Omega FMA-1900 User Manual

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FMA-1900

Mass

Flow Meter

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B

Omega Engineering is not liable for any damages or
personal injury, whatsoever, resulting from the use of Omega’s mass
flow meters or controllers with oxygen gas. Although the mass flow
meters and controllers are cleaned prior to shipment, we make no
claim or warranty that their cleanliness renders them safe for oxygen
service. The customer must clean Omega’s mass flow meters or
controllers to the degree that they require for their oxygen flow
applications. This statement does not replace product warranty.

m

Over-tightening the pipe connection may crack the

fittings or shift the calibration of the FMA-1900 controller.

B

The maximum pressure and temperature in the flow line in

which your FMA-1900 is to be installed should not exceed 150 psig

(5O”C),

122°F

kg/cm*

gauge) or

B

The FMA-1900 is not a loop powered device! Do NOT

apply power to the 4-20

B

power supply (50
watts (250mA)

The FMA-1900 controller requires a 24 VDC regulated

mV

@

24 VDC

mA

output or input section.

RMS ripple) with the ability to provide at least 6

510%.

respectively.

If you are providing your own
power source, refer to Section 2.3, paragraph 8, for specific power
supply requirements and jumper settings.

B

Do not use liquid leak detectors

search for leaks

to

inside or outside the FMA-1900. Instead, monitor pressure decay.

Operator’s Manual

M248310898

FMA-1900 SERIES FLOW CONTROLLERS

TABLE O F

.

1

Introduction

Description.. .....................................................................

1.1
Specifications

1.2

2. Installation
Receipt of Your

2.1
Return

2.2
Before Beginning the Installation

2.3
Mechanical Installation

2.4
Plumbing

2.5
Electrical

2.6

3.

Operation

Referencing the Flow Rate to Other Temperature and

3.1
Pressure
Accuracy

3.2
Overranging

3.3
The 4-20

3.4
Zero and

3.5
Mounting

3.6
Output Options

3.7
Setpoint Input Signal

3.8
Setpoint Configuration

3.9
Cold Sensor Lockout Circuit

3.10

3.11 Auto Shut-Off

............................................................................

..................................................................

..................................................................................

FMA-1900

Shipment..............................................................

Connections

Connections

...................................................................................

Conditions

.....................................

...................................................................

mA

Output Signal

Local

Setpoint

Position..........................................................

...............................................................

.................................................................

CONTENT S

1
1

2
4

...............................................

.....................................

....................................................

.....................................................

.....................................................

.......................................................

_.

..................................

...........................................

Adjustments

......................................................

...................................................

..........................................

............................

4
4
5
7
8

9

11

......

11
11
12
12
12
13
13
13
15
16
16

FMA-1900 SERIES FLOW CONTROLLERS

TABLE O F

CONTENTS CONTINUE D

3. Operation (continued)

3.12 On/Off Control

3.13Purging of Mass-Trak Products

3.13.1 Purging of Non-reactive

Appendix A Pin Connections

Appendix B Purge and Valve Off Connections

Appendix C K-factors and Gas Tables

...............................................................

.....................................

Gases

.....................................

..........................................................

.,............................. 19

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..*..........

16
17
17

18

20

-I-

INTRODUCTIO N

1.1

Description

Omega’s FMA-1900 Series products can be calibrated to

measure and control the mass flow rate of gases in several

ranges from O-l 0 standard cubic centimeters per minute
(SCCM) to
+1.5%

range, and time response is 5 seconds to within 2% of set
point.

The FMA-1900 is ideal for a complete range of gas flow

applications including general process control, laboratories,
instrument OEM’s, gas panels, and flow calibration.

O-50

standard liters per minute (SLM). Accuracy is

of full scale over a wide temperature and pressure

Figure

I-

1 The FMA- 1900 Flow Controller

ZERO

SET POINT

The versatile FMA-1900 product digitally displays the mass
flow rate directly in engineering units or percent of full scale.

The FMA-1900 is a transducer requiring a regulated 24 VDC
external power source. The O-5 VDC and 4-20
signals, which are linearly proportional to gas mass flow rate,
are provided for recording, data-logging, or control. A
“D”

connector is provided for power input, output signal and set
point control. FMA-1900 is available in several basic configu-
rations with either NPT (female) or compression inlet/outlet
fittings, and with or without the optional power supply.

output

mA

15-pin

l&Specifications

FLOW RATES: O-10 SCCM to O-50 SLM; flow ranges speci-

fied are for an equivalent flow of nitrogen at 760 mm Hg and

21

.l

“C (70°F). Other ranges in other units are available (e.g.,

SCFH or
FMA-1900 SERIES MINIMUM DP REQUIREMENTS: 5-50

PSI
optimum.

GASES: Most gases (e.g., air, nitrogen, methane, carbon
dioxide, argon, helium, hydrogen); check compatibility with
wetted materials; specify when ordering.

OUTPUT SIGNALS: Linear O-5 VDC into 2000 Ohm minimum
load resistance standard or linear 4-20
maximum load resistance for 24 VDC supply (500 ohm/l5
VDC supply).

CONTROL RANGE: Calibrated for 10 to 100% of full scale.
INPUT POWER: 0 to 15

VDC

nm3/h).

kg/cm*)

flO%

differential standard; 30 PSI (2 (0.35-3.5

mA

flO%;

into 1000 ohm

0 to 50 SLM/15 VDC

kg/cm*)

SLM/24

O-100%

fl.5%

of full scale from 1 ACCURACY

scale.

of

REPEATABILIW
TEMPERATURE

PRESSURE COEFFICIENT: 0.02% of full scale per PSI (0.07

kg/cm*),

RESPONSE TIME: One second to 63% of final value.

GAS PRESSURE: 150 PSI (10
20 PSI (1.4

LEAK INTEGRITY: 1 x

to outside environment.

shutoff
GASANDAMBIENTTEMPERATURE:

WEllED

430F stainless steel; nickel plating; Viton
SETPOINT

optional) into 22000 Ohms. O-20
Ohms input impedance.

or better:

valve.)

MATERIALS:

&0.25%

COEFFICIENTI

kg/cm*)

COMMAND SIGNALS: O-5 VDC (O-10 VDC

full

0.08% of full scale per

kg/cm*)

gauge optimum.

lo-‘ATM

(Not recommended for use as a positive

10% glass-filled

cc/set

32” to 122°F (0 to 50°C)

mA

of full scale.

