Parker X-Flow Operational Instructions

Attention

Please read this instruction manual carefully before

installing and operating the instrument.

Not following the guidelines could result in personal injury

and or damage to the equipment.

Even though care has been taken in the

preparation and publication of the contents

of this manual, we do not assume legal or

other liability for any inaccuracy, mistake,

misstatement or any other error of

whatsoever nature contained herein. The

material in this manual is for information purposes only, and is subject to change

without notice.

Precision Fluidics Division

August 2018

Page 2 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

1 General Product Information

1.1 Introduction

This user guide covers the X-Flow™ mass flow controllers for gasses as shown in the pictures below. Included is product information, installation instructions, operation, maintenance, troubleshooting and technical specifications.

601XF

1.2 Intended Use

The intended use of X-Flow™ instruments is to control gas flow rates of the specified gas noted on the instrument label. The gas must be clean. The instruments can be used for either (fast) switching or controlling a constant flow rate.

1.3 Symbols

Important information. Discarding this information could cause injuries to people or damage to the Instrument or installation.

Helpful information. This information will facilitate the use of this instrument.

Additional info available from the factory or your local sales representative.

1.4 Product Support References

Instructions:

Operating instructions digital instruments, document FM-1245. RS232 interface with FLOW-BUS protocol, document FM-1249

Technical drawings:

Hook-up diagram X-Flow™, document FM-1409 X-Flow™ Dimensional drawing 601XF, document A-4539 X-Flow™ Transition Plate Dimensional drawing, document A-4540

All these documents are available at www.parker.com/precisionfluidics/X-Flow™ or by request to ppfinfo@parker.com.

Page 4 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

1.5 Product Description

1.5.1 General Description

An X-Flow™ mass flow controller consists of a thermal mass flow sensor, a laminar flow element which acts as a bypass, a solenoid proportional control valve and a digital electronic PC-board for PIDcontrol and communication.

There is one model, 601XF, for flow rates from 40 ml/min to 20 l/min. For simplicity, the standard X-Flow™ configuration is optimized to provide the best repeatable flow measurement possible.

Page 5 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

1.5.2 Model Key

Example: 601XFFAAD00V

Gas: N2 Range: 90 ml/min Analog output: 0-5Vdc Seals: FKM

1.5.3 Seals

The instrument is fitted with FKM seals. It is the customer’s responsibility to ensure compatibility, there is no liability for damages accruing from the use of this manual or other sources regarding compatibility. Compatibility of seals with gasses can impact reliability of the instrument. The customer’s application will demand its own specific design or test evaluation for optimum reliability.

Check if the seals like O-rings, plunger and packing gland of capillary are suitable for the used gas and process.

Page 6 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

1.5.4 Calibration

2

1

2

1

ρ

⋅

=

p

C

CF

n

p

C

n

ρ

X-Flow™ instruments are Nitrogen calibrated. X-Flow™ instruments are delivered with a Calibration Certificate. Precision Fluidics certifies that all instruments meet the rated accuracy.

The calibration is converted to the customer’s gas and conditions using a detailed conversion model. This conversion adds a level of calibration uncertainty described below.

Basic rule for calculating the conversion uncertainty is typical: Uncertainty < 2% x CF for CF > 1 Uncertainty < 2% / CF for CF < 1

With CF defined as the approximate conversion factor, which can be calculated with:

in which:

(1) calibration fluid (N (2) customer fluid

Contact the factory for more information.

1.5.5 Features

Each instrument consists of an Analog interface, a digital RS-232 interface and a digital Modbus®/RS485 interface. The analog and the digital interface can be used together at the same time. According to the pin-designation both RS232 and Modbus®/RS485 are assigned to the same pins. When connecting these pins to either of the two, the instrument will automatically detect which protocol to use.

Digital operation adds many extra features (compared to analog operation) to the instruments. Such as:

• Setpoint slope (ramp function on setpoint for smooth control)

• Direct reading at readout/control module or host computer

• Several control/setpoint modes (e.g. purge/close valve)

• Identification (serial number, model number, device type, user tag)

• Adjustable controller settings for custom controller response

specific heat

density at normal conditions

)

2

Page 7 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

1.6 Operating Principles

mp

signal

cKV Φ⋅⋅=

1.6.1 Thermal Gas Flow Sensor Principle

The gas flow sensor operates on a principle of heat transfer by sensing the temperature difference along a heated section of a capillary tube. Part of the total flow is forced through the capillary by means of a laminar flow element in the main stream generating a pressure difference.

The design of the laminar flow device is such that flow conditions in both the capillary and laminar flow device are comparable, thereby resulting in proportional flow rates through the meter. The amount of heat absorbed by the gas flow derives the delta-T sensed by the upstream and downstream temperature sensors on the capillary.

The transfer function between gas mass flow and signal can be described by the equation:

= output signal

V

signal

K = constant factor

= specific heat

c

p

= mass flow

Φ

m

The temperature sensors are part of a bridge circuit. The imbalance is linearized and amplified to the desired signal level.

1.6.2 Bypass Principle

The measurement part of an X-Flow™ consists of a thermal sensor and a laminar flow element (LFE). A laminar flow element consists of a stack of discs with precision etched flow channels. The flow through each channel is proportional to the flow through the sensor. In this way, by adding more or fewer laminar flow discs, the total flow rate of an instrument can be adjusted while using the same sensor flow rate.

Page 8 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Example of a 50 ml/min measurement part

1.6.3 Solenoid Valve Principle

Flow Control Valve

The control valve used in the X-Flow™ series is a standard, direct operated control valve. It is a normally closed solenoid valve. The plunger is lifted by the force of the magnetic field of the coil. The diameter of the orifice under the plunger is optimised for the customer’s application.

The control valve is not designed to provide positive shut-off. It is recommended to install a separate shut-off valve in the line if so required. Also, pressure surges that may occur during system pressurization must be avoided.

1.7 Maintenance

Periodic maintenance of your mass flow controller is recommended to optimize the performance and to ensure prolonged use of the instrument. Because the nature of each application is different (type of gas, running time, environment, etc.) the user of the device will need to determine the frequency of recalibration and/or service of the instrument. An annual service that includes inspection and recalibration is suggested if an existing maintenance schedule is not already in place. Consider using the Parker Tracking System (PTS) for the management of your X-Flow™ mass flow controller. Each X-Flow™ mass flow controller has a unique PTS number assigned to it. Using PTS helps provide the user with an online solution for keeping track of assets and can be used as a reminder for upcoming service. Learn more about PTS at www.parker.com/pts

Units may be flushed with clean, dry inert gas.

In case of severe contamination, it may be required to clean the inside of the instrument. After cleaning, a recalibration is required. Contact ppfinfo@parker.com for cleaning and recalibration options.

Units may be sent back to the factory for service. Prior to sending the unit back an Authorization to Return (ATR) is required. Please contact us at 800-525-2857 or ppfinfo@parker.com details about our service.

AUTHORIZATION TO RETURN POLICY

Authorization to Return (ATR): You must obtain an ATR number from the factory in order that we may process your returned product. No material will be accepted for return without prior authorization from the factory and an ATR number shown on all packages and accompanying paperwork. All products returned must be free of any biological hazardous material and hazardous chemicals. Return products will not be accepted after 60 days from issuance of the ATR number. This policy has been set for our mutual protection in that it greatly reduces the possibility of misplaced returns. For product purchased through a Parker Sales Company, Division, or Service Center: You must obtain the ATR number from the location where you originally placed the purchase order. Warranty & Non-Warranty Return Policy: Reference Parker Precision Fluidics Division’s Terms & Conditions for specific details on Warranty Returns and Non-Warranty Returns.

Declaration of contamination form QA-415-D

.

for more

could be the result. It is therefore important that servicing is performed by trained and qualified service personnel.

