Granville-Phillips - AKA Brooks 275 User Manual

Series 275

Granville-Phillips® Series 275 Mini-Convectron® Vacuum Gauge Module with Nonlinear Analog Outputs and Process Control Relays

Instruction Manual

Instruction manual part number 275512

Revision A - February 2013

Series 275

Granville-Phillips® Series 275 Mini-Convectron® Vacuum Gauge Module with Nonlinear Analog Outputs and Process Control Relays

This Instruction Manual is for use with all Granville-Phillips Series 275 Mini-Convectron Vacuum Gauge Modules With Nonlinear Analog Outputs and Process Control Relays. A list of applicable catalog numbers is provided on the following page.

Customer Service/Support

For customer service within USA, 8 AM to 5 PM

Mountain Time Zone, weekdays excluding holidays:

Granville-Phillips

6450 Dry Creek Parkway

Longmont, CO 80503 USA

Phone: [phone]

Phone: [phone]

FAX: [phone]

Email: [e-mail]

Brooks Automation, Inc.

15 Elizabeth Drive

Chelmsford, MA 01824 USA

Phone: [phone]

For customer service, 24 hours per day, 7 days per week, every day of the year including holidays within the USA:

Phone: [phone]

www.brooks.com

Instruction Manual

©2013 Brooks Automation. All rights reserved.

Granville-Phillips® and Convectron® are registered trademarks of Brooks Automation, Inc. All other trademarks and registered trademarks are the properties of their respective owners.

Catalog numbers for Series 275 Mini-Convectron Modules (CE Marked)

With electrical connector. Operating power: 11.5 Vdc to 26.5 Vdc

Mini-Convectron Module with one setpoint relay

1/8 NPT / 1/2 inch tubulation	275800-EU
1/4 inch VCR-type female fitting	275801-EU
1/2 inch VCR-type female fitting	275863-EU
3/8 inch VCO-type male fitting	275802-EU
1.33 inch (NW16CF) ConFlat-type flange	275803-EU
2.75 inch (NW35CF) ConFlat-type flange	275804-EU
NW16KF flange	275806-EU
NW25KF flange	275807-EU
NW40KF flange	275808-EU

Mini-Convectron Module with two setpoint relays

1/8 NPT / 1/2 inch tubulation	275870-EU
1/4 inch VCR-type female fitting	275871-EU
1/2 inch VCR-type female fitting	275867-EU
3/8 inch VCO-type male fitting	275872-EU
1.33 inch (NW16CF) ConFlat-type flange	275873-EU
2.75 inch (NW35CF) ConFlat-type flange	275874-EU
NW16KF flange	275876-EU
NW25KF flange	275877-EU
NW40KF flange	275878-EU

Mini-Convectron Module with two setpoint relays and 3-digit digital display

Display in Torr
1/8 NPT / 1/2 inch tubulation	275904-EU
1/4 inch VCR-type female fitting	275905-EU
1/2 inch VCR-type female fitting	275906-EU
3/8 inch VCO-type male fitting	275907-EU
1.33 inch (NW16CF) ConFlat-type flange	275908-EU
2.75 inch (NW35CF) ConFlat-type flange	275909-EU
NW16KF flange	275911-EU
NW25KF flange	275912-EU
NW40KF flange	275913-EU
Display in Pascal
1/8 NPT / 1/2 inch tubulation	275904-EU-P
1/4 inch VCR-type female fitting	275905-EU-P
1/2 inch VCR-type female fitting	275906-EU-P
3/8 inch VCO-type male fitting	275907-EU-P
1.33 inch (NW16CF) ConFlat-type flange	275908-EU-P
2.75 inch (NW35CF) ConFlat-type flange	275909-EU-P
NW16KF flange	275911-EU-P
NW25KF flange	275912-EU-P
NW40KF flange	275913-EU-P

Table of Contents

Chapter 1	Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .		7
	1.1	About These Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . .	7
	1.2	Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	7
	1.3	Caution and Warning Statements . . . . . . . . . . . . . . . . . . . .	8
	1.4	System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	8
	1.5	Implosion / Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	9
	1.6	Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	9
	1.7	Reading and Following Instructions . . . . . . . . . . . . . . . . . .	10

