Pfeiffer Vacuum HiCube Classic Series, HiCube 80 Classic, HiCube 300 Classic, HiCube 700 Classic, HiCube 400 Classic Operating Instructions Manual
HiCube Classic
Turbo pumping station
Translation of the original instructions
Operating Instructions
EN
PT 0264 BEN/D (1312)
Table of contents
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
11 Spare parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.2 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.3 Earthing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.4 Anchoring the pumping station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.5 Connecting the high vacuum side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
5.6 Connecting the exhaust side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
5.7 Connecting an external turbopump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
5.8 Transportation lock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
5.9 Filling up the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5.10 Connecting accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5.11 Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
6.4 Saving energy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.5 Operation with gas ballast valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
6.6 Operation with fore-vacuum valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
6.7 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 23
7.2 Removal of components for their maintenance . . . . . . . . . . . . . . . . . . . . 23
7.3 Changing the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
2
Table of contents
12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
13 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
13.2 HiCube 80 Classic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
13.3 HiCube 300 Classic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
13.4 HiCube 400 Classic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
13.5 HiCube 700 Classic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
14 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
Applicable documents
1.2 Conventions
HiCube Classic Operating instructions
Declaration of Conformity Part of this document
Operating instructions for components see product description*
*also available via www.pfeiffer-vacuum.com
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
4
About this manual
Pictographs
Instructions in the
Work instruction: here you have to do something.
Prohibition of an action or activity in connection with a source of danger,
the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents
Important information about the product or this document
text
Abbreviations used DCU: Display Control Unit
HPU: Handheld Programming Unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
Symbols used The following symbols are used consistently throughout the diagrams:
High vacuum flange
Fore-vacuum connection
Electric connection
Air cooling unit
Venting connection
Sealing gas connection
Exhaust connection
5
Safety
2Safety
2.1 Safety precautions
Duty to inform
Each person involved in the installation, operation or maintenance of the pumping
station must read and observe the safety-related parts of these operating instuctions
and the components instructions.
The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium or the entire system.
Checking the safety system against excess rotation speed
To provide the functioning of the integrated safety system for avoiding excess rotation
speed, the pump must run-up from the standstill at least once a year.
Switch off the pump and await the complete standstill (rotation speed = 0 Hz).
Run-up the pump according to this operating instructions.
NOTICE
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
WARNING
Danger of electric shock
The pumping station is only free of voltages when the mains plug has been disconnected.
Switch off the master switch and disconnect the mains plug before all work.
Secure against unintentional restarting.
● Do not expose any body parts to the vacuum.
● Observe all safety and accident prevention regulations.
● Regularly check the proper observance off all safety measures.
● Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
● Do not loosen any plug connection during operations.
● Wait for the rotor to reach standstill before peforming work on the high vacuum flange.
● Keep leads and cables well away from hot surfaces (> 70 °C).
● Never fill or operate turbopump with cleaning agent.
● Do not operate the turbopump with open high vacuum flange.
● Do not carry out any unauthorised modifications or conversions to the pumps.
● The unit has been accredited with protection class IP 20. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
6
2.2 Protective equipment
kg
Determined situations concerning the handling of vacuum pumps require wearing of personal protective equipment. The owner, respectively the employer are obligated to provide adequate equipment to any operating persons.
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be contaminated by toxic, reactive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.
Risk of injury through falling objects
When transporting vacuum pumps by hand, there is a danger through loads slipping and
falling down.
Carry small and mid-size vacuum pumps two-handed.
Carry vacuum pumps > 20 kg by a suitable lifting device.
Wear safety shoes with steel toe cap according to directive EN 347.
Safety
DANGER
WARNING
2.3 Proper use
CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.
If necessary wear protective gloves according to directive EN 420.
CAUTION
Risk of injury through sharp edges
Rotor and stator disks of turbopumps have very sharp edges.
Before any working wait for the complete standstill of the pump.
Do not reach in the high vacuum flange.
If necessary wear protective gloves according directive EN 420.
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accordingly.
● Only use the pumping station for creating vacuum.
● Only operate the pumping station as an entire unit.
● Only use the pumping station for evacuation of dry and inert gases; other applications
only after consultation with Pfeiffer Vacuum.
7
Safety
warranty seal
2.4 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
● pumping of corrosive or explosive media
● pumping of condensing vapors
● pumping of liquids
● pumping of dusts
● operation with improper high gas throughput
● operation with improper high fore-vacuum pressures
● operation with improper high levels of insulated heat input
● operation in improper high magnetic fields
● operation with improper gas mode
● venting with improper high venting rates
● use of the vacuum pump to generate pressure
● operation of the devices in areas with ionizing radiation
● operation in potentially explosive areas
● use of the devices in systems in which impact-like stress and vibrations or periodically
forces affect the devices
● use of accessories or spare parts, which are not named in this manual
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.
8
3 Transport and storage
60° max
3.1 Transport
Danger from falling and swinging loads!
When lifting the pumping station there is a danger of falling parts.
Only fix a lifting device for transport on the provided eye bolts of the high vacuum flan-
ge of the turbopump.
Make sure that there are no persons under the suspended load.
Only lift the pumping station with the handles manually.
Risk of injury due to the pumping station's tipping or rolling away
Superstructural parts provided by customer can shift the pumping station's center of gravity, creating a risk of tipping. On inclined planes, there are general risks of tipping and
injury due to squeezing from rolling pumping stations.
Do not transport or move pumping stations with superstructural parts.
Do not transport or position a pumping station on inclined planes with a downgrade
> 5° (approx. 8.7%).
Transport and storage
WARNING
CAUTION
Always transport the pumping station uprightly and as even as possible.
Keep the original protective covers.
