Keithley Keithley Instruments 2651A-US Manual

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Model 2651A High Power System SourceMeter

User’s Manual

2651A-900-01 Rev. A / March 2011

Instrument

ECNEDIFNOCFOERUSAEMRETAERGA

Model 2651A

High Power System SourceMeter

User's Manual

Cleveland, Ohio, U.S.A.

Instrument

Any unauthorized reproduction, photocopy, or use the information herein, in whole or in part,

without the prior written approval of Keithley Instruments, Inc. is strictly prohibited.

All Keithley Instruments product names are trademarks or registered trademarks of Keithley

Instruments, Inc. Other brand names are trademarks or registered trademarks of their respective

holders.

Document number: 2651A-900-01 Rev. A / March 2011

Safety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the user documentation for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.

The types of product users are:

Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service personnel may perform installation and service procedures.

Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise marked or described in the user documentation.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions, or the safety of

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the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information, and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.

If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid interlock.

screw is present, connect it to safety earth ground using the wire recommended in the user documentation.

If a

The ! symbol on an instrument means caution, risk of danger. The user should refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument.

The symbol on an instrument means caution, risk of electric shock. Use standard safety precautions to avoid personal contact with these voltages.

The

If this

symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.

symbol indicates a connection terminal to the equipment frame.

symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be

properly disposed of according to federal, state, and local laws.

The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and fire, replacement components in mains circuits — including the power transformer, test leads, and input jacks — must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

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Introduction ................................................................................................................. 1-1

Welcome .............................................................................................................................. 1-1

Extended warranty ............................................................................................................... 1-1

Introduction to this manual................................................................................................... 1-1

CD-ROM contents................................................................................................................ 1-2

Organization of manual sections.......................................................................................... 1-2

Model 2651A applications.................................................................................................... 1-2

Using the front-panel interface.................................................................................. 2-1

Introduction .......................................................................................................................... 2-1

Front panel ........................................................................................................................... 2-1

Using the web interface.............................................................................................. 3-1

Introduction .......................................................................................................................... 3-1

Connect to the instrument web interface ............................................................................. 3-1

Web interface home page.................................................................................................... 3-2

IP configuration tab .............................................................................................................. 3-2

TSB Embedded.................................................................................................................... 3-3

Create a script using TSB Embedded ....................................................................................... 3-3

Exercise: Create and run a script with TSB Embedded ............................................................ 3-4

Reading buffers.................................................................................................................... 3-7

Exercise: Retrieve readings from a buffer ................................................................................. 3-7

TSP Express ........................................................................................................................ 3-8

Making basic front-panel measurements ................................................................. 4-1

Introduction .......................................................................................................................... 4-1

Equipment needed for this example .................................................................................... 4-1

Device connections .............................................................................................................. 4-1

Making front-panel measurements ...................................................................................... 4-2

Step 1: Select and set source level ........................................................................................... 4-2

Step 2: Set compliance limit ...................................................................................................... 4-2

Step 3: Select measurement function and range ...................................................................... 4-2

Step 4: Turn output on .............................................................................................................. 4-2

Step 5: Observe readings on the display .................................................................................. 4-3

Step 6: Turn output off .............................................................................................................. 4-3

Table of Contents Model 2651A High Power System SourceMeter® Instrument User's Manual

Capturing high power pulse waveforms................................................................... 5-1

Introduction to capturing waveforms.................................................................................... 5-1

Equipment needed for this example .................................................................................... 5-1

Set up communication.......................................................................................................... 5-1

Device connections .............................................................................................................. 5-2

Configuring the trigger model............................................................................................... 5-2

Example program code........................................................................................................ 5-4

Example program usage...................................................................................................... 5-9

Characterization of power discretes ......................................................................... 6-1

Introduction to power discrete I-V curve testing................................................................... 6-1

Equipment needed for this example .................................................................................... 6-2

Set up communication.......................................................................................................... 6-2

Device connections .............................................................................................................. 6-4

Configuring the trigger model............................................................................................... 6-5

Model 2651A trigger model operation ....................................................................................... 6-7

Series 26xxA instrument's trigger model operation ................................................................... 6-9

Example program code...................................................................................................... 6-10

Example program usage.................................................................................................... 6-16

Increasing SMU current sourcing ability .................................................................. 7-1

Introduction to combining SMUs.......................................................................................... 7-1

Combining SMUs to increase current sourcing capability ................................................... 7-2

Equipment needed for this example .................................................................................... 7-3

Set up communication.......................................................................................................... 7-3

Device connections .............................................................................................................. 7-4

Configuring the trigger model............................................................................................... 7-6

Master Model 2651A node[1] trigger model operation .............................................................. 7-8

Model 2651A node[2] trigger model operation .......................................................................... 7-8

Series 2600A trigger model operation....................................................................................... 7-9

Example program code........................................................................................................ 7-9

Example program usage.................................................................................................... 7-16

Troubleshooting FAQs ............................................................................................... 8-1

About this section................................................................................................................. 8-1

Need different line frequency or voltage .............................................................................. 8-1

Can I use external trigger lines? .......................................................................................... 8-1

ii 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Table of Contents

The internal web page of the instrument is not accessible.................................................. 8-1

Save the present state of the instrument ............................................................................. 8-2

LabVIEW driver for the Model 2651A .................................................................................. 8-2

Next steps.................................................................................................................... 9-1

Additional Model 2651A information .................................................................................... 9-1

Index.............................................................................................................................. I-1

2651A-900-01 Rev. A / March 2011 iii

Welcome

Section 1

Introduction

In this section:

Welcome .................................................................................. 1-1

Extended warranty ................................................................... 1-1

Introduction to this manual ....................................................... 1-1

CD-ROM contents.................................................................... 1-2

Organization of manual sections .............................................. 1-2

Model 2651A applications ........................................................ 1-2

Thank you for choosing a Keithley Instruments product. The Model 2651A High Power System SourceMeter

Instrument provides manufacturers of electronic components and semiconductor devices a high-power source-measure unit (SMU). A SMU is an instrument that combines source and measurement capabilities in a single instrument. This combination simplifies test processes by eliminating synchronization and connection issues associated with multiple instrument solutions. A Model 2651A provides a scalable, high throughput, highly cost-effective solution for precision DC, pulse, and low frequency AC source-measure testing that also maintains code compatibility with the Series 2600A.

Extended warranty

Additional years of warranty coverage are available on many products. These valuable contracts protect you from unbudgeted service expenses and provide additional years of protection at a fraction of the price of a repair. Extended warranties are available on new and existing products. Contact your local Keithley Instruments representative for details.

Introduction to this manual

This manual provides detailed tutorials to help you achieve success with your Keithley Instruments Model 2651A. In addition, the basics of the two simplest interfaces, the front panel and the web interface, are provided to familiarize you with the instrument. Select and run all examples in Sections 5, 6, and 7 that are relevant to your intended use and to the equipment you are using.

Some of the examples in this manual may use unfamiliar commands and concepts. For detailed information about these, refer to the Reference Manual (part number 2651A-901-01) on the Product Information CD-ROM that came with your instrument.

Section 1: Introduction Model 2651A High Power System SourceMeter® Instrument User's Manual

CD-ROM contents

Two CD-ROMs are shipped with each Model 2651A order. The Model 2651A Quick Start Guide, User's Manual, and Reference Manual are provided in PDF format on the Model 2651A Product Information CD-ROM.

• Quick Start Guide: Provides unpacking instructions, describes basic connections, and reviews

basic operation information. If you are new to Keithley Instruments equipment, refer to the Quick Start Guide to take the steps needed to unpack, set up, and verify operation.

• User's Manual: Provides application examples. If you need a starting point to begin creation of

applications, refer to the User's Manual for a variety of specific examples.

• Reference Manual: Includes advanced operation topics and maintenance information.

Programmers looking for a command reference, and users looking for an in-depth description of the way the instrument works (including troubleshooting and optimization), should refer to the Reference Manual.

A second CD-ROM contains the Test Script Builder script development software (Keithley Instruments part number KTS-850). Use this CD-ROM to install the Test Script Builder Integrated Development Environment. This software not only provides an environment to develop a test program, but also the ability to load the test program onto the instrument. Running a program loaded on the instrument eliminates the need to send individual commands from the host computer to the instrument when running a test.

Organization of manual sections

Bookmarks for each manual section have been provided in the PDF (see Adobe® Acrobat® or Reader Contents located at the beginning of this manual.

help for information about bookmarks). The manual sections are also listed in the Table of

Model 2651A applications

In addition to being a stand-alone instrument, the Keithley Instruments Model 2651A High Power System SourceMeter This manual provides application examples that guide you through several common instrument-to-instrument scenarios. These applications are presented after the summary information about the High Power System SourceMeter

• Making basic front-panel measurements (on page 4-1): Demonstrates the basic measurement

function using a single Model 2651A and a two-terminal device under test (DUT).

• Capturing high power pulse waveforms (on page 5-1)Capturing high power pulse waveforms:

Demonstrates how to use the Keithley Instruments Model 2651A connected to a control computer. This example introduces configuration of the instrument's trigger model to make high-speed measurements of an LED.

Instrument can intelligently connect to other instruments and multiple devices.

Instrument, and include:

1-2 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 1: Introduction

• Characterization of power discretes (on page 6-1): Demonstrates how to use the Keithley

Instruments Model 2651A with a second Series 2600A System SourceMeter

instrument to characterize power MOSFETs and IGBTs. This example introduces the interaction between two instruments' trigger models. The application performs pulsed measurements, collecting IV curve data and placing it in a Microsoft

Excel® compatible file format for graphic and analysis.

• Increasing SMU current sourcing ability (on page 7-1): Demonstrates how to combine two

Keithley Instruments Model 2651A instruments with an additional Series 2600A System SourceMeter current up to 100 A.

instrument, and characterizes the resistance of a power MOSFET by sweeping

2651A-900-01 Rev. A / March 2011 1-3

In this section:

Introduction .............................................................................. 2-1

Front panel ............................................................................... 2-1

Introduction

Before starting this section, complete the tasks outlined in the Model 2651A Quick Start Guide. Once you have completed those tasks, read this section, which provides enough basic information about the Model 2651A front-panel interface to work through the examples provided in this manual.

Section 2

Using the front-panel interface

The front panel of the Keithley Instruments Model 2651A contains the following items:

(1) The POWER key

(2) The display

(3) The navigation wheel

(4) The OUTPUT ON/OFF control

(5) The setup and control keys

You can use the keys, display, and the navigation wheel and set values.

For additional information about the front panel, see the “General operation” section in the Model 2651A Reference Manual.

Front panel

The front panel of the Model 2651A is shown below.

to access, view, and edit the menu items

Section 2: Using the front-panel interface Model 2651A High Power System SourceMeter® Instrument User's Manual

CONFIG

Figure 1: Front panel

+3.21000V

SrcA:+20.0000 A LimAL10.0000V

78 90+/-

SRC MEAS LIMIT MODE

DISPLAY

POWER

CONFIG

DIGITS

SPEED

12 3

LOAD

RUN

REL

FILTER

0000

STORE

RECALL

ARM

AUTO

LOCAL

TRIG

EXIT

ENTER

2651A HIGH POWER SYSTEM SourceMeter

CURSOR

(1) The POWER key. Press this key to turn the instrument on (|). Press it again to turn the instrument

off (0).

(2) The display. During operation, the display provides readings and information about the selected

measurement and configuration. It also shows the control status (local or remote). If REM is displayed, the instrument is being controlled remotely (through GPIB, LAN, or USB). If REM is not displayed, control is through the front panel.

During setup, the display shows menu choices that you can use to configure the instrument.

The items listed below represent the possible display indicators and what they mean.

Indicator Meaning

EDIT: Unit is in the source editing mode

ERR: Questionable reading or invalid calibration step

REM: Unit is in remote mode

TALK: Unit is addressed to talk

LSTN: Unit is addressed to listen

SRQ: Service request is asserted

REL: Relative mode is enabled

FILT: Digital filter is enabled

AUTO: Source or measure autorange is selected

* (asterisk): Readings are being stored in the buffer

(3) The navigation wheel . Turn the navigation wheel to scroll to a menu option or to change the

selected value.

Push the navigation wheel

cases, pressing the navigation wheel

to open menus or to select a menu option or a value. In most

performs the same action as pressing the ENTER key.

(4) The OUTPUT ON/OFF control. Press this control to turn the Model 2651A source output on or off.

The output indicator will light when the source is on.

(5) The setup and control keys provide front panel control and configuration. The following figure

2-2 2651A-900-01 Rev. A / March 2011

illustrates each key's location. The table following the figure contains a definition of each key.

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 2: Using the front-panel interface

Figure 2: Setup and control keys

78 90+/-

DISPLAY

CONFIG

SRC MEAS LIMIT MODE

DIGITS

SPEED

12 3

LOAD

RUN

REL

STORE

FILTER

0000

RECALL

TRIG

LOCAL

EXIT

ENTER

AUTO

CURSOR

Key descriptions

Key Description

DISPLAY Toggles between the various source-measure displays and the user message mode.

CONFIG Configures a function or operation.

SRC Selects the source function (V or A) and places the cursor in the source field for

MEAS

LIMIT Places the cursor in the compliance limit field for editing. Also selects the limit value

MODE Directly controls the mode.

DIGITS Cycles through display resolution (4-1/2, 5-1/2, or 6-1/2 digits).

SPEED Selects either the fast or integrating A/D converter. When the integrating A/D

REL Controls relative measurements. This allows a baseline value to be subtracted from

FILTER Enables or disables the digital filter. You can use this filter to reduce reading noise.

LOAD Loads test for execution.

RUN Runs the last selected factory or user-defined test code.

STORE Accesses reading buffers and takes readings.

