Keithley 9139B-PCA Instructions Manual
www.tek.com/keithley
Model 9139B-PCA Probe Card Adapter
Instructions
9139B-PCA-901-01 Rev. A / January 2019
*P9139B-PCA-901-01A*
9139B-PCA-901-01A
Probe Card Adapter
Model 9139B
Instructions
© 2019, Keithley Instruments, LLC
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments, LLC, is strictly prohibited.
These are the original instructions in English.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments, LLC. Other brand names are trademarks or registered trademarks of their respective
holders.
Microsoft, Visual C++, Excel, and Windows are either registered trademarks or trademarks of
Microsoft Corporation in the United States and/or other countries.
Document number: 9139B-901-01 Rev. A / January 2019
Safety precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low
transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.
For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may
invalidate the warranty.
The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor
injury or damage the instrument. Always read the associated information very carefully before performing the indicated
procedure. Damage to the instrument may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power
transformer, test leads, and input jacks — must be purchased from Keithley. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may
only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other
suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through
Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley office for information.
Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following
environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the
instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that
consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of June 2017.
Table of contents
General information ................................................................................................. 1-1
Introduction .......................................................................................................................... 1-1
Features ............................................................................................................................... 1-2
Safety symbols and terms .................................................................................................... 1-3
Related documentation ........................................................................................................ 1-3
Unpacking and inspection .................................................................................................... 1-3
Handling precautions ................................................................................................................ 1-4
Inspection for damage ............................................................................................................... 1-5
Shipment contents .................................................................................................................... 1-5
Probe card adapter overview .................................................................................. 2-1
Probe card adapter standard components .......................................................................... 2-1
Pin arrangement ................................................................................................................... 2-3
Leakage paths, low-current and high-voltage capabilities ................................................... 2-3
Motherboard characteristics ................................................................................................. 2-4
Probe card configuration ...................................................................................................... 2-4
Probe needle ........................................................................................................................ 2-5
Light cover ............................................................................................................................ 2-5
Installation ................................................................................................................ 3-1
Introduction .......................................................................................................................... 3-1
General installation considerations ...................................................................................... 3-1
Mechanical structure ................................................................................................................. 3-2
Safety ........................................................................................................................................ 3-2
Additional probe card adapter safety interlock cable ................................................................. 3-4
9139B Probe Card Adapter interlock schematic........................................................................ 3-5
Stack height .............................................................................................................................. 3-6
Cable routing ............................................................................................................................. 3-6
Light cover and microscope clearance ...................................................................................... 3-7
Installation procedure ........................................................................................................... 3-7
Probe card removal procedure .......................................................................................... 3-10
Performance verification .................................................................................................... 3-11
Performance verification using system diagnostics ................................................................. 3-11
Optional top-load (clamshell) mechanism installation ........................................................ 3-12
Maintenance ............................................................................................................. 4-1
Introduction .......................................................................................................................... 4-1
Mechanical disassembly ...................................................................................................... 4-2
Moving PCA cable connections ........................................................................................... 4-3
Table of contents
tructions
Model 9139B Probe Card Adapter Ins
Cleaning ............................................................................................................................... 4-3
Replacing a pogo pin ........................................................................................................... 4-4
Replacing a pogo pin socket ................................................................................................ 4-5
Replacing the vacuum connection ....................................................................................... 4-6
Replaceable parts .................................................................................................... 5-1
Ordering information ............................................................................................................ 5-1
Factory service ..................................................................................................................... 5-1
Parts list ............................................................................................................................... 5-1
Blank probe card ....................................................................................................................... 5-1
9139B-01 and 9139B-02 parts list ............................................................................................. 5-2
Mechanical specifications ....................................................................................... 6-1
Probe card adapter mechanical drawings............................................................................ 6-1
Probe card adapter assembly ................................................................................................... 6-1
Probe card adapter width and stack height ............................................................................... 6-2
Probe card adapter top view pin arrangement .......................................................................... 6-2
Probe card dimensions ............................................................................................................. 6-3
In this section:
Unpacking and inspection .........................................................1-3
Introduction ...............................................................................1-1
Features ....................................................................................1-2
Safety symbols and terms .........................................................1-3
Related documentation .............................................................1-3
Introduction
The Model 9139B Probe Card Adapter is an interface specifically designed to connect a Keithley
parametric test system to a device under test (DUT) while maintaining system specifications. It
provides greater accuracy of parametric tests in applications that require a wide range of
measurements, including high voltage up to 1.1 kV, while maintaining low-level measurement
performance. The high-capacity, low-leakage 9139B Probe Card Adapter allows you to make highvoltage measurements in multi-pin, fully automated production test applications.
