Agilent B1500A Technical Overview

Introduction

The Agilent B1500A Semiconductor
Device Analyzer, with EasyEXPERT
software, makes every user a para-
metric test expert. The MS Windows-
based EasyEXPERT interface is
familiar, even to new engineers who
are inexperienced with parametric
measurement instruments. Its unique
task- based approach enables the user
to focus on their real task- at-hand
(device characterization), without
having to become a specialist at using
the instrument hardware. This new
approach is enhanced via a touch
screen interface, which makes the
instrument as easy to use when
racked as when on a benchtop.

The modular 10- slot configuration
helps reduce the cost of test by
ensuring that you purchase only what
you need up- front, leaving room to
grow as your needs change. This
flexibility is advantageous for those
needing capacitance measurement, as
this function is available via a
single- slot capacitance measurement
unit (CMU). An innovative SMU CMU
unify unit (SCUU) is available to
eliminate cabling confusion when
connecting the SMUs and CMU to
your positioner- based wafer probing
environment. This greatly improves
efficiency and accuracy by resolving
cable swapping and measurement
compensation issues.

Agilent B1500A

Semiconductor Device Analyzer

Technical Overview

April 2006

Agilent B1500A Semiconductor Device Analyzer

The B1500A also possesses impress­sive measurement performance, with
available low- current measurement
of 0.1 femtoamp and low-voltage
measurement resolution of 0.5
microvolts.

Basic Features

Y EasyEXPERT software resident on

instrument

Y Performs IV and CV measurements
Y Ten module slots
Y Multiple SMU types available:

MPSMU, HPSMU, and HRSMU

Y Multi-frequency capacitance

measurement unit (1 kHz to
5 MHz) available

Y High- resolution, analog- to- digital

converter (ADC) available to all
installed modules

Y High- speed ADC present on each

installed SMU

Y 4.2-Amp ground unit

Y SMU/AUX path switching available

on the Atto Sense and Switch Unit
(ASU)

Y Supported CMU accessories

include SMU CMU unify unit
(SCUU) and guard switch unit
(GSWU)

Y Automatic identification of

capacitance measurement
accessories (MFCMU)

Y GPIB port for instrument control
Y Self- test, self- calibration,

diagnostics

Specification Conditions

The measurement and output
accuracies are specified under the
following conditions. And the SMU
measurement and output accuracies
are specified at the SMU connector
terminals when referenced to the
Zero Check terminal:

Temperature: 23°C ± 5°C

1.

2. Humidity: 20% to 60%

3. After 40 minutes warm- up

Ambient temperature change less

4.
than ±1°C after self- calibration
execution, not applicable for
MFCMU

Measurement made within one

5.
hour after self-calibration
execution, not applicable for
MFCMU

6. Calibration period: 1 year

SMU integration time setting

7.
(high- resolution ADC must be
used):
1 PLC (1 nA to 1A range, voltage
range)
20 PLC (100 pA range)
50 PLC (1 pA to 10 pA range)

SMU Filter: ON (for SMUs)

8.

SMU measurement terminal

9.
connection: Kelvin connection

Note: This document lists specifications
and supplemental information for the
B1500A and its associated modules. The
specifications are the standards against
which the B1500A and its associated
modules are tested. When the B1500A or
any of its associated modules are shipped
from the factory, they meet the
specifications. The “supplemental”

information and “typical” entries in the
following specifications are not warranted,
but provide useful information about the
functions and performance of the
instrument.

Note: When you install or exchange
modules into the B1500A mainframes,
Agilent can guarantee that the modules
will function and that the module
performance is designed to meet its
specifications. However, if you require
that the modules be guaranteed to their
specifications, then you must perform a
calibration on the instrument.

B1500A Specification

Supported Plug-In Modules

The B1500A supports ten slots for plug-in modules.

Part Number Description

B1510A

B1511A

B1517A

High Power Source/Monitor Unit

(HPSMU)

Medium Power Source/Monitor Unit

(MPSMU)

High Resolution Source/Monitor Unit

(HRSMU)

Slots

Occupied

Range of Operation

2 -200 V to 200 V, -1 A to 1 A

1 -100 V to 100 V, -100 mA to 100 mA

1 -100 V to 100 V, -100 mA to 100 mA

E5288A1 Atto Sense and Switch Unit (ASU) - -100 V to 100 V, -100 mA to 100 mA

B1520A

1. This is connected with the B1517A high resolution SMU.

2.

Dispersion of measurement values when connecting a DUT 10 pF to the measurement terminals under the measurement condition of frequency 1 MHz, signal

level 250 mVac, and measurement time 1 PLC. The display resolution is 0.000001 fF at 1 fF order by 6 digits display.

Maximum Output Power

The total power consumption of all
modules cannot exceed 82 W. Under
this rule, the B1500A can contain up
to 4 dual- slot SMUs (HPSMUs) and 2
single- slot SMUs (MPSMUs and/or
HRSMUs); it can contain up to 10
single- slot SMUs (MPSMUs and/or
HRSMUs); and it can contain any
combination of dual- slot and
single-slot SMUs between these two
extremes. One single- slot MFCMU
may take the place of a single- slot
SMU in any of these configurations.

