MOTOROLA MPX5100 User Manual

MOTOROLA

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SEMICONDUCTOR TECHNICAL DATA

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by MPX5100/D

MPX5100

Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated

The MPX5100 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza­tion, and bipolar processing to provide an accurate, high level analog output signal that is
proportional to the applied pressure.

Features

• 2.5% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller–Based Systems

• Patented Silicon Shear Stress Strain Gauge

• Available in Absolute, Differential and Gauge Configurations

• Durable Epoxy Unibody Element

• Easy–to–Use Chip Carrier Option

V

S

SERIES

OPERATING OVERVIEW

INTEGRATED PRESSURE

SENSOR

0 to 100 kPa (0 to 14.5 psi)

15 to 115 kPa

(2.18 to 16.68 psi)

0.2 to 4.7 V olts Output

BASIC CHIP CARRIER

ELEMENT

CASE 867–08, STYLE 1

SENSING
ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

GND

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

PINS 4, 5 AND 6 ARE NO CONNECTS

V

out

Figure 1. Fully Integrated Pressure Sensor Schematic

MAXIMUM RATINGS

Overpressure

Burst Pressure
Storage Temperature T
Operating Temperature T

1. TC = 25°C unless otherwise noted.

2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

(2)

(1)

Parametrics Symbol Value Unit

(P1 > P2)
(P2 > P1)

(2)

(P1 > P2) P

P

max

burst

stg

A

400
400

1000 kPa
–40° to +125° °C
–40° to +125° °C

kPa

DIFFERENTIAL PORT OPTION

CASE 867C–05, STYLE 1

NOTE: Pin 1 is the notched pin.

PIN NUMBER

1

V

out

2

Gnd

3

NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground.

V

S

4

N/C

5

N/C

6

N/C

REV 6

 Motorola, Inc. 1998

1Motorola Sensor Device Data

MPX5100 SERIES

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OPERATING CHARACTERISTICS

(VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

Characteristic Symbol Min Typ Max Unit

Pressure Range

Supply Voltage
Supply Current I
Minimum Pressure Offset

@ V

S

Full Scale Output

@ V

S

Full Scale Span

@ V

S

Accuracy

(1)

Gauge, Differential: MPX5100D
Absolute: MPX5100A
Vacuum: MPX5100GV

(2)

(3)

= 5.0 Volts

(4)

Differential and Absolute (0 to 85°C)

= 5.0 Volts Vacuum

(5)

Differential and Absolute (0 to 85°C)

= 5.0 Volts Vacuum

(6)

(11)

(11)

(0 to 85°C)

(11)

P

OP

0

15

0

V

V

V

FSO

S
o
off

4.75 5.0 5.25 Vdc
— 7.0 10 mAdc

0.088 0.20 0.313 Vdc

4.587

3.688

V

FSS

—
—

— — —

—
—
—

4.700

3.800

4.500

3.600

100
115
100

4.813

3.913
—

—

"

2.5 %V

kPa

Vdc

Vdc

Sensitivity V/P — 45 — mV/kPa
Response Time
Output Source Current at Full Scale Output I
Warm–Up Time
Offset Stability

(7)

(8)

(9)

t

R

o+

— 1.0 — mS

— 0.1 — mAdc
— — 20 — mSec
— —

"

0.5 — %V

Decoupling circuit shown in Figure 4 required to meet electrical specifications.

MECHANICAL CHARACTERISTICS

Characteristic Symbol Min Typ Max Unit

Weight, Basic Element (Case 867) — — 4.0 — Grams
Common Mode Line Pressure

NOTES:

1. 1.0kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range.

3. Offset (V

) is defined as the output voltage at the minimum rated pressure.

off

4. Full Scale Output (V

5. Full Scale Span (V
minimum rated pressure.

6. Accuracy (error budget) consists of the following:

• Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.

• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from

• TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.

• TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative

• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V

7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.

8. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.

9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

10. Common mode pressures beyond what is specified may result in leakage at the case–to–lead interface.

11. Pressure Range: Vacuum sensor is rated to 100 kPa; part is tested to a vacuum pressure equivalent to 80 kPa.

(10)

) is defined as the output voltage at the maximum or full rated pressure.

FSO

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

FSS

— — — 690 kPa

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.

minimum or maximum rated pressure at 25°C.

to 25°C.

at 25°C.

