USER MANUAL
OPTex
07/2005
LP Part Number: 263 292
Document Code: A0507OPTex
U.S.A.
Lambda Physik USA, Inc.
3201 West Commerical Blvd.
Ft. Lauderdale, FL 33309, USA
Tel.: +1 (954) 486-1500
1 (800) EXCIMER
Fax: +1 (954) 486-1501
eMail: marketingusa@lambdaphysik.com
Internet: http://www.lambdaphysik.com/optex
JAPAN
Lambda Physik Japan Co., Ltd.
German Industry Center
1-18-2 Hakusan, Midori-ku
Yokohama 226-0006, Japan
Tel.: +81 (45) 939-7848
Fax: +81 (45) 939-7849
GERMANY
Lambda Physik AG
Hans-Böckler-Strasse 12
D - 37079 Göttingen, Germany
Tel.: +49 (551) 6938-0
Fax: +49 (551) 68691
eMail: salesgermany@lambdaphysik.com
Marubun Corp.
Marubun Daiya Bldg.
8-1 Nihonbashi Odenmacho
Chuo-ku, Tokyo 103-8577, Japan
Tel.: +81 (3) 3639-9811
Fax: +81 (3) 3662-1349
CONTENTS
1 INTRODUCTION
2 LASER DEVICE FUNDAMENTALS
3SAFETY
4 SPECIFICATIONS AND REQUIREMENTS
5 INSTALLATION
6 LASER CONTROL
7OPERATION
8 MAINTENANCE
9 TROUBLESHOOTING
10 DIAGRAM SCHEMATICS
LIST OF FIGURES
INDEX
TABLE OF CONTENTS
1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . 1
1.1 About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1.1 Purpose, Availability and Use. . . . . . . . . . . . . . . . 1
1.1.2 Intended Audience . . . . . . . . . . . . . . . . . . . . . . . . 2
1.1.3 Numbering of Chapters, Pages and Instructions . 2
1.2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.1 Laser Safety Classification. . . . . . . . . . . . . . . . . . 3
1.2.2 Safety Information . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.3 Signal Words and Symbols in this Manual. . . . . . 3
1.3 Overview of Chapters . . . . . . . . . . . . . . . . . . . . . . . 5
1.4 Conversion Tables . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.4.1 Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.4.2 Temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
A0507OPTex
1.5 Patents and Trademarks. . . . . . . . . . . . . . . . . . . . . 7
1.5.1 Patents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.5.2 Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.6 Feedback Regarding Documentation . . . . . . . . . 10
2 LASER DEVICE FUNDAMENTALS . . . . . . 11
2.1 Excimer Laser . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1.1 The NovaTube
2.2 Laser Terminology According to ISO 11145. . . . 12
2.3 Fundamental Design of the OPTex . . . . . . . . . . . 13
2.4 Overview of the OPTex . . . . . . . . . . . . . . . . . . . . . 14
2.5 Laser Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.6 Laser Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.7 Thyratron . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.8 Energy Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.9 Operating Modes. . . . . . . . . . . . . . . . . . . . . . . . . . 21
®
Innovation . . . . . . . . . . . . . . . . 11
LAMBDA PHYSIK - 07/2005 CONTENTS - I
TABLE OF CONTENTS
2.10 Safety Systems of the OPTex. . . . . . . . . . . . . . . . 23
2.10.1 Safety Interlock. . . . . . . . . . . . . . . . . . . . . . . . . . 24
2.10.2 Electronics Chamber . . . . . . . . . . . . . . . . . . . . . 24
2.10.3 Tube Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3 SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.1 General Safety Aspects . . . . . . . . . . . . . . . . . . . . 25
3.1.1 Basic Operation and Designated Use . . . . . . . . 25
3.1.2 Organizational Measures . . . . . . . . . . . . . . . . . . 26
3.1.3 Selection and Qualification of Personnel
- Basic Responsibilities . . . . . . . . . . . . . . . . . . . 27
3.1.4 Safety Instructions Governing
Specific Operational Phases . . . . . . . . . . . . . . . 28
3.2 Specific Safety Aspects . . . . . . . . . . . . . . . . . . . . 30
3.2.1 Physical Hazards . . . . . . . . . . . . . . . . . . . . . . . . 31
3.2.2 Personnel Safety . . . . . . . . . . . . . . . . . . . . . . . . 35
3.2.3 Constructive Safety Features. . . . . . . . . . . . . . . 42
3.3 Safety Compliance List. . . . . . . . . . . . . . . . . . . . . 46
