LEYBOLD IONIVAC, IONIVAC ITR 90 P, IONIVAC ITR 90 Operating Manual

IONIVAC

ITR 90
ITR 90 P

Operating Manual GA09420_002_C0

Part Numbers

120 90
120 91
120 92
120 94
230 030
230 031

General Information

Product Identification

In all communications with Leybold, please specify the information on the product
nameplate. For convenient reference copy that information into the space provided
below.

Validity

This document applies to products with the following part numbers:

ITR 90 (without display)

120 90

(vacuum connection DN 25 ISO-KF)

120 92 (vacuum connection DN 40 CF-R)

ITR 90 (with display)

120 91
120 94

(vacuum connection DN 25 ISO-KF)

(vacuum connection DN 40 CF-R)

ITR 90 P (with Profibus interface and switching functions)

230030 (vacuum connection DN 25 ISO-KF)
230031

(vacuum connection DN 40 CF-R)

The part number (No.) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this docu-

ment correspond to the KF vacuum connection. They apply to other
vacuum connections by analogy.

All ITR 90 versions are shipped with an instruction sheet (→  [1]). ITR 90 P
comes with a supplementary instruction sheet describing the fieldbus interfaces
and the switching functions (→  [2]).

We reserve the right to make technical changes without prior notice.

All dimensions in mm.

Intended Use

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The ITR 90 transmitters have been designed for vacuum measurement of gases
and gas mixtures in a pressure range of 5×10

-10

… 1000 mbar.

They must not be used for measuring flammable or combustible gases in mixtures
containing oxidants (e.g. atmospheric oxygen) within the explosion range.

The transmitters can be operated in connection with a Leybold controller or with
other control devices.

 Leybold

General Information

Functional Principle

Over the whole measuring range, the transmitters has a continuous characteristic
curve and its measuring signal is output as logarithm of the pressure.

The transmitters functions with a Bayard-Alpert hot cathode ionization measure­ment system (p < 2.0×10
(p > 5.5×10

2.0×10

-3

mbar). In the overlapping pressure range of

-2

… 5.5×10-3 mbar, a mixed signal of the two measurement systems is
output. The hot cathode is switched on by the Pirani measurement system only
below the switching threshold of 2.4×10-2 mbar (to prevent filament burn-out). It is
switched off when the pressure exceeds 3.2×10

-2

mbar) and a Pirani measurement system

-2

mbar.

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Contents

Contents

Product Identification 2

Validity 2
Intended Use 2
Functional Principle 3

1 Safety 5

1.1 Symbols Used 5

1.2 Personnel Qualifications 5

1.3 General Safety Instructions 6

1.4 Liability and Warranty 6

2 Technical Data 7
3 Installation 12

3.1 Vacuum Connection 12

3.1.1 Making the Flange Connection 13

3.1.2 Removing and Installing the Electronics Unit 14

3.1.3 Using the Optional Baffle 15

3.2 Electrical Connection 17

3.2.1 Use With Leybold Transmitter Controllers 17

3.2.2 Use With Other Controllers 18

3.2.3 Using the Optional Power Supply (With RS232C Line) 23

4 Operation 25

4.1 Measuring Principle, Measuring Behavior 25

4.2 Operational Principle of the Transmitter 27

4.3 Putting the Transmitter Into Operation 27

4.4 Degas 27

4.5 Display 28

4.6 RS232C Interface 29

4.6.1 Description of the Functions 29

4.7 Profibus Interface (ITR 90 P) 32

4.7.1 Description of the Functions 32

4.7.2 Operating Parameters 33

4.8 Switching Functions (ITR 90 P) 34

4.8.1 Setting the Switching Functions 34

5 Deinstallation 36
6 Maintenance, Repair 37

6.1 Maintenance 37

6.1.1 Cleaning the Transmitter 37

6.2 Adjusting the Transmitter 37

6.2.1 Adjustment at Atmospheric Pressure 37

6.2.2 Zero Point Adjustment 39

6.3 What to Do in Case of Problems 39

6.4 Replacing the Sensor 41

7 Options 43
8 Spare Parts 43
9 Storage 43
10 Returning the Product 44
11 Disposal 44
Appendix 45

A: Relationship Output Signal – Pressure 45
B: Gas Type Dependence 46
C: Literature 48

Declaration of Contamination 49

For cross-references within this document, the symbol (→  XY) is used, for cross-
references to further documents, listed under literature, the symbol (→  [Z]).

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 Leybold

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or mi­nor equipment damage.

Safety

Notice

Hint, recommendation

The result is O.K.

The result is not as expected

Optical inspection

Waiting time, reaction time

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.

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Safety

1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary precautions for the
process media used.

Consider possible reactions between the materials (→  10) and the process
media.

Consider possible reactions (e.g. explosion) of the process media due to the
heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are con­taminated. Adhere to the relevant regulations and take the necessary precau­tions when handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

Leybold assumes no liability and the warranty becomes null and void if the end­user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

The end-user assumes the responsibility in conjunction with the process media
used.

Transmitter failures due to contamination or wear and tear as well as

expendable parts (filaments) are not covered by the warranty.

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 Leybold

2 Technical Data

Measurement

Display range (air, O

, CO, N2,) 5×10

2

-10

… 1000 mbar, continuous

Measuring range (air, O2, CO, N2,) 1×10-8 … 10-2 mbar, continuous

Accuracy 15% of reading

(after 5 min stabilization)

Repeatability 5% of reading

(after 5 min stabilization)

Gas type dependence

→ Appendix B

Emission

Technical Data

Switching on threshold
Switching off threshold

Emission current

p ≤7.2×10

7.2×10

-6

mbar

-6

mbar <p <3.2×10-2 mbar

Emission current switching

25 µA  5 mA
5 mA  25 µA

2.4×10-2 mbar

-2

3.2×10

mbar

5 mA
25 µA

-6

7.2×10

3.2×10

mbar

-5

mbar

Degas

Degas emission current
(p <7.2×10

-6

mbar)

≈16 mA (P

degas

≈4 W)

Control input signal 0 V/+24 VDC, active high

(control via RS232 →  29)

Duration max. 3 min, followed by automatic stop

In degas mode, ITR 90 transmitters keep supplying measurement values, however
their tolerances may be higher than during normal operation.

