backing pump diaphragm pump MVP 030-3 11 Ground terminal

5 Recessed handle 12 Backing pump diaphragm pump MVP 015-2

6 Turbopump HiPace 300, DN 100 CF-F 13 Master switch

7 Air cooling 14 Mains power supply

4.2.1 Control interface

The integrated DCU 002 display and control unit serves to control and monitor the turbo pumping station. The DCU is optionally used as a remote control when removing the housing and using an extension cable.

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DCU

Product description

4.2.2 Drive

Fig. 4: DCU control panel

1 LC display, illuminated 3 LED operating display

2 Status icons 4 Control keys

●

Electronic drive unit of the turbopump

●

Electronic drive unit of the backing pump

4.2.3 Cooling

●

Air cooling

●

Water cooling (optional)

At excessively high temperatures, the electronic drive unit automatically reduces the drive power.

4.3 Scope of delivery

●

HiCube Eco

●

Protective cover for high vacuum flange

●

Extension cable M12 on M12, 3 m

●

Power supply cable, country-specific

●

Operating instructions for pumping station and individual components

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5 Installation

The rotor of the turbopump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic energy released acts on the housing and on the anchoring of the turbopump within fractions of a second. This makes the stability of the turbopump and its fastenings extremely important.

Comprehensive tests and calculations conforming to ISO 27892 confirm the safety of the turbopump both against crashes (destruction of the rotor blade) and against bursting (breakage of the rotor shaft). The experimental and theoretical results are expressed in safety measures and recommendations for the correct and safe fastening of the turbopump.

5.1 Preparatory work

Preliminary note

►

Choose an installation location that permits access to the pumping station and to supply lines at all times.

Prerequisites

●

The given ambient conditions

●

level, vibration-free surface

●

Distance to side walls or adjacent devices: at least 50 cm

●

Distance to free table edges min. 10 cm

●

when using a housing heater and water cooling, the temperature on the connection flange on the vacuum chamber is not permitted to exceed 120 °C

Choosing the installation location

Ensure adequate cooling options for the pumping station.

Install suitable protective shielding if ambient magnetic fields occur that are higher than the maximum permitted.

Install suitable protective shielding to prevent the radiated heat output exceeding the permissible values when high temperatures arise due to the processes involved.

Installation

5.2 Setting up the pumping station

CAUTION

Cutting injuries on sharp and rotating parts with the high vacuum flange open during installa tion

With the high vacuum flange open, access to sharp-edged parts is possible. There is a risk of cutting injuries. Objects falling inside destroy the pump during subsequent operation.

►

Only remove the original protective cover immediately before connecting the high vacuum flange.

►

Do not reach into the high vacuum flange.

►

Wear protective gloves during the installation process.

►

Do not put the pump into operation with the vacuum flanges open.

►

Ensure that the mechanical installation is completed before the electrics are connected.

General notes for the installation of vacuum components

►

Choose an installation location that permits access to the product and to supply lines at all times.

►

Observe the ambient conditions named for the area of use.

►

Provide the highest possible level of cleanliness during assembly.

►

Ensure that flange components during installation are grease-free, dust-free and dry.

19/56

Installation

5.2.1 Grounding the pumping station

Fig. 5: Example grounding terminal for a HiCube 80 Eco

Connecting the grounding

Pfeiffer Vacuum recommends connecting an appropriate grounding cable to divert applicative interference forces.

Use the grounding terminal of the turbopump (M4 internal thread).

Perform the connection in accordance with applicable local regulations.

5.2.2 Anchor the pumping station (only applies to HiCube 300 Eco)

Fig. 6: Fasten the HiCube 300 Eco pumping station using securing straps

1 Securing strap 2 Securing hooks

Secure the HiCube 300 Eco against twisting

In the case of a sudden blocking of the turbopump rotor, the resulting torque must be taken up via the pumping station frame by the fixture provided by customer. Anchoring the pumping station is mandatory in order to secure the pumping station and the vacuum system. For this purpose there are 2 securing hooks at the sides of the pumping station frame.

Always fasten the HiCube 300 Eco pumping station using securing straps to both securing hooks.

Fix the securing straps against the securing hook openings and thus against the direction of rotation of the turbopump.

Fasten the securing straps at the customer's site such that they are able to withstand loads of up to 2000 N per fixing point.

Ensure that the straps are correctly positioned and tensioned. The loop of each strap must be in the hollow of the hook.

20/56

5.3 Connecting the high vacuum side

5.3.1 Requirements for the design of the counterflange

NOTICE

Danger of property damage due to an incorrect counter flange design

Unevennesses of the customers counter flange result in distortion in the pump housing even when correctly affixed. The result is leaks or negative changes in the running properties.

►

Observe the shape tolerances for the counter flange.

►

Observe the maximum deviations in evenness across the entire surface.

The assembly of attachments onto the HiCube Eco turbo pumping station is the responsibility of the operator. The load capacity of the high vacuum flange is specific to the turbopump being used. The total weight of attachments onto the HiCube Eco turbo pumping station is not permitted to exceed the specified maximum values.

If the rotor is suddenly blocked, the torques arising from the system and the high vacuum flange must be absorbed. The installation elements for turbopumps are special designs of Pfeiffer Vacuum.

Installation

Turbo pumping station

HiCube 500 Nm 50 kg ± 0.05 mm

HiCube 80 Eco 620 Nm 3.3 mT 0.9 W

HiCube 300 Eco 2000 Nm 5.5 mT 2.4 W

Maximum torque oc curring in the event of

a burst

Tbl. 4: Requirements for the design of the high vacuum connection at the customer's site

►

Only use the approved mounting kits from Pfeiffer Vacuum for the high vacuum connection of the turbopump.

Permissi ble total weight of attach ments on the pump ing station

Form toler ance

Tensile strength of the flange materi al in all oper ating condi tions

170 N/mm

270 N/mm

Screwin depth of the fas tening bolts

2.5 x d 3 mT 1.2 W

1.5 x d

Maximum permissi ble sur rounding magnetic field

Maximum permissi ble irradi ated ther mal out put

5.3.2 Using accessories for the high vacuum connection

Installation and operation of accessories

Pfeiffer Vacuum offers a range of specially coordinated accessories for its products. The installation, operation and maintenance of connected devices are described in detail in the operating manuals of the individual components.

●

Information on approved accessories can be found at pfeiffer-vacuum.com.

Using a splinter shield or protective screen

Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange protect the turbopump against foreign bodies from the vacuum chamber. The volume flow rate of the pump reduces according to the flow conductance values and the size of the high vacuum flange.

Flange size Reduced pumping speed in % for gas type

Splinter shield DN 40 6 9 17 18

2) The theoretically calculated torque in the event of a burst (rotor shaft breakage) according to ISO 27892 was not reached in any experimental test.

He N

21/56

Installation

Flange size Reduced pumping speed in % for gas type

Splinter shield DN 63 3 6 15 16

Protective screen DN 63 1 1 4 4

Splinter shield DN 100 5 7 24 24

Protective screen DN 100 2 2 10 8

Tbl. 5: Reduction of the pumping speed of a turbopump when using a splinter shield or pro

tective screen

►

With ISO flanges, use centering rings with a protective screen or splinter shield.

