Newport FMS User Manual

Linear

Metrology Stages

FMS Series

USER’S MANUAL

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EDH0267En1041 — 12/18 ii

FMS Series Linear Metrology Stages

Warranty

Newport Corporation warrants this product to be free from defects in
material and workmanship for a period of 1 year from the date of
shipment. If found to be defective during the warranty period, the product
will either be repaired or replaced at Newport’s discretion.

To exercise this warranty, write or call your local Newport representative,
or contact Newport headquarters in Irvine, California. You will be given
prompt assistance and return instructions. Send the instrument,
transportation prepaid, to the indicated service facility. Repairs will be
made and the instrument returned, transportation prepaid. Repaired
products are warranted for the balance of the original warranty period, or
at least 90 days.

Limitation of Warranty

This warranty does not apply to defects resulting from modification or
misuse of any product or part.

This warranty is in lieu of all other warranties, expressed or implied,
including any implied warranty of merchantability or fitness for a
particular use. Newport Corporation shall not be liable for any indirect,
special, or consequential damages.

by Newport Corporation, Irvine, CA. All rights reserved.

Original instructions.

No part of this document may be reproduced or copied without the prior
written approval of Newport Corporation. This document is provided for
informa ti on only, and pro du ct specifications are subject to change without
notice. Any change will be reflected in future publishings.

CAUTION

Warranty does not apply to damages resulting from:

• Incorrect usage:

– Load on the stage greater than maximum specified load.

– Carriage speed higher than specified speed.

–Improper grounding.

¬ Connectors must be properly secured.

¬ When the load on the stage represents an electrical risk, it must

be connected to ground.

– Excessive or improper cantilever loads.

• Modification of the stage or any part thereof.

CAUTION

Please return equipment in
the original (or equivalent)
packing.

You will be responsible for
damage incurred from
inadequate packaging if the
original packaging is not
used.

© 2018

iii EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

Table of Contents

Warranty .................................................................................................................ii

EC Declaration of Conformity...............................................................................v

Definitions and Symbols.......................................................................................vi

Warnings ...............................................................................................................vii

Caution .................................................................................................................viii

1.0 — Introduction.................................................................................1

2.0 — Description ...................................................................................2

2.1 Design Details ............................................................................................2

3.0 — Characteristics............................................................................3

3.1 Definitions ..................................................................................................3

3.2 Mechanical Specifications .......................................................................4

3.3 Load Specification Definitions.................................................................4

3.4 Load Characteristics and Stiffness .........................................................5

3.5 Stage Weights ............................................................................................5

4.0 — Drives and Motors ....................................................................6

4.1 Stepper Drive Versions ............................................................................6

4.2 DC-Servo Drive Version ............................................................................6

4.3 Sensor Position..........................................................................................7

4.4 Feedback Signal Position .........................................................................7

4.5 Pinouts........................................................................................................8

4.6 MCAB-3 Cable ............................................................................................9

4.7 MSCABLE-3 Cable ......................................................................................9

4.8 MSCABLE-10 Cable ....................................................................................9

5.0 — Connection to Newport Controllers ..............................10

5.1 Warnings on Controllers ........................................................................10

5.2 Connection ...............................................................................................11

5.3 Cables .......................................................................................................11

5.4 MSCABLE-3 Cable ....................................................................................12

5.5 MCAB-3 Cable ..........................................................................................12

6.0 — Connection to Non-Newport Electronics ....................13

6.1 Connections .............................................................................................13

7.0 — Dimensions.................................................................................14

EDH0267En1041 — 12/18 iv

FMS Series Linear Metrology Stages

8.0 — Maintenance ..............................................................................15

8.1 Maintenance ............................................................................................15

8.2 Repair .......................................................................................................15

8.3 Calibration ...............................................................................................15

Service Form .........................................................................................................17

v EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

FMS Series

EU Declaration of Conformity

following Annex II-1A
of Directive 2006/42/EC on machinery

The manufacturer:

MICRO-CONTROLE Spectra-Physics,
9, rue du Bois Sauvage
91055 Évry CEDEX, FRANCE

Hereby declares that the machinery:

y Description: " FMS"
y Function: PRECISION LINEAR STAGES
y Models: FMS100/200/300/CC/PP/PPHA.

– the technical file of which was compiled by:

Mr Hervé LE COINTE , Quality Director,
MICRO-CONTROLE Spectra-Physics, Zone Industrielle - B.P.29
F-45340 Beaune La Rolande France

– complies with all the relevant provisions of the Directive 2006/42/EC on machinery.
– complies with all the relevant provisions of the Directive 2014/30/EU relating to electro­magnetic compatibility.
– complies with all the relevant provisions of the Directive 2011/65/EU relating to RoHS2.