If the equipment is not properly serviced, serious personal injury and/or damage to the equipment

Page 9 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

1.8 Introduction

Before installing an X-Flow™, it is important to read the attached label and check:

Inspect the X-Flow™ mass flow controller for damaged or missing parts.

The tested pressure is stated on the flow controller model code sticker. Check test pressure

mounted in the process line and must be returned to the factory.

This chapter discusses how to prepare the system and install a X-Flow™ mass flow controller.

1.9 Unpacking and inspection

Check the outside packing box for damage incurred during shipment. Should the packing box be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your Parker representative.

Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your Parker representative.

Contact your local Parker representative or ppfinfo@parker.com for return information.

- Flow rate

- Fluid to be measured

- Up- and downstream pressures

- Input/output signal (determined by the model code)

- Temperature

1.10 Rated pressure test inspection

Each X-Flow™ is pressure tested to at least 1.5 times the working pressure of the process conditions stipulated by the customer, with a minimum of 8 bar.

Each instrument is helium leak tested to at least 2⋅10

before installing in the line. If the sticker is not available or the test pressure is incorrect, the instrument should not be

1.11 Instrument mounting

The bottom side of an X-Flow™ consists of four mounting holes for stable mechanical fixation of the instrument. Two opposing mountings are suggested, one on the inlet and one on the outlet side of the instrument. Refer to the following documents for exact position of the mounting holes:

Dimensional drawing 601XF, document A-4539 and Transition Plate dimensional drawing A-4540

The preferred mounting position of X-Flow™ mass flow controllers is horizontal. Other mounting positions may introduce a zero shift and/or little gas and pressure dependency of the zero signal. When mounting an instrument other than horizontal, zeroing of the instrument is advised. The zeroing procedure is described in chapter 2.12.

-9

mbar l/s Helium outboard.

Avoid installation near mechanical vibration and/or heat sources.

1.12 Fluidic connections

The inlet and outlet cavities/fluid connection ports of X-Flow™ instruments have 9/16-18 UNF-2B (female) threads.

The instrument is shipped standard without fittings.

Page 10 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Available fitting kits include:

DO NOT install small diameter piping on high flow rates, because the inlet jet flow will affect

25 pipe diameters distance between regulator and gas flow controller inlet.

• 1/8” compression fitting with screen and O-ring, p/n B-1562-001V

• 1/4” compression fitting with screen and O-ring, p/n B-1562-000V

• 6 mm compression fitting with screen and O-ring, p/n B-1562-036V

Gas Connections

Each X-Flow™ mass flow controller has two (2) threaded process connection ports, one (1) located at each end of the base block. One (1) serves as the gas inlet while the other is the gas outlet. Make certain the tubing which mates to the fitting is correctly sized, clean and is seated against the shoulder in the body of the compression fitting, prior to tightening the connection. Tighten the fitting’s hex nut sufficiently to prevent leakage. Refer to the applicable fitting manufacturer’s data for specific recommendations regarding installation and tightening. Test joints for leaks. The inlet and outlet fittings contain a 325 mesh (44 micron) filter screen which prevents foreign matter from entering the instrument.

Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or other dangerous fluids are used.

1.13 In-line filter usage

Fluids to be measured should be free of dirt, oil, moisture and other particles. Fluids that are heavily contaminated or contain particulates are detrimental to precision. If liquid phases enter the sensor chamber, the function of the sensor and the mass flow controller may be impaired. It is recommended to install an in-line filter or liquid separator upstream of the flow controller, and if backflow can occur, a downstream filter is recommended too. Be aware of the pressure drop caused by the filter.

Contact ppfinfo@parker.com for further information.

1.14 Piping requirements

Be sure that piping is clean!

the accuracy. DO NOT mount abrupt angles direct on inlet and outlet, especially not on high flow rates, allow at least 10 pipe diameters distance between the angle and the instrument is recommended. DO NOT mount pressure regulators directly on the inlet of gas flow controllers, allow at least

1.15 Electrical connections

1.15.1 Interface

X-Flow™ instruments can be operated by means of:

1. Analog interface (0...5Vdc or 4...20mA)

2. RS232 interface with FLOW-BUS protocol

3. RS485 interface with Modbus® protocol

All above operation options are standard available in X-Flow™ instruments. According to the pin-designation both RS232 and RS485 are assigned to the same pins. When connecting these pins to either of the two, the instrument will automatically detect which protocol to use. When sending a frequent request to the instrument, it will be capable of recognizing the protocol, once the instrument detects this protocol, it will send an answer. The instrument will remember the detected protocol as long as the instrument is powered. This auto detection cannot be switched off or by-passed.

For electrical hook-up diagrams refer to document FM-1409, “Hook-up X-Flow™”

Page 11 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

This document is available from the factory. Contact ppfinfo@parker.com or

!

www.parker.com/precisionfluidics/x-flow

1.15.2 Power Supply

X-Flow™ controllers are powered with +15 Vdc to +24 Vdc. When providing your own power supply be sure that voltage and current rating are according to the specifications of the instrument(s) and furthermore that the source is capable of delivering enough power to the instrument(s). Refer to Hook-up X-Flow™ , document no. FM-1409, for more details.

Parker recommends the use of their standard cables. These cables have the right connectors and if loose ends are used, these will be marked to prevent wrong connection.

Parker Standard Cables available:

• C-700-002: 10 ft cable with connector and Flying Leads

• 7.03.366: T-Cable (see section on software)

• C-1739-010: CM-400 Cable Connector

When using other cables, cable wire diameters should be sufficient to carry the supply current and voltage losses must be kept as low as possible. When in doubt: contact the factory. X-Flow™ instruments carry the CE-mark. Therefore, they comply with the EMC requirements as are valid for these instruments. However, compliance with the EMC requirements is not possible without the use of proper cables and connector/gland assemblies.

When connecting the system to other devices (e.g. to PLC), be sure that the integrity of the shielding is not affected. Do not use unshielded wire terminals.

1.16 Power and warm-up

Before switching on power, check if all connections have been made according to the hook-up diagram. It is recommended to turn on power before applying pressure on the instrument and to switch off power after removing pressure. Check fluid connections and make sure there is no leakage. If needed purge the system with a proper fluid. Only purging with gases is allowed. Turn on power and allow at least 30 minutes to warm up and stabilize for optimal accuracy. During warm-up period, fluid pressure may either be on or off.

1.17 Pressure supply / Start-up

When applying pressure to the system, take care to avoid pressure shocks in the system and increase pressure gradually up to the level of the actual operating conditions.

1.18 System purging

To eliminate contamination from foreign materials, start-up cleaning is highly recommended prior to MFM/MFC installation Start-up cleaning must remove weld debris, tube scale and any loose particulate generated during system fabrication.

If corrosive gases or reactive gases are to be used, the complete gas handling system must be purged to remove all air before introducing process gas into the system. Purging can be accomplished with dry nitrogen or other suitable inert gases.

Also, if it becomes necessary to break any gas connection exposing the gas handling system to air, all traces of corrosive or reactive gas must be purged from the system before breaking the connection.

Never allowing a corrosive or reactive process to mix with air reduces the chance of particulate or precipitate formation in the gas handling system.

If explosive gases are to be used, purge the process with inert dry gas like Nitrogen, Argon etc. for at least 30 minutes. In systems with corrosive or reactive fluids, purging with an inert gas is necessary,

Page 12 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

because if the tubing has been exposed to air, introducing these fluids will tend to clog up or corrode the system due to a chemical reaction with oxygen or moist air. Complete purging is also required to remove such fluids from the system before exposing the system to air. It is preferred not to expose the system to air, when working with these corrosive fluids.

1.19 Zeroing

The zero point of each instrument is factory adjusted. However, the zero point may shift slightly due to temperature, pressure, gas type and mounting position influences. If so required, the zero point of the instrument may be re-adjusted.

Zeroing is possible over RS232 Flowbus®, RS485 Modbus® or by means of using the micro switch button on top of unit. Zeroing by means of using the micro switch button on top of unit is described in this manual.

