Thank you for purchasing the ZS Series.
This manual provides reference information on non-procedural communication commands
for ZS Series.
This manual provides information for the following models and versions.
ModelFirmware Version
ZS-LDCv2.000 or later
ZS-HLDCv1.000 or later
ZS-MDCv2.000 or later
ZS-DSUv2.000 or later
Different firmware versions may cause communication errors, unintended setting
overwrite, and damages on the controller. Please make sure to use the controller with the
correct software version.
If your software version is not listed in the table above, please update the software using
the SmartMonitorZS firmware update software, such as WarpEngineZS, to match the
software version.
When using the ZS Series, be sure to observe the following:
• The ZS Series must be operated by personnel knowledgeable in electrical engineering.
• To ensure correct use, please read this manual thoroughly to deepen your understanding of the product.
• Please keep this manual in a safe place so that it can be referred to whenever necessary.
Contents
Contents
Setting the Communication Specifications ................................................... 2
menu to set the appropriate communication specifications for the external
device.
5.Save the settings.
If you are connecting multiple controllers, set all controllers other than ZS-HLDC to [non-procedural].
Note that the communication with SmartMonitor ZS is not available in [non-procedural] mode. If you
want to communicate with SmartMonitor ZS, reset to [CompoWay/F] communication.
ZS-Series
2
Non-procedural Communication Command Reference
Format
The format of non-procedural commands are as follows:
Example: A command to acquire a measured value MEASURE command
* Each character is output as an ASCII code (except for FLOWDATA response).
MEASUREOCR
Format
Space
Delimiter
The format of returned values changes depending on the command.
For the description of each command, refer to "List of Non-procedural Commands"
section.
•MEASURE / M / DATAGET
The returned value consists of right aligned 11 characters and a delimiter. The unit is
nm for a displacement value. Shortfalls of the characters are filled with spaces from
the left.
Example: The returned value is -30.719923 mm.
-30719923CR
•BANKGET command
The returned value is output as 1 character bank No.
Example: The bank No. is 2.
1CR
•VERGET command
The returned value is output in the following format:
ZS - LDC2 . 0 0 0CR
Version
•Other commands
Either OK or ER is returned according to the result of the command. The command
was executed properly:
OKCR
The command was not executed properly or the setting was NG:
ERCR
The delimiter can be selected from the following three types.
CR/LF/CR+LF
ZS-Series
Non-procedural Communication Command Reference
3
List of Non-procedural Commands
List of Non-procedural Commands
Command
name
MEASUREMEASURE
MM <Task No.>
DATAGETDATAGET <Unit No.>
DATASETDATAGET <Unit No.>
BANKGETBANKGET<delimiter><Bank No.>
BANKSETBANKSET<Bank No.>
ZERORSTZERORST
ZEROCLRZEROCLR
DATASAVEDATASAVE
FormatReturned valueDescription
<measured value>
<Task No.>
<delimiter>
<delimiter>
<Data No.>
<delimiter>
<Data No.>
<Setting value>
<delimiter>
<delimiter>
<Task No.>
<delimiter>
<Task No.>
<delimiter>
<delimiter>
<delimiter>
<measured value>
<delimiter>
<Data>
<delimiter>
OK <delimiter>
ER <delimiter>
<delimiter>
OK <delimiter>
ER <delimiter>
OK <delimiter>
ER <delimiter>
OK <delimiter>
ER <delimiter>
OK <delimiter>
ER <delimiter>
Acquires a measured
value.
If <Task No.> is omitted, it
aqcuires the displayed
measured value.
Same as MEASURE
command.
Acquires measurement
data or setting data of the
processing unit.
* For details of numbers,
refer to "List of
Parameters."
p.7
Changes setting data of
the processing unit.
* For details of numbers,
refer to "List of
Parameters."
p.7
Acquires the current bank
No.
Switches to the designated
bank No.
Executes a zero-reset. If
<Task No.> is omitted, it
executes on the task
currently displayed as a
result. If <Task No.> is set
to 4, it executes on all the
tasks.