Chapter 2	Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .		11
	2.1	Module Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	11
	2.2	Installing Pressure Relief Devices . . . . . . . . . . . . . . . . . . . .	12
	2.3	Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	13
	Step 1 Locate and orient the module . . . . . . . . . . . . . . . . . . . . . . .		13
		Locate the Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	13
		Orient the Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	15
	Step 2 Attach the module to the vacuum chamber . . . . . . . . . . . . .		16
		1/8 NPT pipe thread . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	16
		VCR type fitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	16
		KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	16
		ConFlat flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	16
	Step 3 Assemble and connect the wiring . . . . . . . . . . . . . . . . . . . .		17
		Connecting Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	17
		Wiring Terminals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	17
		Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	18
	Step 4 Configure the setpoint relays for the application . . . . . . . . .		19
	Step 5 Calibrate the Convectron gauge . . . . . . . . . . . . . . . . . . . . .		19
		Atmospheric Pressure Calibration . . . . . . . . . . . . . . . . . . . .	19
		Vacuum Chamber Pressure Calibration . . . . . . . . . . . . . . . .	19

Chapter 3	Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .		21
	3.1	Preparing to Operate the Module . . . . . . . . . . . . . . . . . . . .	21
	3.2	Nonlinear Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . .	26
		Commonly used Gases Other than N2 or Air . . . . . . . . . . . .	26
		Other Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	26
	3.3	Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	37
		Preparing to Adjust Setpoint Relays . . . . . . . . . . . . . . . . . . .	38
		Adjusting Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . .	39
	3.4	Reading Relay Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	42
	3.5	Calibrating Convectron Gauge at Atmospheric Pressure . . .	42
	3.6	Calibrating Convectron Gauge at Vacuum Chamber Pressure	44
	3.7	Modules Operating at Low Pressure . . . . . . . . . . . . . . . . . .	44
	3.8	Factory Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	45

Mini-Convectron Module Instruction Manual - 275512 - Rev. A

5

Table of Contents

Chapter 4	Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .		47
	4.1	Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	47
		Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . .	47
	4.2	Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	48
		Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	48
		Symptoms, Causes, and Solutions . . . . . . . . . . . . . . . . . . . .	49
	4.3	Convectron Gauge Test . . . . . . . . . . . . . . . . . . . . . . . . . . . .	50
	4.4	Convectron Gauge Removal and Replacement . . . . . . . . . .	51
		Removing the Convectron Gauge . . . . . . . . . . . . . . . . . . . .	51
		Replacing the Convectron Gauge . . . . . . . . . . . . . . . . . . . .	51
	4.5	Returning a Product for Repair . . . . . . . . . . . . . . . . . . . . . .	52
Appendix A	Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .		53
Appendix B	Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .		57
Index . . . . . . . . . . . . . . . . . . . . . .	. . . . . . .	. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .	59

6	Mini-Convectron Module Instruction Manual - 275512 - Rev. A

Chapter 1 Before You Begin

1.1About These Instructions These instructions explain how to install, operate, and maintain the

Granville-Phillips® Mini-Convectron® vacuum gauge module.

•This chapter explains caution and warning statements, which must be adhered to at all times; explains your responsibility for reading and following all instructions; defines the terms “module” and “Convectron gauge”; and tells you how to contact customer service.

•Chapter 2 explains how to install the module.

•Chapter 3 explains how to operate the module, which has two programmable setpoint relays.

•Chapter 4 explains troubleshooting, Convectron gauge testing, removal and replacement, and module return procedures.

•Appendix A provides specifications for the module.

•Appendix B explains terminology and explains how the Convectron convection-enhanced Pirani heat-loss gauge measures pressure.

Table 1-1 Terms Describing the Mini-Convectron Module and Components

Term		Description
Module		The Mini-Convectron vacuum gauge module, which contains a Convectron
		convection-enhanced Pirani heat-loss pressure gauge.
Convectron gauge		The Convectron convection-enhanced Pirani heat-loss gauge, which measures
		pressure within the vacuum chamber
1.2	Customer Service	For customer service:
		• Phone [phone] or 1-800-776-6543 within USA

• Phone [phone] hours per day, 7 days per week within the USA

• Email [e-mail]

• For Global Customer Support, go to www.brooks.com and click on Services to locate the Brooks Automation office nearest you.