►

With CF flanges, always insert the protective screen or splinter shield into the high vacuum flange with the clamping lugs pointing towards the rotor.

Using vibration dampers

Pfeiffer Vacuum vibration dampers are suitable for use on plants sensitive to vibration.

WARNING

Danger of death due to the turbopump with vibration damper is tearing off in the event of a fault

Provide suitable safety measures on customer's side to compensate the torques arising.

Please contact Pfeiffer Vacuum before installing a vibration damper.

Only install a vibration damper with a vertical passage.

Take account of the flow resistance.

Secure the turbo pump to the high vacuum flange in addition.

Observe the fastening of the ISO-K flanges (see chapter “Installation of ISO-K flange onto ISO-

K”, page 23) and (see chapter “Installation of ISO-K flange onto ISO-F”, page 23).

5.3.3 Connecting an external turbopump

Depending on the configuration, the turbopump can be operated separately from the pumping station.

It is possible to operate the turbopump with separate electronic drive unit following consultation with Pfeiffer Vacuum and using the relevant accessories.

Example for dismantling a turbopump from the turbo pumping station (see chap-

ter “Removal of components for their maintenance”, page 36).

Installing an external turbopump

Observe the installation notes for the turbopump in the relevant operating instructions for the individual component.

Use cable set PM 071 477 -T (3 m) from the Pfeiffer Vacuum accessories range and extend the fore-vacuum line and the control cable.

–

Other lengths on request.

5.3.4 Installation of ISOKF flange

Mounting of ISOflanges

If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or ISO-K can lead to twisting despite proper installation.

●

The tightness of the high vacuum connection is not at risk thereby.

22/56

Connection using a clamping ring

Only use the approved fastening sets from Pfeiffer Vacuum for the connection.

Fasten the high vacuum connection on the turbopump and the clamping ring to the counter flange.

Use all prescribed components for the turbopump.

Tighten the clamping ring screws evenly.

–

Tightening torque: 3.7 Nm.

5.3.5 Installation of ISOK flange onto ISOK

Mounting of ISOflanges

If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or ISO-K can lead to twisting despite proper installation.

●

The tightness of the high vacuum connection is not at risk thereby.

Creating the ISOK connection using bracket screws

Installation

Only use the approved fastening sets from Pfeiffer Vacuum for the connection.

Connect the flange according to the diagram using the components in the mounting kit.

Use all prescribed components for the turbopump.

Tighten the bracket screws in 3 stages in opposite pairs.

–

Tightening torque: 5, 15, 25 ± 2 Nm

5.3.6 Installation of ISOK flange onto ISOF

The connection types for the installation of ISO-K with ISO-F flange are:

●

"Claw and threaded hole"

●

"Hexagonal screw and threaded hole"

●

"Stud screw and threaded hole"

●

"Stud screw and through-bore"

Mounting of ISOflanges

If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or ISO-K can lead to twisting despite proper installation.

●

The tightness of the high vacuum connection is not at risk thereby.

23/56

1.5 x d

2.5 x d

Installation

Connection of claw and threaded hole

Only use the approved fastening sets from Pfeiffer Vacuum for the connection.

Connect the flange according to the diagram using the components in the mounting kit.

Use all prescribed components for the turbopump.

Tighten the claws in 3 stages in opposite pairs.

–

Tightening torque: 5, 10, 16 ± 1 Nm

Connection of hexagonal screw and threaded hole

Only use the approved fastening sets from Pfeiffer Vacuum for the connection.

Place the collar flange over the high vacuum flange on the turbopump.

Insert the snap ring into the side groove on the high vacuum flange of the turbopump.

Fasten the turbopump onto the counter flange in accordance with the diagram using the collar flange, snap ring and centering ring.

Use all prescribed components for the turbopump.

Screw the hexagonal screws into the threaded holes.

–

Observe the minimum tensile strength of the flange material and the screw-in depth.

Tighten the hexagonal screws in three stages in opposite pairs.

–

Tightening torque: 5, 10, 16 ± 1 Nm

Connection of stud screw and threaded hole

Only use the approved fastening sets from Pfeiffer Vacuum for the connection.

Screw the required number of stud screws with the shorter screw-in end into the holes in the counter flange.

–

Observe the minimum tensile strength of the flange material and the screw-in depth.

Place the collar flange over the high vacuum flange on the turbopump.

Insert the snap ring into the side groove on the high vacuum flange of the turbopump.

Fasten the turbopump onto the counter flange in accordance with the diagram using the collar flange, snap ring and centering ring.

Use all prescribed components for the turbopump.

Tighten the nuts in 3 stages in opposite pairs.

–

Tightening torque: 5, 10, 16 ± 1 Nm

24/56

Connection of stud screw and throughbore

Only use the approved fastening sets from Pfeiffer Vacuum for the connection.

Place the collar flange over the high vacuum flange on the turbopump.

Insert the snap ring into the side groove on the high vacuum flange of the turbopump.

Fasten the turbopump onto the counter flange in accordance with the diagram using the collar flange, snap ring and centering ring.

Use all prescribed components for the turbopump.

Tighten the nuts in 3 stages in opposite pairs.

Tightening torque: 5, 10, 16 ± 1 Nm

5.3.7 Installation of CF flanges

The connection types for the installation of CF with CF flange are:

●

"Hexagonal screw and through-bore"

●

"Stud screw and threaded hole"

●

"Stud screw and through-bore"

Installation

NOTICE

Leaks may occur due to the incorrect installation of CF flanges

Inadequate cleanliness when handling CF flanges and copper seals results in leaks and may cause process damage.

►

Always wear suitable gloves before touching or fitting any components.

►

Fit seals only if dry and free of grease.

►

Note any damaged surfaces and cutting edges.

►

Replace the damaged components.

Connection of hexagonal screw and throughbore

Only use the approved mounting kits from Pfeiffer Vacuum for the connection.

If used: Insert the protective screen or splinter shield with the clamping lugs pointing downward into the high vacuum flange.

Place the seal precisely in the hollow.

Connect the flange according to the diagram using the components in the mounting kit.

Tighten the screw connections all the way around.

–

Tightening torque: 22 ± 2 Nm

After this, check the torque as flowing of the sealing material may make it necessary to tighten the screws.

25/56

Installation

Stud screw and threaded hole

Only use the approved mounting kits from Pfeiffer Vacuum for the connection.

Screw the required number of stud screws with the shorter screw-in end into the holes in the counter flange.

If used: Insert the protective screen or splinter shield with the clamping lugs pointing downward into the high vacuum flange.

Place the seal precisely in the hollow.

Connect the flange according to the diagram using the components in the mounting kit.

Tighten the screw connections all the way around.

–

Tightening torque: 22 ± 2 Nm

After this, check the torque as flowing of the sealing material may make it necessary to tighten the screws.

Stud screw and throughbore

Only use the approved mounting kits from Pfeiffer Vacuum for the connection.

If used: Insert the protective screen or splinter shield with the clamping lugs pointing downward into the high vacuum flange.

Place the seal precisely in the hollow.

Connect the flange according to the diagram using the components in the mounting kit.

Tighten the screw connections all the way around.

–

Tightening torque: 22 ± 2 Nm

After this, check the torque as flowing of the sealing material may make it necessary to tighten the screws.

