Edwards STP-XA4503 Series, STP Series Instruction Manual

Instruction Manual (B)

STP Series Turbomolecular Pumps

STP-XA4503 Series

Pump Specific Information

Model name Voltage

STP-XA4503 series 200 - 240 Va.c.

MT-67E-101-B

STP pump consists of the three-volumed Instruction Manuals. Instruction Manual (A): STP pump generic Instruction Manual

Supplied with STP pump

Instruction Manual (B): (This Instruction Manual)

Instruction Manual (C): STP control unit Instruction Manual

STP pump specific information Supplied with STP pump

Supplied with STP control unit

This page intentionally blank

The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

• Introduction

• Installation of the STP pump

• Installation of the STP control unit

• Operation

• Safety functions

• Maintenance and inspection

• Storage and disposal

• Service, Spares and accessories

Instruction Manual (B)

STP Pump specific information:

• Technical data

• How to Secure the STP pump

• Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

• Introduction

• Technical data

• Installation

• Operation

• Serial communication protocol

• STP-Link (except for SCU-750)

• Maintenance

• Storage, transportation and disposal

• Service, spares, and accessories

Keep the manuals in an easily accessible location.

STP-XA4503 Series Turbomolecular Pump

1 TECHNICAL DATA

1.1 Applicable pump specifications

Model Name Specification Applicable Control unit

*1

STP-XA4503 series Extreme Advanced throughput type SCU-1500/SCU-1400

*1

Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400.

Refer to Section 1.1.1, "STP pump specifications" for the differences.

Naming convention:

*2

• "C" following a pump model name indicates a corrosion resistant

type (e.g. STP-XA4503C).

• "CV" indicates an enhanced corrosion resistant type with TMS*3 (e.g. STP-XA4503CV).

*2

Corrosion resistant: STP pump with anti-corrosive treatment.

*3

Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the

temperature with the thermistor in the base of the turbomolecular pump, and

performing the TMS valve and base heater ON/OFF control.

1

TECHNICAL DATA

Aug. 08 1 Issue 1-b

PAG

1

E

STP-XA4503 Series Turbomolecular Pump

1.1.1 STP pump specifications

The values shown below are typical. They are not guaranteed.

TECHNICAL DATA

Pumping speed N2 L/s 3800 4000 4300

Compression ratio N2 >108

Ultimate pressure Pa 10-7 order [after baking]

Allowable backing pressure Pa (Torr) 266 (2): Water cooling/TMS unit used

Flow rate of purge gas <N2> Pa·m3/s (SCCM) 8.4×10

Rated speed rpm 24,000

Backup rotational speed*1 rpm Approximately 6,000

Starting time*2 min 12: with SCU-1500

Stopping time*2 min 12: with SCU-1500

Item XA4503 series

Inlet port flange VG300 ISO320F VG350 Flange size

Outlet port flange KF40 KF40 KF40

H2 L/s 2500 2500 2500

H2 >6×103

-2

(50)

13: with SCU-1400

16: with SCU-1400

Noise dB <50 (at 24,000 rpm)

Temperature Management System (TMS) Available

Baking temperature °C <120

Lubricating oil Not necessary

Installation position Free

Cooling method Water cooling

Mass*3 kg 105 97

Ambient temperature range °C 0 to 40

Storage temperature range °C -25 to 55

Applicable Control unit SCU-1500/SCU-1400

*1

A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.

*2

Time varies depending on the control unit used.

*3

Mass is a value of state that the only standard accessory was installed (except the optional accessory).

Aug. 08 2 Issue 1-b

Maximum gas flow-rate *3

STP-XA4503 Series Turbomolecular Pump

Condition Maximum gas flow-rate

Gas

Yes/No Set point

Ar

N2

*3

The maximum gas flow-rate is applicable under conditions that N2 or Ar gas is vacuumed continuously and the backing

backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is

exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.

TMS SCU-1500 SCU-1400

Cooling water

No -

Yes

70°C

No -

Yes

70°C

Temperature:

5 to 25 °C Flow rate:

3 L/min

Purge gas N gas flow rate

-2

8.4×10

Pa･m3/s

(50 SCCM)

2

3

/s

Pa･m (SCCM)

3.63

(2150)

2.36

(1400)

4.73

(2800)

4.22

(2500)

Pa･m3/s

(SCCM)

3.38

(2000)

2.36

(1400)

4.22

(2500)

3.88

(2300)

1.1.2 Condition for the water-cooling unit

Item

Specification

Without TMS With TMS

*3

1

TECHNICAL DATA

Port type Rc 1/4 (Female) *1

Flow rate L/min 3 3

Water temperature °C 5 to 25

Water pressure MPa (kgf/cm2) 0.3 (3)

