Page 1
6517A
• Measures resistances up to
16
10
Ω
• 1fA–20mA current measurement
range
• <20µV burden voltage on
lowest current ranges
• 200TΩ input impedance
• <3fA bias current
• Up to 125 rdgs/s
• 0.75fA p-p noise
• Built-in ±1kV voltage source
• Unique voltage reversal
method for high resistance
measurements
• Optional plug-in scanner cards
Ordering Information
6517A Electrometer/High
Accessories Supplied
237-ALG-2 Low Noise
Triax Cable, 3-slot Triax to
Alligator Clips, 2m (6.6 ft)
8607 Safety High Voltage
Dual Test Leads
6517-TP Thermocouple Bead Probe
CS-1305 Interlock Connector
Resistance Meter
Electrometer/High Resistance Meter
Keithley’s 51⁄2-digit Model 6517A Electrometer/High
Resistance Meter offers accuracy and sensitivity specifications unmatched by any other meter of this type. It
also offers a variety of features that simplify measur ing
high resistances and the resistivity of insulating materials. With reading rates of up to 125 read ings/second, the
Model 6517A is also significantly faster than competitive
electrometers, so it offers a quick, easy way to measure
low-level currents.
Exceptional Performance Specifications
The half-rack-sized Model 6517A has a special low current
input amplifier with an input bias current of <3fA with
just 0.75fA p-p (peak-to-peak) noise and <20µV burden
voltage on the lowest range. The input impedance for
voltage and resistance measurements is 200TΩ for near-
ideal circuit loading. These speci fi ca tions ensure the accuracy and sensitivity needed for accurate
low current and high imped ance volt age, resistance, and charge measure ments in areas of re search
such as physics, optics, nanotechnology, and materials science. A built-in ±1kV voltage source with
sweep capability simplifies performing leak age, break down, and resis tance testing, as well as volume
(Ω-cm) and surface resistivity (Ω/square) mea sure ments on insulating materials.
Wide Measurement Ranges
The Model 6517A offers full autoranging over the full span of ranges on current, resistance, voltage,
and charge mea sure ments:
• Currentmeasurementsfrom1fAto20mA
• Voltagemeasurementsfrom10µVto200V
16
• Resistancemeasurementsfrom50Ω to 10
• Chargemeasurementsfrom10fCto2µC
ACCESSORIES AVAILABLE
CABLES
6517A-ILC-3 Interlock Cable
7007-1 Shielded IEEE-488 Cable, 1m (3.2 ft)
7007-2 Shielded IEEE-488 Cable, 2m (6.5 ft)
7009-5 RS-232 Cable
7078-TRX-3 Low Noise Triax Cable, 3 -Slot Triax Connectors,
0.9m (3 ft)
7078-TRX-10 Low Noise Triax Cable, 3-Slot Triax Connectors,
3m (10 ft)
7078-TRX-20 Low Noise Triax Cable, 3-Slot Triax Connectors,
6m (20 ft)
8501-1 Trigger Link Cable, 1m (3.3 ft)
8501-2 Trigger Link Cable, 2m (6.6 f t)
8503 Trigger Link Cable to 2 male BNCs, 1m (3.3 f t)
8607 1kV Source Bana na Cables
PROBES
6103C Voltage Div ider Probe
6517-RH Humidity Probe with Exten sion Cable
6517-TP Temperature Bead Probe (included with 6517A)
TEST FIXTURE
8009 Resistivity Test Fixture
Ω
ADAPTERS
237-BNC-TRX Male BNC to 3-Lug Female Triax Adapter
237-TRX-NG Triax Male-Female Adapter with Guard
Disconnected
237-TRX-T 3-Slot Male Triax to Dual 3 -Lug Female Tria x
Tee Adapter
237-TRX-TBC 3-Lug Female Triax Bulkhead Connector
(1.1kV rated)
7078-TRX-BNC 3-Slot Male Triax to BNC Adapter
7078-TRX-GND 3-Slot Male Triax to BNC Adapter with guard
removed
7078-TRX-TBC 3-Lug Female Triax Bulkhead Connector with
Cap
SOFTWARE
6524 High Resistance Measurement Software
RACK MOUNT KITS
4288-1 Single Fixed Rack Mounting Kit
4288-2 Dual Fi xed Rack Mount ing Kit
SCANNER CARDS
6521 Low Current Scanner Ca rd
6522 Voltage/L ow Current Scanner Card
GPIB INTERFACES
KPCI- 488LP IEEE-488 Interface/Controller for the PCI Bus
KPXI-488 IEEE- 488 Interface Board for the PXI Bus
KUSB- 488A IEEE-488 USB -to-GPIB Interface Adapter
Simplifies measuring high resistances and the resistivity of insulating materials
1.888.KEITHLEY
www.keithley.com
(U.S. only)
LOW LEVEL MEASURE & SOURCE
Page 2
6517A
Electrometer/High Resistance Meter
Simple DMM-like Operation
The Model 6517A is designed for easy, DMM-like operation via the front
panel, with single-button control of im por tant functions such as resistance
measurement. It can also be controlled via a built-in IEEE-488 inter face,
which makes it possible to program all func tions over the bus through a
computer controller.
