Mitsubishi MH11H35B0SNA, MH11H03B0LNA, MH11H03B0SNA, MH11H11C0SNA, MH11H11C0LNA User Manual

MELSEC iQ-R Laser Displacement Sensor
Control Module User's Manual (Sensor Head)

-MH11H01A0SNA -MH11H01A0LNA

-MH11H01A1SNA -MH11H01A1LNA

-MH11H01A2SNA -MH11H01A2LNA

-MH11H03B0SNA -MH11H03B0LNA

-MH11H05B0SNA -MH11H05B0LNA

-MH11H05C0SNA -MH11H05C0LNA

-MH11H08B0SNA -MH11H08B0LNA

-MH11H08C0SNA -MH11H08C0LNA

-MH11H11B0SNA -MH11H11B0LNA

-MH11H35C3SNA -MH11H11C0LNA

-MH11H11C0SNA -MH11H35B0LNA

-MH11H35B0SNA -MH11H35C0LNA

-MH11H35C0SNA -MH11H35C3LNA

SAFETY PRECAUTIONS

WARNING

Indicates that incorrect handling may cause hazardous conditions, resulting in
death or severe injury.

CAUTION

Indicates that incorrect handling may cause hazardous conditions, resulting in
minor or moderate injury or property damage.

(Read these precautions before using this product.)

This product is intended to detect an object and does not have the control function to ensure safety such as accident

prevention.

Do not use this product as a safeguard that senses the presence of a person. Doing so may result in an accident due to an

incorrect output or malfunction.

To protect the human body, use a product that complies with local laws and standards such as OSHA, ANSI, and IEC.

Before using this product, please read this manual and the relevant manuals carefully and pay full attention to safety to handle

the product correctly.

The precautions given in this manual are concerned with this product only. For the safety precautions of the programmable

controller system, refer to the MELSEC iQ-R Module Configuration Manual.

In this manual, the safety precautions are classified into two levels: " WARNING" and " CAUTION".

Under some circumstances, failure to observe the precautions given under " CAUTION" may lead to serious

consequences.

Observe the precautions of both levels because they are important for personal and system safety.

Make sure that the end users read this manual and then keep the manual in a safe place for future reference.

1

[Precautions for Using Laser Products]

WARNING

● The laser products use semiconductor laser light sources. When handling laser products, observe the
following because human access to laser radiation may result in injury.
(1) Do not disassemble the laser products. Doing so may result in exposure to laser radiation.
(2) Shut off the external power supply (all phases) to stop laser emission before replacing a failed

laser product or changing the layout.

● Observe the following handling precautions for the laser products in each class.
(1) Class 3R laser products

• Do not aim the laser beam at people.

• Do not directly look at or come in contact with the laser beam and its reflection from a specular
surface (such as a mirror). In addition, never look at the beam and its reflection through optical
instruments (such as a microscope and a telescope).

• Shorten the beam paths as much as possible to prevent diffusion of laser beams. Terminate the
laser beams at the end of their paths by diffusely reflecting materials of appropriate reflectivity
and thermal properties or by absorbers.

• Locate the beam path above or below the eye level. Wearing protective eyewear is
recommended when handling the laser products.

• Install the laser products carefully so that the laser beam is not unintentionally reflected from
specular surfaces.

(2) Class 2 laser products

• Do not aim the laser beam at people.

• Do not stare into the laser beam and its reflection from specular surfaces.

• To prevent exposure to laser radiation (specularly or diffusely reflected laser beams), install a
protective enclosure with an appropriate reflectance.

• Locate the beam path above or below the eye level.

(3) Class 1 laser products

• Do not stare into the laser beam and its reflection from specular surfaces.

2

[Design Precautions]

WARNING

● Provide safety measures such as a dual safety mechanism when the module is used for applications
that have the possibility of causing physical injury or serious damage.

● If a communication cable is disconnected, the network may be unstable, resulting in a communication
failure of multiple stations. Configure an interlock circuit in the program to ensure that the entire
system will always operate safely even if communications fail. Incorrect output or malfunction due to a
communication failure may result in an accident.

[Design Precautions]

CAUTION

● Do not use the laser displacement sensor outside of its specifications (such as ratings or
environments). Doing so may result in overheating or smoke.

● Do not install the control lines or communication cables together with the main circuit lines or power
cables. Keep a distance of 100mm or more between them. Failure to do so may result in malfunction
due to noise.

● Do not power off the programmable controller or reset the CPU module while the settings are being
written. Doing so will make the data in the flash ROM and SD memory card undefined. The values
need to be set in the buffer memory and written to the flash ROM and SD memory card again. Doing
so also may cause malfunction or failure of the module.

● Do not disassemble or modify this product. Doing so may cause failure, malfunction, injury, or a fire.

● Clamp cables securely with the terminal screws. Incomplete connections may cause overheating or

smoke.

● Do not touch any terminal while power is on. Doing so will cause electric shock or malfunction.

● Do not open the covers on the back and the bottom of the product. Doing so may cause malfunction

or failure.

[Installation Precautions]

WARNING

● Shut off the external power supply (all phases) used in the system before mounting or removing the
module. Failure to do so may result in electric shock or cause the module to fail or malfunction.

[Installation Precautions]

CAUTION

● Use this product in an environment that meets the general specifications in this manual. Failure to do
so may result in electric shock, fire, malfunction, or damage to or deterioration of the product.

● When using the programmable controller in an environment of frequent vibrations, fix the module with
a screw.

● Do not directly touch any conductive parts of connectors on the modules. Doing so can cause
malfunction or failure of the module.

3

[Wiring Precautions]

WARNING

● Shut off the external power supply (all phases) used in the system before installation and wiring.
Failure to do so may result in electric shock or cause the module to fail or malfunction.

[Wiring Precautions]

CAUTION

● Individually ground the FG and LG terminals of the programmable controller with a ground resistance
of 100 ohms or less. Failure to do so may result in electric shock or malfunction.

● Check the rated voltage and signal layout before wiring to the module, and connect the cables
correctly. Connecting a power supply with a different voltage rating or incorrect wiring may cause fire
or failure.

● Securely connect the connector to the module. Poor contact may cause malfunction.

● Do not install the control lines or communication cables together with the main circuit lines or power

cables. Keep a distance of 100mm or more between them. Failure to do so may result in malfunction
due to noise.

● Place the cables in a duct or clamp them. If not, dangling cables may swing or inadvertently be pulled,
resulting in malfunction or damage to modules or cables.
In addition, the weight of the cables may put stress on modules in an environment of strong vibrations
and shocks.
Do not clamp the extension cables with the jacket stripped. Doing so may change the characteristics
of the cables, resulting in malfunction.

● Check the interface type and correctly connect the cable. Incorrect wiring (connecting the cable to an
incorrect interface) may cause failure of the module and external device.

● When disconnecting the cable from the module, do not pull the cable by the cable part. For the cable
with connector, hold the connector part of the cable.

● Prevent foreign matter such as dust or wire chips from entering the module. Such foreign matter can
cause a fire, failure, or malfunction.

● Do not apply the 24VDC power before connecting a sensor head. If the power is applied before wiring,
normal data transmission is not guaranteed.

4

[Startup and Maintenance Precautions]

WARNING

● Do not touch any terminal while power is on. Doing so will cause electric shock or malfunction.

● Shut off the external power supply (all phases) used in the system before cleaning the module or

retightening the connector screws or module fixing screws. Failure to do so may result in electric
shock.

● For the operating status of each station after a communication failure, refer to manuals relevant to the
network. Incorrect output or malfunction due to a communication failure may result in an accident.

[Startup and Maintenance Precautions]

CAUTION

● Do not disassemble or modify the modules. Doing so may cause failure, malfunction, injury, or a fire.

● Use any radio communication device such as a cellular phone or PHS (Personal Handy-phone

System) more than 25cm away in all directions from the programmable controller. Failure to do so
may cause malfunction.

● Shut off the external power supply (all phases) used in the system before mounting or removing the
module. Failure to do so may cause the module to fail or malfunction.

● Startup and maintenance of a control panel must be performed by qualified maintenance personnel
with knowledge of protection against electric shock. Lock the control panel so that only qualified
maintenance personnel can operate it.

● Before handling the module, touch a conducting object such as a grounded metal to discharge the
static electricity from the human body. Failure to do so may cause the module to fail or malfunction.