RECALL Recalls data (or statistics) from CHANA-BUFF1 or CHANA-BUFF2.

TRIG Triggers readings.

MENU Accesses the main menu. The main menu can be used to configure many facets of

EXIT (LOCAL)

ENTER Accepts the current selection or brings up the next menu option. In most cases,

Number keys

editing.

Cycles through measure functions (V, A, Ω, or W).

to edit (V, A, or W).

converter is selected, this key also sets the measurement speed and accuracy by controlling the measurement aperture.

a reading.

operation.

Cancels selection and backs out of the menu structure. Also used as a LOCAL key to take the unit out of remote operation.

pressing the ENTER key is the same as pressing the navigation wheel

When enabled, the number keys (0-9, +/-, 0000) allow direct numeric entry in the

EDIT mode. Press the navigation wheel

to enter EDIT mode (see To change a

value using the numeric keypad (on page 2-4)).

2651A-900-01 Rev. A / March 2011 2-3

Section 2: Using the front-panel interface Model 2651A High Power System SourceMeter® Instrument User's Manual

To change a value using the navigation wheel

1. Turn the navigation wheel

to go to the character you want to change (the character blinks

when selected).

2. Press the navigation wheel

3. Turn the navigation wheel

to edit that character.

to change the value.

4. Press the navigation wheel to enter the change.

5. Repeat these steps as needed to change the value.

6. Press the ENTER key or the navigation wheel

when finished changing all the characters.

To change a value using the numeric keypad:

NOTE

The numeric entry method may only be used if the numeric keypad is enabled.

1. If the keypad is disabled, press the MENU key, then select DISPLAY > NUMPAD > ENABLE.

2. Use the CURSOR arrow keys to move the cursor to the value that you want to edit.

3. Press any of the desired number keys (0-9, +/-, 0000). The cursor moves to the next value on the right.

4. Repeat the above steps as required to set the desired values.

5. Press the ENTER key to select the value or press the EXIT (LOCAL) key to cancel the change.

6. (Optional) Press the EXIT (LOCAL) key to return to the main menu.

2-4 2651A-900-01 Rev. A / March 2011

In this section:

Introduction .............................................................................. 3-1

Connect to the instrument web interface .................................. 3-1

Web interface home page ........................................................ 3-2

IP configuration tab .................................................................. 3-2

TSB Embedded........................................................................ 3-3

Reading buffers........................................................................ 3-7

TSP Express ............................................................................ 3-8

Introduction

The Model 2651A web interface allows you to review instrument status, control the instrument, and upgrade the instrument over a LAN connection.

The instrument web page resides in the firmware of the instrument. Changes you make through the web interface are immediately made in the instrument.

Section 3

Using the web interface

Many examples in this manual and in the Model 2651A Reference Manual can be run through the TSB Embedded page of the instrument web interface.

Connect to the instrument web interface

NOTE

The instrument web interface requires the web browser plug-in JavaTM SE Runtime Environment Version ROM that came with your instrument.

The instrument web interface uses Java applets and, depending on your browser security settings, may require your permission to download and install them.

To connect to the instrument web interface, you must have a LAN connection from the computer to the instrument. See "LAN concepts and settings" in the Model 2651A Reference Manual for more information about configuring the Model 2651A for a LAN connection, connecting the Model 2651A to the LAN, and establishing a LAN connection to the instrument.

6 or later. Installation files are also available on the Model 2651A Product Information CD-

Section 3: Using the web interface Model 2651A High Power System SourceMeter® Instrument User's Manual

Once the Model 2651A is configured correctly and connected to the LAN, you can use the LXI® Discover automatic IP address selection. Once identified, you can double-click the IP address in the LXI Discovery Browser to open the web interface for the instrument.

To locate the LXI Discovery Browser on the Keithley website:

1. Select the Support tab.

2. In the model number box, type 2651A.

3. From the list, select Software and click the search icon. A list of software applications for the

4. See the readme file included with the application for more information.

y Browser to identify the IP addresses of LXI certified instruments that are set up for

Model 2651A is displayed.

1. Confirm the LAN light on the instrument is as part of the LAN RJ-45 connector.

2. Open an Internet browser, such as Microsoft only).

3. If you do not know the IP address, press the MENU key on the instrument front panel and then select LAN > STATUS > IP-ADDRESS.

4. In the Address box of the Internet browser, enter the IP address of the instrument and press Enter.

The home page of the instrument web interface is displayed.

Web interface home page

The Welcome page of the web interface gives you basic information about the instrument, including:

• The instrument model, serial number, firmware revision, calibration date, and LXI information

• An ID button to help you locate the instrument

• Links to the instrument web applications, including TSB Embedded, Reading Buffers, Flash

Upgrade, and TSP

Express.

illuminated. The LAN light is located on the rear panel

Windows® Internet Explorer® (version 6.0 or later

IP configuration tab

The IP Configuration tab provides access to the Model 2651A LAN settings. Refer to the Model 2651A Reference Manual for additional information about IP configuration.

3-2 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 3: Using the web interface

NOTE

You must reload the page if you change the gateway or subnet mask from the Modify IP configuration page. If you change the IP address, you must type the new IP address in the address bar before you can use the web interface again.

Figure 3: Select IP configuration

TSB Embedded

TSB Embedded is a web application that includes a command-line interface that you can use to issue commands and interact with the instrument. TSB Embedded also provides a convenient way to create and manage user scripts. TSB Embedded resides in the instrument. You can use TSB Embedded to run some of the application examples in other sections of this manual. If you can access the web interface home page, but cannot use TSB Embedded (or TSP Express), make sure you have the

Java

Create a script using TSB Embedded

If you are using TSB Embedded to create scripts, you do not need to use the commands loadscript or loadandrunscript and endscript.

SE Runtime Environment (JRE) Version 6 or later installed on your computer.

NOTE

2651A-900-01 Rev. A / March 2011 3-3

Section 3: Using the web interface Model 2651A High Power System SourceMeter® Instrument User's Manual

Exercise: Create and run a script with TSB Embedded

The following programming example illustrates the setup and command sequence of a basic source-measure procedure with the following parameters:

• Source function and range: Volts, autorange

• Source output level: 5 V

• Current compliance limit: 10 mA

• Measure function and range: Current, 10 mA

To create and run a sample script with TSB Embedded:

1. From the navigation on the left side of the web interface, select TSB Embedded. The TSB Embedded page is displayed.

Figure 4: Select TSB Embedded

2. To create the example script, enter the name of the TSP script: basic_source_measure at the location shown by (1) in the following illustration.

3-4 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 3: Using the web interface

basi

urce

_mea

Figure 5: TSB Embedded page

1 2 3

basic_source_measure

-- Restore Model 2651A defaults...

smua.nvbuffer1.clear() smua.nvbuffer1.appendmode = 1

3. Enter the code below in the script box (2).

-- Restore Model 2651A defaults.

smua.reset()

-- Select voltage source function.

smua.source.func = smua.OUTPUT_DCVOLTS

-- Set source range to auto.

smua.source.autorangev = smua.AUTORANGE_ON

-- Set voltage source to 5 V.

smua.source.levelv = 5

-- Set current limit to 10 mA.

smua.source.limiti = 10e-3

-- Set current range to 10 mA.

smua.measure.rangei = 10e-3

-- Turn on output.

smua.source.output = smua.OUTPUT_ON

-- Print and place current reading in buffer.

print(smua.measure.i(smua.nvbuffer1))

-- Turn off output.

smua.source.output = smua.OUTPUT_OFF

-- Beep.

beeper.enable = beeper.ON

beeper.beep(1, 1200)

beeper.enable = beeper.OFF

2651A-900-01 Rev. A / March 2011 3-5

Section 3: Using the web interface Model 2651A High Power System SourceMeter® Instrument User's Manual

NOTE

Commands and parameters for the Model 2651A are case-sensitive. It is important to type in the commands exactly as shown to avoid syntax and execution errors.

4. Click Save Script (3). The script is added to the User Scripts list on the left.

Quick Tip

Standard edit functions, such as copy, cut, and paste, work in TSB Embedded.

5. Clear the buffer (4):

• In the console, type the following and then press Enter.

smua.nvbuffer1.clear()

• If successful, the command will appear in the Instrument Output box.

6. Set the buffer to append readings (4):

• In the console, type the following and then press Enter.

smua.nvbuffer1.appendmode = 1

• If successful, the command will appear in the Instrument Output box.

7. Set the buffer to collect timestamps (4):

• In the console, type the following and then press Enter.

smua.nvbuffer1.collecttimestamps = 1

• If successful, the command will appear in the Instrument Output box.

8. Run the script:

• Select the script in the User Scripts list.

• Click Run.

9. The Instrument Output box displays any error messages and output from the script.

10. If no errors appear, but readings do, click Run a few times to populate the buffer. Each time the script is run, readings appear in the Instrument Output box and are also placed in the buffer.

Script management options

Existing scripts are listed in the User Scripts box on the left side of the web interface. To delete a script, click the name of the script and click Delete. The script is deleted from the User Scripts list and from the nonvolatile memory of the instrument. To stop operation of a script, click Abort Script.

To export the selected script to the computer, click Export to PC. Choose the directory in which to save the script and click Save. Scripts are saved to a file with the extension tsp. TSP files are native to Test Script Builder or TSB Embedded, but they can be opened and edited in any text editor.

To import scripts from the computer, click Import to PC. Select the directory that contains the file. You can only import files with the extension tsp.

To clear the name box and the box that contains the script, click Clear. You can type the name of a script in the TSP Script box and click View Script to view the contents of the script.

3-6 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 3: Using the web interface

Reading buffers

The Reading Buffers tab provides access to the Model 2651A reading buffers. The data used in this example was created and placed in the buffer by the Exercise: Create and run a script with TSB

Embedded (on page 3-4).

Exercise: Retrieve readings from a buffer

To retrieve readings from a populated buffer:

1. From the navigation area on the left side of the web interface, select Reading Buffers. The Reading Buffers embedded page is displayed.

Figure 6: Select reading buffer

2. Select smua.nvbuffer1 (1).

3. In the Recall Attributes area (near the bottom of the page), select Values and Time Stamp (2).

2651A-900-01 Rev. A / March 2011 3-7

4. Click Download (3). The table displays the present buffer data.

Section 3: Using the web interface Model 2651A High Power System SourceMeter® Instrument User's Manual

Figure 7: Downloading the reading buffer

5. Notice that the Source Value column is not populated. To collect source values, before taking readings, use TSB Embedded to set the following attribute: smua.nvbuffer1.collectsourcevalues = 1.

TSP Express

Figure 8: Sample downloaded reading buffer

The TSP® Express tab provides access to the TSP Express Launch page. From this page, click the Launch button to start TSP Express.

3-8 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 3: Using the web interface

NOTE

Only one TSB Embedded or TSP Express session can be running and connected to the same instrument.

Figure 9: Select TSP Express

To run TSP Express:

1. From the navigation area on the left side of the web interface, select TSP Express. The TSP Express page is displayed.

2. Click the Launch button. The TSP Express window opens.

3. There is a help pane on the right side of the main window. You can adjust the width of the help pane by sliding the vertical bar. Click and follow the step-by-step example to become familiar with TSP Express (there is a link to the example in the TSP Express Introduction's first paragraph).

2651A-900-01 Rev. A / March 2011 3-9

Section 3: Using the web interface Model 2651A High Power System SourceMeter® Instrument User's Manual

Figure 10: TSP Express

3-10 2651A-900-01 Rev. A / March 2011

In this section:

Introduction .............................................................................. 4-1

Equipment needed for this example......................................... 4-1

Device connections .................................................................. 4-1

Making front-panel measurements ........................................... 4-2

Introduction

You can use the Model 2651A High Power System SourceMeter® Instrument to make basic measurements from the front panel. In this example, measurements are made on a 10 kΩ resistor. Similar measurements can be made on any two-terminal device under test (DUT) if appropriate source values are used.

Section 4

Making basic front-panel measurements

Equipment needed for this example

To run this example, you will need the following equipment:

• Model 2651A High Power System SourceMeter

• Additional cable and connector assemblies as required to make connections to the DUT (for

example, Model 2651A-KIT). See Device connections connections.

Device connections

Connections from the Model 2651A High Power System SourceMeter® Instrument to the DUT are shown in the diagram below. Proper care should be taken to ensure good contact through all connections.

Figure 11: Two-wire resistance connections

SENSE/GUARD

GGGG

Instrument

(on page 4-1) for a schematic of required

OUTPUT

LO HI

40V, 50A MAX.

DUT

Section 4: Making basic front-panel measurements Model 2651A High Power System SourceMeter® Instrument User's Manual

Making front-panel measurements

Use the following procedure to configure the instrument and make measurements from the front panel.

Step 1: Select and set source level

Perform the following steps to select the voltage source and set its value to 10 V:

1. Press the SRC key as needed to select the V-Source, as indicated by the units in the source field on the display. The flashing digit (cursor) indicates which value is selected for editing.

2. Move the cursor to the digit to change, then press the navigation wheel mode, as indicated by the EDIT indicator.

to enter the EDIT

3. Use the RANGE keys to select the 10 V range. If using a different source value, use the lowest possible range for the best accuracy.

4. Set the source value to 10.0000 V, and then press the ENTER key or the navigation wheel complete editing.

Step 2: Set compliance limit

Perform the following steps to edit the compliance limit value to 10 mA:

1. Press the LIMIT key.

2. Move the cursor to the digit to change, then press the navigation wheel

to enter the EDIT

mode, as indicated by the EDIT indicator.

3. Enter the limit value of 10.000 mA.

4. Press the ENTER key or the navigation wheel

to complete editing.

Step 3: Select measurement function and range

To select measurement function and range:

1. Select the current measurement function by pressing the MEAS key as needed.

2. Enable autorange by pressing the AUTO key (the AUTO indicator lights). Alternatively, you can set manual ranging using the up or down RANGE keys.