High Accuracy High Resistance Measurements
The Model 6517A offers a number of features and capabili ties that help
ensure the accuracy of high resistance mea sure ment applications. For
example, the built-in volt age source simplifies determining the relation ship
between an insulator’s resistivity and the level of source voltage used. It is
well suit ed for capacitor leakage and insulation resistance mea sure ments,
tests of the surface insula tion resis tance of printed circuit boards, voltage
coefficient test ing of resistors, and diode leakage characteriza tion.
A test sequence in the Model 6517A incorporates a new volt age reversal
method for measuring very high resis t anc es, especially in materials and
devices where the inherent background currents in the sample previous ly
made accurate measurements impos sible. The op tion al Model 6524 software package simplifies operat ing the Model 6517A via a compu ter controller and makes it easy to optimize the test parameters (delay time, volt age,
etc.) for the specific material or device under test. The Model 6517A meter,
the software, and a resistivity fixture are avail able as a combination for
specific material or device testing applications. Re fer to the Model 65 for
more informa tion.
Temperature and Humidity Stamping
Humidity and temperature can influence the resist ivity values of materials
significantly. To help you make ac curate comparisons of readings acquired
un der varying conditions, the Model 6517A offers a built-in type K thermocouple and an optional Model 6517-RH Relative Humidity Probe. A built-in
data storage bu f fer allows recording and recalling read ings stamped with
the time, tempera ture, and relative humidity at which they were acquired.
Accessories Extend Measurement Capabilities
A variety of optional accessories can be used to extend the Model 6517A’s
applications and enhance its performance.
Scanner Cards. Two scan ner cards are available to simplify scan ning
multiple signals. Either card can be easily inserted in the option slot of the
instru ment’s back panel. The Model 6521 Scan ner Card offers ten channels
of low-level cur rent scanning. The Model 6522 Scanner Card provides ten
channels of high impedance vol t age switching or low current switching.
Test Fixture. The Model 8009 Resistivity Chamber is a guard ed test fixture
for measuring vol ume and sur face resistivities of sam ple mat er ials. It has
stain less-steel elec trodes built to ASTM stan dards. The fixture’s elec trode
dimensions are pre- programmed into the Model 6517A, so there’s no
need to calculate those values then enter them man ually. This accessory is
designed to protect you from contact with potentially hazardous voltages
—opening the lid of the cham ber automatically turns off the Model 6517A’s
volt age source.
Applications
The Model 6517A is well suited for low current and high impedance voltage, resistance, and charge meas ure ments in areas of re search such as
physics, optics, and mater ials science. Its extremely low voltage bur den
makes it particularly appropriate for use in solar cell applica tions, and its
built-in voltage source and low current sensitivity make it an excellent solution for high resistance measurements of nanomaterials such as polymer
based nanowires. Its high speed and ease of use also make it an ex cellent
choice for quality control, product engineering, and production test appli ca tions involving leakage, breakdown, and resistance testing. Volume and
sur face resistivity measurements on non-conduc tive mater ials are particularly enhanced by the Model 6517A’s voltage reversal method.