– was designed and built in accordance with the following harmonised standards:

y NF EN 61326-1:2013 « Electrical equipment for measurement, control and
laboratory use – EMC requirements – Part 1: General requirements »
y NF EN 55011:2010/A1:2011 Class A

– was designed and built in accordance with the following other standards:

y NF EN 61000-4-2
y NF EN 61000-4-3
y NF EN 61000-4-4
y NF EN 61000-4-5
y NF EN 61000-4-6

ORIGINAL DECLARATION

Done in Beaune La Rolande on 16 May 2017
Hervé LE COINTE
Quality Director

DC1-EN rev:A

EC Declaration of Conformity

EDH0267En1041 — 12/18 vi

FMS Series Linear Metrology Stages

Definitions and Symbols

The following terms and symbols are used in this documentation and also
appear on the product where safety-related issues occur.

General Warning or Caution

The exclamation symbol may appear in warning and caution tables in this
document. This symbol designates an area where personal injury or
damage to the equipment is possible.

The following are definitions of the Warnings, Cautions and Notes that may
be used in this manual to call attention to important information regarding
personal safety, safety and preservation of the equipment, or important
tips.

WA RN IN G

Warning indicates a potentially dangerous situation which can result in
bodily harm or death.

CAUTION

Caution indicates a potentially hazardous situation which can result in
damage to product or equipment.

NOTE

Note indicates additional information that must be considered by the
user or operator.

European Union CE Mark

The presence of the CE Mark on Newport Corporation equipment means
that it has been designed, tested and certified as complying with all
applicable European Union (CE) regulations and recommendations.

Warnings and Cautions

ATTENTIO N

This stage is a Class A device. In a residential environment, this device
can cause electromagnetic interference. In this case, suitable measures
must be taken by the user.

vii EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

Warnings

W

ARNING

The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.

WA RN IN G

Do not use this stage when its motor is emitting smoke or is unusually
hot to the touch or is emitting any unusual odor or noise or is in any
other abnormal state.

Stop using the stage immediately, switch off the motor power and then
disconnect the electronics power supply.

After checking that smoke is no longer being emitted contact your
Newport service facility and request repairs. Never attempt to repair the
stage yourself as this can be dangerous.

WA RN IN G

Make sure that this stage is not exposed to moisture and that liquid does
not get into the stage.

Nevertheless, if any liquid has entered the stage, switch off the motor
power and then disconnect the electronics from power supply.

Contact your Newport service facility and request repairs.

WA RN IN G

Do not insert or drop objects into this stage, this may cause an electric
shock, or lock the drive.

Do not use this stage if any foreign objects have entered the stage.
Switch off the motor power and then disconnect the electronics power
supply.

Contact your Newport service facility for repairs.

WA RN IN G

Do not place this stage in unstable locations such as on a wobbly table or
sloping surface, where it may fall or tip over and cause injury.

If this stage has been dropped or the case has been damaged, switch off
the motor power and then disconnect the electronics power supply.

Contact your Newport service facility and request repairs.

WA RN IN G

Do not attempt to modify this stage; this may cause an electric shock or
downgrade its performance.

WA RN IN G

Do not exceed the usable depth indicated on the mounting holes (see
section “Dimensions”). Longer screws can damage the mechanics or
cause a short-circuit.

EDH0267En1041 — 12/18 viii

FMS Series Linear Metrology Stages

Caution

C

AUTION

Do not place this stage in a hostile environment such as X-Rays, hard
UV,… or in any vacuum environment.

CAUTION

Do not place this stage in a location affected by dust, oil fumes, steam or
high humidity. This may cause an electric shock.

CAUTION

Do not leave this stage in places subject to extremely high temperatures
or low temperatures. This may cause an electric shock.

• Operating temperature: +10 to +35 °C

• Storage temperature: -10 to +40 °C (in its original packaging)

CAUTION

Do not move this stage if its motor power is on.

Make sure that the cable to the electronics is disconnected before
moving the stage. Failure to do so may damage the cable and cause an
electrical shock.

CAUTION

Be careful that the stage is not bumped when it is being carried. This
may cause it to malfunction.

CAUTION

When handling this stage, always unplug the equipment from the power
source for safety.

CAUTION

When the carriage is in its end-of-run position, it is strongly recommended
not to go beyond this point as this may damage the stage mechanism.

CAUTION

Contact your Newport service facility to request cleaning and
specification control every year.

1 EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

Linear Metrology Stages
FMS Series

1.0 —Introduction

This manual provides operating instructions for the stage that you have
purchased in the FMS Series:

3 travel ranges of FMS stages.

RECOMMENDATION

We recommend you read carefully the chapter “Connection to
electronics” before using the FMS stage.

