Parker Hannifin MX80L User Manual
Daedal
Manual No. 100-5326-01
Rev. 4
MX80L Precision Grade
MX80L Standard Grade
Product Manual
Effective: May 21, 2007
Supersedes: July 1, 2006
Electromechanical
Positioning Systems
Automation
MX80L Series Product Manual
,
Important User Information
FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED
HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE.
This document and other information from Parker Hannifin Corporation, its subsidiaries, and authorized distributors provide
product and/or systems options for further investigation by users having technical expertise. It is important that you
analyze all aspects of your application and review the information concerning the product or system in the current product
catalog. Due to the variety of operating conditions and applications for these product systems, the user, through its own
analysis and testing, is solely responsible for making the final selection of the products and systems and assuming that all
performance, safety, and warning requirements of the application are met.
The products described herein, including without limitation, product features, specifications, designs, availability and
pricing, are subject to change by Parker Hannifin Corporation and its subsidiaries at any time without notice.
The information in the product manual, including any apparatus, methods, techniques, and concepts
described herein, are the proprietary property of Parker Hannifin Corporation, Daedal Division or its
licensors, and may not be copied, disclosed, or used for any purpose not expressly authorized by the
owner thereof.
Since Parker Hannifin Corporation, Daedal Division constantly strives to improve all of its products, we
reserve the right to change this product manual and equipment mentioned therein at any time without
notice.
WARNING
For assistance contact:
Parker Hannifin Corporation
Daedal Division
1140 Sandy Hill Road
Irwin, PA 15642
Phone: 724/861-8200
800/245-6903
Fax: 724/861-3330
E-mail: ddlcat@parker.com
Web site: www.daedalpositioning.com
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual
,
MX80L Series Product Manual
Table of Contents
IMPORTANT USER INFORMATION............................................................................................................................................ 2
REVISION NOTES........................................................................................................................................................................ 4
CHAPTER 1 - INTRODUCTION ...................................................................................................................................................5
PRODUCT DESCRIPTION ............................................................................................................................................................... 5
UNPACKING ................................................................................................................................................................................. 5
RETURN INFORMATION.................................................................................................................................................................. 6
REPAIR INFORMATION................................................................................................................................................................... 6
WARNINGS AND PRECAUTIONS ...................................................................................................................................................... 6
SPECIFICATION CONDITIONS ......................................................................................................................................................... 7
ASSEMBLY DIAGRAM .................................................................................................................................................................... 8
CHAPTER 2 – MX80L SERIES TABLE SPECIFICATIONS ........................................................................................................ 9
ORDER NUMBER NOMENCLATURE ................................................................................................................................................. 9
DIMENSIONAL DRAWINGS............................................................................................................................................................ 10
GENERAL TABLE SPECIFICATIONS................................................................................................................................................ 13
MX80L SERIES TECHNICAL DATA................................................................................................................................................ 15
LINEAR MOTION GUIDE BEARING LIFE/LOAD COMPUTATION ........................................................................................................... 20
MX80L SERIES TECHNICAL DATA................................................................................................................................................ 21
ELECTRICAL SPECIFICATIONS ...................................................................................................................................................... 23
CLEAN ROOM PREPARATION ....................................................................................................................................................... 24
ENCODER SPECIFICATIONS ......................................................................................................................................................... 25
HALL EFFECT SPECIFICATION ...................................................................................................................................................... 25
LIMIT AND HOME SENSOR SPECIFICATIONS................................................................................................................................... 25
LOW ESD SPECIFICATIONS......................................................................................................................................................... 25
VIX DRIVE SPECIFICATIONS ........................................................................................................................................................ 25
CABLING AND WIRING DIAGRAMS................................................................................................................................................. 26
CHAPTER 3 - HOW TO USE THE MX80L................................................................................................................................. 27
MOUNTING ORIENTATIONS .......................................................................................................................................................... 27
MOUNTING SURFACE REQUIREMENTS .......................................................................................................................................... 27