5.4 Connecting the exhaust side

WARNING

Danger of death from poisoning due to toxic gases being expelled without an exhaust line

►

Note the corresponding regulations for handling toxic substances.

►

Toxic process gases should be safely conveyed away via an exhaust line.

26/56

2 (G1/8”)

Installation

CAUTION

Risk of injury from bursting due to high pressure in the exhaust line

►

Lay the exhaust line without shut-off units.

►

Observe the permissible pressures and pressure differentials of the product.

►

Check the exhaust line regularly for correct function.

Fig. 7: Example for the exhaust connection on the backing pump

1 Diaphragm pump 2 Exhaust silencer (included as standard)

Notes on installing an exhaust line

Choose an exhaust line cross-section of at least the size of the exhaust connection on the backing pump.

Unscrew the exhaust silencer from the backing pump.

Lay the pipelines so that they fall away from the pump to avoid condensate formation.

Where necessary, install a condensate separator in the exhaust line.

Install the condensate drain at the lowest point in the exhaust line.

5.5 Use of the DCU as a remote control

The display and control unit can be removed from the pumping station and used as a remote control.

Safely disconnect the device from the mains before performing any work

Switch the equipment off.

Wait until all components have come to a complete standstill.

Switch off the main switch.

Disconnect the mains plug from the equipment.

Fig. 8: Removing the DCU from the pumping station

27/56

PM 061 270 -X

RS-485

Installation

1 Necked screw with retaining nipple 3 Control cable with M12 connector

2 Display and control unit DCU 002

Remove the DCU from the pumping station housing

Unfasten the 4 necked screws from the corners of the DCU front panel.

Keep the retaining nipple safely.

Take the DCU out of the pumping stand housing.

–

Note the length of the control cable.

Unscrew the M12 connector on the control cable from the DCU.

Using the supplied cables

Other lengths from the Pfeiffer Vacuum accessories range are available on request.

Fig. 9: Connecting the DCU as a remote control

1 Extension cable 2 Control cable with M12 connector

Connect the DCU as a remote control

Screw the interface cable supplied into the RS-485 connection on the DCU.

Use the PM 061 270 -X coupling and connect the extension cable to the connection cable on the control cable from the pumping station.

5.6 Connecting accessories for the pumping station

Installation and operation of accessories

●

Information on approved accessories can be found at pfeiffer-vacuum.com.

Accessory connection for TC 110 electronic drive unit

●

The use of Pfeiffer Vacuum accessories via the TC 110 electronic drive unit is only possible using the corresponding connection cable and/or adapter on the X3 multi-functional connection.

●

Configuration of the required accessory output via RS-485 using a Pfeiffer Vacuum display and control unit or PC.

●

Detailed instructions can also be found in the "TC 110 electronic drive unit" operating instructions.

Note the factory settings.

The accessory connections on the turbopump have been preconfigured at the factory. If the control lines on the connector are mixed up, this can cause the pumping station to malfunction or fail.

28/56

Use additional accessories

Note the present configuration of existing connections and control cables.

Use the Pfeiffer Vacuum display and control unit DCU 002.

5.7 Unfastening the transport retainer

All turbo pumping stations in the HiCube Eco range are equipped with a transport retainer for the backing pumps (see sticker). The backing pump is fixed diagonally to the pumping station baseplate on 2 spring-mounted rails by 2 cheesehead bolts with nuts.

Installation

Fig. 10: Position of the transport retainer on the diaphragm pump

1 Hexagon nut on the transport retainer

Unfastening the transport retainer of the backing pump

Turn the hexagon nuts on the transport retainer as far as they will go.

Also unfasten the transport retainer on the opposite side.

5.8 Connecting to the mains power supply

WARNING

Danger of death from electric shock due to improper installation

The device uses voltage that is dangerous on contact as the electrical power supply. Potentially fatal situations arise due to unsafe or incorrectly installation when reaching into the device.

►

Ensure that the system is safely integrated into an emergency off safety circuit.

►

Do not carry out any unauthorized modifications or changes on the device.

Fig. 11: Mains connection plug and main switch on the HiCube Eco

1 Mains plug 2 Mains connection cable, country-specific (included as standard)

Provide a mains supply to the HiCube Eco

Ensure that the main switch is switched off before connection.

29/56

Installation

Always ensure a safe connection to the protective conductor (PE).

Plug the mains cable provided into the connecting socket on the side of the pumping station housing.

Connect the mains cable to the mains supply at the operator's site.

30/56

Operation

6 Operation

6.1 Commissioning

Important settings and function-related values are programmed into the electronic drive units of the vacuum pumps as parameters. Each parameter has a three-digit number and a designation. Parameters can be used via Pfeiffer Vacuum display and control units or via RS-485 with the Pfeiffer Vacuum protocol.

The DCU is used for both parameter sets as a user interface. The HiCube Eco controls two independent parameter sets for the turbopump and the backing pump. The parameters of the backing pump are

shown in order on the display and are identified with a symbol.

Parameters Name Designation Configuration HiCube 30 Eco HiCube 80 Eco HiCube 300 Eco

[P:001] Heating Heating Without heating not available 0 0

With heating 1 1

[P:012] EnableVent Enable venting 1 1 1

[P:019] Cfg DO2 Configuration

of output DO2

[P:023] MotorPump Motor pump 1 1 1

[P:024] Cfg DO1 Configuration

of output DO1

[P:025] Op-

Mode BKP

[P:035] Cfg Acc A1 Configuration

[P:036] Cfg Acc B1 Configuration

[P:708] PwrSVal Set value pow-

[P:710] Swoff BKP Switching off

[P:711] SwOn BKP Switching on

[P:794] Param set Parameter set 1 = extended 1 = extended 1 = extended

[P:795] Servicelin Service line 309 = Active ro-

[P: 030]

[P: 717]

ValveMode Configuration

StdbySVal Set value rota-

Backing pump mode

accessory connection A1

accessory connection B1

er consumption

threshold backing pump in intermittent mode

gas ballast

tion speed in standby

Air cooling 4 = Fan (tem-

Water cooling 2 = Heating 2 = Heating 2 = Heating

with MVP 015‑2 90 % 90 % 90 %

with MVP 015‑4 100 % 100 % 100 %

with MVP 030 100 % 100 % 100 %

with MVP 015 0 = auto 0 = auto 0 = auto

with MVP 015 66 % 66 % 66 %

22 = Backing pump standby

15 = Pumping station

1 = Intermittent operation

perature controlled)

1 = Venting valve, normally closed

25 W 25 W 45 W | MVP 015

40 W 40 W 55 W | MVP 015

tation speed

22 = Backing pump standby

15 = Pumping station

1 = Intermittent operation

4 = Fan (temperature controlled)

1 = Venting valve, normally closed

309 = Active rotation speed

22 = Backing pump standby

15 = Pumping station

1 = Intermittent operation

4 = Fan (temperature controlled)

1 = Venting valve, normally closed

52 W | MVP 030

62 W | MVP 030

309 = Active rotation speed

Tbl. 6: Preset setting values for HiCube Eco on delivery

31/56

Operation

NOTICE

Destruction of the pump due to gases with excessively high molecule masses

When conveying gases with non-permissibly high molecule masses, there is a risk of the turbopump being destroyed.