Begin You Before

Installation

Operation

Mini-Convectron Module Instruction Manual - 275512 - Rev. A

7

Maintenance

Chapter 1

1.3	Caution and Warning	This manual contains caution and warning statements with which you must
	Statements	comply to prevent inaccurate measurement, property damage, or personal
		injury.

CAUTION

Caution statements alert you to hazards or unsafe practices that could result in minor personal injury or property damage.

Each caution statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice.

WARNING

Warning statements alert you to hazards or unsafe practices that could result in severe property damage or personal injury due to electrical shock, fire, or explosion.

Each warning statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice.

Caution and warning statements comply with American Institute of Standards Z535.1–2002 through Z535.5–2002, which set forth voluntary practices regarding the content and appearance of safety signs, symbols, and labels.

Each caution or warning statement explains:

a. The specific hazard that you must prevent or unsafe practice that you must avoid,

b. The potential result of your failure to prevent the specified hazard or avoid the unsafe practice, and

c. What you must do to prevent the specified hazardous result.

1.4	System Grounding	Grounding, though simple, is very important! Be certain that ground
		circuits are correctly used on your ion gauge power supplies, gauges, and
		vacuum chambers, regardless of their manufacturer. Safe operation of

vacuum equipment, including the Mini-Convectron Module, requires grounding of all exposed conductors of the gauges, the controller and the vacuum system. LETHAL VOLTAGES may be established under some operating conditions unless correct grounding is provided.

8	Mini-Convectron Module Instruction Manual - 275512 - Rev. A

Before You Begin

		Ion producing equipment, such as ionization gauges, mass spectrometers,
		sputtering systems, etc., from many manufacturers may, under some
		conditions, provide sufficient electrical conduction via a plasma to couple
		a high voltage electrode potential to the vacuum chamber. If exposed
		conductive parts of the gauge, controller, and chamber are not properly
		grounded, they may attain a potential near that of the high voltage electrode
		during this coupling. Potential fatal electrical shock could then occur
		because of the high voltage between these exposed conductors and ground.
1.5	Implosion / Explosion	Danger of injury to personnel and damage to equipment exists on all
		vacuum systems that incorporate gas sources or involve processes capable
		of pressuring the system above the limits it can safely withstand.
		For example, danger of explosion in a vacuum system exists during
		backfilling from pressurized gas cylinders because many vacuum devices
		such as ionization gauge tubes, glass windows, glass belljars, etc., are not
		designed to be pressurized.
		Do not attach cables to glass gauge pins while the gauge is under vacuum.
		Accidental bending of the pins may cause the glass to break and implode.
		Cables, once installed, should be secured to the system to provide strain
		relief for the gauge tube pins.
		Install suitable devices that will limit the pressure from external gas sources
		to the level that the vacuum system can safely withstand. In addition, install
		suitable pressure relief valves or rupture disks that will release pressure at a
		level considerably below that pressure which the system can safely
		withstand.
		Suppliers of pressure relief valves and pressure relief disks are listed in
		Thomas Register under "Valves, Relief", and "Discs, Rupture".
		Confirm that these safety devices are properly installed before installing the
		the Mini-Convectron Module. In addition, check that (1) the proper gas
		cylinders are installed, (2) gas cylinder valve positions are correct on
		manual systems, and (3) the automation is correct on automated systems.
1.6	Operation	It is the installer's responsibility to ensure that the automatic signals
		provided by the process control module are always used in a safe manner.

Carefully check manual operation of the system and the setpoint programming before switching to automatic operation. Where an equipment malfunction could cause a hazardous situation, always provide for fail-safe operation. As an example, in an automatic backfill operation where a malfunction might cause high internal pressures, provide an appropriate pressure relief device.