Step 4: Turn output on

4-2 2651A-900-01 Rev. A / March 2011

Turn the output on by pressing the OUTPUT ON/OFF control. The OUTPUT indicator light turns on.

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 4: Making basic front-panel measurements

Step 5: Observe readings on the display

1. Observe the readings on the display. Press the TRIG key if necessary to trigger the instrument to begin taking readings. The readings are on the top line, and source and limit values are on the bottom line. For the 10 kΩ resistor, typical display values are:

1.00000mA SrcA: +10.0000 V LimA:010.0000mA

2. Press the MEAS key several times to display measured voltage, resistance, power, and current. Typical values for the 10 kΩ resistor are:

Step 6: Turn output off

When finished, turn the output off by pressing the OUTPUT ON/OFF control. The OUTPUT indicator light will turn off.

10.0000 V, 10.0000 kΩ, 10.0000 mW, and 1.00000 mA

2651A-900-01 Rev. A / March 2011 4-3

Capturing high power pulse waveforms

In this section:

Introduction to capturing waveforms ........................................ 5-1

Equipment needed for this example......................................... 5-1

Set up communication.............................................................. 5-1

Device connections .................................................................. 5-2

Configuring the trigger model ................................................... 5-2

Example program code ............................................................ 5-4

Example program usage .......................................................... 5-9

Introduction to capturing waveforms

Section 5

The Model 2651A High Power System SourceMeter® Instrument offers a unique feature. In addition to a traditional integrating ADC, the Model 2651A also features a fast-sampling ADC. The fast ADC of the Model 2651A allows the instrument to take measurements at high speed, with capabilities similar to an oscilloscope. This allows you to capture data at up to one million samples per second with more than 5000 readings in a single burst. This feature allows simultaneous current and voltage measurements without any additional hardware, and offers 18-bit resolution providing for high accuracy, even at high speed. The fast ADC of the Model 2651A allows this instrument to be used in a broad range of applications, such as negative bias temperature instability (NBTI) testing and transient thermal analysis.

In this example, we will demonstrate how to use the fast ADC of the Model 2651A to capture both the current and voltage waveforms of high power pulses.

Equipment needed for this example

To run this test, you will need the following equipment:

• Model 2651A High Power System SourceMeter

• GPIB cable or Ethernet cable to connect the Model 2651A to a computer

• Additional cable and connector assemblies as required to make connections to the device under

test (DUT) (for example, Model 2651A-KIT); see Device connections schematic of required connections

Instrument

(on page 5-2) for a

Set up communication

The communication setup is illustrated in the following diagram. GPIB is used as an example, but this application can be run using any of the supported communication interfaces for the instrument.

Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual

CONFIG

Figure 12: GPIB communication example for fast ADC

GPIB

POWER

+3.21000V

SrcA:+20.0000 A LimAL10.0000V

78 90+/-

SRC MEAS LIMIT MODE

DISPLAY

DIGITS

REL

SPEED

12 3

LOAD

RUN

FILTER

0000

STORE

RECALL

CONFIG

2651A HIGH POWER SYSTEM SourceMeter

ARM

LOCAL

TRIG

EXIT

ENTER

CURSOR

AUTO

Controller

Device connections

Make the connections as illustrated in the following figure. To ensure good contact, use care when making connections.

SENSE/GUARD

Figure 13: Connections for fast ADC example

Model 2651A

OUTPUT

GGGG

S HI

Equivalent

LO HI

40V, 50A MAX.

HI S HI

S HI

LED

(DUT)

S LO

SMU

LED

(DUT)

LO S LO

Configuring the trigger model

To output precisely timed high power pulses and accurately capture the pulse with the fast ADC, the trigger model of the Model 2651A High Power System SourceMeter the trigger model, we can output pulses as large as 50 A with pulse widths as small as 100 μs and position our measurements with microsecond resolution. The image below is a diagram of the trigger model used in this example.

5-2 2651A-900-01 Rev. A / March 2011

Instrument must be used. Using

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 5: Capturing high power pulse waveforms

Figure 14: Trigger model configuration for fast ADC example

Model 2651A

Local node*

trigger.timer[1].

stimulus

passthrough = true

trigger.timer[2].

stimulus

passthrough = false

0.03 s

3 ms

EVENT_ID

count = 4

EVENT_ID

count = 1

smua.trigger.

Idle

Arm layer

arm.stimulus

Trigger layer

source.stimulus

measure.stimulus

endpulse.stimulus

arm.count = 1

SWEEP_COMPLETE_EVENT_ID

count = 5

SOURCE_COMPLETE_EVENT_ID

MEASURE_COMPLETE_EVENT_ID

PULSE_COMPLETE_EVENT_ID

IDLE_EVENT_ID

SWEEPING_EVENT_ID

ARMED_EVENT_ID

* Local node: Since only one instrument is being used in this example, the local node is used.

In this example, timer 1 is used to control the time between pulses while timer 2 is used to control the pulse width. Timer 1 also controls the start of the measurements, starting them at the same time it triggers the pulse and thus overlapping the measurements with the pulse.

When the trigger model of the Model 2651A is initialized, the following occurs:

1. The source-measure unit (SMU) trigger model:

• Leaves the idle state

• Flows through the Arm Layer

• Enters the Trigger Layer

• Outputs the ARMED event trigger

• Pauses at the Source Event, where it waits for an event trigger

2. Timer 1 receives the ARMED event trigger and begins its countdown while passing the event trigger through to both the SMU's Source Event and Measure Event simultaneously.

3. The SMU Measure Event receives the event trigger from timer 1 and begins to take measurements. Because measurements have been configured to be asynchronous, the Measure Event begins its execution before the Source Event has completed and will continue to take measurements even after the End Pulse Event has executed. For more information, see "Using the remote trigger model" in the Model 2651A Reference Manual.

4. The SMU Source Event receives the event trigger from timer 1, begins to output the pulse, and then waits the programmed source delay (if any) before it outputs the SOURCE_COMPLETE event to timer 2 and allows the SMU trigger model to continue.

2651A-900-01 Rev. A / March 2011 5-3

Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual

5. Timer 2 receives the SOURCE_COMPLETE_EVENT_ID event trigger from timer 1 and begins its countdown.

6. The SMU trigger model continues to the End Pulse Event, where it pauses and waits for an event trigger from timer 2.

7. The timer 2 countdown expires and timer 2 outputs an event trigger to the SMU End Pulse Event.

8. The SMU End Pulse Event receives the event trigger from timer 2 and outputs the falling edge of the pulse, after which it allows the SMU trigger model to continue.

9. The SMU trigger model then compares the current Trigger Layer loop iteration with the trigger count:

• If the current iteration is less than the trigger count, the Trigger Layer repeats and the SMU trigger

model reaches Source Event, where it waits for another trigger from timer 1. The trigger model then repeats from step 3.

• If the current iteration is equal to the trigger count, the SMU trigger model exits the Trigger Layer,

passes through the Arm Layer, and returns to idle.

Example program code

NOTE

The example code is designed to be run from Test Script Builder or TSB Embedded. It can also be run from other programming environments, such as Microsoft® Visual Studio® or National Instruments LabVIEWTM. However, modification of the example code may be required to do so.

The following script contains all the code necessary to output and capture a current or voltage pulse using the Model 2651A fast ADC. The script sets up the source-measure unit (SMU), configures the trigger model, prepares the reading buffers, executes the test, and outputs the collected data in a format that can be copied and pasted from the instrument console to a Microsoft spreadsheet.

The script is written using Test Script Processor (TSP®) functions rather than as a single block of inline code. TSP functions are similar to functions in other programming languages, such as Microsoft

Visual C® or Visual Basic®, and must be called before the code contained in them is executed. Because of this, running the script alone will not execute the test. To execute the test, run the script to load the functions into test script memory and then call the functions. Refer to the documentation for Test Script Builder or TSB Embedded

(on page 3-3) for directions on how to run

scripts and enter commands using the instrument console.

Excel®

The script contains comments that describe what is being performed by the lines of code and documentation for the functions in the script.

5-4 2651A-900-01 Rev. A / March 2011

--[[ Title: Fast ADC Usage Description: This script is designed to output pulses and capture both the current and the voltage of the pulse using the fast ADC of the Model 2651A High Power System SourceMeter instrument.

Equipment Needed: 1x 2651A ]]

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 5: Capturing high power pulse waveforms

--[[ Name: CapturePulseV(pulseLevel, pulseWidth, pulseLimit, numPulses) Description: This function outputs voltage pulses with a 1% duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety. At the conclusion of the pulse train, the data is returned to the instrument console in a Microsoft Excel compatible format.

Parameters: pulseLevel: The voltage level of the pulse in volts pulseWidth: The width of the pulse in seconds 100e-6 <= pulseWidth <= 4e-3 pulseLimit: The current limit of the pulse in amps numPulses: The number of pulses to output

Example Usage: CapturePulseV(5, 300e-6, 50, 5) ]]

function CapturePulseV(pulseLevel, pulseWidth, pulseLimit, numPulses) if (numPulses == nil) then numPulses = 1 end

-- Configure the SMU reset() smua.reset() smua.source.func = smua.OUTPUT_DCVOLTS smua.sense = smua.SENSE_REMOTE smua.source.rangev = pulseLevel smua.source.levelv = 0 -- The bias level smua.source.limiti = 5 -- The DC limit

-- Use a measure range that is as large as the biggest

-- possible pulse smua.measure.rangei = pulseLimit smua.measure.rangev = pulseLevel

-- Select the fast ADC for measurements smua.measure.adc = smua.ADC_FAST

-- Set the measure count to be 1.25 times the width of the pulse

-- to ensure we capture the entire pulse plus falling edge. smua.measure.count = (pulseWidth / smua.measure.interval) * 1.25

-- Prepare the reading buffers smua.nvbuffer1.clear() smua.nvbuffer1.collecttimestamps = 1 smua.nvbuffer1.collectsourcevalues = 0 smua.nvbuffer1.fillmode = smua.FILL_ONCE smua.nvbuffer2.clear() smua.nvbuffer2.collecttimestamps = 1 smua.nvbuffer2.collectsourcevalues = 0 smua.nvbuffer2.fillmode = smua.FILL_ONCE

-- Cannot use source values with async measurements

2651A-900-01 Rev. A / March 2011 5-5

Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual

-- Configure the Pulsed Sweep setup

-----------------------------------

-- Timer 1 controls the pulse period trigger.timer[1].count = numPulses - 1

-- -- 1% Duty Cycle trigger.timer[1].delay = pulseWidth / 0.01 trigger.timer[1].passthrough = true trigger.timer[1].stimulus = smua.trigger.ARMED_EVENT_ID

-- Timer 2 controls the pulse width trigger.timer[2].count = 1 trigger.timer[2].delay = pulseWidth - 3e-6 trigger.timer[2].passthrough = false trigger.timer[2].stimulus = smua.trigger.SOURCE_COMPLETE_EVENT_ID

-- Configure SMU Trigger Model for Sweep/Pulse Output

-----------------------------------------------------

-- Pulses will all be the same level so set start and stop to

-- the same value and the number of points in the sweep to 2 smua.trigger.source.linearv(pulseLevel, pulseLevel, 2) smua.trigger.source.limiti = pulseLimit smua.trigger.measure.action = smua.ASYNC

-- We want to start the measurements before the source action takes

-- place, so we must configure the ADC to operate asynchronously of

-- the rest of the SMU trigger model actions

-- Measure I and V during the pulse smua.trigger.measure.iv(smua.nvbuffer1, smua.nvbuffer2)

-- Return the output to the bias level at the end of the pulse/sweep smua.trigger.endpulse.action = smua.SOURCE_IDLE smua.trigger.endsweep.action = smua.SOURCE_IDLE smua.trigger.count = numPulses smua.trigger.arm.stimulus = 0 smua.trigger.source.stimulus = trigger.timer[1].EVENT_ID smua.trigger.measure.stimulus = trigger.timer[1].EVENT_ID smua.trigger.endpulse.stimulus = trigger.timer[2].EVENT_ID smua.trigger.source.action = smua.ENABLE

smua.source.output = smua.OUTPUT_ON smua.trigger.initiate() waitcomplete() smua.source.output = smua.OUTPUT_OFF

PrintPulseData() end

5-6 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 5: Capturing high power pulse waveforms

--[[ Name: CapturePulseI(pulseLevel, pulseWidth, pulseLimit, numPulses) Description: This function outputs current pulses with a 1% duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety. At the conclusion of the pulse train, the data is returned to the instrument console in a Microsoft Excel compatible format.

