LEYBOLD MAG W 1600 C, MAG 1600 C, MAG W 1600 CT, MAG 2000 C, MAG W 2000 C Operating Instructions Manual

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Page 1

MAG 1600 C, CT MAG W 1600 C, CT MAG 2000 C, CT MAG W 2000 C, CT

Turbomolecular Pump with Magnetic Bearing

MAG.DRIVE L, L2

Electronic Frequency Converter

Software version MAG.DRIVE L: 1.2.3 MAG.DRIVE L2: 1.3.4 - 1.3.7

Cat. Nos. 894 14 /28 894 15 /29 894 16 /30 894 17 /31 857 24 /23

Operating Instructions

Vacuum Solutions Application Support Service

LEYBOLD VACUUM

GA 05.130/3.02

Page 2

Description

Contents

Page

1 Description . . . . . . . . . . . . . . . . . . . . . . . . . 3

1.1 System overview . . . . . . . . . . . . . . . . . . . . . . 3

1.2 Compatibility with pumped media . . . . . . . . . . 4

1.3 Design of the MAG . . . . . . . . . . . . . . . . . . . . 4

1.4 Function and design of the MAG.DRIVE . . . . 6

1.5 Standard specification . . . . . . . . . . . . . . . . . . 8

1.6 Technical data . . . . . . . . . . . . . . . . . . . . . . . . 9

1.7 Ordering information . . . . . . . . . . . . . . . . . . 10

2 Installation . . . . . . . . . . . . . . . . . . . . . . . . 22

2.1 General safety information . . . . . . . . . . . . . . 22

2.2 Unpacking - storing - transportation . . . . . . . 22

2.3 Operating environment . . . . . . . . . . . . . . . . 23

2.4 Connecting the MAG

to the vacuum chamber . . . . . . . . . . . . . . . . 23

2.5 Connecting the backing pump . . . . . . . . . . . 28

2.6 Connecting the cooling water . . . . . . . . . . . . 28

2.7 Connecting the purge gas . . . . . . . . . . . . . . 30

2.8 Installing the MAG.DRIVE . . . . . . . . . . . . . . 32

2.8.1 Power supply connection X10 . . . . . . . . . . . 33

2.8.2 Pump connection . . . . . . . . . . . . . . . . . . . . . 33

2.8.3 Control plug X1 . . . . . . . . . . . . . . . . . . . . . . 36

2.8.4 Interface connector . . . . . . . . . . . . . . . . . . . 38

2.8.5 Connection X33 . . . . . . . . . . . . . . . . . . . . . . 39

3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 40

3.1 Switching on . . . . . . . . . . . . . . . . . . . . . . . . 40

3.2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . 41

3.3 Switching off . . . . . . . . . . . . . . . . . . . . . . . . 41

4 Converter Control . . . . . . . . . . . . . . . . . . . 43

4.1 Functions of the front panel keys . . . . . . . . . 43

4.2 Operating display . . . . . . . . . . . . . . . . . . . . . 43

4.3 Remote control . . . . . . . . . . . . . . . . . . . . . . 44

4.4 Operating statuses . . . . . . . . . . . . . . . . . . . 46

4.5 Operating menu for the MAG.DRIVE L . . . . . 48

4.5.1 Basic menu . . . . . . . . . . . . . . . . . . . . . . . . . 48

4.5.2 Settings converter . . . . . . . . . . . . . . . . . . . . 49

4.5.3 Settings pump . . . . . . . . . . . . . . . . . . . . . . . 50

4.5.4 Settings active magnetic bearing . . . . . . . . . 50

4.5.5 Settings temperature management system . 51

4.5.6 Settings purge / vent . . . . . . . . . . . . . . . . . . 51

4.5.7 Total view of the menu . . . . . . . . . . . . . . . . . 52

4.6 Operating menu for the MAG.DRIVE L2 . . . . 53

4.6.1 Basic menu . . . . . . . . . . . . . . . . . . . . . . . . . 53

4.6.2 Settings converter . . . . . . . . . . . . . . . . . . . . 54

4.6.3 Settings pump . . . . . . . . . . . . . . . . . . . . . . . 55

4.6.4 Settings temperature management system . 55

4.6.5 Settings purge / vent . . . . . . . . . . . . . . . . . . 56

4.6.6 Total view of the menu . . . . . . . . . . . . . . . . . 57

4.7 Temperature management system . . . . . . . . 58

4.7.1 TMS for the MAG.DRIVE L . . . . . . . . . . . . . 58

4.7.2 TMS for the MAG.DRIVE L2 . . . . . . . . . . . . 60

5 Maintenance . . . . . . . . . . . . . . . . . . . . . . . 62

5.1 Removing the pump from the system . . . . . . 62

5.2 Service at Leybold’s . . . . . . . . . . . . . . . . . . 64

6 Troubleshooting . . . . . . . . . . . . . . . . . . . . . 65

6.1 Troubleshooting for the MAG.DRIVE L . . . . . 66

6.1.1 Warning and failure messages . . . . . . . . . . . 66

6.1.2 Failure messages . . . . . . . . . . . . . . . . . . . . 67

6.1.3 Warning messages . . . . . . . . . . . . . . . . . . . 68

6.1.4 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . 69

6.2 Troubleshooting for the MAG.DRIVE L2 . . . . 70

6.2.1 Warning messages . . . . . . . . . . . . . . . . . . . 70

6.2.2 Failure messages . . . . . . . . . . . . . . . . . . . . 72

6.2.3 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . 77

Certifications . . . . . . . . . . . . . . . . . . . . . . . . 78

Forms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81

Figures

The references to diagrams, e. g.(1/2) consist of the Fig. No.and the Item No. in that order.

We reserve the right to alter the design or any data given in these Operating Instructions. The illustrations are not binding.

The Operating Instructions are included with the pump and the converter. If they have different editions, the version delivered with the pump describes the pump correctly and the version delivered with the converter describes the converter correctly. The version number is the digit behind the „/“ in the GA No.. Example: GA

05.130/1.02 is the first edition.

Differences between the versions:

/1 → /2

• We added the operation diagram and the pumping speed curve for the MAG W 1600.

• We corrected some minor text mistakes.

/2 → /3

• We separated the Troubleshooting for the MAG.DRIVE L & L2 and made it more detailed for the MAG.DRIVE L2.

• We added technical data, the dimensional drawing, the operation diagram, and the pumping speed curve for the MAG 1600.

• We added ordering data.

• We added an installation instruction for the splinter guard.

• We corrected some minor text mistakes.

Thus, you may use v ersion /3 instead of v ersions /1 and /2 for the pump and the converter.

If you have a MAG pump with a MAG.DRIVE 2000 converter you must use the Operating Instructions delivered with the converter for the operation of the converter.

GA 05.130/3.02 - 05/98

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Description

GA 05.130/3.02 - 05/98

Fig. 1 MAG W 2000 CT

MAG.DRIVE L(2)

Fig. 2 MAG.DRIVE Front panel

1 Description

1.1 System overview

The Leybold MAG pumping system consists of:

• The MAG W 1600, MAG 2000, or MAG W 2000 turbopump

The MAG are turbomolecular pumps utilizing magnetic bearings.They are designed to evacuate vacuum chambers down to pressure values in the high-vacuum range and to pump high gas throughputs.

The C versions are equipped with a purge gas valve and a Pt 100 temperature sensor for the cooling water temperature.

The CT versions are additionally equipped with a temperature management system (TMS) to control the base flange temperature.

The pumps are available with 2 different rotors:

MAG version: 11 turbo pump stages MAG W version: 6 turbo pump stages and 1 drag

stage.

• The MAG.DRIVE L or MAG.DRIVE L2 frequency converter

The electronic converter converts the single-phase line supply voltage into a three-phase DC voltage to drive the pump motor.It also evaluates measured signals and controls

- the pump functions

- the temperature management system (TMS) and

- the active magnetic bearing system

• A cable set consisting of:

- BEARING cable

- TMS cable

- DRIVE cable

Fig. 3 Cable Set

Page 4

Description

1.2 Compatibility with pumped media

The MAG (W) 1600/2000 C/CT are specifically designed for the needs of the semiconductor industry.

Corrosion protection

To protect the pump from corrosive gases it is mandatory to use dry Nitrogen purge during operation of the pump.The purge gas protects the bearing section and the motor from corrosive gases.

The rotor and the stator of the pump are KEPLA-coated to prevent corrosiv e attac k caused b y the process gases. The corrosion protection of the pump is effective only when the pump is protected from moisture during standstill and storage. If the process gas contains moisture, contact Leybold for recommendations.

Sublimation

Some media (e.g. AlCl3) can sublimate in the pump and form deposits. Thick coatings can infringe on the requi-

red operating clearence and ultimately cause the pump to seize.These deposits can also react with moisture and generate corrosive gases (e.g. HCl).This can become very critical when the pump is exposed to air. Deposits can be avoided in many processes by heating the pump with TMS (Temperature Management System).

The TMS is integrated in all CT-versions.The pur pose of the TMS is to keep the baseflange temperature in a constant range. To achieve the temperature the pump is equipped with a heaterband.

Some media ( e.g. metall organic compounds ) can decompose at the hot surface of the pump and build layers. Please direct any inqueries to the manufacturer.

Ignition danger

During operation the pressure inside the MAG is so low that there is no danger of ignition (at pressures below about 100 mbar). A hazardous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar. Dur ing operation the pump can reach temperatures as high as 120°C (248°F). If the pump is damaged, sparks could occur which could ignite explosive mixtures.

Please consult us regarding the media which can safely be handled with this unit, with or without purge gas.

GA 05.130/3.02 - 05/98

1.3 Design of the MAG

The MAG comprises basically the pump housing, the multistage rotor with the stator package, the drive, and a magnetic bearing.

Rotor

The rotor is made from a high strength aluminium alloy. The rotor and the lower stator plates are protected with a special ceramic layer ( KEPLA-coat ). The standard rotor is a multi-stage axial-flow turbine.In addition to the turbine stage the wide range rotor has a screw stage.

Both rotors are machined from one piece and the geometry of the the blades is optimized for high compression and pumping speed of the typical gases used in semiconductor manufacturing processes ( e.g.SF6, Ar, BCl3).

Bearings

The MAG 1600/2000 has a built-in precision 5-axis controlled magnetic bearing. The rotor is suspended by trouble-free magnets:

• along two orthogonal axes in each of two radial planes

• and completely in the axial direction The bearing concept allows for low vibration operations

and insures operation of the pump in any mounting position. Magnetic bearings also guarantee ultra-clean vacuum because no grease is used for lubrication of bearings.

Two touch down bearings are provided to stabilize the rotor mechanically if impacts occur during operation. They are only used in case of the breaking of the power supply cable during operation, strong shocks, or faulty electronics.

Motor and control

A DC motor without commutator is used to power the rotor.

Drive voltage for the motor and the operating voltage for the magnetic bearing are supplied by the MAG.DRIVE frequency converter.It also handles the automatic monitoring of these systems.

The pump is equipped with a data storage device which stores the important operating parameters during the complete operation time of the pump.

The converter monitors continously all important operating parameters and provides warning and alarm signals in case the operating conditions exceed the specification or the set threshold.

Page 5

GA 05.130/3.02 - 05/98

Description

Fig. 4 Section of a MAG (W) 2000

Wide range rotorStandard rotor

Page 6

GA 05.130/3.02 - 05/98

Description

Front panel

Main switch 9-pin connecting socket for the RS232 interface 7 short-stroke keys 1 backlit LCD with 2 lines, each 16 characters, 8 mm

character height 1 green/red STATUS LED 1 green COM LED (communications interface) 1 green MAIN LED (line supply voltage)

Rear panel

X1 25-pin D socket connector for remote monitoring

and open-loop control X7.29-pin D connector for RS232 X10 3-pin Hirschmann connector for the connection to

the mains supply X24 64-pin Harting socket connector for internal sen-

sors and magnetic bearing connection X26 10-pin Harting socket connector for the motor

connection X31 25-pin Harting socket connector for the TMS and

purge valve connection X33 3-pin terminal strip, 24 V output voltage (e.g. for the

power failure airing valve) F1 Fuse for mains power supply (only MAG.DRIVE L2) F2 Fuse for power supply of the active magnetic bea-

ring (only MAG.DRIVE L2) F3 Fuse for the heating (TMS) 1 or 2 protective earth terminals

1.4 Function and design of the MAG.DRIVE

The MAG.DRIVE L and MAG.DRIVE L2 electronic converters are used to drive the MAG turbo-molecular pumps.

The electronic converters convert the single-phase line supply voltage into a three-phase DC voltage to control and monitor the electronically-commutated DC motor. It also evaluates measured signals and controls (openloop and closed-loop) the pump functions.

The temperature management system (TMS) and the magnetic bearing control system are integrated into the converter.The TMS regulates the pump temperature by switching the heating on/off or cooling the pump. The magnetic bearing control system actively controls the pump rotor in five axes (closed-loop control).

All parameters required for pump operation and the listed faults and operating hours are stored in a non-volatile memory in the pump.When the converter is switched on, the data are loaded into the converter from the pump.

The outputs of the electronic converter are no-load and short-circuit proof.

The electronic converter can be connected via its serial interface to external open-loop control and monitoring devices. More detailed information on the serial interface and the interface protocol are provided in the Option Manual “MAG.DRIVE serial interface”.

For remote control via control connector X1 we recommend that either a relay or optocoupler is used to provide electrical isolation.

