Page 1
Daedal
Manual No. 100-5326-01
Rev. 4
MX80L Precision Grade
MX80L Standard Grade
Product Manual
Effective: May 21, 2007
Supersedes: July 1, 2006
Electromechanical
Positioning Systems
Automation
Page 2
MX80L Series Product Manual
,
Important User Information
FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED
HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE.
This document and other information from Parker Hannifin Corporation, its subsidiaries, and authorized distributors provide
product and/or systems options for further investigation by users having technical expertise. It is important that you
analyze all aspects of your application and review the information concerning the product or system in the current product
catalog. Due to the variety of operating conditions and applications for these product systems, the user, through its own
analysis and testing, is solely responsible for making the final selection of the products and systems and assuming that all
performance, safety, and warning requirements of the application are met.
The products described herein, including without limitation, product features, specifications, designs, availability and
pricing, are subject to change by Parker Hannifin Corporation and its subsidiaries at any time without notice.
The information in the product manual, including any apparatus, methods, techniques, and concepts
described herein, are the proprietary property of Parker Hannifin Corporation, Daedal Division or its
licensors, and may not be copied, disclosed, or used for any purpose not expressly authorized by the
owner thereof.
Since Parker Hannifin Corporation, Daedal Division constantly strives to improve all of its products, we
reserve the right to change this product manual and equipment mentioned therein at any time without
notice.
WARNING
For assistance contact:
Parker Hannifin Corporation
Daedal Division
1140 Sandy Hill Road
Irwin, PA 15642
Phone: 724/861-8200
800/245-6903
Fax: 724/861-3330
E-mail: ddlcat@parker.com
Web site: www.daedalpositioning.com
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Parker Hannifin Corporation
Daedal Division
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Irwin
Page 3
MX80L Series Product Manual
,
MX80L Series Product Manual
Table of Contents
IMPORTANT USER INFORMATION............................................................................................................................................ 2
REVISION NOTES........................................................................................................................................................................ 4
CHAPTER 1 - INTRODUCTION ...................................................................................................................................................5
PRODUCT DESCRIPTION ............................................................................................................................................................... 5
UNPACKING ................................................................................................................................................................................. 5
RETURN INFORMATION.................................................................................................................................................................. 6
REPAIR INFORMATION................................................................................................................................................................... 6
WARNINGS AND PRECAUTIONS ...................................................................................................................................................... 6
SPECIFICATION CONDITIONS ......................................................................................................................................................... 7
ASSEMBLY DIAGRAM .................................................................................................................................................................... 8
CHAPTER 2 – MX80L SERIES TABLE SPECIFICATIONS ........................................................................................................ 9
ORDER NUMBER NOMENCLATURE ................................................................................................................................................. 9
DIMENSIONAL DRAWINGS............................................................................................................................................................ 10
GENERAL TABLE SPECIFICATIONS................................................................................................................................................ 13
MX80L SERIES TECHNICAL DATA................................................................................................................................................ 15
LINEAR MOTION GUIDE BEARING LIFE/LOAD COMPUTATION ........................................................................................................... 20
MX80L SERIES TECHNICAL DATA................................................................................................................................................ 21
ELECTRICAL SPECIFICATIONS ...................................................................................................................................................... 23
CLEAN ROOM PREPARATION ....................................................................................................................................................... 24
ENCODER SPECIFICATIONS ......................................................................................................................................................... 25
HALL EFFECT SPECIFICATION ...................................................................................................................................................... 25
LIMIT AND HOME SENSOR SPECIFICATIONS................................................................................................................................... 25
LOW ESD SPECIFICATIONS......................................................................................................................................................... 25
VIX DRIVE SPECIFICATIONS ........................................................................................................................................................ 25
CABLING AND WIRING DIAGRAMS................................................................................................................................................. 26
CHAPTER 3 - HOW TO USE THE MX80L................................................................................................................................. 27
MOUNTING ORIENTATIONS .......................................................................................................................................................... 27
MOUNTING SURFACE REQUIREMENTS .......................................................................................................................................... 27
LOAD MOUNTING REQUIREMENTS................................................................................................................................................ 28
LIMIT AND HOME SENSOR OPERATION........................................................................................................................................... 29
ADJUSTING THE LIMIT FLAG PROCEDURE...................................................................................................................................... 30
SETTING HOME SENSOR............................................................................................................................................................. 31
Z CHANNEL POSITION REFERENCE .............................................................................................................................................. 31
GROUNDING / SHIELDING ............................................................................................................................................................ 32
CABLING ................................................................................................................................................................................... 32
CABLE MANAGEMENT ................................................................................................................................................................. 32
PNEUMATIC COUNTERBALANCE ................................................................................................................................................... 33
CHAPTER 4 - PERFORMANCE................................................................................................................................................. 34
ACCELERATION LIMITS................................................................................................................................................................ 34
SPEED LIMITS ............................................................................................................................................................................ 34
THERMAL EFFECTS ON ACCURACY............................................................................................................................................... 35
THERMAL EFFECTS ON REPEATABILITY......................................................................................................................................... 35
CAUSES OF TEMPERATURE INCREASES ........................................................................................................................................ 36
COMPENSATING FOR THERMAL EFFECTS ...................................................................................................................................... 36
CHAPTER 5 - CONNECTING TO THE VIX AMPLIFIER............................................................................................................ 37
CHAPTER 6 - MAINTENANCE AND LUBRICATION................................................................................................................ 38
CROSS ROLLER BEARING LUBRICATION ....................................................................................................................................... 38
APPENDIX A - INTERNAL PROTECTION.................................................................................................................................39
INDEX.........................................................................................................................................................................................40
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Parker Hannifin Corporation
Daedal Division
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Irwin
Page 4
MX80L Series Product Manual Revision Notes
,
Revision Notes
Revision 1
Original Document
Revision 2 – 8/25/03
General
Made numerous spelling corrections
Added precision grade tables
Page 9 – Modified configurable to include precision grade tables
Page 13 – Modified specifications to include precision grade tables
Page 25 – Modified Low ESD description to include precision grade tables
Revision 3
Changed wiring block extension dimension on page 10
Page 29, 30, & 31, Changed Limits/Home from optical sensors to magnetic sensors
Revision 4
Removed Steps 5a & 5b from page 30 (Steps 5a & 5b were for optical Limits/Home)
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Parker Hannifin Corporation
Daedal Division
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Irwin
Page 5
MX80L Series Product Manual Chapter 1 - Introduction
,
Chapter 1 - Introduction
Product Description
MX80L Positioner
Although the MX80L is small in size and weight, it is large on performance and reliability. All key
components are integral to the unit - residing within the body of the stage to provide a clean looking,
reliable, unobstructed package. At the heart of the MX80L is an innovative non-contact linear servo
motor (patent pending). This direct drive motor has been optimized for force, speed, and acceleration, to
deliver outstanding performance and response. A high precision non-contact linear encoder provides
sub-micron resolution and repeatability. Selectable resolutions range from 10 nanometers to 5 microns.
Precision ground “zero cage creep” crossed roller bearing sets provide extremely smooth - precise linear
translation. Travel limit and home sensors are conveniently designed into the unit for easy adjustment
over the entire travel of the stage. Although there are no moving cables, 1 or 3 meters of hi-flex cabling
depending on configuration option is included and wired directly into the units. This hi-flex cabling
addresses cable flexing concerns associated with the second or third axis in multi-axis system.