• Warm-up, pressurize the system, and fill the instrument according to the process conditions.

• Make sure no flow is going through the instrument by closing valves near the instrument.

• The setpoint must be zero.

• Press the micro switch button on top of unit and hold it. After a short time the red LED will go ON

and OFF, then the green LED will go ON. At that moment release the micro switch button on top of unit.

• The zeroing procedure will start at that moment and the green LED will blink fast. The zeroing

procedure waits for a stable signal and saves the zero. If the signal is not stable zeroing will take a long time and the nearest point to zero is accepted. The procedure will take approx. 10 sec with a stable signal.

• When the process is completed the green LED is on continuously.

For information how to start the zeroing procedure over RS232 Flowbus® or RS485 Modbus® check chapter 4.1.4, “Auto Zeroing”

Page 13 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

2 Basic Operation

When operating the instrument through the analog interface it is possible to connect the

(e.g. controller response or other fluid selection).

2.1 General

An X-Flow™ instrument can be operated by means of:

• Analog interface (0...5Vdc/4...20mA)

• Digital RS232 Flowbus® interface (connected to COM-port by means of T cable (7.03.366) on

38400 Baud)

• Digital RS485 Modbus® interface.

Operation via analog or digital interface can be performed at the same time. A special parameter called “control mode” indicates to which setpoint source the controller should respond.

2.2 Analog operation

At analog operation following signals are available:

• Measured value (analog output)

• Setpoint (analog input)

The type of installed analog interface (0-5V, 4-20mA) can be found in the model key of the instrument. Refer to paragraph 1.5.2.

Setpoints below 2% of the full scale will be interpreted as 0% setpoint.

instrument simultaneously to RS232 or Modbus®/RS485 for reading/changing parameters

Page 14 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Description

At each power-on of the

If received data is If a valid message is

The protocol is detected.

Physical layer and communication protocol are detected automatically upon reception of

communication protocol. After every power-up the communication detection mode is active.

2.3 Digital communication protocol detection

(Flow-BUS RS232 or MODBUS® RS485

According to the pin-designation both RS232 and RS485 are assigned to the same pins. At each power-on/off the X-Flow™ instrument the digital communication protocol from the master (PLC/PC) must be detected by the X-Flow™ instrument. This auto detection cannot be switched off or by-passed.

X-Flow™ instrument a protocol detection routine is started and the communication lines switch each 110 ms between RS232 FLOWBUS, RS485 Modbus®RTU and RS485 Modbus®-ASCII.

recognized within the particular time frame of a protocol, then it will immediately switch to this protocol for 660 ms.

received the instrument will answer (reply) to this message and stay in the detected protocol.

The instrument will remember the detected protocol as long as the instrument is powered on.

2.4 Basic RS232 Flowbus® operation

RS232 Flowbus® communication can be used for operating your instrument using the FlowDDE server application. Dynamic Data Exchange (DDE) provides the user a basic level of inter-process communication between Windows applications.

messages. These messages must be sent using the correct combination of physical layer and

FlowDDE is a DDE server application. Together with a client-application, either self-made or with a SCADA-program from 3rd-parties, it is possible to create an easy way of data exchange between the flow controller and a Windows application.

Page 15 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

For example, a cell in Microsoft® Excel®® could be linked to the measured value of the flow controller

FlowDDE and other Parker X-Flow™ applications are available from the factory.

A special RS232 cable (7.03.366) can be ordered separately. It consists of a T-part with 1 male

(analog) sub-D 9 connector.

X-Flow

FlowDDE

Application 1

Application 2

Application n

RS232

DDE-link

Windows based Personal Computer

Instrument

and when the measured value changes, it will be automatically updated in the Excel®® spreadsheet.

server

Examples of DDE client applications: FlowPlot, FlowView, MS-Office, LabView, Intouch, Wizcon.

The FlowDDE server also offers a lot of test facilities and user adjustable settings for efficient communication with the connected flow controller.

How to setup a DDE link with FlowDDE is described in the help-file of the FlowDDE application. Programming examples are available for making applications in: Visual Basic, LabView and Excel®®.

FlowDDE parameter numbers: Reading/changing parameter values via FLowDDE offers the user a different interface to the instrument. Besides the application name: ‘FLowDDE’ there is only need of:

• topic, used for channel number: ‘C(X)’

• item, used for parameter number: ‘P(Y)’

A DDE-parameter number is a unique number in a special FLowDDE instruments/parameter database and not the same as the parameter number from the process on an instrument. Node-address and process number will be translated by FlowDDE to a channel number.

and 1 female sub-D 9 connector on one instrument-side and a normal female sub-D 9 connector on the side of the computer. By means of this cable it is possible to offer RS232 communication and still be able to connect power-supply and analog interface through the

2.5 Modbus® RS485 operation

This chapter is limited to the description of the interface between the Modbus® Mass Flow Controller with a master device. It will explain how to install an X-Flow™ instrument to your Modbus® system.

The implementation of the Modbus® interface is based on the following standards: [1] MODBUS® Application Protocol Specification V1.1b, December 28, 2006 [2] MODBUS® over Serial Line specification and implementation guide V1.02

There is no mutual communication between Modbus® slaves; only between master and slave.

More detailed information about Modbus® can be found at http://www.Modbus®.org or any website of the (local) Modbus® organization of your country (when available).

Page 16 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Physical layer and communication protocol are detected automatically upon reception of

messages. These messages must be sent using the correct combination of physical layer and

communication protocol. After every power-up the communication detection mode is active.

2.5.1 Slave address, baud rate and parity setup

Default instruments will be delivered to customers on address 1 and with a baud rate of 19200 baud and EVEN parity.

The slave address, baud rate and parity of the X-Flow™ controller Modbus® slave can be changed to fit the instrument in your existing Modbus® network. Changing the slave address, baud rate and parity can be done in the following ways

Using RS232: FlowDDE

‘Off-line’ via the RS232 communication port by means of FlowDDE. This program can be used to read/change parameters, including the slave address, baud rate and parity.

Connect your X-Flow™ controller Modbus® slave instrument to a free COM-port using the special cable with on one side a T-part with male and female sub-D 9 connector and on the other side a female sub-D 9 connector (part number 7.03.366). The single sub-D 9 connector should be connected to your COM-port and the female sub-D 9 of the T-part to the male sub-D 9 of the instrument. Standard cables are approx. 3 meters. Maximum length between PC and instrument allowed is approximately 10 meters.

Start FlowDDE and open communication via the menu (as shown below) or by pressing <F3>.

Once the DDE server is active, open the FlowDDE Test Form via the menu (as shown below) or by pressing <F6>.

Page 17 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

The following screen appears:

Green LED

Red LED

Time

Indication

amount of

(0...12)

Off

0 ... 12 sec.

tens in bus-address for instrument

Off

Amount of count

(0...9)

0 ... 9 sec.

units in bus-address for instrument

amount of

amount of count

1 ... 3 sec.

baud rate setting for instrument

3 = 38400 Baud

To read/change the slave address, parameter 199: Bus address must be selected. To read/change the baud rate, parameter 201: Baudrate must be selected. And to read/change the parity parameter 335: Bus1 Parity must be selected. To change one of these parameters parameter 7: Initreset has to be set to ‘64’ first.

Valid values for the slave address are between 1 and 247, valid values for the baud rate are 9600, 19200 and 38400, valid values for parity are 0 (= None), 1 (= Odd) and 2 (= Even). The changed values will be effective immediately after changing.

Note: There are no hardware switches available on the X-Flow™ instruments for Slave address and Baud rate setting.

Using micro-switch button and LEDs on top of the instrument

Readout bus-address/MAC-ID and baud rate:

Pressing the switch 3x briefly with intervals of max. 1 second in normal running/operation mode will trigger the instrument to “show” its bus-address/MAC-ID and baud rate.

