Pfeiffer Vacuum Hena 26, Hena 41 Operating Instructions Manual

OPERATING INSTRUCTIONS
HENA 26/41
Rotary Vane Pump
EN
Translation of the original instructions
PD 0085 BEN/A (1603)
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
11 Spare parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.1 Setting up the pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5.2 Connecting the vacuum side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.3 Connecting the exhaust side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.4 Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
5.5 Filling up the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.1 Before switching on. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
6.2 Switching on the pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
6.3 Pumping condensable vapours. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
6.4 Topping up the operating fluid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.5 Switching off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
7.1 Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.2 Changing the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.3 Changing the exhaust filter in the operating fluid separator . . . . . . . . . . . 25
7.4 Cleaning the operating fluid return line . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.5 Changing the gas ballast filter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
7.6 Changing the intake filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
11.1 Spare parts packages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
13.2 Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
2
13.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

1 About this manual

1.1 Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development. The documen­tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacuum.com.
Applicable docu­ments
Hena 26/41 Operating instructions
Declaration of Conformity Part of this document Operating instructions for accessories (order-specifically) see section "accessories"*
*also available via www.pfeiffer-vacuum.com
About this manual

1.2 Conventions

Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan­dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of which may result in damage to the product.
3
About this manual
G
Pictographs
Instructions in the
Work instruction: here you have to do something.
Prohibition of an action or activity in connection with a source of danger, the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of the unit or equipment
Command to perform an action or task associated with a source of dan­ger, the disregarding of which may result in serious accidents
Important information about the product or this document
text
Symbols used The following symbols are used consistently throughout in all illustrations:
V
Vacuum flange
Exhaust flange
Gas ballast valve
Power connection
4

2Safety

2.1 Safety precautions

Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump must read and observe the safety-related parts of these operating instructions.
The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in­stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".Use original accessory parts only.
Do not expose any body parts to the vacuum.
Observe the safety and accident prevention regulations.
Check regularly that all safety precautions are being complied with.
Do not carry out any unauthorised modifications or conversions to the pumps.
Depending on the operating and ambient conditions, the surface temperature of the
pumps may rise above 70 °C. Use suitable finger guards if necessary.
When returning the pumps to us please note the instructions in the Service section.
Safety
5
Safety

2.2 Protective equipment

Determined situations concerning the handling of vacuum pumps require wearing of per­sonal protective equipment. The owner, respectively the employer are obligated to pro­vide an adequate equipment to any operating persons.
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be con­taminated by toxic, reactive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.If necessary wear protective gloves according to EN 420.
DANGER
CAUTION
WARNING

2.3 Proper use

Increased noise emission!
Increased noise emission can occur within a limited area surrounding the vacuum pump.
Provide noise protection orwear hearing protection.
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord­ingly.
The vacuum pump may only be used to generate a vacuum.
Only use the vacuum pump for applications with oxygen concentration 21%.
Installation, operating and maintenance regulations must be complied with.
Other accessories, than those described in this manual, must not be used without the
agreement of Pfeiffer Vacuum.
6

2.4 Improper use

Safety
Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as usage for purposes deviating from those mentioned above, especially:
pumping of corrosive gases
pumping of explosive media
operation in potentially explosive areas
pumping of gases containing impurities such as particles, dusts and condensate; note
the vapour compatibility levels of the pump
pumping of substances that tend to sublime
use of the vacuum pump to generate pressure
pumping of liquids
the use of operating fluids not specified by Pfeiffer Vacuum
connection to pumps or units which are not suitable for this purpose according to their
operating instructions
connection to units which have exposed voltage-carrying parts
operation of the devices in areas with ionizing radiation
7
Transport and storage

3 Transport and storage

3.1 Transport

Danger from falling and swinging loads!
When lifting the pump there is a danger of falling parts.
Make sure that there are no persons under the suspended load.Close off and supervise the area under the pump.
Operating fluid overflows into the pump system if the pump is tilted!
Vane fractures when pump starts up.
Only transport pump without operating fluid.
WARNING
CAUTION
Transp ort withou t packaging

3.2 Storage

Fig. 1: Unpack and lift pump
Look for transportation damage when receiving the pump. Use only a forklift to transport pump packed on pallet.Unpack pump and undo screws on transport container.Reuse the transport container of the vacuum pump.
– Transport or ship vacuum pumps in the original packing preferably.
Remove the locking cap from the vacuum and exhaust flange immediately before con-
necting!
Use only the eye bolt on the top side of the pump to lift the pump.To lift the pump without motor and if accessories are mounted, fit another strap at a
suitable position.
Check that all the openings on the pump are securely closed.Fill up the pump with new operating fluid to the top edge of the sight glass.Store the pump only indoors, preferably at temperatures between -10 °C and +40 °C.
– In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-
wrapped in a plastic bag together with a bag of desiccant.
– After storage periods longer than two years, it is recommended to carry out main-
tenance and change the operating fluid before using the pump.
8

4 Product description

4.1 Product identification

To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available and use it:
Pump model and model number
Serial number
Type and amount of operating fluid
Date of manufacture
Please find the voltage range and motor-related data on the separately attached motor rating plate.
Scope of delivery ● Pump with drive unit
Operating fluid (except F4 and F5)
Operating instructions
Pump types
Pump type Pump designs
Hena 26 Pump in standard version
Vacuum connection and gas outlet: G 1 1/4"
Operating fluid return via float valve
Gas ballast device without shut-off valve
Hena 41 Pump in standard version
Vacuum connection and gas outlet: G 1 1/4"
Operating fluid return via float valve
Gas ballast device without shut-off valve
Product description
9
Product description