Housing

The converter is supplied with a closed housing. It can be installed in a 19” cabinet

Page 7

X1 X7.2

X26

X31

PEPE

ABCD

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

ABCD

1 2 3 4 5 6 7 8

9 10 11 12 13 14 15 16

X24

4 5

1 2 3 4 5 6 7 8 9

CBA

X10

1 2 3

X33

X7.2

X33

X24

X31

X26

X10

X7.2

X26

X31

ABCD

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

ABCD

1 2 3 4 5 6 7 8

9 10 11 12 13 14 15 16

X24

1 2 3 4 5 6 7 8 9

CBA

X10

1 2 3

F1F2

X33

X7.2

X33

X24

X31

X26

X10

GA 05.130/3.02 - 05/98

Description

MAG.DRIVE L(2)

Connection serial interface RS 232

Fig.6 Rear panel with connections

Fig. 5 Front panel

Main switch

X1 Connection control plug X7.2 Connection serial interface

RS 232 X10 Mains connection X24 Connection magnetic

bearing X26 Connection pump motor X31 Connection TMS X33 Output 24 V F1 Fuse mains F2 Fuse bearing F3 Fuse TMS PE Protective earth

MAG.DRIVE L

MAG.DRIVE L2

Page 8

Description

GA 05.130/3.02 - 05/98

1.5 Standard specification

MAG

The turbomolecular pumps are shipped complete, sealed in a PE bag containing a desiccant.

The maximum effective life of the desiccant is one year. The intake flange is sealed with a transport seal, the

forevacuum flange with a plastic cap. For the intake flange, a centering ring with FPM O-ring,

outer ring, and a splinter guard are enclosed. We also provide the bolts for attaching the pump to your

tool.To avoid any safety risk we highly recommend using only the bolts provided with the pump.Refer also to Section 2.4 „Connecting the MAG ...“.

The electronic frequency converter MAG DRIVE as well as the cables required for operation must be ordered seperately.

In addition, a seal kit is included to seal the pump tightly if it is removed from the process.

MAG.DRIVE

• Converter

• Line supply cable with USA connector, approx.3m

• Line supply cable with EURO connector, approx. 3 m

• Spare fuses (miniature fuses 5 x 20 mm) F1 for the mains power supply (F8A) (only MAG.DRIVE L2) F2 for the power supply of the active magnetic bearing (T3.15A) (only MAG.DRIVE L2) F3 for the heating (F4A)

Cable Set

• Bearing cable

• TMS cable

• Drive cable

Page 9

Description

1.6 Technical data

MAG 1600 C/CT W 1600 C/CT 2000 C/CT W 2000 C/CT

Pumping speed for N2measured with splinter guard (PNEUROP) l·s

-1

1250 1300 1550 1650

Gas flow (continuous operation with Argon) sccm 1000 1000 1000 1000

Compression for N

>10

Ultimate pressure as to DIN 28 400 mbar < 10

-8

< 10

-8

< 10

-8

< 10

-8

Max. forevacuum pressure

with Nitrogen mbar 1.5 3.3 1.5 3.3 with Argon mbar 1.5 4.1 1.5 4.1

Rotor Speed min

-1

28,800 Run-up time min < 10 Braking time with/without venting min 1 / < 7.5 Cooling water

Cooling connection, Swagelok elbow for tube OD mm 6.4 (1/4“) Cooling water temperature °C 15 to 30

°F 59 to 86

Base flange temperature C version °C 30 to 50 (depending on the load) °F 86 to 122

Base flange temperature CT version °C 30 to 63 (controlled) °F 86 to 145

Weight approx. kg 70 65 68 62 High-vacuum connection flange DN 200 ISO-F 200 ISO-F 250 ISO-F 250 ISO-F Forevacuum connection flange DN 40 KF 40 KF 40 KF 40 KF Recommended backing pump DRYVAC 100 50 100 50 Admissible ambient temperature °C 5 to 40

°F 40 to 104

Storage temperature °C -10 to +60

°F 14 to 140

GA 05.130/3.02 - 05/98

Page 10

Purge Gas

Purge gas connection pressure, abs. 1.2 - 2.0 bar Purge gas: dry nitrogen, argon or similar Purge gas throughput

at purge gas pressure 1.5 bar abs. 0.6 mbar·l·s

-1

36 sccm

Connection:VCR Nut 1/4“

MAG.DRIVE

Voltage range 200 - 240 V +10% -15% Line supply frequency 50 / 60 Hz

Load Stand-by approx. 100 W Continuous (rated speed) 810 W Maximum 1800 W

Max. voltage motor 60 V Maximum pump current (Accel.) 20 A dc_peak

Continuous pump current, max. 13 A dc_peak Maximum frequency 480 Hz Load capability, relay output 42 V, 1 A Temperature during operation

MAG.DRIVE L 0-40° C MAG.DRIVE L2 0-45° C

Storage temperature - 10° C to + 60° C Relative air humidity Class F acc. to DIN 400 40 Weight 16 kg Dimensions W x H x D (mm) 465 x 222 x 350

+ connector depth 130

The units have degree of protection IP20 in accordance with EN 60529

(protection against the ingress of solid foreign bodies > 12 mm diameter (finger). It is not protected against the ingress of water with damaging effects.)

An increased degree of protection, e.g.IP54 can only be implemented by mounting the converter in an additional housing.

1.7 Ordering data

Order No. MAG 1600 C 894 14 MAG W 1600 C 894 15 MAG 2000 C 894 16 MAG W 2000 C 894 17 MAG 1600 CT 894 28 MAG W 1600 CT 894 29 MAG 2000 CT 894 30 MAG W 2000 CT 894 31

Seal Kit DN 200 200 91 684 Seal Kit DN 250 200 91 641

MAG.DRIVE L converter 857 24 MAG.DRIVE L2 converter 857 23

Connecting cables, converter / pump Length Cable Cable Cable

BEARING DRIVE TMS ———————————————————————— 3 m 859 50 859 51 859 52

5 m* 859 53 859 54 859 55 10 m* 859 56 859 57 859 58 20 m* 859 62 859 63 859 64 3 m with

bended plugs 859 68 859 69 859 70 The cables with straight plugs are shown in Fig.3, the

cables with bended plugs in Fig. 34.

• MAG.WIN, an operator control interface

which can run under Windows with user instructions as Windows help on request

• Connecting cable serial interface (front panel,

9-pin D-connector), approx. 5 m long on request

* only permissible if the pump is mounted in a vertical position

Description

GA 05.130/3.02 - 05/98

Page 11

Description

GA 05.130/3.02 - 05/98

483

465

146

222

130

353

233

Fig. 7 Dimensional drawing of the MAG.DRIVE; dimensions in mm

1500

1000

500

2000

-2

-1

Torr

-3

-4

l/s

MAG 1600 CT MAG W 1600 CT MAG 2000 CT MAG W 2000 CT

High Vacuum Pressure

Fig. 8 Pumping speed curves for Nitrogen

Pumping speed

Rotor speed 480 Hz Purge gas flow 36 sccm Nitrogen with splinter guard Forepump

for MAG 1600 CT D 65 B + WS 501 for MAG W 1600 CT D 65 B + WS 251 for MAG 2000 CT D 65 B + WS 501

for MAG W 2000 CT D 65 B + WS 251 Pipe 1 m DN 40 according to PNEUROP

Page 12

Description

GA 05.130/3.02 - 05/98

-1

-2

-3

-4

50 sccm

100 sccm

200 sccm

500 sccm

1000 sccm

-2

-1

1 10

Torr

Fig. 10 MAG W 1600 C/CT: operation diagram for nitrogen

High vacuum pressure

Forevacuum pressure

Rotor speed 480 Hz Purge gas flow 36 sccm Nitrogen with splinter guard Forepump D 65 B + WS 251 Pipe 1 m DN 40 according to PNEUROP

-1

-2

-3

-4

50 sccm

100 sccm

200 sccm

500 sccm

1000 sccm

-2

-1

1 10

Torr

Fig. 9 MAG 1600 C/CT: operation diagram for nitrogen

High vacuum pressure

Forevacuum pressure

Rotor speed 480 Hz Purge gas flow 36 sccm Nitrogen with splinter guard Forepump D 65 B + WS 501 Pipe 1 m DN 40 according to PNEUROP

Page 13

Description

GA 05.130/3.02 - 05/98

-1

-2

-3

-4

50 sccm

100 sccm

200 sccm

500 sccm

1000 sccm

-2

-1

1 10

Torr

Fig. 11 MAG 2000 C/CT: operation diagram for nitrogen

High vacuum pressure

Forevacuum pressure

Rotor speed 480 Hz Purge gas flow 36 sccm Nitrogen with splinter guard Forepump D 65 B + WS 501 Pipe 1 m DN 40 according to PNEUROP

-1

-2

-3

-4

50 sccm

100 sccm

200 sccm

500 sccm

1000 sccm

-2

-1

1 10

Torr

Fig. 12 MAG W 2000 C/CT: operation diagram for nitrogen

High vacuum pressure

Forevacuum pressure

Rotor speed 480 Hz Purge gas flow 36 sccm Nitrogen with splinter guard Forepump D 65 B + WS 251 Pipe 1 m DN 40 according to PNEUROP

Page 14

Description

GA 05.130/3.02 - 05/98

DN 40

12x30° = 360°

408

202

436

368

353

322

ø285

ø210

ø339

ø199

DN 200 ISO F

30°

260

18°

51°

30°

35°

102

192

115

Fig. 13 MAG 1600 C, Dimensions in mm

MAG 1600 C Cat. No. 894 14

Page 15

Description

GA 05.130/3.02 - 05/98

322

ø285

DN 200 ISO F

ø210

DN 40

ø339

ø199

202

436

353

368

408

260

18°

51°

30°

102

115

12x30° = 360°

30°

Fig. 14 MAG W 1600 C, Dimensions in mm

MAG W 1600 C Cat. No. 894 15

Page 16

Description

GA 05.130/3.02 - 05/98

408

202

436

368

353

322

ø285

ø210

ø355

ø199

12x30° = 360°

DN 40

DN 200 ISO F

30°

260

421

18°

51°

30°

35°

102

192

115

Fig. 15 MAG 1600 CT, Dimensions in mm

MAG 1600 CT Cat. No. 894 28

Page 17

Description

GA 05.130/3.02 - 05/98

ø310 ø285

ø210

353

368

408

436

DN 200ISO F

322

ø199

202

DN 40

,00

260

355

18°

51°

102

115

30°

12x30° = 360°

30°

Fig. 16 MAG W 1600 CT, Dimensions in mm

MAG W 1600 CT Cat. No. 894 29

Page 18

Description

GA 05.130/3.02 - 05/98

DN 40

DN 250 ISO F

318

202

358

303

386

272

ø339

ø199

ø335

ø261

12x30° = 360°

30°

310

18°

51°

30°

35°

102

192

115

Fig. 17 MAG 2000 C, Dimensions in mm

MAG 2000 C Cat. No. 894 16

Page 19

Description

GA 05.130/3.02 - 05/98

DN 40

318

202

358

303

386

272

ø335

ø199

ø335

ø261

12x30° = 360°

DN 250 ISO F

18°

51°

35°

102

115

30°

310

30°

Fig. 18 MAG W 2000 C, Dimensions in mm

MAG W 2000 C Cat. No. 894 17

Page 20

Description

GA 05.130/3.02 - 05/98

DN 250 ISO F

DN 40

202

272

303

318

358

386

ø339

ø199

ø261

ø335

12x30° = 360°

421

30°

310

18°

51°

30°

35°

102

192

115

Fig. 19 MAG 2000 CT, Dimensions in mm

MAG 2000 CT Cat. No. 894 30

Page 21

Description

GA 05.130/3.02 - 05/98

DN 250 ISO F

DN 40

358

318

303

386

202

272

ø335 ø261

ø355

ø199

12x30° = 360°

18°

51°

30°

35°

421

102

30°

310

115

Fig. 20 MAG W 2000 CT, Dimensions in mm

MAG W 2000 CT Cat. No. 894 31

Page 22

Installation

GA 05.130/3.02 - 05/98

Warning

Before opening the converter, always disconnect from the mains! When applying external voltage in excess of 42 V to terminals of the device, observe local safety regulations! Unauthorized device conversion and modifications are prohibited for safety reasons.

Please keep this Operating Instruction for future reference.

2.2 Unpacking - storing transportation

Remove the equipment from the transportation box and keep the packaging. Make sure that the product has not been damaged during transportation. If this unit is damaged contact your carrier and inform LEYBOLD if necessary. For storage of the product, use the packaging provided.

Lift the pump by the crane eyelets or mo v e it with at least two persons.

You can position the pump on the base plate for transport with a lift-truck. Protect the pump against slipping and tipping over.

Caution

Be careful not to damage the sockets and coolant connections during transportation.

Do not stand below the pump while connecting or removing the MAG.

The MAG is shipped in a sealed PE bag with desiccant. Do not open the sealed package until immediately before installing.

Do not remove the covers and blanking flanges until you are ready to make the connections, to ensure that the MAG is installed under the cleanest possible conditions.

2 Installation

2.1

General safety information

Warning

Indicates procedures that must be strictly observed to prevent hazards to persons.

Caution

Indicates procedures that must be strictly observed to prevent damage to, or destruction of the MAG.

Warning

Never expose any parts of the body to the vacuum.

Warning

The converter has dangerous voltage levels.

Failure to strictly follow the instructions in this Manual can result in death, severe bodily injuries or significant material damage.

Only suitably qualified personnel are permitted to work on the pump or converter. Personnel m ust be completely kno wledgeable of all warning information and measures which are specified in this Instruction manual for transporting, installing, and operating the unit.

Qualified personnel

Qualified electrical personnel in this instruction manual means a person who has received electrical engineering instruction or is an electrical expert in accordance with EN 60204, Part 1, 3.30 respectivly 3.55.

Warning

The device contain electrostatically sensitive devices (ESD)!

Page 23

Installation

GA 05.130/3.02 - 05/98

1 Aluminum cover 2 Screws

Fig. 21 Removing the transport seal

2.3 Operating environment

When using the MAG inside a magnetic field, the magnetic induction at the pump housing must not exceed 5 mT; (1 mT (milliTesla) = 10 G (Gauß))

Exceeding this limit can cause excessive rotor heating due to the eddy currents generated in this situation. It is therefore necessary to provide suitable shielding in such cases.

