Hitachi S-3400N User Manual

INSTRUCTION MANUAL

FOR

MODEL S-3400N

SCANNING ELECTRON MICROSCOPE

(User’s Operation/Maintenance Edition)

Please read through this manual carefully before using the instrument.

• Before using the instrument, read the safety instructions and precautions carefully.

• Keep this manual in a safe place nearby so it can be referred to whenever needed.

Hitachi Science Systems, Ltd.

NOTICE:

1. Information contained in this document is subject to

change without notice for improvement.

2. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved. No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation.

3. Hitachi High-Technologies Corporation assumes no liability for any direct, indirect, or consequential damages arising from use not described in this manual. Utmost care must be exercised when using the instrument.

4. This document does not provide any warranty or permission for industrial properties or any rights to grant license lawfully and without infringement.

FOREWORD

APPLICATION

CAUTION

• The S-3400N SEM utilizes an electron beam accelerated at 300V to 30kV. The instrument is designed mainly for observation and evaluation of specimens prepared for the SEM.

• Note that Hitachi Science Systems, Ltd. will not be responsible for injury or damage caused by usage of the instrument in a manner not described in this manual.

The electron microscope need not conform to the “Radiation Hazard Preventive Laws” or “Ionizing Radiation Hazard Preventive Regulations” currently in effect throughout the world, unlike the instruments designed to produce X-rays. The suggestion made by the ICRP (International Committee on Radiation Hazard Prevention), however, clearly defines that the electron microscope, like the home television set, will potentially produce a certain amount of X-rays as an undesirable byproduct. From a safety viewpoint, therefore, it is essential to operate the instrument carefully taking into account the following fundamental precautions.

(1) Use the instrument within the application range specified in the

catalog or instruction manual.

(2) Do not operate the instrument with covers or doors removed, nor use

alternatives for these components.

(3) Do not apply modifications which may possibly result in deactivation

of the built-in safety devices.

FOREWORD - 1

Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment.

Scope of Instruction Manual

This instruction manual comprises the following:

1. Installation (Requirements and Items to be prepared by User)

2. Function (Description of Controls)

3. Operation (Viewing Images, Saving Data, and Taking Photographs)

4. Maintenance (Procedures, Troubleshooting, and Action on Power Failure)

5. Replacement Parts

6. Accessory Operation

This instruction manual describes the operation, maintenance, and specific precautions pertinent to daily operation on the model S-3400N scanning electron microscope.

First, read and get familiar with the safety precautions described in the opening pages and General Safety Guidelines.

Ⓡ

Windows Windows Microsoft Note that the

is a registered trademark of Microsoft Corp., U.S.A.

Ⓡ

XP is a registered trade name of Microsoft Corp., U.S.A.

Ⓡ

EXCEL is a registered trade name of Microsoft Corp., U.S.A.

Ⓡ

mark is not indicated in this manual.

Acronyms

Listed below are acronyms frequently used in this manual.

• SEM : Scanning Electron Microscope

• WD : Working Distance

• SE : Secondary Electron

• BSE : Backscattered Electron

• PC : Personal Computer

• GUI : Graphical User Interface

FOREWORD - 2

GUARANTEE

Period of Guarantee

The charge-free guarantee period is one year from the date of installation.

Details of Guarantee

(a) The instrument will be repaired free of charge if it malfunctions due to a defect in

manufacture within the charge-free guarantee period.

(b) Note that a substitute part may be used for repair, or replacement with an equivalent

product may be made instead of repair.

modified for improvement may not be available in original versions at the time of replacement.

(d) Maintenance procedures are provided to allow system operation for 10 years after its

delivery. During this period, the maintenance of units or parts having a rather short product cycle such as personal computer and printer may entail the purchase of substitute parts because of limits on the repair period of the former, for which we request your understanding. Even when more than 10 years have elapsed after delivery, maintenance will basically be provided as long as the relevant units and parts are available.

Exclusions from Guarantee

The guarantee will not be valid for the following failures and/or cases even during the charge-free guarantee period.