Cancels a zero-reset. If
<Task No.> is omitted, it
executes on the task
currently displayed as a
result. If <Task No.> is set
to 4, it executes on all the
tasks.
Saves all the bank data on
the flash memory of the
controller.
Support
HLDC
LDC
YesYesYesYes
YesYesYesYes
YesYesYesYes
YesYesYesYes
YesYesYesYes
YesYesYesYes
YesYesYesN o
YesYesYesN o
YesYesYesYes
MDCDSU
ZS-Series
4
Non-procedural Communication Command Reference
List of Non-procedural Commands
Command
name
FormatReturned valueDescription
VERGETVERGET<delimiter><Type/Version>
<delimiter>
BKMC2CTR
BKMC2CTR
<Bank file No.>
OK <delimiter>
ER <delimiter>
<Target controller CH>
<delimiter>
BKCTR2MC
BKCTR2MC
<Bank file No.>
OK <delimiter>
ER <delimiter>
<Target controller CH>
<Target Bank>
<delimiter>
FLOWDATAFLOWDATA
<delimiter>
OK <delimiter>
ER <delimiter>
Acquires version
information of the system.
Example: ZS-LDC
1.100<delimiter>
Sends bank files stored on
a memory card to the
specified bank of the
specified controller.
Example: To transfer the
bank data of the bank file
No. 2 on the memory card
to the controller of 1CH,
enter the following
command.
BKMC2CTR 2 1<delimiter>
Sends the specified bank
of the controller of the
specified CH to the
memory card.
Example: To transfer the
bank data on the Bank 3 of
2CH to the Bank file No. 10
on the memory card, enter
the following command.
BKCTR2MC 10 2
3<delimiter>
Used to acquire
measurement data at the
shortest intervals possible.
For details, refer to
"FLOWDATA Reference."
Support
HLDC
LDC
YesYesYesYes
NoNoNoYes
NoNoNoYes
Yes
(*1)
Yes
(*1)
MDCDSU
Yes
(*1)
No
CFLOGGET CFLOGGET
<Logging No.>
<delimiter>
<measurement value>
<delimiter>
:
<measurement value>
<delimiter>
Or, if the file with the
specified logging
No. does not exist,
the return value is
as follows:
NO FILE <delimiter>
If memory card is
not inserted, the
return value is as
follows:
p.30
Obtains the measurement
value from the logging file
with the specified No.
Enter 3-digits number to
the logging No.
Examples:
For the Logging No. 1
⇒ 001
NoNoNo
For the Logging No. 11
⇒ 011
ZS-Series
Non-procedural Communication Command Reference
Yes
(*2)
5
List of Non-procedural Commands
Command
name
CFIMGGETCFIMGGET
FormatReturned valueDescription
(Omitted)Capture the specified
<Group No.>
<Logging No.>
<delimiter>
image data.
For details, refer to
"Capturing Image Data."
HLDC
LDC
NoNoNo
p.36
CFDATGETCFDATGET
<Group No.>
<delimiter>
<measurement value>
<delimiter>
:
<measurement value>
<delimiter>
Obtains the measurement
value from the logging file
for the image data in the
specified group.
For details, refer to
"Capturing Image Data."
NoNoNo
p.36
*1 It is available when USB cable connection is used.
*2 For ZS-DSU Ver 2.00 or later. It is available when USB cable connection is used.
* Specifying CH
In case other than ZS-HLDC
Specify <CH No.> before <delimiter>. If <CH No.> is omitted, the command operates on the CH that received
it.
Example: To acquire the result for TASK2 of the controller of 2CH,
M 1 2 <delimiter>
Support
MDCDSU
Yes
(*2)
Yes
(*2)
In case of ZS-HLDC
Specify #XX at the beginning of the command.
If the CH No. is 1, specify #01. (Be sure to note double digits.)
If <CH No.> is omitted, the command operates on the CH that received it.