The standard version of the MAG is resistant to radiation at levels up to 103Gy. (1 Gy (Gray) = 100 rad)

The ambient temperature must not exceed 40°C (104 °F).

The noise level when the pump is running is below 70 dB(A). No acoustic insulation is required.

2.4 Connecting the MAG to the vacuum chamber

The MAG is shipped in a sealed PE bag with desiccant. Do not open the package until immediately before installing.

Do not remove the covers and blanking flanges until you are ready to make the connections, to ensure that the MAG is installed under the cleanest possible conditions.

Pay attention to maximum cleanliness when connecting. Remove the transport seal from the intake flange.To do

so unscrew the screws (21/2) and remove the aluminum cover.We recommend saving the transport seal for maintenance.

Page 24

GA 05.130/3.02 - 05/98

Installation

Foreign objects entering the pump through the high-vacuum flange can cause serious damage to the rotor. That’s why the splinter guard must always be installed.

Damages caused during operation without the splinter guard are excluded from warranty.

Caution

Install the splinter guard as shown in Fig.

23. Installing the splinter guard upside down may lead to contact between splinter guard and rotor during fast venting of the pump.

Fig. 22 Connection elements

Intake flange

Forevacuum flange

Cooling water out

Cooling water in

Correct

Wrong

Fig. 23 Installing the splinter guard

Page 25

Installation

GA 05.130/3.02 - 05/98

Warning

The pump must be securely attached.If the pump should suddenly seize, inadequate attachment could cause the pump to break away or allow internal pump parts to be discharged. Never operate the pump (in bench tests, for instance) without its being connected at the vacuum chamber.

If the pump should suddenly seize, the decceleration torque of 60,000 Nm will have to be absorbed by the system. To accomplish this, use all 12 bolts provided by Leybold for fastening the high-vacuum flange; see also Fig. 25.

Mount the MAG as close as possible to the vacuum chamber. If the MAG is permanently flanged to a vacuum chamber with a weight exceeding 500 kg, it will not be necessary to secure it in any other way.

In case of lighter vacuum vessels secure the pump additionally. The pump’s bottom is equipped with tappered holes for fastening a support; see Fig. 26.

If the pump is exposed to shocks, e.g. by a gate valve, secure the pump so that it is supported in the direction of the shock.

We recommend installing an isolation valve between the pump and the chamber. The valve should be closed during wet cleans of the chamber and in case of pump failures which will lead to a pump shut down.The valve should normally be closed with power off.

Warning

The basic flange heater can become so hot during operation (> 80°C, > 176 °F) that it represents a burn hazard: Provide protection against contact with the hot components.

Mounting position and cable length

If the pump is mounted in a vertical position (intake flange up or down) the permissible length of the pumpconverter cables is 3 to 20 meters.

If the pump is mounted in a horizontal position the permissible length of the pump-converter cables is 3 meter.

Purge gas in

TMS connection

BEARING connection

DRIVE connection

Fig. 24 Connection elements

Purge gas valve

Page 26

Installation

GA 05.130/3.02 - 05/98

21.5

l > 15 mm in aluminium l > 10 mm in steel

Outer ring (stainless steel)

Sealing (FPM)

Centering ring (stainless steel)

Splinter guard

Max. torque = 60,000 Nm

Fig. 25 Fixing the intake flange

Bolts: M10 x 40 Quality 12.9 according to DIN 898:

0,2% yield strength > 1080 N/mm

Bolt torque: 40 Nm

Page 27

Installation

GA 05.130/3.02 - 05/98

15°

30°

70°

125°

Ø 310

Fig. 27 Layout of a turbomolecular pump system

Key to Fig. 27

1 Turbomolecular pump 2 Forevacuum gauge point 3 Backing pump 4 Anti-vibration bellows 5 Forevacuum valve 6 High vacuum valve 7 Purge gas connection 8 Valve in the roughing line 9 Electronic frequency converter

— — — — roughing line; recommended if shorter cycle times are to be achieved

— · — · — · — · drive, bearing, and TMS cable

Fig. 26 Fixing the pump at the bottom

Boreholes M8,

15 mm deep

Page 28

Installation

GA 05.130/3.02 - 05/98

2.5 Connecting the backing pump

A two stage rotary vane pump or dry-compression backing pump is required to support operation of the MAG.

We recommend using the DRYVAC or our TRIVAC-B pump for this purpose.

In case of high gas throughput, it may also be necessary to use a roots blower to achieve the backing pressure necessary for operating the MAG. We recommend our RUVAC blower for this purpose or our DRYVAC 251/501 systems.

Fig. 27 shows schematically the design of a pump system incorporating a MAG with an additional foreline valve and an isolation v alv e between chamber and MAG.

The foreline isolation valve is recommended to protect the MAG from shock v enting in case of uncontrolled shut down of the backing pump. This valve must be able to close fast enough to avoid pressure increase in the MAG.

In case of an oil-sealed backing pump the foreline isolation valve protects the MAG from backstreaming oil vapor during standstill.

Connect the forevacuum flange of the MAG to the backing pump.

The torque on the forevacuum connection flange must not exceed the values shown in Fig. 28.

Warning

The forevacuum line must be tight. Hazardous gases can escape at leaks or the gases being pumped can react with the air or humidity. We recommend a leak check.

2.6 Connecting the cooling water

Cooling water specifications

Inlet temperature 15 - 30 °C Inlet pressure 3 to 7 bar absolute Cooling water requirement See Fig. 30 Appearance Colorless, clear,

free of oils and greases Sediments < 250 mg/l Particle size < 150 µm Electrical conductivity < 500 µS/cm pH value 7 to 8.5 Overall hardness (total alkaline earths)

max. 20 ° Ger man hardness scale

(= 3.57 mmol/l)

Further information on request.

M < 150 Nm Mq< 150 Nm

Fig. 28 Maximum torques for the forevacuum connection

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Installation

GA 05.130/3.02 - 05/98

Connect the cooling water to the connectors;see Fig. 29. Make sure that you do not mix up the inlet and the outlet

connection. Tur n off the cooling water supply when the pump is

switched off in order to a void condensate f ormation in the pump.

If you do not close the cooling water it ma y tak e longer to achieve ultimate pressure after start up of the system.

Fig. 29 Connecting the cooling water

Cooling water out 1/4“ tube

Cooling water in 1/4“ tube

5 10 15 20 25 30 35 40

°C

220 200 180 160 140 120 100

80 60 40

l/h

Fig. 30 Recommended cooling water flow as a function of cooling water temperature

Temperature

Flow

maximum

optimum

minimum

Page 30

Installation

GA 05.130/3.02 - 05/98

2.7 Connecting the purge gas

The MAG is equipped with a purge gas and venting valve. It is controlled by the MAG.DRIVE. Additional monitoring with a flow controller is not necessary.

Connect the purge gas and venting valve to the purge gas supply via a pressure reducer.

Connection:VCR Nut 1/4“ Purge gas connection pressure, abs. 1.2 - 2.0 bar Purge gas: dry nitrogen, argon or similar Purge gas throughput

at purge gas pressure 1.5 bar abs. 0.6 mbar·l·s

-1

36 sccm

With no voltage applied the purge gas and venting valve is closed.

The purge gas valve will be open when switching on the MAG.DRIVE.The red LED at the purge gas valve lights.

The venting valv e can be opened via the control plug X1. The red LED at the venting valv e lights when the valve is open. A blind-flanged pump will be vented within 1 minute via the open venting valve.

Warning

Monitor the purge gas continuously. Insufficient purge gas flow can result in:

- Process gases entering the motor and bearing area of the MAG

- Process gases escaping from the purge gas valve

- Humidity entering the pump.

24 V

24 V 24 V

Connection to Nozzle Connection to

purge gas supply pump

Purge valve venting valve

Fig. 31 Schematic drawing of purge and venting valve

Status Purge Valve

No Purge: Purge closed Purge Vent

Vent closed

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Installation

GA 05.130/3.02 - 05/98

Fig. 32 Purge gas connection with connection kit

VCR Nut 1/4“

Port connector: Tube to VCR

Male connector: Tube OD 1/4“ ISO male pipe size: 1/4“

Seal

LED purge valve

LED vent valve

Page 32

Caution

The connecting cables between the converters and pump may only be inserted or removed when the converter is switched off or is isolated from the line supply. If a connector is inserted or withdrawn when the converter is switched on, the converter and the pump could be damaged or destroyed!

Warning

Hazardous voltages are present inside the converter.Death or severe injury can occur if you come into contact with these hazardous voltages. Before opening the converter, isolate the converter from the line supply, and lock the switch so that it cannot be accidentally switched on again.

Installation instructions to maintain EMC

The MAG.DRIVE L2 complies with the Electromagnetic Compatibility (EMC) Directives of the EC. In order to maintain this the following installation instructions must be observed:

• The housing must be connected to a good ground connection (e.g. mounting rack) using a large cross

section (e.g.1.5 mm2) cable which should be as short as possible.The PE connection is located on the rear panel.

• To connect the pump to the converter the prescribed Leybold cables must be used.

• A shielded cable must be used for the connections to the terminal strip X33. The shield should be connected to ground to a low-impedance connection.

• The connection cables to the analog interface (control plug X1) and to the serial interfaces (connectors X7.1 and X7.2) must be shielded. The shields must be connected to the metal housings of the SUB-Dconnector and SUB-D-socket.

Installation

GA 05.130/3.02 - 05/98

2.8 Installing the MAG.DRIVE

The converter can be installed in a 19” cabinet Mounting depth: 350 mm + 130 mm for the connectors

on the rear side (133/4“ + 51/8“); height: 5 height units (83/4“)

Caution

In order to guarantee sufficient cooling, there must be a minimum clearance of 1 height unit (44.2 mm) at the bottom and 1 height unit at the top.A fan assembly can be inserted. During operation the temperature of the ambient air must not exceed 40 °C for the MAG.DRIVE L and 45 °C for the MAG.DRIVE L2.

Warning

The pump may be operated only with a suitable frequency converter and a suitable connector cable. Peak voltages of up to 130 V may be present at the connector line between the frequency converter and the pump; mains voltage is present at the heater. Route all cables so as to protect them from

damage. The protection rating for the connectors is IP 30. Do not expose the pump, the frequency converter or the

connections to dripping water. Install 16 A fuses for the converter.

Warning

Only adequately trained electrical/electronic

personnel may connect-up the equipment in

accordance with valid IEC (international),

EN (European) and/or national guidelines,

or under their management and supervisi-

on.

Page 33

GA 05.130/3.02 - 05/98

Installation

1 2 3

1 = Phase L 2 = Not assigned 3 = Neutral N S = PE

Fig. 33 Connector assignment X10, supply connection

2.8.1 Power supply connection X10

The converter is ready to be connected to line supply voltages between 200-240 V 50/60 Hz.The connection is established using the power cable supplied, which is inserted at connector X10 at the rear of the converter.

Caution

The converter will be damaged if it is operated with the incorrect supply voltage.

BEARING

TMS

DRIVE

Fig. 34 Cable set with bended plugs; cable set with straight plugs similar

2.8.2 Pump connection

Connect the converter (X26) to the pump motor connection (X25) using the DRIVE connecting cable.

Connect the converter (X24) to the magnetic bearing connection of the pump (X23) using the BEARING connecting cable.

Connect the converter (X31) to the TMS connection of the pump (X30) using the TMS connecting cable.

Also refer to Fig. 35 or 36. Make sure that you have fixed all cables properly by

using the clamps fixed to the converter.

Mounting position and cable length

If the pump is mounted in a vertical position (intake flange up or down) the permissible length of the pumpconverter cables is 3 to 20 meters.

If the pump is mounted in a horizontal position the permissible length of the pump-converter cables is 3 meter.

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Installation

GA 05.130/3.02 - 05/98

TMS

BEARING

DRIVE

X 24

BEAR-

ING

X 31 TMS

X 26

DRIVE

X 33

External

valve

TMS Fuse

X 10

Mains plug

X 1 X 7.2

Control plug RS 232

MAINS ANALOG INTERFACE INTERFACE

Fig. 35 Block wiring diagram for MAG.DRIVE L

X25

X23

X30

Page 35

Installation

GA 05.130/3.02 - 05/98

X7.2

X26

X31

ABCD

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

ABCD

1 2 3 4 5 6 7 8

9 10 11 12 13 14 15 16

X24

1 2 3 4 5 6 7 8 9

CBA

X10

1 2 3

F1F2

X33

X7.2

X33

X24

X31

X26

X10

Fig. 36 Block wiring diagram for MAG.DRIVE L2

X25

X23

X30

MAINS

ANALOG INTERFACE

INTERFACE

TMS

BEARING

DRIVE

Page 36

Installation

2.8.3 Control plug X1

Relay outputs

The MAG.DRIVE L converter has 4 relay outputs.Three relay outputs are permanently assigned a signal.

Normal operation (changeover contact) Failure (changeover contact) Warning (NO contact)

The option relay (changeover contact) can output one of the following signals:

Threshold motor temperature reached (only MAG.DRIVE L)

Threshold bearing temperature reached (only MAG.DRIVE L2)

Threshold motor current reached Threshold frequency reached No cooling water No purge gas TMS temperature OK Vent

The selection of signals for the option relay and the adjustment of their thresholds can be achieved via the operator control menu; see Sections 4.5.2 or 4.6.2.

Signaling outputs

Open-collector outputs are available to signal

start command applied power supply O.K. pump standstill

at control plug X1. The outputs can have a maximum load of 15 V DC, 80 mA.

Analog output

The converter has an analog output which provides an analog signal (0..10 V) with a 10-bit resolution.The analog output function can be alternatively used to output

motor current actual frequency motor temperature rotor displacement signals (PW24, PV13, PZ12)

The output value can be increased or reduced by a scaling factor; refer to the operator control menu “Scaling”; see Sections 4.5.2 and 4.6.2 Settings Converter.