4.2 Function

The HenaLine™ series pumps are oil-sealed, single stage operating rotary vane pumps with air cooling and circulatory lubrication. A vacuum safety valve in the intake flange closes the intake line automatically and prevents operating fluid back-streaming when the pump is switched off. An integrated oil mist filter cleans the pumped gas and prevents the expulsion of operating fluid mist at the exhaust. The operating fluid, collected in the separator, is fed back to the pump. In addition there is a filter mounted at the operating fluid separator, which cleans the operating fluid.
400 75 2 1 321
10 0
195 88 83 95
Fig. 2: Hena 26/41
1 Vacuum connection 2 Gas outlet 75 Operating fluid separator 83 Sight glass
88 Operating fluid filler screw 95 Operating fluid drain screw 100 Operating fluid filter
195 Operating fluid return line 321 Axial flow fan 400 Motor
Oil circulation The vacuum pump requires operating fluid for sealing the gap, for lubrication and for
cooling. The operating fluid reservoir is on the pressure side of the vacuum pump on the floor of the operating fluid separator. The pressure differential between the pressure side and suction side automatically causes operating fluid to be sucked in over the supply lines from the operating fluid separator and feed into the pumping system. The incoming operating fluid, together with the incoming gas, is pumped through the vacuum pump and exhausted into the operating fluid separator as oil mist. Operating fluid that is separated at the exhaust filters collects in the upper part of operating fluid separator 75 and is re­turned via operating fluid return line directly to the intake side.
Cooling The vacuum pump is cooled by heat radiation from the surface of the vacuum pump, the
air flow of the two fan impellers, and by the pumped gas.
10

4.3 Range of application

The vacuum pump is intended for the evacuation of air or other non-aggressive, non-poi­sonous and non-explosive gases. Pumping media with a higher density than air results in a higher thermal and mechanical load on the vacuum pump and the drive, and is only permitted after prior consultation with Pfeiffer Vacuum.

5 Installation

5.1 Setting up the pump

Installation location Observe the following requirements when setting up the pump:
Consider the load-bearing capacity of the installation site.
Maximum installation altitude 1000 m (above mean sea level)
Permissible ambient temperature: +12 ... 40°C
Maximum relative humidity 95%
Installation
Fill up with operating fluid before operating the first time (see p. 16, chap. 5.5).
– Amount and type according to rating plate
Always place the pump on a firm, even surface.
– Where stationary installation is involved, anchor the pump on site.
When installing the pump in a closed housing, ensure there is sufficient air circulation.
– Sight glass and gas ballast valve must be visible and readily accessible. – Voltage and frequency information given on the motor rating plate must be visible.
> 200 mm
Fig. 3: Setting up the pump
> 200 mm
11
Installation

5.2 Connecting the vacuum side

Remove locking cap from the vacuum flange and insert centering ring.The connection between the pump and the vacuum chamber should be kept as short
as possible. – Depending on the pump type, use metallic hoses or PVC hoses with flange con-
nections.
– Separators, filters etc. may be installed upstream to protect the pump (see acces-
sories). However, please observe the loss of pumping capacity due to the conduc­tivity of the accessories.

5.3 Connecting the exhaust side

High pressure in the exhaust line!
Risk of damage to the seals and risk of pump bursting.
Always use lines without shut-off devices on the exhaust side.Do not use overpressure or underpressure - maintain atmospheric pressure.
CAUTION
WARNING
Emission of toxic substances from the exhaust!
Danger of poisoning from emitted gases or vapours, which can be detrimental to health and/or can pollute the environment, depending on the particular application.
Comply with the applicable regulations when working with toxic substances.Only officially approved filter systems may be used to separate and remove these
substances.
Choose the cross-section of the exhaust line to be at least the size of the nominal
connection diameter of the vacuum pump's exhaust connection.
Piping to the pump must be suspended or supported.
– Physical forces from the piping system must not be allowed to act on vacuum
pumps.
Lay piping from the pump sloping downward so that no condensate can flow back into
the pump; otherwise fit a condensate separator. – If an air trap is created in the system, then a device for draining condensation water
must be provided at the lowest point.
12

