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HXP100P-MECA
User Manual
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Newport HXP100P-MECA, HXP100PHA-MECA User Manual

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Page 1
6-Axis-Parallel Kinematic
Positioning Systems
HXP100P-MECA &
HXP100PHA-MECA Hexapods
USER’S MANUAL
Page 2
EDH0349En1041 — 12/18 ii
Warranty
Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion.
To exercise this warranty, write or call your local Newport representative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated service facility. Repairs will be made and the instrument returned, transportation prepaid. Repaired products are warranted for the balance of the original warranty period, or at least 90 days.
Limitation of Warranty
This warranty does not apply to defects resulting from modification or misuse of any product or part.
This warranty is in lieu of all other warranties, expressed or implied, including any implied warranty of merchantability or fitness for a particular use. Newport Corporation shall not be liable for any indirect, special, or consequential damages.
by Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document may be reproduced or copied without the prior written approval of Newport Corporation. This document is provided for informa ti on only, and pro du ct specifications are subject to change without notice. Any change will be reflected in future publishings.
CAUTION
Warranty does not apply to damages resulting from:
• Incorrect usage:
– Load on the Hexapod greater than maximum specified load.
– Carriage speed higher than specified speed.
–Improper grounding.
¬ Connectors must be properly secured.
¬ When the load on the Hexapod represents an electrical risk, it
must be connected to ground.
– Excessive or improper cantilever loads.
•Modification of the Hexapod or any part thereof.
CAUTION
Please return equipment in the original (or equivalent) packing.
You will be responsible for damage incurred from inadequate packaging if the original packaging is not used.
© 2018
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HXP100P-MECA & HXP100PHA-MECA 6-Axis-Parallel Kinematic Positioning Systems
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
3.0 — Characteristics............................................................................3
3.1 Mechanical Specifications .......................................................................3
3.2 Guaranteed Specifications of the HXP100PHA-MECA Version ............4
3.3 Max. Cantilever Distance of the Load.....................................................4
3.4 Weight.........................................................................................................4
4.0 — Connection to the HXP100P-ELEC or
HXP100PHA-ELEC Controller.............................................5
4.1 Warnings on Controllers ..........................................................................5
4.2 Connection .................................................................................................6
4.3 Cables .........................................................................................................7
5.0 — Dimensions...................................................................................8
6.0 — Maintenance ................................................................................9
6.1 Maintenance ..............................................................................................9
6.2 Repair .........................................................................................................9
Service Form .........................................................................................................11
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EDH0349En1041 — 12/18 iv
Page 5
v EDH0349En1041 — 12/18
HXP100P-MECA & HXP100PHA-MECA 6-Axis-Parallel Kinematic Positioning Systems
HXP100P­MECA
EU Declaration of Conformity
following Annex II-1A of Directive 2006/42/EC on machinery
The manufacturer:
MICRO-CONTROLE Spectra-Physics, 9, rue du Bois Sauvage 91055 Evry CEDEX, FRANCE
Hereby declares that the machinery:
y Description: " HXP100P-MECA " y Function: 6-Axis Kinematic Positioning System y Models: HXP100P-MECA; HXP100PHA-MECA.
– the technical file of which was compiled by:
Mr Hervé LE COINTE , Quality Director, MICRO-CONTROLE Spectra-Physics, Zone Industrielle - B.P.29 F-45340 Beaune La Rolande France
– complies with all the relevant provisions of the Directive 2006/42/EC on machinery. – complies with all the relevant provisions of the Directive 2014/30/EU relating to electro­magnetic compatibility. – complies with all the relevant provisions of the Directive 2011/65/EU relating to RoHS2.
– was designed and built in accordance with the following harmonised standards:
y NF EN 61326-1:2013 « Electrical equipment for measurement, control and laboratory use – EMC requirements – Part 1: General requirements » y NF EN 55011:2010/A1:2011 Class A
– was designed and built in accordance with the following other standards:
y NF EN 61000-4-2 y NF EN 61000-4-3 y NF EN 61000-4-4 y NF EN 61000-4-6
ORIGINAL DECLARATION
Done in Beaune La Rolande on 16 May 2017 Hervé LE COINTE Quality Director
DC1-EN rev:A
EC Declaration of Conformity
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EDH0349En1041 — 12/18 vi
Definitions and Symbols
The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur.
General Warning or Caution
The exclamation symbol may appear in warning and caution tables in this document. This symbol designates an area where personal injury or damage to the equipment is possible.