3.4 Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
3.4.1 Label Location Diagrams . . . . . . . . . . . . . . . . . . 48
3.4.2 Description of the Labels and Safety Labels . . . 50
4 SPECIFICATIONS AND REQUIREMENTS. 51
4.1 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
4.2 Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . 52
4.3 Electrical Power Supply . . . . . . . . . . . . . . . . . . . . 54
4.4 Remote Control Interlock . . . . . . . . . . . . . . . . . . . 55
4.5 Controller Requirements . . . . . . . . . . . . . . . . . . . 56
4.6 External Trigger In and Pre-Trigger Out . . . . . . . 57
4.6.1 TWE Trigger Converter (Option) . . . . . . . . . . . . 57
CONTENTS - II User Manual OPTex
TABLE OF CONTENTS
4.7 Gas Requirements. . . . . . . . . . . . . . . . . . . . . . . . . 59
4.7.1 Gas Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
4.7.2 Pressure Regulators. . . . . . . . . . . . . . . . . . . . . . 60
4.7.3 Gas Cabinets . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
4.7.4 Gases Required (Premix). . . . . . . . . . . . . . . . . . 61
4.7.5 Optimum Gas Mixtures (Single Gases) . . . . . . . 62
4.8 Air Intake and Exhaust . . . . . . . . . . . . . . . . . . . . . 63
4.9 Environmental Conditions . . . . . . . . . . . . . . . . . . 64
4.10 Space Requirements. . . . . . . . . . . . . . . . . . . . . . . 64
5 INSTALLATION . . . . . . . . . . . . . . . . . . . . . . 65
5.1 Site Preparation. . . . . . . . . . . . . . . . . . . . . . . . . . . 65
5.2 Transport Locks . . . . . . . . . . . . . . . . . . . . . . . . . . 66
5.3 Insert Safety Plug . . . . . . . . . . . . . . . . . . . . . . . . . 66
5.4 Connect Controller . . . . . . . . . . . . . . . . . . . . . . . . 67
5.4.1 Connecting the PC (PC-Powered Convertor). . . 67
5.4.2 Connecting the PC (Mains-Powered Convertor) 69
5.5 Software Installation . . . . . . . . . . . . . . . . . . . . . . . 70
5.6 Connect External Trigger . . . . . . . . . . . . . . . . . . . 71
5.7 Connect Power Supply Line. . . . . . . . . . . . . . . . . 72
5.8 Connect Exhaust Line (Option) . . . . . . . . . . . . . . 73
5.9 Gas Lines Installation . . . . . . . . . . . . . . . . . . . . . . 74
5.9.1 Remarks Regarding Gas Line Installation . . . . . 74
5.9.2 Connect Gas Supply Lines. . . . . . . . . . . . . . . . . 75
5.10 Connect Beam Guidance System
(for F
5.11 New Gas Fill. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Version) . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
2
6 LASER CONTROL. . . . . . . . . . . . . . . . . . . . 79
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LAMBDA PHYSIK - 07/2005 CONTENTS - III
6.1 Laser Control Software. . . . . . . . . . . . . . . . . . . . . 79
6.1.1 Start Laser Control Software . . . . . . . . . . . . . . . 79
6.1.2 Exit Laser Control Software . . . . . . . . . . . . . . . . 80
6.1.3 Laser Control Screen . . . . . . . . . . . . . . . . . . . . . 80
6.2 Service Software . . . . . . . . . . . . . . . . . . . . . . . . . . 88
6.3 Logbook file. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
TABLE OF CONTENTS
7 OPERATION . . . . . . . . . . . . . . . . . . . . . . . . 89
7.1 Check Beam Path . . . . . . . . . . . . . . . . . . . . . . . . . 89
7.2 Start-Up Laser Device. . . . . . . . . . . . . . . . . . . . . . 90
7.2.1 Turn On Gas Supply. . . . . . . . . . . . . . . . . . . . . . 90
7.2.2 Switch On Laser Device and Controller . . . . . . . 92
7.3 Methods of Operation . . . . . . . . . . . . . . . . . . . . . . 95
7.3.1 Laser Operation Modes . . . . . . . . . . . . . . . . . . . 96
7.3.2 Gas Modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
7.4 Start and Stop Laser Operation . . . . . . . . . . . . . 101
7.4.1 Start Laser Operation. . . . . . . . . . . . . . . . . . . . 101
7.4.2 Stop Laser Operation . . . . . . . . . . . . . . . . . . . . 103
7.5 Shut-Down Laser Device . . . . . . . . . . . . . . . . . . 103
7.5.1 Switch Off Laser Device and Controller . . . . . . 103
