Pfeiffer Vacuum HENA 201, HENA 251, HENA 301, HENA 301 S Operating Instructions Manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
HENA 201 | HENA 251 | HENA 301/301 S
Rotary vane pump
2/58

Table of contents

1.1 Validity 5
1.2 Target group 5
1.3 Conventions 6
2.1 General safety instructions 8
2.2 Safety instructions 8
2.3 Safety precautions 10
2.4 Product limits of use 11
2.5 Proper use 11
2.6 Foreseeable improper use 11
Table of contents
1.1.1 Related documents 5
1.1.2 Variants 5
1.3.1 Abbreviations 6
1.3.2 Pictographs 6
1.3.3 Product sticker 6
1.3.4 Symbols used 6
1.3.5 Instructions in the text 7
3.1 Product identification 12
3.2 Shipment 12
3.3 Function 12
3.3.1 Operating principle 13
3.3.2 Operating fluid return via the float valve 14
4.1 Transport 15
4.2 Storage 15
5.1 Installing the vacuum pump 17
5.2 Connecting the vacuum side 17
5.3 Connecting the exhaust side 18
5.4 Establishing mains connection 18
5.4.1 Three phase motor with 12-pin terminal board 19
5.4.2 Three phase motor with 6-pin terminal board 20
5.4.3 Checking the direction of rotation 20
5.4.4 Motor protection 21 PTC thermistor temperature sensor (3TF) 21 Motor protection switch 21 Frequency inverter operation for vacuum pumps with 3-phase mo­tor
5.5 Refilling operating fluid 22
5.6 Connecting accessories 23
5.6.1 Operating fluid temperature monitoring (option) 23
5.6.2 Operating fluid level monitoring (option) 24
5.6.3 Connecting a heat exchanger (optional) 25
22
6.1 Commissioning 28
6.2 Switching on 28
6.3 Operating the rotary vane pump with gas ballast 29
6.3.1 Gas ballast valve – standard version 29
6.3.2 Gas ballast valve – retrofit kit with solenoid valve 29
6.4 Refilling operating fluid 30
3/58
Table of contents
6.5 Switching off the vacuum pump 31
6.5.1 Venting the vacuum chamber 31
6.5.2 Maintaining the vacuum in the chamber 31
7.1 Maintenance instructions 32
7.2 Checklist for inspection and maintenance 32
7.3 Changing the operating fluid 34
7.3.1 Determine degree of aging of P3 operating fluid 34
7.3.2 Draining the operating fluid 35
7.3.3 Rinsing and cleaning 36
7.3.4 Changing the operating fluid filter 36
7.4 Change the exhaust filter in the operating fluid separator 37
7.5 Cleaning the intake strainer 39
7.6 Cleaning the gas ballast filter 39
7.7 Changing operating fluid type 40
8.1 Shutting down for longer periods 41
8.2 Recommissioning 41
8.3 Disposing of the vacuum pump 41
11.1 Spare parts packs 46
11.1.1Operating fluids – maintenance level 1 46
11.1.2Maintenance kit – maintenance level 2 47
11.1.3Set of seals 47
11.1.4Overhaul kit and set of seals 47
11.1.5Set of vanes 47
11.1.6Coupling set 47
12.1 General 48
12.2 Technical data 48
12.3 Dimensions 51
Declaration of conformity 56
4/58

1 About this manual

IMPORTANT
Read carefully before use. Keep the manual for future consultation.

1.1 Validity

These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the designated product and provide the most important information for safe usage of the product. The de­scriptions comply with applicable directives. All information provided in these operating instructions refer to the current development status of the product. The documentation remains valid as long as the cus­tomer does not modify the product in any way.

1.1.1 Related documents

Hena 201/251/301/301 S Operating instructions
Declaration of conformity A part of this document
Current documents are available from the Pfeiffer Vacuum Download Center.
About this manual

1.1.2 Variants

These instructions apply to HenaLine series vacuum pumps:
Pump type Pump version
Hena 201 Hena 251 Hena 301
Hena 301 S Pump with limited intake pressure:

1.2 Target group

This operating instructions are aimed at all persons performing the following activities on the product:
transport,
setup (installation),
usage and operation,
decommissioning,
maintenance and cleaning,
storage or disposal.
The work described in this document is only permitted to be performed by persons with the appropriate technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac­uum.
Pump in standard version
Vacuum connection and gas outlet: G2"
Operating fluid return via the float valve
Motor protection via 3 TF at three phase motors
Gas ballast valve
4 exhaust filters
3 exhaust filters
max. continuous intake pressure ≤ 100 hPa
5/58
1
2
D-35641Asslar
Mod.: Hena 201 Mod.-Nr.: PK D03 400 A
Ser.- Nr.: 0014440
S : max. 200/240 m /h Oil : P3 6.5 l Mass : 182 kg
n : XXXX 1/min
(N )
2
3
max.
Made in Switzerland 2005/01
About this manual

1.3 Conventions

1.3.1 Abbreviations

Abbreviation Meaning in this document
RSSR Radial shaft seal ring 3TF PTC positive temperature coefficient PE Earthed conductor (protective earth)
Tbl. 1: Abbreviations used in this document

1.3.2 Pictographs

Pictographs used in the document indicate useful information.
Note

1.3.3 Product sticker

This section describes all the stickers on the product along with their meaning.
Tbl. 2: Product sticker
Tip
Warning
Hot surface
Sticker
Read the operating instruc­tions before starting up the pump.
Rating plate
The rating plate is located on the pump housing next to the sight glass.
Motor rating plate
The motor rating plate is located on the motor (not shown).

1.3.4 Symbols used

Tbl. 3: Symbols used in this document
6/58
Vacuum connection
Exhaust connection
Gas ballast connection
Electrical connection

1.3.5 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac­tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1.
Step 1
2.
Step 2
3.
...
About this manual
7/58
Safety

2 Safety

2.1 General safety instructions

This document includes the following four risk levels and one information level.
DANGER
Imminent danger
Indicates a hazardous situation which, if not avoided, will result in death or serious injury.
Instructions on avoiding the hazardous situation
WARNING
Possibly imminent danger
Indicates a hazardous situation which, if not avoided, could result in death or serious injury.
Instructions on avoiding the hazardous situation
CAUTION
Possibly imminent danger
Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.
Instructions on avoiding the hazardous situation
Danger of property damage
Notice is used to address practices not related to physical injury.
Instructions on avoiding property damage

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in accordance with Machinery Directive 2006/42/EC Annex I and DIN EN ISO 12100 Section 5. Where ap­plicable, all life cycle phases of the product were taken into account.
Risks during transport
WARNING
Danger of serious injury from falling or swinging objects
Falling or swinging objects during transport pose a danger of injuries to limbs, up to and including bone fractures.
Prevent people from remaining below the suspended load.
Secure the danger zone if necessary.
Avoid diagonal pulling of the crane rope.
Wear protective equipment, e.g. safety shoes.
NOTICE
Notes, tips or examples indicate important information on the product or on this document.
8/58
Safety
Risks during installation
DANGER
Danger to life from electric shock
Contact with exposed and live elements generate an electric shock. Incorrect connection of the mains supply leads to the risk of live housing parts that can be touched. There is a risk to life.
Before the installation, check that the connection leads are voltage-free.
Make sure that electrical installations are only carried out by qualified electricians.
Provide adequate grounding for the device.
After connection work, carry out an earthed conductor check.
CAUTION
Danger of injury from moving parts
After a power failure or a standstill as a result of overheating, the motor restarts automatically. There is a risk of injury to fingers and hands if they enter the operating range of rotating parts.
Safely disconnect motor from the mains.
Secure the motor against reactivation.
Dismantle the vacuum pump for inspection, away from the system if necessary.
Risks during operation
WARNING
Danger of poisoning due to emission of toxic process gases from the exhaust
During operation with no exhaust line, the vacuum pump allows exhaust gases and vapors to escape freely into the air. In processes involving toxic media, there is a risk of injury and danger to life due to poisoning.
Observe the relevant regulations for handling toxic substances.
Safely purge toxic process gases via an exhaust line.
Use suitable filter equipment to separate toxic substances.
WARNING
Risk of burns from ejected hot oil mist
During operation, hot pressurized oil mist escapes from the operating fluid separator.
Only operate the vacuum pump with the operating fluid filler screw securely fitted.
Open the locking screws on the separator only while the vacuum pump is switched off.
CAUTION
Risk of injury from bursting due to high pressure in the exhaust line
Faulty or insufficient exhaust lines cause hazardous situations, e.g. increase in exhaust pressure. There is a risk of bursting. It is not possible to rule out the risk of injuries due to broken pieces flying around, high escaping pressure and damage to the equipment.
Lay the exhaust line without shut-off units.
Observe the permissible pressures and pressure differentials of the product.
Check the exhaust line regularly for correct function.
CAUTION
Danger of burns on hot surfaces
Depending on the operating and ambient conditions, the surface temperature of the vacuum pump can increase to above 70 °C.
Provide suitable touch protection.
9/58
Safety
Risks during maintenance
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from electric shock when making contact with live components.
Always keep the mains connection freely accessible so you can disconnect it at any time.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub­stances causes environmental damage.
Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media.
Decontaminate affected parts before carrying out maintenance work.
Wear protective equipment.
CAUTION
Scalding from hot operating fluid
Danger of burns when draining operating fluid in case of skin contact.
Wear protective equipment.
Use a suitable collection receptacle.
CAUTION
Danger of injury from moving parts
After a power failure or a standstill as a result of overheating, the motor restarts automatically. There is a risk of injury to fingers and hands if they enter the operating range of rotating parts.
Safely disconnect motor from the mains.
Secure the motor against reactivation.
Dismantle the vacuum pump for inspection, away from the system if necessary.

