Hitachi S-4800 User Manual

INSTRUCTION MANUAL

FOR

MODEL S-4800

FIELD EMISSION

SCANNING ELECTRON MICROSCOPE

Please read through this manual carefully before using the instrument.

• Before using the instrument, read the safety instructions and precautions carefully.

• Keep this manual in a safe place nearby so it can be referred to whenever needed.

NOTICE:

1. Information contained in this document is subject to

change without notice for improvement.

2. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved. No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation.

3. Hitachi High-Technologies Corporation assumes no liability for any direct, indirect, or consequential damages arising from use not described in this manual. Utmost care must be exercised when using the instrument.

4. This document does not provide any warranty or permission for industrial properties or any rights to grant license lawfully and without infringement.

FOREWORD

APPLICATION

CAUTION

• The S-4800 SEM utilizes electron beam accelerated at 500 V to 30 kV. The instrument is designed mainly for observation and evaluation of specimens prepared for observation using SEM.

• Note that Hitachi High-Technologies Corporation will not be responsible for injury or damage caused by usage of the instrument in a manner not described in this manual.

The electron microscope need not conform to the “Radiation Hazard Preventive Laws” or “Ionizing Radiation Hazard Preventive Regulations” currently in effect throughout the world, unlike the instruments designed to produce x-rays. The suggestion made by the ICRP (International Committee on Radiation Hazard Prevention), however, clearly defines that the electron microscope, like the home television set, will potentially produce a certain amount of x-rays as an undesirable byproduct. From a safety viewpoint, therefore, it is essential to operate the instrument carefully taking into account the following fundamental precautions.

(1) Use the instrument within the application range specified in the

catalog or instruction manual.

(2) Do not operate the instrument with covers or doors removed, nor use

alternatives for these components.

(3) Do not apply modifications which may possibly result in deactivation

of the built-in safety devices.

CAUTION

Viewing the screen of the computer monitor and/or operating the computer keyboard for prolonged, uninterrupted periods of time may result in fatigue or other problems such as eye strain or repetitive motion injuries. Therefore, Hitachi High-Technologies Corporation recommends that the user carefully consider these potential risks when establishing guidelines for proper use of this instrument in their workplace.

FOREWORD - 1

Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment.

Scope of Instruction Manual

This instruction manual comprises the following:

1. Installation (Requirements and Items to be Prepared by User)

2. Function (Description of Controls)

3. Operation (Viewing Images, Saving Data, and Taking Photographs)

4. Maintenance (Procedures, Troubleshooting, and Action on Power Failure)

5. Replacement Parts

6. Accessory Operation

This instruction manual describes the operation, maintenance, and specific precautions pertinent to daily operation on the model S-4800 scanning electron microscope.

First, read and get familiar with the safety precautions described in the opening pages and General Safety Guidelines.

FOREWORD - 2

GUARANTEE

Period of Guarantee

The charge-free guarantee period is one year from the date of installation.

Details of Guarantee

(a) The instrument will be repaired free of charge if it malfunctions due to a defect in

manufacture within the charge-free guarantee period.

(b) Note that a substitute part may be used for repair, or replacement with an equivalent

product may be made instead of repair.

modified for improvement may not be available in original versions at the time of replacement.

(d) Maintenance procedures are provided to allow system operation for 10 years after its

delivery. During this period, the maintenance of units or parts having a rather short product cycle such as personal computer and printer may entail the purchase of substitute parts because of limits on the repair period of the former, for which we request your understanding. Even when more than 10 years have elapsed after delivery, maintenance will basically be provided as long as the relevant units and parts are available.

Exclusions from Guarantee

The guarantee will not be valid for the following failures and/or cases even during the charge-free guarantee period. (a) Failure due to use in improperly installed condition. (b) Failure due to power supply voltage/frequency other than specified by Hitachi

High-Technologies Corporation or due to power failure.

water supplied by the customer.

(d) Corrosion of electric circuits or deterioration of optical elements due to corrosive gases

or much dust contained in the atmosphere.

(e) Failure due to disassembly, modification, parts replacement, or relocation not approved

by Hitachi High-Technologies Corporation. (f) Consumables and parts having a limited period of guarantee. (g) Failure attributable to use of non-guaranteed parts (parts not described in the

instruction manual). (h) Failure due to acts of God, including fire, earthquake, storm, flood, lightning, social

disturbance, riot, crime, insurrection, war (declared or undeclared), radioactive

pollution, contamination with harmful substance, etc.