Maximum Voltage between Common
and Ground

Multi Frequency Capacitance
Measurement Unit (MFCMU)

1 1 kHz to 5 MHz 0.035 fFrms2

Pulse Measurement

Pulse width: 500 3sec to 2 s
Pulse period: 5 ms to 5 s
Period ¡ Width + 2 ms
(when Width ~ 100 ms)
Period ¡ Width + 10 ms
(when Width > 100 ms)
Pulse resolution: 100 3s

Ground Unit (GNDU) Specification

The GNDU is furnished with the
B1500A mainframe.

Output Voltage: 0 V ± 100 3V
Maximum sink current: ± 4.2 A
Output terminal/connection:

Triaxial connector, Kelvin (remote
sensing)

GNDU Supplemental Information
Load capacitance:

Cable resistance: innocent

For IS ~1.6 A:

Force Line R <1 W

For 1.6 A < I

Force Line R <0.7 W

For 2.0 A < I

Force Line R <0.35 W

For all cases:

Sense Line R ~10 W

Where I
the GNDU.

is the current being sunk by

S

~ ± 42 V.

Measure

Resolution

2 3V, 10 fA

0.5 3V, 10 fA

0.5 3V, 1 fA

0.5 3V, 100 aA

1 3F

~2.0 A:

S

~4.2 A:

S

2

MPSMU and HRSMU Module Specifications

Voltage Range, Resolution, and Accuracy (High Resolution ADC)

Voltage

Range

±0.5 V

±2 V

±5 V
±20 V 1 mV
±40 V 2 mV

±100 V 5 mV

1. ±(% of output/measured value + offset voltage V)

2. 100 mA (Vo ~ 20 V), 50 mA (20 V < Vo ~ 40 V), 20 mA (40 V < Vo ~ 100 V), Vo is the output voltage in Volts.

Force

Resolution

Measure

Resolution

Force Accuracy

1

Measure Accuracy1

25 3V 0.5 3V ±(0.018 % + 150 3V) ±(0.01 % + 120 3V)
100 3V 2 3V ±(0.018 % + 400 3V) ±(0.01 % + 140 3V)
250 3V 5 3V ±(0.018 % + 750 3V) ±(0.009 % + 250 3V)

20 3V
40 3V

100 3V

±(0.018 % + 3 mV)
±(0.018 % + 6 mV) ±(0.01 % + 1 mV)

±(0.018 % + 15 mV) ±(0.012 % + 2.5 mV)

±(0.009 % + 900 3V)

Maximum

Current

100 mA
100 mA
100 mA
100 mA

2

Current Range, Resolution, and Accuracy (High Resolution ADC)

SMU Type

Current

Range

HRSMU w/ ASU ±1 pA 1 fA 100 aA ±(0.9 %+15 fA) ±(0.9 %+12 fA) 100 V

±10 pA 5 fA 400 aA (with ASU)

±100 pA 5 fA 500 aA (with ASU)

±1 nA 50 fA 10 fA ±(0.1 %+300 fA+1 fA x Vo) ±(0.1 %+200 fA+1 fA x Vo) 100 V

±10 nA 500 fA 10 fA ±(0.1 %+3 pA+10 fA x Vo) ±(0.1 %+1 pA+10 fA x Vo) 100 V

±100 nA 5 pA 100 fA ±(0.05 %+30 pA+100 fA x Vo) ±(0.05 %+20 pA+100 fA x Vo) 100 V

±1 3A

MPSMU

±10 3A

±100 3A

±1 mA 50 nA 1 nA ±(0.04 %+150 nA+1 nA x Vo) ±(0.03 %+60 nA+1 nA x Vo) 100 V

±10 mA 500 nA 10 nA

±100 mA

1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.

2. Measurements at lower range are affected strongly by vibrations and shocks. Do not place the environment of vibrations and shocks during measurements.

3. ±(% of output/measured value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)

4. 100 V (Io ~ 20 mA), 40 V (20 mA < Io ~ 50 mA), 20 V (50 mA < Io ~ 100 mA), Io is the output current in Amps.

Force

Resolution

Measure

Resolution

1, 2

Force Accuracy3 Measure Accuracy3

Maximum

Voltage

±(0.46 %+30 fA+10 aA x Vo) ±(0.46 %+15 fA+10 aA x Vo) 100 V HRSMU

1 fA (HRSMU)

±(0.3 %+100 fA+100 aA x Vo) ±(0.3 %+30 fA+100 aA x Vo) 100 V

2 fA (HRSMU)

50 pA 1 pA ±(0.05 %+300 pA+1 pA x Vo) ±(0.05 %+100 pA+1 pA x Vo) 100 V

500 pA 10 pA ±(0.05 %+3 nA+10 pA x Vo) ±(0.04 %+2 nA+10 pA x Vo) 100 V

5 nA 100 pA ±(0.035 %+15 nA+100 pA x Vo) ±(0.03 %+3 nA+100 pA x Vo) 100 V

5 3A

100 nA

±(0.04 %+1.5 3A+10 nA x Vo)

±(0.045 %+15 3A+100 nA x Vo) ±(0.04 %+6 3A+100 nA x Vo)

±(0.03 %+200 nA+10 nA x Vo) 100 V

Current (mA)

4

Power Consumption

Voltage source mode:

Voltage Range Power

0.5 V 20 x Ic (W)
2 V 20 x Ic (W)
5 V 20 x Ic (W)

20 V 20 x Ic (W)
40 V 40 x Ic (W)

100 V 100 x Ic (W)

Where Ic is the current compliance setting.

