Thank you for purchasing the ZS Series.
This manual provides reference information on non-procedural communication commands
for ZS Series.
This manual provides information for the following models and versions.
ModelFirmware Version
ZS-LDCv2.000 or later
ZS-HLDCv1.000 or later
ZS-MDCv2.000 or later
ZS-DSUv2.000 or later
Different firmware versions may cause communication errors, unintended setting
overwrite, and damages on the controller. Please make sure to use the controller with the
correct software version.
If your software version is not listed in the table above, please update the software using
the SmartMonitorZS firmware update software, such as WarpEngineZS, to match the
software version.
When using the ZS Series, be sure to observe the following:
• The ZS Series must be operated by personnel knowledgeable in electrical engineering.
• To ensure correct use, please read this manual thoroughly to deepen your understanding of the product.
• Please keep this manual in a safe place so that it can be referred to whenever necessary.
Contents
Contents
Setting the Communication Specifications ................................................... 2
menu to set the appropriate communication specifications for the external
device.
5.Save the settings.
If you are connecting multiple controllers, set all controllers other than ZS-HLDC to [non-procedural].
Note that the communication with SmartMonitor ZS is not available in [non-procedural] mode. If you
want to communicate with SmartMonitor ZS, reset to [CompoWay/F] communication.
ZS-Series
2
Non-procedural Communication Command Reference
Format
The format of non-procedural commands are as follows:
Example: A command to acquire a measured value MEASURE command
* Each character is output as an ASCII code (except for FLOWDATA response).
MEASUREOCR
Format
Space
Delimiter
The format of returned values changes depending on the command.
For the description of each command, refer to "List of Non-procedural Commands"
section.
•MEASURE / M / DATAGET
The returned value consists of right aligned 11 characters and a delimiter. The unit is
nm for a displacement value. Shortfalls of the characters are filled with spaces from
the left.
Example: The returned value is -30.719923 mm.
-30719923CR
•BANKGET command
The returned value is output as 1 character bank No.
Example: The bank No. is 2.
1CR
•VERGET command
The returned value is output in the following format:
ZS - LDC2 . 0 0 0CR
Version
•Other commands
Either OK or ER is returned according to the result of the command. The command
was executed properly:
OKCR
The command was not executed properly or the setting was NG:
ERCR
The delimiter can be selected from the following three types.
CR/LF/CR+LF
ZS-Series
Non-procedural Communication Command Reference
3
List of Non-procedural Commands
List of Non-procedural Commands
Command
name
MEASUREMEASURE
MM <Task No.>
DATAGETDATAGET <Unit No.>
DATASETDATAGET <Unit No.>
BANKGETBANKGET<delimiter><Bank No.>
BANKSETBANKSET<Bank No.>
ZERORSTZERORST
ZEROCLRZEROCLR
DATASAVEDATASAVE
FormatReturned valueDescription
<measured value>
<Task No.>
<delimiter>
<delimiter>
<Data No.>
<delimiter>
<Data No.>
<Setting value>
<delimiter>
<delimiter>
<Task No.>
<delimiter>
<Task No.>
<delimiter>
<delimiter>
<delimiter>
<measured value>
<delimiter>
<Data>
<delimiter>
OK <delimiter>
ER <delimiter>
<delimiter>
OK <delimiter>
ER <delimiter>
OK <delimiter>
ER <delimiter>
OK <delimiter>
ER <delimiter>
OK <delimiter>
ER <delimiter>
Acquires a measured
value.
If <Task No.> is omitted, it
aqcuires the displayed
measured value.
Same as MEASURE
command.
Acquires measurement
data or setting data of the
processing unit.
* For details of numbers,
refer to "List of
Parameters."
p.7
Changes setting data of
the processing unit.
* For details of numbers,
refer to "List of
Parameters."
p.7
Acquires the current bank
No.
Switches to the designated
bank No.
Executes a zero-reset. If
<Task No.> is omitted, it
executes on the task
currently displayed as a
result. If <Task No.> is set
to 4, it executes on all the
tasks.
Cancels a zero-reset. If
<Task No.> is omitted, it
executes on the task
currently displayed as a
result. If <Task No.> is set
to 4, it executes on all the
tasks.
Saves all the bank data on
the flash memory of the
controller.
Support
HLDC
LDC
YesYesYesYes
YesYesYesYes
YesYesYesYes
YesYesYesYes
YesYesYesYes
YesYesYesYes
YesYesYesN o
YesYesYesN o
YesYesYesYes
MDCDSU
ZS-Series
4
Non-procedural Communication Command Reference
List of Non-procedural Commands
Command
name
FormatReturned valueDescription
VERGETVERGET<delimiter><Type/Version>
<delimiter>
BKMC2CTR
BKMC2CTR
<Bank file No.>
OK <delimiter>
ER <delimiter>
<Target controller CH>
<delimiter>
BKCTR2MC
BKCTR2MC
<Bank file No.>
OK <delimiter>
ER <delimiter>
<Target controller CH>
<Target Bank>
<delimiter>
FLOWDATAFLOWDATA
<delimiter>
OK <delimiter>
ER <delimiter>
Acquires version
information of the system.
Example: ZS-LDC
1.100<delimiter>
Sends bank files stored on
a memory card to the
specified bank of the
specified controller.
Example: To transfer the
bank data of the bank file
No. 2 on the memory card
to the controller of 1CH,
enter the following
command.
BKMC2CTR 2 1<delimiter>
Sends the specified bank
of the controller of the
specified CH to the
memory card.
Example: To transfer the
bank data on the Bank 3 of
2CH to the Bank file No. 10
on the memory card, enter
the following command.
BKCTR2MC 10 2
3<delimiter>
Used to acquire
measurement data at the
shortest intervals possible.