2.3 Safety precautions

Information requirement on possible hazards
The owner or operator of the product is required to make all operating personnel aware of hazards arising from the use of this product.
Every person who is involved in the installation, operation or maintenance of the product must have read and understood the safety-relevant parts of this documen­tation.
Infringement of EU conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the opera­tor changes the original product or installs additional equipment.
Following installation into a system, the operator is required to check and re­evaluate as necessary the conformity of the overall system in the context of the relevant EU Directives before commissioning that system.
10/58
General safety precautions when handling the product
Observe all applicable safety and accident prevention regulations.
Check that all safety measures are observed at regular intervals.
Do not expose body parts to the vacuum.
Always ensure a secure connection to the earthed conductor (PE).
Never disconnect plug connections during operation.
Observe the above shutdown procedures.
Keep lines and cables away from hot surfaces (> 70°C).
Never fill or operate the unit with cleaning agents or cleaning agent residues.
Do not carry out your own conversions or modifications on the unit.
Observe the unit protection class prior to installation or operation in other environments.
Provide suitable touch protection, if the surface temperature exceeds 70°C.

2.4 Product limits of use

Safety
Parameter Hena 201, Hena 251,
Ambient temperature +12 °C to +40 °C +12 °C to +40 °C Pumped medium intake temperature, max. +80 °C +80 °C Permissible operating pressure range during continuous
operation
Tbl. 4: Pump limits of use

2.5 Proper use

Use the vacuum pump for vacuum generation only.
Use standard operating fluid with ≤21% oxygen concentration only.
Use application-specific operating fluid at higher oxygen concentrations only following consultation with Pfeiffer Vacuum.
Adhere to the installation, commissioning, operating, and maintenance instructions.
Do not use any accessory parts other than those recommended by Pfeiffer Vacuum.

2.6 Foreseeable improper use

Improper use of the product invalidates all warranty and liability claims. Improper use is any, even unin­tended, use, which is contrary to the product purpose; and in particular:
Pumping of corrosive media
Pumping of radioactive media
Pumping of gases that introduce an ignition source to the suction chamber
Pumping of gases that contain impurities such as particles, dust, or condensate
Pumping explosive media
Use of the vacuum pump in potentially explosive atmospheres
Pumping of media with a propensity to sublimation
Pumping of fluids
Use of the vacuum pump outside the specified area of application
Use for pressure generation
Use in strong electrical, magnetic, or electromagnetic fields
Connection to vacuum pumps or equipment which are not suitable for this purpose according to their operating manual
Connection to devices with exposed live parts
Use of operating fluids other than those specified by Pfeiffer Vacuum
Use of accessories or spare parts not listed in these instructions
Hena 301 S
Hena 301
< 800 hPa ≤ 100 hPa
11/58
2
D-35641Asslar
Mod.: Hena 201 Mod.-Nr.: PK D03 400 A
Ser.- Nr.: 0014440
S : max. 200/240 m /h Oil : P3 6.5 l Mass : 182 kg
n : XXXX 1/min
(N )
2
3
max.
Made in Germany 2005/01
Product description

3 Product description

3.1 Product identification

To ensure reliable identification of the product when communicating with Pfeiffer Vacuum, always keep all of the information on the rating plate to hand.
Fig. 1: Rating plate, Hena 201 | 251 | 301 | 301 S
The following information is shown on the rating plate:
Pump model
Model number
Operating fluid type and quantity
Date of manufacture

3.2 Shipment

3.3 Function

The rotary vane pumps of the HenaLine are single-stage, oil-sealed rotary displacement pumps with air cooling and circulatory lubrication. A non-return valve in the intake flange closes the intake line automat­ically when switching off the pump and prevents an operating fluid return flow. The integrated oil mist filter cleans the conveyed gas and prevents the operating fluid mist from being emitted at the exhaust. The operating fluid collected in the separator is supplied back to the pump. A filter is also installed for cleaning the operating fluid.
The pump is intended for the evacuation of clean air or other non-aggressive, non-poisonous and non­explosive gases. Pumping media with a higher density than air results in a higher thermal and mechani­cal load on the vacuum pump and the drive, and is only permitted after prior consultation with Pfeiffer Vacuum.
You can obtain motor-specific data such as input voltage range from the separately attached mo­tor rating plate.
Vacuum pump with motor
Operating fluid
Locking caps for vacuum and exhaust connection
Operating instructions
12/58
1
3
2
6
5
4
7
8
Fig. 2: Design Hena 201 | Hena 251 | Hena 301 | Hena 301 S
Product description
1 Vacuum flange 5 Operating fluid drain screw
2 Gas ballast valve 6 Sight glass
3 Exhaust flange 7 Operating fluid filter
4 Operating fluid filler screw (pressure gage, accessories) 8 Operating fluid separator
Air cooling (standard) The vacuum pump is cooled by heat radiation from its surface, the air flow of the two fan impellers and by the pumped gas.
Oil/water heat exchanger (option) In case of thermally unfavorable ambient conditions, we recom­mend the use of a pump version with oil/water heat exchanger.

3.3.1 Operating principle

Fig. 3: HenaLine operating principle
The rotary vane pump is an oil-sealed rotary positive displacement pump. The pumping system is made up of the housing, the eccentrically mounted rotor, and the centrifugally sliding vanes, which divide the suction chamber into multiple chambers. The volume of each chamber changes periodically as the rotor rotates. This causes the gas to be continuously drawn in at the vacuum flange and compressed in the suction chamber by the rotation of the rotor until the exhaust valve opens against the atmospheric pres­sure and the gas leaves the suction chamber.
Gas ballast
The gas ballast device serves to add a limited amount of mixture of ambient air or inert gas to the proc­ess gas in order to counteract the condensation from vapor contents. By increasing the air content in the suction chamber, the opening pressure of the exhaust valve has already been reached before con­densation forms in the expelled gas/vapor mixture. In doing so, the pump-specific limits of the water va-
13/58
Product description
por tolerance must be observed. The ultimate pressure achieved with the gas ballast is higher than op­eration without gas ballast.
Operating fluid
The vacuum pump oil, also referred to as operating fluid, fulfills several functions in a rotary vane pump: in addition to the lubrication of all moving parts, the operating fluid fills a part of the dead volume below
the exhaust valve, and seals the gap. In addition, the operating fluid supports cooling and, under the aspect of corrosion protection and resistance, may also have to be selected for process suitability. From the operating fluid reservoir, dosed operating fluid is supplied to the pump system and mixed with the conveyed gas. In the downstream operating fluid separator, the operating fluid is separated from the ex­haust air flow and thus retained in the rotary vane pump.

3.3.2 Operating fluid return via the float valve

The vacuum pumps are equipped with an operating fluid return as standard. If the operating fluid col­lected in the operating fluid separator reaches a certain level, a float valve opens and the ejected oper­ating fluid is returned to the intake port of the vacuum pump.
Function of the operating fluid return
The operating fluid return functions only at an operating pressure of < 800 hPa.
14/58

4 Transportation and Storage

2
1

4.1 Transport

WARNING
Danger of serious injury from falling or swinging objects
Falling or swinging objects during transport pose a danger of injuries to limbs, up to and including bone fractures.
Prevent people from remaining below the suspended load.
Secure the danger zone if necessary.
Avoid diagonal pulling of the crane rope.
Wear protective equipment, e.g. safety shoes.
Equipment damage from operating fluid leaking into the pumping system.
When tipping the vacuum pump, the operating fluid will overflow into the pumping system, resulting in the vane breaking when the pump is switched on.
Always transport the vacuum pump horizontally or without operating fluid filling.
Fill in the operating fluid only at the final installation location.
Transportation and Storage
NOTICE
Pfeiffer Vacuum recommends keeping the transport packaging and original protec­tive cover.
Fig. 4: Transporting the pump
1 Protective cap 2 Crane lug
In order to prevent dirt and foreign matter from entering the pump interior, it is important that the two protective caps are kept on the connection flanges during transport.
1.
Transport the packaged pump on a pallet. Where possible, use a fork lift.
2.
Be mindful of transport damage.
3.
Unpack the pump.
4.
Loosen the screw connections on the transport container.
Transport without packaging
1.
Lift the pump out of the transport packaging using the intended crane eyebolt.
2.
Remove both protective caps from the vacuum and exhaust connections only immediately before installation.

