OMRON ZX-E User Manual

Smart Sensors (Inductive Displacement Type)

ZX-E Series

Smart Sensors that use the
eddy current method are now
available. Develop new applica­tions with sub-micron sensing
technology.

Ordering Information

■ Sensors

.

Sensor Heads

Shape Dimensions Sensing distance Resolution *1 Model

Cylindrical 3 dia. x 18 mm 0.5 mm 1 μm ZX-EDR5T

5.4 dia. x 18 mm 1 mm ZX-ED01T *2

8 dia. x 22 mm 2 mm ZX-ED02T *2

Screw-shaped M10 x 22 mm ZX-EM02T *2

M18 x 46.3 mm 7 mm ZX-EM07MT *2

Flat 30 x 14 x 4.8 mm 4 mm ZX-EV04T *2 *3

Heat-resistant, cylindrical M12 x 22 mm 2 mm ZX-EM02HT *4

*1: For an average count of 4,096.

*2: Models with Protective Spiral Tubes are also available. Add a suffix of “-S” to the above model numbers when ordering.

(Example: ZX-ED01T-S)

*3: Be sure to use ZX-EDA Amplifier Unit version 1,200 or later with the ZX-EV04.

*4: Be sure to use ZX-EDA Amplifier Unit version 1,300 or later with the ZX-EM02H.

Amplifier Units

Appearance Power supply Output type Model

DC NPN ZX-EDA11

PNP ZX-EDA41

Note: Compatible connection with the Sensor Head.

ZX-E Series Smart Sensors (Inductive Displacement Type) 1

Accessories (Order Separately)

Calculating Unit

Appearance Model

ZX-CAL2

Amplifier Mounting Brackets

Appearance Model Remarks

ZX-XBE1 Attached to

ZX-XBE2 For DIN track

Logging Tool for Personal Computers

Appearance Name Model

Communications
Interface Unit

Smart Monitor (Logging Software
+ Function Setting Software)

RS-232C ZX-SF11

USB ZX-SF21

each Sensor
Head

mounting

ZX-SW11EV3
(See note 1.)

Setup Tool for Personal Computer

Appearance Name Model

Communications Interface

+

Note 1. The ZX-SFW11EV3 or ZX-SW11EV3 is required to use the

Smart Monitor with the ZX-LDA11-N/41-N. Earlier versions
cannot be used.

2. The Smart Monitor Basic does not have a logging function.
Other than the logging function, the Smart Monitor Basic sup­ports the same functions as the Smart Monitor.

Unit (RS-232C) + Smart
Monitor Basic*2 (Function
Setting Software)

ZX-SFW11EV3
(See note 1.)

Cables with Connectors on Both Ends (for
Extension)*

Cable length Model Quantity

1 m ZX-XC1A 1

4 m ZX-XC4A

8 m ZX-XC8A

* Robot cable models are also available.

The model numbers are ZX-XC@R.

Bank Unit

Appearance Model

ZX-SB11

Specifications

■ Sensor Heads

Model ZX-EDR5T ZX-ED01T ZX-ED02T/

Measurement range 0 to 0.5 mm 0 to 1 mm 0 to 2 mm 0 to 7 mm 0 to 4 mm 0 to 2 mm

Sensing object Magnetic metals (Measurement ranges and linearities are different for non-magnetic metals. Refer to En-

Standard reference object 18×18×3 mm 30×30×3 mm 60×60×3 mm 45×45×3 mm

Resolution *1 1 μm

Linearity *2 ±0.5% F.S. ±1.0% F.S. *5

Linear output range Same as measurement range.

Temperature characteristic *3
(including Amplifier Unit)

Ambient
tempera­ture

Ambient humidity Operating and storage: 35% to 85% (with no condensation)

Insulation resistance 50 MΩ min. (at 500 DC)

Dielectric strength 1,000 VAC, 50/60 Hz for 1 min between charged parts and case

Vibration resistance (destruction) 10 to 55 Hz with 1.5-mm double amplitude for 2 h each in X, Y, and Z directions

Shock resistance (destruction) 500 m/s

Degree of protection (Sensor Head) IEC60529, IP65 IEC60529, IP67

Connection method Connector relay (standard cable length: 2 m)

Weight (packed state) Approx. 120 g Approx. 140 g Approx. 160 g Approx. 130 g Approx. 160 g

Materials

Accessories Amplifier Mounting Brackets (ZX-XBE1), Instruction Manual

Operating *4

Storage *4

Sensor
Head

Preamplifier

Case

Sensing surface

Tightening nut

Toothed washer

gineering Data on page 4.)