7.5.2 Turn Off Laser Gases. . . . . . . . . . . . . . . . . . . . 104
8 MAINTENANCE. . . . . . . . . . . . . . . . . . . . . 107
8.1 Laser Logbook. . . . . . . . . . . . . . . . . . . . . . . . . . . 108
8.2 Laser Device Design . . . . . . . . . . . . . . . . . . . . . . 108
8.3 Maintenance Schedule . . . . . . . . . . . . . . . . . . . . 109
8.4 Gas Line Maintenance . . . . . . . . . . . . . . . . . . . . 110
8.4.1 Flush Premix Gas Line (External Flushing) . . . 110
8.4.2 Exchange Premix Gas Cylinder . . . . . . . . . . . . 112
8.4.3 Exchange Inert Gas Cylinder . . . . . . . . . . . . . . 114
8.5 New Gas Fill. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
8.6 Windows Maintenance . . . . . . . . . . . . . . . . . . . . 118
8.6.1 Windows Exchange . . . . . . . . . . . . . . . . . . . . . 119
8.6.2 Windows Alignment . . . . . . . . . . . . . . . . . . . . . 127
8.6.3 Disassembling / Assembling Window Mounts . 132
8.6.4 Windows Cleaning . . . . . . . . . . . . . . . . . . . . . . 136
8.7 Halogen Filter Maintenance . . . . . . . . . . . . . . . . 140
8.7.1 Halogen Filter Exchange . . . . . . . . . . . . . . . . . 140
8.7.2 Halogen Filter Disposal . . . . . . . . . . . . . . . . . . 142
8.8 Energy Monitor Calibration . . . . . . . . . . . . . . . . 143
CONTENTS - IV User Manual OPTex
TABLE OF CONTENTS
9 TROUBLESHOOTING. . . . . . . . . . . . . . . . 147
9.1 Fuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 148
9.2 Possible Problems and Solutions . . . . . . . . . . . 149
9.2.1 Power-Up Error . . . . . . . . . . . . . . . . . . . . . . . . 149
9.2.2 Statical Errors. . . . . . . . . . . . . . . . . . . . . . . . . . 150
9.2.3 Operation Errors. . . . . . . . . . . . . . . . . . . . . . . . 152
10 DIAGRAM SCHEMATICS . . . . . . . . . . . . . 155
10.1 Gas Flow Diagram . . . . . . . . . . . . . . . . . . . . . . . . 155
10.2 Electrics Diagram . . . . . . . . . . . . . . . . . . . . . . . . 156
10.3 Fiber Optic Light Waveguide Diagram . . . . . . . 157
10.4 Safety Circuits Diagram . . . . . . . . . . . . . . . . . . . 158
LIST OF FIGURES. . . . . . . . . . . . . . . . . . . 159
INDEX. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161
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LAMBDA PHYSIK - 07/2005 CONTENTS - V
TABLE OF CONTENTS
CONTENTS - VI User Manual OPTex
1 INTRODUCTION
This chapter outlines:
– the purpose as well as the necessary availability and use of the
instruction manual,
– the persons, for whom the instruction manual is intended,
– how the instruction manual is organized,
– the use of signal words and safety signs in the instruction manual,
– the contents of each chapter.
1.1 About this Manual
About this Manual
1.1.1 Purpose, Availability and Use
This instruction manual is intended to familiarize the user with the
OPTex and its designated use.
The instruction manual contains important information to installing and
operate the OPTex safely, properly and most efficiently. Observing
these instructions helps to avoid danger, reduce repair costs and
downtimes and increase the reliability and lifetime of the OPTex.
The instruction manual must always be available wherever the OPTex
is in use.
The instruction manual must be read and applied by any person in
charge of carrying out work with and on the OPTex, e.g.:
– operation including setting up, troubleshooting in the course of work,
removal of production waste, care and disposal of consumables.
– maintenance (servicing, inspection, repair) and/or
– transport.
The instruction manual is to be supplemented by the respective
national rules and regulations for accident prevention and
environmental protection.
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LAMBDA PHYSIK - 07/2005 1
INTRODUCTION
1.1.2 Intended Audience
This manual is intended for:
– Operators, who have completed the OPTex Basic Operations
course. An operator operates the OPTex excimer laser in normal
day-to-day operations.