• FMS-PP

• FMS-PPHA

• FMS-CC

EDH0267En1041 — 12/18 2

FMS Series Linear Metrology Stages

2.0 —Description

The FMS series of precision linear stages is Newport’s latest innovation in
h

igh precision motion control technology. It addresses the unique needs
of surface metrology applications for smooth motion, low noise, high
straightness and flatness. The FMS linear stages run highly flat and
straight and combined with steel construction, enable higher accuracy
performance. Travel options include 100 mm, 200 mm and 300 mm and can
b

e ordered with either a DC or stepper motor. As with all Newport
motorized stages, there is a wide choice of integrated controller/driver
products, ranging from the single axis SMC100, to the 3-axis ESP301 and
high-performance 8-axis XPS Universal Controller.

Featuring steel construction, the FMS linear stages have a very distinct
advantage over other stages made with aluminum. It is well known that
steel expands less than aluminum when subjected to temperature
fluctuations in the operating environment. In addition, a combination of
steel and aluminum in the construction of a stage introduces a
phenomenon called bi-metallic bending, caused by the different thermal
expansion coefficients of metals. Both these reasons led to the use of steel
exclusively in the base and other components of the FMS stages. Since all
FMS components are made from steel, all these components are expected
to expand at the same rate when the operating temperature fluctuates,
thereby eliminating bi-metallic bending and the associated inaccuracies
and non-flat behavior.

The cross roller bearings in the FMS come standard with an anti-creep
feature that ensures high reliability by eliminating bearing cage migration
and the need for re-centering the bearings. Moreover, this enables
optimum bearing contact that results in superior repeatability of
straightness, flatness, pitch and yaw over the life of the FMS.

The FMS stages have a nominal speed of up to 100 mm/s, easily improving
throughput compared to other products in the market. Controlling with
Newport integrated motion controllers and drivers like the SMC100 and
ESP301 (CC and PP versions) or the XPS (all versions), adds more
flexibility in gathering metrology data.

The FMS linear stages are exceptional solutions for applications in surface
metrology, surface profilometry and tribology.

2.1 Design Details

Base Material Stainless Steel

Bearings Crossed Roller Bearings

Drive Mechanism 8 mm, precision ground ball screw

Drive Screw Pitch (mm) 2

Feedback DC: Screw mounted rotary encoder, 4000 cts/rev, index pulse

PP: No feedback

PPHA: Steel scale, 50 nm

Origin PP: optical, located ~9.5 mm from negative software limit

CC & PPHA: Optical, located ~10.5 mm from negative software limit

Drive Type DC Servo

Stepper

Cable (m) 3 (included)

3 EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

3.0 —Characteristics

3.1 Definitions

Specifications of our products are established in reference to ISO 230
standard part II “Determination of accuracy and repeatability of
positioning numerically controlled axes”.

T

his standard gives the definition of position uncertainty which depends

on the 3 following parameters:

Absolute Accuracy

Difference between ideal position and real position.

Accuracy

Difference between ideal position and real position after the compensation
of linear errors.

Linear errors include: cosine errors, inaccuracy of screw or linear scale
pitch, angular deviation at the measuring point (Abbe error) and thermal
expansion effects. All Newport motion electronics can compensate for
linear errors.

The relation between absolute accuracy and on-axis accuracy is as follows:

Absolute Accuracy = Accuracy + Correction Factor

x Travel

Repeatability

Ability of a system to achieve a commanded position over many attempts.

Reversal Value (Hysteresis)

Difference between actual position values obtained for a given target
position when approached from opposite directions.

Minimum Incremental Motion (MIM or Sensitivity)

The smallest increment of motion a device is capable of delivering
consistently and reliably.

Resolution

The smallest increment that a motion device can theoretically move
and/or detect. Resolution is not achievable, whereas MIM, is the real
output of a motion system.

Yaw, P itch

Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it
moves.

The testing of accuracy, repeatability, and reversal error are made
systematically with test equipment in controlled environment (20±1°C).

A linear cycle with 21 data points on the travel and 4 cycles in each
direction gives a total of 168 points.

Guaranteed and Typical Specifications

Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at www.newport.com

EDH0267En1041 — 12/18 4

FMS Series Linear Metrology Stages

3.2 Mechanical Specifications

CAUTION

To reach the specifications stated, stages must be fixed on a plane with
a flatness better than the stage flatness guaranteed value or fixed using
the 4 washers (Ø 16 mm and thickness 0.1 mm) delivered with the
stage. The M6 screws torque to fix the stage must be 5 Nm.

3.3 Load Specification Definitions

Normal Load Capacity (Cz)

Maximum load a stage can move while maintaining specifications.