Example: To acquire the result for TASK2 of the controller of 2CH,
#02 M 1 <delimiter>
* Specifying the node
Specify @xx at the beginning of the command.
If the node No. is 1, specify @01. (Be sure to note double digits.)
If the node No. is omitted, the command operates on the node that received it.
To specify, the node and CH together in case of ZS-HLDC, specify @XX # △△ at the head of the
command.
* Format of a returned value
A returned value for MEASURE,M,DATAGET,CFLOGGET,CFDATGET is the right aligned 11 characters.
* Upper case and lower case characters
For alphabetic, only upper case characters are accepted.
* Task No.
Omit <Task No.> when issuing a command for ZS-LDC.
Task Nos are assigned as follows: 0: TASK1 1: TASK2 2: TASK3 3: TASK4.
ZS-Series
6
Non-procedural Communication Command Reference
List of Parameters (ZS-LDC)
List of Parameters (ZS-LDC)
The following parameters can be obtained or set by DATASET or DATAGET command:
Unit No.Data No.ParameterSetting range/Output rangeOthers
00Measurement mode0: STANDARD
1: HI-RESO
2: HI-SPEED
3: HI-SENS
4: CUSTOM
12Start position of area 1 0 to 639 (pix)
14End position of area 1 0 to 639 (pix)
24Start position of area 2 0 to 639 (pix)
26End position of area 2 0 to 639 (pix)
18Exposure time2 to 200 (1 div: 0.1ms)Parameters for CUSTOM
1: 2 times
2: 4 times
3: 8 times
4: 16 times
5: 32 times
6: 64 times
7: 128 times
8: 256 times
9: 512 times
10: 1024 times
11: 2048 times
12: 4096 times
Parameters for area 1 at
Glass thickness/Gap
measurement by moving
the objects.
To refer to or set the
parameters for area 2,
add 20 to the unit No. (*)
ZS-Series
8
Non-procedural Communication Command Reference
List of Parameters (ZS-LDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
442Differential0: OFF
1: ON
3Differentiation cycles1 to 5000 (ms)
452Hold type0: OFF
1: PEAK
2: BOTTOM
3: P-P
4: AVERAGE
5: SAMPLE
3Trigger method0: EXT
1: SELF-UP
2: SELF-DOWN
4Trigger level-999999999 to 999999999
(nm)
5Trigger hysteresis0 to 999999999 (nm)
6Trigger delay (ms)0 to 5000 (ms)
7Sampling period (ms)1 to 5000 (ms)
8Trigger delay mode0: OFF
1: ON
465Offset at zero reset-999999999 to 999999999
(nm)
6Zero reset mode0: REAL
1: HOLD
1200Non-measurement
settings
1Output at CLAMP0: MAX
1210Hysteresis width0 to 999999999 (nm)Setting judgment process
1Timer mode0: OFF
2Delay time1 to 5000 (ms)
1222Monitor focus mode0: OFF
3Monitor focus distance
value 1
4Monitor focus distance
value 2
5Monitor focus current
value 1
6Monitor focus current
value 2
7Monitor focus voltage
value 1
8Monitor focus voltage
value 2
0: KEEP
1: CLAMP
1: 20mA
2: 12mA
3: 4mA
4: MIN
1: OFF DELAY
2: ON DELAY
3: ONE SHOT
1: ON
-999999999 to 999999999
(nm)
-999999999 to 999999999
(nm)
4 to 20 (mA)
4 to 20 (mA)
-10 to 10 (V)
-10 to 10 (V)
Non-procedural Communication Command Reference
ZS-Series
9
List of Parameters (ZS-LDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
When the
measurement object is
changed, the settings
are initialized
according to the
selected object.