(a) Failure due to use in improperly installed condition.

(b) Failure due to power supply voltage/frequency other than specified by Hitachi Science

Systems Ltd. or due to power failure.

supplied by the customer.

(d) Corrosion of electric circuits or deterioration of optical elements due to corrosive gases

or much dust contained in the atmosphere.

(e) Failure due to disassembly, modification, parts replacement, or relocation not approved

by Hitachi Science Systems, Ltd.

(f) Consumables and parts having a limited period of guarantee.

(g) Failure attributable to use of non-guaranteed parts (parts not described in the

instruction manual).

(h) Failure due to acts of God, including fire, earthquake, storm, flood, lightning, social

disturbance, riot, crime, insurrection, war (declared or undeclared), radioactive pollution, contamination with harmful substance, etc.

FOREWORD - 3

GUARANTEE

(i) Failure of instrument or damage of basic software, application software or other data

due to a computer virus.

(j) Failure of the PC used with the instrument or damage to basic software, application

software and/or data because of momentary voltage drop caused by lightning or power interruption.

(k) Failure of the PC used with the instrument or damage to basic software, application

software and/or data caused by turning off the PC main power without taking the normal termination procedure.

(l) Using the system in ways that are not covered in this operating manual, or employing

operating procedures not covered in the same; or failure of the system due to repairs performed not under control of Hitachi or under service personnel authorized by Hitachi.

(m) Failure of the system due to relocation or transport of the system after installation, not

under Hitachi's control or under the control of service personnel authorized by Hitachi.

(n) Failure of components outside the scope of the warranty, covered by operating

manuals.

Limitations on Guarantee

HITACHI SCIENCE SYSTEMS, LTD. MAKE NO GUARANTEES, EITHER EXPRESS OR IMPLIED, EXCEPT AS PROVIDED HEREIN, INCLUDING WITHOUT LIMITATION THEREOF, GUARANTEES AS TO MARKETABILITY, MERCHANTABILITY, FOR A PARTICULAR PURPOSE OR USE, OR AGAINST INFRINGEMENT OF ANY PATENT. IN NO EVENT SHALL HITACHI SCIENCE SYSTEMS, LTD. BE LIABLE FOR ANY DIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES OF ANY NATURE, OR LOSSES OR EXPENSES RESULTING FROM ANY DEFECTIVE PRODUCT OR THE USE OF ANY PRODUCT. NO ORAL OR WRITTEN INFORMATION OR ADVICE GIVEN BY HITACHI SCIENCE SYSTEMS, LTD., ITS DEALERS, DISTRIBUTORS, AGENTS OR EMPLOYEES SHALL CREATE A GUARANTEE OR IN ANY WAY INCREASE THE SCOPE OF THIS GUARANTEE.

FOREWORD - 4

INSTALLATION AND AFTER-SALES SERVICE

Installation

• Only the persons who have been trained by a certified engineer of the manufacturer are allowed to carry out the installation work

• Before installation, refer to section 1 and prepare the necessary utilities.

• Installation at another place after delivery will be provided at charge. Consult your

nearest Hitachi service representative for details.

After-sales Service

• For after-sales service of the instrument, contact the Hitachi sales or service representative in charge.

• For service after the guarantee period, consult Hitachi service with regard to a maintenance and inspection service contract.

CAUTION ON DISPOSAL OF INSTRUMENT

Although at present the instrument does not use materials that will directly harm the environment, changes are apt to be made in relevant laws and/or regulations, so be sure to consult a qualified specialist when planning to dispose of the instrument.

FOREWORD - 5

Available Training Programs

Hitachi service offers various kinds of training programs at its own facilities or at the user's site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them. Applicants will be charged.

Handling of Chemicals

(1) The user is responsible for proper handling and disposal of chemicals used for cleaning of

the equipment in accordance with applicable regulations.

(2) Follow the supplier's instructions on handling, storage, and disposal of chemicals.