Material: ferrous (S50C)

0.15% F.S./°C 0.07% F.S./°C0.1% F.S./°C

0 to 50°C (with
no icing or con­densation)

2

, 3 times each in X, Y, and Z directions

Brass Stainless steel Brass

Heat-resistant ABS PEEK

PES

−10 to 60°C (with no icing or condensation) −10 to 200°C

−20 to 70°C (with no icing or condensation) −20 to 200°C

---

---

EM02T

Brass (nickel-plated) (except ZX-ED02T)

Iron (zinc-plated) (except ZX-ED02T)

ZX-EM07MT ZX-EV04T ZX-EM02H

IEC60529, IP60 *6

Zinc (nickel-plated)

---

---

Brass

Brass (nickel-plated)

Iron (zinc-plated)

2 ZX-E Series Smart Sensors (Inductive Displacement Type)

*1:Resolution: The resolution is the deviation (±3σ) in the linear output when connected to the ZX-EDA Amplifier Unit. The above values indicate

the deviations observed 30 minutes after the power is turned ON.
(The resolution is measured with OMRON's standard reference object at 1/2 of the measurement range with the ZX-EDA set for the maxi­mum average count of 4,096 per period.)
The resolution is given at the repeat accuracy for a stationary workpiece, and is not an indication of the distance accuracy. The resolution
may be adversely affected under strong electromagnetic fields.

*2: Linearity: The linearity is given as the error in an ideal straight line displacement output when measuring the standard reference object. The

linearity and measurement values vary with the object being measured.

*3: Temperature characteristic: The temperature characteristic is measured with OMRON's standard reference object at 1/2 of the measure-

ment range.

*4: The ambient temperature given is only for the sensor head. It is -10 to 60°C for the preamp.

*5: The value given is for an ambient temperature of 25°C.

*6: Do not use in moist environments because the case is not waterproof.

■ Amplifier Units

Model ZX-EDA11 ZX-EDA41

Measurement period *1 150 µs

Possible average count settings 1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096

Linear output *2 Current output: 4 to 20 mA/F.S., Max. load resistance: 300 Ω

Voltage output: ±4 V (± 5 V, 1 to 5 V *3), Output impedance: 100 Ω

Judgement outputs
(3 outputs: HIGH/PASS/LOW)

Zero reset input, timing input, reset
input, judgement output hold input

Function - Measurement value display - Set value/output value/resolution display

Indications Judgement indicators: High (orange), pass (green), low (yellow), 7-segment main digital display (red),

Voltage influence
(including Sensor)

Power supply voltage 12 to 24 VDC ±10%, Ripple (p-p): 10% max.

Current consumption 140 mA max. with power supply voltage of 24 VDC (with Sensor connected)

Ambient temperature Operating and storage: 0 to 50°C (with no icing or condensation)

Ambient humidity Operating and storage: 35% to 85% (with no condensation)

Insulation resistance 20 MΩ min. (at 500 DC)

Dielectric strength 1,000 VAC, 50/60 Hz for 1 min

Vibration resistance (destruction) 10 to 150 Hz with 0.7-mm double amplitude for 80 min each in X, Y, and Z directions

Shock resistance (destruction) 300 m/s

Connection method Prewired (standard cable length: 2 m)

Weight (packed state) Approx. 350 g

Materials Case: PBT (polybutylene terephthalate), Cover: Polycarbonate

Accessories Instruction Manual

*1:The response time for the first linear output or judgment output is calculated as follows (with fixed sensitivity): Measurement period × (Aver-

age count setting + 1). The response time for the second and later outputs is the measurement period specified in the table.

*2: The output can be switched between a current output and voltage output using a switch on the bottom of the Amplifier Unit.

*3: Setting is possible via the monitor focus function.

*4: A Calculating Unit (ZX-CAL2) is required.

NPN open-collector outputs, 30 VDC, 50 mA max.
Residual voltage: 1.2 V max.

ON: Short-circuited with 0-V terminal or 1.5 V or

less

OFF: Open (leakage current: 0.1 mA max.)