►

Make sure the gas mode is set correctly [P:027] on the electronic drive unit.

►

Consult Pfeiffer Vacuum before using gases with larger molecule gases (> 80).

Notes on commissioning the turbo pumping station

Release the transport retainer.

When using water cooling, note the cooling water feed and flow.

When using sealing gas, note the sealing gas feed and flow.

6.2 Switching on the turbo pumping station

Switch on the power supply

►

Switch on the power supply at the main switch.

The DCU carries out a self-test and a check of the connected units after switch-on. The duration of the self-test is approx. 20 seconds and is visualized on the display with a progress bar.

Put the pumping station into operation

►

Switch on the turbo pumping station.

6.3 Operating mode of the turbo pumping station

Using the DCU

When using the Pfeiffer Vacuum DCU 002 display and control unit, observe the corresponding operating manual supplied.

Key Parameter | use Description

corresponds to

[010] = 0 or 1

[308] --> [309] Scroll forwards through the parameter set

[309] --> [308] Scroll back through the parameter set

Press simultaneously Editing mode: Allows the setting of parameter options

Press simultaneously

again

Tbl. 7: Description of the key functions of the DCU

Pumping station ON/OFF: All components are put

into/out of operation according to their configuration

Error acknowledgement (Reset): Resets active malfunction messages in case the cause is eliminated.

The arrow    > designates the option selection in the display

Selection mode: Accepts the selection made ("change confirmed" is displayed)

6.4 Operation with gas ballast

Steam or moisture from pumped media can condense in the backing pump and hence impair the suction performance. Adding gas ballast can improve the expulsion of condensate. The pumping station reaches the specified final vacuum in a shorter time again.

●

The backing pumps MVP 015-4 and MVP 030-3 have an adequately high water vapor tolerance and are not fitted with a gas ballast valve.

●

The MVP 015-2 backing pump is equipped with an electronic gas ballast valve.

32/56

Operation

●

The parameters for automatic operation of the gas ballast valve are preset at the factory for normal applications.

Fig. 12: Display view of second parameter set "ValveMode = open"

Open the gas ballast valve manually with the MVP 0152

The HiCube Eco turbo pumping station with diaphragm pump MVP 015-2 as the backing pump is equipped with an automatic gas ballast function. If delays in the startup time still occur due to condensate in the fore-vacuum range, Pfeiffer Vacuum recommends opening the gas ballast valve manually.

Activate the expanded parameter set (see chapter “Operating mode of the turbo pumping sta-

tion”, page 32).

2. Switch off the turbo pumping station.

3. Scroll through the entire first parameter set to [030]: ValveMode.

Press both buttons simultaneously: This will open editing mode.

5. Select the option "2" = open.

Press both buttons simultaneously: This confirms your selection and exits editing

mode.

7. Switch on the turbo pumping station.

Operate the turbo pumping station with the gas ballast valve open.

–

Operating duration approx. 15 to 30 minutes.

9. Switch off the turbo pumping station.

10. Select the parameter [030]: ValveMode.

11.

Press both buttons simultaneously: This will open editing mode.

12. Select the option "0" = auto.

13.

Press both buttons simultaneously: This confirms your selection and exits editing

mode.

14. Switch the turbo pumping station back on.

6.5 Monitoring the operating status

6.5.1 Operating mode display via LED

The LEDs on the front panel of the DCU display basic operating statuses.

33/56

Operation

LED Symbol LED status Display Meaning

Off currentless

Green

Red

On, flashing "Pumping station OFF", speed ≤60 rpm

On, inverse flashing "Pumping station ON", nominal speed not reached

On, constant "Pumping station ON", nominal speed reached

On, blinking "Pumping station OFF", speed >60 rpm

Off No error, no warning

On, flashing Warning

On, constant Errors

Tbl. 8: Response and meaning of the LEDs on the DCU

6.5.2 Temperature monitoring

If threshold values are overrun, output signals from temperature sensors allow the pumps to be brought to a safe condition. Depending on pump type, temperature threshold values for warnings and error messages are saved unchanged in the electronic drive unit. For information purposes, various status queries are prepared in the parameter set.

●

The drive power of the turbopump is reduced in case of impermissibly high motor temperature or impermissibly high housing temperature. This can cause the motor to fall below the set rotation speed switchpoint and so result in switching off of the pump.

●

In the event of a non-permissibly high temperature (> 75 °C) of the backing pump, the motor speed is reduced to nominal rotation speed to prevent the pump overheating. After cooling down (< 72° C), the pump begins to run again at the set rotation speed.

6.6 Switching off and venting

Recommendation

After the turbopump is switched off, Pfeiffer Vacuum recommends venting the turbopump to avoid contamination due to particles streaming back from the fore-vacuum area.

6.6.1 Switching off the turbo pumping station

Take the pumping station out of operation

►

Switch off the turbo pumping station.

Switch off the power supply

►

Switch off the complete power supply at the main switch.

6.6.2 Venting

Damage to the turbopump due to nonpermissibly fast pressure rise during venting

►

Observe the prescribed maximum pressure rise speed of 15 hPa/s.

►

Avoid manual and uncontrolled venting of very low volumes.

►

Where necessary, use a venting valve from the Pfeiffer Vacuum range of accessories.

NOTICE

34/56

Operation

Manual venting (standard design)

Ensure that the vacuum system is switched off.

Open the black venting screw on the turbopump by one rotation.

Wait for the pressure to equalize to atmospheric pressure in the vacuum system.

Close the venting screw again.

Vent with the Pfeiffer Vacuum venting valve (accessories)

The Pfeiffer Vacuum venting valve is closed without current. Control is carried out via the electronic drive unit of the turbopump and the parameter settings of [P:012] and [P:030].

In the event of a power failure, the turbopump continues to run on, providing sufficient energy to initiate a correct venting process. When power is restored, the venting process is interrupted.

Venting speed [P:720] Venting duration [P:721] Venting duration on power fail

ure

50 % of the nominal rotation speed 3600 s 3600 s

Tbl. 9: Factory settings for delayed venting with turbopumps

►

Switch off the turbopump via the control unit or the remote control.

–

The venting process starts automatically.

General notes for rapid venting

Pfeiffer Vacuum recommends performing the rapid venting of larger volumes in 2 stages.

Use a Pfeiffer Vacuum venting valve for the turbopump or match the valve cross-section to the size of the recipient and the maximum flow rate.

Vent the vacuum system with a maximum rate of pressure rise of 15 hPa/s for the duration of 20 seconds.

Then vent the system with a second venting valve of any size, e.g. directly on the vacuum chamber.

Wait for the pressure to equalize to atmospheric pressure in the vacuum system.

35/56

Maintenance

7 Maintenance

7.1 General maintenance information

WARNING

Danger of death from electric shock during servicing and maintenance work

The device is only free of voltage with the mains plug disconnected and the turbopump at a standstill.

►

Switch off the main switch prior to starting any work.

►

Wait for the turbopump to come to a standstill (speed = 0)

►

Disconnect the mains plug from the device.

►

Secure the device against accidental restart.

WARNING

Health risk and potential environmental damage due to toxic contaminated parts or devices

►

Take appropriate safety precautions and avoid health risks or environmental hazards due to toxic process media.