Instruction Manual

(1) This instruction manual and those instruction manuals for relevant accessories may be

revised for improvement without prior notice.

(2) Hitachi Science Systems, Ltd. has the copyright of this instruction manual.

(3) Reproducing or copying of part or all of this instruction manual is not allowed without our

written permission.

FOREWORD - 6

For Safe Handling

Before operating the machine, read the following instructions carefully.

Safety precautions are indicated with the following headings combining the alert symbol “Caution”, and heading words:

, words “Danger”, “Warning”, and

: This safety alert symbol calls the user’s attention

to a danger that can potentially be injurious to people. To avoid the hazard, or even death, that can occur, all safety messages following the symbol must be heeded.

DANGER: Indicates an imminently hazardous situation that, if

not avoided, will result in death or serious injury.

WARNING: Indicates a potentially hazardous situation which, if

not avoided, can result in death or serious injury.

CAUTION: Indicates a hazardous situation that, if not avoided,

will or can result in minor or moderate injury, or serious damage of product.

IMPORTANT: Indicates a hazardous situation that, if not avoided,

can cause property damage.

In addition to the above hazard tips, precautions for safe operation are indicated with the following headings:

NOTICE: Indicates information and descriptions for ensuring

correct usage.

SAFETY - 1

General Precautions on Safety

Before Using the System

■ Before using this product, read the operating manual careful and

be sure to understand its contents.

■ The operating manual should be kept in a safe place near you for

ready access and reference.

■ The system should be handled according to the procedures given

in this manual.

■ Be sure to understand the safety-related instructions provided in

this manual and heed them.

■ Be sure to observe the precautions indicated on the system or in

the manual. Failure to heed such precautions can result in equipment damage or bodily injury.

For Safe Handling

■ Be sure to observe the operating instructions on the product itself

and those provided in its operating manual.

■ Do not carry out modification of the instrument, parts

replacement, use non-specified parts, nor detach safety mechanisms since this could be hazardous.

■ Do not perform any operation or action in any way other than as

provided in this manual. When in doubt, call the designated field engineer.

■ The customer is responsible for proper ventilation of the room

when using chemicals. Inadequate ventilation could cause a health hazard.

■ Most system operations are performed by viewing the monitor.

Looking at the monitor continuously for long hours can cause fatigue-related eye problems. For the safe system operation involving the use of display devices, adequate labor management standards should be established and implemented.

■ Keep in mind that the hazard warnings in this manual or on the

machine cannot cover every possible case, as it is impossible to predict and evaluate all circumstances beforehand. Be alert and use your common sense.

The above instructions should be observed strictly. Failure to do so can result not only in improper specimen observation and evaluation, but also in bodily injury.

SAFETY - 2

For Safe Handling

General Precautions on Safety (cont’d)

Precautions on Using the System

■ When leaving the system unattended, turn off the acceleration

voltage.

■ If abnormal conditions arise when the system is being used, such

as abnormal noise, noxious odor, fumes, or gas leakage, immediately shut off the power, shut the master gas valve, and take any other safety measures that the situation may dictate, and call the HS Service Department.

Precautions in Installation, Maintenance, and Relocations

■ To ensure the safe and accurate use of the system, installation

will be performed by either personnel from Hitachi’s Service Department or qualified engineers trained and certified by Hitachi.

■ Upon completion of the installation work, when receiving the

transfer of the product, please make sure that nothing is missing in the standard accessories that are supposed to come with the system. Operating the system with some standard accessories missing can lead to system malfunction and safety problems. If you notice anything missing, damaged, or out of the ordinary, please discuss the matter with installation personnel, the sales office servicing your installation, or the nearest Hitachi Service Department.

■ Servicing operations to be performed by the customer are limited

to the items covered in this operating manual. Maintenance services should be performed with a good understanding of the information contained in the manual. To avoid system malfunction, or even bodily injury, maintenance operations not covered in the manual should not be performed.

■ To avoid below-standard performance due to vibrations, the

system should not be moved after installation.