Non-procedural Communication Command Reference
ZS-Series
13
List of Parameters (ZS-HLDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
400Measurement mode0: OFF
1: Average
2: Peak
3: Bottom
4: Thickness
5: Gap
6: K+mX; +nY
3Parameter X0: None
1: TASK 1
2: TASK 2
3: TASK 3
4: TASK 4
4Parameter Y0: None
1: TASK 1
2: TASK 2
3: TASK 3
4: TASK 4
5Parameter K-999999999 to 999999999 (nm)
8Parameter M-100 to 100 (1div: 0.1)
9Parameter N-100 to 100 (1div: 0.1)
1Surface for
measurement (Area 1)
10Surface for
measurement (Area 2)
11Measurement position 1
(for thickness
measurement)
12Measurement position 2
(for thickness
measurement)
13Measurement area0: Area 1
14Width of peak bottom0 to 255
32Measurement value
(First surface)
33Measurement value
(Second surface)
34Measurement value
(Third surface)
410Scaling mode0: OFF
1Span value-20000 to 20000 (1 div: 0.0001)
2Offset value
422Smooth0: OFF
0: First surface
1: Second surface
2: Third surface
0: First surface
1: Second surface
2: Third surface
0: None
1: Average
2: Peak
3: Bottom
0: None
1: Average
2: Peak
3: Bottom
1: Area 2
- (nm)
- (nm)
- (nm)
1: ON
-999999999 to 999999999 (nm)
1: ON
TASK1 settings.
The settings in Unit
Number 40 are valid
only for multi-task
mode.
14
ZS-Series
Non-procedural Communication Command Reference
List of Parameters (ZS-HLDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
432Average0: 1 time
1: 2 times
2: 4 times
3: 8 times
4: 16 times
5: 32 times
6: 64 times
7: 128 times
8: 256 times
9: 512 times
10: 1024 times
11: 2048 times
12: 4096 times
442Differential type0: OFF
1: ON
3Differentiation cycles1 to 5000 (ms)
452Hold type0: Through
1: Peak
2: Bottom
3: Peak to peak
4: Average
5: Sampling
3Trigger method0: External input
1: Self up
2: Self down
4Trigger level-999999999 to 999999999 (nm)
5Trigger hysteresis0 to 999999999 (nm)
6Trigger delay (ms)0 to 5000 (ms)
7Sampling period (ms)1 to 5000 (ms)
8Trigger delay mode0: OFF
1: ON
465Offset at zero reset-999999999 to 999999999 (nm)
7Zero reset mode0: REAL
1: HOLD
64Status0: OFF
1: ON
TASK1 settings.
The settings in Unit
Number 40 are valid
only for multi-task
mode.
(*)
If GLASS/MODE 2 or GLASS THICKNESS/MODE 2 is selected, a process using multiple tasks will be
performed, as in the multi-task mode.
The following processes are assigned to the respective tasks:
TASK 1Calculates Area 1 displacement value.
TASK 2Calculates Area 2 displacement value.
TASK 3GLASS: Calculates the result of the NEAR side of TASK 1 and TASK 2.
GLASS THICKNESS: Calculates the difference value between TASK1 and TASK2.
TASK 4Unused
ZS-Series
Non-procedural Communication Command Reference
15
List of Parameters (ZS-HLDC)
The measurement conditions can be set for each task in this mode.
• Configuration of Task
The ZS-HLDC performs task processing.
The processing units for each task are grouped into 20 units.
To refer to the processing unit of TASK N, therefore, add 20×(N-1) to the above processing unit No.
Example: To change the averaging process of TASK2, refer to or set to a parameter with:
Process unit No.=43+20×(2-1)=63 and
Data No.=2
Unit No.Data No.ParameterSetting range/Output rangeOthers
1200Hysteresis width0 to 999999999 (nm)Setting judgment process
1
2
3Judgment output
1210Non-measurement
1222Monitor focus mode0: OFF
3Monitor focus distance
4Monitor focus distance
5Monitor focus current
6Monitor focus current
7Monitor focus voltage
8Monitor focus voltage
21Output mode TASKWhen multi-task mode is OFF.
