Page 1
PHOENIX Quadro
PHOENIX Quadro dry
Helium leak detector
Operating instructions
Catalog Numbers
250000V02 (EU)
251000V02 (US)
251100V02 (JP)
250001V02 (dry, all countries)
300700189_002_C1
Page 2
Table of Contents LEYBOLD
Table of Contents
1 About these instructions ...................................................................................................................................6
1.1 Target groups ...........................................................................................................................................6
1.2 Warnings...................................................................................................................................................6
2 Safety ...............................................................................................................................................................7
2.1 Intended use .............................................................................................................................................7
2.2 Owner requirements .................................................................................................................................7
2.3 Duties of the operator ...............................................................................................................................8
2.4 Dangers ....................................................................................................................................................8
3 Shipment, Transport, Storage ........................................................................................................................10
4 Description......................................................................................................................................................13
4.1 Function ..................................................................................................................................................13
4.2 Operation modes ....................................................................................................................................13
4.2.1 Operation mode “Vacuum”.......................................................................................................... 13
4.2.2 Operation mode “Sniffing”........................................................................................................... 13
4.3 Device setup ...........................................................................................................................................14
4.3.1 Overall device .............................................................................................................................14
4.3.2 Operating unit ............................................................................................................................. 15
4.3.2.1 START button ....................................................................................................................16
4.3.2.2 STOP button ......................................................................................................................16
4.3.2.3 ZERO button ......................................................................................................................17
4.3.2.4 Meaning of the button LEDs...............................................................................................17
4.3.2.5 Meaning of the status LED.................................................................................................18
4.3.2.6 Assembly of the touchscreen .............................................................................................19
4.3.3 Vacuum connections................................................................................................................... 20
4.3.3.1 Inlet ....................................................................................................................................20
4.3.3.2 Exhaust ..............................................................................................................................21
4.3.3.3 Connection for venting and purging/gas ballast .................................................................21
4.3.4 Connections for accessories and control signals........................................................................ 23
4.3.5 Markings on the device ...............................................................................................................24
4.4 Technical data ........................................................................................................................................24
5 Installation ......................................................................................................................................................27
5.1 Setup ......................................................................................................................................................27
5.2 For oil-sealed backing pumps, remove the plug .....................................................................................29
5.3 Connecting the leak detector to the power supply system .....................................................................29
5.4 Check the Operation of the Device.........................................................................................................30
6 Operation........................................................................................................................................................32
ii PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 3
LEYBOLD Table of Contents
6.1 Switch ON...............................................................................................................................................32
6.2 Basic settings..........................................................................................................................................32
6.2.1 Set language on the user interface .............................................................................................32
6.2.2 Setting date, time and time zone ................................................................................................ 33
6.2.3 User profile settings ....................................................................................................................33
6.2.3.1 Overview of Rights Groups ................................................................................................33
6.2.3.2 Select, modify, create user profile......................................................................................33
6.2.3.3 Modify Personal Settings ...................................................................................................34
6.2.4 Switch off Automatic Login.......................................................................................................... 35
6.2.5 Switch on Automatic Login.......................................................................................................... 35
6.2.6 Presentation of the measurement screen ...................................................................................36
6.2.6.1 Changing the presentation of the line graph ......................................................................36
6.2.6.2 Changing the presentation of the bar graph.......................................................................37
6.2.6.3 Change general display settings ........................................................................................37
6.2.7 Change units............................................................................................................................... 38
6.2.8 Change audio settings ................................................................................................................38
6.2.9 Change the protection settings ...................................................................................................39
6.2.10 Activate or deactivate maintenance requests .............................................................................41
6.2.11 Modify Other Settings ................................................................................................................. 41
6.3 Settings for the measurements...............................................................................................................42
6.3.1 Select operation mode ................................................................................................................42
6.3.2 Select gas ...................................................................................................................................42
6.3.3 Setting setpoints ......................................................................................................................... 42
6.3.4 Change vacuum settings ............................................................................................................ 43
6.3.5 Setting the machine factor ..........................................................................................................44
6.3.6 Set external calibration leak........................................................................................................ 45
6.3.7 Change pressure limits ...............................................................................................................45
6.3.8 Set and use the function ZERO ..................................................................................................46
6.3.9 Change leak rate filter................................................................................................................. 47
6.3.10 Change background suppression ...............................................................................................47
6.3.10.1 Determine the background of the inlet area .......................................................................48
6.3.11 Change the sniffer line pressure monitoring ...............................................................................48
6.3.12 Set and use external partial flow system .................................................................................... 49
6.3.13 Calibrating ................................................................................................................................... 50
6.3.13.1 Internal calibration..............................................................................................................50
6.3.13.2 External calibration.............................................................................................................51
6.4 Measuring ...............................................................................................................................................52
6.5 Measurement data..................................................................................................................................53
6.5.1 Configure data recording ............................................................................................................ 53
6.5.2 Configure and implement export................................................................................................. 53
6.5.3 Measurement data database: Information and delete function................................................... 54
6.6 Information..............................................................................................................................................55
6.6.1 Retrieve information about the device ........................................................................................ 55
6.6.2 Call information on the assemblies .............................................................................................55
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) - © Leybold GmbH iii
Page 4
Table of Contents LEYBOLD
6.6.3 Information on connected accessories ....................................................................................... 55
6.6.4 Call the energy data information .................................................................................................55
6.6.5 Call the latest information to the current measurement value..................................................... 56
6.6.6 Call the latest information to the current calibration value ..........................................................56
6.7 Log..........................................................................................................................................................56
6.7.1 Call the error and warning log..................................................................................................... 56
6.7.2 Call the TMP log ......................................................................................................................... 56
6.7.3 Call calibration log....................................................................................................................... 56
6.7.4 Call maintenance log .................................................................................................................. 57
6.8 Device settings .......................................................................................................................................57
6.8.1 Viewing and customizing individual parameters .........................................................................57
6.8.2 Saving and managing sets of parameters .................................................................................. 57
6.8.3 Exporting or importing sets of parameters ..................................................................................58
6.9 Updating the software.............................................................................................................................59
6.9.1 Update the user interface software .............................................................................................59
6.9.2 Updating the software of the basic unit....................................................................................... 59
6.9.3 Update the software in expert mode ...........................................................................................60
6.10 Lock screen ............................................................................................................................................60
6.11 Use external monitor...............................................................................................................................60
6.12 View vacuum diagram ............................................................................................................................61
6.13 Resetting to factory settings ...................................................................................................................61
6.14 Logging off from the device ....................................................................................................................61
6.15 Switching off the device. .........................................................................................................................62
7 Warning and error messages .........................................................................................................................63
7.1 List of warning and error messages........................................................................................................63
8 Cleaning and maintenance.............................................................................................................................73
8.1 Cleaning the housing ..............................................................................................................................73
8.2 Change the filter mat of the fan input......................................................................................................73
8.3 Check oil-sealed backing pump..............................................................................................................73
8.4 Service at Leybold ..................................................................................................................................74
9 Decommissioning the measuring instrument..................................................................................................75
10 Accessories ....................................................................................................................................................76
10.1 Accessories and spare parts ..................................................................................................................76
10.2 I/O module ..............................................................................................................................................78
10.2.1 Create a connection between the device and the I/O module ....................................................78
10.2.2 Configuring digital outputs .......................................................................................................... 78
10.2.3 Configure digital inputs ............................................................................................................... 80
10.2.4 Configure analog outputs ............................................................................................................ 81
iv PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 5
LEYBOLD Table of Contents
10.2.5 Setting up the I/O module protocol ............................................................................................. 83
10.3 Bus module.............................................................................................................................................83
10.3.1 Creating a connection between the device and the bus module ................................................ 83
10.4 Operate leak detector via web browser ..................................................................................................84
10.4.1 Configure the WiFi connection of the leak detector ....................................................................84
10.4.2 Set-up the WiFi connection in the notebook or tablet .................................................................85
11 Appendix......................................................................................................................................................... 86
11.1 Menu path...............................................................................................................................................86
11.1.1 Diagnosis ....................................................................................................................................86
11.1.2 Settings ....................................................................................................................................... 87
11.2 CE Declaration of Conformity .................................................................................................................89
Index...............................................................................................................................................................90
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) - © Leybold GmbH v
Page 6
1 | About these instructions LEYBOLD
1 About these instructions
This document applies to the software version stated on the title page.
Product names may occur in the document, which are added for identification pur-
poses only and belong to the respective owner of the rights.
1.1 Target groups
This instruction manual is aimed at the operator of the device and at technically quali-
fied specialists, with experience in the field of leak testing technology.
1.2 Warnings
DANGER
Imminent hazard resulting in death or serious injuries
WARNING
Hazardous situation resulting in potential death or serious injuries
CAUTION
Hazardous situation resulting in minor injuries
NOTICE
Hazardous situation resulting in damage to property or the environment
6 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 7
LEYBOLD Safety | 2
2 Safety
2.1 Intended use
The device is a leak detector for detecting and measuring leaks in test objects. The
device is suitable for leak testing as per the vacuum method and the sniffing method.
• Operate the device only according to this instruction manual.
• Comply with application limits, see "Technical Data".
Improper use
Avoid the following, non-intended uses:
• Use outside the technical specifications, see "Technical Data".
• Test of wet or damp test objects
• Pumping down of explosive, aggressive, corrosive, flammable, toxic or reactive
substances
• Pumping down of condensable fluids and vapors.
• Pumping of gases contaminated with particles
• Shock loads or vibrations
• Using the device in potentially explosive atmospheres.
• Scanning of mains power cables with a sniffing probe
• Sudden ventilation of vacuum systems
• Connect a test object that is not vacuum resistant
• Pumping out gases containing halogens such as fluorine or chlorine in high con-
centration or over a long period of time. Use with refrigerants or SF6.
• Operation without exhaust pipe for devices with oil-sealed backing pump
Note: This device is not intended to be used in residential areas.
2.2 Owner requirements
The following notes are for companies or any person who is responsible for the safety
and effective use of the product by the user, employee or third party.
Safety conscious oper-
ation
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 7 / 94
• Only use the device when it is technically in good order and condition.
• Only operate the device in accordance with this instruction manual, in a safety and
risk conscious manner.
• Adhere to the following regulations and observe their compliance:
– Intended use
– General applicable safety and accident prevention regulations
– International, national and local standards and guidelines
Page 8
2 | Safety LEYBOLD
– Additional device-related provisions and regulations
• Only use original parts or parts approved by the manufacturer.
• Keep this instruction manual available on site.
Personnel qualifica-
tions
• Only instructed personnel should be permitted to work with and on the device. The
instructed personnel must have received training on the device.
• Make sure that authorized personnel have read and understood the operating in-
structions and all other applicable documents.
2.3 Duties of the operator
• Read, observe, and follow the information in this manual and in the work instruc-
tions provided by the owner. This concerns in particular the safety instructions and
warnings.
• Always observe the complete operating instructions for all work.
• If you have any questions about operation or maintenance that are not answered
in this manual, please contact Customer Service.
2.4 Dangers
The measuring instrument was built according to the state-of-the-art and the recog-
nized safety regulations. Nevertheless, improper use may result in risk to life and limb
on the part of the user or third parties, or damage to the measuring instrument or other
property may occur.
Hazards due to liquids
and chemicals
Dangers from electric
power
Explosion hazard
Liquids and chemical substances can damage the instrument.
• Never try to find toxic, caustic, microbiological, explosive, radioactive or other
harmful substances with the device.
There is a danger to life from the contact of conductive parts inside the device.
• Disconnect the device from the power supply prior to any installation and mainte-
nance work. Make sure that the electric power supply cannot reconnected without
authorization.
The device contains electric components that can be damaged from high electric volt-
age.
• Before connecting the device to the power supply, make sure that the supply volt-
age specified on the device is the same as the local power supply.
Hydrogen is a flammable and explosive gas.
• Use only tracer gases with a concentration of hydrogen that cannot explode in
combination with oxygen. The allowable composition of venal gas mixtures can be
read in the safety data sheets of the respective manufacturers.
8 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 9
LEYBOLD Safety | 2
Risk of uncontrolled
movements as a result
of being frightened
Injury from bursting ob-
jects
When operating the device in "vacuum” operation mode there will be a negative pres-
sure created at the inlet flange.
If the inlet flange is not properly closed by a blank flange or connected to a test set,
the vacuum pull on your hands or limbs could be alarming or frightening.
There is risk of injury from bursting objects causes by a test object notwithstanding the
vacuum pressure when a test object is connected.
• Take appropriate precautions.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 9 / 94
Page 10
3 | Shipment, Transport, Storage LEYBOLD
3 Shipment, Transport, Storage
Scope of delivery
Device with oil-sealed backing pump (EU), catalog number 250000V02
Item Quantity
PHOENIX Quadro (EU) Leak detector 1
Power supply cable EU 1
Power supply cable UK 1
Blank flange DN25 KF 1
Clamping ring DN25 KF 1
Centering ring DN25 KF 1
Set of spare fuses 1
Plug for exhaust 1
Operating instructions (English) 1
Operating instructions (German) 1
Protocol Descriptions (English only) 1
Inspection certificate calibration leak 1
Inspection certificate leak detector 1
Device with oil-sealed backing pump (US), catalog number 251000V02
Item Quantity
PHOENIX Quadro (US) Leak detector 1
Power supply cable US 1
Blank flange DN25 KF 1
Clamping ring DN25 KF 1
Centering ring DN25 KF 1
Set of spare fuses 1
Plug for exhaust 1
Operating instructions (English) 1
Protocol Descriptions (English only) 1
Inspection certificate calibration leak 1
Inspection certificate leak detector 1
10 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 11
LEYBOLD Shipment, Transport, Storage | 3
Device with oil-sealed backing pump (JP), catalog number 251100V02
Item Quantity
PHOENIX Quadro (JP) Leak detector 1
Power supply cable US 1
Blank flange DN25 KF 1
Clamping ring DN25 KF 1
Centering ring DN25 KF 1
Set of spare fuses 1
Plug for exhaust 1
Operating instructions (English) 1
Protocol Descriptions (English only) 1
Inspection certificate calibration leak 1
Inspection certificate leak detector 1
Device with dry backing pump (all countries), catalog number
250001V02
Item Quantity
PHOENIX Quadro dry Leak detector 1
Power supply cable US 1
Power supply cable EU 1
Power supply cable UK 1
Blank flange DN25 KF 1
Clamping ring DN25 KF 1
Centering ring DN25 KF 1
Set of spare fuses 1
Operating instructions (German) 1
Operating instructions (English) 1
Protocol Descriptions (English only) 1
Inspection certificate calibration leak 1
Inspection certificate leak detector 1
►
Check the delivery contents after receiving the product to ensure it is complete.