■ If the warning labels deteriorate due to aging or are damaged,

please contact the nearest Hitachi Service Department.

SAFETY - 3

For Safe Handling

Warnings in the Operating Manual

Warnings provided in this manual and where they occur are summarized below.

● This system does not have components that require

signs.

Warning Indicators

● Burns from the Rotary Pump

■ If it stops abnormally the rotary pump remains hot. Touching it

can cause burns. Do not touch the rotary pump in the event of an abnormal stoppage.

(Chapter 4 Maintenance)

● Burns from Touching the Filament Assembly

■ When the filament assembly is replaced, it can be as hot at 90℃.

Touching it can cause burns. When replacing a filament assembly, turn off the acceleration voltage, and let the assembly stand for 30 minutes or longer after the air is let in before working on it. Or, execute the filament exchange by using heatproof gloves of the clean room specification.

(Chapter 4 Maintenance)

Danger

● Beware of Electric Shock

■ Voltages up to 100 V AC and 30 kV DC are used inside this

instrument. Do not touch inside or you may receive an electric shock. Do not remove the covers of main unit and display unit and do not touch internal parts or circuits while the instrument power is turned on. There is a hazard of fatal or serious injury due to electric shock.

(Chapter 4 Maintenance)

SAFETY - 4

Warning Indicators (cont’d)

● Injury from Splashing Compressor Drain

■ The inside of the compressor tank is pressurized. When

draining off the compressor, jerky motion can cause the liquid to splash, causing eye injuries. When draining off the compressor, do not stand directly in front of the drain. Turn the drain cock slowly.

For Safe Handling

(Chapter 4 Maintenance)

SAFETY - 5

Caution Indicators

● Fatigue due to Long Hours of Operation

■ In operating the system while viewing the display, looking at the

display for long hours at the same posture can build up fatigue in the eyes or body. For your health, when operating the system for long hours, take a break 10 to 15 minutes every hour or so to rest your eyes and body.

● Injury from Lifting Heavy Objects

■ The goniometer (stage) is a heavy object. Removing the stage

involves the risk of dropping it accidentally, injury hands or feet. To avoid the danger, do not remove the stage from the system unit.

■ The rotary pump is a heavy object weighing approximately 30 kg.

When moving the rotary pump, it should be lifted by at least two persons to prevent your hands or feet from getting caught.

■ The weight is a heavy object, weighing as much as 40 kg. Any

installation or relocation of the weight must be performed by Hitachi or a service department authorized by Hitachi. The weight should not be lifted by customer personnel.

(Chapter 1 Specifications and Installation Requirement)

For Safe Handling

(Chapter 3 Operation)

(Chapter 2 System Configuration)

(Chapter 4 Maintenance)

● Injury from Getting Caught in a Heavy Object

■ The goniometer (stage) is a heavy object. When replacing

specimens, be sure to operate the stage by grasping the handle.

SAFETY - 6

(Chapter 3, Operation)

For Safe Handling

Caution Indicators (cont’d)

● Burns from Touching the Heated Aperture Plates

■ Heated aperture plates after baking are hot. Touching it can cause

burns. Do not touch the heated aperture plates heated with bare hands.

(Chapter 4 Maintenance)

SAFETY - 7

For Safe Handling

System Warning Labels

Safety pages 7 to 10 show Warning labels that are affixed to the S-3400N. The contents of the warning labels should be checked against the actual equipment. Warning labels should be checked, cleaned, and maintained from time to time so that they are clearly visible from a safe distance. If warning labels fade and become difficult to read due to aging, call the nearest Service Department for replacement.