Simplifies measuring high resistances and the resistivity of insulating materials
6517A-3Y-EW 1-year factory warranty extended to 3 years from date of shipment
C/6517A-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3 years of purchase*
TRN-LLM-1-C Course: Making Accurate Low-Level Measurements
*Not available in all countries
1.888.KEITHLEY
LOW LEVEL MEASURE & SOURCE
www.keithley.com
SERVICES AVAILABLE
(U.S. only)
Model 6517A rear panel
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6517A
Electrometer/High Resistance Meter
VOLTS Accuracy Temperature
(1 Year)
5
1
⁄2-Digit 18°–28°C 0°–18°C & 28°–50°C
1
Coefficient
Range Resolution ±(%rdg+counts) ±(%rdg+counts)/°C
2 V 10 µV 0.025 + 4 0.003 + 2
20 V 100 µV 0.025 + 3 0.002 + 1
200 V 1 mV 0.06 + 3 0.002 + 1
1
When properly zeroe d, 51⁄2-digit , 1 PLC (power line cycle), med ian filter o n, digital f ilter = 10
readings.
NMRR: 60dB on 2V, 20V, >55dB on 200V, at 50Hz or 60H z ±0.1%.
CMRR: >120dB at DC, 50Hz or 60Hz.
INPUT IMPEDANCE: >2 00T Ω in parallel with 20pF, <2pF guarded (1MΩ with
zero check on).
SMALL SIGNAL BANDWIDTH AT PR EAMP OUTPUT: Typically 100kHz (–3dB).
AMPS Accuracy Temperature
(1 Year)
5
1
⁄2-Digit 18°–28°C 0°–18°C & 28°–50°C
1
Coefficient
Range Resolution ±(% rdg+counts) ±(%rdg+counts)/ °C
20 pA 100 a A 2 1 + 30 0.1 + 5
200 pA 1 fA
2
1 + 5 0.1 + 1
2 nA 10 fA 0.2 + 30 0.1 + 2
20 nA 100 fA 0.2 + 5 0.03 + 1
200 nA 1 pA 0.2 + 5 0.03 + 1
2 µA 10 pA 0.1 + 10 0.005 + 2
20 µA 100 pA 0.1 + 5 0.005 + 1
200 µA 1 nA 0.1 + 5 0.005 + 1
2 mA 10 nA 0.1 + 10 0.008 + 2
20 mA 100 nA 0.1 + 5 0.008 + 1
1
When properly zeroe d, 51⁄2-digit, 1PLC (power l ine cycle), media n filter on,
digita l filter = 10 re adings.
2
aA =10–18A , fA=10–15A.
INPUT BIAS CURR ENT: <3fA at T
. Temperature coefficient = 0.5fA/°C.
CAL
INPUT BIAS CURR ENT NOISE: <750a A p-p (capped input), 0.1Hz to 10Hz band-
width, damping on. Digital filter = 40 readings.
INPUT VOLTAGE BURDEN at T
ranges. <100µV on 200pA, 200nA, 200µA ranges. <2mV on 2mA range. <4mV
±1°C: <20µV on 20pA, 2nA, 20nA, 2µA, 20µA
CAL
on 20mA range.
TEMPERATURE COEFFICIENT OF INPUT VOLTAGE BURDEN: <10µV/°C on pA ,
nA, µA ranges.
PREA MP SETTLING TIME (to 10% of f inal value): 2.5s t ypical on pA ranges,
damping off, 4s typical on pA ranges damping on, 15ms on nA ranges, 2ms on µA
and mA ranges.
NMRR: >95dB on pA, 60dB on nA, µA, and mA ranges at 50H z or 60Hz ±0.1%.
COULOMBS Accuracy Temperature
(1 Year)
5
1
⁄2-Digit 18°–28°C 0°–18°C & 28°–50°C
1,2
Coefficient
Range Resolution ±(% rdg+counts) ±(%rdg+counts)/ °C
2 nC 10 fC 0.4 + 5 0.04 + 3
20 nC 100 fC 0.4 + 5 0.04 + 1
200 nC 1 pC 0.4 + 5 0.04 + 1
2 µC 10 pC 0.4 + 5 0.04 + 1
1
Speci fications appl y immediatel y after cha rge acquisit ion. Add
|Q
wher e T
QAV = aver age charge me asured over TA, and RC = 300,000 t ypical.