Transportation lock The backing pump of the pumping station HiCube Classic is secured against damage
during transport (see p. 16, chap. 5.8).
Follow instructions concerning the installation location!
Before putting into operation loosen the backing pump's transportation lock device at
the installation location.
3.2 Storage
Close the flange openings by using the original protective covers.
Close further connection ports by using the corresponding protective covers.
Only store the pumping station indoors at an ambient temperature between -10 °C
and +40 °C.
In rooms with moist or aggressive atmospheres, the pumping station must be airproof
shrink-wrapped in a plastic bag together with a bag of dessicant.
9
Product description
HiPace 700
HiPace 400
HiPace 300
HiPace 80
DCU
TPS
DUO 5 M
DUO 3
MVP 040
MVP 070
4 Product description
Feature HiCube Classic Operating Instruc-
HV flange DN 40 / DN 63 DN 100 DN 160
Turbopump HiPace 80
Electronic drive unit TC 110
Venting valve yes yes yes yes PT 0228 BN
Backing pump: diaphragm pump MVP 040
Backing pump: rotary vane pump DUO 3
Casing heating
(water cooling required)
Display control unit DCU 002 DCU 002 DCU 002 DCU 002 PT 0250 BN
Mains pack TPS 110 TPS 310 TPS 400 TPS 400 PT 0199 BN
MVP 070
DUO 5 M
optional, only with
CF flange
HiPace 300
HiPace 400
TC 400 TC 400 TC 400
MVP 040
MVP 070
DUO 3
DUO 5 M
optional, only with
CF flange
MVP 040
MVP 070
DUO 3
DUO 5 M
optional, only with
CF flange
optional, only with
Fig. 1: Selection of turbopumps and backing pumps for HiCube Classic
HiPace 700
MVP 040
MVP 070
DUO 3
DUO 5 M
CF flange
tions
PT 0208 BN
PT 0200 BN
PT 0209 BN
PT 0210 BN
PT 0204 BN
PT 0203 BN
PU 0050 BN
PU 0050 BN
PD 0060 BN
PK 0197 BN
PT 0233 BN
10
4.1 Product identification
84
15
159
127
106
Product description
Product characteristics
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
D-35614 Asslar
Mod.:
HiCube Classic
Mod.-No.:
PM S28 250 00
Ser. No.:
Fig. 2: Example for a rating plate
Scope of delivery ● HiCube Classic
● Only with rotary vane pump as backing pump: operating fluid and filler tube
● Mains cable
● Grounding cable, 3 m (incl. fixing material)
● Protective cover for the high vacuum flange
● Operating manuals for pumping station and individual components
● Eye bolts
4.2 Function
Turbo pumping stations are fully automatic pump units which are ready for connection.
A turbo pumping station consists of a portable or mobile vacuum pumping unit with a turbopump and a specially matched backing pump.
The display and control unit DCU serves to control and monitor the pumping station.
115 - 230 V, 50/60 Hz
Wiring diagram PM 061
T4 AH
Mass:
28 kg
Made in Germany 2008/09
Fig. 3: View of HiCube Classic
15 HiPace turbopump
84 Carrying handle
106 Securing hook
Control Electronic drive unit of the turbopump
Cooling ● Air cooling
● Water cooling (optional)
In the case of excess temperature the electronic drive unit reduces the drive power automatically.
127 Display and control unit DCU 002
159 Transport roller (optional)
11
Product description
4.3 Range of application
The pumping station HiCube Classic must be installed and operated in the following ambient conditions.
Installation location weather protected (indoors)
Protection category IP 20
Protection class I
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T ≤ 31 °C, up to max. 50% at T ≤ 40 °C
Atmospheric pressure: 750 hPa - 1060 hPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II
Connection voltage TC 24 or 48 V DC ±5%
Limit values for HiPace 80 HiPace 300 HiPace 400 HiPace 700
Permissible magnetic field max. 3.3 mT 5.5 mT 6 mT 6 mT
Permissible irradiated heat input 3 W 8 W 14 W 14 W
Remarks to ambient conditions
The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible fore-vacuum pressure or at maximum gas throughput depending
on the cooling method. The turbopump is intrinsically safe by a redundant temperature
monitoring.
● By reducing the fore-vacuum pressure or gas throughput, the turbopump can be operated at higher ambient temperatures.
● If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit reduces drive power first and switches off then, if necessary.
12
5 Installation
M
F
G
H
125.1
167.1
167.1
125.2
166
25.6
175.1
3.1
127.3
5.1 Set-up
Installation
3.1 External venting connection (opt.)
25.6 Exhaust connection
125.1 Main switch
125.2 Mains connection
127.3 Feedthrough measuring cable
166 Cooling water connection
167.1 Connection for dryer
175.1 Sealing gas connection (optional)
Fig. 4: HiCube Classic, connections
The installation location is to be chosen so that components that need servicing are freely accessible at all times. No special foundations or base are necessary for installation.
The unit must not be used outdoors. Conditions are:
● the ambient conditions specified for the range of application
● a level, vibration-free surface.
● Distance to side walls or adjacent devices: at least 50 cm.
● Distance to possible edges of tables: at least 10 cm.
● When using a casing heating and a water cooling unit the temperature of the connect-
ed flange of the vacuum chamber must not exceed 120 °C.
● It is not allowed to operate the device in systems where impact-like stresses and vibrations or periodically forces occur.
Dismantling the casing panels
For certain activities during the installation, the side panels must be dismantled.
For this, note the instructions in the chapter "Maintenance" (see p. 23, chap. 7.2).
5.2 Preparatory work
Ensure sufficient cooling for the pumping station.
When magnetic fields exceed the approved values, a suitable shielding must be used.
Check installation location and consult Pfeiffer Vacuum if needed!