►

Decontaminate the affected parts before carrying out maintenance work.

►

Wear protective equipment.

7.2 Maintenance intervals and responsibilities

Instructions for performing maintenance activities

Perform the required maintenance on the components of the pumping station in accordance with the instructions in the individual operating manuals.

Clean the pumping station externally with a lint-free cloth cloth and a little industrial alcohol.

Clarify shorter maintenance intervals for extreme loads or contaminated processes with Pfeiffer Vacuum Service.

For all other cleaning, maintenance or repair work, please contact your Pfeiffer Vacuum service point.

7.3 Removal of components for their maintenance

Maintenance work performed by the customer on the pumping station's components may require the components to be removed from the pumping station frame.

NOTICE

Malfunction due to changing the connection configuration

The pumping station connections are pre-configured at the factory. If the control lines on the connector are mixed up, this causes the pumping station to malfunction or fail.

►

When removing components, note their original layout for subsequent re-assembly.

►

Make a note of the accessories configuration and important setting values from the DCU before disassembly of the pumping station or components.

Connection to X3 Preset accessory

Acc. A1 Air cooling

Acc. B1 Venting valve

DO1 Backing pump (only with MVP-30-3)

36/56

Tbl. 10: Preset accessory connections on the HiCube Eco

7.3.1 Dismantling connections

Safely disconnect the device from the mains before performing any work

Fig. 13: Removing HiCube Eco connections

Maintenance

Switch the equipment off. Wait until all components have come to a complete standstill. Switch off the main switch. Disconnect the mains plug from the equipment.

1 Mains cable 4 Connecting cable connector

2 Main switch 5 Accessories control cable

3 Multi-functional connection "X3"

Remove the connector from the multi-functional connection on the electronic drive unit of the turbopump.

Unfasten and remove the accessories control cables from the connector.

7.3.2 Removing the turbopump

Fig. 14: HiCube Eco | Dismantling the turbopump

1 Mounting plate 4 Fore-vacuum connection

2 Turbopump, complete 5 Fore-vacuum line

3 Retaining bolt with washer

Unfasten and remove the fore-vacuum line from the turbopump.

Ensure that the fore-vacuum hose is not bent or damaged.

Unscrew all retaining bolts (x4) and washers from the mounting plate.

37/56

Maintenance

–

Tightening torque of the retaining bolts during subsequent assembly: 10 Nm.

Remove the entire turbopump with mounting plate from the frame.

The opening in the mounting plate makes it easy for customers to perform maintenance work on the turbopump (e.g. change the lubricant reservoir).

38/56

8 Decommissioning

8.1 Shutting down for longer periods

Procedure for an extended standstill of the turbo pumping station

Remove the pumping station from the vacuum system where necessary.

Replace the operating fluid reservoir of the turbopump where necessary.

Seal the flange openings using the original protective covers.

Only store the pumping station in indoor areas at temperatures between -10 °C and +40 °C.

In rooms with a humid or caustic atmosphere: Seal the pumping station airtight in a plastic bag together with a drying agent.

8.2 Recommissioning

Damage to the turbopump due to excessive aging of the operating fluid after recommission ing

The storage capacity of the operating fluid in the turbopump is limited. Excessive aging of the operating fluid can result in the ball bearings failing and cause damage to the turbopump.

►

Observe the usable service life of the operating fluid:

●

Without operation, maximum of 2 years,

●

Following operating and standstill times, 4 years in total.

►

Observe the maintenance instructions and inform Pfeiffer Vacuum Service.

Decommissioning

NOTICE

8.3 Disposal

Procedure for recommissioning the pumping station

Check the pumping station for contamination and humidity.

Clean the pumping station externally with a lint-free cloth cloth and a little industrial alcohol.

Have the pumping station thoroughly cleaned by Pfeiffer Vacuum Service as necessary.

Have the pumping station components serviced by Pfeiffer Vacuum Service as necessary.

Install the pumping station in accordance with these instructions (see chapter “Installa-

tion”, page 19).

Put the pumping station back into operation in accordance with these instructions (see chap-

ter “Commissioning”, page 31).

WARNING

Health risk and potential environmental damage due to toxic contaminated parts or devices

►

Take appropriate safety precautions and avoid health risks or environmental hazards due to toxic process media.

►

Decontaminate the affected parts before carrying out maintenance work.

►

Wear protective equipment.

►

Dispose all substances safely and in accordance with the locally applicable regulations.

39/56

Malfunctions

9 Malfunctions

9.1 General

Malfunctions on the pumping station are usually caused by faults on individual components. LEDs on the turbo pump and backing pump indicate the operating conditions for the corresponding device.

●

The DCU display and control unit displays basic operating conditions of the pumping station (see

chapter “Operating mode display via LED”, page 33).

●

Operational faults are indicated by the DCU with an output of an error code on the display.

9.2 Troubleshooting

Problem Possible causes Remedy

Pumping station will not start up. None of the LEDs on the DCU is lit.

Pump not achieving the required final pressure.

●

Electrical supply interrupted

●

Incorrect operating voltage

●

No operating voltage applied

●

Electronic drive unit defective

●

Condensate in the backing pump

●

Gas ballast valve open

Check the supply lines to the pumping station. Check the 24 V DC output voltage on the "DC out" connection of the integrated power supply. Check the plug-in contacts on the power supply. Check the connection cable between the power supply, backing pump and turbopump.

Observe the specifications on the rating plate. Apply the correct operating voltage.

Apply the operating voltage

Replace the electronic drive unit according to the operating instructions for the turbopump. Inform Pfeiffer Vacuum Service.

Only with MVP 0152: Open the gas ballast valve on the backing pump (see chapter “Operation with gas bal-

last”, page 32).

Only with MVP 0152: Close the gas ballast valve on the backing pump (see chapter “Operation with gas bal-

last”, page 32).

9.3 Error codes

Error (** Error E––– **) always result in the shutdown of the connected peripheral devices.

Warnings (* Warning F––– *) are only displayed and do not result in the shutdown of components.

Handling of error messages on the HiCube Eco

First eliminate the cause of the error.

2. Reset the error message by pressing the key.

Display Problem Possible causes Remedy

E040 Hardware fault

E042 Hardware fault

E043 Hardware fault

E090 ** Internal device er-

ror

40/56

●

External RAM faulty

●

EPROM checksum

●

E2PROM write error

●

RAM insufficient

●

DCU is connected to the wrong pump electronics

●

Contact Pfeiffer Vacuum Service.