*1

Standard type

Aug. 08 3 Issue 1-b

PAG

1

E

STP-XA4503 Series Turbomolecular Pump

1.2 External appearance of the STP pump

TECHNICAL DATA

VG300 ISO320F

B

G

F

E

D

C

(45)

(4)

12-φ15

3

0

ﾟ

0

7

3

φ

1

φA

φ182

φH

φ395

φ420

Ａ

1

5

ﾟ

I (1)

J

K (2)

L (3)

(7)

(6) *1

(5)

12-φ14

3

0

ﾟ

5

9

3

φ

225.5

≧

3

70

(

1

)

Figure 1 - STP-XA4503 series: VG300/ISO320F

1 5 ﾟ

（12）

(8)

ﾟ

5

4

2

.

5

(9)

7

8

1

5 3

2

φ

ﾟ

5

.

ﾟ

2

5

ﾟ

2

（13）

(10)

.

5

ﾟ

2

2. 5

ﾟ

No. Item Description

1 Center of gravity

Inlet port

flange

2 Height of the purge port

φA

3 Height of water cooling port

4 TMS sensor

5 Screw hole of legs 4-M16 depth 33

6 TMS heater*1 Built-in

7 TMS heater cover

8 Outlet port flange KF40

φH

9 Purge port KF10

10 Cooling water port 2-Rc*21/4

11 Bending dimension of the

STP connection cable

12 Screw hole for legs 8-M16 depth 24

*1

TMS used only

*2

ISO

13 Viewed from arrow A

VG300 ISO320F

400 425

B 18 20

C 465 455.5

D 420 410.5

E 388.5 379.5

F 131 121.5

G 56 44.5

343 370

I 224 217

J 332.5 323

K 390.5 381.5

L 398 389.5

Aug. 08 4 Issue 1-b

415

VG350

370

(45)

STP-XA4503 Series Turbomolecular Pump

1

12-φ15

3

0

(5)

ﾟ

1

5 ﾟ

200 (1)

282.5

(7)

(6) *1

340.5 (2）

348 (3）

225.5

≧3

7

(

0

1

)

(12)

0

2

4

φ

18

63

338.5

(4)

φ450

φ395

φ420

1

Ａ

φ182

(8)

ﾟ

5

4

2

.

5

(9)

7

8

1

5

3

2

φ

ﾟ

5

.

2

ﾟ

2

5

(13)

(10)

ﾟ

2

.

5

ﾟ

2

.

5

ﾟ

TECHNICAL DATA

Figure 2 - STP-XA4503 series: VG350

No. Item Description

1 Center of gravity

2 Height of the purge port

3 Height of water cooling port

4 TMS sensor

5 Screw hole of legs 4-M16 depth 33

6 TMS heater*1 Built-in

7 TMS heater cover

8 Outlet port flange KF40

9 Purge port KF10

10 Cooling water port 2-Rc*21/4

11 Bending dimension of the

STP connection cable

12 Screw hole for legs 8-M16 depth 24

13 Viewed from arrow A

*1

TMS used only

*2

ISO

Aug. 08 5 Issue 1-b

1.3 Label affixing positions

PAG

E

1

Refer to the Instruction Manual (A) for the details of the labels 1 to 7.

TECHNICAL DATA

STP-XA4503 Series Turbomolecular Pump

9

10

6

4

Figure 3 - Label Affixing Positions for the STP pump

1 STP pump installation warning label 2 Hot surface warning label 3 Heavy product caution label 4 Connector caution label 5 STP pump/control unit caution label 6 TMS heater caution label 7 Rotational direction instruction label 8 Name plate 9 Company logo

10 Parts number

8

2

5

7

1

3

Aug. 08 6 Issue 1-b

1.4 Accessories

STP-XA4503 Series Turbomolecular Pump

Item Q’ty Remarks

Inlet port cover 1

1

TECHNICAL DATA

Outlet port cover 1

STP connector cover 1

Blank flange for purge port 1 KF10

Clamping ring for purge port

O-ring washer for purge port

Leg

Instruction Manual (B)

1 KF10

4

1 This manual

Aug. 08 7 Issue 1-b

PAG

1

E

TECHNICAL DATA

STP-XA4503 Series Turbomolecular Pump

This page intentionally blank.

Aug. 08 8 Issue 1-b

STP-XA4503 Series Turbomolecular Pump

2 HOW TO SECURE THE STP PUMP

WARNING

The STP pump is provided with a high-speed rotor. Any internal abnormality/error

may result in a jump in rotational torque leading to personal injury or peripheral

The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage.

Secure the STP pump to the vacuum equipment according to the method specified in this manual.