4.2 Storage

Pfeiffer Vacuum recommends storing the products in their original transport pack­aging.
15/58
Transportation and Storage
Storing the vacuum pump
1.
Close both connection flanges.
2.
Make sure that the gas ballast valve is closed.
3.
Store the vacuum pump only in dry, dust-free rooms, within the specified ambient conditions.
4.
Hermetically shrink-wrap the vacuum pump together with a drying agent in a plastic bag in case of damp or aggressive atmospheres.
5.
Change the operating fluid if the storage period is longer than 2 years.
16/58

5 Installation

> 200 mm
> 200 mm
> 200 mm

5.1 Installing the vacuum pump

Installation
Installation location
Installation altitude max. 1000 m Orientation horizontal, max. permissible angle of inclination: ±1° Ambient temperature +12 °C to +40 °C Relative air humidity max. 85%
Tbl. 5: Ambient conditions
Indoors, protected from dust deposits
Outdoors, protected from direct weather influences

5.2 Connecting the vacuum side

Fig. 5: Minimum clearances to side boundaries and permissible inclination
Notes on installing the pump
1.
Fill with operating fluid prior to first commissioning.
Quantity and type according to rating plate.
2.
Place the pump on a flat, horizontal surface, to safeguard the operating fluid supply.
3.
Screw the pump on the rubber-metal buffer to the mounting surface.
4.
When installing the pump in a closed housing, ensure adequate air circulation.
5.
Keep the sight glass and gas ballast valve visible and freely accessible.
6.
Keep the voltage and frequency specifications on the motor rating plate visible and freely accessi­ble.
1.
Remove the protective cap from the vacuum connection.
2.
Use a pipe that is as short as possible, at least the nominal diameter of the vacuum connection.
3.
Use a separator or filter if necessary to protect the pump against contamination.
4.
Clean the connection threads.
5.
For sealing, apply Loctite to the thread turns.
Recommendation: Loctite 245 or Loctite 577.
6.
Screw in the pipe.
7.
Support the piping to the pump so that no piping system forces act on the pump.
As an alternative to the G 2" pipe connection, an adapter flange DN 63 ISO-K / G 2" is available (see
chapter “Accessories”, page 55).
17/58
Installation

5.3 Connecting the exhaust side

WARNING
Danger of poisoning due to emission of toxic process gases from the exhaust
During operation with no exhaust line, the vacuum pump allows exhaust gases and vapors to escape freely into the air. In processes involving toxic media, there is a risk of injury and danger to life due to poisoning.
Observe the relevant regulations for handling toxic substances.
Safely purge toxic process gases via an exhaust line.
Use suitable filter equipment to separate toxic substances.
CAUTION
Danger of injury from bursting as a result of high pressure in the exhaust line
Faulty or short exhaust lines cause hazardous situations, e.g. exhaust pressure increase. There is a danger of bursting. Injuries caused by flying fragments, the escaping of high pressure, and damage to the unit cannot be excluded.
Open shut-off units immediately before or at the same time as starting the pump.
Take care that atmospheric pressure is always present on the exhaust side. Overpressure or un­derpressure are not permissible!
Check the function of the exhaust line on a regular basis.
Connecting the exhaust side
1.
Remove the protective cap from the exhaust connection.
2.
Choose a minimum exhaust line cross section equal to the nominal diameter of the exhaust con­nection.
3.
Route the piping downwards from the pump, to prevent condensate return.
4.
Clean the connection threads.
5.
For sealing, apply Loctite to the thread turns.
Recommendation: Loctite 245 or Loctite 577.
6.
Screw in the pipe.
7.
Support the piping to the pump so that no piping system forces act on the pump.
As an alternative to the G 2" pipe connection, an adapter flange DN 63 ISO-K / G 2" is available (see
chapter “Accessories”, page 55).
Avoiding condensation backflow:
1.
Install a condensate separator in the exhaust line if necessary.
2.
Use the lowest exhaust line point for the condensate drain.

5.4 Establishing mains connection

DANGER
Danger to life from electric shock
Contact with exposed and live elements generate an electric shock. Incorrect connection of the mains supply leads to the risk of live housing parts that can be touched. There is a risk to life.
Before the installation, check that the connection leads are voltage-free.
Make sure that electrical installations are only carried out by qualified electricians.
Provide adequate grounding for the device.
After connection work, carry out an earthed conductor check.
18/58
U3 U2
U4
U1
V3 V2
V4
V1
V W3 W2
W4
W1
L1
L2
L3
U3 U2
U4
U1
V3 V2
V4
V1
V
W3 W2
W4
W1
L1
L2
L3
U3 U2
U4
U1
V3 V2
V4
V1
V W3 W2
W4
W1
L1
L2
L3
Installation
CAUTION
Danger of injury from moving parts
After a power failure or a standstill as a result of overheating, the motor restarts automatically. There is a risk of injury to fingers and hands if they enter the operating range of rotating parts.
Safely disconnect motor from the mains.
Secure the motor against reactivation.
Dismantle the vacuum pump for inspection, away from the system if necessary.
NOTICE
Risk of damage from excess voltage!
Incorrect or excessive mains voltage will destroy the motor.
Always observe the motor rating plate specifications.
Route the mains connection in accordance with locally applicable provisions.
Always provide a suitable mains fuse to protect the motor and supply cable in the event of a fault.
Pfeiffer Vacuum recommends the circuit breaker type "K" with slow tripping characteristic.
NOTICE
Risk of damage from high starting torque!
The specific load behavior of the vacuum pump requires a direct start-up.
Always start the motor directly; do not use a star-delta starting circuit.
Depending on the pump type, different motor designs or mains voltages can be used:
Three phase motor without switch and mains cable with 3TF

5.4.1 Three phase motor with 12-pin terminal board

This motor can be connected in 3 different circuit configurations:
Observe the voltage on the motor rating plate in each case.
Double star circuit
Fig. 6: Multi-voltage motor (low voltage)
Delta connection
Fig. 7: Multi-voltage motor (medium voltage)
Star circuit
19/58
W2
U1
U2
V2
V
V1
W1
L1
L2
L3
V
L1
L2
L3
W2
U1
U2
V2
V1
W1
Installation
Fig. 8: Multi-voltage motor (high voltage)

5.4.2 Three phase motor with 6-pin terminal board

This motor can be connected in 2 different circuit configurations:
Observe the voltage on the motor rating plate in each case.
Delta connection
Fig. 9: Delta connection for low voltage
The 3 phases are connected in series and the connection points connected to the mains. The voltage per phase is equal to the mains voltage, while the mains current is √3 times the phase current. The del­ta connection is marked with the symbol. The voltage between the incoming mains supply lines is called mains voltage. The mains current is the current flowing in the incoming supply lines.
Star circuit
Fig. 10: Star circuit for high voltage
The ends of the 3 phases are connected in the star point. The terminal voltage is √3 times the phase voltage, the mains current is equal to the phase current. The star circuit is marked with the Y symbol.

5.4.3 Checking the direction of rotation

Equipment damage from incorrect direction of rotation
The direction of rotation must be checked on vacuum pumps with three phase motors. If the vacuum pump has an incorrect direction of rotation, damage may be caused to the pumping system after a short time.
Determine the intended direction of rotation based on the arrow sticker.
Fill in the operating fluid only after that.
Checking the direction of rotation
1.
Remove the protective cap from the exhaust flange.
2.
Switch the vacuum pump on briefly (2 to 3 seconds)
The motor and motor fan must rotate counter-clockwise (see the arrow on the fan cover).
3.
If the direction of rotation is incorrect, swap the two phases on the connection cable.
4.
Refill the operating fluid (see chapter “Refilling operating fluid”, page 22).
NOTICE
20/58

5.4.4 Motor protection

N
L1
M
3
L2 L3
F1 - F3
K1
10
11
AC 220 ... 240 V
Us
F4
U
V
W
S1
S2
k1
K1
H1
S3
2)
A1 A2 T1 T2 Y2Y1 24 21 22 14 1211
2)
2)
1)
1)
1)
T1...T3
3)
Pump motors equipped with PTC thermistor temperature sensors (3TF) in the stator windings can be connected to a PTC resistor tripping device for protection against overload. You may also use other pro­ven motor monitoring systems.
Tripping devices store the shutdown event and need to be manually switched back on again via the in­tegrated RESET button or via the external RESET S3. Switching on mains detected as automatic RE­SET.
Installation
 PTC thermistor temperature sensor (3TF)
Fig. 11: Connection example with PTC thermistor tripping unit
U
S
S
1
S
2
S
3
K1 Contactor
F1 – F4 Fuses
Control voltage T1 – T3 PTC resistor sensor
OFF button H1 Tripping indicator
ON button M Motor, 3-phase
RESET button
1)
2)
3)
For devices with two relay outputs only
For MSR type only
Only for order no.: P 4768 051 FQ
Connecting the PTC thermistor tripping unit
Design the connection to comply with the sense of rotation stated on the pump independently of the illustration in the circuit diagram.
Protection switches with slow tripping characteristics are suitable. The drive motor can have a power input greater than the rated current IN . In accordance with EN 60034-1, 1.5 times the rated current is
 Motor protection switch
permissible for a duration of 2 minutes.
Setting the motor protection switch
Obtain the setting value for the motor protection switch from the following tables.
21/58
Installation
Voltage [V] Frequency [Hz] Motor rating [kW] IN[A] I
190 – 200 220 – 230 380 – 400 208 220 230 440 460
Tbl. 6: Motor protection switch setting values for Hena 201 (from index "A")
Voltage [V] Frequency [Hz] Motor rating [kW] IN[A] I
190 – 200 220 – 230 380 – 400 208 220 230 440 460
400 690
50 5.5 24.2 204 50 5.5 20.9 176 50 5.5 12.1 102 60 6.6 25.6 213 60 6.6 24.2 201 60 6.6 24.2 201 60 6.6 12.1 101 60 6.6 12.1 101
50 7.5 32.6 297 50 7.5 28.2 257 50 7.5 16.3 149 60 9.2 33.0 314 60 9.2 32.2 306 60 9.2 32.0 304 60 9.2 16.1 153 60 9.2 16.0 152 50 8.3 16.7 122 50 8.3 9.6 71
max
max
[A]
[A]
Tbl. 7: Motor protection switch setting values for Hena 251 | Hena 301 (from index "A")
 Frequency inverter operation for vacuum pumps with 3-phase motor
Rotary vane pumps with variable rotation speed can be operated within a mains frequency range of 35 to 60 Hz. Start-up takes place via a ramp (run-up time: max. 30 s). Shutdown can take place immediate­ly.