“C,

or better.

gauge maximum;

of helium maximum

66; 316 stainless steel,

Nyton

“C”-rings.

mA

and 4-20

into 250

-2-

INSTALLATIO N

2.1

Receipt of Your FMA-1900

After receiving your FMA-1900, carefully check the outside of
the packing carton for damage incurred in shipment. If the
packing carton is damaged, notify the carrier at once regarding
their liability. A report with the serial number and part number
should be submitted to Customer Service. Call 800-622-2378
for detailed instructions.

Remove the packing slip from its envelope and check that the
carton contains all parts listed. Make sure spare parts or
accessories are not discarded with the packing material. In
case of shortages, contact 800-872-9436
Have your purchase order and model number available.

2.2

Return Shipment

Do not return any equipment without a Return Authorization,
obtainable from the Customer Service Department at the
number shown above.

Information describing the problem, the corrective action or work to
be accomplished at the factory, the purchase order number under
which the work is to be done, and the name of person to contact
must be included with the returned equipment.

NOTE:Equipment returned for repair that is found to be com-
pletely operational will be subject to the current “no problem
found” billing rate.
identify possible problems with the installation or application.

In a case such as this, Omega will attempt to

(800~USA-WHEN).

2.3

Before Beginning the Installation

Read the following notes in their entirety before beginning

actual installation of your FMA-1900 flow controller.

1.

Using the flow direction arrow on the FMA-1900 to prop-
erly orient the controller, install the FMA-1900 into the gas
flow line. If you are utilizing
quality paste pipe thread sealant. First tighten the fittings

by hand, then tighten no more than one and a half turns to
avoid cracked fittings or creating a calibration shift.

The line pressure and temperature should not exceed 150
psig (10
operating pressure differential is 50 psig.

2.

Apply power to your FMA-1900. If you are using the

Omega power supply, connect it to the
tor on the side of your FMA-1900, then plug the power
supply into line power. If you are providing your own
power source, refer to Section 2.3, paragraph 8, for
specific power supply requirements and jumper settings.

3.Upon application of power, the output signal will be at a high
level for the first 10 to 20 seconds, after which (assuming zero
flow) it will drop to 0 VDC (or
ration). Allow at least 15 minutes for complete warmup.

CAUTION:

Do NOT apply power to the 4-20

4.

After the warm-up period, your FMA-1900 will begin

monitoring the gas mass flow rate.

5.

Output Signals: The FMA-1900 has either O-5 VDC (O-l 0
VDC optional) or 4-20
control range of the unit is 10% to 100% of the calibrated
flow range. The output is

mass flow rate. The full scale range and the gas for which
the unit was calibrated are shown on the FMA-1900 data
tag. Section
the electrical output signal hookup. For example, if you are
monitoring the O-5 VDC output signal, 5.00 VDC is the
output signal for the full scale listed on the FMA-1900 data
tag; 2.50 VDC is for one-half of full scale; and 0.00 VDC is
for zero flow.

signal, 20.00

mA

kg/cm*

gauge) or 150°F (66°C). Maximum

The FMA-1900 is not a loop powered device!

2.6,

ELECTRICAL CONNECTIONS, describes

If you are monitoring the 4-20

mA

is the output signal for the full scale; 12.00

is for one-half of full scale; and 4.00

l/4-inch pipe, use a good

15-pin

4mA,

depending on output configu-

mA

output or input section.

mA

output signals. The effective

linearty

proportional to the gas

mA

is for zero flow.

connec-

“D”

mA

output

l/2

Integral Display: The 3

6

engineering units or optional percent of full scale. The full
scale range and gas are shown on the instrument data tag.
The decimal point for the flow rate is set at the factory and
will show automatically (e.g., “5.54” SLM or “76.4”

Overrange conditions are indicated by the display and/or

7.

output going to a high level, above the full scale range.
After the over-range condition has been removed, it may
take several minutes for the FMA-1900 to recover and
resume normal operation.

The FMA-1900 has more stringent power supply require-

8.

ments due to the presence of the valve.
is operated in a control loop, power supply variations
cannot be tolerated. This means the power supply must be
a regulated 24 VDC with ripple not to exceed 50mV peak to
peak, and capable of producing at least 250mA (6 watts).

The standard power supply for both the FMA-1900 is 24
VDC. It is possible to operate the FMA-1900 on 15 VDC at
reduced performance levels. There is a direct relationship
between the amount of power the valve requires and the
flow rate. Due to this relationship, 15 VDC powered
controllers are limited to a flow rate of 15 SLM. To achieve
flow rates above

The minimum power requirements for all FMA-1900
controllers are as follows:

15 VDC
installed) [If less than 15 SLM].

24 VDC
removed)

A regulated power supply is required. Ripple content
should not exceed 50mV peak to peak.

Refer to the component location diagram (Figure 3-2) for
the location of Jumper J3.

160mA,

@

250mA,

@

[

15 to 250 SLM].

digit LCD display reads directly in

%).

Because the valve

15

SLM, use a 24 VDC power supply.

Jumper J3 closed (shorting block

Jumper J3 open (shorting block

2.4

Mechanical Installation

CAUTION: The maximum pressure and temperature in the flow line
in which your FMA-1900 is to be installed should not exceed

(5O”C),

kg/cm*

150 psig (10

gauge) or 122°F

respectively.

In order to ensure a successful installation, inlet and outlet
tubing or piping should be in a clean state prior to plumbing
your FMA-1900 to the system. FMA-1900 is applicable to
clean gas only because patticulates and other foreign matter
may clog the sensor tube and laminar flow element over a
period of time. If the gas contains particulate matter install a
high-efficiency, 50 to 100 micron, in-line filter upstream of the
FMA-1900.

Do not locate the FMA-1900 in areas subject to sudden
temperature changes, moisture, or near equipment radiating
significant amounts of heat. Allow adequate space for cable
connectors and wiring. Be sure the arrow on the side of the
transducer points in the direction of flow. You can obtain best
results if you operate the FMA-1900 in the plane in which it
was calibrated. If you mount the unit in a position other than
its calibrated position, you may have mild to severe perfor-
mance problems. (See Section 3.6.)