Parameters: pulseLevel: The current level of the pulse in amps pulseWidth: The width of the pulse in seconds 100e-6 <= pulseWidth <= 4e-3 pulseLimit: The voltage limit of the pulse in volts numPulses: The number of pulses to output

Example Usage: CapturePulseI(50, 300e-6, 10, 5) ]]

function CapturePulseI(pulseLevel, pulseWidth, pulseLimit, numPulses) if (numPulses == nil) then numPulses = 1 end

-- Configure the SMU reset() smua.reset() smua.source.func = smua.OUTPUT_DCAMPS smua.sense = smua.SENSE_REMOTE smua.source.rangei = pulseLevel smua.source.leveli = 0 -- The bias level smua.source.limitv = 10 -- The DC limit

-- Use a measure range that is as large as the biggest possible pulse. smua.measure.rangev = pulseLimit smua.measure.rangei = pulseLevel

-- Select the fast ADC for measurements smua.measure.adc = smua.ADC_FAST

-- Set the measure count to be 1.25 times the width of the pulse

-- to ensure we capture the entire pulse plus falling edge. smua.measure.count = pulseWidth / smua.measure.interval) * 1.25

-- Cannot use source values with async measurements

2651A-900-01 Rev. A / March 2011 5-7

Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual

-- Configure the Pulsed Sweep setup

-----------------------------------

-- Timer 1 controls the pulse period trigger.timer[1].count = numPulses - 1

-- 1% Duty Cycle trigger.timer[1].delay = pulseWidth / 0.01 trigger.timer[1].passthrough = true trigger.timer[1].stimulus = smua.trigger.ARMED_EVENT_ID

-- Configure SMU Trigger Model for Sweep/Pulse Output

-----------------------------------------------------

-- Pulses will all be the same level so set start and stop to

-- the same value and the number of points in the sweep to 2 smua.trigger.source.lineari(pulseLevel, pulseLevel, 2) smua.trigger.source.limitv = pulseLimit smua.trigger.measure.action = smua.ASYNC

-- We want to start the measurements before the source action takes

-- place, so we must configure the ADC to operate asynchronously of

-- the rest of the SMU trigger model actions

-- Measure I and V during the pulse smua.trigger.measure.iv(smua.nvbuffer1, smua.nvbuffer2)

-- Return the output to the bias level at the end of the pulse smua.trigger.endpulse.action = smua.SOURCE_IDLE smua.trigger.endsweep.action = smua.SOURCE_IDLE smua.trigger.count = numPulses smua.trigger.arm.stimulus = 0 smua.trigger.source.stimulus = trigger.timer[1].EVENT_ID smua.trigger.measure.stimulus = trigger.timer[1].EVENT_ID smua.trigger.endpulse.stimulus = trigger.timer[2].EVENT_ID smua.trigger.source.action = smua.ENABLE

smua.source.output = smua.OUTPUT_ON smua.trigger.initiate() waitcomplete() smua.source.output = smua.OUTPUT_OFF

PrintPulseData() end

5-8 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 5: Capturing high power pulse waveforms

--[[ Name: PrintPulseData() Description; This function prints the data contained in smua.nvbuffer1 and smua.nvbuffer2 in a format that is copy and paste compatible with Microsoft Excel. ]]

function PrintPulseData() print("Timestamp\tVoltage\tCurrent") for i=1, smua.nvbuffer1.n do print(string.format("%g\t%g\t%g", smua.nvbuffer1.timestamps[i], smua.nvbuffer2[i], smua.nvbuffer1[i])) end end

Example program usage

The functions in this script allow the parameters of the test to be adjusted without rewriting and rerunning the script. To execute the test, either call CapturePulseV() (to capture voltage) or CapturePulseI() (to capture current), passing in the appropriate values as parameters.

The parameters of the CapturePulseV() function are in the following table:

CapturePulseV() parameters

Parameter Units Description

pulseLevel

pulseWidth

pulseLimit

numPulses

Volts The voltage level of the pulse

Seconds The width of the pulse

Amperes The current limit of the pulses to output

Not applicable The number of pulses to output

An example call to this function is as follows:

CapturePulseV(10, 300e-6, 50, 5)

This call will output five 10 V pulses with a 300 μs pulse width. The pulses will be limited to 50 A and have a 1 percent duty cycle. At the completion of the pulsed outputs, the source-measure unit (SMU) output is turned off. The resulting data from this test will be returned in a Microsoft

Excel® compatible format (you can cut and paste the output from the console) that can be used for graphing and analysis.

The parameters of the CapturePulseI() function are contained in the following table:

CapturePulseI() parameters

Parameter Units Description

pulseLevel Amperes The current level of the pulse

pulseWidth Seconds The width of the pulse

pulseLimit Volts The voltage limit of the pulses to output

numPulses Not applicable The number of pulses to output

2651A-900-01 Rev. A / March 2011 5-9

Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual

An example call to this function is as follows:

CapturePulseI(50, 300e-6, 50, 5)

This call will output five 50 A pulses with a 300 μs pulse width. The pulses will be limited to 10 V and have a 1% duty cycle. At the completion of the pulsed outputs, the SMU output is turned off. The resulting data from this test will be returned in a Microsoft

Excel® compatible format (you can cut and

paste the output from the console) that can be used for graphing and analysis.

5-10 2651A-900-01 Rev. A / March 2011

Characterization of power discretes

In this section:

Introduction to power discrete I-V curve testing ....................... 6-1

Equipment needed for this example......................................... 6-2

Set up communication.............................................................. 6-2

Device connections .................................................................. 6-4

Configuring the trigger model ................................................... 6-5

Example program code .......................................................... 6-10

Example program usage ........................................................ 6-16

Introduction to power discrete I-V curve testing

Section 6

A common test performed on power MOSFETs and IGBTs characterizes the I-V performance of the device under test (DUT) at various gate voltages. In this test, the gate of the device is held at a constant voltage while the voltage on the drain (or collector) of the device is swept and current is measured. This process is repeated for several different gate voltages, and the resulting data is plotted to show a series of I-V curves for the device. The following figure illustrates an example of this plot for a power MOSFET device.

Figure 15: Example set of IV curves for a power MOSFET device

Ids (amperes)

Vgs = 5.00 Vgs = 6.00 Vgs = 7.00 Vgs = 8.00 Vgs = 9.00

0 2 4 6 8 10 12

Vds (volts)

Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual

To avoid device self-heating, this test is usually performed using pulsed measurements. This method pulses voltage across the device for a short duration. During this pulse, after the pulse has settled, the current is measured. The duration of the pulse and the duty cycle in which the pulses are applied to the device are controlled, minimizing self-heating. A single Model 2651A High Power System SourceMeter

Instrument can pulse-measurement test with precision timing at currents up to 50 A

and pulse widths as low as 100 µs.

This example demonstrates how to perform pulsed measurements and collect I-V curves using the Model 2651A High Power System SourceMeter

could be used to test IGBTs.

Equipment needed for this example

To run this test, you will need the following equipment:

• Model 2651A High Power System SourceMeter

• Series 2600A System SourceMeter

• TSP-Link

cable (Keithley Instruments part number CA-180-3A)

Instrument (see NOTE)

• GPIB cable or Ethernet cable to connect the Model 2651A to a computer

• Additional cable and connector assemblies as required to make connections to the device under

test (DUT) (for example, Model 2651A-KIT and Model 2600-KIT); see Device connections page 6-4) for a schematic of required connections

NOTE

For this application, Series 2600A System SourceMeter® Instrument refers to any of the following instrument models: Models 2601A/2602A, 2611A/2612A, or 2635A/2636A.

Instrument on a MOSFET. The same procedure

Instrument

(on

Set up communication

The communication setup is illustrated in the following diagram. GPIB is used as an example, but this application can be run using any of the supported communication interfaces for the instruments. A TSP-Link Series 2600A (on TSP-Link node 2) are sent over the TSP-Link interface.

6-2 2651A-900-01 Rev. A / March 2011

connection enables communication between the two instruments. Commands for the

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes

Figure 16: GPIB communication overview

GPIB

Model 2651A

(TSP-Link Node #1)

TSP-Link

Controller

Series 26xxA*

(TSP-Link Node #2)

* Model 260xA, Model 261xA, or Model 263xA

When using the TSP-Link communication interface, each instrument must have a unique TSP-Link node number. Configure the node number for the:

• Model 2651A to 1

• Series 2600A to 2

To set the TSP-Link node number using the front-panel interface:

1. Press the MENU key.

2. Select TSPLink.

3. Select NODE.

4. Use the navigation wheel

5. Press the ENTER key to save the TSP-Link node number.

to adjust the node number.

On the Model 2651A SMU #1 (TSP-Link node #1), perform a TSP-Link reset to update it with the linked instruments:

1. Press the MENU key.

2. Select TSPLink.

3. Select RESET.

NOTE

If error 1205 is generated during the TSP-link reset, ensure that the Series 2600A has a unique TSP-Link node number.

Quick Tip

You can also perform a TSP-Link reset from the remote command interface by sending tsplink.reset() to the Model 2651A. This method is used in the example program.

2651A-900-01 Rev. A / March 2011 6-3

Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual

Device connections

To run the test, make the connections as illustrated in the following figure. To ensure good contact, use care when making connections.

NOTE

For best results, all connections should be left floating (no connections should be tied to ground).

Figure 17: Connections for IV curve characterization

Model 2651A

(master node #1)

Equivalent

SENSE/GUARD

GGGG

OUTPUT

LO HI

40V, 50A MAX.

HI S HI

SMU

(subordinate

node #2)

LO S LO

Gate resistor

(if required)

S HI

SMU

(master

node #1)

LO S LO

S HI

Series 26xxA*

(subordinate node #2)

N-Channel

power

MOSFET

S LO

LO G HI G G G

S HI

Gate resistor

(if required)

S LO

* Model 260xA, Model 261xA, or Model 263xA

NOTE

During high-current pulsing through the channel of the device, the gate may begin to oscillate. This oscillation creates an unstable voltage on the gate, which may cause unstable measurements through the device channel. You can install a resistor to dampen this oscillation and stabilize the gate. Install the resistor between the gate of the device and the force and sense HI of the Model 2651A. If the gate still remains unstable, enable High-C mode on the Model 2651A source-measure unit (SMU).

6-4 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes

Configuring the trigger model

Correctly configuring the trigger model allows you to achieve pulsed measurements with precise timing and current levels up to 50 A on the Model 2651A. The following figure illustrates this test's overall trigger model configuration, including the interactions between the Model 2651A and the Series 2600A instrument. Refer to the Example program code of this trigger model.

In this example, the trigger model of each instrument is configured to perform a linear sweep.

The Series 2600A is configured to sweep the voltage applied to the gate of the device.

The Model 2651A is configured to sweep the voltage across the drain (or collector) of the device. The Model 2651A is configured to repeat its sweep and will do so as many times as there are steps in the sweep of the Series 2600A.

For example, if the Model 2651A instrument’s sweep contains four points and the Series 2600A instrument’s sweep contains three points, the Model 2651A instrument’s sweep will run three times, for a total of 12 points. To synchronize the sweeps between instruments, the trigger lines of the TSP-

interface are used. The following figure illustrates the 12-point sweep example.

Link

(on page 6-10) for an implementation

Figure 18: SMU output from configured trigger model

Gate

(Series 26xxA)

Drain

or Collector

(Model 2651A)

2651A-900-01 Rev. A / March 2011 6-5

Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual

Figure 19: Trigger model configuration for IV curve characterization

Model 2651A (master)

node[1].

trigger.timer[1].

stimulus

passthrough = true

trigger.timer[2].

stimulus

passthrough = false

0.03 s

0.001 s

EVENT_ID

count = 20

EVENT_ID

count = 1

smua.trigger.

Idle

Arm layer

arm.stimulus

Trigger layer

source.stimulus

measure.stimulus

endpulse.stimulus

IDLE_EVENT_ID

SWEEPING_EVENT_ID

arm.count = 5

SWEEP_COMPLETE_EVENT_ID

ARMED_EVENT_ID

count = 21

SOURCE_COMPLETE_EVENT_ID

MEASURE_COMPLETE_EVENT_ID

PULSE_COMPLETE_EVENT_ID

tsplink.trigger[1].

mode = tsplink.TRIG_SYNCHRONOUSM

tsplink.trigger[2].

mode = tsplink.TRIG_FALLING

Series 26xxA (subordinate)*

node[2].

tsplink.trigger[1].

mode = tsplink.TRIG_SYNCHRONOUSA

tsplink.trigger[2].

mode = tsplink.TRIG_FALLING

EVENT_ID

stimulus

EVENT_ID

stimulus

EVENT_ID

stimulus

EVENT_ID

stimulus

smua.trigger.

Idle

Arm layer

arm.stimulus

Trigger layer

source.stimulus

measure.stimulus

endpulse.stimulus

IDLE_EVENT_ID

SWEEPING_EVENT_ID

arm.count = 1

SWEEP_COMPLETE_EVENT_ID

ARMED_EVENT_ID

count = 5

SOURCE_COMPLETE_EVENT_ID

MEASURE_COMPLETE_EVENT_ID

PULSE_COMPLETE_EVENT_ID

* Model 260xA, Model 261xA, or Model 263xA

6-6 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes

Model 2651A trigger model operation

The following figure illustrates this test's Model 2651A trigger model configuration.

Figure 20: Model 2651A trigger model for IV curve characterization

Model 2651A (master)

node[1].

trigger.timer[1].

stimulus

passthrough = true

trigger.timer[2].

stimulus

passthrough = false

0.03 s

0.001 s

EVENT_ID

count = 20

EVENT_ID

count = 1

smua.trigger.

Idle

Arm layer

arm.stimulus

Trigger layer

source.stimulus

measure.stimulus

endpulse.stimulus

IDLE_EVENT_ID

SWEEPING_EVENT_ID

arm.count = 5

SWEEP_COMPLETE_EVENT_ID

ARMED_EVENT_ID

count = 21

SOURCE_COMPLETE_EVENT_ID

MEASURE_COMPLETE_EVENT_ID

PULSE_COMPLETE_EVENT_ID

tsplink.trigger[1].

mode = tsplink.TRIG_SYNCHRONOUSM

tsplink.trigger[2].

mode = tsplink.TRIG_FALLING

EVENT_ID

stimulus

EVENT_ID

stimulus

TSP-Link bus

2651A-900-01 Rev. A / March 2011 6-7

Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual

When the configured trigger model of the Model 2651A is initiated, the following occurs:

1. The source-measure unit (SMU) trigger model passes through the Arm Layer, enters the Trigger

Layer, then outputs the ARMED event trigger.

2. The ARMED event trigger triggers TSP-Link

trigger 1, which outputs a trigger on TSP-Link line 1.

This trigger is meant to tell the Series 2600A that it should step the gate SMU.

3. The SMU trigger model continues until it reaches the Source Event and then pauses and waits for

an event trigger.

