MicroE 1000V User Manual

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Mercury™1000V - Vacuum Rated

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Manual No. IM-M1000V Rev S5

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MicroE Systems was founded to advance encoder technology to a level never before achieved. Our objective was to design encoder systems that would be small enough to fit into densely packed OEM equipment designs, affordable enough for cost-sensitive applications and easy enough to enable installation, setup and alignment by assemblers with little training. We are pleased to say that all of these goals have been realized with the introduction of the Mercury family of encoders.

Sensor shown actual size

M10

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Covered by the following patents: US 5,991,249; EP 895,239; JP 3,025,237; US 6,897,435; and EP 1,451,933. Additional patents and patents pending may apply.

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Follow standard ESD precautions. Turn power off before connecting the sensor. Do not touch the electrical pins without static protection such as a grounded wrist strap.

Do not touch the glass scale unless you are wearing talc-free gloves or finger cots. Please read this installation manual for full instructions.

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This product is sold solely for use as a component (or replacement) in an electronic product; therefore it is not required to, and does not comply with, 21 CFR 1040.10 and 1040.11 which pertain to complete laser products. The manufacturer of the complete system-level electronic product is responsible for complying with 21 CFR 1040.10 and 1040.11 and for providing the user with all necessary safety warnings and information.

MicroE encoders contain an infrared laser diode or diodes. Emitted invisible laser radiation levels have been measured to be within the CDRH Class 1 range, which is not considered hazardous; however, to minimize exposure to the diverging beam, the encoder sensor should be installed in its operational configuration in close proximity to the encoder scale before power is applied.

• Invisible laser radiation; wavelength: 850 nm

• Max power 2.4 mW CW (4.8 mW CW for Mercury II™)

• CAUTION – The use of optical instruments with this product will increase eye hazard. DO NOT VIEW DIRECTLY WITH OPTICAL INSTRUMENTS (MICROSCOPES, EYE LOUPES OR MAGNIFIERS).

• All maintenance procedures such as cleaning must be performed with the MicroE encoder turned off.

• Do not insert any reflective surface into the beam path when the encoder is powered.

• Do not attempt to service the MicroE encoder.

INVISIBLE LASER RADIATION

DO NOT VIEW DIRECTLY WITH OPTICAL

INSTRUMENTS

(MICROSCOPES, EYE LOUPES OR

MAGNIFIERS)

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SYSTEM ILLUSTRATION PAGE

Encoder with Linear scale 2 Encoder with Rotary scale 3

INSTALLATION INSTRUCTIONS

Encoder System Mounting - Linear 4 Encoder System Alignment - Linear 5 Establishing an Index - Linear 5 Centering the Index & Calibration - Linear 5 Encoder System Mounting - Rotary 6 Encoder System Alignment - Rotary 7 Establishing an Index - Rotary 7 Centering the Index & Calibration - Rotary 7

REFERENCE SECTION

Installation of Linear Scales 8 Grounding Instructions 9 Recommendations for Power 9 Recommended Interface Termination 10 Customer Interface Cable Requirements 10

ENCODER TROUBLESHOOTING

Selected Topics 11 Cleaning Scales 11 Contact MicroE Systems Back Cover

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Mercury 1000V Analog Encoder System

with Linear scale

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End locator pin

Mounting screws & flat washers (2 needed per screw)

Bracket mounting holes (2)

Optional sensor benching pins (3)

Double shielded cable

Typical user-supplied sensor mounting bracket

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Shown with linear scale

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Scale reference datum; example shown with benching pins

SmartPrecision Alignment Tool SS-AT 1000

Sensor mounting holes (2)

15 pin standard D-sub connector

Sensor

Linear glass scale (shown mounted on a linear slide)

Vacuum wall

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Mercury 1000V Analog Encoder System

with Rotary scale

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Double shielded cable

Top reflective rotary scale

Rotary glass scale

sensor

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Mounting screws & flat washers (2 needed per screw)

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Shown with rotary scale

15 pin standard D-sub connector

Vacuum compatable cable

Flying leads

Vacuum wall

SmartPrecision Alignment Tool SS-AT 1000

Vacuum wall

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Installation Instructions

Linear Encoders

Attach the scale to the base slide. Reference the preferred datum on the interface drawing for either end or center index orientation.