LOAD MOUNTING REQUIREMENTS................................................................................................................................................ 28
LIMIT AND HOME SENSOR OPERATION........................................................................................................................................... 29
ADJUSTING THE LIMIT FLAG PROCEDURE...................................................................................................................................... 30
SETTING HOME SENSOR............................................................................................................................................................. 31
Z CHANNEL POSITION REFERENCE .............................................................................................................................................. 31
GROUNDING / SHIELDING ............................................................................................................................................................ 32
CABLING ................................................................................................................................................................................... 32
CABLE MANAGEMENT ................................................................................................................................................................. 32
PNEUMATIC COUNTERBALANCE ................................................................................................................................................... 33
CHAPTER 4 - PERFORMANCE................................................................................................................................................. 34
ACCELERATION LIMITS................................................................................................................................................................ 34
SPEED LIMITS ............................................................................................................................................................................ 34
THERMAL EFFECTS ON ACCURACY............................................................................................................................................... 35
THERMAL EFFECTS ON REPEATABILITY......................................................................................................................................... 35
CAUSES OF TEMPERATURE INCREASES ........................................................................................................................................ 36
COMPENSATING FOR THERMAL EFFECTS ...................................................................................................................................... 36
CHAPTER 5 - CONNECTING TO THE VIX AMPLIFIER............................................................................................................ 37
CHAPTER 6 - MAINTENANCE AND LUBRICATION................................................................................................................ 38
CROSS ROLLER BEARING LUBRICATION ....................................................................................................................................... 38
APPENDIX A - INTERNAL PROTECTION.................................................................................................................................39
INDEX.........................................................................................................................................................................................40
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Revision Notes
,
Revision Notes
Revision 1
Original Document
Revision 2 – 8/25/03
General
Made numerous spelling corrections
Added precision grade tables
Page 9 – Modified configurable to include precision grade tables
Page 13 – Modified specifications to include precision grade tables
Page 25 – Modified Low ESD description to include precision grade tables
Revision 3
Changed wiring block extension dimension on page 10
Page 29, 30, & 31, Changed Limits/Home from optical sensors to magnetic sensors
Revision 4
Removed Steps 5a & 5b from page 30 (Steps 5a & 5b were for optical Limits/Home)
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Chapter 1 - Introduction
,
Chapter 1 - Introduction
Product Description
MX80L Positioner
Although the MX80L is small in size and weight, it is large on performance and reliability. All key
components are integral to the unit - residing within the body of the stage to provide a clean looking,
reliable, unobstructed package. At the heart of the MX80L is an innovative non-contact linear servo
motor (patent pending). This direct drive motor has been optimized for force, speed, and acceleration, to
deliver outstanding performance and response. A high precision non-contact linear encoder provides
sub-micron resolution and repeatability. Selectable resolutions range from 10 nanometers to 5 microns.
Precision ground “zero cage creep” crossed roller bearing sets provide extremely smooth - precise linear
translation. Travel limit and home sensors are conveniently designed into the unit for easy adjustment
over the entire travel of the stage. Although there are no moving cables, 1 or 3 meters of hi-flex cabling
depending on configuration option is included and wired directly into the units. This hi-flex cabling
addresses cable flexing concerns associated with the second or third axis in multi-axis system.
Unpacking
Unpacking
Carefully remove the positioner from the shipping container and inspect the unit for any evidence of
shipping damage. Report any damage immediately to your local authorized distributor. Please save the
shipping container for damage inspection or future transportation.
Incorrect handling of the positioner may adversely affect the performance of the unit in its application.
Please observe the following guidelines for handling and mounting of your new positioner.
• DO NOT allow the positioner to drop onto the mounting surface. Dropping the positioner can
generate impact loads that may result in flat spots on bearing surfaces or misalignment of drive
components.
• DO NOT drill holes into the positioner. Drilling holes into the positioner can generate particles and
machining forces that may effect the operation of the positioner. Daedal will drill holes if
necessary; contact your local authorized distributor.
• DO NOT subject the unit to impact loads such as hammering, riveting, etc. Impacts loads
generated by hammering or riveting may result in flat spots on bearing surfaces or misalignment of
drive components.
• DO NOT lift the positioner by cables or cable management system. Lifting positioner by cables or
cable management system may effect electrical connections and/or cable management assembly.
The unit should be lifted by the base structure only.
• DO NOT expose positioner to mist, spray or submersion in liquids.
• DO NOT disassemble positioner. Unauthorized adjustments may alter the positioner’s
specifications and void the product warranty.