- Linearity adjustment (materials selection) - Scaling

- Display reverse - Display OFF mode - ECO mode

- Number of display digit changes - Sample hold - Peak hold

- Bottom hold, peak-to-peak hold - Self-peak hold - Self-bottom hold

- Average hold - Delay hold - Zero reset

- Initial reset - Linearity initialization - ON-delay timer

- OFF-delay timer - One-shot timer - Previous value comparison

- Non-measurement setting - Direct threshold value setting - Position teaching

- Automatic teaching - Hysteresis width setting - Timing inputs

- Reset input - Judgement output hold input - Monitor focus

- Linear output correction - (A-B) calculations *4 - (A+B) calculations *4

- K-(A+B) calculation *4 - Mutual interference prevention *4

- Sensor disconnection detection - Zero reset memory - Zero reset indicator

- Key lock

7-segment sub-digital display (yellow), power ON (green), zero reset (green), enable (green)

0.5% F.S. of linear output value at ±20% of power supply voltage

2

, 3 times each in 6 directions (up, down, left, right, forward, backward)

PNP open-collector outputs, 30 VDC, 50 mA max.
Residual voltage: 2 V max.

ON: Supply voltage short-circuited or supply volt-

age within 1.5 V

OFF: Open (leakage current: 0.1 mA max.)

ZX-E Series Smart Sensors (Inductive Displacement Type) 3

Engineering Data (Typical)

Measurement Distance vs. Linearity (with Linearity Adjusted for Standard Sensing Object)

ZX-EDR5T ZX-ED01T ZX-ED02T/ZX-EM02T

0.3

0.3

0.3

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

0

0.1 0.2 0.3 0.4 0.5

Measurement distance (mm)

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

0

0.2 0.4 0.6 0.8 1

Measurement distance (mm)

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

0

0.5 1 1.5 2

ZX-EM07MT ZX-EV04T ZX-EM02HT

0.3

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

1234 657

0

Measurement distance (mm)

0.3

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

0.0

1.0 2.0 3.0 4.0
Measurement distance (mm)

0.3

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

0

0.5 1 1.5 2

Size of Sensing Object vs. Linearity (with Linearity Adjusted for Each Sensing Object)

ZX-EDR5T ZX-ED01T ZX-ED02T/ZX-EM02T

0.4

0.3

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

−0.4

0

S50C @5
S50C @8
S50C @12
S50C @18
S50C @30
S50C @45

0.1 0.2 0.3 0.4 0.5

Measurement distance (mm)

0.6

0.5

0.4

0.3

Linearity (% F.S.)

0.2

0.1

0

−0.1

−0.2

−0.3

−0.4

−0.5

−0.6

0

S50C @5
S50C @8
S50C @12
S50C @18
S50C @30
S50C @45

0.2 0.4 0.6 0.8 1

Measurement distance (mm)

1.0

0.8

0.6

Linearity (% F.S.)

0.4

0.2

0

−0.2

−0.4

−0.6

−0.8

−1.0

0

S50C @5
S50C @8
S50C @12
S50C @18
S50C @30
S50C @45

0.5 1 1.5 2

ZX-EM07MT ZX-EV04T ZX-EM02HT

0.3

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

0

S50C @30
S50C @45
S50C @60

1234 567

Measurement distance (mm)

1

0.8

0.6

0.4

Linearity (% F.S.)

0.2

0

−0.2

−0.4

−0.6

−0.8

−1

0.0

S50C @8
S50C @12
S50C @18
S50C @30
S50C @45
S50C @60

1.0 2.0 3.0 4.0
Measurement distance (mm)

0.5

0.4

0.3

Linearity (% F.S.)

0.2

0.1

0

−0.1

−0.2

−0.3

−0.4

−0.5

0

0.5 1 1.5 2

Measurement distance (mm)

Measurement distance (mm)

Measurement distance (mm)

S50C @8
S50C @12
S50C @18
S50C @30
S50C @45

Measurement distance (mm)

4 ZX-E Series Smart Sensors (Inductive Displacement Type)

Size of Sensing Object vs. Linearity (with Linearity Adjusted for Standard Sensing Object)

ZX-EDR5T ZX-ED01T ZX-ED02T/ZX-EM02T

4

3

2

Linearity (% F.S.)

1

0

−1

−2

−3

−4

0.1 0.2 0.3 0.4 0.5

0

S50C @5
S50C @8
S50C @12
S50C @18
S50C @30
S50C @45

Measurement distance (mm)

4

3

2

Linearity (% F.S.)

