Nikon LV100D, LV150, LV150A User Manual

En

Specifications and equipment are subject to change without any notice or obligation
on the part of the manufacturer. April 2005.

©2000-05 NIKON CORPORATION

This brochure is printed on recycled paper made from 40% used material.

WARNING

TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS
CAREFULLY BEFORE USING YOUR EQUIPMENT.

Printed in Japan (0504-05)T Code No. 2CE-KWFH-7

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Industrial Microscopes LV150/150A/100D

Industrial Microscopes

32

A modular microscopy system for breadth and depth

• Printer heads

• Micro sensors

• Optical switches

• GMR heads for HDD

• Medium/small PCB

• FPC

• Interposer substrates

• Bare wafers

• Lithography process

• Probe, test processes

• Post-dicing

• Macromolecules, monomeric materials

• Organic/inorganic materials

• Polymers • Thin film

• Magnetic materials

• Crystals • Metallugraphy

• Precision molds • LCD, color filters

• Polarizing filters

• Organic EL

• CCD • CMOS

• LCOS • DMD

• LF/TAB • WL-CSP

• QFP • SIP

• BGA, CSP, FC

VersatilityVersatility

Versatility

Extend your vision

Optical performance

Improved performance

Extend

your

vision

Extend

your

vision

Optical

performance

Optical

performance

Basic

Performance

Improved

performance

• OA equipment parts

• Cell phones, PDAs, DSC, PC parts

• Automobiles, aeronautics

MEMS

PCB

Casts and parts

Precision molds

FPD

Display devices

Semiconductors

Materials Packages

Versatility

5

Extensive range of industrial stages and
accessories

Users can select suitable models based on sample and stage
stroke. All stages are highly durable with triple-plate design.

Dia base unit for diascopic illumination

In the Eclipse LV series, the LV-DIA Dia Base is available for
diascopic illumination OEM use. Users can now take full
advantage of the modular design. A UN2 transformer is used
for the power supply.

The modular design of the Eclipse LV series
allows an unprecedented level of versatility. The
Eclipse LV series offers flexibility that enables it
to cover a wide variety of products and
applications, extending from development and
quality control to inspection in the manufacturing
process. Users will recognize the superb
performance of the Eclipse LV series when
inspecting semiconductors, FPD, packages,
electronics substrates, materials (material
science), medical devices, cast/metallic/ceramic
parts, precision molds, MEMS, telecommuni­cations devices, and a wide variety of other
samples.

Versatility

Accepts taller samples

The maximum sample height can be increased to 82mm from
47mm by inserting the LV-CR Column Riser 35 between the
main body and arm of the microscope. This feature is useful
for viewing the surfaces of precision molds, optical materials
and other thick samples.

Non-Nikon stages (LV150 or LV150A
only)

Use of non-Nikon stages, such as the Suruga Seiki B23-60CR,
in combination with the LV-SUB Substage 2 allows the
microscope to handle taller samples of up to 116.5 mm,
thereby enabling the observation of fiber ends and other
tools.

With column riserWithout column riser

Combination of LV-150 with LV-SUB Substage 2
and Suruga Seiki B23-60CR stage

82mm

47mm

Modular design

LV150 standard combination

Appropriate holder and substage are selected based on
sample and stage combination.

Compact industrial stage: LV-S32 3x2 Stage

The newly designed LV-S32 3x2 is a compact stage for
industrial microscopes. Its triple-plate design ensures

durability, stability and ease of
use, even when heavy samples
such as metallic materials are
observed. The standard glass
plate makes this stage suitable
for episcopic and diascopic
illumination.

An example of LV-DIA Dia Base built into a taped sample inspection system

LV-DIA Bia Base

LV-S6 6x6 Stage
Stroke: 150 x 150 mm

LV-S64 6x4 Stage
Stroke: 150 x 100 mm

L-S6WH Wafer Holder 6
(for LV-S6 6x6 Stage)

L-S6PL ESD Plate
(for LV-S6 6x6 Stage)

LV-S32PL ESD Plate
(for LV-S32 3x2 Stage)

LV-S32SGH Slideglass Holder
(for LV-S32 3x2 Stage)

LV-SUB Stage
(exclusive for LV150/LV150A)

LV-SUB Substage 2
(exclusive for LV150/LV150A)

LV-S32 3x2 Stage
Stroke: 75 x 50 mm

Tape-suction

section

Roll-out section Roll-in section

Tape-transport
section

Stage section

6

7

Optical PerformanceExtend your vision

A wide variety of observation methods is available with the Eclipse LV series. Observations with first-order
compensator, UV polarizing, and epi-fluorescence observations with UV excitation, in addition to brightfield,
darkfield, DIC, simple polarizing, epi-fluorescence (excitation using visible light) and double-beam
interferometry are all possible. Two new light sources also have been developed: high-intensity, low power­consumption 12V-50W halogen light source and adjustable high-intensity mercury-fiber light source.