[Operating Precautions]

CAUTION

● When changing data and operating status, and modifying program of the running programmable
controller from an external device such as a personal computer connected to an intelligent function
module, read relevant manuals carefully and ensure the safety before operation. Incorrect change or
modification may cause system malfunction, damage to the machines, or accidents.

● Do not power off the programmable controller or reset the CPU module while the setting values in the
buffer memory are being written to the flash ROM in the module. Doing so will make the data in the
flash ROM and SD memory card undefined. The values need to be set in the buffer memory and
written to the flash ROM and SD memory card again. Doing so can cause malfunction or failure of the
module.

[Disposal Precautions]

CAUTION

● When disposing of this product, treat it as industrial waste.

5

[Transportation Precautions]

CAUTION

● The halogens (such as fluorine, chlorine, bromine, and iodine), which are contained in a fumigant
used for disinfection and pest control of wood packaging materials, may cause failure of the product.
Prevent the entry of fumigant residues into the product or consider other methods (such as heat
treatment) instead of fumigation. The disinfection and pest control measures must be applied to
unprocessed raw wood.

6

CONDITIONS OF USE FOR THE PRODUCT

(1) Mitsubishi's laser displacement sensor must be used in applications which do not lead to serious accidents even in

cases where failure/nonconformity was unlikely to occur in the laser displacement sensor, as well as, application which

execute backup and failsafe functions in systems through external devices when a failure or defect has occurred.

(2) Mitsubishi's laser displacement sensor was designed/manufactured as a general-purpose product which was designed

for use in general industries, etc. Accordingly, the applications of Mitsubishi's laser displacement sensor shall be

exempt for usage in special applications such as devices and systems as stated below. In the unlikely event that it is

used, we bare no responsibility (includes, but is not limited to debt defaults, defective warranty, QA, illegal acts, and

product liabilities) for the quality performance, and safety of Mitsubishi's laser displacement sensor.

• Large applications which greatly affect the public such as, nuclear power plants operated by each power company and

other nuclear power plants

• Application which request Mitsubishi to construct special QA structures such as railway companies and government

offices.

• Application such as aerospace, medicine, railway, combustion-fuel system, passenger cars, manned transfer

equipment, entertainment devices, and safety devices that are expected to greatly affect lives, the body and

properties

Mitsubishi's information desk should be contacted for more information as the laser displacement sensor may be

applicable at the discretion of Mitsubishi, on the condition that the application is strictly limited and special qualities

(exceeding the general specifications, etc.) are not required even in the above applications.

7

INTRODUCTION

Thank you for purchasing the Mitsubishi Electric MELSEC iQ-R series programmable controllers.

This manual describes the installation methods, specifications, and maintenance and inspection of the relevant products listed

below.

Before using this product, please read this manual and the relevant manuals carefully and develop familiarity with the

functions and performance of the MELSEC iQ-R series programmable controller to handle the product correctly.

Please make sure that the end users read this manual.

Relevant products

■Sensor head

MH11H01A0SNA, MH11H01A1SNA, MH11H01A2SNA, MH11H03B0SNA, MH11H05B0SNA, MH11H05C0SNA,

MH11H08B0SNA, MH11H08C0SNA, MH11H11B0SNA, MH11H11C0SNA, MH11H35B0SNA, MH11H35C0SNA,

MH11H35C3SNA, MH11H01A0LNA, MH11H01A1LNA, MH11H01A2LNA, MH11H03B0LNA, MH11H05B0LNA,

MH11H05C0LNA, MH11H08B0LNA, MH11H08C0LNA, MH11H11B0LNA, MH11H11C0LNA, MH11H35B0LNA,

MH11H35C0LNA, MH11H35C3LNA

8

CONTENTS

SAFETY PRECAUTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1

CONDITIONS OF USE FOR THE PRODUCT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

INTRODUCTION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8

RELEVANT MANUALS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

TERMS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

CHAPTER 1 BEFORE USING THE PRODUCT 12

1.1 Correct Usage Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12

1.2 Handling of Laser Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15

1.3 Accessories and Products Sold Separately . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .30

1.4 Part Names. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .32

1.5 Installation Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .33

CHAPTER 2 SPECIFICATIONS 38

2.1 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

2.2 Sensor Head Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .39

10mm type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .40

30mm type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .41

50mm type (Class 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

50mm type (Class 3R). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

85mm type (Class 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

85mm type (Class 3R). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

110mm type (Class 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .46

110mm type (Class 3R). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47

350mm type (Class 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .48

350mm type (Class 3R). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

8mm type (Class 1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .51

15mm type (Class 1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

2.3 ND Filter Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .53

CONTENTS

CHAPTER 3 MAINTENANCE AND INSPECTION 54

3.1 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .54

3.2 Inspection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .54

CHAPTER 4 TROUBLESHOOTING 56

APPENDICES 58

Appendix 1 External Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .58

Appendix 2 Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .65

Appendix 3 How to Confirm Serial Number and Function Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70

Appendix 4 Export Regulations by Japanese Government . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71

INDEX 72

REVISIONS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .74

WARRANTY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .75

TRADEMARKS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .76

9

RELEVANT MANUALS

Manual name [manual number] Description Available

form

MELSEC iQ-R Laser Displacement Sensor Control
Module User's Manual (Sensor Head)
[SH-082023ENG] (this manual)

MELSEC iQ-R Laser Displacement Sensor Control
Module User's Manual (Startup)
[SH-082017ENG]

MELSEC iQ-R Laser Displacement Sensor Control
Module User's Manual (Application)
[SH-082019ENG]

e-Manual refers to the Mitsubishi Electric FA electronic book manuals that can be browsed using a dedicated

tool.

e-Manual has the following features:

• Required information can be cross-searched in multiple manuals.

• Other manuals can be accessed from the links in the manual.

• The hardware specifications of each part can be found from the product figures.

• Pages that users often browse can be bookmarked.

• Sample programs can be copied to an engineering tool.

Precautions for using the laser displacement sensor, and installation methods/
specifications/maintenance and inspection for the sensor head

Specifications, procedures before operation, system configuration, wiring, and
operation examples of the laser displacement sensor control module

Functions, parameter settings, timing charts, troubleshooting, I/O signals, and
buffer memory of the laser displacement sensor control module

Print book

e-Manual
PDF

Print book

e-Manual
PDF

Print book

e-Manual
PDF

10

TERMS

Unless otherwise specified, this manual uses the following terms.

Ter m Description

Control module An abbreviation for MELSEC iQ-R laser displacement sensor control module

Engineering tool Another name for the software package for the MELSEC programmable controllers

Laser displacement sensor The generic term for the sensor head and the control module

Measurement center distance The distance from the light emitting part of the sensor head to the center of the measurement range.

Measurement range (F.S.) The range where the resolution and linearity are guaranteed, and the displacement can be measured. For example,

Sensor head An abbreviation for the laser displacement sensor MH11 sensor head

Setting tool An abbreviation for the laser displacement sensor MH11 SettingTool Version 2

when the measurement range is 5mm, the measurement range (F.S.) becomes 10mm.

11

1 BEFORE USING THE PRODUCT

Precautions

This chapter describes the installing method and connection method of the sensor head.

1.1 Correct Usage Method

Regarding execution and use of the sensor head, be aware of the following.

Installation environment

Do not install the product in the following conditions.

• Where the ambient temperature, ambient humidity, or ambient illuminance of light receiving surface is beyond the range of

specifications ( Page 12 Usage environment)

• Where dew condensation occurs due to rapid temperature change

• In an atmosphere of corrosive gas or flammable gas

• Where the product is exposed to dust, iron powder, and salt

• In an atmosphere which is likely to be exposed to organic solvent such as benzene, thinner, or alcohol, or to strong alkaline

materials such as ammonia or sodium hydroxide

• Where heavy vibration or impact is applied

• Where direct sunlight is received

• Where water, oil, or chemicals splashes

• Where load is applied to the product

Usage environment

■Ambient temperature

Use the sensor head within the specifications range of 0 to 45. ( Page 38 SPECIFICATIONS)
Store the product within the ambient temperature range of -20 to 70.

The life of the semiconductor laser depends on the ambient temperature during use. When using the product near a heat

source, take measures to lower the ambient temperature of the sensor head as possible. Install the sensor head on a device

having good heat radiation because the sensor head itself emits heat.

For MH11H110NA, when installing two sensor heads in parallel at a 20mm or less interval, install each sensor head on an
aluminum or iron plate having a 200 or more surface area.