This value is given with speed and acceleration specified for each stage,
and with a load perpendicular to bearings.

Axial Load Capacity (±Cx)

Maximum load along the direction of the drive train.

Off-Centered Load (Q)

Maximum cantilever-load a stage can move.

FMC-CC FMC-PP FMC-PPHA

Travel Range (mm) 100; 200; 300

Minimum Incremental Motion (µm) 0.5 0.1

(1)

0.1
Uni-directional Repeatability,
Typical (Guaranteed) (µm)

±0.40 (±0.75) ±0.35 (±0.75) ±0.06 (±0.10)

Bi-directional Repeatability

(2)

,

Typical (Guaranteed) (µm)

±0.8 (±1.5) ±1.3 (±2.25) ±0.15 (±0.25)

Maximum Speed (mm/s) 100 20 50

FMS100 FMS200 FMS300

Accuracy

(2)

, -CC and -PP ±1.5 (±3.0) ±2.0 (±5.0) ±2.5 (±6.5)
Typical (Guaranteed) (µm) -PPHA ±0.2 (±0.5) ±0.4 (±1.0) ±0.5 (±1.5)
Straightness, Flatness

(2)

,
Typical (Guaranteed) (µm) ±0.25 (±0.75) ±0.5 (±1.5) ±1.0 (±3.0)
Pitch

(2) (3)

, Typical (Guaranteed) (µrad) ±15 (±40) ±20 (±50) ±30 (±60)

Yaw

(

2) (3)

, Typical (Guaranteed) (µrad) ±4.0 (±10) ±5.0 (±15) ±6.0 (±20)

1

)

0.1 µm with XPS; 0.5 µm with SMC100PP and ESP301.

2

)

For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial
at www.newport.com

3

)

To obtain arcsec units, divide µrad value by 4.8.

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FMS-PP PPHA FMS-CC

Specified Speed (mm/s) 20 50 100
Specified Acceleration (mm/s2) 80 200 400

5 EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

3.4 Load Characteristics and Stiffness

3.5 Stage Weights

Weights indicated into the below table are average values for stages with a
typical drive unit installed.

The stage weight below does not include the cable.

The weight difference between drive units is not significant.

Weight [lb (kg)]
FMS100 14.3 (6.5)
FMS200 17.0 (7.7)
FMS300 19.6 (8.9)
3-meter MSCABLE-3 Cable 0.66 (0.3)
3-meter MCAB-3 Cable 1.32 (0.6)

Cz, Normal center load capacity on bearings 150 N
±Cx, Axial load capacity <30 N

(1)

kax, Compliance in roll 3 µrad/Nm
kay, Compliance in pitch 2 µrad/Nm
kaz, Compliance in yaw 2 µrad/Nm
Q, Off-center load Q ≤Cz ÷ (1 + D/80)
with D = Cantilever distance (mm)

1)

Note
Reversible drive chain: Not recommended for vertical use
unless counterweighed.

k

α

y

Q

D

k

α

z

X

Z

C

z

k

α

x

Y

+

C

x

–

C

x

EDH0267En1041 — 12/18 6

FMS Series Linear Metrology Stages

4.0 —Drives and Motors

4.1 Stepper Drive Versions

FMS-PP: This version is not equipped with an encoder.

T

he micro-step is equivalent to 1/100 of the full-step.

FMS-PPHA: This version is equipped with a steel scale encoder.

For these stages, the micro-step is equivalent to 1/200 of the
full-step.

Stepper Motor Performance Specifications and Characteristics

Command Signals for the Stepper Motors

4.2 DC-Servo Drive Version

One DC-motor configurations is available: FMS-CC.

This version is equipped with a 4000 cts/rev. rotary encoder located
directly on the screw.

DC-Motor Performance Specifications and Characteristics

Command Signals for the DC-Motors

In the above drawings, + Motor signal is referred to – Motor signal.

➀

When the stage moves in + Direction, the + Motor voltage is higher than
– Motor voltage.

➁

When the stage moves in – Direction, the + Motor voltage is lower than
– Motor voltage.

0 2

-1

1

10.5 1.5

Step 1 2 3 4 5 8 7 8

+

Phase 1

+ + – – + + – –

–

Phase 1

– – + + – – + +

+

Phase 2

– + + – – + + –

–

Phase 2

+ – – + + – – +

D

irection

–

MOTION

+

+ Phase 1

– Phase 1

+ Phase 2

– Phase 2

Direction +

Resolution Speed Nominal Max RMS Max. Peak Resistance Inductance Tachometer
(µm) (mm/s) Voltage (V) Current (A) Current (A) (Ω) (mH) Const. (V/krpm)

FMS-CC 0.5 100 48 0.9 1.6 2.52 0.51 –

Direction +

+V

+ Motor

– Motor

–V

MOTION Direction +

MOTIONDirection –

Resolution Speed Angle by Step RMS Current Resistance Inductance

(µm) (mm/s) (°) per Phase (A) (Ω) (mH)

FMS-PP 0.1 20 1.8 0.71 1.7 2.8
FMS-PPHA 0.05 50 1.8 0.71 1.7 2.8

7 EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

4.3 Sensor Position

NOTES

• End-of-Run and Mechanical Zero are 5 V open collector type.