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Chapter 1 - Introduction
,
Return Information
Returns
All returns must reference a “Return Material Authorization” (RMA) number. Please call your local
authorized distributor or Daedal Customer Service Department at 800-245-6903 to obtain a “RMA”
number. See Daedal Catalog #8083/USA, for additional information on returns and warranty.
Repair Information
Out-of-Warranty Repair
Our Customer Service Department repairs Out-of-Warranty products. All returns must reference a “RMA”
number. Please call your local authorized distributor or Daedal Customer Service Department at 800245-6903 to obtain a “RMA” number. You will be notified of any cost prior to making the repair.
Warnings and Precautions
Hot Surfaces
DO NOT touch linear motor coils located in the base of the MX80, (see page 7, Assembly Diagram, for
component location), after high duty operation. Motor temperature may approach 125 C. The unit itself
may become warm or hot to the touch.
Electrical Shock
DO NOT take apart or touch any internal components of the positioner while unit is plugged into an
electrical outlet. SHUT OFF power before replacing components to avoid electrical shock.
High Magnetic Field
Unit may be HAZARDOUS to people with Pace Makers or any other 'magnetically-sensitive' medical
devices. Unit may have an effect on 'magnetically-sensitive' applications.
Ferrous Materials
The positioner's open design WILL ATTRACT ferrous materials. The customer must take additional
precautions in these applications to keep positioner free of these highly magnetic particles.
Vertical Operation
The MX80L is NOT recommended for vertical operation unless it is configured with the pneumatic assist
option. If the pneumatic assist is not used, the carriage and customer's load will fall in power loss
situations potentially causing product or load damage or personal injury.
General Safety
Because linear motors can accelerate up to 5 g's, and sometimes positioners move without warning,
keep all personnel away from dynamic travel range of positioner.
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Chapter 1 - Introduction
,
Specification Conditions
Specifications Are Temperature Dependent
Catalog specifications are obtained and measured at 20 Degrees C. Specifications at any other
temperature may deviate from catalog specifications. Minimum to maximum continuous operating
temperature range (with NO guarantee of any specification except motion) of a standard unit before
failure is 5 - 40 degrees C.
Specifications Are Mounting Surface Dependent
Catalog specifications are obtained and measured when the positioner is fully supported, bolted
down, and is mounted to a work surface that has a maximum flatness error of:
• Standard Grade: 0.003mm/300mm (0.0001”/ft)
• Precision Grade: 0.001mm/300mm (0.00004”/ft)
Table will operate with work surface 0.100mm/300mm but performance specifications will be
significantly effected.
Specifications Are Point of Measurement Dependent
Catalog specifications and specifications in this manual are measured from the center of the carriage,
38 mm above the carriage surface. All measurements taken at any other location may deviate from
these values.
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Chapter 1 - Introduction
,
Assembly Diagram
Anti Cage Creep
Cross Roller Bearings
Limit Flag Bracket
Left side of stage w.r.t. cables
CARRIAGE
+X
Travel
Encoder
Read
Head
Linear Motor
Coils
BASE
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
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Chapter 2 – MX80L Series Table Specifications
Order Number Nomenclature
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
,
Dimensional Drawings
10
Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
02
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Z-axis configuration with counter balance
25 and 50mm travel
MX80L-T01 OR T02
P/N 002-2223-01
CYLINDER ASSY.
5.6 [0.22]
13.1 [0.51]
P/N 100-9822-01
QTY.(2)
16.0 [0.63]
125.0 [4.92]
100mm travel
5.6 [0.22]
5.6 [0.22]
002-2223-02
CYLINDER ASSY.
002-2223-02
Cylinder Ass'y.
45.0 [1.77]
Z-AXIS SHOWN AT MID-TRAVEL POSITION
MX80L-T03
16.0 [0.63]
16.0 [0.63]
2.1 [0.08]
2.1 [0.08]
50.0 [1.97]
Z-Axis - shown at Mid-travel
MX80L-T03
220.0 [8.66]
P/N 100-9822Qty.(2)
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
P
C
,
150mm travel
MX80L-T04
/N 002-2223-03
YLINDER ASSY
5.7 [0.22]
16.0 [0.63]
285.0 [11.22]
P/N 100-9822-02
QTY.(2)
75.0 [2.95]
Z-Axis at Mid-travel
7.1 [0.28]
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Parker Hannifin Corporation
Daedal Division
Pennsylvania
Irwin
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