FOREWORD - 3

GUARANTEE

(i) Failure of instrument or damage of basic software, application software or other data

due to a computer virus. (j) Failure of the PC used with the instrument or damage to basic software, application

software and/or data because of momentary voltage drop caused by lightning or power

interruption. (k) Failure of the PC used with the instrument or damage to basic software, application

software and/or data caused by turning off the PC main power without taking the

normal termination procedure.

Limitations on Guarantee

HITACHI HIGH-TECHNOLOGIES CORPORATION MAKES NO GUARANTEES, EITHER EXPRESS OR IMPLIED, EXCEPT AS PROVIDED HEREIN, INCLUDING WITHOUT LIMITATION THEREOF, GUARANTEES AS TO MARKETABILITY, MERCHANTABILITY, FOR A PARTICULAR PURPOSE OR USE, OR AGAINST INFRINGEMENT OF ANY PATENT. IN NO EVENT SHALL HITACHI HIGH-TECHNOLOGIES CORPORATION BE LIABLE FOR ANY DIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES OF ANY NATURE, OR LOSSES OR EXPENSES RESULTING FROM ANY DEFECTIVE PRODUCT OR THE USE OF ANY PRODUCT. NO ORAL OR WRITTEN INFORMATION OR ADVICE GIVEN BY HITACHI HIGH-TECHNOLOGIES CORPORATION, ITS DEALERS, DISTRIBUTORS, AGENTS OR EMPLOYEES SHALL CREATE A GUARANTEE OR IN ANY WAY INCREASE THE SCOPE OF THIS GUARANTEE.

FOREWORD - 4

INSTALLATION AND AFTER-SALES SERVICE

Installation

• Installation at delivery will be carried out by Hitachi High-Technologies Corporation installation engineers.

• Before installation, refer to section 1 and prepare the necessary utilities.

• Installation at another place after delivery will be provided at charge. Consult your

nearest Hitachi High-Technologies Corporation service representative for details.

After-sales Service

• For after-sales service of the instrument, contact the Hitachi High-Technologies Corporation sales or service representative in charge.

• For service after the guarantee period, consult Hitachi High-Technologies Corporation with regard to a maintenance and inspection service contract.

CAUTION ON DISPOSAL OF INSTRUMENT

Although at present the instrument does not use materials that will directly harm the environment, changes are apt to be made in relevant laws and/or regulations, so be sure to consult a qualified specialist when planning to dispose of the instrument.

FOREWORD - 5

Available Training Programs

Hitachi High-Technologies Corporation offers various kinds of training programs at its own facilities or at the user’s site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them. Applicants will be charged.

Handling of Chemicals

(1) The user is responsible for proper handling and disposal of chemicals used for cleaning of

the equipment in accordance with applicable regulations.

(2) Follow the supplier’s instructions on handling, storage, and disposal of chemicals.

Instruction Manual

(1) This instruction manual and those instruction manuals for relevant accessories may be

revised for improvement without prior notice. (2) Hitachi High-Technologies Corporation has the copyright of this instruction manual. (3) Reproducing or copying of part or all of this instruction manual is not allowed without our

written permission.

FOREWORD - 6

SAFETY SUMMARY

General Safety Guidelines

Before operating the machine, read the following instructions carefully:

• Follow all the operating procedures provided in this manual.

• Installation and maintenance must be entrusted to personnel who have received training at and are authorized by Hitachi High-Technologies Corporation.

• Pay special attention to and follow all the hazard warnings on the machine and in the manual. Failure to do so can cause injury to yourself or damage to the machine.

• The hazard warnings which appear on the warning labels on the machine or in the manual have one of the following alert headings consisting of an alert symbol and a signal word, DANGER, WARNING, or CAUTION.

DANGER

WARNING

CAUTION

NOTICE

Indicates an imminently hazardous situation which, if not

avoided, will result in death or serious injury.

Indicates a potentially hazardous situation which, if not avoided,

can result in death or serious injury

Indicates a hazardous situation which, if not avoided, will or can

result in minor or moderate injury, or serious damage of product.

The alert symbol shown at left precedes every signal word for

hazard warnings, and appears in safety related descriptions in the manual.

Indicates instructions for preventing possible damage to the

instrument.

Indicates information and descriptions for ensuring correct

usage.