For indication the bus-address/MAC-ID the green LED will flash the amount of tens and the red LED the amount of units in the number. For indication of baud rate setting, both LEDs will flash. The flashes are called “count-flashes” and have a pattern of 0.5 sec. on, 0.5 sec. off.

Table: LED indications for bus-address and baud rate

count flashes

flashes

count flashes (1...3)

Note: Value zero will be indicated by a period of 1 sec. off (0.5 sec. off + 0.5 sec. off).

Examples:

• For bus-address 35 / 9600 baud the green LED will flash 3 times, the red LED will flash 5 times and

both LEDs will flash 1 time.

• For bus-address 20 / 19200 baud the green LED will flash 2 times, the red LED will flash 0 times and

both LEDs will flash 2 times.

• For bus-address 3 / 38400 the green LED will flash 0 times, the red LED will flash 3 times and both

LEDs will flash 3 times.

Change bus-address/MAC-ID and baud rate:

Pressing the switch 5x briefly with intervals of max. 1 second in normal running/operation mode will trigger the instrument to enter the bus configuration mode. Within the time-out period of 60 sec. it is possible to start changing the bus-address/MAC-ID of the instrument (see table below).

flashes (1...3)

Maximum

1 = 9600 Baud 2 = 19200 Baud

Page 18 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Step

Action

Indication

time

handling

1

Set instrument

mode”

both LEDs off

Press switch 5x briefly

2

Set tens of bus-

Green LED flashes

0.5 sec off

time-out:

Press switch and count green

next attempt.

3

Set units of bus-

red LED flashes

time-out:

Press switch and count red

counting for next attempt.

4

Set baud rate of

both red and green

time-out:

Press switch and count red and

change

Parameter

Options

Remarks

Addressing

address configurable from 1 to 247 (default 1)

see section 3.5.1

broadcast support

Yes

Table 7: Procedure for changing bus-address and baud rate

to “bus config

address

Address

field bus communication.

1 = 9600 Baud 2 = 19200 Baud 3 = 38400 Baud

0.1 sec on,

0.1 sec off

count-flashes start when switch is pressed:

0.5 sec on,

0.1 sec on,

0.1 sec off

count-flashes start when switch is pressed:

0.5 sec on,

0.5 sec off

LED flashes

0.1 sec on,

0.1 sec off

count-flashes start when switch is pressed:

0.5 sec on,

0.5 sec off

60 sec

flashes for tens of bus-address. Release after desired count.

Counts up to max. 12 and then starts at 0 again. When counting fails, keep switch pressed and restart counting for

flashes for units of busaddress/MAC-ID. Release after desired count.

Counts up to max. 9 and then starts at 0 again. When counting failed, keep switch pressed and restart

green flashes for baud rate setting. Release after desired count.

Counts up to max. 3 and then starts at 0 again. When counting failed, keep switch pressed and restart counting for next attempt.

Note: selection of 0 means: No

Instrument returns to normal running/operation mode. Changes are valid when they are made within the time-out times. Actual setting can be checked by pressing the switch 3x briefly with intervals of max. 1 sec. for readout the bus-address/MAC-ID and baud rate.

Note 1: Value zero will be indicated by a period of 1 sec. off (0.5 sec. off + 0.5 sec. off). When value zero is wanted, press switch shortly and release it again within 1 sec.

Note 2: Before each action of flash-counting, the LED(s) to be used for counting will flash in a high frequency. (Pattern: 0.1 sec on, 0.1 sec off). As soon as the switch is pressed-down, this LED (or both LEDs) will be off and the counting sequence will start.

Note 3: The parity setting cannot be read or changed using the micro-switch.

2.5.2 Implementation class

The physical and data link layer is implemented conforming to the "basic slave" implementation class as described in document [2], “MODBUS® over Serial Line specification and implementation guide V1.02”. The following options have been implemented:

Page 19 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

The maximum message size for the Read Holding Registers function is 100 bytes at 9600

corrupted responses may be received.

Sub-function code (dec)

Name

00

Return Query Data

!

baud rate

9600, 19200 (default), 38400

see section 3.5.1

parity

None, Odd, Even (default)

see section 3.5.1

transmission mode

RTU/ASCII

Auto detection data bits

RTU=8, ASCII=7

not configurable

electrical interface

RS485 2W-cabling

See document:

(Basic)

connector type

DB9 Male

See document:

(Basic)

More detailed information about Modbus® can be found at http://www.Modbus®.org or any website of the (local) Modbus® organization of your country (where available).

2.5.3 Response time

This slave device will respond on each valid request from the master within 100 msec. This means that the response timeout setting of the master should be set to a value larger than or equal to 100 ms.

2.5.4 Supported Modbus® functions

This section describes the supported Modbus® function codes. Refer to document [1] “MODBUS® Application Protocol Specification V1.1b, December 28, 2006” for more details.

FM1263 - Hook-up diagram Series II B

More detailed information about Modbus® can be found at http://www.Modbus®.org or any website of the (local) Modbus® organization of your country (where available).

Read Holding Registers (03)

Possible exception responses:

• 02, ILLEGAL DATA ADDRESS, in case of reading of non-existing address, or reading a part of a

multiregister parameter (float, long, etc)

• 03, ILLEGAL DATA VALUE, in case of reading less than 1 or more than 125 registers

• 04, SLAVE DEVICE FAILURE, in case of reading a write-only register

baud (200 bytes at 19200 baud and 400 bytes at 38400 baud). When this size is exceeded,

Write Single Register (06)

Possible exception responses:

• 02, ILLEGAL DATA ADDRESS, in case of writing to non-existing address, or writing to a part of a

multiregister parameter (float, long, etc)

• 04, SLAVE DEVICE FAILURE, in case of writing to read-only register

• 04, SLAVE DEVICE FAILURE, in case of writing illegal value to register

Write Multiple Registers (16)

Possible exception responses:

• 02, ILLEGAL DATA ADDRESS, in case of writing to non-existing address, or writing to a part of a

multiregister parameter (float, long, etc)

• 03, ILLEGAL DATA VALUE, in case of reading less than 1 or more than 123 registers

• 04, SLAVE DEVICE FAILURE, in case of writing to read-only register

• 04, SLAVE DEVICE FAILURE, in case of writing illegal value to register

When one of the written registers raises an exception, the value written to all subsequent registers are discarded (ignored).

Diagnostics (08)

The following sub-functions are supported:

Page 20 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Sub-function code (dec)

Name

10

Clear Counters and Diagnostics Register

11

Return Bus Message Count

12

Return Bus Communication Error Count

13

Return Bus Exception Error Count

14

Return Slave Message Count

15

Return Slave No Response Count

16

Return Slave NAK Count (always 0)

17

Return Slave Busy Count (always 0)

18

Return Bus Character Overrun Count

The maximum message size for the Return Query Data sub function is 100 bytes at 9600 baud

corrupted responses may be received.

MODBUS® REGISTERS

Hex

Dec

Wink

Unsigned char

W

0x0000

0x0001

1

Value 14592

Init/reset

Unsigned char

RW

0x000A

0x000B

11

Valve output

Unsigned int

RW

0x001F

0x0020

32

0..32767

Measure

Unsigned int

R

0x0020

0x0021

33 Setpoint

Unsigned int

RW

0x0021

0x0022

34 Setpoint slope

Unsigned int

RW

0x0022

0x0023

35 Analog input

Unsigned int

R

0x0023

0x0024

36

Setp. control modes

Unsigned char

RW

0x0024

0x0025

37 Sensor type

Unsigned char

RW 

0x002E

0x002F

47 Capunit

Unsigned char

RW 

0x002F

0x0030

48

Fluid number

Unsigned char

RW

0x0030

0x0031

49

Alarminfo

Unsigned char

R

0x0034

0x0035

53 Temperature

Unsigned int

R

0x0427

0x0428

1064

Identnumber

Unsigned char

RW 

0x0E2C

0x0E2D

3629

ContrResp

Unsigned char

RW 

0x0E45

0x0E46

3654

CycleTime

Unsigned char

R

0x0E4C

0x0E4D

3661

RespStable

Unsigned char

RW 

0x0E51

0x0E52

3666

RespOpen0

Unsigned char

RW 

0x0E52

0x0E53

3667

Calibration mode

Unsigned char

RW 

0x0E61

0x0E62

3682

Monitor mode

Unsigned char

RW 

0x0E62

0x0E63

3683

Reset

Unsigned char

W

0x0E68

0x0E69

3689

Sensor zero potmeter

Unsigned char

RW 

0x0E85

0x0E86

3718

!

