Omron ZS-HL DATASHEET
The scalable high-precision laser measurement sensor
ZS-HL series
The ZS laser sensor family provides outstanding measurement performance on
all kind of materials. Its huge range of
sensor heads and scalable concept
makes it a versatile platform for all high
precision sensing applications.
• Highest resolution and dynamic
sensing range for all surfaces
• Modular and scalable platform
concept for up to 9 sensors
• Easy to use, install and maintain for all
user levels
• Fast response time of 110 µs
• Multi-tasking capability – manages up
to 4 measurement tools in one
controller
Ordering information
Sensors
ZS-HL-series sensor heads
Optical system Sensing distance Beam shape Beam diameter Resolution
Regular reflective models
Diffuse reflective models
*1.
Refer to the table of ratings and specifications for details.
20±1 mm
25±2 mm 2.2 mmx45 µm 0.6 µm ZS-HLDS2VT
50±5 mm 1.0 mmx30 µm 0.25 µm ZS-HLDS5T
100±20 mm 3.5 mmx60 µm 1 µm ZS-HLDS10
600±350 mm 16 mmx0.3 mm 8 µm ZS-HLDS60
1500±500 mm 40 mmx1.5 mm 500 µm ZS-HLDS150
Line beam
1.0 mmx20 µm 0.25 µm ZS-HLD2ST
ZS-HL-series sensor heads (for nozzle gaps) also compatible with ZS-L controller
Optical system Sensing distance Beam shape Beam diameter Resolution
Regular Reflective
*1.
Refer to the table of ratings and specifications for details.
10±0.5 mm
15±0.75 mm ZS-LD15GT
Line beam 900x25 µm 0.25 µm
ZS-L-series sensor heads
Optical System Sensing distance Beam shape Beam diameter Resolution
Regular reflective models
Diffuse reflective models
*1.
This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode.
20±1 mm
40±2.5 mm Line beam 2000x35 µm ZS-LD40T
50±5 mm
80±15 mm Line beam 900x60 µm 2 µm ZS-LD80
130±15 mm Line beam 600x70 µm 3 µm ZS-LD130
200 ±50 mm Line beam 900x100 µm 5 µm ZS-LD200
350 ±135 mm Spot beam 240 µm dia. 20 µm ZS-LD350S
Line beam 900x25 µm
Spot beam 25 µm dia. ZS-LD20ST
Line beam 900x60 µm
Spot beam 50 µm dia. ZS-LD50S
0.25 µm
0.8 µm
*1
*1
*1
Model
Model
ZS-LD10GT
Model
ZS-LD20T
ZS-LD50
1ZS-HL series
Sensor controllers
Shape Supply voltage Control outputs Model
NPN outputs ZS-HLDC11
24 VDC
Multi controllers
Shape Supply voltage Control outputs Model
24 VDC
Data storage units
Shape Supply voltage Control outputs Model
24 VDC
Accessories (Sold separately)
Controller link
Shape Model
ZS-XCN
Panel mount adapter
Shape Model
ZS-HLDC41
PNP outputs
ZS-HLDC41A
(incl. USB cable +
Smart Monitor)
NPN outputs ZS-MDC11
PNP outputs ZS-MDC41
NPN outputs ZS-DSU11
PNP outputs ZS-DSU41
Extension cables for sensor heads
Cable length Model Qty
1m ZS-XC1A 1
4m ZS-XC4A 1
5m ZS-XC5B
8m ZS-XC8A 1
10 m ZS-XC10B
*1.
Up to two ZS-XC@B Cables can be connected (22 m max.).
*2.
A Robot Cable (ZS-XC5BR) is also available.
*1,*2
1
*1
1
ZS-XPM1 For 1st controller
ZS-XPM2
For expansion (from
2nd controller on
Cables for connecting to a Personal Computer
Shape Model Type Qty
ZS-XRS2 RS-232C
1
ZS-XUSB2 USB
Safety precautions for using laser equipment
Laser Label Indications
Attach the following
warning label to the side of
the ZS-L-series Sensor
Head.