– Process engineers, who have completed the OPTex Advanced
Operations course. A process engineer prepares jobs for production
and other purposes and monitors production quantity and quality.
– Any reader who wishes to acquire general knowledge of the OPTex
excimer laser.
1.1.3 Numbering of Chapters, Pages and Instructions
The pages of this manual are numbered continuously. The page
number appears in the lower outside corner of every page.
The chapters are numbered continu o us ly. Th e na m e of the ch ap te r
appears in the upper outside corner of every even page, the name of
the main section appears in the upper outside corner of the
corresponding odd page.
Each chapter ends with an even page number. Consequently, certain
even pages at the ends of chapters will be intentionally left blank.
Each step within a procedure is sequentially numbered.
2 User Manual OPTex
1.2 Safety
1.2.1 Laser Safety Classification
Lasers and laser systems are classified according to their relative
hazards. These classifications are found in the American National
Standards for the Safe Use of Lasers (ANSI Z 136.1-1986),
FDA 21 CFR 1040.10 and 1040.11 and IEC-825.
Within this classification, the OPTex excimer laser is a class IV
(high power) laser. It must be regarded as a potential hazard to
the human operator. When connected to a correspondingly
configured beam guidance system, the OPTex becomes a class I laser
device.
The laser beam must also be regarded as a potential fire hazard.
1.2.2 Safety Information
Safety
Chapter 3 (Safety) describes the physical hazards related to the laser
device, the means of protection against these hazards and the safety
features incorporated in the design of the laser device.
The Safety Chapter must be read by all persons entrusted with any
sort of work on the OPTex excimer laser device.
Never start to follow the procedures detailed in this manual
unless you have read and fully understood the information given
in the Safety Chapter.
1.2.3 Signal Words and Symbols in this Manual
Contained within this manual are sections in which particular hazards
are defined or special attention is drawn to particular conditions. These
are indicated with signal words in accordance with ANSI Z-535.2 -1991
and safety symbols (pictorial hazard alerts) in accordance with ANSI
Z535.3-1991. The signal words are de fined in section 1.2.3.1 of this
manual and the safety symbols in section 1.2.3 .2 .
1.2.3.1 Signal Words
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LAMBDA PHYSIK - 07/2005 3
Four signal words are used in this manual: DANGER, WARNING,
CAUTION and NOTE. The signal words DANGER, WARNING and
CAUTION designate the degree or level of hazard:
DANGER
Indicates an imminently
avoided, will result in death or serious injury
hazardous situation which, if not
.
INTRODUCTION
WARNING
Indicates a potentially
avoided, could result in death or serious injury
CAUTION
Indicates a potentially
may result in minor or moderate injury
against unsafe practices that may result in property damage.
Use of the signal word ”NOTE”:
NOTE
Used to define sections, where particular attention should be paid
to ensure efficient operation or servicing of the laser device.
1.2.3.2 Symbols
The signal words DANGER, WARNING, and CAUTION are always
emphasized with a safety symbol. These safety symbols are used to
indicate special hazards. They are used regardle ss of the hazard level:
hazardous situation which, if not
.
hazardous situation which, if not avoided,
. It is also used to alert
This symbol is combined with one of the signal words DANGER,
WARNING or CAUTION to indicate a hazardous situation caused by
laser radiation.
This symbol is combined with one of the signal words DANGER,
WARNING or CAUTION to indicate a hazardous situation caused by
electricity.
This symbol is combined with one of the signal words DANGER,
WARNING or CAUTION to indicate a hazardous situation caused by
toxic substances.
This symbol is combined with one of the signal words DANGER,
WARNING or CAUTION to indicate a hazardous situation caused by
flammable substances.
This symbol is combined with one of the signal words DANGER,
WARNING or CAUTION to indicate a hazardous situation caused by
circumstances other than those described above.
4 User Manual OPTex
1.3 Overview of Chapters
Chapter 1 (this chapter).
•
Chapter 2 provides the reader with a short overview of system
•
elements and a description of different subsystems. It introduces
fundamental operational concepts, such as running modes, as well
as familiarizing the reader with organization and function of the
system.
Chapter 3 explains safety and provides an overview of safety signs
•
and identification labels. Described are the main physical hazards as
well as personal and constructional precautions. It is essential that
you read this chapter before performing any t ask on the OPTex.