2
When properly zeroe d, 51⁄2-digit , 1PLC (power line cycle), medi an filter on,
INPUT BIAS CURR ENT: <4fA at T
|
AV
_____
(4fA +
RC
digita l filter = 10 re adings.
) T
A
= peri od of time in seconds betwe en the coulombs zero and meas uremen t
A
. Temperature coefficient = 0.5fA/°C.
CAL
OHMS (Normal Method)
Accuracy
5
1
⁄2-Digit (10–100% Range) (10–100% Range)
Temperature
1
Coefficient
Reso- 18°–28°C (1 Yr.) 0°–18°C & 28°–50°C Auto Amps
Range Lution ±(% rdg+counts) ±(% rdg+counts) V Source Range
2 MΩ 10 Ω 0.125 + 1 0.01 + 1 40 V 200 µA
20 MΩ 100 Ω 0.125 + 1 0.01 + 1 40 V 20 µA
200 MΩ 1 kΩ 0.15 + 1 0.015 + 1 40 V 2 µA
2 GΩ 10 kΩ 0.225 + 1 0.035 + 1 40 V 200 n A
20 GΩ 100 kΩ 0.225 + 1 0.035 + 1 40 V 20 n A
200 GΩ 1 MΩ 0.35 + 1 0.110 + 1 40 V 2 nA
2 TΩ 10 MΩ 0.35 + 1 0.110 + 1 400 V 2 nA
20 TΩ 100 MΩ 1.025 + 1 0.105 + 1 400 V 200 pA
200 TΩ 1 GΩ 1.15 + 1 0.125 + 1 400 V 20 pA
1
Specifications are for auto V-source ohms, when properly zeroed, 51⁄2-digit, 1PLC, median filter on,
digital filter = 10 readings. If user selectable voltage is required, use manual mode. Manual mode displays resistance (up to 10
selected Amps range.
18
Ω) calculated from measured current. Accuracy is equal to accuracy of V-source plus accuracy of
PREA MP SETTLING TIME: Add voltage source settling time to preamp settling time in Amps specification.
OHMS (ALTERNATING POLARITY METHOD)
The alternating polarity sequence compensates for the background (offset) currents of the material or device
under test. Max imum tolerable of fset up to full scale of the current range used.
Using Keithley 8009 fix ture
× R/V
REPEATABILITY: ∆I
ACCUR ACY: ( V
SRC
Err + I
+ 0.1% (1σ) (instrument temperature constant ±1°C).
BG
ALT
Err × R)/ V
MEAS
ALT
where: ∆IBG is a measured, typical background cur rent noise from the sample and fixture.
V
V
I
is the alternating polarity voltage used.
ALT
Err is the accuracy (in volts) of the voltage source using V
SRC
Err is the accuracy (in amps) of the ammeter using V
MEAS
as the setting.
ALT
/R as the rdg.
ALT
VOLTAGE SOURCE Accuracy Temperature
(1 Year) Coefficient
5
Range Resolution ±(% setting + offset ) ±(% setting+offset )/°C
100 V 5 mV 0.15 + 10 mV 0.005 + 1 mV
1000 V 50 mV 0.15 + 100 mV 0.005 + 10 mV
MAXIMUM OUTPUT CUR RENT:
±10mA; active current limit at <11.5mA for 100V range.
±1mA; active current limit at <1.15mA for 1000V range.
SETTLING TIME: <8ms to rated accuracy for 100V range.
<50ms to rated accuracy for 1000V range.
NOISE: <150µV p-p from 0.1Hz to 10Hz for 100V range.
<1.5mV p-p from 0.1Hz to 10Hz for 1000V range.