Depending on the mounting method, attach the scale to the slide with adhesive. Refer to pg. 8 for details.

Be sure the grating surface of the scale faces the sensor. Insure that there is no contact between these surfaces or damage may result.

Be sure the source power is off before connecting the SmartPrecision Alignment Tool.

Connect the M1000V to the SmartPrecision Alignment Tool

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To M1000V encoder

To Power Supply

Connect the Alignment Tool to the Computer Interface Adapter. Turn on the power.

Install the sensor on your mounting surface referencing the appropriate datum surface as shown on the interface drawing. Use 2 washers per mounting screw.

Benching pins may be used to locate the sensor if the system mechanical tolerances are adequate. See data sheet for alignment tolerances, or keep mounting screws loose for sensor alignment if benching pins are not used.

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Installation Instructions

Linear Encoders

Proper sensor alignment may require minor adjustments to the sensor position with respect to the scale. This can be performed easily using the SmartPrecision Alignment Tool as illustrated below.

The red, yellow, or green LED will light depending on sensor alignment. Slowly move the sensor by allowing it to slide on the mounting surface until the green LED, is illuminated. Optimal alignment will be displayed as a “Bright Green” LED.

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: Confirm that the green LED blinks when passing over the index.

If not, readjust the sensor in the Y direction and repeat the above procedure. When alignment is completed, tighten the sensor mounting screws.

Confirm green over the full range of motion by sliding the scale past the sensor. The “green” LED must remain on over the entire range. If not aligned over the entire range of motion, loosen the sensor mounting screws and repeat step 5.

To align the sensor, move it in the Y or θ

direc-

tions.

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This procedure must be completed for proper system operation each time the sensor is aligned.

Push the Calibration button inside the SS-AT 1000 body with a small diameter shaft, such as

a bare cotton swab. This will set the gain and offset of the M1000V, producing a 1V

output*.

The Power/Calibration indicator will flash

continuously. Move the scale past the sensor over a distance of at least 7mm (1/4”). Do not run off the end of the scale. When the calibration procedure is complete, the Power/Calibration LED stops flashing.

±15% (Differential) across 120Ω resistor

Power/

Calibration

indicator

Calibration

button

Proper

Alignment

indicator

SmartPrecision Alignment Tool

Improper

Alignment LED

Red

Power/

Calibration

Power/

Calibration

Power/

Calibration

Improved

Alignment LED

Yellow

Proper

Alignment LED

Green

Optimal

Alignment LED

Bright Green

15 pin D

connector

to sensor

15 pin D

connector

to sensor

15 pin D

connector

to sensor

SmartPrecision Alignment Tool

SSAT1000

SmartPrecision Alignment Tool

SSAT1000

SmartPrecision

Alignment Tool

SSAT1000

SmartPrecision Alignment Tool

SSAT1000

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Installation Instructions

Rotary Encoders

Attach your hub/scale assembly to the rotary device. Refer to the interface drawing. The reflective surface of the scale must face the sensor.

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Be sure the source power is off before connecting the SmartPrecision Alignment Tool.

Connect the M1000V encoder to the SmartPrecision Alignment Tool.

To M1000V encoder

To Power Supply

Connect the Alignment Tool to the Computer Interface Adapter. Turn on the power.

Install the sensor on your mounting surface referencing the appropriate datum surface as shown on the interface drawing. Use 2 washers per mounting screw.

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This procedure must be completed for proper system operation each time the sensor is aligned.

Push the Calibration button inside the SS-AT 1000 body with a small diameter shaft, such as

a bare cotton swab. This will set the gain and offset of the M1000V, producing a 1V

output*.

The Power/Calibration

indicator will flash continuously. Move the scale past the sensor over a distance of at least 7mm (1/4”). Do not run off the end of the scale when using a segment scale. When the calibration procedure is complete, the Power/Calibration LED stops flashing.