Unpacking
Unpacking
Carefully remove the positioner from the shipping container and inspect the unit for any evidence of
shipping damage. Report any damage immediately to your local authorized distributor. Please save the
shipping container for damage inspection or future transportation.
Incorrect handling of the positioner may adversely affect the performance of the unit in its application.
Please observe the following guidelines for handling and mounting of your new positioner.
• DO NOT allow the positioner to drop onto the mounting surface. Dropping the positioner can
generate impact loads that may result in flat spots on bearing surfaces or misalignment of drive
components.
• DO NOT drill holes into the positioner. Drilling holes into the positioner can generate particles and
machining forces that may effect the operation of the positioner. Daedal will drill holes if
necessary; contact your local authorized distributor.
• DO NOT subject the unit to impact loads such as hammering, riveting, etc. Impacts loads
generated by hammering or riveting may result in flat spots on bearing surfaces or misalignment of
drive components.
• DO NOT lift the positioner by cables or cable management system. Lifting positioner by cables or
cable management system may effect electrical connections and/or cable management assembly.
The unit should be lifted by the base structure only.
• DO NOT expose positioner to mist, spray or submersion in liquids.
• DO NOT disassemble positioner. Unauthorized adjustments may alter the positioner’s
specifications and void the product warranty.
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Parker Hannifin Corporation
Daedal Division
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Irwin
Page 6
MX80L Series Product Manual Chapter 1 - Introduction
,
Return Information
Returns
All returns must reference a “Return Material Authorization” (RMA) number. Please call your local
authorized distributor or Daedal Customer Service Department at 800-245-6903 to obtain a “RMA”
number. See Daedal Catalog #8083/USA, for additional information on returns and warranty.
Repair Information
Out-of-Warranty Repair
Our Customer Service Department repairs Out-of-Warranty products. All returns must reference a “RMA”
number. Please call your local authorized distributor or Daedal Customer Service Department at 800245-6903 to obtain a “RMA” number. You will be notified of any cost prior to making the repair.
Warnings and Precautions
Hot Surfaces
DO NOT touch linear motor coils located in the base of the MX80, (see page 7, Assembly Diagram, for
component location), after high duty operation. Motor temperature may approach 125 C. The unit itself
may become warm or hot to the touch.
Electrical Shock
DO NOT take apart or touch any internal components of the positioner while unit is plugged into an
electrical outlet. SHUT OFF power before replacing components to avoid electrical shock.
High Magnetic Field
Unit may be HAZARDOUS to people with Pace Makers or any other 'magnetically-sensitive' medical
devices. Unit may have an effect on 'magnetically-sensitive' applications.
Ferrous Materials
The positioner's open design WILL ATTRACT ferrous materials. The customer must take additional
precautions in these applications to keep positioner free of these highly magnetic particles.
Vertical Operation
The MX80L is NOT recommended for vertical operation unless it is configured with the pneumatic assist
option. If the pneumatic assist is not used, the carriage and customer's load will fall in power loss
situations potentially causing product or load damage or personal injury.
General Safety
Because linear motors can accelerate up to 5 g's, and sometimes positioners move without warning,
keep all personnel away from dynamic travel range of positioner.
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Parker Hannifin Corporation
Daedal Division
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Page 7
MX80L Series Product Manual Chapter 1 - Introduction
,
Specification Conditions
Specifications Are Temperature Dependent
Catalog specifications are obtained and measured at 20 Degrees C. Specifications at any other
temperature may deviate from catalog specifications. Minimum to maximum continuous operating
temperature range (with NO guarantee of any specification except motion) of a standard unit before
failure is 5 - 40 degrees C.
Specifications Are Mounting Surface Dependent
Catalog specifications are obtained and measured when the positioner is fully supported, bolted
down, and is mounted to a work surface that has a maximum flatness error of:
• Standard Grade: 0.003mm/300mm (0.0001”/ft)
• Precision Grade: 0.001mm/300mm (0.00004”/ft)
Table will operate with work surface 0.100mm/300mm but performance specifications will be
significantly effected.
Specifications Are Point of Measurement Dependent
Catalog specifications and specifications in this manual are measured from the center of the carriage,
38 mm above the carriage surface. All measurements taken at any other location may deviate from
these values.
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Parker Hannifin Corporation
Daedal Division
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Page 8
MX80L Series Product Manual Chapter 1 - Introduction
,
Assembly Diagram
Anti Cage Creep
Cross Roller Bearings
Limit Flag Bracket
Left side of stage w.r.t. cables
CARRIAGE
+X
Travel
Encoder
Read
Head
Linear Motor
Coils
BASE
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Daedal Division
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Page 9
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
Chapter 2 – MX80L Series Table Specifications
Order Number Nomenclature
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Daedal Division
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Irwin
Page 10
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
Dimensional Drawings
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
02
,
Z-axis configuration with counter balance
25 and 50mm travel
MX80L-T01 OR T02
P/N 002-2223-01
CYLINDER ASSY.
5.6 [0.22]
13.1 [0.51]
P/N 100-9822-01
QTY.(2)
16.0 [0.63]
125.0 [4.92]
100mm travel
5.6 [0.22]
5.6 [0.22]
002-2223-02
CYLINDER ASSY.
002-2223-02
Cylinder Ass'y.