5.4 Connecting to the mains power supply

Depending on the pump type, different motor versions or mains voltages are possible:
Single phase motor for fixed voltage without motor protection, mains cable and switch.
Three-phase motor without motor protection.
Voltage-bearing elements
Danger to life from electric shock.
The electrical connection can be carried out only by trained and authorised electri-
cians.
Disconnect the power supply and secure it against being switched back on.Ensure the system is adequately earthed.
Excess voltage!
Danger of destroying the motor.
Power connections must comply with local regulations. Voltage and frequency infor-
mation given on the motor rating plate must correspond to the mains voltage and fre­quency values.
To protect the motor and supply cable in case of malfunction, mains fuse protection
must be implemented. Recommended: Type K slow blow circuit breaker.
Installation
DANGER
NOTICE
WARNING
Danger of injury from moving parts!
After power failure or motor shutdown due to overheating, the motor may restart auto­matically.
Secure the motor so that it cannot be switched on while any work is being performed
on the pump.
If necessary, dismantle the pump from the installation for inspection.
Single phase motors Connect motor in terminal box in accordance with the connection diagram.
Motor protection
To protect the motor in case of malfunction, additionally provide a fuse protection in
accordance with the regional regulations. – Select a fuse with slow characteristics according to the table below.
Three-phase motor The three-phase current motor circuit
Star Connection
The ends of the three coils are connected at the star center. The terminal voltage is the cube root of the coil voltage; the mains and the coil current are the same. Star connec-
tions are denoted by the symbol Y. A star connection three phase motor for 400 V mains
voltage has a coil voltage of 230 V.
V2U2W2
W3
Fig. 4: Motor coil and connecting plate for high voltage
V3U3
U1
V1
W1
L1
L2
L3
13
Installation
U1
V1
W1
L1
L2
L3
V2U2W2
V3U3
W3
Double Star Connection
Fig. 5: Connecting plate for low voltage
NOTICE
Do not start with star/delta connection.
Always start motor directly.
Checking the direction of rotation
The control of the direction of rotation is required for pumps with three-phase motors!
CAUTION
Operating fluids may leak out!
If the direction of rotation is incorrect, there is a danger that operating fluids may leak at the vacuum flange.
Always check the direction of rotation before filling in operating fluid.
Remove the locking cap from the exhaust flange.Switch the pump on briefly (from 2 to 3 sec.).
– Rotation must be in a clockwise direction in view of the shaft end of the motor (see
the arrow on the fan cover).
If the direction of rotation is incorrect: Swap two phase contacts at the connecting ca-
ble.
Fill up the operating fluid.
14
Motor protection With motor protection switch
Suitable are protection switches with slow triggering characteristics. The drive motor can have a power consumption that is higher than the rated current I 60034-1 it is permissible to exceed the rated current I utes. The setting must permit the overload ability of the motor and can be found in the following table.
Hena 26
Installation
. According to DIN EN
1.5 times for a period of 2 min-
N
N
Voltage [V] Frequency [Hz] Motor rating [kW] IN [A] I
220 ... 240 (1~) 50 1,0 4,8 40 190 ... 208 (3~) 50 1,0 2,4 20 380 ... 415 (3~) 50 1,2 4,8 40 220 ... 230 (3~) 60 1,2 2,4 20 440 ... 460 (3~) 60 1,1 7,0 19,2
Hena 41
Voltage [V] Frequency [Hz] Motor rating [kW] IN [A] I
190 ... 208 50 1,4 7,0 55,3 380 ... 415 50 1,4 3,5 28 220 ... 230 60 1,7 6,6 52 440 ... 460 60 1,7 3,3 26
Motor control system Frequency converter (valid for three phase motors)
Operation of rotary vane pumps with variable rotation speeds is possible in the mains fre­quency range between 35 and 60 Hz. The start-up can use a ramp (run-up time: max. 30 s); the shutdown can occur directly.
max
max
[A]
[A]
15
Installation

5.5 Filling up the operating fluid

The type and amount of operating fluid should be visible on the pump's rating plate for every rotary vane pump.
The delivery consignment for the standard pump contains sufficient operating fluid for
one filling. The use of other operating fluids requires prior authorisation from Pfeiffer Vac­uum.
Permissible operating fluid
P3 (standard operating fluid)
Operating fluid for special applications on request
Use approved operating fluids only!
The use of operating fluids that have not been approved by Pfeiffer Vacuum shall result in a limited warranty. In such cases, it is not possible to guarantee that product-specific performance data will be achieved.
Prior consultation is required before using other application-specific operating fluids.
NOTICE
Filling up the operat­ing fluid
Unscrew operating fluid filler screw 88.Fill up with operating fluid to the middle of the sight glass.
– Filling quantity approx. 1,0 l of operating fluid.
83 Sight glass 88 Operating fluid filler
screw
95 Operating fluid drain
screw
88
Max.
Min.
95
Fig. 6: Filling up the operating fluid
83
Screw in operating fluid filler screw 88.Close intake port valve (if present) or cover intake flange.Start pump and run it for max. 5 minutes.Switch off pump and wait until the operating fluid has collected in the separator box.Check fill level: The correct fill level is between the markings on the sight glass.
– If the fill level drops below the "Min" marking, add operating fluid.
Open intake port valve.
16

6Operation

6.1 Before switching on

Check the operating fluid level in the sight glass.Compare the voltage and frequency information on the rating plate with the mains volt-
age and frequency values.
Check that exhaust connection is free flowing (atmospheric pressure).Protect the pump sufficiently from taking in contaminants by means of suitable precau-
tions (e.g. dust filters); if necessary, check operating fluid regularly or replace at short­er intervals.

6.2 Switching on the pump

The pump can be switched on in any pressure range between atmospheric and
ultimate pressure.
The ideal operating condition of the pump is achieved during continuous operation. Cy­clic operation is possible, but 10 cycles per hour should not be exceeded and the oper­ating phase should always be longer than the downtime (non-operation time).
No specific measures are required when pumping dry gases. Due to the permanently opened gas ballast unit, the final pressure that can be achieved by the pump is limited. To achieve the lowest possible final pressures, you can mount a manual gas ballast valve
(accessories) to close off the system (see p. 18, chap. 6.3).
Operation
WARNING
Danger of burns from exiting hot oil mist!
During operation, the operating fluid separator is filled with hot, pressurised oil mist.
Only operate the vacuum pump with the operating fluid filler screw securely fitted.Open the blanking plugs on the separator only when the pump is switched off.
CAUTION
Hot surface!
Danger of burns if hot parts are touched. Depending on the operating and ambient con­ditions, the surface temperature of the pump may rise above 70 °C.
In this case, use suitable finger guards.
NOTICE
Increased motor current draw (> rated current) !
With an intake pressure of about 300 h/Pa, the pump has the highest power require­ment, which can increase even further under unfavorable operating conditions (e.g. counter-pressure on exhaust side.
Limit the max. power consumption for 1.5 times the rated current for 2 minutes max.
(according to DIN EN 60034-1.
Switch on the pump with the vacuum flange closed and allow to warm up for 15 min-
utes.
Permissible operat­ing conditions
Type / Version Intake pressure for continu-
ous operation
Hena 26/41
Operating fluid return via float valve
< 800 hPa unlimited < 800 hPa unlimited
Intake pressure for intermit­tent operation
17
Operation
Operating fluid return via float valve
The pumps are fitted with an operating fluid return as standard. If the operating fluid col­lected in the operating fluid separator 75 reaches a definite level, the float valve opens and the ejected operating fluid is returned to the pump’s intake flange.
The operating fluid return only works properly if the working pressure is < 800 hPa.