■Ambient humidity

Use the controller within a range of 35% to 85% (RH).

Do not, however, use the controller in places where a drastic temperature change may result in dew condensation.

■Light receiving surface ambient illuminance

Use the system with illuminance of 3000lx or less at light receiving surface using an incandescent lamp.

12

1 BEFORE USING THE PRODUCT

1.1 Correct Usage Method

■Environment

• Water, oil, or fingerprints on the light emitting part and light receiving part of a sensor head refracts light. Dust and dirt on

them block light. Keep them clean at all times. When cleaning these parts, wipe them off using a soft lint-free cloth or lens

cleaning paper.

• Install the sensor head so that ambient light such as sunlight or light with the same wavelength as laser beam does not

enter the light receiver. If high accuracy is required, install a light shielding plate or the like on the sensor head.

• Do not use the product in dusty places or that exposed to flammable or corrosive gases, droplet, direct sunlight, severe

vibration, or impact.

Protective structure

Although the sensor head is waterproof, the control module and connectors are not structurally dustproof, waterproof, or

corrosion-resistant. Therefore, measurement underwater or in the rain is not allowed. Be aware of the usage environment.

Warming up time

Allow at least 30 minutes of warming up after emitted laser beam from a sensor head to ensure the performance of the sensor

head.

Measures to reduce noise

• Install the product as far away as possible from noise source such as high-voltage lines, high-voltage device, power lines,

power device, machines which generate a large starting and stopping surge, welding machines, and inverter motor.

• Install the product as far away as possible from a wireless device that has a transmitter, such as an amateur radio device.

• Do not run the sensor head cable along (bundled in parallel) with other wirings. Keep it at least 100mm away from other

wires. Run the cable so that it is separate from high voltage and power circuit lines. If it is necessary to run the cable in

parallel with them, shield the cable by running it through a grounded electrical conduit.

1

1 BEFORE USING THE PRODUCT

1.1 Correct Usage Method

13

Connecting

R30mm or more

20mm or more

■Connector

• Turn off the power of the programmable controller before connecting or disconnecting the connectors and any other

connections.

• When connecting or disconnecting the sensor head, be sure to hold the connector part of the sensor head cable not to

apply extra force to the cable.

• Be careful not to touch the terminals of disconnected connectors or to let foreign objects get in disconnected connectors.

• Be careful not to apply force to around the connectors of sensor head cable and extension cable for sensor head. Do not

bend the cables near connectors of the sensor head. Doing so causes disconnection of the cables.

• Fit the connector of the sensor head cable to the plug-in side of the connector.

■Sensor head cable

• Do not pull the cable using a force 29.4N or more when routing the cable with the sensor head and control module fixed.

Doing so may cause disconnection of the cable. At least 20mm is required from the cable connection to the bend. The

bending radius must be 30mm or more.

• When moving the sensor head during operation, make sure that the cable is not bent while moving it.

■Extension cable for sensor head

• Use only one extension cable for sensor head for connection between one sensor head and a controller.

• When moving the sensor head during operation, use the replaceable extension cable for the bending part and movable

part. The bending radius of the extension cable must be 30mm or more for the fixed part, and 60mm or more for the

movable part. Do not apply tensile stress to the cable.

14

1 BEFORE USING THE PRODUCT

1.1 Correct Usage Method

1.2 Handling of Laser Products

JIS/IEC/GB

A semiconductor laser is used as the beam source of the sensor.

The laser class is classified based on the JIS (JIS C 6802: 2014), IEC (IEC 60825-1: 2014), and GB standards (GB 7247.1:

2012).

Class Maximum

output

10.1mW*1658nm MH11H01ANA

2 1mW 658nm MH11H03B0NA, MH11H05B0NA, MH11H08B0NA, MH11H11B0NA, MH11H35B0NA

3R 5mW 658nm MH11H05C0NA, MH11H08C0NA, MH11H11C0NA, MH11H35CNA

*1 MH11H01A2NA: 0.3mW

Before handling laser products, read "Precautions for using laser products" in safety precautions carefully.

■Caution

• Please consult your local Mitsubishi representative if the product breaks down.

• Do not use the product in a way other than specified in this manual. Users may be exposed to hazardous laser radiation if

the device is controlled or adjusted in procedures not specified in this manual.

• Before use, carefully read the content of the warning labels shown below. The warning label is posted on the side surface of

the sensor head. Use the warning label including in the sensor head packaging as needed.

Wavelength Model name

1

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

15

■Warning label

Japanese/English

Korean/Chinese

• 10mm type (MH11H01A0SNA, MH11H01A0LNA)

[Label position]

• 30mm type (MH11H03B0SNA, MH11H03B0LNA)

[Label position]

16

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

• 50mm type (MH11H05B0SNA, MH11H05B0LNA)

Japanese/English

Korean/Chinese

[Label position]

1

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

17

• 50mm type (MH11H05C0SNA, MH11H05C0LNA)

Japanese/English

Korean/Chinese

[Label position]

18

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

• 85mm type (MH11H08B0SNA, MH11H08B0LNA)

Japanese/English

Korean/Chinese

[Label position]

1

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

19

• 85mm type (MH11H08C0SNA, MH11H08C0LNA)

Japanese/English

Korean/Chinese

[Label position]

20

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

• 110mm type (MH11H11B0SNA, MH11H11B0LNA)

Japanese/English

Korean/Chinese

[Label position]

1

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

21

• 110mm type (MH11H11C0SNA, MH11H11C0LNA)

Japanese/English

Korean/Chinese

[Label position]

22

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

• 350mm type (MH11H35B0SNA, MH11H35B0LNA)

Japanese/English

Korean/Chinese

[Label position]

1

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

23

• 350mm type (MH11H35C0SNA, MH11H35C0LNA)

Japanese/English

Korean/Chinese

[Label position]

24

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

• 350mm type (MH11H35C3SNA, MH11H35C3LNA)

Japanese/English

Korean/Chinese

[Label position]

1

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

25

• 8mm type (MH11H01A1SNA, MH11H01A1LNA)

• 15mm type (MH11H01A2SNA, MH11H01A2LNA)

[Label position]

MH11H01A1SNA, MH11H01A1LNA MH11H01A2SNA, MH11H01A2LNA

26

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

■Preventive measures against damage caused by laser light

When using this product, each country should observe related laws and regulations of its own country to prevent damage

caused by laser light. For Japan, under the Industrial Safety and Health Act, the detailed safety preventive measures for

operations handling laser equipment other than that of class 1 and 2 and operations that are exposed to laser light are

established in "Preventive measures against damage caused by laser light". The following lists the measure standards for

each class of laser equipment.
: Required, : Optional

Measure Description Class of laser equipment

*1

Invisible Visible

Appointment of administrators of laser equipment Appoint controllers of laser equipment from the workers

who have sufficient knowledge and experience with
laser equipment handling and laser light prevention.

Controlled area (off-limits area with a sign) Separate the off-limits areas from other areas and

Laser
equipment

Work
management,
health
management,
and other
managements

Laser light path Position of light

Key control A structure activated by using a key or others   

Emergency
stop switch or
other devices

Interlock system or other systems Stop laser emission automatically when a controlled

Indication of laser emission
aperture

Operating position Position which is as far as possible from laser light   

Measures in adjusting the optical
system

Protective gear Safety goggles Wear effective safety goggles depending on the type of

Inspection and maintenance Perform start-up inspection, periodic inspection, and

Safety and health education Perform education when hiring workers, reassigning

Healthcare Examination of

path

Appropriate
design of light
path and light
blocking

Appropriate
termination of
light

Emergency
stop switch

Warning device A warning device, such as an automatic indicator, which

Shutter A shutter which avoids accidental laser emission from a

Work clothes
with little skin
exposure

Use of flame­retardant
materials

anterior eye
part (cornea
and crystalline
lens)

Examination of
the ocular
fundus

indicate them with signs. Allow only authorized
personnel to enter there.

Set the light path avoiding the eye height of the workers.   

Make the optical path as short as possible to minimize
the number of bend times and block the light as much as
possible without crossing the optical path and walking
path.

Terminate the light path with a diffuse reflector or an
absorber with appropriate reflectance and heat
resistance.

An emergency stop switch which immediately stops
laser light emission

enables prompt check of laser light

laser emission aperture

area is open or a light path is unblocked.

Display the indication at the laser light emission
aperture.

Minimalize the laser light output when adjusting the
optical system.

the laser light.