Output signal

Output signal (measuring signal) 0 … +10 V

Display range 0.774 V … +10 V

(5×10

-10

mbar … 1000 mbar)

Relationship voltage-pressure logarithmic, 0.75 V/decade

(

→ Appendix A)

Error signal

Minimum load impedance

<0.3 V/0.5 V (→  39)

10 kΩ

Display (120 91 and 120 94)

Display panel

Dimensions

Pressure units (pressure p)

LCD matrix, 32×16 pixels,
with background illumination

16.0 mm × 11.2 mm

mbar (default), Torr, Pa
(selecting the pressure unit →  29)

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Technical Data

pp

Power supply

Operating voltage at the
IONIVAC ITR 90

Power consumption

Standard
Degas
Emission start (<200 ms)

Power consumption

ITR 90
ITR 90 P

Fuse necessary 1.25 AT

Sensor cable

DANGER

The transmitter must only be connected to power supplies, instru­ments or control devices that conform to the requirements of a
grounded extra-low voltage (PELV). The connection to the transmitter
has to be fused (Leybold controllers fulfill these requirements).

+24 VDC (20 … 28 VDC) 1)
ripple max. 2 V

≤0.5 A
≤0.8 A
≤1.4 A

≤16 W
≤18 W

For reasons of compatibility, the expression "sensor cable" is used for all

ITR 90 versions in this document, although the pressure reading of the
transmitters with fieldbus interface (ITR 90 P) is normally transmitted via
the corresponding bus.

Electrical connector

ITR 90
ITR 90 P

Cable for ITR 90

Analog values only
Without degas function

Analog values
With degas function

Analog values
With degas function
And RS232C interface

Cable for ITR 90 P

Max. cable length (supply voltage 24 V

Analog operation

RS232C operation

Transmitter identification

D-Sub,15-pin, male (→  19)
D-Sub,15-pin, male (→  20)

4 conductors plus shielding

5 conductors plus shielding

7 conductors plus shielding

depending on the functions used,
max. 15 conductors plus shielding

1)

)

≤35 m, conductor cross-section 0.25 mm²
≤50 m, conductor cross-section 0.34 mm²
≤100 m, conductor cross-section 1.0 mm²

≤30 m

42 kΩ resistor between Pin 10 (sensor
cable) and GND

1)

Measured at sensor cable connector (consider the voltage drop as function of

the sensor cable length).

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Switching functions

ITR 90

ITR 90 P

Adjustment range

Relay contact rating

Voltage
Current

RS232C interface

Technical Data

none

2 (setpoints A and B)

-9

mbar … 100 mbar

1×10

Setpoints adjustable via potentiometers
(setpoints A and B), one floating, nor­mally open relay contact per setpoint
(→  20, 34)

Adjusting the setpoints via field bus is
described in the corresponding bus sec­tions.

≤30 V
≤0.5 ADC

Data rate

Data format

Connections (sensor cable connector)
TxD (Transmit Data)
RxD (Receive Data)
GND

9600 Baud

binary
8 data bits
one stop bit
no parity bit
no handshake

Pin 13
Pin 14
Pin 5

Function and interface protocol of the RS232C interface →  29

Profibus interface (ITR 90 P)

Fieldbus name Profibus

Standard applied

Interface protocol data format

Interface, physical RS485

Data rate

Node address

Local
(Adjustable via hexadecimal
"ADDRESS", "MSD", "LSD"
switches)

Via Profibus
(hexadecimal "ADDRESS" switches
set to >7d

hex

(>125

dec

))

→  [5]

→  [3], [5]

≤12 MBaud (→  [3])

00 … 7D

(0 … 125

hex

dec

00 … 7D

(0 … 125

hex

dec

)

)

Profibus connection D-Sub, 9-pin, female

Cable Shielded, special Profibus cable

(→  22 and  [4])

Cable length, system wiring According to Profibus specifications

(→  [4], [5])

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Technical Data

Vacuum

Materials exposed to vacuum

Housing, supports, screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element

Internal volume

DN 25 ISO-KF
DN 40 CF-R

Max. Pressure 2 bar (absolute)

Weight

Part numbers

120 90, 120 91

120 92, 120 94
230 030
230 031

Ambiance

Admissible temperatures

Storage

Operation

Bakeout

Relative humidity
(year's mean / during 60 days)

Use indoors only

Type of protection IP 30

stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y

2O3

)
molybdenum
tungsten, copper

3

≤24 cm
≤34 cm3

≈290 g
≈550 g
≈430 g
≈695 g

-20 … 70 °C

0 … 50 °C

+150 °C (without electronics unit)

≤65 / 85% (no condensation)

altitude up to 2000 m NN

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Dimensions [mm]

Part numbers Part numbers

120 90 120 92

120 91 120 94

230 030 230 031

4-40UNC 2B

Technical Data

4-40UNC 2B

DN 25 ISO-KF

DN 40 CF-R

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Installation

3 Installation

3.1 Vacuum Connection

DANGER

DANGER: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.

Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.

DANGER

The transmitter must be electrically connected to the grounded
vacuum chamber. This connection must conform to the requirements
of a protective connection according to EN 61010:

• CF connections fulfill this requirement

• For transmitters with a KF vacuum connection, use a conductive

metallic clamping ring.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to

• The transmitter is supplied with a built-in grid. For potentially contaminating
applications and to protect the electrodes against light and fast charged
particles, installation (→  15) of the optional baffle is recommended (→  43).

• The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C,
the electronics unit has to be removed (→  14) or an extension (Option
→  43) has to be installed.

ensure cleanliness and prevent damages.

The transmitter may be mounted in any orientation. To keep conden-

sates and particles from getting into the measuring chamber, preferably
choose a horizontal to upright position. See dimensional drawing for
space requirements (→  11).

When installing the transmitter, make sure that the area around the
connector is accessible for the tools required for adjustment while the
transmitter is mounted (→  37).

When installing the transmitter, allow for installing/deinstalling the
connectors and accommodation of cable loops.

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3.1.1 Making the Flange Connection

Procedure

It is recommended not to apply any vacuum grease.

Installation

The protective lid will be needed for maintenance.

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Installation

3.1.2 Removing and Installing the Electronics Unit

Required tool

• Allen key, size 2.5 mm

Removing the electronics unit

 Unscrew the hexagon socket set screw (1) on the side of the electronics

unit (2).

1

2

 Remove the electronics unit without twisting it.

Removal of the electronics unit is completed.

Installing the electronics unit

 Place the electronics unit on the sensor (3) (be careful to correctly align the

pins and notch (4)).