5.5 Refilling operating fluid

Risk of damage due to the use of non-approved operating fluid
Product-specific performance data are not achieved. All liability and warranty claims against Pfeiffer Vacuum are also excluded.
Use approved operating fluid only.
Use other application-specific operating fluids only after consultation with Pfeiffer Vacuum.
The operating fluid type intended for the pump and the respective filling quantity are indicated on the rating plate. Only the operating fluid used during initial commissioning is permissible.
Approved operating fluid
P3 (standard operating fluid)
D1 for special applications (such as higher operating temperatures)
NOTICE
22/58
MAX MIN
1
3
4
2
Max. Min.
Fig. 12: Fill pump with operating fluid
1 Filling screw for operating fluid 3 Sight glass
2 O-ring 4 Drain screw for operating fluid
Installation
Refilling operating fluid
1.
Unscrew the operating fluid filler screw.
2.
Fill the operating fluid to the middle of the sight glass.
Quantity for initial filling and with cold pump: approx. 6.5 l operating fluid
3.
Screw in the operating fluid filler screw, watching out for the O-ring.
4.
Connect the intake flange or, where applicable, the intake port valve.
5.
Start the pump and operate it for approx. 5 mins.
6.
Switch the pump off and wait approx. 1 min. until the operating fluid has accumulated in the sepa­rator box.
7.
Check the fill level.
The correct fill level is between the Min/Max markings on the sight glass.
8.
Open the intake flange again.

5.6 Connecting accessories

Installation and operation of accessories
Pfeiffer Vacuum offers a series of special, compatible accessories for its products.
Information and ordering options for approved accessories can be found on­line.
The following accessories are not included in the scope of supply.

5.6.1 Operating fluid temperature monitoring (option)

Pfeiffer Vacuum recommends monitoring the operating fluid temperature using a temperature switch on the operating fluid separator (oil sump) and to use the signal for triggering an alarm. The change-over contact responds when the set switch-point is reached.
23/58
1
1
4
2
ϑ >
Installation
Fig. 13: Operating fluid temperature switch
1 Temperature switch
Order number PK 100 125 Classification Operating fluid temperature switch Current max. 2 A AC / 0.25 A DC Set point: Temperature 90 – 110 °C Set point: Temperature min. 90 °C Set point: Temperature max. 110 °C Switching voltage 230 V AC / V DC, ±10 % For pump Hena 200 – Hena 1600 | Hena 201 – Hena 1601 Monitored Features Operating fluid temperature for P3 : 90°–95° / D1 : 100° – 110° Protection category IP54 Contact Two-way contact
Tbl. 8: Technical data, operating fluid temperature switch
Setting the switch-point
Observe the operating fluid-specific temperature switch-points:
P3: 90 °C to 95 °C
D1: 100 °C
The setting is just above the operating temperature of the pump during normal operation.

5.6.2 Operating fluid level monitoring (option)

A level switch is used for the monitoring of the operating fluid level, which is mounted on the operating fluid separator (oil sump). When falling below the "Min" marking, a change-over contact opens whose signal serves to switch off the pump.
24/58
1
12
3
Fig. 14: Level switch
1 Level switch
Setting the signal evaluation
For the signal evaluation, select a hysteresis of at least 10 s in order to avoid a faulty alarm.
Order number PK 100 116 Classification Operating fluid level monitoring Current max. 1 A Switching power max. 26 VA / 20 W Switching voltage 90 – 230 V AC / 1 – 48 V DC For pump Hena 200 – Hena 1600 Monitored Features Operating fluid level Protection category IP65 Selection field Operating fluid level monitoring Contact Contact opens when level drops below min.
Installation
Tbl. 9: Technical data, operating fluid level switch

5.6.3 Connecting a heat exchanger (optional)

For applications with thermally unfavorable ambient conditions, Pfeiffer Vacuum recommends the use of an oil/water heat exchanger. This must be fitted at the factory and cannot be retrofitted later on.
Vacuum pump damage caused by different cooling characteristics
For applications with short pumping cycles or increased ambient temperature, the rotor may start ro­tating after switching off temporarily.
Always switch the water cooling and/or an auxiliary fan off together with the vacuum pump.
For checking the cooling water flow, use a solenoid valve that only opens when the vacuum pump is switched on.
NOTICE
25/58
2
1
Installation
Parameter Cooling water
Appearance
filtered
mechanically clear
visually clear
no turbidity
no sediment
free from grease and oil pH value 7 to 9 Carbonate hardness, max. 10 °dH
12.53 °e
17.8 °fH 178 ppm CaC0
3
Chloride content, max. 100 mg/l Sulfate content, max. 240 mg/l Carbonic acid content, max. not detectable Ammonia content, max. not detectable Electrical conductivity, max. 500 µS/cm Particle size, max. 150 µm Cooling water temperature See "Technical data" Cooling water consumption See "Technical data" Feed line overpressure, max. 6000 hPa
Tbl. 10: Requirements on the cooling water composition
Fig. 15: Making the cooling water connection
26/58
1 Cooling water inlet 2 Cooling water outlet
Making the cooling water connection
1.
Connect the cooling water lines according to the connection diagram:
Cooling water inlet,
Cooling water outlet.
2.
Ensure that the outlet is unpressurized.
3.
Open the supply and fill the cooling system until cooling water is emitted at the outlet.
4.
On-site, set a flow rate of 2 to 2.5 l/min.
5.
Interrupt the cooling water connection.
Installation
27/58
Operation

6 Operation

6.1 Commissioning

Before switching on
1.
Check the operating fluid in the sight glass.
2.
Compare the voltage and frequency specifications on the motor rating plate with the available mains voltage and frequency.
3.
Take appropriate steps (e.g. dust filter) to adequately protect the vacuum pump against taking in contamination.
4.
Check the operating fluid regularly or change it more frequently.
5.
Check the exhaust connection for free passage (max. permissible pressure: atmospheric pres­sure).
6.
Actuate the shut-off units so that the shut-off units open before or at the same time as the pump starts up.

6.2 Switching on

You can switch on the vacuum pump in every pressure range, between atmospheric pressure and ulti­mate pressure. The optimal operating condition of the vacuum pump is achieved in continuous opera­tion. Cyclical operation is possible, however do not exceed 10 cycles per hour. The operating phase should always be longer than the downtime.
When pumping down dry gases, no special precautions are required. In order to achieve the lowest possible ultimate pressures, the gas ballast valve should be closed.
WARNING
Risk of burns from ejected hot oil mist
During operation, hot pressurized oil mist escapes from the operating fluid separator.
Only operate the vacuum pump with the operating fluid filler screw securely fitted.
Open the locking screws on the separator only while the vacuum pump is switched off.
CAUTION
Danger of burns on hot surfaces
Depending on the operating and ambient conditions, the surface temperature of the vacuum pump can increase to above 70 °C.
Provide suitable touch protection.
NOTICE
Risk of damage to the drive from increased motor current consumption
At an intake pressure of approximately 300 hPa and under unfavorable operating conditions (such as for example exhaust side counterpressure), the power input exceeds the rated current.
Limit the maximum power input of 1.5 times the rated current to max. 2 minutes (in accordance with EN 60034-1).
Switching on the vacuum pump
1.
Switch the vacuum pump on at the mains switch.
2.
Close the vacuum flange and gas ballast valve.
3.
Allow the vacuum pump to warm up prior to process start, with the vacuum flange closed, for ap­proximately 30 minutes.
4.
Check the operating fluid level with the vacuum pump running and at operating temperature.
The fill level must be within the marks on the sight glass during operation.
Check the operating fluid fill level daily during continuous operation, and every time the pump is switched on.
The fluid can be refilled during operation in the final vacuum.
28/58

6.3 Operating the rotary vane pump with gas ballast

1
''I''
''0''
2
NOTICE
Risk of damage from condensation in vacuum pump
During operation without gas ballast, condensation may form as a result of the vapor compatibility of the vacuum pump being exceeded.
Pump condensable vapors only when the vacuum pump is warm and the gas ballast valve open.
Allow the vacuum pump to run on after process end for another 30 minutes with the gas ballast valve open.
This cleans the operating fluid and protects the vacuum pump against corrosion.
Behavior of process gases with condensable vapors
Operate the vacuum pump with gas ballast, i.e. with the gas ballast valve open.