Transport
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 11 / 94
Page 12
3 | Shipment, Transport, Storage LEYBOLD
WARNING
Danger of injury due to high tare weight
Transport of the unpacked device over a shorter distance
► Do not lift the device by the inlet flange.
► Lift and transport the device only in pairs.
► To lift, grasp the handle grips on the sides of the device.
NOTICE
Material damage if incorrect transport packaging is used
Transport over long distances
► Keep the original packaging.
Storage
► Only transport the device in its original packaging.
Store the device taking into consideration the specifications, see "Specifications".
See also
2 Technical data [} 24]
12 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 13
LEYBOLD Description | 4
4 Description
4.1 Function
The device is a leak detector for detecting and measuring leaks in test objects. The
device is suitable for leak testing using the vacuum method and the sniffer method.
• When using the vacuum method the test object is evacuated and subjected to He-
lium or forming gas from the outside. To do this it is necessary to establish a vac-
uum connection between the device and the test object.
• When using the sniffer method an over-pressure is established in the test object
using Helium or a forming gas. The test object is then inspected on the outside us-
ing a sniffer probe.
4.2 Operation modes
SL300
4.2.1 Operation mode “Vacuum”
The inlet flange is located on the upper side of the device.
You can mount a suitable external calibration leak on the inlet flange and perform an
external calibration, see also “External calibration [} 51]“. Alternatively, you can per-
form an internal calibration, see also “Internal calibration [} 50]“.
To be able to perform leak testing using the vacuum method the inlet flange must be
connected to the desired specimen.
If the pressure in the specimen is less than the surrounding pressure, then Helium
(which is sprayed over the specimen) can penetrate into the specimen if there is a
leak. Helium can be detected in the leak detector using a mass spectrometer.
4.2.2 Operation mode “Sniffing”
To be able to inspect test objects under overpressure with a sniffer line you can con-
nect the sniffer SL300.
The vacuum connection of the sniffer line SL300 is connected to the upper side of the
device on the inlet flange.
The electrical connection of the sniffer line SL300 is connected to the connector "AC-
CESSORIES" on the rear of the device, see "Connections for accessories and control
signals [} 23]".
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 13 / 94
Page 14
4 | Description LEYBOLD
Connection flange for test object
Operating unit
4.3 Device setup
4.3.1 Overall device
Fig.1:
Front view
14 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 15
LEYBOLD Description | 4
Connections for accessories and control signals
Connection flange for test object
VENT / PURGE
Connection for power cable, power switch and fuses
Filter ventilator inlet
EXHAUST
Fig.2:
4.3.2 Operating unit
Fig.3:
The control unit consists of a touchscreen and a control panel with the buttons
START, STOP and ZERO (background suppression) on the housing.
Back view
Control unit - front view
See also "Assembly of the touchscreen [} 19]", see also "START button [} 16]".
The LED lighting of the buttons on the control panel changes its display color accord-
ing to the device state, see also "Meaning of the button LEDs [} 17].
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 15 / 94
Page 16
4 | Description LEYBOLD
The remote control RC310 is optionally available, see also "Accessories and spare
parts [} 76].
You can also operate the device using a notebooks or tablets, see also "Operate leak
detector via web browser [} 84]".
See also
2 Updating the software [} 59]
2 Measurement data [} 53]
4.3.2.1 START button
• To start the measurements.
• Can be operated via touchscreen or on the control panel (Hardware button).
• If you press the START button on the control panel again during measurement,
the maximum leak rate (Q
also “Assembly of the touchscreen [} 19]“.
) that has occurred since START is displayed. See
max
• If you press the START button on the control panel during measurement, the max-
imum leak rate display is updated.
Function Touchscreen Control panel
Starting START button
Display maximum leak rate Cannot be operated
4.3.2.2 STOP button
• To stop the measurements.
• Can be operated via the touchscreen of the control panel.
• Using the STOP button on the control panel you can do more than just stopping
the measurements but also perform ventilation.
Function Touchscreen Control panel
Stop STOP button
via touchscreen
Press the START button
again.
Vent Press the STOP button
again and keep it pressed
for approx. 2 seconds.
16 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 17
LEYBOLD Description | 4
Function Touchscreen Control panel
(Prerequisite is the setting
“ventilation mode” “man-
ual”, see Change vacuum
settings [} 43] “ “.)
4.3.2.3 ZERO button
• To hide the "Background signal", see also "Definition of terms”.
• Can be operated via the touchscreen of the control panel.
• Using the ZERO button you can switch ZERO on and off. For further details see
"Set and use the function ZERO [} 46]”.
Function Touchscreen Control panel
Background suppression ON ZERO button
Background suppression OFF Press the ZERO button again and
keep it pressed for approx. 2 sec-
onds.
The actual measured leak rate is considered to be a background signal. Depending on
the selected variant of operation mode the background signal is hidden until the dis-
play limit of the respective vacuum range is reached.
After pressing the ZERO button, background suppression is automatically adjusted to
the course of the falling leak rate signal. As a result, the detection of leaks is possible
even with slowly falling signal.
Display limits according to factory setting:
1×10-7 mbar l/s in GROSS
-10
1×10
1×10
mbar l/s in FINE
-12
mbar l/s in ULTRA
To switch-off the function ZERO again, press the button ZERO for about 2 seconds.
The function ZERO should be activated only if the leak rate signal is stable and no
leak is measured. See also “Set and use the function ZERO [} 46]“.
See also
2 Change vacuum settings [} 43]
4.3.2.4 Meaning of the button LEDs
START button LED STOP button LED Meaning
Off Flashing red No connection to the control unit
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 17 / 94
Page 18
4 | Description LEYBOLD
START button LED STOP button LED Meaning
Pulsing blue Pulsing blue Run-up
Off Green Standby vented (Vent valve open)
Off Blue green Standby pumped out (Vent valve
close)
Pulsing green Off Pump down
Off Flashing green Internal calibration
Flashing green Off External calibration
Green Off Measuring
Yellow (warning, faulty
measurement possible)
Off Red Error
Red Red Service mode is activated
ZERO button LED
Off No measurement operation
Off ZERO blocked
Blue ZERO OFF
Flashing blue ZERO blocked by SMART-ZERO
Green ZERO ON
Red Service mode is activated
Off Measuring with warning not ac-
4.3.2.5 Meaning of the status LED
The status LED is located on the back of the instrument inside of the connector block
for the equipment and control signals, see also Connections for accessories and con-
trol signals [} 23].
knowledged
Status LED Meaning
Flashing red No communication with operating unit
Flashing blue Run-up
Blue Standby
Flashing green Evacuate (pumping)
Flashing green Calibrating
Green Measuring
Yellow Measuring with warning not acknowl-
edged
Red Error
18 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 19
LEYBOLD Description | 4
Operation
Information
Vacuum
access control
Settings
Diagnosis
Measuring mode
Operation mode
Gas
Time
Navigation button
Measurement value
Navigation button
Navigation button
Setpoints
Measurement value
ULTRA
Vacuum
Volume
Calibrating
ZERO ON
ZERO OFF
Measurement data recording
Switching:
Line graph
Bar graph
Helium
ULTRA
Inlet pressure
4.3.2.6 Assembly of the touchscreen
The display is a touchscreen.
The touchscreen responds to being touched lightly. To correctly select the chosen
function, avoid strong pressure.
You can always see symbols for the navigation on the display.
Additionally, you can see, depending on the context, other symbols and elements.
Navigation buttons
Function buttons
The buttons can appear in different grey tones:
• Hidden: Function inactive
• Light grey: Function can be activated
• Dark grey: Function is active
Settings
Operation
Diagnosis
Table1:
Navigation buttons
The buttons can appear in two different grey tones:
• Light grey: Function can be activated
• Dark grey: Function is active
General function symbols
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 19 / 94
Page 20
4 | Description LEYBOLD
Cancel ongoing function
Confirm entry or selection
Load
Save
Edit
Delete
Other symbols
Table2:
See also “Overview of Rights Groups [} 33]“.
Function buttons
Authorization “User“
Authorization “Operator“
Authorization “Supervisor“
View the time or set the time
4.3.3 Vacuum connections
4.3.3.1 Inlet
The inlet is located on the upper part of the device. This is a DN 25 KF flange.
If you select the vacuum leak test mode, connect the test object or the vacuum cham-
ber onto the flange.
If you are testing applications where dust or dirt is accumulating, use the O-ring with
filter. In this case, the pump down times are extended.
Use the inlet for connecting the sniffer line SL300, too.
20 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 21
LEYBOLD Description | 4
User profile
1
2
EXHAUST
VENT
4.3.3.2 Exhaust
DANGER
Health risk due to exhaust fumes and vapors
Depending on the connected container and the gas it is holding hazardous gases can
enter the surrounding air via the exhaust of the leak detector.
If you have a device with an oil-sealed backing pump, dangerous combustion products
can arise, i.e. smoke, mist, sulfur oxide, aldehyde, and free carbon dioxide.
► Make sure you have protection measure to prevent inhaling hazardous gases.
► Connect an exhaust pipe at the exhaust, see also “Exhaust [} 21]“.
Vent
Fig.4:
Connections for exhaust, for venting and purging/gas ballast on the left of the device
1 EXHAUST: Exhaust 2 VENT: To vent the inlet. This connection can
be used also for purging/gas ballast.
At the left side of the device there is the an exhaust, see “Connections for accessories
and control signals [} 23]“. This is a quick connection for hoses with an outside diam-
eter of 8 mm.
4.3.3.3 Connection for venting and purging/gas ballast
At the left side of the device there is the connection for venting and purging/gas bal-
last, next to “Exhaust [} 21]“.
Via this connection the inlet is vented, the backing pump purged (when the backing
pump is wet: gas ballast) and the TMP vented when “power off”. This is a quick con-
nection for hoses with an outside diameter of 8 mm.
Normally, the specimens are ventilated with ambient air after completion of the test. If
necessary, the test specimens can be ventilated with a different gas (e.g., fresh air,
dry air, nitrogen, etc.) to a maximum of 1050 mbar pressure.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 21 / 94
Page 22
4 | Description LEYBOLD
Purging/gas ballast
To purge use a Helium free gas at atmospheric pressure. The surrounding air may be
contaminated with traces of Helium due to spraying or filling up large containers. In
such cases connect a gas supply line (this means Nitrogen or fresh air or similar) over
the purge gas connection. The pressure of the gas line should not be more than 1050
mbar.
22 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 23
LEYBOLD Description | 4
4.3.4 Connections for accessories and control signals
NOTICE
The electronics of the device can be destroyed.
► Only connect devices which are provided for the appropriate interfaces.
The connections for the external devices show a safe disconnection from the mains
and are within the range of the safety extra low voltage (SELV).
Fig.5:
Connections for accessories and control signals at the back side of the device.
REMOTE1
REMOTE2
ACCESSORIES
STATUS
HDMI
LD
For connecting the remote control RC310C via cable, maxi-
mum length 28 m, or for direct connection of the radio trans-
mitter via an adapter. The remote control is not part of the
scope of delivery of the device.
Enables the connection via radio transmitter for the radio
control via a special adapter.
Electrical connection for sniffer line SL300 or partial flow sys-
tem. For partial flow system see also “Set and use external
partial flow system [} 49]“.
To display the status of the device, see also “Meaning of the
status LED [} 18]“.
For connection to the HDMI interface of a touch monitor,
maximum cable length 3 m.
2 USB connections. To transfer data and to perform updates
with an USB stick (FAT32-formatted). To connect a touch
monitor via USB cable.
Connection for bus module or I/O module, maximum line
length 10 m
Network interface, maximum length 3 m
See also
2 Connection for venting and purging/gas ballast [} 21]
2 Exhaust [} 21]
2 Connecting the leak detector to the power supply system [} 29]
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 23 / 94
Page 24
4 | Description LEYBOLD
4.3.5 Markings on the device
Device cannot be scrapped with the normal domestic waste.
4.4 Technical data
Mechanical data
Device with oil-sealed backing pump, catalog numbers:
250000V02 (EU), 251000V02 (US), 251100V02 (JP)
PHOENIX Quadro
Dimensions (L×W×H) 495 mm x 318 mm x 475 mm
Weight 41 kg
Inlet flange test object DN 25 KF
Inlet flange prevacuum -
Device with dry backing pump, catalog number:
250001V02 (all countries)
PHOENIX Quadro dry
Dimensions (L×W×H) 495 mm x 318 mm x 475 mm
Weight 35 kg
Inlet flange test object DN 25 KF
Inlet flange prevacuum -
Electrical data
Device with oil-sealed backing pump, catalog numbers:
250000V02, 251000V02, 251100V02
PHOENIX Quadro
Main fuse 2 x 250 V T10 A
Max. power 640 VA
Power port for backing pump -
Supply voltage EU 220 – 240 V, 50 Hz
230 V, 60 Hz
Supply voltage US 110 -120 V, 60 Hz
24 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 25
LEYBOLD Description | 4
PHOENIX Quadro
Supply voltage JP 100 V, 50 / 60 Hz
Supply voltage multi-range
-
power unit
Ingress protection IP 30
Excess voltage category II
Electronic interfaces REMOTE1, REMOTE2, ACCESSORIES, HDMI,
USB, LD, Ethernet
Device with dry backing pump, catalog number:
250001V02
PHOENIX Quadro dry
Main fuse 2 x 250 V T10 A
Max. power 470 VA
Power port for backing pump -
Supply voltage EU -
Supply voltage US -
Supply voltage JP -
Supply voltage multi-range
100 - 240 V, 50 / 60 Hz
power unit
Ingress protection IP 30
Excess voltage category II
Electronic interfaces REMOTE1, REMOTE2, ACCESSORIES, HDMI,
USB, LD, Ethernet
Physical data
Catalog numbers:
250000V02, 251000V02, 251100V02, 250001V02
PHOENIX Quadro, PHOENIX Quadro dry
Minimum detectable helium leak
rate vacuum mode
Response time < 1 s
Maximum inlet pressure 15 mbar
5·10
-12
mbar l/s
Helium pumping speed ULTRA >3.1 l/s
Detectable masses
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 25 / 94
4
He, H2, mass 3
Page 26
4 | Description LEYBOLD
PHOENIX Quadro, PHOENIX Quadro dry
Minimum detectable helium leak
rate sniffer mode
Gas flow through sniffer line
SL300
Measurement range 12 decades
Run-up time 110 s
Ion source 2 long lasting iridium cathodes
*) Under normal environmental conditions, the smallest detectable leak rate and leak
rate indication is after ZERO 1·10-8 mbar l/s. In special devices, where the air helium is
removed, for example, by flooding with nitrogen, the minimum detectable leak rate can
be adjusted to 1·10-9 mbar l/s. Please contact Leybold in this case.