Timer mode0: OFF
1: OFF-Delay
2: ON-Delay
3: One shot
Delay time1 to 5000 (ms)
0: TASK 1
TASK
settings
value 1
value 2
value 1
value 2
value 1
value 2
1: TASK 2
2: TASK 3
3: TASK 4
0: Keep
1: Clamp
1: ON
-999999999 to 999999999 (nm)
-999999999 to 999999999 (nm)
4 to 20 (mA)
4 to 20 (mA)
-10 to 10 (V)
-10 to 10 (V)
0: OFF
1: ON
When multi-task mode is ON.
0: OFF
1: TASK 1
2: TASK 2
3: TASK 3
16
ZS-Series
Non-procedural Communication Command Reference
List of Parameters (ZS-HLDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
12223Output at CLAMPVoltage output
0: MAX
1: 10 V
2: 9 V
3: 8 V
4: 7 V
5: 6 V
6: 5 V
7: 4 V
8: 3 V
9: 2 V
10: 1 V
11: 0 V
12: -1 V
13: -2 V
14: -3 V
15: -4 V
16: -5 V
17: -6 V
18: -7 V
19: -8 V
20: -9 V
21: -10 V
22: MIN
Current output
0: MAX
1: 20 mA
2: 19 mA
3: 18 mA
4: 17 mA
5: 16 mA
6: 15 mA
7: 14 mA
8: 13 mA
9: 12 mA
10: 11 mA
11: 10 mA
12: 9 mA
13: 8 mA
14: 7 mA
15: 6 mA
16: 5 mA
17: 4 mA
123
Digital output
2Monitor focus mode0: OFF
1: ON
3
4
5
6
7Clear monitor focus1: Clear
Monitor focus distance
value 1
Monitor focus distance
value 2
Monitor focus current
value 1
Monitor focus current
value 2
-999999999 to 999999999 (nm)
-999999999 to 999999999 (nm)
0 to 65535
0 to 65535
Non-procedural Communication Command Reference
ZS-Series
17
List of Parameters (ZS-HLDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
1: Input B
2: Input C
3: Input D
4: Input E
5: Input F
6: Input G
7: Input H
8: Input I
9: TASK 1
10: TASK 2
11: TASK 3
12: TASK 4
-999999999 to 999999999 (nm)
0: OFF
1: ON
Non-procedural Communication Command Reference
ZS-Series
21
List of Parameters (ZS-MDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
4018TASK2 setting
(AVE,MAX-MIN)
19TASK3 setting
(AVE,MAX-MIN)
20TASK4 setting
(AVE,MAX-MIN)
21Thickness
410Scaling mode0: OFF
1Span value-20000 to 20000 (×0.0001)
2Offset value
422Smooth0: OFF
432Average0: 1 time
442Differential0: OFF
3Differentiation cycles1 to 5000 (ms)
452Hold type0: OFF
3Trigger method0: EXT
4Trigger level
5Trigger hysteresis0 to 999999999 (nm)
6Trigger delay (ms)0 to 5000 (ms)
7Sampling period (ms) 1 to 5000 (ms)
8Trigger delay mode0: OFF
465Offset at zero reset
6Zero reset mode0: REAL
0: OFF
1: ON
-999999999 to 999999999 (nm)
1: ON
-999999999 to 999999999 (nm)
1: ON
1: 2 times
2: 4 times
3: 8 times
4: 16 times
5: 32 times
6: 64 times
7: 128 times
8: 256 times
9: 512 times
10: 1024 times
11: 2048 times
12: 4096 times
1: ON
1: PEAK
2: BOTTOM
3: P-P
4: AVERAGE
5: SAMPLE
1: SELF-UP
2: SELF-DOWN
-999999999 to 999999999 (nm)
1: ON
-999999999 to 999999999 (nm)
1: HOLD
22
ZS-Series
Non-procedural Communication Command Reference
List of Parameters (ZS-MDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
Unit No.Data No.ParameterSetting range/Output rangeOthers
1262External output (OUT)
task mode
4Linear output task
mode
6Digital output target0: OFF
10External input 0 mode 0: Not used
11External input 1 mode
12External input 2 mode
13External input 3 mode
0: None
1: TASK1
2: TASK2
3: TASK3
4: TASK4
0: None
1: TASK1
2: TASK2
3: TASK3
4: TASK4
1: ON
1: Trigger
2: Hold reset
3: Laser off
4: Zero reset
• Configuration of Task
The ZS-MDC performs task processing. The processing units for each task are grouped
into 20 units. To refer to the processing unit of TASK N, therefore, add 20×(N-1) to the
above processing unit No.