6.3.1 Gas ballast valve – standard version

To avoid condensation of condensable vapors in the pump when pumping them down, air is fed into the working chamber periodically via the gas ballast valve at the start of the compression phase.
The gas ballast valve is closed when turned to the right to position "0" and open when turned to the left to position "I". Intermediate settings are not possible.
Operation
Fig. 16: Gas ballast valve
1 Gas ballast valve 2 Gas ballast filter

6.3.2 Gas ballast valve – retrofit kit with solenoid valve

With the retrofit kit, you can control the inlet of the gas ballast or flushing gas using a solenoid valve.
29/58
1
3
2
4
Operation
Fig. 17: Gas ballast valve – retrofit kit with solenoid valve
1 Gas ballast filter 3 Angle
2 Gas ballast valve, standard 4 Solenoid valve
Order number PK 100 145 -U Classification advanced Magnetic gas ballast valve 24 VDC Flange (in) G 1/2 Over pressure max. 500 hPa Electrical connection Cable screw connection Mains requirement: voltage (range) ± 10 % For pump Hena 201 – 301 Power supply voltage 24 VDC Power consumption 8 W Contact Normally closed
Tbl. 11: Technical data, solenoid valve
Retrofitting the solenoid valve
If ambient air is not possible due to the process, flushing gas can be introduced directly via the solenoid valve. In this case, connect the gas supply line directly to the solenoid valve (without gas ballast filter).
1.
Dismantle the gas ballast filter.
2.
Dismantle the installed gas ballast valve.
3.
For sealing, apply Loctite to the thread turns.
Pfeiffer Vacuum recommends: Loctite 245 or Loctite 577.
4.
Mount the solenoid valve with adapter to the angle, observing the flowing direction of the solenoid valve.
5.
Seal the thread with Teflon tape before remounting the gas ballast filter.
6.
Establish the electrical connection.

6.4 Refilling operating fluid

If the operating fluid has reached the minimum fill level, it must be refilled. The fluid can be refilled dur­ing operation in the final vacuum.
30/58
MAX MIN
1
3
4
2
Max. Min.
Fig. 18: Fill pump with operating fluid
1 Filling screw for operating fluid 3 Sight glass
2 O-ring 4 Drain screw for operating fluid
Operation
Refilling operating fluid
1.
Switch off the pump.
2.
Unscrew the operating fluid filler screw.
3.
Refill operating fluid up to the “max.” marking, with the pump at operating temperature.
4.
Screw in the operating fluid filler screw, watching out for the O-ring.

6.5 Switching off the vacuum pump

You can switch off the vacuum pump in any pressure range. Rotary vane vacuum pumps from the HenaLine series have an integrated non-return valve on the suc-
tion side. The valve closes automatically when the vacuum pump is switched off, preventing the return flow of gas and processing materials into the intake line.

6.5.1 Venting the vacuum chamber

Contamination from operating fluid backflow
After the vacuum pump is switched off, the connected vacuum system can become contaminated.
Vent the vacuum chamber, regardless of the chamber size, for 30 seconds.
Shut off the intake line with an additional shut-off valve, after the vacuum pump is switched off during longer venting operations.

6.5.2 Maintaining the vacuum in the chamber

NOTICE
NOTICE
Contamination from operating fluid backflow
After the vacuum pump is switched off, the connected vacuum system can become contaminated.
Because the safety valve of the vacuum pump is not suitable for longer-term sealing, install an additional shut-off valve in the intake line.
Shut off the intake line immediately after switching off the vacuum pump.
31/58
Maintenance

7 Maintenance

7.1 Maintenance instructions

WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub­stances causes environmental damage.
Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media.
Decontaminate affected parts before carrying out maintenance work.
Wear protective equipment.
CAUTION
Danger of injury from moving parts
After a power failure or a standstill as a result of overheating, the motor restarts automatically. There is a risk of injury to fingers and hands if they enter the operating range of rotating parts.
Safely disconnect motor from the mains.
Secure the motor against reactivation.
Dismantle the vacuum pump for inspection, away from the system if necessary.
NOTICE
Danger of property damage from improper maintenance
Unprofessional work on the vacuum pump will lead to damage for which Pfeiffer Vacuum accepts no liability.
We recommend taking advantage of our service training offering.
When ordering a replacement part, provide the data from the pump rating plate where possible.
The following section describes the tasks for cleaning and maintaining the vacuum pump. More ad­vanced works are described in the service instructions.
Shut down the vacuum pump and allow it to cool if necessary.
Vent the vacuum pump to atmospheric pressure via the intake side.
Safely disconnect the drive motor from the mains.
Secure the motor against switching back on.
For maintenance work, only dismantle the vacuum pump to the extend needed.
Dispose of used operating fluid according to applicable regulations in each case.
When using synthetic operating fluid, please observe the associated application instructions.
Only use alcohol or similar media to clean the pump parts.

7.2 Checklist for inspection and maintenance

Pfeiffer Vacuum recommends that all maintenance work is carried out by the manufacturer’s service de­partment. If the required intervals listed below are exceeded, or if maintenance work is carried out im­properly, no warranty or liability claims are accepted on the part of Pfeiffer Vacuum. This also applies if original spare parts are not used.
32/58
Maintenance
Action
described in docu­ment
Interval daily ≤ every six
Inspection
Visual and acoustic pump check
Check operating fluid fill level
Check operating fluid color (contam­ination)
Check saturation of the exhaust fil­ters
Check vacuum pump for leaks
Check accessories (in accordance with re­spective operating in­structions)
Maintenance level 1 – operating fluid replacement (see chapter “Changing the operating flu-
id”, page 34)
Clean the outside of the pump hous­ing
Clean motor fan cap
Changing the oper­ating fluid
Changing the oper­ating fluid filter
Dismantle and clean the filter of the gas ballast de­vice
Maintenance level 2 – maintenance (see chapter “Change the exhaust filter in the operating fluid
separator”, page 37)
Change the ex­haust filter
Clean the separa­tor box and replace the seals
Changing the oper­ating fluid filter
Maintenance level 3 – overhaul
OI:operating instructions, MI:maintenance instructions
Depending on the operating conditions, the required maintenance intervals can be shorter than the reference values specified in the table. Please consult Pfeiffer Vacuum if necessary.
You can find the corresponding spare parts in the chapter Spare parts packs .
Inspec­tion
OI
Maintenance
OI
≤ 1 years ≤ 4 years
months
Operating
Operating
Inspection
MI
Required material
1)
fluid Operating
fluid filter
fluid Maintenance
kit
1) Operating fluid is required for all maintenance activities, and must be ordered separately in each case.
33/58
Maintenance
Action
described in docu­ment
Interval daily ≤ every six
Dismantle and clean vacuum pump, replace seals and all wear parts:
Storage
Replace the radial shaft seal ring
Clean or replace the exhaust valves
Check the coupling and replace the sleeve
Vane
operating instructions, MI:maintenance instructions
OI:
Depending on the operating conditions, the required maintenance intervals can be shorter than the reference values specified in the table. Please consult Pfeiffer Vacuum if necessary.
You can find the corresponding spare parts in the chapter Spare parts packs .
Inspec­tion
OI
2)
Maintenance
OI
months
Inspection
I
M
≤ 1 years ≤ 4 years
Overhaul kit
as required
Required material
(without vane)
Operating fluid
Set of vanes
Tbl. 12: Maintenance intervals for HenaLine rotary vane vacuum pumps

7.3 Changing the operating fluid

Pfeiffer Vacuum recommends determining the precise service life of the oper­ating fluid in the first operating year.
The usable life may deviate from the reference value specified depending on ther­mic and chemical loads, and the accumulation of suspended particles and conden­sate in the operating fluid.
The service life of operating fluid depends on the vacuum pump's area of application.
Instructions for when operating fluid should be changed
The vacuum pump does not reach the specified ultimate pressure.
Operating fluid is perceptibly polluted, milky, or cloudy when viewed through the sight glass.
It is possible to detect thermal aging of the operating fluid from its color identification number (ap­plies to mineral oils only).
Safety data sheets
You can obtain the safety data sheets for operating fluids from Pfeiffer Vacuum on request, or from the Pfeiffer Vacuum Download Center.

7.3.1 Determine degree of aging of P3 operating fluid

You can determine the degree of aging of P3 operating fluid in clean processes using the color chart (in accordance with DIN 51578). If required, you can obtain the supplementary sheet (document number: PK 0219 BN) from the Pfeiffer Vacuum Download Center.
Determining the degree of aging
1.
Switch off the vacuum pump.
34/58
2) In event of noticeably high loss of operating fluid from operating fluid escaping between the pump housing and motor or fan, the radial shaft seal rings have to be replaced.
2.
Max
Min
4/(5)
1/(2)
3
Allow the vacuum pump to cool if needed.
3.
Vent the vacuum pump to atmospheric pressure via the intake side.
4.
Unscrew the operating fluid filler screw.
5.
Extract an operating fluid sample from the vacuum pump via the operating fluid filling port.
6.
Pour the sample into a test tube or similar container.
7.
Check the sample in bright light.
8.
If it is a reddish-brown color at the latest (corresponding with color identification number 5), change the operating fluid.

