Edwards STP-XA4503 Series, STP Series Instruction Manual
Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-XA4503 Series
Pump Specific Information
Model name Voltage
STP-XA4503 series 200 - 240 Va.c.
MT-67E-101-B
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Supplied with STP pump
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C): STP control unit Instruction Manual
STP pump specific information
Supplied with STP pump
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
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The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
• Introduction
• Installation of the STP pump
• Installation of the STP control unit
• Operation
• Safety functions
• Maintenance and inspection
• Storage and disposal
• Service, Spares and accessories
Instruction Manual (B)
STP Pump specific information:
• Technical data
• How to Secure the STP pump
• Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
• Introduction
• Technical data
• Installation
• Operation
• Serial communication protocol
• STP-Link (except for SCU-750)
• Maintenance
• Storage, transportation and disposal
• Service, spares, and accessories
Keep the manuals in an easily accessible location.
STP-XA4503 Series Turbomolecular Pump
CONTENTS
Section Title Page
1 TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 4
1.3 Label affixing positions 6
1.4 Accessories 7
2 HOW TO SECURE THE STP PUMP 9
3 TEMPERATURE MANAGEMENT SYSTEM (TMS) 13
3.1 Configuration of the STP pump with the TMS 13
3.2 TMS connection cable 14
3.3 TMS heater 15
3.4 TMS valve 15
3.5 TMS sensor cable 15
3.6 Installation of the TMS unit 16
3.6.1 Connecting the TMS connection cable to the STP control unit 16
3.6.2 Connecting the pump and cables 16
3.6.3 Connecting TMS connection cable to STP pump 16
3.7 Condition for the TMS unit 17
3.8 Accessories 17
PAGE
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Aug. 08 i Issue 1-b
STP-XA4503 Series Turbomolecular Pump
PAGE
ii
ILLUSTRATIONS
Figure Title Page
1 STP-XA4503 series: VG300/ISO320F 4
2 STP-XA4503 series: VG350 5
3 Label Affixing Positions for the STP pump 6
4 Methods of securing the STP pump 10
5 Shape of reduced diameter shank bolts 11
6 Configuration of the TMS 13
7 External view of TMS connection cable 14
8 TMS sensor cable 15
TABLES
Table Title Page
1 Tightening torque of bolt 9
2 Maximum torque predicted and recommended securing bolt
for inlet port flange 10
Aug. 08 ii Issue 1-b
STP-XA4503 Series Turbomolecular Pump
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name Specification Applicable Control unit
*1
STP-XA4503 series Extreme Advanced throughput type SCU-1500/SCU-1400
*1
Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400.
Refer to Section 1.1.1, "STP pump specifications" for the differences.
Naming convention:
*2
• "C" following a pump model name indicates a corrosion resistant
type (e.g. STP-XA4503C).
• "CV" indicates an enhanced corrosion resistant type with TMS*3 (e.g. STP-XA4503CV).
*2
Corrosion resistant: STP pump with anti-corrosive treatment.
*3
Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
temperature with the thermistor in the base of the turbomolecular pump, and
performing the TMS valve and base heater ON/OFF control.
1
TECHNICAL DATA
Aug. 08 1 Issue 1-b
PAG
1
E
STP-XA4503 Series Turbomolecular Pump
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
TECHNICAL DATA
Pumping speed N2 L/s 3800 4000 4300
Compression ratio N2 >108
Ultimate pressure Pa 10-7 order [after baking]
Allowable backing pressure Pa (Torr) 266 (2): Water cooling/TMS unit used
Flow rate of purge gas <N2> Pa·m3/s (SCCM) 8.4×10
Rated speed rpm 24,000
Backup rotational speed*1 rpm Approximately 6,000
Starting time*2 min 12: with SCU-1500
Stopping time*2 min 12: with SCU-1500
Item XA4503 series
Inlet port flange VG300 ISO320F VG350 Flange size
Outlet port flange KF40 KF40 KF40
H2 L/s 2500 2500 2500
H2 >6×103
-2
(50)
13: with SCU-1400
16: with SCU-1400
Noise dB <50 (at 24,000 rpm)
Temperature Management System (TMS) Available
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Mass*3 kg 105 97
Ambient temperature range °C 0 to 40
Storage temperature range °C -25 to 55
Applicable Control unit SCU-1500/SCU-1400
*1
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*2
Time varies depending on the control unit used.
*3
Mass is a value of state that the only standard accessory was installed (except the optional accessory).
Aug. 08 2 Issue 1-b
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