Section 1
General information
Figure 1: 9139B probe card assembly
Section
1: General information Model 9139B Probe Card Adapter
Instructions
Refer to the manufacturer documentation for your prober for information about connecting hardware
to it. Refer to the documentation provided with your Keithley parametric test system for information
about connections to the system.
Make sure you order the PCA with the correct stack height for your prober. Refer to probe card
adapter with and stack height (on page 6-2)
Features
Key features of the 9139B Probe Card Adapter include:
• Vacuum lock allows quick exchange of probe cards with accurate and repeatable alignment
• System supports up to 64 pins at up to 1.1 kV
• All pins use 1.1 kV triaxial connectors
• Optional hinged interface mechanism for easy probe card changes
• Easily connects device under test (DUT) cables to a probe card
• Each pin supports fully guarded measure and sense lines
• Maintains test system specifications to the probe tip
• Preserves full Kelvin connections to the probe tip
• Reduces capacitance with extended guards
• Extends low-current capabilities of the Keithley Parametric Test system
1-2 9139B-901-01 Rev. A / January 2019
Model 9139B
Probe Card Adapter Instructions Section 1:
General information
Safety symbols and terms
Refer to Safety precautions (on page 1-1) for important information about safety symbols and all
precautions that must be taken when using the probe card adapter.
Hazardous voltages may be present on the probe card adapter, even after you disengage the
interlock. Cables can retain charges after the interlock is disengaged, exposing you to live
voltages that, if contacted, may cause personal injury or death.
Never attempt to touch or change a probe card when tests are running. You must be
absolutely certain that all tests have stopped before making contact with anything in the
vicinity of the probe card adapter. Also, never run tests without a probe card installed.
Related documentation
The following related customer documentation is included with the Keithley Parametric Test System:
• Administrative Guide (part number S530-924-01 and S535-924-01): This guide provides
information about Keithley Parametric Test Systems, including available configurations, sit
preparation and installation, equipment startup, connection diagrams, and maintenance.
• Reference Manual (part number S530-924-01 and S535-924-01): This manual describes how to
us
e the diagnostic and verification software suite that is part of your Keithley Parametric Test
System.
Unpacking and inspection
The following topics provide information about your shipment.
e
9139B-901-01 Rev. A / January 2019 1-3
Section
1: General information Model 9139B Probe Card Adapter
Instructions
Handling precautions
The 9139B Probe Card Adapter is assembled at the factory to provide the highest quality connections
possible between the device under test (DUT) and your system. Use care when handling these parts.
Do not touch high-impedance areas of the probe card assembly or the probe card. Touching
a high-impedance area will cause leakage and problems when performing low-current
measurements. Excessive leakage will cause the probe card adapter to fail system tests. See
the following figure for the location of high-impedance areas.
Figure 2: Handling 9139B
Take these precautions when handling the 9139B:
• Handle the board only by the edges.
• Use clean gloves to prevent inadvertent contact with high-impedance areas.
• Avoid bringing the board into contact with sources of contamination.
• Always confirm that fixtures and handling equipment are clean.
1-4 9139B-901-01 Rev. A / January 2019
Model 9139B
Probe Card Adapter Instructions Section 1:
General information
Inspection for damage
Carefully unpack your 9139B Probe Card Adapter from its original shipping carton and inspect the
card for any obvious signs of physical damage. Report any such damage to the shipping agent
immediately. Save the original packing carton for possible future shipment.
Shipment contents
The following items are included with every 9139B:
• 9139B Probe Card Adapter
• Model 9139A-VUA vacuum control box
• Unpopulated (blank) probe card (this probe card is used for diagnostics and is installed in the
pr
obe card adapter)
• A shorted probe card for system verification
• 6 m (15 ft) of 0.64 cm (1/4 in.) vacuum hose
9139B-901-01 Rev. A / January 2019 1-5
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