GA 05.130/3.02 - 05/98

1 Remote/Local 2 Start/Stop 3 Ground 4 Analog output 0..10V 5 Analog ground 6 Relay „Failure“ com. 7 Relay „Failure“ n.c. 8 Relay „Failure“ n.o. 9 Relay „Norm. operation“ com. 10 Relay „Norm. operation“ n.o. 11 Relay „Norm. operation“ n.c. 12 Option relay com 13 Option relay n.o.

14 Option relay n.c. 15 Signal „Star t command present“ 16 Signal „Power supply o.k.“ 17 Output +15 V;max 80 mA 18 Signal „Pump stands still“ 19 Digital input: TMS OFF 20 Digital input: Purge gas OFF 21 Relay „Warning“ n.o. 22 Relay „Warning“ com. 23 Digital input: Vent 24 Analog input 2 25 Analog input 1

n.o.= normally open com. = common n.c. = normally closed

Fig. 37 Assignment control plug X1

Page 37

Installation

GA 05.130/3.02 - 05/98

X1.6

X1.

X1.9

X1.10

X1.11

X1.12

X1.13

X1.14

X1.4 X1.5

X1.15

X1.16

X1.17

+15 V

X1.22

X1.21

X1.18

2,5 Hz

Strombegrenzung

80 mA

Open collector Ausgänge

Keine Störung

Relais Normalbetrieb

Normalbetrieb

Melderelais Option

Funktion

Melderelais

Funktion

Analogausgang

Analog Masse

Startbefehl steht an

Stromversorgungo.k.

Skalierung

Kein Kühlwasser

Kein Sperrgas

TMS o.k.

Startbefehl

steht an

Relais Warnung

Warnung

Pumpe steht

Schwellwert

Motorstrom

Schwellwert

Motorstrom

Schwellwert

Frequenz

Frequenz-Istwert

Aktuelle Lager-Temp.

Schwellwert Lager-Temp.

Frequenz-Istwert

Fluten

Rotorlage

Istwert PVW 13

Istwert PZ 12

Istwert PVW 24

Relais Störung

Frequenz-Istwert

Fig. 38 Function diagram outputs

Relay failure

Relay warning

Relay normal operation

Relay option

Function

relay option

Function

analog output

Scale

Analog output

Analog ground

Open collector outputs

Pump standstill

Current limit

80 mA

No failure

Warning

Start command

applied

Actual frequency

Normal operation

Motor or bearing

temperature

Threshold

Motor current

Threshold

Actual frequency

Threshold

No cooling water

No purge gas

TMS temperature ok

Vent

Rotor displacement

actual PVW 13 actual PVW 24

actual PZ12

Start command applied

Power supply

Actual frequency

Page 38

Installation

GA 05.130/3.02 - 05/98

Analog inputs

The converter has two analog inputs with a 10-bit resolution.

Input signal: 0...10V standard

4...20mA on request

A supplementary function can be set for analog input 2 via the operator control menu; see Sections 4.5.2 or

4.6.2: No function: The input signal can be output via

the serial interface.

Frequency setpoint: In addition to the function descr i-

bed above, the drive frequency setpoint is entered via analog input 2.

Analog ground

Analog ground X1.5 is the reference ground for the analog output as well as for the analog inputs.

Digital inputs

The converter has 3 digital inputs with the following functions:

TMS OFF Purge gas OFF Vent ON

The functions are active if an High signal (15 V) is connected at the digital input.

2.8.4 Interface connector

A 9-pin sub-D socket is provided at the front panel and a 9-pin sub-D connector at the rear panel to connect a higher-level open-loop control and monitoring unit or a PC with the MAG.WIN operator control program.

The front connector X7.1 is assigned the serial interface RS232. If the front connector is to be used, to select connector X7.1, pin 1 must be connected to pin 5 (signal ground). To upload the software, pin 4 (boot) must be connected with pin 5 (signal ground).

The rear connector X7.2 is assigned with the serial RS232 interface.

Further information on the serial interface and the interface protocol to be used are provided in the optional manual „Serial interface MAG.DRIVE”.

1 Select front connector

X7.1 2 TxD 3 RxD 4 Boot 5 Signal ground

Fig. 39 Connector assignment, interface X7.1 (front side)

Fig. 40 Connector assignment, interface X7.2 (rear side)

5 Signal ground 4 +5V output through 390 Ω 3 RS232 RxD 2 RS232 TxD 1 -

Page 39

Installation

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3 2 1

1 PE 2 + 24 V output,

max. 300 mA

3 Ground

Fig. 41 Connector assignment X33, supply voltage

2.8.5 Connection X33

The internal +24 V supply voltage can be accessed for external loads at connector X33; for example, to connect relays or solenoid valv es.The output is short-circuit-proof and the output current is limited to 300 mA.

Page 40

Operation

GA 05.130/3.02 - 05/98

3 Operation

This Section describes the normal operation of the MAG pumping system

• via the front panel keys START and STOP,

• with pump and converter in the state of delivery from Leybold, and

• if no failure occurs.

If you want to operate the pumping system differently or if you want more background information about the pumping system operation refer to the following Sections:

• Explanation of the front panel keys 4.1

• Explanation of the display 4.2

• Operate the pump via remote control 4.3

• Explanation of the displayed operating statuses 4.4

• Change pump parameters via the operating menu 4.5 or 4.6

• Explanation of the temperature management system 4.7

• A failure message is displayed 6

3.1 Switching on

• Switch on the MAG.DRIVE.The display reads Ready

0.0 A 0 Hz

If the pump has the optional TMS (including e.g.the red heater band) the heater will be activated. The setpoint temperature will be reached within 30 - 60 minutes depending on cooling water temperature and flow.

In case of corresponding connection the backing pump will be activated when switching on the MAG.DRIVE.

• Open the purge gas supply.

• Open the cooling water supply.

• Press the START button.

The pump runs-up.

Acceleration

20.0 A 250 Hz

is diplayed until the frequency setpoint has been reached. Then

Normal Operation

1.0 A 480 Hz is displayed. The backing pump and the MAG can be switched on

simultaneously. In such a situation the MAG serves from the very outset as an effective baffle.

Do not suddenly expose the MAG to an already evacuated vacuum chamber .The pressure surge may cause the rotor to make contact with the touch-down bearings.This will cause increased wear.

The pump may make noise during the run-up and rundown phases.This has neither an influence on the pump nor on the process.

Page 41

Operation

3.2 Operation

The magnetic bearing in the MAG are immune to wear. In addition to the magnetic bearings, the MAG is equipped with touch-down bearings which protect the rotor against mechanical contact with the stator if the pump is subjected to external shock loading or when the pump is switched off.These touch-down bearings have a limited service life. Please observe the following in order to obtain maximum service life.

• Avoid shock and vibrations when the pump is running. Shocks perpendicular to the rotation axis are particularly har mful. If the pump appears to be running in the mechanical bearings continuously it is switched off.

• Avoid frequent run up and down. The converter may overheat. You may run up und down the pump twice immediately after each other.

• Do not disconnect the MAG and MAG.DRIVE while they are operating. If MAG and MAG.DRIVE have been disconnected accidently do not re-connect them while the MAG is operating.

Warning

Monitor the purge gas continuously. Insufficient purge gas flow can result in:

- Process gases entering the motor and bearing area of the MAG

- Process gases escaping from the purge gas valve

- Humidity entering the pump. Refer to Section 2.7.

MAG with heating collar:

Warning

The heating collar will be hot during operation. Burn hazard!

3.3 Switching off

The MAG.DRIVE controls the venting automatically provided purge gas is connected to the MAG and the MAG.DRIVE is programmed correspondingly („Vent on“).

Caution

The values shown in the pressure rise curve must be maintained; see Fig. 42.

Caution

Do not stop the MAG with the mains. Use the STOP key. Switching off the mains while the pump is running will wear out the touch down bearings.

• Press the STOP key. Deceleration

20.0 A 400 Hz

will be displayed.When the display reads

Ready

0.0 A 0 Hz

the pump has come to a standstill.

• Close the cooling water supply when the pump is

switched off in order to a v oid condensate formation in the pump.

The backing pump may be switched off once the MAG has stopped.

If the MAG has been used for pumping corrosive gases it should be purged with dry nitrogen for one hour before switching off.During down times of the system take care that neither ambient air nor cleaning agents enter the pump.

GA 05.130/3.02 - 05/98

Page 42

Operation

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Forevacuum pressure/mbar

-1

-2

-3

Fig. 42 Curve for safe venting of the MAG; pressure rise as a function of venting time

0 10 20 30 40 50 60

Time/s

Page 43

4 Converter Control

4.1 Functions of the front panel keys

• Starts the pump (only possible

if there is no fault).The start key is only active if the user is in the basic menu or in the operating display.

• Returns to the operating display

from any point in the programming menu.

• Stop when the pump is opera-

tional. The pump is braked down to < 1 Hz.

• Acknowledges a failure after the

cause of the failure has been removed.

• Selects a sub-menu

• Acknowledges a modified value

• Changes from the operating

display into the programming menu

• Selects the programming menu

in the main menu

• Returns to the last main menu

in the programming menu

• Increases a parameter value or

proceeds to the next option

• Lowers a parameter value or

returns to the previous option

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Converter Control

4.2 Operating display

All operating states, warning and failure are displa y ed on the display and three lamps on the front side of the converter.

If a critical operating status occurs, e.g. “Warning Temp. Pump”, this warning is displayed, alternating with the operating display.

Plain text display

1st line: Operating status 2nd line: Motor current / Actual frequency /

(TMS status code for MAG.DRIVE L2)

or 1st line: Failure message 2nd line: Failure cause

TMS status code (only for MAG.DRIVE L2)

No. Code Descr iption

————————————————————————

1 H Heating pump (range below T

set

- 5K)

2 H O K Temp.TMS ok, heater ON

(range T

set

- 5K to T

set

)

3 O K Temp.TMS ok (range T

set

± 2K)

4 C O K Temp.TMS ok, cooling ON

(range T

set

+ 5K to T

set

)

5 W Warning Temp. TMS

(Temp. > T

set

+ 5K)

O F F TMS cancelled via control plug X1

see also Section 4.7.2 „TMS for the MAG.DRIVE L2“

Failure

Accel.Time

Acceleration

9.7 A 254 Hz

START

STOP

ENTER

Page 44

Converter Control

Significance of the lamps

COM (green)

Is lit if communication has been established via the interface.

STA TUS(green/red)

Red, steady light = Failure Red, flashing = Warning Green, flashing (slow) = Start delay, Acceleration Green, flashing (fast) = Deceleration,

Kinetic buffering

Green, steady light = Nor mal operation

MAINS (green)

This lamp is lit if the power is switched-on, and all of the supply voltages for operation are available.

Flashes when the power fails as long as the power supply voltages in the converter are maintained by the kinetic buffering.

4.3 Remote control

The converter permits 3 operating modes. They can be selected via contact X1.1 of the control connector at the rear panel of the converter or via the serial interface. Operating mode 0 is automatically selected after the line supply voltage has been applied.

Operating mode 0

The pump can be switched-on or off using the START/ STOP keys or via control connector X1. The reference frequency can be selected in the operating menu.

• X1.1 not connected = Start/Stop via the operator control panel

• Jumper X1.1-X1.3 = Start/Stop via control input X1.2

Operating mode 1

This operating mode can only be selected via the serial interface.

The pump can only be started and stopped via the serial interface.

The frequency setpoint can only be changed via the serial interface, e.g.from MAG.WIN

GA 05.130/3.02 - 05/98

Remote

Start

Masse

X1.1

X1.2

X1.3

Switch closed: START Switch open: STOP

Remote

Start

Masse

X1.1

X1.2

X1.3

Autostart

Remote

Start

Ground

Remote

Start

Ground

Fig. 43 Connecting-up example remote control

Page 45

Converter Control

Operating mode 2

This operating mode can only be set via the serial interface.

The pump can be switched-off via the keyboard, but it cannot be started via the keyboard.

The frequency setpoint can only be changed via the serial interface, e.g.from MAG.WIN.

Automatic starting after the power has been connected

Connect contacts X1.1, X1.2 and X1.3 with one another. The converter starts automatically when the power is applied.

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START

REMOTE

+15 V

X1.1

X1.2 X1.3

START Pumpe

STOP Pumpe

START Bedienfeld

STOP Bedienfeld

STOP Schnittstelle

START Schnittstelle

Störungen, die Bremsbetrieb verursachen

0 V = 0

15 V = 1

10 K

Ω

Keine Störung

≥1

Startverzögerungszeit

P36

P12

-1

(Bremsbetrieb mit dem Pulswiderstand)

Betriebsart: Programmierung nur über Schnittstelle

Fig. 44 Function diagram START/STOP

Operating mode:

Programming only via

serial interface

Start delay time

START pump

STOP pump

decelerating the pump with the pulsed resistor

START serial

interface

START

key pad

STOP

key pad

STOP serial

interface

failure Failures

causing

deceleration

Page 46

Converter Control

GA 05.130/3.02 - 05/98

4.4 Operating statuses

Switch-On Guard

The converter goes into the “Switch On Guard”operating status after the power is switched on and after initialization. If there is no warning or failure, it changes over into the “Ready” condition.

After a failure has been acknowledged, the converter goes into the “Switch On Guard” operating status. The failure must be acknowledged a second time, so that it then goes into the “Ready” condition.

Ready

The converter is ready and waits for the START command. All parameters can be interrogated or changed via the operator control panel or the serial interface.

The basic menu parameters (refer to 4.5/4.6, operating menu) can be scanned via the operator control panel.

Acceleration

The pump continuously accelerates with the maximum current. The acceleration time is monitored to ensure that it lies within a programmed value (refer to the menu “settings pump/max. Accel. Time”). If the converter hasn’t reached the normal operating mode during the monitoring time, then it is shutdown with the failure message „max. Accel. Time”.

Normal operation

After a programmable frequency threshold has been reached (refer to the menu “settings pump/Normal Operation”), the converter goes into the normal operation mode but the pump continues to accelerate up to the frequency setpoint.