(Front view) (Left side view)

Warning Label Pasting Locations on System Unit

SAFETY - 8

For Safe Handling

（Right side view） (Rear view)

Warning Label Pasting Locations on System Unit

SAFETY - 9

For Safe Handling

Warning Labels Pasting Locations on Rotary Pump

Motion shielding weight Compressor

（Top view） (Back view）

Warning Label Pasting Locations on Weight/Compressor

SAFETY - 10

For Safe Handling

Warning Label Pasting Locations Display Unit

(Front view) (Left side view)

SAFETY - 11

For Safe Handling

Precautions for Proper Operation

― Precautions for the Proper Operation of the S-3400N ―

About Electricity

(a) Single-phase AC 100 V(±10%), 50/60 Hz, 2 kVA (for main

unit).When the supplied power line voltage is 100 V, the instrument works by direct connection. When the supplied power line voltage is other than 100 V (200 V or others), use a step down transformer to step the power line voltage down to 100 V. Refer to Chapter 1 (Specifications and Installation Requirement) for the step down transformer requirement.

(b) Connect the instrument to ground based on the standard of your

country to prevent electric shock hazards due to the high voltage. Otherwise, you could suffer an electric shock or a malfunction could occur in the instrument. Avoid sharing the ground terminal with other power equipments. Be sure to ground the instrument independently. The image trouble and the malfunction of the equipment might be caused when sharing.

Handling Volatile Solvents

When handling a volatile solvent in cleaning components of this

system, take precautions on the following points:

(a) Volatile solvent should be handled at a place which is well

ventilated and is well away from flames.

(b) For handling volatile solvents, ventilation equipment and

protective gear should be provided at the customer’s discretion. The inhaling of a volatile solvent in excessive amounts can results in respiratory difficulties. If volatile solvent is swallowed or it gets onto the skin or into the eyes, symptoms of polyneuritis including anesthesia and ataxia (difficulty in walking) may develop.

SAFETY - 12

Precautions on Proper Operation (cont’d)

Third Party’s Industrial or Proprietary Rights

Hitachi Science Systems, Ltd. shall not be responsible for a third party’s claim regarding infringement of any patent rights or industrial properties with respect either to products manufactured through the use of equipment supplied by Hitachi or its related companies or to applications of the Hitachi equipment.

Laser Light Hazard

The CD-ROM or CD-R/W drive in the personal computer is equipped with a laser device. The personal computer with laser device complies with safety standards including International Electrotechnical Commission (IEC) 825. With specific regard to the laser, the equipment complies with laser product performance standards set by U.S. governmental agencies for a Class 1 laser product. The product does not emit hazardous light; the beam is totally enclosed during all modes of customer operation and maintenance. Therefore be sure to observe the following warnings when operating a product equipped with a laser device.

• Do not try to open the unit enclosure. There are no user-serviceable components inside.

• Do not operate controls, make adjustments, or perform procedures with the laser device other than those specified herein.

• Allow only service personnel to repair the unit.

Laser Information: Laser type: Semiconductor GaAlAs Wavelength: 780 ± 35 nm Divergence angle: 53.5° ± 0.5° Output power: Less than 0.2 mW or 10,869 W m-2 sr-1 Polarization: Circular 0.25 Numerical aperture: 0.45 ± 0.04 inches

Harmful Chemicals

For Safe Handling

This product contains chemicals, including lead, known to the State of California to cause cancer, and birth defects or other reproductive harm. Wash hands after handling.

SAFETY - 13

Precautions on Proper Operation (cont’d)

Backup of Important Data

Trouble-free operation cannot be guaranteed for the computer system. You are recommended to copy important data on the hard disk into floppy disks (FD) or magneto-optical disks (MO) at a regular interval

About Computer Applications Software

Other applications software should not be installed on the PC that is a part of this system. Such software can cause unexpected animation screens to pop up, exert adverse impact on the system, and interfere with the operation of the system. The warranty does not cover situations where the system fails to run properly due to the installation of other application software.