CAUTION: Do not use liquid leak detectors to search for leaks
inside or outside the FMA-1900.Instead, monitor pressure decay

self-

“B”

#6,

Mount the FMA-1900 to a chassis with two

type

tapping screws.

CAUTION: These screws should extend into the flow body no

furtherthan

.15”(4mm).

If screws extendfurtherthan

.15”(4mm),

the flow body may be damaged. See Figure 2-1.

2- 1 Mounting the FMA- 7900 Series

Figure

t

2.75

BSCREWx.15DP2

6.%?UNCx.t3LG

PLBSELFTAF$‘INGTYPE

$5_ Plumbing Connections

Your FMA-1900 transducer is supplied with either female NPT

outlet

(standard) or compression inlet and
should not be removed unless your FMA-1900 is being
cleaned or calibrated for a new flow range.
requires a good quality, paste, pipe thread sealant which
should be used in the inlet and outlet fittings. lighten fitting
only one and a half turns past hand tight.

CAUTION: Over-tightening the pipe connection may crack the
fittings

or shiicalibratfon.

For installation of
fittings, simply insert the tubing into the fitting. Make sure that
the tubing rests firmly on the shoulder of the fitting and that the
nut is finger-tight.
While holding the fitting body steady with a back-up wrench,
tighten the nut one and a quarter turns, watching the scribe
mark make one complete revolution and continue to the nine
o’clock position. After this, the fitting can be reconnected by
snugging with a wrench. Use a back-up wrench to avoid

damaging the inlet fitting.

Finally, check the system ’s entire flow path thoroughly for leaks
before proceeding to Section 3, OPERATION.

CAUTION: All instruments are leak-tested prior to shipping. To

check your installation, test the fittings only.

detectors to search for leaks inside or outside the FMA-1900.
Instead, monitor pressure decay.

IMPORTANT
Install a section of straight pipe at least five pipe diameters in

length upstream of the transducer. DO NOT use reducers. If

the gas contains any particulate matter, an in-line filter is

recommended. There can be no restrictions (such as valves,

tubing or piping internal diameters, reducers, etc.) upstream or

downstream of the MFC less than the valve orifice diameter.
Failure to comply with this requirement will result in severely
impaired performance and possible oscillations in flow control-
lers. Refer to Table 2-1 for minimum restriction diameters
upstream or downstream of the flow controller.

l/4-inch

(outside diameter) compression

Scribe the nut at the six o ’clock position.

fittings. These fittings

l/4-inch pipe

Do not use liquid leak

TABLE 2-1 TYPICAL MINIMUM RESTRICTION DIAMETERS

(Under Standard

AP

Conditions of 39

Flow Ranges
Relative to N2

O-10 to O-500 SCCM
O-500 to O-l 000 SCCM
O-2 to O-5 SLM
O-10 SLM
O-l 5 SLM
O-30 to O-50

SLM

PSIG

Inlet and Ambient Outlet)

Valve Orifice Diameter
(Typical-in inches)

0.02

0.03

0.05

0.05

0.065

0.083

2.6 Electrical Connections

CAUTION: The FMA-1900 is not a loop powered device! Do

mA

NOT apply power to the 4-20
FMA-1900 is provided with a

the side of
“D”

connector are shown in Figure 2-2, and the pin assign-

theFMA-1900 enclosure. The pin numbers of this

ments are given in Table 2-2. Operating power input and
output signals are supplied via the

output or input section.

“D”

15-pin

connector located on

“D”

connector.

“D”

Figure 2-2

Connector Location and Pin Number Assignments

TABLE 2-2 “D” CONNECTOR PIN ASSIGNMENTS

PIN #

FUNCTION
SignalCommon

O-5 VDC Flow Signal*
valve

Return

PowerCommon
No Connection
+24

VDC (15 VDC) Supply

Setpoint

Input

+15

NOTE:

VDC operation uses same supply pins.

See page 6,

#8.

PIN # FUNCTION

9

4-20

Signal Common

10

+5

11

Valveoff

12

+24

13
14

4-20

15

ChassisGrand

(Common)

mA

VDC Reference

VDC)

VDC (15

mA

Output

Suppty

*O-l 0 VDC optional

OPERATIO N

3.1 Referencing the Flow Rate to Other

m

Temperature and Pressure Conditions

The gas flow rate output of your FMA-1900 is referenced to

“C

“standard” conditions of 21.1
(one atmosphere), unless you have specified otherwise in your
order.
FMA-1900, because it may make a difference if you are
comparing the output of FMA-1900 with another type of flow
meter. For example, the output reading of FMA-1900 will be
approximately 7% lower if you compare it to a device that uses
a “standard” temperature of

Be sure you know the reference conditions of your

(70°F) and 760 mm of mercury

0°C

rather than 21

.l”C.

3.2

Accuracy

The accuracy of FMA-1900 is
effective control range of the device is 10% to 100%. The

&1.5%

of full scale accuracy means the O-5 VDC output signal
is accurate to within
VDC) and the 4-20
This means, for example, that the output signal for zero flow
can be as high as
get an output signal at zero flow that is within either of these
two ranges, your FMA-1900 is functioning properly. With
respect to the FMA-1900 digital readout, the accuracy is simply

1.5% times the full scale flow rate listed on the instrument data
tag. For example, if full scale is 10 SLM, the digital readout will
be accurate to fo.15 SLM, and the reading at zero flow may be
as high as
specification.

+0.15

kO.075

mA

output is accurate to within

kO.075

SLM and still be within the stated accuracy

51.5%

of full scale, and the

*

VDC (O-l 0 VDC accuracy

VDC or

It0.24mA. Please note if you

0.150

f0.24mA.

Overranging

3.3

If the flow rate exceeds the full scale range listed on the
1900 data tag, the output signal and digital display will read a
higher value. The FMA-1900 has not been calibrated for
overranged flows and will be both non-linear and inaccurate if
an overrange condition exists. The O-5 VDC (O-l 0 optional)
and 4-20
or more. On the digital display, the display cannot exceed the
four digits 1999. If the flow rate exceeds 1999, the right-most
digits will blank and only the left-hand
display.