Example: To change the averaging process of TASK2, refer to or set to a parameter with:
Process unit No.=43+20×(2-1)=63 and
Data No.=2
Setting Threshold Value
• In case of TASK1
Unit No.Data No.ParameterSetting range/Output rangeOthers
482Lower limit of
threshold
3Upper limit of
threshold
4Hysteresis width0 to 999999999 (nm)
5Timer mode0: OFF
6Delay time1 to 5000 (ms)
To change the threshold of TASKN, change the unit No. as follows:
Unit No.=48+20X(N-1)
-999999999 to 999999999 (nm)
-999999999 to 999999999 (nm)
1: OFF DELAY
2: ON DELAY
3: ONE SHOT
24
ZS-Series
Non-procedural Communication Command Reference
List of Parameters (ZS-DSU)
List of Parameters (ZS-DSU)
The following parameters can be obtained or set by DATASET or DATAGET command:
Unit No.Data No.ParameterSetting range/Output rangeOthers
1: EXT
2: DATA
3: WINDOW
4: I/O
5: HOUR
6: QUANT
7: TIME
Same as Start trigger
Same as Start trigger
1 through 999999 (*1)
1 through 128 (*2)
1: Repeat
1: ADD
2: OVER WR
1: Trigger times
2: Elapsed time (timeout)
When [Save image] is
set to ON, [TIME] is
not available.
(*1) [Save image] is
set to OFF.
(*2) [Save image] is
set to ON.
When [Save image] is
set to ON, [REPEAT]
is not available.
When [Save image] is
set to ON, [ADD] is
not available.
Non-procedural Communication Command Reference
ZS-Series
27
List of Parameters (ZS-DSU)
Unit No.Data No.ParameterSetting range/Output rangeOthers
23Repeat end conditions
Trigger times
6Interval of saving image0: All
7NG save mode0: OR
8Save image mode0: Standard
31I/O data0: No save
2Save direction (Range)0: COLUMN
3New line input0: Ignore
Label input and time settings can not be set or referenced.
1 to 100000 (pcs)
1: Save NG
1: AND
1: Latest
1: Save
1: ROW
1: Enable
It is available only if
[Save image] is set to
ON.
28
ZS-Series
Non-procedural Communication Command Reference
List of Parameters (ZS-DSU)
Judgment relation
Unit No.Data No.ParameterSetting range/Output rangeOthers
400Input source0: Source A
1: Source B
2: Source C
3: Source D
4: Source E
5: Source F
6: Source G
7: Source H
8: Source I
9: Source J
10: Source K
11: Source L
12: Source M
13: Source N
1Lower limit of
threshold
2Upper limit of
threshold
-999999999 to 999999999 (nm)
-999999999 to 999999999 (nm)
For Image Logging
Unit No.Data No.ParameterSetting range/Output rangeOthers
200Align image0: None
1: 1CH
2: 2CH
:
14: 14CH
1Save image0: OFF
1: ON
Non-procedural Communication Command Reference
ZS-Series
29
FLOWDATA Reference
C
FLOWDATA Reference
What is FLOWDATA?
The ZS series implements high speed sampling measurement up to 110us.
Handling these measurement data with an external device requires reading in a large
amount of data.
The ZS series are provided with a mechanism which enables to handle and acquire
measurement data by a given bundle.
This bundle of data is called a FLOWDATA.