• Do not perform any operation or action in any way other than as provided in this manual. When in doubt, call the designated field engineer.

• Keep in mind that the hazard warnings in this manual or on the machine cannot cover every possible case, as it is impossible to predict and evaluate all circumstances beforehand. Be alert and use your common sense.

SAFETY - 1

SAFETY SUMMARY(cont’d)

• Installation at delivery, maintenance and/or relocation must be carried out under the supervision of Hitachi-approved specialists.

• The customer is responsible for proper ventilation of the room when using chemicals. Inadequate ventilation could cause a health hazard.

• Maintenance up to 4.4 in section 4 must be entrusted to the service engineers (of Hitachi Instrument Service). The user should not carry out these procedures.

• Do not carry out modification of the instrument, parts replacement, use non-specified parts, nor detach safety mechanisms since this could be hazardous.

Locations of Warning Labels on the equipment are illustrated on the next pages.

Maintenance of Warning Labels

Contact your nearest Hitachi High-Technologies Corporation service representative for

maintenance of deteriorated or damaged warning labels. Locations of Warning Labels on the equipment are illustrated on the next pages. SEMI S2 modification including ANSI style labels is provided as option. Refer to fig S-1 and S-2 for standard version and S-3 and S-4 for ANSI style labels.

SAFETY - 2

Electrical Hazard

Electrical hazards exist due to the following:

Electron Gun : 0.5 to 30 kV DC Ion Pump : 5 kV DC Photomultiplier : 1 kV DC Scintillator of secondary electron detector : 10 kV DC Electrode 1 : 50 V DC Electrode 2 : 200 V (Max) DC Electrode 3 : 100 V (Max) DC ExB : 30 V (Max)DC Penning gauge : 3 kV

Photo CRT : 10 kV DC An enclosure is provided for each high voltage power supply sub-unit. These enclosures are fixed by screws and electrically connected to the protective grounding, so electrical hazards by direct contact are prevented. At the high voltage power supply sub-units, warning labels are attached to prevent hazards during maintenance. The maintenance should be carried out only by the service personnel specified and trained by the manufacturer.

The operator should not open the enclosure of the high voltage power supply sub-units in the main unit, display unit or ion pump power supply unit.

• If you touch a terminal board, you may receive an electric shock.

• If you touch a high-voltage section also, you may receive an electric shock.

SAFETY - 3

High Temperature Hazard

Baking the electron gun part is carried out about once per 6 months to keep high vacuum inside

the part. When baking, the surface of the gun housing and ion pumps reaches around 250 °C.

The electron gun part is surrounded by a metal guard to prevent high temperature hazard caused by direct contact. However, the temperature of the upper stage surface rises up to

100 °C and the temperature of the side cover surface also rises up to 75 °C. The maintenance

work of baking should be carried out by personnel trained by the manufacturer.

The operator should not touch the covers when the electron gun and ion pumps are heated up to

about 250 °C in order to keep the electron gun in ultra high vacuum. Touching these sections

would result in burns.

Note that the above heated parts are still hot even after stopping heating. Cooling down to close to room temperature needs about 6 hours.

Magnetic Field Hazard

The ion pumps are constructed with permanent magnets. There is a fringing magnetic field of about 10 mT at the ion pump surface and about 1 mT at the outside of the ion pump cover.

• Any person who carries a pacemaker embedded is not allowed to approach the ion-pump.

• Do not bring near the ion pump wristwatches and magnetic cards that are susceptible to

magnetic fields.

SAFETY - 4

Laser light Hazard

The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Personal Computer with a laser device complies with safety standards, including International Electrotechnical Commission (IEC) 825. With specific regard to the laser, the equipment complies with laser product performance standards set by US government agencies for a Class 1 laser product. The product does not emit hazardous light; the beam is totally enclosed during all modes of customer operation and maintenance. Therefore, be sure to observe the following warnings when operating a product equipped with a laser device.

・Do not try to open the unit enclosure. There are no user-serviceable components inside. ・Do not operate controls, make adjustments, or perform procedures to the laser device other

than those specified herein.

・Allow only Service persons to repair the unit.