Field Aperture Shutter UV-cut

diaphragm diaphragm filter

BF Any diameter Any diameter Open Insert

DF Open Open Open Insert

FL1 Any diameter Any diameter Open —

FL2 Any diameter Any diameter Open —

Universal epi-illuminator: LV-UEPI

The LV-UEPI universal epi-illuminator enables
brightfield, darkfield, simple polarizing and DIC
observations. Field and aperture diaphragms are
automatically opened when the observation is switched
from brightfield to darkfield, and return to their original
position when switched back to brightfield.

High-intensity 12V-50W halogen
light source:

LV-LH50PC Precentered
Lamphouse

Although the LV-LH50PC Precentered Lamphouse
is 12V-50W, the brightness is equivalent to or
higher than that of 12-100W types. The low power­consumption halogen light source contributes to
the compact design of the microscope while also
being friendly to the environment. Focus drift due
to heat from the illuminator is substantially
reduced.

Universal epi-illuminator 2: LV-UEPI2

The LV-UEPI2 universal episcopic illuminator is
equipped with advanced optics suited to a wide variety of
observation methods—brightfield, darkfield, DIC and epi­fluorescence—and automatically sets optimal
illumination in accordance with the field and aperture
diaphragm, shutter, and filters, including diffuser and
ND. This design enables the operator to concentrate on
the observation.

Auto optimal illumination
selection

• Brightfield

• Darkfield

• Simplepolarizing

• DIC

• Brightfield

• Darkfield

• Simplepolarizing

• Observationwithfirst-ordercompensator

• UVpolarizingepi-fluorescence

• DIC

• Epi-fluorescence(UVexcitationpossible)

CFI60 LU Plan Fluor EPI series

CFI60 LU Plan Fluor BD series

CFI60 L Plan EPI CR series of objective lenses
with correction ring

With correction at 0.7 mm (50x)

Without correction (50x)

Transmission wavelength coverage
extended to UV

CFI LU Plan Fluor series

The new CFI LU Plan Fluor series covers transmission
wavelength ranges up to UV. These objective lenses are suitable
for various research, analysis and examination needs, while
maintaining Nikon’s commitment to high NA and long working
distance. Only one kind of objective lens is needed for
brightfield, darkfield, simple polarizing, observation with first­order compensator, DIC and UV epi-fluorescence observations.
These objective lenses, which offer high resolution and easy-to­use performance, can be combined not only with microscopes
but also with other equipment for even greater versatility.

Objective lenses with correction ring

CFI L Plan EPI CR series

The CFI60 series now includes the CFI L Plan EPI CR series to
cope with the thinner coverglass used in liquid crystal displays,
and highly integrated, and dense devices. Coverglass correction
can be continuously made from 0 mm up to 1.2 mm (0-0.7 mm
and 0.6-1.3 mm for 100x) with the correction ring. The 100x
objective lens offers 0.85 high NA, while enabling high-contrast
imaging of cells and patterns without being affected by the
coverglass.

Environmentally friendly

The eco glass used in the CFI LU Plan Fluor and L Plan EPI CR
series does not contain harmful substances such as lead and
arsenic.

Model Magnification NA

Working Distance (mm)
CFI L Plan EPI 2.5X 0.075 8.8
CFI LU Plan Fluor EPI 5X 0.15 23.5

New

10X 0.30 17.3
20X 0.45 4.5
50X 0.80 1.0

100X 0.90 1.0

CFI LU Plan EPI ELWD 20X 0.40 13.0

50X 0.55 10.1

100X 0.80 3.5

CFI L Plan EPI SLWD 20X 0.35 24.0

50X 0.45 17.0

100X 0.70 6.5

CFI LU Plan Apo EPI 100X 0.95 0.4

150X 0.95 0.3

CFI L Plan Apo EPI WI 150X 1.25 0.25

Model Magnification NA

Working Distance (mm)

CFI LU Plan Fluor BD 5X 0.15 18.0

New

10X 0.30 15.0
20X 0.45 4.5
50X 0.80 1.0

100X 0.90 1.0

CFI LU Plan BD ELWD 20X 0.40 13.0

50X 0.55 9.8

100X 0.80 3.5

CFI LU Plan Apo BD 100X 0.90 0.51

150X 0.90 0.4

Model Magnification NA (mm) Working Distance (mm) Glass Thickness Correction Range
CFI L Plan EPI CR

New

20x 0.45 10.9-10.0 0-1.2mm

CFI L Plan EPI CR

New

50x 0.7 3.9-3.0 0-1.2mm

CFI L Plan EPI CRA

New

100x 0.85 1.2-0.85 0-0.7mm

CFI L Plan EPI CRB

New

100x 0.85 1.3-0.95 0.6-1.3mm

CFI60 Series Objectives

8 9

Usability has been vastly improved as has durability and rigidity.

