Panasonic FR-H10-KV1 User Manual

FR-KV1SERIES
FT-KV1SERIES
WAFER MAPPING FIBER
FD-WL48
ULTRA-COMPACTFIXED-FOCUS REFLECTIVE FIBER
OPTICAL FIBER HEAD
Retroreflective Type
Retrorefelctive type mapping fiber with ultra-thin 2.2 mm 0.087 in body and easy beam axis alignment
FR-KV1
Ultra-compact size W7.2H7.5D2 mm W0.283H0.295D0.079 in
FD-WL48
4 mm
0.157 in
2 mm
0.079 in
7.5 mm
0.295 in
Extended reflector angular deviation characteristics
2.2 mm
0.087 in
11.2 mm
0.441 in
Fiber head
Reflector
Ultra-thin retroreflective type reduces construction work
2.0 mm 0.079 in fiber head and an ultra-thin 2.2 mm 0.087 in reflector allow these to be mounted even in thin robot hands. Furthermore, because they are retroreflective type fibers, the amount of wiring needed can be reduced, and the robot hands require less processing and so can be kept strength.
Ultra-narrow beams and extended angular deviation characteristics
A retroreflective type fiber is used, so that an aperture angle of less than 3 produces an ultra-narrow beam, but still with extended angular deviation characteristics compared to thru-beam types. This allows stronger curvatures in robot hands and reduces the work required for beam axis alignment.
Retroreflective type
Retroreflective type
Heat-resistant type available
Resistant to temperatures of 105 C 221 F, so that the robots can be used with confidence for wafer transportation immediately after heat processing.
Extended sensing range
A sensing range of 250 mm 9.843 in (in STD mode) allows easy mapping of 300 mm 11.811 in wafers.
Reduces work required for beam axis alignment
In order to reduce the amount of work required for mounting, beam axis alignment for the fiber head relative to the mounting reference surface is carried out at the time of assembly.
With the FT(-H10)-KV1, the fiber can be embedded into a plate with a thickness of 2 mm 0.079 in.
Ultra-compact size
The ultra-compact size of W2H1.5D20 mm W0.079
H0.059D0.787 in means that mounting is possible even in
places such as robot hands where space is limited.
Heat-resistant type available
Resistant to temperatures of 105 C 221 F, so that it can be used with confidence for wafer transportation immediately after heat processing.
FR-H10-KV1
FR-KV1 can be mounted
to robot hands with
thicknesses of 2.2 mm 0.087 in
2.2 mm
0.087 in
M1.4 screw mounting
Only 2 mm 0.079 in from tip of the fiber head to the beam axis
21.5 mm
0.846 in
Aperture angle 3
Thru-beam type fiber
FT-KV1 / FT-H10-KV1
Beam axis alignment for the fiber head
relative to the mounting reference surface is
carried out at the time of assembly.
FT-H10-KV1
2 mm
0.079 in
2 mm
0.079 in
20 mm
0.787 in
1.5 mm
0.059 in
Aperture angle 3
Beam axis alignment complete
Mounting reference surface
All that is needed is vertical direction adjustment !
Wafer mapping fiber FR/FT-KV1
NEW Concept ! Retrorefelctive type mapping fiber with ultra-thin 2.2 mm 0.087 in body and easy beam axis alignment
1
Loading...
+ 4 hidden pages