Overrange
going to a
condition has been removed, it may take several minutes for
the FMA-1900 to recover and resume normal operation. An
overrange condition will not harm the instrument.

mA

outputs can exceed full scale by as much as 50%

“1’

will appear on the

by

conditions are indicated

hii

level, above the full scale range. After the overrange

the display

andlor

FMA-

output

3.4

The 4-20

The 4-20
pin on the
mum) to ground (see Section 2.6, Electrical Connections).
Figure 3-l illustrates an installation with a current loop output.

Figure

mA Output Signal

output

mA

mAoutput

“D”

1

Hookup Wiring for a Single 4-20

3-

signal current flows from the 4-20

connector through the load (1000 Ohms maxi-

mA

Unit

Zero and Local

The zero and local
ports marked on the front of your FMA-1900. If the zero output
is more than
ometer when you are absolutely certain that the system has
reached its normal operating temperature and there is zero
flow at the desired pressure and orientation.

Setpoint Adjustments

setpoint

potentiometers are accessed through

fl.5%

of scale, you may adjust the zero potenti-

The local
using an external setpoint. Turning the potentiometer clock-

wise increases the setpoint.

setpoint potentiometer is used when you are not

Mounting Position

Unless specified otherwise, your FMA-1900 has been cali-
brated for installation with the flow section in a horizontal plane
(k15”)

with the enclosure standing up. If your actual installation

position is different, you will have to make a zero adjustment.
NOTE: The zero value may shift and be more pronounced

when under pressure and when mounted in different positions.

Output Options,, Meters and Controllers

The standard output for all FMA-1900 controllers is either a O-5

mA

VDC (O-l 0 VDC optional) or 4-20
linearly to the
VDC (and O-10 VDC optional) output requires a minimum load
resistance of 2000 Ohms, while the 4-20
dates a load resistance of up to 1000 Ohms at 24 VDC and
500 Ohms at 15 VDC.

Setpoint Input Signal

3.8

The

setpoint input signal is a direct linear representation of
O-100%
causes a condition of 0% flow to occur and a 5.00 VDC
causes a flow condition equivalent to 100% of flow to occur.)

When the command (setpoint) signal is applied, the flow
controller will respond to changes in the
second to 63% of final value, and within five seconds to
full scale.

setpoint

O-100%

of the mass flow full scale value. (A 0 VDC

Either O-5 VDC (O-10 VDC optional) or 4-20

commands are available.

mass flow full scale range. The O-5

signal that corresponds

mA

output accommo-

setpoint

setpoint

setpoint within one

f2%

of

mA

Figure 3-2 Component Location and

r-7

L-j

r--’

I

I

___I

i--i

L

__I

___.

D/P

Switch Set Up

Setpoint

m

The DIP switches on the FMA-1900 flow controller are used to

configure
The default configuration is for an internal O-5 VDC

on-board

Configuration3.9

-

setpoint

operation and the Positive Shut-Off feature.

setpoint

using the

setpoint

command potentiometer (accessible through a hole

in the case) and the positive shut-off option enabled.
Other options include internally or externally sourced O-5 VDC

setpoint

with positive shut-off enabled or disabled and externally

setpoint

sourced 4-20

mA

with positive shut-off enabled or disabled.

A factory installed option of O-1 0 VDC in and out is also available.*

1

Move DIP switch

setpoint

potentiometer. Move this switch to the left (OFF) to select an

to the right (ON) to select the internal on-board

external setpoint, which you must supply. This is also the position

required if you choose to use a local
Move DIP switches 2 and 3 to the right to select 4-20

setpoint

potentiometer.

setpoint

mA

input. Move these switches to the left to select O-5 VDC setpoint. If

setpoint

your FMA-1900 was originally set up for O-5 VDC

setpoint

decide to switch to a 4-20
VR12

to ensure that the

mA

setpoint

signal you may need to adjust

and output match at full scale.

and you

Move DIP switch 5 to the right to have the controller valve forced shut

setpoint

(auto shut-off) whenever the

is less than 2% of full scale.

Move this switch to the left to disable auto shut-off.
A 5.1 VDC reference is provided for internal and external

setpoint

command pots. The reference provides approximately 0.125 volts

headroom to allow for external cabling and ensures the ability to always
reach full scale when using these inputs. The
intended to be provided externally by the user.

0-1OV

to be used with a

output, DIP switch 1 is moved to the right-hand

setpoint

O-1OV
If the internal

input is

setpoint

is

position and DIP switch 4 must be in the left-hand (open) position. This
allows the controller to operate from the internal (or external local)
setpoint

command pot even though the output is

setpoint

NOTE: If the

input is not connected to some type of com-

0-1OV.

0-W

mand control device, the valve-off function must be activated or DIP

switch

#l must be in the “internal source” position. If no

setpoint

command is present on a controller when powered-up and the valve

is not switched off, the valve will drift wide open.

setpoint,

‘The internal

S1-4

switch

I

opened. External set must be disconnected.

when used with the O-10 V in/out setup, requires DIP

3.10 Cold Sensor Lockout Circuit

FMA-1900 controllers incorporate a safety circuit that closes

the valve when a fault condition is detected that could result in

uncontrolled flow (valve wide open). The circuit operates by

monitoring the temperature of the sensor elements and forcing
the output high if the temperature falls below a preset limit.
There are several conditions under which this could occur:

a)

Operation at a temperature below that for which the
instrument is rated.

b) Power failure while running at or near full scale. Upon

resumption of power, the valve will remain shut until minimum

operating temperature is again reached.
c) Sensorfailure.
The operation of this circuit may be checked by observing the

output upon power-up.
first 10 to 20 seconds. After that, assuming zero flow, the output will
drop to 0 VDC or
observing.)

(The output signal should be high for the

you

4mA,

depending on which

output

are

3.11

Auto Shut-Off

All FMA-1900 controllers are provided with an Auto Shut-Off

feature that, when enabled, closes the valve at a command

signal level of 2% or less of full scale.
To enable this feature on your FMA-1900, move DIP switch 5

to the right. The valve will then be forced shut whenever the
setpoint is less than 2% of full scale. To disable the feature,
move DIP switch 5 to the left. The valve will then remain
open even when the
The default is enabled.

setpoint falls below 2% of full scale.

On/Off Control 3.12

For all FMA-1900 controllers, on/off control is provided via a
mechanical or open collector switch. You can implement this
option manually by connecting an on/off switch between pins 3
and 12 of the
operation resumes when pin 12 is left floating.