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4

3

 Leybold

 Slide the electronics unit in to the mechanical stop and lock it with the hexa-

gon socket set screw (1).

The electronics unit is now installed.

3.1.3 Using the Optional Baffle

In severely contaminating processes and to protect measurement electrodes opti­cally against light and fast charged particles, replacement of the built-in grid by the
optional baffle (→  43) is recommended.

Installing/deinstalling
the baffle

The optional baffle will be installed at the sensor opening of the deinstalled trans­mitter (Deinstallation →  36).

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the
desorption rate.

Always wear clean, lint-free gloves and use clean tools when working

Required tools / material

in this area.

Installation

• Baffle (→  43)

• Pointed tweezers

• Pin (e.g. pencil)

• Screwdriver No 1

Procedure

 Carefully remove the grid with tweezers.

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Installation

 Carefully place the baffle onto the sensor opening.

 Using a pin, press the baffle down in the center until it catches.

The baffle is now installed (Installation of the transmitter →  12).

Deinstallation

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Carefully remove the baffle with the screwdriver.

 Leybold

3.2 Electrical Connection

3.2.1 Use With Leybold Transmitter Controllers

See Leybold sales literature and data sources for controllers and our range of
sensor cables on our internet home page (→  [6]).

Caution

Caution: data transmission errors

If the transmitter is operated with the RS232C interface and a fieldbus
interface at the same time, data transmission errors may occur.

The transmitter must not be operated with the RS232C interface and

Procedure

Profibus at the same time.

 Plug the sensor connector into the transmitter and secure it with the locking

screws.

Installation

 Connect the other end of the sensor cable to the Leybold controller and

secure it.

The transmitter can now be operated with the Leybold controller.

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Installation

3.2.2 Use With Other Controllers

The transmitter can also be operated with other controllers.

Especially the fieldbus version ITR 90 P (Profibus) is usually operated as part of a
network, controlled by a master or bus controller. In such cases, the control system
has to be operated with the appropriate software and interface protocol (→  [3]).

3.2.2.1 Making an Individual Sensor Cable

For reasons of compatibility, the expression "sensor cable" is used for all

ITR 90 versions in this document, although the pressure reading of the
ITR 90 P transmitter with fieldbus interface is normally transmitted via
Profibus.

The sensor cable is required for supplying all ITR 90 types with power.
In connection with the ITR 90 P transmitter with fieldbus interface it also
permits access to the relay contacts of the switching functions (→  20).

Cable type

The application and length of the sensor cable have to be considered when deter­mining the number and cross sections of the conductors (→  8).

Procedure

 Open the cable connector (D-Sub, 15-pin, female).
 Prepare the cable and solder/crimp it to the connector as indicated in the

diagram of the transmitter used:

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Sensor cable connection ITR 90

ITR 90

TxD

RxD

Installation

The supply common (Pin 5) and the shielding (Pin 15) must be
connected at the supply unit with protective ground.

Incorrect connection, incorrect polarity or inadmissible supply voltages
can damage the transmitter.

+U

b

42k



WARNING

1.25AT

Identification

24 V

15

9

1

8

For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the

output signal can be measured directly between the positive signal out­put (Pin 2) and supply common GND (Pin 5) without loss of accuracy. At
greater cable lengths, differential measurement between signal output
(Pin 2) and signal common (Pin 12) is recommended.

 Reassemble the cable connector.
 On the other cable end, terminate the cable according to the requirements

of the transmitter controller you are using.

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Installation

Plug the sensor connector into



the transmitter and secure it with
the locking screws.

 Connect the other end of the sensor cable to the connector of the instru-

ment or transmitter controller you are using.

The transmitter can now be operated via analog and RS232C interface.

Sensor cable connection ITR 90 P

.

ITR 90 P

Measuring signal

SP A

SP B

SP A

SP B

TxD

RxD

Degas

42k

3

6

1

4

9

11

13

14

7

8

2

12



10

5

15

RS232

1.25 AT

Identification

0V

Degas

24V

9

1

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15

8

WARNING

The supply common (Pin 5) and the shielding (Pin 15) must be
connected at the supply unit with protective ground.

Incorrect connection, incorrect polarity or inadmissible supply

For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the out-

put signal can be measured directly between the positive signal output
(Pin 2) and supply common GND (Pin 5) without loss of accuracy. At
greater cable lengths, differential measurement between signal output
(Pin 2) and signal common (Pin 12) is recommended.

 Reassemble the cable connector.

voltages can damage the transmitter.

 On the other cable end, terminate the cable according to the requirements

of the transmitter controller you are using.

Plug the sensor connector into



the transmitter and secure it with
the locking screws.

Installation

 Connect the other end of the sensor cable to the connector of the instru-

ment or transmitter controller you are using.

The transmitter can now be operated via analog and RS232C interface.

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Installation

3.2.2.2 Making a Profibus Interface Cable (ITR 90 P)

For operating ITR 90 P via Profibus, an interface cable conforming to the Profibus
standard is required.

If no such cable is available, make one according to the following indications.

Cable type

Only a cable that is suited to Profibus operation may be used (→  [4], [5]).

Procedure

 Make the Profibus interface cable according to the following indications:

1 5

D-Sub, 9-pin
male, soldering side

6 9

Pin Function (BPG400-SP)

1 Do not connect

2 Do not connect

3 RxD/TxD-P

4 CNTR-P

5 DGND

6 VP

1)

2)

2)

7 Do not connect

8 RxD/TxD-N

9 Do not connect

1)

Only to be connected if an optical link module is used.

2)

Only required as line termination for devices at both ends of bus cable

(→  [4]).

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 Plug the Profibus (and sensor) cable connector into the transmitter.

 Leybold

Installation

 Lock the Profibus (and sensor) cable connector.

The transmitter can now be operated via Profibus interface (→  32).

3.2.3 Using the Optional Power Supply (With RS232C Line)

The optional 24 V power supply (→  43) allows RS232C operation of the ITR 90
transmitter with any suitable instrument or control device.

The instrument or control device needs to be equipped with a software that sup­ports the RS232C protocol of the transmitter (→  29).

