Newport FSM-CD300B, FSM-300 User Manual

FSM-300 Fast Steering Mirror
& FSM-CD300B Controller/Driver
User’s Manual
EU Declaration of Conformity 3
Warranty 5
Warranty
Newport Corporation warrants that this product will be free from defects in material and workmanship and will comply with Newport’s published speci­fications at the time of sale for a period of one year from date of shipment. If found to be defective during the warranty period, then product will either be repaired or replaced at Newport's option.
To exercise this warranty, write or call your local Newport office or repre­sentative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the product, freight prepaid, to the indicated service facility. Repairs will be made and the instrument returned freight prepaid. Repaired products are warranted for the remainder of the original warranty period or 90 days, whichever first occurs.
Limitation of Warranty
The above warranties do not apply to products which have been repaired or modified without Newport’s written approval, or products subjected to unusual physical, thermal or electrical stress, improper installation, misuse, abuse, accident or negligence in use, storage, transportation or handling. This warranty also does not apply to fuses, batteries, or damage from battery leakage.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT, SPECIAL, OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS.
First printing 2003
Copyright 2003 by Newport Corporation, Irvine, CA. All rights reserved.
No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation.
This manual has been provided for information only and product specifica­tions are subject to change without notice. Any change will be reflected in future printings.
© 2003 Newport Corporation
1791 Deere Ave. Irvine, CA 92606 (949) 863-3144 P/N 40342-01, Rev. F
6 Confidentiality & Proprietary Rights
Confidentiality & Proprietary Rights
Reservation of Title:
The Newport Programs and all materials furnished or produced in connection with them ("Related Materials") contain trade secrets of Newport and are for use only in the manner expressly permitted. Newport claims and reserves all rights and benefits afforded under law in the Programs provided by Newport Corporation.
Newport shall retain full ownership of Intellectual Property Rights in and to all development, process, align or assembly technologies developed and other derivative work that may be developed by Newport. Customer shall not challenge, or cause any third party to challenge, the rights of Newport.
Preservation of Secrecy and Confidentiality and Restrictions to Access:
Customer shall protect the Newport Programs and Related Materials as trade secrets of Newport, and shall devote its best efforts to ensure that all its personnel protect the Newport Programs as trade secrets of Newport Corporation. Customer shall not at any time disclose Newport's trade secrets to any other person, firm, organization, or employee that does not need (consistent with Customer's right of use hereunder) to obtain access to the Newport Programs and Related Materials. These restrictions shall not apply to information (1) generally known to the public or obtainable from public sources; (2) readily apparent from the keyboard operations, visual display, or output reports of the Programs; (3) previously in the possession of Customer or subsequently developed or acquired without reliance on the Newport Programs; or (4) approved by Newport for release without restriction.
Table of Contents 7
Table of Contents
EU Declaration of Conformity..............Error! Bookmark not defined.
Warranty................................................................................................. 5
Confidentiality & Proprietary Rights..................................................... 6
Table of Contents ................................................................................... 7
1. Safety Precautions.................................................................. 11
1.1 General Safety Warnings............................................................ 11
1.2 General Cautions ........................................................................ 11
2. Fast Steering Mirror Technology........................................... 13
3. Typical Specifications............................................................17
3.1 FSM System ............................................................................... 17
3.2 Standard Mirror Options............................................................. 18
3.3 FSM-CD300B Controller/Driver................................................ 19
3.4 Bode Plots................................................................................... 20
3.5 Safe Operating Area ................................................................... 21
4. Unpacking the FSM................................................................. 23
4.1 Packing List................................................................................ 23
4.2 Freeing the Mirror Head............................................................. 23
4.3 Storing and Shipping the Mirror Head ....................................... 24
4.4 Replacing the Mirror .................................................................. 24
5. System Components..............................................................25
5.1 FSM Mirror Head Assembly ...................................................... 25
5.2 FSM-CD300B Controller/Driver................................................ 27
5.3 FSM Electronics ......................................................................... 28
5.4 FSM-CD300B Controller/Driver Cable Pin Connections.......... 29
5.5 Interface I/O Pin Connections .................................................... 31
6. System Operation................................................................... 32
6.1 Installation Location & Ventilation............................................ 32
6.2 Electrical Connections................................................................ 32
6.3 Command Inputs ........................................................................ 33
6.4 Position Outputs ......................................................................... 34
6.5 Fault Indication........................................................................... 34
6.6 External Sensor Feedback Control Mode................................... 35
6.7 Open Loop Control Mode .......................................................... 36
6.8 Maintenance & Service .............................................................. 37
8 Safety Precautions
7. Appendices ............................................................................. 38
7.1 Appendix A – Troubleshooting the FSM System ...................... 38
7.2 Appendix B – Abbreviations ...................................................... 39
7.3 Technical Support....................................................................... 39
7.4 Service & Returns....................................................................... 40
7.5 Appendix C – Return Material Authorization Request .............. 41
9
Safety Precautions 11
1. Safety Precautions
1.1 General Safety Warnings
Observe these general warnings when operating or servicing this system:
Heed all warnings on the unit and in the operating instructions.