Improved performance

Highly rigid, vibration-free body

The use of structural analysis during the design process
has improved rigidity and antivibration parameters to
yield clear images even at high magnification.

Tilting trinocular eyepiece tube

LV-TT2 Tilting Trinocular Eyepiece
Tube

The newly developed LV-TT2 tilting trinocular
eyepiece tube (erect image) offers comfort to all
users, regardless of their stature or viewing
position. The optical path changeover of
100:0/20:80 allows the simultaneous use of a
monitor.

Highly durable motorized nosepiece

LV-NU5A Nosepiece

The LV-NU5A motorized universal quintuple
nosepiece is 10 times more durable than its
predecessor and can be used with the LV150A. In
combination with the LV-NCNT motorized
nosepiece controller, it can also be used in other
devices.

Manual nosepiece

A variety of manual nosepieces are available to suit
all needs.

Thorough ESD protection

All parts of the microscope that might be touched,
including the body, tube and stage, have been
insulated. This improves anticontamination and
prevents samples from being harmed by static
electricity, thereby improving yields.

Electrostatic decay time: 1000-10V, within 0.2 sec.

C-N6 Nosepiece
(Brightfield)

L-NBD5 Nosepiece
(Bright/darkfield)

L-NU5 Nosepiece
(Universal)

LV-P
 Plate

Brightfield

The antiflare design applied
to the objective lenses and
light source ensures bright,
high-contrast images.

Darkfield

Nikon’s unique “Fly-eye
Lens” used in the darkfield
illuminator yields a
threefold increase in
brightness over previous
models. This allows high­sensitivity detection of
defects and height gaps in
samples.

Nomarski DIC

Standard or high contrast DIC
sliders can be selected to suit
the sample. This method is
useful for the surface
observations of various
devices and precision molds.

Epi-fluorescence

UV, V, BV, B or G excitation
fluorescence filter blocks can
be selected. This method is
perfect for the observation of
OEL, ion migration and other
substrate uses.

L-DIC DIC Prism (standard) L-DIHC DIC Prism (high contrast) Brightfield Epi-fluorescence B-2A

Fluorescence filter blocks

Simple polarizing

In addition to simple
polarizing, a lambda plate
can be inserted into the
optical path to achieve
observations with a first­order compensator. This is
useful for liquid crystal
inspections (when used in
combination with the LV­UEPI 2).

Double-beam interferometry equipment
(measures minute height gaps)

Michelson (TI) and Mirau (DI)
types of episcopic double­beam interferometry can be
carried out. A filar micrometer
eyepiece can be used to
examine or measure samples
while avoiding direct contact.

Diascopic illumination

Diascopic illumination is
used to observe optical
parts, FPD and other samples
that transmit light.

Episcopic Two-beam Interferometry Equipment TI/DI

Condenser

Observation Methods

YM-PO
Polarizer

LV-UV
Polarizer

LV-FLAN FL
Analyzer

L-AN
Analyzer

LV-PO
Polarizer

LV-FLAN
FL Analyzer

L-DIC
DIC Prism

L-DICH[??]
High-contrast
DIC Prism

YM-PO
Polarizer

L-AN
Analyzer

10 11

Semiconductor (IC wafer) Semiconductor (IC wafer) MEMS (optical switch)

Brightfield Darkfield Brightfield

Micro bump Compact disc (CD) Image sensor (CCD)

Brightfield Simple polarizing Brightfield

PCB (ion migration) PCB (ion migration) Precision mold

Brightfield Epi-fluorescence DIC

L150A controls

(Episcopic illumination type)

Applications

CFI-series eyepiece

An illuminator that can be
used for brightfield,
darkfield, simple
polarizing and DIC
observations.

LV-UEPI

A universal motorized
nosepiece that is 10 times
more durable than its
predecessors.

LV-NU5A Nosepiece

These objective lenses feature a
high NA, long working distances
and an extended transmission
wavelength range.

CFI LU Plan Fluor series

The LV150 and LV150A
microscopes are used for
episcopic illumination.

A trinocular tube with an
optical path changeover
of 100:0/0:100.

LV150/LV150A

An episcopic illumination
stage capable of inspecting
150mm wafers. (With 6”
wafer holder)

LV-S6 6x6 Stage

LV-TI3 Trinocular Tube

A low power-consumption 12V-50W
halogen light source equivalent to or
higher than the 12V-100W type.

LV-LH50PC Precentered Lamphouse

Motorized nosepiece controls

12 13

Applications

(Episcopic/diascopic illumination type)

LCD (color filter) LCD (conductive particle) Test reticle

Diascopic brightfield DIC Diascopic brightfield

リシャ輝石？？

Carbon paper Nodular graphite cast iron

DIC Brightfield DIC

Tourmaline Tourmaline Tourmaline

Brightfield DIC Double-beam interferometry

CFI-series eyepiece

The LV-UEPI2 illuminator
enables brightfield,
darkfield, DIC, simple
polarizing, and UV
excitation epi-fluorescence
observations.