The following are definitions of the Warnings, Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety, safety and preservation of the equipment, or important tips.
WA RN IN G
Warning indicates a potentially dangerous situation which can result in bodily harm or death.
CAUTION
Caution indicates a potentially hazardous situation which can result in damage to product or equipment.
NOTE
Note indicates additional information that must be considered by the user or operator.
European Union CE Mark
The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations.
Warnings and Cautions
ATTENTIO N
This stage is a Class A device. In a residential environment, this device can cause electromagnetic interference. In this case, suitable measures must be taken by the user.
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HXP100P-MECA & HXP100PHA-MECA 6-Axis-Parallel Kinematic Positioning Systems
Warnings
W
ARNING
The motion of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved.
WA RN IN G
Do not use this Hexapod when struts are emitting smoke or is unusually hot to the touch or are emitting any unusual odor or noise or is in any other abnormal state.
Stop using the Hexapod immediately, switch off struts power and then disconnect the HXP controller from power supply.
After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the Hexapod yourself as this can be dangerous.
WA RN IN G
Make sure that this Hexapod is not exposed to moisture and that liquid does not get into the Hexapod.
Nevertheless, if any liquid has entered the Hexapod, switch off struts power and then disconnect the HXP controller from power supply.
Contact your Newport service facility and request repairs.
WA RN IN G
Do not insert or drop objects into this Hexapod, this may cause an electric shock, or lock the drive.
Do not use this Hexapod if any foreign objects have entered the Hexapod. Switch off struts power and then disconnect the HXP controller from power supply.
Contact your Newport service facility for repairs.
WA RN IN G
Do not place this Hexapod in unstable locations such as on a wobbly table or sloping surface, where it may fall or tip over and cause injury.
If this Hexapod has been dropped or the case has been damaged, switch off struts power and then disconnect the HXP controller from power supply.
Contact your Newport service facility and request repairs.
WA RN IN G
Do not attempt to modify this Hexapod; this may cause an electric shock or downgrade its performance.
WA RN IN G
Do not exceed the usable depth indicated on the mounting holes (see section “Dimensions”). Longer screws can damage the mechanics or cause a short-circuit.
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EDH0349En1041 — 12/18 viii
Caution
CAUTION
Do not place this Hexapod in a hostile environment such as X-Rays, hard UV,… or in any vacuum environment.
CAUTION
Do not use the top plate for handling. This may cause it to malfunction.
CAUTION
Do not manipulate struts. This may cause it to malfunction.
CAUTION
Do not use the Hexapod neither up side down nor horizontally.
CAUTION
Do not place this Hexapod in a location affected by dust, oil fumes, steam or high humidity. This may cause an electric shock.
CAUTION
Do not leave this Hexapod in places subject to extremely high temperatures or low temperatures. This may cause an electric shock.
• Operating temperature: +10 to +35 °C
• Storage temperature: -10 to +40 °C (in its original packaging)
CAUTION
Do not move this Hexapod if struts power is on.
Make sure that the cable to the electronics is disconnected before moving the Hexapod. Failure to do so may damage the cable and cause an electrical shock.
CAUTION
Be careful that the Hexapod is not bumped when it is being carried. This may cause it to malfunction.
CAUTION
When handling this Hexapod, always unplug the equipment from the power source for safety.
CAUTION
Contact your Newport service facility to request cleaning and specification control every year.
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HXP100P-MECA & HXP100PHA-MECA 6-Axis-Parallel Kinematic Positioning Systems
6-Axis-Parallel Kinematic Positioning Systems HXP100P-MECA & HXP100PHA-MECA Hexapods
1.0 —Introduction
This manual provides operating instructions for the Hexapod that you have purchased.
CAUTION
Please read chapters 3.3 and 5.0 carefully before operating your Hexapod.
CAUTION
Do not use the HXP100P-MECA or HXP100PHA-MECA Hexapod neither up side down nor horizontally.
CAUTION
Do not use the top plate for handling.
CAUTION
Do not manually turn
struts.
