MOTOROLA MPX4080D User Manual

MOTOROLA

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SEMICONDUCTOR TECHNICAL DATA

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by MPX4080D/D

MPX4080D

Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated

The MPX4080D series piezoresistive transducer is a state–of–the–art monolithic
silicon pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza­tion, and bipolar processing to provide an accurate, high level analog output signal that is
proportional to the applied pressure.

Features

• 3.0% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller–Based Systems

• Patented Silicon Shear Stress Strain Gauge

• Durable Epoxy Unibody Element

• Easy–to–Use Chip Carrier Option

V

S

SENSING
ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

PINS 4, 5 AND 6 ARE NO CONNECTS

V

out

SERIES

OPERATING OVERVIEW

INTEGRATED PRESSURE

SENSOR

0 to 80 kPa (0 to 11.6 psi)

0.58 to 4.9 V olts Output

BASIC CHIP CARRIER

ELEMENT

CASE 867–08

NOTE: Pin 1 is the notched pin.

PIN NUMBER

4

1

V

out

2

Gnd

3

NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground.

V

S

N/C

5

N/C

6

N/C

GND

Figure 1. Fully Integrated Pressure Sensor Schematic

MAXIMUM RATINGS

Overpressure

Storage Temperature T
Operating Temperature T

1. TC = 25°C unless otherwise noted.

2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

REV 0

(2)

(1)

Parametrics Symbol Value Unit

(P1 > P2)
(P2 > P1)

P

max

stg

A

400

400
–40° to +125° °C
–40° to +105° °C

kPa

 Motorola, Inc. 2000

1Motorola Sensor Device Data

MPX4080D SERIES

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OPERATING CHARACTERISTICS

Characteristic Symbol Min Typ Max Unit

Pressure Range
Supply Voltage
Supply Current I
Minimum Pressure Offset

@ VS = 5.1 Volts

Full Scale Output

@ VS = 5.1 Volts

Full Scale Span

@ VS = 5.1 Volts
Accuracy
Sensitivity V/P — 54 — mV/kPa

NOTES:

1. 1.0kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range.

3. Offset (V

4. Full Scale Output (V

5. Full Scale Span (V
minimum rated pressure.

6. Accuracy (error budget) consists of the following:

• Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.

• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from

• TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.

• TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative

• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V

(1)

(2)

(3)

(4)

(0 to 85°C)

(5)

(0 to 85°C)

(6)

) is defined as the output voltage at the minimum rated pressure.

off

) is defined as the output voltage at the maximum or full rated pressure.

FSO

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

FSS

(VS = 5.1 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

P

OP

V

S

o

(0 to 85°C)

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.

minimum or maximum rated pressure at 25°C.

to 25°C.

V

off

V

FSO

V

FSS

— — —

0 — 80 kPa

4.85 5.1 5.35 Vdc
— 7.0 10 mAdc

0.478 0.575 0.672 Vdc

4.772 4.900 5.020 Vdc

— 4.325 — Vdc

"

3.0 %V

at 25°C.

FSS

FSS

2 Motorola Sensor Device Data

MPX4080D SERIES

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ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION and SIGNAL CONDITIONING

Figure 2 shows the sensor output signal relative to
pressure input. Typical, minimum, and maximum out­put curves are shown for operation over a temperature
range of 0° to 85°C using the decoupling circuit below.
(The output will saturate outside of the specified pres­sure range.)

FLUORO SILICONE

GEL DIE COAT

WIRE BOND

4.5

3.5

2.5

OUTPUT (V)

1.5

0.5

DIE

5

VS = 5.1 Vdc
TA = 25°C

4

MPX4080

3

2

1

0

0

10

20

30
PRESSURE (kPa)

TYP

MAX

MIN

40

50

Figure 2. Output versus Pressure Differential

STAINLESS STEEL

METAL COVER

EPOXY PLASTIC

CASE

SPAN RANGE (TYP)

OUTPUT RANGE (TYP)

60

70

80

OFFSET

(TYP)

LEAD FRAME

DIFFERENTIAL/GAUGE ELEMENT

Figure 3. Cross–Sectional Diagrams

(Not to Scale)

Figure 3 illustrates the Differential Sensing Chip in the ba­sic chip carrier (Case 867). A fluorosilicone gel isolates the
die surface and wire bonds from the environment, while al­lowing the pressure signal to be transmitted to the sensor di­aphragm.

The MPX4080D series pressure sensor operating char -

1.0mF

0.01mF

DIE

BOND

acteristics, and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media,
other than dry air, may have adverse effects on sensor
performance and long–term reliability. Contact the fac­tory for information regarding media compatibility in your
application.

+

5 V

V

V

S

IPS

out

GND

OUTPUT

Figure 4. Recommended Power Supply Decoupling.

For output filtering recommendations, please refer to

Application Note AN1646.

3Motorola Sensor Device Data

MPX4080D SERIES

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Transfer Function (MPX4080D)

Nominal Transfer Value: V

T emperature Error Multiplier

4.0

3.0

2.0

1.0

0.0

NOTE: The T emperature Multiplier is a linear response from 0 ° to –40°C and from 85° to 105°C.

Pressure Error Band

= VS (P x 0.01059 + 0.1 1280)

out

+/– (Pressure Error x Temp. Mult. x 0.01059 x VS)
VS = 5.1 V ±0.25V P kPa

Break Points

MPX4080D Series

Temp Multiplier

– 40 3
0 to 85 1
+105 2

–40 –20 0 20 40 60

T emperature in °C

13012010080

140

3.0

2.0

1.0

0.0

Error (kPa)

–1.0
–2.0
–3.0

Error Limits for Pressure

0 20 40 60 80 100

120

Pressure in kPa

MPX4080D Series

Pressure Error (max)
0 to 6 kPa ± 1.8 kPa

0 to 60 kPa ± 1.5 kPa
60 to 80 kPa ± 2.3 kPa

4 Motorola Sensor Device Data

PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE

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MPX4080D SERIES

Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluoro silicone gel
which protects the die from harsh media. The Motorola MPX

Part Number Case Type

MPX4080D 867–08 Stainless Steel Cap

pressure sensor is designed to operate with positive differen­tial pressure applied, P1 > P2.

The Pressure (P1) side may be identified by using the

Table below:

Pressure (P1)

Side Identifier

ORDERING INFORMATION:

The MPX4080D is available only in the basic element package.

MPX Series

Device Name Options Case Type

Basic Element Differential 867–08 MPX4080D MPX4080D

Order Number Device Marking

5Motorola Sensor Device Data

MPX4080D SERIES

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P ACKAGE DIMENSIONS

C

R

POSITIVE PRESSURE

M

B

J
S

–A–

SEATING
PLANE

PIN 1

–T–

123456

F

D

6 PL

(P1)

N

L

G

0.136 (0.005) T

M

M

A

CASE 867–08

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED

16.00 (0.630).

DIM MIN MAX MIN MAX

A 0.595 0.630 15.11 16.00
B 0.514 0.534 13.06 13.56
C 0.200 0.220 5.08 5.59
D 0.027 0.033 0.68 0.84
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.40
L 0.695 0.725 17.65 18.42
M 30 NOM 30 NOM

__

N 0.475 0.495 12.07 12.57
R 0.430 0.450 10.92 11.43
S 0.090 0.105 2.29 2.66

STYLE 1:

PIN 1. VOUT

2. GROUND

3. VCC

4. V1

5. V2

6. VEX

MILLIMETERSINCHES

ISSUE N

BASIC ELEMENT

6 Motorola Sensor Device Data