The maximum permissible rotor temperature for the turbopump is 90 °C. If high tem-
peratures arise for process reasons, the radiated heat input must not exceed the permissible values. Install suitable screening sheets, if necessary (design information on
request).
13
Installation
M4
106
159
4x !
5.3 Earthing
NOTICE
Danger of missing casing earthing
To comply with the required height of the leakage currents according to DIN EN 610101:2010, perform the following measure:
Connect the earthing cable (consignment) of the pumping station with PE on site,
before mains connection.
5.4 Anchoring the pumping station
In the case the rotor of the turbopump suddenly blocs, the resulting torque must be absorbed via the pumping station frame by the fixture provided by the customer. Anchoring
the pumping station is mandatory in order to secure the pumping station and the vacuum
system. For this purpose, there are 4 securing hooks at the lower corners of the pumping
station frame.
Fig. 5: Anchoring the pumping station
106 Securing hooks 159 Roller
Lock all pumping station roller brakes.
Fasten the pumping station with lashing straps at all 4 securing hooks.
– Pay attention to the fit and the stress of the straps; the strap loop has to be in the
recess of the securing hook.
– Fasten securely the lashing straps provided by the the customer in order to be able
to hold loads up to 2000 N per anchorage point.
14
5.5 Connecting the high vacuum side
The assembly of superstructures on the pumping station HiCube Classic is in the operator’s responsibility. The load capacity of the high vacuum flange is specific for the used
turbopump. The gross weight of superstructures on the pumping station HiCube Classic
may not exceed 100 kg!
Observe barycentric shifting by using high or lateral protruding superstructure (e.g.
vacuum chamber). Danger of tilting!
Install the high vacuum flange in accordance with the instructions in the operating
manual of the turbopump.
Ensure the greatest possible cleanliness when installing any high vacuum parts. Un-
clean components prolong the pump-down time.
Observe the minimum strength of 170 N/mm
5.6 Connecting the exhaust side
High pressure in the exhaust line!
Danger of damage to the seals and danger of the pump bursting.
Install the line without shut-off valves on the exhaust side.
Do not operate the pump with excess pressure at the inlet; observe the maximum al-
lowable pressures and pressure differences.
2
CAUTION
Installation
for the flange material.
Prepare the exhaust line provided by customer starting from the pumping station's
casing.
Choose the cross-section of the exhaust line to be at least the size of the nominal
connection diameter of the vacuum pump's exhaust connection.
Piping to the pump must be suspended or supported.
– Physical forces from the piping system must not be allowed to act on vacuum
pumps.
Lay piping from the pump sloping downward so that no condensate can flow back into
the pump; otherwise fit a condensate separator.
– If an air trap is created in the system, then a device for draining condensation water
must be provided at the lowest point.
5.7 Connecting an external turbopump
Depending on the configuration the turbopump can be operated separately from the
pumping station. Please observe the following installation information!
Install the turbopump according to its operating instructions.
Open the casing of the pumping station, if necessary.
Extend necessary control leads for the electronic drive unit of the turbopump using
Pfeiffer Vacuum accessories.
Connect the control leads to the electronic drive unit.
Install an air cooling unit (accessories) for the external turbopump and connect it to
the electronic drive unit.
– Use water cooling optionally.
Operation of the turbopump with the electronic drive unit separate
The operation of the turbopump with a separated electronic drive unit is only possible
using the respective Pfeiffer Vacuum accessories.
15
Installation
78
84
93
3
4
1
2
Installing the high
vacuum flange
WARNING
Risk of the turbopump being torn-off
In case of sudden blocking of the rotor, torques of up to 4200 Nm can occur, which can
lead with incorrect attachment to tearing the turbopump off. The energy released thereby can hurl the entire pump or fragments from their inside around the area. This can
cause severest injuries (possibly resulting in death) and large property damage.
Precisely follow installation instructions.
Only use Pfeiffer Vacuum original components (accessories) for installation.
Install the high vacuum flange in accordance with the instructions in the operating
manual of the turbopump.
Ensure the greatest possible cleanliness when installing any high vacuum parts. Un-
clean components prolong the pump-down time.
Observe the minimum strength of 170 N/mm
2
for the flange material.
Connecting the forevacuum side
Extend the fore-vacuum line between turbopump and backing pump.
Connect the fore-vacuum line with small-flange components or threaded hose cou-
plings. Do not narrow the free cross section of the fore-vacuum flange!
With rigid pipe connections: Install bellows for attenuation of vibrations in the connec-
tion line.
5.8 Transportation lock
Turbo pumping stations of the HiCube Classic line are equipped with transportation lock
for the backing pumps (see label). The transportation lock consists of two opposing
knurled screws with spring suspension which fasten the backing pump's bottom plate.
16
Fig. 6: Transportation lock for HiCube Classic
78 Side panel 84 Handle 93 Transportation lock
Lift the carrying handle.
Loosen two retaining screws each from a side panel.
Remove the side panel:
– Lift the side panel approx. 2-3 cm from its adjustment and tilt it outwards.
– Disconnect the earthing cable from the terminal socket of the side panel.
– Remove the side panel from the pumping station.
Loosen the knurled screw of the transportation lock.
Place the side panel in position.
– Pay attention to the earthing cable!
Similarly loosen the transportation lock on the opposite side.
5.9 Filling up the operating fluid
Only applies to HiCube with rotary vane pump as backing pump!
● The operating fluid reservoir is already filled and installed for the turbopump.
● The operating fluid for the rotary vane pump is enclosed with the delivery.
Lift the carrying handle.
Loosen two retaining screws each from a side panel.
Remove the side panel:
– Lift the side panel approx. 2-3 cm from its adjustment and tilt it outwards.