Wear work clothes with as little skin exposure as
possible.

Wear clothes made of flame-retardant materials (in
particular, chemical fibers which melt and turn into
beads are not suitable).

maintenance.

workers, and changing laser equipment.

Perform examination of anterior eye part along with a
visual acuity examination when hiring or reassigning
workers.

Perform examination of ocular fundus along with a
visual acuity examination when hiring or reassigning
workers.

4 3B 3R

  

  

  

  

  

  

  

  

  

  

  

  

  

  

  

  

  

1

2M,
1M

*2

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

27

Measure Description Class of laser equipment

*1

Invisible Visible

2M,
1M

Others Indication Administrator

of laser
equipment

Hazardous
nature and
harmful effects,
and
precautions

Installation of
laser
equipment

Indication of high-voltage parts of
laser equipment

Prohibition of bringing hazardous
materials

Measures against hazardous
gases and dust

Medical examination and
treatment of workers who may
have been affected by laser light

4 3B 3R

Put the name of the laser equipment administrator to an
easily viewable place.

Put the indications of hazardous nature, harmful effects,
and precautions of laser light to an easily viewable
place.

Put a sign of laser equipment to an easily viewable
place.

Put a sign of high-voltage parts and take measures for
electrical shock prevention.

Prohibit the bringing of explosive or flammable
materials.

Measures established by the Japanese Industrial Safety
and Health Act

Prompt medical examination and treatment   

  

  

  

  

  

  

*1 Visible light indicates the light with wavelength of 400 to 700nm. Invisible light indicates the light with a wavelength range outside the

wavelength range of visible light.

*2 Measures need to be taken at the termination of the light path for the products from which laser lights are output in parallel.

For details on "Preventive measures against damage caused by laser light", refer to the website of the

Ministry of Health, Labour and Welfare.

28

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

FDA

■Export to the United States

When mounting the product on equipment and machinery, and exporting to the United States, it is subject to the laser

regulation standards at the U.S. FDA (Food and Drug Administration). The FDA standard PART1040 (Performance Standards

for Light-Emitting Products) was established to prevent beforehand the occurrence of damage to users of laser products. In

this standard, the regulation classifies laser products according to the level of hazard, and provides the safety measures for
classes. Refer to the sensor head specifications (light source). ( Page 39 Sensor Head Specifications)

■FDA-compliant product

The laser displacement sensor MH11 sensor heads are all FDA-compliant products.

Laser classes are classified according to the FDA Laser Notice No.50 and complied with IEC 60825-1.

■Label display

A warning label based on FDA standards is attached on this product.

For the warning label and label position, refer to the following.
( Page 16 Warning label)

1

1 BEFORE USING THE PRODUCT

1.2 Handling of Laser Products

29

1.3 Accessories and Products Sold Separately

Accessory

In the sensor head packaging, the following items are included. Before using the product, check that all items are included.

■MH11H01ANA

Item Quantity

Sensor head 1

Laser warning label (written in Japanese, English, Chinese, and Korean) 1

"Before Using the Product" (document) 1

■MH11HB0NA

Item Quantity

Sensor head 1

Laser warning label (written in Japanese and English) 1

Laser warning label (written in Chinese and Korean) 2

"Before Using the Product" (document) 1

■MH11HCNA

Item Quantity

Sensor head 1

Laser warning label (written in Japanese and English) 2

Laser warning label (written in Chinese and Korean) 2

"Before Using the Product" (document) 1

• If the attached label is hidden when the sensor head is installed in the device, attach the enclosed laser

warning label near the light emitting part.

• When MH11HB0NA or MH11HCNA is used in a Chinese- or Korean-speaking region, attach

the Chinese/Korean laser warning label.

ND filter (sold separately)

The following shows the recommended ND filter.

•MH11F98 ( Page 53 ND Filter Specifications)

30

1 BEFORE USING THE PRODUCT

1.3 Accessories and Products Sold Separately

Extension cable for sensor head (sold separately)

Extension cable for sensor head includes the following products. (All the cables are bending resistant.)

Model name Remarks

MH11C20EX Length: 2m, Weight: Approx. 0.2kg

MH11C50EX Length: 5m, Weight: Approx. 0.4kg

MH11C100EX Length: 10m, Weight: Approx. 0.7kg

MH11C200EX Length: 20m, Weight: Approx. 1.4kg

MH11C300EX Length: 30m, Weight: Approx. 2.0kg

1

1 BEFORE USING THE PRODUCT

1.3 Accessories and Products Sold Separately

31

1.4 Part Names

(1)

(3) (5)

(4)

(2)

No. Item Description

(1) Laser radiation indicator (LASER ON) Laser emission status is displayed.

(2) Measurement range indicator (RANGE) Measurement value status is displayed.

(3) Light emitting part Emits a laser beam.

(4) Light receiving part Receives light reflected from the measurement object.

(5) Warning label Shows the laser radiation position.

• On: Laser emission (green)

• Off: Laser stop

Take safety measures according to the laser classes. A laser beam is emitting when the laser
radiation indicator is on. ( Page 27 Preventive measures against damage caused by laser
light)

• On: Around the measurement center (yellow)

• Flashing: Within the measurement range (yellow)

• Off: Outside the measurement range
A measurement range indicator (RANGE) of the sensor head that is not specified in output
selection turns off.

Be aware of the description.

32

1 BEFORE USING THE PRODUCT

1.4 Part Names

1.5 Installation Method

Precautions

Before installing the sensor head, check the installation environment. (Page 12 Correct Usage Method)

With screw holes in two locations on the sensor head, use M5 screws to firmly fix the head in place.

The user is asked to provide M5 screws for installing.

• Set the tightening torque to 1.2Nm or less.

• The two screw holes are both 10mm deep and not through holes. Select screws with awareness of the screw length.

Installation direction

For more accurate measurement, and for more stable measurement, install the sensor head in the directions shown below in

relation to the measurement object.

1

■Direction in relation to a moving object

• When there are differences in materials or color

When performing measurement of a moving measurement target object with extremely different materials and colors, the

sensor head can be installed in the direction shown below to hold the measurement errors to a minimum.

• Measurement of a rotating target object

When performing measurement of a rotating target object, the sensor head can be installed as shown below to perform

measurement while suppressing the effects of up and down shaking or position drift of the target object.

1 BEFORE USING THE PRODUCT

1.5 Installation Method

33

• When there are step differences

When there are step differences in a moving target object measurement, the sensor head can be installed as shown below to

perform measurement while suppressing the effects of step edges.

34

1 BEFORE USING THE PRODUCT

1.5 Installation Method

■Measurement in narrow space or concave area

Black target

Black target

When performing measurement in a narrow space or hole, install the sensor head so that the light path from the light emitting

part to the light receiving part is not blocked.

■When the measurement object is black, or when light intensity is insufficient

When performing measurement of black target object with low reflectance, the light intensity entering the light receiving part

reduces, and the signal obtained from the linear image sensor becomes small, resulting in a decline in resolution.

In this case, perform installing as follows to boost the received light intensity.

■Specular reflection installing ■Approaching the measurement object

1

A specular reflection component with a large reflected light amount is received,
for improved accuracy.

The received light intensity is in inverse proportion to the square of the
distance from the measurement object. When the distance to the
measurement object is shortened, the received light intensity increases.

■When installing the sensor head on a wall surface

To avoid multiple reflected lights on a wall surface from entering the light receiving part, install the sensor head as shown

below. In addition, when the reflectance of the wall surface is high, setting to a non-glossy black color can be effective.

1 BEFORE USING THE PRODUCT

1.5 Installation Method

35

■Center of measurement and sensor head angle

90 degrees

Diffuse reflection line

Specular reflection line

90 degrees

Specular reflection line of MH11H080NA

Specular reflection line of MH11H050NA

• Diffuse reflection measurement

As shown below, install the sensor head so that the surface of light emitting part and light receiving part is parallel to the

measurement object.
For the measurement center distance and measurement range, refer to the sensor head specifications. ( Page 39 Sensor

Head Specifications)

• Specular reflection measurement

As shown below, install the sensor head so that the angles of the light emitting laser beam and light receiving laser beam to

the measurement object is left-right symmetrical.

When positioned correctly, the measurement object and specular reflection line (slope of sensor head) are perpendicular to

each other, as shown below. For the measurement center distance and measurement range, refer to the sensor head
specifications. ( Page 39 Sensor Head Specifications)

MH11H050NA and MH11H080NA have two installing surfaces. Note that the installing surfaces of the

specular reflection lines differ between MH11H050NA and MH11H080NA.