6.3 Pumping condensable vapours

Should the process gases contain condensable gases, the rotary vane pump must be operated with gas ballast (i.e. with an open gas ballast valve).
Bad final vacuum and damage to the pump!
Danger of condensation and corrosion due to exceeding the water vapour compatibility during operation without gas ballast or in case of insufficient supply of flushing gas.
Only pump vapours when the pump is warm and the gas ballast valve is open.When the process has been completed, allow the pump to continue running for
about 30 minutes with the vacuum flange closed and the gas ballast open for oper­ating fluid regeneration purposes.
NOTICE
NOTICE
Gas ballast function The pumps have a gas ballast unit via which air is permanently taken in. A ball valve 440
for closing off the line can be fitted as an upgrade (see accessories).
The gas ballast valve is closed when turning to the right to position 0 and open when turn­ing to the left to position 1. Intermediate settings are not possible.
“1”
440
441
Fig. 7: Gas ballast valve
440 Ball valve 441 Sintered metal filter
“0”
18

6.4 Topping up the operating fluid

If the operating fluid has reached its minimum filling level, the operating fluid must be topped up.
Operation
Filling up the operat­ing fluid
Switch off the pump.Unscrew operating fluid filler screw 88.When the pump is at operation temperature, top up the operating fluid up to the "max."
marking.
83 Sight glass 88 Operating fluid filler
screw
95 Operating fluid drain
screw
88
Max.
Min.
95
Fig. 8: Filling up the operating fluid
83
Screw in operating fluid filler screw 88.
19
Operation

6.5 Switching off

Vacuum chamber venting
The pump can be switched off in any pressure range.
HenaLine rotary vane pumps have an integrated non-return valve on the suction side. This closes automatically when the pump is switched off and therefore prevents the re­turn flow of gas and processing materials into the suction pipe.
Switch the pump off at the mains switch or disconnect from the mains in a secure man-
ner.
NOTICE
Danger of backflow of operating fluid into the intake line!
Contamination of the connected vacuum system!
Vent the vacuum chamber within 30 s, regardless of the chamber size.For a longer venting process, use an additional shut-off valve and shut off the intake
line after switching off the pump.
Maintaining the vac­uum in the chamber
NOTICE
Danger of backflow of operating fluid into the intake line!
Contamination of the connected vacuum system!
Because the safety valve of the pump is not suitable for longer-term sealing, install
an additional shut-off valve in the intake line.
Shut off the intake line immediately after switching off the pump.
20

7 Maintenance

7.1 Precautions

Danger of injury from moving parts!
After power failure or motor shutdown due to overheating, the motor may restart auto­matically.
Secure the motor so that it cannot be switched on while any work is being performed
If necessary, dismantle the pump from the installation for inspection.
Pump parts may be contaminated from pumped media!
Danger of poisoning due to contact with harmful substances.
Decontaminate the pump before carrying out any maintenance work.In the event of contamination, take suitable safety precautions to prevent your health
Maintenance
WARNING
on the pump.
WARNING
from being harmed by any dangerous substances.
Turn off the vacuum pump, vent to atmospheric pressure and allow to cool.Disconnect the drive motor from the mains and secure it so that it cannot be switched
on.
Only dismantle the pump as far as necessary to carry out maintenance.Dispose of used operating fluid in compliance with local regulations.When using synthetic operating fluids or working with toxic substances or substances
contaminated with corrosive gases, the relevant instructions governing their use must be observed.
Use only alcohol or similar agents for cleaning pump parts.
21
Maintenance
Checklist for inspec­tion, maintenance and overhaul
Certain maintenance and overhaul work should only be performed by Pfeiffer Vacuum Service (PV). Pfeiffer Vacuum will be released from all warranty and liability claims if the required, below listed, intervals are exceeded or maintenance or overhaul procedures are not performed properly. This also applies if replacement parts other than Pfeiffer Vac­uum OEM replacement parts are used.
Activity
Check operating fluid level X Visual inspection (leak-tightness/oil leaks) X Check the saturation of the exhaust air filter
(internal oil mist filter) Change operating fluid X Change operating fluid filter X Change the exhaust air filter X Cleaning the pump and renew the O-rings X Clean gas ballast filter X Clean the fan cap of the motor X Replace the radial shaft seals Clean or replace discharge valves X (PV) Replace vanes X (PV) Replace the non return valve X (PV) Check or change coupling X (PV) Depending on the process, the required replacement intervals for lubricants and the intervals for inspection,
maintenance and overhaul may be shorter than the guide values specified in the table. Consult with Pfeiffer Vacuum Service if necessary.
1. Where unusually high levels of operating fluid are being lost it is necessary to carry out a check of the radial shaft seals. If operating fluid leaks out from under the pump between the pump casing and the motor or fan, the radial shaft seals should be replaced. In this case please get in touch with your local Pfeiffer Vacuum Service.
1
daily
X
as required; at least
once every 6 months
as required;
at least annually
as required;
X (PV)
at least every 2 years
as required;
at least every 4 years