• Use of the Index Pulse provides a repeatable Home Position at ±1 step.

• There is no index pulse on the FMS-PP.

• On the FMS-CC, there is one index pulse every 2 mm and homing will
use the first pulse to the right of the Mechanical Zero. It is adjusted to
about 1 mm.

• There is one index pulse every 25 mm on FMS-PPHA. Homing will use
the first pulse to the right of the Mechanical Zero and is adjusted to
about 1 mm.

CAUTION

“End-of-Run” and “Mechanical Zero” are active signals and should not
be connected to any other source.

4.4 Feedback Signal Position

On FMS-CC stages, the incremental sensor operates following the
photoelectric measurement principle, with a disk including slides.

S

tage Travel Range

N

egative Software Limit Positive Software Limit

Home Position (Origin)
near the – end-of-run

Motion Direction +

–

EOR Limit

M

echanical

Z

ero

Index Pulse

I

ndex Pulse

+ EOR Limit

1

mm

0.5 mm 0.5 mm

F

MSCC: 2 mm

F

MSPPHA: 25 mm

Direction +

0

1

Encoder
Phase A

0

1

Encoder
Phase A

1234

0

1

Encoder
Phase B

0

1

Encoder
Phase B

Direction – MOTION Direction +

EDH0267En1041 — 12/18 8

FMS Series Linear Metrology Stages

When the sensor shaft turns, the sensor generates square signals in
quadrature, sent to pins #19, #20, #23 and #24 of the 25-pin Sub-D connector.

“Encoder” and “Index Pulse” are “differential pair” (type RS-422) type
output signals. Using these signals permits a high immunity to noise.
Emission circuits generally used by Newport are 26LS31 or MC3487.
Reception circuits to use are 26LS32 or MC3486.

4.5 Pinouts

The pinout diagrams for the FMS stages SUB-D connector are shown below.

SUD-D25 OR SUB-D15

Encoder Phase A 19 13

Encoder Phase A 23 6

Encoder Phase B 20 14

Encoder Phase B 24 7

Index Pulse Phase I 15 15

Index Pulse Phase I 25 8

21 12

22 5

N

EWPORT

S

TAGE

U

SER

C

ONNECTOR PIN #

O

utput Signals

Encoders
& Sensors
Power Supply

+5 V 5%
150 mA max.

0 V

}

13

25

14

1

FMS-PPHA

1 + Phase 1
2 + Phase 1
3 – Phase 1
4 – Phase 1
5 + Phase 2
6 + Phase 2
7 – Phase 2
8 – Phase 2
9 N.C.
10 N.C.
11 N.C.
12 N.C.
13 Mechanical Zero
14 Ground
15 Index Pulse I
16 0 V
17 + End-of-Run
18 – End-of-Run
19 Encoder Phase A
20 Encoder Phase B
21 +5 V
22 0 V
23 Encoder Phase /A
24 Encoder Phase /B
25 Index Pulse /I

FMS-CC

1 N.C.
2 + Motor
3 Mechanical Zero
4 – End-of-Run
5 0 V
6 Encoder Phase /A
7 Encoder Phase /B
8 Index Pulse /I
9 N.C.
10 – Motor
11 + End-of-Run
12 +5 V
13 Encoder Phase A
14 Encoder Phase B
15 Index Pulse I

FMS-PP

1 + Phase 1
2 + Phase 2
3 Mechanical Zero
4 – End-of-Run
5 0 V
6 N.C.
7 N.C.
8 N.C.
9 – Phase 1
10 – Phase 2
11 + End-of-Run
12 +5 V
13 N.C.
14 N.C.
15 N.C.

8

15

9

1

9 EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

4.6 MCAB-3 Cable

T

his cable is supplied with each FMS-PPHA stages.

4.7 MSCABLE-3 Cable

This cable is supplied with each FMS-PP and FMS-CC stage.

4.8 MSCABLE-10 Cable

Optional 10-meter cable for FMS-PP or FMS-CC stages.