Do not use this equipment in or near liquids.
Do not operate this equipment in an explosive atmosphere.
Only plug the controller/driver unit into a grounded power outlet.
Route power cords and cables where they are not likely to be damaged.
Disconnect power before cleaning the controller/driver unit. Do not use
liquid or aerosol cleaners.
Only qualified service personnel should open the case of the
controller/driver. There are no user-serviceable components inside unit.
Dangerous voltages associated with the 100-120 V AC power supply are
present inside controller/driver unit. To avoid injury, do not touch exposed connections or components while power is on.
Do not wear rings or wristwatches when troubleshooting electrical
circuits.
To avoid fire hazard, use only the specified fuse(s) with the correct type
number, voltage and current ratings. Only qualified personnel should replace fuses.
Qualified service personnel should perform a safety check after any
service.
To prevent damage to the equipment, read the instructions in this manual
for selection of the proper input voltage.
If the Fast Steering Mirror is used with lasers, avoid looking into the laser
beam, and take precaution not to aim the laser beam at the eyes of others.
1.2 General Cautions
Observe these cautions when operating or servicing this equipment:
Handle equipment with care, like other delicate electronic equipment.
To prevent damage to equipment when replacing fuses, locate and correct
the problem that caused the fuse to blow before re-applying power.
12 Safety Precautions
Use only specified replacement parts.
Follow precautions for static-sensitive devices when handling electronic
circuits.
This product should only be powered as described in this manual.
If this equipment is used in a manner not specified within this manual, the
protection provided by the equipment may be impaired.
Do not position this equipment in a location that would make it difficult to
turn off power to the equipment or disconnect the AC power cord.
WARNING
AC power line voltages are present inside the controller/driver unit. To avoid possibility of electrical shock, refer all service to qualified personnel.
WARNING
If the Fast Steering Mirror is used with lasers, avoid looking into the laser beam, and take precaution not to aim the laser at the eyes of others.
CAUTION
Static-sensitive electronic equipment. Wear grounding strap when handling electronic circuit boards and components found inside the
controller/driver unit.
FRAME & CHASSIS TERMINAL
This symbol identifies the terminal used for connecting a ground to the chassis. The power cord, properly grounded, will normally ground
the chassis.
Fast Steering Mirror Technology 13
2. Fast Steering Mirror Technology
Originally conceived for military/aerospace applications such as high-speed target tracking and secure satellite-to-satellite communication, fast steering mirror technology has been developed to the point where it is economically viable for widespread commercial use in dynamic mirror alignment applica-
tions. This technology can be used to stabilize laser beams (Figure 1), track
work pieces for precision laser micro-machining, scan laser beams for real­time confocal microscopy, track optical receivers for laser free-space com­munication, and increase sharpness in sophisticated imaging systems.
Figure 1: Two fast steering mirrors used to compensate for input tilt errors.
A practical fast steering mirror head is shown in Figure 2. There are eight
basic head components: voice-coil actuators, mirror, mirror carrier, flexure suspension, frame, housing, internal position sensors, and position sensor electronics. These components work with the controller to produce the precision rotation and speed characteristic of these devices.
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