4. A trigger comes back on TSP-Link trigger 1, indicating that the gate step is complete. An event

trigger is output from TSP-Link trigger 1 and input to timer 1.

5. Timer 1 receives the event trigger and begins its countdown while simultaneously passing the

event trigger.

6. The SMU Source Event Detector receives the event trigger from timer 1, sets the SMU output to

the pulse level, waits for a programmed source delay (if any), and outputs the SOURCE_COMPLETE event to timer 2.

7. Timer 2 receives the SOURCE_COMPLETE event trigger and begins its countdown.

8. The SMU trigger model moves to the Measure Event, where it waits for a programmed measure

delay (if any), then takes a measurement.

9. The SMU trigger model moves to the End Pulse Event, where it stops and waits for an event

trigger from timer 2.

10. The timer 2 countdown expires and outputs an event trigger to the SMU End Pulse Event.

11. The End Pulse Event Detector receives the event trigger from timer 2, sets the SMU output to the

bias level, and then continues.

12. The trigger model checks the current Trigger Layer iteration number against the trigger count.

• If the iteration number is less than the trigger count, the trigger model stays in the trigger layer and wraps around to the Source Event, where it waits again for an event trigger from timer 1 (as it did in step

3). This time, however, timer 2 will not receive an event trigger from TSP-Link trigger 1. Despite this, the trigger model will continue running because the timer 1 count was set to one less than the trigger count. Therefore, timer 1 will continue outputting event triggers while the trigger model is in the Trigger Layer, outputting one trigger event every time the countdown expires. The trigger model continues as described in step 6.

• If the iteration number is greater than the trigger count, the SMU trigger model exits the Trigger Layer and goes into the Arm Layer.

13. Upon entering the Arm Layer, the SMU trigger model outputs the SWEEP_COMPLETE event trigger.

14. TSP-Link trigger 2 receives the SWEEP_COMPLETE event trigger and outputs a trigger on TSPLink line 2. This trigger is meant to signal the Series 2600A that it is acceptable to continue, and it no longer needs to hold the current gate level.

15. The trigger model checks the current Arm Layer iteration number against the arm count.

• If the iteration number is less than the arm count, the trigger model stays in the Arm Layer and begins

the entire process again from step 1.

• If the iteration number is greater than the arm count, the trigger model continues, exits the Arm Layer,

and returns to an iIdle state.

6-8 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes

Series 26xxA instrument's trigger model operation

The following figure illustrates the Series 26xxA trigger model configuration for this test.

Figure 21: Series 26xxA instrument's trigger model for IV curve characterization

TSP-Link bus

Series 26xxA (subordinate)*

node[2].

tsplink.trigger[1].

mode = tsplink.TRIG_SYNCHRONOUSA

tsplink.trigger[2].

mode = tsplink.TRIG_FALLING

EVENT_ID

stimulus

EVENT_ID

stimulus

smua.trigger.

Idle

Arm layer

arm.stimulus

Trigger layer

source.stimulus

measure.stimulus

endpulse.stimulus

IDLE_EVENT_ID

SWEEPING_EVENT_ID

arm.count = 1

SWEEP_COMPLETE_EVENT_ID

ARMED_EVENT_ID

count = 5

SOURCE_COMPLETE_EVENT_ID

MEASURE_COMPLETE_EVENT_ID

PULSE_COMPLETE_EVENT_ID

* Model 260xA, Model 261xA, or Model 263xA

When the configured trigger model of the Series 2600A instrument is initiated, the following occurs:

1. The source-measure unit (SMU) trigger model passes through the Arm Layer, enters the Trigger Layer, reaches the Source Event, pauses, and then waits for an event trigger from TSP-Link

trigger 1.

2. A TSP-Link trigger is received by TSP-Link trigger 1. Because TSP-Link trigger 1 is configured as a synchronous acceptor, it latches the line low and outputs an event trigger to the SMU Source Event.

3. The SMU Source Event Detector receives the event trigger from TSP-Link trigger 1, sets the SMU output to the step level, waits a programmed source delay (if any) and continues.

4. The SMU trigger model moves to the Measure Event, where it waits a programmed measure delay (if any), takes a measurement, and then outputs the MEASURE_COMPLETE event trigger.

5. TSP-Link trigger 1 receives the MEASURE_COMPLETE event trigger and releases the TSP-link trigger line, telling the Model 2651A that it has completed its step and that the Model 2651A may begin its sweep.

6. The SMU trigger model moves to the End Pulse Event, where it stops and waits for an event trigger from TSP-Link trigger 2.

7. A TSP-Link trigger is received by TSP-Link trigger 2, indicating that the Model 2651A instrument sweep has completed and it is safe to go to the next step. TSP-Link trigger 2 outputs an event trigger to the SMU End Pulse Event Detector.

8. The SMU End Pulse Event Detector receives an event trigger from TSP-Link trigger 2, completes

2651A-900-01 Rev. A / March 2011 6-9

the End Pulse Action, and then continues.

Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual

9. The trigger model checks the current Trigger Layer iteration number against the trigger count.

• If the iteration number is less than the trigger count, the trigger model stays in the trigger layer and

wraps around to the Source Event, where it waits again for an event trigger from TSP-Link Trigger 1. The trigger model repeats from step 2.

• If the iteration number is greater than the trigger count, the SMU trigger model exits the Trigger Layer

and goes into the Arm Layer.

10. Because the arm count is set to 1, the trigger model exits the Arm Layer and returns to an idle state.

Example program code

NOTE

The following is a Test Script Processor (TSP®) script that performs a series of sweeps to collect I-V curve data for power MOSFETs and IGBT devices. The script contains all the code necessary to:

• Initialize the TSP-Link

connection

• Configure the output and trigger models of the source-measure unit (SMU), as described in the

previous section

• Prepare the reading buffers

• Execute the test

• Return the collected data in a format that can be copied from the instrument console and pasted

into Microsoft

The script contains comments that describe what is being performed by the lines of code and documents the functions in the script.

Lines starting with node[2]. are commands that are being sent to the Series 26xxA through the TSP-Link interface. All other commands are executed on the Model 2651A.

Excel®

6-10 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes

--[[ Title: IV Curves Example Script Description: This script will perform a series of IV curves on a MOSFET or IGBT device and will return the data in a Microsoft Excel compatible format for graphing and analysis.

TSP-Link Configuration: Node 1: 2651A Node 2: 26xxA

Master Node: Node 1 ]]

--[[ IV_Curves(gstart, gstop, gsteps, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit)

Description: This function will perform a series of pulsed sweeps on a MOSFET or IGBT device to generate a series of IV Curves that characterize the device. Note: To avoid device oscillations, a series resistor on the gate terminal of the device may be required.

Parameters: gstart: The starting voltage of the gate sweep gstop: The ending voltage of the gate sweep gsteps: The number of steps in the gate sweep dstart: The starting voltage of the drain sweep dstop: The ending voltage of the drain sweep dsteps: The number of steps in the drain sweep pulseWidth: The width of the drain pulse in seconds pulsePeriod: The time in seconds between the start of consecutive drain pulses in the sweep pulseLimit: The current limit in amperes of the drain pulse

Example Usage: IV_Curves(5, 9, 5, 0, 10, 21, 300e-6, 30e-3, 50)

--]]

function IV_Curves(gstart, gstop, gsteps, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit) reset() tsplink.reset(2) -- Verify that at least two nodes are present

-- Configure the Drain SMU(2651A)

-------------------------------- smua.reset() smua.source.func = smua.OUTPUT_DCVOLTS smua.sense = smua.SENSE_REMOTE

smua.source.rangev = math.max(math.abs(dstart), math.abs(dstop))

-- Select the source range that is large enough to fit all values of the sweep smua.source.levelv = 0 -- Sets the drain bias level smua.source.limiti = 5

smua.measure.rangev = smua.source.rangev smua.measure.rangei = (pulseLimit == "off") and 50 or pulseLimit

-- Select a measure range large enough to fit pulses up to the current limit

2651A-900-01 Rev. A / March 2011 6-11

Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual

smua.measure.autozero = smua.AUTOZERO_ONCE smua.measure.nplc = 0.001

-- NPLC can be increased to improve measurement accuracy.

-- However, it should remain small enough to fit the measurement

-- within the width of the settled part of the pulse. smua.measure.delay = (pulseWidth - ((1/localnode.linefreq) * smua.measure.nplc)) - 50e-6

-- Set the measure delay so that the measurement is

-- taken at the end of the pulse before the falling edge

-- Timer 1 controls the pulse period trigger.timer[1].count = (dsteps <= 1) and 1 or (dsteps - 1)

-- If dsteps <= 1 then use 1 for the count else use dsteps - 1 trigger.timer[1].delay = pulsePeriod trigger.timer[1].passthrough = true trigger.timer[1].stimulus = tsplink.trigger[1].EVENT_ID trigger.timer[1].clear()

-- Configure Drain SMU(2651A) trigger model smua.trigger.source.linearv(dstart, dstop, dsteps) smua.trigger.source.limiti = pulseLimit smua.trigger.measure.action = smua.ENABLE smua.trigger.measure.iv(smua.nvbuffer1, smua.nvbuffer2) smua.trigger.endpulse.action = smua.SOURCE_IDLE smua.trigger.endsweep.action = smua.SOURCE_IDLE smua.trigger.arm.count = gsteps smua.trigger.count = dsteps smua.trigger.arm.stimulus = 0 smua.trigger.source.stimulus = trigger.timer[1].EVENT_ID smua.trigger.measure.stimulus = 0 smua.trigger.endpulse.stimulus = trigger.timer[2].EVENT_ID smua.trigger.source.action = smua.ENABLE

-- Configure TSP-Link Triggers tsplink.trigger[1].clear() tsplink.trigger[1].mode = tsplink.TRIG_SYNCHRONOUSM tsplink.trigger[1].stimulus = smua.trigger.ARMED_EVENT_ID

-- TSP-Link Trigger 1 is used by the 2651A to command the 26xxA

-- to step the gate and for the 26xxA to report to the 2651A

-- that it has completed the step.

tsplink.trigger[2].clear() tsplink.trigger[2].mode = tsplink.TRIG_FALLING tsplink.trigger[2].stimulus = smua.trigger.SWEEP_COMPLETE_EVENT_ID

-- TSP-Link Trigger 2 is used by the 2651A to command the 26xxA

-- that it has completed the drain sweep and that the 26xxA continue.

6-12 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes

-- Prepare the Drain SMU (2651A) reading buffers smua.nvbuffer1.clear() smua.nvbuffer1.collectsourcevalues = 1 smua.nvbuffer1.fillmode = smua.FILL_ONCE smua.nvbuffer2.clear() smua.nvbuffer2.collectsourcevalues = 1 smua.nvbuffer2.fillmode = smua.FILL_ONCE

-- Configure the Gate SMU(26xxA)

------------------------------- node[2].smua.reset() node[2].smua.source.func = node[2].smua.OUTPUT_DCVOLTS node[2].smua.sense = node[2].smua.SENSE_REMOTE node[2].smua.source.levelv = 0 node[2].smua.source.limiti = 100e-3 node[2].smua.measure.delay = 300e-6

-- Give gate 300us to settle

-- Do not need to configure any additional measure settings.

-- Timing is not critical on the gate so autorange will do.

node[2].smua.source.highc = node[2].smua.DISABLE

-- If you find the gate to be unstable even with a gate resistor

-- in place, changing highc to node[2].smua.ENABLE can improve stability.

-- Configure Gate SMU(26xxA) Trigger Model node[2].smua.trigger.source.linearv(gstart, gstop, gsteps) node[2].smua.trigger.source.limiti = 100e-3 node[2].smua.trigger.measure.action = node[2].smua.ENABLE node[2].smua.trigger.measure.iv(node[2].smua.nvbuffer1, node[2].smua.nvbuffer2) node[2].smua.trigger.endpulse.action = smua.SOURCE_HOLD node[2].smua.trigger.endsweep.action = smua.SOURCE_IDLE node[2].smua.trigger.count = gsteps node[2].smua.trigger.arm.stimulus = 0 node[2].smua.trigger.source.stimulus = node[2].tsplink.trigger[1].EVENT_ID node[2].smua.trigger.measure.stimulus = 0 node[2].smua.trigger.endpulse.stimulus = node[2].tsplink.trigger[2].EVENT_ID node[2].smua.trigger.source.action = smua.ENABLE

-- Configure Model 26xxA TSP-Link Triggers node[2].tsplink.trigger[1].clear() node[2].tsplink.trigger[1].mode = node[2].tsplink.TRIG_SYNCHRONOUSA node[2].tsplink.trigger[1].stimulus = node[2].smua.trigger.MEASURE_COMPLETE_EVENT_ID

node[2].tsplink.trigger[2].clear() node[2].tsplink.trigger[2].mode = node[2].tsplink.TRIG_FALLING

2651A-900-01 Rev. A / March 2011 6-13

Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual

-- Prepare the Gate SMU (26xxA) reading buffers node[2].smua.nvbuffer1.clear() node[2].smua.nvbuffer1.collectsourcevalues = 1 if node[2].smua.nvbuffer1.fillmode ~= nil then node[2].smua.nvbuffer1.fillmode = node[2].smua.FILL_ONCE end node[2].smua.nvbuffer2.clear() node[2].smua.nvbuffer2.collectsourcevalues = 1 if node[2].smua.nvbuffer1.fillmode ~= nil then node[2].smua.nvbuffer1.fillmode = node[2].smua.FILL_ONCE end

-- The SMUs are configured and ready to run the test

-- Outputs on node[2].smua.source.output = node[2].smua.OUTPUT_ON smua.source.output = smua.OUTPUT_ON if errorqueue.count > 0 then print("Errors were encountered") reset() return end

-- Start the 26xxA trigger model node[2].smua.trigger.initiate()

-- Start the 2651A trigger model smua.trigger.initiate()

waitcomplete() -- Wait until the sweeps are complete

-- Outputs off smua.source.output = smua.OUTPUT_OFF node[2].smua.source.output = node[2].smua.OUTPUT_OFF

-- Return the data PrintIVcurveData(gsteps, dsteps) end

6-14 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes

--[[ PrintIVcurveData(gsteps, dsteps)

Description: This function will output the data collected by the IV_Curves() function in a Microsoft Excel compatible format. For each step of the gate, this function will output three columns that contain the drain sweep data and the gate data in the first row.