Technical data

Mains connection

Mains voltage 90 … 250 VAC 50 … 60 Hz

Mains cable 1.8 meter (Schuko DIN and U.S. con-

Output (operating voltage of transmitter)

Voltage 21 … 27 VDC, set to 24 VDC

Current Max. 1.5 A

Transmitter connection

Connector D-Sub, 15-pin, female

24 VDC cable 5 m, black

Connection of the instrument or control
device

RS232C connection D-Sub, 9-pin, female

Cable 5 m, black, 3 conductors, shielded

Wiring diagram

nectors)

ITR 90
D-Sub,
15 pins

PE

+24 V

GND

DC

AC

RS232C
D-Sub, 9 pins

Mains

N

90 ... 250 VAC

PE

50 ... 60 Hz

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Installation

Connecting the power supply

 Connect the transmitter to the power supply and lock the connector with the

screws.

 Connect the RS232C line to the instrument or control device and lock the

connector with the screws.

 Connect the power supply to the mains.
 Turn the power supply on.

The transmitter can now be operated via RS232C interface (→  29).

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4 Operation

4.1 Measuring Principle, Measuring Behavior

The ITR 90 vacuum transmitters consist of two separate measuring systems (hot
cathode Bayard-Alpert (BA) and Pirani).

Bayard-Alpert

The BA measuring system uses an electrode system according to Bayard-Alpert
which is designed for a low x-ray limit.

The measuring principle of this measuring system is based on gas ionization.
Electrons emitted by the hot cathode (F) ionize a number of molecules proportional
to the pressure in the measuring chamber. The ion collector (IC) collects the thus
generated ion current I

+

and feeds it to the electrometer amplifier of the
measurement instrument. The ion current is dependent upon the emission current
Ie, the gas type, and the gas pressure p according to the following relationship:

+

I

= Ie × p × C

Factor C represents the sensitivity of the transmitter head. It is generally specified

.

for N

2

The lower measurement limit is 5×10

To usefully cover the whole range of 5×10

-10

mbar (transmitter metal sealed).

-10

mbar … 10-2 mbar, a low emission
current is used in the high pressure range (fine vacuum) and a high emission cur­rent is used in the low pressure range (high vacuum). The switching of the emis­sion current takes place at decreasing pressure at approx. 7.2×10
creasing pressure at approx. 3.2×10
can temporarily (<2 s) deviate from the specified accuracy.

-5

mbar. At the switching threshold, the ITR 90

-6

mbar, at in-

IC

ECF

+– +–

(Degas 250V)

200V40V

Diagram of the BA measuring system

EC

F hot cathode (filament)
IC ion collector
EC anode (electron collector)

F

IC

Operation

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Operation

Pirani

Within certain limits, the thermal conductibility of gases is pressure dependent. This
physical phenomenon is used for pressure measurement in the thermal conduc­tance vacuum meter according to Pirani. A self-adjusting bridge is used as meas­uring circuit (→ schematic). A thin tungsten wire forms the sensor element. Wire
resistance and thus temperature are kept constant through a suitable control cir­cuit. The electric power supplied to the wire is a measure for the thermal conduc­tance and thus the gas pressure. The basic principle of the self-adjusting bridge
circuit is shown in the following schematic.

Schematic

The bridge voltage UB is a measure for the gas pressure and is further processed
electronically (linearization, conversion).

Measuring range

The ITR 90 transmitters continuously cover the measuring range

-10

5×10

mbar … 1000 mbar.

• The Pirani constantly monitors the pressure.

• The hot cathode (controlled by the Pirani) is activated only at pressures

<2.4×10

-2

mbar.

If the measured pressure is higher than the switching threshold, the hot cathode is
switched off and the Pirani measurement value is output.

-2

If the Pirani measurement drops below the switching threshold (p = 2.4×10
the hot cathode is switched on. After heating up, the measured value of the hot
cathode is fed to the output. In the overlapping range of 5.5×10

-3

… 2.0×10-2 mbar,

mbar),

the output signal is generated from both measurements.

-2

Pressure rising over the switching threshold (p = 3.2×10

mbar) causes the hot

cathode to be switched off. The Pirani measurement value is output.

Gas type dependence

The output signal is gas type dependent. The characteristic curves are accurate for
dry air, N

and O2. They can be mathematically converted for other gases

2

(→ Appendix B).

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4.2 Operational Principle of the Transmitter

The measuring currents of the Bayard-Alpert and Pirani sensor are converted into
a frequency. A micro-controller converts this frequency into a digital value repre­senting the measured total pressure. After further processing this value is available
as analog measurement signal (0 … +10 V) at the output (sensor cable connector
Pin 2 and Pin 12). The maximum output signal is internally limited to +10 V (

≙

atmosphere). The measured value can be read as digital value through the

RS232C interface (Pins 13, 14, 15) (→  29). transmitters with a display show the
value as pressure. The default setting of the displayed pressure unit is mbar. It can
be modified via the RS232C interface (→  29).

In addition to converting the output signal, the micro controller's functions include
monitoring of the emission, calculation of the total pressure based on the meas­urements of the two sensors, and communication via RS232C interface.

4.3 Putting the Transmitter Into Operation

When the operating voltage is supplied (→ Technical Data), the output signal is
available between Pin 2 (+) and Pin 12 (–) of the sensor cable connector
(Relationship output signal – pressure → Appendix A).

Allow for a stabilizing time of approx. 10 min. Once the transmitter has been
switched on, permanently leave it on irrespective of the pressure.

Communication via the digital interface is described in a separate section.

4.4 Degas

Operation

Contamination

Transmitter failures due to contamination or wear and tear as well as

expendable parts (filaments) are not covered by the warranty.

Deposits on the electrode system of the BA transmitter can lead to unstable
measurement readings.

The degas process allows in-situ cleaning of the electrode system by heating the
electron collector grid to approx. 700 °C by electron bombardment.

Depending on the application, this function can be activated by the system control
via a digital interface. The ITR 90 automatically terminates the degas process after
3 minutes, if it has not been stopped before.

The degas process should be run at pressures below 7.2×10-6 mbar

(emission current 5 mA).

For a repeated degas process, the control signal first has to change from ON
(+24 V) to OFF (0 V), to then start degas again with a new ON (+24 V) command. It
is recommended that the degas signal be set to OFF again by the system control
after 3 minutes of degassing, to achieve an unambiguous operating status.

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Operation

4.5 Display

The transmitters with part numbers

120 91 and
120 94

have a built-in two-line display with an LCD matrix of 32×16 pixels. The first line
shows the pressure, the second line the pressure unit, the function and possible
errors. The background illumination is usually green, in the event of an error, it
changes to red. The pressure is displayed in mbar (default), Torr or Pa. The pres­sure unit can be changed via RS232C interface (→  29).