±15% (Differential) across 120Ω resistor

Installation Instructions

Rotary Encoders

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Proper sensor alignment may require minor adjustments to the sensor position with respect to the scale. This can be performed easily using the SmartPrecision Alignment Tool as illustrated below.

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: Confirm that the green LED blinks when passing over

the index. If not, readjust the sensor in the Y direction and repeat the above procedure. When alignment is completed, tighten the sensor mounting screws.

To align the sensor, move it in the Y or θz directions.

Power/

Calibration

indicator

Calibration

button

Proper

Alignment

indicator

SmartPrecision Alignment Tool

Improper

Alignment LED

Red

Power/

Calibration

Power/

Calibration

Power/

Calibration

Improved

Alignment LED

Yellow

Proper

Alignment LED

Green

Optimal

Alignment LED

Bright Green

15 pin D

connector

to sensor

15 pin D

connector

to sensor

15 pin D

connector

to sensor

SmartPrecision Alignment Tool

SSAT1000

SmartPrecision Alignment Tool

SSAT1000

SmartPrecision

Alignment Tool

SSAT1000

SmartPrecision Alignment Tool

SSAT1000

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Reference Section

Installation of Linear Scales

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MicroE Systems

0.2L

0.6L

0.2L

Benching pins

Positioning the Scale

Note: Before beginning mounting procedure, use talc-free gloves or finger cots to handle the scales. Also use vacuum compatible handling procedures and materials . "Benching" the scale to the system means aligning the scale by means of benching pins. Pin locations are described on the appropriate interface drawing. Two benching pins are recommended on the long side of the scale and one at the end as shown . This is marked datum A on the interface drawing.

Position the benching pins in from either end. 20% of the overall scale length is the recommended location from the edge.

Be sure the benching pins do not extend too high in the Z direction to prevent mechanical interference with the sensor or sensor mount.

End Benching Pin

Mounting the Scale

End Benching Pin

Hard epoxy at one corner, this end only.

Suggested Epoxy and Clamp Mounting

Make sure the mounting surface is clean and dry.

Scale clamps (customer supplied) may be used to mechanically secure the scale. The clamps should allow for thermal expansion of the scale and mounting surface. Make sure that the clamps do not interfere with the sensor or sensor mount. Note: adhesive used on clamps supplied by MicroE is not vacuum rated.

Side view showing suggested scale clamps and scale. Space clamps every 75mm on scales over 150 mm in length.

Apply a hard, vacuum compatible epoxy to the end of the scale at the end benching pin.

MicroE Systems

Align the scale by placing the edges against the benching pins.

Benching pins

Scale clamp

Mounting clamp

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Installation Reference Guide

Mercury encoders require a minimum of 4.75V DC continuously. When designing circuits and extension cables to use Mercury encoders, be sure to account for voltage loss over distance and tolerances from the nominal supply voltage so that at least 4.75V DC is available to the Mercury encoder under all operating conditions. The input voltage should not exceed 5.25V DC.

Grounding Instructions for Mercury 1000V Encoder Systems

Recommendations for Power

Electrically conductive mechanical connection (as supplied by MicroE Systems).

Do not ground shroud.

Shielding Instructions

Customer-installed connectors at the vacuum chamber wall must electrically shield the signal wires from Electro Magnetic Interference, Radio Frequency Interference and Electro Static Discharge. The connectors' shielding must completely surround the wires with no gaps, including intimate electrical contact 360 degrees around the outer cable shields at the ends of the cables supplied with flying leads. The inner shield of the cable that is attached to the SmartPrecision electronics module must be electrically isolated from the

outer shield.

Important Note

MicroE Systems recommends testing the motion subsystem after the Mercury 1000V encoders are installed using your vacuum throughwall connectors. The testing should prove that the motion system has sufficient immunity to Electro Magnetic Interference, Radio Frequency Interference and Electro Static Discharge according to the application requirements.

Correct grounding can be implemented in several ways depending on how the customer implements the connections through the vacuum chamber wall. The diagram below is suitable where:

•The outer cable shields are electrically isolated from each other at the vacuum chamber wall.