Laser Information

Laser Type Semiconductor GaAlAs Wave Length 780 nm +/- 35 nm Divergence Angle 53.5 degrees +/- 0.5 degrees Output Power Less than 0.2 mW or 10,869 W m-2 sr-1 Polarization Circular 0.25 Numerical Aperture 0.45 inches +/- 0.04 inche

SAFETY - 5

SAFETY - 6

Fig S-1 Warning labels on the Main unit (standard version)

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Fig S-2 Warning labels on the Display unit (standard version)

Fig S-3 Warning labels on the Main unit (ANSI style labels)

SAFETY - 8

（NOTICE : (Labels with(S2) are put to SEMI-S2 guideline conforming version)

SAFETY - 9

（NOTICE : (Labels with(S2) are put to SEMI-S2 guideline conforming version)

Fig S-3 Warning labels on the Display unit (ANSI style labels)

Beware of electric shock

Beware of high temperature

WARNING

• Voltages up to 100 V AC and 30 kV DC are used inside this instrument. Do not touch inside or you may receive an electric shock.

• Do not remove the covers of column unit, control unit or power unit and do not touch internal parts or circuits while the instrument power is turned on. There is a hazard of fatal or serious injury due to electric shock.

• Avoid removing the covers of the instrument. If they must be removed, make sure to first turn off all power to the instrument.

Electron Gun / Ion pump Baking

• The electron gun and ion pump are heated to about 250°C in order to keep the electron gun in a high vacuum. Touching these sections would result in burns.

Rotary Pump

• The temperature of the oil rotary pump rises up to about 70°C, while it is operating. Touching the pump may also result in burns.

Beware of low temperature

Magnetic Fields

Liquid Nitrogen

• When you replenish liquid nitrogen in the cold-trap of DP and the anti-contamination trap, be sure to wear eye-protection glasses and protective gloves to keep liquid nitrogen from splashing on the eyes or the skin.

• Anyone working on the electrical part of the system should follow the correct lock-out tag-out procedures for that location.

• The user should prepare a mains switch box on which the lock-out and the tag-out procedures are provided.

• Electrical hazards can occur if lock-out tag-out procedures are not followed.

• The ion-pump produces magnetic fields. There are fringing magnetic fields of about 100 Gauss from the ion-pump and 10 Gauss at the outside of the ion-pump cover.

Any person who has a pacemaker embedded is not allowed to

approach the ion-pump.

Do not bring near to the ion-pump wristwatches and magnetic cards

that are susceptible to magnetic fields.

SAFETY - 10

Laser Light

WARNING (cont’d)

The CD-ROM or CD R/W drive in the personal computer provides with a laser device.

Be sure to observe the following warnings when operating a product equipped with a laser device.

・ Do not try to open the unit enclosure. There are no user-serviceable

components inside.

・ Do not operate controls, make adjustments, or perform procedures to

the laser device other than those specified herein.

・ Allow only Service persons to repair the unit.

SAFETY - 11

Other Relevant Precautions

• Water Leakage Detection A water-leakage detector is not provided with this equipment. Water leakage may be caused by corrosion and cracks along the water flow system developed by changes in cooling-water quality and pressure. If a cooling-water circulating system is not installed, you should install a water-supply kit; the water-supply kit is provided with a pressurereducing valve and a water-leakage sensor, preventing an accident of water pooling.

• Third Party’s Industrial or Proprietary Rights Hitachi shall not be responsible for a third party’s claim regarding infringement of any patent rights or industrial properties with respect either to products manufactured through the use of equipment supplied by Hitachi or its related companies or to applications of the Hitachi equipment.

• Cooling Water (a) You can use city water of which chlorine concentration is less than 0.5 ppm for

cooling water. If the chlorine concentration is higher, use a cooling-water circulating

system to prevent water-leakage due to corrosion of the water flow system. (b) Necessary flow rate of the cooling water is about 1.5 L/min. (c) Use a pipe taper-thread to fix the hose to the water faucet. (d) Be sure to secure the drain hose to the drainage. Loose drain hose can be

responsible for a water pool. (e) Close the supply valve of the cooling water when not in use. (f) Soft polyvinyl chloride is used for the supply and drain hoses. These hoses may

become hardened and less flexible after a long period of time. Therefore, regular

replacement is recommended, and be sure to check against water leakage before

use. (g) If you anticipate the cooling water to freeze in winter, use antifreeze on a cooling-

water circulating system.

(h) Cooling water temperature should be controlled so it is not more than 7 °C below the

room temperature. If the temperature difference is greater than this, condensation

may form along the cooling water flow path. And long use under this condition may

cause rusting of the important cooled parts such as objective lens magnetic path and

eventually result in damage to them, whereby the complete set of objective lens will

require replacement. It is thus recommended to use a closed water circulator and

maintain a suitable water temperature.