Maximum power or Overload

„Maximum power“ for MAG.DRIVE L or „Overload“ for MAG.DRIVE L2.

The speed is continuously monitored and controlled. If the speed, even at maximum current, cannot be held at the setpoint, as a result of external influences, e.g. excessive gas intake, the speed reduces until the converter goes into the „max.pow er”or „Overload“ operating condition when the programmable frequency threshold is fallen below (refer to the menu “settings pump/Normal Operation”). The acceleration time is restarted. If the converter hasn’t gone into the normal operating mode after the monitoring time, it is shutdown with the failure message „max. power time” or „Failure Overload Time“.

Kinetic buffering

If the power fails when the converter is switched on, the converter regenerates due to the pump up to a minimum frequency of < 170 Hz. When the power returns, the pump is again accelerated up to the frequency setpoint.

The acceleration time is now restarted. If the converter hasn’t gone into the normal operating mode after the monitoring time, it is shutdown with the failure message „max. Accel.Time” .

Deceleration

After a stop command, the pump is braked down to a speed < 1 Hz as quickly as possible. A brake resistor is integrated into the converter which converts the regenerative energy into heat.

Failure

The converter was shutdown with a failure message and waits for a failure acknowledgement after the failure has been removed.The failure type can be read from the display. The failure message can be acknowledged by depressing the STOP key or via the serial interface.

Page 47

Converter Control

GA 05.130/3.02 - 05/98

Mains switched on

Initialization

Switch On Guard

Acceleration

Normal Operation

Kinetic Buffer

Maximum Power

or Overload

Deceleration

Failure

After a failure, quit a second time

START command

Mains ok

Frequency > P 25 x P24

Mains failure

Frequency > P25 x P24

Frequency < P25 x P24

Mains failure

STOP command

If a failure occurs the pump is decelerated

Frequency < 1 Hz

Failure occurs

Failure acknowledgement only possible if f<5 Hz

Ready

Start Delay

STOP command

Parameter: P24 = Frequency setpoint P25 = Factor normal operation

Fig 45 Diagram: Operation status

Page 48

Converter Control MAG.DRIVE L

GA 05.130/3.02 - 05/98

Ready

0.0 A 0 Hz Enter

Setpoint

480 Hz

Enter

Pump life

0.00 h Enter

Temp. Motor

50 °C Enter

Temp. Converter

40 °C Enter

Temp. Pump

50 °C Enter

actual PVW 13

10%

Enter

actual PVW 24

10%

Enter

actual PZ 12

Enter

power

400 W

Enter

Not active

Temp.TCU

63 °C

Enter

Not active

Temp. Cooling

20 °C

Enter

4.5.1 Basic menu

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

Ready Operating display - - - - -

Setpoint Sets the speed for operation 0 480 480 Hz r/w

Pump life Total operating hours of the pump actual value h r

Temp.Motor Motor temperature actual value °C r

Temp.Converter Temperature of the power actual value °C r

electronic

Temp.Pump Temperature of the magnetic actual value °C r

bearing

Temp.TCU Temperature of the Temperature actual value °C r

Management System

Temp.Cooling Cooling water temperature actual value °C r

Diff. pressure Difference pressure actual value mbar r

Only active at pump models with purge valve flow control (MCF, MCTF)

actual PVW 13 Rotor displacement in the

magnetic bearing actual value % r plane VW13

actual PVW 24 Rotor displacement in the

magnetic bearing actual value % r plane VW24

actual PZ 12 Rotor displacement in the

magnetic bearing actual value % r axis Z12

power Power consumption of the drive actual value W r

r (read) = value can only be read r /w (read/write) = value can be read and written

Enter

Not active

Diff. pressure

100 mbar

4.5 Operating menu for the MAG.DRIVE L

Page 49

Converter Control MAG.DRIVE L

GA 05.130/3.02 - 05/98

inductance ...

analog 1 4%

German

4.5.2 Settings converter

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

Option Relay Relay with change -over Threshold motor

contact; the operator can temperature reached °C r/w select one of the functions Threshold motor described current reached A

Threshold frequency the thresholds are adjusted reached Hz in the next three menu items No cooling water -

no purge gas -

TMS temperature o.k. -

Vent -

„analog1 4%“ not used

Threshold Threshold motor temp. 0 100 60 °C r/w

for option relay

Threshold Threshold motor current 0 20 10 A r/w

for option relay

Threshold Threshold frequency 0 480 300 Hz r/w

for option relay

analog output Analog output 0...10V; Motor current;

the operator can select 20 A =10Vxscale factor V r/w one of the functions Act.frequency ; described 500 Hz = 10Vxscale factorV

Bearing temp.;

100 °C = 10Vxscale factor V

Actual PVW13;

100% = 10Vxscale factor V

Actual PVW24;

100% = 10Vxscale factor V

Actual PZ12; 100% = 10Vxscale factor V „inductance“ not used

scale factor Scale factor for the analog output 0 2 1 - r/w Analog Input 2 Analog input 0...10V ; No function - r/w

optionally frequency setpoint via analog input 2 Function frequency (10V = max. frequency setpoint) setpoint -

Start delay Waiting time between start

command and acceleration 0 1200 0 s r/w

Display Display language English - r/w

German -

Bus adress Bus adress for the converter for

operation via 0 31 0 - r/w serial interface RS232

venting

Temp.TCU ok

no purge gas

no cooling water

frequency

Converter data

Enter

current

option relay

temperature

Enter

Threshold

60 °C Enter

Threshold

10.0 A Enter

Threshold

300 Hz

Enter

PZ12 peak

PVW24 peak

PVW13 peak

temperature

frequency

analog output

current

Enter

scale factor

1.0 x Enter

freq. setpoint

Analog Input 2

no function

Enter

Start delay

0 s

Enter

Display English

Enter

Bus address

Enter

r (read) = value can only be read r /w (read/write) = value can be read and written

Page 50

Converter Control MAG.DRIVE L

GA 05.130/3.02 - 05/98

4.5.3 Settings pump

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

Normal operation Threshold for normal operation

corresponding to the 35 99 95 % r/w frequency setpoint

max. accel.time Monitor time for acceleration

and overload 600 3600 1000 s r/w

Motor current Limits the maximum motor

current; used to limit the 5 100 65 % r/w pump rotor temperature.

!!! See warning below!!!

Pump Type Displays the installed pump type Installed pump type - r/w

!!! Do not change the pump setting!!!

Warning

Setting the motor current to more than 65% may result in rotor overheating. Setting the motor current to more than 65% or changing the pump setting without permission from Leybold voids the warranty.

4.5.4 Settings active magnetic bearing

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

ident.magn.bear. Code to identify AMB type actual value - r

Emerg. bearing Counts actual value - r

Emerg. bearing Time actual value s r

Prog.Pump

Enter

Normal operation

95 %

Enter

max. accel. time

800 s Enter

r (read) = value can only be read r /w (read/write) = value can be read and written

Magnetic bearing

Enter

ident.magn.bear.

Enter

Emerg. bearing

Enter

Emerg. bearing

0.0 s

Enter

Motor current

65%

Enter

MCFT

MCF

Pump Type

MCT

Enter

Page 51

Converter Control MAG.DRIVE L

GA 05.130/3.02 - 05/98

4.5.5 Settings temperature management system

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

Setpoint Temp. Setpoint Temperature 20 75 63 °C r/w

Management System

Warn.Temp. TCU Warning temperature

Temperature Management 0 85 70 °C r/w System

FailTemp.TCU Shutdown temperature

Temperature Management 0 100 72 °C r/w System

speaker Intermittent = warning off - r/w

Continuous = failure on -

4.5.6 Settings purge / vent

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

P-Nr.HE Testdis Not used

TCU

Enter

Setpoint Temp

63 °C Enter

Purge/Vent

Enter

P-Nr.HE-Testdis

Enter

r (read) = value can only be read r /w (read/write) = value can be read and written

Warn.Temp.TCU

70 °C Enter

Fail Temp.TCU

72 °C Enter

speaker

off

Enter

Page 52

Converter Control MAG.DRIVE L

GA 05.130/3.02 - 05/98

4.5.7 Total view of the menu

Programming menu

Selects the parameterization menu from the

operating display.

Switches forward to the next main menu.

Switches back to the last main menu.

Selects submenu.

Confirms to store changed parameters.

Increases a parameter value or switches

forward to the next option.

Reduces a parameter value or switches

back to the last option.

Starts the pump. Only possible from the

basic menu.

Stops the pump.

Return to the operating display from

parameterization menu.

START

STOP

ENTER

Stop

Data to Eeprom?

Stop=no Enter=yes

Enter

Ready

00.0 A 0000 Hz

Stop

Data are stored

in the EPROM

To exit the parameterization menu

Basic menu

ororor

Ready

0.0 A 0 Hz

Enter

Setpoint

480 Hz

Enter

Pump life

0.00 h

Enter

Temp. Motor

50 °C

Enter

Temp. Converter

40 °C

Enter

Temp. Pump

50 °C

Enter

actual PVW 13

10%

Enter

actual PVW 24

10%

Enter

actual PZ 12

Enter

power

400 W

Enter

Not active

Temp. TCU

63 °C

Enter

Not active

Temp. Cooling

20 °C

Enter

Not active

Diff. pressure

100 mbar

inductance ...

analog 1 4%

German

venting

Temp. TCU ok

no purge gas

no cooling water

frequency

Converter data

Enter

current

option relay

temperature

Enter

Threshold

60 °C

Enter

Threshold

10.0 A

Enter

Threshold

300 Hz

Enter

PZ12 peak

PVW24 peak

PVW13 peak

temperature

frequency

analog output

current

Enter

scale factor

1.0 x

Enter

freq. setpoint

Analog Input 2

no function

Enter

Start delay

0 s

Enter

Display

English

Enter

Bus address

Enter

Prog.Pump

Enter

Normal operation

95 %

Enter

max. accel. time

800 s

Enter

Motor current

65%

Enter

MCFT

MCF

Pump Type

MCT

Enter

Magnetic bearing

Enter

ident.magn.bear.

Enter

Emerg. bearing

Enter

Emerg. bearing

0.0 s

Enter

TCU

Enter

Setpoint Temp

63 °C

Enter

Warn. Temp. TCU

70 °C

Enter

Fail Temp. TCU

72 °C

Enter

speaker

off

Enter

Purge/Vent

Enter

P-Nr. HE-Testdis

Enter

or or

Software version 1.2.3

Page 53

4.6.1 Basic menu

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

Ready Operating display - - - - -

Freq.Setpoint Sets the speed for operation 0 480 480 Hz r/w

Operation Hours Total operating hours of the pump actual value h r

Motor Temp. Motor temperature actual value °C r

Converter Temp. Temperature of the power actual value °C r

electronic

Bearing Temp. Temperature of the magnetic actual value °C r

bearing

Actual Value TMS Temperature of the Temperature actual value °C r

Management System

Cooling Temp. Cooling water temperature actual value °C r

Actual PVW 13 Rotor displacement in the

magnetic bearing actual value % r plane VW13

Actual PVW 24 Rotor displacement in the

magnetic bearing actual value % r plane VW24

Actual PZ 12 Rotor displacement in the

magnetic bearing actual value % r axis Z12

Power Power consumption of the drive actual value W r

Software Version Actual software version actual value - r

Converter Control MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Ready

0.0 A 0 Hz Enter

Freq.Setpoint

480 Hz

Enter

Operation Hours

0.00 h Enter

Motor Temp.

50 °C Enter

Converter Temp.

40 °C Enter

Bearing Temp.

50 °C Enter

Actual PVW 13

10%

Enter

Actual PVW 24

10%

Enter

Actual PZ 12

Enter

Power 400 W

Enter

Not Active

Actual Value TMS

63 °C

Enter

Not Active

Cooling Temp.

20 °C

Enter

r (read) = value can only be read r /w (read/write) = value can be read and written

4.6 Operating menu for the MAG.DRIVE L2

Software Version

103.04

Enter

Page 54

Converter Control MAG.DRIVE L2

GA 05.130/3.02 - 05/98

r (read) = value can only be read r /w (read/write) = value can be read and written

4.6.2 Settings converter

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

Option Relay Relay with change -over Threshold bearing

contact; the operator can temperature reached °C r/w select one of the functions Threshold motor described current reached A

Threshold frequency the thresholds are adjusted reached Hz in the next three menu items No cooling water -

no purge gas -

TMS temperature o.k. -

Vent -

Threshold Threshold bearing temp. 0 100 60 °C r/w

for option relay

Threshold Threshold motor current 0 20 10 A r/w

for option relay

Threshold Threshold frequency 0 480 300 Hz r/w

for option relay

Analog Output Analog output 0...10V; Motor current;

the operator can select 20 A =10Vxscale factor V r/w one of the functions Act.frequency ; described 500 Hz = 10Vxscale factorV

Bearing temp.;

100 °C = 10Vxscale factor V

Actual PVW13;

100% = 10Vxscale factor V

Actual PVW24;

100% = 10Vxscale factor V

Actual PZ12;

100% = 10Vxscale factor V

Scale Factor Scale factor for the analog output 0 2 1 - r/w Analog Input 2 Analog input 0...10V ; No function - r/w

optionally frequency setpoint via analog input 2 Function frequency (10V = max. frequency setpoint) setpoint -

Start Delay Waiting time between start

command and acceleration 0 1200 0 s r/w

Display Display language English - r/w

German -

Bus Adress Bus adress for the converter by

operation via 0 31 0 - r/w serial interface RS232/485

Acoustic Alarm OFF - r/w

Intermittent = warning ON Continuous = failure

German

Vent

TMS ok

No Purge gas

No Cooling Water

Frequency

Set Converter

Enter

Motor Current

Option Relay

Bearing Temp.

Enter

Threshold

60 °C Enter

Threshold

10.0 A Enter

Threshold

300 Hz

Enter

Actual PZ12

Actual PVW24

Actual PVW13

Bearing Temp.