– Disconnect the earthing cable from the terminal socket of the side panel.
– Remove the side panel from the pumping station.
25.4
Installation
25 Backing pump: rotary vane pump
25.1 Filler opening/Filler screw
25.4 Operating fluid bottle
25.5 Filler tube
25.5
25.1
25
Fig. 7: Filling the backing pump with operating fluid
Unscrew operating fluid filler screw 25.1.
Unscrew the operating fluid bottle's screw plug and screw the filler tube (both included
in the equipment pack).
Insert the filler tube into the rotary vane pump's filler opening.
Fill operating fluid according to rotary vane pump operating instructions.
Screw in operating fluid filler screw 25.1.
Check fill level: The correct fill level is between the markings on the sight glass.
– If the fill level drops below the "Min" marking, add operating fluid.
Place the side panel in position.
– Pay attention to the earthing cable!
5.10 Connecting accessories
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.
17
Installation
M
59 (6x)
127.1
127.4
127
78
29
NOTICE
Dangerous excess temperatures
Process-related high temperatures can result in impermissible excess temperatures
and thus damage to the turbopump.
Water cooling must be used when employing a casing heating or during operation
with heated vacuum chambers.
Do not introduce any additional energy into the pump (see p. 20, chap. 6.1).
● An air cooling unit is integrated in the casing of the pumping station and is suitable for
ambient temperatures up to +35 °C.
● A venting valve is installed and connected to the turbopump.
Generally use water cooling if the ambient temperature is > +35 °C.
Connect additional accessories according to the operating manual of the turbopump.
Connecting a measuring device
The connection of a measuring gauge (e.g. Pfeiffer Vacuum ActiveLine) is possible to the
display and control unit DCU.
Lift the carrying handle.
Loosen two retaining screws each from a side panel.
Remove the side panel:
– Lift the side panel approx. 2-3 cm from its adjustment and tilt it outwards.
– Disconnect the earthing cable from the terminal socket of the side panel.
– Remove the side panel from the pumping station.
18
Fig. 8: HiCube Classic, running a measuring cable
29 Perforated plate
59 Allen head screw
78 Side panel
127 Display and control unit
127.1 Measuring gauge
127.4 Measuring cable
Unscrew the retral perforated plate from the casing of the pumping station (6x Allen
head screw 59).
Run the measuring cable via the measuring connection into the interior of the pumping
station.
Plug the measuring cable in the connection X3 of the DCU.
Settings are possible with the extended parameter set at the DCU.
5.11 Connecting to the mains power supply
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
Observe the information on the rating plae.
Plug the mains cable into the the mains connection on the rear side of the pumping
station and fix it with the clip.
Connect the mains cable to the mains.
Installation
19
Operation
6Operation
6.1 Commissioning
The following important settings are programmed in the electronic drive unit ex factory.
● Parameter [P:027] Gas mode: 0 = heavy gases
● Parameter [P:700] Set value max. run-up time monitoring: 8 min
● Parameter [P:701] Rotation speed switchpoint: 80% of the nominal roation speed
● Parameter [P:707] Set value rotation speed setting mode: 65 % of the nominal rota-
tion speed
● Parameter [P:708] Set value power consumption 60 % (may be only reduced)
● Parameter [P:720] Venting rotation speed at delayed venting: 50% of the nominal ro-
tation speed
● Parameter [P:721] Venting time: 3600 s
Loosen the transportation lock before first-time starting.
When water cooling is used: Open cooling water supply and check the flow.
When sealing gas is used: Open the sealing gas supply and check the flow.
Comply run-up time
Pump throughput can be impaired by condensate or remainig moisture in the backing
area. This can lead to exceeding the maximum run-up time.
Recommendation: When switching on, open the gas ballast valve for about 5 min.
(see p. 21, chap. 6.5).
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to destruction of the pump.
Ensure the gas mode is correctly set.
Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).
6.2 Operation modes
The following operation modes are available:
● Operation via RS-485 and Pfeiffer Vacuum display and control units or PC
6.3 Function description
Danger due to open high vacuum flange
The rotor of the turbopump turns at high speed. If the high vacuum flange is open, there
is a danger of cut injuries and that the pump can be destroyed by objects falling into it.
Never operate the pump with an open high vacuum flange.
NOTICE
WARNING
Operation with DCU Consider the following manuals for the operation via Pfeiffer Vacuum display and con-
trol units:
● Operating instructions "DCU"
● Operating instructions "Electronic drive unit"
Switch on the mains supply via the main switch.
Switch on the pumping station via button "ON/OFF" on the DCU 002.
Settings are possible with the extended parameter set at the DCU.
20
6.4 Saving energy
Operation
Settings are possible via the RS-485 by using DCU, HPU or PC.
Use of the DCU as a remote control
The display and control unit can be removed from the pumping station and used as a
remote control.
Switch off the pumping station at the master switch.
Disconnect the mains plug.
Unscrew and remove the 4 fastening screws with washers from the front panel of the
display and control unit.
Lift out the display and control unit from the casing.
– Be careful of the casing seal.
Swap the connecting cable between the display and control unit and the electronic
drive unit marked "RS 485" for a longer M12 interface cable (accessory).
Depending on the power consumption of the turbopump the electronic drive unit can control the backing pump operation. Consequently, the supplied fore-vacuum pressure depends on the turbopump power consumption. Standby operation of the backing pump
can reduce the overall power consumption of the pumping system and the operating
temperature of the backing pump as well.
● Intermittend mode only for diaphragm pumps
● No control for DuoLine
The diaphragm pump is switched on and off in dependence of the turbopump's power
consumption. The switching thresholds for the backing pump are adjustable via the DCU.