7.2 Changing the operating fluid

The service life of the operating fluid is dependent on the application area for the pump. It must be changed if:
The specified ultimate pressure is no longer reached
The operating fluid in the sight glass is visibly contaminated, milky, or cloudy
The operating fluid is thermally aged, identifiable by its color ID value (applies to min-
eral oils only).
Depending on the applications, Pfeiffer V acuum recommends determining the ex­act service life of the operating fluid during the first year of operation.
The replacement interval may vary from the guide value specified by Pfeiffer Vacuum depending on the thermal and chemical loads, and the accumulation of suspended par­ticles and condensation in the operating fluid.
Hot operating fluid!
Danger of burns when draining due to contact with skin.
Wear suitable protective clothing.Use a suitable collecting vessel.
WARNING
22
Maintenance
Max
Min
95
88
WARNING
Operating fluid may contain toxic substances from the pumped media!
Danger of poisoning from the emission of harmful substances from the operating fluid.
Wear suitable protective clothing and respirators.Dispose of operating fluid according to the local regulations
Request safety data sheets for operating fluids and lubricants
from Pfeiffer Vacuum or download at www.pfeiffer-vacuum.com.
Dispose of operating fluid according to the local regulations.
Draining the operat­ing fluid
Turn off the vacuum pump and vent to atmospheric pressure.Unscrew operating fluid filler screw 88.Unscrew operating fluid drain screw 95.Drain the operating fluid while still quite hot;
– to empty the pump fully, tip it forward slightly.
Determining the level of deterioration
Fig. 9: Draining the operating fluid
Screw in operating fluid drain screw 95; pay attention to O-ring.Screw in operating fluid filler screw 88.Allow pump to run for a maximum of 5 seconds with the vacuum flange open.Drain off remaining operating fluid.
– In case of serious contamination, the operating fluid will have to be changed sev-
eral times (flushing):
Fill up with operating fluid and check the filling level (see p. 16, chap. 5.5).
The level of deterioration of operating fluid P3 can be determined for clean processes
with the colour scale (in accordance with DIN 51578); supplementary sheet PK 0219
BN on request or at www.pfeiffer-vacuum.com.
Suck off operating fluid from the pump through the operating fluid filler opening.Fill the specimen in a test tube or some similar vessel and test by holding against the
light.
23
Maintenance
Where discolouration is red brown (equivalent to 5 on the scale) change operating flu-
id at the latest.
Flushing and clean­ing
Changing the operat­ing fluid filter
If the interior of the pump is heavily contaminated with process residues, we recommend performing several changes of operating fluid to flush away the contamination:
Operate the pump with the gas ballast open until the pump has warmed up.Drain the operating fluid again and check for contamination, flush again if necessary.If the operating fluid is heavily contaminated, replace the operating fluid filter 100 and
exhaust filter 122.
Screw the operating fluid drain screw back in.
Fill up with operating fluid and check the filling level (see p. 16, chap. 5.5).
Screw in operating fluid filler screw 88.
Operating fluid filter 100 should be replaced at every operating fluid change but at least once every six months. It is also necessary to replace the filter when the pump is on op­erating temperature and the filter housing is cold.
Allow the pump to warm up for a minimum of 15 minutes before replacing the filter.Switch off the pump.Drain off operating fluid.Unscrew operating fluid filter with a spanner and replace.Oil the sealed surface of the replacement filter before fitting.Screw in the filter manually; do not use tools.
10 0
Fig. 10: Changing the operating fluid filter 100
24

7.3 Changing the exhaust filter in the operating fluid separator

12 mm
Exhaust filters 122 in operating fluid separator 75 should be replaced, depending on the application and level of contamination, however at least once every year. It is recom­mended to replace also the respective O-rings 121.
During operation, the exhaust filters become saturated with oil. It is therefore normal for the operating fluid fill level to sink slightly after the filters are changed.
Indications that a filter change is required:
– High current drain by the motor. – Increased presence of operating fluid vapor in gas outlet. – Increased pressure in operating fluid separator 75 (manometer display in red range).
To perform continuous monitoring of the filter resistance, you can install a manometer (see accessories) instead of the operating fluid filler screw 88.
WARNING
Exhaust air filter may contain toxic substances from the pumped media!
Danger of poisoning from the emission of harmful substances (radioactive, toxic, etc.) from the filter and the operating fluid.
Wear suitable protective clothing and respirators.Dispose of consumables supplies according to the local regulations
Maintenance
Dismantling Depending on the pump type, between one and eight exhaust filters are used. The pro-
cess for changing a filter is described below using an exhaust filter as an example.
Remove exhaust line.Unscrew screws 146 from separator cover 155; take care with the spring washer !Remove separator cover 155, observe the flat gasket 141. Slacken screws 126 and release tension on filter spring 125; do not remove screws.
NOTICE
Make a tool!
To simplify dismantling/assembly of the filter springs, we recommend that you make a tool.
Make a fork out of steel sheet about 2 mm thick as shown in the sketch.Weld the lower end of the fork onto the tip of a medium-sized slotted screwdriver.
Using the tool, press filter spring 125 out of the recesses and twist.Remove filter spring.Remove used exhaust filter 122 from operating fluid separator; be careful of O-rings .
25
Maintenance
126
121
75 Operating fluid separator 83 Sight glass 84 Sealing 88 Operating fluid filler screw 89 O-ring 95 Operating fluid drain screw
96 O-ring 100 Operating fluid filter 122 Exhaust filter 121 O-ring 125 Filter spring
Fig. 11: Changing the exhaust filter
Assembly  Assembling is carried out in reverse order.
Insert new exhaust filter; be careful of O-ring.Check seat of screw in the filter spring; tip of screw must project approx. 2 to 5 turns
of the thread beyond the filter spring.
Using tool, insert filter spring into operating fluid separator and engage in the location
in the separator box; at the same time, insert the screw into the hole of the exhaust filter.
Tighten screw 126 in the filter screw until the screw head is in contact with the spring
washer.
Install separator cover 155, ensure that flat seal 141 is clean and undamaged; ex-
change if necessary.