Begin You Before

Installation

Operation

Mini-Convectron Module Instruction Manual - 275512 - Rev. A

9

Maintenance

Chapter 1

1.7Reading and Following You must comply with all instructions while you are installing, operating,

Instructions	or maintaining the module. Failure to comply with the instructions violates
	standards of design, manufacture, and intended use of the module.
	Granville-Phillips and Brooks Automation disclaim all liability for the
	customer's failure to comply with the instructions.
	• Read instructions – Read all instructions before installing or operating the
	product.
	• Follow instructions – Follow all installation, operating and maintenance
	instructions.
	• Retain instructions – Retain the instructions for future reference.
	• Heed warnings and cautions – Adhere to all warnings and caution
	statements on the product and in these instructions.
	Parts and accessories – Install only those replacement parts and accessories
	that are recommended by Brooks Automation, Inc./Granville-Phillips.
	Substitution of parts is hazardous.

10	Mini-Convectron Module Instruction Manual - 275512 - Rev. A

		Chapter 2	Installation
2.1	Module Components	The Mini-Convectron module contains a Convectron convection-enhanced
		Pirani heat-loss gauge.

WARNING

Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage or personal injury.

Do not use the module to measure the pressure of flammable or explosive gases.

The module is shipped with an instrument screwdriver and a 15-pin female, high-density subminiature D connector that mates to the male connector on the module.

Figure 2-1 illustrates the module without the digital display. The module without the display may have one setpoint relay or two setpoint relays.

Figure 2-2 illustrates the module with the 3-digit digital display. The module with the display has two setpoint relays.

Figure 2-1 Mini-Convectron Module without Digital Display

Mini-Convectron module with	Mini-Convectron module with
one setpoint relay, no display	two setpoint relays, no display

Begin You Before

Installation

Operation

Mini-Convectron Module Instruction Manual - 275512 - Rev. A

11

Maintenance

Chapter 2

Figure 2-2 Mini-Convectron Module with two Setpoint Relays and 3-Digit Digital Display

2.2Installing Pressure Relief Before you install the module, install appropriate pressure relief devices in

Devices	the vacuum system.
	Brooks Automation, Inc. does not supply pressure relief valves or rupture
	disks. Suppliers of pressure relief valves and rupture disks are listed in the
	Thomas Register under “Valves, Relief” and “Discs, Rupture.”

CAUTION

Operating the module above 1000 Torr (1333 mbar, 133 kPa) true pressure could cause pressure measurement error or product failure.

To avoid measurement error or product failure due to overpressurization, install pressure relief valves or rupture disks in the system if pressure exceeds 1000 Torr (1333 mbar, 133 kPa).

12	Mini-Convectron Module Instruction Manual - 275512 - Rev. A

Installation

2.3

Installation Procedure

The module installation procedure includes the following steps:

1.Locating and orienting the module.

2.Attaching the module vacuum chamber fitting to its mate on the vacuum chamber.

3.Assembling and connecting module wiring.

4.Configuring the setpoint relays to the desired voltage levels.

5.Calibrating the Convectron gauge at atmospheric and vacuum pressures.

			WARNING
			Failure to use accurate pressure conversion data for N2
			or air to other gases can cause an explosion due to
			overpressurization.
			If the module will measure any gas other than N2 or air, before
			putting the module into operation, adjust setpoint relays for the
			process gas that will be used.
	Step 1		Locate and orient the module
	To locate and orient the module, refer to Figure 2-3, Figure 2-4, and
	Table 2-1, and follow the instructions below.
Locate the Module	• For greatest accuracy and repeatability, locate the module in a stable,
	room-temperature environment. Ambient temperature should never
	exceed 40 °C (104 °F) operating, non-condensing, or 85 °C (185 °F)
	non-operating.

•Locate the module away from internal and external heat sources and in an area where ambient temperature remains reasonably constant.

•Do not locate the module where it requires long lengths of tubing or has constricted tubing. Length of tubing depends on the application. Longer tubing will affect vacuum pressure limit and response time.

•Do not locate the module near the pump, where gauge pressure might be lower than normal vacuum chamber pressure.

•Do not locate the module near a gas inlet or other source of contamination, where inflow of gas or particulates causes atmospheric pressure to be higher than system atmosphere.

•Do not locate the module where it will be exposed to corrosive gases such as mercury vapor or fluorine.

•Do not locate the module where it will vibrate. Vibration causes convection cooling, resulting in inaccurate high pressure readings.