For details, refer to
"FLOWDATA Reference."
Support
HLDC
LDC
YesYesYesYes
NoNoNoYes
NoNoNoYes
Yes
(*1)
Yes
(*1)
MDCDSU
Yes
(*1)
No
CFLOGGET CFLOGGET
<Logging No.>
<delimiter>
<measurement value>
<delimiter>
:
<measurement value>
<delimiter>
Or, if the file with the
specified logging
No. does not exist,
the return value is
as follows:
NO FILE <delimiter>
If memory card is
not inserted, the
return value is as
follows:
p.30
Obtains the measurement
value from the logging file
with the specified No.
Enter 3-digits number to
the logging No.
Examples:
For the Logging No. 1
⇒ 001
NoNoNo
For the Logging No. 11
⇒ 011
ZS-Series
Non-procedural Communication Command Reference
Yes
(*2)
5
List of Non-procedural Commands
Command
name
CFIMGGETCFIMGGET
FormatReturned valueDescription
(Omitted)Capture the specified
<Group No.>
<Logging No.>
<delimiter>
image data.
For details, refer to
"Capturing Image Data."
HLDC
LDC
NoNoNo
p.36
CFDATGETCFDATGET
<Group No.>
<delimiter>
<measurement value>
<delimiter>
:
<measurement value>
<delimiter>
Obtains the measurement
value from the logging file
for the image data in the
specified group.
For details, refer to
"Capturing Image Data."
NoNoNo
p.36
*1 It is available when USB cable connection is used.
*2 For ZS-DSU Ver 2.00 or later. It is available when USB cable connection is used.
* Specifying CH
In case other than ZS-HLDC
Specify <CH No.> before <delimiter>. If <CH No.> is omitted, the command operates on the CH that received
it.
Example: To acquire the result for TASK2 of the controller of 2CH,
M 1 2 <delimiter>
Support
MDCDSU
Yes
(*2)
Yes
(*2)
In case of ZS-HLDC
Specify #XX at the beginning of the command.
If the CH No. is 1, specify #01. (Be sure to note double digits.)
If <CH No.> is omitted, the command operates on the CH that received it.
Example: To acquire the result for TASK2 of the controller of 2CH,
#02 M 1 <delimiter>
* Specifying the node
Specify @xx at the beginning of the command.
If the node No. is 1, specify @01. (Be sure to note double digits.)
If the node No. is omitted, the command operates on the node that received it.
To specify, the node and CH together in case of ZS-HLDC, specify @XX # △△ at the head of the
command.
* Format of a returned value
A returned value for MEASURE,M,DATAGET,CFLOGGET,CFDATGET is the right aligned 11 characters.
* Upper case and lower case characters
For alphabetic, only upper case characters are accepted.
* Task No.
Omit <Task No.> when issuing a command for ZS-LDC.
Task Nos are assigned as follows: 0: TASK1 1: TASK2 2: TASK3 3: TASK4.
ZS-Series
6
Non-procedural Communication Command Reference
List of Parameters (ZS-LDC)
List of Parameters (ZS-LDC)
The following parameters can be obtained or set by DATASET or DATAGET command:
Unit No.Data No.ParameterSetting range/Output rangeOthers
00Measurement mode0: STANDARD
1: HI-RESO
2: HI-SPEED
3: HI-SENS
4: CUSTOM
12Start position of area 1 0 to 639 (pix)
14End position of area 1 0 to 639 (pix)
24Start position of area 2 0 to 639 (pix)
26End position of area 2 0 to 639 (pix)
18Exposure time2 to 200 (1 div: 0.1ms)Parameters for CUSTOM
1: 2 times
2: 4 times
3: 8 times
4: 16 times
5: 32 times
6: 64 times
7: 128 times
8: 256 times
9: 512 times
10: 1024 times
11: 2048 times
12: 4096 times
Parameters for area 1 at
Glass thickness/Gap
measurement by moving
the objects.
To refer to or set the
parameters for area 2,
add 20 to the unit No. (*)
ZS-Series
8
Non-procedural Communication Command Reference
List of Parameters (ZS-LDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers
442Differential0: OFF
1: ON
3Differentiation cycles1 to 5000 (ms)
452Hold type0: OFF
1: PEAK
2: BOTTOM
3: P-P
4: AVERAGE
5: SAMPLE
3Trigger method0: EXT
1: SELF-UP
2: SELF-DOWN
4Trigger level-999999999 to 999999999
(nm)
5Trigger hysteresis0 to 999999999 (nm)
6Trigger delay (ms)0 to 5000 (ms)
7Sampling period (ms)1 to 5000 (ms)
8Trigger delay mode0: OFF
1: ON
465Offset at zero reset-999999999 to 999999999
(nm)
6Zero reset mode0: REAL
1: HOLD
1200Non-measurement
settings
1Output at CLAMP0: MAX
1210Hysteresis width0 to 999999999 (nm)Setting judgment process
1Timer mode0: OFF
2Delay time1 to 5000 (ms)
1222Monitor focus mode0: OFF
3Monitor focus distance
value 1
4Monitor focus distance
value 2
5Monitor focus current
value 1
6Monitor focus current
value 2
7Monitor focus voltage
value 1
8Monitor focus voltage
value 2
0: KEEP
1: CLAMP
1: 20mA
2: 12mA
3: 4mA
4: MIN
1: OFF DELAY
2: ON DELAY
3: ONE SHOT
1: ON
-999999999 to 999999999
(nm)
-999999999 to 999999999
(nm)
4 to 20 (mA)
4 to 20 (mA)
-10 to 10 (V)
-10 to 10 (V)
Non-procedural Communication Command Reference
ZS-Series
9
List of Parameters (ZS-LDC)
Unit No.Data No.ParameterSetting range/Output rangeOthers