7.3.2 Draining the operating fluid

WARNING
Health hazard and risk of environmental damage from toxic contaminated operating fluid
Toxic process media can cause operating fluid contamination. When changing the operating fluid, there is a health hazard due to contact with poisonous substances. Illegal disposal of toxic substan­ces causes environmental damage.
Wear suitable personal protective equipment when handling these media.
Dispose of the operating fluid according to locally applicable regulations.
CAUTION
Scalding from hot operating fluid
Danger of burns when draining operating fluid in case of skin contact.
Wear protective equipment.
Use a suitable collection receptacle.
Maintenance
Fig. 19: Draining the operating fluid
1 Filling screw for operating fluid 4 Drain screw for operating fluid
2 O-ring 5 O-ring
3 Sight glass
Required tool
Open-end wrench, 27 mm
Open-end wrench, 38 mm
Draining the operating fluid
1.
Shut down the vacuum pump and allow it to cool if necessary.
2.
Vent the pump to atmospheric pressure via the intake side.
35/58
1
2
Maintenance
3.
Unscrew the operating fluid filler screw.
4.
Be careful with the O-ring.
5.
Place a collection receptacle below the drain screw.
6.
Unscrew the operating fluid drain screw and drain the operating fluid (while still warm if possible).
7.
Screw the filler and drain screws back in.
8.
Be careful with the O-rings.
9.
Switch on the pump with the vacuum flange open for max. 5 seconds.
10.
Tilt the pump slightly to completely empty it and drain the remaining operating fluid.
11.
In the event of heavy contamination, change the operating fluid several times (flushing).
12.
Fill with new operating fluid and check the fill level.

7.3.3 Rinsing and cleaning

If the inside of the pump is heavily contaminated with process residue, Pfeiffer Vacuum recommends carrying out multiple operating fluid changes to drain the dirt.
Changing the operating fluid for dirt drainage
1.
Operate the vacuum pump with the gas ballast open, until it is warm.
2.
Drain the operating fluid again.
3.
Check for contamination.
4.
Repeat the flushing operation if needed.
5.
With highly contaminated operating fluid, replace the operating fluid filter and the exhaust filter at the same time.
6.
Screw in the operating fluid drain screw, watching out for the O-ring.
7.
Refill the operating fluid (see chapter “Refilling operating fluid”, page 22).
8.
Screw in the operating fluid filler screw, watching out for the O-ring.

7.3.4 Changing the operating fluid filter

The filter must be changed each time when the operating fluid is changed, at least once every six months.
A filter housing which is cold on the outside when the pump is warm is an additional indicator for a satu­rated filter.
Fig. 20: Changing the operating fluid filter
1 Operating fluid filter 2 Separator box
36/58
Required tool
Strap wrench
Changing the operating fluid filter
The pump must be at its operating temperature before the filter change (leave to run for approx. 15 mi­nutes).
1.
Switch pump off.
2.
Drain the operating fluid (see chapter “Draining the operating fluid”, page 35).
3.
Unscrew the operating fluid filter with a strap wrench and take note of operating fluid escaping.
4.
8x
1
2
4
3
5
6
7
8
Apply oil to the sealing surface of the replacement filter.
5.
Screw the filter on finger-tight.

7.4 Change the exhaust filter in the operating fluid separator

WARNING
Poisoning hazard through contact with harmful substances
The exhaust filter may contain poisonous substances from the pumped media.
Decontaminate the affected parts before carrying out maintenance work.
Prevent health hazards or environmental pollution by taking respective safety precautions.
Dispose of the exhaust filter according to the applicable regulations.
Pfeiffer Vacuum recommends replacing the exhaust filter in the operating fluid separator annually, de­pending on the work process and the contamination incurred during the process.
Signs that indicate saturation of the exhaust filter:
higher power input of the motor.
increased emission of operating fluid mist at the gas outlet.
increased pressure in the operating fluid separator (pressure gage display in the red area). For the continuous monitoring of the Filter resistance, a pressure gage can be mounted instead of the operating fluid filler screw (see chapter “Accessories”, page 55).
Prerequisites
Pump has cooled down.
Consumable
Parts according to the maintenance kit
Required tool
Open-end wrench, 13 mm
Allen key, WAF 6 mm
Torque wrench
Maintenance
Fig. 21: Dismantling the exhaust filters
37/58
8x
2
1
1.1
3.1 3
4
5
6
8
7
9
Maintenance
1 Separator cover plate 5 Filter unit
2 Flat seal 6 Separator box
3 Fixing bolts 7 Clamping plate
4 Filter material 8 Exhaust filter
Dismantling the exhaust filters
The vacuum pump must be switched off and have cooled down.
1.
Vent the pump to atmospheric pressure via the intake side.
2.
Dismantle the separator cover plate observing the flat seal at the same time.
3.
Remove the fixing bolts inside the separator box.
4.
Remove the filter material.
5.
Loosen the nut from the threaded rod of the filter unit.
6.
Pull the filter unit completely out of the separator box.
7.
Dismantle the clamping plate.
8.
Replace the exhaust filters.
38/58
Fig. 22: Mounting the exhaust filters
1 Exhaust filter 5 Filter material
1.1 O-ring 6 Fixing bolts
2 Clamping plate 7 Flat seal
3 Filter unit 8 Separator cover plate
3.1 O-ring 9 Screws
4 Separator box
Mounting the exhaust filters
1.
Place the new O-ring on the front side of the exhaust filters.
2.
Mount the exhaust filters using the clamping plate.
The mounting direction is marked on the filter by an arrow.
1
2
3
4
The arrow must point upwards ().
3.
Place the new O-ring on the front side of the filter unit.
4.
Insert the pre-assembled filter unit into the separator box.
5.
Insert the new filter material into the housing groove of the separator box while fixing it with the fixing bolts.
6.
Mount the flat seal and the separator cover plate.
7.
Tighten the screws on the separator cover plate evenly.
torque: 21 Nm.
During operation, the new exhaust filter becomes saturated with oil. It is therefore normal for the operat­ing fluid fill level to drop slightly after the filters were changed.

7.5 Cleaning the intake strainer

With decreasing throughput, clean the intake strainer located in the inlet flange upper part.
Required tool
Socket key with insert, 13 mm
Maintenance
Fig. 23: Cleaning the intake strainer
1 Socket cap screws 3 Intake flange
2 Washers 4 Intake strainer
Cleaning the intake strainer
1.
Dismantle the operating fluid return line from the intake flange.
2.
Unscrew the cheesehead screws.
3.
Remove the intake flange and note the washers.
4.
Remove the intake strainer from the intake duct.
5.
Clean the intake strainer.
6.
Dismantle the part of the non-return valve resting in the intake duct.
7.
Clean and examine all parts for wear.

7.6 Cleaning the gas ballast filter

During operation, the gas ballast valve will be contaminated if dusty ambient air is aspirated. With increasing contamination, the air throughput of the gas ballast filter is reduced and there is a great-
er risk of condensation and corrosion within the pump.
39/58
1
2
3
Maintenance
Fig. 24: Cleaning the gas ballast valve
1 Gas ballast filter 3 Gas ballast line
2 Gas ballast valve
Removing and cleaning the gas ballast filter
1.
Dismantle the gas ballast filter.
2.
Clean the gas ballast filter using compressed air.
3.
Replace the filter in the event of strong contamination or damage.
4.
Check and clean the gas ballast line using compressed air if the line is clogged.

7.7 Changing operating fluid type

Changing the operating fluid type
The operating fluid type can be changed between mineral operating fluid – P3 – and synthetic operating fluid – D1 – only. It is not possible to change from either of these types to F4/F5 or vice versa.
For 2 required flushing operations and the final filling, 3 times the filling quantity of fresh operating fluid is required.
When filling, refilling, or changing operating fluid, always use the operating fluid type specified on the pump rating plate. Should process conditions change, you can convert to a different operating fluid.
Changing the operating fluid type
1.
Carry out 2 flushing operations with the new operating fluid as described above.
2.
Change the exhaust filters in the operating fluid separator (see chapter “Change the exhaust filter
in the operating fluid separator”, page 37).
3.
Change the operating fluid filter.
4.
Finally, fill the pump with a third operating fluid.
5.
Note the currently used operating fluid type at a suitable location on the pump; e.g. on the rating plate.
40/58

8 Decommissioning

8.1 Shutting down for longer periods

Before shutting down the pump, observe the following instructions to adequately protect the interior of the vacuum pump (pumping system) against corrosion:
1.
Switch off the vacuum pump, and
2.
Allow the vacuum pump to cool if needed.
3.
Remove the vacuum pump from the vacuum system if necessary.
4.
Change the operating fluid (see chapter “Changing the operating fluid”, page 34).
5.
Start the vacuum pump and bring it to operating temperature in order to wet the inside of the vac­uum pump with fresh operating fluid.
6.
Close the vacuum and exhaust flanges with the original screw caps.
7.
Store the vacuum pump only in dry, dust-free rooms, within the specified ambient conditions.
8.
Hermetically shrink-wrap the vacuum pump together with a drying agent in a plastic bag if the vac­uum pump is to be stored in areas with damp or aggressive atmospheres.
9.
For longer storage periods (> 2 years), Pfeiffer Vacuum recommends changing the operating fluid again prior to recommissioning.

8.2 Recommissioning

Decommissioning
Risk of damage to vacuum pump as a result of operating fluid aging
The operating fluid usability is limited (max. 2 years). Prior to recommissioning, following a shutdown of 2 years or more, carry out the following work.
Change the operating fluid.
Change the radial shaft seal rings and other elastomer parts if required.
Observe the maintenance instructions – consult Pfeiffer Vacuum if necessary.