1·10-9 mbar l/s *)
20 - 25 sccm
Ambient conditions
Catalog numbers:
250000V02, 251000V02, 251100V02, 250001V02
PHOENIX Quadro, PHOENIX Quadro dry
Max. altitude above sea level 2000 m
Maximum relative humidity 80% at 30°C, linear decreasing to 50% at 40°C
Storage temperature - 10°C to +60°C
Operating temperature + 10°C … + 40 °C
Pollution degree 2
26 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 27
LEYBOLD Installation | 5
5 Installation
5.1 Setup
CAUTION
Risk of injury from lifting the heavy device
The device is heavy and can slip out of hand.
► Do not use the inlet flange to lift the device.
► Lift and transport the device only in pairs.
► To lift, grasp the handle grips on the sides of the device.
DANGER
Health risk due to exhaust fumes and vapors
Depending on the connected container and the gas it is holding hazardous gases can
enter the surrounding air via the exhaust of the leak detector.
If you have a device with an oil-sealed backing pump, dangerous combustion products
can arise, i.e. smoke, mist, sulfur oxide, aldehyde, and free carbon dioxide.
► Make sure you have protection measure to prevent inhaling hazardous gases.
► Connect an exhaust pipe at the exhaust, see also “Exhaust [} 21]“.
WARNING
Danger from moisture and electricity
Moisture entering the device can lead to personal injury due to electric shocks as well
as damage to property due to short circuiting.
► Only operate the device in dry environments and only in buildings.
► Operate the device away from sources of liquid and moisture.
► Place the device where you can always reach the mains plug.
► Do not operate the device standing water and do not let even a drop of water or
other liquids on the device.
► Prevent the device from coming into contact with bases, acids and solvents.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 27 / 94
Page 28
5 | Installation LEYBOLD
NOTICE
Material damage from overheated device
The device heats up during operation and can overheat without sufficient ventilation.
► Please note the technical specifications.
► Ensure sufficient ventilation, especially on the ventilation slots on the left and right
of the device: There should be free space in the front, to the rear and sides of the
unit of at least 10 cm.
► Keep heat sources away from the device.
NOTICE
Operating system can be attacked via USB or Ethernet
The Linux operating system used in the leak detector is not updated automatically and
can therefore contain security gaps. This vulnerability may be exploited through the
Ethernet and USB interfaces of the leak detector to provide unauthorized access to
the system.
► Ensure that no unauthorized person has access to these interfaces, for example
through a USB port / Ethernet port lock.
► In order not to jeopardize the security of your company network, never connect the
leak detector directly to the public Internet. This is true for connections over WLAN
as well as over Ethernet.
► However, if you want to access the web interface of the leak detector remotely, we
recommend an encrypted Virtual Private Network (VPN) connection. However, we
cannot assume any guarantee for the security of VPN connections, which are pro-
vided by third parties.
Prevention of measurement errors due to leaks in the Helium source in the de-
vice surroundings
We recommend that you regularly check around the device to a distance of 10 m all
large Helium sources for gross leaks. Use a sniffer line to do this.
28 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 29
LEYBOLD Installation | 5
5.2 For oil-sealed backing pumps, remove the plug
Malfunction of the pump system with inserted plug in the exhaust line
On devices with oil-sealed backing pump, the exhaust is protected by a plug against
leaking oil.
► For devices with oil-sealed backing pump, remove the plug before switching it on.
►
To remove the plug press the release ring in the direction of the device so that the
locking device releases. Pull the plug out while release ring is pressed.
5.3 Connecting the leak detector to the power
supply system
WARNING
Danger from electric shock
Improperly earthed or protected products may be dangerous to life in case of a fault.
The use of the device is not permitted without a connected protective conductor.
► Only use the included 3-wire power cable.
► Make sure that the mains plug is always accessible.
NOTICE
Damage through wrong power supply
► Only connect the device to the power supply when the tension shown on the type
plate corresponds to the one of your power supply connection.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 29 / 94
Page 30
5 | Installation LEYBOLD
Fig.6:
Power supply and on / off switch are at the right side of the device
5.4 Check the Operation of the Device
NOTICE
Damage to the turbo molecular pump due to jerking movements
Jerking movements can damage the running turbo molecular pump.
► Avoid any jerking movements or vibrations to the instrument during operation and
for up to 1 minute after switching off.
Do not switch on the device when the ambient temperature is less than 10 °C.
ü A DN 25 KF blank flange is available (if not already installed on the inlet flange).
ü A helium calibration leak is available (optional).
1
Check if the inlet is blank flanged. If this is not so, flange a blank flange with an
O-ring gasket on the inlet on the upper side of the device.
2
If your leak detector has an oil-sealed backing pump, connect an exhaust line at
the exhaust port, see also Exhaust [} 21].
3
Connect the device to the mains supply.
4
Switch on the leak detector via the mains switch.
ð After switching on pieces of status information are shown on the touchscreen
about the speed of the turbo molecular pump, the pre-vacuum pressure, the
emission and the active cathode. The start process takes about 3 minutes
and is completed with a short acoustic signal. Now, the device is in "Standby"
mode.
5
Press the START button.
ð The inlet is evacuated and then the measuring mode for the measured leak
rate is shown. In case a test object was connected, you would start with
spraying helium on the outside.
6
In case you would like to suppress any possible existing background signals
(Helium background in the test object) press the ZERO button.
In order to reverse the background suppression press the ZERO button on the
control panel for 2 - 3 seconds, see "ZERO button [} 17]”.
7
Press the STOP button.
30 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 31
LEYBOLD Installation | 5
ð The device switches to the mode "Standby".
If you press the STOP button on the control panel for a few seconds the inlet
of the device is ventilated.
8
If you want to finish the test now, turn off the device.
9
If you want to check the internal calibration wait, for getting a better quality of
measurement results, 15 to 20 minutes until the device has warmed up.
10
To call the calibration menu press on the cross hair icon .
11
Select “Internal“.
12
Press the button.
ð The automatic internal calibration starts and requires approx. 30 seconds.
13
If you want to check the measurement accuracy of the device using the optional
Helium calibration leak remove the blank flange from the inlet and connect an
open Helium calibration leak onto the inlet.
14
Press the START button.
ð The inlet is evacuated and the leak rate of the test object is measured and
displayed.
15
Press the STOP button to interrupt the measurement.
ð The leak detector changes into the Standby mode.
16
Press the STOP button on the housing until the message STANDBY / VENTED
appears on the display.
ð The inlet is now in the vented state.
17
Separate the Helium calibration leak from the inlet and flange the inlet blank
again.
18
Switch off the device via the mains switch.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 31 / 94
Page 32
6 | Operation LEYBOLD
6 Operation
6.1 Switch ON
►
To switch on the device, press the power button.
ð When delivered the device shows the screen "Standby" after run-up.
Fig.7:
Window “Standby“
Starting the measurement Calibrating
Purging/gas ballast Vent
6.2 Basic settings
You are able to save the actual settings of the device at any time, so that you can use
them at a later time, see also “Saving and managing sets of parameters [} 57]“.
6.2.1 Set language on the user interface
When a user is created, a language is specified, see also “Select, modify, create user
profile [} 33]“.
In addition, as a user with limited rights, you can also change the language of the user
interfaces, see also “Modify Personal Settings [} 34]“.
32 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 33
LEYBOLD Operation | 6
6.2.2 Setting date, time and time zone
Supervisor
ü
1
> Setup > General > Date and time
2
Set up.
3
Save .
Alternatively, press in the upper window bar and make your settings.
- rights
6.2.3 User profile settings
6.2.3.1 Overview of Rights Groups
The rights of auser depend upon which group he belongs to.
User
Operator
Supervisor
Members of the group
• perform measurements,
• view history of the measurement results,
• view device information,
• view error logs.
Members of the group
they can
• create / modify / delete users,
• export / delete measurement data,
• modify measurement settings,
Members of the group
Moreover, they can
• create / modify / delete operators,
• create / modify / delete supervisors,
• Perform software updates,
User
can
Operator
Supervisor
have all the rights of the group
have all the rights of groups
User
User
. Moreover,
Operator
and
.
• modify date / time.
6.2.3.2 Select, modify, create user profile
ü
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 33 / 94
Operator
1
> User accounts
ð Existing users and associated groups are displayed in list form.
2
You have the following possibilities:
To create a new user profile, select at the bottom of the window.
The "User profile” window opens.
Supervisor
or
rights
Page 34
6 | Operation LEYBOLD
User profile
German
Mueller
Name
Group
Language
PIN
Otherwise, press an already created user name and choose from the tool bar:
, to load a user profile.
The login window opens.
, to modify a user profile .
The "User profile” window opens.
, to delete a user profile .
A confirmation screen appears.
3
After selecting some tools, the “User profile” window opens. If this window
opens, enter a user name, change it, or keep it as required.
4
If the "PIN" field is not filled in or you want to change the content, enter a 4-digit
PIN.
5
To assign the required rights to the user, select a group. Via and select be-
tween the groups User, Operator and Supervisor. See "Overview of Rights
Groups [} 33]".
6
In the field "Language" assign a language to the user via and .
7
Save .
6.2.3.3 Modify Personal Settings
As a user with limited rights (
User
) you can also modify your language or PIN. By this
the associated user profile is correspondingly adapted. Access to the entire user pro-
file is not necessary.
1
Press on your name which appears on the left of the display.
Alternatively press “ > User accounts > Change own language“.
34 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 35
LEYBOLD Operation | 6
ð The window "User accounts" opens.
2
Select the “Change own PIN” or “Change own language” button as required.
6.2.4 Switch off Automatic Login
Factory setting
As per factory settings, after switching on the device the user "Supervisor" automati-
cally logs in and the measurement screen is called. This default user also has the per-
missions of the group "Supervisor". Without changing this setting, any user can oper-
ate all functions without restriction.
You can specify that the login window appears after you turn on the device instead of
automatically logging on.
In the login window, all users can login, which have been already registered in the de-
vice, see"Select, modify, create user profile [} 33]”.
Supervisor
ü
1
> User accounts > Manage Auto Login
2
In the “Manage Automatic Login” window, deactivate the option “Active”.
3
Save .
ð After restarting the device, the current settings are applied.
- rights
6.2.5 Switch on Automatic Login
You can specify if a user of your choice is automatically logged in after the device is
switched on without the login window.
Supervisor
ü
ü The requested user was already created. See "Select, modify, create user profile
[} 33]".
1
> User accounts > Manage Auto Login
2
Enter the name of the user in the "Name" field. Note the uppercase / lowercase.
3
Enter the current PIN of the user profile in the "PIN" field.
- rights
4
In the window “Manage Automatic Login”, activate the option “Active”.
5
Save .
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 35 / 94
Page 36
6 | Operation LEYBOLD
6.2.6 Presentation of the measurement screen
To switch between the different diagram presentation press on the measurement
screen, see "Assembly of the touchscreen [} 19]".
You can select between the following presentations:
• Line graph
• Bar graph
You can further configure the different diagram presentations. See "Changing the pre-
sentation of the line graph [} 36]" and "Changing the presentation of the bar graph
[} 37]".
6.2.6.1 Changing the presentation of the line graph
Fig.8:
Presentation of the line graph
ü
36 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Operator
1
> Display > Line graph
2
In the field "Scaling" select between "Linear" and "Logarithmic".
3
Select between the different viewable ”Decades”.
4
To dynamically adjust the upper and lower limit on the leak rate, activate the op-
tion "Autoscale".
5
In the field "Time axis" select the length of the time axis "30", "60", "90", "120" or
"240" seconds.
6
If the option "Autoscale" is not active, select "Lower diagram limit" in the field the
desired decade.
Supervisor
or
rights
Page 37
LEYBOLD Operation | 6
7
Save .
6.2.6.2 Changing the presentation of the bar graph
Fig.9:
Presentation as bar graph
ü
Operator
1
> Display > Bar graph
2
In the field "Scaling" select between "Linear" and "Logarithmic".
3
Select between the different viewable ”Decades”.
4
To dynamically adjust the upper and lower limit on the leak rate, activate the op-
tion "Autoscale".
5
If the option "Autoscale" is not active, select "Lower diagram limit" in the field the
desired decade.
6
Save .
Supervisor
or
rights
6.2.6.3 Change general display settings
ü
1
Operator
> Display > General
Supervisor
or
rights
2
If very small leak rates are of no interest to your application and you want to
raise the lower leak rate limit, select between 1 to 6 decades in the “Raise lower
leak rate limit”. Raising the lower leak rate limit can facilitate the assessment of
the leak rate display.
3
To set whether to display the internal background leak rate in the “Standby” win-
dow, enable or disable the “Show background at standby“ option.
The internal background is created from the remaining gas, which has not yet
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 37 / 94
Page 38
6 | Operation LEYBOLD
been pumped out. Very clean systems show a background in the range of 1 x
-11
10
mbar l/s. Under normal conditions there is a background of 1 x 10
s or 1x10-9 mbar l/s.
4
Save .
-10
mbar l/
6.2.7 Change units
For the vacuum operation mode you can select between "Torr·l/s", "atm·cc/s", "Pa·m3/
s", and "mbar·l/s".
After switching the operation mode "Sniffer" in addition to the modes mentioned above
you can also select between the units "oz/yr", "g/a" and "ppm".
You can also choose between the following pressure units: “mbar”, “Pa”, “atm” and
“Torr”.
ü
Operator
1
> Setup > General > Units
2
If necessary change the units of the "Leak rate unit vacuum", the "Leak rate unit
sniff" and the "Pressure unit".
ð The option “Equal to display “ is activated according to the factory settings so
that the units for the interface can be shown exactly as the units of the device.
3
In order to independently select the units of the interface deactivate the option
"Equal to display.
ð Further fields to set the units of the interface are shown.
4
To order to set the selected units so that they can also be used for the interface,
activate the option "Equal to display".
5
Save .
Supervisor
or
rights
6.2.8 Change audio settings
In addition to the visual display of the measurement results you can change the set-
tings to the volume, to the Notification beep and to the audio alarm.
WARNING
Damage to the hearing due to loud audio
The alarm level of the device can exceed 85 dB(A).
► Adjust the volume accordingly.
► Only expose yourself a short time to the alarm.
► Use hearing protection.
ü
38 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Operator
Supervisor
or
rights
Page 39
LEYBOLD Operation | 6
1
> Audio
2
In order to change the volume of the audio alarm and the notification sounds,
select the desired "Volume". Do not fall below the set value for the “Minimum
volume“ in the next field
ð Setting range: 0 … 15
ð You can listen to the set volume using the "Test" button.
3
If necessary, change the minimum volume.
ð The "Minimum volume" is the volume for the audible alarm which cannot be
undershot. If you select a value greater than 0, the lowest volume level is
shown on the measurement screen after pressing the volume icon. This al-
lows you to prevent a non-authorized person from setting a value that is be-
low the ambient noise level.