36

1 BEFORE USING THE PRODUCT

1.5 Installation Method

Attaching the ND filter

Precautions

ND filter

MH11H03B0NA,
MH11H050NA,
MH11H080NA,
MH11H110NA,
MH11H35C3NA

MH11H350NA

Attach the ND filter when the received light intensity is too large.

When attaching the ND filter, with screw holes in two locations on the sensor head, use the provided M2.64 bind screws to

firmly fix the filter in place. Set the tightening torque to 0.3Nm or less.

Attach the ND filter with care to avoid leaving fingerprints or scratches on the glass area. In addition, if it gets contaminated

with fingerprints or due to other reasons, use an optical cloth to wipe it down, so as to avoid scratching.

1

1 BEFORE USING THE PRODUCT

1.5 Installation Method

37

2 SPECIFICATIONS

This chapter describes the specifications for the sensor head and ND filter.

2.1 General Specifications

Item Specifications

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Storage ambient temperature -20 to 70

Operating ambient humidity 35 to 85%RH, no dew condensation

Storage ambient humidity 35 to 85%RH, no dew condensation

Vibration resistance Frequency: 10 to 55Hz

Shock resistance 196m/, X, Y, Z directions, 3 times each

Operating atmosphere No corrosive gas or flammable gas

Operating altitude 0 to 2000m

Installation location Incandescent lamp: Light receiving surface illuminance of 3000lx or less

Overvoltage category

Pollution degree

*1 This indicates the section of the power supply to which the equipment is assumed to be connected between the public electrical power

distribution network and the machinery within premises. Category  applies to equipment for which electrical power is supplied from
fixed facilities. The surge voltage withstand level for up to the rated voltage of 300V is 2500V.

*2 This index indicates the degree to which conductive material is generated in terms of the environment in which the equipment is used.

Pollution degree 2 is when only non-conductive pollution occurs. A temporary conductivity caused by condensing must be expected
occasionally.

*1

*2

Amplitude: 1.5mm
Sweep: X, Y, Z directions (120 minutes each)

Do not allow ambient light, such as sunlight or light with the same wavelength as laser beam, to enter
the light receiving part.

 or less

2 or less

38

2 SPECIFICATIONS

2.1 General Specifications

2.2 Sensor Head Specifications

MH11H

Export control

Beam spot

Special specifications

Laser class

Measurement center distance

Sensor head model name

The sensor head displays the model name as shown below.

Item Code Description

Export regulation NA Products not subject to export regulations

Beam spot S Small spot

LLine spot

Special specifications 0 Normal product

1 Special form product (8mm type)

2 Special form product (15mm type)

3 Wide measurement range product

Laser class A Class 1 (JIS/IEC/GB/FDA)

B Class 2 (JIS/IEC/GB/FDA)

C Class 3R (JIS/IEC/GB/FDA)

Measurement center distance 01 8mm/10mm/15mm type

03 30mm type

05 50mm type

08 85mm type

11 110m m ty p e

35 350mm type

2

Product specification notes

Measuring conditions are as follows unless otherwise specified: With the control module connected, power voltage of the
control module: 24VDC, ambient temperature: 20, sampling cycle: 40s, average times: 256, at measurement center

distance, measurement object: white ceramic (8mm type and 10mm type are aluminum vapor deposition surface reflection

mirror, and 15mm type is transparent glass), and digital measurement value.

2.2 Sensor Head Specifications

2 SPECIFICATIONS

39

10mm type

Item MH11H01A0SNA MH11H01A0LNA

Measurement method Specular reflection

Measurement center distance 10mm

Measurement range

Beam source Red semiconductor laser, Class 1 (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.02% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 250g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 The measurement range is limited between 0.1 and 1.0mm (in case the sampling cycle is 20s), or between 0.8 and 1.0mm (in case the

sampling cycle is 10s).

*2 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*3 The variation in ambient illuminance is 0.02% F.S. or less.
*4 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

1mm

Max output: 0.1mW, Emission peak wavelength: 658nm

*2

*4

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Approx. 20m Approx. 20  700m



Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*3

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

40

2 SPECIFICATIONS

2.2 Sensor Head Specifications

30mm type

Item MH11H03B0SNA MH11H03B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 30mm 26.4mm 30mm 26.4mm

Measurement range

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 250g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0 and 5.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0 and

4.6mm (in case the sampling cycle is 20s at specular reflection), between 3.8 and 5.0mm (in case the sampling cycle is 10s at diffuse

reflection), or between 3.6 and 4.6mm (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

5mm 4.6mm 5mm 4.6mm

Max output: 1mW, Emission peak wavelength: 658nm

Approx. 30m Approx. 30  1200m

0.4m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

2

2 SPECIFICATIONS

2.2 Sensor Head Specifications

41

50mm type (Class 2)

Item MH11H05B0SNA MH11H05B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 50mm 46mm 50mm 46mm

Measurement range

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0.5 and 5.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0.5 and

5.0mm (in case the sampling cycle is 20s at specular reflection), between 4.7 and 5.0mm (in case the sampling cycle is 10s at diffuse

reflection), or between 4.6 and 5.0mm (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

5mm

Max output: 1mW, Emission peak wavelength: 658nm

Approx. 70m Approx. 70  1000m

0.4m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

42

2 SPECIFICATIONS

2.2 Sensor Head Specifications

50mm type (Class 3R)

Item MH11H05C0SNA MH11H05C0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 50mm 46mm 50mm 46mm

Measurement range

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0.5 and 5.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0.5 and

5.0mm (in case the sampling cycle is 20s at specular reflection), between 4.7 and 5.0mm (in case the sampling cycle is 10s at diffuse

reflection), or between 4.6 and 5.0mm (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

5mm

Max output: 5mW, Emission peak wavelength: 658nm

Approx. 70m Approx. 70  1000m

0.4m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

2

2 SPECIFICATIONS

2.2 Sensor Head Specifications

43

85mm type (Class 2)

Item MH11H08B0SNA MH11H08B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 85mm 81.4mm 85mm 81.4mm

Measurement range

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.6m/average times 256, 0.25m/average times: 4096

Linearity 0.03% F.S. 0.1% F.S. 0.03% F.S. 0.1% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0 and 20mm (in case the sampling cycle is 20s at diffuse reflection), between 0 and 6mm

(in case the sampling cycle is 20s at specular reflection), between 18 and 20mm (in case the sampling cycle is 10s at diffuse

reflection), or unmeasurable (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

20mm 6mm 20mm 6mm

Max output: 1mW, Emission peak wavelength: 658nm

Approx. 100m Approx. 100  1200m

0.5m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

44

2 SPECIFICATIONS

2.2 Sensor Head Specifications

85mm type (Class 3R)

Item MH11H08C0SNA MH11H08C0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 85mm 81.4mm 85mm 81.4mm

Measurement range

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.6m/average times 256, 0.25m/average times: 4096

Linearity 0.03% F.S. 0.1% F.S. 0.03% F.S. 0.1% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0 and 20mm (in case the sampling cycle is 20s at diffuse reflection), between 0 and 6mm

(in case the sampling cycle is 20s at specular reflection), between 18 and 20mm (in case the sampling cycle is 10s at diffuse

reflection), or unmeasurable (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

20mm 6mm 20mm 6mm

Max output: 5mW, Emission peak wavelength: 658nm

Approx. 100m Approx. 100  1200m

0.5m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

2

2 SPECIFICATIONS

2.2 Sensor Head Specifications

45

110mm type (Class 2)

Item MH11H11B0SNA MH11H11B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 110mm 106.7mm 110mm 106.7mm

Measurement range

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.25m/average times: 4096

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0.5 and 15.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0.5 and

14.5mm (in case the sampling cycle is 20s at specular reflection), between 12.5 and 15.0mm (in case the sampling cycle is 10s at

diffuse reflection), or between 12.5 and 14.5mm (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

15mm 14.5mm 15mm 14.5mm

Max output: 1mW, Emission peak wavelength: 658nm

Approx. 80m Approx. 80  1700m

0.5m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

46

2 SPECIFICATIONS

2.2 Sensor Head Specifications

110mm type (Class 3R)

Item MH11H11C0SNA MH11H11C0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 110mm 106.7mm 110mm 106.7mm

Measurement range

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.25m/average times: 4096

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0.5 and 15.0mm (in case the sampling cycle is 20s at diffuse reflection), between 0.5 and