Fluctuations in the power consumption of idling turbopumps and type-dependent varying
fore-vacuum pressures of the backing pumps require the switching thresholds to be set
separately for the intermittend mode.
Parameter [P:794] = 1 (Displaying the extended parameter set at the DCU)
Parameter [P:025] = 1 (Intermittend operation).
Configure thresholds [P:710] and [P:711] according to the operating instructions
"Electronic Drive Unit".
6.5 Operation with gas ballast valve
Steam or moisture from pumped media can condense in the vacuum pump and hence
impair the suction performance.
Letting in gas ballast improves the discharge of condensate, and the pump achieves the
specified final vacuum more quickly. The gas ballast valve can be replaced with a flushing gas connection if necessary.
For operation with gas ballast, please refer to the operating manual for the backing
pump.
Elimination of large amounts of condensate
If the open gas ballast valve alone is not sufficient to reduce the condensate load, the
pumping system with switched off turbopump can be relieved additionally via the venting connection.
● Prerequisite is an existing display and control unit.
● Admit dry inert gas at the venting connection, if possible.
Switch the backing pump to continous operation by means of the associated param-
eters (accessories- or digital input).
– for TC 110: [P:024] = 10
– for TC 400: [P:035] = 7
Switch off the pumping station (switch S1).
21
Operation
– Backing pump keeps running.
Open venting screw upon stillstand of the turbopump respectively let the venting pro-
cess proceed via the connected venting valve.
Relieve pumping system of condensate for about 5 minutes.
Repeat, if necessary.
Restore starting configuration of the backing pump.
– for TC 110: [P:024] = 13
– for TC 400: [P:035] = 3
Reset turbo pumping station.
6.6 Operation with fore-vacuum valve
The fore-vacuum safety valve (optional accessory) is located in the fore-vacuum line between the turbopump and the backing pump. It protects the process vacuum and the turbopump from inadvertent venting upon stillstand of the pumping station (backing pump)
or power failure. The valve is closed currentless.
● Pumping station "On" = Fore-vacuum safety valve open
● Pumping station "Off" = Fore-vacuum safety valve closed
6.7 Switching off and venting
Switching off After the turbopump is switched off, it must be vented to avoid contamination due to par-
ticles streaming back from the fore-vacuum area.
WARNING
Danger of electric shock
The pumping station is only free of voltages when the mains plug has been disconnected.
Switch off the master switch and disconnect the mains plug before all work.
Secure against unintentional restarting.
Switch off the pumping station via the "ON/OFF" button on the DCU.
Venting (possibilities, see below)
Switch off the pumping station at the master switch.
For water cooling: Shut off the water supply.
Venting Venting with Pfeiffer Vacuum Venting Valve
Enable venting via the functions of the electronic drive unit.
Settings are possible via the RS-485 by using DCU, HPU or PC.
Venting rotation speed Switch off the pumping station Mains power failure
50% of the nominal rotation
speed
1)
When mains power is restored the venting procedure is aborted.
Venting valve opens for 3600 s (1 h,
works setting)
Venting valve opens for
3600 s (1 h, works setting)
1)
22
Basic information for the rapid venting
Venting of the vacuum chamber in two steps. Ask for details on individual solutions from
Pfeiffer Vacuum.
Vent for 20 seconds at a rate of pressure rise of max. 15 hPa/s.
– The valve cross section for the venting rate of 15 hPa/s must be adapted to the size
of the vacuum chamber.
– For small vacuum chambers, use the Pfeiffer Vacuum venting valve.
Then vent with an additional venting valve of any desired size.
7 Maintenance / replacement
Contamination of parts and operating fluid by pumped media is possible.
Poisoning hazard through contact with materials that damage health.
In the case of contamination, carry out appropriate safety precautions in order to pre-
vent danger to health through dangerous substances.
Decontaminate affected parts before carrying out maintenance work.
Disclaimer of liability
Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or
operating malfunctions due to improperly performed maintenance. The liability and warranty entitlement expires.
Danger of electric shock
The pumping station is only free of voltages when the mains plug has been disconnected.
Switch off the master switch and disconnect the mains plug before all work.
Secure against unintentional restarting.
Maintenance / replacement
WARNING
NOTICE
WARNING
7.1 Maintenance intervals and responsibilities
● Clean the pumping station externally with a lint-free cloth and little industrial alcohol.
● Carry out the required maintenance on the components of the pumping station in ac-
cordance with the instructions in the individual operating manuals.
● Clarify shorter maintenance intervals for extreme loads or impure processes with Pfeiffer Vacuum Service.
● For all other cleaning, maintenance or repair work, please contact your Pfeiffer Vacuum service location.
7.2 Removal of components for their maintenance
In some cases, components may need to be dismantled from the pumping station so that
customers can carry out necessary maintenance work on them (they should then be reassembled in reverse order).
Dismantling connections
Switch off the pumping station at the master switch.
Disconnect the mains plug.
Remove the connector plug from the electronic drive unit.
NOTICE
Note the factory settings.
The accessory connections on the turbopump have been preconfigured at the factory.
Interchanging the control leads on the connector causes the pumping station to malfunction or fail.
Do not interchange the control leads.
Accessory connections can be configured for operation with the DCU.
– For more information refer to the operating instructions for the electronic drive unit
of the turbopump.
23
Maintenance / replacement
Dismantling the casing panels
The casing panels are fixed with quick release screws.
78
11
79
Fig. 9: HiCube Classic, dismantling the casing panels
11 Casing cover 78 Side panel 1 79 Side panel 2
Loosen four quick release screws from the casing cover.
Remove the casing cover.
– Disconnect the earthing cable from the terminal socket of the casing cover.
Lift the carrying handle.
Loosen two retaining screws each from a side panel.
