AIR-COOLED
NEW
VUV LIGHT SOURCE UNIT L8998
Equipped with vacuum flange (ICF70)
OVER VIEW
Hamamatsu now introduces a vacuum ultraviolet
(VUV) light source that combines a 30 watt head-on
type deuterium lamp with a vacuum flange. Its compact size and air-cooled configuration allow easy
handling and operation. The deuterium lamp uses
an MgF2 (magnesium fluoride) window to efficiently
transmit VUV radiation down to 115 nm.
The vacuum flange (ICF70), assembled as a standard feature, connects easily to most vacuum chambers.
A metal connector on the lamp housing permits
easy connection to a dedicated power supply also
available from Hamamatsu.
Left: Power supply, Right: Light source
FEATURES
●High VUV radiation output intensity
●Air-cooled (no cooling water required)
●Equipped with vacuum flange (ICF70)
APPLICATIONS
●VUV spectrophotometers
●Optical vapor phase growth
●VUV lithography
●Excitation light sources
●Light chemical reaction
●Experiment and study using VUV light
SPECIFICATIONS
●GENERAL RATINGS
Parameter
Spectral Distribution
Window Material
Aperture Size
Cooling Method
Operating Temperature Range
Operating Humidity Range *
* Without moisture condensation
●RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C)
Parameter
Warm-up Time
Discharge Starting Voltage (DC)
Anode Current (DC)
Tube Drop Voltage (DC)
Output Stability
Light Source Estimated Life (at 160 nm)
Input Voltage (AC)
Power Consumption
Drift
Fluctuation (p-p)
●VACUUM FLANGE
Parameter
Flange Standard
Hermetic Seal Method
Sealing Force Retention
Description/Value
115 to 400
2
MgF
1.0
Air-cooled
10 to 35
20 to 85
Description/Value
30
400
300
80
±1.0
0.05
300
90 to 115 / 180 to 250 (Auto)
140
Description
ICF70 (P.C.D. 58.7 mm - 6 holes)
Gasket
-6
5 × 10
Pa•m3•s-1 or less
Unit
nm
—
mm
—
°C
% RH
Unit
s
V Min.
mA
V Typ.
%/h Max.
% Max.
h
V
VA
SPECTRAL DISTRIBUTION
(VUV region; reference data)
TLSOB0079EA
100
80
60
40
RELATIVE OUTPUT
20
0
140120100
WAVELENGTH (nm)
240 400220200180160