LV-UEPI2

Selectable from C-N6
(brightfield), L-NBD5
(bright/darkfield) and L­NU5 (universal) nosepieces.

Nosepiece

These objective lenses feature
high NA, long working distances
and an extended transmission
wavelength range.

CFI LU Plan Fluor Series

A trinocular tube with an
optical path changeover
of 100:0/0:100.

This small, industrial-use
stage has a triple-plate
design and can be used for
episcopic and diascopic
illumination.

LV-S32 3x2 Stage

LV-TI3 Trinocular Tube

A low power-consumption 12V-50W
halogen light source equivalent to or
higher than the 12V-100W type.

LV-LH50PC 12V-50W Lamphouse

The LV100D microscope is
capable of episcopic and
diascopic illumination.

LV100D

14 15

ACCESSORIES

100

IN

0

100

OUT

Eyepiece tubes

Illuminators Double Port Polarizing/DIC accessories

Nosepieces

Objective adapters

Objective lenses

Substages (LV150/LV150A)

Stages

Holders

Micrometers

Diascopic illumination condensers

Model F.O.V. Remarks

CFI 10x 22

CFI 10xM 22 Photomask included
CFI 10×CM：for C-TE binocular ergo tube

22 Crosshairs and micrometer included

CFI 12.5x 16

CFI 15x 14.5

CFI UW 10x 25

CFI UW 10xM 25 Photomask included

Mirometer eyepiece 10xN 20 Stroke 10 mm

Main scale: 0.1 mm/increments
Sub scale: 0.01 mm/increments

Objective micrometer

Eyepiece micrometer

Grid micrometer

LV-TI3 Trinocular
Eyepiece Tube ESD

Y-IDP Double Port
(Beamsplit 45:55/0:100)
Y-IDP Double Port 0/100
(Beamsplit 100:0/0:100)

LV-TT2 Tilting Trinocular Eyepiece Tube

LV-SUB Stage LV-SUB Stage 2

C-N6 Nosepiece
(Brightfield)

L-NBD5 Nosepiece
(Bright/darkfield)

L-NU5
Nosepiece
(Universal)

C-OA 15mm AdapterLU objective

Adapter M32-25

LV-NU5A Motorized
Nosepiece (Universal)

LV-S6 6x6 Stage LV-S64 6x4 Stage LV-S32 3x2 Stage

L-S6WH Wafer
Holder

For LV-S6 6x6 Stage For LV-S32 3x2 Stage

L-S6PL ESD Plate LV-S32SGH

Slideglass Holder

LV-S32PL
ESD Plate

Simple Polarizing

UV polarizing epi-fluorescence

YM-PO
Polarizer

LV-UV
Polarizer

LV-FLAN FL
Analyzer

L-DIC DIC
Prism

L-DICH

High-contrast
DIC Prism

L-AN
Analyzer

YM-PO
Polarizer

L-AN
Analyzer

LV-PO
Polarizer

LV-FLAN FL
Analyzer

LV-P
 Plate

Observation with first-order compensator

DIC

LWD
Achromat

C-C Abbe

DF (Dry)

Slide
(Swing-out??)

Achromat
2-100x

C-C Achro

CFI LU PLAN FLUOR EPI series

CFI LU PLAN FLUOR BD series

CFI L PLAN EPI CR series

LV-UEPI

LV-UEPI2

Eyepieces

IN

OUT

0

100

0

100

16 17

Digital cameras for microscopes

The Digital Sight series is a powerful imaging system for monitoring/capturing images taken under brightfield,

darkfield, DIC, epi-fluorescence, and other observation methods.

Ultrahigh-definition Digital Camera

Digital Camera

The DXM1200F produces true-to-life, extremely high-quality images with up to approximately 12 million output pixels. It meets

the demanding requirements of professional users and is excellent for image analysis in advanced R&D fields.

• Approx. 12 million output pixels comparable to film
high-end cameras, thanks to Nikon’s exclusive micro­step high-density imaging technology

• Live image display at a frame rate of 12 fps max.

• The wide exposure latitude produces true-to-life
images regardless of brightness level.

Standalone type

This type comes with an LCD monitor, making it
convenient for on-screen monitoring without a PC and in
applications that require long/multiple exposures.

Real imaging camera—DS-2Mv-L1

• Live image display at 30fps max.

• Image size: 1600 x 1200 pixels

• 6.3” TFT monitor

• Analog RGB output

• CompactFlash card slot

• USB mass-storage-class
compatible

• Direct print function (Pict
bridge compatible)
optional

*1

• Ethernet (100BASE/TX) port

*2

*1: A CP900DC dedicated printer

and C-mount adapter are
necessary. Provided with real 10
mode (10X printing).

*2: FTP Client/Server, HTTP Server Telnet Server functions provided.