(200 bytes at 19200 baud and 400 bytes at 38400 baud). When this size is exceeded,

Possible exception responses:

• 01, ILLEGAL FUNCTION, in case of not-supported sub-function

• 03, ILLEGAL DATA VALUE, in case of an incorrect value for the data field

Report Slave ID (17)

The Slave ID field in the response is a string with the same contents as FlowDDE parameter 1 (indent number + version nr/serial nr). The Run Indicator Status field in this message will indicate ON when the device is in normal operating mode (FB_NORMAL).

Possible exception responses:

• 04, SLAVE DEVICE FAILURE, in case of an internal error

2.5.5 Available parameters

Modbus® registers (in the data model) are numbered from 1 to 65536. In a Modbus® PDU (Protocol Data Unit) these registers are addressed from 0 to 65535.

The following table lists the most commonly used parameters.

PARAMETER NAME

PARAMETER TYPE

ACCESS PDU

ADDRESS hex

REGISTER NUMBER

REMARK

Page 21 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Modbus® slave addr.

Unsigned char

RW 

0x0FAA

0x0FAB

4011

Polycnst A

Float

RW 

0x8128..0x81 29

0x8129..0x812 A

33065..3306 6

Polycnst B

Float

RW 

0x8130..0x81 31

0x8131..0x813 2

33073..3307 4

Polycnst C

Float

RW 

0x8138..0x81 39

0x8139..0x81A

33081..3308 2

Polycnst D

Float

RW 

0x8140..0x81 41

0x8141..0x814 2

33089..3309 0

TdsDn

Float

RW 

0x8158..0x81 59

0x8159..0x815 A

33113..3311 4

TdsUp

Float

RW 

0x8160..0x81

61

0x8161..0x816

33121..3312

Capacity

Float

RW 

0x8168..0x81 69

0x8169..0x816 A

33129..3313 0

Fluid name

String (10 bytes)

RW 

0x8188..0x81 8C

0x8189..0x818 D

33161..3316 5

Capacity unit string

String (7 bytes)

RW 

0x81F8..0x81 FB

0x81F9..0x81F C

33273..3327 6

Fmeasure

Float

R

0xA100..0xA1 01

0xA101..0xA10 2

41217..4121 8

Fsetpoint

Float

RW

0xA118..0xA1 19

0xA119..0xA11 A

41241..4124 2

Temperature

Float

R

0xA138..0xA1 39

0xA139..0xA13 A

41273..4127 4

Capacity 0%

Float

RW 

0xA1B0..0xA1 B1

0xA1B1..0xA1B 2

41393..4139 4

Device type

String (6 bytes)

R

0xF108..0xF1 0A

0xF109..0xF10 B

61705..6170 7

Model number

String (14 bytes)

RW 

0xF110..0xF1 16

0xF111..0xF11 7

61713..6171 9

Serial number

String (16 bytes)

RW 

0xF118..0xF1 1F

0xF119..0xF12 0

61721..6172 8

Manufacturer config

String (16 bytes)

RW 

0xF120..0xF1 27

0xF121..0xF12 8

61729..6173 6

Firmware version

String (5 bytes)

R

0xF128..0xF1 2A

0xF129..0xF12 B

61737..6173 9

Usertag

String (13 bytes)

RW

0xF130..0xF1 36

0xF131..0xF13 7

61745..6175 1

IOStatus

Unsigned char

RW 

0xF258..0xF2 59

0xF259..0xF25 A

62041..6204 2

PID Kp

Float

RW 

0xF2A8..0xF2 A9

0xF2A9..0xF2A A

62121..6212 2

PID Ti

Float

RW 

0xF2B0..0xF2 B1

0xF2B1..0xF2B 2

62129..6213 0

PID Td

Float

RW 

0xF2B8..0xF2 B9

0xF2B9..0xF2B A

62137..6213 8

Kspeed

Float

RW

0xF2F0..0xF2 F1

0xF2F1..0xF2F 2

62193..6219 4

Dynamic displ. factor

Float

RW 

0xF508..0xF5 09

0xF509..0xF50 A

62729..6273 0

Static displ. factor

Float

RW 

0xF510..0xF5 11

0xF511..0xF51 2

62737..6273 8

Exp. Smoothing filt.

Float

RW 

0xF520..0xF5 21

0xF521..0xF52 2

62753..6275 4

Modbus® baud rate

Long integer

RW 

0xFD48..0xFD 49

0xFD49..0xFD4 A

64841..6484 2

2

Notes:

• Access indicates whether parameter can be Read and/or Written.

• When a byte parameter is read, the upper 8-bits of the Modbus® register will be 0. When a byte

parameter is written, the upper 8-bits must be set to 0.

Page 22 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

• Long integer parameters have a length of 4 bytes and are mapped on two consecutive Modbus®

registers. The first register contains bit 32-16, the second register contains bit 15-0.

• Floating point parameters have a length of 4 bytes and are mapped on two consecutive Modbus®

registers. Floats are in single precision IEEE format (1 sign bit, 8 bits exponent and 23 bits fraction). The first register contains bit 32-16, the second register contains bit 15-0.

• String parameters can have a length of maximal 16 bytes and can take up to 8 Modbus® registers

where each register contains two characters (bytes). The upper byte of the first register contains the first character of the string. When writing strings, the write action should always start from the first register as a complete block (it is not possible to write a part of a string). If the string is shorter than the specified maximum length the string should be terminated with a 0.

Page 23 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

2.6 Push-button operation

LED’s

Time

Indication

Green

Red

Off

0 – 1 sec

Pressing a switch shortly by accident will not cause

3.5, “Modbus® RS485 operation” for more details.

Off

1 – 4 sec

Off

On

4 – 8 sec

Reset instrument

self-test

On

Off

8 – 12 sec

Auto-zero

is connected to power for at least 30 minutes!

On

12 – 16

Prepare instrument for FLASH mode for firmware

At next power-up instrument will be active again.

LED’s

Time

Indication

Green

Red

off

Off

0 – 4 sec

No action

cause unwanted reactions of the instrument

off

normal

4 – 8 sec

Restore parameters

restored to situation of final test at Parker production

normal flash

Off

8 – 12 sec

No action

normal

12 – 16

Manual install. The bus address and baudrate can be

address/MAC-ID and baud rate).

By means of manual operation of the micro push-button switch some important actions for the instrument can be selected/started. These options are available in both analog and digital operation mode.

Pushed

unwanted reactions of instrument. Pressing the switch 3x briefly with intervals of max. 1 sec. will force instrument to indicate its busaddress/MAC-ID and evt. baud rate. Check chapter

Instrument program will be restarted and all warning and error message will be cleared During (new) start-up, instrument will perform a (new)

Instrument will be re-adjusted for measurement of zero-flow (not for pressure meter/controller) NOTE: First make sure there is no flow and instrument

sec

LED indications using micro-switch button at normal running mode of an instrument

Pushed

flash

LED indications using micro-switch at power-up situation of an instrument

flash

sec

update. Instrument shuts down and both LEDs turn off.

