HAMAMATSU F6589 Datasheet

FEATURES

● Ultra Thin Type: 2.5 mm (Max.)

• Detection at closed distance from samples

● Flexible Lead Out (polymide film)

• Easy system design with a flexible wiring

• Low outguessing for high vacuum operation

● Light Weight

APPLICATIONS

● SEM

● FIB System

ULTRA THIN MCP ASSEMBLY
WITH CENTER HOLE
F6589

● Mask Aligner

● Electron Beam Measuring System

SPECIFICATIONS

Parameter Value Unit

GENERAL

Assembly Outer Diameter 28.0 mm
Effective Diameter 11.0 mm
Maximum Height 2.5 mm
MCP Channel Diameter 12 µm
MCP Stage Number 2 stage
Centerpipe Inner Diameter 1 mm
Dead Area around Center Hole 4 mm

Electrical Potential

MAXIMUM RATINGS

MCP Supply Voltage (In-Out) 2.0 kV
MCP Out-Anode Voltage 0.4 kV
Anode-Substrate Voltage 2.4 kV
Operating Vacuum Condition Less than 6.7 × 10
Ambient Temperature -50 to +70 °C
Baking Temperature 200 °C
Baking Time 8 hours
Vacuum Condition for Baking Less than 6.7 × 10

• Not allowed to be baked.

MCP-in -0.4 to +0.4
Anode +2.4 (Max.)

-4

-4

(5 × 10

(5 × 10

-6

) Pa (Torr)

-6

) Pa (Torr)

TMCPF0083

kV

CHARACTERISTICS

Gain at 1.8kV 1 × 10 6 Min. –
Plate Resistance 50 to 200 MΩ/MCP

Maximum Linear Output
DC Dark Current at 2kV 1 × 10

Dark Count at 2kV 3 cps

Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.

Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. © 1997 Hamamatsu Photonics K. K.

7% of strip current under uniform input into

whole MCP effective area

-10

µA

A

ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589

,

Figure 1: Merit of Ultra Thin MCP Assembly with Center Hole

ULTRA THIN TYPE CONVENTIONAL TYPE

Electron Electron

MCP

Secondary Electrons

Sample

Detection efficiency of secondary Electrons is improved with a closed distance from
sample.

Figure 2: Dimensional Outline (Unit: mm)

ANODE LEAD

MCP-OUT LEAD

63

58

Stage

8

10

MCP

Secondary Electrons

Sample

MCP-IN LEAD

ø6

ø4

ø2.2

POLYIMIDE FILM (Less Than 0.1t)
ELECTRODE : COPPER

Stage

TMCPC0039EA

SUBSTRATE
(TITANIUM)

ø11
ø18
ø28

ø1

EFFECTIVE AREA

PROTECTION ELECTRODE
FOR CHARGING-UP

2.5 MAX.

(SAME POTENTIAL AS SUBSTRATE)

SUBSTRATE

MCP (2 STAGE)

HAMAMATSU PHOTONICS K.K., Electron Tube Center
314-5, Shimokanzo, Toyooka-village, Iwata-gun, Shizuoka-ken, 438-0193, Japan, Telephone: [phone], Fax: [phone]

U.S.A.:

Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: [phone], Fax: [phone]

Germany:

Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: [phone], Fax: [phone]

France:

Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: [phone], Fax: [phone]

United Kingdom:
North Europe:
Italy:

Hamamatsu Photonics Italia S.R.L.: Via Della Moia, 1/E 20020 Arese, (Milano), Italy, Telephone: [phone], Fax: [phone]

Hamamatsu Photonics UK Limited: Lough Point, 2 Gladbeck Way, Windmill Hill, Enfield, Middlesex EN2 7JA, United Kingdom, Telephone: [phone], Fax: [phone]

Hamamatsu Photonics Norden AB: Färögatan 7, S-164-40 Kista, Sweden, Telephone: [phone], Fax: [phone]

ANODE
(SUS-NM)

TMCPA0031EA

TMCP1011E03
MAR. 1998. CR (9705)
Printed in Japan