“D”

15-pin

connector (See Appendix B). Normal

3.13

Purging of FMA-1900 Products

The purge function opens the controller valve completely
for the purpose of purging the meter and for quickly
flushing unwanted gas from the flow path. When the
valve is opened for purging, it allows flows far in excess of
the rated full scale of the controller. Because of the

uncontrolled nature of the purge function, two conditions

must be met before a controller can be purged.

1)

The Valve OFF switch, if it is used, must be in the ON
or open state.

2)

The Auto-Shutoff function cannot be active (the
setpoint command signal must be above 2% of full
scale or DIP switch 5 must be in the OFF position).

The activation of either the Valve OFF switch or the
Auto-Shutoff function will override the purge command.

“D”

To activate purge, connect pin 4 of the
tor to common through either a mechanical switch or an
open-collector transistor or logic output capable of sinking
at least 4mA (See Appendix B). The maximum voltage
appearing on this pin is 5.0 VDC.

15-pin

connec-

3.13.1 Purging Non-reactive Gases

Purge non-reactive gases from the FMA-1900 with clean,

dry nitrogen or argon for a minimum of two hours.

3.13.2 Purging Reactive Gases

-

Purge reactive gases from the FMA-1900 using one of the

following methods:

Cycle purge. This is done by alternately evacuating

1)

and purging the device for two to four hours with
clean, dry nitrogen or argon.

Purge the device with clean, dry nitrogen or argon for

2)

eight to twenty-four hours.
Evacuate the device for eight to twenty-four hours.

3)

Appendix A. Pin Connections

Appendix C. K-factors and Gas Tables

The following tables provide K-factors and thermodynamic

properties of gases commonly used with mass flow controllers

and meters. The purpose of these tables is two-fold:

1.

Calibrating an “actual” gas with a reference gas. This is

latly

useful if the actual gas is not a common gas or if it is a

called “nasty” gas (i.e., toxic, flammable, corrosive, etc.).

Interpreting the reading of a flow controller which has been

2.
calibrated with a gas other than the actual gas.

the

In applying

where:

=

The volumetric flow rate of the gas referenced to standard

Q

conditions of

=

The

K

“actual ” gas, and

The K-factor is derived from the first law of thermodynamics
applied to the sensor tube.

where:

=

The constant amount of heat applied to the sensor tube,

H

=

The mass flow rate of the gas

m

=

The coefficient of specific heat of the gas

C,

given in the Tables (at

=

The temperature difference between the downstream and

AT

upstream coils.

N

=

A correction factor for the molecular structure of the gas
given by the following table:

tables, the following fundamental relationship is used:

Q,/Q,=K,/K,

0°C

and 760 mmHg(SCCM or SLM),

=

refers to the

),

(6),

“K”

factor defined in equation

refers to the

=

)*

(

mC

AT

P

H=

N

(gm/min),

O’C).

(

‘?eference ”

(Cal/gm);

patticu-

so-

(1)

gas.

(2)

C,

is

Number of Atoms in the Gas Molecule

Monatomic

Diatomic

Triatomic

Polyatomic

N

1.040
1 .ooo

0.941

The mass flow rate, m, can also be written as:

pQ

ri-r=

The gas mass density at standard conditions

p

where:
p

is given in the tables (at

temperature difference,

780 mm Hg). Furthermore, the

0°C

AT,

is proportional to the output

(3)

(gil);=

voltage, E, of the mass flow meter, or

AT=aE
where: a
If we combine Equations (3) and

(2)

and solve for

where: b =

A

contstant

=

(4)

insert them into Equation

Q,

we get:

PC,)

Q

H/aE

= A constant if the output voltage is constant.

=

(bN/

For our purposes, we want the ratio of the flow rate,

Q,,

actual gas to the flow rate of a reference gas,

to produce

(4)

(5)

Q,,

for an

the same output voltage in a particular mass flow controller.
We get this by

comgining Equations (1) and (5):

Q,/Q,=K,/K,=@J,/P,

Q,,)

(6)

Please note that the constant b cancels out. Equation (6) is

the fundamental relationship used in the accompanying tables.

For convenience, the tables give “relative ” k-factors, which are

the ratios

K,/K2,

instead of the K-factors themselves.

In the third column of the tables, the relative K-factor is

Kreference ’

Ka*d

equivalent to the actual gas. In the fourth column, the relative

K-factor is
used gas, nitrogen&
enabling you to calculate
some instances,

where the reference gas is a gas molecularly

K,&dKN

,

where the reference gas is the commonly

).

The remaining columns give

K,/K2

directly using Equation (6). In

C, and

p,

K,/K, from the tables may be different from

that which you calculate directly. The value from the tables is

preferred because in many cases it was obtained by experiment.
Omega calibrates every FMA-1900 Series mass flow controller

with primary standards using the actual gas or a molecularly
equivalent reference gas. The calibration certificate accompa-
nying your flow controller will cite the reference gas used.
When a reference gas is used, the actual flow rate will be
within 2 to 4% of the calculated flow rate.

EXAMPLE 1: A flow controller is calibrated for nitrogen

(N,)
and the flow rate is 1000 SCCM for a 5.000 VDC output signal.
The flow rate for carbon dioxide at a 5.000 VDC output is:

KN*,

or

/

Kco,

=

QN*

/

Qco,

=

/

Qco,

= (0.74

1 .OOO) 1000

EXAMPLE 2: A flow controller is calibrated for hydrogen

740 SCCM

(H,)

and the flow rate is 100 SCCM for a 5.000 VDC output signal.

The flow rate for nitrous oxide

KN*O

QH*

=

/

QN*O

/

QN*O

=

1 .Ol) 100 = 70.3 SCCM

(0.71

(N,O)

KH*,

/

found.as follows:

is

or

Please note that the K-factors relative to nitrogen must be
used in each case.

EXAMPLE 3: We want a flow controller to be calibrated for
use with dichlorosilane

flow. We wish to use the

(CF,).

What flow of

QSIH~C~

QCF’

=

Equation (6) is used for gas mixtures, but we must calculate

(SiH

CL,) at a 100 SCCM full scale

preterred

CF,

must we generate to do the calibration?