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EDH0349En1041 — 12/18 2
2.0 —Description
The HXP100P-MECA 6-Axis Hexapod is a parallel kinematic motion device t
hat provides six degrees of freedom: X, Y, Z, pitch, roll, and yaw. The HXP100 has long travel capability and is an effective solution to complex motion applications that demand accuracy in up to six independent axes. Contrary to the image of being complex and highly priced, the HXP100P-MECA hexapod is not only affordable but extremely easy to use. T
he HXP100P-MECA design also includes two programmable pivot points, enabling more flexibility to align a sample at a particular point or points of that sample. The HXP100P-MECA Series also takes advantage of the RightPath™ trajectory capability, enabling scanning in a path along a defined trajectory, line, arc or rotation, at a constant and definable speed with low-runout.
Derived from the HXP50-MECA, the HXP100P-MECA is driven by six DC servo motor actuators with encoder feedback at the leadscrew nut, providing precise MIM, low backlash and fast speed. The quality of the actuators has obviously a strong impact on the overall motion performance of the HXP100P-MECA, but of equal importance are the joints with which the actuators are attached to the base and the moving top plate. With size and rigidity in mind, our engineers came up with innovative spherical joints that are not only very simple, but also enhance the stiffness of the hexapod.
To further ensure positioning performance, the High Accuracy (HA) HXP100PHA-MECA is available with guaranteed accuracy values. This enables the use of a Newport Hexapod in positioning applications, where position accuracy is required. In addition to accuracy along an axis, the Pitch and Yaw deviations during axial motion are also monitored and guaranteed. When the HA Hexapod is used with RightPath
™
, this combination achieves positioning performance close to standard Newport stages.
The HXP100P-ELEC and HXP100PHA-ELEC provide advanced features including instrument grade I/O's, hardware based input triggers, event triggers, high-speed on-the-fly data acquisition, fast TCP/IP communication, and integrated TCL programming language for on-board processes. All these features improve accuracy and throughput, making the programmer’s life much easier. Order the hexapod with the corresponding controller.
A common requirement for many Hexapod motion applications is a virtual pivot point, allowing the user to freely choose the point in space that is a pivot point for all rotations. The Newport Hexapod can not only relocate the pivot point, but through our advanced technology, the entire coordinate system can be relocated. In addition, two user-definable coordinate systems are provided, called tool (moves with the Hexapod) and work (stationary coordinate systems). Incremental displacements are possible in either one of these systems in user-friendly Cartesian coordinates, and positions can be easily calculated from one system to the other by a function call, without the need for complex external coordinate transformations.
WORLD
WORK
CARRIAGE
TOOL
BASEBASEBASE
Absolute moves and positions are defined in the work coordinate system. Incremental moves can be done in the tool or in the work coordinate systems.
As a standard feature, the HXP100P-ELEC and HXP100PHA-ELEC controllers allow the user to choose a virtual pivot point in space for all rotations.
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HXP100P-MECA & HXP100PHA-MECA 6-Axis-Parallel Kinematic Positioning Systems
Each hexapod (HA and non HA versions) is delivered with a dedicated controller. It is particularly important for the HXP100PHA-MECA hexapod to verify that it is connected to the appropriate HXP100PHA-ELEC as the controller includes the calibration performed on the hexapod (the Hexapod is linked with its own controller through its S/N).
3.0 —Characteristics
3.1 Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface with a flatness of:
• 50 µm for the HXP100P-MECA version.
• 10 µm for the HXP100PHA-MECA version.
R
ightPath
™
T
rajectory Control enables minimal r
unout in linear and arc
trajectories.
2
.0
Z Motion (mm)
0
0
.2
0.4
0.6
0.8
1
.0
1.2
1
.4
1.6
1.8
-
30 0
-
10
-
20
1
0
2
0
X Motion (mm)
H
exapod Trajectory
3
0
S
tandard Motion
RightPath
™
XYZU (Rx) V (Ry) W (Rz)
Travel range
(1)
±27.5 mm ±25 mm ±14 mm ±11.5° ±10.5° ±19°
Minimum Incremental Motion 0.1 µm 0.1 µm 0.05 µm 0.05 mdeg 0.05 mdeg 0.1 mdeg
Uni-directional repeatability, typical ±0.1 µm ±0.1 µm 0.05 µm ±0.05 mdeg ±0.05 mdeg ±0.1 mdeg
Bi-directional repeatability
(2)
, typical ±0.25 µm ±0.25 µm ±0.125 µm ±0.125 mdeg ±0.125 mdeg ±0.25 mdeg
Max. speed 12 mm/s 10 mm/s 5 mm/s 8 °/s 8 °/s 16 °/s
Rigidity 3 N/µm 3 N/µm 24 N/µm – – –
Centered load capacity
(3)
60 N
1)
Travel ranges are interdependent. The listed values are max. travels per axis when all other axis are in their centered position.