Chapter 4 describes the specifications, installation requirements,
•
conditions of transport and operation and the accesso ries delivered
with the OPTex.
Chapter 5 describes the installation of the OPTex.
•
Chapter 6 describes the laser control and service software and its
•
application in the operation of the OPTex.
Overview of Chapters
Chapter 7 contains instructions on how to start and operate the
•
OPTex.
Chapter 8 describes fundamental maintenance routines, which can
•
be performed by instructed operators.
Chapter 9 explains what action the operator can take when errors
•
occur and how to trace errors.
Chapter 10 gives an overview of wiring diagrams and schematics.
•
The last pages of this manual include a list of figures and a index.
•
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INTRODUCTION
1.4 Conversion Tables
1.4.1 Measurements
Listed below are the units of measure used in this manual and their
equivalents according to the SI standard:
1 meter (m) = 39.37 inches (in)
1 meter (m) = 3.28 feet (ft)
1 centimeter (cm) = 0.3937 inch (in)
1 square meter (m²) = 1,550 square inches (in²)
1 square meter (m²) = 10.76 square feet (ft²)
1 cubic meter (m³) = 35.31 cubic feet (ft³)
1 liter (l) = 0.264 US gallons (gal)
1 kilogram (kg) = 2.20 US pounds (lbs)
1 bar = 100,000 Pascal (Pa)
100,000 Pascal (Pa) = 14.50 pounds force
per square inch (lbf/in²)
1.4.2 Temperatures
The temperatures in this manual are primarily indicated in degrees
celsius (° C).
To convert °C to °F; multiply by 9, divide by 5 and add 32.
To convert °F to °C; subtract 32, multiply by 5, divide by 9.
As a guide, we have converted below some temperature values from
°C to °F:
-10 °C = 14 °F
0 °C = 32 °F
5 °C = 41 °F
16 °C = 61 °F
20 °C = 68 °F
38 °C = 100 °F
100 °C = 212 °F
6 User Manual OPTex
1.5 Patents and Trademarks
1.5.1 Patents
Lambda Physik GmbH is owner of the following patents:
Germany: P 32 12 928.9 “Entladungsgepumpter Laser”
US Patent # 4,534,034 “Discharge-pumped laser”
Germany: P 33 35 690.4 “Vorrichtung zum Erzeugen von
Hochleistungs-Hochspannungsimpulsen
hoher Wiederholfrequenz”
Germany: P 38 17145.7 “Elektrode für gepulste Gaslaser und ihre
Verwendung”
Germany: G 88 17 197.3 “Elektrode für gepulste Gaslaser”
US Patent # 4,860,300 “Electrode for pulsed gas lasers”
Patents and Trademarks
Germany: P 37 14 503.7 “Steuerschaltung für einen gepulsten
Gaslaser und Verfahren zum
Initialisieren der Steuerschaltung”
US Patent #4,916,707 “Control circuit for a pulsed gas laser”
US Patent # 4,993,042 “Device for mounting a window on a gas
discharge laser”
US Patent # 4,980,894 “Ignitor for the preionization of a gas
discharge laser”
US Patent # 4,951,295 “Preionization means for a gas discharge
laser”
Germany: G 8906 627.8 “Vorrichtung zum Reinigen von
Lasergas”
Germany: P 40 03 841.6-09 “Laserresonator”
US Patent #5,220,574 “Excimer laser with hydrogen chloride
and method for producing hydrogen
chloride for an excimer laser”
Japan 1 991 984 “Excimer laser with hydrogen chloride
and method for producing hydrogen
chloride for an excimer laser”
Germany: P 42 06 803.7-09 “Verfahren zum Nachfüllen von
Halogengas in das Gasreservoir eines
Excimerlasers”
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LAMBDA PHYSIK - 07/2005 7
US Patent # 5,396,514 “Excimer laser comprising a gas
reservoir and a collecting receptacle and
a method of refilling the gas reservoir of
the laser”
Germany: G 92 08 936.4 “Laserresonator”
INTRODUCTION
Germany: P 42 33 634.1 “Elektroden für die Entladungseinheit
eines Excimerlasers”
US Patent # 5,347,532 “Laser having at least one anode and one
cathode for preionization and/or
discharge”
Japan: Hei 5-262 989/93 “Laser having at least one anode and one
cathode for preionization and/or
discharge”
US Patent # 4,977,573 “Excimer laser output control device”
US Patent # 4,611,270 “Method and means of controlling the
output of a pulsed laser”
Germany: P 43 35 079.8-33 “Elektroden in einer Fluor enthaltenden
Entladungseinheit eines gepulsten
Gasentladungslasers”
Germany: G 93 20 768.9 “Elektroden in einer Fluor enthaltenden
Entladungseinheit eines gepulsten
Gasentladungslasers”