QCF’

=

/

QCF’

/

100

reference gas Freon-14

KcF,,

/

= 0.869

KsiH2Ch

100/0.869=115SCCM

N/

and N for a

p,

pC, for the mixture. The equivalent values of

C,

dual gas mixture are given as follows:
The equivalent gas density is:

=

Total mass flow rate

rh,

61,

=

a

where:

(

rir,

=

refers to gas

),

+

,

and (

#l

=

p

=

refers to gas

)*

The equivalent specific heat is:

where: F,
The equivalent value of N is: N

=

(rf+

1%

P

) and

/

)

P,

=

The equivalency relationships for p, C
more than two gases have a form

61~)

/

(6,

Cp,

=

F, C,
(fi2

F,

cm,

simr

=

/

,

and N for mixtures of

*P

ar to the dual-gas

(I$/

p,

+

(grn/min),

#2

C,

F,

+

(fi,

P

/

P,)

(br2

p,

t?~,)

(7)

)

m,)N,

/

in,)N, +

relationship given above.

Achul

on

Ch.“dul

Sytt’bol

u-tat.

K-k

Ret.

Rd.Ws

to

z

Cp

Rel.

to

N,

(CwQ)

BensKy

(g/l)

80%

o-ring

EIeakUhef

valv e

seat

Acetylene
Air

Aflene

(Propadiie)

Ammonia

Argon

Arsine

Trichlodda

Boron

Trtftuoride

Boron
Bromine

Trib’omide

Boron

Pentafluoride

Bromine
Bromine

Trfftuoride
Bronmtdfloromethane
(F’ecwt3Bt)

1.3~B”tadiana
Butane

-Butane

1
*-Butane
2-Butane

Modde

Carbon

Carbon

Disulfide

Ca’km

Monoxide

Tetrachlortde

Carbon
Carbon

Tetralluoride

(Freon-t’)

Fiuo’tde

Cerbonyi

Sulide

Carbonyi
Chlorine
ChtonneTrifluodde
Chforodiffuoronw’J-rane
(Freon-22)
Chloroform

(Freon-115)
Chlorotriflurometha
(F’ecn-13)
Cwogen
Cyanogen

Chloride

cychlopropane

CJ’,

C,“,

NH,

A’

AsH,

BC’,
BF,

B’,
B’,

B’F,
B’F,

CB’F,

C,H,

C.Hw

C,“,

C,H,

TRANS

C.H.

..

cq

Cs,
c o

CCI,

CF.

COF,

co s

Cl,

CIF,

CHCIF,

CHCI,

C,CIF,Chkxopentafluoroethe

CCIF,

C,N,

CICN

C.H.

Cl.6

N,

N,
N’
N,

A’
N,
N,

’

N,
N,

N,
N,

N,

N,
N’
N,

N
N.

‘

4

N;
N,

N’
N,

N,
NZ
N,
N,
N,

N,

N,

N,
N*

N,

se

1.00
.43

t.ooO 1.45

.67
.41
51N,
.61
36

36
.37

.32

.26
.30

324

.74
56

.3t
.42

54
66
.66
46
.46

.39
.24N*

3s

.61
.61

.4036

.246
,352
,492.73

.1244

.1167
.1279
.1776
.0539
.o647
.1369.26
.1161
.tt13

,351’
.4007
364S

.336

,374,291
.x)16
.t426
.24661.00
.,655
.1664

.1710
.1651

,114
.(65’l
.1544

.13’39

,164

,153

.2613
.t739
.3177.46

1.162

1.293

1.767
,766

1.762

3.476

5.227

3.025

7.130

11.16

7.6’33

6.166

6.644

2.413

2.593

2.503

2.503

2.503

1.964

3.397
t.25’3

6.660

3.926

2.945

2.666

3.163

4.125

3.656

5.326

6.692

4.660

2.322

2.742

1.077 KR

NE0

NE0
NE0
NE0

KR

NE0

KR
KRKR
KR

KFt
KR
KR

KR
KR
KR

KR
KR

KR
KR
KR

KR
KR

KR

KR

Acluol

GOO

chornlcel

Symbol Gas

Ref .

K-fttG.

Ret. to

K&c.

N,Ret.Gas

to

Cp

De’tac

(Cat/g)Rel.

Elastomer

(g6) O-ring ’

80%

Vatw

Seat

Deulerium
Diborane
Dibromodifluoromethane
Dibromethane
Dichiorodifluommethane
(Freon-12)
Dichlorolluoromethane
(Freon-21)
Dichlommethylsilane
Dichlo ’osilane
Dichlorotetralluoroethane
(Freon-1, ‘)

-Difluorcelhytene

.l 1

132A)

(Freon-t
Dimethylamine
Dimeyi

Ether

2.2-Dimethylp ’opana
ElhaIW
Ethanol
EthylAcetylene
Ethyl Chloride
Ethylene
Ethylene Oxide
Fluorine
Fluorolorm

(Freon-23)

Freon-l

1
Freon-l 2
Freon-13
Freon-t 3
Freon-14
Freon-21
Freon-22
Freon-t 13
Freon-114
Freon-115

8Freon-C31
Germane
Germanium

Tetrachloride

D,

49

CBr ’F’

CCI ’F,

CHCI,F

(CH,),SiCI,

sIH&I,
t&t&F,

C,H,Fz

(CHJ ’NH

(CHJ ’O

C,H, ’

C&O

CP,

C,H,CI

C,“,

C,H,O)

F,

CHF,

CCI,F

CCl,F,

CCIF,

CF ’F,Bt

CF.
CHCI ’F
CHCIF.

CCI,FCCIF,

CFt,F,

C,CIF,

GaCL,

100

%

.&I

Y

.I9

Nz

.47

N,

.35

N’

.;2

N*

.25

N,

.40

NZ

.22

N,

.43

N,

.37N,
.39

N,

.22N,
xl

N*CsH,

.39

N,

.32

NZ
NZ

.39
.60N,
.52N*

,980

%

66

N*

33

N,

.35

N*

36

N,

.37

N,

.42

N,

.42

N2

.46

N_

.20

N,

.22N*
.24

N,

.17

N,C,F,

.57

N,GeH,

.27

N*

.1722

so6

.I5

.075

.I432

,140

.tS62

.t50

.1604

,224

,366
3414
,391 ’
.4097
.3395
.3513

,244
.1365

,266
.1673

,176
.1357
.1432

,153
.ttt3
.I654

,140
.1544

.t61

,166

,164

,165
.14o4
.to71

1.799

7.235

9.362

7.76

5.395

4.952

5.756

4.506

7.626

2.657

2.011 KR

2.055

3.219

1.342

2.055

2.413

2.679

1.251

1.965 KR

1.695

3.127

6.129

5.395

4.660

6.644

3.926

4.952

3.666

6.360

7.626

6.692

6.397

3.416

9.565

KR

KR
KR
KR

KR

KR
KFI
KR

KFI

KR
KR

KR
KR
KR

KR
KR
KR
KR
KR

KR

KR
KR
KR
KR
KR
KR

KFi

Actual

G8o

ChOltliCSf

svmbol

K-fee. C p

K-M.