ð Setting range: 0 … 15
4
If you want to define the cause of an alarm or the type of notification beep more
accurately, then make your selection with the “Audio alarm mode“ between
“Leak rate proportional“, “PINPOINT“, “SETPOINT“, “TRIGGER“ and “Off“.
ð "Leak rate proportional": The frequency of the audible signal is proportional to
the bar graph display or diagram height. The frequency range is 300 Hz to
3300 Hz.
ð "PINPOINT": The sound of the acoustic signal changes its frequency within a
specific range of leak rates. This range extends from a decade below the se-
lected setpoint value to a decade above. Below this leak rate range, the
sound is constantly low, above the sound is constantly high.
ð "SETPOINT": The pitch is proportional to the leak rate. The signal sounds if
the leak rate exceeds the set setpoint 1. See also “Setting setpoints [} 42]“.
ð "TRIGGER": If the set setpoint 1 is exceeded, then a two-pitch signal is is-
sued. See also “Setting setpoints [} 42]“.
5
If you want to suppress the alarm for some time after pressing the START but-
ton, then set “Audio alarm delay“. For example: Time period during the pump
down of a test chamber system.
ð After pressing the START button the audible signal is activated as soon as
the leak rate falls below the setpoint value 1 or the alarm delay time expires.
This setting is only for the audible alarm type “Setpoint“ and “TRIGGER“.
6
If you wish to have notification beeps, activate the option "Notification beep".
7
Save .
6.2.9 Change the protection settings
You can protect the device from Helium contamination with gross leaks and from the
penetration of particles. Furthermore, you can change the maximum evacuation time.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 39 / 94
Page 40
6 | Operation LEYBOLD
Supervisor
ü
1
> Setup > Measurement > Protection
2
If you want to switch-on the gross leak protection, activate the option "Gross
- rights
leak protection" and set under "Gross leak protection limit" a shut-down thresh-
old.
ð The device closes the inlet valve as soon as the measured leak rate exceeds
the shut-down threshold. This will prevent an excess amount of helium from
entering the mass spectrometer. Consequently, the leak detection unit is pre-
vented from becoming contaminated by Helium. The helium entering the
specimen can be pumped out using an external pump. If no external pump is
being used, we recommend that the test object is vented before continuing
with the measurement.
3
If you want to prevent particles from being sucked into the device make sure
that the test object is first pumped down with another parallel running pump. Ac-
tivate the option "Particle protection" additionally.
ð The leak detector only starts with the pump down once the inlet pressure has
fallen below 1 mbar.
4
To change the maximum evacuation time after a gross leak is detected, enter
the desired time in seconds under "Max. evacuation time gross leak".
ð This setting determines when a gross leak warning message is signaled. The
factory setting is 600 s. If the inlet pressure drops below 100 mbar within this
time span, a fault message is signaled. This menu point is especially useful
with series tests that always have the same test conditions.
After pressing the START button the specimen is evacuated. If the corre-
sponding pressure conditions (p1 < 100 mbar) is not reached within the time
that is to be set here or falls below, the pump down process is aborted and a
warning message appears in the display.
The time that is to be selected depends on the one hand on the desired reac-
tion time for the gross leak message and on the other hand on the volume of
the test object and from the affect of the pumping speed.
If the pump down process should not be aborted enter "0". This corresponds
to the entry "infinitely".
5
To change the maximum evacuation time before the measurement, enter the
desired time in seconds under "Max. evacuation time until measurement".
The ”evacuation time until measurement” is about the time until the first ap-
proved measuring range is reached.
The factory setting is 1800 s.
ð If the anticipated pressure conditions are not reached during the evacuation
time, a warning message is shown after the expiration of the evacuation time.
For the pressure conditions, see also the following setting options:
40 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 41
LEYBOLD Operation | 6
> Setup > Measurement > Pressure limits
and
> Setup > Measurement > Vacuum > Vacuum range
6
Save .
See also
2 Change vacuum settings [} 43]
6.2.10 Activate or deactivate maintenance requests
Enables or disables warnings when the time for maintenance is exceeded. The time
until the next maintenance is displayed.
Supervisor
ü
1
> Setup > Maintenance requests
ð In the “Enable/disable maintenance requests” window, you can activate or de-
activate the maintenance requests for the following modules:
- Calibration leak
- TMP
- Filter sniffer tip
- backing pump
- Exhaust filter
- Air filter
- rights
2
Set up.
3
Save .
6.2.11 Modify Other Settings
• You can set whether you need to be notified for calibrations or not. The factory
setting is "OFF".
• Furthermore, you can, for safety reasons for example, set whether the device is
only to be operated via the touchscreen and not via the buttons on the control
panel or via the remote control. The factory settings for the "Local operation" is ac-
tivated and allows all operating possibilities.
ü
Operator
1
> Setup > Measurement > Miscellaneous
2
If you want to switch-on the calibration request, activate the option "Calibration
request".
ð If this option is switched-on there is a corresponding message 30 minutes af-
ter switched-on or when the temperature of the device has changed by more
than 5 °C since the last calibration.
Supervisor
or
rights
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 41 / 94
Page 42
6 | Operation LEYBOLD
3
If you want set whether the device is only to be operated via the touchscreen
deactivate the option "Local control".
ð The buttons START, STOP and ZERO are then blocked in the control panel.
The buttons of the remote control can also not be used.
4
Save .
6.3 Settings for the measurements
6.3.1 Select operation mode
ü
Operator
1
> Operating mode
2
Select between “Vacuum“ and “sniffing / SL300“.
3
Save .
6.3.2 Select gas
DANGER
Danger from a Hydrogen explosion
Hydrogen can explode in combination with oxygen. The allowable composition of ve-
nal gas mixtures can be read in the safety data sheets of the respective manufactur-
ers.
► Ensure that the share of hydrogen does not exceed the described concentration.
Supervisor
ü
Supervisor
or
- rights
rights
1
> Setup > Measurement > Mass
2
Make a selection from:
"Hydrogen" H2 (2 amu)
"Helium" 4He (4 amu)
"Mass 3" 3He (3 amu)
3
Save .
6.3.3 Setting setpoints
You can set the leak rate for the setpoint to 1, 2, 3 and 4 separately.
Setpoints 1 and 2 are typically used as warning and reject limits. Setpoints 3 and 4 are
not shown in the display. All 4 setpoints can be used via the I/O module, see also the
interface description.
42 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 43
LEYBOLD Operation | 6
When the setpoints are exceeded:
• If the setpoint 1 or 2 is exceeded, the measurement line in the measurement win-
dow changes color.
• The setpoint relay of the digital output switches, see also "I/O module [} 78]" or
the interface description.
Also setpoint 1 defines the trigger point for the different alarms, see also "Change au-
dio settings [} 38]". It is also the limit for SMART, see “Set and use the function ZERO
[} 46]“.
Vacuum ranges
ü
1
2
Set up.
3
Save .
Operator
> Setpoints
Supervisor
or
rights
6.3.4 Change vacuum settings
You can activate the vacuum ranges GROSS, FINE and ULTRA for your measure-
ments.activate for measurementactivate for measurementVacuum rangesVacuum
ranges
All 3 areas can be activated at the same time. If several areas are activated, they
switch automatically depending on the inlet pressure. In this way different sensitivities
can be measured with.
At least one range must be activated.
ü
Operator
1
> Setup > Measurement > Vacuum
2
Activate the desired vacuum range under "Vacuum range".
Supervisor
or
rights
3
Save .
Vent
Purge/Gas ballast
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 43 / 94
Under "Vent mode" you have the choice between "Immediate", "No ventilation" and
"Manual". If "Immediate" is activated, the ventilation is triggered when changing to
Standby. If “manually” is activated the ventilation is only triggered after a prolonged
pressure on the button STOP or by pressing at in the window “Standby“.
ü
You can automatically purge the backing pump for 20 seconds when you change to
"Standby".
ü
Operator
1
> Setup > Measurement > Vacuum
2
Set up.
3
Save .
Operator
Supervisor
or
Supervisor
or
rights
rights
Page 44
6 | Operation LEYBOLD
1
> Setup > Measurement > Vacuum
2
If necessary activate or deactivate the option "Automatic purge".
ð If you switch off the automatic purging you can switch on or off the purging by
pressing .
3
Save .
6.3.5 Setting the machine factor
If you are measuring in the operation mode "Vacuum" and using an external pump in
parallel, the measured leak rate would be too small in comparison to the leak rate
based on an internal calibration.
If you would like to compensate for this you can multiply the measured leak rate with
the suitable machine factor and then have the value shown. This factor is used only in
the vacuum mode and not in the sniffing mode.
When taking into consideration the Helium pumping speed of the device, the machine
factor can also be estimated. The measurement of the leak rate is more accurate us-
ing an external calibration leak with the test object - once with the external pump
switched and once without. The machine factor then results from the quotient of the
calculated calibration factors.
The machine factor can also be used to correct the leak rate display with respect to
the air equivalence. The machine factor for this correction is 0.37.
Using Quicktest QT100
The Quicktest QT100 is available as an accessory. For more information see “Acces-
sories and spare parts [} 76]“ or the operating instructions for the QUICKTEST
QT100.
If you are measuring in the operation mode "Sniffer" and have a Quicktest QT100 con-
nected to the inlet, the measured leak rates would be too small compared to leak rates
based on internal calibration. For the Quicktest QT100 a machine factor of approx.
400 has to be set.
To obtain accurate results based on internal calibration, it is necessary to compare
this factor with an external calibration leak. For this, calibrate both with an external and
the internal calibration leak and note the determined calibration factors in each case.
The new machine factor results from the following formula:
(Old machine factor) * (External calibration factor) / (Internal calibration factor)
Calibrate again after adjusting the machine factor!
ü
44 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Operator
1
> Setup > Measurement > Calibration leak
Supervisor
or
rights
Page 45
LEYBOLD Operation | 6
ð The field “Machine factor helium” is shown.
2
Set up.
3
Save .
6.3.6 Set external calibration leak
To use an external calibration leak for calibration, enter the leak rate of the calibration
leak.
ü
See also
2 External calibration [} 51]
Operator
1
> Setup > Measurement > Calibration leak
2
Adopt the printed value and the associated unit from the calibration leak or cer-
tificate.
Do not change the combination of the printed value and associated unit, even if
your device is otherwise set to other units!
3
Save .
Supervisor
or
rights
6.3.7 Change pressure limits
Pressure limits for the vacuum mode.
With this function the factory-set switching points between the vacuum ranges
GROSS, FINE and ULTRA can be changed. This can be necessary if the device is
pumped down with gases other than air. The pressure signal of the gas type inlet
pressure gage (Pirani) can then deliver the corresponding switching values of the se-
quence flow of the device. By changing the preset switching point this can be compen-
sated for.GROSSGROSSVacuum rangesVacuum rangesFINEFINEVacuum ranges-
Vacuum rangesULTRAULTRAVacuum rangesVacuum rangesChange pressure lim-
itsChange pressure limitsVacuum rangesVacuum ranges
Supervisor
ü
1
> Setup > Measurement > Pressure limits
ð You can change the named pressure limits. Preset values see "Factory set-
tings".
GROSS -> FINE
FINE -> ULTRA
2
Set up.
3
Save .
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 45 / 94
- rights
Page 46
6 | Operation LEYBOLD
6.3.8 Set and use the function ZERO
Why should I use
ZERO?
Activate or deactivate
ZERO
To be able to clearly measure small leakages the function ZERO should be used.
With each leak testing there is a "Background signal" (see "Definition of terms") that
disrupts the search or the measurement of leakages.
• To hide the background signal, activate the function ZERO.
• You can also use ZERO to hide a currently displayed leakage, which interferes
with searches for other or even smaller leaks.
A currently displayed leak is hidden through ZERO.
By using the function ZERO not only is the background signal hidden, but also the rep-
resentation of a current leak.
► Only activate the ZERO function, if a leak is not measured at the same time. The
ZERO function should be activated before the tracer gas is used.
ZERO is activated by factory settings.
Supervisor
ü
1
> Setup > Measurement > ZERO and filter
- rights
2
If necessary change "ZERO mode". The factory settings is "SMART".
ð Effect of SMART: The ZERO function remains blocked until the background
decreases sufficiently slowly so that a leak the size of setpoint 1 can be mea-
sured. As soon as the function ZERO is unblocked it is shown in the status
display by "Stable".
ð Effect of ZERO: When you press the ZERO button, the current leak rate value
is set to the lower display limit. Note: The ZERO button should not be pressed
when there is a rapidly falling background, otherwise, when compared to the
background change, small leak rate signals may be incorrectly hidden.
ð Effect of ZERO with ULTRA: The setting automatically activates the ZERO
function “ZERO”, as soon as the ULTRA measurement range is reached the
first time after pressing the START button and the leak rate has been fallen
below setpoint 3.
ð If you select”OFF”, the ZERO button does not work.
3
Save .
ð If ZERO is activated, start the function by pressing the ZERO button. See also
“ZERO button [} 17]“.
How do I switch on the
selected ZERO func-
tion?
46 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Briefly press the ZERO button on the control panel or the touchscreen . Through it
the current leak rate value is set to the lower display limit.
Page 47
LEYBOLD Operation | 6
How do I switch off the
ZERO function?
6.3.9 Change leak rate filter
Procedure
Press the ZERO button on the control panel for more than 2 seconds or on the touch-
screen .
The leak rate filter “AUTO“ is preset. AUTO ensures that the averaging time is opti-
mally adapted to the leak rate range.
Signals are averaged in optimized time intervals, based on the respective leak rate
range. In addition, disturbance peaks are eliminated, which are unrelated to the leak
rate signals and provides unusually short response times even with low leakage rate
signals. The algorithm used offers excellent sensitivity and response time.
With the leak rate filter "Fixed" there is also a filter with a fixed time constant available.
Supervisor
ü
1
> Setup > Measurement > ZERO and filter
2
Make a selection between “AUTO“ and “Fixed” under “Leakage rate filter”.
3
Save .
- rights
6.3.10 Change background suppression
The measurement system of the leak detector contains a residual amount of helium
and hydrogen even without connection to a test chamber. This creates an internal
measurement signal component already before pressing the START button.
After activating "Background suppression" the internal background and selectably also
the background in the inlet area is deducted from the leak rate. This happens after
pressing the START button automatically.
Supervisor
ü
1
> Setup > Measurement > ZERO and filter
2
Make your selection in the field “Background suppression“ between “Internal
only”, “Inlet area” and “Switched off“.
ð Internal only
Factory setting. With every measurement the internal measurement signal
component of the device is deducted by pressing the START button. The ac-
curacy of the measurement results are no longer impaired by the internal
background.
ð Inlet area
Additionally to the deduction of the internal background, pressing START with
every measurement also deducts the background of the inlet area.