PC-connection type

This type requires connection to a PC and allows
observation on a PC monitor, image capture,
measurement and analysis when special application
software, ACT-2U, is used.

Real imaging camera—DS-2Mv-U1

• Live image display at 12fps (800 x 560)

• Image size: 1600 x 1200 pixels

• PC connection via USB2.0

• Dedicated application software—ACT-2U

Camera heads

Select the best type to match your sample and use.

For brightfield, darkfield, DIC observations

For fluorescence observations
(that require long exposure)

A host of measuring tools

*Dedicated ACT-2U camera control software is necessary when using the DS-U1.

DS-2MBW

• Image size: 1600 x 1200 pixels

• 15 fps (30 max.)

• Superb movie

DS-5M

• Image size: 2560 x 1920 pixels

• True-to-life recording of minute

images

DS-2MBWc

• Image size: 1600 x 1200 pixels

• Sensitivity approx. 5 times greater

than predecessors

• Includes a Peltier device

• Brilliant images with minimum noise

DS-5Mc

• Image size: 2560 x 1920 pixels

• Includes a Peltier device

• Brilliant images with minimum noise

Cross scale
(DS-L1 only)

Option: camera control software

ACT-2

The optional ACT-2U software offers the following
arrays of convenient measurement tools.

Camera control software

ACT-1

Minimizes fatigue during large-volume, extended
time shooting.

All essential sections, including  live image preview, 
captured image window,  thumbnail, and  image
capture parameter setting panel, are simultaneously
displayed on a single screen, enabling users to easily
understand image capture procedures. The size of the
parameter setting panel has been reduced to leave more
space for image display.

 

 

Dedicated camera control
software ACT-2U

Wafer/IC chip

Two-point distance

Area (DS-U1 only) XY scale

Screen pattern
(crossline, circle)

Scale Point to line distance Intersection angle

Circumference/diameter

Metal/ceramics PCB

Camera control software for DS-L1/DS-U1

Scene mode—optimal imaging with a single mouse click

Optimal imaging parameters have been preset for each sample type, therefore anyone, regardless of experience, can easily perform
photography of the highest level.

Two-point distance

Scale

Point to line distance

Intersection angle

Circumference/diameter

Area

XY scale

Screen pattern (crossline, circle)

1918

Dimensional diagrams

LV-UEPI Universal Epi-illuminator LV-UEPI2 Universal Epi-illuminator 2

LV- DIA Dia Dase

1

0

0

I

N

0





0

1

0

0

O

U

T

95.5

267.090

508.5

387.2
326

193

78.1

341

456.8

134.5

36

250

25.5

J

APA

N

341

495

391

326

193

92

15176

250

140.5

95.5

LV-TI3 Trinocular

Tube ESD

LV-TT2 Tilting

Trinocular Tube

LV-CR Column Riser 35

LV-S6 6x6 Stage LV-S64 6x4 Stage

LV-SUB Stage

LV-NU5A

Nosepiece

LV-NCNT Nosepiece

Controller

LV-SUB Stage 2 LV-S32PL

ESD Plate

LV-S32SGH Slideglass

Holder

LV-S32 3x2 Stage

LV150A/LV150

LV100D

192.7 65.5

φ

60

φ

50

137.3

E.P.

20°

96.8

T

U

I

O

N

0

1

0

0

0

1





0

0

φ

51

60 67 202.5

205

186

17431

317

357

317

109

155 35

118

59

E.P.

118

103

82

92.5

54.55

73.7

264.6 66 31

138.3

20°

φ

100

153

φ10

φ

52

104

98.5

75

51

114

35

205.5

140.5

188

φ34

25.5

227

181

134

134

8445.5

JAPAN

140.5

φ34

109

25.5

34
φ

129 299

JAPAN

174

111129

40 31

45.5

φ

34

34

φ

217 25.5

299

25.5

109

205.5

188

140.5

45.5

φ

34

130

130

336

295

110

79.3

100

φ48

13

54

81.3

φ40

27660

61

25

57

29

336

295

95

110

54

81.3 79.3

13

27660

61

Cablelength220mm
(cordbushexittoconnectorexit)

25

105

φ40

410.5

370

45°

40

25.5

100

φ48

300.5113.3

65

5

16

410.5

370

45°

40

300.5113.3

65

5

16

φ21

φ51

25.5

95

Cablelength220mm
(cordbushexittoconnectorexit)

φ21

φ51

94

100

54

106

4-M4

470

)

35

39
(

57 12

74

120

ケーブル長

15°

:固定部より160mm

(89)

88

105

149

93.7

55.7

69

48

φ43 .5

15

φ127

50

50

74

30

66

8-M4

96

13

30.5

26.5 4

110

(182)

10°

28

111

48

122

88

5

171.5

167.5
71

171.5

122

88

26.5

76.5

4.7

100

φ60

250

55

341
367

φ62

127

250

φ48

116

115 73.5

20 21

LV150/150A

Main specifications

Main body Baseless type (spacer insertable between arm and stand); Max. sample height 47mm (when configured with 3x2 stage/6x4 stage),