C

ONNECTED

T

O THE CAP

C

ONNECTED

T

O THE CAP

S

UB-D25M

C

ONNECTOR

1
2
3
4

5
6
7
8

1

4

2

2

2

1

1

6

1

9

2

3

2

0

2

4

1

5

2

5

1

7

1

8

1

3

S

UB-D25F

C

ONNECTOR

1
2
3
4

5
6
7
8

1

4

2

2

2

1

1

6

1

9

2

3

2

0

2

4

1

5

2

5

1

7

1

8

1

3

(0.6 MM2) WHITE 1
(

0.6 MM

2

)

WHITE 2

(0.6 MM

2

) WHITE 3

(0.6 MM2) WHITE 4

(0.6 MM2) WHITE 6
(

0.6 MM

2

)

WHITE 7

(0.6 MM

2

) WHITE 8

(0.6 MM2) WHITE 9

(0.6 MM2) WHITE 5

(0.6 MM2) WHITE 10
(0.6 MM2) WHITE 11
(

0.6 MM

2

)

WHITE 12

(0.09 MM

2

) WHITE
(0.09 MM2) BROWN
(0.09 MM2) GREEN
(

0.09 MM

2

)

YELLOW

(0.09 MM

2

) GREY
(0.09 MM2) PINK
(0.09 MM2) BLUE
(0.09 MM2) RED
(

0.09 MM

2

)

BLACK

(0.09 MM

2

) PURPLE
(0.09 MM2) ORANGE
(0.09 MM2) BLUE

(AWG20) WHITE 1
(

AWG20) WHITE 2
(AWG20) WHITE 3
(AWG20) WHITE 4

(AWG20) WHITE 6
(

AWG20) WHITE 7
(AWG20) WHITE 8
(AWG20) WHITE 9

(AWG20) WHITE 5

(AWG20) WHITE 10
(AWG20) WHITE 11
(

AWG20) WHITE 12

(AWG28) WHITE
(AWG28) BROWN
(AWG28) GREEN
(

AWG28) YELLOW
(AWG28) GREY
(AWG28) PINK
(AWG28) BLUE
(AWG28) RED
(

AWG28) BLACK
(AWG28) PURPLE
(AWG28) ORANGE
(AWG28) BLUE

SUB-D25M

CONNECTOR

1
3
5
7

21
22
13
17
18
19
23
20
24
15
25

SUB-D15F

CONNECTOR

1
9
2
10

12
5
3
11
4
13
6
14
7
15
8

(

0.25 MM

2

)

WHITE

(0.25 MM

2

) BROWN
(0.25 MM2) YELLOW
(0.25 MM2) GREEN

(

0.14 MM

2

)

PINK

(0.14 MM

2

) GRAY
(0.05 MM2) BROWN
(0.05 MM2) YELLOW
(0.05 MM2) GREEN
(

0.05 MM

2

)

RED

(0.05 MM

2

) BLUE
(0.05 MM2) PINK
(0.05 MM2) GRAY
(0.05 MM2) BLACK
(0.05 MM

2

) WHITE

(

AWG23) WHITE
(AWG23) BROWN
(AWG23) YELLOW
(AWG23) GREEN

(

AWG26) PINK
(AWG26) GRAY
(AWG30) BROWN
(AWG30) YELLOW
(AWG30) GREEN
(

AWG30) RED
(AWG30) BLUE
(AWG30) PINK
(AWG30) GRAY
(AWG30) BLACK
(AWG30) WHITE

CONNECTED

TO THE CAP

CONNECTED
TO THE CAP

CONNECTED

TO THE CAP

CONNECTED
TO THE CAP

SUB-D25M

CONNECTOR

1
2
3
4

5
6
7
8

14

13
21
22
17
18
19
23
20
24
15
25

SUB-D15F

CONNECTOR

1

9

2

10

3
12
5
11
4
13
6
14
7
15
8

(0.34 MM2) WHITE
(0.34 MM2) BROWN
(0.34 MM2) GREEN
(0.34 MM2) YELLOW

(0.34 MM2) WHITE
(0.34 MM2) BROWN
(0.34 MM2) GREEN
(0.34 MM2) YELLOW

(0.14 MM

2

) WHITE
(0.14 MM2) GREEN
(0.14 MM

2

) ORANGE
(0.14 MM2) WHITE/BLACK
(0.14 MM2) YELLOW
(0.14 MM2) PURPLE
(0.14 MM2) BLUE
(0.14 MM2) GRAY
(0.14 MM2) BROWN
(0.14 MM2) NATURAL
(0.14 MM2) RED
(0.14 MM2) BLACK

(AWG22) WHITE
(AWG22) BROWN
(AWG22) GREEN
(AWG22) YELLOW

(AWG22) WHITE
(AWG22) BROWN
(AWG22) GREEN
(AWG22) YELLOW

(AWG26) WHITE
(AWG26) GREEN
(AWG26) ORANGE
(AWG26) WHITE/BLACK
(AWG26) YELLOW
(AWG26) PURPLE
(AWG26) BLUE
(AWG26) GRAY
(AWG26) BROWN
(AWG26) NATURAL
(AWG26) RED
(AWG26) BLACK

EDH0267En1041 — 12/18 10

FMS Series Linear Metrology Stages

5.0 —Connection to Newport Controllers

N

OTE

Visit www.newport.com for compatible Newport controllers.