IF you would like to switch this on, make sure that the background of the inlet
area is determined, see "Determine the background of the inlet area [} 48]".
- rights
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 47 / 94
Page 48
6 | Operation LEYBOLD
We recommend that the calculation of the inlet area background is occasion-
ally repeated, because the device pumps down any background present in
the inlet area after a certain time.
ð Switched off
No background suppression.
3
Save .
High background value
If the actual background is higher than 1×10-8 mbar l/s, it can no longer be automati-
cally deducted. The high background must be pumped down in this case.
6.3.10.1 Determine the background of the inlet area
This function determines the value of the internal Helium background.
If "Zero and Filter" are shown in the window under background suppression with value
"Inlet area" selected, this value is then deducted from the measured signal when-
START is pressed. See also “Change background suppression [} 47]“.
ü Inlet blank flange
ü Operation mode Vacuum Mode
ü The device is in the state "Standby" or "Measure".
1
Select the cross-hair icon .
2
Select "Calibration Eingang Hintergrund.
3
To start the automatic determination of the intake background, press .
6.3.11 Change the sniffer line pressure monitoring
In the operation mode Sniffing (SL300) automatic pressure monitoring is activated.
The preset pressure limits define a maximum and a minimum inlet pressure. If the
pressure does not lie within these limits then generally the caliper is either blocked or
broken. Fault messages are issued according to the following rules:
Inlet pressure > Upper limit: Caliper defective.
Inlet pressure < Lower limit: Gas flow is too low through the caliper (blocked caliper).
Supervisor
ü
- rights
1
> Setup > Measurement > Sniff > Capillary surveillance
ð You can change the following settings, to view the preset values see Factory
settings.
“Pressure SL300 capillary blocked” (Untergrenze)
“Pressure SL300 capillary broken“ (Obergrenze)
2
Set up.
48 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 49
LEYBOLD Operation | 6
3
Save .
6.3.12 Set and use external partial flow system
In partial flow operation, the test object is additionally evacuated with another pump.
We recommend using the Leybold partial flow system (Cat. No. 14020), see “Acces-
sories and spare parts [} 76]“.
As an alternative to the partial flow system mentioned above, you can connect an ex-
ternal auxiliary pump via a T-piece. In this case, however, the leak detector is not
ready to measure from 1000 mbar.
Connect partial flow system to the leak detector
ü You have a partial flow system (Cat. No. 14020).
1
Connect the angle valve of the partial flow valve block with the vacuum hose to
the inlet flange of the leak detector.
2
Connect the control cable to the "ACESSORIES" connector block, see “Connec-
tions for accessories and control signals [} 23]“.
Further detailed information can be found in the operating instructions for the partial
flow system.
Configure partial flow system
ü
Operator
1
> Setup > Measurement > Partial flow
2
Under “Pumping speed“, enter the air-suction capacity of the external partial
flow pump in m3/h.
3
If required, enter a period in seconds under “Quick pump time“.
The “Quick pump time“ determines how long valve V10 is open in the partial
flow valve block. A detailed description can be found in the operating manual for
the partial flow system.
At "0" seconds, valve V10 will not be opened at START. We recommend this
value if you want to reduce the entry of particles into the leak detector or need a
leak rate indicator with reduced sensitivity immediately after START.
Supervisor
or
rights
A setting of "60000" or greater corresponds to "infinite". The valve V10 is
opened at START. At an inlet pressure p1 <15 mbar, the leak detector starts
measuring operation and indicates leak rates with the highest possible sensitiv-
ity. This setting is recommended if it is acceptable to wait a while to reach the
measuring mode and a leak rate reading is not necessary before.
During a “Quick pump time“ between 0 seconds and "infinite", the leak detector
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 49 / 94
Page 50
6 | Operation LEYBOLD
attempts to reach an inlet pressure < 15 mbar with V10 open during this time.
After this time, the valve V10 is closed and the leak tester switches to measuring
mode (helium or hydrogen enters the device via the panel of the valve block).
4
If necessary activate the option "Bypass Valve Automatic close".
This setting defines the behavior of the bypass valve in the partial flow system.
When this option is activated, the bypass valve closes depending on the inlet
pressure. This allows more sensitive measurements at low inlet pressure.
If this option is not activated, the bypass valve will always remain open, even if
the inlet pressure is low enough. This always causes the maximum pumping
speed at the inlet.
5
Turn on the partial flow system by activating the “Enabled“ option or off by deac-
tivating this option.
6.3.13 Calibrating
In order to be able to measure leak rates correctly, the leak detector has to be ad-
justed at regular intervals by calibration. The mass spectrometer is tuned automati-
cally.
You can perform the calibration using the device internal calibration leak or use an ex-
ternal calibration leak. Normally calibration should take place on a daily basis or if
there is some doubt as to the measurement ability of the device.
NOTICE
When using Nitrogen or Helium-3 (3He) as tracer gas an internal calibration is not pos-
sible. In this case use an external calibration leak.
The operation modes Vacuum and Sniffer must be separately calibrated when using
an external calibration.
A calibration should only take place when the device is at operating temperature. Cali-
brate at least 20 minutes after switch-on.
6.3.13.1 Internal calibration
ü
ü The device is in the state "Standby" or "Measure".
Operator
Supervisor
or
rights
1
Select the cross-hair icon .
2
Select “Internal“.
3
Press .
ð The device performs an internal calibration.
50 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 51
LEYBOLD Operation | 6
6.3.13.2 External calibration
ü
Operator
1
Mount the calibration leak on the inlet of the device.
2
> Setup > Measurement > Calibration leak
3
Adjust the leak rate of the calibration leak used, see also “Set external calibra-
tion leak [} 45]”.
4
Place the device in the state "Standby" or "Measure".
5
Press the cross-hair icon .
6
Select “External“.
7
Press .
8
Follow the instructions on the screen.
Supervisor
or
rights
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 51 / 94
Page 52
6 | Operation LEYBOLD
6.4 Measuring
ü The inlet flange on the upper side of the device is prepared for the pending mea-
surement. Optionally connected there: Calibration leak, specimen, sniffer line
SL300 or blank flange.
ü If you have a device with an oil-sealed backing pump, there is an exhaust line at the
exhaust port, see also ”Exhaust”.
ü Possible alternatives to the operating possibilities on the device are set up (op-
tional):
I/O module, remote control, WiFi connection to the notebook or tablet. Also see "Ac-
cessories and spare parts [} 76] " and "Operate leak detector via web browser
[} 84]".
1
Switch on the leak detector via the mains switch.
2
Make sure that the desired operation mode is set (see "Select operation mode
[} 42]").
3
Make sure that the correct basic settings and the settings for the current mea-
surement are carried out. See "Basic settings [} 32]" and "Settings for the mea-
surements [} 42]".
4
Make sure that calibration takes place daily.
When performing a calibration, note the 20 minute warm-up time. See "Calibrat-
ing [} 50]".
5
In standby mode, initiate the measurement process by pressing the START but-
ton.
6
Keep track of the measurement results either as line, bar or circle graph, see
"Presentation of the measurement screen [} 36]" and "Assembly of the touch-
screen [} 19]".
7
To display the maximum leak rate (Q
measurement, press the START button again. Also see "START button [} 16] "
and "Assembly of the touchscreen [} 19]".
8
To measure small leak rates more easily, press the ZERO button when re-
quired, see "Set and use the function ZERO [} 46]".
9
Record the measured values if necessary, see "Configure data recording
[} 53]" and "Assembly of the touchscreen [} 19]".
) on the measurement screen during a
max
10
Switch the instrument off.
See also
2 Exhaust [} 21]
52 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 53
LEYBOLD Operation | 6
6.5 Measurement data
The measured values are recorded in a database. The data recording can always take
place or via the Start-Stop-Button. The measured values can be exported to a USB
flash drive (FAT32 format) in the CSV format. The extent of the export can be deter-
mined through different criteria.
See also
2 Configure and implement export [} 53]
6.5.1 Configure data recording
NOTICE
Reduces the service life of the memory
The recording of many measured values reduces the service life of the internal mem-
ory.
► Disable data recording when you no longer need it.
ü
Operator
1
> Setup > Data recording
2
If necessary change the "Max. database size".
ð The standard size of the database corresponds approximately to the number
of measurement values that can take place throughout the period of one year.
This however corresponds to a database size of approx. 16 GB.
ð If storage is needed for the recording and the maximum set database size (in
measurement values) has been exceeded, the oldest records are automati-
cally deleted so that 5% of the specified capacity is freed for new data.
3
If necessary change "Export file prefix".
ð The export files receive the name "Prefix + time stamp + extension
(e.g.icmeas20160720-082829.csv).
4
To record immediately after starting the device, activate the option "Enabled".
Supervisor
or
rights
ð This option is deactivated as standard. To start or stop a recording without
activating this option press in the measurement display.
5
Save .
6.5.2 Configure and implement export
ü
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 53 / 94
Operator
1
> Measurement data export
Supervisor
or
rights
Page 54
6 | Operation LEYBOLD
2
Select under "Export format" between "CSV en" and "CSV de".
Standard is "CSV en".
For “CSV en”, the decimal separator is a dot and the column separator is a
comma.
For “CSV de”, the decimal separator is a comma and the column separator is a
semicolon.
3
If necessary change the preset "Sample distance": "Minimum", "1", "2", "5" or
"10" seconds.
ð With the setting "Minimum" all measured values are exported in the search
area.
ð With the settings "1", "2", "5" or "10" seconds only the measured values of the
search area are exported whose temporal difference is 1, 2, 5 or 10 seconds.
4
If necessary change the preset "Time criterion". As choices there are "Back from
now" or "Rangeavailable".
Make sure that the export process is limited to 1 day maximum. This corre-
sponds to 1 million measurement values with full recording. If you want export
data from a larger time period perform several exports.
ð "Back from now": A time period can be set in seconds to coincide with the
moment retroactive from when the export process should begin.
ð "Range": An export time period can be exported. To do this make your entries
in the available fields, to start below left and to stop below right.
5
Save .
ð Storing automatically starts the export.
6.5.3 Measurement data database: Information and delete
function
Supervisor
ü
1
> Data recording
ð The following is displayed:
"Current database size" in [Byte]
"Measurement values": Number of measurement values in the database
"Max. database size": Number of measurement values that can be stored in
the database
"Level"
"Oldest record": Time stamp of the oldest measurement value
"Newest record": Time stamp of the newest measurement value
- rights
2
If it is necessary to delete and re-create the entire database, press on the button
"Clear database".
54 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 55
LEYBOLD Operation | 6
6.6 Information
6.6.1 Retrieve information about the device
Diverse information on the device is shown: Software and serial numbers, network in-
formation and operating hours.
►
> Information > Device > Identification
►
> Information > Device > Network
►
> Information > Device > Operating hours
6.6.2 Call information on the assemblies
Diverse measurement values and information to the following assemblies is shown:
Preamplifier, ion source, turbo molecular pump (TMP), processor assembly MSB,
backing pump and its frequency converter.
►
> Information > Assemblies > Ion source
►
> Information > Assemblies > MSB
►
> Information > Assemblies > TMP
►
> Information > Assemblies > Preamplifier
6.6.3 Information on connected accessories
►
> Information > Accessories > I/O module
ð If an I/O module is connected, you will find details.
6.6.4 Call the energy data information
Diverse measure supply voltages, electrical power and temperatures are shown.
►
> Information > Energy > Power
►
> Information > Energy > Voltage (1)
ð In this window the first part of the information to the voltage is shown.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 55 / 94
Page 56
6 | Operation LEYBOLD
►
> Information > Energy > Voltage (2)
ð In this window the second part of the information to the voltage is shown.
6.6.5 Call the latest information to the current measurement
value
►
> Information > Measurement values > Leak rate and pressure
ð The leak rate and different pressure values are shown.
►
> Information > Measurement values > Temperature
ð Different temperature values are displayed.
►
> Information > Measurement values > Runtimes
ð The current runtime information is displayed.
6.6.6 Call the latest information to the current calibration value
►
> Information > Calibration
6.7 Log
6.7.1 Call the error and warning log
►
> Logs > Errors and warnings
If there are more than 20 entries always the oldest entry is deleted.
6.7.2 Call the TMP log
Display of the fault and warning history of the turbo molecular pump.
The entries are for the entire period of use of the device. If there are more than 10 en-
tries always the oldest entry is deleted.
►
> Logs > TMP
6.7.3 Call calibration log
The entries are for the entire period of use of the device. If there are more than ap-
prox. 20 entries always the oldest entry is deleted.
►
> Logs > Calibrations
56 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 57
LEYBOLD Operation | 6
6.7.4 Call maintenance log
►
> Logs > Maintenance
If there are more than 20 entries always the oldest entry is deleted.
6.8 Device settings
6.8.1 Viewing and customizing individual parameters
You are able to get a quick overview of the actual settings of the device and you can
make modifications, if needed.
ü You have the required right to change the specific parameter.
1
> Sets of parameters > Parameter list
ð The device settings will be displayed as a list.
2
Modify individual parameters, if needed.
3
Save .
►
To modify parameters, press alternatively a subheading in the list. A separate set-
ting window will be opened, where you can change and save.
ð After changing a parameter setting in a separate window press to return to
the list of parameters.
6.8.2 Saving and managing sets of parameters
A set of parameters is a collection of parameters with the relevant settings of the de-
vice. You are able to save sets of parameters in text-based files at any time. The pa-
rameters can be viewed in clearly arranged form.
Supervisor
ü
1
> Sets of parameters > Manage sets of parameters
ð Sets of parameters already created will be displayed as a list.
If the values of a saved set of parameters match the actual settings of the de-
vice 100 %, a green dot will be displayed.
- rights
2
To create a new set of parameters, press .
ð In the next window you can insert a free text description. The prefix “parame-
ter-set” and the date of saving are used for the file name. Save . You are
able to save max 10 sets of parameters.
3
To open the context menu of a created set of parameters, press the desired set
of parameter and choose
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 57 / 94
Page 58
6 | Operation LEYBOLD
, to view further details concerning the parameters contained. If parameters
do not match actual device settings, an orange dot will be displayed.
If there is a missing setting, a red dot will be displayed (after a software update
for example). We recommend to view the missing setting, to create a new set of
parameters and to delete the old set of parameters.
, to activate a set of parameters.
, to delete a set of parameters.
6.8.3 Exporting or importing sets of parameters
You are able to transfer saved sets of parameters from the internal memory to an at-
tached USB flash drive and to import the sets again.
Supervisor
ü
1
> Sets of parameters > Manage sets of parameters
2
To export all sets of parameters to a USB flash drive (formatted in FAT32) if
needed, press below the list.
3
To import all sets of parameters from a USB flash drive into the device, press
below the list.
ð All sets of parameters on the USB flash drive will be saved in the device, if
the number of 10 is not exceeded. Using a PC you can delete redundant sets
of parameters on the USB flash drive before transferring.