82mm with column riser, 116.5mm with Suruga Seiki B23-60CR; 12V-50W brightness control transformer built in

Focusing section Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 40mm, coarse 14.0mm/rotation (torque adjustable, with

refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)

Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece

(universal quintuple, with flare prevention), LV-NU5A Nosepiece (for LV150A, high-durability motorized universal quintuple, with
flare prevention)

Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); Field (centerable) and aperture diaphragms synchronized with B/D
LV-U EPI changeover; ø25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer mountable

Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); 120W high-intensity mercury-fiber illuminator (with brightness
LV-U EPI2 control, no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover;

f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable

Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (inverted

image, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22)

Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate), ESD-applied (excluding glass plate)

LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate), ESD-applied (excluding glass plate)
LV-S6 6x6 Stage (stroke: 150x150 mm; only for episcopic illumination)

Eyepiece CFI eyepiece series

Objective lens CFI60 series

Electrostatic decay time 1000-10V, within 0.2 sec.

Power consumption 1.2A/75W

Weight Approx. 8.6kg

LV100D

Main body Baseless type (spacer insertable between arm and stand); Max. sample height 29mm, 64mm with column riser; 12V-50W

brightness control transformer built in

Focusing section Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation (torque adjustable, with

refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)

Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece

(universal quintuple, with flare prevention)

Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); Field (centerable) and aperture diaphragms synchronized with B/D
LV-U EPI changeover; f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable

Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); 120W high-intensity mercury-fiber illuminator (with brightness control,
LV-U EPI2 no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; f25mm filter

(NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable

Diascopic illuminator 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; Filters

(ND8, NCB11) insertable

Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (inverted

image, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22)

Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate)

LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate)

Eyepiece CFI eyepiece series

Objective lens CFI60 series

Electrostatic decay time 1000-10V, within 0.2 sec.

Power consumption 1.2A/75W

Weight Approx. 9.4kg

Polarizers/analyzers/plate

JAPAN

JAPAN

JAPAN

L.U

L.U

L.U

JAPAN

L.U

JAPAN

L.U

JAPAN

L.U

JAPAN

L.U

JAPAN

L.U

JAPAN

L.U

JAPAN

JAPAN

JAPAN

JAPAN

JAPAN

L.U

Objective lenses

YM-PO Polarizer LV-PO Polarizer

85.4
79

30

6.5

30

7.5

LV-FLAN FL Analyzer LV-P Plate

位

方

5°±'

4

30

6.5

λ板の

30

3

CFI LU PLAN FLUOR

CFI LU Plan Fluor EPI 5X CFI LU Plan Fluor EPI 10X

φ29

φ23.8

5

L.U

5X /

45°

36.5

φ20

JAPAN

WD

15A

23.5

M25x0.75

W.D.=23.5

CFI LU PLAN FLUOR BD

φ36
φ34

M32x0.75

φ30.8

5

JAPAN

0.2

L.U

35

5X /

3.95

φ27.6
φ35.5

15A

18

WD

W.D.=18

42

6.7

CFI L PLAN EPI CR

CFI L PLAN EPI 20XCR

φ35
φ33.5
φ29.5

φ27.5

(0.5)

5

11°

10.8

11.7

49.1

L

20X / 0.45

(45°）

φ20

φ31.5

JAPAN

0.6(CG)

21.1 5

W.D.=10.5

60

60

60.2

φ29

φ23.8

5

42.5

45

30°

0.2

4

JAPAN

L.U

10X /

30A

17.5

WD

φ17.5

φ36
φ34

φ30.8

JAPAN

L.U

10X /

30A

15

WD

5°

φ25

CFI L PLAN EPI 50XCR

(0.5)

5

°)

7

(

14.5

13

56.1

L

15.56.5

45°

3

30°

3.1

W.D.=3.5

φ33.5

φ32
φ29
φ27

φ23.8

50X / 0.70

φ13
φ18.8
φ23.3

φ26
φ31.5

LV-UVPO Polarizer

85.4 85.4
79

307.5

47113.5

90

M25x0.75 M25x0.75

60

W.D.=17.5

M32x0.75 M32x0.75

60

W.D.=15

M25x0.75

60.2

JAPAN

0.6(CG)

10

CFI LU Plan Fluor EPI 20X

φ29

φ23.8

5

JAPAN

L.U

20X /

55.5

55.5 5

50°

51

45A

60

4.5

WD

4.5

φ9

φ36
φ34

φ30.8

0.2

JAPAN

L.U

20X /

45 A

60

4.5

WD

5°

4

φ26.2
φ33.5

W.D.=4.5

CFI L PLAN EPI 100XCRA

φ35.5

φ34
φ29.5
φ28.5

(0.7)

5

)