Protection against Computer Viruses

For Safe Handling

Computer viruses are malicious programs that sneak into the PC to cause misbehavior or damage to data. And, a program designed to offer protection against and eradicate computer viruses is called a vaccine program. Using a floppy disk or other storage medium infected by a virus can cause virus infection. Note also that once a virus infects the PC, it may spread to other computers through storage media. Therefore, never use a program or storage medium that is suspected of containing a virus. If there is a possibility of virus infection, check for a virus using a vaccine program. The user is requested to prepare a proper vaccine program and carry out virus removal on his or her own responsibility. Note, however, that some kinds of vaccine programs may cause incorrect operation of the S-3400N control program. If a problem occurs after you install a vaccine program, remove it or execute virus check when the S-3400N program is not running. It is desirable not to set the vaccine program in the auto start-up group, or to terminate the vaccine program before starting the S-3400N program.

SAFETY - 14

Precautions on Proper Operation (cont’d)

About Changes in Computer Settings

Do not change the following system settings of your PC. These are set up at the optimum conditions for operation of the S-3400N SEM before shipping.

(a) Connection to the USB ports

This instrument uses a USB port for communication between the PC and the internal microprocessor. The USB port number 1 is assigned to the instrument. Therefore, if external storage devices or printers are to be connected to USB ports, ports that are available to users are subject to restrictions.

(b) Monitor screen setting

Monitor properties need to be set at 1280×1024 pixels for the desktop area, true color (24 bit) mode and 60 Hz to 70 Hz for the refresh rate. Using other resolution, faster refresh rate or 256 color mode may cause an abnormal screen display.

For Safe Handling

This instrument operates using many DLL programs along with the control program. Deletion of files in the Windows directory or change of the registry will cause troubles. Also do not delete tasks and processes using the task manager.

(d) Screen saver settings

The screen saver can cause to exert adverse impact on the system, and to interfere with the operation of the system. For using the screen saver, read the following carefully.

(1) Use only the screen saver of the windows standard.

The operation of the screen savers other than the Windows standard are not guaranteed.

(2) Password Protection should not be set on a screen saver.

Password Protection can prevent SEM images to display properly when the system wakes up from the screen saver mode. . If you need to lock Windows when leaving your work

site, the option to activate Password Locking from the S-3400N Control Program should be used. See 3.9.19 Password Locking of Windows.

SAFETY - 15

For Safe Handling

(e) Power Saving mode

Do not use the Power Saving mode. It will cause trouble in communication between the PC and internal microprocessor.

(f) Virtual memory setting

Do not change the virtual memory setting.

(g) Any saved image data is subject to control by SEM data

Manager. Image files should not be renamed or deleted by using Windows File Manager or Windows Explorer. The use of Windows File Manager or Windows Explorer can cause a conflict between the data controlled by SEM Data Manager and the actual data. Such files generate a “Reference disabled” message on SEM Data Manager. If such a conflict arises, the offending file should be deleted by using the Remove List Function of the Batch Process of SEM Data Manager. Valuable images contained in such a file can be re-registered using the Add From File function.

SAFETY - 16

Precautions on Proper Operation (cont’d)

OS Operation during S-3400N SEM Operation

Although the Windows Task Manager can be launched from the Taskbar or by Ctrl+Alt+Del key operation, if Standby or Halt mode is set or logged-off while the S-3400N control program is running, it will not work normally when recovered from such a status. Close S-3400N control program if setting of such mode is necessary.

USB Devices

When connecting USB devices such as external storage unit, printer etc., take notice of the following.

(1) USB Port 1 is used by the display control unit, ports available to

users are subject to restrictions.

For Safe Handling

(2) Terminate S-3400N control program when carrying out disk

formatting or copying a large volume of image files to MO disk, hard disk or other storage devices using USB port.

(3) By the above operation, sometimes the message “USB not

connected” will be shown. In such case, S-3400N control program will not continue normal operation. If this message appears, close Windows, shut down the PC, turn off the key switch for the system unit, wait 30 seconds, and then restart the system by turning on the power again.

SAFETY - 17

Precautions on Proper Operation (cont’d)

Network Connection

The PC is equipped with Ethernet ports for network connectivity. Performing a network connection using the Ethernet requires extensive knowledge of the network environment. Such a connection should be undertaken in consultation with the Network Administrator.