Pressing a switch shortly by accident will not

All parameter settings (except field bus settings) will be

changed by means of micro-switch en LEDs. The procedure is described in 3.5.1 (Change bus-

2.7 Micro-switch use for reading/changing control mode

2.7.1 Read control mode

For switching between different functions in use of a digital controller several modes are available. More information about the available control modes can be found at parameter “Control mode”. Pressing the switch 2x briefly with intervals of max. 1 second in normal running/operation mode will trigger the instrument to “show” its control mode. For indication of the control mode number the green LED will flash the amount of tens and the red LED the amount of units in the number. The flashes are called “count-flashes” and have a pattern of 0.5 sec. on, 0.5 sec. off. The control mode numbers can be found at parameter “control mode”.

Page 24 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

View current control mode (press switch 2x briefly)

LED’s

Time

Indication

Green

Red

amount of count

flashes (0…2)

Off

0 … 2 sec. maximum

tens in control mode number

off

amount of count

flashes (0…9)

0 … 2 sec. maximum

units in control mode number

Value zero will be indicated by a period of 1 sec. off (0.5 sec. off + 0.5 sec off).

View current control mode (press switch 2x briefly)

Step

Action

Indicatio

n

Time

Handling

Green

Red

Green

(0…2)

Off

0 … 2

tens in control mode number

off

amount

(0…9)

0 … 2

m

units in control mode number

LED’s

Time

Indication

Green

Red

slow wink

0.2 sec

off

Wink mode

fast wink

0.1 sec

off

Switch-released, selected action started.

Green

LED

Time

Indication

Off

Continuously

Power-off or program not running

On

Continuously

Normal running/operation mode

Flash

0.2 sec on,

Special function mode

E.g. auto-zero or self-test

Red LED

Time

Indication

Off

Continuously

No error

Flash

Variable

Bus activity on the Modbus® interface

On

Continuously

Critical error message

Instrument needs service before further using

!

2.7.1 Change control mode:

For switching between different functions in use of a digital controller several modes are available. More information about the available control modes can be found at parameter “Control mode”. Pressing the switch 4x briefly with intervals of max. 1 second in normal running/operation mode will trigger the instrument to “change” its control mode.

2.8 LED indications

Green and Red LED turn-by-turn indication modes (no switch used)

amount

of count

flashes

of count

flashes

on,

0.2 sec

on,

0.1 sec

sec. maximu m

sec. maximu

By a command send to the instrument.

0.2 sec off

Green LED indication modes (no switch used)

Red LED indication modes (no switch used)

Page 25 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Instrument is busy performing any special function.

A serious error occurred in the instrument

2.9 Basic Parameters and Properties

Type

Access

Range

FlowDDE

Flowbus®

Modbus®

[type]

RW 

[x]…[y]

[FB]

[Pro]/[Par]

[address]/[index]

When operating the instrument through the analog interface it is possible to connect the

2.9.1 Introduction

Every parameter has its own properties. These properties are given in a table as shown:

Type

Unsigned char 1 byte character Unsigned char[x] x byte array (string) Unsigned int 2 byte unsigned integer Float 4 byte floating point

Access

R The parameter is read-only RW The parameter can be read and write RW The parameter can only be written when the Init Reset parameter is set to 64. See Chapter

4.1.1, General Product Information for more details.

Range

Some parameters only accept values within a certain range: [x] Minimal value of the range. [y] Maximal value of the range.

FlowDDE

Parameter number in FlowDDE. Check chapter 0, “At analog operation following signals are available:

• Measured value (analog output)

• Setpoint (analog input)

The type of installed analog interface (0-5V, 4-20mA) can be found in the model key of the instrument. Refer to paragraph 1.5.2.

Setpoints below 2% of the full scale will be interpreted as 0% setpoint.

instrument simultaneously to RS232 or Modbus®/RS485 for reading/changing parameters (e.g. controller response or other fluid selection).

Page 26 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Description

At each power-on of the

If received data is If a valid message is

The protocol is detected.

2.10 Digital communication protocol detection

(Flow-BUS RS232 or MODBUS® RS485

According to the pin-designation both RS232 and RS485 are assigned to the same pins. At each power-on/off the X-Flow™ instrument the digital communication protocol from the master (PLC/PC) must be detected by the X-Flow™ instrument. This auto detection cannot be switched off or by-passed.

X-Flow™ instrument a protocol detection routine is started and the communication lines switch each 110 ms between RS232 FLOWBUS, RS485 Modbus®RTU and RS485 Modbus®-ASCII.

recognized within the particular time frame of a protocol, then it will immediately switch to this protocol for 660 ms.

received the instrument will answer (reply) to this message and stay in the detected protocol.

The instrument will remember the detected protocol as long as the instrument is powered on.

Basic RS232 Flowbus® operation”, for detailed information.

Page 27 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Flowbus®

Process and parameter number to address parameters using the Flowbus® protocol. [Pro] Flowbus® process number [Par] Flowbus® parameter number “RS232 interface with FLOW-BUS protocol”, for detailed information.

Modbus®

PDU Address and register number to address parameters using the Modbus® protocol. [address] Hexadecimal PDU address. [index] Decimal register number. For the Modbus® protocol every 2 bytes are addressed separately. Check chapter 3.5, “Modbus® RS485 operation” for more details.

2.10.1 Basic Parameters

Type

Access

Range

FlowDDE

Flowbus®

Modbus®

Unsigned int

R

0…41942

8

1/0

0x0020/33

Type

Access

Range

FlowDDE

Flowbus®

Modbus®

Unsigned int

RW

0…41942

9

1/1

0x0021/34

Type

Access

Range

FlowDDE

Flowbus®

Modbus®

Unsigned int

RW

0…18

12

1/4

0x0024/37

Value

Mode

Instrument action

Setpoint source

0

DIGITAL_INPUT

Controlling

RS232/RS485

1

ANALOG_INPUT

Controlling

Analog input

3

VALVE_CLOSE

Valve closed

4 CONTROLLER_IDLE

Idle 5

TEST_MODE

Test mode enabled

7 SETPOINT_100

Controlling @100%

Fixed 100%

8

VALVE_OPEN

Valve full opened

9 CALIBRATION_MODE

Calibration mode enabled

12

SETPOINT_0

Controlling @0%

Fixed 0%

18

RS232_INPUT

Controlling

RS232 Flowbus®

Measured Value (Measure)

The measured value indicates the amount of mass flow metered by the instrument. The signal of 0...100% will be presented in a range of 0...32000. The maximum signal to be expected is

131.07 %, which is: 41942.

Setpoint

Setpoint is used to set the wanted amount of mass flow. Signals are in the same range as the measured value, only setpoint is limited between 0 and 100 %.

Control Mode

The Controller mode is used to select different functions of the instrument. The following modes are available:

After power-up the control mode will always be set to DIGITAL_INPUT or ANALOG_INPUT, depending on customer’s requirement. Check chapter 4.1.6, Changing Default Control Mode, to change the startup mode.

Page 28 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

3 Advanced Operation

All parameters described in this chapter have influence on the behaviour of the mass-flow

these parameters use set parameter “Init Reset” to “UN-LOCKED”

Type

Access

Range

FlowDDE

Flowbus®

Modbus®

Unsigned char

RW

82/64

7

0/10

0x000A/11

Value

Mode

Instrument action

82

LOCKED

Advanced parameters are read-only

64

UN_LOCKED

Advanced parameters are write- en readable.

Type

Access

Range

FlowDDE

Flowbus®

Modbus®

Unsigned char[20]

R - 92

113/3

0xF118..0xF11F/61721..61728

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char[14]

R - 91

113/2

0xF111..0xF117/61713..61719

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char[5]

R - 105

113/5

0xF128..0XF12A/61737..61739

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char[13]

RW 

-

115

113/6

0xF130..0xF136/61745..61751

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char[16]

RW 

-

93

113/4

0xF120..0xF127/61729..61736

!

3.1 Reading and Changing Instrument Parameters

3.1.1 Introduction

meter. Please be aware that wrong settings can disorder the output and control response. To avoid careless changes of these parameters, these parameters are locked. To un-lock

Init Reset

The Init Reset parameter is used to ‘Un-Lock’ advanced parameters for writing. This parameter knows the following values:

This parameter is always set to “LOCKED” at power-up.