°

14.313226.225

(16

58.7

L

°

45

6.5

°
5
2

φ11.5

W.D.=1.1

φ19.8
φ24.8

φ27
φ32.5

100X / 0.35

79

CFI LU Plan Fluor EPI 50X

59

54

59 5

JAPAN

L.U

47.5

50X /

45°

°

4.5

40

2.3

(Overheadscrew)

φ40
φ35

φ30.8

0.5

L.U

50X /

35°

3

(φ28.4)

φ37

M25x0.75-6g

60.1

0.3(CG)

φ30

φ23.8

φ8.5

φ17.5
φ21.8

φ24

40.4

JAPAN

WD

80 A

JAPAN

WD

1.0

80A

1.0

L-AN Analyzer

30

6.5

CFI LU Plan Fluor EPI 100X

M25x0.75

47.5

59

60

W.D.=1

M32x0.75

60

W.D.=1

CFI L PLAN EPI 100XCRB

(0.7)

(16

14.313226.4

58.2 5W.D.=1.2

4

2

1.8

°)

°

5

6.5

°
6

CFI LU Plan Fluor BD 100XCFI LU Plan Fluor BD 50XCFI LU Plan Fluor BD 20XCFI LU Plan Fluor BD 10XCFI LU Plan Fluor BD 5X

59 5

L

45°

4.5

0°
3

3.5

(Overheadscrew)

0.5

54

35°

3

φ35.5

φ34
φ29.5
φ28.5
φ23.8

100X / 0.35

JAPAN

φ14.5

φ19.8
φ24.8

φ27

φ32.5

100X /

φ23.8

L.U

100X /

φ21.8

40.4

φ40
φ35

φ30.8

L.U

(φ28.4)

φ37

M25x0.75

0.9(CG)

90

φ30

φ8.8

φ18

φ24

JAPAN

60.3

M25x0.75

JAPAN

WD

90A

60

1.0

W.D.=1

M32x0.75

90 A

1.0

WD

60

W.D.=1

22 23

System diagram

LV150／LV150A LV100D

D-FB

ND4ND16

NCB11

λ

OUT

IN

F

F

E

A

B

A

F

E

B

I
I’

I’

I’

F

E

OP

P'

T

Q

Q'

R

Q

S

O

T

Q'

R

S

*Not necessary on the LV150A as the operation unit has been built into the main body.

Fiber

External Power Supply

S

I

P

P'

POWER

MIN. MAX.

Photomicrographic
System FX-III Series

ENG-mount CCTV Camera C-mount CCTV Camera

Camera Mount

V-T Photo
Adapter

Projection
Lenses
PLI 2x
PLI 2.5x
PLI 4x
PLI 5x

ENG-mount
CCTV Adapters

0.45x

0.6x

ENG-mount
CCTV Adapter

Relay
Lens 1x

ENG-mount
Zooming
Adapter

Zooming
Lens

C-mount
Zooming
Adapter

C-mount
CCTV Adapter

Relay
Lens
1x

C-mount
CCTV Adapters

0.35x

0.45x

0.6x

0.7x

C-mount
CCTV
Adapter
VM2.54x

C-mount
CCTV
Adapter
VM4x

C-mount Direct
CCTV Adapter

C-mount
Adapter A

0.7x

DXM1200F

DS-5M DS-2M

LV-TV TV Tube

C-mount
Adapter

0.55x

0.5x 2nd
Objective

Y-TB
Binocular Tube

Other Eclipse series eyepiece
tubes can be used.

LV-TI3 Trinocular
Tube ESD

LV-TT2 Tilting
Trinocular Tube

Eyepiece Tubes

Epi-fluorescence Accessories

C-FL Fluorescence
Filter Block

L-AN
Analyzer

YM-PO
Polarizer

LV-FLAN FL Analyzer

LV-λP λPlate

LV-PO
Polarizer

LV-UVPO Polarizer

D-FB Excitation
Light Balancer

NCB Slider

ND Slider

Adapter

CFI UW
10x

CFI UW
10x M

F.N.ø25

F.N.ø22

CFI
15x

C-CT

Centering

Telescope

CFI

12.5x

CFI

10xCM

CFI

10xM

CFI
10x

L-W

10x

ESD

Filar Micrometer
10xN

Eyepieces

LV-SUB Substage

Surugaseiki
B23-60CR

LV-SUB
Substage 2

LV-CR Column Riser 35

C-ER Eyelevel Riser

Y-IDP Double Port (100：0 / 55：45)

Y-IDP Double Port (100：0 / 0：100)

LV-UEPI Universal
Epi-Illuminator

LV-UEPI2
Universal
Epi-Illuminator 2

Intermediate Modules

L-S6WH Wafer
Holder

L-S6PL
ESD Plate

LV-S32SGH
Slidegalss Holder

LV-S32PL
ESD Plate

LV-S6
6x6 Stage

LV-S64
6x4 Stage

LV-S32
3x2 Stage

Stages

LV-LH50PC
Precentered Lamphouse

D-LH 12V-100W Precentered
Lamphouse (Requires
TE2 External External Power
Supply)