5.1 Warnings on Controllers

Controllers are intended for use by qualified personnel who recognize
shock hazards and are familiar with safety precautions required to avoid
possible injury. Read the controller user’s manual carefully before
operating the instrument and pay attention to all written warnings and
cautions.

WA RN IN G

Disconnect the power plug under the following circumstances:

• If the power cord or any attached cables are frayed or damaged in
any way.

• If the power plug is damaged in any way.

• If the unit is exposed to rain, excessive moisture, or liquids are spilled
on the unit.

• If the unit has been dropped or the case is damaged.

• If you suspect service or repair is required.

• Whenever you clean the electronics unit.

CAUTION

To protect the unit from damage, be sure to:

• Keep all air vents free of dir t and dust.

• Keep all liquids away from the unit.

• Do not expose the unit to excessive moisture (85% humidity).

• Read this manual before using the unit for the first time.

WA RN IN G

All attachment plug receptacles in the vicinity of this unit are to be of
the grounding type and properly polarized.

Contact your electrician to check your receptacles.

WA RN IN G

This product is equipped with a 3-wire grounding type plug.

Any interruption of the grounding connection can create an electric
shock hazard.

If you are unable to insert the plug into your wall plug receptacle,
contact your electrician to perform the necessary alterations to ensure
that the green (green-yellow) wire is attached to ear th ground.

11 EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

5.2 Connection

There is a label on every stage indicating its part and serial numbers.

WARNING

Always turn the controller's power OFF before connecting to a stage.

NOTE

These stages are ESP compatible. Enhanced System Performance is
Newport's exclusive technology that enables Newport ESP motion
controllers to recognize the connected Newport ESP stage and upload
the stage parameters. This ensures that the user can operate the motion
system quickly and safely.

5.3 Cables

All FMS stages are delivered with 3-meter cables with a SUB-D25M
connector for direct connection to Newport Controllers.

• FMS-PP and FMS-CC: MSCABLE-3 cable.

• FMS-PPHA: MCAB-3 cable.

WA RN IN G

This product operates with voltages that can be lethal.

Pushing objects of any kind into cabinet slots or holes, or spilling any
liquid on the product, may touch hazardous voltage points or short out
parts.

EDH0267En1041 — 12/18 12

FMS Series Linear Metrology Stages

5.4 MSCABLE-3 Cable

5.5 MCAB-3 Cable

CABLE

CONNECTOR

S

TAGE

BENDING

STATIC CABLE: ≥.94 (24)
CABLE IN MOTION: ≥2.76 (70)

L

OCKING

K

NOBS

2

.24 (57)

D

ISCONNECTED

ø.24

(6)

S

UB-D15 CONNECTOR SHOWN

DIMENSIONS IN INCHES (AND MILLIMETERS)

WA RN IN G

This cable is shielded correctly. For a correct operation, make sure to
lock connectors (ground continuity provided by the cable).

For applications where the standard 3-meter cable (MSCABLE-3) included
with your stage is not adequate, Newport offers a 10-m longer length cable
(MSCABLE-10) designed to ensure the integrity of your positioning
application.

REMARK

The cross section of the MSCAB-10 cable is different from the one of the
MSCABLE-3 cable to allow a longer length. The MSCAB-10 cable has the
same mechanical properties as the MCAB-10 cable.

These cables are specially shielded and terminated with Newport’s
standard SUB-D15 and SUB-D25 connectors.

WA RN IN G

Keep the motor cables at a safe distance from other electrical cables in
your environment to avoid potential cross talk.

CABLE

CONNECTOR

STAGE

LOCKING

KNOBS

BENDING

STATIC CABLE: ≥1.50 (38)
CABLE IN MOTION: ≥3.78 (96)

2.28 (58)

DISCONNECTED

ø.39
(10)

SUB-D25 CONNECTOR SHOWN

DIMENSIONS IN INCHES (AND MILLIMETERS)

WA RN IN G

This cable is shielded correctly. For a correct operation, make sure to
lock connectors (ground continuity provided by the cable).

13 EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

6.0 —Connection to Non-Newport Electronics

6.1 Connections

WARNING

Newport is not responsible for malfunction or damage of FMS stages
when used with non-Newport controllers.