Ref.

to

ReL

R&Gas

N,

to

(CalIo)

DSllSity

(grl)

00%

Elutottle’

O-ring ’

Valve

Seat

Helium
HexaRuoroalhane

16)

(Freon-1
Hexane
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Cyanide
Hydnqen

fluoride

Hydrogen

Iodide HI

Selenide

Hydrogen
Hydrogen Sulfide

Pentafluorida

Iodine
lsobutane
Isobutytene
Krypton
Methane
Methand
Methyl

Aoetytene
Methyl Bromide
Methyl Chloride
Methyl Fluoride

Mercaptan

Methyl

Trichlomeilane

Methyl

Odde

Trifluortde

Chloride

Oxide

Hexaffuortde

Molybderwm
Monoethykmine
Monomethylamine
Neon NE
Nitric
Nitrcgen
Nitrogen Dioxide
Nitrogen
Nilrosyi
Nitrous

(CH,)=f,

He

C’F,

C,H,,

“*

HBr

HCI

HCN

HF

YSe

YS

IF,

CH(C”,),

C,H,

K’

CH,

CH,OH

C,H.
CH,B’
CH,CI

CH,F

CH,SH

MoF,

C’H,NH,

CYN”,

NO

N,

NO,

NF,

NOCI

N’O

He

1.6’36

N,

.16

N,

t.006
N, 1.066
N,

1.006
,070t

N,

t.ooO

N,

l.ooo

N,

.79

N,

60

N,
N*

N,

.29

N,

1.062

A’

.72

N’

56

N*

.43

N,

56

N,

63

N,

66

N,

.52

N,
N,

.21

N’
N,

.5tN,

A’

996

N,

1.006

N,

.74

N,

46

N,
N,

.71

N’

1.464 1.241
.1834 6.157

.3966

1.0, 3.419H,
.0661
.1912 1.627

.317f
3479
.0545 5.707
.1025 3.613
.2397 1.520

.1106.25

3672

.0593 3.739

1.453
5328

3274
.3547 1.767 KR

.ll’x
.1926 2.253
.3221 1.516
.2459 2.146

,164

.1373

.4343 1.366

,2451.006 1.46
.2326 1.339
.2465 1.25
.1933 2.052
.I797
.1632
.2066 1.964

.17&T

3.645
6699

3.610

1.206
603

wu

3.593

2.503,370,

,715

1.429

4.236

6.669

9.366

2.0112.67.35

.9CQ

3.166

2.920.6t

KR KR

KFI

KR.24

KR

KR
KR
KR

KR
KR
KR
KR
KR.27
UR

KR
KR
KFI
KR.25
KR
KFI
KR

KR
KR

Gas

Actual

(Freon-Csr 6)

Oxygen

Difluodde
Oxygen
Ozone
Pentaborane
Pentane
Perchloryi

Fluoride
Pe’fl”o ’op’opane
Phosgene
Phosphine
Phosphorous
Phosphorous

Propane
Propylene

Silica
Sulfur Dioxide
Sulfur Hexafluoride
Sulfuryi
TeoS
Tetrafluorahydrazine

(Freon-ll)
Trichlorisilane
1,1.2-Ttichloro-lv2.2
Ttifluorethane
Trisobutyl
Titanium
Trichloro
Trimethylamine
Tungsten
Uranium Hexafluoride
Vinyl Bromide
Vinyl Chloride
Xenon

Oxychloride

Pentalluoride

TrichlorideF’hosphomus

Tetrachlofids

Telrafluoride

Fluoride

(Freon-l

Aluminum

Tetrachloride

Ethylene

Hexasfuoride

Chemical

Symbol Gas

13)
(C,H#

CH,CHBr
CH&HCl

C,F,Octafluorqclobutane

OF,

0,
0,

B,H,

4H’z

CIOaF

C,F,

COCI,

PH,

POCI,

PH,

PCI,
C,H,
C,“,

SiHSilane
SiCLSilicon

SiF

so:
SF,

SO,F,

NSF,

CCI,FTtichlo ’ofluormelhans

SiHCI,

T’ZI,

(CH,),N

WF,

“Fe

X0

Raf.

N,

N,
Y

N,

K-faC.

Rel. to

Ref.

Y

.63N,

Y

1.000
,446N,

.26

N1

21

N,
N,

,174

.44N,

1.070
.36

.36

NZ

41

NZ
N*
N,

N,

,090

NZ

.32

N,

.33

N*

.20

N,CCl,FCClF,

N,
N,

.27

N,C,HCI,
N,

.25

N1
N,

.46

N,

.46

N,
A’

Gas

Ral.

Cp

to

N,

DenSityK-fsc.

(Calfg)

,165

.1917 2.406
.2193 1.427

.3

,396

,151 ’

,197 6.366

,237 ’
,132 ’
.1810
.1250
3665

3169
.1270 7.560
.1691
.1466
.(592 6.516
.1543

.,a2

.1357

.1360

,161

,506
.120 6.465

,163 5.95.32
.3710
0610
.0668
.I241 4.772

,120s

,037s,993 1.44

Efaatornu

O-ring ’ Valv e

A(&

6.397

2.144

2.616

3.219

4.571 KR.39

4.416

1.517

6.643

5.620

6.127

1.967 KR
.a77 KR

1

.3541

1.433 KR.60

4.643

2.656

4.562

KR KR

4.64

6.129

6.043

6.360

6.648

2.639

KR

13.26

15.70 KR.20

2.766

5.856

Seat

KR.17

KR.36
KR

KR
KR.1394
KR
KR
KR.30N,
KR.30

KR.26
KR.35N,
KR.69N,
KR.26
KR.39N,

KFI
KR.33N,

KR
KR

KR.061
KR
KFI
KR.26

Teflon

KR

KR

WARRANTY/DISCLAIMER

OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and

workmanship for a period of 13

additional one (1) month grace period to the normal

handling and shipping time. This ensures

coverage on each product.
If the unit should malfunction, it must be returned to the factory for evaluation. OMEGA ’s