Actual Frequency

Analog Output Motor Current

Enter

Scale factor

1.0 x

Enter

Freq.Setpoint

Analog Input 2

No Function

Enter

Start delay

0 s

Enter

Display English

Enter

Bus address

Enter

Acoustic Alarm

Off

Enter

Page 55

Converter Control MAG.DRIVE L2

GA 05.130/3.02 - 05/98

4.6.3 Settings pump

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

Normal Operation Threshold for normal operation

corresponding to the 35 99 95 % r/w frequency setpoint

Max. Accel.Time Monitor time for acceleration

and overload 600 3600 1000 s r/w

Pump Type Displays the installed pump type Installed pump type - r

4.6.4 Settings temperature management system

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

TMS Setpoint Setpoint Temperature- 20 70 63 °C r/w

Management-System

Set Pump

Enter

Normal Operation

95 % Enter

Max. Accel. time

800 s Enter

Pump Type

MAG 1600/2000 CT

Enter

Set TMS

Enter

TMS Setpoint

60 °C

Enter

r (read) = value can only be read r /w (read/write) = value can be read and written

Page 56

Converter Control MAG.DRIVE L2

GA 05.130/3.02 - 05/98

4.6.5 Settings purge / vent

Menu item Description Adjustable value / option Ac-

cess

min. max. stan- Unit

value value dard

Purge / Vent The operator can select one Purge OFF - r/w

of the beside standing Purge ON options for purge and vent Controlling purge / vent

via control plug X1 -

Option P / V Displays the factory installed

option for purge and vent Installed option - r

Via X1

Purge ON

Set Purge/Vent

Enter

Purge/Vent Purge OFF

Enter

Option P/V

Option 1

Enter

r (read) = value can only be read r /w (read/write) = value can be read and written

Page 57

Converter Control MAG.DRIVE L2

GA 05.130/3.02 - 05/98

4.6.6 Total view of the menu

Programming menu

German

Vent

TMS ok

No Purge gas

No Cooling Water

Frequency

Set Converter

Enter

Motor Current

Option Relay

Bearing Temp.

Enter

Threshold

60 °C

Enter

Threshold

10.0 A

Enter

Threshold

300 Hz

Enter

Actual PZ12

Actual PVW24

Actual PVW13

Bearing Temp.

Actual Frequency

Analog Output

Motor Current

Enter

Scale factor

1.0 x

Enter

Freq. Setpoint

Analog Input 2

No Function

Enter

Start delay

0 s

Enter

Display

English

Enter

Bus address

Enter

Acoustic Alarm

Off

Enter

Selects the parameterization menu from the

operating display.

Switches forward to the next main menu.

Switches back to the last main menu.

Selects submenu.

Confirms to store changed parameters.

Increases a parameter value or switches

forward to the next option.

Reduces a parameter value or switches

back to the last option.

Starts the pump. Only possible from the

basic menu.

Stops the pump.

Return to the operating display from

parameterization menu.

START

STOP

ENTER

Stop

Data to Eeprom?

Stop=no Enter=yes

Enter

Ready

00.0 A 0000 Hz

Stop

Data are stored

in the EPROM

To exit the parameterization menu

Ready

0.0 A 0 Hz

Enter

Freq. Setpoint

480 Hz

Enter

Operation Hours

0.00 h

Enter

Motor Temp.

50 °C

Enter

Converter Temp.

40 °C

Enter

Bearing Temp.

50 °C

Enter

Actual PVW 13

10%

Enter

Actual PVW 24

10%

Enter

Actual PZ 12

Enter

Power

400 W

Enter

Not Active

Actual Value TMS

63 °C

Enter

Not Active

Cooling Temp.

20 °C

Enter

Basic menu

Via X1

Purge ON

Set Pump

Enter

Normal Operation

95 %

Enter

Max. Accel. time

800 s

Enter

Pump Type

MAG 1600/2000 CT

Enter

Set TMS

Enter

TMS Setpoint

60 °C

Enter

Set Purge/Vent

Enter

Purge/Vent

Purge OFF

Enter

Option P/V

Option 1

Enter

ororor

Main menus

Software Version

103.04

Enter

Page 58

Converter Control MAG.DRIVE L

4.7. Temperature Management System

4.7.1 Temperature Management System for the MAG.DRIVE L

Function description

The TMS is only in function, when a MAG1600/2000 CT version is connected.The heater will be activated when the mains is switched on. The TMS (TCU) controls the heating and water cooling to maintain the pump at the specified setpoint temperature.

Settings

Principally the factory presettings will be used. The settings are saved in the pump’s memory chip.Before changing any setpoint value request Leybold! The following parameters are progammable via the key panel or the serial interface when the pump stands still.

• Setpoint Temperature

• Warning Temperature

• Failure Temperature

For the settings refer to 4.5.5 Operating menu, Settings TMS.

Heat up

The setpoint temperature will be reached within 30 to 60 minutes depending on cooling water temperature and flow. If the flow is very high and the temperature low a high temperature setpoint might not be reached. For temperature sensitive applications observe the cooling water specifications (refer to section 1.6 Technical Data).

Actual temperature

The actual TMS is displayed on the operating display (refer to 4.5.1 Operating menu, Basic menu)

Signal TMS OK

If the actual TMS (TCU) temperature lies in the range ±5K from the setpoint temperature, the TMS OK signal can be output via the option relay. The option relay must be programmed for this function (refer to Section 2.8.3 Control plug X1, Relay outputs)

Warning message

If the actual temperature exceeds the warning temperature the converter displays the message:

warning

TCU

Failure message

If the actual temperature exceeds the failure temperature the converter displays the message:

failure

TCU

The pump is decelerated. After the pump has cooled down, the failure can be ackno wledged and the pump restarted.

GA 05.130/3.02 - 05/98

Page 59

Converter Control MAG.DRIVE L

GA 05.130/3.02 - 05/98

Setpoint Temp. T

Failure

Warning

Heater ON

Cooling ON

Signal TMS OK

Failure

Warning

T + 5 K T + 2 K

T - 5 K

T - 2 K

Fig. 46 Function diagram TMS for the MAG.DRIVE L

Page 60

Converter Control MAG.DRIVE L2

GA 05.130/3.02 - 05/98

4.7.2 Temperature Management System for the MAG.DRIVE L2

Function description

The TMS is only in function, when a MAG1600/2000 CT version is connected.The heater will be activated when the mains is switched on.The TMS controls the heating and water cooling to maintain the pump at the specified setpoint temperature.

Settings

The temperature (TMS) setpoint can be programmed via the front panel keys or the serial interface when the pump stands still.

Principally the factory presetting will be used.The setting is saved in the pump’s memor y chip. Before changing any setpoint value request Leybold!

For the setting refer to 4.6.4 Operating menu, Settings TMS.

Heat up

TMS status code

The TMS status code is displayed on the operation display, see Section 4.2.

Actual temperature

The actual temperature is displayed on the oper ating display (refer to 4.6.1 Operating menu, Basic menu)

Signal TMS OK

If the actual TMS temperature lies in the r ange ±5K from the setpoint temperature, the TMS OK signal can be out put via the option relay. The option relay must be programmed for this function (refer to Section 2.8.3 Control plug X1, Relay outputs)

Warning message (Temp > T

set

+5K)

If the actual temperature exceeds the warning temperature the converter displays the message:

Warning

TMS

Page 61

Converter Control MAG.DRIVE L2

GA 05.130/3.02 - 05/98

T - 5 K

T - 2 K

T + 2 K

T + 5 K

T + 15 K

1 2

2 3

3 2 2 133

4 455

Sollwert TMS

TMS Code Heizung EIN Kühlung EIN

TMS OK

Warnung TMS

Störung TMS

1) The TMS status code is displayed on the operation display;see Section 4.2.

2) Heater or cooling active

Fig. 47 Function diagram TMS for the MAG.DRIVE L2

Setpoint temp.T

TMS Code Heater ON

Cooling ON

TMS ok

Warning Temp.TMS

Failure TMS 5

Page 62

5 Maintenance

The MAG is maintenance-free. Wear only occurs at the touch-down bearings when hard shocks have to be supported or when the pump frequently runs down without venting.

Maintenance is also required after removing the bearing cable during operation of the pump.

Under these conditions the rotor can not be controlled by the magnet bearing and the pump will have a full run down on the touch down bearing.

5.1 Removing the pump from the system

MAG which hav e been used in semiconductor processes are contaminated by semiconductor process gases. Most of these gases form acids when exposed to moist air which causes serious corrosion damage to the pump.

To prevent corrosion damage during storage and shipping, use the seal kit.

Failure to seal a contaminated MAG voids the warranty. The seal kit contains the following

- dry car tr idge,

- plastic cap for forevacuum connection flange,

- plastic adhesive film and

- aluminum cover and screws for the high-vacuum

connection flange.

Proceed as follows to seal the turbomolecular pump immediately after removing it from your process.

Purge the pump for two hours with the backing pump running. This helps to remove a large quantity of the process gases from the pump.We recommend purging the pump via the intake flange and the purge valve with approx. 200 sccm.

Press the STOP button at the MAG.DRIVE and wait until the pump has come to a standstill.

Afterwards turn the mains switch to the „0“ position. The cables between the MAG and MAG.DRIVE may be

disconnected only after the MAG has come to a full stillstand and the mains is switched off.

Warning

When the pump has been pumping hazardous gases, ensure that proper safety precautions are taken before opening the intake or exhaust connections.

Use gloves or protective clothing to avoid skin contact with toxic or highly corrosive substances. Work under a fume hood if available.

Disconnect the cables from the pump. Disconnect the forevacuum line. Disconnect the cooling water lines. Remaining cooling

water may flow out.Protect all par ts below. Remove 10 of the 12 bolts which hold the intake flange.

The 2 remaining bolts must be directly opposite. Support the pump with a lift-truck at the base plate and

remove the 2 remaining bolts. Clean the intake and forevacuum connection flange as

necessary for good adhesion of tape. Place the dry cartr idge into the forevacuum port. Don’t

use loose crystals. Firmly seal all ports with plastic adhesive film. Cover the forevacuum connection port with its plastic

cap. Seal the high-vacuum connection flange with the cover

and the screws. Pack the pump so that it may not be damaged during

transportation. Particularly protect the flanges, the cooling water connectors and the current feedthrough.

Only for MAG 1600

As the plastic adhesive film is too large for the high-v acuum connection flange slit it a little bit at the screw holes.

GA 05.130/3.02 - 05/98

Maintenance

Page 63

Maintenance

GA 05.130/3.02 - 05/98

Fig. 48 Sealing the MAG tightly

ring nut (2x)

aluminum cover

plastic adhesive film

washer (6x)

screw (6x)

nut (4x)

dry cartridge

plastic adhesive film

plastic cap

Page 64

Maintenance

GA 05.130/3.02 - 05/98

5.2 Service at Leybold’s

If you send a pump to Leybold indicate whether the pump is free of substances damaging to health or whether it is contaminated.If it is contaminated also indicate the nature of hazard.To do so, you must use a preprinted form which we shall send to you upon request.

A copy of this form is printed at the end of the Operating Instructions: „Declaration of Contamination of Vacuum Equipment and Components“.

Either fasten this form at the pump or simply enclose it to the pump.

Don’t pack the form with the pump into the PE bag. This declaration of contamination is necessary to comp-

ly with legal requirements and to protect our staff. Leybold must return any pump without a declaration of

contamination to the sender’s address.

Page 65

6 Troubleshooting

In case of a malfunction, the MAG will be braked and the first line of the display shows

FAILURE

Malfunction messages can be cancelled once the pump has come to a stop and after the malfunction has been rectified; do so with the STOP function (button or serial interface).

Warning

The MAG shall be stopped completely and the mains power cord detached before you open the MAG.DRIVE. Since dangerous voltages may nonetheless be encountered, the housing must be opened only by a qualified electrician.

Troubleshooting

GA 05.130/3.02 - 05/98

Page 66

Troubleshooting for the MAG.DRIVE L

GA 05.130/3.02 - 05/98

Warning/Failure Message on Display

Temp. Motor

Temperature sensor inside the motor reads a higher temperature than the limitation.

temp. pump

Temperature sensor inside the pump reads a higher temperature than the limitation.

temp. cool. water

Temperature sensor at cooling water block reads a higher temperature than the limitation.

TCU

Temperature sensor at base flange reads a higher temperature than the limitation.

temp. converter

Temperature sensor inside of the converter reads a higher temperature than the limitation (65 °C).

unbalanc. PVW13 unbalanc. PVW24 unbalanc. PZ12

Converter senses that rotor displacement has exceeded the limitation.

Corrective Action

Check BEARING connector and cable. Measure resistance of KTY (temperature sensor motor) at BEARING connector (pump side) between X23/x - X23/w, default

2kΩ ± 1 %. Service pump.

Set cooling water according to specifications. Check cooling lines for deposits. See Section 2.6.

Check cable, Pt 100 wires and connector. In particular measure resistance between X23/v - X23/u and X23/v - X23/t, typical resistances are in the range of 110 Ω to 130 Ω at 20 °C to 70 °C.

Set cooling water according to specifications. Check cooling lines for deposits. See Section 2.6.

Check TMS cable, Pt 100 wires and connector.In par ticular measure resistance between X30/V - X30/S, typical resistances are in the range of 110 Ω to 130 Ω at 20 °C to 70 °C.

Set cooling water according to specifications. Check cooling lines for deposits. See Section 2.6.

Check TMS cable, Pt 100 wires and connector.In par ticular measure resistance between X30/F - X30/H and X30/F - X30/G, typical resistances are in the range of 110 Ω to 130 Ω at 20 °C to 70 °C.

If temperature sensor TMS (Pt 100) is ok,unplug it.The water valve should open instantly with a clicking noise and the red LED inside the valve connector lights up.