Germany: G 94 01 808.1 “Vorrichtung zum Regeln der Temperatu r
von Lasergas, insbesondere eines
Excimerlasers”
Germany: 295 20 820.1 “Laserröhre für halogenhaltige
Gasentladungslaser”
US Patent # 4,611,327 “Gas transport laser system”
US Patent # 4,549,091 “Electrical excitation circuit for gas laser”
US Patent # 4,393,505 “Gas discharge laser having a buffer gas
of neon”
US Patent # 4,340,968 “Rare gas hydrogen-halide excimer laser
with hydrogen additive”
Germany P 44 00 345.5 “Vorrichtung für die Reinigung von
Lasergas”
8 User Manual OPTex
1.5.2 Trademarks
LAMBDA PHYSIK is a registered trademark of Lambda
OPTex is a trademark of Lambda Physik AG
NovaTube is a registered trademark of Lambda
Gyrolok is a registered trademark of Hoke Inc.,
Patents and Trademarks
Physik AG
the Lambda Physik logo is a registered
trademark of Lambda Physik AG
Physik AG
NJ, USA
Microsoft, MS,
Windows, Windows 95 and
Windows NT
IBM is a registered trademark of
are registered trademarks of Microsoft
Corporation in USA and other countries
International Business Machines, Inc.
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LAMBDA PHYSIK - 07/2005 9
INTRODUCTION
1.6 Feedback Regarding Documentation
If you have any comments regarding the documentation provided to
you, please contact us.
When you contact us, please provide us with
– The document code
– The date of issue
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procedure step number
– A description of any errors
– A proposal for improvements
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10 User Manual OPTex
2 LASER DEVICE
FUNDAMENTALS
This chapter briefly describes the most important features, functions,
and subassemblies of a Lambda Physik excimer laser. This
background information will ease your understanding of the
information contained in the subsequent chapters.
The information in this chapter does not enable you to operate or
service the OPTex excimer laser.
Never switch on or attempt to operate or service the OPTex
before reading, understanding and fully familiarizing yourself
with Chapter 3 of this manual (Safety)!
Excimer Laser
2.1 Excimer Laser
Excimer lasers take their name from the exci ted state dimers from
which lasing occurs. The most important excimers are rare gas halides
such as Argon Fluoride (ArF), Krypton Fluoride (KrF), Xenon Chloride
(XeCl) and Xenon Fluoride (XeF). These produce intense UV light
(U ltra V iolet) on distinct spectral lines between 157nm and 351nm.
2.1.1 The NovaTube
All Lambda Physik excimer lasers use the NovaTube® technology.
The NovaTube
of corrosion and contamination. To ensure strict adherence to these
design objectives, all laser tube components are assembled in a
clean-room. Optimized electrode materials combined with an improved
preionization scheme minimizes electrode erosion. The se major
improvements in laser tube technology lead to an increased laser tube
lifetime.
®
Innovation
®
has been conceived to virtually eliminate the effects
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LAMBDA PHYSIK - 07/2005 11
LASER DEVICE FUNDAMENTALS
2.2 Laser Terminology According to ISO 11145
ISO 11145 (“Optics and Optical Instruments - Lasers and Laser
Related Equipment - Vocabulary and Symbols”) contains a list of laser
terminology.
To prevent misunderstandings, this manual strictly differentiates
between “laser” and “laser device” (see Figure 1). Thus “Start laser
device” means that the power is off and shall be turne d on. To “sta r t
the laser” means to switch on the laser beam and start lasing.
Laser Unit
Laser Device
Supply Units
Power, Cooling, ...
Figure 1: Laser components according to ISO 11145
Laser Assembly
Laser
Mirrors, Lenses, ...
Measuring and
Control Unit
Telescope,
Focussing, ...
Handling Systems
Robotics, Workpiece
Positioning
Definitions:
Laser Lasers consist of an amplifying
medium capable of emitting coherent
radiation with wavelengths up to 1 mm
by means of stimulated emission.
Workpiece
Laser Device A laser, where the radiation is
generated, together with essential
additional facilities (e.g. cooling,
power and gas supply) that are
necessary to operate the laser.