Logging software
Name Model
Smart Monitor Zero
Professional
ZS-SW11E
Memory card
Model Model
F160-N64S(S) 64 MB
QM300-N128S 128 MB
F160-N256S 256 MB
2 Displacement sensors / Width-measuring Sensors
Specifications
Sensor heads
ZS-HL-series sensor heads
Item ZS-HLDS2T ZS-HLDS2VT ZS-HLDS5T ZS-HLDS10 ZS-HLDS60 ZS-HLDS150
Applicable
controllers
Optical system Regular
Measuring
center distance
Measuring range ±1 mm ±1 mm ±2 mm ±4 mm ±5 mm ±16 mm ±20 mm ±350 mm ±500 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Clas Visible semiconductor laser
Beam shape Line beam
Beam diameter
*2
Linearity
Resolution
Temperature
characteristic
Sampling cycle 110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Indica-
NEAR
tors
indicator
FAR
indicator
Operating
ambient
illumination
Ambient
temperature
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection
Vibration
resistance
(destructive)
Shock resistance
(destructive)
Materials Case: aluminum die-cast, front cover: glass
Cable length 0.5 m, 2 m 2 m 0.5 m, 2 m
Weight Approx. 350 g Approx. 600 g Approx. 800 g
F.S.: Full scale of measurement
*1.
Defined as 1/e² (13.5%) of the center optical intensity in the measurement center distance. The beam diameter is sometimes influenced by the ambient conditions
of the workpiece such as leaked light from the main beam.
*2.
This is the error on the measured value with respect to an ideal straight line. Linear curve may change according to the workpiece. The following lists the workpieces
Model Diffusive reflection Mirror reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS5T/HLDS10 White alumina ceramic Glass
ZS-HLDS60/HLDS150 White alumina ceramic -
ZS-HLDS2VT - Glass
*3.
This is the “peak-to-peak” displacement conversion value of the displacement output in the measurement center distance when high-resolution mode and the average number in the table are set (For ZS-HLDS60, the maximum resolution at 250 mm is also included). The following lists the workpieces.
Model Diffusive reflection Mirror reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS5T White alumina ceramic Glass
ZS-HLDS10 White alumina ceramic
ZS-HLDS60/HLDS150 White alumina ceramic -
ZS-HLDS2VT - Glass
*4.
Value obtained when the sensor part and object part are fixed with an aluminum jig.
ZS-HLDC series
reflection
Diffuse
reflection
Regular
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Diffuse
reflection
20mm 5.2mm 25mm 44mm 50mm 94mm 100mm 600mm 1,500mm
(wavelength 658 nm, 1 mW
max., Class 2)
*1
1.0 mmx20 µm 2.2 mm
x45 µm
±0.05% F.S. ±0.2 %F.S. ±0.1% F.S. ±0.07 %F.S.
1.0 mmx30 µm 3.5 mmx60 µm 0.3 mm
x16 mm
(250 mm to
750 mm)
±0.1% F.S.
(750 mm to
950 mm)
*3
0.25 µm
(No. of samples to average:
256)
0.5 µm
(No. of samples to average: 128)
0.25 µm
(No. of samples to average:
512)
1µm
(No. of samples to average:
64)
8µm
(average 64)
(at 250 mm)
40 µm
(average 64)
(at 600 mm)
0.01% F.S./°C 0.1% F.S./°C 0.01% F.S./°C
*4
Lits near the measurement center, and nearer than the measurement center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Lits near the measurement center, and further than the measurement center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Illumination on received light surface 3,000 lx or less (incandescent light) Illumination
on received
light surface
1,000 lx or
less (incandescent light)
Operating: 0 to +50°C, storage: -15 to +60°C (with no icing or condensation)
IP64 IP67 Cable length 0.5 m: IP66, cable length 2 m: IP67 IP66 (IEC60529)
10 to 150 Hz, 0.7 mm double amplitude, 80 min each in X, Y, and Z directions
150 m/s² 3 times each in six directions (up/down, left/right, forward/backward)
Diffuse
reflection
1.5 mm
x40 mm
±0.2 %F.S.