Let the converter cool down and restart. Check mounting position and clearences

inside the rack. See Section 2.8.Check ambient temperature and watch for other heat sources.

Acknowledge failure by by pressing stop and try to restart pump.

Check unbalance PV13 / PW24 / PZ12 reading via display (basic menu) during accelleration. Check BEARING connector and cable for bended pins.

Check the chamber pressure in the operation cycle. Remove transport seal; see Section 2. 4.

Replace pump or converter or whole system.

Possible Cause

BEARING cable or connector damaged.

Drive failure.

No or too low cooling water.

BEARING cable or connector damaged. Pt 100 (temp.sensor bear ing) damaged.

No or too low cooling water.

Temperature sensor cooler (Pt 100) failure. TMS cables damaged.

No or too low cooling water.

Temperature sensor TMS (Pt 100) failure or TMS cable or connectors damaged.

Water valve malfunction.

Frequent run up and down. No sufficient air circulation.

Mechanical shocks, perhaps due to tool maintenance.

BEARING cable or connector damaged.

High active magnetic bearing current due to shock venting or transport seal not removed.

Internal failure.

6.1 Troubleshooting for the MAG.DRIVE L

6.1.1 Warning and failure messages

Page 67

Troubleshooting for the MAG.DRIVE L

GA 05.130/3.02 - 05/98

Failure Message on Display

MB-Code wrong

Converter senses that magnetic bearing is not active.

no motor current

max. accel.Time

The maximum acceleration time has been exceeded.

max. power time

Rotational speed dropped below normal operation range for more than the max. accel. time.

min. frequency

Rotational speed dropped below the minimum frequency threshold.

Corrective Action

Replace converter.

Check cables and connectors, straighten pins if required.

Replace pump.

Check pressures.

Set parameter max. Accel.time to default 1000 s. See Section 4.5.3/4.6.3 Settings pump.

Check pressures.

Set parameter max. Accel.time to default 1000 s. Set parameter Normal Operation to default 95 %. See Section 4.5.3/4.6.3 Settings pump.

Check pressures.

Possible Cause

Internal fuse for power supply active magnetic bearing PC boards blown.

Overloaded active magnetic bearing. BEARING cable connected while the con-

verter was powered.

DRIVE cable not connected or damaged. Connectors damaged or pins have no contact.

Motor coils damaged.

Backing pressure or inlet pressure too high during start-up.

Parameter max.Accel. time is not set properly.

Backing or inlet pressure too high. Process flows too high.

Parameters max.Accel. time or Normal Operation not set properly.

Backing or inlet pressure too high. Process flows too high.

6.1.2 Failure messages

Page 68

Troubleshooting for the MAG.DRIVE L

GA 05.130/3.02 - 05/98

Warning Message on Display

PK communication

Converter does not communicate with the memory chip inside of the pump.

max. power

max. frequency

Kin. Buffer

The converter works in generator mode.

Corrective Action

Check BEARING cable and connectors.

Replace pump.

Check pressures.

Set parameter max. Accel.time to default

1000 s.

Set parameter Normal Operation to default

95 %.

See Section 4.5.3/4.6.3 Settings pump.

Motor current decreases to 0 Amp.The rotor

frequency decreases to the normal operati-

on range via gas friction.

Switch the mains power on. Locate and eli-

minate the cause of the mains failure.The

pump should handle numerous power failu-

res.

Possible Cause

BEARING cable not connected or damaged. Memory chip inside magnetic bearing car-

tridge is damaged.

Backing or inlet pressure too high. Process flows too high.

Parameters max.Accel. time or Normal Operation not set properly.

Frequency exceeds the setpoint for more than 2 Hz.

Mains power off.

6.1.3 Warning messages

Page 69

Troubleshooting for the MAG.DRIVE L

GA 05.130/3.02 - 05/98

Malfunction

Converter dead, nothing happens after mains switched on.

Display malfunction, confusing failure messages.No reaction when pressing keys.

Leaks of the vacuum chamber while the pump is stopped.

No purge gas flow

Pump does not accelerate to more than 16 Hz

Base pressure not reached.

MAG does not heat up.

Display becomes blurred.

Corrective Action

Check if the green LED above the mains switch lights up.Check mains cable and connectors. Check power supply.

Replace converter.

Open and close purge gas and venting valve via control plug X1. LED on the valve must light up and a clicking noise can be heard. Foreline pressure drops while the valve is closed.

Set purge flow according to specification. Open and close purge gas and venting valve

via control plug X1. LED on the valve must light up and a clicking noise can be heard. Foreline pressure drops while the valve is closed.

Compare pump type (label on the pump) with parameter setting. Refer to Section

4.5.3/4.6.3 Settings pump.

Check pressures. Replace converter or pump or whole

system.

Let the pump system run for 3 to 5 hours to reach a base pressure below 10-5mbar.

Check TMS setpoint.Default 63 °C. Refer to Section 4.5.5.

Replace fuse (F 4 A, 5x20 mm).

Measure resistance of heater, typical approx. 70 Ω (connector pump side X30/A and X30/B).

Measure resistance between pins X31/A1 and X31/A2 at TMS cable when pump is connected.

It’s just the display. It becomes distinct at moderate temperatures.

Possible Cause

No power supply.

Fuse F1 blown.

Internal failure.

Purge gas and venting valve open or malfunctioning.

No purge gas flow. Valve malfunction.

Wrong setting in the programming menu: Settings pump: pump type

No vacuum at all. Internal converter or pump failure.

Degassing surfaces of rotor and stator. If the pump was not stored in a dry environment or was too long open to wet ambient air all internal surfaces will be covered with a layer of water.

Wrong setting TMS setpoint.

Fuse F3 at rear panel of converter blown or damaged.

TMS heater jacket defective.

TMS cable or connectors damaged.

Converter temperature high or very low.

6.1.4 Malfunctions

Page 70

Troubleshooting for the MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Warning Message on Display

Motor Temp.

Temperature sensor inside the motor reads a higher temperature value than the warning threshold (100 °C).

Message will not be activated as long as warning threshold = failure threshold.

Bearing Temp.

Temperature sensor inside the pump reads a higher temperature value than the warning threshold (68 °C).

Cooling Temp.

Temperature sensor at cooling water block reads a higher temperature value than the warning threshold (40 °C).

Converter Temp.

Temperature sensor inside of the converter reads a higher temperature value than the warning threshold (69 °C).

Overspeed

The frequency exceeds the frequency setpoint by more than 10 Hz.

TMS

TMS temperature sensor reads a temperature higher than the TMS setpoint +5 °C.

Unbalanc. PVW13 Unbalanc. PVW24 Unbalanc. PZ12

A rotor displacement exceeding the warning threshold occured.The code designates the affected axis.

Overload

The rotational speed dropped below normal operation frequency.

Measures

Take the actual motor temperature reading

from the display; see Section 4.6.1.

Reduce gas load. If the warning persists contact Leybold service.

Contact Leybold service.

Apply cooling water according to specifications. Check cooling water tubes for deposits. See also Section 2.6.

Allow pump to cool down between the cycles.

Apply cooling water according to specifications. Check cooling water tubes for deposits. See also Section 2.6.

Allow converter to cool down between the cycles.

Refer to Section 2.8 for the correct mounting

of the converter in a rack; max.ambient tem-

perature 45 °C.

Motor current decreases to 0 Amp.The rotor

frequency decreases to the setpoint via gas

friction.

Apply cooling water according to specificati-

ons. Check cooling water tubes for deposits.

See also Section 2.6.

Check the TMS setpoint (default 63 °C). For

the correct setting refer to Section 4.6.4.

If warning message persists contact Leybold

service.

Check the chamber pressure during operati-

on.

Contact Leybold service.

Reduce backing pressure.Additionally, check process gas flow.

Set parameter „Normal Operation“ to default 95%. Refer also to Section 4.6.3.

Possible Cause

Motor temperature exceeds the warning threshold e.g. due to a high gas load.

Drive failure or internal converter failure.

Cooling water flow too low or cooling water temperature too high.

Frequent acceleration and deceleration of the pump.

Cooling water flow too low or cooling water temperature too high.

Frequent acceleration and deceleration of the pump.

No sufficient air circulation.

Changing the frequency setpoint during operation to a lower value.

Cooling water flow too low or cooling water temperature too high.

Wrong TMS temperature setpoint.

Mechanical shocks, perhaps due to tool maintenance.

Shock venting.

Converter failure.

Backing pressure too high during operation. Parameters „Normal Operation“ are not set

correctly.

6.2 Troubleshooting for the MAG.DRIVE L2

6.2.1 Warning messages

Page 71

Troubleshooting for the MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Warning Message on Display

Kinetic Buffer

The converter is in the generator mode.

Op.Without Purge

The warning indicates that a C/CT type of pumpis operated while the purge gas valve is closed.

Measures

Reconnect converter to the mains. Switch on the converter.

Set purge gas function to Purge ON. (Key panel or control connector X1).

Possible Cause

Mains interrupted or converter switched off during operation of the pump.

Purge gas function disabled.

Page 72

Troubleshooting for the MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Failure Message on Display

Motor Temp.

Temperature sensor inside the motor reads a higher temperature value than the failure threshold (100 °C).

Cooling Temp.

Temperature sensor at cooling water block reads a higher temperature value than the failure threshold (50 °C).

Measures

Acknowledge failure message. Take the actual motor temperature reading from the

display; see Section 4.6.1. Reduce gas load. If the warning persists contact Leybold service.

Step 1: Check pump (temperature sensor)

Check pump connector X23. In particular measure resistance between pins X23/x and X23/w.The resistance is typically 2kΩ ± 1 %. In case of abnormal values (> 3.4 kΩ) are measured contact Leybold service.

Step 2: Check BEARING cable

If step 1 was successful do the following: Check BEARING cable for bent pins

Measure the resistance between pins X24/A9 and X24/B9 with the cable connected to the pump.The resistance is typically 2kΩ ± 1 %.

Replace the cable if it is damaged or in case the measurement of the resistance shows abnormal values (> 3.4 kΩ) now.

Contact Leybold service.

Apply cooling water according to specifications. Check cooling water tubes for deposits. See also Section 2.6.

Step 1: Check cooling water temperature sensor

Check pump connector X30. In particular measure resistance between pins X30/S and X30/V. The resistance is typically between 110 Ω and 130 Ω (20 °C to 70 °C).

Step 2: Check TMS cable and connectors

If step 1 was successful do the following: Check TMS cable for bent pins

Measure the resistance between pins X31/A4 and X31/A5 with the TMS cable connected to the pump. The resistance is typically between 110 Ω and 130 Ω (20 °C to 70 °C).

Replace TMS cable if it is damaged or in case the measurement of the resistance shows abnormal values now.

Contact Leybold service.

Possible Cause

Motor temperature exceeds the failure threshold e.g. due to a high gas load.

Motor temperature sensor defective.

BEARING cable or connector damaged.

Converter failure.

Cooling water flow too low or cooling water temperature too high.

Pt 100 (cooling water temperature sensor) damaged.

TMS cable or connectors damaged.

Converter failure.

6.2.2 Failure messages

Page 73

Troubleshooting for the MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Failure Message on Display

Bearing Temp.

Temperature sensor inside the pump reads a higher temperature value than the failure threshold (70 °C).

Converter Temp.

Temperature sensor inside of the converter reads a higher temperature value than the failure threshold (74 °C).

TMS 1

The converter measures a heating current of less than 300 mA when heater is on.

Measures

Apply cooling water according to specifications. Check cooling water tubes for deposits. See also Section 2.6.

Allow pump to cool down between the cycles.

Step 1: Check pump (temperature sensor)

Check pump connector X23. In particular measure resistance between pins X23/v and X23/u as well as between pins X23/v and X23/t.The resistance is typically between 110 Ω and 130 Ω (20 °C to 70 °C). In case abnormal values are measured contact Leybold service.

Step 2: Check BEARING cable

If step 1 was successful do the following: Check BEARING cable for bent pins

Measure the resistance between pins X24/B7 and X24/C7 as well as between pins X24/B7 and X24/D7 with the cable connected to the pump.The resistance is typically between 110 Ω and 130 Ω (20 °C to 70 °C).

Replace the cable if it is damaged or in case the measurement of the resistance shows abnormal values now.

Contact Leybold service.

Allow converter to cool down between the cycles.

Refer to Section 2.8 for the correct mounting of the converter in a rack; max.ambient temperature 45 °C.

Contact Leybold service.

Acknowledge TMS 1 failure message (possibly several times).

Step 1: Check fuse

Replace fuse F3 (F4A, 5x20 mm) if blown.

Step 2: Check pump (heating element)

Check if the connector of the heating element is connected.

Check pump connector X30. In particular measure resistance between pins X30/A and X30/B.The resistance is typically between 70 Ω and 75 Ω. In case abnormal values are measured contact Leybold service.

Step 3: Check TMS cable

If step 2 was successful do the following: Check TMS cable for bent pins

Measure resistance between pins X31/A1 and X31/A2 with the cable connected to the pump.The resistance is typically between 70 Ω and 75 Ω.

Replace the cable if it is damaged or in case the measurement of the resistance shows abnormal values now.

Contact Leybold service.

Possible Cause

Cooling water flow too low or cooling water temperature too high.

Frequent acceleration and deceleration of the pump.

Pt 100 (temperature sensor bearing) damaged.

BEARING cable or connectors damaged.

Converter failure.

Frequent acceleration and deceleration of the pump.

No sufficient air circulation.

Converter failure.

A TMS 2 ...5 failure occured and was subsequently acknowledged.

Fuse F3 (rear panel) blown.

Heating element or internal pump connection damaged.

TMS cable or connectors damaged.

Converter failure.

Page 74

Troubleshooting for the MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Failure Message on Display

TMS 2

The converter measures a heating current of more than 4 A.

TMS 3

TMS temperature sensor reads a temperature higher than 99 °C.

TMS 4

TMS temperature sensor reads a temperature lower than 1 °C.