Laser Assembly Laser device together with specific,
normally optical, mechanical and/or
electrical system components for
beam handling and forming.
Laser Unit One ore more laser assemblies
together with handling, measurement
and control systems.
12 User Manual OPTex
Fundamental Design of the OPTex
2.3 Fundamental Design of the OPTex
The OPTex is provided with all required power supply and control
units. One-phase mains power supply with protective earth as well as
Premix and Inert gas supply are sufficient for safely and ease
operation. Only a few modules are to be checked and serviced within
determined periods. The maintenance schedule is shown in Section
8.3 on page 109.
The OPTex is the most compact Lambda Physik excimer laser device.
To ensure fail-safe operation and ease-of-service, the laser device
housing is divided into two separate chambers containing the internal
components; designated as the tube chamber and the electronics
chamber.
l
e
n
a
p
k
c
a
B
Tiltable by 90° as
indicated. Feet to be
relocated in recesses
on back panel.
Tube chamber
Electronics chamber
Figure 2: Fundamental design of the OPTex
To enable space at the installation site to be optimally utilized, the
laser device can be installed on its back or on its bottom panel:
recesses for the feet are provided in both pa ne ls.
The installation position (upright or flat) and th e be am exit side are set
at the factory. In this manual, we assume that the laser device is to be
installed on its bottom panel (upright position). The beam is to exit
from the aperture on the right-hand side (shown in Figure 2 and in
Figure 3 on page 14). The gas and power con n ec tion s ar e situ ated on
the left-hand side (see Figure 4 on page 15).
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LASER DEVICE FUNDAMENTALS
O P
T e
x
2.4 Overview of the OPTex
A B
RS232
INTERLOCK
KLM
Figure 3: Right side and front of the OPTex
H
C
Key to Figure 3:
D
E
O PTex
FGI
A Exhaust electronics chamber
B Beam exit aperture (for F
connector)
C Recesses for feet (alternative)
D Key switch
E Front service panel
F Height adjustable feet
G Right-han d se rvic e pa ne l
H Gas connection valve, Inert (alternative)
I Gas connection valve, Premix (alternative)
K Trigger in / Pre trigger out connector (alternative)
L Optical RS232 connector (alternative)
M Interlock connector (alternative)
version with beam guidance system
2
14 User Manual OPTex
Overview of the OPTex
A B
INERTPREMIX
NP
O
M
C
POWERON
FUSE2x6.3 WLASEREMISSION
RS232 INTERLOCK
L
EF
D
INDICATOR
IK
Figure 4: Left side and top of the OPTex
G
H
A0507OPTex
Key to Figure 4:
A Exhaust tube chamber
B Air intake tube chamber
C Key switch
D Power ON light
E Air intake electronics chamber
F Laser tube
G Top service panel
H Laser radiation warning lamp
I Interlock connector
K Optical RS232 connector
L Trigger in / Pre trigger out connector
M Mains socket with main fuses
N Left-hand service panel
O Gas connection valve, Inert
P Gas connection valve, Premix
LAMBDA PHYSIK - 07/2005 15
LASER DEVICE FUNDAMENTALS
H K
I
L
A
G
B
Figure 5: Electronics chamber (with servic e panel remo ved)
Key to Figure 5:
A Trigger board
B Thyratron supply board
C High voltage power supply module
D Gas supply unit
E Laser control unit
F Vacuum pump
G Halogen filter
H Mains filter
I Mains power supply unit
K Transformer
L Power distribution unit
DEF
C
16 User Manual OPTex
2.5 Laser Control
The OPTex is controlled through an integral control device, known as
the laser control unit (CLS). This communicates with decentralized
submodules that perform dedicated functions (e.g. laser pulse
triggering).
Communication between the laser control unit and the decentralized
modules occurs through fiber optic light waveguides (FOLs). As the
FOLs do not pick up or transmit electromagnetic interference (EMI),
they provide a secure noise-free communication link. This is of
considerable importance as the fast high voltage (HV) discharges
required with excimer lasers create a high level of EMI.
The laser control software is stored on a flash prom mounted on the
laser control unit. This is interfaced to the operator through either the
optical RS232 in case of an OEM subassembly or through an
operating panel simulated on an PC (the software is provided). In the
following description “PC” also means Laptop.