7.4 Cleaning the operating fluid return line

To ensure proper functioning, the operating fluid return line 195 and the float valve should be cleaned whenever the exhaust filter and the operating fluid is replaced.
This ensures that the vacuum pump achieves the specified ultimate pressure and no op­erating fluid leaks out at the exhaust flange.
126 Screw 146 Screw 155 Separator cover 195 Operating fluid return line 200 Float valve, complete
26
Remove separator cover 155 above the float valve 200 (fig. see above).Using a spray bottle, evacuate operating fluid from the float chamber.
Maintenance
440
441
Slacken screws in the ventilator cowl if necessary, and remove ventilator cowl 340.
Operating fluid leaks out
When the banjo fitting is released, a small amount of operating fluid leaks out.
Have a cleaning cloth to hand.Pay attention to the sealing rings of the banjo fitting.
Release banjo fitting of operating fluid return line 195 from the operating fluid separa-
tor and bend the line to the side.
Slacken screws on the flange of float valve 200 and remove float valve from the oper-
ating fluid separator.
Check float valve for cleanliness and functioning, blow out with compressed air if nec-
essary.
Ensure that the O-ring on the flange of the float valve is present and undamaged, re-
place with a new O-ring if necessary.
Insert float valve into the operating fluid separator with the correct orientation and
screw on the two screws on the flange.
Fasten banjo fitting of operating fluid return line on the operating fluid separator with
the banjo bolt and two sealing rings.
Re-install ventilator cowl and fasten with screws.

7.5 Changing the gas ballast filter

The gas ballast filter is used to keep the air free of particles before entering the suction chamber.
The greater the contamination, the lower the filter air throughput and the greater the risk of condensation and corrosion within the pump.
Fig. 12: Gas ballast valve 440 with gas ballast filter 441
Remove gas ballast filter 441.Clean the gas ballast filter 441 using alcohol and blow out using compressed air.
27
Maintenance

7.6 Changing the intake filter

The intake filter, located in the upper part of the intake flange must be cleaned when the intake throughput reduces.
Unscrew screws 265 from the vacuum flange and dismantle flangeRemove intake sieve 261 from the intake port and clean it.When cleaning the sieve it is recommended to clean the vacuum safety valve at the
same time and check it for wear and tear.
28

8 Decommissioning

8.1 Shutting down for longer periods

Before shutting down the pump, observe the following procedure and adequately protect the pump system against corrosion:
Switch off the pump.
Change the operating fluid (see p. 22, chap. 7.2).
Start the pump and allow the pump to warm up with closed vacuum flange and with
open gas ballast valve.
Close gas ballast valve.

8.2 Re-starting

Emission of operating fluid!
Danger of the operating fluid being emitted at the exhaust flange if overfilled.
Drain the operating fluid to the normal level before restarting the pump.
Decommissioning
NOTICE
Re-starting
The serviceability of the operating fluid without operation is a maximum of 2 years. Be-
fore restarting after a shut-down of 2 years or longer, carry out the following work.
Replace the operating fluid.Replace the radial shaft sealing rings and further elastomer parts.Replace bearings at pumps with anti-friction bearings.Follow the maintenance instructions and inform Pfeiffer Vacuum.

8.3 Disposal

Products or parts thereof (mechanical and electrical components, operating fluids, etc.) may cause environmental burden.
Safely dispose of the materials according to the locally applicable regulations.

9 Malfunctions

Please note the following instructions should the pump malfunction:
Hot surface!
Danger of burns if hot parts are touched. The surface temperature of the pump may rise above 105 °C in case of malfunction.
Carry out work on the pump only after it has cooled to a safe temperature.
CAUTION
29
Malfunctions