14.5mm (in case the sampling cycle is 20s at specular reflection), between 12.5 and 15.0mm (in case the sampling cycle is 10s at

diffuse reflection), or between 12.5 and 14.5mm (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

15mm 14.5mm 15mm 14.5mm

Max output: 5mW, Emission peak wavelength: 658nm

Approx. 80m Approx. 80  1700m

0.5m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

2

2 SPECIFICATIONS

2.2 Sensor Head Specifications

47

350mm type (Class 2)

Item MH11H35B0SNA MH11H35B0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 350mm 348mm 350mm 348mm

Measurement range

Beam source Red semiconductor laser, Class 2 (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 2.0m/average times: 256, 0.5m/average times: 4096

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 450g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0.0 and 50mm (in case the sampling cycle is 20s at diffuse reflection), between 0.0 and

42mm (in case the sampling cycle is 20s at specular reflection), between 36 and 50mm (in case the sampling cycle is 10s at diffuse

reflection), or between 36 and 42mm (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

50mm 42mm 50mm 42mm

Max output: 1mW, Emission peak wavelength: 658nm

Approx. 250m Approx. 250  3500m

1.4m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

48

2 SPECIFICATIONS

2.2 Sensor Head Specifications

350mm type (Class 3R)

MH11H35C0SNA, MH11H35C0LNA

Item MH11H35C0SNA MH11H35C0LNA

Diffuse reflection Specular reflection Diffuse reflection Specular reflection

Measurement method

Measurement center distance 350mm 348mm 350mm 348mm

Measurement range

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 2.0m/average times: 256, 0.5m/average times: 4096

Linearity 0.03% F.S.

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 450g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between 0.0 and 50mm (in case the sampling cycle is 20s at diffuse reflection), between 0.0 and

42mm (in case the sampling cycle is 20s at specular reflection), between 36 and 50mm (in case the sampling cycle is 10s at diffuse

reflection), or between 36 and 42mm (in case the sampling cycle is 10s at specular reflection).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.03% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection/specular reflection

50mm 42mm 50mm 42mm

Max output: 5mW, Emission peak wavelength: 658nm

Approx. 250m Approx. 250  3500m

1.4m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

2

2 SPECIFICATIONS

2.2 Sensor Head Specifications

49

MH11H35C3SNA, MH11H35C3LNA

Item MH11H35C3SNA MH11H35C3LNA

Measurement method

Measurement center distance 350mm

Measurement range

Beam source Red semiconductor laser, Class 3R (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 8m/average times: 256, 2m/average times: 4096

Linearity 0.04%F.S. (-200 to 0mm), 0.08%F.S. (0 to 200mm) (F.S. = 200mm)

Temperature characteristics 0.01% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Die-cast aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 Use the ND filter in case the amount of reflected beam is too large.
*2 The measurement range is limited between -70 and 200mm (in case the sampling cycle is 20s), or between 100 and 200mm (in case

the sampling cycle is 10s).
*3 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*4 The variation in ambient illuminance is 0.08% F.S. or less.
*5 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

*2

*3

*5

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Diffuse reflection

200mm

Max output: 5mW, Emission peak wavelength: 658nm

Approx. 400m Approx. 400  6500m

1.4m

Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*4

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

50

2 SPECIFICATIONS

2.2 Sensor Head Specifications

8mm type (Class 1)

Item MH11H01A1SNA MH11H01A1LNA

Measurement method Specular reflection

Measurement center distance 8mm

Measurement range

Beam source Red semiconductor laser, Class 1 (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.02% F.S.

Temperature characteristics 0.02% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Aluminum

Cable length 0.08m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 300g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 The measurement range is limited between 0.1 and 0.8mm (in case the sampling cycle is 20s), or between 0.7 and 0.8mm (in case the

sampling cycle is 10s).
*2 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*3 The variation in ambient illuminance is 0.02% F.S. or less.
*4 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

0.8mm

Max output: 0.1mW, Emission peak wavelength: 658nm

*2

*4

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Approx. 20m Approx. 20  700m



Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*3

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

2

2 SPECIFICATIONS

2.2 Sensor Head Specifications

51

15mm type (Class 1)

Item MH11H01A2SNA MH11H01A2LNA

Measurement method Specular reflection

Measurement center distance 15mm

Measurement range

Beam source Red semiconductor laser, Class 1 (JIS/IEC/GB/FDA)

Beam diameter

Light receiving element Linear image sensor

Resolution 0.25m/average times: 256

Linearity 0.02% F.S.

Temperature characteristics 0.02% F.S./

Safety distance (Normal ocular hazard
distance: NOHD)

Indicator Laser radiation

Protective structure IP67 (excluding the connector part)

Pollution degree 2

Insulation resistance With 500VDC megger, 20M or more (between all the terminals and case)

Withstand
voltage

Vibration resistance Endurance: 10 to 55Hz (cycle: 1 minute), double amplitude: 1.5mm

Shock resistance 196m/

Ambient illuminance 3000lx or less

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Operating altitude 0 to 2000m

Material Main body case, main body cover: Aluminum

Cable length 0.5m

Cable extension The cable length can be extended to full length of 30m with the extension cable for sensor head.

Weight Approx. 400g (including the sensor head cable)

For measuring conditions not specified, refer to the following.
Page 39 Product specification notes

*1 The measurement range is limited between 0.1 and 1.0mm (in case the sampling cycle is 20s), or between 0.8 and 1.0mm (in case the

sampling cycle is 10s).
*2 The figure shows the value at measurement center distance. It is determined by 1/e

Due to leak light outside the specified area, the reflectance around the detecting point may be higher than at the point and this may

affect the measurement value.
*3 The variation in ambient illuminance is 0.02% F.S. or less.
*4 Terminate a laser beam using a diffusely reflecting material or by an absorber regardless of the safety distance.

*1

1mm

Max output: 0.3mW, Emission peak wavelength: 658nm

*2

*4

indicator

Measurement range
indicator

Commercial
frequency

Impulse 1000V, 1.2/50s (between all the terminals and case)

Approx. 30m Approx. 30  1400m



Green light-emitting diode
ON during laser radiation

Yellow light-emitting diode
ON near the measurement center/Flashes within the measurement range/OFF outside the measurement range

500VAC, 1 minute (between all the terminals and case)

X, Y, Z directions, 2 hours each

X, Y, Z directions, 3 times each

*3

(illuminance at light receiving surface using incandescent lamp)

At storage: -20 to 70

At storage: 35 to 85%RH

Front cover: Glass

2

(approximately 13.5%) of center beam intensity.

52

2 SPECIFICATIONS

2.2 Sensor Head Specifications

2.3 ND Filter Specifications

Item MH11F98

Applicable sensor head MH11H03B0SNA, MH11H03B0LNA, MH11H050SNA, MH11H050LNA, MH11H080SNA, MH11H080LNA,

MH11H110SNA, MH11H110LNA, MH11H350SNA, MH11H350LNA, MH11H35C3SNA, MH11H35C3LNA

Reduced intensity rate 98%

Shock resistance 196m/ or more

Operating ambient temperature 0 to 45 (No dew condensation or icing allowed)

Operating ambient humidity 35 to 85%RH

Material Mounting support area: Aluminum

Weight Approx. 20g

Accessory Two mounting screws

*1 Attach and use the ND filter in case the amount of reflected beam from the measurement object is too large.

*1

X, Y, Z directions, 3 times each

At storage: -20 to 70

At storage: 35 to 85%RH

ND area: Glass

2

2 SPECIFICATIONS

2.3 ND Filter Specifications

53

3 MAINTENANCE AND INSPECTION

3.1 Maintenance

Maintenance instructions

■Sensor head cleaning

• Before cleaning the sensor head, always disconnect the power supply and stop laser emission.

• Errors may occur if the substance that refracts light such as oil and fingerprints, or the substance that blocks light such as

dust and dirt exists on the light emitting or receiving parts at the sensor head. Inspect the surfaces regularly and always

keep them clean.

• To remove large particles of dust, blow them away using a camera lens blower.

• To remove small particles of dust and fingerprints, use soft lens cleaning cloth or lens cleaner paper to lightly wipe them out.

• Use cloth moistened with a small amount of alcohol to wipe out tough dirt carefully.

• Molded resin is used in some parts of the sensor head. Do not use organic solvents such as thinner and benzene to wipe

dirt on it. Otherwise, molded resin may be dissolved.