C-HGF Fiber
Adapter

LV-HL50W 12V-50W-LL
Halogen Lamp

12V-100W
Lamp

100W TE2
Power Supply

Lamphouses

L-DIC DIC Prism

L-DIHC High
Contrast DIC Prism

LV-NU5A
Motorized
Nosepiece

L-NU5 U5
Nosepiece

L-NBD5 DB5
Nosepiece

C-N C-N6
Nosepiece

P-N P-N5
Nosepiece

Adapter

LV-NCNT
Nosepiece
Controller*

LV-NCNT
Nosepiece
Controller Cable
10m

LU Plan Fluor
BD Objective

LU Plan Fluor
EPI Objective

LU Nosepiece
Adapter
M32-25

C-OA 15MM
Adapter

DI Objective

CFI L/LU
EPI P
Objective

TI Objective Adapter

Nosepieces

C

D-FB

ND4ND16

NCB11

λ

OUT

IN

F

F

E

A

F

E

B

I

F

E

OP

P'

T

Q

Q'

R

Q

S

I’

O

T

Q'

R

S

LV-S32
3x2 Stage

鏡筒

S

I

P

P'

A

B

I

C

カメラマウント

TE2-PS100W Power Supply
(YM-EPI3 3-pin extension
cord is required)

POWER

MIN. MAX.

POWER

MIN. MAX.

I
I’

I’

Photomicrographic
System FX-III Series

ENG-mount CCTV Camera C-mount CCTV Camera

Camera Mount

V-T Photo
Adapter

Projection
Lenses
PLI 2x
PLI 2.5x
PLI 4x
PLI 5x

ENG-mount
CCTV Adapters

0.45x

0.6x

ENG-mount
CCTV Adapter

Relay
Lens 1x

ENG-mount
Zooming
Adapter

Zooming
Lens

C-mount
Zooming
Adapter

C-mount
CCTV Adapter

Relay
Lens
1x

C-mount
CCTV Adapters

0.35x

0.45x

0.6x

0.7x

C-mount
CCTV
Adapter
VM2.54x

C-mount
CCTV
Adapter
VM4x

C-mount Direct
CCTV Adapter

C-mount
Adapter A

0.7x

DXM1200F

DS-5M DS-2M

LV-TV TV Tube

C-mount
Adapter

0.55x

0.5x 2nd
Objective

Y-TB
Binocular Tube

Other Eclipse series eyepiece
tubes can be used.

LV-TI3 Trinocular
Tube ESD

LV-TT2 Tilting
Trinocular Tube

Eyepiece Tubes

Epi-fluorescence Accessories

C-FL Fluorescence
Filter Block

L-AN
Analyzer

YM-PO
Polarizer

LV-FLAN FL Analyzer

LV-λP λPlate

LV-PO
Polarizer

LV-UVPO Polarizer

D-FB Excitation
Light Balancer

NCB Slider

ND Slider

Adapter

CFI UW
10x

CFI UW
10x M

F.N.ø25

F.N.ø22

CFI
15x

C-CT

Centering

Telescope

CFI

12.5x

CFI

10xCM

CFI

10xM

CFI
10x

L-W
10x

ESD

Filar Micrometer
10xN

Eyepieces

C-SP Simple
Polarizing
Polarizer

LV-CR Column Riser 35

C-ER Eyelevel Riser

Y-IDP Double Port (100：0 / 55：45)

Y-IDP Double Port (100：0 / 0：100)

LV-UEPI Universal
Epi-Illuminator

LV-UEPI2
Universal
Epi-Illuminator 2

Intermediate Modules

LV-S32SGH
Slidegalss Holder

LV-S32PL
ESD Plate

LV-S64
6x4 Stage

Stages

LV-LH50PC
Precentered Lamphouse

D-LH 12V-100W Precentered
Lamphouse (Requires
TE2 External Power Supply)

C-HGF Fiber
Adapter

LV-HL50W 12V-50W-LL
Halogen Lamp

12V-100W
Lamp

100W TE2
Power Supply

Lamphouses

L-DIC DIC Prism

L-DIHC High
Contrast DIC Prism

L-NU5 U5
Nosepiece

L-NBD5 DB5
Nosepiece

C-N C-N6
Nosepiece

P-N P-N5
Nosepiece

External Power Supply

LU Plan Fluor
BD Objective

LU Plan Fluor
EPI Objective

LU Nosepiece
Adapter
M32-25

C-OA 15MM
Adapter

DI Objective

CFI L/LU
EPI P
Objective

TI Objective Adapter

Adapter

Nosepieces

DF (dry)

D-C
Abbe

C-C
Achromat

LWD
Achromat

Slide (Swing-out??)
Achromat 2-100x

Condensers