Laser Control
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LAMBDA PHYSIK - 07/2005 17
Figure 6: OPTex controlled through a Laptop
The OEM device’s controller unit or the existing PC is connected to the
laser control unit in the laser device through an optical RS232
interface. To convert the electrical signals emitted by the PC into the
optical signals required by the laser control unit and vice-versa, a
RS232 optical interface adapter is connected to a serial port on the
PC. This adapter is supplied as standard when operation thr ough a PC
is specified.
LASER DEVICE FUNDAMENTALS
BA
2.6 Laser Tube
The NovaTube® can be considered as the motor of the laser. Figure 7
shows a cross section of the longitudinally symmetrical laser tube.
C
D
Figure 7: Cross section of the laser tube
The laser tube (C) is the reservoir for the laser gas. The materials
chosen allow the problem-free use of excimer gas mixtures. The
material surfaces become coated with a layer of halogen metal
complex. This process, resulting from a reaction between halogen
(laser gas) and metal (material within tube), is called passivation.
Passivation renders the material surfaces within the tube chemically
inert to halogen.
A repetition of this process, known as re-passivation, is always
required
– if the surface passivation has been damaged as a result of air
entering the laser tube
– (with multigas version only) if a change from a Fluorine to a Chloride
gas mixture is necessary
– when the laser device or laser tube has been transported or stored
for longer periods.
18 User Manual OPTex
Laser Tube
A high voltage discharge between the electrodes (A) transfers the
energy to the excimer gas mixture (e. g. fluorine or krypton premix). In
order to obtain a controlled, spark-free discharge, the laser gas has to
be preionized, i. e. a sufficiently high density of free charged molecules
has to be created between the electrode s. Th is is ach ieved with
preionization pins (B) arranged along the main electrodes. The result
is a homogeneous preionization of the laser gas. The switching of
preionization and main discharge in series ensures a perfect
synchronization between preion iza tion an d ma in disch ar ge .
After the high-voltage discharge, thermal inhomogenities in the laser
gas arise in the discharge area. Therefore, the gas volume in the
discharge area has to be completely exchanged between two laser
pulses. A transverse circulation fan (D) positioned within the laser tube
causes the gas volume between the main electrodes to be completely
replaced between two successive laser pulses. The circulation fan is
driven externally via a magnetic coupling by a single-phase motor.
The energy efficiency of the excimer laser is to the order of 2%, i. e.
the main part of the energy supplied has to be carried away in the form
of heat. The gas heated up by the discharge is recooled to the correct
operating temperature (approx. 40 °C or 104 °F) using environmental
air.
The maintenance operations re qu ired during the lifetime of the
NovaTube
®
are new gas fills and the exchange of the windows. To
minimize downtimes, the windows should be stored as premounted
units.
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LASER DEVICE FUNDAMENTALS
2.7 Thyratron
The laser uses a simple hydrogen thyratron, a thermionic tube. It is
used as an active switch to discharge the storage capacitors. The
anode of the thyratron is connected to the charging voltage. The
cathode is connected to ground. Between these two main electrodes is
the control grid, which initiates the discharge (switching) of the
thyratron.
As is also the case with conventional thermionic tubes, the cathode
structure has to be heated in order to ensure sufficient emission of
starting electrons. If the electron emission after a longer operating
period is no longer sufficient to initiate switching of the thyratron, this
can be corrected during the thyratron lifetime by increasing the heatin g
power of the cathode. Hydrogen is necessary to provide a fast current
increase and a high current intensity. However, as hydrogen is
continually lost due to diffusion and metal erosion, the concentration of
hydrogen has to be continually renewed. For this purpose, there is a
reservoir structure (palladium ) in th e tube, in which a large quantity of
hydrogen is stored. By heating the reservoir, hydrogen is released
from the reservoir into the main thyratron. It sh ould be note d, however,
that too much hydrogen reduces the hold-off voltage between the
electrodes of the thyratron to such a level that unwanted switching of
the thyratron will take place even without the trigger pulse. On the
other hand, if the partial hydrogen pressure in the thyratron is too low,
the laser is unable to pulse. This is because there is no discharge in
the thyratron due to a lack of charged particles.
The values for the two heating voltages, UH for the cathode heating
and UR for the hydrogen reservoir voltage, are critical to the correct
operation of the tube. The voltages are stabilized in a broad input
voltage range in order to be unaffected by voltage fluctuations in the
supply line (spikes). These values have to be altered during the total
life of the thyratron to ensure proper switching of the tube.
20 User Manual OPTex
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