1
⁄2-Digit 18°–28°C 0°–18°C & 28°–50°C
Side Text
Model 6517A specifications
1.888.KEITHLEY
www.keithley.com
(U.S. only)
LOW LEVEL MEASURE & SOURCE
Page 4
6517A
Electrometer/High Resistance Meter
TEMPERATURE (Thermocouple)
Accuracy (1 Year)
Thermocouple 18°–28°C
Type Range ±(% rdg + °C )
K –25°C to 150°C ± (0.3% + 1.5°C)
1
Exclud ing probe err ors, T
± 5°C, 1 PLC integrat ion time.
CAL
HUMIDITY
Accuracy (1 Year)
Range 18°–28°C, ±(% rdg + % RH)
0–100% ± (0.3% +0.5)
1
Humid ity probe acc uracy must be added. This i s ±3% RH for Model 6517-RH, up to 65°C probe
enviro nment, not to ex ceed 85°C.
IEEE-488 BUS IMPLEMENTATION
IMPLEMENTATION: SCPI (IEEE-488.2, SCPI-1993).
TRIGGER TO READING DONE: 150ms typical, with external trigger.
RS-232 IMPLEMENTATION: Supports: SCPI 1991.0.
Baud Rates: 300, 600, 1200, 2400, 4800, 9600, 19.2k.
PROTOCOLS: Xon/Xoff, 7- or 8-bit ASCII, parity-odd/even/none.
Side Text
CONNECTOR: DB-9 T XD/RXD/GND.
Model 6517A specifications
1
DISPLAY: 61⁄2-digit vacuum f luorescent multiline.
RANGING: Automatic or manual.
CONVERSION TIME: Selectable 0.01PLC to 10PLC.
MAXIMUM INPUT: 250V peak, DC to 60Hz sine wave; 10s per minute maxi-
mum on mA ranges.
MAXIMUM COMMON MODE VOLTAGE (DC to 60Hz sine wave):
1
Electrometer, 500V peak; V Source, 750V peak.
ISOLATION (Meter COMMON to chassis): Typically 10
50 0pF.
INPUT CONNECTOR: Three lug triaxial on rear panel.
2V ANA LOG OUTPUT: 2V for full range input. Non-inverting in Volts mode,
inverting when measur ing Amps, Ohms, or Coulombs. Output impedance
10kΩ.
PREA MP OUTPUT: Provides a guard output for Volts measurements. Can
be used as an inverting output or with external feedback in Amps and
Coulombs modes.
EXTERNA L TRIGGER: TTL compatible External Trigger and Electro meter
Complete.
GUARD: Switchable voltage guard available.
DIGITAL I /O AND TR IGGER LINE: Available, see manual for usage.
EMI/RFI: Meets VDE-0871 and FCC Class B limits.
EMC: Conforms to European Union Directive 89/336/EEC.
SAFETY: Conforms to European Union Directive 73/23/EEC (meets EN61010-1/
IEC 1010).
REA DING STORAGE: 50,000 max. readings (SCPI mode).
REA DING R ATE:
To internal buffer 125 readings/second
To IEEE-488 bus 115 readings/second
Bus transfer 2500 readings/second
1
0.01PLC, digital filters off, front panel off, temperature + RH off.
2
Binary transfer mode.
DIGITAL FILTER: Median and averaging.
ENVIRONMENT: Operating: 0°–50°C; relative humidity 70% non-condensing,
up to 35°C. Storage: –25° to +65°C.
WARM-UP: 1 hour to rated accurac y (see manual for recommended proce-
dur e).
POWER: 105–125V or 210–250V (external switch selected), 90–110V (internal
switch selected), 50–60Hz, 50VA.
PHYSICAL: Case Dimensions: 90mm high × 214mm wide × 369mm deep
1
⁄2 in. × 81⁄2 in. × 141⁄2 in.).
(3
Working Dimensions: From front of case to rear including power cord and
IEEE-488 connector: 15.5 inches.
Net Weight: <4.6kg (<10.1 lbs.).
Shipping Weight: <9.5kg (<21 lbs.).
GENERAL
1
1,2
2
10
Ω in parallel with
1.888.KEITHLEY
LOW LEVEL MEASURE & SOURCE
www.keithley.com
(U.S. only)
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