45.0 [1.77]
Z-AXIS SHOWN AT MID-TRAVEL POSITION
MX80L-T03
16.0 [0.63]
16.0 [0.63]
2.1 [0.08]
2.1 [0.08]
50.0 [1.97]
Z-Axis - shown at Mid-travel
MX80L-T03
220.0 [8.66]
P/N 100-9822Qty.(2)
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Page 12
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
P
C
,
150mm travel
MX80L-T04
/N 002-2223-03
YLINDER ASSY
5.7 [0.22]
16.0 [0.63]
285.0 [11.22]
P/N 100-9822-02
QTY.(2)
75.0 [2.95]
Z-Axis at Mid-travel
7.1 [0.28]
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Parker Hannifin Corporation
Daedal Division
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Irwin
Page 13
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
y
y
y
,
General Table Specifications
Specifications
Normal Load Capacity
25mm 50mm 100mm 150mm
8 kg 8 kg 8 kg 8 kg
Maximum Acceleration
Precision Grade 4G 4G 4G 3G
Standard Grade 5G 5G 5G 4G
Maximum Velocit
5.0 um resolution 1100 mm/sec 1500 mm/sec 2000 mm/sec 2000 mm/sec
1.0 um resolution 1100 mm/sec 1500 mm/sec 2000 mm/sec 2000 mm/sec
0.5 um resolution 1100 mm/sec 1500 mm/sec 1500 mm/sec 1500 mm/sec
0.1 um resolution 300 mm/sec 300 mm/sec 300 mm/sec 300 mm/sec
0.02 um resolution 60 mm/sec 60 mm/sec 60 mm/sec 60 mm/sec
0.01 um resolution 30 mm/sec 30 mm/sec 30 mm/sec 30 mm/sec
Peak Force
Continuous Force
Duty Cycle
12.0N (2.7 lbs) 12.0N (2.7 lbs) 24.0N (5.4 lbs) 24.0N (5.4 lbs)
4.0N (0.9 lbs) 4.0N (0.9 lbs) 8.0N (1.8 lbs) 8.0N (1.8 lbs)
100% 100% 100% 100%
Straightness & Flatness
Precision Grade 4 microns 4 microns 5 microns 6 microns
Standard Grade 6 microns 6 microns 10 microns 12 microns
Positional Accurac
Precision Grade (1)(2)(3)
0.01 um resolution 3 microns 4 microns 5 microns 5 microns
0.02 um resolution 3 microns 4 microns 5 microns 5 microns
0.1 um resolution 3 microns 4 microns 5 microns 5 microns
0.5 um resolution 4 microns 5 microns 6 microns 6 microns
1.0 um resolution 5 microns 6 microns 7 microns 7 microns
5.0 um resolution 13 microns 14 microns 15 microns 15 microns
Standard Grade (2)
0.01 um resolution 12 microns 15 microns 20 microns 20 microns
0.02 um resolution 12 microns 15 microns 20 microns 20 microns
0.1 um resolution 12 microns 15 microns 20 microns 20 microns
0.5 um resolution 12 microns 15 microns 20 microns 20 microns
1.0 um resolution 15 microns 20 microns 25 microns 25 microns
5.0 um resolution 25 microns 30 microns 35 microns 35 microns
Bi-directional Repeatabilit
Precision Grade (1)(2)(3)
0.01 um resolution
0.02 um resolution
0.1 um resolution
0.5 um resolution
1.0 um resolution
5.0 um resolution
Standard Grade (2)
0.01 um resolution
0.02 um resolution
0.1 um resolution
0.5 um resolution
1.0 um resolution
5.0 um resolution
Unit Mass
Precision Grade 590g 590g 1027g 1345g
Standard Grade
475g 475g 875g 1125g
Carriage Mass
Precision Grade 282g 282g 509g 676g
Standard Grade
(1) Measured at the carriage center, 35mm off mounting surface @ 20C with no load. Unit bolted to granite surface, flat to within 1 micron/300mm
(2) Total accuracy and bi-directional repeatability over full travel (peak to peak)
(3) Precision grade with slope correction value provided. Consult factory if better accuracy is required.
213g 213g 405g 537g
Travel
+/- 0.4 microns
+/- 0.4 microns
+/- 0.5 microns
+/- 1.0 microns
+/- 2.0 microns
+/- 10.0 microns
+/- 0.8 microns
+/- 0.8 microns
+/- 0.8 microns
+/- 1.5 microns
+/- 2.0 microns
+/- 10.0 microns
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Parker Hannifin Corporation
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
Test Methodology
2.64
6.32
-3.68
Published accuracy and repeatability specifications are subject to the testing methodology. Daedal’s
methodology provides specifications over the entire table travel regardless of start or finish position. The
accuracy and repeatability specifications are based on the peak to peak error measured by a laser
interferometer and prism located at 38mm above the center of the table. This type of measurement sums
the X, Y, Z, roll, pitch, and yaw errors. Temperature deviations from test condition may cause deviations
in straightness, flatness, accuracy, and repeatability from catalog specifications. Tests are performed with
the table mounted to a granite table, unloaded at 20
o
C.
In this example, the accuracy of an MX80L-T02 ranges from -3.68 microns to 2.64 microns. This table
would have its accuracy specified as 6.32 micron since the worst case would be starting at one extreme
and traveling to the other.
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Parker Hannifin Corporation
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Page 15
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
MX80L Series Technical Data
The useful life of a linear table at full catalog specifications is dependent on the forces acting upon it.
These forces include both static components resulting from payload weight, and dynamic components due
to acceleration/deceleration of the load. In multi-axes applications, the primary positioner at the bottom of
the stack usually establishes the load limits for the combined axes. When determining load/life, it is critical
to include the weight of all positioning elements that contribute to the load supported by the primary axis.
The life/load charts are used to establish the table life relative to the applied loads.
Life-Load Curve All Travels
Life vs Normal or Side load
1000000
T01
T02
100000
T03
T04
Life (km)
10000
1000
012345678
Load (kg)
Moment Load – Life Curves
The effect of moment loading on the bearing life is dependent upon load and lever arm. The lever arm in
this case is measured from the center of the surface of the table to the point where the load is applied. For
dynamic loading, use the distance from the center of the table to the center of mass of the load. The LifeLoad charts show curves for various lever arm lengths (units in [mm]). Note Pitch moments and Yaw
moments use the same curves.
Yaw Moment Loading Roll Moment Loading Pitch Moment Loading
ForceForce
ForceForce
ForceForce
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
[T01] Travel Moment Life – Load Charts
Lif e - M om ent Chart 2 5m m trav el Pi t ch- Yaw Loading
100000
10000
25
Life [km]
1000
100
100000
10000
Life [km]
1000
50
75
100
250 300
012345678
200
150
Load [kg]
Lif e - M om ent Chart 2 5m m t r av el Rol l Loadi ng
25
50
75
100
300
200250
150
100
012345678
Load [kg]
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
[T02] Travel Moment Life – Load Charts
Lif e - M om ent Chart 5 0m m t r a vel Pi t c h- Yaw Loadi ng
100000
10000
25
Life [km]
100000
Lif e [ km ]
1000
250300
100
012345678
200
Load [kg]
Lif e - M om ent Chart 5 0m m t r a vel Roll Loadi ng
10000
300
1000
250
150
200
50
75
100
25
50
75
100
150
100
012345678
Load [kg]
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Page 18
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
[T03] Travel Moment Life – Load Charts
Lif e - M om ent Chart 1 00m m tra vel Pi t ch-Y a w Loadi ng
100000
25
10000
50
75
Life [km]
1000
250300
100
150
200
100000
10000
Life [km]
1000
100
012345678
Load [kg]
Lif e - M om ent Char t 1 00m m t r a vel Roll Loadi ng
25
100
150
200
250
300
100
012345678
Load [kg]
50
75
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Page 19
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
[T04] Travel Moment Life – Load Charts
Lif e - M om e nt Char t 15 0m m t r a vel Pi t ch-Y a w Loadi ng
100000
25
Life [km]
100000
Life [km]
10000
1000
100
012345678
Load [kg]
Lif e - M om ent Chart 15 0m m t r a vel Rol l Loading
10000
1000
250300
75
100
150
200
300
50
25
50
75
100
150
200
250
100
012345678
Load [kg]
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Page 20
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
Linear Motion Guide Bearing Life/Load Computation
To predict the travel life of the MX80L cross roller bearings under a moment load use the curve with the
corresponding lever arm and given load. Factor in dynamic as well as static loads. For compound loading
(multiple moments) use an “effective lever arm of 2x actual lever arm.