The generated torque during a pump failure is called "Destructive torque". Design and secure the mounting for the STP pump so that it can withstand the maximum rotational torque. Refer to Table 2 for torque in pump abnormality.

Bolt size Tightening torque (Nm)

M8 12

M10 24

M12 42

Table 1 - Tightening torque of bolt

equipment damage.

2

HOW TO SECURE THE STP PUMP

When making the legs to secure the base, make them shorter than the ones attached to the STP pump. Use a material that has a tensile strength of 600N/mm

When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.

Note: When using any securing method other than that specified in this manual, contact Edwards.

2

or more.

Aug. 08 9 Issue 1-b

2

STP-XA4503 Series Turbomolecular Pump

The generated destructive torque depends on the presence of a torque reduction mechanism that can be built into the flange, according to the pump model and flange type. This mechanism, shown in Figure 5, is designed to absorb energy and also buffer the destructive torque.

HOW TO SECURE THE STP PUMP

There are two installation methods for the pump, as shown in Figure 4. Make sure to secure the inlet port flange of the pump with the recommended bolts, as described in Figure 5 and Table 2, according to the installation method used.

Note that special washers will be required if the pump includes the inlet torque reduction mechanism. The washer shape is shown in Figure 5.

Pump model STP-XA4503 series

Flange type

Toque reduction

mechanism

Destructive Torque

[kNm]

Base (4 positions)

securing

Shape Standard Standard Standard Standard

Material*1

bolt

Strength*1

Recommended

*1

Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054).

Special washer

Equipped (optional)

Carbon steel Alloyed steel

12.9 or more 12.9 or more 12.9 or more 70 or more

Figure 5 Figure 5

VG300/ISO320F/VG350

Not Equipped

(standard)

53.7 68.8

No Yes No Yes

Carbon steel Alloyed steel

Not

necessary

Stainless

steel

Not

necessary

Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange

1

2

(A) When the base is not secured (B) When the base is secured

1. Recommended fitting bolt for flange

2. Secure the base

Figure 4 - Methods of securing the STP pump

Aug. 08 10 Issue 1-b

*1

STP-XA4503 Series Turbomolecular Pump

CAUTION

Install the flange securing bolts in the proper position with the special square washer shown in

Figure 5. Failure to do so may cause abnormal operation of the torque reduction mechanism and

damage the pump.

CAUTION

When any internal abnormality/error results in high rotational torque, causing the torque reduction mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at

axis.

2

A

2

HOW TO SECURE THE STP PUMP

2.5

4

*1

VG300/VG350: A=18, ISO320F: A=20

3

1. Vacuum equipment

2. Inlet port flange

3. Washer

4. Torque reduction mechanism

Figure 5 - Shape of reduced diameter shank bolts

Aug. 08 11 Issue 1-b

HOW TO SECURE THE STP PUMP

STP-XA4503 Series Turbomolecular Pump

2

This page intentionally blank

Aug. 08 12 Issue 1-b

STP-XA4503 Series Turbomolecular Pump

3 TEMPERATURE MANAGEMENT SYSTEM (TMS)

WARNING

The STP pump operates at high temperatures while the Temperature Management

System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral

equipment while TMS unit are in operation. Operators can burn hands. Moreover,

NEVER remove the TMS cover while the Temperature Management System (TMS)

unit is in operation. Doing so may result in electric shock or burnt hands.

The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump by monitoring the temperature with temperature sensor in the base of the turbomolecular pump, and performing the TMS valve and TMS heater ON/OFF control.

3.1 Configuration of the STP pump with the TMS

4

5

1

3

2

3

TEMPERATURE MANAGEMENT SYSTEM

8

6

7

9

1. STP control unit 6. TMS valve

2. STP connection cable 7. TMS sensor cable

3. TMS heater (Built-in) 8. TMS connection cable

4. STP pump 9. Power cable

5. TMS heater cover

Figure 6 - Configuration of the TMS

Note: The shape of each part is an example. It varies according to specifications.

Aug. 08 13 Issue 1-b

STP-XA4503 Series Turbomolecular Pump

3.2 TMS connection cable

3

TEMPERATURE MANAGEMENT SYSTEM

The components of the TMS connection cables are as follows: (see Figure 7)

Item Description Function

1 Connector X5A For the STP control unit

2 CON1 HEATER OUT connector For the TMS heater

3 CON2 COOLING VALVE OUT connector For the TMS valve

4 CON3 TC IN connector For the TMS sensor cable

2

7

1

3

.

5

200

6

49

1

φ31

98

0

1

φ10

2

1

.

7

1

8

3

φ21.5

150 32

φ12

4

Figure 7 - External view of TMS connection cable

Note: The shape of the TMS connection cable is an example. It varies according to specifications.