Remove the side panel:
– Lift the side panel approx. 2-3 cm from its adjustment and tilt it outwards.
– Disconnect the earthing cable from the terminal socket of the side panel.
– Remove the side panel from the pumping station.
24
Maintenance / replacement
Dismantling of the
turbopump
9 Mounting plate
15 Turbopump
75 Casing
9
90 Allen head screw
90 (6x)
15
75
Fig. 10: Dismantling of the turbopump
Detach the fore-vacuum line from the turbopump and take it off.
– Do not kink or damage the fore-vacuum hose.
Unscrew and remove all Allen head screws 90 (6x) from the mounting plate.
– Tightening torque for the fixing screws when mounted: 33 Nm
Take off the turbopump with the mounting plate from the casing.
The opening in the mounting plate makes it easy for customers to perform maintenance
work on the turbopump (e.g. change the lubricant reservoir).
25
Maintenance / replacement
25.1
25.2
25.3
106
90
81
104
45
5 (2x)
7.3 Changing the operating fluid
Only applies to HiCube with rotary vane pump as backing pump!
Operating fluid may contain toxic substances from the pumped media!
Danger of poisoning from the emission of harmful substances from the operating fluid.
Wear suitable protective clothing and respirators.
Dispose of operating fluid according to the local regulations
WARNING
Fig. 11: Changing the operating fluid for HiCube Classic with rotary vane pump
5 Allen head screw
25.1 Filling screw
25.2 Drain screw
25.3 Sight glass
45 Operating fluid duct
81 Perforated plate
90 Allen head screw
104 Lens head screw
106 Securing hook
Release the lashing strap at the front right fastening hook.
Uscrew the securing hooks from the frame (2x Allen head screws 90).
Loosen the power supply support fastening screws (2x Allen head screws 5).
Lift the power supply and shift it aside.
–Do not loosen electrical connections!
Unscrew two screws 104 from the frame.
Remove the perforated plate sidewise out of the frame.
Swivel out the operating fluid duct from the pumping station frame.
Put a suitable container under the operating fluid duct.
Change the operating fluid according to the operating instructions of the rotay vane
pump.
Assembly of the pumping station in reverse order.
Re-fasten the pumping station with all the lashing straps.
26
8 Decommissioning
8.1 Shutting down for longer periods
Contamination of parts and operating fluid by pumped media is possible.
Poisoning hazard through contact with materials that damage health.
In the case of contamination, carry out appropriate safety precautions in order to pre-
vent danger to health through dangerous substances.
Decontaminate affected parts before carrying out maintenance work.
If the pumping station should be shut down for longer than a year:
Remove the pumping station from the system, if necessary.
Change the operating fluid reservoir of the turbopump.
Only store the pumping station indoors at an ambient temperature between -10 °C
and +40 °C.
In rooms with moist or aggressive atmospheres, the pumping station must be airproof
shrink-wrapped in a plastic bag together with a bag of dessicant.
Decommissioning
WARNING
8.2 Re-starting
8.3 Disposal
NOTICE
Restarting
The serviceability of the operating fluid of the turbopump without operation is a maxi-
mum of 4 years. Before restarting after a shut-down of 4 years or longer, carry out the
following work:
Replace the operating fluid reservoir
Replace bearings
Follow the maintenance instructions and inform Pfeiffer Vacuum
Check pumping station for contamination and moisture.
Clean the pumping station externally with a lint-free cloth and little industrial alcohol.
If necessary, have Pfeiffer Vacuum Service clean the pumping station completely.
Installation and commissioning in accordance with the operating instructions.
Products or parts thereof (mechanical and electrical components, operating fluids, etc.)
may cause environmental burden.
Safely dispose of the materials according to the locally applicable regulations.
27
Malfunctions
9 Malfunctions
Malfunctions on the pumping station are usually caused by faults on individual components. Faults are indicated by the LEDs at the electronic drive unit of the turbopump. Alternatively, a fault code can also be output at the display and control unit DCU.
9.1 Rectifying malfunctions
Problem Possible causes Remedy
Pumping station will not start; none of the
integrated LEDs on the electronic drive
unit of the turbopump light up
Pump not achieving the required ultimate
pressure
● Electrical supply interrupted Check the plug contacts at the relay box and the
● Incorrect operating voltage Apply correct operating voltage
● No operating voltage applied Apply the correct operating voltage.
● Electronic drive unit defective Replace the electronic drive unit.
● Condensate in the backing pump Open the gas ballast valve at the backing pump.
● Gas ballast valve open Close the gas ballast valve at the backing pump.
power supply unit.
Check the supply lines of the pumping station.
Check the output voltage (24 V DC) at the "DC
out" terminal of the power supply unit
Check the plug contacts on the power supply
unit
Observe the ratings on the type plate.
Contact Pfeiffer Vacuum Service.
● Please refer to the relevant operating manual for troubleshooting at pumping station
components.
● For additional queries, contact Pfeiffer Vacuum Service.
28
10 Service
Service
Pfeiffer Vacuum offers first-class service!
● Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService
● Maintenance / repair in the nearby ServiceCenter or ServicePoint
● Fast replacement with exchange products in mint condition
● Advice on the most cost-efficient and quickest solution
Detailed information, addresses and forms at: www.pfeiffer-vacuum.com (Service).
Maintenance and repair in the Pfeiffer Vacuum ServiceCenter
The following steps are necessary to ensure a fast, smooth servicing process:
Download the forms "Service Request" and "Declaration on Contamination".
Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum
service address.
Include the confirmation on the service request from Pfeiffer Vacuum with your ship-
ment.
Fill out the declaration on contamination and include it in the shipment (required!).
Dismantle all accessories.
Drain the operating fluid (applies for turbopumps with pumping speed > 700 l/s).