9.1 Rectifying malfunctions

Problem Possible causes Remedy
Pump will not start up No mains voltage or voltage does
Pump switches off af­ter a while after being started
Pump does not attain ultimate pressure
Pumping speed of pump too low
Loss of operating fluid Operating fluid separator leaky Check tightness; replace gasket if neces-
Unusual operating noises
Check mains voltage and mains fuse protec-
not correspond to the motor data Pump temperature too low Warm up pump to > 12 °C Thermal protection switch has re-
sponded Pump system dirty Clean pump; contact Pfeiffer Vacuum Ser-
Pump system damaged Clean and overhaul pump; contact Pfeiffer
Motor defective Replace motor Thermal protection switch of the
motor has responded Mains fuse protection triggered
due to overload (e.g. cold start) Exhaust pressure too high Check opening of exhaust line and exhaust
Measurement reading is false Check gauge, check ultimate pressure with-
Pump or connected accessories are dirty
Operating fluid dirty Operate pump for a longer period with gas
Leak in system Repair leak Operating fluid filling level too low Top off operating fluid Pump damaged Contact Pfeiffer Vacuum Service. Intake line not well-dimensioned Keep connections as short as possible and
Exhaust pressure too high Check opening of exhaust line and exhaust
Radial shaft seal rings leaky Replace seal ring and check bushing Operational loss of operating fluid Check the oil return unit Silencer dirty Clean or replace the silencer. Damage to the pump system Clean and overhaul pump; contact Pfeiffer
Motor bearing defective Replace motor; contact Pfeiffer Vacuum
tion; check motor switch
Detect and fix cause of overheating; allow pump to cool off if necessary.
vice if necessary.
Vacuum Service if necessary.
Detect and fix cause of overheating; allow motor to cool off if necessary.
Warm up pump
accessories
out installation connected. Clean pump and check components for con-
tamination.
ballast valve open or change operating fluid
see that cross-sections are sufficiently di­mensioned
accessories
sary
Vacuum Service if necessary.
Service if necessary
30
NOTICE
Service work should be carried out by a qualified person only!
Pfeiffer Vacuum is not liable for any damage to the pump resulting from work carried out improperly.
Take advantage of our service training programs; additional information at www.pfei-
ffer-vacuum.com.
Please state all the information on the pump rating plate when ordering spare parts.

10 Service

Service
Pfeiffer Vacuum offers first-class service!
Maintenance/repairs on site by Pfeiffer Vacuum field service
Maintenance/repairs in a nearby service center or service point
Fast replacement with exchange products in mint condition
Advice on the most cost-efficient and quickest solution
Detailed information and addresses at: www.pfeiffer-vacuum.com (Service).
Maintenance and repairs in Pfeiffer Vacuum ServiceCenter
The following steps are necessary to ensure a fast, smooth servicing process:
Download the forms "Service Request" and "Declaration on Contamination".Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum
service address.
Include the confirmation on the service request from Pfeiffer Vacuum with your ship-
ment.
Fill in the contamination declaration and enclose it in the shipment (required!).Dismantle all accessories.Drain operating fluid/lubricant.Drain cooling medium, if used.Send the pump or unit in its original packaging if possible.
1)
Sending of contaminated pumps or devices
No units will be accepted if they are contaminated with micro-biological, explosive or ra­dioactive substances. “Hazardous substances” are substances and compounds in ac­cordance with the hazardous goods directive (current version). If pumps are contaminat­ed or the declaration on contamination is missing, Pfeiffer Vacuum performs decontamination at the shipper's expense.
Neutralise the pump by flushing it with nitrogen or dry air.Close all openings airtight.Seal the pump or unit in suitable protective film.Return the pump/unit only in a suitable and sturdy transport container and send it in
while following applicable transport conditions.
Service orders
All service orders are carried out exclusively according to our repair conditions for vacu­um units and components.
1)
Forms under www.pfeiffer-vacuum.com
31
Spare parts

11 Spare parts

32
Fig. 13: Exploded view Hena 26
Accessories
14 Rotor with inner ring 18 Inner ring 22 Vane 24 Cylinder cover, side A 27 Cylinder cover, side B 30 Needle bearing 35 Radial shaft seal 42 Supporting ring 43 Hexagon head screw 46 Sealing ring 47 Locking screw 50 O-ring 53 Hexagon head screw/lock
washer
57 Cylinder pin 60 Taper pin 65 Shaft key 66 Shaft key 75 Operating fluid separator 83 Sight glass 84 Flat seal 88 Locking screw 89 O-ring 95 Locking screw 96 O-ring 99 Nipple 100 Operating fluid filter 105 Cover 106 Flat seal
107 Hexagon head screw/lock
washer 122 Exhaust filter 125 Filter spring 136 O-ring 138 Hexagon head screw/lock
washer 139 Cover 141 Flat seal 146 Hexagon head screw/lock
washer 155 Exhaust cover plate, com-
plete 159 Exhaust valve, complete 185 Flat seal 186 Stud 187 Lock washer 191 Hexagon nut 195 Operating fluid return line,
complete 200 Float valve, complete 210 Operating fluid supply, com-
plete 250 Intake flange, lower housing 255 O-ring 257 Valve set, complete 260 Intake flange 265 Hexagon head screw/lock
washer 280 Oil return valve, complete
300 Motor flange 301 Hexagon head screw/
lock washer 310 Coupling 312 Coupling sleeve, for
three-phase motor 312 Coupling set for AC
motor 315 Protection clip 321 Axial fan 326 Notched ring 340 Fan cover 341 Self-tapping screw 345 Protective screen 391 Eye bolt 400 Motor 401 Hexagon head screw/
lock washer 411 Hexagon head screw/
lock washer 412 Foot 415 Hexagon head screw/
lock washer 421 Rubber foot 422 Rubber foot 425 Washer 440 Gas ballast valve

11.1 Spare parts packages

Spare parts package Hena 26 Hena 41
Set of seals PK E60 020 -T PK E60 020 -T Maintenance kit PK E61 020 -T PK E61 020 -T Overhaul kit PK E62 020 -T PK E62 021 -T Set of vanes PK E68 020 -T PK E68 021 -T Operating fluid filter PK 100 129 PK 100 129