Aug. 08 14 Issue 1-b

3.3 TMS heater

STP-XA4503 Series Turbomolecular Pump

The TMS heater heats the base of the STP pump. It’s fitted with the STP-XA4503 series at the factory.

3.4 TMS valve

The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP pump. The shape of the TMS valve varies according to specifications.

3.5 TMS sensor cable

The TMS sensor cable is for reading the TMS sensor signal from the base of the STP pump.

1 2

1. TMS connection cable side (5 pin, pin type)

3

TEMPERATURE MANAGEMENT SYSTEM

2. STP pump side (5 pin, socket type)

Figure 8 - TMS sensor cable

Aug. 08 15 Issue 1-b

STP-XA4503 Series Turbomolecular Pump

3.6 Installation of the TMS unit

3

DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable

TEMPERATURE MANAGEMENT SYSTEM

DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables

3.6.1 Connecting the TMS connection cable to the STP control unit

Insert the connector X5A of the TMS connection cable into the connector X5 of the STP control unit. (see the "STP control unit Instruction Manual (C)" for the position of the connector X5.)

3.6.2 Connecting the pump and cables

Refer to Figure 6, "Configuration of the STP pump with the TMS" to connect the pump and TMS sensor cable, TMS valve proceed as follows:

CAUTION

environment.

CAUTION

excessively.

1. Connect the TMS sensor cable to the connector of the temperature sensor in the base of the

pump.

2. Connect the cooling water pipe to the TMS valve. Pay special attention to the port label on the

cooling water valve to connect proper port. Connect the NC side (or OUT side) of the TMS valve to the STP pump, and COM side (or IN side) of the TMS valve to the equipment.

Use cooling water under the conditions in Section 3.7, “Condition for the TMS unit”.

Note: Procure and connect the cooling water pipe and affix the electromagnetic cooling water valve

at your site. The diameter of the valve is Rc1/4 (ISO standard).

3.6.3 Connecting TMS connection cable to STP pump

Refer to Figure 6, "Configuration of the TMS unit". Connect the TMS connection cable to the STP pump as follows:

1. Connect the cable for the TMS heater to the "CON1 HEATER OUT" connector of the TMS

connection cable.

2. Connect the cable for the TMS valve to the "CON2 COOLING VALVE OUT" connector of the TMS

connection cable.

3. Connect the TMS sensor cable to the "CON3 TC IN" connector of the TMS connection cable.

Aug. 08 16 Issue 1-b

STP-XA4503 Series Turbomolecular Pump

3.7 Condition for the TMS unit

The values shown below are typical. They are not guaranteed.

3

Item Condition

Ambient temperature range °C 0 to 40

Storage temperature range °C -20 to 55

Input voltage Same voltage as the STP control unit 200 to 240 Vac

Temperature control method Control ON/OFF of the TMS heater and cooling water

Setting temperature °C Standard type: 70

Cooling water temperature °C 5 to 25

Quantity of cooling water flow

Alarm output Alarm outputs from the STP control unit

3.8 Accessories

Item Q’ty Condition

TMS heater 1 Attached to the STP pump

L/min 3

TEMPERATURE MANAGEMENT SYSTEM

TMS connection cable 1 With connector at each end

TMS valve 1 Coupling for water cooling port,

cable with connector on one side

TMS sensor cable 1 With connector at each end

Aug. 08 17 Issue 1-b

STP-XA4503 Series Turbomolecular Pump

3

TEMPERATURE MANAGEMENT SYSTEM

This page intentionally blank

Aug. 08 18 Issue 1-b

For more information, contact the nearest Service Office.

Manufacturer: Edwards Japan Limited

1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822

International +81-47-458-8822

Facsimile: Domestic 047-458-8833 International +81-47-458-8833

Edwards STP-XA4503 Series, STP Series Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

CONTENTS

1 TECHNICAL DATA

1.1 Applicable pump specifications

1.1.1 STP pump specifications

1.1.2 Condition for the water-cooling unit

1.2 External appearance of the STP pump

1.3 Label affixing positions

1.4 Accessories

2 HOW TO SECURE THE STP PUMP

3 TEMPERATURE MANAGEMENT SYSTEM (TMS)

3.1 Configuration of the STP pump with the TMS

3.2 TMS connection cable

3.3 TMS heater

3.4 TMS valve

3.5 TMS sensor cable

3.6 Installation of the TMS unit

3.6.1 Connecting the TMS connection cable to the STP control unit

3.6.2 Connecting the pump and cables

3.6.3 Connecting TMS connection cable to STP pump

3.7 Condition for the TMS unit

3.8 Accessories