Pressure display

Pressure reading, pressure unit

Function display

(none) Pirani operation

Emission 25 A

Emission 5 mA

Degas

1000 mbar adjustment (Pirani)



Error display

no error
(green background illumination)

Pirani sensor error
(red background illumination)

BA sensor error
(red background illumination)

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Internal data connection failure
(red background illumination)

What to do in case of problems →  39.

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4.6 RS232C Interface

The built-in RS232C interface allows transmission of digital measurement data and
instrument conditions as well as the setting of instrument parameters.

Caution

Caution: data transmission errors

If the transmitter is operated with the RS232C interface and a fieldbus
interface at the same time, data transmission errors may occur.

The transmitter must not be operated with the RS232C interface and

4.6.1 Description of the Functions

The interface works in duplex mode. A nine byte string is sent continuously without
a request approx. every 20 ms.

Commands are transmitted to the transmitter in a five byte input (receive) string.

Operational parameters

Profibus at the same time.

Operation

• Data rate

• Byte

9600 Baud set value, no handshake

8 data bits
1 stop bit

Electrical connections

• TxD

• RxD

• GND

Pin 13

Pin 14

Pin 5

(Sensor cable connector)

4.6.1.1 Output String (Transmit)

The complete output string (frame) is nine bytes (byte 0 … 8). The data string is
seven bytes (byte 1 … 7).

Format of the output string

Byte No Function Value Comment

0 Length of data string 7 (Set value)

1 Page number 5 (For ITR 90)

2 Status

3 Error

4 Measurement high byte 0 … 255

5 Measurement low byte 0 … 255

6 Software version 0 … 255

→ Status byte

→ Error byte

→ Calculation of pressure value

→ Calculation of pressure value

→ Software version

7 Sensor type 10 (For ITR 90)

8 Check sum 0 … 255

→ Synchronization

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Operation

Synchronization

Synchronization of the master is achieved by testing three bytes:

Byte No Function Value Comment

0 Length of data string 7 Set value

1 Page number 5 (For ITR 90)

8 Check sum of bytes No 1 … 7 0 … 255 Low byte of check

1)

High order bytes are ignored in the check sum.

sum

1)

Status byte

Bit 1 Bit 0 Definition

0 0 Emission off

0 1

Emission 25 μA

1 0 Emission 5 mA

1 1 Degas

Bit 2 Definition

0 1000 mbar adjustment off

1 1000 mbar adjustment on

Bit 3 Definition

0 ⇔ 1

Toggle bit, changes with every

string received correctly

Bit 5 Bit 4 Definition

0 0 Current pressure unit mbar

0 1 Current pressure unit Torr

1 0 Current pressure unit Pa

Bit 7 Bit 6 Definition

x x Not used

Error byte

Bit 3 Bit 2 Bit 1 Bit 0 Definition

x x x x Not used

Bit 7 Bit 6 Bit 5 Bit 4 Definition

0 1 0 1 Pirani adjusted poorly

1 0 0 0 BA error

1 0 0 1 Pirani error

Software version

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The software version of the transmitter can be calculated from the value of byte 6
of the transmitted string according to the following rule:

Version No = Value

(Example: According to the above formula, Value

Byte 6

/ 20

of 32 means software ver-

Byte 6

sion 1.6)

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Calculation of the pressure value

The pressure can be calculated from bytes 4 and 5 of the transmitted string. De­pending on the currently selected pressure unit (→ byte 2, bits 4 and 5), the ap­propriate rule must be applied.

As result, the pressure value results in the usual decimal format.

((high byte × 256 + low byte) / 4000 - 12.5)

= 10

((high byte × 256 + low byte) / 4000 - 12.625)

((high byte × 256 + low byte) / 4000 - 10.5)

p

mbar

p

= 10

Torr

pPa = 10

Example

The example is based on the following output string:

Byte No 0 1 2 3 4 5 6 7 8

Value 7 5 0 0 242 48 20 10 69

The instrument or controller (receiver) interprets this string as follows:

Byte No Function Value Comment

0 Length of data

7 (Set value)

string

1 Page number 5 ITR 90

2 Status 0

Emission = off
Pressure unit = mbar

3 Error 0

Measurement
4
5

High byte
Low byte

6 Software version 20

No error

Calculation of the pressure:

242

48

((242 × 256 + 48) / 4000 - 12.5)

p = 10

Software version = 20 / 20 = 1.0

= 1000 mbar

7 Sensor type 10 ITR 90

8 Check sum 69

5 + 0 + 0 + 242 + 48 + 20 + 10 =

≙ 01 45

325

dec

hex

High order byte is ignored 
Check sum = 45

hex

≙ 69

dec

4.6.1.2 Input String (Receive)

Operation

For transmission of the commands to the transmitter, a string (frame) of five bytes
is sent (without <CR>). Byte 1 to byte 3 form the data string.

Format of the input string

Byte no Function Value Comment

0 Length of data string 3 (Set value)

1 Data

2 Data

3 Data

4 Check sum

1)

High order bytes are ignored in the check sum.

(from bytes No 1 … 3) 0 … 255

→ admissible input strings

→ admissible input strings

→ admissible input strings

(low byte of sum)

1)

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Operation

Admissible input strings

For commands to the transmitter, six defined strings are used:

Byte No

Command 0 1 2 3 4 2)

Set the unit mbar in the display 3 16 62 0 78

Set the unit Torr in the display 3 16 62 1 79

Set the unit Pa in the display 3 16 62 2 80

Power-failure-safe storage of current unit 3 32 62 62 156

Switch degas on

3 16 93 148 1

(switches itself off after 3 minutes)

Switch degas off before 3 minutes 3 16 93 105 214

2)

Only low order byte of sum (high order byte is ignored).

4.7 Profibus Interface (ITR 90 P)

This interface allows operation of ITR 90 P with part number

230030 and
230031

in connection with other devices that are suited for Profibus operation. The physical
interface and interface firmware of ITR 90 P comply with the Profibus standard
(→  [4], [5]).

Two adjustable switching functions are integrated in the ITR 90 P. The corre­sponding relay contacts are available at the sensor cable connector (→  20, 34).

The basic sensor and sensor electronics of all ITR 90 transmitters are identical.

Caution

Caution: data transmission errors

If the transmitter is operated via RS232C interface and Profibus
interface at the same time, data transmission errors may occur.