Contact Pfeiffer Vacuum Service. Connect the correct pump electronics

Display Problem Possible causes Remedy

E698 Communication

error

F110 Pressure gauge

Tbl. 11: Error displays and warnings for the DCU display and control unit

Display Problem Possible causes Remedy

E001 Overspeed

E002 Overvoltage

E006 Run-up fault

E007 Insufficient operating fluid

E008 Connection from electronic

drive unit to pump faulty

E010 Internal device error

E021 Drive electronics fail to identi-

fy pump

E043 Internal configuration error

E044 Excess temperature electron-

ics

E045 Motor overheated

E046 Internal initialization error

E091 Internal device error

E092 Unknown terminal panel

E093 Temperature evaluation on

motor is faulty

E094 Temperature evaluation on

electronics is faulty

E098 Internal communication error

E107 Combined error for output

stage

E108 Speed measurement fault

E109 Software not released

E110 Operating material analysis

contains errors

●

Electronic drive unit not responding

●

Transmitter faulty

●

Connection to the transmitter disconnected during operation

●

Incorrect power pack used

●

Run-up time threshold set too low

●

Gas flow in recipient through leaks or open valves

●

Speed-control switching point not reached upon expiration of run-up time

●

Insufficient operating fluid

●

Connection to pump faulty

●

Insufficient cooling

●

Insufficient cooling

●

Contact Pfeiffer Vacuum Service.

●

Restart with connected measuring tube

●

Replace the pressure measuring tube

●

Install the pressure measuring tube correctly

●

Call Pfeiffer Vacuum Service

●

Only acknowledge for rotational speed f = 0

●

Check power pack type

●

Check partial mains voltage

●

Adjust run-up time to process conditions

●

Check recipient for leakage and closed valves

●

Adjust speed-control switching point

●

Check operating fluid

●

Only acknowledge for rotational speed f = 0

●

Check connections

●

Only acknowledge for rotational speed f = 0

●

Call Pfeiffer Vacuum Service

●

Only acknowledge for rotational speed f = 0

●

Call Pfeiffer Vacuum Service

●

Only acknowledge for rotational speed f = 0

●

Call Pfeiffer Vacuum Service

●

Improve cooling

●

Check deployment conditions

●

Improve cooling

●

Check deployment conditions

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Only acknowledge for rotational speed f = 0

●

Call Pfeiffer Vacuum Service

●

Only acknowledge for rotational speed f = 0

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Only acknowledge for rotational speed f = 0

Malfunctions

41/56

Malfunctions

Display Problem Possible causes Remedy

E111 Operating materials pump

communication error

E112 Operating materials pump

collective fault

E114 Temperature evaluation on

output stage is faulty

E117 Excess temperature on pump

base

E118 Excess temperature on out-

put stage

E119 Excess temperature on bear-

ings

E143 Operating fluid pump over-

temperature

E777 Nominal speed not confirmed

F001 TMS warm-up time elapsed

F003 TMS heating circuit tempera-

ture sensor

F007 Undervoltage/mains failure

F018 Authorization level conflict

F021 Sealing gas signal invalid

F034 Low sealing gas flow

F045 High motor temperature

F076 High electronics temperature

F097 Invalid pump information

F098 Insufficient pump information

F100 Speed increased to minimum

value

F115 Temperature evaluation on

pump base is faulty

F116 Temperature evaluation on

bearings is faulty

●

Insufficient cooling

●

Insufficient cooling

●

Insufficient cooling

●

Insufficient cooling

●

Nominal speed not confirmed after replacing drive electronics

●

Internal timer for warmup monitoring elapsed

●

TMS temperature not in the permissible range between +5 °C and 85 °C

●

Mains failure

●

Pumping station switched on with [P:010] while E74 input "start/stop" is off (open)

●

Sealing gas monitoring unit signal outside the valid range

●

Sealing gas monitoring unit signal valid, but below the set threshold [P:

791]

●

Insufficient cooling

●

Insufficient cooling

●

Pump data error

●

Connection to pump faulty

●

Permitted specifications for speed setup mode or standby not correct

●

Call Pfeiffer Vacuum Service Only acknowledge for rotational speed f = 0

Call Pfeiffer Vacuum Service

Improve cooling Check deployment conditions

Improve cooling Check deployment conditions Only acknowledge for rotational speed f = 0

Confirm nominal speed with [P:777] confirmed Only acknowledge for rotational speed f = 0

Check deployment conditions

Check deployment conditions Call Pfeiffer Vacuum Service

Check power supply

Switch on pumping station E74 [P:010] Switch off

Check connections for sealing gas monitoring Check parameter options for accessory outputs

Check and improve sealing gas supply Check deployment conditions

Improve cooling Check deployment conditions

Factory setting through acknowledgment

Call Pfeiffer Vacuum Service

[P:707] or [P:717] Refer to technical data for the turbopump for valid speed range

Call Pfeiffer Vacuum Service

42/56

Display Problem Possible causes Remedy

F117 High pump base temperature

F118 High output stage tempera-

ture

F119 High bearing temperature

F143 High temperature of operating

materials pump

F168 High delay

Tbl. 12: Error and warning messages for the drive electronics of the turbopump

Display Problem Possible causes Remedy

E042 Software inconsistent Checksum error

E091 Hardware unknown

E098 Internal communication error between the inter-

face board and drive

E117 Excess temperature pump

E173 Overcurrent on pump

E174 Pump blocked

●

Insufficient cooling

●

Insufficient cooling

●

Insufficient cooling

●

Insufficient cooling

●

Pressure increase speed too high; venting rate too high

●

Improve cooling

●

Check deployment conditions

●

Improve cooling

●

Check deployment conditions

●

Improve cooling

●

Check deployment conditions

●

Improve cooling

●

Check deployment conditions

●

Check and adjust venting rate on pumpspecific basis

Insufficient cooling

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Call Pfeiffer Vacuum Service

●

Improve cooling

●

Check deployment conditions

Malfunctions

Tbl. 13: Error and warning messages for the drive electronics of the diaphragm pump

MVP 015

43/56

ANFORDERUNG SERVICE

ERKLÄRUNG KONTAMINIERUNG

Service solutions from Pfeiffer Vacuum

10 Service solutions from Pfeiffer Vacuum

We offer first class service

Long vacuum component service life, coupled with low downtimes, are clear expectations that you have of us. We satisfy your needs with capable products and outstanding service.

Our intention is always to optimize our core expertise, servicing vacuum components. After the purchase of a product from Pfeiffer Vacuum, our service is still far from over. Often that's precisely where it starts. Naturally with proven Pfeiffer Vacuum quality.

Our professional sales engineers and service technicians stand ready to provide hands-on support to you worldwide. Pfeiffer Vacuum offers a complete portfolio of service offerings, ranging from genuine

spare parts right through to service agreements.

Take advantage of Pfeiffer Vacuum Service

Whether for preventative on-site service from our field service, fast replacement with as-new replacement products or repair in a Service Center close to you; you have various options for upholding your equipment availability. Detailed information and addresses can be found on our website in the Pfeiff-

er Vacuum Service section.

Advice on the optimum solution is available from your Pfeiffer Vacuum contact partner.

For quick and smooth handling of the service process, we recommend the following steps:

1. Download the current form templates.

─ Declaration of Service Request ─ Service Request ─ Declaration of Contamination

a. Dismantle all accessories (all parts that are not original parts).

b. Drain the operating fluid/lubricant as necessary.

c. Drain the cooling medium as necessary.

2. Fill out the service request and the declaration of contamination.

3. Send the forms via email, fax or post to your local Service Center.

4. You will receive a response from Pfeiffer Vacuum.

Sending of contaminated products

No units will be accepted if they are contaminated with micro-biological, explosive or radioactive substances. If products are contaminated or if the declaration of contamination is missing, Pfeiffer Vacuum performs decontamination at the shipper's expense.