2)
With standard compensation.
3)
For allowable cantilevered loads, refer to section 3.2: “Max. Cantilever Distance of the Load“.
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EDH0349En1041 — 12/18 4
3.2 Guaranteed Specifications of the HXP100PHA-MECA Version
3.3 Max. Cantilever Distance of the Load
3.4 Weight
Max. Load (N)
0
250
2
00
1
50
100
50
0
20 40 60
Radial Distance, D (mm)
L
oad Position: D = 0 to 140 mm; H = 0 to 200 mm
L
oad
8
0 100
1
20 140
H = 0 H = 100 H = 200
H
D
Weight [lb (kg)] Hexapod (without cables) 15.9 (7.2) Cables 2.2 (1.0)
X
YZ
U
ni-directional repeatability ±0.15 µm ±0.15 µm ±0.075 µm
B
i-directional repeatability ±0.5 µm ±0.5 µm ±0.25 µm
Accuracy ±5 µm ±5 µm ±2.5 µm
Pitch ±37.5 µrad ±37.5 µrad ±37.5 µrad
Yaw ±37 µrad ±37 µrad ±37 µrad
G
U
A
R
A
N
T
E
E
D
S
P
E
C
I
F
I
C
A
T
I
O
N
S
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HXP100P-MECA & HXP100PHA-MECA 6-Axis-Parallel Kinematic Positioning Systems
4.0 —Connection to the HXP100P-ELEC or HXP100PHA-ELEC Controller
4.1 Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid p
ossible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions.
WA RN IN G
Disconnect the power plug under the following circumstances:
• If the power cord or any attached cables are frayed or damaged in
any way.
• If the power plug is damaged in any way.
• If the unit is exposed to rain, excessive moisture, or liquids are spilled
on the unit.
• If the unit has been dropped or the case is damaged.
• If you suspect service or repair is required.
• Whenever you clean the electronics unit.
CAUTION
To protect the unit from damage, be sure to:
• Keep all air vents free of dir t and dust.
• Keep all liquids away from the unit.
• Do not expose the unit to excessive moisture (85% humidity).
• Read this manual before using the unit for the first time.
WA RN IN G
All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized.
Contact your electrician to check your receptacles.
WA RN IN G
This product is equipped with a 3-wire grounding type plug.
Any interruption of the grounding connection can create an electric shock hazard.
If you are unable to insert the plug into your wall plug receptacle, contact your electrician to perform the necessary alterations to ensure that the green (green-yellow) wire is attached to ear th ground.
WA RN IN G
This product operates with voltages that can be lethal.
Pushing objects of any kind into cabinet slots or holes, or spilling any liquid on the product, may touch hazardous voltage points or short out parts.
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EDH0349En1041 — 12/18 6
4.2 Connection
WARNING
A
lways turn the controller's power OFF before connecting to a strut.
Anytime prior to power-up, each strut must be connected with the supplied cables to the corresponding 2 plugs located at the rear panel of t
he HXP100P-ELEC controller. The SUB-D25 cable must be connected to the plug labeled “MOTOR”, the SUB-D15 cable to the plug labeled “ENCODER”.
WARNING
Each Hexapod strut label corresponds to the axis number of its controller. This label is also indicated on connectors of the strut.
6 SUB-D25F CONNECTORS
FOR MOTOR CABLES
6 SUB-D15F CONNECTORS
FOR ENCODER CABLES
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HXP100P-MECA & HXP100PHA-MECA 6-Axis-Parallel Kinematic Positioning Systems
4.3 Cables
Each Hexapod is equipped with cables terminated with SUB-D25M c
onnectors and can be directly connected to its controller.
CAUTION
Numbering of axes is important for strut connections. A mismatch will c
ause fatal errors during initialization.
NOTE
On each connector, a sticker indicates the home preset and backlash on the SUB-D25M connector, and the resolution on the SUB-D15M connector.
These parameters have to be set into the controller for each strut. This is done at our factory when the Hexapod is ordered with its own HXP100P-ELEC or HXP100P-ELEC controller.
WARNING
These Hexapods must be grounded via a threaded hole to avoid electrical disturbances generated by ground loops.
WA RN IN G
These cables are shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable).
WA RN IN G
Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk.
