MARCH AP-600 Plasma System
Compact Bench-Top Plasma Treatment
The AP-600™ plasma system delivers exceptionally
uniform plasma cleaning and treatment for semiconductor,
microelectronic packaging and assembly, and medical device
manufacturing.
The AP-600 system provides:
• Durable high-quality aluminum construction and xtures
• Up to 7 removable and adjustable powered or grounded
shelves for a wide range of piece-parts, components, and
part carriers including magazines, trays, and boats
• A compact, self-contained system chassis that houses the
plasma chamber, control electronics, 13.56 MHz RF
generator, and the automatic matching network (only the
vacuum pump is external to the system)
• An intuitive touch-screen control panel for real-time
process monitoring
• Convenient facility hook-ups for periodic calibration
requirements used in validation processes
• Support for a wide range of process gases including argon,
oxygen, hydrogen, helium, and uorinated gases
Key Applications
• Plasma cleaning
• Surface activation
• Adhesion improvement
• Maintenance access through an interlocked door or
removable panels
• Two standard electronic mass ow controllers for optimal
gas control, with an option for two additional controllers
(4 maximum)
MARCH AP-600™ Plasma System
Specications
Enclosure
Dimensions
Chamber
Electrodes
RF Power
Gas Control
Control System
and Interface
Vacuum Pump
Facilities
W x D x H – Footprint 569W x 869D x 704H mm
Net Weight 221 kg (487 lbs)
Equipment Clearance
Maximum Volume 50.4 liters (3076 in³)
Variable Electrode Congurations Power-Ground, Ground-Power, Power-Power
Number of Electrode Positions 7
Electrode Pitch 25.4 mm (1 in.)
Powered Working Area 330W x 330D mm (13W x 13D in.)
Ground/Perforated Working Area 368W x 330D mm (14.5W x 13D in.)
Floating Working Area 330W x 330D mm (13W x 13D in.)
Standard Wattage 600 W
Frequency 13.56 MHz
Available Flow Volumes 10, 25, 50, 100, 250 or 500 sccm
Maximum Number of MFCs 4
Software Control PLC Control with Touch Screen Interface
Remote Interface PlasmaLINK, ProcessLINK
Standard Wet Pump 19.5 cfm with Oxygen Oil Mist Eliminator
Optional Wet Pump 19.5 cfm with Corrosive Oil Mist Eliminator
Optional Purged Dry Pump 22 cfm
N2 Purged Pump Flow 2 slm
Power Supply 110 VAC, 20A, 50/60 Hz, Single Phase, 12 AWG, 3-Wire or
Process Gas Fitting Size & Type 6.35 mm (0.25 in.) OD Swagelok Tube
Process Gas Purity Lab or Electronic Grade
Process Gas Pressure 0.69 bar (10 psig) min. to 1.03 bar (15 psig) max., regulated
Purge Gas Fitting Size & Type 6.35 mm (0.25 in.) OD Swagelok Tube
Purge Gas Purity Lab or Electronic Grade N2/CDA
Purge Gas Pressure 2 bar (30 psig) min. to 6.9 bar (100 psig) max., regulated
(22W x 34D x 28H in.)
Right, Left, Front – 569 mm (22 in.), Back – 254 mm (10 in.)
220 VAC, 10A, 50/60 Hz, Single Phase, 12 AWG, 3-Wire
For more
information,
speak with your
Nordson
representative
or contact
your Nordson
regional oice.
North America
Headquarters
Concord, CA
+1.925.827.1240
info@nordsonmarch.com
China
Shanghai
+86.21.3866.9166
EMEA
Maastricht, Netherlands
+31.65.155.4996
Southeast Asia
Singapore
+65.6796.9500
Korea
Seoul
+82.31.736.8321
Taiwan
New Taipei City
+886.2.2902.1860
India
Chennai
+91.44.4353.9024
Pneumatic Valves Fitting Size & Type 6.35 mm (0.25 in.) OD Swagelok Tube
Pneumatic Gas Purity CDA, Oil Free, Dewpoint ≤7°C (45°F), Particulate Size <5 µm
Pneumatic Gas Pressure 3.45 bar (50 psig) min. to 6.89 bar (100 psig) max., regulated
Exhaust 38 mm (1.5 in.) OD Pipe Flange
Compliance
Ancillary
SEMI S2/S8 (EH&S/Ergonomics)
International CE Marked
Gas Generators Nitrogen, Hydrogen
Equipment
Facilities Chiller, Scrubber
MARCH Products
2470-A Bates Avenue
Concord, CA 94520-1294, U.S.A
info@nordsonmarch.com
+1.925.827.1240
nordsonmarch.com
(Requires Additional Non-Optional Hardware)
Published January 2021
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