ð You must not modify parameters of a set of parameters on the USB flash
drive before importing. You cannot transfer these files to the device after the
modification.
- rights
58 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 59
LEYBOLD Operation | 6
6.9 Updating the software
The device has two different software versions: One for the user interface and one for
the basic unit. Each has its own independent versions number.
6.9.1 Update the user interface software
Import software updates using a USB flash drive.
NOTICE
Data loss due to an aborted connection
► Do not switch off the device and do not remove the USB flash drive while the soft-
ware is being updated!
Supervisor
ü
- rights
1
Copy the file into the main directory of a FAT32 formatted USB flash drive.
2
Connect the USB flash drive to a USB port on the device.
3
> Update > Update operating unit
ð At the top in the window the active software version of the user interface is
shown.
If one or more versions of the software are on the USB flash drive the most
recent version is shown on the line below. If this is the same as the version
already installed the background is green, otherwise it is red.
4
In order to load the new software version, press on the button "Update".
ð After completion there is an automatic restart of the operating unit.
6.9.2 Updating the software of the basic unit
Import software updates using a USB flash drive.
NOTICE
Data loss due to an aborted connection
► Do not switch off the device and do not remove the USB flash drive while the soft-
ware is being updated!
Supervisor
ü
1
Copy the file into the main directory of a FAT32 formatted USB flash drive.
2
Connect the USB flash drive to the USB port on the device.
3
> Update > Update basic unit
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 59 / 94
- rights
Page 60
6 | Operation LEYBOLD
ð At the top in the window the active software version of the basic unit is
shown.
If one or more versions of the software are on the USB flash drive the most
recent version is shown on the line below. If this is the same as the version
already installed the background is green, otherwise it is red.
4
In order to load the new software version, press on the button "Update".
ð After completion there is an automatic restart of the system.
6.9.3 Update the software in expert mode
Supervisor
ü
1
> Update > Update operating unit/basic unit > Expert
ð Software versions already available on the device are shown in a list.
2
Highlight any of the software versions as required and proceed to step 5.
ð Resetting to an older software version is possible.
- rights
3
If alternatively you want to add a new software version, connect a FAT32 for-
matted USB flash drive with the update file to one of the USB ports of the de-
vice.
4
In order to load the new software version, press on .
5
To activate the new version, select the desired list entry and press .
ð After completion there is an automatic restart of the system.
6.10 Lock screen
You can protect the screen against unintended operation by accidental movement.
You can activate or deactivate this protection at any time after starting up the device.
1
> Lock screen
ð The screen lock will be activated and an icon “safety lock” will be displayed
on the screen.
2
To terminate the screen lock, tap the screen in any position and confirm the
question in the dialog window.
6.11 Use external monitor
You are able to use an external touch monitor instead of the internal monitor. You can
use either the internal or the external monitor.
ü You have a touch monitor with connections for HDMI and USB, furthermore an ap-
propriate power supply. HDMI is required to transmit the images, USB is required to
transmit the sound.
60 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 61
LEYBOLD Operation | 6
1
Connect the HDMI cable and the USB cable of the touch monitor with the con-
nector block of your leak detector, see also “Connections for accessories and
control signals [} 23]“. For proper operation, make sure that the cable length
does not exceed 3 m.
2
> Display > Switch monitor > External monitor
ð The picture will be displayed on the external monitor.
►
Instead of changing the monitor display, you can connect the external monitor be-
fore switching on the device.
ð Then the picture will be displayed on the external monitor without changing
settings.
Switch to internal monitor
When the instrument is switched on, you will be able to switch to internal monitor at
any time.
►
> Display > Switch monitor > Internal monitor
6.12 View vacuum diagram
To check the function and the operating state of the measuring system at a glance,
call up the simplified diagram of the vacuum diagram.
►
> Vacuum diagram
6.13 Resetting to factory settings
You can restore the device to factory settings.
Loss of settings and measurement data
After resetting to factory settings only the manufacturer factory settings are in the
memory of the device. The software of the device is not reset when restoring the fac-
tory settings.
Supervisor
ü
►
> Setup > General > Reset settings > Reset now
- rights
6.14 Logging off from the device
1
Press on your name which appears on the top left of the display.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 61 / 94
Page 62
6 | Operation LEYBOLD
ð The window "User accounts" opens. See also “Modify Personal Settings
[} 34]“.
2
You log off from the device via the button "Log off".
ð The login window opens.
6.15 Switching off the device.
You can switch off the device at the mains switch at any time. The parameters set in
the device remain saved.
62 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 63
LEYBOLD Warning and error messages | 7
7 Warning and error messages
During operation, the display shows information that helps you operate the instrument.
Measurement values are displayed along with current unit modes, operating instruc-
tions as well as warnings and error messages. The instrument is equipped with exten-
sive self-diagnostic functions. If the electronics detect a faulty state, the device will
show this as far as possible on the display and will interrupt operation when neces-
sary. Warning and error messages consist of a number, a descriptive text, and often
an associated measured value (e.g., a measured voltage).
Warnings
Error messages
Active errors and warn-
ings
Confirmed warnings
Reference on the dis-
play
Warnings warn of instrument modes that can impair the accuracy of measurements.
Operation of the instrument is not interrupted.
For details about the cause and the remedy, press .
To close a warning message, press the button ”Clear” after reading.
Errors are events that force the interruption of the operation.
For details about the cause and the remedy, press .
Once you have found the cause for the error continue operation by pressing the button
"Clear".
This menu item is only displayed when the template contains errors or warnings:
►
> Errors and warnings
If an active warning is acknowledged without rectifying the cause, it is displayed under
"Confirmed warnings".
►
> Confirmed warnings
An overview of possible errors and warnings can be found at:
►
> Help > Errors and warnings
7.1 List of warning and error messages
W102 Timeout during
communication with
EEPROM on VI-
Board
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 63 / 94
The EEPROM on the VI-Board is de-
fective or does not exist
• Contact customer service
Page 64
7 | Warning and error messages LEYBOLD
W104 One EEPROM pa-
rameter has been
initialized
W106 Several EEPROM
parameters have
been initialized
A new parameter was introduced by
a software update
The EEPROM on the VI-Board is de-
fective
A software update introduced new
parameters
• Confirm the warning message
• Check that the message does not
appear when you restart the device
• Check whether the factory settings
correspond with the new parameter
of your application.
• Confirm the warning message
• Check if the message occurs each
time when you restart the device
• Contact customer service
• Confirm the warning message
• Check that the message does not
appear when you restart the device
• Check whether the factory settings
comply with the new parameters of
your application.
E107 Internal IIC commu-
nication error
E108 Internal IIC2 com-
munication error
W110 Real-time clock was
reset! Please enter
date and time
The EEPROM on the VI-Board was
replaced
• Confirm the warning message
• Check that the message does not
appear when you restart the device
• Check whether the factory settings
comply with the new parameters of
your application.
The EEPROM on the VI-Board is de-
fective
• Confirm the warning message
• Check if the message occurs each
time when you restart the device
• Contact customer service
Internal IIC communication error • Contact customer service
Internal IIC2 communication error • Contact customer service
The real-time clock has not been set • Enter the correct date and time
• Check that the message does not
appear when you restart the device
Battery jumper on the MSB not set • Contact customer service
Rechargeable battery on MSB is dis-
• Contact customer service
charged or defective
Real-time clock defective • Contact customer service
64 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 65
LEYBOLD Warning and error messages | 7
W122 No response from
the BUS-Modul
W125 I/O module no
longer connected
W127 Wrong bootloader
version
Connection to BUS module inter-
rupted
• Check the connection to the BUS
module.
• Replace the connection cable to
the bus module
Bus module defective • Replace the bus module
Bus module connection on the de-
• Contact customer service
vice defective
Connection to I/O module interrupted • Check the connection to the I/O
module.
• Replace the connection cable to
the I/O module
I/O module defective • Replace the I/O module
I/O module connection on the device
• Contact customer service
defective
The bootloader is not compatible with
• Contact customer service
application
E129 EEPROM contains
data from wrong de-
vice class
W151 No communication
with operating unit
W152 No communication
with control panel
W171 CU1000 not sup-
ported
W201 Voltage U24V_MSB
too low
The software of the basic unit does
• Contact customer service
not match the EEPROM
The EEPROM does not match this
• Contact customer service
device class
A software update or a parameter re-
set has been executed
• Confirm the warning message
• Check that the message does not
appear when you restart the device
Internal connection problem between
• Contact customer service
the basic unit and the operating unit
Internal connection problem between
• Contact customer service
the basic unit and the control panel
A CU1000 can not be used with this
device
• Disconnect the CU1000 from this
device
Malfunction of 24V power supply unit • Contact customer service
Short circuit or overload in the 24V
• Contact customer service
supply
W202 Voltage U24V_MSB
Malfunction of 24V power supply unit • Contact customer service
too high
W203 24V valve supply
voltage out of range
Malfunction of a valve • Contact customer service
Short circuit or overload in the 24V
• Contact customer service
valve supply
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 65 / 94
Page 66
7 | Warning and error messages LEYBOLD
W206 24V operating unit
supply voltage out
of range
W207 12V internal supply
voltage out of range
W208 24V fan supply volt-
age out of range
W209 24V DIV1 supply
voltage out of range
W210 24V DIV2 supply
voltage out of range
W211 5V internal supply
voltage out of range
W212 5V sniffer line sup-
ply voltage out of
range
Malfunction of operating unit • Contact customer service
Short circuit or overload in the 24V
• Contact customer service
operating unit supply
Short circuit or overload in the 12V
• Contact customer service
supply
Malfunction of a fan • Contact customer service
Short circuit or overload in the 24V
• Contact customer service
fan supply
Short circuit or overload in the 24V
• Contact customer service
DIV1 supply
Short circuit or overload in the 24V
• Contact customer service
DIV2 supply
Short circuit or overload in the inter-
• Contact customer service
nal 5V supply
Sniffer line defective • Use another sniffer line, if possible
• Contact customer service
Short circuit or overload in the 5V
• Contact customer service
sniffer line supply
W221 Internal voltage
24V_RC voltage out
of range
W222 Internal voltage
24V_IO voltage out
of range
The remote control is defective • Use another remote control, if pos-
sible
The cable connected to REMOTE
• Use another cable, if possible
CONTROL connector is defective
The accessory connected to ACCES-
• Use another accessory, if possible
SOIRIES connector is defective
The cable connected to ACCES-
• Use another cable, if possible
SOIRIES connector is defective
Short circuit or overload in the
• Contact customer service
24V_RC supply
The module connected to LD con-
• Use another module, if possible
nector is defective
The cable connected to LD connec-
• Use another cable, if possible
tor is defective
Short circuit or overload in the
• Contact customer service
24V_IO supply
W223 Internal voltage
24V_TMP1 voltage
Short circuit or overload in the
24V_TMP1 supply
• Contact customer service
out of range
66 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 67
LEYBOLD Warning and error messages | 7
W224 Internal voltage
24V_PRESSURE
(Pirani) voltage out
of range
W240 Voltage +15V out of
range
W241 Voltage -15V out of
range
E242 +15V or -15V volt-
age shorted
W250 REF5V voltage out
of range
E252 REF5V voltage
shorted
W300 Anode voltage too
low
Short circuit or overload in the
• Contact customer service
24V_PRESSURE (Pirani) supply
Short circuit at preamplifier • Contact customer service
VI-Board or MSB defective • Contact customer service
Short circuit at preamplifier • Contact customer service
VI-Board or MSB defective • Contact customer service
Short circuit at preamplifier • Contact customer service
VI-Board or MSB defective • Contact customer service
Short circuit at preamplifier • Contact customer service
VI-Board or MSB defective • Contact customer service
Short circuit at preamplifier • Contact customer service
VI-Board or MSB defective • Contact customer service
Short circuit of the anode voltage • Contact customer service
VI-Board or MSB defective • Contact customer service
W301 Anode voltage too
high
W302 Suppressor voltage
too low
W303 Suppressor voltage
too high
W304 Anode-cathode volt-
age too low
W305 Anode-cathode volt-
age too high
E306 Anode voltage
wrong
MSB defective • Contact customer service
Short circuit suppressor or preampli-
• Contact customer service
fier
VI-Board or MSB defective • Contact customer service
MSB defective • Contact customer service
Short circuit between anode and
• Contact customer service
cathode
VI-Board or MSB defective • Contact customer service
MSB defective • Contact customer service
The anode voltage set value is out-
side the allowable range
• Perform a calibration
• Contact customer service
MSB defective • Contact customer service
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 67 / 94
Page 68
7 | Warning and error messages LEYBOLD
W310 Cathode 1 broken Cathode defective • Check that the other cathode has
been switched on
• Contact customer service
Connection to cathode broken • Contact customer service
VI-Board or MSB defective • Contact customer service
W311 Cathode 2 broken Cathode defective • Check that the other cathode has
been switched on
• Contact customer service
Connection to cathode broken • Contact customer service
VI-Board or MSB defective • Contact customer service
E312 Cathodes broken Both cathodes defective • Contact customer service
Connection to cathode broken • Contact customer service
VI-Board or MSB defective • Contact customer service
E340 Emission error Pressure too high with aged cathode • Contact customer service
W342 Cathode not con-
nected
Both cathodes defective during self
test
• Contact customer service
Plug of ion source not connected • Contact customer service
W350 Suppressor not con-
nected
E352 Preamplifier not
connected
W358 Alternate preampli-
fier ranges
W359 Overdriven pream-
plifier
W360 Preamplifier output
too low
Suppressor cable not connected or
• Contact customer service
defective
Preamplifier defective or cable not
• Contact customer service
connected
Preamplifier defective • Contact customer service
Unusual leak rate waveform • Contact customer service
Ion source or preamplifier defective • Contact customer service
Mass spectrometer contaminated • Contact customer service
Ion source bad • Contact customer service
Mass spectrometer contaminated • Contact customer service
W361 The offset voltage of
Preamplifier defective • Contact customer service
the preamplifier is
too high
W362 Preamplifier range
error
W390 500 GOhm resistor
out of range
68 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Preamplifier defective • Contact customer service
MSB defective • Contact customer service
Preamplifier defective • Contact customer service
MSB defective • Contact customer service
Page 69
LEYBOLD Warning and error messages | 7
E400 TMP error message Unhandled error message from the
• Contact customer service
TMP
E402 No communication
with turbo pump
converter
TMP cable defective or not con-
• Contact customer service
nected
TMP converter defective • Contact customer service
MSB defective • Contact customer service
W405 No TMP run-up time Inlet pressure during run-up too high • Check that the backing pump is
working during run-up
• Check that the pressure drops dur-
ing run-up
• Contact customer service
TMP bearing damage • Contact customer service
E410 TMP temperature
too high
The ambient temperature is too high • Turn off the device and let it cool
down
• Reduce the temperature in the en-
vironment in which the device
stands
Air filter dirty • Clean the air vents or replace the
filter plates
Fan blocked or defective • Contact customer service
E422 No TMP run-up time Inlet pressure during run-up too high • Check that the backing pump is
working during run-up
• Check that the pressure drops dur-
ing run-up
• Contact customer service
TMP bearing damage • Contact customer service
E430 TMP bearing tem-
perature too high
(one hour > 60°C)
The ambient temperature is too high • Turn off the device and let it cool
down
• Reduce the temperature in the en-
vironment in which the device
stands
Air filter dirty • Clean the air vents or replace the
filter plates
Fan blocked or defective • Contact customer service
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 69 / 94
Page 70
7 | Warning and error messages LEYBOLD
W431 TMP bearing tem-
perature too high (>
60°C)
The ambient temperature is too high • Turn off the device and let it cool
down
• Reduce the temperature in the en-
vironment in which the device
stands
Air filter dirty • Clean the air vents or replace the
filter plates
Fan blocked or defective • Contact customer service
E500 Pressure sensor p1
not connected
Pressure sensor p1 not connected or
cable defective
• Contact customer service
VI-Board or MSB defective • Contact customer service
E502 Pressure sensor p2
not connected
Pressure sensor p1 not connected or
cable defective
• Contact customer service
VI-Board or MSB defective • Contact customer service
E520 Pressure too high Pressure p2 too high for at least 15s • Contact customer service
E521 Pressure rise, an-
ode voltage col-
Pressure rise at pressure sensor p2
and anode voltage collapsed
• Contact customer service
lapsed
W522 Pressure rise, emis-
sion break down
W540 Flow through capil-
lary is too low!
