Olicom 9600 User Manual
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TI CRYOG
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HELIX TECHNOLOGY CORPORATION
EN
9600 Compressor Installation, Operation, and
Maintenance Instructions
ICS
8040540
Rev. 101 (12/2004)
HELIX TECHNOLOGY CORPORATION
http://www.helixtechnology.com
ELIXH
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©2004 Helix Technology Corporation Printed in USA
9600 Compressor Installation, Operation, and Maintenance
Table of Co nt ents
Section 1 - 9600 Compressor Description
Genera l . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Benefi t s . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Compressor Conf i g u rations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1- 1
Syste m Do c u m e n t a t i o n . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
CTI-CRYOGENICS Helium Refrigeration System . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Specificatio n s . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Weigh t . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Elect r i c a l . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Coolin g Wa t e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Genera l . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
System Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Control Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Power ON In d i c ator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Gas Charg e F lared Fit ti n g . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Helium Pressure Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Power Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Return G as Co u p l i n g . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Coolin g Wa t e r IN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Coolin g Wa t e r OUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Cryopump Electrical Outlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Cryopump Power Phase Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Compressor Remot e Co n n ec t o r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Supply Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Multiple On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Multiple Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Section 2 - Unpacking and Inspection
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Shipping Carton Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Removal fr o m Sh i p p i n g C arton . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Compre ssor Inspe ction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Compre ssor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Helium St at ic Pressu re Verif i c a t i o n . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Shippin g Carton Co n te n ts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
P/N 8040540 4
9600 Compressor Installation, Operation, and Maintenance
Table of Contents (continued)
Section 3 - Installation
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Supply and Return Water Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Hard Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Flexib le Water Li n e s . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Elect r i c a l Co n n e ctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Power Cable Prep a ration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Phase Ch e ck . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Cryopump Power Phase Switch Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3- 7
Connecti n g /Disc o nn e c t i n g He li u m Fl ex Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 -7
Conne c t i n g . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Disconnecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Single Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Multiple On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Power Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Multiple Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Power Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Section 4 - Operation
Adjusti n g Sy stem Heli u m Pr e ssure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Static Hel i u m Sy stem Pre ssure Ver i ficatio n . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Compre ssor Opera t i o n . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Replacement of Helium Circuit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Section 5 - Maintenance
Schedu l ed Mainte n a n ce . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Adsorber Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Adjusti n g Sy stem Heli u m Pr e ssure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Reducing H e l i u m Pr e ssure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 -4
Increa sing Heliu m P re ssure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Adding H elium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
5 P/N 8040540
9600 Compressor Installation, Operation, and Maintenance
Table of Contents (continued)
Appendi x A - Cu st ome r Support Infor mation
Appendix B - Flow Diagram
Appendix C - Troubleshoot ing P r ocedures
Appendix D - Schematic
Figures
Figure 1-1: 9600 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-2: 9600 Compressor Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Figure 1 -3 : Wa t e r Fl o w Rate versu s Pressur e Dro p . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-4: 9600 Compressor Rear View Component Locations . . . . . . . . . . . 1-8
Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps . 1-12
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps 1-13
Figure 2 -1 : U si n g t h e Shi p p i n g C arton Ramp . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Figure 3-1: 9600 Compressor Installation Flowchart . . . . . . . . . . . . . . . . . . . . 3-2
Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed) . . 3-5
Figure 3-3: Connecting/Disconnecting Helium Flex Line Self
Sealing Couplings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Figure 3-4: Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . 3- 9
Figure 3-5: Single Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . . . 3-10
Figure 3-6: Recommended Multiple On-Board Cryopump or
Waterpump Installation (Splitter Box located at Process Tool) . . 3-12
Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Compressor) . . . . . . . . . . . . . . . . . . . . . . . 3-13
Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation . . . . . 3- 15
Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation . . . . . . . . 3-16
P/N 8040540 6
9600 Compressor Installation, Operation, and Maintenance
Table of Contents (continued)
Figure 5-1: Disconnecting Self Sealing Couplings . . . . . . . . . . . . . . . . . . . . . . 5-2
Figure 5-2: Adsorber Location within the 9600 Compressor
(Rear Panel Rem o v e d ) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Figure 5-3: 9600 Compressor Helium Pressure Control Components . . . . . . . 5-4
Figure B-1: 9600 Compressor Flow Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . B-1
Figure D-1:9600 Motor Drive Compressor Schematic . . . . . . . . . . . . . . . . . . . D-2
Tables
Table 1- 1 : Comp ressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-2: Electrical Input Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1- 3 : Cool ing Wate r Specifi c a t i o n s . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Table 1- 4 : Gen eral Comp ressor O p erating Spe c i ficati o n s . . . . . . . . . . . . . . . . 1-7
Table 1-5: Cryopump Electrical Outlet Pin Assignments . . . . . . . . . . . . . . . . 1-10
Table 1-6: Compressor Remote Connector Pin Assignments . . . . . . . . . . . . . 1-11
Table 4-1: 9600 Compressor Helium Static Charge . . . . . . . . . . . . . . . . . . . . . 4-1
Table 5-1: Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Table C-1: Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . C-2
7 P/N 8040540
9600 Compressor Installation, Operation, and Maintenance
Section 1 - 9600 Compressor Description
General
This manual provides the information required to install, operate, and
maintain the CTI-CRYOGENICS 9600 Compressor.