3.1.2 Identification

Serial number

This parameter consists of a maximum 20-byte string with instrument serial number for identification. Example: “P436435A”

X-Flow™ Model number

Parker instrument model number information string.

Firmware version

Revision number of firmware. Eg. “V1.12”

Usertag

User definable alias string. Maximum 13 characters allow the user to give the instrument his own tag name.

Customer model

Digital instrument manufacturing configuration information string. This string can be used by Parker to add extra information to the model number information.

Page 29 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

3.1.3 Fluid Information

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char[10]

RW 

-

25

1/17

0x8188..0x818C/33161..33165

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char[7]

R - 129

1/31

0x81F8..0x81FB/33273..33276

Type

Access

Range

FlowDD E

Flowbus®

Modbus® PDU

Float

R

±1E-10… ±1E+10

21

1/13

0x8168..0x8169/33129..331 30

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Float

R

±1E-10… ±1E+10

183

33/22

0xA1B0..0xA1B1/41393..41394

Type

Access

Range

FlowDDE

Flowbus®

Modbus®

Unsigned int

RW

0…18

12

1/4

0x0024/37

Type

Access

Range

FlowDDE

Flowbus®

Modbus®

Unsigned int

RW 

9

58

115/1

0x0E61/3682

Value

Mode

Instrument action

0

IDLE

Idle

9

AUTO_ZERO

Auto-zeroing

255

ERROR

Idle

Next parameters give information about the fluid range of the instrument.

Fluid name

Fluid name consists of the name of the fluid. Up to 10 characters are available for storage of this name.

Fluid unit

The Fluid unit can be read by parameter ‘capacity unit’. This parameter contains the unit in maximal 7 characters.

Fluid Capacity (@100%)

Capacity is the maximum value (span) at 100% for direct reading in sensor base units.

Fluid Capacity (@0%)

This is the capacity zero point (offset) for direct reading in sensor base units.

3.1.4 Auto Zeroing

To start the auto zero-procedure two parameters should be written:

Control Mode

Check chapter 3.10.1, “Basic Parameters”, for available control modes.

Calibration Mode

Procedure:

Step 1: Set Control Mode to CALIBRATION_MODE (9) Step 2: Set Calibration Mode to AUTO_ZERO(9) Step 3: Check Calibration Mode,

IDLE Auto-zeroing succeeded AUTO_ZERO Auto-zeroing active ERROR Auto-zeroing failed

3.1.5 Controller Response Adjustment

The controller settling time of X-Flow™ instruments is factory adjusted to approximately 1 second at customer process conditions. When real process conditions differ from supplied data, or when a faster or slower controller response is needed, a readjustment can be performed.

Page 30 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Settling time is defined as the time to reach the setpoint (and stay) within ± 2% of the initial

setpoint

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Float

RW 

0…1E+10

167

114/21

0xF2A8..0xF2A9/62121..62122

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Float

RW 

0…1E+10

254

114/1

0xF2F0..0xF2F1/62193..62194

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Float

RW 

0…1E+10

168

114/22

0xF2B0..0xF2B1/62129..62130

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Float

RW 

0…1E+10

169

114/23

0xF2B8..0xF2B9/62137..62138

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char

RW 

0…255

165

114/18

0x0E52/3667

∫

d +

K

S

+

-

Curve

Sensor

Control Valve

Flow

Setpoint

Kp K

K

P I D

The picture below shows the basic controller diagram of the X-Flow™. It consists of a standard PID controller with a number of add-ons.

open

speed

dt

Basically, when a faster or slower controller response is needed, only the controller gain Kspeed or Kp has to be changed.

normal

stable

Corr

Kp (PIDKp)

Proportional action of the PID controller.

Kspeed

Ti (PIDTi)

Integration action in seconds of the PID controller. The value should not be changed.

Td (PIDTd)

Differentiation action in seconds of the PID controller. Default Value: 0.0 This value should not be changed.

Kopen (RespOpen0)

Controller response when starting-up from 0% (when valve opens). Value 128 is default and means: no correction. Otherwise controller speed will be adjusted as follows:

(128-RespOpen0)

Page 31 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

New response = old response * 1.05

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char

RW 

0…255

72

114/5

0x0E45/3654

05

.1

)128(

__

contresp

oldresponsenew

response

−

⋅=

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char

RW 

0…255

141

114/17

0x0E51/3666

05.1

)128(

__

respstable

oldresponsenewresponse

−

⋅=

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char

RW 

0…255

86

114/11

0xF258/62041

])

400

[(

xOR

])400[( xAND

Knormal (ContrResp)

Controller response during normal control (at setpoint step) Value 128 is default and means: no correction. Otherwise controller speed will be adjusted as follows:

Kstable (RespStable)

Controller response when controller is stable (within band of 2% of setpoint) Value 128 is default and means: no correction. Otherwise controller speed will be adjusted as follows:

3.1.6 Changing Default Control Mode

Instruments are delivered with either analog or digital signal as default setpoint, depending on customer’s requirement. After every (power on) reset the instrument will return to its default control mode.

The default control mode can be changed with the following parameter:

IOStatus

Bit 6 [7..0] represents the former analog jumper. 1 = default control mode is analog 0 = default control mode is digital

Procedure for changing default digital operation to default analog operation:

• Read IOStatus

• Add 64 to the read value

• Write IOstatus

Procedure for changing default analog operation to default digital operation:

• Read IOStatus

• Subtract 64 from the read value

• Write IOstatus

3.1.7 Display Filter

The output signal of an X-Flow™ instrument (measured value) is filtered. The filter has dynamic behaviour: when a change in sensor signal is detected, the measured value will be less filtered than when the sensor signal is constant and stable. There are two filter constants: Static Display Factor and Dynamic Display Factor. These two factors can be transformed into time constants using the following formula:

Page 32 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

factor

cycletime

−

⋅

=

1

τ

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Float

RW 

0 …

1.0

56

117/1

0xF508..0xF509/62729..62730

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Float

RW 

0 …

1.0

57

117/2

0xF511..0xF512/62737..62738

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char

R

0…255

52

114/12

0x0E4C/3661

Type

Access

Range

FlowDDE

Flowbus®

Modbus® PDU

Unsigned char

RW 

0…255

86

114/11

0xF258/62041

The measured value is filtered with a first order low pass filter with a filter time constant between these two τ values.

Dynamic Display Factor

Static Display Factor

CycleTime

Note: The unit of parameter CycleTime is 10ms. Example: value 0.2 means 2ms

3.1.8 Disabling Micro Switch

It is possible to disable the Micro Switch on top of the instrument. This can prevent undesired use of this button.

Disabling the micro switch can be performed with the following parameter:

IOStatus

Bit 3 [7..0] is used to disable the micro switch. 0 = micro switch disabled 1 = micro switch enabled

Procedure to enable the micro switch:

• Read IOStatus

• Add 8 to the read value

• Write IOstatus

Procedure to disable the micro switch:

• Read IOStatus

• Subtract 8 from the read value

• Write IOstatus

3.2 Using other gasses than specified

Each instrument has been calibrated and adjusted for customer process conditions. Controllers or valves may not operate correctly, if process conditions vary too much, because of the restriction of the orifice in the valve. For flowmeters performance and accuracy may be affected tremendously if physical fluid properties such as heat capacity and viscosity change due to changing process conditions. Check chapter 1.6, “Operating Principles”, for detailed information about the sensor principle.

3.2.1 Fluid conversion factor information

Contact the factory for more information on conversion factors, at any temperature/pressure combination, when converting to different fluids and gases.