Example:
Given a MX80L-T02 with a 2 kg load mounted 35 mm off of the end
ForceForce
of the carriage in line with the travel path. The lever arm is 35 mm
+ 40 mm (center of table to edge) = 75 mm
This loading produces a pitch moment. Therefore, using the Pitch
curve for the 50mm travel, draw a vertical line up from the x-axis at
the 2 kg load point until it intersects the 75 curve. The point of
intersect is the predicted bearing life of the table. In this example
the life is 10,000 km of travel
Lif e - M om ent Chart 5 0m m t r av el Pit ch- Yaw Loadi ng
100000
10000
25
Life [km]
1000
250300
100
012345678
200
150
50
75
100
Load [kg]
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
MX80L Series Technical Data
Force/Speed Charts
The Force/Speed Charts for the MX80L are shown for each available travel. In the maximum allowable
travel range the motor force is the same for 80 and 48 VDC bus voltage. See Electrical Specifications for
motor parameters. Performance based on table mounted to 200mmx150mmx20mm Aluminum plate.
Curves shown include friction and viscous damping values of table. Peak speed is limited by travel
length for 25mm [T01] and 50mm [T02] travel lengths.
[D11] 4-pole Motor Force-Speed Curve ([T01] 25 mm travel)
Rated Force Speed Curve
14
12
Peak
10
8
6
Force N
4
Continuous
2
0
0 200 400 600 800 1000 1200
Speed mm/s
( 80 & 48 VDC)
[D11] 4-pole Motor Force-Speed Curve ([T02] 50 mm travel)
(80 & 48VDC)
14
12
10
Rated Force Speed Curve
Peak
8
6
Force N
4
Continuous
2
0
0 300 600 900 1200 1500
Speed mm/s
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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
[D13] 4-pole Motor Force-Speed Curve ([T03] 100 mm travel)
Rated Force Speed Curve
(80 & 48VDC)
30
25
Peak
20
15
Force N
10
Continuous
5
0
0 400 800 1200 1600 2000
Speed mm/s
[D13] 4-pole Motor Force-Speed Curve ([T04] 150 mm travel)
Rated Force Speed Curve
30
(80 & 48VDC)
25
Peak
20
15
Force N
10
Continuous
5
0
0 400 800 1200 1600 2000
Speed mm/s
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Page 23
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
Electrical Specifications
Specifications for both the 4 pole and 8 pole linear servo motors
Parameter:
Stall Force Continuous [1] Fcs N 4.0 8.0 8.0
Stall Current Continuous [1, 4, 8] Ics(sine) Amps Peak 1.13 2.26 2.26
Stall Current Continuous [1, 7] Ics(trap) Amps DC 0.92 1.84 1.84
Stall Current Continuous [1] Ics(RMS) Amps RMS 0.8 1.6 1.6
Peak Force [6] Fpk N 12 24 24
Peak Current [4, 6, 8] Ipk(sine) Amps Peak 3.2 6.4 6.4
Peak Current [6, 7] Ipk(trap) Amps DC 2.8 5.5 5.5
Peak Current [6] Ipk(RMS) Amps RMS 2.4 4.8 4.8
Voltage Constant [3, 4] Ke Volts/m/s 4.5 4.5 4.5
Voltage Constant [3] Ke (RMS) Volts RMS/m/s 3.2 3.2 3.2
Force Constant [9] Kf(sine) N/Amps Peak 3.90 3.90 3.90
Force Constant [3, 4] Kf(trap) N/Amps DC 4.50 4.50 4.50
Force Constant [3] Kf(RMS) N/Amps RMS 5.51 5.51 5.51
Resistance [3] R Ohms 9.50 4.75 4.75
Inductance [5] L mH 3.60 1.80 1.80
Maximum Bus Voltage Vm Volts DC 80 80 80
Thermal Resistance Wind-Amb Rth w-a C/watt 6.8400 3.4000 3.4200
Motor Constant Km N/sqrt(watt) 1.46 2.06 2.06
Viscous Damping B N/m/s 0.500 0.5 0.800
Static Friction [13] Fs N 0.5 1.0 1.0
Motor Thermal Time Constant Tau_th minutes 0.8 0.8 0.8
Winding Thermal Time Const Tau_wnd minutes 0.5 0.5 0.5
Intermittent Force Duration [10] T_2x seconds 8.0 10.0 10.0
Peak Force Duration [11] T_3x seconds 1.2 2.3 2.3
Electrical Pitch [12] Pe mm 13 13 13
Rated Winding Temperature RT C 95 95 95
Rated Ambient Temperature AT C 20 20 20
Winding Class H H H
o
1. @ 25
C ambient, 125C Winding Temperature with the table mounted to a 200mm x
150mm x 20mm aluminum plate
2. Measured with a 0.33 mm gap
3. Measured Line to Line +/-10%
4. Value is measured peak of sine
5. +/-30% Line to Line, inductance bridge measurement @1Khz
6. Initial winding temperature must be 60 C or less before Peak Current is applied
7. DC current through a pair of motor phases of a trapezoidal (six state) commutated
8. Peak of the sinusoidal current in any phase for a sinusoidal commutated motor
9. Total motor force per peak of the sinusoidal amps measured in any phase, +/-10%
10. Maximum time duration with 2 times rated current applied with initial winding temp
at 60 C
11. Maximum time duration with 3 times rated current applied with initial winding temp at
60 C
12. The Distance from the leading edge of the north pole to the leading edge of the next
north pole
13. Average friction over total table travel
Symbol: Units: 25 & 50 mm
D11
100 mm
D13
150 mm
D13
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Clean Room Preparation
There is no clean room ‘rating’ for motion control products just individual compatibility with class of clean
rooms. The compatibility is also dependant on measurement location. A point directly below a component
may have a different particle count than at a side location. In an effort to clarify the class of clean room
that our products can be used in with out affecting the overall rating of the clean room, Daedal provides a
Clean Room Class Compatibility chart for product intended for use in such environments. Due to the
moving magnet design of the MX80L, minimal particle generation occurs during operation. MX80L tables
with clean room preparation were tested in Daedal’s vertical laminar flow work station which utilizes ULPA
filters to produce an environment having a cleanliness of class 10 prior to testing. Tables were tested in a
variety of orientations with sampling both below the table and at the carriage mounting surface with a
particle counter capable of measuring 0.3 µm diameter and larger particles. Based on results from testing
following the 209E Federal Standard, the following chart shows the expected clean room compatibility of
the MX80L with Class 10 clean room prep. Consult factory for details on test methodology and results.
* Compatibility is defined as not affecting the clean room class rating with the addition of this product for classes shown.
For example a MX80L with 50mm travel with a velocity of 500mm/sec will not effect a class 10 clean room or higher.
The Class 1 rating in the table refers to class 1 levels of 0.3µ and larger particles detected in Daedal’s Class 10
chamber. For complete class 1 compatibility, the particle count for the 0.1 and 0.2µm particles would also need to be
taken into consideration.
Standard Clean Room Preparation
• Stringent cleaning and handling measures
• Clean room rated lubricant
• Reduce force specification by 25%
MX80L Clean Room Class Compatibility*
100 & 150 mm
Velocity 25 & 50 mm Travel
[mm/sec]
4.5" below At stage top 4.5" below At stage top
1 1 1 5 1
5 1 1 5 1
10 1 1 5 1
25 1 1 5 1
50 1 1 10 5
100 1 1 10 5
250 1 5 25 10
500 10 5 50 10
1000 25 10 50 25
1500 n/a 25 100 25
2000 n/a n/a 100 25
Travel
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Encoder Specifications
Description Specification
Input Power 5 VDC +/-5% 150 to 220 mA depending on encoder resolution
Output
(Incremental)
E2, E3, E4, E5,
E8
Reference (Z
Channel)
Maximum Speed 5.0 micron resolution = 2.0 meters/sec (limited by table)
Square wave differential line driver (EIA RS422) 2 channels A and B in
quadrature (90
Synchronized pulse, duration equal to one resolution bit. Repeatability of
position is unidirectional moving toward positive direction and is equal to
table repeatability specifications.