NOTE: All personnel with installation, operation, and maintenance
responsibilities should become familiar with the contents of both the 9600
Compressor Installation, Operation, Maintenance, and appropriate
cryopump manuals to ensure safe, high quality, and reliable system
performance.
Benefits
The 9600 Compressor is a universal compressor that accepts
three-phase 50Hz or 60 Hz power input and provides two-phase or threephase 60Hz power output to On-Board or Cryo-Torr Cryopumps.
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EN
ICS
The 9600 Compressor design eliminates the use of three-phase motor
controllers and/or frequency converters and significantly reduces the
amount of equipment required and cost associated with the Cryopump
power circuit.
Refer to Appendix A to contact the local Customer Support Center for
information on connecting 9600 Compressors to a manifold with other
CTI-CRYOGENICS compressors.
Compressor Configurations
The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps.
For multiple cryopump installations, an On-Board Splitter Box or CryoTorr Interface can be used for cold head power distribution that reduces
total cable requirements as shown in Figure 1-5 and 1-6.
CAUTION
P/N 8040540 1-1
9600 Compressor Description
System Documentation
The manuals for a system cover two basic components: the cryopump and
the Compressor. A manual is shipped with each system component to
provide information for installation and operation of that component.
A loose-leaf binder with index tab separators is also provided so you can
compile a complete set of tabulated manuals.
CTI-CRYOGENICS Helium Refrigeration System
The operation of CTI-CRYOGENICS’ cryopumps is based upon a closed
loop helium expansion cycle. The system is made up of two major
components: the cryopump, which contains the cold head, and the helium
Compressor which compresses the helium gas.
Refrigeration is produced in the cryopump cold head through periodic
expansion of high pressure helium in a regenerative process. The high
pressure helium is provided by the Compressor. Low pressure helium
returning from the cold head is compressed into the necessary high
pressure to be returned to the cold head. The energy required to compress
the helium is rejected as heat through the cooling water.
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EN
ICS
High pressure room temperature helium is transferred to the cold head
through the supply lines. After expansion, low pressure helium is returned
to the Compressor (at or near room temperature) to repeat the cycle in a
closed loop fashion. Large separation distances can be accommodated
between the Compressor and the cryopump.
In the Compressor, helium is compressed using a highly reliable oil
lubricated commercial Compressor. Helium purification takes place via
several stages of oil removal. The final stage of purification is performed
with a replaceable adsorber cartridge. In order to maintain peak efficiency,
the adsorber must be replaced every three years. The 9600 Compressor is
shown in Figure 1-1.
1-2 P/N 8040540
9600 Compressor Installation, Operation, and Maintenance
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HELIX TECHNOLOGY CORPORATION
0
0
6
R
9
O
S
S
0
R
E
0
O
6
R
S
9
P
S
M
E
O
R
C
P
M
O
C
Figure 1-1: 9600 Compressor
P/N 8040540 1-3
9600 Compressor Description
Specifications
Dimensions
TI CRYOG
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HELIX TECHNOLOGY CORPORATION
The dimensions of the Compressor are shown in Figure 1-2.
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EN
ICS
19.52 IN.
(496 MM)
14.4 IN.
(366 MM)
21.50 IN.
(546 MM)
23.36 IN.
(593 MM)
3.18 IN.
(81 MM)
Figure 1-2: 9600 Compressor Dimensions
1.28
(32MM)
CAUTION
Do not place a weight greater than 75 lbs. (34Kg) on top of the
Compressor.
1-4 P/N 8040540
9600 Compressor Installation, Operation, and Maintenance
Weight
The weight of the Compressor is listed in Table 1-1.
Table 1-1: Compressor W eight
Electrical
The electrical specificati ons of the Compre ss or are listed in
Table 1-2.