Parameters: gsteps: The number of steps in the gate sweep dsteps: The number of steps in the drain sweep

Example Usage: PrintIVcurveData(5, 21)

--]] function PrintIVcurveData(gsteps, dsteps) line1 = "" line2 = "" for i = 1,gsteps do line1 = line1 .. string.format("Vgs = %0.2f\t%g\t%g\t", node[2].smua.nvbuffer1.sourcevalues[i], node[2].smua.nvbuffer2[i], node[2].smua.nvbuffer1[i]) line2 = line2 .. "Source Value\tVoltage\tCurrent\t" end print(line1) print(line2) for i = 1, dsteps do line = "" for j = 1, gsteps do line = line .. string.format("%g\t%g\t%g\t", smua.nvbuffer1.sourcevalues[(j - 1) * dsteps + i], smua.nvbuffer2[(j - 1) * dsteps + i], smua.nvbuffer1[(j - 1) * dsteps + i]) end print(line) end end

2651A-900-01 Rev. A / March 2011 6-15

Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual

Example program usage

The functions of this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script. A test can be executed by calling the function IV_Curves(gstart, gstop, gsteps, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit) with the appropriate values passed to it in its parameters.

IV_Curves() parameters

Parameter Units Description

gstart

gstop

gsteps

dstart

dstop

dsteps

pulseWidth

pulsePeriod

pulseLimit

An example call to this function is as follows:

IV_Curves(5, 9, 5, 0, 10, 21, 300e-6, 30e-3, 50)

Volts The level of the first step in the gate sweep

Volts The level of the last step in the gate sweep

Volts The number of steps in the gate sweep

Volts The level of the first step in the drain/collector sweep

Volts The level of the last step in the drain/collector sweep

Not applicable

Seconds The width of the pulse in the drain/collector sweep

Seconds The time between the start of consecutive pulses in the

Amperes The current limit of the pulses in the drain/collector sweep

The number of steps in the drain/collector sweep

drain/collector sweep

This call sweeps the drain of the device from 0 V to 10 V in 21 points. The points of this sweep are gathered using pulsed measurements with a pulse width of 300 µs and a pulse period of 30 ms for a 1 percent duty cycle. These pulses are limited to a maximum of 50 A. This sweep is performed at five different gate voltages, starting with 5 V and ending at 9 V. The resulting data from this test will be returned in a Microsoft

Excel® compatible format (you can cut and paste the output from the console)

that can be used for graphing and analysis.

6-16 2651A-900-01 Rev. A / March 2011

Increasing SMU current sourcing ability

In this section:

Introduction to combining SMUs .............................................. 7-1

Combining SMUs to increase current sourcing capability ........ 7-2

Equipment needed for this example......................................... 7-3

Set up communication.............................................................. 7-3

Device connections .................................................................. 7-4

Configuring the trigger model ................................................... 7-6

Example program code ............................................................ 7-9

Example program usage ........................................................ 7-16

Introduction to combining SMUs

Section 7

A common test performed on power MOSFETs characterizes the resistance of the device under test (DUT). In this test, the gate of the DUT is held at a constant voltage (representing the on-state of the device) while a current is swept through the drain and the voltage is measured. The resulting data can be plotted to show drain current versus Rds(on) for the DUT. The following figure is an example of this plot.

Figure 22: Example Rds(on) curves for a power MOSFET device

0.02

0.019

0.018

0.017

0.016

0.015

Rds(on)

0.014

0.013

0.012

0.011

0.01 0 10 20 30 40 50 60 70 80 90 100

Ids (amperes)

Vgs = 10 V Vgs = 6 V

Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual

To avoid device self-heating, this test is usually performed using pulsed measurements. This method pulses current across the device for a short duration. During this pulse (after the pulse has settled), the voltage is measured. The duration of the pulse and the duty cycle in which the pulses are applied to the device are controlled, minimizing self-heating. A single Model 2651A High Power System SourceMeter

Instrument can pulse-measurement test with precision timing at currents up to 50 A

and pulse widths as low as 100 µs.

To increase the pulse output, you can combine two Model 2651A High Power System SourceMeter Instruments to output a pulse that is greater than that of a single Model 2651A. This example demonstrates how to perform an Rds(on) sweep up to 100 A using two Model 2651A High Power System SourceMeter

Instruments.

Combining SMUs to increase current sourcing capability

CAUTION

Carefully consider and configure the appropriate output-off state, source, and compliance levels before connecting the Model 2651A High Power System SourceMeter® Instrument to a device that can deliver energy (for example, other voltage sources, batteries, capacitors, solar cells, or other Series 2600A System SourceMeter® instruments). Program recommended instrument settings before making connections to the device. Failure to consider the output-off state, source, and compliance levels may result in damage to the instrument or to the device under test (DUT).

To combine two Model 2651A High Power System SourceMeter® Instruments to output a pulse that is greater than that of a single instrument, the current sources are connected in parallel. This delivers the sum of the currents to the DUT, which allows a sweep of the DUT up to 100 A. The following figure illustrates this principle of combining current sources.

Figure 23: Sum of parallel current sources

I1+I

DUT

Because each Model 2651A can produce up to 50 A, placing the instruments in parallel can deliver up to 100 A. In this example, we will sweep the DUT using each Model 2651A to source exactly half of the desired total current level for each point in the sweep.

7-2 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability

Equipment needed for this example

To run this test, you will need the following equipment:

• Two Model 2651A High Power System SourceMeter

• One Series 2600A System SourceMeter

SourceMeter 2611A/2612A, or 2635A/2636A.

• Two TSP-Link

Instrument refers to any of the following instrument models: Models 2601A/2602A,

cables (Keithley Instruments part number CA-180-3A)

• One GPIB cable or Ethernet cable to connect one Model 2651A to a computer

• Additional cable and connector assemblies as required to make connections to the device under

test (DUT) (for example, Model 2651A-KIT and Model 2600-KIT); see Device connections page 7-4) for a schematic of required connections

The Model 2651A High Power System SourceMeter® Instruments must be at the same firmware revision.

Set up communication

The communication setup is illustrated in the following diagram. GPIB is used as an example, but this application can be run using any of the supported communication interfaces for the instruments. A TSP-Link Model 2651A SMU #2 (node #2) and the Series 2600A SMU #3 (node #3) are sent over the TSP-Link interface.

connection enables communication between the two instruments. Commands for the

Instruments

Instrument; for this application, Series 2600A System

(on

NOTE

Figure 24: GPIB communication example for Rds(on) sweep

GPIB

Model 2651A SMU #1

(TSP-Link Node #1)

Controller

Model 2651A SMU #2

TSP-Link

* Model 260xA, Model 261xA,

2651A-900-01 Rev. A / March 2011 7-3

or Model 263xA

(TSP-Link Node #2)

Series 26xxA* SMU #3

(TSP-Link Node #3)

Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual

To set the TSP-Link node number using the front-panel interface:

1. Press the MENU key.

2. Select TSPLink.

3. Select NODE.

4. Use the navigation wheel

5. Press the ENTER key to save the TSP-Link node number.

On the Model 2651A SMU #1 (TSP-Link node #1), perform a TSP-Link reset to update it with the linked instruments:

1. Press the MENU key.

2. Select TSPLink.

3. Select RESET.

If error 1205 is generated during the TSP-link reset, ensure that the Series 2600A has a unique TSP-Link node number.

You can also perform a TSP-Link reset from the remote command interface by sending tsplink.reset() to the Model 2651A. This method is used in the example program.

Device connections

to adjust the node number.

NOTE

Quick Tip

To run the test, make the connections as illustrated in the following figure. To ensure good contact, use care when making connections.

CAUTION

7-4 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability

NOTE

For best results, all connections should be left floating (no connections should be tied to ground).

Figure 25: Connections for Rds(on) sweep

Model 2651A

(master node #1)

Model 2651A

(subordinate node #2)

SENSE/GUARD

GGGG

Series 26xxA*

(subordinate node #3)

LO G HI G G G

Gate resistor

(if required)

* Model 260xA, Model 261xA, or Model 263xA

OUTPUT

LO HI

40V, 50A MAX.

S HI S HI

S LO

HIHI

N-Channel

power

MOSFET

S LO

SENSE/GUARD

GGGG

OUTPUT

LO HI

40V, 50A MAX.

Equivalent

HI S HI

SMU

(subordinate

node #3)

S LO LO

Gate resistor

(if required)

S HI

(master, node #1)

S LO

SMU

S HI

SMU

(subordinate,

node #2)

S LO

NOTE

2651A-900-01 Rev. A / March 2011 7-5

Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual

Configuring the trigger model

When the trigger model is correctly configured, you can achieve pulsed measurements with precise timing and current levels up to 100 A for the combined Model 2651A instruments. Refer to the

Example program code

In this trigger model, the master Model 2651A node[1] is configured to control the overall timing of the sweep. Subordinate Model 2651A node[2] is configured to wait for signals from the master Model 2651A node[1] that prompt it to pulse.

In this example, the Series 2600A is controlled by script, so its trigger model is not used.

(on page 7-9) for an implementation of this trigger model.

The following figure illustrates the overall trigger model configuration of this test, which synchronizes the two Model 2651A High Power System SourceMeter

Instruments to within 1 µs to provide a single

100 A pulse.

7-6 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability

Figure 26: Trigger model configuration for Rds(on) sweep

Model 2651A (master)

node[1].

trigger.timer[1].

stimulus

passthrough = true

trigger.timer[2].

stimulus

passthrough = false

tsplink.trigger[1].

mode = tsplink.TRIG_FALLING

50e-3 s

500e-6 s

Model 2651A (subordinate)

node[2].

tsplink.trigger[1].

mode = tsplink.TRIG_FALLING

EVENT_ID

count = 99

EVENT_ID

count = 1

EVENT_ID

stimulus

EVENT_ID

stimulus

smua.trigger.

Idle

Arm layer

arm.stimulus

Trigger layer

source.stimulus

measure.stimulus

endpulse.stimulus

smua.trigger.

Idle

Arm layer

arm.stimulus

Trigger layer

IDLE_EVENT_ID

SWEEPING_EVENT_ID

arm.count = 1

SWEEP_COMPLETE_EVENT_ID

ARMED_EVENT_ID

count = 100

SOURCE_COMPLETE_EVENT_ID

MEASURE_COMPLETE_EVENT_ID

PULSE_COMPLETE_EVENT_ID

IDLE_EVENT_ID

SWEEPING_EVENT_ID

arm.count = 1

SWEEP_COMPLETE_EVENT_ID

ARMED_EVENT_ID

count = 100

source.stimulus

trigger.timer[1].

stimulus

passthrough = false

3e-5 s

EVENT_ID

count = 1

measure.stimulus

endpulse.stimulus

SOURCE_COMPLETE_EVENT_ID

MEASURE_COMPLETE_EVENT_ID

PULSE_COMPLETE_EVENT_ID

2651A-900-01 Rev. A / March 2011 7-7

Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual

Master Model 2651A node[1] trigger model operation

In the master Model 2651A (node[1]) trigger model, timer 1 controls the period of the pulse, while timer 2 controls the pulse width. TSP-Link

trigger 1 prompts Model 2651A (subordinate, node[2]) to

output its pulse.

When the trigger model of the master Model 2651A (node[1]) is initialized, the following occurs:

1. The source-measure unit (SMU) trigger model leaves the idle state, flows through the Arm Layer, enters the Trigger Layer, outputs the ARMED event trigger, and then reaches the Source Event, where it waits for an event trigger.

2. The ARMED event trigger is received by timer 1, which begins its countdown and passes the trigger through to be received by TSP-Link trigger 1, timer 2, and the SMU Source Event Detector.

3. TSP-Link trigger 1 receives the event trigger from timer 1 and sends a trigger through the TSP-Link interface to Model 2651A (subordinate, node[2]) to instruct it to output the pulse.

4. The SMU Source Event Detector receives the event trigger from timer 1, begins to output the pulse, waits the programmed source delay (if any), outputs the SOURCE_COMPLETE event to timer 2, and then allows the SMU trigger model to continue.

5. Timer 2 receives the SOURCE_COMPLETE event trigger from timer 1 and begins to count down.

6. The SMU trigger model continues to the Measure Event, where it waits a programmed measure delay (if any), takes a measurement, and continues until it encounters the End Pulse Event, where it waits for an event trigger.

7. The timer 2 countdown expires and timer 2 outputs an event trigger to the SMU End Pulse Event.

8. The SMU End Pulse Event Detector receives the event trigger from timer 2, outputs the falling edge of the pulse, and allows the SMU trigger model to continue.

9. The SMU trigger model compares the current trigger layer loop iteration with the trigger count.

• If the current iteration is less than the trigger count, the trigger layer repeats and the SMU trigger model

reaches Source Event, where it waits for another trigger from timer 1. Because timer 1 had its count set to one less than the trigger count, timer 1 will continue to output a trigger for each iteration of the Trigger Layer loop. The trigger model then repeats from step 3.

• If the current iteration is equal to the trigger count, the SMU trigger model exits the Trigger Layer,

passes through the Arm Layer, and returns to an idle state.