TMS 5

TMS temperature sensor reads a temperature higher than the TMS setpoint + 15 °C.

Measures

Check the line voltage (200-240 V +10% / -15%). Repeat step 2of failure TMS 1. In case the measu-

red value is less than 60 Ω contact Leybold service.

Contact Leybold service.

Step 1: Check TMS sensor

Check pump connector X30. In particular measure resistance between pins X30/F and X30/H as well as between pins X30/F and X30/G.The resistance is typically between 110 Ω and 130 Ω (20 °C to 70 °C).

Step 2: Additional TMS sensor test

If temperature sensor TMS (Pt 100) has the correct resistance, unplug it while the pump is on power. The water valve should open instantly with a clicking noise and a red LED inside the cooling water valve connector lighting up.This LED should be on if the actual TMS temperature is higher than the TMS setpoint + 2 °C.

Contact Leybold service if the sensor is defective.

Step 3: Check TMS cable

Check TMS cable connector X31. In particular measure resistance between pins X31/A8 and X31/C8 as well as between pins X31/A8 and X31/B8.The resistance is typically between 110 Ω and 130 Ω (20 °C to 70 °C).

Contact Leybold service if the TMS cable is damaged.

Contact Leybold service.

Repeat steps 1 and 2 of failure TMS 3. Contact Leybold service if the sensor is defective.

Repeat step 3 of failure TMS 3. Contact Leybold service if the cable is damaged.

Contact Leybold service.

Apply cooling water according to specifications. Check cooling water tubes for deposits. See also Section 2.6.

Repeat step 2 of failure TMS 3. Contact Leybold service if cooling water valve is malfunctioning.

Check the TMS setpoint (default 63 °C). For the correct settings refer to Section 4.6.4.

Possible Cause

Overvoltage. Heating element defective.

Converter failure.

TMS sensor damaged.

TMS cable damaged.

Converter failure.

TMS sensor short-circuited.

TMS cable short-circuited.

Converter failure.

Cooling water flow too low or cooling water temperature too high.

Cooling water valve malfunctioning.

Wrong TMS temperature setpoint.

Page 75

Troubleshooting for the MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Failure Message on Display

Overload PZ 12 Overload PV 13 Overload PW 24

An abnormal displacement ot the rotor occured at frequencies between 0 and 5 Hz.The code designates the affected axis.

MB MB, Purge ON MB, Purge OFF

An abnormal displacement ot the rotor occured at frequencies between 130 Hz and 480 Hz.

The additional message gives information on the status of the purge gas valve the moment the failure occured. It can be used to estimate the run down time of the pump.

PK Communication

Converter does not communicate with the memory chip inside of the pump.

MB-Code Wrong

Magnetic bearing controller does not work.

Starting Time

The frequency has not reached 40 Hz 2 minutes after the start command was applied.

Accel.Time

The pump does not reach the normal operation frequency after the set maximum acceleration time.

Overload Time

The rotational speed has dropped below normal operation frequency and stays there for longer than the maximum „Accel.Time“.

Shutdown Freq.

Rotational speed dropped below the shutdown frequency threshold (140 Hz).

Measures

Acknowledge failure message and restart the pump.If failure message persists contact Leybold service.

Remove transport seal; see Section 2.4.

Check BEARING connector and cable for bent pins. Contact Leybold service if the cable is damaged.

Acknowledge failure message and restart the pump.If failure message persists contact Leybold service.

Check the chamber pressure during the operation. Refer to Section 3.3 for correct venting of the pump.

Contact Leybold service.

Check BEARING connector and cable for damages or bent pins. Contact Leybold service if the cable is damaged.

Contact Leybold service.

Reduce backing pressure. Check if the rotor rotates freely. Contact Ley-

bold service if the rotor is damaged or blocked.

Reduce backing pressure. Set parameter „Accel.Time“ to default 1000

s; see Section 4.6.3.

Reduce backing pressure.Additionally check process gas flow.

Set parameter „Normal Operation“ to default 95 % and parameter „Accel.Time“ to default 1000 s; see Section 4.6.3.

Reduce backing pressure.Additionally check process gas flow.

Possible Cause

Mechanical shocks, possibly due to tool maintenance whwn the rotor stands still.

Pump is still protected with transport seal on power up.

BEARING cable or connector damaged.

Mechanical shocks, possibly due to tool maintenance.

Shock venting.

Converter failure.

BEARING cable not connected or damaged.

Memory chip inside of magnetic bearing cartridge malfunctioning.

Converter failure.

Backing pressure too high during start-up. Rotor blocked.

Backing pressure too high during start-up. Parameter „Accel.Time“ is not set correctly.

Backing pressure too high during operation.

Parameters „Accel.Time“ or „Normal Operation“ are not set correctly.

Backing pressure too high during operation.

Page 76

Troubleshooting for the MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Failure Message on Display

Cooling Temp. SC

The cooling water temperature sensor reads a temperature lower than 1 °C.

Bearing Temp. SC

The magnetic bearing temperature sensor reads a temperature lower than 1 °C.

Motor Temp. SC

The motor temperature sensor reads a temperature lower than 1 °C.

Connection pump

Frequency

Abnormal motor current or frequency

Measures

Repeat step 1 of „failure Cooling Temp.“.

Contact Leybold service if the resistance of

the sensor is less than 100 Ω.

Repeat step 2 of „failure Cooling Temp.“.

Contact Leybold service if the resistance of the sensor is less than 100 Ω.

Contact Leybold service.

Repeat step 1 of „failure Bearing Temp.“. Contact Leybold service if the resistance of the sensor is less than 100 Ω.

Repeat step 2 of „failure Bearing Temp.“. Contact Leybold service if the resistance of the sensor is less than 100 Ω.

Contact Leybold service.

Repeat step 1 of „failure Motor Temp.“. Contact Leybold service if the resistance of the sensor is less than 1.62 kΩ.

Repeat step 2 of „failure Motor Temp.“. Contact Leybold service if the resistance of the sensor is less than 1.62 kΩ.

Contact Leybold service.

Check if the BEARING cable is connected to the pump and the converter.Acknowledge failure message.

Contact Leybold service.

Check cables and connectors, straighten pins if required.

Acknowledge failure message;see Section

4.4. If failure persists contact Leybold service.

Acknowledge failure message and restart the pump.

Possible Cause

Temperature sensor Pt 100 shor t-circuited.

TMS cable short-circuited.

Converter failure.

Temperature sensor Pt 100 shor t-circuited.

BEARING cable short-circuited.

Converter failure.

Temperature sensor KTY shor t-circuited.

BEARING cable short-circuited.

Converter failure.

BEARING cable not connected.

Converter failure.

On START command: DRIVE cable not connected or connectors damaged.

The rotor frequency exceeds 515 Hz.

A STOP commend followed by a START command given while the warning „Overspeed“ is displayed.

Page 77

Troubleshooting for the MAG.DRIVE L2

GA 05.130/3.02 - 05/98

Malfunction

Converter dead, LED „mains“ does not light up after switching on.

Display malfunction, confusing messages. No reaction when pressing keys.

Vacuum chamber pressure rises above normal backing pressure while the pump is stopped.

No purge gas flow

Base pressure not reached.

MAG 1600/2000 CT does not heat up.

Display blurred.

Measures

Check the line voltage. Contact Leybold service.

Switch the converter off and on again. If the converter still malfunctions contact Leybold service.

Open and close purge gas and/or venting valve via control plug X1.LED on the valve must light up and a clicking noise can be heard. Foreline pressure drops while the valve is closed.

Set purge flow according to specification. Open and close purge gas and venting valve via control plug X1. LED on the valve must light up and a clicking noise can be heard. Foreline pressure drops while the valve is closed.

Leave the pump system run for 3 to 5 hours to reach a pressure below 10-5mbar.

See TMS failures.

Operate the converter according to the specifications.

Possible Cause

No power supply. Fuse F1 blown or converter failure.

Converter failure.

Purge gas and venting valve open or malfunctioning.

Valve malfunctioning.

Degassing surfaces of rotor and stator. If the pump was stored in a humid environment or was exposed to humid ambient air all surfaces will be covered with condensation.

TMS failure.

Ambient temperature too high or too low.

6.2.3 Malfunctions

Page 78

Certifications

GA 05.130/3.02 - 05/98

EC declaration of manufacture

in accordance with Art. 4 paragraph 2 of EC directive 89/392/EEC changed by 91/368EEC and 93/44/EEC, Appendix IIB

Document No.: MSR0196 / MAG.DRIVE L Manufacturer: REFU elektronik GmbH Product Identification: MAG.DRIVE L2 Catalog No.: 857 24

The product indicated solely for fitting in anorther machine.Commissioning is prohibited until the conformity of the end product with EC directive 89/392/EEC has been established.

Standards applied: EN 60204-1 (DIN VDE 0113 part 1)

EN 61010-1 (DIN VDE 0411 part 1)

1.10. 1997 REFU elektronik GmbH

...................................................

H. Baumann President

The savety notes given in the product documentation must be observed.

Page 79

Certifications

GA 05.130/3.02 - 05/98

EC declaration of conformity

Document No.: MSR0196 / MAG.DRIVE L Manufacturer: REFU elektronik GmbH Product Identification: MAG.DRIVE L2 Catalog No.: 857 24

Herewith, we declare that this product, as a result of ist design and type of construction, and the version marketed by us, correspond to the basic health and safety regulations specified in the EEC Directives.

This declaration is no longer valid if the product is modified without us being in full agreement.

The product conforms to the EEC Low-Voltage Directive (73/23/EEC).

Standards applied: EN 61010-1 (DIN VDE 411 Teil 1) Edition 1994-03

Display the CE-mark: 1997

1.10. 1997 REFU elektronik GmbH

...................................................

H. Baumann President

The savety notes given in the product documentation must be observed.

Page 80

Certifications

GA 05.130/3.02 - 05/98

Factory certificate

Document No.: MSR0196 / MAG.DRIVE L Manufacturer: REFU elektronik GmbH Product Identification: MAG.DRIVE L2 Catalog No.: 857 24

The named product, when put to ist intended use, satisfies the requirements of Directive 89/336/EEC concerning electromagnetic compatibility.

The applicable measurements were made taking into account the following standards:

EN 500 81-1 EN 500 82-2 EN 55011 (DIN VDE0875 Teil 1) EN 61000-3-2 EN 61000-3-3

Note

Attention must be paid to the information provided on proper installation with respect to elektromagnetic compatibility and to other pertinent notes in the documentation supplied with the product, as well as to the relevant information concernning electrical connection.

1.10. 1997 REFU elektronik GmbH

...................................................

H. Baumann President

The savety notes given in the product documentation must be observed.

Page 81

GA 05.130/3.02 - 05/98

Form TMP-1 … Turbopump Field Failure Report

Field Service IR No.: RMA No. (if returning to factory): Service Center: Customer: Turbopump Model: Turbopump Pump Part Number: Turbopump Serial Number: Complaint:

Process: OEM Equipment Name and Model: Process Gas: Was the turbopump replaced? ❐ Yes; ❐ No. If yes, replacement pump P/N: replacement pump S/N: Date Installed: Date Removed: Date Received: Date Examined: Examined by: Received Condition:

Findings:

Cause of Failure:

Recommendations:

Remarks/Questions:

LEYBOLD AG

Fax to:Service LV Fax#:(0049) 221 347 1945

LEYBOLD VACUUM

Page 82

GA 05.130/3.02 - 05/98

S A M P L E

Declaration of Contamination of Vacuum Equipment and Components

The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declaration. This declaration can only be completed and signed by authorized and qualified staff.

1. Description of Vacuum Equipment and Components

- Equipment type/model: _________________________________

- Code No.: _________________________________

- Serial No.: _________________________________

- Invoice No.: _________________________________

- Delivery date:

__________________________

2. Reason for Return

____________________________________________ ____________________________________________ ____________________________________________ ____________________________________________

____________________________________________ ____________________________________________

3. Condition of the Vacuum Equipment and Components

- Has the equipment been used?

yes

❒ no ❒

- What type of pump oil/liquid was used? _________

- Is the equipment free from potentially

harmful substances?

yes ❒ (go to Section 5) no ❒ (go to Section 4)

4. Process related Contamination of Vacuum Equipment and Components:

- toxic yes ❒ no ❒

- corrosive yes ❒ no ❒

- explosive*) yes ❒ no ❒

- biological hazard*) yes ❒ no ❒

- radioactive*) yes ❒ no ❒

- other har mful substances yes ❒ no ❒

*) Vacuum equipment and components which have been contaminated by biological e xplosiv e or r adioactiv e substances , will

not accepted without written evidence of decontamination!

Please list all substances, gases and by-products which may have come into contact with the equipment:

Trade name Product name Chemical name Dangerous Measures First aid in case of Manufacturer (or Symbol) material class if spillage human contact

Copies: Page 1 (white) to manufacturer or representative - Page 2 (yellow) attach to consignment packaging securety - Page 3 (blue) copy for file of sender

5. Legally Binding Declaration

I hereby declare that the information supplied on this form is complete and accurate.The despatch of the contaminated vacuum equipment and components will be in accordance with the appropriate regulations covering Packaging, Transportation and Labelling of Dangerous Substances.

Name of organisation or company:_____________________________________________________________________ Address: _____________________________ Post code:______________________________________ Tel.: ______________________________________________________________________________ Fax: _____________________________ Telex: _________________________________________ Name: ______________________________________________________________________________ Job title: ______________________________________________________________________________ Date: _____________________________ Company stamp:

Legally binding signature:____________________________________________________________________________

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Notes

GA 05.130/3.02 - 05/98

Page 84

LEYBOLD VAKUUM GmbH

Bonner Strasse 498 (Bayenthal) D-50968 Cologne

Tel.: + 49 (221) 347-0 Fax: + 49 (221) 347-1250 http://www.leyboldvac.de e-mail:[email protected]

80000740 05.98 RSP Printed in Germany on chlorine-free bleached paper Technical alterations reserved