Leaks may not be
detectable!
W541 Flow through capil-
lary is much too low
Leaks may not be
detectable!
Pressure rise at pressure sensor p2
• Contact customer service
and emission collapsed
Filter is dirty • Replace the sniffer tip filter
Sniffer tip or capillary blocked • Remove the blocking of the sniffer
tip
• Use another sniffer line, if possible
• Contact customer service
The pressure limit for a blocked cap-
illary is set too high
• Check and change the pressure
limit, if necessary
Filter is dirty • Replace the sniffer tip filter
Sniffer tip or capillary blocked • Remove the blocking of the sniffer
tip
• Use another sniffer line, if possible
• Contact customer service
The pressure limit for a blocked cap-
illary is set too high
• Check and change the pressure
limit, if necessary
70 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 71
LEYBOLD Warning and error messages | 7
W542 Flow through capil-
lary too high
W559 Leak rate too high!
Switched to Standby
to prevent conatami-
nation
W580 Maximum evacua-
tion time until 100
mbar exceeded
Capillary broken or leaky • Use another sniffer line, if possible
• Contact customer service
The pressure limit for a broken capil-
lary is set too low
Gross leak at test object or the con-
nection to the test object
• Check and change the pressure
limit, if necessary
• Check the tightness of the connec-
tion between the leak detector and
the test object
Gross leak protection limit is set too
low
• Check and change the gross leak
protection limit, if necessary
Alarm delay time time too short • Check and change the alarm delay,
if necessary
Gross leak at test object or the con-
nection to the test object
• Check the tightness of the connec-
tion between the leak detector and
the test object
• Use another test object, if possible
The settings value for the max. evac-
uation time gross leak is too low
• Check and change the max. evacu-
ation time gross leak if necessary
W581 Maximum evacua-
tion time until mea-
surement exceeded
W630-
Calibration request Operation mode or mass has
Phoenix
W670 Calibration error
(emission break
down)
Gross leak at test object or the con-
nection to the test object
The settings value for the max. evac-
uation time until measurement is too
low
changed
Runtime over 30 minutes and tem-
perature change by 5 Kelvin since
last calibration
Runtime over 30 minutes and no cali-
bration since 24 hours
During calibration the emission col-
lapsed
• Check the tightness of the connec-
tion between the leak detector and
the test object
• Use another test object, if possible
• Check and change the max. evacu-
ation time until measurement if
necessary
• Perform a calibration
• Perform a calibration
• Perform a calibration
• Check if the message occurs again
when you perform a new calibra-
tion
• Contact customer service
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 71 / 94
Page 72
7 | Warning and error messages LEYBOLD
W700 Preamplifier temper-
ature is too low
W702 Preamplifier temper-
ature is too high
W710 MSB temperature is
too high
Ambient temperature is too low • Increase the temperature in the en-
vironment in which the device
stands
Temperature sensor is defective • Contact customer service
The ambient temperature is too high • Reduce the temperature in the en-
vironment in which the device
stands
Air filter dirty • Clean the air vents or replace the
filter plates
Fan blocked or defective • Contact customer service
The ambient temperature is too high • Reduce the temperature in the en-
vironment in which the device
stands
Air filter dirty • Clean the air vents or replace the
filter plates
Fan blocked or defective • Contact customer service
E711 Max. MSB tempera-
ture exceeded
W901 Maintenance: TMP
bearing lubricant
W903 Maintenance: Cali-
bration leak expired
W904 Maintenance: Snif-
fer tip filter
W910 Maintenance: Back-
ing pump
W920 Maintenance: Ex-
haust filter
The ambient temperature is too high • Reduce the temperature in the en-
vironment in which the device
stands
Air filter dirty • Clean the air vents or replace the
filter plates
Fan blocked or defective • Contact customer service
Maintenance interval for TMP bear-
• Contact customer service
ing lubricant exceeded
Maintenance interval for calibration
• Contact customer service
leak exceeded
Maintenance interval for sniffer tip fil-
• Contact customer service
ter exceeded
Maintenance interval for backing
• Contact customer service
pump exceeded
Maintenance interval for exhaust fil-
• Contact customer service
ter exceeded
W925 Maintenance: Air fil-
ter
72 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Maintenance interval for air filter ex-
ceeded
• Contact customer service
Page 73
LEYBOLD Cleaning and maintenance | 8
8 Cleaning and maintenance
All cleaning and maintenance work described here must be carried out without open-
ing the device!
WARNING
Life threatening hazard from electric shock
High voltages are inside the device. Touching parts where electrical voltage is present
can result in death.
► Disconnect the device from the power supply prior to any installation and mainte-
nance work.. Ensure that the electrical supply cannot be switched back on uninten-
tionally.
► Don’t open the device!
8.1 Cleaning the housing
Wipe the housing with a soft damp cloth.
Use only water to moisten. Avoid cleaners that contain alcohol, fat or oil.
Use a soft brush or a vacuum cleaner to clean the ventilation slots.
8.2 Change the filter mat of the fan input
Filter set with filter mat Order number 200001210
Required tools None
Depending on the location, the filter mat on the back of the device may become dirty.
Check the filter mat periodically and change it, if the filter mat is significant dirty.
ü You have a new filter set.
1
Make sure that the device is disconnected from the power supply by pulling the
power plug securely.
2
Gently lift the lower corners of the plastic grid and remove the plastic grid with
the filter mat.
3
Replace the dirty filter set.
8.3 Check oil-sealed backing pump
If you have a leak detector with an oil-sealed backing pump, you should check the
sight glasses at regular intervals.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 73 / 94
Page 74
8 | Cleaning and maintenance LEYBOLD
1
On the side of the device, make sure whether the oil of the pump falls below the
marked minimum level.
2
On the back of the device, check if the oil filter has become clogged and the oil
exceeds the marked maximum level.
If the backing pump contains too little oil or the oil filter has become clogged, contact
the service.
8.4 Service at Leybold
Maintenance inside the device should only be performed by the manufacturer.
If you send us a device, indicate whether the device is free of harmful substances or if
it is contaminated. If it is contaminated, also indicate the type of hazard. Use a form
prepared by us:
”Declaration of Contamination of Compressors, Vacuum Pumps and Components”.
The form can be found on the Internet: www.leybold.com - Downloads - Download
documents.
Attach the form to the device or attach it.
This declaration of contamination is required to comply with legal requirements and
protect our employees.
Devices without explanation about contamination sends Leybold back to the sender.
For devices with oil-sealed backing pump, close the connection “EXHAUST“ with the
plug from the scope of delivery.
74 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 75
LEYBOLD Decommissioning the measuring instrument | 9
9 Decommissioning the measuring
instrument
The device may be contaminated by the process or environmental factors. In this
case, it must be professionally decontaminated. We offer this service at a fixed price.
We kindly ask you to send us your request.
Health and environmental damage
Contaminated parts can cause health and environmental damage.
Before starting work, find out about possible contamination. When handling contami-
nated parts, observe the relevant regulations and observe the protective measures.
Disassemble clean devices, separate and dispose of them according to
their material type.
We offer this service. We kindly ask you to send us your request.
If you send us a device, follow the instructions in the section “Service at Leybold
[} 74]“.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 75 / 94
Page 76
10 | Accessories LEYBOLD
10 Accessories
10.1 Accessories and spare parts
The parts listed below can additionally be ordered:
IO Interface
IO Interface module 252211V02
Bus module
Bus Interface module Profibus 252212V02
Bus Interface module ProfiNet 252213V02
Bus Interface module DeviceNet 252214V02
Bus Interface module EtherNet/IP 252215V02
Data cable
Cable for interface module 2 m 252290V02
Cable for interface module 5 m 252291V02
Cable for interface module 10 m 252292V02
Sniffer line
SL300, 4 m length 252003
QT100 Helium Sample Probe QUICKTEST 15594
Remote control
Remote control RC310, wired 252013V01
Remote control RC310WL, wireless 252014V01
Miscellaneous
Test gas spray gun, with hose 16555
Partial flow system 14020
Filter set for fan input 200001210
Sniffer line SL300
By using the sniffer line the leak detector can easily be converted to a sniffer leak
searcher. The length of the sniffer line is 4 m.
QUICKTEST QT100
QT100 is an accessory for helium leak detectors. It consists of a gas pump with hous-
ing. The QT100 ensures a quick suction of the test gas and thus for a short response
time.
76 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 77
LEYBOLD Accessories | 10
Extra long sniffer lines can be connected via the gas inlet socket of the QT100. This
enables sniffing leak detection for larger distances between the test object and the
leak detector. For the QT100 sniffer lines are available with 5 m, 20 m or 50 m length.
Remote control RC310C and RC310WL
With the RC310C remote control you can operate the leak detector over a cable with a
length of up to 28 m.
With the wireless remote control RC310, you can operate the leak detector at a dis-
tance of up to 100 m.
Via remote control you control the functions START, STOP / VENT (STOP/Ventilate),
ZERO (background). The measured leak rate is displayed as a bar graph, as a nu-
meric value or as a diagram on the display of the remote controls (see the RC310
Technical Manual).
Measurement values you create over a recording time of up to 24 hours in the internal
memory of the remote controls. You transfer the data easily to a USB flash drive.
You can set an internal threshold for warning when exceeding the set points. The
warning occurs visually on the display and audibly via the built-in loudspeaker or the
connected headset respectively.
The remote controls are placed in robust housings that allow ergonomic operation.
Magnets on the lower side allow installation from horizontal to vertical metal surfaces.
Search for the wireless remote control from the leak detector
If you have misplaced the RC310WL wireless remote control, you can trigger from
your leak detector acoustic signals of this remote control.
1
> Setup > Accessories > RC310
2
Select the setting “ON” in the field “Paging request”.
ð The remote control emits acoustic signals.
3
To stop signals from being emitted after finding the remote control, select "OFF"
in the "Paging request" field.
Partial flow system
In partial flow operation, the test object is additionally evacuated with another pump.
When using the partial flow system (cat.-no. 14020), the following advantages result:
• faster response times
• Ready for measurement already from 1000 mbar inlet pressure
• fast pumping and flooding of large test objects
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 77 / 94
Page 78
10 | Accessories LEYBOLD
10.2 I/O module
10.2.1 Create a connection between the device and the I/O
module
Supervisor
ü
1
Connect the I/O module with a data cable to the LD socket on the rear of the de-
vice, see "Connections for accessories and control signals [} 23]".
2
> Setup > Accessories > Device selection
3
Select the "IO module".
4
Save .
10.2.2 Configuring digital outputs
- rights
The digital outputs PLC-OUT 1 ... The available functions can be assigned in any way
necessary to the 8 I/O module.
Supervisor
ü
1
> Setup > Accessories > I/O module > Digital outputs configuration
2
Select the desired "Digital output".
ð The outputs PLC-OUT 1 - 8 are available.
3
Select the desired "Function", see the table below.
4
Select the desired "Mode".
ð The modes "Standard" or the mode "Inverse" are available for selection.
To mode "Inverse": In the table overview the description of the state "open"
must be replaced with the description of the state "closed".
5
Save .
Function State: Description
Off (open) open: always open
Ready for operation closed: Emission switched on, calibration process in-
- rights
active, no error
open: Emission switched off or calibration process
active or error
Emission on closed: Emission switched on
open: Emission switched off
Error closed: Error
open: No error
Error or warning closed: Error or warning
78 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 79
LEYBOLD Accessories | 10
Function State: Description
open: No error or warning
Run-up closed: Run-up
open: no run-up
Calibration request closed: No external calibration: Calibration required
When external calibration or "CAL check":
Request "Open or close external calibrated
leak"
open: No request: Calibration not required
Calibration active closed: Device is calibrated.
open: Device is not calibrated.
Calibration stable closed: Calibration completed with calibration leak
open: Assignment not stable or calibration is inac-
tive
Cathode 2 closed: Cathode 2 is active
open: Cathode 1 is active
Measuring closed: Measuring (ZERO is possible, all setpoint
outputs switch depending on the leak rate.)
open: Standby or emission disabled (ZERO is not
possible, all setpoint outputs will return
"Leak rate threshold value exceeded".)
Open open: always open
Sniff closed: Operation mode Sniffing active
open: Operation mode Vacuum active
Setpoint 1 closed: Measured leak rate exceeds the setpoint 1
open: Measured leak rate undercuts the setpoint 1
Setpoint 2 closed: Measured leak rate exceeds the setpoint 2
open: Measured leak rate undercuts the setpoint 2
Setpoint 3 closed: Measured leak rate exceeds the setpoint 3
open: Measured leak rate undercuts the setpoint 3
Setpoint 4 closed: Measured leak rate exceeds the setpoint 4
open: Measured leak rate undercuts the setpoint 4
Purge closed: Purge valve open
open Purge valve closed
Standby or evacuate closed: State standby or evacuate active
open: State standby of evacuate not active, such
as when measuring
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 79 / 94
Page 80
10 | Accessories LEYBOLD
Function State: Description
Status calibration
leak valve
Warning closed: Warning
ZERO active closed: ZERO switched on
closed: Test leak valve is open
open: Test leak valve is closed
open: No warning
open: ZERO switched off
10.2.3 Configure digital inputs
These inputs can be used to operate the device with a programmable logic controller
(PLC).