Leave electronic drive on the pump.
Close the flange openings by using the original protective covers.
If possible, send pump or unit in the original packaging.
1)
Sending of contaminated pumps or devices
No units will be accepted if they are contaminated with micro-biological, explosive or radioactive substances. “Hazardous substances” are substances and compounds in accordance with the hazardous goods directive (current version). If pumps are contaminated or the declaration on contamination is missing, Pfeiffer Vacuum performs
decontamination at the shipper's expense.
Neutralise the pump by flushing it with nitrogen or dry air.
Close all openings airtight.
Seal the pump or unit in suitable protective film.
Return the pump/unit only in a suitable and sturdy transport container and send it in
while following applicable transport conditions.
Exchange unit
The factory operating parameters are always preset with exchange units. If you use
changed parameters for your application, you have to set these again.
Service orders
All service orders are carried out exclusively according to our repair conditions for vacuum units and components.
1)
Forms under www.pfeiffer-vacuum.com
29
Spare parts
11 Spare parts
Please also specify model number of the the rating plate when ordering accessories or
spare parts.
Refer to the operating manuals for the individual components.
12 Accessories
Please also specify model number of the the rating plate when ordering accessories or
spare parts.
Refer to the operating manuals for the individual components.
30
13 Technical data
13.1 General
Conversion table: pressure units
mbar 1 1 · 10
bar 1000 1 1 · 10
Pa 0.01 1 · 10
hPa 1 1 · 10
kPa 10 0.01 1000 10 1 7.5
Torr
mm Hg
Conversion table: gas throughput units
mbar·l/s 1 0.1 59.2 0.75 0.987
Pa·m
sccm 1.69 · 10
Torr·l/s 1.33 0.133 78.9 1 1.32
atm·cm
Technical data
mbar bar Pa hPa kPa Torr
mm Hg
7.5 · 10
1.67 · 10
1.33 1.33 · 10
-3
-5
-3
-3
100 1 0.1 0.75
5
1 0.01 1 · 10
100 1 0.1 0.75
133.32 1.33 0.133 1
1 Pa = 1 N/m
1000 100 750
-3
2
mbar·l/s Pa·m3/s sccm Torr·l/s atm·cm3/s
3
/s 10 1 592 7.5 9.87
3
/s 1.01 0.101 59.8 0.76 1
-2
1.69 · 10
-3
1 1.27 · 10
-2
-3
-2
13.2 HiCube 80 Classic
Parameter HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic
Flange (in) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF
Flange (out) G 1/2" ; G 1/4" G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 040 MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 35 l/s 35 l/s 35 l/s 35 l/s
Pumping speed backing pump at 50 Hz2.3 m
Ultimate pressure < 1 · 10
Relative humidity of air 5-85, non-
Cooling method, standard Air Air Air Air
Power consumption max. 290 W 360 W 270 W 360 W
Weight 36.4 kg 41.4 kg 35.5 kg 44 kg
Parameter HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic
Flange (in) DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K
Flange (out) G 1/2" ; G 1/4" G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 040 MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 67 l/s 67 l/s 67 l/s 67 l/s
Pumping speed backing pump at 50 Hz2.3 m
Ultimate pressure < 1 · 10
Relative humidity of air 5-85, non-
Cooling method, standard Air Air Air Air
Power consumption max. 290 W 360 W 270 W 360 W
Weight 36.4 kg 41.4 kg 35.5 kg 44 kg
3
/h 3.8 m3/h 2.5 m3/h 5 m3/h
-7
hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa
5-85, non-
condensing %
3
/h 3.8 m3/h 2.5 m3/h 5 m3/h
-7
hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa
condensing %
condensing %
5-85, noncondensing %
5-85, noncondensing %
5-85, noncondensing %
5-85, noncondensing %
5-85, noncondensing %
Parameter HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic
Flange (in) DN 63 CF-F DN 63 CF-F DN 63 CF-F DN 63 CF-F
Flange (out) G 1/2" ; G 1/4" G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 040 MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 67 l/s 67 l/s 67 l/s 67 l/s
31
Technical data
Parameter HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic
Pumping speed backing pump at 50 Hz2.3 m3/h 3.8 m3/h 2.5 m3/h 5 m3/h
Ultimate pressure < 1 · 10
-8
Relative humidity of air 5-85, non-
condensing %
hPa < 1 · 10-8hPa < 5 · 10
5-85, noncondensing %
-10
hPa < 5 · 10
5-85, noncondensing %
-10
hPa
5-85, non-
condensing %
Cooling method, standard Air Air Air Air
Power consumption max. 290 W 360 W 270 W 360 W
Weight 37.8 kg 42.8 kg 36.9 kg 45.4 kg
13.3 HiCube 300 Classic
Parameter HiCube 300 Classic HiCube 300 Classic HiCube 300 Classic HiCube 300 Classic
Flange (in) DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K
Flange (out) G 1/2" ; G 1/4" G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 040 MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 260 l/s 260 l/s 260 l/s 260 l/s
Pumping speed backing pump at 50 Hz2.3 m
Ultimate pressure < 1 · 10
Relative humidity of air 5-85, non-
Cooling method, standard Air Air Air Air
Power consumption max. 480 W 550 W 460 W 550 W