The transmitter must not be operated via RS232C interface and

4.7.1 Description of the Functions

Via this interface, the following and further data are exchanged in the standardized
Profibus protocol (→  [3]):

• Pressure reading

• Pressure unit (Torr, mbar, Pa)

• Degas function

• Transmitter adjustment

• Status and error messages

• Status of the switching functions

Profibus interface at the same time.

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4.7.2 Operating Parameters

As the Profibus protocol is highly complex, the parameters and programming of
ITR 90 P are described in detail in the separate Interface Manual (→  [3]).

4.7.2.1 Operating Software

For operating the transmitter via Profibus, prior installation of the ITR 90 specific
GSD file is required on the bus master side. This file can be downloaded from the
CD ROM, which is enclosed in scope of delivery of the transmitter.

4.7.2.2 Node Address Setting

For unambiguous identification of the transmitter in a Profibus environment, a node
address is required. The node address setting is made on the transmitter.

The node address (0 … 125
(00 … 7D

) via the "ADDRESS", "MSD", and "LSD" switches.

hex

) is set in hexadecimal form

dec

The node address is polled by the firmware when the trans­mitter is switched on. If the setting deviates from the stored
value, the new value is taken over into the NVRAM. If a value
>7D

hex

(>125

) is entered, the node address setting currently

dec

stored in the device remains valid but it can now be defined via
Profibus ("Set slave Address", →  [3]).

Electrical connections

Operation

The transmitter is connected to Profibus via the 9-pin Profibus connector (→  22).

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Operation

4.8 Switching Functions (ITR 90 P)

The transmitter ITR 90 P has two independent, manually settable switching
functions. Each switching function has a floating normally open relay contact. The
relay contacts are accessible at the sensor cable connector (→  20).

The threshold values of switching functions A and B can be set within the pressure
range 1×10

-9

mbar … 100 mbar via potentiometers "SETPOINT A" and

"SETPOINT B".

Calculating the threshold voltage

U

Threshold

= 0.75 × (log p

Setpoint

– c) + 7.75

Constant c is pressure unit dependent (→ Appendix A).

Measuring signal

(Pressure p)

U

Threshold

(Setpoint A, B)

u

s

a

e

M

Hysteresis
10% U

a

v

d

e

r

Threshold

e

u

l

Off

Time t

Switching function

Off

On

The hysteresis of the switching functions is 10% of the threshold setting.

4.8.1 Setting the Switching Functions

The threshold values of the two switching functions "SETPOINT A" and
"SETPOINT B" are set locally on the potentiometers of the transmitter that are
accessible via the openings on one side of the transmitter housing.

Required tools

• Voltmeter

• Ohmmeter or continuity checker

• Screwdriver, max. ø2.5 mm

Procedure

The procedure for setting thresholds is identical for both switching functions.

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 Put the transmitter into operation.

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 Connect the + lead of a voltmeter to the threshold measurement point of the

selected switching function ("Setpoint A" Pin 3, "Setpoint B" Pin 6) and

its – lead to Pin 5.

Setpoint A Pin 3
Setpoint B Pin 6

max. ø2.5

Pin 5

Operation

 Using a screwdriver (max. ø2.5 mm), set the voltage of the selected

switching function (Setpoint A, B) to the desired value U

Setting of the switching functions is now concluded.

There is no local visual indication of the statuses of the switching func-

tions. However, a functional check of the switching functions (On/Off)
can be made with one of the following methods:

• Reading the status via fieldbus interface →  [3].

• Measurement of the relay contacts at the sensor cable connector

with a ohmmeter/continuity checker (→  20).

Threshold

.

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Deinstallation

5 Deinstallation

Procedure

DANGER

Caution: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contami­nated. Adhere to the relevant regulations and take the necessary pre­cautions when handling contaminated parts.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.

 Vent the vacuum system.

Before taking the transmitter out of operation, make sure that this

has no adverse effect on the vacuum system.

Depending on the programming of the superset controller, faults
may occur or error messages may be triggered.

Follow the appropriate shut-down and starting procedures.

 Take transmitter out of operation.
 Disconnect all cables from the transmitter.
 Remove transmitter from the vacuum system and replace the protective lid.

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Maintenance, Repair

6 Maintenance, Repair

6.1 Maintenance

DANGER

Caution: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contami­nated. Adhere to the relevant regulations and take the necessary pre-

The product is maintenance-free, If clean operating conditions are met.

6.1.1 Cleaning the Transmitter

Small deposits on the electrode system can be removed by baking the anode
(Degas →  27). In the case of severe contamination, the baffle can be exchanged
easily (→  15). The sensor itself cannot be cleaned and needs to be replaced in
case of severe contamination (→  41).

A slightly damp cloth normally suffices for cleaning the outside of the unit. Do not
use any aggressive or scouring cleaning agents.

cautions when handling contaminated parts.

Make sure that no liquid can penetrate the product. Allow the product to

dry thoroughly before putting it into operation again.

Transmitter failures due to contamination or wear and tear as well as

expendable parts (filaments) are not covered by the warranty.

6.2 Adjusting the Transmitter

The transmitter is factory-calibrated. Through the use in different climatic condi­tions, fitting positions, aging or contamination (→  27) and after exchanging the
sensor (→  41) a shifting of the characteristic curve can occur and readjustment
can become necessary. Only the Pirani part can be adjusted.

6.2.1 Adjustment at Atmospheric Pressure

At the push of a button the digital value and thus the analog output are adjusted
electronically to 10 V at atmospheric pressure.

Adjustment is necessary if

• at atmospheric pressure, the output signal is <10 V

• the display reads < atmospheric pressure (if the transmitter has a display)

• at atmosphere, the digital value of the RS232C interface is < atmospheric pres-

sure

• at atmosphere, the digital value received by the bus controller of the fieldbus
transmitter (Profibus) is < atmospheric pressure

• when the vacuum system is vented, the output voltage reaches 10 V (limited to
10 V by the software) before the measured pressure has reached atmosphere

• when the vacuum system is vented, the digital value of the RS232C interface
reaches its maximum before the measured pressure has reached atmosphere.

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Maintenance, Repair

• when the vacuum system is vented, the digital value received by the bus con­troller of the fieldbus (Profibus) reaches its maximum before the measured
pressure has reached atmosphere.

Required tools

• Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)

Procedure

The transmitter ITR 90 P is mechanically slightly different from the BPG400. The
adjustment opening of ITR 90 P is on one side of the transmitter housing. However,
the adjustment procedure is the same for all transmitter versions.