500 µm
(average 64)
Illumination
on received
light surface
500 lx or less
(incandescent light)
3ZS-HL series
ZS-L-series sensor heads
Item Model ZS-LD20T ZS-LD20ST ZS-LD40T ZS-LD10GT ZS-LD15GT
Applicable
controllers
Optical system Regular
Measuring center
distance
Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm ±0.5 mm ±0.75 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam
Beam diameter
*2
Linearity
Resolution
Temperature
characteristic
Sampling cycle
Indica-
NEAR
tors
indicator
FAR
indicator
Operating ambient illumination
Ambient
temperature
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of
protection
Materials Case: Aluminum die-cast, front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g Approx. 400 g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure Locks (2), instruction sheet Laser safety labels (1 each for JIS/
*1.
Defined as 1/e² (13.5%) of the center optical intensity at the actual measurement center distance (effective value). The beam diameter is sometimes influenced by
the ambient conditions of the workpiece, such as leaked light from the main beam.
*2.
This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics in diffuse reflection mode and
glass in the regular reflection mode of the ZS-LD20T/40T/50. Linearity may change according to the workpiece.
*3.
This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of
samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode.
*4.
This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
*5.
This value is obtained when the measuring mode is set to the high-speed mode.
ZS-HLDC/LDC series
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular reflection
20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm 10 mm 15 mm
*1
900x25 µm 25 µm dia. 2,000x35 µm Approx. 25x900 µm
±0.1%F.S
*3
0.25 µm 0.25 µm 0.4 µm 0.25 µm 0.25 µm
0.04% FS/°C 0.04% FS/°C 0.02% FS/°C 0.04% FS/°C
*4
*5
110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Lights near the measuring center distance, and nearer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Lights near the measuring center distance, and further than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Illumination on received light surface: 3,000 lx or less (incandescent light)
Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
Cable length 0.5 m: IP66, cable length 2 m: IP67 IP40
EN),ferrite cores (2), insure locks
(2)
Item Model ZS-LD50 ZS-LD50S ZS-LD80 ZS-LD130 ZS-LD200
Applicable
controllers
Optical system
(reflection)
Measuring center
ZS-HLDC/LDC series
Diffuse Regular Diffuse Regular Diffuse Regular Diffuse Regular Diffuse Regular Diffuse
50 mm 47 mm 50 mm 47 mm 80 mm 78 mm 130 mm 130 mm 200 mm 200 mm 350 mm
ZS-
LD350S
distance
Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam Line beam Line beam Spot beam
*1
Beam diameter
*2
Linearity
Resolution
Temperature
characteristic
Sampling cycle
Indica-
NEAR
tors
indicator
FAR
indicator
Operating
ambient
illumination
Ambient
temperature
900x60 µm 50 µm dia. 900x60 µm 600x70 µm 900x100 µm 240 µm
±0.1%F.S. ±0.25%
*3
0.8µm 0.8µm 2µm 3µm 5µm 20µm
0.02% FS/°C 0.02% FS/°C 0.01% FS/°C 0.02% FS/°C 0.02% FS/°C 0.04%
*4
*5
110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Lights near the measuring center distance, and nearer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
F.S.
±0.1%F.S. ±0.25%
Lights near the measuring center distance, and further than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Illumination on received light surface: 3,000 lx or less (incandescent light) Illumination on received
light surface: 2,000 lx or
Illumination on received light surface:
3,000 lx or less (incandescent light)
less (incandescent light)
Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
F.S.
dia.
±0.04%
F.S.
FS/°C
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
4 Displacement sensors / Width-measuring Sensors
Loading...