• Do not wipe the glass portion of laser aperture too hard. Scratches on the glass may cause errors.

3.2 Inspection

Inspect the sensor head regularly to ensure performance and to use it under optimum conditions.

Major inspection items

• Check that the glass surface on the laser aperture is free from dust, dirt, or fingerprints.

• Check that the operating ambient temperature is within the range of 0 to 45.

• Check that the operating ambient humidity is within the range of 35 to 85%RH.

54

3 MAINTENANCE AND INSPECTION

3.1 Maintenance

MEMO

3

3 MAINTENANCE AND INSPECTION

3.2 Inspection

55

4 TROUBLESHOOTING

For details on occurring errors and troubleshooting when using a sensor head, refer to the following.
 MELSEC iQ-R Laser Displacement Sensor Control Module User's Manual (Application)

56

4 TROUBLESHOOTING

MEMO

4

4 TROUBLESHOOTING

57

APPENDICES

Reference
surface

(Measurement center
distance)

Light
emission
axis

Light
reception
axis

Measurement
range indicator
(yellow)

Laser emission
indicator
(green)

2-M5 mounting hole, Depth:8

(same as the hole at the diagonal position)

(Measurement center distance)

Light
emission axis

Light
reception
axis

2-M5 mounting hole
Depth:10
(same as the hole at
the diagonal position)

Measurement
range indicator
(yellow)

Laser emission
indicator
(green)

Appendix 1 External Dimensions

Sensor head

■10mm type (MH11H01A0SNA, MH11H01A0LNA)

(Unit: mm)

■30mm type (MH11H03B0SNA, MH11H03B0LNA)

• Diffuse reflection installation

(Unit: mm)

58

APPX
Appendix 1 External Dimensions

• Specular reflection installation

Specular reflection line

The reference surface for specular reflection installation

(Measurement center distance)

Light emission axis

Light reception axis

26

50

5

36°

74

64

ø6.6

6.2

13

9

75

90

64

69

5

(550)

(ø14.7)

(Measurement center distance)

Light
reception axis

2-M5 mounting hole
Depth:10
(same as the hole at the
diagonal position)

Laser emission indicator
(green)

Measurement range
indicator (yellow)

Light emission axis

46

18°

28.2

55.4

91.14.9

101

89

37.7

9

(3.8)

Specular reflection line

The reference surface for specular reflection installation

(Measurement center distance)

Light reception axis

Light emission axis

(Unit: mm)

■50mm type (MH11H05B0SNA, MH11H05B0LNA, MH11H05C0SNA, MH11H05C0LNA)

• Diffuse reflection installation

(Unit: mm)

• Specular reflection installation

(Unit: mm)

A

APPX

Appendix 1 External Dimensions

59

■85mm type (MH11H08B0SNA, MH11H08B0LNA, MH11H08C0SNA, MH11H08C0LNA)

26

85

5

28°

74

64

6.2

13

9

75

90

64

69

5

ø6.6

(ø14.7)

(550)

(Measurement center distance)

Light
reception axis

2-M5 mounting hole
Depth:10
(same as the hole at the
diagonal position)

Laser emission indicator
(green)

Measurement range
indicator (yellow)

Light emission axis

81.4

14°

23.1

52.5

88.35.4

98.7

86.3

44

9

(3.5)

(Measurement center distance)

Light reception axis

Light emission axis

Specular reflection line

The reference surface for specular reflection installation

• Diffuse reflection installation

(Unit: mm)

• Specular reflection installation

(Unit: mm)

60

APPX
Appendix 1 External Dimensions

■110mm type (MH11H11B0SNA, MH11H11B0LNA, MH11H11C0SNA, MH11H11C0LNA)

Light
reception axis

Measurement
range indicator
(yellow)

(Measurement center distance)

2-M5 mounting hole
Depth:10

(same as the hole at
the diagonal position)

Light emission axis

Laser emission indicator
(green)

(Measurement center distance)

Light emission axis

Light reception axis

Specular reflection line

The reference surface for specular reflection installation

Light reception axis

Measurement
range indicator
(yellow)

(Measurement center distance)

2-M5 mounting hole
Depth:10

(same as the hole at
the diagonal position)

Laser emission indicator
(green)

Light emission axis

• Diffuse reflection installation

(Unit: mm)

• Specular reflection installation

(Unit: mm)

■350mm type (MH11H35B0SNA, MH11H35B0LNA, MH11H35C0SNA, MH11H35C0LNA)

• Diffuse reflection installation

(Unit: mm)

A

APPX

Appendix 1 External Dimensions

61

• Specular reflection installation

Specular reflection line

The reference surface for specular reflection installation

(Measurement center distance)

Light emission axis

Light reception axis

26

350

5

8.8°

74

64

ø6.6

6.2

13

9

75

90

64

69

5

(ø14.7)

(550)

(Measurement center distance)

Light reception axis

2-M5 mounting hole
Depth:10
(same as the hole at
the diagonal position)

Laser emission indicator
(green)

Measurement range
indicator (yellow)

Light emission axis

(Unit: mm)

■350mm type (MH11H35C3SNA, MH11H35C3LNA)

(Unit: mm)

APPX

62

Appendix 1 External Dimensions

■8mm type (MH11H01A1SNA, MH11H01A1LNA)

33.5

17

135

24

16

12

45

32

41

127

27

8

ø4.5

ø8

10

2

17

9

7

4

(ø14.7)

ø6.6

62

64.5

5

18

39

27

80

84°

2-ø4.5 (mounting hole)

Light
emission
axis

Light
reception
axis

Measurement
range indicator
(yellow)

Laser emission
indicator (green)

30

38

12

61

49

57

127

135

17

103

38

28

15

50

ø4.5

ø8

18

8

4

(550)

ø6.6

(ø14.7)

95

19

26

34.5

5

92.5

100°

2-ø4.5 (mounting hole)

Measurement
range indicator
(yellow)

Laser emission
indicator (green)

Light
emission
axis

Light
reception
axis

(Unit: mm)

■15mm type (MH11H01A2SNA, MH11H01A2LNA)

(Unit: mm)

A

APPX

Appendix 1 External Dimensions

63

ND filter (MH11F98)

2

25

2

15

22

7

7

11

22 15

2

2

25

(1.6)

(1.6)

9

(Unit: mm)

• Diffuse reflection installation (ND filter attached) (MH11H03B0SNA, MH11H03B0LNA)

(Unit: mm)

• Specular reflection installation (ND filter attached) (MH11H03B0SNA, MH11H03B0LNA)

(Unit: mm)

Installing dimensions are also the same in the applicable sensor heads other than the MH11H03B0SNA and

MH11H03B0LNA.

64

APPX
Appendix 1 External Dimensions

Appendix 2 Characteristics

ø0.12

ø0.02 ø0.12

0.55 0.70 0.85

0.12 0.02 0.12

Measurement range

Measurement center distance

MH11H01A0SNA
Small spot

MH11H01A0LNA
Line spot

0.22

0.03 0.22

0.85 1.2 1.55

0.18

0.18

0.03

0.03

0.18

0.18

Measurement range

Measurement center distance

MH11H03B0SNA
Small spot

MH11H03B0LNA
Line spot

0.13

0.07 0.13

0.7 1.0 1.3

0.11

0.11

0.07

0.07

0.11

0.11

Measurement range

Measurement center distance

MH11H050SNA
Small spot

MH11H050LNA
Line spot

Beam diameter

The following figures show the beam diameter of each sensor head type.