8.3 Disposing of the vacuum pump

WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub­stances causes environmental damage.
Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media.
Decontaminate affected parts before carrying out maintenance work.
Wear protective equipment.
Dispose of all substances in a safe manner according to locally applicable regulations.
NOTICE
41/58
Malfunctions

9 Malfunctions

CAUTION
Danger of burns on hot surfaces
In the event of a fault, the surface temperature of the vacuum pump can increase to above 105°C.
Allow the vacuum pump to cool down before working on it.
Wear personal protective equipment if necessary.
Danger of property damage from improper maintenance
Unprofessional work on the vacuum pump will lead to damage for which Pfeiffer Vacuum accepts no liability.
We recommend taking advantage of our service training offering.
When ordering a replacement part, provide the data from the pump rating plate where possible.
Should malfunctions occur, you can find information about potential causes and how to fix them here:
Problem Possible causes Remedy
Vacuum pump will not start up
Vacuum pump switches off after a while after being started
NOTICE
No mains voltage or voltage does not corre­spond to the motor data
Pump temperature too low
Thermal protection switch has triggered
Pumping system conta­minated
Pumping system dam­aged
Motor faulty
Thermal protection switch of the motor has triggered
Mains fuse triggered due to overload (e.g. cold start)
Exhaust pressure too high
Check the mains voltage and mains fuse; check the motor switch if nec­essary.
Check mains voltage and mains fuse; check motor switch.
Identify and eliminate the cause; al­low vacuum pump to cool if neces­sary.
Clean the vacuum pump; contact
Pfeiffer Vacuum Service if necessa-
ry.
Clean and maintain the vacuum pump; contact Pfeiffer Vac-
uum Service if necessary.
Replace the motor.
Identify and eliminate the cause of the overheating; allow motor to cool if necessary.
Bring vacuum pump to permissible ambient temperature range.
Check exhaust line outlet opening and exhaust side accessories.
42/58
Problem Possible causes Remedy
Vacuum pump does not reach the specified ulti­mate pressure
Pumping speed of vacuum pump too low
Loss of operating fluid
Unusual noises during op­eration
Measurement result distorted
Vacuum pump or con­nected accessory con­taminated
Operating fluid conta­minated
Operating fluid level too low
Leak in system
Vacuum pump is dam­aged
The intake line is not suitably dimensioned
Exhaust pressure too high
Operating fluid separa­tor leaking
Radial shaft seal rings (RSSR) leaking
Operational loss of op­erating fluid
Noise reduction is con­taminated
Pumping system is contaminated or dam­aged
Motor bearing is faulty
Check measurement instrument, check ultimate pressure with system disconnected.
Clean the vacuum pump and check the components for pollution.
Operate the vacuum pump for an extended period of time with gas ballast valve open, or change the operating fluid.
Refilling operating fluid
Locate and eliminate the leak.
Contact Pfeiffer Vacuum Service.
Make sure that connections are short and cross sections adequately dimensioned.
Check exhaust line outlet opening and exhaust side accessories.
Check leak tightness and replace the seal if necessary.
1.
Check and replace the RSSR.
2.
Check and also replace the associ­ated bushing if necessary.
Check the oil return.
Clean the noise reduction or replace it.
Clean and maintain the vacuum pump; contact Pfeiffer Vac-
uum Service if necessary.
Replace motor; contact Pfeiffer Vac-
uum Service if necessary.
Malfunctions
Tbl. 13: Troubleshooting for HenaLine rotary vane vacuum pumps
43/58
ANFORDERUNG SERVICE
ERKLÄRUNG KONTAMINIERUNG
Service solutions from Pfeiffer Vacuum

10 Service solutions from Pfeiffer Vacuum

We offer first class service
Long vacuum component service life, coupled with low downtimes, are clear expectations that you have of us. We satisfy your needs with capable products and outstanding service.
We are consistently striving to perfect our core competence, service for vacuum components. And our service is far from over once you’ve purchased a product from Pfeiffer Vacuum. It often enough really just begins then. In proven Pfeiffer Vacuum quality, of course.
Our professional sales engineers and service technicians stand ready to provide hands-on support to you worldwide. Pfeiffer Vacuum offers a complete portfolio of service offerings, ranging from genuine
spare parts right through to service agreements.
Take advantage of Pfeiffer Vacuum Service
Whether for preventative on-site service from our field service, fast replacement with as-new replace­ment products or repair in a Service Center close to you; you have various options for upholding your equipment availability. Detailed information and addresses can be found on our website in the Pfeiff-
er Vacuum Service section.
Advice on the optimum solution is available from your Pfeiffer Vacuum contact partner.
For quick and smooth handling of the service process, we recommend the following steps:
1. Download the current form templates. ─ Declaration of Service Request
Service RequestDeclaration of Contamination
a. Dismantle all accessories and keep them (all external mounted parts as valve, inlet
screen, etc.).
b. Drain the operating fluid/lubricant as necessary.
c. Drain the cooling medium as necessary.
2. Fill out the service request and the declaration of contamination.
3. Send the forms via email, fax or post to your local Service Center.
4. You will receive a response from Pfeiffer Vacuum.
Sending of contaminated products
No units will be accepted if they are contaminated with micro-biological, explosive or radioactive sub­stances. If products are contaminated or if the declaration of contamination is missing, Pfeiffer Vacuum will contact the customer before starting maintenance. In addition, depending on the product and the level of contamination additional decontamination costs may be required.
44/58
ERKLÄRUNG KONTAMINIERUNG
Service solutions from Pfeiffer Vacuum
5. Prepare the product for transport in accordance with the details in the dec­laration of contamination.
a) Neutralize the product with nitrogen or dry air.
b) Close all openings with airtight blank flanges.
c) Seal the product in appropriate protective film.
d) Only pack the product in suitable, stable transport containers.
e) Observe the applicable transport conditions.
6 Affix the declaration of contamination to the outside of the packaging.
7 Then send your product to your local Service Center.
8 You will receive a confirmation message/a quotation from Pfeiffer Vacuum.
For all service orders, our General Terms and Conditions of Sales and Supply and General Terms and
Conditions of Repair and Maintenance apply to vacuum equipment and components.
45/58
Spare parts

11 Spare parts

11.1 Spare parts packs

Observe the following instructions when ordering spare parts:
Spare parts ordering
Where possible, have the pump part number to hand, along with other details from the rating plate if necessary.
Only use original spare parts.
Spare parts pack Order no.
Set of seals PK E60 022 -T Maintenance kit PK E61 022 -T Overhaul kit
without vane Set of vanes PK E68 024 -T Coupling set PK E63 000 -T Operating fluid filter P 0920 591 E Gas ballast filter PK 100 171 -U
PK E62 024 -T
Tbl. 14: Hena 201
Spare parts pack Order no.
Maintenance kit PK E61 022 -T Set of seals PK E60 023 -T Overhaul kit
without vane Set of vanes PK E68 025 -T Coupling set PK E63 000 -T Operating fluid filter P 0920 591 E Gas ballast filter PK 100 171 -U
Tbl. 15: Hena 251 | Hena 301 | Hena 301 S

11.1.1 Operating fluids – maintenance level 1

Select the respective operating fluid type and quantity under consideration of the details on the rating plate.
Description order number
P3, mineral oil, 1 l PK 001 106 -T P3, mineral oil, 5 l PK 001 107 -T P3, mineral oil, 20 l PK 001 108 -T D1, synthetic diester based oil, 1 l PK 005 875 -T D1, synthetic diester based oil, 5 l PK 005 876 -T
PK E62 025 -T
46/58
Tbl. 16: Consumables

11.1.2 Maintenance kit – maintenance level 2

The maintenance kit contains the filler and drain screw seals for changing the operating fluid, the filter and the seals of the separator cover plate for cleaning the oil chamber:
Exhaust filter
O-rings
Operating fluid filter
Filter material

11.1.3 Set of seals

The set of seals contains:
all seals from the main- and sub-assemblies,
the radial shaft seal ring (RSSR).

11.1.4 Overhaul kit and set of seals

The overhaul kit contains all wearing parts of the vacuum pump (no vane) which must be replaced after the vacuum pump is dismantled and cleaned. It consists of:
set of seals with all seals relevant for the function,
the bearings,
the intake strainer,
the operating fluid and exhaust filters,
the wearing parts of the valves
and the coupling sleeve.
Spare parts

11.1.5 Set of vanes

The set of vanes contains:
the vane

11.1.6 Coupling set

The coupling set contains:
the two coupling halves,
and the coupling sleeve.
47/58
Technical data and dimensions

12 Technical data and dimensions

12.1 General

Basis for the technical data of Pfeiffer Vacuum rotary vane pumps:
Specifications according to PNEUROP committee PN5
ISO 21360; 2007: “Vacuum technology - Standard methods for measuring vacuum-pump perform­ance - General description”
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1 bar 1000 1 Pa 0.01 hPa 1 kPa 10 0.01 1000 10 1 7.5 Torr | mm Hg 1.33
-3
1 · 10
-5
1 · 10
-3
1 · 10
1.33 · 10
-3
1 Pa = 1 N/m
100 1 0.1 0.75
1 · 10 1 0.01 100 1 0.1 0.75
133.32 1.33 0.133 1
5
1000 100 750
1 · 10
2
-3
7.5 · 10
-3
Tbl. 17: Conversion table: Pressure units
mbar l/s 1 0.1 59.2 0.75 0.987 Pa m3/s sccm Torr l/s 1.33 0.133 78.9 1 1.32 atm cm3/s
Tbl. 18: Conversion table: Units for gas throughput