•The sensor is mounted with good electrical contact to a well-grounded surface. (Note that an electrical path through bearings will not result in a well-grounded sensor.)

Note: specific applications may require a different grounding scheme. Contact MicroE Systems for applications support.

Connector pins

Power

Supply

5 Volts

0 Volts

Vacuum Chamber wall

Note: Specific applications may require a different grounding scheme. Please contact MicroE Systems Application grouip with details for assistance.

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Customer Interface Cable Requirements

Customer cables that interface to Mercury series encoders must have the following characteristics:

• Twisted pair signal wiring.

• Characteristic impedance of 100-120 ohms.

• Sufficient wire gauge to meet the minimum voltage requirement at the encoder, for example 24AWG gauge wire for a 2m length cable. An example of acceptable cables with 24 AWG gauge wire and 4 twisted pairs are Belden 9831, 8104, 8334 and 9844 or other manufacturer's equivalents.

• Single shield cable with a minimum of 90% coverage. Note that a double shielded cable may be required in high-noise applications.

Signal Wiring:

Each differential signal should be connected to a corresponding twisted pair as follows:

Shield Termination:

The customer's cable shield should be in 360° contact with the connector shroud and the connector shell to provide complete shielding. The connector shell should be metal with conductive surfaces. Suggested metal connector shells for use with Mercury 3500, 3000, 3000Si, and 2000 encoders: AMP 748676-1 or equivalent; for Mercury 1000 and 1500S encoders: AMP 745172-3, -2, or -1 where the dash number is dependent on the customer's outside cable diameter. The shield should be terminated as illustrated in the following diagram.

Customer Differential Amplifier

B-

IW-

120 ohm

B+

A+

120 ohm

IW+

A-

Recommended Interface Termination

Sine+

Sine-

Cosine+

Cosine-

IW+

IW-

Fold braided shield back over jacket. Example shows double-shielded cable. Dimensions shown are for illustration only.

Mercury 1000V Encoders Signal Twisted Pair

Sine+ Pair 1

SineCosine+ Pair 2 Cosine-

Index+ Pair 3

Index-

+5V Pair 4 GND

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Troubleshooting

Problem

The Power/Calibration indicator will not come on.

Solution

• Make sure the M1000 15-pin D connector is fully seated and connected.

• Confirm that +5 Volts DC is being applied to pin 12 on the M1000 15-pin D connector and that pin 13 is connected to ground.

Problem

Can't get the SmartPrecision Alignment Tool "Signal" LEDs better than red or yellow; or the green, “ green” indicator doesn't stay illuminated over the full length of the scale.

Solution

• Verify that the sensor has been aligned to the scale and that the mounting screws are tight. Check the dimensions for the mechanical mounting holes (and clamps if any) to make sure that the sensor is correctly located over the scale. Refer to appropriate the interface drawing.

• Check that the scale is firmly mounted and can't jiggle or move in other than the intended direction.

• Make sure that the scale is clean over its entire length or circumference.

Problem

The green Power/Calibration indicator is flashing unexpectedly.

Solution

• Part of the normal setup procedure is to activate the SmartPrecision Alignment Tool calibration process by pressing the recessed button on the SmartPrecision Alignment Tool connector body. The Power/Calibration indicator will flash until calibration is complete.

General Particle Removal

Blow off the contamination with nitrogen, clean air, or a similar gas.

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Contamination Removal

Use a lint-free cleanroom wipe or cotton swab dampened with isopropyl alcohol or acetone only to wipe the surface clean. Handle the scale by the edges. Do not scrub the scale.

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World Headquarters: 125 Middlesex Turnpike • Bedford • MA 01730 USA

www.microesys.com • [email protected] • T. [781] 266-5700 • F. [781] 266-5112

Contacting MicroE Systems

Thank you for purchasing a MicroE Systems product. You should expect the highest level of quality and support from MicroE. If you want to download the Mercury Encoder Installation Manual, Data Sheet or Interface Drawing, browse www.microesys.com and click on the Mercury Encoders button.