Page 33 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

3.2.2 Maximum pressure drop

Diameter [mm]

Kv

Normally

∆p max. [bard]

0.05

2.00

4.33 x 10-5

6.63 x 10-2

10

3.6

For solenoid operated control valves with small orifices the maximum allowable pressure drop for gases is according to the table below.

closed

0.07

0.10

0.14

0.20

0.30

0.37

0.50

0.70

1.00

1.30

1.50

1.70

8.48 x 10-5

1.73 x 10

3.39 x 10

6.93 x 10

1.56 x 10

2.37 x 10

4.33 x 10

8.48 x 10

1.73 x 10

2.93 x 10

3.90 x 10

5.00 x 10

-4

-3

-2

10 10 10 10 10 10 10 10 10 8 6 5

Also, the minimum pressure drop is limited. For exact figures consult factory.

Page 34 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

4 Troubleshooting

View current control mode (press switch 2x briefly)

LED’s

Time

Indication

Green

Red

amount of count

flashes (0…2)

Off

0 … 2 sec. maximum

tens in control mode number

off

amount of count

flashes (0…9)

0 … 2 sec. maximum

units in control mode number

Value zero will be indicated by a period of 1 sec. off (0.5 sec. off + 0.5 sec off).

View current control mode (press switch 2x briefly)

Green

Red

Green

(0…2)

Off

0 … 2

tens in control mode number

off

amount

(0…9)

0 … 2

m

units in control mode number

!

4.1 General

For a correct analysis of the proper operation of a flow/pressure meter or controller it is recommended to remove the unit from the process line and check it without applying fluid supply pressure. In case the unit is dirty, this can be ascertained immediately by loosening the compression type couplings and, if applicable the flange on the inlet side.

Energizing or de-energizing of the instrument of the instrument indicates whether there is an electronic failure. After that, fluid pressure is to be applied in order to check behaviour. If there should be suspicion of leakage in case of a gas unit, do not check for bubbles with a leak detection liquid under the cover as this may lead to a short-circuit in the sensor or p.c.board.

4.2 LED indications

4.3 The two LEDs on the instrument give information about the status of the

instrument. Check chapter 3.7, “Micro-switch use for reading/changing control mode

4.3.1 Read control mode

For switching between different functions in use of a digital controller several modes are available. More information about the available control modes can be found at parameter “Control mode”. Pressing the switch 2x briefly with intervals of max. 1 second in normal running/operation mode will trigger the instrument to “show” its control mode. For indication of the control mode number the green LED will flash the amount of tens and the red LED the amount of units in the number. The flashes are called “count-flashes” and have a pattern of 0.5 sec. on, 0.5 sec. off. The control mode numbers can be found at parameter “control mode”.

4.3.2 Change control mode:

For switching between different functions in use of a digital controller several modes are available. More information about the available control modes can be found at parameter “Control mode”. Pressing the switch 4x briefly with intervals of max. 1 second in normal running/operation mode will trigger the instrument to “change” its control mode.

Step Action Indication Time Handling

amount

of count

flashes

of count

flashes

” for detailed info.

Page 35 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

sec. maximu m

sec. maximu

4.4 Troubleshooting summary general

Symptom

Possible cause

Action

No output signal

No power supply

1a) check power supply

1b) check cable connection

Output stage blown-up due to long

peaks

1c) return to factory Supply pressure too high, or differential pressure across meter too high

1d) lower supply pressure

Valve blocked/contaminated

1e) connect 0 .. 15 Vdc to valve and

(qualified personnel only)

Screen in inlet fitting blocked

1f) clean screen

Sensor/capillary failure

1g) return to factory

Maximum output signal Output stage blown-up

2a) return to factory

Sensor/capillary failure

2b) return to factory

Output signal much lower than

Screen blocked/contaminated

3a) clean screen

LFD blocked/contaminated and/or liquid

3b) remove LFD and clean; dry meter

2

N

Valve blocked/contaminated

3c) clean valve

Valve internal damage (swollen seat in plunger)

3d) replace plunger assembly and adjust valve or return

Incorrect type of gas is used and/or pressure/diff. pressure

3e) try instrument on conditions for which it was designed

Flow is gradually decreasing

3

NH

10483

HC,HC

etc.

4a) decrease supply pressure and/or

Valve adjustment has changed

4b) see ‘1e’

Oscillation

Supply pressure/diff. pressure too high

5a) lower pressure

Pipeline too short between pressure regulator and MFC

5b) increase length or diameter of piping upstream

Pressure regulator is oscillating

5c) replace pressure regulator or try

Valve sleeve or internals damaged

5d) replace damaged parts and

factory

Controller adjustment wrong

5e) adjust controller

Small flow at zero setpoint Valve leaks due to damaged plunger or dirt in orifice

6a) clean orifice and/or, when replacing plunger assembly, see ‘1e’

Pressure too high or much too low

6b) apply correct pressure

High flow at zero setpoint

Damaged diaphragm (only applicable to valves with membrane)

7a) replace membrane seal

lasting shortage and/or high-voltage

setpoint signal or desired flow

in meter

slowly increase voltage while supply pressure is ‘on’. The valve should open at 7V ± 3V; if not open, then cleaning parts and adjust valve

with air or

Condensation occurs with

hydrocarbons such as

,

heat gas to be measured

‘5b’

adjust valve, see ‘1e’ or return to

Page 36 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

5 Service

Only factory service is available. Contact your local Parker Sales office. In the US contact the Parker factory or send an email describing the problem to ppfinfo@parker.com

.

PARKER HANNIFIN CORPORATION

INSTRUMENTATION GROUP

PRECISION FLUIDICS DIVISION

26 CLINTON DRIVE – UNIT 103

HOLLIS, NH 03049 USA

OFFICE 603 595 1500

FAX 603 595 8080

Page 37 Instruction manual Parker X-Flow FM-1407 Rev - 7/18

Parker X-Flow Operational Instructions

Specifications and Main Features

Frequently Asked Questions

User Manual

TABLE OF CONTENTS

1 General Product Information

1.1 Introduction

1.2 Intended Use

1.3 Symbols

1.4 Product Support References

1.5 Product Description

1.5.1 General Description

1.5.2 Model Key

1.5.3 Seals

1.5.4 Calibration

1.5.5 Features

1.6 Operating Principles

1.6.1 Thermal Gas Flow Sensor Principle

1.6.2 Bypass Principle

1.6.3 Solenoid Valve Principle

1.7 Maintenance

1.8 Introduction

1.9 Unpacking and inspection

1.10 Rated pressure test inspection

1.11 Instrument mounting

1.12 Fluidic connections

1.13 In-line filter usage

1.14 Piping requirements

1.15 Electrical connections

1.15.1 Interface

1.15.2 Power Supply

1.16 Power and warm-up

1.17 Pressure supply / Start-up

1.18 System purging

1.19 Zeroing

2 Basic Operation

2.1 General

2.2 Analog operation

2.4 Basic RS232 Flowbus® operation

2.5 Modbus® RS485 operation

2.5.1 Slave address, baud rate and parity setup

2.5.2 Implementation class

2.5.3 Response time

2.5.4 Supported Modbus® functions

2.5.5 Available parameters

2.6 Push-button operation

2.7 Micro-switch use for reading/changing control mode

2.7.1 Read control mode

2.7.1 Change control mode:

2.8 LED indications

2.9 Basic Parameters and Properties

2.9.1 Introduction

2.10.1 Basic Parameters

3 Advanced Operation

3.1 Reading and Changing Instrument Parameters

3.1.1 Introduction

3.1.2 Identification

3.1.3 Fluid Information

3.1.4 Auto Zeroing

3.1.5 Controller Response Adjustment

3.1.6 Changing Default Control Mode

3.1.7 Display Filter

cycletime

Static Display Factor

3.1.8 Disabling Micro Switch

3.2 Using other gasses than specified

3.2.1 Fluid conversion factor information

3.2.2 Maximum pressure drop

4 Troubleshooting

4.1 General

4.2 LED indications

4.3.1 Read control mode

4.3.2 Change control mode:

4.4 Troubleshooting summary general

5 Service