• Backup of Important Data Trouble-free operation cannot be guaranteed for the computer system. You are recommended to copy important data on the hard disk into floppy disks (FD) or magnetooptical disks (MO) at a regular interval.

SAFETY - 12

Other Relevant Precautions (cont’d)

• Third Party’s Application Programs Do not install a third party’s application programs into the PC of the equipment. Those application programs can be responsible for display of unexpected windows, adverse effects on the equipment, and interference in the operation of the system program. Hitachi shall not be liable for the troubles caused by such application programs.

• Protection against Computer Viruses Computer viruses are malicious programs that sneak into the PC to cause misbehavior or damage to data. And, a program designed to offer protection against and eradicate computer viruses is called a vaccine program. Virus infection can be caused by using a floppy disk or other storage medium infected by a virus. Note also that once the PC is infected by a virus, it may spread to other computers through storage medium. Therefore, never use a program or storage medium that is suspected of containing a virus. If there is a possibility of virus infection, check for a virus using a vaccine program. The user is requested to prepare a proper vaccine program and carry out virus removal on his or her own responsibility. Note, however, that some kinds of vaccine programs may cause incorrect operation of the S-4800 control program. If a problem occurs after you install a vaccine program, remove it or execute virus check when the S-4800 program is not running. It is desirable not to set the vaccine program in the auto start-up group, or to terminate the vaccine program before starting the S-4800 program.

• Do Not Change Computer Settings

Do not change the following system settings of your PC. These are set up at the optimum conditions for operation of the S-4800 SEM before shipping. (a) Connection to the USB ports

This instrument uses a USB port for communication between the PC and the internal microprocessor. The USB port number 1 is occupied for the instrument. Use USB ports on the installed additional USB board for external storage devices, printer etc. Do not connect these units to the standard USB ports of PC even if these are open.

(b) Display screen setting

Display properties need to be set at 1280x1024 pixels for the desktop area, true color (24 bit) mode and 60Hz to 70Hz for the refresh rate. Using other resolution, faster refresh rate or 256 color mode may cause an abnormal screen display.

This instrument operates using many of dll programs along with control program. Deletion of files in the Windows directory or change of the registry will cause troubles. Also do not delete tasks and processes using the task manager.

SAFETY - 13

Other Relevant Precautions (cont’d)

(d) Power Saving mode

Do not use the Power Saving mode. It will cause trouble for communication between the PC and internal microprocessor.

(f) Virtual memory setting

Do not change the virtual memory setting.

• OS operation during S-4800 SEM operation Although the Windows Task Manager can be launched from the Taskbar or using Ctrl+Alt+Del key operation, if Standby or Halt mode is set or logged-off during S-4800 control program is running, it will not work normally when recovered from such a status. Close S-4800 control program If setting such mode is necessary.

• USB devices When connecting USB devices such as external storage unit, printer etc., take notice to followings. (1) Terminate S-4800 control program when carrying out disk formatting or copying large

volume of image files to MO disk, hard disk or other storage devices using USB port. (2) By above operation, sometimes the message “USB not connected” will be shown. In the case, S-4800 control program will not continue normal operation. Terminate Windows and shut the PC down. Then turn the DISPLAY switch OFF. Turn it on again after waiting about half a minute.

• Power Failure Instantaneous drop in the line voltage caused by power failure or lightning can be responsible for malfunction of the PC or damage to system programs, application programs, or data. An uninterruptible power supply unit is recommended to protect your system from such instantaneous drop in the line voltage.

• Personal Computer (PC)

Do not turn off the PC power independently. If the PC power is turned off during access to HD or FD, the PC or data and programs stored therein may be damaged. Be sure to terminate the SEM system software and Windows 2000 software, and then turn off the PC by means of the DISPLAY switch. If the PC should become locked, press the Alt, Ctrl and Delete keys simultaneously, select the process related to locking, then press the Exit button.

• Other Precautions for operation Refer to “Precautions When Using the S-4800 SEM” in the PC-SEM Help shown by selecting Help menu.

• Do not forget other precautions described in the text of the instruction manual.

NOTICE

:The model S-4800 has two nameplates. The nameplate at the back of the main unit

indicates production serial number, production date, manufacturer name and AC power input. The nameplate at the back of the display unit idicates rated voltage, current and frequency of AC power input.