■ How to acquire FLOWDATA
FLOWDATA is batch output if the controller has accepted the command for acquiring a
FLOWDATA when data is accumulated for the specified buffer size (max. 1000 data).
A device receiving data (such as PC) needs to issue the command before the ZS controller accumulates measurement data for the buffer size.
LD ONZEROENABLE
H
P
L
P
Issue command
Batch acquire data for the buffer size
Receive data
Issue command
Batch acquire data for the buffer size
Receive data
Issue command
Batch acquire data for the buffer size
Receive data
Issue command
If the controller has not received the command when measurement data for the buffer size is
accumulated in the controller, the past data is overwritten:
In this case, it raises an error flag for buffer overflow. A device receiving data (such as PC) needs
to check this flag to see if the commands have been issued in time.
Controller
Accumulating data
Output the result
Accumulating data
Output the result
Accumulating data
Output the result
Accumulating data
ZS-Series
30
Non-procedural Communication Command Reference
FLOWDATA Reference
Format
After outputting the command for acquiring FLOWDATA, the binary data is output in the
following format:
Header division (4bytes)Data division (4bytes)
Configuration of FLOWDATA p.34
Binary data is used for response data of FLOWDATA to give the highest priority to the speed. Therefore,
general purpose communication tools such as HyperTerminal may not be used to receive the data.
■ Buffer size and buffer intervals
The buffer size of measurement data to be accumulated in the ZS controller and its
buffer intervals can be changed.
Change the following parameters:
* DATAGET and DATASET commands are used to change and refer to the parameters.
Unit No.Data No.ParameterDescription
1242FLOWDATA accumulation
mode
3Buffer intervals1 to 65535 (pcs)
4Buffer size1 to 1000 (pcs)
0: OFF
1: ON
■ Logging data
Data to be accumulated in the ZS controller can be selected.
●In case of ZS-LDC
A maximum of 3 data can be accumulated.
Unit No.Data No.ParameterDescription
1245Accumulated data 1*
6Accumulated data 2
7Accumulated data 3
* A setting value changes in accordance with the measurement mode.
•[Glass thickness/Gap-Film/Else-Move] is selected.
Val ueDescription
0No accumulation
1Result for area 1
2Result for area 2
3Thickness/Gap value
Non-procedural Communication Command Reference
ZS-Series
31
FLOWDATA Reference
•Glass thickness/Gap except for the above is selected.
Val ueDescription
0No accumulation
1Thickness/Gap value
•A mode other than above is selected.
Val ueDescription
0No accumulation
1Distance value (Measurement value)
●In case of ZS-HLDC
• When multi-task mode is OFF
• When GLASS/MODE 2 or GLASS THICKNESSS/MODE 2 is selected for the measurement object
Unit No.Data No.ValueDescription
12450No accumulation
1Accumulation of result of area 1
2Accumulation of result of area 2
3Accumulation of result of glass surface or
glass thickness
• When a mode other than the above is selected for the measurement object
Unit No.Data No.ValueDescription
12450No accumulation
1Accumulation
• When multi-task mode is ON
Unit No.Data No.ValueDescription
124140Does not accumulate the result of TASK 1
1Accumulate the result of TASK 1
150Does not accumulate the result of TASK 2
1Accumulate the result of TASK 2
160Does not accumulate the result of TASK 3
1Accumulate the result of TASK 3
170Does not accumulate the result of TASK 4
1Accumulate the result of TASK 4
32
ZS-Series
Non-procedural Communication Command Reference
●In case of ZS-MDC
A maximum of 9 data can be accumulated.
Unit No.Data No.ParameterDescription
1245Accumulated data 10: No accumulation
6Accumulated data 2
7Accumulated data 3
8Accumulated data 4
9Accumulated data 5
10Accumulated data 6
11Accumulated data 7
12Accumulated data 8
13Accumulated data 9
Increasing data to be accumulated extends the measurement cycle of the ZS controller. Confirm it
by selecting [SYSTEM]-[INFO]-[CYCLE] after setting.