Weight 41.2 kg 46.2 kg 40.3 kg 48.8 kg
Parameter HiCube 300 Classic HiCube 300 Classic HiCube 300 Classic HiCube 300 Classic
Flange (in) DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F
Flange (out) G 1/2" ; G 1/4" G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 040 MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 260 l/s 260 l/s 260 l/s 260 l/s
Pumping speed backing pump at 50 Hz2.3 m
3
/h 3.8 m3/h 2.5 m3/h 5 m3/h
-7
hPa < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-7hPa
5-85, non-
condensing %
3
/h 3.8 m3/h 5 m3/h 5 m3/h
condensing %
5-85, noncondensing %
5-85, non-
condensing %
Ultimate pressure < 1 · 10
-8
Relative humidity of air 5-85, non-
condensing %
hPa < 1 · 10-8hPa < 5 · 10
5-85, noncondensing %
-10
hPa < 5 · 10
5-85, noncondensing %
5-85, non-
condensing %
Cooling method, standard Air Air Air Air
Power consumption max. 480 W 550 W 460 W 550 W
Weight 43.2 kg 48.2 kg 40.3 kg 48.8 kg
13.4 HiCube 400 Classic
Parameter HiCube 400 Classic HiCube 400 Classic HiCube 400 Classic
Flange (in) DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K
Flange (out) G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 355 l/s 355 l/s 355 l/s
Pumping speed backing pump at 50 Hz3.8 m
Ultimate pressure < 1 · 10
Relative humidity of air 5-85, non-
Cooling method, standard Air Air Air
Power consumption max. 670 W 580 W 670 W
Weight 51.6 kg 45.7 kg 54.2 kg
Parameter HiCube 400 Classic HiCube 400 Classic HiCube 400 Classic
Flange (in) DN 100 CF-F DN 100 CF-F DN 100 CF-F
Flange (out) G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 355 l/s 355 l/s 355 l/s
3
/h 2.5 m3/h 5 m3/h
-7
hPa < 1 · 10-7hPa < 1 · 10-7hPa
5-85, non-
condensing %
condensing %
5-85, noncondensing %
-10
hPa
32
Parameter HiCube 400 Classic HiCube 400 Classic HiCube 400 Classic
Pumping speed backing pump at 50 Hz3.8 m3/h 2.5 m3/h 5 m3/h
Technical data
Ultimate pressure < 1 · 10
-8
Relative humidity of air 5-85, non-
condensing %
hPa < 5 · 10
-10
hPa < 5 · 10
5-85, noncondensing %
-10
hPa
5-85, non-
condensing %
Cooling method, standard Air Air Air
Power consumption max. 670 W 580 W 670 W
Weight 57.5 kg 45.7 kg 54.2 kg
13.5 HiCube 700 Classic
Parameter HiCube 700 Classic HiCube 700 Classic HiCube 700 Classic
Flange (in) DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K
Flange (out) G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 685 l/s 685 l/s 685 l/s
Pumping speed backing pump at 50 Hz3.8 m
Ultimate pressure < 1 · 10
Relative humidity of air 5-85, non-
Cooling method, standard Air Air Air
Power consumption max. 670 W 580 W 670 W
Weight 52 kg 46.2 kg 54.7 kg
Parameter HiCube 700 Classic HiCube 700 Classic HiCube 700 Classic
Flange (in) DN 160 CF-F DN 160 CF-F DN 160 CF-F
Flange (out) G 1/2" ; G 1/4" G 1/2" G 1/2"
Backing pump MVP 070 DUO 3 DUO 5 M
Pumping speed turbopump 685 l/s 685 l/s 685 l/s
Pumping speed backing pump at 50 Hz3.8 m
3
/h 2.5 m3/h 5 m3/h
-7
hPa < 1 · 10-7hPa < 1 · 10-7hPa
5-85, non-
condensing %
3
/h 2.5 m3/h 5 m3/h
condensing %
5-85, noncondensing %
Ultimate pressure < 1 · 10
-8
hPa < 5 · 10
Relative humidity of air 5-85, non condensing % 5-85, non-
-10
hPa < 5 · 10
condensing %
5-85, non-
condensing %
Cooling method, standard Air Air Air
Power consumption max. 670 W 580 W 670 W
Weight 57.9 kg 46.2 kg 54.7 kg
-10
hPa
33
Dimensions
28
15
96
275
102
400
472.5
2
492
66.5
A
B
392
350
M
F
G
H
H
14 Dimensions
Dimensions HiCube 80 Classic HiCube 80 Classic HiCube 80 Classic
Flange (in) DN 40 ISO-KF DN 63 ISO-K DN 63 CF-F
A 590 mm 581 mm 587 mm
B 102 mm only with DUO 5
Dimensions HiCube 300 Classic HiCube 300 Classic
Flange (in) DN 100 ISO-K DN 100 CF-F
A 580 mm 592 mm
B 102 mm only with DUO 5
Dimensions HiCube 400 Classic HiCube 400 Classic
Flange (in) DN 100 ISO-K DN 100 CF-F
A 624 mm 624 mm
B 102 mm only with DUO 5
Dimensions HiCube 700 Classic HiCube 700 Classic
Flange (in) DN 160 ISO-K DN 160 CF-F
A597mm609mm
B 102 mm only with DUO 5
34
Declaration of conformity
We hereby declare that the product cited below satisfies all relevant provisions accord-
ing to the following EC directives:
● Machinery 2006/42/EC (Annex II, no. 1 A)
● Electromagnetic Compatibility 2004/108/EC
The agent responsible for compiling the technical documentation is Mr. Helmut Bernhardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.
HiCube
HiCube Classic
Harmonised standards and national standards and specifications which have been applied:
DIN EN ISO 12100 : 2011-03 DIN EN 61326-1 : 2006
DIN EN 1012-2 : 1996 DIN EN 62061 : 2005
DIN EN 61010-1 : 2010 Semi F47-0200
DIN EN 61000-3-2 : 2008
DIN EN 61000-3-3 : 2006
Signatures:
(M.Bender)
Managing Director
(Dr. M. Wiemer)
Managing Director
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
CE/2013
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Headquarters • Germany
T +49 6441 802-0
info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.com
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