1

0

−1

−2

−3

−4

0.2 0.4 0.6 0.8 1

0

S50C @5
S50C @8
S50C @12
S50C @18
S50C @30
S50C @45

Measurement distance (mm)

6

5

4

3

Linearity (% F.S.)

2

1

0

−1

−2

−3

−4

−5

0

0.5 1 1.5 2

ZX-EM07MT ZX-EV04T ZX-EM02HT

0.8

0.6

0.4

Linearity (% F.S.)

0.2

0

−0.2

−0.4

−0.6

−0.8

−1

−1.2

S50C @30
S50C @45
S50C @60

01234567

Measurement distance (mm)

Material of Sensing Object vs. Linearity (

5

4

3

2

Linearity (% F.S.)

1

0

−1

−2

−3

−4

−5

0.0

1.0 2.0 3.0 4.0

S50C @8
S50C @12
S50C @18
S50C @30
S50C @45
S50C @60

Measurement distance (mm)

with Linearity Adjusted for Each Sensing Object)

8

7

6

Linearity (% F.S.)

5

4

3

2

1

0

−1
0

S50C @8
S50C @12
S50C @18
S50C @30
S50C @45

0.5 1 1.5 2

ZX-EDR5T ZX-ED01T ZX-ED02T/ZX-EM02T

0.3

0.2

Linearity (% F.S.)

0.1

S50C @18
SUS304 @18
A5052 @18

0.3

0.2

Linearity (% F.S.)

0.1

S50C @18
SUS304 @18
A5052 @18

0.3

0.2

Linearity (% F.S.)

0.1

S50C @30
SUS304 @30
A5052 @30

S50C @5
S50C @8
S50C @12
S50C @18
S50C @30
S50C @45

Measurement distance (mm)

Measurement distance (mm)

−0.1

−0.2

−0.3

0

0.1 0.2 0.3 0.4 0.5

0

Measurement distance (mm)

−0.1

−0.2

−0.3

0

0

ZX-EM07MT ZX-EV04T

0.3

S50C @60

0.2

Linearity (% F.S.)

0.1

−0.1

−0.2

−0.3

SUS304 @60
A5052 @60

0

1234 657

0

Measurement distance (mm)

0.5

0.4

0.3

0.2

Linearity (% F.S.)

0.1

0

−0.1

−0.2

−0.3

−0.4

−5

0.0

ZX-E Series Smart Sensors (Inductive Displacement Type) 5

0.2 0.4 0.6 0.8 1

S50C @60
SUS304 @60
A5052 @60

Measurement distance (mm)

1.0 2.0 3.0 4.0
Measurement distance (mm)

−0.1

−0.2

−0.3

0

0.5 1 1.5 2

0

Measurement distance (mm)

Material of Sensing Object vs. Linearity (with Linearity Adjusted for Standard Sensing Object and Iron)

ZX-EDR5T ZX-ED01T ZX-ED02T/ZX-EM02T

0.7

0.6

0.5

Display value (mm)

0.4

0.3

0.2

0.1

0

0.1 0.2 0.3 0.4 0.5

0

S50C @18
SUS304 @18
A5052 @18

Measurement distance (mm)

3.5

3

2.5

Display value (mm)

2

1.5

1

0.5

0

0.2 0.4 0.6 0.8 1

0

S50C @18
SUS304 @18
A5052 @18

Measurement distance (mm)

4.5

4

3.5

3

Display value (mm)

2.5

2

1.5

1

0.5

0

0

S50C @30
SUS304 @30
A5052 @30

0.5 1 1.5 2

ZX-EM07MT ZX-EV04T

16

14

12

Display value (mm)

10

8

6

4

2

0

S50C @60
SUS304 @60
A5052 @60

1234567

0

Measurement distance (mm)

7

S50C @60
SUS304 @60

6

A5052 @60

5

Display value (mm)

4

3

2

1

0

0.0

1.0 2.0 3.0 4.0

Measurement distance (mm)

Temperature Characteristics

ZX-EM02HT

1.0

Measurement distance (mm)

0.5

0

−0.5

−1

Rate of sensing distance change (%F.S.)

−1.5

−2

−20

200 40 60 80 180160140120100

Ambient sensor head temperature (°C)

200

6 ZX-E Series Smart Sensors (Inductive Displacement Type)