44/56

ERKLÄRUNG KONTAMINIERUNG

Service solutions from Pfeiffer Vacuum

5. Prepare the product for transport in accordance with the details in the declaration of contamination.

a) Neutralize the pump with nitrogen or dry air.

b) Close all openings airtight.

c) Seal the product in appropriate protective film.

d) Only pack the product in suitable, stable transport containers.

e) Observe the valid transport conditions.

6 Affix the declaration of contamination to the outside of the packaging.

7 Then send your product to your local Service Center.

8 You will receive a confirmation message from Pfeiffer Vacuum.

For all service orders, our General Terms and Conditions of Sales and Supply and General Terms and

Conditions of Repair and Maintenance apply to vacuum equipment and components.

45/56

Accessories

11 Accessories

Please note the lists of accessories for the individual components in the corresponding operating manuals or online at pfeiffer-vacuum.com.

46/56

12 Technical data and dimensions

12.1 General

This section describes the basic technical specifications on Pfeiffer Vacuum turbopumps.

Maximum values refer exclusively to the input as a single load.

●

Specifications according to the PNEUROP Committee PN5

●

ISO 27892 2010:"Vacuum technology - Turbomolecular pumps. Measurement of rapid shutdown torque"

●

ISO 21360 2007: "Vacuum technology — Standard methods for measuring vacuum-pump performance — General description"

●

ISO 5302 2003: "Vacuum technology - Turbomolecular pumps - Measurement of performance characteristics"

●

End pressure with test dome after 48 hours of heating

●

Gas throughput with water cooling; backing pump = rotary vane pump (10 m3/h)

●

Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C

●

Integral leakage rate with helium concentration 100 %, measuring period 10 s

●

Sound pressure level at distance from pump = 1 m

Technical data and dimensions

mbar bar Pa hPa kPa Torr | mm Hg

mbar 1

bar 1000 1

Pa 0.01

hPa 1

1 · 10

-3

-5

-3

100 1 0.1 0.75

1 · 10

1 0.01

1000 100 750

-3

1 · 10

7.5 · 10

100 1 0.1 0.75

kPa 10 0.01 1000 10 1 7.5

Torr | mm Hg 1.33

1.33 · 10

-3

1 Pa = 1 N/m

133.32 1.33 0.133 1

Tbl. 14: Conversion table: Pressure units

mbar l/s

Pa m3/s

sccm Tor l/s

atm cm3/s

mbar l/s 1 0.1 59.2 0.75 0.987

Pa m3/s

sccm

10 1 592 7.5 9.87

1.69 · 10

-2

1.69 · 10

-3

1.27 · 10

-2

1.67 · 10

Torr l/s 1.33 0.133 78.9 1 1.32

atm cm3/s

1.01 0.101 59.8 0.76 1

Tbl. 15: Conversion table: Units for gas throughput

-3

-2

12.2 Technical Data

Classification HiCube 30 Eco HiCube 30 Eco HiCube 30 Eco

Flange (in) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 30 HiPace 30 HiPace 30

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

47/56

Technical data and dimensions

Ultimate pressure

Pumping speed for N

< 1 · 10

22 l/s 22 l/s 22 l/s

-7

hPa < 1 · 10

-7

hPa < 1 · 10

-7

hPa

Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 84 s 15 s

size 1 l

Pump-down time for vacuum chamber

560 s 836 s 145 s

size 10 l

Pump-down time for vacuum chamber

5595 s 8358 s 1451 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing

Weight 11.7 kg 13.4 kg 13.3 kg

Tbl. 16: Technical data for HiCube 30 Eco, DN 40 ISOKF

Classification HiCube 30 Eco HiCube 30 Eco HiCube 30 Eco

Flange (in) DN 63 CF-F DN 63 CF-F DN 63 CF-F

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 30 HiPace 30 HiPace 30

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

Pumping speed for N

< 1 · 10

32 l/s 32 l/s 32 l/s

-8

hPa < 1 · 10

-8

hPa < 1 · 10

-8

hPa

Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 84 s 15 s

size 1 l

Pump-down time for vacuum chamber

560 s 836 s 145 s

size 10 l

Pump-down time for vacuum chamber

5595 s 8358 s 1451 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing

Weight 12.9 kg 14.6 kg 14.5 kg

Tbl. 17: Technical data for HiCube 30 Eco, DN 63 CFF

Classification HiCube 30 Eco HiCube 30 Eco HiCube 30 Eco

Flange (in) DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 30 HiPace 30 HiPace 30

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

Pumping speed for N

< 1 · 10

32 l/s 32 l/s 32 l/s

-7

hPa < 1 · 10

-7

hPa < 1 · 10

-7

hPa

48/56

Technical data and dimensions

Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber size 1 l

Pump-down time for vacuum chamber size 10 l

Pump-down time for vacuum chamber size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing

Weight 11.7 kg 13.4 kg 13.3 kg

Tbl. 18: Technical data for HiCube 30 Eco, DN 63 ISOK

Classification HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco

Flange (in) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 80 HiPace 80 HiPace 80

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

Pumping speed for N

Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber size 1 l

Pump-down time for vacuum chamber size 10 l

Pump-down time for vacuum chamber size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing

Weight 12.1 kg 13.8 kg 13.7 kg

56 s 84 s 15 s

560 s 836 s 145 s

5595 s 8358 s 1451 s

< 1 · 10

-7

hPa < 1 · 10

-7

hPa < 1 · 10

35 l/s 35 l/s 35 l/s

56 s 83 s 14 s

557 s 834 s 143 s

5572 s 8335 s 1428 s

-7

hPa

Tbl. 19: Technical data for HiCube 80 Eco, DN 40 ISOKF

Classification HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco

Flange (in) DN 63 CF-F DN 63 CF-F DN 63 CF-F

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 80 HiPace 80 HiPace 80

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

Pumping speed for N

< 1 · 10

67 l/s 67 l/s 67 l/s

-8

hPa < 1 · 10

-8

hPa < 1 · 10

-8

hPa

Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 83 s 14 s

size 1 l

49/56

Technical data and dimensions

Pump-down time for vacuum chamber

557 s 834 s 143 s

size 10 l

Pump-down time for vacuum chamber

5572 s 8335 s 1428 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing

Weight 13.5 kg 15.2 kg 15.1 kg

Tbl. 20: Technical data for HiCube 80 Eco, DN 63 CFF

Classification HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco

Flange (in) DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 80 HiPace 80 HiPace 80

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

Pumping speed for N

< 1 · 10

67 l/s 67 l/s 67 l/s

-7

hPa < 1 · 10

-7

hPa < 1 · 10

-7

hPa

Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 83 s 14 s

size 1 l

Pump-down time for vacuum chamber

557 s 834 s 143 s

size 10 l

Pump-down time for vacuum chamber

5572 s 8335 s 1428 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing

Weight 12.1 kg 13.8 kg 13.7 kg

Tbl. 21: Technical data for HiCube 80 Eco, DN 63 ISOK

Classification HiCube 300

Eco

HiCube 300 Eco

Flange (in) DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F

Flange (out) Silencer,

G 1/8"

Silencer, G 1/8"

Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 H HiPace 300 H HiPace 300 H

Backing pump MVP 015-2 MVP 015-4 MVP 030-3 MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pres-