1.0 micron resolution = 2.0 meters/sec (limited by table)
0.5 micron resolution = 1.5 meters/sec
0.1 micron resolution = 0.3 meters/sec
20 nanometer resolution = 0.06 meters/sec
10 nanometer resolution = 0.03 meters/sec
o
) phase shift.
Hall Effect Specification
Description Specifications
Input Power +5 VDC, 30 mA
Output Open collector, Current Sinking, 20 mA Max
Limit and Home Sensor Specifications
Description Specification
Input Power +5 VDC 60 mA (power from encoder, no additional connection needed)
Output Output form is selectable with product:
- Normally Closed Current Sinking
- Normally Open Current Sinking
NPN open collector +5 to +24 VDC All types Sink maximum of 50 mA
Repeatability
Home Sensor: +/- 5 µm (unidirectional) with 1.0 micron or better encoder
NOTE: Repeatability using z-channel refers to encoder specifications
Low ESD Specifications
The low ESD (ElectroStatic Discharge) option refers to either an electroless nickel coating on standard
grade tables or an Armoloy® coating on precision grade tables that provides a very low resistance path to
ground from all surfaces of the MX80.
ViX Drive Specifications
Refer to Specifications provided in ViX Manual.
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Cabling and Wiring Diagrams
Connector Pin Out and Extension Cable Wire Color Codes for the 5, 1, 0.5 and 0.1
micron resolution encoders
PIN FUNCTION WIRE COLOR
1 GND BLACK
6 + End of travel ORANGE
7 - End of travel BLUE
8 Home GREEN
X5 – LIMITS CONNECTOR
X1 – MOTOR LEADS
WIRE COLOR DRIVE
RED U
WHITE V
BLACK W
GREEN GND
The 10 and 20 nanometer resolution
encoders have an interpolator box and
bypass cable
Not included with
[H1][L1] option
X2 – FEEDBACK-HALL CONNECTOR
PIN FUNCTION WIRE COLOR
1 Encoder Z+ ORANGE
2 Encoder Z- BROWN
3 GND BLACK
5 +5V RED
6 Temperature- YELLOW/BLACK
7 Encoder A+ WHITE
8 Encoder A- YELLOW
9 Hall#1 WHITE/BROWN
10 Temperature+ YELLOW/RED
11 Encoder B- BLUE
12 Encoder B+ GREEN
13 Hall#2 WHITE/ORANGE
14 Hall#3 WHITE/VIOLET
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MX80L Series Product Manual Chapter 3 - How to Use the MX80
P
,
Chapter 3 - How to Use the MX80L
Mounting Orientations
The MX80L can be mounted normal, inverted, side or vertically. For vertical (z-axis) mounting the
pneumatic counter balance is recommended to compensate for the effect of gravity on the carriage and
the load. For all mounting orientations, the cables should be secured as to not interfere with the movement
of the carriage and bearings.
.
HORIZONTAL
INVERTED
SIDE MOUNTED
/N 100-9822-02 QTY.(2)
VERTICAL
With c’balance and z-bracket
Mounting Surface Requirements
Proper mounting of the MX80L is essential to optimize product performance. All specifications are based
on the following conditions:
• The positioner must be bolted down using all counter bored mounting holes provided (4 on T01 &
T02, 8 on T03 and T04) using M4 socket head cap screws.
"E
70.0 [2.76]
CENTERED
T01 T02 T03 T04
‘E’ n/a n/a 35.0 65.0
50.0 [1.97]
CENTERED
• The positioner must be mounted to a flat, stable surface, with a flatness error less than or equal to
0.025mm/300mm for operation (specifications will be greatly varied from published specification).
To meet catalog specifications the surface must have a flatness error less than or equal to
0.003mm/300mm for Standard grade and 0.001mm/300mm for Precision grade.
70.0 [2.76]
CENTERED
25.0 [0.98]
CENTERED
BASE
27
"E"
C-BORED HOLES ON BASE
FOR M4 X 0.7 X 8.0 LENGTH SOCKET CAP HEAD SCREW
+0.012-0.000
[
Ø4.008
Ø0.1578
]
DOWEL PIN HOLES QTY.(2)
0000
+0.0005-0.
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• Catalog specifications may deviate for positioners mounted to surfaces that do not meet the above
conditions.
• If the intended mounting surface cannot meet these specifications a separate rigid mounting plate
meeting these specifications should be used to mount to the main structure.
• If mounting conditions require that the table base is overhung, table specifications will not be met
over that portion of the table. Additionally, in X-Y Systems the overhung portion of the Y-axis may
not met specifications due to the additional error caused by deflection and non-support of the
base. Contact Daedal for guidelines on specifications of overhang applications
Load Mounting Requirements
Dowel holes are included in the carriage of the MX80L for repeatable mounting of loads/fixturing. When
bolting payload to carriage take precaution in using bolts M4 with 7mm of engagement as to not damage
the table.
Use appropriate length bolt.
The MX80L compact design requires proper sized bolts to be used when mounting payloads to the
carriage. Excessive length bolts can damage bearings or pin the table in position.
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Limit and Home sensor operation
The MX80L utilizes an innovative method for setting limit and home positions. The magnetic sensors
embedded in the base of the MX80L change state based on the limit “flag”. This space saving, compact design
consists of three (3) parts; magnetic sensors, limit flag and limit flag bracket. The limit and home magnetic
sensors are mounted to a PCB in a fixed position to the base of the unit. The flag bracket is mounted to the left
side of the carriage with respect to the cables. The Limit Flag is a pattern of thin magnets which triggers the
sensors. This pattern defines whether the switch functions as normally open or normally closed. A limit is
normally closed when the switch operates from non-magnet to magnet surfaces. The home switch is normally
open when the switch operates from non-magnet to magnet surfaces. To change from normally open to
normally closed operation of the sensor the patterns are reversed.
Example of Limit and Home Flag magnets corresponding to possible MX80L Limit Home configurations:
Config Home End of Travel Limit Flag Magnets
Normally
Closed
Normally
Closed
Normally
Open
Normally
Open
Normally
Closed
Normally
Open
Normally
Closed
Normally
Open
H1L1 Option Upgrades
• Limits and Homes can not be added to the MX80S table in the field due to the integrated design
which encloses the sensor on a printed circuit board in the base. If the magnetic sensor limit
and home are desired the unit must be returned to the factory on an RMA.
• To change Limit/Home operation from Normally Open to Normally Closed or from Normally
Closed to Normally Open a new limit flag bracket must be purchased, contact factory for proper
configuration and part number.
• To adjust the operating position of the limits, limit/home adjustment magnets can be adhered on
top of the existing limit flag. These adjustment magnets are included with the unit.