FSS

FSS

FSS

2 Motorola Sensor Device Data

MPX5100 SERIES

LUORO SILICONE

STAINLESS STEEL

STAINLESS STEEL

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ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION and SIGNAL CONDITIONING

Figure 2 shows the sensor output signal relative to
pressure input. Typical, minimum, and maximum out­put curves are shown for operation over a temperature
range of 0° to 85°C using the decoupling circuit below.
(The output will saturate outside of the specified pres­sure range.)

F

GEL DIE COAT

WIRE BOND

DIE

METAL COVER

EPOXY PLASTIC

CASE

OUTPUT (V)

5

VS = 5 Vdc

4.5
T

3.5

2.5

1.5

0.5

4

3

2

1

0

= 25°C

A

MPX5100

0

10

20

30

40

PRESSURE (kPa)

TYP

50

MAX

60

MIN

70

Figure 2. Output versus Pressure Differential

FLUORO SILICONE

GEL DIE COAT

WIRE BOND

DIE

SPAN RANGE (TYP)

OUTPUT RANGE (TYP)

80

90

110

100

METAL COVER

EPOXY PLASTIC

CASE

OFFSET

(TYP)

LEAD FRAME

DIFFERENTIAL/GAUGE ELEMENT

DIE

BOND

Figure 3. Cross–Sectional Diagrams

(Not to Scale)

Figure 3 illustrates both the Differential/Gauge and the
Absolute Sensing Chip in the basic chip carrier (Case 867). A
fluorosilicone gel isolates the die surface and wire bonds
from the environment, while allowing the pressure signal to
be transmitted to the sensor diaphragm.

The MPX5100 series pressure sensor operating char-

1.0mF

0.01mF

LEAD FRAME

ABSOLUTE ELEMENT

acteristics, and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media,
other than dry air, may have adverse effects on sensor
performance and long–term reliability. Contact the fac­tory for information regarding media compatibility in your
application.

+

5 V

V

V

IPS

S

out

GND

OUTPUT

DIE

BOND

Figure 4. Recommended Power Supply Decoupling.

For output filtering recommendations, please refer to

Application Note AN1646.

3Motorola Sensor Device Data

MPX5100 SERIES

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Transfer Function (MPX5100D, MPX5100GV)

Nominal Transfer Value: V

T emperature Error Multiplier

4.0

3.0

2.0

1.0

0.0

NOTE: The T emperature Multiplier is a linear response from 0 ° to –40°C and from 85° to 125°C.

Pressure Error Band

= VS (P x 0.009 + 0.04)

out

+/– (Pressure Error x Temp. Mult. x 0.009 x VS)

= 5.0 V ±5% P kPa

V

S

Break Points

MPX5100D Series

Temp Multiplier

– 40 3
0 to 85 1
+125 3

–40 –20 0 20 40 60

T emperature in °C

13012010080

140

3.0

2.0

1.0

0.0

Error (kPa)

–1.0
–2.0
–3.0

NOTE: For vacuum type parts (5100GV), Transfer Function is the same as that for 5100D Series.

0 20 40 60 80 100

Error Limits for Pressure

120

Pressure in kPa

MPX5100D Series

Pressure Error (max)
0 to 100 kPa ± 2.5 kPa

4 Motorola Sensor Device Data

Transfer Function (MPX5100A)

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MPX5100 SERIES

Nominal Transfer Value: V

T emperature Error Multiplier

4.0

3.0

2.0

1.0

0.0

NOTE: The T emperature Multiplier is a linear response from 0 ° to –40°C and from 85° to 125°C.

Pressure Error Band

= VS (P x 0.009 – 0.095)

out

+/– (Pressure Error x Temp. Mult. x 0.009 x VS)

= 5.0 V ±5% P kPa

V

S

Break Points

MPX5100A Series

Temp Multiplier

– 40 3
0 to 85 1
+125 3

–40 –20 0 20 40 60

T emperature in °C

13012010080

140

3.0

2.0

1.0

0.0

Error (kPa)

–1.0
–2.0
–3.0

Error Limits for Pressure

0 20 40 60 80 100

130

Pressure in kPa

MPX5100A Series

Pressure Error (max)

15 to 115 kPa ± 2.5 kPa

5Motorola Sensor Device Data

MPX5100 SERIES

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PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION T ABLE

Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluoro silicone gel
which protects the die from harsh media. The Motorola MPX

Part Number Case Type

MPX5100A, MPX5100D 867–08 Stainless Steel Cap
MPX5100DP 867C–05 Side with Part Marking
MPX5100AP, MPX5100GP 867B–04 Side with Port Attached
MPX5100GVP 867D–04 Stainless Steel Cap
MPX5100AS, MPX5100GS 867E–03 Side with Port Attached
MPX5100GVS 867A–04 Stainless Steel Cap
MPX5100ASX, MPX5100GSX 867F–03 Side with Port Attached
MPX5100GVSX 867G–03 Stainless Steel Cap

pressure sensor is designed to operate with positive differen­tial pressure applied, P1 > P2.

The Pressure (P1) side may be identified by using the

Table below:

Pressure (P1)
Side Identifier

ORDERING INFORMATION:

The MPX5100 pressure sensor is available in absolute, differential, and gauge configurations. Devices are available in the
basic element package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pres­sure connections.

MPX Series

Device Name Options Case Type

Basic Element Absolute 867–08 MPX5100A MPX5100A

Differential 867–08 MPX5100D MPX5100D

Ported Elements Differential Dual Ports 867C–05 MPX5100DP MPX5100DP

Absolute, Single Port 867B–04 MPX5100AP MPX5100AP
Gauge, Single Port 867B–04 MPX5100GP MPX5100GP
Gauge, Vacuum Port 867D–04 MPX5100GVP MPX5100GVP
Absolute, Axial 867E–03 MPX5100AS MPX5100A
Gauge, Axial 867E–03 MPX5100GS MPX5100D
Gauge, Vacuum Axial 867A–04 MPX5100GVS MPX5100D
Absolute, Axial PC Mount 867F–03 MPX5100ASX MPX5100A
Gauge, Axial PC Mount 867F–03 MPX5100GSX MPX5100D
Gauge Vacuum Axial PC Mount 867G–03 MPX5100GVSX MPX5100D

Order Number Device Marking

6 Motorola Sensor Device Data

P ACKAGE DIMENSIONS

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MPX5100 SERIES

–B–

B

PORT #2

VACUUM

(P2)

C

R

POSITIVE PRESSURE

M

(P1)

–A–

N

PIN 1

SEATING
PLANE

J
S

–T–

123456

F

D

6 PL

0.136 (0.005) T

L

G

M

M

A

CASE 867–08

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED

16.00 (0.630).

DIM MIN MAX MIN MAX

A 0.595 0.630 15.11 16.00
B 0.514 0.534 13.06 13.56
C 0.200 0.220 5.08 5.59
D 0.027 0.033 0.68 0.84

F 0.048 0.064 1.22 1.63

G 0.100 BSC 2.54 BSC

J 0.014 0.016 0.36 0.40
L 0.695 0.725 17.65 18.42

M 30 NOM 30 NOM

__

N 0.475 0.495 12.07 12.57
R 0.430 0.450 10.92 11.43
S 0.090 0.105 2.29 2.66

STYLE 1:

PIN 1. VOUT

2. GROUND

3. VCC

4. V1

5. V2

6. VEX

MILLIMETERSINCHES

ISSUE N

BASIC ELEMENT (A, D)

C

POSITIVE

PRESSURE

K

(P1)

PIN 1

S

V

J

NE

–T–

A

12 3 4 5 6

G

F

D

6 PL

0.13 (0.005) T

M

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

DIM MIN MAX MIN MAX

A 0.690 0.720 17.53 18.28
B 0.245 0.255 6.22 6.48
C 0.780 0.820 19.81 20.82
D 0.027 0.033 0.69 0.84
E 0.178 0.186 4.52 4.72

F 0.048 0.064 1.22 1.63

G 0.100 BSC 2.54 BSC

J 0.014 0.016 0.36 0.41
K 0.345 0.375 8.76 9.53
N 0.300 0.310 7.62 7.87
S 0.220 0.240 5.59 6.10
V 0.182 0.194 4.62 4.93

STYLE 1:

M

B

PIN 1. VOUT

2. GROUND

3. VCC

4. V1

5. V2

6. VEX

MILLIMETERSINCHES

CASE 867A–04

ISSUE E

VACUUM SIDE PORTED (GVS)

7Motorola Sensor Device Data