< 1 · 10

-8

hPa < 1 · 10

-8

hPa < 1 · 10

-8

hPa < 1 · 10

-10

hPa < 1 · 10

-10

hPa < 1 · 10

-10

sure

Pumping speed for N

Pumping

260 l/s 260 l/s 260 l/s 260 l/s 260 l/s 260 l/s

1 m³/h 0.75 m³/h 1.8 m³/h 1 m³/h 0.75 m³/h 1.8 m³/h speed backing pump at 50 Hz

50/56

hPa

Technical data and dimensions

Pump-down

55 s 83 s 14 s 55 s 83 s 14 s time for vacuum chamber size 1 l

Pump-down

553 s 830 s 138 s 553 s 830 s 138 s time for vacuum chamber size 10 l

Pump-down

5532 s 8295 s 1382 s 5532 s 8295 s 1382 s time for vacuum chamber size 100 l

Mains require-

100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V ment: voltage

Mains require-

50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz ment: frequency (range)

Cooling meth-

Air Air Air Air Air Air od, standard

Relative humidity of air

5-85 %, non-

condensing

5-85 %, noncondensing

Weight 17.9 kg 19.6 kg 19.5 kg 17.9 kg 19.6 kg 19.5 kg

Tbl. 22: Technical data for HiCube 300 Eco, DN 100 CFF

Classification HiCube 300

Eco

HiCube 300 Eco

Flange (in) DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K

Flange (out) Silencer,

G 1/8"

Silencer, G 1/8"

Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 H HiPace 300 H HiPace 300 H

Backing

MVP 015-2 MVP 015-4 MVP 030-3 MVP 015-2 MVP 015-4 MVP 030-3

pump

Ultimate

< 1 · 10

-7

hPa < 1 · 10

-7

hPa < 1 · 10

-7

hPa < 1 · 10

-7

hPa < 1 · 10

-7

hPa < 1 · 10

-7

hPa

pressure

Pumping speed for N

Pumping

260 l/s 260 l/s 260 l/s 260 l/s 260 l/s 260 l/s

1 m³/h 0.75 m³/h 1.8 m³/h 1 m³/h 0.75 m³/h 1.8 m³/h speed backing pump at 50 Hz

Pump-down

55 s 83 s 14 s 55 s 83 s 14 s time for vacuum chamber size 1 l

Pump-down

553 s 830 s 138 s 553 s 830 s 138 s time for vacuum chamber size 10 l

Pump-down

5532 s 8295 s 1382 s 5532 s 8295 s 1382 s time for vacuum chamber size 100 l

51/56

Technical data and dimensions

Mains requirement: voltage

Mains requirement: frequency (range)

Cooling method, standard

Relative humidity of air

Weight 15.9 kg 17.6 kg 17.5 kg 15.9 kg 17.6 kg 17.5 kg

100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V

50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz

Air Air Air Air Air Air

5-85 %, non-

condensing

Tbl. 23: Technical data for HiCube 300 Eco, DN 100 ISOK

5-85 %, noncondensing

12.3 Dimensioned drawings

All dimensions given in mm

Fig. 15: Dimensions of HiCube 30 Eco, DN 40 ISOKF

Fig. 16: Dimensions of HiCube 30 Eco, DN 63 CFF

52/56

Fig. 17: Dimensions of HiCube 30 Eco, DN 63 ISOK

Technical data and dimensions

Fig. 18: Dimensions of HiCube 80 Eco, DN 40 ISOKF

Fig. 19: Dimensions of HiCube 80 Eco, DN 63 CFF

53/56

Technical data and dimensions

Fig. 20: Dimensions of HiCube 80 Eco, DN 63 ISOK

Fig. 21: Dimensions of HiCube 300 Eco, DN 100 CFF

Fig. 22: Dimensions of HiCube 300 Eco, DN 100 ISOK

54/56

Declaration of Conformity

We hereby declare that the product cited below satisfies all relevant provisions of the following EC Directives:

●

Machinery 006/42/EC (Appendix II, No. 1 A)

●

Electromagnetic Compatibility 2014/30/EU

●

Restriction in the use of certain hazardous substances 2011/65/EU

Authority for compiling the technical documents rests with Mr. Helmut Bernhardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

Turbo pumping station

HiCube Eco

Harmonized standards and national standards and specifications which have been applied:

DIN EN ISO 12100:2011

DIN EN 1012-2:2011

DIN EN 61000-3-2:2014

DIN EN 61000-3-3:2014

DIN EN 61010-1:2010

DIN EN 61326-1:2013

DIN EN 62061:2013

Signature:

(Dr. Ulrich von Hülsen)

Managing Director

Pfeiffer Vacuum GmbH

Berliner Straße 43

35.614 Asslar

Germany

9/10/2016

ed. C - Date 1708 - P/N:PT0553BEN

*PT0553*

Pfeiffer Vacuum HICUBE ECO Operating Instructions Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Table of contents

1 About this manual

1.1 Validity

1.1.1 Related documents

1.1.2 Variants

1.2 Target group

1.3 Conventions

1.3.1 Abbreviations

1.3.2 Pictographs

1.3.3 Stickers on the product

1.3.4 Instructions in the text

2 Safety

2.1 General safety instructions

2.2 Safety instructions

2.3 Safety precautions

2.4 Limits of use of the product

2.5 Proper use

2.6 Foreseeable misuse

3 Transportation and Storage

3.1 Transport

3.2 Transport protection

3.3 Storage

4 Product description

4.1 Product identification

4.2 Function

4.2.1 Control interface

4.2.2 Drive

4.2.3 Cooling

4.3 Scope of delivery

5 Installation

5.1 Preparatory work

5.2 Setting up the pumping station

5.2.1 Grounding the pumping station

5.2.2 Anchor the pumping station (only applies to HiCube 300 Eco)

5.3 Connecting the high vacuum side

5.3.1 Requirements for the design of the counterflange

5.3.2 Using accessories for the high vacuum connection

5.3.3 Connecting an external turbopump

5.3.7 Installation of CF flanges

5.4 Connecting the exhaust side

5.5 Use of the DCU as a remote control

5.6 Connecting accessories for the pumping station

5.7 Unfastening the transport retainer

5.8 Connecting to the mains power supply

6 Operation

6.1 Commissioning

6.2 Switching on the turbo pumping station

6.3 Operating mode of the turbo pumping station

6.4 Operation with gas ballast

6.5 Monitoring the operating status

6.5.1 Operating mode display via LED

6.5.2 Temperature monitoring

6.6 Switching off and venting

6.6.1 Switching off the turbo pumping station

6.6.2 Venting

7 Maintenance

7.1 General maintenance information

7.2 Maintenance intervals and responsibilities

7.3 Removal of components for their maintenance

7.3.1 Dismantling connections

7.3.2 Removing the turbopump

8 Decommissioning

8.1 Shutting down for longer periods

8.2 Recommissioning

8.3 Disposal

9 Malfunctions

9.1 General

9.2 Troubleshooting

9.3 Error codes

10 Service solutions from Pfeiffer Vacuum

11 Accessories

12 Technical data and dimensions

12.1 General

12.2 Technical Data

12.3 Dimensioned drawings

Declaration of Conformity