To change the activation position of the sensors:
Determine desired position
Cut magnet to proper length
Follow Adjusting Limit Flag Procedure to add to the adjustment
Determining Desired Position
The limit sensors are set at the factory for maximum travel. These factory settings only allow for 3mm
(0.12”) before the carriage contacts the end stop. In slow speed applications this may be adequate,
however as the top speed of the application increases the required deceleration distance increases. To
determine the safe Deceleration Distance the Maximum Speed and the Maximum Obtainable
Deceleration Rate must be known or calculated. The maximum speed should be known from your
application requirements. Velocity limits should be set in your program or in your amplifier to cause a
fault if the speed exceeds this value. The maximum deceleration is a factor of load and available peak
force of the table. Using F = ma, calculate maximum acceleration and then required deceleration
distance. See the following example for calculating maximum deceleration for an application with a
payload = 0.25 kg on an MX80-T01 with a maximum speed of 500 mm/s.
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Total mass = 0.46 kg (Payload mass = 250 grams + Carriage mass = 213 grams)
Application Speed = 500mm/sec
Available peak force at .25 m/sec = 11.8 N (See Chapter 2, Force / Speed Curve)
Maximum Obtainable Deceleration Rate
Thus: F = ma Æ a = F/m Æ a = 11.8N / 0.46kg Æ 25.6 m/sec
2
Now, calculate the Deceleration Distance for linear deceleration:
First… find the Deceleration time:
Ta = Max Velocity / Deceleration Rate
Ta = .50 m/sec / 25.6 m/sec
2
Æ 0.020 seconds
Second… find the Deceleration Distance:
Distance = ((Max Velocity) * (Ta)) / 2
Distance = ((500 mm/sec) * (0.020)) / 2 Æ 5.0 mm
This means that both the positive and negative limit switch targets must be moved inward by 5.0 mm.
The limit deceleration rate should be set to 25.6 meters/sec
2
. Using the supplied limit flag sheet cut two
5.0mm long strips from the appropriate white or black (depending on configuration) marked Limit/Home
Adjustment overlay decal and follow the procedure for changing the limits.
Adjusting the Limit Flag Procedure
The following procedure is to be used for changing the limit flag (switching activation from N.O. to N.C. or
vice versa) and adjusting the activation position of the end of travel limits on the MX80: (Images shown
are for changing H3L2 to H2L3
Step 1: Remove power from the unit and allow time for stage
base and carriage to reach room temperature
Step 2: Remove the limit flag bracket from the MX80L by
removing the button head cap screws (BHCS) that secure the
bracket to the side of the carriage.
Step 3: Gently slide the bracket from out from under the carriage.
Step 4a: To adjust limits to increase travel: With a razor, cut and remove
the desired amount of protective sticker and magnet which equals the
amount of desired travel increase.
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Step 4b: To adjust limits to reduce travel: With a razor, cut the clear
protective sticker at the end of the magnet that is to be adjusted.
Flatten out protective sticker at the cut, this allows a flat surface to
adhere additional magnet. Place additional self adhesive magnet
(supplied with positioner) at the end of the existing magnet which
equals the amount of desired travel reduction. Confirm that there is
no gap between the original magnet and the additional magnet just
applied. If there is a gap, remove the additional magnet, discard it,
and apply a new magnet.
Step 5: Gently slide bracket under carriage. Push up on bracket, insert 0.5mm to 1.0mm shims
between bracket and base, insert and tighten BHCS.
Setting Home Sensor
The MX80L is equipped with a “home” position reference sensor when purchased with Home
configuration option [H2] or [H3]. The home sensor is located on the same PCB as the limit sensors and
the target is located between the limit targets. The sensor is typically used in conjunction with the
encoder ‘Z’ marker. If another home location is desired, the home target can be adjusted by removing
the limit flag decal and applying adjustment overlay decals in the desired location.
Z Channel Position Reference
The Z channel is an output on the encoder. Many servo controllers support this input. The Z channel on
the MX80L is at mid travel. The Z channel is a unidirectional device. This means that the final homing
direction must occur in one direction. The MX80L is set that the final home direction is to be toward the
positive end of the table (See Chapter 2, Dimensional Drawing, for positive direction definition). The
repeatability of the Z channel is equal to the repeatability of the table. Thus the repeatability of the “Z”
channel equals:
Encoder Resolution Z Channel Repeatability
5 micron +/- 10 micron
1 micron +/- 2 micron
0.5 micron +/- 1 micron
0.1 micron +/- 0.4 micron
0.02 micron +/- 0.4 micron
0.01 micron +/- 0.4 micron
NOTE
: Home repeatability is also very dependent on controller input speed and homing algorithms. The
above repeatability does not include possible controller tolerance. Additionally, to achieve the highest
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repeatability the final homing speed must be slow. Slower final speed usually results in higher
repeatability.
: The “Z” channel output is only one resolution count wide. Thus the on-time may be very brief.
NOTE
Due to this some controllers may have difficulty reading the signal. If you are experiencing the positioner
not finding the “Z” channel during homing, try reducing final homing speed; also refer to your controller
manual for frequency rates of the “Z” channel input.
Grounding / Shielding
All cables are shielded. These shields are to be grounded to a good earth ground. Failure to ground
shields properly may cause electrical noise problems. These noise problems may result in positioning
errors and possible run away conditions.
The motor cable has an area of the shield exposed to allow a grounding path from shield to drive ground.
The Hall/Encoder and Limit/Home cables have the shield carried through the connector hood that is in
turn grounded through the drive. MX80L purchased with ViX drives as part of the configurable part
number come equipped with p-clips designed for the small OD of the motor cable to allow the cable
shield to be grounded to the ViX ground.
Cabling
The MX80L is provided with high flex cabling which is strain relieved at the connection point on the
positioner. The Hall/Encoder cable is terminated with a high density 15 pin D-sub connector which is
compatible with the ViX drive from Parker. The motor cable is terminated with flying leads which are
stripped and tinned and ready for installation into the screw terminals on the ViX drive. For wire color
codes and pin outs see tables in electrical section of manual.
The limit/home cable is optional and therefore if not ordered a space will be open in the clamp at the
connection point. The limit/home cable is provided with a 15 pin D-sub connector which is compatible
with the ViX drive. For wire color codes and pin outs see tables in electrical section of manual.
Recommended bend radius for these cables is 50mm. This radius will provide a minimum of 10 million
cycles of the cable. Smaller bend radius will reduce cable life while larger bend radius will increase life.
If the positioner is mounted in a multi-axis configuration special care should be taken in routing and strain
relieving the cables so as to prevent flexing of the cable at the connection to the table and where
mounted stationary to the structure. Provide sufficient service loop that the cable bends a minimum of
25mm from these end points. It is also recommended to avoid twisting the cable. The cable should be
secured in a position which will orient it in a direction that creates a single plane of operation for the
cable.
To replace extension cables 1.) Disconnect power to positioner. 2.) Remove two button head screws
from side of shield and remove the shield. 3.) Remove the two cap head screws from the strain relief
and remove the strain relief. 4.) unplug extension cables. 5.) Reverse steps to reassemble.
: When reassembling the strain relief, take care not to pinch any wires and be certain that the
Note
exposed braided shield on the cables lies under the strain relief.