100

50

20

-20

-50

20

40

-100

-20-40

100

Voltage (V)

Current source mode:

Voltage Compliance Power

Vc ~ 20

20 < Vc ~ 40

40 < Vc ~ 100

Where Vc is the voltage compliance setting and Io is output current.

20 x Io (W)
40 x Io (W)

100 x Io (W)

MPSMU and HRSMU
Measurement and Output Range

-100

3

HPSMU Module Specifications

Voltage Range, Resolution, and Accuracy (High Resolution ADC)

Voltage

Range

±2 V
±20 V 1 mV
±40 V 2 mV

±100 V 5 mV
±200 V 10 mV

1. ±(% of output/measured value + offset voltage V)

Current Range, Resolution, and Accuracy (High Resolution ADC)

Current

Range

±1 nA 50 fA 10 fA ±(0.1 %+300 fA+1 fA x Vo) ±(0.1 %+300 fA+1 fA x Vo) 200 V

±10 nA 500 fA 10 fA ±(0.1 %+3 pA+10 fA x Vo) ±(0.1 %+2.5 pA+10 fA x Vo) 200 V

±100 nA 5 pA 100 fA ±(0.05 %+30 pA+100 fA x Vo) ±(0.05 %+25 pA+100 fA x Vo) 200 V

±1 3A

±10 3A

±100 3A

±1 mA 50 nA 1 nA ±(0.04 %+150 nA+1 nA x Vo) ±(0.03 %+60 nA+1 nA x Vo) 200 V

±10 mA 500 nA 10 nA

±100 mA

±1 A

1. Specified measurement resolution is limited by fundamental noise limits.

2. ±(% of output/measured value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)

3. 200 V (Io ~ 50 mA), 100 V (50 mA < Io ~ 125 mA), 40 V (125 mA < Io ~ 500 mA), 20 V (500 mA < Io ~ 1 A), Io is th e output current in Amps.

Power Consumption

Voltage source mode:

Voltage Range Power

Where Ic is the current compliance setting.

Current source mode:

Voltage Compliance Power

Vc ~ 20

20 < Vc ~ 40

40 < Vc ~ 100

100 < Vc ~ 200

Where Vc is the voltage compliance setting and Io is output current.

Force

Resolution

Measure

Resolution

Force Accuracy1 Measure Accuracy1

100 3V 2 3V ±(0.018 % + 400 3V) ±(0.01 % + 140 3V)

Force

Resolution

20 3V

40 3V
100 3V
200 3V

Measure

Resolution1

±(0.018 % + 3 mV)

±(0.018 % + 6 mV) ±(0.01 % + 1 mV) 500 mA
±(0.018 % + 15 mV) ±(0.012 % + 2.5 mV) 125 mA
±(0.018 % + 30 mV) ±(0.014 % + 2.8 mV) 50 mA

Force Accuracy2 Measure Accuracy2

±(0.009 % + 900 3V)

50 pA 1 pA ±(0.05 %+300 pA+1 pA x Vo) ±(0.05 %+100 pA+1 pA x Vo) 200 V

500 pA 10 pA ±(0.05 %+3 nA+10 pA x Vo) ±(0.04 %+2 nA+10 pA x Vo) 200 V

5 nA 100 pA ±(0.035 %+15 nA+100 pA x Vo) ±(0.03 %+3 nA+100 pA x Vo) 200 V

5 3A

100 nA

±(0.04 %+1.5 3A+10 nA x Vo)

±(0.045 %+15 3A+100 nA x Vo) ±(0.04 %+6 3A+100 nA x Vo)

±(0.03 %+200 nA+10 nA x Vo) 200 V

50 3A 1 3A ±(0.4 %+300 3A+1 3A x Vo) ±(0.4 %+150 3A+1 3A x Vo)

Current (mA)

1000

2 V 20 x Ic (W)
20 V 20 x Ic (W)
40 V 40 x Ic (W)

100 V 100 x Ic (W)

500

200 V 200 x Ic (W)

125

50

-50

20 x Io (W)

-200

-100

-40 -20

40 x Io (W)

100 x Io (W)

-125

200 x Io (W)

-500

40

20

Maximum

Current

1 A
1 A

Maximum

Voltage

100

3

200

Volt age ( V)

HPSMU Measurement
and Output Range

-1000

4