Model 2651A node[2] trigger model operation

In the Model 2651A instrument (subordinate, node[2]) trigger model, timer 1 controls the pulse width and is programmed with the same delay as timer 2 in the Model 2651A (master, node[1]).

The pulse period is controlled by TSP-Link instrument (master, node[1]) timer 1, so the same timer in the system controls the pulse period.

trigger 1, which gets its triggers from the Model 2651A

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Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability

When the trigger model of Model 2651A (subordinate, node[2]) is initialized, the following occurs:

1. The source-measure unit (SMU) trigger model leaves the idle state, flows through the arm layer, enters the trigger layer, and reaches the Source Event, where it waits for an event trigger.

2. TSP-Link trigger 1 receives a trigger from the TSP-Link interface and outputs an event trigger to the SMU Source Event.

3. The SMU Source Event Detector receives the event trigger from TSP-Link trigger 1, begins to output the pulse, waits the programmed source delay (if any), and outputs the SOURCE_COMPLETE event to timer 1 before allowing the SMU trigger model to continue.

4. Timer 1 receives the SOURCE_COMPLETE event trigger from TSP-Link trigger 1 and begins its countdown.

5. The SMU trigger model continues to the Measure Event, where it waits for a programmed measure delay (if any), takes a measurement, and then continues until it stops at the End Pulse Event, where it waits for an event trigger.

6. The timer 1 countdown expires and timer 1 outputs an event trigger to the SMU End Pulse Event.

7. The SMU's End Pulse Event Detector receives the event trigger from timer 1, outputs the falling edge of the pulse, and then allows the SMU trigger model to continue.

8. The SMU trigger model compares the current trigger layer loop iteration with the trigger count.

• If the current iteration is less than the trigger count, the trigger layer repeats and the SMU trigger model

reaches Source Event, where it waits for another trigger from TSP-Link trigger 1. The trigger model then repeats from step 2.

• If the current iteration is equal to the trigger count, the SMU trigger model exits the trigger layer, passes

through the arm layer, and returns to an idle state.

Series 2600A trigger model operation

In this example, the Series 2600A is controlled by script, so its trigger model is not used.

Example program code

NOTE

2651A-900-01 Rev. A / March 2011 7-9

Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual

The following script contains all the code necessary to perform an Rds(on) sweep up to 100 A using two Model 2651A High Power System SourceMeter SourceMeter

• Initializes the TSP-Link

Instrument. This script:

connection

Instruments and a Series 2600A System

• Configures the source-measure units (SMUs)

• Configures the trigger models of the two Model 2651A instruments

• Prepares the reading buffers

• Executes the test

• Stores the collected data in a format that can be copied from the instrument console and pasted

into a Microsoft

The script contains comments that describe what is being performed by the lines of code and document the functions in the script. Lines starting with node[2]. are commands that are being sent to Model 2651A on node 2 through the TSP-Link interface. Lines starting with node[3]. are commands that are being sent to the Series 2600A through the TSP-Link interface. All other commands are executed on the master Model 2651A on node [1].

--[[ Title: Combining SMUs for 100A Example Description: This script is designed to perform an Rds(on)sweep on a power MOSFET device. It combines two 2651A SMUs in parallel to perform a current sweep up to 100A. Data collected from the sweep is then returned in a Microsoft Excel compatible format for plotting and analysis.

Excel® spreadsheet.

Equipment needed: 2x 2651A 1x 26xxA 2x TSP-Link Cable

TSP-Link Configuration:

---------------------- Unit | Node # 2651A #1 | 1 2651A #2 | 2 26xxA | 3

Master Node (PC Interface): Node 1 ]]

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Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability

--[[ Name: DualSmuRdson(gateLevel, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit) Description: This function uses two 2651A SMUs to perform a pulsed Rds(on) sweep with currents up to 100A.

Parameters: gateLevel: The gate level to be used during the sweep dstart: The starting current level of the drain sweep dstop: The ending current level of the drain sweep dsteps: The number of steps in the drain sweep pulseWidth: The width of the drain pulse in seconds pulsePeriod: The time from the start of one drain pulse to the next in seconds pulseLimit: The voltage limit of the drain pulse in volts Note: Actual pulse limit will be 10% lower than setting to protect SMUs in a compliance condition

Example Usage: DualSmuRdson(10, 1, 100, 100, 500e-6, 50e-3, 10) ]]

function DualSmuRdson(gateLevel, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit) tsplink.reset(3) -- Verify that at least three nodes are present reset()

-- Configure 2651A #1 (Drain SMU 1)

---------------------------------- smua.reset() smua.source.func = smua.OUTPUT_DCAMPS smua.sense = smua.SENSE_REMOTE smua.source.offmode = smua.OUTPUT_NORMAL smua.source.offfunc = smua.OUTPUT_DCVOLTS smua.source.offlimiti = 1e-3 -- Set off limit

-- SMU #1 will be a 0V voltage source with 1mA limit when its

-- output is turned off. SMU #2 will be a 0A current source with

-- a 10V limit when the output is turned off. These settings keep

-- the parallel combination safe in case one SMU is turned off.

smua.source.rangei = math.max(math.abs(dstart / 2), math.abs(dstop / 2)) smua.source.leveli = 0 -- Sets the DC bias level smua.source.limitv = 9 -- Sets the DC bias limit

-- SMU #2 will have a voltage limit of 10V. By setting the voltage

-- limit 10% lower than that of SMU #2, we can ensure that only

-- one of the two SMUs will ever go into compliance and become a

-- voltage source. This is desirable, because if both SMUs went

-- into compliance, there would be two voltage sources in parallel,

-- which is an unsafe condition.

smua.measure.nplc = 0.005 smua.measure.rangev = pulseLimit smua.measure.autozero = smua.AUTOZERO_ONCE smua.measure.delay = pulseWidth - ((1 / localnode.linefreq) * smua.measure.nplc)) - 20e-6

2651A-900-01 Rev. A / March 2011 7-11

Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual

-- Set the delay so that the measurement is near the end of the pulse

-- Prepare the reading buffers smua.nvbuffer1.clear() smua.nvbuffer1.collecttimestamps = 1 smua.nvbuffer1.collectsourcevalues = 1 smua.nvbuffer1.fillmode = smua.FILL_ONCE smua.nvbuffer2.clear() smua.nvbuffer2.collecttimestamps = 1 smua.nvbuffer2.collectsourcevalues = 1 smua.nvbuffer2.fillmode = smua.FILL_ONCE

-- Configure TSP-Link Trigger 1 tsplink.trigger[1].clear() tsplink.trigger[1].mode = tsplink.TRIG_FALLING tsplink.trigger[1].stimulus = trigger.timer[1].EVENT_ID

-- TSP-Link Trigger 1 signals 2651A #2 to pulse

-- Timer 1 controls the pulse period by triggering the pulse to begin trigger.timer[1].count = dsteps - 1 trigger.timer[1].delay = pulsePeriod trigger.timer[1].passthrough = true trigger.timer[1].stimulus = smua.trigger.ARMED_EVENT_ID trigger.timer[1].clear()

-- Configure SMU Trigger Model for Sweep

-- Each unit will source half the current, so divide the start

-- and stop values by 2 smua.trigger.source.lineari(dstart / 2, dstop / 2, dsteps) smua.trigger.source.limitv = pulseLimit - (pulseLimit * 0.1)

-- Again, keep the limit SMU #1 lower than the limit of SMU #2

-- to prevent parallel V-sources smua.trigger.measure.iv(smua.nvbuffer1, smua.nvbuffer2) smua.trigger.measure.action = smua.ENABLE

-- Return to the bias level at the end of the pulse/sweep smua.trigger.endpulse.action = smua.SOURCE_IDLE smua.trigger.endsweep.action = smua.SOURCE_IDLE

smua.trigger.count = dsteps smua.trigger.arm.stimulus = 0 smua.trigger.source.stimulus = trigger.timer[1].EVENT_ID smua.trigger.measure.stimulus = 0 smua.trigger.endpulse.stimulus = trigger.timer[2].EVENT_ID smua.trigger.source.action = smua.ENABLE

7-12 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability

-- Configure 2651A #2 (Drain SMU 2)

---------------------------------- node[2].smua.reset() node[2].smua.source.func = node[2].smua.OUTPUT_DCAMPS node[2].smua.sense = node[2].smua.SENSE_REMOTE node[2].smua.source.offmode = node[2].smua.OUTPUT_NORMAL node[2].smua.source.offfunc = node[2].smua.OUTPUT_DCAMPS node[2].smua.source.offlimitv = 10 -- Set off limit

-- SMU will be a 0A current source with 10V limit when output is turned off node[2].smua.source.rangei = math.max(math.abs(dstart / 2), math.abs(dstop / 2)) node[2].smua.source.leveli = 0 -- Sets the DC bias level node[2].smua.source.limitv = 10 -- Sets the DC bias limit

node[2].smua.measure.nplc = 0.005 node[2].smua.measure.rangev = pulseLimit node[2].smua.measure.autozero = node[2].smua.AUTOZERO_ONCE node[2].smua.measure.delay = (pulseWidth ((1 / node[2].linefreq) * node[2].smua.measure.nplc)) - 20e-6

-- Set the delay so that the measurement is near the end of the pulse

-- Prepare the reading buffers node[2].smua.nvbuffer1.clear() node[2].smua.nvbuffer1.collecttimestamps = 1 node[2].smua.nvbuffer1.collectsourcevalues = 1 node[2].smua.nvbuffer1.fillmode = node[2].smua.FILL_ONCE node[2].smua.nvbuffer2.clear() node[2].smua.nvbuffer2.collecttimestamps = 1 node[2].smua.nvbuffer2.collectsourcevalues = 1 node[2]. smua.nvbuffer2.fillmode = node[2].smua.FILL_ONCE

-- Configure TSP-Link Trigger 1 node[2].tsplink.trigger[1].clear() node[2].tsplink.trigger[1].mode = node[2].tsplink.TRIG_FALLING

-- Timer 1 controls the pulse width node[2].trigger.timer[1].count = 1 node[2].trigger.timer[1].delay = pulseWidth - 3e-6 node[2].trigger.timer[1].passthrough = false node[2].trigger.timer[1].stimulus = node[2].smua.trigger.SOURCE_COMPLETE_EVENT_ID node[2].trigger.timer[1].clear()

-- Configure SMU Trigger Model for Sweep node[2].smua.trigger.source.lineari(dstart / 2, dstop / 2, dsteps) node[2].smua.trigger.source.limitv = pulseLimit node[2].smua.trigger.measure.iv(node[2].smua.nvbuffer1, node[2].smua.nvbuffer2) node[2].smua.trigger.measure.action = node[2].smua.ENABLE

-- Return the output to the bias level at the end of the pulse/sweep node[2].smua.trigger.endpulse.action = node[2].smua.SOURCE_IDLE node[2].smua.trigger.endsweep.action = node[2].smua.SOURCE_IDLE node[2].smua.trigger.count = dsteps node[2].smua.trigger.arm.stimulus = 0 node[2].smua.trigger.source.stimulus = node[2].tsplink.trigger[1].EVENT_ID node[2].smua.trigger.measure.stimulus = 0 node[2].smua.trigger.endpulse.stimulus = node[2].trigger.timer[1].EVENT_ID node[2].smua.trigger.source.action = node[2].smua.ENABLE

2651A-900-01 Rev. A / March 2011 7-13

Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual

-- Configure the 26xxA (Gate SMU)

-------------------------------- node[3].smua.reset() node[3].smua.source.func = node[3].smua.OUTPUT_DCVOLTS node[3].smua.sense = node[3].smua.SENSE_REMOTE node[3].smua.source.levelv = gateLevel node[3].smua.source.highc = node[3].smua.ENABLE

-- If you find your gate oscillating even with a dampening resistor

-- in place, try enabling high-C mode to help stabilize the gate.

-- Prepare the reading buffers node[3].smua.nvbuffer1.clear() node[3].smua.nvbuffer1.collectsourcevalues = 1 if node[3].smua.nvbuffer1.fillmode ~= nil then node[3].smua.nvbuffer1.fillmode = node[3].smua.FILL_ONCE end node[3].smua.nvbuffer2.clear() node[3].smua.nvbuffer2.collectsourcevalues = 1 if node[3].smua.nvbuffer2.fillmode ~= nil then node[3].smua.nvbuffer2.fillmode = node[3].smua.FILL_ONCE end

--------------------------

-- Ready to begin the test

--------------------------

-- Outputs on node[3].smua.source.output = node[3].smua.OUTPUT_ON node[2].smua.source.output = node[2].smua.OUTPUT_ON smua.source.output = smua.OUTPUT_ON

if errorqueue.count > 0 then print("Errors were encountered") reset() return end

-- Give the gate some time to settle before starting the sweep delay(0.001) node[3].smua.measure.iv(node[3].smua.nvbuffer1, node[3].smua.nvbuffer2)

-- Start the 2651A #2 trigger model node[2].smua.trigger.initiate()

-- Start the 2651A #1 trigger model smua.trigger.initiate()

-- Wait until test is complete waitcomplete()

-- Outputs off node[3].smua.source.output = node[3].smua.OUTPUT_OFF smua.source.output = smua.OUTPUT_OFF node[2].smua.source.output = node[2].smua.OUTPUT_OFF

-- Print back data PrintDualSmuRdsonData() end

7-14 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability

--[[ Function: PrintDualSmuRdsonData() Description: This function processes the data stored in the SMU reading buffers by function DualSmuRdson() and prints back the individual SMU data and the combined SMU data and Rds(on) readings in a format that is copy and paste compatible with Microsoft Excel. ]] function PrintDualSmuRdsonData()

-- Print the gate SMU readings print("Gate SMU\r\nSource Value\tVoltage\tCurrent") print(string.format("%0.2f\t%g\t%g\r\n", node[3].smua.nvbuffer1.sourcevalues[1], node[3].smua.nvbuffer2[1], node[3].smua.nvbuffer1[1]))

-- Print column headers print("Timestamp\tSource Value\tVoltage 1\tCurrent 1\tVoltage 2\tCurrent 2\tVoltage\tCurrent\tRds(on)")

-- Loop through the reading buffer printing one row at a time for i = 1,smua.nvbuffer1.n do

-- Combined Source Level = SMU1 source level + SMU2 source level sourceLevel = smua.nvbuffer1.sourcevalues[i] + node[2].smua.nvbuffer1.sourcevalues[i]

-- Combined Voltage = Average(SMU1 Voltage reading, SMU2 Voltage reading) combinedVoltage = (smua.nvbuffer2[i] + node[2].smua.nvbuffer2[i]) / 2

-- Combined Current = SMU1 Current reading + SMU2 Current reading combinedCurrent = smua.nvbuffer1[i] + node[2].smua.nvbuffer1[i]

-- Rds(on) = Combined Voltage / Combined Current rdson = combinedVoltage / combinedCurrent

-- Print a row of data print(string.format("%g\t%g\t%g\t%g\t%g\t%g\t%g\t%g\t%g", smua.nvbuffer1.timestamps[i], sourceLevel, smua.nvbuffer2[i], smua.nvbuffer1[i], node[2].smua.nvbuffer2[i], node[2].smua.nvbuffer1[i], combinedVoltage, combinedCurrent, rdson)) end end

2651A-900-01 Rev. A / March 2011 7-15

Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual

Example program usage

The functions in this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script. A test can be executed by calling the function

DualSmuRdson(gateLevel, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit) with the appropriate values passed to it in its parameters.