WARNING

Newport guarantees

“”compliance of FMS stages only if used with

Newport cables and controllers.

It is the customer’s responsibility to modify the cable and take care of
sensor signal connections, when using the stage with non-Newport
controllers.

End-of-Runs and Mechanical Zero are open collector type with a 5.6 V
protective Zener diode.

For applications where the standard 3-meter cable (MCAB-3) included with
your stage is not adequate, Newport offers longer length cables designed to
ensure the integrity of your positioning application.

These cables are specially shielded and terminated with Newport’s standard
SUB-D25 connectors. They are available in 5-m (MCAB-5), 7-m (MCAB-7) or
10-m (MCAB-10) lengths.

WA RN IN G

Keep the motor cables at a safe distance from other electrical cables in
your environment to avoid potential cross talk.

Iin max.: 16 mA
V max.: 5.25 V

NEWPORT

STAGE

5.6 V

EDH0267En1041 — 12/18 14

FMS Series Linear Metrology Stages

7.0 —Dimensions

1.57

(40)

1.54

(39)

4.69

(119)

3.31

(84)

.63

(16)

3.54

(90)

FMS-CC

& FMS-PP:

5.63

(143)

FMS-PPHA:

6.34

(161)

FMS100: 6.42 (163)

FMS200: 8.39 (213)

FMS300: 10.35 (263)

FMS100: 12.4 (315)

FMS200: 16.3 (415)

FMS300: 20.3 (515)

MALE CONNECTOR

FMS-PP & FMS-CC: SUB-D15M

FMS-PPHA: SUB-D25M

MODEL SHOWN: FMS300CC

DIMENSIONS IN INCHES (AND MILLIMETERS)

FMS200 AND FMS300:

4 HOLES ø.26 (6.6) C’BORED ø.43 (11)

4 HOLES ø.26 (6.6)

C’BORED ø.43 (11) ON SQR 1.97 (50)

4 HOLES M6 THD

(1)

ON SQR 1.97 (50)

4 HOLES M6 THD

(1)

ON SQR 2.95 (75)

1)

DEPTH: .24 (6)

HOLE M6 THD

(1)

FMS-CC

& FMS-PP

FMS-PPHA

FMS200: 5.91 x 1.97 (150 x 50)

FMS300: 9.84 x 1.97 (250 x 50)

4 ACCESS HOLES

FOR FIXING SCREW

15 EDH0267En1041 — 12/18

FMS Series Linear Metrology Stages

8.0 —Maintenance

R

ECOMMENDATION

Please contact Technical Sales Support team for recommendations on
application specific maintenance.

8.1 Maintenance

The FMS stage requires no particular maintenance. Nevertheless, this is a
precision mechanical device that must be kept and operated with caution.

PRECAUTIONS

The FMS stage must be used or stocked in a clean environment, without
dust, humidity, solvents or other substances.

RECOMMENDATION

It is recommended to return the stage to Newport for re-lubrication after
2000 hours of use.

If the FMS stage is mounted on a workstation and cannot be easily
removed, please contact Newport's After Sales Service for further
instructions.

8.2 Repair

CAUTION

Never attempt to disassemble a component of the stage that has not
been covered in this manual.

To disassemble a non specified component can cause a malfunction of
the stage.

If you observe a malfunction in your stage, please contact us immediately
to arrange for a repair.

CAUTION

Any attempt to disassemble or repair a stage without prior
authorization will void your warranty.

8.3 Calibration

CAUTION

It is recommended to return your FMS stage to Newport once a year for
recalibration to its original specifications.

EDH0267En1041 — 12/18 16

FMS Series Linear Metrology Stages

17 EDH0267En1041 — 12/18

Your Lo ca l Rep re se nt at iv e

Tel .:
F

ax:

N

ame:

Company:

Address:

Country:

P. O . N u m b e r :

Item(s) Being Returned:

Model #:

Description:

Reasons of return of goods (please list any specific problems):

R

eturn authorization #:

(Please obtain prior to return of item)

Date:

Phone Number:

Fax Number:

Serial #:

Service Form

Visit Newport Online at:

www.newport.com

North America & Asia

Newport Corporation
1791 Deere Ave.

Irvine, CA 92606, USA

Sales

Tel.: [phone]
e-mail: [e-mail]

Technical Support

Tel.: [phone]
e-mail: [e-mail]

Service, RMAs & Returns

Tel.: [phone]
e-mail: [e-mail]

Europe

MICRO-CONTROLE Spectra-Physics S.A.S
9, rue du Bois Sauvage

91055 Évry CEDEX
France

Sales & Technical Support

Tel.: [phone]
e-mail: [e-mail]

Service & Returns

Tel.: [phone]