Cable Management
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For multi-axis configurations special attention needs to be taken into account for the moving cables on
the non-base axis.
TIP: For Multi-axis Configurations.
Consider using the top axis for the highest frequency move in the application. The top axis will have
the least amount of weight to move and will reduce the cycles on the cables.
Pneumatic Counterbalance
Cylinder Specification
Description Specifications
Cylinder Piston Area 0.105 in
Cylinder Mounting Torque Head nut 0.45 – 0.90 Nm (4 – 8 in-lbs)
Maximum Compressive Rod Force 10 lbs
Allowable Input Pressure 0 – 100 psi
Coefficient of Friction 0.015 (assuming no side load)
Operating Temperature -20 – 175o F
Counter Balance Force
For ‘Z’-axis (vertical) applications, the use of the pneumatic counter balance and accessory kit is
strongly recommended. The pneumatic accessory kit includes a filter-regulator-precision regulator,
fittings and 1/8” ID tubing. The pressure in the pneumatic cylinder can be set to provide a balancing
force to counter act the effect of gravity. The counter balance force (F
pressure (P) and the cylinder piston area (A
balance force.
The yaw force generated by the counter balance will add 0.2 arc-sec of yaw per psi of pressure.
The Pressure regulation during motion is dependent on the speed and acceleration of the motion
profile. The following table shows the expected pressure fluctuation based on the move dynamics.
Acceleration Velocity Fluctuation*
Clean Room Compatibility
The vertical counter balance is compatible with clean rooms of class 250-500 for speeds below 500
mm/sec or class 1000 for higher speeds due to the particle generation on the plunger.
Rod End. 0.23 – 0.56 Nm (2 – 5 in-lbs)
F
C
0.25 kg 5.2 psi
0.5 kg 10.5 psi
1 kg 21 psi
2 kg 42 psi
4 kg 84 psi
1 g ≤ 500 mm/sec < 1 psi
3 g ≤ 500 mm/sec < 2 psi
3 g ≤ 2000 mm/sec < 3 psi
* 1 psi = 1.68oz (0.47 N) of force
2
) is a linear function of the
); FC = PxAC. See the following table to set the counter
C
P
C
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MX80L Series Product Manual Chapter 4 - Performance
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Chapter 4 - Performance
Acceleration Limits
Acceleration of linear servo driven tables is typically limited by three (3) factors; linear bearings,
available motor force and settling time. Due to the high load bearings used in the MX80, the
acceleration is only limited by the available motor force and the settling time.
• Available Motor Force
This is the primary factor that reduces acceleration. This is simply the amount of motor force
available to produce acceleration. The larger the inertial and or frictional load the lower the
accelerations limit.
• Settling Time
In many applications reducing cycle time is a primary concern. To this end, the “settling” time (the
amount of time needed after a move is completed for table and load oscillating to come within
acceptable limits) become very important. In many cases where very small incrementing moves are
executed, the settling time is greater than the actual move time. In these cases accelerations may
need to be reduced thus reducing the settling time.
Speed Limits
The Maximum Speed of the MX80L is limited by three (3) factors:
• Travel Length
The short travel length of the MX80L is the main limiting factor for maximum speed. The T01 and
T02 options (25mm and 50mm) a triangular motion profile with 5g accel/decel will only yield peak
speeds of 1.1m/sec and 1.5 m/s respectively.
• Linear Encoder Limit
The linear encoder has speed limits relative to encoder resolution; these limits are listed below:
Encoder
Resolution
5 micron 5 meters/second (¹) 2 MHz
1 micron 3 meters/second(1) 6.7 MHz
0.5 micron 1.5 meters/second 6.7 MHz
0.1 micron 0.3 meters/second 10 MHz
0.02 micron 0.06 meters/second 10 MHz
(¹) When using an encoder with 5 micron resolution, velocity limited by speed dependant force.
(²) This is the bandwidth frequency that the amplifier or servo control input should have to operate properly with the encoder output at
maximum speeds. This frequency is post-quadrature, to determine pre-quadrature divide above values by 4. Above frequencies include a
safety factor for encoder tolerances and line loses.
• Force / Speed Limit
The available force of the MX80L reduces as speed increases.
0.01 micron 0.03 meters/second 10 MHz
Maximum Velocity Required Post
Quadrature Input
Bandwidth (²)
(Chapter 2, MX80L Series Technical Data)
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Thermal Effects on Accuracy
The MX80L uses a moving magnet linear servo motor. The magnet rails and the encoder tape are
mounted to the carriage. The motor coils are mounted in the base and unless the table is mounted
to an insulated surface, the heat generated in the coils should radiate out the base maintaining a
low thermal delta between base and carriage. All specifications for the MX80L are taken at 20 C.
Variation from this temperature will cause additional positional errors. If the carriage of the MX80L
varies from this temperature the encoder scale will expand or contract, thus changing its measuring
length and thus encoder resolution.
The factor by which this thermal effect occurs is 0.000022mm/mm/° C. Although this sounds like a
very small number it can make significant accuracy and repeatability effects on your applications,
especially on longer travel applications. To understand this better let’s look at an example:
Example
travel is 25 microns @ 20° C. If the carriage temperature increases by 5 C an additional error of 17
microns will be added over the total travel (0.000022mm/mm/° C)*150mm*5 C. However, this
additional error can be compensated for since the error is linear.
The accuracy of the MX80L is plotted with respect to carriage temperature in the graph below for
the 25 mm, 50 mm, 100 mm and 150 mm travel lengths.
: A standard grade MX80L with 150mm travel is being used. The accuracy over the entire
Temperature Effect on Accuracy
0.07
0.06
0.05
0.04
0.03
Error (mm)
0.02
0.01
0
0 25 50 75 100 125 150
Travel (mm)
5 degrees C 10 degrees C 15 degrees C 20 degrees C
Thermal Effects on Repeatability
Repeatability will not be affected as long as the temperature remains constant. However the
repeatability will be affected as the temperature changes from one level to another. This is most
commonly experienced when starting an application cold. Then as the application runs the MX80L
comes to its operational temperature. The positions defined when the unit was “cold” will now be
offset by the thermal expansion of the unit. To compensate for this offset, all positions should be
defined after the system has been exercised and brought to operational temperature.
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Causes of Temperature Increases
One or more of the following conditions may affect the temperature of the MX80L
carriage:
• Ambient Temperature
This is the air temperature that surrounds the MX80L
• Application or Environment Sources
These are mounting surfaces or other items which produce a thermal change that affect the
temperature of the MX80L carriage (i.e. X/Y configurations with motors or other heat generating
devices that heat the mounting surface and thus thermally affect the MX80L carriage).
• Motor heating from MX80L
Since the MX80L uses a servo motor as its drive, it produces no heat unless there is motion, or a
force being generated. In low duty cycle applications heat generation is low, however as duty
cycles increase, temperature of the MX80L will increase, causing thermal expansion of the base.
With very high duty cycles these temperatures can reach temperatures as high as 30° C above
ambient.