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EDH0349En1041 — 12/18 8
5.0 —Dimensions
C
ARRIAGE
BASE
ø
7.9
(
200)
8.23
±.55
(209
±14
)
HEXAPOD AT
MIDDLE POSITION
.98
(25)
.98
(25)
– TOP VIEW –
6 HOLES M6 THD
(1)
EQUIDISTANT AT 60° ON ø4.9 (125)
1.97 (50)
3.94 (100)
9.06 (230)
8.00 (203.2)
5.91 (150)
4.4
(
112.5) T
YP.
X
Y
1)
DEPTH: .39 (10)
1.97 (50)
12 HOLES M6 THD
(1)
3.94
(
100)
4 HOLES M6 THD
(1)
ON SQR 1.97 (50)
6 HOLES M6 THD
(1)
EQUIDISTANT AT 60°
ON ø6.9 (175)
T
OP PLATE
BASE PLATE
1
HOLE ø.394
+.006
(Ø 10
H7
)
DEPTH: .31 (8)
0
2
PINHOLES ø.197
+.006
(Ø 5
H7
)
DEPTH: .39 (10)
0
2 PINHOLES ø.197
+.006
(Ø 5
H7
)
DEPTH: .39 (10)
0
1 HOLE M6 THD
DEPTH: .20 (5)
MODEL SHOWN: HXP100P-MECA
DIMENSIONS IN INCHES (AND MILLIMETERS)
A A
– A-A –
3 CLR HOLES FOR M6 SCREW
EQUIDISTANT AT 120°
ON ø11.0 (280)
2 CLR HOLES FOR 1/4 SCREW
8.0 (203.2) SPACING
ø11.8 (300)
6 CLR HOLES FOR M6 SCREW EQUIDISTANT AT 60° ON ø7.9 (200)
4 CLR SLOTS FOR: 1/4” SCREW ON 4.0 x 8.0 (101.6 x 203.2) OR M6 SCREW ON 3.9
x 7.9 (100 x 200)
NOTE
Top and base plates of the HXP100P-MECA and HXP100PHA-MECA Hexapod are made of anodized aluminum.
6
1
5
4
6
1
Z
X
Y
NOTE
T
he +X-axis points in the direction of the cable output
between struts #3 and #4.
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HXP100P-MECA & HXP100PHA-MECA 6-Axis-Parallel Kinematic Positioning Systems
6.0 —Maintenance
R
ECOMMENDATION
Please contact Technical Sales Support team for recommendations on application specific maintenance.
6.1 Maintenance
The Hexapod requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution.
PRECAUTIONS
The Hexapod must be used or stocked in a clean environment, without dust, humidity, solvents or other substances.
RECOMMENDATION
It is recommended to return the Hexapod to Newport for re-lubrication after 2000 hours of use.
If the HXP100P-MECA is mounted on a workstation and cannot be easily removed, please contact Newport's After Sales Service for further instructions.
6.2 Repair
CAUTION
Never attempt to disassemble a component of the Hexapod that has not been covered in this manual.
To disassemble a non specified component can cause a malfunction of the stage.
If you observe a malfunction in your Hexapod, please contact us immediately to arrange for a repair.
CAUTION
Any attempt to disassemble or repair a Hexapod without prior authorization will void your warranty.
Page 18
EDH0349En1041 — 12/18 10
Page 19
11 EDH0349En1041 — 12/18
Your Lo ca l Rep re se nt at iv e
Tel .: F
ax:
N
ame:
Company:
Address:
Country:
P. O . N u m b e r :
Item(s) Being Returned:
Model #:
Description:
Reasons of return of goods (please list any specific problems):
R
eturn authorization #:
(Please obtain prior to return of item)
Date:
Phone Number:
Fax Number:
Serial #:
Service Form
Page 20
Visit Newport Online at:
www.newport.com
North America & Asia
Newport Corporation 1791 Deere Ave.
Irvine, CA 92606, USA
Sales
Tel.: (800) 222-6440 e-mail: sales@newport.com
Technical Support
Tel.: (800) 222-6440 e-mail: tech@newport.com
Service, RMAs & Returns
Tel.: (800) 222-6440 e-mail: service@newport.com
Europe
MICRO-CONTROLE Spectra-Physics S.A.S 9, rue du Bois Sauvage
91055 Évry CEDEX France
Sales & Technical Support
Tel.: +33 (0)1.60.91.68.68 e-mail: france@newport.com
Service & Returns
Tel.: +33 (0)2.38.40.51.55
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