Motorola MPXL10GC7U Datasheet

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SEMICONDUCTOR TECHNICAL DATA

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The MPXL10 series device is a silicon piezoresistive pressure sensor providing a very
accurate and linear voltage output — directly proportional to the applied pressure. This
standard, low cost, uncompensated sensor permits manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.

Features

• Low Profile Package

• Low Cost

• Patented Silicon Shear Stress Strain Gauge Design

• Ratiometric to Supply Voltage

• Easy to Use Chip Carrier Package Options

• Differential and Gauge Options

• Available in Unibody Package (see MPX10 Series Data Sheet)

Application Examples

• Air Movement Control

• Environmental Control Systems

• Level Indicators

• Leak Detection

• Medical Instrumentation

• Industrial Controls

• Pneumatic Control Systems

• Robotics

Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.

PIN 3

+ V

S



0 to 10 kPa (0–1.45 psi)

35 mV FULL SCALE SPAN

(TYPICAL)

CASE 472B–01, STYLE 2

PIN NUMBER

5

1

Gnd

2

+V

out

3
4–V

NOTE: Pins 5, 6, 7, and 8 are not
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.

V

S
out

N/C

6

N/C

7

N/C

8 N/C

PIN 2

+ V

PIN 4

– V

out

out

X–ducer

PIN 1

Figure 1. Uncompensated Pressure Sensor Schematic

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.

The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).

Senseon and X–ducer are trademarks of Motorola, Inc.

 Motorola, Inc. 1997

1Motorola Sensor Device Data

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MAXIMUM RATINGS

Rating Symbol Value Unit

Overpressure
Burst Pressure
Storage Temperature T
Operating Temperature T

(8)

(P1 > P2) P

(8)

(P1 > P2) P

max

burst

stg

A

75 kPa

100 kPa
–40 to +125 °C
–40 to +125 °C

OPERATING CHARACTERISTICS (V

Characteristic

Differential Pressure Range

(5)

(2)

(3)

(6)

(10% to 90%) t

(9)

Supply Voltage
Supply Current I
Full Scale Span

(4)

Offset
Sensitivity ∆V/∆P — 3.5 — mV/kPa
Linearity
Pressure Hysteresis
Temperature Hysteresis
Temperature Coefficient of Full Scale Span
Temperature Coefficient of Offset
Temperature Coefficient of Resistance
Input Impedance Z
Output Impedance Z
Response Time
Warm–Up — — 20 — ms
Offset Stability

(1)

(5)

(0 to 10 kPa) — — ± 0.1 — %V

(5)

(–40°C to +125°C) — — ± 0.5 — %V

(5)

= 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

S

Symbol Min Typ Max Unit

P

OP

V

S

o

V

FSS

V

off

— –1.0 — 1.0 %V

(5)

(5)

TCV

FSS

TCV

off

TCR 0.21 — 0.27 %Zin/°C

in

out

R

— — ±0.5 — %V

0 — 10 kPa
— 3.0 6.0 Vdc
— 6.0 — mAdc
20 35 50 mV

0 20 35 mV

–0.22 — –0.16 %V

— ±15 — µV/°C

400 — 550 Ω
750 — 1250 Ω

— 1.0 — ms

MECHANICAL CHARACTERISTICS

Characteristic Symbol Min Typ Max Unit

Common Mode Line Pressure

NOTES:

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.

3. Full Scale Span (V
minimum rated pressure.

4. Offset (V

5. Accuracy (error budget) consists of the following:

• Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified

• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the

• TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.

• TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative

• TCR: Zin deviation with minimum rated pressure applied, over the temperature range of –40°C to +125°C,

6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.

7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.

8. Exposure beyond these limits may cause permanent damage or degradation to the device.

9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

) is defined as the output voltage at the minimum rated pressure.

off

(7)

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

FSS

pressure range.

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.

minimum or maximum rated pressure, at 25°C.

to 25°C.

relative to 25°C.

— — — 690 kPa

FSS
FSS
FSS

FSS

FSS

/°C

2 Motorola Sensor Device Data