Weight
200lbs./91kg
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EN
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Table 1-2: Electrical Input Specifications
Parameter Value
Operating Voltage Range 180 - 253 VAC
Line Frequency 50/60 Hz
Phase 3
Nominal Input Power 5.5 KW Nominal Power Factor 0.85 Rated FL/LR* Current 16.2/80
Minimum Electrical Service 30 Amps
*FL/LR = Full Load/Locked Rotor
P/N 8040540 1-5
9600 Compressor Description
Cooling Water
Maximum Inlet Temperature 90°F (32°C) Minimum Inlet Temperature 50°F (10°C)
Pressure Drop (inlet-to-outlet) See Figure 1-3
Maximum Inlet Pressure 100 psi (6.9 bars)
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The water used to cool the Compressor must meet the
specifications shown in Table 1-3 for proper system operation.
Table 1-3: Cooling W ater Specifications
Parameter Value
Flow Rate 2.75 ±1.25 gpm (10.4 ± 4.7 lpm)
Alkalinity 6.0 - 8.0 pH
EN
ICS
Calcium Carbonate < 75 ppm
NOTE: Water conditioning may be required for applications not meeting these
requirements.
WATER PRESSURE DROP (Bars)
.07 .49.21 .35 .63 .77
4.00
3.50
E
N
I
L
3.00
2.50
2.00
1.50
WATE R FLOW RATE (GPM)
E
P
O
E
L
B
A
T
P
E
C
C
A
G
N
I
T
A
R
1.00
0.50
1
3
5
WATER PRESSURE DROP (PSID)
7
911
15.2
13.3
11.40
9.50
7.60
5.70
3.80
1.90
WATER FLOW RATE (LPM)
NOTE: Figure 1-3 defines the wat er flow rate through the Compressor as a f unction of the pressure drop from water inlet to
water outlet. You must provide the correct pressure drop in your water supply system to ensure that the water fl ow condition
meets th e requirements specified in Table 1-3.
Figure 1-3: Water Flow Rate versus Pressure Drop
1-6 P/N 8040540
9600 Compressor Installation, Operation, and Maintenance
General
The information in Table 1-4 provides general Compressor operating
specifications.
Table 1-4: General Compressor Operating Specifications
Specification Values
Part Numbers
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Input Power Cable
(Customer Supplied)
Nominal Helium Pressure Refer to Table 4-1
Ambient Operating Temperature Range
Interface
Gas Supply Connector
Gas Return Connector
Remote Control Receptacle
600 VAC 10 Gauge, 3 conductor wire with ground Must conform to local electrical codes
50 - 100º F (10 - 38º C)
Cryopump Power Receptacles: mates with the
CTI-CRYOGENICS supplied cryopump power cable for
single pump use.
Mates with remote junction box power cable for multiple cryopump use.
1/2 in. Aeroquip self-sealing coupling
1/2 in. Aeroquip self-sealing coupling
24VAC, 2.7A inductive mates with P5 connector P/N MS3106A*
Adsorber Service Schedule 3 Years
* Supplied by CTI-CRYOGENICS
NOTE: The 9600 Compressor is designed for continuous operation and
should remain ON when the cryopumps are in a regeneration cycle.
P/N 8040540 1-7
9600 Compressor Description
Component Description
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The components of the 9600 Compressor that are accessible from the rear
panel are shown in Figure 1-4 and described in the following paragraphs.
EN
ICS
SERVICE I/O
CONNECTOR
CONTROL CIRCUIT
BREAKER
GAS CHARGE
FLARED FI TTING
HELIUM
PRESSURE
GAUGE
GAS CHARGE
CONTROL
VALVE
RETURN GAS
COUPLING
POWER ON
INDICATOR
COMPRESSOR REM O TE
CONNECTOR
SYSTEM CIRCUIT
BREAKER
CRYOPUMP
ELECTRICAL
OUTLET
CRYOPUMP
POWER PHASE
SWITCH
SUPPLY GAS
COUPLING
POWER
INLET
COOLING
WATER
IN
COOLING
WATER
OUT
REAR PANEL
Figure 1-4: 9600 Compressor Rear View Component Locations
1-8 P/N 8040540
9600 Compressor Installation, Operation, and Maintenance
System Circuit Breaker
The System Circuit Breaker protects main input power to the Compressor
pump and module. The circuit breaker positions are labeled ON (1), which
is in the UP position, and OFF (0), which is in the DOWN position.
NOTE: The phase monitor within the Compressor will cause the system
circuit breaker to open when input power phases are incorrect.