Compensating for Thermal Effects
If the application requires high accuracy, the thermal effects must either be removed by regulating
carriage temperature or compensated for with a correction factor added to the commanded
position. Controlling the carriage temperature is the best method. However, this means controlling
the ambient temperature by removing all heat/cold generators from the area and operating at very
low duty cycles. Compensation is the other way of achieving accuracy without sacrificing
performance. In this case the system must be exercised through its normal operating cycle. The
temperature of the carriage should be measured and recorded from the beginning (cold) until the
carriage becomes thermally stable. This carriage temperature should be used in a compensation
equation. Below is the fundamental thermal compensation equation:
Cd = (Id - ((Id) * (Te) * ∆T))
Cd = Corrected displacement (mm)
= Incremental displacement (mm)
I
d
= Thermal Expansion (0.000022 mm/mm/° C)
T
e
∆T = Temperature Differential from 20° C
Example:
• Carriage Temperature of 32° C required move of 100mm
Cd = 100mm - (100mm * Te * 12° C) = 99.9736mm
In this example the commanded move should be 26.4 microns less (100mm – 99.9736mm) than
the desired move. This will compensate for the thermal expansion of the scale. This is a simple
linear correction factor and can be programmed in to most servo controllers using variables for the
position commands.
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MX80L Series Product Manual Chapter 5 - Connecting the ViX Amplifier
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Chapter 5 - Connecting to the ViX Amplifier
The MX80L is designed to be plug and run compatible with the Parker ViX drive. The cables on
the MX80L are labeled to match the labels on the ViX for ease of use and quick installation. When
purchased as part of the part number, the ViX will have the motor parameters already downloaded.
X1 – MOTOR LEADS
WIRE COLOR DRIVE
RED U
WHITE V
BLACK W
GREEN GND
X2 – FEEDBACK-HALL CONNECTOR
PIN FUNCTION WIRE COLOR
1 Encoder Z+ ORANGE
2 Encoder Z- BROWN
3 GND BLACK
5 +5V RED
6 Temperature- YELLOW/BLACK
7 Encoder A+ WHITE
8 Encoder A- YELLOW
9 Hall#1 WHITE/BROWN
10 Temperature+ YELLOW/RED
11 Encoder B- BLUE
12 Encoder B+ GREEN
13 Hall#2 WHITE/ORANGE
14 Hall#3 WHITE/VIOLET
Limits use Inputs
The ViX drive has 5 digital inputs. When using with MX 80L, the EOT Limits and Home use 3 of the 5 inputs.
A VM15-PF screw terminal breakout board may be purchased to allow access to the remaining 2 inputs and all
of the outputs.
X5 – LIMITS CONNECTOR*
PIN FUNCTION WIRE COLOR
1 GND BLACK
6 + End of travel ORANGE
7 - End of travel BLUE
8 Home GREEN
* For Drive Only versions of the ViX, the limits need to
be connected to the motion controller NOT the drive.
37
Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
Page 38
MX80L Series Product Manual Appendix
,
Chapter 6 - Maintenance and Lubrication
Cross Roller Bearing Lubrication
Standard Prep:
• Recommended Lubricant: Mobil Vactra No. 2, oil
• Lubrication Interval: 1000 hours*
• Method:
Lightly coat the bearing surfaces with oil. Bearings surfaces can be exposed by moving the table
to the end of travel lubricating the now exposed surfaces, then moving the table to the other end
of travel and lubricating the other set of surfaces.
Warning
Excessive oiling of the bearings--particularly the limit side bearing--can cause unit to
malfunction. Excess oil can damage limit sensor and target.
Clean Room Prep:
• Recommended Lubricant: Castrol Braycote 803, grease
• Lubrication Interval: 2000 hours*
• Method:
Lightly coat the bearing surfaces with grease. Bearings surfaces can be exposed by moving the
table to the end of travel lubricating the now exposed surfaces, then moving the table to the
other end of travel and lubricating the other set of surfaces.
Warning
Excessive greasing of the bearings--particularly the limit side bearing--can cause unit to
malfunction. Excess grease can damage limit sensor and target.
* General notes: Shorter lubrication interval may be required in environments with high amounts of dust and other contamination.
38
Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
Page 39
MX80L Series Product Manual Appendix
,
Appendix A - Internal Protection
Daedal has conducted testing to determine the degree to which the positioner is protected by
using a British standard called an Ingress Protection Rating (IP Rating). The MX80L has an
IP 10 protection rating.
Definition
Reference
This standard describes a system of classifying degrees of protection provided by enclosures of
electrical equipment. Standardized test methods and the establishment of a two digit numeric
rating verify the extent of protection provided against access to hazardous parts, against ingress
of solid foreign objects, and against the ingress of water.
First Number
Second Number
0 - No special protection provided.
Note
: British standard EN 60529 : 1992
– The first number indicates protection of persons against access to dangerous
parts and protection of internal equipment against the ingress of solid foreign objects.
1 - Protection against access to hazardous parts with the back of a hand, and protected
against solid foreign objects of 50 mm diameter and larger.
– The second number indicates protection of internal equipment against harmful
ingress of water.
: Number Indicators above represent only a partial list of IP Rating specifications.
Warning
Particles as small as 0.005” diameter could lodge between the table and internal components
causing the motor to stall.
39
Parker Hannifin Corporation
Daedal Division
Irwin
Pennsylvania
Page 40
MX80L Series Product Manual Index
,
Index
Acceleration
Limits, 39
Specifications, 13
Accuracy
Specifications, 13
Thermal Effects, 40, 41
Assembly Diagram, 8, 44
Bearing
Life, 16
Load, 21
Lubrication, 45
Bend Radius, 36
Cabling, 9, 36, 37
Cleanroom, 25, 38, 45
Counter Balance, 37
Deceleration Distance, 33
Dimensional Drawings, 11
Drive Ampilifier, 9
Electrostatic Discharge (ESD),
27
Encoder, 35, 39, 40
Options, 9
Resolution, 39
Specifications, 27
Velocity Limit, 39
Z Channel, 9
Force/Speed Charts, 23, 26
General Specifications, 14
Grounding, 36
Hall Effect
Specifications, 27
Home Sensor, 9
Adjusting, 35
Specifications, 27
ViX, 43
Horizontal Translation, 21
Ingress Protection Rating, 46
Internal Protection, 46
Limit Sensor, 9
Adjusting, 34
Specifications, 27
ViX, 43
Lubrication, 45
Maintenance, 45
Mass, 13
Motor Force, 39
Motor Heating, 41
Mounting, 9, 31
Surface Requirements, 31, 32
Order Number Nomenclature, 9
Overhang, 32
Pinning, 9
Repair Information, 6
Repeatability, 35
Specifications, 13
Thermal Effects, 41
Return Information, 6
Settling Time, 39
Shielding, 36
Specifications
Bearing, 16
Electrical, 24
Encoder, 27
Force, 22
General, 13
Hall Effect Sensors, 27
Speed
Limits, 39
Maximum, 33
Table Load, 16
Thermal Effects
Accuracy, 40
Causes, 41
Compensation, 41
Repeatability, 41
Thrust
Specifications, 13
Travel, 9
Setting Limit Sensors, 33
Unpacking, 5
Velocity
Maximum, 39
Specifications, 13
ViX
Amplifier, 43
Drive Specifications, 28
Warnings, 6
Wiring Diagrams, 29
Z Channel, 35
40
Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
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