Mini-Convectron Module Instruction Manual - 275512 - Rev. A

13

Begin You Before

Installation

Operation

Maintenance

Chapter 2

Figure 2-3 Mini-Convectron Module Dimensions
11	4.1
(4.3)	(1.6)

6.4

(2.5)

Dim. H

5.5

(2.2)

Table 2-1 Mini-Convectron Vacuum Connections

Vacuum Connections		Dim. H
	cm		in.
1/8 NPT pipe thread, ½-inch inside diameter	2.2		0.9
½-inch 4 VCR® type fitting, female	3.0		1.2
½-inch 8 VCR type fitting, female	3.9		1.5
NW16KF flange	3.1		1.2
NW25KF flange	3.1		1.2
NW40KF flange	3.7		1.5
1.33-inch (NW16CF) ConFlat® flange	3.8		1.5
2.75-inch (NW35CF) ConFlat flange	3.8		1.5

14	Mini-Convectron Module Instruction Manual - 275512 - Rev. A

	Installation
Orient the Module	For proper operation of the module above 1 Torr, orient the module so the
	axis is horizontal (see Figure 2-4). Although the Convectron gauge will read
	correctly below 1 Torr with the module mounted in any position, inaccurate
	readings will result at pressures above 1 Torr if the module axis is not
	horizontal.
Figure 2-4 Module Orientation

Mount the Module Axis Horizontally to Ensure Accurate Measurement Above 1 Torr

	chamber Vacuum
Vacuum chamber	Vacuum
Vacuum chamber	chamber

V

a c u u

m

c h a

m

b e r

Vacuum

V

a c u u

m

Recommended

Not recommended

Begin You Before

Installation

Operation

Mini-Convectron Module Instruction Manual - 275512 - Rev. A

15

Maintenance

Chapter 2

Step 2 Attach the module to the vacuum chamber

Attach the module vacuum chamber fitting to its mate on the vacuum chamber.

		CAUTION
		Twisting the module to tighten the fitting to the vacuum
		chamber can damage the module’s internal connections.
		• Do not twist the module to tighten the fitting.
		• Use appropriate tools to tighten the fitting.
1/8 NPT pipe thread	The 1/8 NPT pipe thread accommodates a standard 1/8 NPT female fitting.
	a.	Wrap the threads of the port to the vacuum chamber with thread seal
		tape.
	b.	Without using a wrench or other tool, tighten the module just enough
		to achieve a seal.
VCR type fitting	a.	Remove the plastic or metal bead protector cap from the fitting.
	b.	If a gasket is used, place the gasket into the female nut.
	c.	Assemble the components and tighten them to finger-tight.
	d.	While holding a back-up wrench stationary, tighten the female nut 1/8
		turn past finger-tight on 316 stainless steel or nickel gaskets, or 1/4 turn
		past finger-tight on copper or aluminum gaskets.
KF flange	The KF mounting system requires O-rings and centering rings between
	mating flanges.
	a.	Tighten the clamp to compress the mating flanges together.
	b.	Seal the O-ring.
ConFlat flange	To minimize the possibility of leaks with ConFlat flanges, use high strength
	stainless steel bolts and a new, clean OFHC copper gasket. Avoid
	scratching the seal surfaces. To avoid contamination, install metal gaskets.
	a.	Finger tighten all bolts.
	b.	Use a wrench to continue tightening 1/8 turn at a time in crisscross
		order (1, 4, 2, 5, 3, 6) until flange faces make contact.
	c.	Further tighten each bolt about 1/16 turn.

16	Mini-Convectron Module Instruction Manual - 275512 - Rev. A

		Installation
	Step 3	Assemble and connect the wiring
Connecting Cable	The cable is user-supplied. Brooks Automation does not supply the cable.
	Install externally shielded cable and connect the shield at both ends.
	At the module end of the cable, connect the shield to the outer shell of the
	subminiature D connector.
	On both versions of the module, connect the 11.5 to 26.5 Vdc power
	supply to terminals 3 and 4.
	• Terminal 4 (ground) is negative (–).
	• Terminal 3 (input) is positive (+).
	For grounding instructions, see page 18.
Wiring Terminals	Figure 2-5 illustrates the 15-pin D subminiature wiring terminals for the
	module with two setpoint relays.