DualSmuRdson() parameters

Parameter Units Description

gateLevel

dstart

dstop

dsteps

pulseWidth

pulsePeriod

pulseLimit

An example call to this function is as follows:

DualSmuRdson(10, 1, 100, 100, 500e-6, 50e-3, 10)

Volts The voltage level to hold the gate

Amperes The level of the first step in the drain sweep

Amperes The level of the last step in the drain sweep

Not applicable

Seconds The width of the pulse in the drain sweep

Seconds The time between the start of consecutive pulses in the drain sweep

Volts The voltage limit of the pulses in the drain sweep

The number of steps in the drain sweep

This call will set the gate source-measure unit (SMU) output to 10 V and then sweep the drain of the device from 1 A to 100 A in 100 points. The points of this sweep will be gathered using pulsed measurements with a pulse width of 500 µs and a pulse period of 50 ms for a 1 percent duty cycle. These pulses will be limited to a maximum of 10 V. At the end of the sweep, all SMU outputs will be turned off. The resulting data from this test will be returned in a Microsoft

Excel® compatible format

(you can cut and paste the output from the console) that can be used for graphing and analysis.

7-16 2651A-900-01 Rev. A / March 2011

In this section:

About this section..................................................................... 8-1

Need different line frequency or voltage................................... 8-1

Can I use external trigger lines?............................................... 8-1

The internal web page of the instrument is not accessible ....... 8-1

Save the present state of the instrument.................................. 8-2

LabVIEW driver for the Model 2651A ....................................... 8-2

About this section

The intent of this section is to troubleshoot the most common problems encountered with the Model 2651A. For additional troubleshooting information, please see the "Troubleshooting" section in the Model 2651A Reference Manual.

Section 8

Troubleshooting FAQs

Need different line frequency or voltage

I need to use a Model 2651A at a different line frequency or voltage. What do I need to do?

The Model 2651A supports a line frequency of either 50 Hz or 60 Hz. The factory configures the Model 2651A to automatically detect and operate at line frequencies (either 50 Hz or 60 Hz) each time the instrument power is turned on. In noisy environments, it may be necessary to manually configure the instrument to match the actual line frequency. See the Model 2651A Reference Manual, "Line frequency configuration."

Can I use external trigger lines?

Yes, these signals appear on the digital I/O connector. For information about the digital I/O capabilities, refer to "Controlling digital I/O lines" in the Model 2651A Reference Manual.

The internal web page of the instrument is not accessible

I cannot access the internal web page of the instrument. How do I fix this?

Ensure that the instrument has been assigned a valid and unique IP address.

Section 8: Troubleshooting FAQs Model 2651A High Power System SourceMeter® Instrument User's Manual

• To view the IP address of the Model 2651A, press MENU. Select LAN > STATUS >

IP-ADDRESS. If a valid IP address is displayed, the instrument configuration is correct. If 0.0.0.0

is displayed, the IP address is not valid.

• If you are using the automatic configuration method over a corporate network, contact your

network administrator for assistance.

• If you are using the automatic configuration method and you have a one-to-one connection

between the instrument and the computer, verify that the computer is set to receive an IP address automatically.

• If you are using the manual configuration method over a corporate network, verify that you have

entered the IP address, gateway, and subnet mask provided by your network administrator.

• If you are using the manual configuration method and a one-to-one connection with the computer,

verify that the subnet mask agrees with the computer's settings.

• If the above suggestions do not work, see the Model 2651A Reference Manual, "Communication

interfaces."

Save the present state of the instrument

How do I save the present state of the instrument?

You can save the present state of the instrument using the front-panel menus or from a command interface. See the Model 2651A Reference Manual, "User setups."

LabVIEW driver for the Model 2651A

Where do I find the LabVIEW driver for the Model 2651A?

8-2 2651A-900-01 Rev. A / March 2011

In this section:

Additional Model 2651A information......................................... 9-1

Additional Model 2651A information

This manual has prepared you to start using your new Model 2651A for your real-world applications. For more detailed information about the Model 2651A, refer to the Keithley Instruments Model 2651A Reference Manual, part number 2651A-901-01.

For additional information on the Model 2651A, refer to:

• The Product Information CD-ROM (ships with the product): Contains software tools, drivers, and

product documentation, including documentation for switch cards that are compatible with the Model 2651A

Section 9

Next steps

•

• The Knowledge Center, which contains the following handbooks:

• The Low Level Measurements Handbook: Precision DC Current, Voltage, and Resistance

Measurements

• Switching Handbook: A Guide to Signal Switching in Automated Test Systems

• Application notes

• Updated drivers

• Information on related products, including:

• The Model 4200-SCS Semiconductor Characterization System

• The Series 2600A System SourceMeter

Instruments

• Your local Field Applications Engineer can help you with product selection, configuration, and

usage. Check the website for contact information.

Index

Action keys

RECall • 2-2 STORE • 2-2

Communication

Set up • 5-1, 6-2, 7-3

Compliance

Setting front panel compliance limit • 4-2

Connections

Device • 4-1, 5-2, 6-4, 7-4

Current

Increase sourcing capability • 7-1, 7-2

Curves

Example test script • 6-10, 6-16 I-V curves • 6-1, 6-4, 6-5, 6-6, 6-7, 6-9 IV_Curves() parameters • 6-16

Delete script • 3-6 Discovery Browser, LXI • 3-1 Display

Observing readings • 3-7, 4-3 Documentation • 1-2 Download

Reading buffer • 3-7 DualSmuRdson() • 7-16

Examples

Combining SMUs for 100 A current sweep • 7-9,

7-16

Fast-sampling ADC • 5-4, 6-10, 6-16 Exercises

Create and run script with TSB Embedded • 3-4

Retrieve readings from buffer • 3-7 Export script • 3-6

Fast ADC

CapturePulseI() • 5-9

CapturePulseV() • 5-9

Communication setup • 6-2

Device connections • 6-4

Example program code • 6-10, 6-16

High power pulse • 5-1

Trigger model • 5-2

Waveforms, capturing • 5-1

Front panel • 2-1

Compliance limit • 4-2 Indicators • 2-2 Interface • 2-1 Measurements • 4-1, 4-2 Output, on/off • 4-2 Readings • 4-3 Source-measure procedure • 4-2 Using • 2-1

Functions

CapturePulseI() • 5-9 CapturePulseV() • 5-9 DualSmuRdson() • 7-16 IV_Curves() • 6-16 Selecting • 4-2

Import script • 3-6 Indicators • 2-2 IP address • 3-2, 8-1 I-V

Curves • 6-1, 6-4, 6-5, 6-6, 6-7, 6-9 Performance characterization • 6-1, 6-4

IV_Curves() • 6-16

Java plug-in • 3-1

Keypad • 2-4 Keys

CONFIG • 2-2 DIGITS • 2-2 DISPLAY • 2-2 ENTER • 2-2 EXIT • 2-2 FILTER • 2-2 LIMIT • 2-2 LOAD • 2-2 MEAS • 2-2 MENU • 2-2 MODE • 2-2 Number keys • 2-2 RECall • 2-2 REL • 2-2 RUN • 2-2 SPEED • 2-2 SRC • 2-2 STORE • 2-2

2651A-900-01 Rev. A / March 2011 Index-1

Index Model 2651A High Power System SourceMeter® Instrument User's Manual

TRIG • 2-2 Selecting auto • 4-2

LabVIEW drivers • 8-2 Linear sweep • 6-5 LXI Discovery Browser • 3-1

Downloading from website • 3-1

Reading buffer • 3-7

Downloading • 3-7

Reading buffers • 3-7

Displaying readings • 3-7

Readings

Display • 4-3 Observing • 3-7, 4-3

Manuals • 1-2 Measure

Simultaneous current and voltage • 5-1 Measurement

Fast-sampling ADC • 5-1

Front panel • 4-1, 4-2

Function, selecting • 4-2

Range, selecting • 4-2

Waveforms • 5-1

Navigation wheel • 2-2, 2-3 NBTI • 5-1 Node

TSP-Link • 6-2 Number keys • 2-2

Operation keys

ENTER • 2-2

EXIT • 2-2

FILTER • 2-2

LIMIT • 2-2

LOAD • 2-2

MENU • 2-2

RECall • 2-2

REL • 2-2

RUN • 2-2

TRIG • 2-2 Oscillation • 6-4 Output enable • 4-2 OUTPUT ON/OFF control • 2-2, 4-2, 4-3

Parameters

CapturePulseI() • 5-9

CapturePulseV() • 5-9 Plug-in, Java • 3-1 Power

Discrete I-V curve testing • 6-1 Pulses

High power (pulses) • 5-1

Range

Scripts

CapturePulseI() • 5-9 CapturePulseV() • 5-9 Clearing • 3-6 Create in TSB Embedded • 3-3, 3-4 Deleting • 3-6 Examples • 5-4, 5-9, 7-9, 7-16 Exporting • 3-6 Fast ADC • 6-10, 6-16 Importing • 3-6 Management • 3-6 Stopping • 3-6 Viewing • 3-6

SMU

Combining to increase current sourcing • 7-1

Source

Level • 4-2

Speed

Fast-sampling ADC • 5-1

Sweep

Parameters, adjust • 6-16 Voltage • 6-5

Test Script Processor • 6-10 Tests

Discrete I-V curve • 6-1

Trigger model

Configuring • 5-2, 6-5, 7-6 Described • 6-8, 7-8 Diagram • 6-6 Initialization • 5-2 Operation • 6-7, 6-8, 6-9

Troubleshooting • 8-1

External trigger lines • 8-1 IP address • 3-1, 3-2, 8-1 LabVIEW driver • 8-2 Line frequency • 8-1 Save present state • 8-2 Voltage • 8-1 Web page • 3-1, 3-2, 8-1

TSB Embedded • 3-3

Script, create with • 3-3

TSP Express • 3-8

Index-2 2651A-900-01 Rev. A / March 2011

Model 2651A High Power System SourceMeter® Instrument User's Manual Index

TSP-Link

Nodes • 6-2

Voltage

Source, set level • 4-2

Warranty • 1-1 Web interface • 3-1

Accessing • 3-1

Browser requirements • 3-1

Home page • 3-2

IP address configuration • 3-2

Reading buffers • 3-7

TSB Embedded • 3-3

TSP Express • 3-8

Using • 3-1

2651A-900-01 Rev. A / March 2011 Index-3

12/06

Specifications are subject to change without notice.

All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.

All other trademarks and trade names are the property of their respective companies.

A GREATER MEASURE OF CONFIDENCE

Keithley Keithley Instruments 2651A-US Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Safety Precautions

Table of Contents

Welcome

Extended warranty

Introduction to this manual

CD-ROM contents

Organization of manual sections

Model 2651A applications

Introduction

Front panel

Introduction

Connect to the instrument web interface

Web interface home page

IP configuration tab

TSB Embedded

Create a script using TSB Embedded

Exercise: Create and run a script with TSB Embedded

Script management options

Reading buffers

Exercise: Retrieve readings from a buffer

TSP Express

Introduction

Equipment needed for this example

Device connections

Making front-panel measurements

Step 1: Select and set source level

Step 2: Set compliance limit

Step 3: Select measurement function and range

Step 4: Turn output on

Step 5: Observe readings on the display

Step 6: Turn output off

Introduction to capturing waveforms

Equipment needed for this example

Set up communication

Device connections

Configuring the trigger model

Example program code

Example program usage

Introduction to power discrete I-V curve testing

Equipment needed for this example

Set up communication

Device connections

Configuring the trigger model

Model 2651A trigger model operation

Series 26xxA instrument's trigger model operation

Example program code

Example program usage

Introduction to combining SMUs

Combining SMUs to increase current sourcing capability

Equipment needed for this example

Set up communication

Device connections

Configuring the trigger model

Master Model 2651A node[1] trigger model operation

Model 2651A node[2] trigger model operation

Series 2600A trigger model operation

Example program code

Example program usage

About this section

Need different line frequency or voltage

Can I use external trigger lines?

The internal web page of the instrument is not accessible

Save the present state of the instrument

LabVIEW driver for the Model 2651A

Additional Model 2651A information

Index