Control Circuit Breaker
The Control Circuit Breaker provides current overload protection for all
internal components of the Compressor except the Compressor motor. The
Compressor motor is protected by a separate overload protector. The
Control Circuit Breaker opens automatically and must be reset manually.
Power ON Indicator
The Power On Indicator illuminates when the system circui t breaker is
placed in the ON position. The Compressor pump is energized when the
power indicator is illuminated and the elapsed time meter records system
operation time.
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HELIX TECHNOLOGY CORPORATION
EN
ICS
Gas Charge Flared Fitting
The Gas Charge Flared Fitting is used to connect a 99.999% pure helium
supply to the Compressor when helium charging is required. The fitting
has a 45º flare and 7/16 in. x 20 threads/inch.
Refer to Section 5 - Maintenance for information on adding helium to the
Compressor.
Helium Pressure Gauge
The Helium Pressure Gauge indicates system static helium charge pressure
when the Compressor and cryopumps are OFF and Compressor suction or
inlet pressure when the Compressor is ON. Refer to T a ble 4-1 for the
appropriate static helium charge pressure.
Power Inlet
The Power Inlet is used to connect your power cable to the Compressor.
Refer to Section 3 - Installation for information on power cable
installation.
P/N 8040540 1-9
9600 Compressor Description
Return Gas Coupling
Cooling Water IN
Cooling Water OUT
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HELIX TECHNOLOGY CORPORATION
The Return Gas Coupling returns the helium, which has been cycled
through the cryopump, back to the Compressor. Refer to
CTI-CRYOGENICS Helium Refrigeration System within this section
for more information.
The Cooling Water IN connector provides water to the Compressor from
your facility to cool the Compressor during operation. The connector
thread size is a 1/2 in. female pipe thread. The water must meet the
specifications outlined in Table 1-3. Refer to Section 3 - Installation for
more information on cooling water connections.
The Cooling Water OUT connector returns the water that has been used to
cool the Compressor to your facility. The connector thread size is a
1/2 in. female pipe thread. Refer to Section 3 - Installation for more
information on cooling water connections.
EN
ICS
Cryopump Electrical Outlet
The Cryopump Electrical Outlet provide power to a single On-Board or
Cryo-Torr Cryopump, an On-Board Splitter Box, or a Cryo-Torr Interface.
The Compressor requires the use of an On-Board Splitter Box or
Cryo-Torr Interface for multiple cryopump system connections. Refer to
Table 1-5 for connector pin identification. Refer to Multiple On-Board
Cryopump Connections or Multiple Cryo-Torr Cryopump
Connections within this section for more information.
Table 1-5: Cryopump Electrical Outlet Pin Assignments
Identifier Function
A and B Heater Power - 208 VAC nominal
C Center tap for D and E
D and E 24 VCT @ 4.6 Amps
F-G and G-H Cold Head Voltage Output 130-160 VAC @ 4.5 Amps
J Chassis Ground
KNot Used
1-10 P/N 8040540
9600 Compressor Installation, Operation, and Maintenance
Cryopump Power Phase Sw itc h
NOTE: The Cryopump Power Phase Switch is behind the system circuit
breaker cover.
The Cryopump Power Phase Switch matches the output power phase of the
9600 compressor to that of the cryopump. The switch is set to the two or
three phase position based upon cryopump power requirements. Refer to
Section 3 - Installation for more information.
Compressor Remote Connector
The Compressor Remote Connector is a two-pin connector that can be us ed
in conjunction with the On-Board setpoint relays, relays in the Cryo-Torr
Interface, or a signal from the vacuum system to turn the Compressor ON
or OFF. Refer to Table 1-6 for connector pin identification. Switching
contacts must be rated at 24VDC, 2.7A inductive.
NOTE: The Compressor is shipped with a mating plug which must remain
installed in the Compressor Remote Connector to ensure Compressor
operation when the Compressor remote feature is not being used.
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HELIX TECHNOLOGY CORPORATION
EN
ICS
Table 1-6: Compressor Remote Connector Pin Assignments
Identifier Function
A and B Compressor Remote Control - Make = ON, Break = OFF
Supply Gas Coupling
The Supply Gas Coupling provides a connection for high pressure
compressed helium to the cryopump cold head. Refer to
CTI-CRYOGENICS Helium Refrigeration System within this section
for more information.
Multiple On-Board Cryopump Connections
The On-Board Splitter Box permits the connection of multiple On-Board
Cryopumps or Waterpumps to one 9600 Compressor as shown in Figure
1-5. Refer to Section 3 - Installation for more information on connecting
single or multiple On-Board Cryopumps or Waterpumps to the
Compressor.
P/N 8040540 1-11
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