12.2 Technical data

Classification Hena 201 Hena 251 Order number PK D03 400 PK D03 432 Flange (in) Female thread G 2" Female thread G 2" Flange (out) Female thread G 2" Female thread G 2" Nominal pumping speed at 50 Hz 200 m³/h 250 m³/h Nominal pumping speed at 60 Hz 240 m³/h 300 m³/h Ultimate pressure with gas ballast Ultimate pressure without gas bal-
last Leak rate safety valve Intake pressure at continuous opera-
tion max. Exhaust pressure, max. Atmospheric pressure Atmospheric pressure Exhaust pressure, min. Atmospheric pressure Atmospheric pressure Water vapor capacity 50 Hz 4000 g/h 4500 g/h
mbar l/s
Pa m3/s
sccm Tor l/s
atm cm3/s
10 1 592 7.5 9.87
1.69 · 10
-2
1.69 · 10
-3
1
1.27 · 10
-2
1.67 · 10
1.01 0.101 59.8 0.76 1
≤ 7 · 10-1 hPa ≤ 7 · 10-1 hPa ≤ 3 · 10-1 hPa ≤ 3 · 10-1 hPa
≤ 8 · 10-3 Pa m³/s ≤ 8 · 10-3 Pa m³/s 800 hPa 800 hPa
-2
48/58
Technical data and dimensions
Water vapor capacity 60 Hz 4600 g/h 5200 g/h Water vapor tolerance at 50 Hz 40 hPa 40 hPa Water vapor tolerance at 60 Hz 40 hPa 40 hPa Emission sound pressure level with-
out gas ballast at 50 Hz Emission sound pressure level with-
out gas ballast at 60 Hz Cooling method, standard Air Air Operating fluid filling 6.5 l 6.5 l Ambient temperature 12 – 40 °C 12 – 40 °C Shipping and storage temperature -25 °C – 55 °C -25 °C – 55 °C Motor version 3-ph motor 3-ph motor Mains requirement: voltage 50 Hz 190–200/220–230/380–400 V 190–200/220–230/380–400 V Mains requirement: voltage 60 Hz 208/220/230/440/460 V 208/220/230/440/460 V Mains requirement: voltage (range) ±5 % ±5 % Rated power 50 Hz 5.5 kW 7.5 kW Rated power 60 Hz 6.6 kW 9.2 kW Rotation speed at 50 Hz 1500 rpm 1500 rpm Rotation speed at 60 Hz 1800 rpm 1800 rpm Protection category IP55 IP55 Motor protection 3TF 3TF Switch included No No Mains cable included No No Weight 182 kg 227 kg
≤ 72 dB(A) ≤ 72 dB(A)
≤ 74 dB(A) ≤ 74 dB(A)
Tbl. 19: Hena 201 | Hena 251
Classification Hena 301 Hena 301 S
Order number PK D03 450 PK D03 455 Flange (in) Female thread G 2" Female thread G 2" Flange (out) Female thread G 2" Female thread G 2" Nominal pumping speed at 50 Hz 300 m³/h 300 m³/h Nominal pumping speed at 60 Hz 360 m³/h 360 m³/h Ultimate pressure with gas ballast Ultimate pressure without gas bal-
last Leak rate safety valve Intake pressure at continuous opera-
tion max. Exhaust pressure, max. Atmospheric pressure Atmospheric pressure Exhaust pressure, min. Atmospheric pressure Atmospheric pressure Water vapor capacity 50 Hz 5000 g/h 5000 g/h Water vapor capacity 60 Hz 5800 g/h 5800 g/h Water vapor tolerance at 50 Hz 40 hPa 40 hPa Water vapor tolerance at 60 Hz 40 hPa 40 hPa
≤ 7 · 10-1 hPa ≤ 7 · 10-1 hPa ≤ 3 · 10-1 hPa ≤ 3 · 10-1 hPa
≤ 8 · 10-3 Pa m³/s ≤ 8 · 10-3 Pa m³/s – 100 hPa
49/58
Technical data and dimensions
Classification Hena 301 Hena 301 S
Emission sound pressure level with­out gas ballast at 50 Hz
Emission sound pressure level with­out gas ballast at 60 Hz
Cooling method, standard Air Air Operating fluid filling 6.5 l 6.5 l Ambient temperature 12 – 40 °C 12 – 40 °C Shipping and storage temperature -25 °C – 55 °C -25 °C – 55 °C Motor version 3-ph motor 3-ph motor Mains requirement: voltage 50 Hz 190–200/220–230/380–400 V 190–200/220–230/380–400 V Mains requirement: voltage 60 Hz 208/220/230/440/460 V 208/220/230/440/460 V Mains requirement: voltage (range) ±5 % ±5 % Rated power 50 Hz 7.5 kW 7.5 kW Rated power 60 Hz 9.2 kW 9.2 kW Rotation speed at 50 Hz 1500 rpm 1500 rpm Rotation speed at 60 Hz 1800 rpm 1800 rpm Protection category IP55 IP55 Motor protection 3TF 3TF Gas ballast Yes Switch included No No Mains cable included No No Weight 227 kg 222 kg
≤ 74 dB(A) ≤ 74 dB(A)
≤ 76 dB(A) ≤ 76 dB(A)
Tbl. 20: Hena 301 | Hena 301 S
50/58

12.3 Dimensions

99
15
(305 )
564
305
± 2
±1.5
315
4 x M10
± 2
± 1.5
± 1.5
± 1.5
± 1.5
± 2
972
253
Ø 50
4
1
0
1
8
0
G 2'' DIN ISO 228-1
G2 DIN ISO 228-1
133
256.5
263
390
263
40
4 x M10
4 x
Ø 50
418
± 2
Technical data and dimensions
Fig. 25: Hena 201 | 3 phase motor IE3
51/58
315
49
15
(351 )
564
180
410
303
418
± 2
± 2
± 1.5
± 1.5
± 2
390
298
351
± 1.5
364
± 2
± 1.5
1072
4 x M10
4 x
Ø 50
G 2'' DIN ISO 228-1
G 2'' DIN ISO 228-1
128
257
Technical data and dimensions
Fig. 26: Hena 251 | 3 phase motor IE3
52/58
315
49
15
(350 )
564
180
410
303
418
± 2
± 2
± 2
± 1.5
± 1.5
390
298
350
± 1.5
365
± 2
± 1.5
1073
4 x M10
4 x
Ø 50
G 2'' DIN ISO 228-1
G 2'' DIN ISO 228-1
128
256
Technical data and dimensions
Fig. 27: Hena 301 | 3 phase motor IE3
53/58
± 1.5
± 1.5
± 1.5
± 2
± 1.5
± 2
± 2
± 2
4 x M10
4 x
Ø 50
G 2'' DIN ISO 228-1
G 2'' DIN ISO 228-1
3
0
5
4
0
0
4
1
0
1033
303
390
210
3
5
0
256
1
7
0
350( )
15
48
105
561
Technical data and dimensions
Fig. 28: Hena 301 S | 3 phase motor IE3
54/58

13 Accessories

Description order number
Operating fluid level monitoring PK 100 116 Operating fluid temperature switch PK 100 125 KAS 63, condensate separator PK Z10 010 FAK 063, activated carbon filter PK Z30 010 SAS 63, DN 63 ISO-K PK Z60 511 Flange DN 100 ISO-K/G 2" PK 100 058 Flange DN 63 ISO-K/G 2" PK 100 059 Pressure gauge 0–1 bar PK 100 127 Magnetic gas ballast valve 24 VDC PK 100 145 -U PTC-resistor tripping device P 4768 052 FQ
Accessories
View the range of accessories for Pfeiffer Vacuum rotary vane pumps online under
Accessories.
Tbl. 21: Hena 201 | Hena 251 | Hena 301 | Hena 301 S
Description order number
P3, mineral oil, 1 l PK 001 106 -T P3, mineral oil, 5 l PK 001 107 -T P3, mineral oil, 20 l PK 001 108 -T D1, synthetic diester based oil, 1 l PK 005 875 -T D1, synthetic diester based oil, 5 l PK 005 876 -T
Tbl. 22: Consumables
55/58

Declaration of conformity

We hereby declare that the product cited below satisfies all relevant provisions of the follow­ing EU Directives:
Machinery 2006/42/EC (Annex II, no. 1 A)
Electromagnetic compatibility 2014/30/EU
Restriction of the use of certain hazardous substances 2011/65/EU
The authorized representative for the compilation of technical documents is Mr. Sebas­tian Oberbeck, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar, Germany.
HenaLine
Hena 201
Hena 251
Hena 301
Hena 301 S
Harmonized standards and applied national standards and specifications:
EN ISO 12100: 2010 EN 60204-1: 2006 EN ISO 13857: 2008 EN 61000-6-2: 2005 EN 1012-1: 2010
DIN EN 1012-2: 2011-12 DIN EN ISO 2151 : 2: 2008 EN 13849-1: 2015
EN 61000-6-4: 2007 + A1: 2011
Signature:
(Dr. Ulrich von Hülsen) President
Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany
Asslar, 01/26/2018
57/58
ed. B - Date 1803 - P/N:PD0087BEN
*PD0087*
Loading...