 Operate transmitter for approx. 10 minutes at atmospheric pressure.

If the transmitter was operated before in the BA range, a cooling-

down time of approx. 30 minutes is to be expected (transmitter
temperature = ambient temperature).

 Insert the pin through the opening marked <FULL SCALE> and push the

button inside for at least 5 s.

ITR 90 ITR 90 P

Transmitters with display will show the reading "1000 mbar" and

the function "A" when the button has been pushed for 4 s. Upon
completion of the adjustment, the function indication "A" disap­pears.

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The transmitter is automatically adjusted (≈10 s).

The transmitter is now adjusted at atmospheric pressure.

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Maintenance, Repair

6.2.2 Zero Point Adjustment

A zero point adjustment is recommended

• after the sensor has been exchanged

• as part of the usual maintenance work for quality assurance

• if "FAIL 5" is shown on the display

Required tools

• Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)

Procedure

The push button <FULL SCALE> is also used for the zero point adjustment
(→ Illustration in "Adjustment at Atmospheric Pressure").

 Operate transmitter for approx. 10 minutes at a pressure of 1×10

-4

mbar.

 Insert the pin through the opening marked <FULL SCALE> and push the

button inside for 2 s.

The adjustment is done automatically and ends after 2 minutes.

The zero point of the transmitter is now adjusted.

6.3 What to Do in Case of Problems

In the event of a fault or a complete failure of the output signal, the transmitter can
easily be checked.

Required tools / material

• Voltmeter / ohmmeter

• Allen key, size 2.5 mm

• Spare sensor (if the sensor is faulty)

Troubleshooting

The output signal is available at the sensor cable connector (Pin 2 and Pin 12).

In case of an error, it may be helpful to just turn off the mains supply and

turn it on again after 5 s.

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Maintenance, Repair

Problem Possible cause Correction

Output signal
permanently ≈0V

No supply voltage Turn on the power supply

transmitter in an unde-

Output signal ≈0.3 V
Display: "FAIL 8"

Output signal ≈0.5 V
Display: "FAIL 9"

Electronics unit not

Display: Internal data connection

Sensor cable defective or
not correctly connected

fined status

Hot cathode error
(sensor faulty)

Pirani error
(sensor defective)

mounted correctly on
sensor

not working

Check the sensor cable

Turn the transmitter off
and on again (reset)

Replace the sensor
(→  41)

Replace the sensor
(→  41)

Check the connection the
electronics unit - sensor

Turn the transmitter off
and on again after 5 s

Replace the electronics
unit

transmitter does not
switch over to BA at low

Pirani zero point out of
tolerance

Carry out a zero point
adjustment (→  39)

pressures

Troubleshooting (sensor)

If the cause of a fault is suspected to be in the sensor, the following checks can be
made with an ohmmeter (the vacuum system need not be vented for this purpose).

Separate the sensor from the electronics unit (→  14). Using an ohmmeter, make
the following measurements.

Ohmmeter measure-

ment between pins

2 + 4

4 + 5

6 + 7

4 + 1

6 + 1

3 + 1

9 + 1

6 + 3

9 + 3

≈37 Ω >>37 Ω

≈37 Ω >>37 Ω

≈0.15 Ω >>0.15 Ω

∞ << ∞

∞ <<

∞ <<

∞ <<

∞ <<

∞ <<

Possible cause

Pirani element 1 broken

Pirani element 2 broken

Filament of hot cathode broken

Electrode - short circuit to ground

Electrode - short circuit to ground

∞

Electrode - short circuit to ground

∞

Electrode - short circuit to ground

∞

Short circuit between electrodes

∞

Short circuit between electrodes

∞

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View on sensor pins

9

1

8

7

6

2

4

5

Maintenance, Repair

6

Hot cathode ca. 0.15 Ohm

7
8

Not connected

2

3

Pirani sensor 1 ca. 37 Ohm

4

Pirani sensor 2 ca. 37 Ohm

5
3

Anode

1

GND (connected to sensor housing)

9

Ion collector

Correction

All of the above faults can only be remedied by replacing the sensor (→  41).

Troubleshooting on Fieldbus Transmitters (ITR 90 P)

Error diagnosis of fieldbus transmitters can only be performed as described above
for the basic sensor and sensor electronics. Diagnosis of the fieldbus interface can
only be done via the superset bus controller (→  [3]).

6.4 Replacing the Sensor

Replacement is necessary, when

• the sensor is severely contaminated

• the sensor is mechanically deformed

• the sensor is faulty, e.g. filament of hot cathode broken (→  39)

• the sensor is faulty, e.g. Pirani element broken (→  39)

Transmitter failures due to contamination or wear and tear as well as

expendable parts (filaments) are not covered by the warranty.

Required tools / material

• Allen key, size 2.5 mm

• Spare sensor (→  43)

Procedure

 Deinstall the transmitter (→  36).

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Maintenance, Repair

 Deinstall the electronics unit from the faulty sensor and mount it to the new

sensor (→  14).

 Adjust the transmitter (→  37).

The new sensor is now installed.

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Options, Spare Parts, Storage

7 Options

Part number

24 VDC power supply / RS232C line (→  23)

Bake-out extension 100 mm 127 06

Baffle DN 25 ISO-KF / DN 40 CF-R (→  15)

8 Spare Parts

When ordering spare parts, always indicate:

• All information on the product nameplate

• Description and part number

Part number

Replacement sensor IE 90, vacuum connection DN 25 ISO-KF

(including Allen key)

Replacement sensor IE 90, vacuum connection DN 40 CF-R

(including Allen key)

9 Storage

121 06

121 07

E 121 02

E 121 03

Caution: vacuum component

Inappropriate storage leads to an increase of the desorption rate
and/or may result in mechanical damage of the product.

Cover the vacuum ports of the product with protective lids or grease
free aluminum foil. Do not exceed the admissible storage temperature
range (→  10).

Caution

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Returning the Product, Disposal

10 Returning the Product

WARNING

WARNING: forwarding contaminated products

Contaminated products (e.g. radioactive, toxic, caustic or biological
hazard) can be detrimental to health and environment.

Products returned to Leybold should preferably be free of harmful
substances. Adhere to the forwarding regulations of all involved
countries and forwarding companies and enclose a duly completed

Products that are not clearly declared as "free of harmful substances" are decon­taminated at the expense of the customer.

Products not accompanied by a duly completed declaration of contamination are
returned to the sender at his own expense.

