Liquid sensing
5
Reliable detection
The unique effect of capillarity enables
reliable detection of small leaks and viscous
liquids.
Compact, space-saving
This slim (10 mm 0.394 in) side-mounting fiber is
especially good for use in confined spaces.
Ideal for chemicals and volatile materials
This fiber type sensor is safer to use with
volatile materials (SEMI S2 compliant). The
fluorine resin fiber head makes it ideal for
use with chemicals.
Note: Dedicated amplifier FX-301-F must
be used with the FD-F7 series.
Note: Dedicated amplifier FX-301-F must
be used with the FT-F9 series.
A new slim fiber ideal for sensing
chemical leaks
Leak Detection Fiber / FD-F7 SERIES
Safer fiber type sensor
In response to the demand for higher safety
standards throughout the world, including
SEMI S2, safer sensing can be achieved by
placing the amplifier for this fiber sensor
away from dangerous locations, such as
locations with volatile chemicals, where
electrical circuits increase the risk of fire or
explosion.
Reliable detection not affected by
bubbles or droplets
Latest optical fiber techniques have solved
problems caused by bubbles, droplets or
liquid leakage that arise in conventional
pipe-mountable sensors.
Reliably detect liquid in pipe
Heat-resistant Fixed-focus Reflective Fiber
/
FD-H18-L31,FD-H30-L32 SERIES
Glass substrate detection in high
temperature production line
High precision detection
In addition to excellent heat resistance,
these fibers have achieved a repeatability
of 0.06 mm 0.002 in for transparent glass
substrates.
Extended detection range
Now available with full-range detection
capabilities containing no dead zones (in
both LONG and STD modes). As well, an
extended detection distance of 15 mm
0.591 in (in LONG mode) has been
achieved, even allowing for the detection of
warping in glass substrates.
Thin fiber head
In addition to having heat resistance of
180C 356F and 300C 572F, respectively,
these new fiber heads are thin - now only
5 mm 0.197 in thick. Even more space can
now be saved during installation.
Liquid Fiber / FT-F9 SERIES
Wide Beam Fiber / FT-WA30/A30
32 mm 1.26 in New wide-area
fiber launched!
Seal slit is avalable
The using of a seal slit reduces the amount
of emitting beam and allows sensing of
much smaller objects.
FT-WA30/A30 fiber heads are not
susceptible to interference from
peripheral objects
As these fibers incorporate light sources
having almost the same collimated beam as
lasers, beam interference from peripheral
objects is minimal, thus permitting stable
detection to be performed in crowded areas.
A bending radius of R1 mm (R0.039 in)
has been made possible
The allowable bending radius for FT-WA30
is R1 mm R0.039 in or greater. These fibers
can be bent as much as if they were electric
wires, thus saving tremendous amounts of
space during fiber installation.
Space-saving installation is now possible
FT-WA30/A30 has a depth of 20 mm 0.787 in
allowing for installation on the narrowest
production lines.
Leak detection for use in semiconductor device manufacturing
Glass substrate detection in high temperature production line
Detecting dropping objects
• Capillarity effect
Leakage pan
Liquid
Fiber head
10 mm
0.394 in
FT-F9
□
FD-F7
□
Liquid present
Liquid absent
Beam-receiving signal
Low
Beam-receiving signal
High
Glass substrateGlass substrate