Figure 2-6 illustrates the 9-pin D subminiature wiring terminals for the module with one setpoint relay.

Figure 2-5 15-Pin Connector for Module with two Setpoint Relays

Analog output 5	15	Relay 1 common
Power ground 4	14	Relay 1 normally closed
11.5–26.5 VDC power input 3	13	Relay 2 normally closed
Setpoint 2 adjust 2	12	Relay 2 common
Setpoint 1 adjust 1	11	Relay 2 normally open
10 Relay 1 normally open
9	Relay disable
8	No connection
7	No connection
6	Signal common
Figure 2-6 9-Pin Connector for Module with one Setpoint Relay
Analog output 5
Power ground 4	9	Setpoint output
11.5–26.5 VDC power input 3	8	Signal common
Relay normally closed 2	7	Relay disable
Relay normally open 1	6	Relay common

Mini-Convectron Module Instruction Manual - 275512 - Rev. A

17

Begin You Before

Installation

Operation

Maintenance

Chapter 2

Grounding

WARNING

Improper grounding could cause product failure, property damage, or serious personal injury.

To reduce the risk of product failure, property damage, or serious personal injury, follow ground network requirements for the facility.

•Maintain all exposed conductors at earth ground.

•Ground the module housing to the vacuum chamber as instructed below.

•Make sure the vacuum port to which the module is mounted is properly grounded.

If the fitting allows continuous metal-to-metal contact between the housing base and the vacuum chamber, the module is properly grounded via the fitting. If the fitting requires a rubber gasket, rubber O-ring, Teflon tape, or other material that prevents metal-to-metal contact between the housing base and the vacuum chamber, refer to Figure 2-7 and follow these instructions to ground the module to the vacuum chamber:

a.Attach a metal hose clamp or other metal clamp to the gauge stem of the housing.

b.Install a 3.31 mm2 (12 AWG) or larger copper wire between the clamp and a metal ground lug, bolt, or stud on the vacuum chamber.

Figure 2-7 Ground Connection to the Vacuum Chamber

Gauge stem		3.00 mm2 (12 AWG) or larger ground wire

Metal hose clamp or other metal clamp

Ground lug, bolt, or stud

Fitting

Vacuum Chamber

18	Mini-Convectron Module Instruction Manual - 275512 - Rev. A

Installation

Atmospheric Pressure

Calibration

Vacuum Chamber

Pressure Calibration

Step 4 Configure the setpoint relays for the application

To configure setpoint relays for the module, see pages 34–41.

If the module will measure the pressure of a gas other than N2 or air, you must adjust relay setpoints for the process gas. The true pressure of a gas other than N2 or air may be substantially different from the pressure that the output indicates. For example, outputs might indicate a pressure of 10 Torr (1.33 kPa, 13.3 mbar) for argon, although the true pressure of the argon is 250 Torr (33.3 kPa, 333.3 mbar). Such a substantial difference between indicated pressure and true pressure can cause overpressurization resulting in an explosion.

WARNING

Failure to use accurate pressure conversion data for N2 or air to other gases can cause an explosion due to overpressurization.

If the module will measure any gas other than N2 or air, before connecting relays to system control devices, adjust setpoints for the process gas that will be used.

Step 5 Calibrate the Convectron gauge

Calibration improves the accuracy and repeatability of the Convectron gauge. To calibrate the Convectron gauge, see pages 42–44.

An atmospheric calibration is performed on the Convectron gauge, using N2, at the factory before the module is shipped. The factory calibration sets the atmospheric calibration point to 760 Torr (101.3 kPa, 1013 mbar) of N2.

Because performance varies depending on the process gas, you may wish to reset the atmospheric calibration point if a gas other than N2 or air is being used. Periodic resets of the atmospheric calibration point also improve the accuracy and repeatability of the Convectron gauge near atmospheric pressure, even if the process gas is N2 or air.

Periodic resets of the vacuum chamber pressure calibration point improve the accuracy and repeatability of the Convectron gauge.

Begin You Before

Installation

Operation

Mini-Convectron Module Instruction Manual - 275512 - Rev. A

19

Maintenance

20	Mini-Convectron Module Instruction Manual - 275512 - Rev. A