12 Accessories

Designation Hena 26 Hena 41
P3, mineral oil, 20 l PK 001 108 -T PK 001 108 -T P3, mineral oil, 5 l PK 001 107 -T PK 001 107 -T P3, mineral oil, 1 l PK 001 106 -T PK 001 106 -T Pressure gauge for monitoring the operating fluid separator G 3/4" PK 100 126 PK 100 126 Gas ballast valve manuell PK 100 150 PK 100 150 Flange DN 40 ISO-K - G 1 ¼" PK 300 525 PK 300 525 FAK 040, activated carbon filter PK Z30 008 PK Z30 008 KAS 40, condensate separator for pumping speeds up to 100 m SAS 40, DN 40 ISO-KF, polyester filter PK Z60 510 PK Z60 510
Further detailed accessories are contained in the Pfeiffer Vacuum printed or Online Cat­alogue.
3
/h PK Z10 008 PK Z10 008
33
Technical data and dimensions

13 Technical data and dimensions

13.1 General

Recommendations of PNEUROP committee PN5
ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum-
pump performance - General description"
Conversion table: pressure units
mbar bar Pa hPa kPa Torr
mbar 1 1 · 10
bar 1000 1 1 · 10
Pa 0.01 1 · 10 hPa 1 1 · 10 kPa 10 0.01 1000 10 1 7.5 Tor r
mm Hg
1.33 1.33 · 10
Conversion table: gas throughput units
-3
-5
-3
-3
1 Pa = 1 N/m
mm Hg
100 1 0.1 0.75
5
1 0.01 1 · 10
100 1 0.1 0.75
133.32 1.33 0.133 1
1000 100 750
2
-3
7.5 · 10
-3
mbar·l/s Pa·m3/s sccm Torr·l/s atm·cm3/s
mbar·l/s 1 0.1 59.2 0.75 0.987
3
Pa·m
/s 10 1 592 7.5 9.87
sccm 1.69 · 10
Torr·l/s 1.33 0.133 78.9 1 1.32
3
atm·cm
/s 1.01 0.101 59.8 0.76 1
-2
1.69 · 10
-3
1 1.27 · 10
-2
1.67 · 10
-2
34

13.2 Technical data

Technical data and dimensions
Parameter Hena 26 Hena 41
Flange (in) Female thread G 1 ¼" Female thread G 1 ¼" Flange (out) Female thread G 1 ¼" Female thread G 1 ¼" Pumping speed at 50 Hz 25 m Pumping speed at 60 Hz 30 m Ultimate pressure with gas ballast 1.5 hPa ≤1,5 hPa Ultimate pressure without gas ballast 0.3 hPa ≤0,3 hPa Exhaust pressure, min. Atmospheric pressure Atmospheric pressure Exhaust pressure, max. Atmospheric pressure Atmospheric pressure Rotation speed at 50 Hz 1500 min Rotation speed at 60 Hz 1800 min Leak rate safety valve 8 · 10-3Pa m3/s 8 · 10-3Pa m3/s Emission sound pressure level without gas ballast at
50 Hz Emission sound pressure level without gas ballast at
60 Hz Ambient temperature 12-40 °C 12-40 °C Protection category IP55 IP55 Rated power 50 Hz 1 kW 1.4 kW Rated power 60 Hz 1.2 kW 1.7 kW Mains requirement: voltage 50 Hz 190-208/380-415 V 190-208/380-415 V Mains requirement: voltage 60 Hz 220-230/440-460 V 220-230/440-460 V Mains requirement: voltage (range) ±5 % ±5 % Switch No No Mains cable No No Shipping and storage temperature -25-+55 °C -25-+55 °C Operating fluid P3 P3 Operating fluid filling 1 l 1 l Gas ballast yes, without shut-off
Weight 35 kg 48 kg Cooling method, standard Air Air
3
/h 40 m3/h
3
/h 48 m3/h
-1
-1
1500 min 1800 min
60 dB (A) 63 dB (A)
63 dB (A) 66 dB (A)
yes, without shut-off
valve
valve
-1
-1
35
Technical data and dimensions
7
2
6
3
17
14550
283
1
9
5
G1¼
G1¼
1~ : 565 ± 2 3~ : 585,5 ± 2
3X Ø 30
M8
1~ : 240 ± 2
3~ : 270 ± 2
171 ± 2
238 ± 2
132,5 120 ± 2
159 ± 2
260 ± 2
7
2
6
3
17
14550
283
G1¼
G1¼
624 ± 2
3X Ø 30
M8
270 ± 2
171 ± 2
238 ± 2
151,5
151,5
123 ± 2
179 ± 2
260 ± 2
263

13.3 Dimensions

Fig. 14: Hena 26
Fig. 15: Hena 41
36

Declaration of conformity

We hereby declare that the product cited below satisfies all relevant provisions accord-
ing to the following EC directives:
Machinery 2006/42/EC (Annex II, no. 1 A)
Electromagnetic Compatibility 2014/30/EU
Restriction of the use of certain Hazardous Substances 2011/65/EU
The agent responsible for compiling the technical documentation is Mr. Sebastian Ober­beck, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.
HenaLine™ Hena 26/41
Harmonised standards and national standards and specifications which have been ap­plied:
DIN EN ISO 12100 : 2010 DIN EN ISO 13857 : 2008 DIN EN 61000-6-3 : 2007 + A1: 2011
DIN EN 1012-1 : 2010 DIN EN 61000-6-1 : 2007 DIN EN 61000-6-4 : 2007 + A1: 2011
DIN EN 1012-2 : 2011-12 DIN EN 61000-6-2 : 2006
DIN EN ISO 2151 : 2: 2008
Signature:
Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany
(Dr. Ulrich von Hülsen) Managing Director
2016-03-01
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Are you looking for a perfect vacuum solution? Please contact us:
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Pfeiffer Vacuum GmbH
Headquarters • Germany T +49 6441 802-0 info@pfeiffer-vacuum.de
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