(1) Connecting a cable to an Ethernet port is carried out by Hitachi

(2) Ethernet cables are not included as part of the system. Cables

(3) For a network connection, setting in the PC should be modified

For Safe Handling

Science installation engineers or service engineers. Consult your nearest Hitachi Science service representative for details.

should be procured as necessary. For detail, refer to About Changes in Computer Settings in this chapter.

with adequate care. Unwittingly changing the settings required by the operation of the system can disable the system.

(4) No special software should be installed for network connection.

Such software can adversely impact the system and even disable it. When connecting your system to a special network, please consult the sales representative or the Service Department that handles your system.

(6) Connecting to an external device, such as EDX, using an optional

external communications interface requires the use of an Etherport. Therefore, for connecting to a device other than an external device, a branching hub should be procured. Some external devices come equipped with a standard hub, which should be verified with your servicing sales representative.

(7) A network connection using the Microsoft TCP/IP protocol

requires an IP address, which should be set up in consultation with a Network Administrator. Connecting to an external device, such as EDX, requires another IP address specifically for connection to that device.

NOTICE The user is requested to prepare a proper Computer

viruses protection on his or her own responsibility with consulting to the network administrator. It is not guaranteed Failure of instrument or damage of basic software, application software or other data due to a computer virus.（For detail, refer to Protection against

Computer Viruses in this chapter.）

SAFETY - 18

Precautions on Proper Operation (cont’d)

Using Other Windows Applications

Running non-SEM Windows applications (especially the Printer or Internet Explorer) during a SEM operation, especially image capture, transfer of saved.

Personal Computer (PC)

Do not turn off the PC power independently. If the PC power is turned off during access to hard disk or floppy disk, the PC or data and programs stored therein may be damaged.

Be sure to close the S-3400N control program, shut down Windows, and after the PC is automatically shut off or a “You can now safety turn off the computer” message has appeared, turn off the power switch (key switch) on the S-3400N system unit.

For Safe Handling

If the PC lock up for some reason, take steps to shut down the PC safely by referring to 4.4.9 When PC has Hung Up.

SAFETY - 19

Precautions on Proper Operation (cont’d)

Transportation and Relocation of Instrument

(a) The transport of the system, which carries considerable risk,

should never be attempted by a customer. Any system transport should be performed with the assistance and supervision of Hitachi-approved engineers.

(b) Do not lift the instrument by holding the table. The strength of

table fitting is not sufficient for bearing the weight of display unit, approximately 120 kg. Should the table be lifted, the display unit might slip off and crash. Hence, it is recommended to remove the table and transport the display unit independently when moving the instrument.

Ambient Temperature and Humidity

For Safe Handling

Even when the system is not running, the room in which the system is installed should be maintained under the following environmental conditions:

Room temperature: 15℃ to 30℃

Humidity: 70％ or lower (no condensation)

If the system is not used for a long time, the specimen chamber should be evacuated instead of being exposed to the atmosphere.

SAFETY - 20

Additional Information of PC Setting

Setting of Windows (r) XP Professional Service Pack2 in S-3400N

1. Outline

As of February 2005, OS of the personal computer for the PC-SEM control is Windows XP Professional Service Pack2 (SP2). In SP2, a security function is strengthening in addition to accumulation of the correction program published in the past. The setting of SP2 when PC-SEM is shipped from factory is described as follows. The factory does not provide guarantee when PC-SEM is used in the settings not described in this manual.

2. Setting of Security Center

(1) Click Start button, and select Control panel. (2) Click Security Center icon.

2.1 Firewall

The Firewall is set to ON. When you confirm this setting, refer to the following procedures.

(1) Click Windows Firewall in the Windows Security Center window.

Fig. 1 The Windows Security Center Window

PC - 1

The Windows Firewall is set as shown in the figure below. To restore all Windows Firewall settings to a default state, select the Advanced tab and click the Restore Defaults button.

Fig. 2 The Windows Firewall Dialogs

PC - 2

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