1: Measurement result of TASK 1
2: Measurement result of TASK 2
3: Measurement result of TASK 3
4: Measurement result of TASK 4
5: Measurement result of Input A
6: Measurement result of Input B
7: Measurement result of Input C
8: Measurement result of Input D
9: Measurement result of Input E
10: Measurement result of Input F
11: Measurement result of Input G
12: Measurement result of Input H
13: Measurement result of Input I
FLOWDATA Reference
Non-procedural Communication Command Reference
ZS-Series
33
FLOWDATA Reference
Configuration of FLOWDATA Response
1 packet of FLAWDATA
Header division
1st byte2nd byte3rd byte4th byte–
ABCDEFGHIJKLData
8 11245121115 32
Details of header division
DataNameDescription
AUnusedReserved bit
BFLOWDATA overflow bitNormally set to 0.Set to 1 when there is an overflow in
FLOWDATA accumulation.
CDecimal informationNormally set to 0.0: nm order, 1: µm order
DTASK No.TASK1 to TASK4 (*1)
ECH No.CH No. of data source
FUnit states (Input)Indicates ON/OFF states of various input lines. (*2)
GFLOWDATA stop bit• All data are set to 1 if FLOWDATA does not flow over subse-
quently. (Always set to 1 for one-shot requests)
• All data are set to 0 if FLOWDATA continues to flow over.
(Until FLOWDATA is stopped after requested (in succession)
HTASK judgment result bit
IDisabledReserved bit
J
K
LUnit states (Output)Indicates output states (states of measurement results). (*4)
DataMeasurement dataSigned 32 bit data
Indicates the TASK judgment result of data source. (*3)
When the decimal info division is 0, the unit of the data is nm.
When the decimal info division is 1, the unit of the data is µm
Data
division
Meaning of
data
Number of
bits
=Total
64 bits
34
*1 TASK No.=bit data+1
Example: bit data=10B=2 (dec)
indicates TASK3 data.
*2 The input lines are, from the lower bit, assigned to:
In case of ZS
• Input terminal 4 (Unused. Always set to 0.)
• Input terminal 3
• Input terminal 2
• Input terminal 1
• Input terminal 0 (5 inputs in total.)
ZS-Series
Non-procedural Communication Command Reference
FLOWDATA Reference
*3 Data to be received and their states are as follows:
00b=Not executed
01b=LOW
10b=PASS
11b=HIGH
*4 The output states are, from the lower bit, assigned to:
In case of ZS
• Output terminal 4 (Busy output)
• Output terminal 3 (Enable output)
• Output terminal 2 (Low output)
• Output terminal 1 (Pass output)
• Output terminal 0 (High output)
(5 outputs in total). States in parenthesis indicate the standard states.
Indicates the unit status (states of
measurement results).
From the lower bit
Output terminal 4 BUSY
Output terminal 3 ENABLE
Output terminal 2 LOW
Output terminal 1 PASS
Output terminal 0 HIGH
Disabled
TASK judgment result bit
00b= Not executed
01b= LOW
10b= PASS
11b= HIGH
FlowData stop bit
Unit status: Indicates ON/OFF states of
various input lines.
From lower bit
Input terminal 4 (Unused, Always 0)
Input terminal 3
Input terminal 2
Input terminal 1
Input terminal 0
CH No.
TASK No.
Decimal information
Normally set to 0: nm order, 1: µm order
FlowData overflow bit
Normally set to 0. Set to 1 when there is an
overflow in FLOWDATA accumulation.
Unused
Non-procedural Communication Command Reference
ZS-Series
35
Capturing Image Data
Capturing Image Data
For ZS-DSU (Ver 2.000 or later), image data logging from ZFV is available. Image data on
the memory card can be shown as image files (.bmp) by inserting the memory card into
the memory slot on the personal computer. Image data can also be imported from the
memory card inserted into the ZS-DSU by entering the command below.