11 Disposal

declaration of contamination (→  49).

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contami­nated. Adhere to the relevant regulations and take the necessary pre­cautions when handling contaminated parts.

WARNING

WARNING: substances detrimental to the environment

Products or parts thereof (mechanical and electric components, oper­ating fluids etc.) can be detrimental to the environment.

Dispose of such substances in accordance with the relevant local

Separating the components

After disassembling the product, separate its components according to the follow­ing criteria:

Contaminated components

regulations.

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Contaminated components (radioactive, toxic, caustic or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,
separated according to their materials, and disposed of.

Other components

Such components must be separated according to their materials and recycled.

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Appendix

A: Relationship Output Signal – Pressure

Conversion formulae

(U - 7.75) / 0.75 + c

p = 10

U = 0.75 × (log p - c) + 7.75

where U p c

[V] [mbar] 0

[V] [Pa] 2

[V] [Torr] -0.125

Conversion curve

Appendix

1E+04

1E+03

1E+02

1E+01

1E+00

1E–01

1E–02

1E–03

1E–04

1E–05

1E–06

1E–07

1E–08

1E–09

1E–10

Sensor error

Inadmissible range

1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

0.0

Measuring signal U[V]

Inadmissible range

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Appendix

–

–

–

Conversion table

Output signal U

[V]

0.3 / 0.5

[mbar]

Pressure p

[Torr]

Sensor error (→  39)

[Pa]

0.51 … 0.774 Inadmissible range

0.774 5×10

-10

3.75×10

1.00 1×10-9 7.5×10

-10

5×10-8

-10

1×10-7

1.75 1×10-8 7.5×10-9 1×10-6

2.5 1×10-7 7.5×10-8 1×10-5

3.25 1×10-6 7.5×10-7 1×10-4

4.00 1×10-5 7.5×10-6 1×10-3

4.75 1×10-4 7.5×10-5 1×10-2

5.50 1×10-3 7.5×10-4 1×10-1

6.25 1×10-2 7.5×10-3 1×100

7.00 1×10-1 7.5×10-2 1×101

7.75 1×100 7.5×10-1 1×102

8.50 1×101 7.5×100 1×103

9.25 1×102 7.5×101 1×104

10.00 1×103 7.5×102 1×105

>10.00 Inadmissible range

B: Gas Type Dependence

Indication range above 10-2 mbar

Pressure indicated (transmitter adjusted for air, Pirani-only mode)

p (mbar)

2

10

1

10

0

10

–1

10

–2

10

–3

10

10

Indication range
above 10 mbar)

HO

2

vapor

3

-2

2

10

1

10

10

H2He Ne

0

Air
O2
CO
N2

CO

2

Ar

Freon 12
Kr

Xe

1

10

2

10

GA09420_002_C0 – (2016-10) –

46

 Leybold

Calibration in pressure range 10-2 … 1 mbar

The gas type dependence in the pressure range 10-2 … 1 mbar can be compen­sated by means of the following formula:

p

= C × indicated pressure

eff

where Gas type Calibration factor C

Air, O2, CO 1.0

N

0.9

2

CO2 0.5

Water vapor 0.7

Freon 12 1.0

H

0.5

2

He 0.8

Ne 1.4

Ar 1.7

Kr 2.4

Xe 3.0

(The above calibration factors are mean values)

Calibration in pressure range <10-3 mbar

-3

The gas type dependence in the pressure range <10

mbar can be compensated

by means of the following formula (transmitter adjusted for air):

p

= C × indicated pressure

eff

where Gas type Calibration factor C

Air, O2, CO, N2 1.0

N

1.0

2

He 5.9

Ne 4.1

H

2.4

2

Ar 0.8

Kr 0.5

Xe 0.4

(The above calibration factors are mean values)

Appendix

A mixture of gases and vapors is often involved. In this case, accurate

determination is only possible with a partial-pressure measuring instru­ment.

GA09420_002_C0 – (2016-10) –

 Leybold

47

Appendix

C: Literature

 [1] www.leybold.com

Instruction Sheet
IONIVAC ITR 90
KA09420_002
Leybold GmbH, D–50968 Köln

 [2] www.leybold.com

Instruction Sheet
IONIVAC ITR 90 P
KA09421_002
Leybold GmbH, D–50968 Köln

 [3] www.leybold.com

Interface Manual
Profibus ITR 90 P
SB09421_002
Leybold GmbH, D–50968 Köln

 [4] www.profibus.com

(Profibus user organization)

 [5] European Standard for Profibus EN 50170

 [6] www.leybold.com

Leybold GmbH, D–50968 Köln

GA09420_002_C0 – (2016-10) –

48

 Leybold

Declaration of Contamination

Declaration of Contamination

GA09420_002_C0 – (2016-10) –

 Leybold

49

Sales and Service

Germany

Leybold GmbH

Sales, Service, Support Center (3SC)
Bonner Strasse 498
D-50968 Cologne
T: [phone]
F: [phone]
[email protected]
www.leybold.com

Leybold GmbH
Sales Area North

Branch Office Berlin
Industriestrasse 10b
D-12359 Berlin
T: [phone]
F: [phone]
[email protected]

Leybold GmbH
Sales Office South

Branch Office Munich
Karl-Hammerschmidt-Strasse 34
D-85609 Aschheim-Dornach
T: [phone]
F: [phone]
[email protected]
[email protected]

Leybold Dresden GmbH
Service Competence Center

Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
T: [phone]
F: [phone]
[email protected]

Europe

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International Trade Co. Ltd.

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India

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Leybold Japan Co., Ltd.

Headquarters
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3-23-3, Shin-Yokohama
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[email protected]

Leybold Japan Co., Ltd.

Tsukuba Technical Service Center
1959, Kami-yokoba
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Japan

Service:
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Malaysia

Leybold Malaysia
Leybold Singapore Pte Ltd.

No. 1 Jalan Hi-Tech 2/6
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South Korea

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3F. Jellzone 2 Tower
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Sales:
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Service:
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Singapore

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8 Commonwealth Lane #01-01
Singapore 149555
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Sales und Service:
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Taiwan

Leybold Taiwan Ltd.

No 416-1, Sec. 3
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Sales and Service:
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[email protected]

Original: German GA09420_001_C0 (2016-10)

ga09420. 002. c0

Headquarter
Leybold GmbH

Bonner Strasse 498
D-50968 Cologne
T: [phone]
F: [phone]
[email protected]

www.leybold.com