Customer Service Department will issue an Authorized Return
phone or written request. Upon examination by OMEGA, if the unit is found to be defective it will

operation outside of design limits, improper repair, or unauthorized modification. This

WARRANTY Is VOID If the unit shows evidence of having been tampered with or shows evidence

being

of
OMEGA’s control. Components which wear are not warranted, including but not limited to

contact points, fuses, and
O$Nlg

foranYdmnag9sthatresultftvmtheuseofRsproductsinaccwdsncewRhi&onna&n
provided by OMEGA, either verbal or written. OMEGA warrants only that the
manufactured
WARRANTIES OR

WARRANTY OF
HEREBY DISCLAIMED.
herein
based on contract,
notexceedthepurchasepriceofthe
shall OMEGA be liable for consequential, incidental or

CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used:
a “Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity;
or (2) in medical applications or used on humans. Should any Product(s) be used in or with any

OMEGA assumes no responsibility as set forth in our basic WARRANTY/DISCLAIMER language,
or damage whatsoever arising out of the use of the Product(s) in such a manner.

damaged as a result of excessive corrosion; or current, heat, moisture or vibration;

improper specification; misapplication: misuse or other operating conditions outside of

is&--at4

to offer

assumes

H

will be as

by

REPRESENTADONS OF ANY KIND WHATSOEVER, EXPRESSED OR

are

exclusive and the total

warranty,

nuclear installation or activity, medical application, used on humans, or misused in any way,
and additionally, purchaser will indemnify OMEGA and hold OMEGA harmless from any liability

months

triacs.

suBBestions

responsrbilii

spacified

TITLE,

UMlTAllON

negfigence,

from date of purchase. OMEGA Warranty adds an

one (1) year product warranty

that OMEGA’s customers receive maximum

(AR)

number immediately upon

on the use of its various products. However,

for any omissions or errors ncr assumes

and free of defects. OMEGA

AND ALL IMPUED, EXCEPT THAT OF

OF

liability

lMPUED WARRANTIES INCLUDING ANY

FllNESS FOR A MERCHANTABBll-Y AND

UABIUTY:

The remedies of purchaser set forth

PARllCULAR PURPOSE ARE

of OMEGA with respect to thii order, whether

indemnification, strict liiilii or

MAKES

othewfise.

component upon which liability is based.

damages.

rq3ecial

to

cover

be repaired or replaced at no charge. OMEGA’s WARRANTY does not apply to defects resulting
from any action of the purchaser, including but not limited to mishandling, improper interfacing,

liibilitY

patis

OTHER

NO

shall

ln

no event

(1)

as

/

RETURN REQUESTS

INQUIRIES

Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department.
BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN

AUTHORIZED RETURN (AR) NUMBER FROM OMEGA ’S CUSTOMER SERVICE DEPARTMENT
(IN ORDER TO AVOID PROCESSING

DELAYS). The assigned AR number should then be

marked on the outside of the return package and on any correspondence.
The purchaser is responsible for shipping charges, freight, insurance and proper packaging to

prevent breakage in transit.

FOR

WARRANTY

the followina information available BEFORE

contacting

1. P.O. number under which the product was
PURCHASED,

2. Model and serial number of the product
under warranty, and

3. Repair instructions and/or specific
problems relative to the product.

OMEGA ’s policy is to make running changes, not model changes, whenever an improvement is possible.
This affords our customers the latest

OMEGA is a registered trademark of OMEGA ENGINEERING, INC.
(D

Coovriaht 1996 OMEGA ENGINEERING. INC. All riahts reserved. This document mav not be
reproduced. translated, or reduced to any electronic medium or machine-readable
prior written consent of OMEGA ENGINEERING, INC.

GMEGA:

RETURNS, please have

in technology and engineering.

FOR NON-WARRANTY REPAIRS, consult
OMEGA for current repair charges. Have the
following information available BEFORE
contacting OMEGA:

1. P.O. number to cover the COST
of the repair,

2. Model and serial number of product, and

3. Repair instructions and/or specific problems
relative to the product.

ohotocooied,

cooied.

form,

whole.or

in

in

hart,

without

Where Do I Find Everything I Need for

Process Measurement and Control?

OMEGA...Of

Course!

TEMPERATURE

&

Ii??

Thermocouple, RTD

@’

Wire: Thermocouple, RTD
0 Calibrators
0 Recorders, Controllers
0 Infrared Pyrometers

&

Ice Point References

PRESSURE, STRAIN AND FORCE

@ ’

Transducers
0 Load Cells
0 Displacement Transducers
0 Instrumentation

&

&

Pressure Gauges

Thermistor Probes, Connectors,

&

Thermistor

&

Process Monitors

Strain Gauges

&

Accessories

.

FLOW/LEVEL

Flow

Computers

&

0’

Rotameters, Gas Mass
0 Air Velocity Indicators
0

Turbine/I ’addlewheel

0 Totalizers

&

Batch Controllers

Flowmeters

Systems

pH/CONDUCTlVITY

&

pH

Electrodes, Testers

k?

Benchtop/Laboratory

0
0 Controllers, Calibrators, Simulators
0 Industrial

&

Conductivity Equipment

pH

Accessories

Meters

&

Pumps

DATA ACQUISITION

&

I@

Data Acquisition
0 Communications-Based Acquisition Systems
0 Plug-in Cards for Apple, IBM
0 Datalogging Systems
@

Recorders, Printers

Engineering Software

&

Compatibles

& Plotters

Panels

&

Assemblies

HEATERS

0

Heating Cable
0 Cartridge &Ship Heaters

0 Immersion
0 Flexible Heaters
0 Laboratory Heaters

&

Band Heaters

ENVIRONMENTAL
MONITORING AND CONTROL

&

0 Metering
0 Refractometers

0 Pumps
0 Air, Soil
0 Industrial Water

pH,

0

Control Instrumentation

&

Tubing

&

Water Monitors

Conductivity

&

Wastewater Treatment

&

Dissolved Oxygen

Instruments

M2483/0898