SAFETY - 14

Emergency Off Button

The Emergency Off button (EMO) is a red, mushroom shaped pushbutton switche, that is located on the Evacuation control panel of Main unit. Its purpose is to shut off all power in the system when pushed, and it is a non- momentary switch which is never be overridden even during servicing of the system.

Fig S- 5 Location of Emergency Off button

It is recommended to check the function of Emergency Off circuit during the regular maintenance.

NOTE : When pushing the EMO, the whole power line is cut off. Since a battery backed up

power supply for the PC is not mounted the PC can not finish the shutdown sequence, thus possibly causing serious damage to the PC file system.

RECOVER OF EMERGENCY OFF

1. Check the whole system. If the system has something wrong, call service personnel (Hitachi High-Technologies Corporation service engineer etc.) and execute maintenance.

2. Turn all breakers on the back og the display unit.

3. Unlock EMO switch. (Turn clockwise for unlocking)

4. Refer to section 4 for starting up.

SAFETY - 15

Main Power Disconnect

Lock out/tag out procedure are very important safety concern. The purpose of the lock out/tag out procedure is to insure safety while working on electrical and mechanical equipment. Make sure you get introduced to the person responsible for the equipment at the site. When you need to power down the system and work on it in that state, you must lock out/tag out. If the main Disconnect is a knife switch, turn it off and place your pad lock in the hole provided. Place a tag that is clearly readable with your name and how you can be reached on it, remember you are the only person that has a key to unlock this Disconnect. If the main Disconnect is a receptacle type, remove it and place a lockable box cover over it and tag it, again you keep the only key. If there is no disconnect you should turn off main breaker at power supply and physically disconnect the power output of the main breaker.

Power Supply and Grounding Connection

This instrument is designed to operate on AC 100 V input power voltage. If other than 100 V input power must be used, it is required to use the double installation transformer. Refer to <1.3.1 Power and Ground Wirings> for connection of the transformer. In this case, using a voltage meter, make sure that the output voltage of the transformer is 100 V.

Connect the instrument to ground based on the standard of your country. Avoid sharing the ground terminal with other power equipments. Be sure to ground the instrument independently.

SAFETY - 16

INTERLOCK

Electron Gun The Gun cable is now interlocked with a momentary switch.

If the cover at the top of the electron gun is removed to disconnect gun cable, the High Voltage applied to the electron gun is shut off. This switch can be overridden for service. However, if the cable is replaced the service override is removed.

Ion Pump The ion pump cover at the back of the electron optical column

has a safety interlock switch. If the cover is removed, the High Voltage supplied to the ion pumps is shut off and lamps in the RESET switches for ion pumps located on the evacuation control panel will go off. For service the switches can be overridden, but as soon as the ion pump cover is put again, the service override is removed.

Other High Voltages High voltage power supply for photo multipliers and electrodes

are placed inside of a box located at the behind of the specimen chamber. The cover of the box has a safety interlock switch. If the cover is removed, the High Voltage supplied to the photo multipliers and electrodes is shut off. For service the switches can be overridden, but as soon as the cover is put again, the interlock is functional.

Baking power supply Baking heater power supply connectors are placed at the right

side of the ion pumps cover. To connect heater connectors, the box cover of the connector must be removed. The box cover of the connector has a safety interlock switch. The baking power is shut off when the cover is removed. After connecting connectors, put the cover again. The baking power then becomes applicable.

Unit power supply Four side covers of the Main unit have safety interlock switches

one for each. If one of the side covers is removed, AC power supply for the Main unit (for evacuation system, ion pump power supply and stage controller) will be shut off. The switches can be overridden for service. However, if the covers are put again, the service override is removed. The interlock location is shown in fig S-6

Protection for Earthquakes It is recommended that the protection for movement of Main unit

and Display unit during earthquakes is to be provided by user as shown in figures S-7 and S-8.

Gravity location of units The gravity location of Main and Display unit are shown in fig S-

9 through S-11.

Water-leakage detection It is recommended that the water–leakage detector is to be

provided by user. Figure S-12 shows an example of the water– leakage detector.

SAFETY - 17

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Fig S- 6 Location of safety interlock

Fig S- 7 Protection from movement during earthquakes (Display unit)

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Fig S- 8 Protection from movement during earthquakes (Main unit)

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Fig S- 9 Gravity location of Main unit (Type1)

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Fig S- 10 Gravity location of Main unit (Type2)

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