■10mm type

(Unit: mm)

■30mm type

(Unit: mm)

■50mm type

(Unit: mm)

A

APPX

Appendix 2 Characteristics

65

■85mm type

0.4

0.1 0.4

0.4 1.2 2.0

0.25

0.25

0.1

0.1

0.25

0.25

Measurement range

Measurement center distance

MH11H080SNA
Small spot

MH11H080LNA
Line spot

0.24

0.08 0.24

1.2 1.7 2.2

0.2

0.2

0.08

0.08

0.2

0.2

Measurement range

Measurement center distance

MH11H110SNA
Small spot

MH11H110LNA
Line spot

0.35

0.25 0.35

2.8 3.5 4.2

0.35

0.35

0.25

0.25

0.35

0.35

Measurement range

Measurement center distance

MH11H350SNA
Small spot

MH11H350LNA
Line spot

(Unit: mm)

■110mm type

(Unit: mm)

■350mm type (MH11H35B0SNA, MH11H35B0LNA, MH11H35C0SNA, MH11H35C0LNA)

(Unit: mm)

66

APPX
Appendix 2 Characteristics

■350mm type (MH11H35C3SNA, MH11H35C3LNA)

1.5

0.4 1.5

1.0 6.5 12.0

0.8

0.8

0.4

0.4

0.8

0.8

Measurement range

Measurement center distance

MH11H35C3SNA

Small spot

MH11H35C3LNA

Line spot

ø0.12

0.55

0.12

0.70 0.85

0.120.02

ø0.12ø0.02

Measurement range

Measurement center distance

MH11H01A1SNA
Small spot

MH11H01A1LNA
Line spot

1.25

0.14

ø0.14 ø0.14

1.40

0.03

ø0.03

1.55

0.14

Measurement range

Measurement center distance

MH11H01A2SNA
Small spot

MH11H01A2LNA
Line spot

(Unit: mm)

■8mm type

(Unit: mm)

■15mm type

(Unit: mm)

A

APPX

Appendix 2 Characteristics

67

Mutual interference area

11

1

313

2

1

11

24.5

35.5

9

10

3213

5

2

10

45

55

9

35

6

3

24

63

40

65

105

When two or more diffuse reflection sensor heads are installed side by side, mutual interference occurs if the laser spots from

other sensor heads fall within the shaded areas in the following figures. Install sensor heads so that the laser spots from other

sensor heads fall outside the shaded areas.

■30mm type (MH11H03B0SNA, MH11H03B0LNA)

(Unit: mm)

■50mm type (MH11H05B0SNA, MH11H05B0LNA, MH11H05C0SNA, MH11H05C0LNA)

(Unit: mm)

■85mm type (MH11H08B0SNA, MH11H08B0LNA, MH11H08C0SNA, MH11H08C0LNA)

(Unit: mm)

68

APPX
Appendix 2 Characteristics

■110mm type (MH11H11B0SNA, MH11H11B0LNA, MH11H11C0SNA, MH11H11C0LNA)

9

16

3220

5

2

30

95

125

9

30

523

3

100

400

300

33

88160

1147

18

150

400

550

(Unit: mm)

■350mm type (MH11H35B0SNA, MH11H35B0LNA, MH11H35C0SNA, MH11H35C0LNA)

(Unit: mm)

■350mm type (MH11H35C3SNA, MH11H35C3LNA)

(Unit: mm)

If beam from the other sensor head enters the mutual interference area when two sensor heads are

connected, turn on the interference prevention function.

A

Appendix 2 Characteristics

APPX

69

Appendix 3 How to Confirm Serial Number and

(1)

(2)

(3)

Function Version

The serial number and function version of the sensor head can be confirmed by the rating plate on the side of the product.

(1) Serial number
(2) Function version
(3) Applicable standard symbol

70

APPX
Appendix 3 How to Confirm Serial Number and Function Version

Appendix 4 Export Regulations by Japanese

Government

The products have specifications not subject to export regulations by the Foreign Exchange and Foreign Trade Law.

A

APPX

Appendix 4 Export Regulations by Japanese Government

71

INDEX

A

Attaching the ND filter . . . . . . . . . . . . . . . . . . . . 37

C

Control module . . . . . . . . . . . . . . . . . . . . . . . . . 11

E

Engineering tool . . . . . . . . . . . . . . . . . . . . . . . . 11

F

F.S. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

FDA. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

J

JIS/IEC/GB. . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

L

Laser displacement sensor . . . . . . . . . . . . . . . . 11

M

Measurement center distance . . . . . . . . . . . . . . 11

Measurement range . . . . . . . . . . . . . . . . . . . . . 11

N

ND filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

S

Sensor head. . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Setting tool. . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

72

MEMO

I

73

REVISIONS

*The manual number is given on the bottom left of the back cover.

Revision date *Manual number Description

June 2019 SH(NA)-082023ENG-A First edition

Japanese manual number: SH-082022-A

This manual confers no industrial property rights of any other kind, nor does it confer any patent licenses. Mitsubishi Electric Corporation cannot be held
responsible for any problems involving industrial property rights which may occur as a result of using the contents noted in this manual.

 2019 MITSUBISHI ELECTRIC CORPORATION

74

WARRANTY

Please thoroughly read the following product warranty descriptions before using this product.

1. Warranty Period and Warranty Coverage

If any failures or defects (hereinafter referred to as "failures") - for which Mitsubishi is held responsible - occur in the
product during the warranty period, Mitsubishi shall repair the product free of charge through sales representatives or
Mitsubishi Service Company. However, the customer shall be liable for all expenses required to send an engineer(s) for
onsite domestic or international repairs. Mitsubishi shall not be liable for any onsite re-calibration and test operations
involved in the replacement of failed modules.
[Warranty Period]
The warranty period of the product shall be for one year after the date of purchase or delivery to the designated place.
The maximum distribution period shall be six (6) months after product shipment from Mitsubishi, and the maximum
warranty period shall be eighteen (18) months after manufacture. The warranty period for repair parts shall not exceed
the warranty period before repairs.
[Warranty Coverage]

(1) A primary failure diagnosis should generally be performed at the customer's company. However, this can be

delegated to Mitsubishi or Mitsubishi's service network at the request and expense of the customer. In this case,
failures caused by Mitsubishi shall be free of charge.

(2) The operating condition/method and the operating environment shall be limited to cases where the product is being

used in normal conditions which follow the precautions and conditions described within the instruction manual, the
user's manual, and the caution label on the product, etc.

(3) The following cases shall NOT be free of charge even if the warranty period is still valid.

1. Failures due to improper storage or handling, carelessness or faults, as well as failures caused by the customer's
hardware or software designs.

2. Failures due to modifications performed on the product by the customer without prior consent from Mitsubishi.

3. Failures when Mitsubishi's products are mounted and used in the customer's devices, and could have been
avoided if the customer's devices had functions/constructions considered as safety mechanisms or industry
standards which should be provided according to the legal regulations the customer's device is subject to.

4. Failures which could have been avoided when servicing/replacing consumable parts specified in the instruction
manual, etc.

5. Failures due to external factors caused by force majeure such as fires, abnormal voltages, etc., as well as, natural
disasters such as earthquakes, thunderstorms, winds and floods, etc.

6. Failures due to causes which could not be predicted based on the level of science and technology at the time the
product was shipped.

7. Other failures found not to be the responsibility of Mitsubishi or admitted to be outside Mitsubishi's responsibilities
by the customer.

2. Onerous Repair Period after Production Discontinuation

(1) Onerous repairs shall be accepted by Mitsubishi for up to seven (7) years after the discontinuation of a product.

Production discontinuations shall be announced in Mitsubishi's Technical Bulletins, etc.

(2) The product shall no longer be supplied after the product has been discontinued (including spare parts).

3. Overseas services

For overseas purchases, repairs shall be accepted through Mitsubishi's FA center for each region. However repair
conditions for each FA center may differ.

4. Warranty liability exceptions for opportunity losses, secondary losses, etc.

Regardless of the validity of the warranty period, Mitsubishi shall not be liable for: incidences caused by events which
could not be attributed to the responsibilities of Mitsubishi; opportunity losses to the customer due to the failure of
Mitsubishi's products; profit losses; losses caused by foreseeable or unforeseeable special circumstances; secondary
losses; compensation for accidents; damages to products not from Mitsubishi; and compensation for replacement jobs,
the re-calibration of onsite machinery, start-up operations and other jobs done by the customer.

5. Products specification changes

The specifications given in the catalogs, manuals or technical documents are subject to change without prior notice.

75

TRADEMARKS

SH(NA)-082023ENG-A

The company names, system names and product names mentioned in this manual are either registered trademarks or

trademarks of their respective companies.



In some cases, trademark symbols such as '

' or '' are not specified in this manual.

76

SH(NA)-082023ENG-A(1906)MEE

Specifications subject to change without notice.

When exported from Japan, this manual does not require application to the
Ministry of Economy, Trade and Industry for service transaction permission.

HEAD OFFICE : TOKYO BUILDING, 2-7-3 MARUNOUCHI, CHIYODA-KU, TOKYO 100-8310, JAPAN
NAGOYA WORKS : 1-14 , YADA-MINAMI 5-CHOME , HIGASHI-KU, NAGOYA , JAPAN

MODEL: MH11-U-SH-E
MODEL CODE: 13JX93