The digital inputs PLC-IN 1 ... The available functions can be assigned in any way
necessary to the 10 I/O module.
– Active signal: typically 24 V
– Inactive signal: typically 0 V.
The 24V output of the I/O module can be used as an active signal.
Every function can be inverted.
Supervisor
ü
1
> Setup > Accessories > I/O module > Digital inputs configuration
2
Select as desired "Digital input".
ð The inputs PLC-IN 1 - 10 are available.
3
Select the desired Function, see the table below.
4
Select the desired Mode.
ð The modes "Standard" or the mode "Inverse" are available for selection.
To mode "Inverse": In the following table overview, the arrow pointing the
transfer direction in the column "Transition" must be reversed.
5
Save .
Function Transition Description
Vent inactive→ active: Vent inlet (only in standby state)
CAL inactive→ active:
- rights
Start calibration.
active→ inactive:
No function - The input is not functioning. Recommended setting of unused inputs.
Delete inactive→ active: Erase warning or error message / cancel calibration.
Sniff inactive→ active:
active→ inactive:
80 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Apply value for background and finish calibration.
Enable sniffer mode.
Enable vacuum mode.
Page 81
LEYBOLD Accessories | 10
Function Transition Description
Purge inactive→ active:
active→ inactive:
Start inactive→ active: Change to the measurement mode.
Start/Stop inactive→ active:
active→ inactive:
Stop inactive→ active: Switch to Standby.
ZERO inactive→ active:
active→ inactive:
Switch-on purge (only in standby state)
Switch-off purge (only in standby state)
Change to the measurement mode.
Switch to Standby.
Switch ZERO on.
Switch ZERO off.
10.2.4 Configure analog outputs
Supervisor
ü
1
> Setup > Accessories > I/O module > Analog outputs configuration
2
Set-up the "Analog output 1".
ð You can choose from "Off", Pressure p1", Pressure p2", "Leak rate mantissa",
"Leak rate exponent", "Leak rate linear", "Leak rate logarithmic", "Leak rate
mantissa hyst.", and "Via interface".
- rights
3
Set-up the "Analog output 2".
ð You can choose from "Off", Pressure p1", Pressure p2", "Leak rate mantissa",
"Leak rate exponent", "Leak rate linear", "Leak rate logarithmic", "Leak rate
mantissa hyst.", and "Via interface".
4
Set-up the "Analog output scale".
ð You can choose from "0.5 V / decade", "1 V / decade", "2 V / decade", "2.5
V / decade", "3 V / decade", "5 V / decade", or "10 V / decade".
5
Set-up the "Exponent upper limit".
6
Save .
The settings "Analog output scaling" and "Upper limit exponent" affect both analog
outputs dependent on the selected function, see the table overview below.
Functions and assignment of analog outputs:
Off The analog outputs are
switched off
(Output voltage = 0 V).
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 81 / 94
Page 82
10 | Accessories LEYBOLD
Pressure p1 / Pressurep21 ... 10 V; 0.5 V / decade;
logarithmic
1 V = 1 x 10-3 mbar
Leak rate mantissa 1 ... 10 V; linear; in the se-
lected unit
Leak rate exponent 1 ... 10 V; 0.5 V / decade;
Step function;
1 V = 1 x 10
-12
; in selected
unit
Linear leak rate 0 ... 10 V; linear;
in the selected unit
Leak rate log. 0 ... 10 V; logarithmic;
in the selected unit
Useful only if the other analog output is assigned
"Leak rate exponent".
Useful only if the other analog output "Leak rate man-
tissa" or "Leak rate mantissa hyst." is assigned.
The upper limit (= 10 V) is set via the parameter "Ex-
ponent upper limit” in whole decades. The lower
value is always 0 (leak rate), which corresponds to 0
V output voltage.
This setting is for both analog outputs, if an appropri-
ate output function is selected. Depending on the se-
lected leak rate unit there is a different absolute limit.
The selected range can be additionally narrowed by
the limits, which is valid for all interfaces.
The upper limit (= 10 V) and the scale (V / decades)
are set via the parameters "Exponent upper limit" and
"Analog output scale".
For example:
Upper limit set to 1x10-5mbarl/s (=10 V). Scale set
to 5 V / decade. The lower limit is thus 1 x 10-7 mbar l/
s (= 0 V). The logarithmic output function of both the
slope in V / decade as well as the upper limit (10 V
limit) can be set. This results in the minimum dis-
playable value. The following slopes are available:
0.5, 1, 2, 2.5, 3, 5, 10 V/The higher the selected slope
value, the smaller the displayable area. The upper
limit is the same for both analog outputs. Depending
on the selected leak rate unit there is a different ab-
solute limit.
Set by interface The output voltage can be specified for tests with the LD log command 221.
Leak rate mantissa hyst. 0.7 ... 10 V; linear;
in the selected unit
Useful only if the other analog output is assigned
"Leak rate exponent". Through an overlap of the man-
tissa in the range 0.7 to 1.0, a constant jumping be-
tween two decades is prevented. 0.7 V corresponds
to a leak rate of 0.7x10-x. 9.9 V corresponds to a
leak rate of 9.9x10-x.
82 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 83
LEYBOLD Accessories | 10
10.2.5 Setting up the I/O module protocol
To switch between ASCII and LD protocol.
Supervisor
ü
1
2
3
> Setup > Accessories > I/O module > I/O module protocol
Set up.
Save .
- rights
10.3 Bus module
10.3.1 Creating a connection between the device and the bus
module
Supervisor
ü
- rights
1
Connect the bus module with a data cable to the LD socket on the rear of the
device, see “Connections for accessories and control signals [} 23]“.
2
> Setup > Accessories > Device selection
3
Select "Bus module".
4
Save .
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 83 / 94
Page 84
10 | Accessories LEYBOLD
10.4 Operate leak detector via web browser
NOTICE
Operating system can be attacked via USB or Ethernet
The Linux operating system used in the leak detector is not updated automatically and
can therefore contain security gaps. This vulnerability may be exploited through the
Ethernet and USB interfaces of the leak detector to provide unauthorized access to
the system.
► Ensure that no unauthorized person has access to these interfaces, for example
through a USB port / Ethernet port lock.
► In order not to jeopardize the security of your company network, never connect the
leak detector directly to the public Internet. This is true for connections over WLAN
as well as over Ethernet.
► However, if you want to access the web interface of the leak detector remotely, we
recommend an encrypted Virtual Private Network (VPN) connection. However, we
cannot assume any guarantee for the security of VPN connections, which are pro-
vided by third parties.
In order to be able to access the user interface of the device via WiFi there needs to
be a WiFi capable USB adapter with WiFi Access Point technology inserted in the rear
of device.
Minimum technical requirements:
• Interface: USB 2.0
• USB port: Type A
• Chipset: RTL819x or similar
• Support to: Access Point Client Mode
"EDIMAX EW-7612UAn V2” is a WiFi capable USB adapter, which meets the specifi-
cation and has been tested with the leak detector.
The WiFi connection can be susceptible to interference. The stability depends on the
range, shielding walls, other WiFi networks, interfering transmitters in the vicinity and
other factors.
10.4.1 Configure the WiFi connection of the leak detector
Supervisor
ü
1
> Setup > Network > WiFi
84 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
- rights
Page 85
LEYBOLD Accessories | 10
2
In the field "SSID" enter the desired network name and in the field "Password"
the desired password. “SSID“ and "Password" have the following values preset:
“Phoenix“ or “phoenix40“ respectively. The password should have at least 8
characters.
3
To set-up that the device supports the WiFi connection activate the option "En-
abled".
ð If the WiFi capable USB adapter is inserted, this will automatically start the
Access Point. In order to configure the WiFi adapter of the leak detector, no
USB adapter needs to be inserted.
4
Save .
10.4.2 Set-up the WiFi connection in the notebook or tablet
WiFi connection - quick-start
If you have already performed these preset work steps, then on most devices it is suf-
ficient just to enter the URL.
ü A WiFi capable USB adapter with WiFi Access Point Technology is connected to a
USB port on the rear of the leak detector, see "Connections for accessories and
control signals [} 23]".
ü In the configuration of the leak detector, the option "Enabled" is activated, see Con-
figure the WiFi connection of the leak detector [} 84].
ü The WiFi connection is automatically detected by the client.
ü With old devices WPA2 may need to be set-up as the encoding.
ü Java Script is enabled in the web browser. We recommend using a current version
of the web browser Chrome™, Firefox® or Safari®.
1
Check in the WiFi settings of your notebook or tablet whether it is already con-
nected the WiFi of the leak detector.
2
If it is not connected to the WiFi of the leak detector, select the WiFi of the leak
detector and enter if necessary the password, see "Configure the WiFi connec-
tion of the leak detector [} 84]", handling step 2.
3
To access the leak detector via the web browser of the notebook or tablet, use
the following URL:
phoenix.leybold.com
ð The current active user interface of the leak detector is called.
ð When using a notebook or tablet the same functionality is available as with the
touchscreen of the leak detector.
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 85 / 94
Page 86
11 | Appendix LEYBOLD
11 Appendix
11.1 Menu path
Pressing the navigation button brings you back to the measurement display regard-
less of whether you were previously in a menu or sub-menu.
11.1.1 Diagnosis
1
> Confirmed warnings
ð Can only be seen when active
2
> Data recording
3
> Errors and warnings
ð Can only be seen when active
10
11
12
13
14
15
16
17
18
4
> Information
5
> Information > Assemblies
6
> Information > Assemblies > Ion source
7
> Information > Assemblies > MSB
8
> Information > Assemblies > TMP
9
> Information > Assemblies > Preamplifier
> Information > Energy
> Information > Energy > Power
> Information > Energy > Voltage (1)
> Information > Energy > Voltage (2)
> Information > Device
> Information > Device > Operating hours
> Information > Device > Identification
> Information > Device > Network
> Information > Help > Errors and warnings
19
20
21
22
23
24
25
86 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
> Information > Calibration
> Information > Measurement values
> Information > Measurement values > Runtimes
> Information > Measurement values > Leak rate and pressure
> Information > Measurement values > Temperature
> Information > Accessories
> Information > Accessories > I/O module
Page 87
LEYBOLD Appendix | 11
26
27
28
29
30
31
32
33
34
35
36
37
38
> Information > Accessories > RC310
> Measurement data export
> Logs
> Logs > Errors and warnings
> Logs > Calibrations
> Logs > TMP
> Logs > Maintenance
> Update
> Update > Update operating unit
> Update > Update operating unit > Expert
> Update > Update basic unit
> Update > Update basic unit > Expert
> Vacuum diagram
11.1.2 Settings
10
11
12
13
14
15
1
> Display
2
> Display > General
3
> Display > Bar graph
4
> Display > Line graph
5
> Display > Switch monitor
6
> Display > Switch monitor > External monitor
7
> Display > Switch monitor > Internal monitor
8
> Audio
9
> User accounts
> User accounts > Log off
> User accounts > Manage Auto Login
> User accounts > Manage user accounts
> User accounts > Change own PIN
> User accounts > Change own language
> Operating mode
16
17
18
19
20
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 87 / 94
> Lock screen
> Setup
> Setup > General
> Setup > General > Date and time
> Setup > General > Units
Page 88
11 | Appendix LEYBOLD
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
> Setup > General > Reset settings > Reset now
> Setup > Data recording
> Setup > Measurement
> Setup > Measurement > Pressure limits
> Setup > Measurement > Mass
> Setup > Measurement > Calibration leak
> Setup > Measurement > Sniff
> Setup > Measurement > Sniff > Capillary surveillance
> Setup > Measurement > Protection
> Setup > Measurement > Miscellaneous
> Setup > Measurement > Partial flow
> Setup > Measurement > Vacuum
> Setup > Measurement > ZERO and filter
> Setup > Network
> Setup > Network > Connected clients
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
> Setup > Network > WiFi
> Setup > Maintenance requests
> Setup > Accessories
> Setup > Accessories > Bus module
> Setup > Accessories > Device selection
> Setup > Accessories > I/O module
> Setup > Accessories > I/O module > I/O module protocol
> Setup > Accessories > I/O module > Analog outputs configuration
> Setup > Accessories > I/O module > Digital outputs configuration
> Setup > Accessories > I/O module > Digital inputs configuration
> Setup > Accessories > RC310
> Sets of parameters
> Sets of parameters > Parameter list
> Sets of parameters > Manage sets of parameters
> Setpoints
88 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 89
LEYBOLD Appendix | 11
11.2 CE Declaration of Conformity
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 89 / 94
Page 90
Index LEYBOLD
Index
A
Access controls 33
Automated login
Switch off 35
Switch on 35
B
Background suppression 47
Bus module 83
C
Calibrating
External calibration 51
Internal calibration 50
Staring situation 50
Change audio settings 38
Change units 38
Changing the volume 38
Cleaning works 73
Connecting sniffer line SL300 13, 20
I
I/O module 78
M
Machine factor 44
Maintenance 73
Maintenance requests 41
Measurement data
Configure and implement export 54
Configure records 53
Information on the database 54
Menu path 86
Modify Personal Settings 34
O
Operation
Notebook, Tablet 85
Operation mode sniffing 13, 42
Operation mode vacuum 13, 42
Operator 33
O-Ring with filter 20
D
Display background leak rate 37
Display leak rate and pressure 56
Display maximum leak rate 16
Display runtimes 56
Display temperature value 56
E
Evacuation time gross leak 40
Evacuation time measurements 40
F
Function description 13
G
Gas ballast 21
P
Partial flow 23, 49
Personnel qualifications 8
Q
Qmax 16
QUICKTEST QT100 44, 76
R
RC310 WL search (Paging) 77
Remote control RC310C 77
Remote control RC310WL 77
Remote control search (Paging) 77
Restore factory settings 61
Rights 33
90 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 91
LEYBOLD Index
S
Select gas 42
Select operation mode 42
Select ventilation mode 43
Set external calibration leak 45
Set of parameters
Delete 58
load 58
Setting setpoints 42
Setting the language 34
Show background at standby 37
Sniffer line
Pressure monitoring 48
Sniffer line SL300 76
Software
Update basic unit 59
User interface update 59
Supervisor 33, 35
Switch OFF 62
Switch ON 32
Z
ZERO 52
Button 17
Factory setting 46
T
Technical data 24
Touchscreen 19
Icons 19
U
User 33
User profile
create 33
Delete 34
edit 34
load 34
V
Vacuum diagram 61
W
Web browser 84
WiFi 84
PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801) 91 / 94
Page 92
Index LEYBOLD
92 / 94 PHOENIX-Quadro-Operating-instructions-300700189_002_C1-(1801)
Page 93
Page 94